JP2020028832A - Transportation stage and inkjet device using the same - Google Patents

Abstract

To provide a transportation stage securing movement accuracy in a processing range while suppressing the size of a base in an area where processing is performed in a processing part: and to provide an inkjet device using the transportation stage.SOLUTION: A transportation stage includes: a base part 1 composed of a first separation base 1a and a second separation base 1b disposed adjacent to the first separation base along a first scanning direction 41 while both the bases are made of the same material, and extending along the first scanning direction; a guide 2 disposed on the base part so as to extend along the first scanning direction; a transportation table 3 moving along the guide; a bearing part 12 disposed between the guide and the transportation table supporting the transportation table so as to be movable along the guide; and a driving part 9 moving the transportation table. An area vertically above the first separation base is defined as a first area A, an area supported by the second separation base and other than the first area in the first scanning direction of the guide is defined as a second area B, and the upper surface of the guide is curved vertically downward in a protruding direction toward the second area from the first area.SELECTED DRAWING: Figure 1A

Description

  The present invention relates to a transfer stage and an ink jet device using the same. In particular, the present invention relates to a large-sized transfer stage and an ink jet device using the same.

  In recent years, a method of manufacturing a device using an inkjet apparatus has been receiving attention. An ink jet device has a plurality of nozzles for discharging droplets, and applies droplets to a printing target by discharging droplets from the nozzles while controlling the positional relationship between the nozzles and the printing target. is there.

  As one type of this type of ink jet device, a device provided with a plurality of module heads (in other words, a droplet discharge head having a plurality of discharge ports) which are called a line head and are arranged side by side in the width direction of an object to be printed. There is. By arranging these line heads side by side in the sub-scanning direction, which is a direction orthogonal to the main scanning direction in the same horizontal plane, ink is applied to a wide printing target in a single transport process. can do.

  Further, by mounting a plurality of line heads arranged in the sub-scanning direction also in the main scanning direction, it is possible to collectively print a plurality of types of inks having different colors, for example, in a single transport process. Can be applied.

  According to this configuration, for example, a plurality of types of ink can be collectively applied to a large-sized print target having a size of G4 (680 mm x 880 mm) or more in a single transport process. In addition to the fact that the tact time can be reduced and the drying conditions after ink application can be easily made uniform, there are advantages in the printing process, for example, the ink film thickness can be controlled uniformly.

  However, in recent years, there has been a demand for a further increase in the size of a printing target in order to improve productivity. As the size of the print target increases, the transport distance increases accordingly, and inevitably, the length of the guide that carries the print target and runs in the main scanning direction also needs to be increased. For this reason, a problem arises in that processing and manufacturing cannot be performed with the required accuracy with one member. Similarly, the required size of the base supporting the guide is also increased, and there is a problem that processing and manufacturing cannot be performed with one member. In addition, even if processing and production can be performed with one member, if the size is large, the procurement cost will be extremely high, or there will be problems such as not being able to be transported depending on the traffic laws of each country. It is required to reduce the size of each member.

  In other words, it is desirable to use a stone member that can be processed with high precision and has little thermal deformation for the guide and the base that require high flatness. However, recently, while the size of the printing target is required to be further increased, it is becoming more difficult to procure a large stone member from the viewpoint of resource depletion. Therefore, even if procurement and processing are possible, there is a great disadvantage in terms of cost and procurement delivery time. In addition, since the weight of the apparatus is increased, it may be necessary to reinforce the factory where the apparatus is installed, and the cost is further increased.

  For this reason, a method is disclosed in which the guide rail and the gantry supporting the guide rail are each composed of a plurality of members and have a configuration in which a positioning reference surface is provided and can be combined (for example, Patent Document 1).

JP-A-7-124831

  However, according to the above method, when it is required to perform scanning with high traveling accuracy without vibrating the transfer table, it becomes difficult to secure the flatness of the plurality of bases supporting the guide rails in the height direction. Since it is difficult to secure the flatness of the guide rail in the height direction due to the influence, the traveling accuracy is deteriorated. Further, due to the influence, a step or the like is likely to be generated at a joint portion where a plurality of guide rails are connected, and a problem is likely to occur when the transfer table passes through the joint portion.

  Therefore, for example, in an apparatus such as an ink-jet apparatus that requires the transport table to travel with high precision without vibrating, the position where the ink ejected from the inkjet head lands due to the vibration of the transport table varies. And the problem that a high-resolution printing object cannot be manufactured arises.

  That is, an object of the present invention is to reduce the size of a base in an area where processing is performed in a processing unit to a necessary minimum while ensuring movement accuracy in a processing range, a transfer stage, and an inkjet apparatus using the same. It is to provide.

According to one aspect of the present invention, a first divided base made of the same material and a second divided base arranged adjacent to the first divided base along a first scanning direction are provided. A base portion extending along the first scanning direction;
A guide arranged on the base portion so as to extend along the first scanning direction, the guide having a plurality of guide members;
A transfer table that moves along the guide,
A bearing portion disposed between the guide and the transfer table to movably support the transfer table along the guide;
A driving unit coupled to the transfer table to move the transfer table,
A vertical region of the guide in the first scanning direction in the first scanning direction is defined as a first region, and the guide is supported by the second divisional base and the guide in the first scanning direction. When a region other than the first region is a second region, the upper surface of the guide is curved in a vertically downwardly convex direction from the first region toward the second region,
Provide a transfer stage.

  According to the aspect of the present invention, it is possible to secure the movement accuracy in the processing range while suppressing the size of the base in the region where the processing is performed by the processing unit to the minimum necessary.

FIG. 1 is a schematic view of an inkjet apparatus according to an embodiment, as viewed from above Schematic view of the inkjet device as viewed from the front Schematic diagram showing the arrangement of the bearings of the inkjet device Comparison diagram showing the arrangement of bearings Explanatory drawing showing the arrangement of rotating bearings Schematic diagram of the inkjet device viewed from the side Schematic diagram showing the positional relationship between the inkjet device base and the guide In the embodiment, a conceptual diagram showing a positional relationship among a base, a guide, a transfer table, and a line head in a state where a quasi-reference base is arranged on an auxiliary base. FIG. 7 is a conceptual diagram illustrating a positional relationship among a base, a guide, a transfer table, and a line head in a state where a quasi-reference base is arranged on a height adjustment unit in the embodiment. In the comparative example, in a state where the quasi-reference base is placed on the auxiliary base, a comparison diagram showing a positional relationship among the base, the guide, the transfer table, and the line head. In the comparative example, in a state where the quasi-reference base is arranged on the height adjustment unit, a comparison diagram illustrating a positional relationship among the base, the guide, the transfer table, and the line head. FIG. 4 is a conceptual diagram showing the curvature of the transfer table when there is an inflection point of the guide vertically downward of the transfer table. Conceptual diagram showing the curvature of the transfer table when there is no inflection point of the guide vertically downward of the transfer table Graph showing the analysis result of the reaction force applied to the bearing part when the guide is curved upward Comparison graph showing the analysis results of the reaction force applied to the bearing part when the guide is curved downward Conceptual diagram conceptually showing the amount of deflection of the guide when the transfer table moves to the guide tip In the embodiment, when the conveyance table moves to near the tip of the guide, the conceptual diagram shows that the guide maintains a downward convex curve. In the comparative example, when the transport table moves to the vicinity of the tip of the guide, the conceptual diagram shows that the guide is in a straight state. In the comparative example, when the transport table moves to the vicinity of the distal end of the guide, the guide is deformed into an upwardly convex curve. In a comparative example, a conceptual diagram showing a case where a transport table is assumed to be a rigid body with respect to a transport table on a curved guide. Conceptual diagram showing the maximum amount of deflection when both ends of the transport table in the main scanning direction are simply supported Explanatory drawing showing the configuration of the height adjustment unit

