JP2020039198A - Vertical linear actuator - Google Patents
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- JP2020039198A JP2020039198A JP2018164595A JP2018164595A JP2020039198A JP 2020039198 A JP2020039198 A JP 2020039198A JP 2018164595 A JP2018164595 A JP 2018164595A JP 2018164595 A JP2018164595 A JP 2018164595A JP 2020039198 A JP2020039198 A JP 2020039198A
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本発明は、基台に固定されたコイルユニットにスライド自在に挿通された可動軸を、外嵌するコイルの励磁によって装着されたワーク体と共に、小さな推力をもって上下駆動することのできる縦型リニアアクチュエータに関する。
The present invention relates to a vertical linear actuator capable of vertically driving a movable shaft slidably inserted into a coil unit fixed to a base with a small thrust, together with a work body mounted by exciting a coil to be externally fitted. About.
近年、直線駆動する電気アクチュエータとしてシャフト型リニアアクチュエータが注目されている。この種リニアアクチュエータは、複数の棒状磁石が直列状に配列された可動軸（シャフト）と、該可動軸をスライド自在に外嵌する固定子としてコイルユニットを備え、該コイルユニットの内周部に設けられるコイルの励磁によって、可動軸を直線的に駆動させるようになっている。このような構成によれば、コギングや速度ムラが少ないので、様々な分野での応用が検討されており、殊に、リニアアクチュエータを縦置きにして可動軸を上下にリニア駆動する機能を生かした分野（半導体の製造装置など）への応用が期待されている。 2. Description of the Related Art In recent years, shaft-type linear actuators have attracted attention as electric actuators for linear driving. This type of linear actuator includes a movable shaft (shaft) in which a plurality of rod-shaped magnets are arranged in series, and a coil unit as a stator that slidably fits the movable shaft, and is provided on an inner peripheral portion of the coil unit. The movable shaft is driven linearly by exciting the coil provided. According to such a configuration, there is little cogging and speed unevenness, so applications in various fields are being studied. In particular, the function of linearly driving a movable shaft up and down with a linear actuator placed vertically is utilized. It is expected to be applied to fields (such as semiconductor manufacturing equipment).
しかしながら、リニアアクチュエータを縦置きに設定すると、停電などで供給電源が停止した場合、装着されるワーク体重量を含む可動軸への推力がゼロになるため、自重により落下して可動軸の先端やワーク体がワーク台などと衝突して故障を誘発する危惧が生じる。
ところで、従来、この様な衝突を回避するために、特許文献１に開示された如くのダンパー機構を備えた筒型リニアモータなるものが知られている。このものは、複数の永久磁石（２２）が直列状に配列されたパイプ（２１）よりなる可動子としての磁界部（２０）と、磁界部（２０）をスライド自在に外嵌する固定子としての筒状フレーム（１１）を備え、筒状フレーム（１１）の内周部に設けられるコイル（１３）の励磁によって、磁界部（２０）を直線的に駆動させるようになっており、筒状フレーム（１１）の両側内部に緩衝部材を（２６）配設した構造となっている。
However, if the linear actuator is set vertically, if the power supply is stopped due to a power failure or the like, the thrust to the movable shaft including the weight of the work to be mounted will be zero, and it will fall by its own weight and There is a fear that the work body collides with the work table or the like to cause a failure.
By the way, conventionally, in order to avoid such a collision, there is known a cylindrical linear motor provided with a damper mechanism as disclosed in Patent Document 1. This is a magnetic field part (20) as a movable element composed of a pipe (21) in which a plurality of permanent magnets (22) are arranged in series, and a stator that slidably fits the magnetic field part (20). The magnetic field portion (20) is driven linearly by exciting a coil (13) provided on the inner peripheral portion of the cylindrical frame (11). The structure is such that buffer members (26) are disposed inside both sides of the frame (11).
しかしながら、かかる緩衝部材（２６）は、コイルスプリングや対向する同一磁極の反発磁力を利用した永久磁石（２６ｅ）を筒状フレーム（１１）の内部に採用（図１１参照）することで、制御間違えや暴走、加速中の電源停止などの異常時に、磁界部（２０）の端部と軸受部（１７）との衝突を回避できるようにした、所謂ダンパー機構として機能するにすぎず、通常のリニア駆動に影響しない構成となっている。したがって、このものを縦置きに設置して使用すると、下降から上昇へ反転駆動する際に、段付きシャフト（２４）と装着されるワーク体との自重に抗して上動しなければならず、強い起磁力をもったコイル（１３）や強い磁気力をもった永久磁石（２２）を用いる必要があり、リニアモータ全体が大型化されコスト高を招来するだけでなく、永久磁石（２６ｅ）と永久磁石（２２）か筒状フレーム（１１）の内部に固定化されて設けられているため、ワーク体の重さが異なったり、永久磁石（２６ｅや２２）の磁力の強弱の違いなどによって、反発磁力による離間幅の変位に伴って、相対的に筒状フレーム（１１）から突出する小径シャフト部（２４ｂ）の突出幅や、そこに装着されるワーク体の始動位置に変化を生じてしまい、その位置決め調整を行うことができず、リニアモータの初期駆動設定された動作制御をそのまま採用できないという問題がある。
However, the buffer member (26) employs a permanent magnet (26e) using a coil spring or a repulsive magnetic force of the same magnetic pole opposed to the inside of the cylindrical frame (11) (see FIG. 11), so that the control mistake is made. In the event of an abnormality such as runaway, runaway, or stoppage of power during acceleration, it merely functions as a so-called damper mechanism capable of avoiding collision between the end of the magnetic field portion (20) and the bearing portion (17). The configuration does not affect driving. Therefore, when this is installed and used in a vertical position, it must be moved upward against the own weight of the stepped shaft (24) and the work body to be mounted when reversing drive from descending to ascending. In addition, it is necessary to use a coil (13) having a strong magnetomotive force and a permanent magnet (22) having a strong magnetic force, which not only increases the size of the linear motor and increases the cost but also increases the cost of the permanent magnet (26e). And the permanent magnet (22) or fixed inside the cylindrical frame (11), so that the weight of the work body is different or the magnetic force of the permanent magnet (26e or 22) is different. With the displacement of the separation width due to the repulsive magnetic force, the protrusion width of the small-diameter shaft portion (24b) relatively protruding from the cylindrical frame (11) and the starting position of the work body mounted thereon change. End, its position Can not be performed because adjustment, there is a problem that can not be employed as the initial driving set operation control of the linear motor.
