JP2020029883A - Fluid control valve - Google Patents

Fluid control valve Download PDF

Info

Publication number
JP2020029883A
JP2020029883A JP2018154726A JP2018154726A JP2020029883A JP 2020029883 A JP2020029883 A JP 2020029883A JP 2018154726 A JP2018154726 A JP 2018154726A JP 2018154726 A JP2018154726 A JP 2018154726A JP 2020029883 A JP2020029883 A JP 2020029883A
Authority
JP
Japan
Prior art keywords
main valve
contact
fluid
valve member
fluid control
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2018154726A
Other languages
Japanese (ja)
Other versions
JP7112282B2 (en
Inventor
由晴 中島
Yoshiharu Nakajima
由晴 中島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujikura Composites Inc
Original Assignee
Fujikura Composites Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujikura Composites Inc filed Critical Fujikura Composites Inc
Priority to JP2018154726A priority Critical patent/JP7112282B2/en
Publication of JP2020029883A publication Critical patent/JP2020029883A/en
Application granted granted Critical
Publication of JP7112282B2 publication Critical patent/JP7112282B2/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Fluid-Driven Valves (AREA)
  • Safety Valves (AREA)

Abstract

To provide a fluid control valve suppressed in positional deviation of a main valve member due to side slip of a spring member.SOLUTION: A fluid control valve 1 includes a main valve member 2 capable of being kept into contact with and separated from a valve seat 13 disposed around an opening portion 12 of a communication hole 11, and switching opening/closing of a flow channel of a fluid between two ports 10a, 11a by closing the opening portion 12 in contact and opening the opening portion 12 in separation, a spring member 4 of which a length is variable in contact of the main valve member 2 with the valve seat 13, and an intermediate member 5 connected with the spring member 4, kept into contact with the main valve member 2, and moved in accompany with movement between contact and separation of the main valve member 2 to the valve seat 13 while transmitting energization force of the sprig member 4 to the main valve member 2. One of the main valve member 2 and the intermediate member 5 has a projecting portion 18 on a surface facing the other member side, the other member has a flat contact surface 16 brought into contact with the projecting portion 18, and the intermediate member 5 is brought into contact with the main valve member 2 at the projecting portion 18 in a manner that the projecting portion 18 is relatively movable along the contact surface 16.SELECTED DRAWING: Figure 1

Description

本発明は、バネ部材の付勢力を用いて流体の圧力に応じた流体の流路の開閉を行うことで流体の動きを制御する流体制御弁に関する。   The present invention relates to a fluid control valve that controls the movement of a fluid by opening and closing a fluid flow path in accordance with the pressure of the fluid using the urging force of a spring member.

バネ部材の付勢力を用いて流体の圧力に応じた流路の開閉を行うことで流体の動きを制御する流体制御弁が従来から知られている。こうした流体制御弁には、用途や機能が異なる様々な弁が存在する。たとえば、流体の圧力が必要以上に上昇することを防ぐリリーフ弁(安全弁)や、減圧後の流体の圧力を一定に保つ減圧弁は、こうした流体制御弁に含まれる様々な弁のうちの1つである。   2. Description of the Related Art A fluid control valve that controls the movement of a fluid by opening and closing a flow path according to the pressure of the fluid using the urging force of a spring member has been conventionally known. There are various types of fluid control valves having different applications and functions. For example, a relief valve (safety valve) for preventing the pressure of the fluid from rising more than necessary and a pressure reducing valve for keeping the pressure of the fluid after depressurization constant are one of various valves included in such a fluid control valve. It is.

こうした流体制御弁には、連通孔の開口部の周囲に設けられた弁座に対する当接離間が可能な主弁部材と、その当接離間の方向に延在しその延在方向の長さに応じた付勢力を主弁部材に与えるバネ部材とが備えられている。ここで、主弁部材が弁座に当接している時のバネ部材の延在方向の長さはユーザの調整操作により可変であり、ユーザは、主弁部材の当接時におけるバネ部材の付勢力を任意に設定できる。主弁部材が弁座に当接している状態では、開口部が塞がれることで流体は2つの空間に分断されて存在しており、これら2つの空間のうちの一方が圧力制御対象の流体が属する空間である。この空間の流体の圧力が、設定されたバネ部材の付勢力に応じた閾値レベル以上に増加あるいは減少すると、弁座から主弁部材を離間させようとする力が、当接させようとする力よりも優勢となる。この結果、主弁部材が弁座から離間して開口部を介して上記2つの空間の間を流体が移動し、上述の閾値レベル以上に圧力が上昇あるいは減少していた流体の圧力は、適度なレベルの圧力に向かって変化していく。このような流体の圧力の変化に伴い、今度は、弁座に対して主弁部材を当接させようとする力が、離間させようとする力よりも優勢になり、この結果、主弁部材が弁座に当接して再び流体が2つの空間に分断される。   Such a fluid control valve has a main valve member that can be brought into contact with and separated from a valve seat provided around the opening of the communication hole, and a main valve member that extends in the direction of the contact and separation and has a length in the extending direction. A spring member for applying a corresponding urging force to the main valve member. Here, the length in the extending direction of the spring member when the main valve member is in contact with the valve seat is variable by a user's adjustment operation, and the user can attach the spring member when the main valve member is in contact with the valve seat. The power can be set arbitrarily. When the main valve member is in contact with the valve seat, the fluid is divided into two spaces by closing the opening, and one of the two spaces is the fluid to be pressure-controlled. Is the space to which When the pressure of the fluid in this space increases or decreases to or above a threshold level corresponding to the biasing force of the set spring member, the force for separating the main valve member from the valve seat increases the force for making contact. More dominant. As a result, the main valve member is separated from the valve seat, the fluid moves between the two spaces through the opening, and the pressure of the fluid whose pressure has increased or decreased above the above-described threshold level is moderate. It changes toward a new level of pressure. With such a change in the pressure of the fluid, the force for bringing the main valve member into contact with the valve seat becomes dominant over the force for separating the main valve member. Abuts against the valve seat and the fluid is again divided into two spaces.

こうした流体制御弁においては、バネ部材と主弁部材とが、直接的に結合しているか、あるいは、両部材とそれぞれ結合する部材を間に介在させて間接的に結合している形態が採用されるのが通常である(たとえば特許文献1におけるスプリング32S、軸部32、およびダイヤフラム20の間の関係参照)。流体制御弁の中には、主弁部材とは嵌合しているものの、固定的には結合していない部材を介してバネ部材の付勢力が主弁部材に伝達する形態を採用した流体制御弁も存在する(たとえば特許文献2における調圧ばね35、ダイヤフラム25、ステム41、および弁体21の間の関係参照)。これらいずれの形態においても、主弁部材は、バネ部材の動きに追従して動くことになる。   In such a fluid control valve, a form is adopted in which the spring member and the main valve member are directly connected, or indirectly connected with a member connected to both members interposed therebetween. (See, for example, the relationship between the spring 32S, the shaft portion 32, and the diaphragm 20 in Patent Document 1). Some fluid control valves adopt a form in which the urging force of a spring member is transmitted to the main valve member via a member that is fitted to the main valve member but is not fixedly coupled. There is also a valve (see, for example, the relationship between the pressure regulating spring 35, the diaphragm 25, the stem 41, and the valve body 21 in Patent Document 2). In any of these modes, the main valve member moves following the movement of the spring member.

特開2016−151293号公報JP-A-2006-151293 特開2009−26050号公報JP 2009-26050 A

一般に、主弁部材の当接時におけるバネ部材の長さの調整操作において、バネ部材の長さを縮小してバネ部材の付勢力を大きな値に設定すると、主弁部材の当接離間の方向とは垂直な横方向にバネ部材がたわんで横滑りを起こしやすくなる。上述した形態のように主弁部材がバネ部材の動きに追従して動く形態では、バネ部材が横滑りを起こすと、その横滑りに追従して主弁部材も横方向に位置ずれを起こしやすい。主弁部材が横方向に位置ずれを起こすと、開口部が主弁部材によって完全に塞がれないため流体の動きが制御不能となり、流体制御弁としての本来の機能が発揮されないといった問題が生じ得る。ここで、流体制御弁の中には、主弁部材が、バネ部材の付勢力を受けて開口部を塞ぐ主弁本体と、主弁本体の周囲に配置され薄膜状の弾性部材からなる膜部とを有する、いわゆるダイヤフラム型の流体制御弁が知られている。ダイヤフラム型の流体制御弁には、膜部の存在により、流体の密閉性を保持しつつ主弁本体の当接離間が柔軟に行えるという利点があるが、この利点のため、主弁本体がバネ部材の動きに追従しやすいという特性がある。このためダイヤフラム型の流体制御弁では、上述の問題が特に深刻なものになりやすい。   Generally, when adjusting the length of the spring member at the time of contact of the main valve member, if the urging force of the spring member is set to a large value by reducing the length of the spring member, the direction of contact and separation of the main valve member In this case, the spring member flexes in the vertical lateral direction, so that the skid easily occurs. In the mode in which the main valve member moves following the movement of the spring member as in the above-described embodiment, when the spring member causes a side slip, the main valve member is likely to be displaced in the lateral direction following the side slip. If the main valve member is misaligned in the lateral direction, the opening will not be completely closed by the main valve member, and the movement of the fluid will be uncontrollable. obtain. Here, in the fluid control valve, the main valve member receives the urging force of the spring member to close the opening, and the membrane portion formed around the main valve body and formed of a thin elastic member. A so-called diaphragm type fluid control valve having the following is known. The diaphragm type fluid control valve has an advantage that the main valve body can be flexibly contacted and separated while maintaining the airtightness of the fluid due to the presence of the membrane portion. There is a characteristic that it can easily follow the movement of the member. For this reason, in the case of the diaphragm type fluid control valve, the above-mentioned problem tends to be particularly serious.

上記の事情を鑑み、本発明は、バネ部材の横滑りによる主弁部材の位置ずれを抑えた流体制御弁を提供することを目的とする。   In view of the above circumstances, an object of the present invention is to provide a fluid control valve that suppresses a displacement of a main valve member due to a side slip of a spring member.