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

(Embodiment 1)
FIG. 1A is a plan view of the inkjet device 10 according to the first embodiment as viewed from the main surface direction of the printing target 6. An overall image of the inkjet device 10 will be described with reference to FIG. 1A.

  As shown in FIG. 1A, the inkjet device 10 includes at least a transport stage 20, a gate-shaped gantry 4 as an example of a support member, and a line head 5 as an example of a print head.

  The transfer stage 20 includes at least the base unit 1, the guide 2, the transfer table 3, the bearing unit 12, and the drive unit 9.

  The base unit 1 is configured by a rectangular parallelepiped having a long rectangular planar shape in a main scanning direction (for example, an example of a first scanning direction) 41.

  The gantry 4 has a portal shape in front, and is fixed to a predetermined position, for example, an intermediate position of the base 1 so as to straddle in the width direction of the base 1 when viewed in plan.

  The guide 2 is fixed to the upper surface of the base 1 along the longitudinal direction of the base 1, that is, along the main scanning direction 41. As an example, the guide 2 is formed of a rectangular parallelepiped member having a rectangular cross section along a direction orthogonal to the main scanning direction 41. The guide 2 has at least one, and preferably a plurality of rail-shaped connecting plural guide members 2a and 2b arranged on the base 1 so as to extend along the first scanning direction 41. It is composed of a guide member 2c.

  The rectangular transport table 3 can be transported in the main scanning direction 41 of the base 1 while the lower surface thereof is guided by the guide 2. A printing object 6 such as a substrate can be held on the upper surface of the transport table 3. The transport table 3 has a bending rigidity lower than the bending rigidity of the guide 2 along the guide 2.

  The line head 5 is supported by a gantry 4 connected to the base 1. The line head 5 ejects ink toward the transport table 3 at a timing when the transport table 3 passes below the line head 5 in the main scanning direction 41. That is, at the same time as the transport table 3 moves from the left side to the right side in FIG. 1A below the line head 5 along the main scanning direction 41, the ink is ejected from the line head 5 and the print held on the upper surface of the transport table 3. The ink is applied to the application area of the target object 6.

  In this configuration, as shown in FIG. 1A, the line head 5 has a configuration in which two types of line heads 5 are arranged on both sides of the gantry 4 (ie, the left and right sides of the gantry 4 in FIG. 1A). However, only one line head 5 may be arranged in the gantry 4, or two line gantry 4 may be arranged, and a total of four line heads 5 may be arranged on both surfaces of each gantry 4. good. The configuration such as the number and arrangement of the line heads 5 may be determined by the processing to be performed by the line heads 5 on the print target 6.

  In the following description, the direction in which the printing target 6 is transported is referred to as a main scanning direction 41, and a direction perpendicular to the main scanning direction 41 in the same horizontal plane as the main scanning direction 41 is referred to as a sub-scanning direction (for example, the second scanning direction). An example) 42, and the main surface direction of the print target 6, that is, the vertical direction in general, is defined as an up-down direction 43 (see FIG. 1B).

  In order to drive the transport table 3 in the main scanning direction 41, at least one or more driving units 9 are arranged on the base unit 1 along the main scanning direction 41 and connected to the transport table 3. The sheet can be transported in the main scanning direction 41. As an example of the driving unit 9, in FIGS. 1A and 1B, two driving units 9 are arranged on the base unit 1 along the main scanning direction 41 near both ends in the width direction. Each drive unit 9 may be a linear motor, or may be a ball screw or the like connected to a rotary motor, but in the configuration of the present embodiment, a linear motor that is easy to have a long configuration is used. Used.

  FIG. 1B is a cross-sectional view of the inkjet device 10 as viewed from a cross section taken along line YY of FIG. 1A.

  As shown in FIG. 1B, the guide 2 is fixed on the base 1. The base unit 1 is installed via a frame unit 7 that holds the base unit 1 so as not to be directly affected by unevenness of the floor surface 21, that is, unevenness.

  In addition, between the frame part 7 and the floor surface 21, and between the frame part 7 and the base part 1, a plurality of height adjustment parts 8 capable of performing adjustment in the height direction independently. It is better to support. With such a configuration, the plurality of height adjustment units 8 are used to adjust the flatness of the upper surface of the base unit 1 according to the floor surface 21 on which the base unit 1 of the inkjet device 10 is installed. 1 can be adjusted in height.

  In addition, the base part 1 may be directly held via the height adjustment part 8 without using the frame part 7.

  The height adjusting section 8 is, for example, a so-called leveling block. As shown in FIG. 12, when a wedge mechanism 18 is used, the height adjusting section 8 is mounted in a lateral direction between a plurality of blocks 18a and 18b on a mounting base 18e. By pushing and pulling the wedge 18d in the horizontal direction by the forward / reverse rotation of the bolt 18c, the height of the blocks 18a and 18b can be changed.

  At least one or more bearings 12 are connected between the guide 2 and the transport table 3. More specifically, a bearing 12 is disposed between the upper surface of the guide 2 and the lower surface of the transfer table 3, for example, on the transfer table 3, and the transfer table 3 is slidably supported on the guide 2 via the bearing 12. Have been.

  The bearing unit 12 supports the upper surface of the guide 2 or the upper surface of the guide 2 in order to support the own weight of the transfer table 3 and prevent rotation in the rotation direction (pitching direction) about the sub-scanning direction 42. A bearing portion 12A supported on both the lower surface of the table 3 and a side surface of the guide 2 for preventing the transport table 3 from meandering in the horizontal direction and rotating in the rotation direction (yaw direction) around the vertical direction. It can be configured with one or both of the supported bearing portion 12B.

  Note that the bearing portion 12 may be disposed only above the guide 2 and slidably supported to support the transport table 3 by its own weight and prevent rotation in the pitching direction. In this configuration, the upper surface of the guide 2 is slidably supported to support the transport table 3 by its own weight and to prevent rotation in the pitching direction, thereby preventing the transport table 3 from rotating in the horizontal meandering and yawing directions. For this purpose, both sides of the guide 2 in the sub-scanning direction 42 are slidably supported. The details will be described later.