本発明は、上記の如き問題点を一掃すべく創案されたものであって、コイルユニットを基台に縦置きに設けて、可動軸を、装着されるワーク体と共に上下駆動するものでありながら、可動軸の下端部に設けられる軸側マグネットに、同一磁極を対向させて基台に設けられる固定側マグネットとの間に生じる反発磁力によって、ワーク体を所定の離間幅をもって支持受けさせて、その自重がキャンセルされた状態で位置保持できるようにし、上下駆動制御に伴う可動軸の下降位置を、常に反発磁力が及ぶ範囲に設定して、可動軸を反転上動させる際にコイルの上昇起磁力を補助し、ワーク体を小さな推力をもって上下駆動することができるようにし、しかも、軸側と固定側のマグネットは、調整やメンテナンス可能な外部に設けられているので、ワーク体の重さの違いなどによる外部要因により、磁極反発による離間幅に変位が生じてワーク体の静止基準位置が変化しても、容易に位置決め調整可能とすることのできる縦型リニアアクチュエータを提供することを目的としている。
The present invention has been conceived in order to eliminate the above-mentioned problems, and it is provided that a coil unit is provided vertically on a base and a movable shaft is driven up and down together with a work body to be mounted. On the shaft side magnet provided at the lower end of the movable shaft, the work piece is supported and received with a predetermined separation width by the repulsive magnetic force generated between the fixed side magnet provided on the base with the same magnetic pole facing the same. The lowering position of the movable shaft associated with the vertical drive control is always set to a range where the repulsive magnetic force can reach, so that the coil can be raised when the movable shaft is turned upside down. The magnetic force is assisted, and the work body can be driven up and down with a small thrust. In addition, the magnets on the shaft side and fixed side are provided outside for adjustment and maintenance. A vertical linear actuator that can be easily adjusted even if the stationary reference position of the workpiece changes due to displacement of the separation width due to repulsion of the magnetic pole due to external factors such as differences in the weight of the workpiece. It is intended to provide.
上記課題を解決するために本発明の縦型リニアアクチュエータは、複数の棒状磁石が直列状に配列された可動軸と、該可動軸をスライド自在に外嵌する複数のコイルを内周部に並設せしめたコイルユニットとを備え、前記可動軸を、装着されるワーク体と共に前記コイルの励磁によって所定の可動域を進退駆動するよう構成されたリニアアクチュエータであって、前記コイルユニットを基台に縦置きに装着し、前記可動軸と共にワーク体を上下駆動するに、前記可動軸の下端部に軸側マグネットを設け、該軸側マグネットに磁極反発するよう前記基台やワークテーブル側に対向配置させて固定側マグネットを設け、前記軸側マグネットと固定側マグネットとの間に生じる反発磁力によって、前記ワーク体の励磁ＯＦＦ状態時の荷重を、所定の離間幅をもって支持受けさせて位置保持せしめ、ワーク体の静止基準位置に設定すると共に、前記可動軸の下降位置を、前記両マグネット間に生じる反発磁力の及ぶ範囲に設定せしめて、ワーク体を小さな推力をもって上下駆動可能に構成したことを特徴とするものである。
In order to solve the above problems, a vertical linear actuator according to the present invention has a movable shaft in which a plurality of bar-shaped magnets are arranged in series, and a plurality of coils that slidably fit the movable shaft on the inner peripheral portion. A linear actuator comprising a coil unit installed, and the movable axis is configured to drive a predetermined movable range forward and backward by exciting the coil together with a work body to be mounted, wherein the coil unit is mounted on a base. To be mounted vertically and drive the work body up and down together with the movable shaft, a shaft-side magnet is provided at the lower end of the movable shaft, and is disposed on the base or work table side so as to repel magnetic poles on the shaft-side magnet. Then, a fixed-side magnet is provided, and the repulsive magnetic force generated between the shaft-side magnet and the fixed-side magnet reduces the load when the excitation of the work body is in the OFF state to a predetermined value. The position of the movable body is set to the stationary reference position while the lower position of the movable shaft is set within a range where the repulsive magnetic force generated between the two magnets can reach. It is characterized in that it can be driven up and down with thrust.
