JP2020017705A - Load port device - Google Patents

Abstract

To provide a load port device that can detect the connection between a container port and a flow path.SOLUTION: A load port device having a mounting portion on which a container is mounted includes a movable portion having a flow path that can contact a port provided at the bottom of the container mounted on the mounting portion by moving to the raised position and that can communicate with the inside of the container via the port, a base portion that supports the movable portion so as to be relatively movable, such that the movable portion can move between the raised position and a lowered position below the raised position, and a detection unit that is arranged below the upper surface of the base portion and detects the movement of the movable portion.SELECTED DRAWING: Figure 3

Description

  The present invention relates to a load port device that transfers containers at a semiconductor factory or the like.

  2. Description of the Related Art In a semiconductor factory or the like, a load port device having a placement unit for placing a container is used as a device for transferring a container containing a substrate such as a silicon wafer. The load port device can connect, for example, a container mounted on the mounting portion to an EFEM or the like connected to a semiconductor processing device that performs various kinds of processing on a substrate, whereby the wafer transfer arm in the EFEM can be connected. , It is possible to access the substrate in the container.

  In recent years, in order to protect a substrate to be processed, such as a semiconductor processing apparatus, from oxidation and contamination, it has been required to increase the cleanliness of an environment for accommodating a wafer. As a load port device corresponding to such needs, a cleaning gas is introduced into a container mounted on the mounting portion through a port provided at the bottom of the container to clean the container being mounted. Have been proposed. Some of such load port devices have a nozzle that moves up and down so as to contact and separate from the bottom of the container.

JP 2011-187539 A

  However, in the conventional load port device, there may be a case where the connection between the port of the container and the nozzle of the load port device is not completely connected due to an operation error or a malfunction caused in a mechanism for moving the nozzle up and down. Has become. If the cleaning operation is started when the connection between the port of the container and the nozzle of the load port device is not perfect, problems such as the inability to introduce the cleaning gas into the container and the leakage of the cleaning gas into the factory will occur. Occurs. In addition, when the gap between the mounting portion of the load port device and the bottom of the container is narrowed, there is an advantage that the stroke of the nozzle can be shortened to reduce the size of the device, but it is difficult to add a member to the small gap. Become.

  The present invention has been made in view of such circumstances, and provides a load port device capable of detecting a connection between a port of a container and a flow path.

In order to achieve the above object, a load port device according to the present invention includes:
A load port device having a mounting portion for mounting a container,
A movable portion having a flow path that can contact a port provided at the bottom of the container placed on the placement portion by moving to the ascending position, and has a flow path that can communicate with the inside of the container via the port; ,
A base portion that supports the movable portion so as to be relatively movable, so that the movable portion can move between the raised position and a lowered position below the raised position;
A detection unit disposed below the upper surface of the base unit and configured to detect movement of the movable unit.

  The load port device according to the present invention has the detection unit that detects the movement of the movable unit between the raised position and the lowered position, so that the connection between the port of the container and the flow path can be appropriately detected. In addition, since the detection unit is disposed below the upper surface of the base unit, even if the gap between the placement unit and the bottom of the container is narrowed, there is no problem in installing the detection unit. Therefore, the load port device according to the present invention can reduce the size of the device by shortening the stroke of the nozzle and detect the connection between the port and the flow path.

Further, for example, the movable portion may have a detected portion extending below the lower surface of the base portion at the lowered position,
The detection section may detect the movement of the detected section at a position below the lower surface of the base section.

  In such a load port device, the detection unit can be disposed below the lower surface of the base unit so as to overlap with the base unit. Therefore, even if the space in the plane direction is narrow, the movable unit can move in the vertical direction. Can be disposed.

  Also, for example, the base portion may include a nozzle in which the flow path is formed in the movable portion, a first opening through which the base is inserted in the up-down direction, and the detected portion may include the base. And a second opening through which is inserted in the vertical direction.

  In such a load port device, since the nozzle portion passes through the first opening of the base portion, and the detected portion passes through the second opening of the base portion, the movable portion moves relative to the base portion. Relative rotation can be prevented. Further, since the detected portion is provided separately from the nozzle portion, the size of the detecting portion can be reduced as compared with a case where the nozzle portion is directly detected.