  In addition, in order to realize high-precision and low-vibration conveyance, a gas such as air is ejected from the bearing portion 12 toward the guide 2 so that the bearing portion 12 and the guide 2 are not separated from each other. It is desirable to use hydrostatic bearings that face each other in contact. When the bearing unit 12 is a hydrostatic bearing, a pad of a self-generated or orifice throttle may be used, or a groove may be cut on the back surface of the transfer table 3 to form a surface throttle. However, in this configuration, a pad of a porous throttle is used in order to make the vibration less likely to occur.

  When the bearing portion 12 is a hydrostatic bearing, the bearing stiffness changes depending on the amount of air floating from the guide 2 due to the air jetted from the bearing portion 12, so that the bearing is designed so that the bearing stiffness is the highest. It is desirable. In the present configuration, as an example, the intended floating amount is set to 10 μm at which the rigidity of the bearing portion 12 is the highest.

  FIG. 2A is a view of the transport table 3 as viewed from the arrow ZZ in FIG. 1B. FIG. 2A shows an arrangement configuration of the bearing portion 12 in the present configuration. In addition, although it does not actually appear in the cross-sectional view, the guide member 2c is also virtually shown by a broken line for ease of explanation.

  In this configuration, in order to support the transport table 3 under its own weight and to prevent rotation in the pitching direction, the transport table 3 has a bearing portion 12A slidably supported on the upper surface of the guide member 2c. In order to prevent the meandering in the horizontal direction and the rotation in the yawing direction of the transfer table 3, the transfer table 3 has bearing portions 12B that support both side surfaces of the guide member 2c.

  Note that the total pressure receiving area of the bearing portion 12A is determined by the load capacity of the bearing portion 12A and the weight of the transport table 3, but the arrangement of the bearing portion 12A is, as shown in FIG. May be arranged intensively at both ends. 2B, the rigidity of the transfer table 3 in the pitching direction can be increased. However, in the configuration of FIG. 2B, when the size of the transport table 3 is large, a problem occurs in that the transport table 3 easily bends in a space where the bearing unit 12 does not exist. It is better to use them properly when it is desired to increase the rigidity of the rotation, and when it is desired to suppress the deflection of the transport table 3.

  In the present configuration, as an example, the transport table 3 is configured as a substantially rectangular parallelepiped having a size in the main scanning direction 41 of 3.2 m, a size in the sub-scanning direction 42 of 3.2 m, and a thickness of about 120 mm. When the number of support points by 12A is small, the transport table 3 itself is easily bent. Therefore, in order to suppress the deflection of the transport table 3, as an example, in each guide member 2c, a bearing portion 12A having a square surface having a pressure receiving surface of 120 mm square is provided at a plurality of points in the main scanning direction 41 of each guide member 2c ( (For example, 5 points). Similarly, in order to suppress the deflection of the transport table 3, a configuration is adopted in which a plurality of points (for example, three points) are received in the sub-scanning direction 42. That is, as shown in FIG. 2A, the bearing section 12A has a configuration in which five rows in the main scanning direction 41 and three rows in the sub-scanning direction 42, that is, a total of 15 pieces are arranged on the back surface of the transport table 3.

  As an example, the width of the upper surface of the guide member 2c in the sub-scanning direction 42 is set to 150 mm, and three rows are arranged at equal intervals in the sub-scanning direction 42 in accordance with the arrangement of the bearing portion 12A. In other words, the configuration in which the guide members 2c are arranged in three or more rows at intervals in the sub-scanning direction 42 makes it possible to reduce the number of bearings in comparison with a generally used configuration in which the guide members 2c are arranged in two rows at intervals. The interval supported by the section 12 can be reduced, and the deflection of the transport table 3 can be suppressed. In addition, as described later, in this configuration, the thickness of the transfer table 3 is made smaller than the thickness of the transfer table 3 which is generally used, the bending rigidity becomes small, and the transfer table 3 is easily bent. This configuration in which at least three or more 2c are arranged in the sub-scanning direction 42 is effective.

  Further, the bearing portion 12B also has a configuration in which the pressure receiving area facing the side surface of the guide member 2c is further increased and the bearing portion 12B is arranged at both ends of the transport table 3 in the main scanning direction 41 to increase the rigidity in the yawing direction. I can do it. However, when the pressure receiving area of the bearing portion 12B facing the side surface of the guide member 2c is increased, the height of the guide member 2c is required correspondingly, and there is a problem that the device weight and the device size increase.

  Therefore, in the present configuration, as an example, the bearing portion 12 </ b> B having a square surface having a pressure receiving surface of 90 mm square is configured to support both side surfaces of the guide member 2 c only at the center of the transport table 3. In addition, the height of the guide member 2c is set to 120 mm, for example, in accordance with the arrangement of the bearing portion 12B.

  In this configuration, the drive units 9 are arranged in two rows near both ends in the sub-scanning direction 42 of the transport table 3 and are driven biaxially. Although not shown in the drawings, a control structure is provided in which the two axes can be individually finely moved during traveling and when stopped to correct the position in the yawing direction. With such a configuration, the meandering in the horizontal direction and the rotation in the yawing direction of the transport table 3 are suppressed.

  Note that, in the above configuration, in order to prevent the bearing portion 12B of the hydrostatic bearing, which is originally opposed to the guide member 2c in a non-contact manner, from contacting the guide member 2c due to the driving force of the driving portion 9, the transfer table 3 is provided. It is preferable to provide the rotation bearing 13 at the center. As shown in FIG. 2C, the rotary bearing portion 13 is disposed on the lower surface of the central portion of the transfer table 3 and configured with a ring-shaped bearing member. It is composed of a rotating bearing support portion 13a and a bearing portion 12A, and a rotating bearing body portion 13b having a U-shaped vertical section. The transport table 3 can be freely rotated around the rotation axis of the rotary bearing support 13a by the rotary bearing support 13a with respect to the rotary bearing main body 13b. With such a configuration, even if the transport table 3 slightly rotates with respect to the guide 2 due to the variation of the two axes that intersect, the rotation can be absorbed by the rotary bearing 13, and the bearing 12 has no influence. You can avoid receiving it.

  It is preferable that the drive unit 9 has a self-position grasping function such as a linear scale. However, when there is a possibility that the self-position grasping function such as a linear scale expands and contracts due to a temperature change, the respective linear scale values are measured by laser measurement. It is preferable to perform self-position correction while constantly checking with the result of (1).

  Next, the configuration of the base 1 and the guide 2 will be mainly described with reference to FIGS. 3A and 3B.

  FIG. 3A is a cross-sectional view taken along line XX of FIG. 1A. As shown in FIG. 3A, the base 1 is located at a predetermined position in the main scanning direction 41 of the guide 2, for example, at the center. The base unit 1 includes at least a main reference base 1a and an auxiliary base 1b, and preferably includes a main reference base 1a, an auxiliary base 1b, and at least one or more quasi-reference bases 1c. It consists of. As an example, in FIG. 3A, in the main scanning direction 41, auxiliary bases 1b are arranged adjacent to both sides of the main reference base 1a. A quasi-reference base 1c is arranged on each auxiliary base 1b.