本発明は、上記のように構成したことにより、コイルユニットを基台に縦置きに設けて、可動軸を装着されるワーク体と共に上下駆動するものでありながら、可動軸の下端部に設けられる軸側マグネットに、同一磁極を対向させて基台に設けられる固定側マグネットとの間に生じる反発磁力によって、ワーク体を所定の離間幅をもって支持受けさせて、その自重がキャンセルされた状態で位置保持できるだけでなく、上下駆動制御に伴う可動軸の下降位置を、常に反発磁力が及ぶ範囲に設定して、反転上動させるストローク下限位置として位置決めされた状態で駆動制御を行うことができ、可動軸の反転上動時におけるコイルの上昇起磁力を補助し、ワーク体を小さな推力をもって上下駆動することが可能となり、縦型リニアアクチュエータであっても、強い起磁力をもったコイルや、強い磁気力をもった棒状磁石を必要とすることが無く、装置自体の軽量化とコンパクト化を図り得て、安価なものを提供することができる。しかも、軸側と固定側のマグネットはメンテナンス可能な外部に設けられているので、ワーク体の重さや、使用されるマグネットの表面磁束や加工精度等による機械的精度のばらつきの存在を含む磁気力の強弱の違いなどによる外部要因により、反発磁力による離間幅が変位し、当該変位に伴って相対的に生じる可動軸の突出幅変化による可動域や、ワーク体の静止基準位置やストローク下限位置に変化が生じても、使用される現場において、両マグネット間の離間幅を一定に保持したまま、その設置環境に応じてワーク体を上下調整することで、ワーク体の静止基準位置を、容易に位置決め変更可能なものとし得る。
According to the present invention, as described above, the coil unit is provided vertically at the lower end of the movable shaft while the coil unit is provided vertically on the base and the movable shaft is driven up and down together with the work body to be mounted. With the repulsive magnetic force generated between the shaft-side magnet and the fixed-side magnet provided on the base with the same magnetic pole facing each other, the work body is supported and received with a predetermined separation width, and the work body is positioned with its own weight canceled. In addition to holding, the lowering position of the movable shaft accompanying the vertical drive control can always be set within the range where the repulsive magnetic force can reach, and the drive control can be performed in the state where it is positioned as the stroke lower limit position for reversing upward movement. A vertical linear actuator that assists in raising the magnetomotive force of the coil when the axis is reversed and moves up and down with a small thrust. Even if there is no need for a coil with a strong magnetomotive force or a bar-shaped magnet with a strong magnetic force, it is possible to reduce the weight and size of the device itself and provide an inexpensive device. it can. In addition, the magnets on the shaft side and the fixed side are provided on the outside that can be maintained, so the magnetic force including the variation in mechanical accuracy due to the weight of the work body, the surface magnetic flux of the magnet used, processing accuracy, etc. The separation width due to the repulsive magnetic force is displaced due to external factors such as the difference in strength of the work, and the movable range due to the change in the protrusion width of the movable shaft that occurs relatively with the displacement, the stationary reference position of the work body, and the stroke lower limit position Even if a change occurs, at the place of use, the work body can be adjusted up and down according to the installation environment while maintaining a constant gap between the two magnets, so that the stationary reference position of the work body can be easily adjusted. Positioning can be changed.
以下、本発明の実施の形態を好適な実施の形態として例示する縦型リニアアクチュエータを図面に基づいて詳細に説明する。図１は、縦型リニアアクチュエータにワーク体を装着した状態を示す（Ａ）は正面図、（Ｂ）は側面図、図２は、図１（Ａ）２示す縦型リニアアクチュエータの縦断面図である。これら図に示すように、縦型リニアアクチュエータ１は、非磁性体ステンレス管よりなる円筒パイプ２１内に、中心に孔が穿設された複数のドーナツ状の棒状磁石２ａが互いの磁極が対向するように直列状に配列された可動軸２と、該可動軸２をスライド自在に外嵌する固定子としてのコイルユニット３とを備え、コイルユニット３は、基台４に装着され、可動軸２が挿通される筒状ボビン３１の外周部に設けられるコイル３２の励磁により、可動軸２を直線的に駆動させる。なお、棒状磁石２ａは、その中心に孔が穿設されていない棒状磁石でも良い。 Hereinafter, a vertical linear actuator illustrating an embodiment of the present invention as a preferred embodiment will be described in detail with reference to the drawings. 1A and 1B show a state in which a work body is mounted on a vertical linear actuator, wherein FIG. 1A is a front view, FIG. 1B is a side view, and FIG. 2 is a vertical sectional view of the vertical linear actuator shown in FIG. It is. As shown in these drawings, in the vertical linear actuator 1, a plurality of donut-shaped rod-shaped magnets 2a having a hole formed in the center thereof are opposed to each other in a cylindrical pipe 21 made of a non-magnetic stainless steel tube. And a coil unit 3 as a stator for slidably fitting the movable shaft 2 to the outside. The coil unit 3 is mounted on a base 4, and the movable shaft 2 The movable shaft 2 is driven linearly by excitation of a coil 32 provided on the outer peripheral portion of the cylindrical bobbin 31 through which is inserted. In addition, the bar-shaped magnet 2a may be a bar-shaped magnet having no hole formed in the center thereof.