Further, for example, the movable portion may have a nozzle flange portion projecting in an outer diameter direction from a nozzle portion in which the flow path is formed in the movable portion,
The upper end of the detected part may be connected to the nozzle flange.

  Since the upper end of the detected portion is connected to the nozzle flange portion, the detecting portion can be disposed avoiding the nozzle portion, so that the overall length of the movable portion in the vertical direction can be reduced.

  Further, for example, the detection unit may be attached to a lower surface of the base unit.

  Since the detection section is attached to the lower surface of the base section, the detection section, the base section, and the movable section can be formed as an integrated unit, and the size of the unit can be reduced.

  Further, for example, the detection unit may be attached to the placement unit to which the base unit is fixed.

  By attaching the detection section to the mounting section without attaching to the base section, it is not necessary to provide an attachment section for the detection section on the base section, so that the base section can be downsized.

  Further, for example, the detection unit may be an optical sensor having a light-emitting unit that emits light and a light-receiving unit that receives the light and outputs a signal.

  As the detection unit that detects the movement of the movable unit, for example, a magnetic sensor, a contact sensor, an optical sensor, and the like can be used. However, from the viewpoint of the reliability and durability of the sensor, an optical sensor is used. Is preferred.

  Further, for example, the detected part may pass between the light emitting part and the light receiving part in at least a part of the vertical movement.

  By detecting the detection target that passes between the light emitting unit and the light receiving unit, such a detection unit can reliably detect the movement of the movable unit.

Also, for example, the load port device according to the present invention includes a gas supply unit that supplies a cleaning gas to the flow path,
A control unit to which a signal of the detection unit is input,
The control unit controls the gas supply unit to supply the cleaning gas to the flow path after recognizing that the movable unit is at the raised position by the signal from the detection unit. The cleaning gas may be introduced into the container via a port.

  Such a load port device prevents the cleaning operation from being started in a state in which the port of the container and the nozzle of the load port device are not completely connected, and reliably introduces the cleaning gas into the container. The problem that the cleaning gas leaks into the factory can be prevented.

FIG. 1 is a schematic diagram of a load port device and a container placed on the load port device according to an embodiment of the present invention. FIG. 2 is a partially enlarged view showing one arrangement of a bottom purge unit included in the load port device. FIG. 3 is a front view of the bottom purge unit shown in FIG. 2 and shows a state where the movable unit is at the raised position. FIG. 4 is a front view of the bottom purge unit shown in FIG. 2 and shows a state where the movable unit is at a lowered position. FIG. 5 is a front view of a movable portion included in the bottom purge unit shown in FIGS. 3 and 4. FIG. 6 is a bottom view of the bottom purge unit shown in FIG. FIG. 7 is a perspective view of the bottom purge unit shown in FIG. 2 and shows a state where the moving part is at the raised position. FIG. 8 is a conceptual diagram illustrating the movement of the movable unit and the detection method by the detection unit in the embodiment, the first modification, and the second modification. FIG. 9 is a front view of a movable section according to a third modification.

Hereinafter, the present invention will be described based on embodiments shown in the drawings.
FIG. 1 is an external view showing a load port device 10 according to an embodiment of the present invention and a hoop 80 as a container placed on the placing portion 12 of the load port device 10. The load port device 10 is usually installed on a wall of an eFem (EFEM) and forms a part of the eFem. The e-fem forms a mini-environment provided with a robot arm for wafer transfer and the like, and the robot arm includes a silicon wafer housed in the hoop 80 from within the hoop 80 connected to the mini-environment by the load port device 10. The substrate is taken out and transported to a semiconductor processing apparatus.

  The load port device 10 includes a door 14, a frame 16, a bottom purge unit 20, a gas supply unit 60, a control unit 70, and the like, in addition to the placement unit 12 on which the hoop 80 is placed. A FOUP (FOUP) 80 for sealingly storing and transporting a substrate is removably mounted on the mounting portion 12 of the load port device 10. The mounting portion 12 is configured by a moving table or the like that moves in the Y-axis direction while the hoop 80 is mounted on the upper portion, and can connect the main opening 86 of the hoop 80 to the frame opening 16 a of the frame 16. . In the drawings, the Y axis indicates the moving direction of the mounting section 12, the Z axis indicates the vertical direction, and the X axis indicates the direction perpendicular to these Y axis and Z axis.