  The main reference base 1a is made of the same material. The auxiliary base 1b is formed of a material different from the material of the main reference base 1a, and is disposed so as to be connected to both ends in the main scanning direction 41 of the main reference base 1a. The quasi-reference base 1c is made of the same material as the main reference base 1a, and separates from the main reference base 1a without contacting the main reference base 1a. It is located on the opposite end side.

In the present configuration, as an example, the main reference base 1a and the quasi-reference base 1c are each made of a stone material. An example of a stone material is granite.
As an example, the auxiliary base 1b is made of an iron-based material, that is, a steel material that has a larger coefficient of thermal expansion than a stone material, is likely to be thermally deformed, and has a low processing accuracy, but is easy to reduce in weight and inexpensive. . The main reference base 1a and the quasi-reference base 1c are each formed of a substantially rectangular parallelepiped and provided with a desired cavity for weight reduction, while the auxiliary base 1b has a frame structure.

  The auxiliary base 1b can be easily formed and adjusted with high accuracy by using a stone material, similarly to the main reference base 1a and the quasi-reference base 1c, but the weight and cost increase. In the present configuration, as will be described later, the accuracy is not important in the auxiliary base 1b. For example, as described above, the main reference base 1a and the quasi-reference base 1c are made of a stone material, and the auxiliary base 1b is It is made of iron-based material. Note that, as an example, the guide 2 that requires flatness is also configured to use a stone material.

  The auxiliary base 1b does not directly support the guide 2 on the upper surface of the auxiliary base 1b, but indirectly supports the guide 2 via the height adjusting unit 8a. As will be described later, in this configuration, the upper surface of the guide 2 on the auxiliary base 1b does not require a high flatness as compared with the upper surface of the guide 2 on the upper part of the main reference base 1a, and the guide 2 has a desired curvature. It has a shape. Therefore, in order to easily adjust the guide 2 to have a desired curved shape, the guide 2 is discontinuously supported in the main scanning direction 41 via the height adjustment unit 8a at the upper part of the auxiliary base 1b. I do. The height adjusting section 8a is a member similar to the height adjusting section 8 as shown in FIG.

  The guide 2 may be directly supported on the upper surface of the auxiliary base 1b without the intervention of the height adjusting portion 8a. In the following description, the height adjustment unit 8a may be described as a part of the member that forms the auxiliary base 1b.

  Since the constituent materials are different from each other, the auxiliary base 1b has a larger coefficient of thermal expansion than the guide 2. For this reason, if the auxiliary base 1b and the guide 2 are immovably fixed and completely constrained using screws or the like, the guide 2 may be distorted due to thermal expansion of the auxiliary base 1b. Therefore, the auxiliary base 1b and the guide 2 need not be completely restrained to be fixed relative to each other by using a screw or the like, but should be a sliding constraint that supports only the own weight of the guide 2 and can relatively move. good. That is, the auxiliary base 1b and the guide 2 are not fastened with screws or the like to restrict in all directions. For example, the height adjustment unit 8a is attached to the auxiliary base 1b with the main scanning direction 41 and the sub-scanning direction orthogonal to each other by screws. The guide 2 restricts all three directions of 42 and the vertical direction 43, and the guide 2 simply supports the own weight of the guide 2 by the height adjusting portion 8a without interposing a screw or the like on the height adjusting portion 8a. Thus, the contact surface between the height adjustment unit 8a and the guide 2 can slide relative to each other by making the relative movement along the main scanning direction 41 possible.

  With such a configuration, even when the auxiliary base 1b expands and contracts due to a change in ambient temperature, it is possible to prevent the guide 2 from being distorted due to the relative movement between the auxiliary base 1b and the guide 2, and to prevent the auxiliary base 1b from being distorted. The load on the guide 2 from the table 1b side is reduced. Although the flatness of the upper surface of the guide 2 may be deteriorated due to expansion and contraction of the auxiliary base 1b, the flatness of the upper surface of the guide 2 is not important at the upper part of the auxiliary base 1b, as described later. Configuration. The height adjusting unit 8a may have a passive passive rotation mechanism. With such a configuration, even when the angle of the facing surface between the auxiliary base 1b and the guide 2 changes mainly due to thermal deformation of the auxiliary base 1b, the auxiliary base 1b and the guide 2 The guide 2 can be made to be less likely to be distorted by changing and following the angle of the facing surface of the guide 2.

  On the other hand, since the same stone material is used for the main reference base 1a and the guide 2, there is little possibility of distortion due to thermal deformation, and the main reference base 1a, whose plane is secured with high precision, In order to maintain the flatness of the guide 2 with high accuracy by firmly fastening the guide 2, the main reference base 1a and the guide 2 are fastened via screws as an example. The quasi-reference base 1c and the guide 2 are also quasi-reference bases in order to prevent the guide 2 from meandering in the sub-scanning direction 42 and facilitate adjustment in the height direction (that is, the vertical direction). 1c and the guide 2 are configured to be fastened via screws as an example.

  FIG. 3B is a plan view of the base 1 and the guide 2 as viewed from the main surface direction of the printing target 6, that is, a view as viewed vertically downward.

  The guide 2 is installed so as to straddle the main reference base 1a and the quasi-reference base 1c along the main scanning direction 41, and the weight of the guide 2 is supported by the main reference base 1a and the quasi-reference base 1c. Have been. As an example, the guide 2 may include a plurality of rail-shaped guide members 2c extending along the main scanning direction 41 so as to straddle the main reference base 1a and the quasi-reference base 1c, and are parallel to each other. it can. The weight of the guide 2 is also supported by the auxiliary base 1b through the quasi-reference base 1c and the height adjusting unit 8a. The auxiliary base 1b and the guide 2 do not directly contact each other, and the base 1 may be directly supported only by the main reference base 1a and the quasi-reference base 1c.

  In the following description, as shown in FIG. 3B, a region above the main reference base 1a in the vertical direction is referred to as a first region A, and a region other than the first region A, that is, the quasi-reference base 1c or the auxiliary base. The area above the table 1b or both in the vertical direction is defined as a second area B.

  In the present configuration, the guides 2 are composed of guide members 2c arranged in parallel in three rows at intervals in the sub-scanning direction. It is desirable that the heights of the upper surfaces of these three rows of guide members 2c be the same as much as possible at least in the first region A. With such a configuration, rotation in the rotation direction (rolling direction) around the main scanning direction 41 can be suppressed. At this time, if only the main reference base 1a and the auxiliary base 1b are configured, the difficulty of adjusting the heights of the upper surfaces of the three rows of guide members 2c to the same level increases.