可動軸２には、円筒パイプ２１の上端部と下端部にそれぞれ後端キャップ２２と先端キャップ２３が嵌着されており、円筒パイプ２１の外周面域を含む可動軸２の端部が好適に補強されており、この補強された部位に、可動ステージなど任意のワーク体５が装着される。
また、各コイル３２…は、予めドーナツ状に巻線形成されたものを、筒状ボビン３１の胴部に都合１２個嵌挿配設し、３相駆動のためのＵ相、Ｖ相、Ｗ相の３個のコイル３２を１組として４組の組数による各コイルブロックにて構成される。なお、コイル３２…の組数は任意であり、各相のコイル３２…同士はそれぞれ直列または並列に接続せしめた所定のパターンによって結線されており、また、必要において各コイル３２…の間には、図示しないドーナツ状の絶縁紙や絶縁樹脂シートなどを介在させても良い。
A rear end cap 22 and a front end cap 23 are fitted to the movable shaft 2 at the upper end and the lower end of the cylindrical pipe 21, respectively. The end of the movable shaft 2 including the outer peripheral surface area of the cylindrical pipe 21 is preferably used. An arbitrary work body 5 such as a movable stage is mounted on the reinforced portion.
Each of the coils 32... Is wound in a donut shape in advance, and 12 coils are inserted and disposed in the body of the cylindrical bobbin 31 for convenience, and U-phase, V-phase, and W-phase for three-phase driving are provided. Each of the three coils 32 of the phase is made up of four coil blocks each having four sets. The number of sets of the coils 32 is arbitrary. The coils 32 of each phase are connected to each other in a predetermined pattern connected in series or in parallel. Alternatively, a doughnut-shaped insulating paper (not shown) or an insulating resin sheet may be interposed.
可動軸２の下部域には、可動軸２側に配設される円筒形状の軸側マグネット６１と、基台４側、或いは、基台４と離間したワークテーブルなどに配設される円筒形状の固定側マグネット６２とからなる一対のマグネット６が、同軸上に、互いのＮ極同士を対向させて、磁極反発より所定間隔を存して対向離間するよう配設されている。軸側マグネット６１は、先端キャップ２３の下部側に突出させて一体形成させた、断面視下向きコ字状のマグネット装着部６ａに嵌着されており、最下端の棒状磁石２ａとの磁力干渉を生じない部位に設けられている。
なお、マグネット装着部６ａは別部材にて形成して、先端キャップ２３にネジ止め固定するようにしても良い。この様に別部材にて形成すると、ワーク体との兼ね合いに応じて、最適な磁気力や大きさを有したマグネットを好適に選択取着することができる。また、固定側マグネット６２は、軸側マグネット６１に同軸上に対向配置されて固定状態で設けられていればよい。
In the lower region of the movable shaft 2, a cylindrical shaft-side magnet 61 disposed on the movable shaft 2 side, and a cylindrical shape disposed on the base 4 side or a work table separated from the base 4. And a pair of fixed magnets 62 are disposed coaxially with their N poles facing each other and spaced apart from each other at a predetermined interval from the repulsion of the magnetic poles. The shaft-side magnet 61 is fitted to a magnet mounting portion 6a, which is formed integrally with the lower end of the tip cap 23 so as to protrude from the lower portion of the tip cap 23, and has a magnetic interference with the lowermost bar-shaped magnet 2a at the lowermost end. It is provided in a part that does not occur.
Note that the magnet mounting portion 6a may be formed as a separate member and fixed to the distal end cap 23 with screws. When formed as a separate member in this manner, a magnet having an optimal magnetic force and size can be suitably selected and attached in accordance with the balance with the work body. Further, the fixed-side magnet 62 may be provided so as to be coaxially opposed to the shaft-side magnet 61 and fixed.
固定側マグネット６２は、その下部に突設される雄ネジ部６ｃを有して、断面視上向きコ字状に形成されたマグネット装着部６ｂに嵌着された状態で、基台４設けられたホルダー部４１に嵌挿されている。
ホルダー部４１は、断面視上向きコ字状に形成され、その底部に雄ネジ部６ｃを螺入するための雌ネジ部４１ａが形成されており、マグネット装着部６ｂは、雄ネジ部６ｃを雌ネジ部４１ａに螺入させた状態で、雄ネジ部６ｃを下部の凹溝６ｃ１をドライバー等によって、緊緩操作することで螺合送りによる上下移動調整可能にセットされている。つまり、マグネット装着部６ａと６ｂは、可動軸２の下部域で、その調整操作やメンテナンス作業が可能な外部に設けられており、ワーク体５は、これら調整操作やメンテナンス作業の邪魔にならない態様で取付けられている。なお、上下動作に伴う振動等により、調整セット位置のズレ防止のために、雌ネジ部４１ａにロックナットを設けるようにしても良い。
The fixed-side magnet 62 has a male screw portion 6c protruding from a lower portion thereof, and is provided on the base 4 in a state of being fitted to a magnet mounting portion 6b formed in an upward U-shape in cross section. It is fitted into the holder part 41.
The holder portion 41 is formed in an upward U-shape in cross section, and a female screw portion 41a for screwing the male screw portion 6c is formed at the bottom thereof, and the magnet mounting portion 6b is formed with a female screw portion 6c. With the male screw portion 6c screwed into the screw portion 41a, the lower groove 6c1 is set loosely by a driver or the like by a screwdriver or the like, so that the vertical movement can be adjusted by screw feed. In other words, the magnet mounting portions 6a and 6b are provided in the lower region of the movable shaft 2 and outside the movable shaft 2 where the adjusting operation and the maintenance work can be performed, and the work body 5 does not interfere with the adjustment operation and the maintenance work. Installed in. Note that a lock nut may be provided on the female screw portion 41a in order to prevent displacement of the adjustment set position due to vibration or the like accompanying the vertical movement.