上述の課題を解決するため、本発明は、以下の流体制御弁を提供する。
[1] 流体が流出入する第1ポートおよび第2ポートと、前記第1ポートに連通するとともに前記第1ポートとは別に開口部を有する連通孔と、前記第2ポートに連通するとともに前記開口部を介して前記連通孔と連通する空間部と、が形成され、前記開口部の周囲に弁座を有する筐体と、前記弁座に対する当接離間が可能であり、前記弁座への当接時に前記開口部を塞ぎ前記弁座からの離間時に前記開口部を開くことで前記第1ポートと前記第2ポートとの間の流体の流路の閉鎖開放を切り換える主弁部材と、前記弁座に対する前記主弁部材の当接離間の方向に延在し該延在方向の長さに応じた付勢力を前記主弁部材に与えるバネ部材であって、前記主弁部材が前記弁座に当接している時の前記延在方向の長さがユーザの調整操作により可変なバネ部材と、前記バネ部材に接続されるとともに前記主弁部材に当接し、前記バネ部材の付勢力を前記主弁部材に伝達しつつ前記弁座に対する前記主弁部材の当接離間の動きに従動して移動する中間部材であって、前記主弁部材側を向いた面上に該主弁部材側に向かって突き出した凸部を有する中間部材と、を備え、前記主弁部材と前記中間部材のうちの一方の部材は、他方の部材側を向いた面上に該他方の部材側に向かって突き出した凸部を有するものであり、該他方の部材は、前記凸部に当接する平坦な当接面を有するものであり、前記中間部材は、前記凸部が前記当接面に沿って相対的に移動自在な態様で該凸部において前記主弁部材に当接するものである流体制御弁流体制御弁。
In order to solve the above problems, the present invention provides the following fluid control valve.
[1] A first port and a second port through which a fluid flows in and out, a communication hole communicating with the first port and having an opening separately from the first port, and a communication port with the second port. A space that communicates with the communication hole through a portion, a housing having a valve seat around the opening, and a contact / separation with the valve seat are possible; A main valve member for switching between closing and opening a fluid flow path between the first port and the second port by closing the opening at the time of contact and opening the opening at the time of separation from the valve seat; A spring member that extends in a direction in which the main valve member comes into contact with or separates from a seat and applies an urging force to the main valve member in accordance with the length of the extending direction, wherein the main valve member is attached to the valve seat. The length in the extending direction when in contact can be adjusted by the user's adjustment operation. A strange spring member, which is connected to the spring member and abuts on the main valve member, and transmits the urging force of the spring member to the main valve member while contacting and separating the main valve member with the valve seat. An intermediate member that moves in accordance with the movement, the intermediate member having a convex portion protruding toward the main valve member side on a surface facing the main valve member side, One of the intermediate members has a protrusion protruding toward the other member on a surface facing the other member, and the other member contacts the protrusion. The intermediate member has a flat contact surface in contact therewith, and the intermediate member comes into contact with the main valve member at the protrusion in such a manner that the protrusion is relatively movable along the contact surface. Fluid control valve Fluid control valve.

ここで、上記の「前記凸部が前記当接面に沿って相対的に移動自在な態様」は、ほぼ静止した当接面に接しながら当接面に沿って凸部が移動自在な態様や、ほぼ静止した凸部に接しながら、当接面が広がっている平面に沿って当接面が移動自在な態様を指す。また、上記の「平坦な当接面」には、凹凸が存在しない水平な面の他に、凸部が相対的に当接面上を十分なめらかに移動できる程度の緩やかな曲面を有する当接面も含まれる。   Here, the “mode in which the protrusion is relatively movable along the contact surface” refers to a mode in which the protrusion is movable along the contact surface while contacting the almost stationary contact surface. Refers to a mode in which the contact surface is movable along a plane where the contact surface is widening while contacting the substantially stationary convex portion. In addition, the above-mentioned “flat contact surface” has, in addition to a horizontal surface having no unevenness, a contact surface having a gently curved surface such that the protrusion can relatively move on the contact surface relatively sufficiently. Surfaces are also included.

[2] 前記一方の部材は前記中間部材であり前記他方の部材は前記主弁部材であって、前記中間部材は、一方の面が前記バネ部材に接続され他方の面が前記主弁部材の前記当接面に対向する平板状の中間部材本体を有するものであり、該他方の面上に、前記凸部として、先端面が丸みを帯びた曲面となっている凸部が形成されている[1]に記載の流体制御弁。 [2] The one member is the intermediate member, the other member is the main valve member, and the intermediate member has one surface connected to the spring member and the other surface connected to the main valve member. It has a plate-shaped intermediate member main body facing the contact surface, and on the other surface, a convex portion whose tip end surface is a rounded curved surface is formed as the convex portion. The fluid control valve according to [1].

[3] 前記中間部材本体は前記他方の面に凹部を有するものであり、前記凹部の深さよりも長い厚さを有し該厚さ方向の先端面が丸みを帯びた曲面となっている曲面部材が該先端面とは反対側を前記凹部の底に向けて前記凹部内に嵌め込まれることによって前記凸部は形成されたものである[2]に記載の流体制御弁。 [3] The intermediate member main body has a concave portion on the other surface, and has a thickness longer than a depth of the concave portion, and a tip surface in the thickness direction has a rounded curved surface. The fluid control valve according to [2], wherein the convex portion is formed by fitting a member into the concave portion with the side opposite to the distal end face facing the bottom of the concave portion.

[4] 前記曲面部材は、前記凹部の深さよりも長い直径を有する球状の部材である[3]に記載の流体制御弁。 [4] The fluid control valve according to [3], wherein the curved member is a spherical member having a diameter longer than the depth of the concave portion.

[5] 前記曲面部材は、前記中間部材本体を構成する材料よりも、JIS Z 2244で規定される ビッカース硬さが大きい金属材料で構成されている[3]又は[4]に記載の流体制御弁。 [5] The fluid control according to [3] or [4], wherein the curved member is made of a metal material having a Vickers hardness specified by JIS Z 2244 larger than a material forming the intermediate member main body. valve.

[6] 前記主弁部材は、前記当接面を有するとともに前記弁座に当接して前記開口部を塞ぐ金属製の主弁本体と、主弁本体の周囲に配置された薄膜状の弾性部材からなり外周の端部が前記筐体に固定された膜部と、を備えたダイヤフラムを有するものである[1]〜[5]のいずれかに記載の流体制御弁。 [6] The main valve member has the contact surface and is in contact with the valve seat to close the opening, and a thin-film-like elastic member disposed around the main valve body. The fluid control valve according to any one of [1] to [5], further comprising a diaphragm comprising: a membrane portion having an outer peripheral end fixed to the housing.

本発明では、バネ部材が主弁部材の当接離間の方向とは垂直な横方向にたわんで横滑りを起こしその横滑りに追従して中間部材が移動した時でも、凸部が当接面に当接しつつ当接面上を相対的に移動するため主弁部材自体はバネ部材の横滑りに追従しにくい。このため、本発明の流体制御弁では、バネ部材の横滑りによる主弁部材の位置ずれが抑えられる。   According to the present invention, even when the spring member bends in the lateral direction perpendicular to the direction of contact and separation of the main valve member to cause a side slip and the intermediate member moves following the side slip, the convex portion contacts the contact surface. Since the main valve member moves relatively on the contact surface while in contact with the main member, the main valve member itself does not easily follow the side slip of the spring member. For this reason, in the fluid control valve of the present invention, the displacement of the main valve member due to the side slip of the spring member is suppressed.

本発明の流体制御弁の一実施形態である流体制御弁の模式的な断面図である。It is a typical sectional view of the fluid control valve which is one embodiment of the fluid control valve of the present invention. 主弁部材が凸部を有し中間部材が当接面を有する本発明の一実施形態である流体制御弁の模式的な断面図である。It is a typical sectional view of a fluid control valve which is one embodiment of the present invention where a main valve member has a convex part and an intermediate member has a contact surface.

以下、本発明の実施形態を、図面を参照しながら説明する。なお、本発明は以下の実施形態に限定されるものではなく、本発明の趣旨を逸脱しない範囲で、当業者の通常の知識に基づいて、適宜設計の変更、改良等が加えられることが理解されるべきである。   Hereinafter, embodiments of the present invention will be described with reference to the drawings. It is to be noted that the present invention is not limited to the following embodiments, and it is understood that design changes, improvements, etc. may be appropriately made based on ordinary knowledge of those skilled in the art without departing from the spirit of the present invention. It should be.

図1は、本発明の流体制御弁の一実施形態である流体制御弁1の模式的な断面図である。   FIG. 1 is a schematic sectional view of a fluid control valve 1 which is one embodiment of the fluid control valve of the present invention.

図1に示す流体制御弁1は、流体の圧力が必要以上に上昇することを防ぐリリーフ弁(安全弁)であり、バネ部材の付勢力を用いて流体の圧力に応じた流路の開閉を行うことで流体の動きを制御する流体制御弁の一具体例である。   The fluid control valve 1 shown in FIG. 1 is a relief valve (safety valve) that prevents the pressure of the fluid from rising more than necessary, and opens and closes a flow path according to the pressure of the fluid by using the urging force of a spring member. This is a specific example of the fluid control valve that controls the movement of the fluid.

流体制御弁1は筐体3を備えており、筐体3には、流体が流出入する第1ポート11aおよび第2ポート10aの2つのポートが形成されている。また、筐体3には、第1ポート11aに連通するとともに第1ポート11aとは別に開口部12を有する連通孔11と、第2ポート10aに連通するとともに開口部12を介して連通孔11と連通する空間部10も形成されている。さらに筐体3は、空間部10において、開口部12の周囲に弁座13を有している。   The fluid control valve 1 includes a housing 3, and the housing 3 has two ports, a first port 11a and a second port 10a, through which fluid flows in and out. The housing 3 has a communication hole 11 communicating with the first port 11a and having an opening 12 separately from the first port 11a, and a communication hole 11 communicating with the second port 10a and through the opening 12. A space 10 communicating with the space is also formed. Further, the housing 3 has a valve seat 13 around the opening 12 in the space 10.

また、流体制御弁1は主弁部材2を備えている。主弁部材2は、弁座13に対する当接離間が可能であり、弁座13への当接時に開口部12を塞ぎ弁座13からの離間時に開口部12を開くことで第1ポート11aと第2ポート10aとの間の流体の流路の閉鎖開放を切り換える役割を果たしている。   The fluid control valve 1 has a main valve member 2. The main valve member 2 can contact and separate from the valve seat 13. The main valve member 2 closes the opening 12 when the main valve member 2 contacts the valve seat 13, and opens the opening 12 when separating from the valve seat 13. It plays the role of switching between closing and opening the fluid flow path between the second port 10a.

また、流体制御弁1は、弁座13に対する主弁部材2の当接離間の方向に延在しその延在方向の長さに応じた付勢力を主弁部材2に与えるバネ部材4を備えている。このバネ部材4は、主弁部材2が弁座13に当接している時の延在方向の長さがユーザの調整操作により可変なバネ部材である。ユーザの調整操作を受けてバネ部材4の延在方向の長さを調整する機構については後で詳述する。   Further, the fluid control valve 1 includes a spring member 4 extending in a direction in which the main valve member 2 contacts and separates from the valve seat 13 and applying an urging force to the main valve member 2 according to the length in the extending direction. ing. The spring member 4 is a spring member whose length in the extending direction when the main valve member 2 is in contact with the valve seat 13 is variable by a user's adjustment operation. A mechanism for adjusting the length of the spring member 4 in the extending direction in response to a user's adjustment operation will be described later in detail.