  Therefore, in this configuration, the quasi-reference base 1c is provided at a position apart from the main reference base 1a. As an example, the length of the main reference base 1a in the main scanning direction 41 is 4 m, the length of the base 1 including the main reference bases 1a to 1c in the main scanning direction 41 is 13 m, and the main scanning of the base 1c is 13 m. The length of the direction 41 is 0.3 m.

  When the height of the guide member 2c can be adjusted only with the main reference base 1a and the auxiliary base 1b, the guide member 2c is mainly used as the main reference base 1a without using the quasi-reference base 1c. It may be configured to be supported only by the auxiliary base 1b.

  In the above description, the quasi-reference base 1c is included in the auxiliary base 1b, and the quasi-reference base 1c has the same meaning even when the auxiliary base 1b is combined with the auxiliary base 1b.

  It is preferable that each guide member 2c is formed of one member in the main scanning direction 41. For example, the size of the printing target is G8 (that is, 2200 mm × 2400 mm) or more. Is large, it is difficult to procure and process the material because the guide member 2c is long. For this reason, as the guide member 2c, it is preferable to use a plurality of rail-shaped divided guide members 2a and 2b connected along the main scanning direction 41.

  In the present configuration, as an example, the required length of the guide member 2c is 12.5 m, and it is difficult to process with one member. Therefore, each of the three guide members 2c is divided into two in the main scanning direction 41. It is assumed that the guide members 2a and 2b are formed.

  At this time, the joint 14 between the divided guide members 2a and 2b is formed, and the joint 14 is desirably in the first area A. With such a configuration, a configuration in which a step is hardly generated at the joint 14 can be achieved. That is, since the guide members 2a and 2b can be processed to approximately the same height by simultaneous processing or the like, whether or not a step is likely to occur at the joint 14 has a greater effect on the flatness of the base 1 receiving the guide members 2a and 2b. receive. In the first region A, the flatness of the base 1 can be increased, so that the step 14 is less likely to be generated.

  It is preferable that the position coordinates of the plurality of joints 14 in the main scanning direction 41 be different from each other. With such a configuration, it is possible to prevent the plurality of bearings 12 from passing through the joint 14 along the main scanning direction 41 at the same time, and to suppress the vibration of the transport table 3.

  In the seam 14, the gap in the main scanning direction 41 is filled with a sealing material having a smaller longitudinal modulus than the material of the guide 2, and the sealing material is located at a position lower than the upper surface of the guide member 2 c in the seam 14. It is desirable to be arranged. With such a configuration, it is possible to prevent the air ejected from the bearing portion 12 from leaking from the gap at the joint 14 and becoming a vibration source of the transfer table 3. An example of the encapsulant is wax.

  4A to 5B are conceptual diagrams showing the positional relationship among the base 1, the guide 2, the transport table 3, and the line head 5. 4A and 4B show this embodiment, and FIGS. 5A and 5B show comparative examples. The difference between the two is that the guide 2 curves in a vertically downward convex shape in FIGS. 4A and 4B, whereas the guide 2 curves in a vertical upward convex shape in FIGS. 5A and 5B. This is the configuration. 4A and 5A show a configuration in which the lower part of the quasi-reference base 1c is supported by the auxiliary base 1b, whereas FIGS. 4B and 5B show a lower part of the quasi-reference base 1c which is not supported by the auxiliary base 1b. In addition, it is configured to pass through the auxiliary base 1b and be supported by the height adjusting unit 8.

As described above, the main reference base 1a and the quasi-reference base 1c are made of a stone material. However, the auxiliary base 1b has a larger thermal expansion coefficient than the stone material, so that thermal deformation easily occurs and processing accuracy is also increased. Uses an iron-based material that is relatively hard to put out. Therefore, even if the flatness of the upper surface of the guide 2 can be obtained with high accuracy in the first region A, it is difficult to obtain the flatness of the upper surface of the guide 2 similarly to the second region B. Further, in the second region B, the auxiliary base 1b is easily deformed even by a change in ambient temperature, so that the flatness of the upper surface of the guide 2 can be reduced to the second region B as in the first region A. It is difficult to get out. In other words, guide 2 of the upper surface and the height Tr ₂ height difference between the height Tr ₁ of the upper surface of the guide 2 in the first region _{A ΔTr (= Tr 2 -Tr 1} ) is likely to occur in the second region B. For this purpose, for example, as shown in FIGS. 4A and 4B, the guide 2 is curved in a downwardly convex direction, and as shown in FIGS. 5A and 5B, the guide 2 is curved in an upwardly convex direction. , Or both.

  However, in this configuration, the transport table 3 is configured to be deformed along the guide 2 by making the bending rigidity value of the transport table 3 in the pitching direction smaller than the bending rigidity value of the guide 2 in the pitching direction. With this configuration, even if the guide 2 is curved in the second area B, in the lower area where the line head 5 is arranged, that is, in the first area A, the transport table 3 The configuration can ensure the flatness of the upper surface.

  That is, when the inflection point 15 of the guide 2 curved downward in the vertical direction of the transport table 3 exists, the deflection amount of the transport table 3 is determined by the inflection point of the guide 2 curved downward in the vertical direction of the transport table 3. It is configured to be larger than the amount of deflection of the transport table 3 when 15 does not exist.

As shown in FIG. 6A, when the transfer table 3 supported on the curved guide 2 via the bearing unit 12 is viewed in a cross section including the axis in the main scanning direction 41 and the vertical direction, as shown in FIG. Both ends of the transfer table 3 in the main scanning direction 41 are connected by a straight line 3x, and the maximum length from the straight line 3x to the upper surface of the transfer table 3 is defined as a deflection amount ΔT. As shown in FIG. 6A, since the bending stiffness value of the conveyance table 3 in the pitching direction is smaller than the bending stiffness value of the guide 2 in the pitching direction, the inflection point 15 of the curved guide 2 is When the transfer table 3 exists downward, the transport table 3 is curved, and the deflection amount ΔT increases. However, as shown in FIG. 6B, when the inflection point 15 of the guide 2 curved downward in the vertical direction of the transport table 3 does not exist, a slight bending occurs in a portion where the bearing portion 12 does not exist, but the amount of the bending is generated. ΔT is much smaller than ΔT ₁ when there is an inflection point 15 of the guide 2 that is curved downward in the vertical direction of the transport table 3. For easy understanding, the amount of deflection ΔT is exaggerated in FIG. 6B.

  With the above configuration, even when the guide 2 is curved in the second area B, in the lower area where the line head 5 is arranged, that is, in the first area A, the transport table 3 is located on the upper surface of the guide 2. Since the shape follows the shape, the upper surface of the transport table 3 can maintain a highly accurate flatness. Therefore, the accuracy of the second region B in the auxiliary base 1b is not important, and it is important to process and adjust the main reference base 1a with high accuracy. Therefore, as described above, for the purpose of weight reduction and cost reduction, for example, the main reference base 1a is made of a stone material that can be easily processed with high precision, and the auxiliary base 1b is reduced in weight and cost. As described above, in the first region A, the flatness of the upper surface of the transfer table 3 can be maintained with high accuracy while employing a configuration using an easy iron-based material.