次に、本実施形態にかかる縦型リニアアクチュエータ１の駆動制御について説明する。この様に、可動軸２の下部域に、軸側マグネット６１と固定側マグネット６２とを配置させた状態において、縦型リニアアクチュエータ１を非通電時における励磁ＯＦＦ状態では、可動軸２とワーク体５に働く重力（以下単に、ワーク体５の荷重または自重という）を、軸側マグネット６１と固定側マグネット６２との間に生じる反発磁力によって、所定の離間幅をもって支持受けする、謂わば、ワーク体５の自重が反発磁力によりキャンセルされ、両者の釣合がとれた状態で停止位置が保持され、この停止保持位置を、ワーク体５の静止基準位置として設定し、可動軸２は、コイルユニット３の下面からワーク体５までの間隔を可動域Ｍとして、この可動域Ｍ内において任意に設定された移動ストロークを、３相コイル３２…を組とするコイルブロック毎に、或いは、中間のコイルブロックと、上側または下側のコイルブロックを組として、順次に切換え励磁制御されて反復リニア駆動するようになっている。 Next, drive control of the vertical linear actuator 1 according to the present embodiment will be described. As described above, in a state where the shaft-side magnet 61 and the fixed-side magnet 62 are arranged in the lower region of the movable shaft 2, when the vertical linear actuator 1 is not energized when the power is not supplied to the vertical linear actuator 1, the movable shaft 2 and the workpiece The gravity acting on the workpiece 5 (hereinafter simply referred to as the load of the workpiece body 5 or its own weight) is supported and received with a predetermined separation width by a repulsive magnetic force generated between the shaft-side magnet 61 and the fixed-side magnet 62. The self-weight of the body 5 is canceled by the repulsive magnetic force, and the stop position is held in a state where the two are balanced. This stop holding position is set as the stationary reference position of the work body 5. 3 is defined as a movable range M, and a movement stroke arbitrarily set in the movable range M is defined as a set of three-phase coils 32. Per le block, or an intermediate of the coil block, the upper or lower side of the coil block as a set, so as to sequentially repeat linear drive is switched excitation control.
この静止基準位置からコイル３２を励磁ＯＮして、ワーク体５を所定の上昇位置に上動し、下動させて反転上動させる駆動制御を行うのであるが、当該上下駆動制御によって反転上動させる可動軸２の下降位置を、常に軸側マグネット６１と固定側マグネット６２との間に生じる反発磁力の及ぶ範囲に設定してあり、その下降位置における反発磁力を利用して反転上昇時におけるコイル３２…の起磁力を補助することのできるよう、反転上動させるストローク下限位置として位置決め設定して構成されている。このストローク下限位置は、ワーク体５の静止基準位置に一致させて設定しても良く、また、採用設置される環境等を考慮して、静止基準位置周辺の前記軸側マグネット６１と前記基台側マグネット６２との間に生じる反発磁力の及ぶ範囲に設定しても良い。この様にストローク下限位置を設定して駆動制御すると、ワーク体５を小さな推力をもって上下駆動することが可能となり、縦型リニアアクチュエータ１であっても、強い起磁力をもったコイル３２…や、強い磁気力をもった棒状磁石２ａを必要とすることが無く、磁気力の小さなコイル３２…や磁気力の小さな棒状磁石２ａを採用することが可能となり、装置自体の軽量化とコンパクト化を図ることができ、安価なものを提供することができる。なお、両磁石間の反発磁力の及ぶ範囲には、少なくとも、ワーク体を動かすには推力なリニアアクチュエータが、両マグネットの反発力の補助により、ワーク体を駆動することが可能な範囲を含むものとする。 From this stationary reference position, the coil 32 is energized ON to drive the work body 5 up to a predetermined ascending position, and to perform a drive control to move the work body 5 down and upside down. The lowering position of the movable shaft 2 to be moved is always set to a range where a repulsive magnetic force generated between the shaft-side magnet 61 and the fixed-side magnet 62 can reach. In order to be able to assist the magnetomotive force of 32.. The stroke lower limit position may be set in accordance with the stationary reference position of the work body 5, and the shaft-side magnet 61 and the base around the stationary reference position are considered in consideration of the environment in which the work body 5 is installed and installed. The range may be set to a range where a repulsive magnetic force generated between the side magnet 62 and the side magnet 62 can reach. When the drive control is performed by setting the stroke lower limit position in this manner, the work body 5 can be vertically driven with a small thrust, and even in the case of the vertical linear actuator 1, the coils 32 having a strong magnetomotive force, There is no need for the bar-shaped magnet 2a having a strong magnetic force, and it is possible to employ the coil 32 having a small magnetic force or the bar-shaped magnet 2a having a small magnetic force, thereby reducing the weight and size of the device itself. And can provide cheap ones. Note that the range of the repulsive magnetic force between the two magnets includes at least the range in which the linear actuator that is thrust to move the work body can drive the work body with the assistance of the repulsive force of the two magnets. .