さらに流体制御弁1は中間部材5を備えており、中間部材5はバネ部材4に接続されている。また、中間部材5は主弁部材2に当接しており、バネ部材4の付勢力を主弁部材2に伝達しつつ弁座13に対する主弁部材2の当接離間の動きに従動して移動する。   Further, the fluid control valve 1 includes an intermediate member 5, and the intermediate member 5 is connected to the spring member 4. The intermediate member 5 is in contact with the main valve member 2, and moves following the movement of the main valve member 2 in contact with or separated from the valve seat 13 while transmitting the urging force of the spring member 4 to the main valve member 2. I do.

ここで、中間部材5は、主弁部材2側を向いた面上に主弁部材2側に向かって突き出した凸部18を有しており、主弁部材2は、中間部材5の凸部18に当接する平坦な当接面16を有している。中間部材5は、凸部18が当接面16に沿って相対的に移動自在な態様で凸部18において主弁部材2に当接している。   Here, the intermediate member 5 has a convex portion 18 protruding toward the main valve member 2 on a surface facing the main valve member 2 side. It has a flat abutment surface 16 that abuts on 18. The intermediate member 5 is in contact with the main valve member 2 at the protrusion 18 in such a manner that the protrusion 18 is relatively movable along the contact surface 16.

ここで、図1の実施形態では、中間部材5が本発明にいう「一方の部材」の一例に相当し、主弁部材2が本発明にいう「他方の部材」の一例に相当する。なお、本発明では、図1の実施形態とは反対に、主弁部材が、凸部を有する「一方の部材」であって、中間部材が、当接面を有する「他方の部材」である実施形態が採用されてもよい。このような実施形態については後述する。   Here, in the embodiment of FIG. 1, the intermediate member 5 corresponds to an example of “one member” according to the present invention, and the main valve member 2 corresponds to an example of “the other member” according to the present invention. In the present invention, contrary to the embodiment of FIG. 1, the main valve member is “one member” having a convex portion, and the intermediate member is “the other member” having a contact surface. Embodiments may be employed. Such an embodiment will be described later.

一般に、主弁部材の当接時におけるバネ部材の長さの調整操作において、バネ部材の長さを縮小してバネ部材の付勢力を大きな値に設定すると、主弁部材の当接離間の方向とは垂直な横方向にバネ部材がたわんで横滑りを起こしやすくなる。ここで、バネ部材が直接に主弁部材に結合している従来の流体制御弁では、バネ部材が横滑りを起こすと、その横滑りに追従して主弁部材も横方向に位置ずれを起こしやすい。主弁部材が横方向に位置ずれを起こすと、開口部が主弁部材によって完全に塞がれないため流体の動きが制御不能となり、流体制御弁としての本来の機能が発揮されないといった問題が生じ得る。また、従来の流体制御弁の中には、バネ部材に接続された中間的な部材をバネ部材と主弁部材との間に介在させているものも存在するが、そうした中間的な部材は、主弁部材と固定的に結合していないにしても主弁部材と嵌合するようになっている。このため、このような流体制御弁においても、バネ部材が横滑りを起こすと上述の問題が生じ得る。   Generally, when adjusting the length of the spring member at the time of contact of the main valve member, if the urging force of the spring member is set to a large value by reducing the length of the spring member, the direction of contact and separation of the main valve member In this case, the spring member flexes in the vertical lateral direction, so that the skid easily occurs. Here, in the conventional fluid control valve in which the spring member is directly connected to the main valve member, when the spring member causes a side slip, the main valve member is likely to be displaced in the lateral direction following the side slip. If the main valve member is displaced in the lateral direction, the opening will not be completely closed by the main valve member, and the movement of fluid will be uncontrollable, causing a problem that the original function of the fluid control valve will not be exhibited. obtain. Also, some of the conventional fluid control valves have an intermediate member connected to the spring member interposed between the spring member and the main valve member. Even if it is not fixedly connected to the main valve member, it fits with the main valve member. Therefore, even in such a fluid control valve, the above-described problem may occur if the spring member causes a side slip.

一方、図1の流体制御弁1では、バネ部材4が、主弁部材2の当接離間の方向(図の中心軸AA’の方向)とは垂直な横方向(図の両矢印Xの方向)に横滑りしても、中間部材5の凸部18は、主弁部材2の当接面16に当接しつつ当接面16上を移動する。このため、主弁部材2自体はバネ部材4の横滑りに追従しにくい。この結果、図1の流体制御弁1では、バネ部材4の横滑りによる主弁部材2の位置ずれが抑えられる。なお、バネ部材4の横滑りは、バネ部材4の付勢力が小さくなることで解消され、このとき凸部18は、当接面16に当接しつつ当接面16上を移動して元の位置に戻る。   On the other hand, in the fluid control valve 1 of FIG. 1, the spring member 4 moves in the horizontal direction (direction of the double-headed arrow X in the figure) perpendicular to the direction in which the main valve member 2 contacts and separates (the direction of the center axis AA ′ in the figure). ), The projection 18 of the intermediate member 5 moves on the contact surface 16 while contacting the contact surface 16 of the main valve member 2. For this reason, it is difficult for the main valve member 2 itself to follow the sideslip of the spring member 4. As a result, in the fluid control valve 1 of FIG. 1, the displacement of the main valve member 2 due to the side slip of the spring member 4 is suppressed. The side slip of the spring member 4 is eliminated by reducing the urging force of the spring member 4. At this time, the convex portion 18 moves on the contact surface 16 while contacting the contact surface 16 and returns to the original position. Return to

ここで、図1に示すように、中間部材5が、一方の面がバネ部材4に接続され他方の面が主弁部材2の当接面16に対向する平板状の中間部材本体17を有しており、その他方の面上に、上述の凸部18として、先端面が丸みを帯びた曲面となっている凸部が形成されていることが好ましい。   Here, as shown in FIG. 1, the intermediate member 5 has a plate-shaped intermediate member body 17 having one surface connected to the spring member 4 and the other surface facing the contact surface 16 of the main valve member 2. It is preferable that a protrusion having a rounded end surface is formed as the above-described protrusion 18 on the other surface.

中間部材本体17が平板状であることで、2次元的に広がった中間部材本体17の一方の面に対するバネ部材4の接続部分をなるべく長くとって接続状態を強固にすることが可能となる。また、中間部材本体17の他方の面上に、上述の凸部18として、先端面が丸みを帯びた曲面となっている凸部を設けることで、中間部材5と主弁部材2との接触状態が滑らかになり、主弁部材2がバネ部材4の横滑りにより一層追従しにくくなる。   Since the intermediate member main body 17 has a flat plate shape, the connection portion of the spring member 4 to one surface of the two-dimensionally expanded intermediate member main body 17 can be made as long as possible, and the connection state can be strengthened. In addition, by providing a convex portion having a rounded tip surface as the above-mentioned convex portion 18 on the other surface of the intermediate member main body 17, contact between the intermediate member 5 and the main valve member 2 is provided. The state becomes smooth, and it becomes more difficult for the main valve member 2 to follow the spring member 4 due to the side slip.

また、図1に示すように、中間部材本体17は上述の他方の面に凹部19を有するものであり、凹部19の深さよりも厚さを有しその厚さ方向の先端面が丸みを帯びた曲面となっている曲面部材がその先端面とは反対側を凹部19の底に向けて凹部19内に嵌め込まれることによって凸部18は形成されたものであることがさらに好ましい。   As shown in FIG. 1, the intermediate member main body 17 has the concave portion 19 on the other surface described above, has a thickness greater than the depth of the concave portion 19, and has a rounded tip surface in the thickness direction. It is more preferable that the convex portion 18 is formed by fitting a curved member having a curved surface into the concave portion 19 with the side opposite to the tip surface facing the bottom of the concave portion 19.

このさらに好ましい形態によれば、先端面が丸みを帯びた曲面となっている凸部18を中間部材本体17上に簡単に形成することができる。また、摩耗等で凸部18が損傷した場合でも新しい凸部18だけを取り換えればよく、中間部材本体17はそのまま使用することができる。このため、このさらに好ましい形態では利便性が高い。   According to this further preferred embodiment, the convex portion 18 having a rounded distal end surface can be easily formed on the intermediate member main body 17. Even when the projection 18 is damaged due to wear or the like, only the new projection 18 needs to be replaced, and the intermediate member main body 17 can be used as it is. For this reason, convenience is high in this more preferable embodiment.

また、図1に示すように、上記の曲面部材(凸部18)は、凹部19の深さよりも長い直径を有する球状の部材であることが特に好ましい。   Further, as shown in FIG. 1, it is particularly preferable that the curved surface member (projection 18) is a spherical member having a diameter longer than the depth of the recess 19.

この特に好ましい形態によれば、主弁部材2の当接面16に対する凸部18の接触部分が、図1に示す点Bのような一点となるため接触面積が小さくなり、きわめて滑らかな接触状態が実現する。   According to this particularly preferred embodiment, the contact portion of the convex portion 18 with the contact surface 16 of the main valve member 2 is a single point like the point B shown in FIG. Is realized.

なお、本発明では、図1のように球状の部材が凹部19内に嵌め込まれて固定されることによって凸部18が形成されている実施形態以外に、球状の部材が回転自在な状態で凹部内に配置されることで凸部が形成されている別の実施形態が採用されてもよい。このような別の実施形態では、球状の部材が回転するため中間部材の位置が多少不安定であるが、主弁部材と中間部材との間で非常に滑らかな接触状態が実現するので、バネ部材の横滑りによる主弁部材の位置ずれを防止する効果はきわめて高い。このような別の実施形態は、球状の部材が凹部内で回転自在な状態で配置されている点を除き、実質的に図1の実施形態と同じである。そこで、このような別の実施形態については、図1および図1の説明を参照することとしてその詳細説明は省略する。   In the present invention, in addition to the embodiment in which the convex portion 18 is formed by fitting and fixing the spherical member in the concave portion 19 as shown in FIG. Another embodiment in which the convex portion is formed by being disposed in the inside may be adopted. In such another embodiment, the position of the intermediate member is somewhat unstable due to the rotation of the spherical member, but a very smooth contact state between the main valve member and the intermediate member is realized. The effect of preventing the displacement of the main valve member due to the side slip of the member is extremely high. Such an alternative embodiment is substantially the same as the embodiment of FIG. 1 except that the spherical member is rotatably disposed within the recess. Therefore, with respect to such another embodiment, the detailed description thereof will be omitted by referring to FIG. 1 and the description of FIG.

図1の実施形態に戻ってその説明を続ける。   Returning to the embodiment of FIG. 1, the description will be continued.

図1の実施形態では、上記の曲面部材(凸部18)が、中間部材本体17を構成する材料よりも、JIS Z 2244で規定されるビッカース硬さが大きい金属材料で構成されており、本発明では、このような形態が特に好ましい。   In the embodiment of FIG. 1, the curved surface member (projection 18) is made of a metal material having a Vickers hardness specified by JIS Z 2244 larger than the material of the intermediate member main body 17. In the invention, such a form is particularly preferable.