  4A and 4B, the line head 5 is preferably disposed in the first area A. With such a configuration, it is possible to discharge ink from the line head 5 to the transport table 3 in a state where the upper surface maintains high-precision flatness, and print the ink on the transport table 3 It is possible to discharge accurately at a target position.

  In this configuration, the line head 5 is fixed to the gantry 4, but may be, for example, a cantilever arm instead of the gantry 4, and a space where the transfer table 3 passes between the guide 2 and the line head 5. 22.

  Although the line head 5 is an example of a processing unit, a processing unit that performs predetermined processing other than printing may be used instead of the line head 5.

  The quasi-reference base 1c may be installed on the upper part of the auxiliary base 1b as shown in FIG. 4A. However, as shown in FIG. 4B or FIG. It may be installed directly on the adjustment unit 8. With the latter configuration, the quasi-reference base 1c can be easily machined and adjusted with high accuracy, but the weight and cost increase accordingly. In this configuration, as shown in FIGS. 4A and 5A, the quasi-reference base 1c is installed above the auxiliary base 1b.

  As described above, in the present configuration, the guide 2 may be curved, but it is desirable that the direction and amount of bending be within an appropriate range.

  Hereinafter, a direction in which the guide 2 bends and an appropriate range in the amount of bending will be described with reference to FIGS. 7A to 9C.

The amount of bending of the guide 2 is determined by the maximum value ΔTr of the height difference between the height Tr ₁ of the upper surface of the guide 2 in the first region A and the height Tr _{2 of the} upper surface of the guide 2 in the second region B (see FIGS. 4B). Therefore, by designing the maximum value ΔTr of the height difference to a desired value, the bending amount of the guide 2 can be set to a desired value.

  FIGS. 7A and 7B show that the transport table 3 moves in the main scanning direction on the guide 2 in which one end of the guide 2 is curved to a position higher or lower than the center of the guide 2 by, for example, ± 100 μm. The reaction force applied to the bearing portion 12 when the portion corresponding to half of the length along 41 is in the first region A and the portion corresponding to the other half is in the second region B is determined by the finite element method. 2 shows the results of analysis using.

  In addition, in a state where the reaction force applied to the bearing portion 12 varies, for example, in a state where the reaction force is concentrated on one bearing portion 12, the floating amount of the corresponding bearing portion 12 fluctuates in a decreasing direction. , Which leads to the vibration of the transfer table 3. The reason will be described below.

  As described above, since the bending stiffness value of the conveying table 3 in the pitching direction is smaller than the bending stiffness value of the guide 2 in the pitching direction, if there is nothing between the guide 2 and the conveying table 3, the basic The transport table 3 tends to deform along the guide 2. However, since the bearing portion 12 is interposed between the guide 2 and the transfer table 3, when the reaction force applied to the bearing portion 12 is not uniform, the floating amount in each bearing portion 12 changes to balance the forces. Keep. For this reason, the floating amount in each bearing part 12 changes dynamically, which leads to vibration of the transport table 3. Therefore, it is desirable that the reaction force applied to the bearing portion 12 be uniform in a state where the transport table 3 is deformed along the guide 2.

  As shown in FIG. 7A, when the guide 2 is warped upward in the vertical direction toward the tip (for example, the right end in FIG. 7A) in the main scanning direction 41, that is, the guide 2 is convex downward in the vertical direction. When curved in the direction, the reaction force applied to the five first to fifth bearing portions 12a to 12e is largest in the second bearing portion 12b and smallest in the third bearing portion 12c. The difference is about 5%.

  On the other hand, as shown in FIG. 7B which is a comparative example, when the guide 2 is hanging vertically downward toward the tip of the main scanning direction 41 (for example, the right end in FIG. 7A), that is, the guide 2 is vertically In the case where the first and fifth bearing portions 12a to 12e are curved in the upwardly convex direction, the reaction force applied to the five first to fifth bearing portions 12a to 12e is the largest in the third bearing portion 12c and the largest in the second bearing portion 12b. The difference is about 10%. That is, in the case of FIG. 7B in which the upper surface of the guide 2 is curved in the upwardly convex direction, it is twice or more as compared with the case of FIG. 7A in which the upper surface of the guide 2 is curved in the downwardly convex direction. , The variation of the reaction force is large.

  The reason is that, when the upper surface of the guide 2 is curved in a downwardly convex direction, the transport table 3 is first supported at two points at both ends in the main scanning direction 41 and then moved by its own weight. It becomes a state in which the self-weight part from which the center part hangs is supported by another bearing part 12. On the other hand, when the guide 2 is curved in the upwardly convex direction, the transport table 3 first tries to support at one of the inflection points 15 of the guide 2 that is curved upwardly, This is because the load tends to concentrate on the bearing 12 near the bending point 15.

  As described above, when the guide 2 is curved in the downwardly convex direction in the vertical direction, the load applied to the bearing portion 12 is greater than when the guide 2 is curved in the upwardly convex direction in the vertical direction. The present inventors have discovered that the balance of the transfer table 3 is improved and the vibration of the transfer table 3 is hardly generated.

  Therefore, on a coordinate axis whose vertical direction is a vertical direction from the upper surface of the guide 2 in the first region A, the maximum value of the upper surface coordinates of the guide 2 in the second region B is the same as the upper surface coordinate of the guide 2 in the first region A. A configuration in which the guide 2 is disposed on the base 1 so that the guide 2 is curved in a downwardly convex direction from the first area A toward the upper side of the second area B by making the value larger than the maximum value. Good to do.

  Next, an appropriate value of the bending amount of the guide 2 will be described.

  As described above, the guide 2 is desirably curved in a downwardly convex direction. However, when the transport table 3 moves to near the tip of the guide 2, the guide 2 cancels the downwardly curved direction. Deformation in the direction, that is, the direction hanging down.

  FIG. 8 shows that when the transport table 3 moves to the vicinity of the tip of the guide 2 (for example, the right end of FIG. 8), the distal end of the guide 2 (for example, the right end of FIG. 8) is affected by the weight of the transport table 3. FIG. 9 is a conceptual diagram showing a state where the guide hangs downward by a height ΔTb and deforms like a guide 2 </ b> A indicated by a dotted line. That is, for example, when the guide 2 is curved in a downwardly convex direction as shown by a solid line in FIG. 8 and the transport table 3 moves to near the tip of the guide 2, the tip of the guide 2 (for example, FIG. The right end portion) is deformed in such a direction as to cancel the downward convex curvature.

  FIGS. 9A to 9C show the leading end of the guide 2 (for example, FIG. 8) due to the effect of the weight of the transport table 3 when the transport table 3 moves to the vicinity of the tip of the guide 2 (for example, the right end of FIGS. 9A to 9C). FIG. 3 is a conceptual diagram showing a state in which the right end of the image is deformed. Note that FIG. 9A is the present embodiment, and FIGS. 9B and 9C are comparative examples, respectively.