一方、縦型リニアアクチュエータ１において、この様にストローク下限位置を常に反発磁力を利用した位置に設定すると、ワーク体５自体の製作誤差や種類、大きさの違いなどにより生じるばらつきの存在を含む重量の違いや、使用される一対のマグネット６の表面磁束や加工精度等による機械的精度のばらつきの存在を含む磁気力の強弱の違い、或いは、温度等の設置環境の違いなどによる外部要因により、反発磁力による離間幅が一定化されずに変位し、当該変位に伴って相対的に生じる可動軸の突出幅変化による可動域Ｍや、ワーク体５の静止基準位置やストローク下限位置に変化が生じる。この変化は同じ製造ラインに複数設置された場合であっても、個々の縦型リニアアクチュエータ１に生じる危惧があり、かかる相対的に位置変化を生じた状態では、出荷時に予め初期設定された駆動制御によって、精度の良い動作制御が行えない危惧が生じる。 On the other hand, in the vertical linear actuator 1, if the stroke lower limit position is always set to a position utilizing the repulsive magnetic force, the weight including the manufacturing error of the work body 5 itself, the existence of the variation caused by the difference in the type and the size, etc. Due to differences in the strength of the magnetic force, including the presence of variations in mechanical accuracy due to the surface magnetic flux and machining accuracy of the pair of magnets 6 used, or external factors such as differences in the installation environment such as temperature. The separation width due to the repulsive magnetic force is displaced without being fixed, and a change occurs in the movable range M due to a change in the protruding width of the movable shaft relatively generated with the displacement, the stationary reference position of the work body 5, and the stroke lower limit position. . Even if a plurality of such changes are installed on the same manufacturing line, there is a risk that each of the vertical linear actuators 1 may cause such a change. Due to the control, there is a fear that accurate operation control cannot be performed.
しかしながら、本実施形態における固定側マグネット６２は、マグネット装着部６ｂの雄ネジ部６ｃを緊緩操作することで、螺合送りによる上下移動調整が可能に構成されている。つまり、固定側マグネット６２を上動操作して、反発磁力に抗して離間幅を一定に保持したままワーク体５を上昇させ、下動操作によって、反発磁力による離間幅を一定に保持したままワーク体５を下降させることで、ワーク体５を微調整しながら位置決め調整操作することができるようになっており、ワーク体５の静止基準位置を、使用される現場において、その設置環境に応じて、容易にワーク体５を上下位置を調整変更して位置決めセットすることができ、しかも、ワーク体５を上下位置調整することで、可動軸２のストローク下限位置が一定化されて、予め初期設定された駆動制御を何ら変更することなく、可動域Ｍ内に設定した任意のストロークを精度良く昇降駆動させて、ワーク体５の上昇位置と下降位置で精度良く位置決め停止させる動作制御を行うことができるように構成されている。
However, the fixed-side magnet 62 in the present embodiment is configured to be capable of vertical movement adjustment by screwing feed by loosely operating the male screw portion 6c of the magnet mounting portion 6b. That is, the work body 5 is raised while the fixed magnet 62 is moved upward to maintain the separation width constant against the repulsive magnetic force, and is moved downward to maintain the separation width due to the repulsive magnetic force constant. By lowering the work body 5, the positioning adjustment operation can be performed while finely adjusting the work body 5, and the stationary reference position of the work body 5 is set according to the installation environment at the site where the work body 5 is used. Thus, the work body 5 can be easily adjusted and changed in the vertical position to set the position. In addition, by adjusting the work body 5 in the vertical position, the stroke lower limit position of the movable shaft 2 is fixed, and the initial position is set in advance. Without changing the set drive control at all, the arbitrary stroke set in the movable range M is driven up and down with high accuracy, and the position of the work body 5 is accurately stopped at the ascending and descending positions. And it is configured to be capable of performing an operation control for.
叙述の如く構成された本発明の実施の形態において、縦型リニアアクチュエータ１の可動軸２を、基台４に固定されたコイルユニット３のコイル３２…のＯＮ／ＯＦＦ切り替えにより、ワーク体５と共に上下駆動するのであるが、本発明における縦型リニアアクチュエータ１は、可動軸２の下端部に軸側マグネット６１を設け、該軸側マグネット６１に磁極反発するよう基台４やワークテーブル側に対向配置させて固定側マグネット６２を設け、軸側マグネット６１と固定側マグネット６２との間に生じる反発磁力によって、ワーク体５の励磁ＯＦＦ状態時の荷重を、所定の離間幅をもって支持受けさせて位置保持せしめ、ワーク体５の静止基準位置に設定すると共に、可動軸２の下降位置を、両マグネット６１と６２間に生じる反発磁力の及ぶ範囲に設定せしめて、ワーク体５を小さな推力をもって上下駆動可能に構成されている。 In the embodiment of the present invention configured as described above, the movable shaft 2 of the vertical linear actuator 1 is moved together with the workpiece 5 by switching ON / OFF of the coils 32 of the coil unit 3 fixed to the base 4. The vertical linear actuator 1 according to the present invention is provided with a shaft-side magnet 61 at the lower end of the movable shaft 2, and is opposed to the base 4 and the worktable so that the shaft-side magnet 61 repels magnetic poles. The fixed-side magnet 62 is disposed so as to support and receive the load when the excitation of the work body 5 is OFF with a predetermined separation width by a repulsive magnetic force generated between the shaft-side magnet 61 and the fixed-side magnet 62. The movable body 2 is set at the stationary reference position of the work body 5 and the lowered position of the movable shaft 2 is set to the repulsive magnetic force generated between the magnets 61 and 62. And allowed to set in department range and the work member 5 is vertically drivable configured with a small thrust.