凸部18は、中間部材5における、主弁部材2の当接面16との接触部分であるため、摩耗しにくい硬い材料で構成されていることが望まれる。こうした材料としては、たとえば、JIS Z 2244で規定されるビッカース硬さが大きい金属材料が挙げられる。本発明では、このような金属材料により、凸部18だけでなく中間部材本体17を含めて中間部材5全体を構成してもよい。ただし、このような金属材料で中間部材本体17を構成した場合、中間部材5が必要以上の重量を有しさらにコスト高にもつながるといった問題が生じることがある。そこで、高い摩耗耐久性が不要な中間部材本体17の構成材料に比べ、ビッカース硬さが大きい金属材料で上記の曲面部材(凸部18)を構成することで、上記の問題を回避しつつ、当接面16との接触部分における高い摩耗耐久性を実現できる。   Since the convex portion 18 is a contact portion of the intermediate member 5 with the contact surface 16 of the main valve member 2, it is desired that the convex portion 18 be made of a hard material that is not easily worn. Examples of such a material include a metal material having a large Vickers hardness specified in JIS Z 2244. In the present invention, the entire intermediate member 5 including the intermediate member main body 17 as well as the convex portion 18 may be made of such a metal material. However, when the intermediate member main body 17 is made of such a metal material, there may be a problem that the intermediate member 5 has an unnecessarily heavy weight and leads to an increase in cost. Therefore, by configuring the curved surface member (convex portion 18) with a metal material having a higher Vickers hardness than the constituent material of the intermediate member main body 17 that does not require high wear durability, the above problem can be avoided. High wear durability can be realized in the contact portion with the contact surface 16.

ここで、曲面部材(凸部18)の構成材料としては、たとえば、鉄に、炭素、ニッケル、クロム、コバルト等が添加されたいわゆる鋼材を挙げることができる。一方、中間部材本体17としては、こうした鋼材よりもビッカース硬さが小さい鉄やアルミニウム等の金属材料(合金材料含む)や強化プラスチック材料を用いることができる。なお、主弁部材2において、当接面16を有する部分の材料としては、曲面部材(凸部18)の構成材料と同様のものを採用することができる。   Here, as a constituent material of the curved surface member (convex portion 18), for example, a so-called steel material in which carbon, nickel, chromium, cobalt, or the like is added to iron can be given. On the other hand, as the intermediate member main body 17, a metal material (including an alloy material) such as iron or aluminum having a Vickers hardness smaller than such a steel material or a reinforced plastic material can be used. In addition, as the material of the portion having the contact surface 16 in the main valve member 2, the same material as the constituent material of the curved surface member (convex portion 18) can be adopted.

また、図1に示すように、主弁部材2が、当接面16を有するとともに弁座13に当接して開口部12を塞ぐ金属製の主弁本体14と、主弁本体14の周囲に配置された薄膜状の弾性部材からなり外周の端部が筐体3に固定された膜部15と、を備えたダイヤフラムを有するものであることが好ましい。なお、図1の例では、主弁部材2がこのようなダイヤフラムを有する好ましい形態の一例として、主弁部材2それ自体がダイヤフラムとなっている。   As shown in FIG. 1, the main valve member 2 includes a metal main valve body 14 having an abutting surface 16 and abutting against a valve seat 13 to close the opening 12. It is preferable to have a diaphragm provided with a film portion 15 made of a thin film-shaped elastic member disposed and having an outer peripheral end fixed to the housing 3. In the example of FIG. 1, as an example of a preferred embodiment in which the main valve member 2 has such a diaphragm, the main valve member 2 itself is a diaphragm.

このようなダイヤフラム(主弁部材2)には、膜部15の存在により、流体の密閉性を保持しつつ主弁本体14の当接離間が柔軟に行えるという利点があるが、この利点のため、主弁本体14がバネ部材4の動きに追従しやすい。このため、上述したような、従来の流体制御弁における、バネ部材の横滑りに伴う主弁部材の位置ずれの問題が特に深刻なものになりやすい。そこで、凸部18を有する中間部材5により主弁部材2をバネ部材4の横滑りに追従しにくくする本実施形態の機構がとりわけ有用となる。   Such a diaphragm (main valve member 2) has an advantage that the presence and absence of the membrane portion 15 allows the main valve body 14 to flexibly contact and separate while maintaining the fluid tightness. The main valve body 14 can easily follow the movement of the spring member 4. For this reason, in the conventional fluid control valve described above, the problem of the displacement of the main valve member due to the sliding of the spring member tends to be particularly serious. Therefore, the mechanism of the present embodiment that makes it difficult for the main valve member 2 to follow the side slip of the spring member 4 by the intermediate member 5 having the convex portion 18 becomes particularly useful.

以下では、図1の流体制御弁1の構成についてさらに詳しく説明する。   Hereinafter, the configuration of the fluid control valve 1 of FIG. 1 will be described in more detail.

図1の流体制御弁1は、以上説明した構成要素に加えて、補助バネ6、付勢力調整部材7、およびバネ固定部材8を備えている。   The fluid control valve 1 of FIG. 1 includes an auxiliary spring 6, an urging force adjusting member 7, and a spring fixing member 8 in addition to the components described above.

補助バネ6は、筐体3内部の空間部10において、弁座13の近傍に一端部が固定され他端部が主弁本体14に固定されたバネである。補助バネ6は、主弁本体14が弁座13から離間する方向に主弁本体14を付勢しており、この付勢力により、主弁本体14が弁座13に当接する際の主弁本体14の勢いが弱められる。すなわち、補助バネ6は、弁座13への主弁本体14の当接に対する緩衝バネとしての役割を有している。   The auxiliary spring 6 is a spring whose one end is fixed near the valve seat 13 and the other end is fixed to the main valve body 14 in the space 10 inside the housing 3. The auxiliary spring 6 urges the main valve main body 14 in a direction in which the main valve main body 14 is separated from the valve seat 13, and the urging force causes the main valve main body 14 to come in contact with the valve seat 13. 14 momentum is weakened. That is, the auxiliary spring 6 has a role as a buffer spring against contact of the main valve body 14 with the valve seat 13.

付勢力調整部材7は、バネ部材4により主弁部材2に及ぼされる付勢力の大きさを調整するための部材であり、図の中心軸AA’を回転軸として回転するつまみ状の部材である。付勢力調整部材7は、中心軸AA’の方向に延びる主軸20を有しており、主軸20は筐体3内部の空間部10内に挿入されている。一方、付勢力調整部材7の、主軸20以外の部分は筐体3外部に露出しており、流体制御弁1の外部から見ると、このように露出している主軸20以外の部分がつまみの操作部として認識される。ここで、付勢力調整部材7と筐体3とは、互いに接触する部分において、互いに嵌合する不図示のネジ溝が形成されている。付勢力調整部材7が図の中心軸AA’を回転軸として回転すると、これらのネジ溝により付勢力調整部材7は、回転方向に応じて、筐体3に対し相対的に中心軸AA’の方向に沿った図の上方向あるいは下方向に移動する。   The biasing force adjusting member 7 is a member for adjusting the magnitude of the biasing force exerted on the main valve member 2 by the spring member 4, and is a knob-shaped member that rotates around the center axis AA ′ in the drawing as a rotation axis. . The biasing force adjusting member 7 has a main shaft 20 extending in the direction of the central axis AA ′, and the main shaft 20 is inserted into the space 10 inside the housing 3. On the other hand, portions of the biasing force adjusting member 7 other than the main shaft 20 are exposed to the outside of the housing 3, and when viewed from outside the fluid control valve 1, the portions other than the main shaft 20 are the knobs. Recognized as an operation unit. Here, a thread groove (not shown) that fits with each other is formed at a portion where the urging force adjusting member 7 and the housing 3 are in contact with each other. When the urging force adjusting member 7 rotates around the central axis AA ′ in the drawing as a rotation axis, the urging force adjusting member 7 is relatively moved with respect to the housing 3 by the screw grooves. Move up or down in the figure along the direction.

ここで、主軸20には、中心軸AA’から離れる方向に広がるフランジ部21が設けられている。このフランジ部21の、主軸20が挿入される方向を向いた面上には、バネ固定部材8が、主軸20の回りで回転自在な態様で主軸20の回りに配置されている。このため、付勢力調整部材7が図の中心軸AA’を回転軸として回転したときでも、バネ固定部材8は、フランジ部21とともに中心軸AA’の方向(図の上下方向)には移動するが、主軸20の回りには回転しにくくなっている。ここで、バネ固定部材8にはバネ部材4の一端部が固定されており、バネ部材4は、主軸20の回りを取り巻く態様で中間部材5に向かって延び、バネ固定部材8の他端部は、上述したように中間部材5に接続されている。すなわち、バネ部材4は、バネ固定部材8と中間部材5の間に挟まれた状態で、主軸20の回りに配置されている。ここで、図1の流体制御弁1では、バネ固定部材8と中間部材5との間の距離(すなわちバネ部材4の長さ)はバネ部材4の自然長よりも常に短くなるよう設定されている。このため、バネ固定部材8および中間部材5のそれぞれに対し、互いから離れる方向に向かう付勢力がバネ部材4から常に及ぼされる。この結果、バネ固定部材8はフランジ部21に常に押し付けられ、中間部材5は主弁部材2に常に押し付けられる。このようにして中間部材5と主弁部材2との当接状態(正確には、中間部材5の凸部18と主弁部材2の当接面16との当接状態)が常時維持される。   Here, the main shaft 20 is provided with a flange portion 21 extending in a direction away from the central axis AA '. On a surface of the flange portion 21 facing the direction in which the main shaft 20 is inserted, the spring fixing member 8 is arranged around the main shaft 20 so as to be rotatable around the main shaft 20. For this reason, even when the urging force adjusting member 7 rotates about the central axis AA ′ in the figure as a rotation axis, the spring fixing member 8 moves in the direction of the central axis AA ′ (vertical direction in the figure) together with the flange portion 21. However, it is difficult to rotate around the main shaft 20. Here, one end of the spring member 4 is fixed to the spring fixing member 8, and the spring member 4 extends toward the intermediate member 5 so as to surround the main shaft 20, and the other end of the spring fixing member 8. Are connected to the intermediate member 5 as described above. That is, the spring member 4 is disposed around the main shaft 20 while being sandwiched between the spring fixing member 8 and the intermediate member 5. Here, in the fluid control valve 1 of FIG. 1, the distance between the spring fixing member 8 and the intermediate member 5 (that is, the length of the spring member 4) is set so as to always be shorter than the natural length of the spring member 4. I have. For this reason, a biasing force in a direction away from each other is always applied from the spring member 4 to each of the spring fixing member 8 and the intermediate member 5. As a result, the spring fixing member 8 is always pressed against the flange portion 21, and the intermediate member 5 is always pressed against the main valve member 2. In this way, the contact state between the intermediate member 5 and the main valve member 2 (more precisely, the contact state between the projection 18 of the intermediate member 5 and the contact surface 16 of the main valve member 2) is always maintained. .