  As shown in FIG. 9A of the present embodiment, the amount of deflection of the guide 2 when the transport table 3 moves to the tip of the guide 2 is equal to the maximum value of the height of the upper surface of the guide 2 in the first area A. When the difference from the maximum value of the height of the upper surface of the guide 2 in the two regions B is smaller, the guide 2 keeps a state of being curved in a downwardly convex direction.

  On the other hand, as shown in FIG. 9B which is a comparative example, the amount of deflection when the transport table 3 moves to the tip of the guide 2 is equal to the maximum value of the height of the upper surface of the guide 2 in the first area A and the second area. When the difference from the maximum value of the height of the upper surface of the guide 2 in B is equal, the curvature of the guide 2 is eliminated, and the guide 2 becomes straight along the main scanning direction 41.

  Further, as shown in FIG. 9C as a comparative example, the amount of deflection when the transport table 3 moves to the tip of the guide 2 is equal to the maximum value of the height of the upper surface of the guide 2 in the first area A and the second area B. Is larger than the maximum value of the height of the upper surface of the guide 2 in the above, the guide 2 is curved in a convex upward direction.

  9A to 9C, ideally, as shown in FIG. 9B, a state in which the guide 2 is straight when the transport table 3 is moved to the distal end of the guide 2 is the first area A. The maximum value of the height difference between the height of the upper surface of the guide 2 and the height of the upper surface of the guide 2 in the second region B is the same as the amount of deflection when the transport table 3 moves to the tip of the guide 2. Adjusting can be very difficult. Further, if the adjustment is erroneously made even a little, the state shown in FIG.

  Therefore, it is desirable to surely create the state shown in FIG. 9A, and the maximum value of the height of the upper surface of the guide 2 in the first area A on a coordinate axis whose vertical direction is a vertical direction from the upper surface of the guide 2 in the first area A And the maximum value of the height of the upper surface of the guide 2 in the second region B is set to be larger than the amount of deflection when the transfer table 3 is moved to the tip of the guide 2. The arrangement arranged in the section 1 is good. With such a configuration, even when the transport table 3 moves to the tip of the guide 2, the guide 2 can maintain a state of being curved in a downwardly convex direction.

  Similarly, the auxiliary base 1b is made of an iron-based material that has a larger coefficient of thermal expansion than a stone material and is liable to be thermally deformed. For this reason, it is conceivable that the upper surface height of the quasi-reference base 1c may change due to a change in the surrounding temperature. However, the guide 2 may be bent in a downwardly convex direction due to an assumed surrounding temperature change. The maximum value of the upper surface coordinates of the guide 2 in the first region A and the maximum value of the upper surface coordinates of the guide 2 in the second region B are set so that the guide 2 does not change to a state of being curved in a convex upward direction. Good to decide the difference.

  Similarly, in consideration of both the amount of deflection when the transport table 3 moves to the tip of the guide 2 and the amount of deformation in which the height of the upper surface of the quasi-reference base 1c changes due to a change in ambient temperature, the guide 2 is The maximum value of the upper surface coordinates of the guide 2 in the first region A and the second region are set so that the state in which the guide 2 is curved in the upwardly convex direction does not change from the state in which the guide 2 is curved in the downwardly convex direction. It is desirable to determine the difference from the maximum value of the upper surface coordinates of the guide 2 in B.

  Note that the maximum value of the height difference between the upper surface height of the guide 2 in the first area A and the upper surface height of the guide 2 in the second area B is an initial value when the transport table 3 is not on the guide 2. Is shown. When the center of the transport table 3 in the main scanning direction 41 is located at the center of the first area A in the main scanning direction 41, the value is substantially the same as the initial value. May be regarded as the maximum value of the height difference in a state where the center of the first area A is located at the center of the first area A in the main scanning direction 41.

  If the amount of bending of the guide 2 is too large, the transfer table 3 does not follow the guide 2 and a problem arises in that the flatness of the upper surface of the transfer table 3 cannot be ensured even in the first area A.

  FIG. 10, which is a comparative example, is a conceptual diagram illustrating a state in which the transport table 3 is supported by the guide 2 when the transport table 3 is assumed to be a rigid body with respect to the curved transport guide 3. is there. FIG. 10 is an extreme example, but when the maximum deflection amount when both ends of the transfer table 3 are simply supported is smaller than the bending amount of the guide 2, as shown in FIG. Thus, a gap 11 is generated between the transport table 3 and the guide 2. That is, the transport table 3 is in a state of floating from the guide 2. In this state, since the transport table 3 does not follow the guide 2, even if the guide 2 is curved in the second area B, the flatness of the upper surface of the transport table 3 is ensured in the first area A. Does not play.

  Therefore, the amount of bending of the guide 2 is preferably set to a value smaller than the maximum amount of bending when both ends of the transport table 3 are simply supported.

  FIG. 11 is a conceptual diagram illustrating the maximum deflection amount ΔTt when both ends of the transport table 3 in the main scanning direction 41 are simply supported. That is, the difference between the maximum value of the upper surface coordinates of the guide 2 in the first region A and the maximum value of the upper surface coordinates of the guide 2 in the second region B (that is, the maximum value ΔTr of the height difference in FIGS. 4A and 4B) is It is preferable that the value be smaller than the maximum deflection amount ΔTt when both ends of the transport table 3 in the main scanning direction 41 are simply supported.

  That is, the maximum value of the upper surface coordinates of the guide 2 in the first region A and the maximum value of the upper surface coordinates of the guide 2 in the second region B on a coordinate axis having the positive direction perpendicular to the upper surface of the guide 2 in the first region A. The guide 2 is preferably arranged on the base unit 1 so that the difference from the above is smaller than the maximum deflection amount when both ends of the transport table 3 in the main scanning direction 41 are simply supported.

  As described above, in the present embodiment, the guide 2 may be curved in a downwardly convex direction from the first area A toward the second area B. Further, the amount of curvature, that is, the maximum value of the upper surface coordinates of the guide 2 in the first area A and the guide 2 in the second area B, on a coordinate axis whose vertical direction is a vertical direction from the upper surface of the guide 2 in the first area A. (Ie, the maximum value ΔTr of the height difference in FIGS. 4A and 4B) is the amount of deflection when the transport table 3 moves to the tip of the guide 2 (ie, ΔTb in FIG. 8). The guide 2 is arranged on the base 1 so as to have a larger value than the maximum deflection amount and a value smaller than the maximum deflection amount when both ends of the transport table 3 are simply supported (ie, ΔTt in FIG. 11). The configuration is good.