  The frame 16 of the load port device 10 extends upward (in the positive direction of the Z axis) from the mounting portion 12, and the mounting portion 12 and the hoops 80 installed on the mounting portion 12 move closer to the frame 16. Move away. A frame opening 16 a is formed in the frame 16 so as to face the main opening 86 of the hoop 80, and the frame opening 16 a is opened and closed by the door 14.

  The door 14 of the load port device 10 can open and close the frame opening 16 a and engage with a lid portion detachably provided in the main opening 86 of the hoop 80 to open and close the main opening 86. In the load port device 10, after the mounting unit 12 moves the hoop 80 to a position where the hoop 80 contacts the frame 16, the door 14 engages with the lid of the hoop 80 and pulls the hoop 80 into the mini-environment. The inside and the mini-environment can be airtightly connected via the main opening 86 of the hoop 80.

  As shown in FIG. 1, the bottom purge unit 20 of the load port device 10 is provided on the receiver 12. The bottom purge unit 20 supplies a cleaning gas into the hoop 80 via a port 84 provided at the bottom 82 of the hoop 80 placed on the placement unit 12. Although FIG. 1 shows only one of the bottom purge units 20 included in the load port device 10, the load port device 10 may include a plurality of bottom purge units 20.

  The load port device 10 includes a gas supply unit 60 that supplies a cleaning gas to the flow path 32 (see FIG. 5) of the bottom purge unit 20, a bottom purge unit 20, a mounting unit 12, a gas supply unit 60, and a door 14. It has a control unit 70 for controlling the operation. The gas supply unit 60 has a valve or the like for switching between supply and stop of the supply of the cleaning gas to the bottom purge unit 20, and the control unit 70 has a processor or the like that performs arithmetic processing for controlling each unit.

  FIG. 2 is a conceptual diagram showing an arrangement of the bottom purge unit 20 in the load port device 10. The bottom purge unit 20 is disposed so as to face a port 84 provided at the bottom 82 of the hoop 80. As shown in FIG. 2, a gap is formed between a port 84 provided on the bottom 82 of the hoop 80 and the placement unit 12.

  FIGS. 3 and 4 are front views showing the bottom purge unit 20 shown in FIG. 2 and the installation section 12a of the placement section 12 to which the bottom purge unit 20 is attached. FIG. 3 shows a state in which the movable section 30 of the bottom purge unit 20 is at the raised position P2, and FIG. 4 shows a state in which the movable section 30 of the bottom purge unit 20 is at the lowered position P1. 6 is a bottom view of the bottom purge unit 20, and FIG. 7 is a perspective view of the bottom purge unit 20. The shape of the mounting portion 12a is a part of the mounting portion 12 for the purpose of explaining the bottom purge unit 20, and the mounting portion 12a is separable from other portions of the mounting portion 12. Or may be integral.

  As shown in FIGS. 3 and 4, the bottom purge unit 20 has a movable section 30, a base section 40, and a detection section 50. The movable section 30 vertically passes through the installation section opening 12b formed in the installation section 12a and the first opening 44 and the second opening 46 formed in the base section 40. FIG. 5 is a front view showing only the movable section 30 included in the bottom purge unit 20.

  The movable part 30 has a hollow cylindrical nozzle part 34 in which the flow path 32 is formed, and a nozzle flange part 35 protruding from the nozzle part 34 in the outer diameter direction. The nozzle flange 35 is connected to an upper portion of the nozzle 34 and is exposed upward from the first opening 44 of the base 40 as shown in FIGS. As shown in FIG. 7 which is a perspective view, the nozzle 34 and the nozzle flange 35 are ring-shaped when viewed from the Z-axis direction. However, the shapes of the nozzle 34 and the nozzle flange 35 are only cylindrical and ring-shaped. It is not limited to.

  As shown in FIG. 7, a ring-shaped contact portion 37 is provided on the upper surface of the nozzle flange 35. The contact portion 37 is preferably made of a resilient material such as a resin. The contact portion 37 increases the airtightness of a connection portion between the flow path 32 and the port 84, and a fluid flowing in the flow path 32 and the port 84 of the movable section 30. But prevent it from flowing out.