流体制御弁1のユーザは、主弁部材2が弁座13に当接している状態において、付勢力調整部材7を中心軸AA’の回りに回転させることで、主弁部材2の当接時におけるバネ部材4の長さを所望の値に調整することができる。すなわち、このユーザの調整操作を受けて中心軸AA’の方向(図の上下方向)にフランジ部21が移動することで、フランジ部21上のバネ固定部材8と中間部材5との間の距離(つまりバネ部材4の長さ)が所望の値に調整される。これにより、ユーザは、主弁部材2の当接時におけるバネ部材4の付勢力を任意に設定できる。   The user of the fluid control valve 1 rotates the urging force adjusting member 7 around the central axis AA ′ in a state where the main valve member 2 is in contact with the valve seat 13 so that the Can be adjusted to a desired value. In other words, the flange portion 21 moves in the direction of the center axis AA '(up and down direction in the figure) in response to the user's adjustment operation, so that the distance between the spring fixing member 8 and the intermediate member 5 on the flange portion 21 is increased. (That is, the length of the spring member 4) is adjusted to a desired value. Thereby, the user can arbitrarily set the urging force of the spring member 4 when the main valve member 2 abuts.

ここで、図1の流体制御弁1では、主弁部材2が弁座13から離間して中間部材5とともに中心軸AA’に沿って弁座13から離れる方向に移動できるようにするため、バネ部材4の長さが主軸20の長さよりも短くなるように設定されている。従って、バネ部材4には、主軸20の回りを取り巻くバネ固定部材8側の上側部分4Aの他に、主軸20の回りを取り巻いていない中間部材5側の下側部分4Bが常に存在する。一般に、バネ部材においては、図の下側部分4Bのように、バネ部材のらせん形状の内側においてバネ部材の姿勢を保持する軸部材(図1では主軸20)が存在しない部分ではバネ部材の横ずれが特に発生しやすい。このため、下側部分4Bが存在する本実施形態では、凸部18を有する中間部材5により主弁部材2をバネ部材4の横滑りに追従しにくくする本実施形態の機構がとりわけ有用となる。   Here, in the fluid control valve 1 of FIG. 1, the main valve member 2 is moved away from the valve seat 13 along with the intermediate member 5 along the central axis AA ′ so as to move away from the valve seat 13. The length of the member 4 is set to be shorter than the length of the main shaft 20. Therefore, the spring member 4 always has a lower portion 4B on the intermediate member 5 side not surrounding the main shaft 20 in addition to the upper portion 4A on the side of the spring fixing member 8 surrounding the main shaft 20. Generally, in a portion of the spring member such as a lower portion 4B in the figure, where there is no shaft member (the main shaft 20 in FIG. 1) that holds the posture of the spring member inside the spiral shape of the spring member, the spring member laterally shifts. Is particularly likely to occur. For this reason, in the present embodiment in which the lower portion 4B is present, the mechanism of the present embodiment in which the intermediate member 5 having the convex portion 18 makes it difficult for the main valve member 2 to follow the sideslip of the spring member 4 becomes particularly useful.

なお、以上の説明では、主軸20の回りで回転自在なバネ固定部材8にバネ部材4の一端部が固定されていたが、図1のように、凸部18が凹部19の深さよりも長い直径を有する球状の部材である場合には、バネ固定部材8を省いてフランジ部21に直接にバネ部材4の一端部が固定されている形態が採用されてもよい。この場合、付勢力調整部材7が回転するとバネ部材4も回転することになるが、主弁部材2の当接面16に対する中間部材5の接触部分が凸部18上の点Bの一点であるため、中間部材5は、主弁部材2を回転させることなくバネ部材4の回転に合わせて回転する。このため、付勢力調整部材7が回転してもバネ部材4はその長さが伸縮するだけであって、バネ部材4自体がねじれてしまうことは回避される。この形態には、バネ固定部材8を省くことで部品点数が減るという長所がある。   In the above description, one end of the spring member 4 is fixed to the spring fixing member 8 rotatable around the main shaft 20. However, as shown in FIG. In the case of a spherical member having a diameter, a form in which one end of the spring member 4 is directly fixed to the flange portion 21 without using the spring fixing member 8 may be adopted. In this case, when the urging force adjustment member 7 rotates, the spring member 4 also rotates, but the contact portion of the intermediate member 5 with the contact surface 16 of the main valve member 2 is one point B on the protrusion 18. Therefore, the intermediate member 5 rotates according to the rotation of the spring member 4 without rotating the main valve member 2. For this reason, even if the urging force adjusting member 7 rotates, the length of the spring member 4 only expands and contracts, and the spring member 4 itself is prevented from being twisted. This embodiment has an advantage that the number of components is reduced by omitting the spring fixing member 8.

以下では、図1の流体制御弁1のリリーフ弁(安全弁)としての動作について説明する。   Hereinafter, the operation of the fluid control valve 1 of FIG. 1 as a relief valve (safety valve) will be described.

図1の流体制御弁1は、第1ポート11aを介して流体制御弁1外部の不図示の第1の流体収容部と接続されるとともに、第2ポート10aを介して流体制御弁1外部の不図示の第2の流体収容部と接続される。ここで、第1の流体収容部および第2の流体収容部それぞれには同一種類の流体が収容されている。第1の流体収容部の流体の圧力は許容可能なそれほど高くはない圧力となっているが、第2の流体収容部の流体の圧力は、特段の減圧処理をしなければ、第2の流体収容部における流体の処理環境等の要因により、許容できないほどの高圧になることがある。図1の流体制御弁1は、第2の流体収容部におけるこうした高圧状態を回避するため、第2ポート10aを介して第2の流体収容部と連通する流体室9A(以下の説明参照)内の流体の圧力を制御する。以下、この制御機構について詳しく説明する。   The fluid control valve 1 of FIG. 1 is connected to a first fluid storage unit (not shown) outside the fluid control valve 1 via a first port 11a, and is connected to a fluid outside the fluid control valve 1 via a second port 10a. It is connected to a second fluid storage unit (not shown). Here, the same type of fluid is contained in each of the first fluid containing portion and the second fluid containing portion. Although the pressure of the fluid in the first fluid container is not so high as tolerable, the pressure of the fluid in the second fluid container is the second fluid unless a special decompression process is performed. The pressure may become unacceptably high due to factors such as the processing environment of the fluid in the storage unit. In order to avoid such a high pressure state in the second fluid storage section, the fluid control valve 1 of FIG. 1 has a fluid chamber 9A (see the following description) communicating with the second fluid storage section via the second port 10a. To control the pressure of the fluid. Hereinafter, this control mechanism will be described in detail.

流体制御弁1では、筐体3内部の空間部10において、ダイヤフラムからなる主弁部材2の膜部15の外周端部が、上述したように筐体3に固定されていることで、空間部10は流体室9Aと収容室9Bとに分断されている。流体室9Aは、圧力制御の対象の流体を含む部屋であり、収容室9Bは、バネ部材4や中間部材5を収容している部屋である。ここで、流体制御弁1では、付勢力調整部材7を介して設定されたバネ部材4の付勢力の下で、図1に示すように主弁部材2の主弁本体14が弁座13に当接して開口部12を塞いでいる状態が通常の状態(以下、通常状態と呼ぶ)である。この通常状態では、第2ポート10aに接続している箇所を除き、流体室9Aは、筐体3内部において、空間部10の壁面と主弁部材2とで囲まれた閉じた空間を形成している。この流体室9Aは、第2ポート10aを介して不図示の第2の流体収容部と接続されており、流体室9A内の流体の圧力は、第2の流体収容部内の流体の圧力と同じである。   In the fluid control valve 1, in the space 10 inside the housing 3, the outer peripheral end of the membrane portion 15 of the main valve member 2 made of a diaphragm is fixed to the housing 3 as described above, so that the space Reference numeral 10 is divided into a fluid chamber 9A and a storage chamber 9B. The fluid chamber 9A is a room containing a fluid to be pressure-controlled, and the accommodation room 9B is a room that accommodates the spring member 4 and the intermediate member 5. Here, in the fluid control valve 1, under the urging force of the spring member 4 set via the urging force adjusting member 7, the main valve body 14 of the main valve member 2 moves to the valve seat 13 as shown in FIG. A state in which the opening 12 is closed by contact is a normal state (hereinafter, referred to as a normal state). In this normal state, except for the portion connected to the second port 10a, the fluid chamber 9A forms a closed space surrounded by the wall surface of the space 10 and the main valve member 2 inside the housing 3. ing. The fluid chamber 9A is connected to a second fluid storage unit (not shown) via the second port 10a, and the pressure of the fluid in the fluid chamber 9A is the same as the pressure of the fluid in the second fluid storage unit. It is.

一方、収容室9Bには、付勢力調整部材7と筐体3との間の僅かな隙間から流体制御弁1外部の空気が侵入することができ、このため、収容室9Bは、大気圧程度の圧力を持つ空気によって満たされている。ここで、主弁部材2の存在により、収容室9Bの空気と流体室9A内の流体とはほぼ完全に遮断されている。   On the other hand, air outside the fluid control valve 1 can enter the accommodation room 9B from a slight gap between the urging force adjusting member 7 and the housing 3, and therefore, the accommodation room 9 </ b> B Filled with air with pressure. Here, due to the presence of the main valve member 2, the air in the storage chamber 9B and the fluid in the fluid chamber 9A are almost completely shut off.

また、連通孔11は、第1ポート11aを介して不図示の第1の流体収容部と接続されており、連通孔11内の流体の圧力は、第1の流体収容部内の流体の圧力と同じであって、許容可能なそれほど高くはない圧力となっている。   The communication hole 11 is connected to a first fluid storage unit (not shown) via the first port 11a. The pressure of the fluid in the communication hole 11 is equal to the pressure of the fluid in the first fluid storage unit. The same, but not so high pressure that is acceptable.