この様に構成すると、コイルユニット３を基台に縦置きに配設させて、可動軸２を装着されるワーク体５と共に上下駆動する縦型リニアアクチュエータ１でありながら、可動軸２の下端部に設けられる軸側マグネット６１に、同一磁極を対向させて基台４に設けられる固定側マグネット６２との間に生じる反発磁力によって、ワーク体５を所定の離間幅をもって支持受けさせて、その自重がキャンセルされた状態で位置保持できるだけでなく、上下駆動制御に伴う可動軸２の下降位置を、常に反発磁力が及ぶ範囲に設定して、反転上動させるストローク下限として位置決めされた状態で駆動制御を行うことができ、可動軸２の反転上動時におけるコイル３２の上昇起磁力を補助し、ワーク体５を小さな推力をもって上下駆動することが可能となり、縦型リニアアクチュエータ１であっても、強い起磁力をもったコイル３２や、強い磁力をもった棒状磁石２ａを必要とすることが無く、装置自体の軽量化とコンパクト化を図り得て、安価なものを提供することができる。 With such a configuration, the lower end of the movable shaft 2 is a vertical linear actuator 1 in which the coil unit 3 is vertically disposed on the base and is driven up and down together with the work body 5 on which the movable shaft 2 is mounted. The workpiece 5 is supported and received with a predetermined separation width by a repulsive magnetic force generated between the fixed magnet 62 provided on the base 4 with the same magnetic pole facing the shaft-side magnet 61 provided on the base 4. Not only can the position be maintained in the state where the motor is canceled, but also the drive control in a state where the lowering position of the movable shaft 2 associated with the vertical drive control is always set within the range where the repulsive magnetic force can reach and the stroke lower limit for reversing upward movement. It is possible to assist the ascending magnetomotive force of the coil 32 when the movable shaft 2 is turned upside down and to move the work body 5 up and down with a small thrust. Therefore, even with the vertical linear actuator 1, the coil 32 having a strong magnetomotive force and the bar-shaped magnet 2a having a strong magnetic force are not required, and the device itself can be reduced in weight and size. Inexpensive things can be provided.
特に、ワーク体５の上昇の上限を、軸側マグネット６１と基台側マグネット６２との間に生じる反発力による補助が及ぶ範囲内に設定することにより、さらにコンパクトな縦型リニアアクチュエータ１を選定することが可能となる。
例えば、静止基準位置における両磁石の反発力が５０Ｎであった場合、４ｋｇのワーク体を、定格推力３．５Ｎのリニアアクチュエータで駆動制御することが可能であった。この場合のストロークの上限は、静止基準位置から上方に８ｍｍ程度であった。出願人の販売しているリニアアクチュエータでは、４ｋｇの荷重を駆動制御するためには、直径２５ｍｍの円筒状ネオジム磁石を用いたシャフトを用いなければ駆動できないところ、直径８ｍｍの円筒状ネオジム磁石を用いたシャフトで駆動制御することができた。
しかも、軸側マグネット６１と固定側マグネット６２は、メンテナンス可能な外部に設けられているので、ワーク体５の重さや、使用される両マグネット６１、６２の表面磁束密度や加工精度等による機械的精度のばらつきの存在を含め、磁気力の強弱の違いなどによる外部要因により、反発磁力による離間幅が変位し、当該変位に起因して相対的に生じる可動域Ｍの変化（可動軸２の突出幅変化）や、ワーク体５の静止基準位置やストローク下限位置に変化が生じても、使用される現場において、両マグネット６１、６２間の離間幅を一定に保持したまま、その設置環境に応じてワーク体５を上下調整することで、ワーク体５の静止基準位置を、容易に位置決め変更可能なものとし得る。
In particular, by setting the upper limit of the ascent of the work body 5 within a range where the assist by the repulsive force generated between the shaft-side magnet 61 and the base-side magnet 62 reaches, a more compact vertical linear actuator 1 is selected. It is possible to do.
For example, when the repulsive force of both magnets at the stationary reference position is 50 N, it was possible to drive and control a 4 kg workpiece by a linear actuator with a rated thrust of 3.5 N. In this case, the upper limit of the stroke was about 8 mm upward from the stationary reference position. The linear actuator sold by the applicant cannot be driven unless a shaft using a cylindrical neodymium magnet having a diameter of 25 mm is used in order to drive and control a load of 4 kg. However, a cylindrical neodymium magnet having a diameter of 8 mm is used. Driving control was possible with the shaft.
In addition, since the shaft-side magnet 61 and the fixed-side magnet 62 are provided outside for maintenance purposes, the shaft-side magnet 61 and the fixed-side magnet 62 are mechanically driven by the weight of the work body 5, the surface magnetic flux density of the two magnets 61 and 62 used, the processing accuracy, and the like. The separation width due to the repulsive magnetic force is displaced by an external factor such as the difference in the strength of the magnetic force, including the existence of the variation in accuracy, and the change in the movable range M relatively caused by the displacement (protrusion of the movable shaft 2) Width change) or a change in the stationary reference position or the lower stroke limit position of the work body 5 at the site where the work body 5 is used. By vertically adjusting the work body 5, the stationary reference position of the work body 5 can be easily changed in position.
また、固定側マグネット６２は、ワーク体５の重さの変更、または、両マグネット６１と６２の大きさの変更等によって、軸側マグネット６１との間における反発磁力による離間幅が変位することに起因して、相対的に生じる可動域Ｍの変化に応じて、ワーク体５の静止基準位置を上下調整可能に構成されている。
この様に構成すると、ストローク下限位置を常に反発磁力を利用した位置に設定された状態においては、ワーク体５自体の製作誤差や種類、大きさの違いなどにより生じる重量の違いや、使用される一対のマグネット６の表面磁束や加工精度等による機械的精度のばらつきの存在を含む磁力の強弱の違いなどによる外部要因により、反発磁力による離間幅が変位し、当該変位に伴って相対的に生じる可動域Ｍの変化（可動軸２の突出幅変化）や、ワーク体５の静止基準位置やストローク下限位置に変化が生じても、固定側マグネット６２を上下調整することにより、反発磁力による離間幅を一定に保持したまま、ワーク体５の静止基準位置を調整変更することができる。しかも、ワーク体５を上下位置調整することで、可動軸２のストローク下限位置が一定化されて、予め初期設定された駆動制御を何ら変更することなく、精度の良い動作制御を行うことができ、ワーク体５を設定された上昇位置と下降位置に精度良く位置決め停止させることができる。
In addition, the fixed magnet 62 changes its separation width due to the repulsive magnetic force between the fixed magnet 62 and the shaft magnet 61 due to a change in the weight of the work body 5 or a change in the size of the two magnets 61 and 62. Due to this, the stationary reference position of the work body 5 can be adjusted up and down in accordance with the change in the movable range M which occurs relatively.