  In the present configuration, as an example, the amount of deflection when the transport table 3 moves to the tip of the guide 2 is about 20 μm, and the maximum amount of deflection when both ends of the transport table 3 are simply supported is about 400 μm. Therefore, in this example, the difference between the maximum value of the upper surface coordinates of the guide 2 in the first region A and the maximum value of the upper surface coordinates of the guide 2 in the second region B is 100 μm in consideration of the ease of processing and adjustment. I do.

  The difference between the maximum value of the upper surface coordinates of the guide 2 in the first area A and the maximum value of the upper surface coordinates of the guide 2 in the second area B is preferably smaller within the above range. In addition, there is a problem that the difficulty of the adjustment increases, and the cost and the adjustment time increase. Therefore, the difference between the maximum value of the upper surface coordinates of the guide 2 in the first area A and the maximum value of the upper surface coordinates of the guide 2 in the second area B is determined by a value that is not difficult to process and adjust within the above range. Is good. As an example, the difference between the maximum value of the upper surface coordinates of the guide 2 in the first area A and the maximum value of the upper surface coordinates of the guide 2 in the second area B is 50 μm to 100 μm.

  With the above configuration, it is desirable to use a material that can be easily processed with high precision, such as a stone material, among the members constituting the base 1. The printing target 6 can be transported with high accuracy in a range where traveling accuracy is required for performing the processing. Therefore, problems regarding weight, cost, transportation, and the like can be solved.

  It should be noted that not only the inkjet apparatus 10 but also an apparatus that performs some kind of process processing on a large object to be processed can achieve the same effects as those of the inkjet apparatus by utilizing the transport stage of the present invention.

  Therefore, according to the embodiment, the size of the main reference base 1a in the first area A where the predetermined processing is performed by the processing unit such as the print head 5 is suppressed to the minimum necessary, and the movement accuracy in the processing range is reduced. Can be secured.

  That is, in the transfer stage 20 requiring a long and high-precision transfer, a plurality of bases 1a, 1b, 1c including a main reference base 1a made of the same material such as a stone material are used. It is possible to reduce the size of the device while greatly reducing the influence of the step due to the division of the device 1, and to realize a reduction in the cost of the device, an easy procurement, and a reduction in the weight. Therefore, for example, it is possible to reduce the cost of the inkjet apparatus 10 that applies the ink from the print head 5 with high accuracy to a large-sized print target in one transfer, thereby reducing the production efficiency of the print target 6. Can be improved.

  Note that by appropriately combining any of the above-described various embodiments or modifications, the effects of the respective embodiments or modifications can be achieved. In addition, a combination of the embodiments, a combination of the examples, or a combination of the embodiment and the example is possible, and a combination of features in different embodiments or examples is also possible.

  The transport stage and the inkjet apparatus using the transport stage according to the aspect of the present invention are effective for a device that applies ink or the like to a large-sized printing target, and include a light-emitting element of an organic EL, a hole transport layer, or an electron transport layer. The present invention can be applied to an apparatus for efficiently applying a material such as ink to a large-sized printing target by printing or printing a color filter.

Reference Signs List 1 base part 1a main reference base 1b auxiliary base 1c sub-reference base 2 guide 2A deformed guides 2a, 2b rail-shaped divided guide member 2c rail-shaped guide member 3 transport table 3x straight line 4 gantry 5 line head 6 Printed object 7 Frame 8 Height adjuster 8a Height adjuster 9 supporting guide 9 Drive unit 10 Inkjet device 11 Gaps 12, 12a to 12e Bearing 12A Bearing 12A supported on the upper surface of guide 2 On the side of guide 2B Bearing 13 to be supported Rotary bearing 14 Joint 15 Inflection point 18 of curved guide 18 Wedge mechanism 20 Transfer stage 21 Floor surface 22 Space 41 Main scanning direction 42 Sub-scanning direction 43 Vertical direction A First area B Second area

Claims (10)

A first divided base made of the same material, and a second divided base arranged adjacent to the first divided base along the first scanning direction and extending along the first scanning direction. Base part,
A guide arranged on the base portion so as to extend along the first scanning direction, the guide having a plurality of guide members;
A transfer table that moves along the guide,
A bearing portion disposed between the guide and the transfer table to movably support the transfer table along the guide;
A driving unit coupled to the transfer table to move the transfer table,
An area vertically above the first division base in the first scanning direction of the guide is defined as a first area, and the guide is supported by the second division base and the guide in the first scanning direction. When a region other than the first region is a second region, the upper surface of the guide is curved in a vertically downwardly convex direction from the first region toward the second region.
Transfer stage. When the transfer table is arranged at a position where the inflection point of the guide curved downward in the vertical direction of the transfer table exists, the amount of deflection of the transfer table is determined by moving the transfer table in the vertical direction of the transfer table. The guide curved downward is configured to be larger than the deflection amount of the transport table when the guide is disposed at a position where the inflection point does not exist.
The transfer stage according to claim 1. In a coordinate axis having a positive direction perpendicular to the upper surface of the guide in the first region, a maximum value of the upper surface coordinate of the guide in the second region and a maximum value of the upper surface coordinate of the guide in the first region. When the difference is ΔTr and the amount of deflection of the guide is ΔTb when the transport table moves to the end of the guide in the first scanning direction,
Disposing the guide on the base portion so as to satisfy a formula of ΔTr>ΔTb;
The transfer stage according to claim 1. In a coordinate axis having a positive direction perpendicular to the upper surface of the guide in the first region, a maximum value of the upper surface coordinate of the guide in the second region and a maximum value of the upper surface coordinate of the guide in the first region. When the difference is ΔTr and the maximum deflection amount when both ends of the transport table in the first scanning direction are simply supported is ΔTt,
Arranging the guide on the base portion so as to satisfy a formula of ΔTt>ΔTr;
The transfer stage according to claim 1. The first divided base is made of a stone material, and the second divided base is made of an iron-based material.
The transfer stage according to claim 1. Performing a predetermined process on the processing object on the transport table, having a processing unit disposed so as to have a space through which the transport table passes between the guide,
A processing position of the processing unit is included in the first area;
The transfer stage according to claim 1. When a direction perpendicular to the first scanning direction of the transport table is defined as a second scanning direction, at least three or more guides are arranged at positions where coordinates in the second scanning direction are different from each other, with an interval therebetween. ing,
The transfer stage according to claim 1. A joint portion at which ends of the plurality of guide members along the first scanning direction face each other is located in an area of the first area,
The transfer stage according to claim 1. A plurality of height adjustment units arranged between the guide and the second divided base in the second region and capable of adjusting the height,
Among the at least one or more materials constituting the second divided base, the material having the largest occupied volume has a larger coefficient of thermal expansion than the material constituting the first divided base. The guides in the two regions are discontinuously supported by the height adjustment unit by a sliding constraint in which opposing surfaces can slide with each other.
The transfer stage according to claim 1. A transfer stage according to claim 6,
The processing unit is supported by a support member disposed so as to straddle the guide member, the printing target on the transport table, at least one or more print heads that eject ink,
The print head is disposed in the first area;
Ink jet device.

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