以上説明した構成により、通常状態の主弁部材2に対しては、流体室9Aおよび連通孔11の流体から、主弁部材2を弁座13から離間させようとする圧力が作用し、収容室9Bの空気から、主弁部材2を弁座13に当接させようとする圧力が作用する。また、この主弁部材2に対し、上述したように、バネ部材4から、主弁部材2を弁座13に当接させようとする付勢力が作用し、補助バネ6から、主弁部材2を弁座13から離間させようとする付勢力が作用する。さらに、弁座13から主弁部材2が受ける、弁座13から離れる方向の抗力(垂直抗力)が加わり、これらすべての力が釣り合うことで、中心軸AA’の方向についての主弁部材2の位置が、図1に示すように弁座13に当接する位置に維持される。   With the configuration described above, the pressure for separating the main valve member 2 from the valve seat 13 acts on the main valve member 2 in the normal state from the fluid in the fluid chamber 9A and the communication hole 11, and the accommodation chamber From the air of 9B, a pressure acts to bring the main valve member 2 into contact with the valve seat 13. Further, as described above, the urging force for bringing the main valve member 2 into contact with the valve seat 13 acts on the main valve member 2 as described above. Of the valve seat 13 acts on the valve seat 13. Further, a reaction force (vertical reaction force) that the main valve member 2 receives from the valve seat 13 in a direction away from the valve seat 13 is applied, and all these forces are balanced, whereby the main valve member 2 in the direction of the center axis AA ′ is balanced. The position is maintained at a position abutting the valve seat 13 as shown in FIG.

ここで、第2の流体収容部における流体の処理環境等の要因により第2の流体収容部の流体の圧力が上昇していくと、主弁部材2に作用する上述の様々な力の中でも、主弁部材2を弁座13から離間させようとする流体室9Aの流体からの圧力が大きくなっていく。このため、主弁部材2を弁座13から離間させようとする力が優勢になり、主弁部材2は、弁座13から離れる方向に移動を開始する。この結果、開口部12が開かれて第1ポート11aと第2ポート10aとの間の流体の流路が開放され、高圧の流体室9A(および第2の流体収容部)の流体は、開口部12を通って連通孔11(および第1の流体収容部)に移動する。この流体の移動により、第2の流体収容部の流体の圧力が徐々に低下し、流体室9Aの流体から主弁部材2に作用する圧力も低下していく。やがて、主弁部材2を弁座13に当接させようとする力の方が優勢になり、主弁部材2は、今度は、弁座13に向かう方向に移動を開始する。そして、再び主弁部材2が弁座13に当接して開口部12が塞がれ、第1ポート11aと第2ポート10aとの間の流体の流路が閉鎖される。この結果、図1の通常状態が再び実現する。   Here, when the pressure of the fluid in the second fluid storage unit increases due to factors such as the processing environment of the fluid in the second fluid storage unit, among the various forces acting on the main valve member 2, The pressure from the fluid in the fluid chamber 9 </ b> A that tends to separate the main valve member 2 from the valve seat 13 increases. Therefore, the force for separating the main valve member 2 from the valve seat 13 becomes dominant, and the main valve member 2 starts moving in a direction away from the valve seat 13. As a result, the opening 12 is opened to open the fluid flow path between the first port 11a and the second port 10a, and the fluid in the high-pressure fluid chamber 9A (and the second fluid accommodating portion) is opened. It moves to the communication hole 11 (and the first fluid storage part) through the part 12. Due to this movement of the fluid, the pressure of the fluid in the second fluid storage portion gradually decreases, and the pressure acting on the main valve member 2 from the fluid in the fluid chamber 9A also decreases. Eventually, the force for bringing the main valve member 2 into contact with the valve seat 13 becomes dominant, and the main valve member 2 starts moving in the direction toward the valve seat 13 this time. Then, the main valve member 2 again comes into contact with the valve seat 13 to close the opening 12, and the fluid flow path between the first port 11a and the second port 10a is closed. As a result, the normal state of FIG. 1 is realized again.

以上が、図1の流体制御弁1のリリーフ弁(安全弁)としての動作についての説明である。このようにして、流体制御弁1では、流体室9A(および第2の流体収容部)の流体の圧力が、許容できないほどの高圧になることが回避される。   The above is the description of the operation of the fluid control valve 1 in FIG. 1 as a relief valve (safety valve). In this way, in the fluid control valve 1, it is possible to prevent the pressure of the fluid in the fluid chamber 9A (and the second fluid storage portion) from becoming unacceptably high.

以上が図1の実施形態についての説明である。   The above is the description of the embodiment in FIG.

図1の実施形態では、中間部材5が凸部18を有し主弁部材2が当接面16を有していたが、本発明では、図1の実施形態とは反対に、主弁部材が凸部を有し中間部材が当接面を有する実施形態が採用されてもよい。以下、このような実施形態について説明する。   In the embodiment of FIG. 1, the intermediate member 5 has the convex portion 18 and the main valve member 2 has the contact surface 16. However, in the present invention, contrary to the embodiment of FIG. May have a convex portion, and the intermediate member may have an abutment surface. Hereinafter, such an embodiment will be described.

図2は、主弁部材が凸部を有し中間部材が当接面を有する本発明の一実施形態である流体制御弁1’の模式的な断面図である。   FIG. 2 is a schematic cross-sectional view of a fluid control valve 1 ′ according to an embodiment of the present invention in which a main valve member has a convex portion and an intermediate member has a contact surface.

図2では、図1の流体制御弁1と同一の構成要素については同一の符号が付されており、その重複説明は省略する。流体制御弁1’は、図1で説明した筐体3やバネ部材4に加えて、主弁部材2’および中間部材5’を備えている。   In FIG. 2, the same components as those of the fluid control valve 1 of FIG. 1 are denoted by the same reference numerals, and the description thereof will not be repeated. The fluid control valve 1 'includes a main valve member 2' and an intermediate member 5 'in addition to the housing 3 and the spring member 4 described in FIG.

主弁部材2’は、弁座13に対する当接離間が可能であり、弁座13への当接時に開口部12を塞ぎ弁座13からの離間時に開口部12を開くことで第1ポート11aと第2ポート10aとの間の流体の流路の閉鎖開放を切り換える役割を果たしている。   The main valve member 2 ′ can be brought into contact with and separated from the valve seat 13, and the first port 11 a is opened by closing the opening 12 when contacting with the valve seat 13 and opening the opening 12 when separating from the valve seat 13. It plays the role of switching between closing and opening of the fluid flow path between the first and second ports 10a.

中間部材5’はバネ部材4に接続されている。また、中間部材5’は主弁部材2’に当接しており、バネ部材4の付勢力を主弁部材2’に伝達しつつ弁座13に対する主弁部材2’の当接離間の動きに従動して移動する。   The intermediate member 5 'is connected to the spring member 4. Further, the intermediate member 5 'is in contact with the main valve member 2', and the urging force of the spring member 4 is transmitted to the main valve member 2 'while the main valve member 2' moves toward and away from the valve seat 13. Follow and move.

ここで、主弁部材2’は、中間部材5’側を向いた面上に中間部材5’側に向かって突き出した凸部18’を有しており、中間部材5’は、主弁部材2’の凸部18’に当接する平坦な当接面16’を有している。中間部材5’は、凸部18’が当接面16’に沿って相対的に移動自在な態様で凸部18’において主弁部材2’に当接している。ここで、主弁部材2’が本発明にいう「一方の部材」の一例に相当し、中間部材5’が本発明にいう「他方の部材」の一例に相当する。   Here, the main valve member 2 ′ has a projection 18 ′ protruding toward the intermediate member 5 ′ on a surface facing the intermediate member 5 ′, and the intermediate member 5 ′ is It has a flat contact surface 16 ′ that contacts the 2 ′ convex portion 18 ′. The intermediate member 5 'is in contact with the main valve member 2' at the protrusion 18 'in such a manner that the protrusion 18' is relatively movable along the contact surface 16 '. Here, the main valve member 2 'corresponds to an example of "one member" according to the present invention, and the intermediate member 5' corresponds to an example of "the other member" according to the present invention.

図2の流体制御弁1’では、バネ部材4が、主弁部材2’の当接離間の方向(図の中心軸AA’の方向)とは垂直な横方向(図の両矢印Xの方向)に横滑りしても、中間部材5’の当接面16’は、主弁部材2’の凸部18’に当接しつつ、当接面16’が広がっている平面に沿って移動する。このため、主弁部材2’自体はバネ部材4の横滑りに追従しにくい。この結果、図2の流体制御弁1’では、バネ部材4の横滑りによる主弁部材2’の位置ずれが抑えられる。なお、バネ部材4の横滑りは、バネ部材4の付勢力が小さくなることで解消され、このとき当接面16’は、凸部18’に当接しつつ、当接面16’が広がっている平面に沿って移動して元の位置に戻る。   In the fluid control valve 1 'of FIG. 2, the spring member 4 is moved in the horizontal direction (the direction of the double-headed arrow X in the figure) perpendicular to the direction in which the main valve member 2' contacts and separates (the direction of the center axis AA 'in the figure). ), The contact surface 16 ′ of the intermediate member 5 ′ moves along the plane where the contact surface 16 ′ spreads while contacting the convex portion 18 ′ of the main valve member 2 ′. For this reason, the main valve member 2 ′ itself does not easily follow the sideslip of the spring member 4. As a result, in the fluid control valve 1 ′ of FIG. 2, the displacement of the main valve member 2 ′ due to the skid of the spring member 4 is suppressed. Note that the side slip of the spring member 4 is eliminated by reducing the urging force of the spring member 4, and at this time, the contact surface 16 'is in contact with the convex portion 18' and the contact surface 16 'is widened. Move along the plane and return to the original position.

ここで、図2に示すように、中間部材5’が、一方の面がバネ部材4に接続され他方の面に主弁部材2’の凸部18’に対向する当接面16’が形成された平板状であることが好ましい。   Here, as shown in FIG. 2, the intermediate member 5 ′ has one surface connected to the spring member 4 and the other surface formed with a contact surface 16 ′ facing the convex portion 18 ′ of the main valve member 2 ′. It is preferably a flat plate.

中間部材5’が平板状であることで、2次元的に広がった中間部材5’の一方の面に対するバネ部材4の接続部分をなるべく長くとって接続状態を強固にすることが可能となる。   Since the intermediate member 5 'has a flat plate shape, it is possible to make the connection portion of the spring member 4 to one surface of the two-dimensionally expanded intermediate member 5' as long as possible, thereby strengthening the connection state.

また、図2に示すように、主弁部材2’は、中間部材5’の当接面16’側を向いた面に凹部19’を有するものであり、凹部19’の深さよりも厚さを有しその厚さ方向の先端面が丸みを帯びた曲面となっている曲面部材がその先端面とは反対側を凹部19’の底に向けて凹部19’内に嵌め込まれることによって凸部18’は形成されたものであることがさらに好ましい。   As shown in FIG. 2, the main valve member 2 ′ has a concave portion 19 ′ on the surface facing the contact surface 16 ′ of the intermediate member 5 ′, and has a thickness greater than the depth of the concave portion 19 ′. A convex member having a curved surface member having a front end surface in a thickness direction having a rounded curved surface is fitted into the concave portion 19 'with the opposite side to the front end surface facing the bottom of the concave portion 19'. More preferably, 18 'is formed.