With this configuration, in a state where the stroke lower limit position is always set to a position using the repulsive magnetic force, a difference in weight caused by a manufacturing error, a type, a difference in size, and the like of the work body 5 itself, and a difference in weight used. The separation width due to the repulsive magnetic force is displaced by external factors such as the difference in the strength of the magnetic force including the variation in mechanical accuracy due to the surface magnetic flux of the pair of magnets 6 and the processing accuracy, and is relatively caused by the displacement. Even if a change in the movable range M (a change in the protrusion width of the movable shaft 2) or a change in the stationary reference position or the lower stroke limit position of the work body 5, the fixed magnet 62 is adjusted up and down to obtain the separation width due to the repulsive magnetic force. Can be adjusted and changed while maintaining the constant. In addition, by adjusting the vertical position of the workpiece 5, the lower limit of the stroke of the movable shaft 2 is fixed, and accurate operation control can be performed without any change in the drive control preset in advance. In addition, the positioning of the workpiece 5 at the set ascending position and descending position can be accurately stopped.
１ 縦型リニアアクチュエータ
２ 可動軸
２ａ 棒状磁石
２１ 円筒パイプ
２２ 後端キャップ
２３ 先端キャップ
３ コイルユニット
３１ 筒状ボビン
３２ コイル
４ 基台
４１ ホルダー部
４１ａ 雌ネジ部
５ ワーク体
６ マグネット
６１ 軸側マグネット
６２ 固定側マグネット
６ａ マグネット装着部
６ｂ マグネット装着部
６ｃ 雄ネジ部
６ｃ１ 凹溝
Ｍ 可動域
DESCRIPTION OF SYMBOLS 1 Vertical linear actuator 2 Movable shaft 2a Rod magnet 21 Cylindrical pipe 22 Rear end cap 23 Front end cap 3 Coil unit 31 Cylindrical bobbin 32 Coil 4 Base 41 Holder 41a Female screw 5 Work 6 Magnet 61 Shaft side magnet 62 Fixed side magnet 6a Magnet mounting part 6b Magnet mounting part 6c Male screw part 6c1 Groove M Movable range
Claims (3)
前記コイルユニットを基台に縦置きに装着し、前記可動軸と共にワーク体を上下駆動するに、
前記可動軸の下端部に軸側マグネットを設け、該軸側マグネットに磁極反発するよう前記基台やワークテーブル側に対向配置させて固定側マグネットを設け、
前記軸側マグネットと固定側マグネットとの間に生じる反発磁力によって、前記ワーク体の励磁ＯＦＦ状態時の荷重を、所定の離間幅をもって支持受けさせて位置保持せしめ、ワーク体の静止基準位置に設定すると共に、
前記可動軸の下降位置を、前記両マグネット間に生じる反発磁力の及ぶ範囲に設定せしめて、ワーク体を小さな推力をもって上下駆動可能に構成したことを特徴とする縦型リニアアクチュエータ。 A movable shaft in which a plurality of bar-shaped magnets are arranged in series, and a coil unit in which a plurality of coils for slidably fitting the movable shaft are arranged side by side on an inner peripheral portion, and the movable shaft is mounted. A linear actuator configured to drive a predetermined movable range forward and backward by exciting the coil together with the work body,
To vertically mount the work unit together with the movable shaft by mounting the coil unit vertically on the base,
A shaft-side magnet is provided at the lower end of the movable shaft, and a fixed-side magnet is provided so as to face the base or the work table so as to repel magnetic poles on the shaft-side magnet,
Due to the repulsive magnetic force generated between the shaft-side magnet and the fixed-side magnet, the load when the excitation of the work body is in the OFF state is supported and received with a predetermined separation width, the position is held, and the work body is set at the stationary reference position. Along with
A vertical linear actuator characterized in that a lowering position of the movable shaft is set within a range of a repulsive magnetic force generated between the two magnets so that the work body can be vertically driven with a small thrust.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2018164595A JP7158661B2 (en) | 2018-09-03 | 2018-09-03 | vertical linear actuator |
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| Application Number | Priority Date | Filing Date | Title |
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Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04130229A (en) * | 1990-09-20 | 1992-05-01 | Tokuda Seisakusho Ltd | Weight detector |
| WO2013069148A1 (en) * | 2011-11-11 | 2013-05-16 | 三菱電機株式会社 | Cylindrical linear motor |
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| US5931828A (en) | 1996-09-04 | 1999-08-03 | The West Company, Incorporated | Reclosable vial closure |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04130229A (en) * | 1990-09-20 | 1992-05-01 | Tokuda Seisakusho Ltd | Weight detector |
| WO2013069148A1 (en) * | 2011-11-11 | 2013-05-16 | 三菱電機株式会社 | Cylindrical linear motor |
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