このさらに好ましい形態によれば、先端面が丸みを帯びた曲面となっている凸部18’を主弁部材2’において簡単に形成することができる。また、摩耗等で凸部18’が損傷した場合でも新しい凸部18’だけを取り換えればよく、凸部18’以外の部分はそのまま使用することができる。このため、このさらに好ましい形態では利便性が高い。   According to this further preferred embodiment, the convex portion 18 'having a rounded distal end surface can be easily formed in the main valve member 2'. Even when the projection 18 'is damaged due to abrasion or the like, only the new projection 18' needs to be replaced, and portions other than the projection 18 'can be used as they are. For this reason, convenience is high in this more preferable embodiment.

また、図2に示すように、上記の曲面部材(凸部18’)は、凹部19’の深さよりも長い直径を有する球状の部材であることが特に好ましい。   Further, as shown in FIG. 2, it is particularly preferable that the curved surface member (projection 18 ') is a spherical member having a diameter longer than the depth of the recess 19'.

この特に好ましい形態によれば、中間部材5’の当接面16’に対する凸部18’の接触部分が、図2に示す点B’のような一点となるため接触面積が小さくなり、きわめて滑らかな接触状態が実現する。   According to this particularly preferred embodiment, the contact area of the convex portion 18 'with the contact surface 16' of the intermediate member 5 'is one point such as the point B' shown in FIG. A good contact state is realized.

なお、本発明では、図2のように球状の部材が凹部19’内に嵌め込まれて固定されることによって凸部18’が形成されている実施形態以外に、球状の部材が回転自在な状態で凹部内に配置されることで凸部が形成されている別の実施形態が採用されてもよい。このような別の実施形態では、球状の部材が回転するため中間部材の位置が多少不安定であるが、主弁部材と中間部材との間で非常に滑らかな接触状態が実現するので、バネ部材の横滑りによる主弁部材の位置ずれを防止する効果はきわめて高い。このような別の実施形態は、球状の部材が凹部内で回転自在な状態で配置されている点を除き、実質的に図2の実施形態と同じである。そこで、このような別の実施形態については、図2および図2の説明を参照することとしてその詳細説明は省略する。   In the present invention, in addition to the embodiment in which the convex portion 18 'is formed by fitting and fixing the spherical member into the concave portion 19' as shown in FIG. Another embodiment in which the convex portion is formed by being disposed in the concave portion may be adopted. In such another embodiment, the position of the intermediate member is somewhat unstable due to the rotation of the spherical member, but a very smooth contact state between the main valve member and the intermediate member is realized. The effect of preventing the displacement of the main valve member due to the side slip of the member is extremely high. Such an alternative embodiment is substantially the same as the embodiment of FIG. 2, except that the spherical member is rotatably disposed within the recess. Therefore, with respect to such another embodiment, detailed description thereof will be omitted by referring to FIGS.

図2の実施形態に戻ってその説明を続ける。   Returning to the embodiment of FIG. 2, the description will be continued.

図2の実施形態では、上記の曲面部材(凸部18’)が、凹部19’の構成材料よりも、JIS Z 2244で規定される ビッカース硬さが大きい金属材料で構成されており、本発明では、このような形態が特に好ましい。   In the embodiment of FIG. 2, the curved surface member (projection 18 ′) is made of a metal material having a Vickers hardness specified by JIS Z 2244 larger than the material of the recess 19 ′. Then, such a form is particularly preferable.

凸部18’は、主弁部材2’における、中間部材5’の当接面16’との接触部分であるため、摩耗しにくい硬い材料で構成されていることが望まれる。こうした材料としては、たとえば、JIS Z 2244で規定されるビッカース硬さが大きい金属材料が挙げられる。本発明では、このような金属材料により、凸部18’だけでなく凹部19’を構成してもよい。ただし、このような金属材料で主弁部材2’を構成した場合、主弁部材2’が必要以上の重量を有しさらにコスト高にもつながるといった問題が生じることがある。そこで、高い摩耗耐久性が不要な凹部19’の構成材料に比べ、ビッカース硬さが大きい金属材料で上記の曲面部材(凸部18’)を構成することで、上記の問題を回避しつつ、当接面16’との接触部分における高い摩耗耐久性を実現できる。   Since the convex portion 18 'is a portion of the main valve member 2' in contact with the contact surface 16 'of the intermediate member 5', it is desirable that the convex portion 18 'be made of a hard material that is hard to wear. Examples of such a material include a metal material having a large Vickers hardness specified in JIS Z 2244. In the present invention, not only the convex portion 18 'but also the concave portion 19' may be made of such a metal material. However, when the main valve member 2 'is made of such a metal material, there may be a problem that the main valve member 2' has an unnecessarily heavy weight, which leads to an increase in cost. Therefore, by configuring the curved surface member (convex portion 18 ') with a metal material having a higher Vickers hardness than the constituent material of the concave portion 19' which does not require high wear durability, the above problem can be avoided. High wear durability can be realized at the contact portion with the contact surface 16 '.

ここで、曲面部材(凸部18’)の構成材料としては、たとえば、鉄に、炭素、ニッケル、クロム、コバルト等が添加されたいわゆる鋼材を挙げることができる。一方、凹部19’の構成材料としては、こうした鋼材よりもビッカース硬さが小さい鉄やアルミニウム等の金属材料(合金材料含む)や強化プラスチック材料を用いることができる。なお、中間部材5’において、当接面16’を有する部分の材料としては、曲面部材(凸部18’)の構成材料と同様のものを採用することができる。   Here, as a constituent material of the curved surface member (convex portion 18 '), for example, a so-called steel material in which carbon, nickel, chromium, cobalt, or the like is added to iron can be given. On the other hand, as a constituent material of the concave portion 19 ', a metal material (including an alloy material) such as iron or aluminum having a lower Vickers hardness than such a steel material or a reinforced plastic material can be used. In the intermediate member 5 ', the same material as that of the curved surface member (projection 18') can be used as the material of the portion having the contact surface 16 '.

また、図2に示すように、主弁部材2’が、凸部18’を有するとともに弁座13に当接して開口部12を塞ぐ金属製の主弁本体14’と、主弁本体14’の周囲に配置された薄膜状の弾性部材からなり外周の端部が筐体3に固定された膜部15と、を備えたダイヤフラムを有するものであることが好ましい。なお、図2の例では、主弁部材2’がこのようなダイヤフラムを有する好ましい形態の一例として、主弁部材2’それ自体がダイヤフラムとなっている。   As shown in FIG. 2, the main valve member 2 ′ includes a metal main valve body 14 ′ having a projection 18 ′ and abutting against the valve seat 13 to close the opening 12, and a main valve body 14 ′. It is preferable to have a diaphragm provided with a film portion 15 which is formed of a thin film-like elastic member and is fixed to the housing 3 at its outer periphery. In the example of FIG. 2, as an example of a preferred embodiment in which the main valve member 2 'has such a diaphragm, the main valve member 2' itself is a diaphragm.

このようなダイヤフラム(主弁部材2’)には、膜部15の存在により、流体の密閉性を保持しつつ主弁本体14’の当接離間が柔軟に行えるという利点があるが、この利点のため、主弁本体14’がバネ部材4の動きに追従しやすい。このため、上述したような、従来の流体制御弁における、バネ部材の横滑りに伴う主弁部材の位置ずれの問題が特に深刻なものになりやすい。そこで、凸部18’に当接する当接面16’を有する中間部材5’により主弁部材2’をバネ部材4の横滑りに追従しにくくする本実施形態の機構がとりわけ有用となる。   Such a diaphragm (main valve member 2 ′) has an advantage that the presence of the membrane portion 15 allows the main valve main body 14 ′ to flexibly contact and separate while maintaining the fluid tightness. Therefore, the main valve body 14 ′ can easily follow the movement of the spring member 4. For this reason, in the conventional fluid control valve described above, the problem of the displacement of the main valve member due to the sliding of the spring member tends to be particularly serious. Therefore, the mechanism of the present embodiment that makes it difficult for the main valve member 2 ′ to follow the sideslip of the spring member 4 by the intermediate member 5 ′ having the contact surface 16 ′ that contacts the convex portion 18 ′ is particularly useful.

図2の流体制御弁1’は、以上説明した構成要素に加えて、補助バネ6、付勢力調整部材7、およびバネ固定部材8を備えている。これらの構成要素については、図1で説明したのと同一であり、ここではその説明は省略する。また、図2の流体制御弁1’のリリーフ弁(安全弁)としての動作についても、図1で説明したのと同一であるので、ここではその説明は省略する。   2 includes an auxiliary spring 6, an urging force adjusting member 7, and a spring fixing member 8 in addition to the components described above. These components are the same as those described with reference to FIG. 1, and a description thereof will not be repeated. The operation of the fluid control valve 1 'of FIG. 2 as a relief valve (safety valve) is also the same as that described with reference to FIG. 1, and a description thereof will be omitted.

以上の説明では、本発明の流体制御弁の一例として、リリーフ弁(安全弁)として機能する流体制御弁1について説明したが、本発明の流体制御弁は、減圧後の流体の圧力を一定に保つ減圧弁といった、リリーフ弁(安全弁)とは用途や機能が多少異なる様々な弁に適用されてもよい。一般に減圧弁では、ダイヤフラムそれ自体が弁座に当接するのではなく別の部材が弁座に当接に当接しダイヤフラムはそうした別の部材にバネ部材の付勢力を伝達する役割を果たしていることが多い。このような形態の減圧弁においても、ダイヤフラムとバネ部材との間に備えられた本発明の中間部材は、以上説明した実施形態における中間部材5と同様の機能を果たす。この場合、ダイヤフラムや上記の別の部材を含む、流体の流路の開閉に寄与する部材の全体が、本発明にいう「主弁部材」の一例に相当する。   In the above description, the fluid control valve 1 functioning as a relief valve (safety valve) has been described as an example of the fluid control valve of the present invention. However, the fluid control valve of the present invention keeps the pressure of the fluid after the pressure reduction constant. It may be applied to various valves, such as a pressure reducing valve, which have slightly different uses and functions from a relief valve (safety valve). In general, in a pressure reducing valve, the diaphragm itself does not abut the valve seat, but another member abuts against the valve seat, and the diaphragm plays a role of transmitting the urging force of the spring member to such another member. Many. Also in the pressure reducing valve of such a form, the intermediate member of the present invention provided between the diaphragm and the spring member performs the same function as the intermediate member 5 in the embodiment described above. In this case, the whole of the members that contribute to opening and closing of the fluid flow path, including the diaphragm and the other members described above, corresponds to an example of the “main valve member” according to the present invention.

また、以上の説明では、流体制御弁1のユーザが付勢力調整部材7を回転させることで主弁部材2の当接時におけるバネ部材4の長さが調整されていたが、本発明の流体制御弁では、このような手動の調整操作に代えて、ソレノイド等を用いた電磁的な手段(たとえば特許文献1参照)により調整操作が行われる形態が採用されてもよい。   In the above description, the user of the fluid control valve 1 rotates the urging force adjusting member 7 to adjust the length of the spring member 4 when the main valve member 2 abuts. Instead of such a manual adjustment operation, the control valve may adopt a mode in which the adjustment operation is performed by electromagnetic means using a solenoid or the like (for example, see Patent Document 1).

本発明は、バネ部材の横滑りによる主弁部材の位置ずれを抑えた流体制御弁の実現に有用である。   INDUSTRIAL APPLICABILITY The present invention is useful for realizing a fluid control valve that suppresses displacement of a main valve member due to side slippage of a spring member.

1,1’:流体制御弁、2,2’:主弁部材、3:筐体、4:バネ部材、4A:上側部分、4B:下側部分、5,5’:中間部材、6:補助バネ、7:付勢力調整部材、8:バネ固定部材、9A:流体室、9B:収容室、10:空間部、10a:第2ポート、11:連通孔、11a:第1ポート、12:開口部、13:弁座、14,14’:主弁本体、15:膜部、16,16’:当接面、17:中間部材本体、18,18’:凸部、19,19’:凹部、20:主軸、21:フランジ部。 1, 1 ': fluid control valve, 2, 2': main valve member, 3: housing, 4: spring member, 4A: upper portion, 4B: lower portion, 5, 5 ': intermediate member, 6: auxiliary Spring, 7: biasing force adjusting member, 8: spring fixing member, 9A: fluid chamber, 9B: accommodation chamber, 10: space, 10a: second port, 11: communication hole, 11a: first port, 12: opening Part, 13: valve seat, 14, 14 ': main valve main body, 15: membrane part, 16, 16': contact surface, 17: intermediate member main body, 18, 18 ': convex part, 19, 19': concave part , 20: spindle, 21: flange.

Claims (6)

流体が流出入する第1ポートおよび第2ポートと、前記第1ポートに連通するとともに前記第1ポートとは別に開口部を有する連通孔と、前記第2ポートに連通するとともに前記開口部を介して前記連通孔と連通する空間部と、が形成され、前記開口部の周囲に弁座を有する筐体と、
前記弁座に対する当接離間が可能であり、前記弁座への当接時に前記開口部を塞ぎ前記弁座からの離間時に前記開口部を開くことで前記第1ポートと前記第2ポートとの間の流体の流路の閉鎖開放を切り換える主弁部材と、
前記弁座に対する前記主弁部材の当接離間の方向に延在し該延在方向の長さに応じた付勢力を前記主弁部材に与えるバネ部材であって、前記主弁部材が前記弁座に当接している時の前記延在方向の長さがユーザの調整操作により可変なバネ部材と、
前記バネ部材に接続されるとともに前記主弁部材に当接し、前記バネ部材の付勢力を前記主弁部材に伝達しつつ前記弁座に対する前記主弁部材の当接離間の動きに従動して移動する中間部材と、を備え、
前記主弁部材と前記中間部材のうちの一方の部材は、他方の部材側を向いた面上に該他方の部材側に向かって突き出した凸部を有するものであり、該他方の部材は、前記凸部に当接する平坦な当接面を有するものであり、前記中間部材は、前記凸部が前記当接面に沿って相対的に移動自在な態様で該凸部において前記主弁部材に当接するものである流体制御弁。
A first port and a second port through which fluid flows in and out, a communication hole communicating with the first port and having an opening separate from the first port, and a communication port communicating with the second port and through the opening; A space communicating with the communication hole is formed, and a housing having a valve seat around the opening;
Contact and separation with respect to the valve seat are possible, and the first port and the second port are closed by closing the opening at the time of contact with the valve seat and opening the opening at the time of separation from the valve seat. A main valve member for switching between closing and opening of a fluid flow path therebetween;
A spring member that extends in a direction in which the main valve member comes into contact with or separates from the valve seat, and applies an urging force to the main valve member in accordance with the length of the extending direction, wherein the main valve member is the valve; A spring member whose length in the extending direction when in contact with the seat is variable by a user's adjustment operation,
The main valve member is connected to the spring member and abuts on the main valve member. The urging force of the spring member is transmitted to the main valve member, and the main valve member moves following the movement of the main valve member with respect to the valve seat. And an intermediate member,
One of the main valve member and the intermediate member has a protrusion protruding toward the other member on a surface facing the other member, and the other member is The intermediate member has a flat contact surface that comes into contact with the convex portion, and the intermediate member is provided on the main valve member at the convex portion so that the convex portion is relatively movable along the contact surface. The fluid control valve that is in contact.
前記一方の部材は前記中間部材であり前記他方の部材は前記主弁部材であって、前記中間部材は、一方の面が前記バネ部材に接続され他方の面が前記主弁部材の前記当接面に対向する平板状の中間部材本体を有するものであり、該他方の面上に、前記凸部として、先端面が丸みを帯びた曲面となっている凸部が形成されている請求項1に記載の流体制御弁。   The one member is the intermediate member and the other member is the main valve member, and the intermediate member has one surface connected to the spring member and the other surface abutting the main valve member. And a flat-shaped intermediate member main body facing the surface, wherein a convex portion having a rounded tip surface is formed as the convex portion on the other surface. 3. The fluid control valve according to item 1. 前記中間部材本体は前記他方の面に凹部を有するものであり、前記凹部の深さよりも長い厚さを有し該厚さ方向の先端面が丸みを帯びた曲面となっている曲面部材が該先端面とは反対側を前記凹部の底に向けて前記凹部内に嵌め込まれることによって前記凸部は形成されたものである請求項2に記載の流体制御弁。   The intermediate member main body has a concave portion on the other surface, and a curved surface member having a thickness longer than a depth of the concave portion and having a tip end surface in a thickness direction having a rounded curved surface is provided. The fluid control valve according to claim 2, wherein the convex portion is formed by being fitted into the concave portion with the side opposite to the distal end face facing the bottom of the concave portion. 前記曲面部材は、前記凹部の深さよりも長い直径を有する球状の部材である請求項3に記載の流体制御弁。   The fluid control valve according to claim 3, wherein the curved surface member is a spherical member having a diameter longer than a depth of the concave portion. 前記曲面部材は、前記中間部材本体を構成する材料よりも、JIS Z 2244で規定される ビッカース硬さが大きい金属材料で構成されている請求項3又は4に記載の流体制御弁。   5. The fluid control valve according to claim 3, wherein the curved surface member is made of a metal material having a Vickers hardness specified by JIS Z 2244 larger than a material of the intermediate member main body. 前記主弁部材は、前記当接面を有するとともに前記弁座に当接して前記開口部を塞ぐ金属製の主弁本体と、主弁本体の周囲に配置された薄膜状の弾性部材からなり外周の端部が前記筐体に固定された膜部と、を備えたダイヤフラムを有するものである請求項1〜5のいずれかに記載の流体制御弁。   The main valve member includes a metal main valve body having the contact surface and abutting against the valve seat to close the opening, and a thin film-shaped elastic member disposed around the main valve body. The fluid control valve according to any one of claims 1 to 5, wherein the diaphragm includes a diaphragm having an end portion fixed to the housing.
JP2018154726A 2018-08-21 2018-08-21 fluid control valve Active JP7112282B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2018154726A JP7112282B2 (en) 2018-08-21 2018-08-21 fluid control valve

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2018154726A JP7112282B2 (en) 2018-08-21 2018-08-21 fluid control valve

Publications (2)

Publication Number Publication Date
JP2020029883A true JP2020029883A (en) 2020-02-27
JP7112282B2 JP7112282B2 (en) 2022-08-03

Family

ID=69624147

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2018154726A Active JP7112282B2 (en) 2018-08-21 2018-08-21 fluid control valve

Country Status (1)

Country Link
JP (1) JP7112282B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2022134450A (en) * 2021-03-03 2022-09-15 株式会社鷺宮製作所 Pressure regulation valve

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10167U (en) * 1998-02-16 1998-08-11 シーケーディ株式会社 Fluid control valve
JP2005004694A (en) * 2003-06-16 2005-01-06 Ckd Corp Pressure-control valve
JP2007225085A (en) * 2006-02-27 2007-09-06 Nissan Tanaka Corp Pressure regulating valve
WO2008093529A1 (en) * 2007-01-29 2008-08-07 Fujikin Incorporated Fluid controller
US20090294712A1 (en) * 2008-05-30 2009-12-03 South Bend Controls, Inc. High flow proportional valve

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10167U (en) * 1998-02-16 1998-08-11 シーケーディ株式会社 Fluid control valve
JP2005004694A (en) * 2003-06-16 2005-01-06 Ckd Corp Pressure-control valve
JP2007225085A (en) * 2006-02-27 2007-09-06 Nissan Tanaka Corp Pressure regulating valve
WO2008093529A1 (en) * 2007-01-29 2008-08-07 Fujikin Incorporated Fluid controller
US20090294712A1 (en) * 2008-05-30 2009-12-03 South Bend Controls, Inc. High flow proportional valve

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2022134450A (en) * 2021-03-03 2022-09-15 株式会社鷺宮製作所 Pressure regulation valve
JP7406518B2 (en) 2021-03-03 2023-12-27 株式会社鷺宮製作所 pressure regulating valve

Also Published As

Publication number Publication date
JP7112282B2 (en) 2022-08-03

Similar Documents

Publication Publication Date Title
JP4781845B2 (en) Pressure regulating valve
US8408243B2 (en) Valve device
JP5973197B2 (en) Piston-type working fluid pressure actuator and control valve
KR101907283B1 (en) Fluid controller
JP2020029883A (en) Fluid control valve
JP2000242338A (en) Regulator
JP2009026054A (en) Pressure reducing valve
JPWO2020021911A1 (en) Valve device, fluid control device, fluid control method, semiconductor manufacturing device and semiconductor manufacturing method
US10817002B2 (en) Gas valve and gas control device
JP2013206176A (en) Pressure reduction valve for high voltage extraction
WO2012137424A1 (en) Pressure reduction valve
EP3754237B1 (en) Electric valve and manufacturing method therefor
WO2021131631A1 (en) Diaphragm valve, flow rate control device, fluid control device, and semiconductor manufacturing device
JP2007058616A (en) Pressure regulator
WO2017141780A1 (en) Diaphragm valve
JP4440798B2 (en) Diaphragm valve
JP7129096B2 (en) controller
WO2015052863A1 (en) Pressure reducing valve
JP5004702B2 (en) Pressure reducing valve
JP3358147B2 (en) Fluid controller
WO2012118071A1 (en) Fluid control valve
WO2014087996A1 (en) Control valve
JP7089739B2 (en) Controller
JPH0962365A (en) Pressure compensating flow regurating valve having check valve
JP4164016B2 (en) Gas regulator

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20210629

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20220412

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20220530

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20220719

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20220722

R150 Certificate of patent or registration of utility model

Ref document number: 7112282

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150