  As shown in FIG. 5, a joint 36 is attached to the lower end of the nozzle 34. Inside the joint portion 36, a gas supply flow passage connected to the flow passage 32 in the nozzle portion 34 is formed. As shown in FIGS. 3 and 4, a connection path 62 of a gas supply unit 60 is connected to the joint 36. The cleaning gas is supplied to the flow path 32 of the nozzle part 34 from the connection path 62 of the gas supply part 60 connected via the joint part 36.

  As shown in FIG. 5, the movable section 30 has a detected section 33 that protrudes downward from the nozzle flange section 35. The detected part 33 has a rod shape, and the upper end 33 b of the detected part 33 is connected to the lower surface of the nozzle flange 35. The detected part 33 extends in the Z-axis direction and is parallel to the nozzle part 34.

  As shown in FIG. 4, the lower end portion 33a of the detected portion 33 extends below the lower surface 40b of the base portion 40 when the movable portion 30 is at the lowered position P1. A detection unit 50 that detects the movement of the movable unit 30 is attached to a lower surface 40b of the base unit 40 via an attachment jig. As shown in FIG. 6, which is a bottom view, a gap 56 of the detection unit 50 is disposed at a position where the lower end 33a of the detection target 33 passes.

  As shown in FIG. 3, the movable portion 30 can contact a port 84 (see FIG. 2) provided on the bottom portion 82 of the hoop 80 placed on the placement portion 12 by moving to the ascending position P2. . Further, the flow path 32 of the movable section 30 shown in FIG. 7 can communicate with the inside of the hoop 80 via the port 84 by moving the movable section 30 to the ascending position P2.

  As shown in FIGS. 3 and 4, the base unit 40 relatively moves the movable unit 30 so that the movable unit 30 can move up and down between an ascending position P2 and a descending position P1 below the ascending position P2. Movable support. As shown in FIGS. 3 and 4, the base section 40 is configured by vertically combining two members, an upper base section 42 and a lower base section 43.

  The base portion 40 has a first opening 44 through which the nozzle portion 34 of the movable portion 30 is inserted in the vertical direction, and a second opening 46 through which the detected portion 33 of the movable portion 30 is inserted in the vertical direction. I have. The first opening 44 and the second opening 46 are through holes penetrating the base portion 40 in the up-down direction. As shown in FIG. 6, the opening shapes of the first opening 44 and the second opening 46 are circular, and the inner diameter of the first opening 44 is substantially the same as or slightly larger than the outer diameter of the nozzle portion 34. The opening 46 is substantially the same as or slightly larger than the outer diameter of the detected part 33. Therefore, the nozzle portion 34 and the detected portion 33 can slide inside the first opening 44 or the second opening 46 and move smoothly in the vertical direction.

  As shown in FIG. 4, since the opening diameter of the first opening 44 is smaller than the outer diameter of the nozzle flange 35, the movable portion 30 is prevented from falling down. As shown in FIG. 6, the opening diameter of the second opening 46 through which the detected part 33 passes is smaller than the opening diameter of the first opening 44 through which the nozzle part 34 passes. It is possible to reduce the size.

  As shown in FIG. 3, a pressure chamber for transmitting power to the movable section 30 is formed inside the base section 40, and a pressure chamber inside the base section 40 is formed in the upper base section 42 and the lower base section 43. A first connection portion 42a and a second connection portion 43a for transmitting pressure to the first and second connection portions are formed. The base portion 40 and the movable portion 30 are in a cylinder-piston relationship, and pressure is transmitted from the first connection portion 42a and the second connection portion 43a to a pressure chamber in the base portion 40, so that the movable portion 30 is movable. Can be moved up and down. In each of the drawings, pipes that transmit pressure to the first connection portion 42a and the second connection portion 43a are not shown. The transmission of the pressure to the pressure chamber of the movable unit 30 is controlled by the control unit 70 shown in FIG.

  As shown in FIG. 6, the detection unit 50 is an optical sensor having a light emitting unit 52 that emits light, and a light receiving unit 54 that receives light from the light emitting unit 52 and outputs a signal. FIGS. 8A and 8B are conceptual diagrams illustrating a detection method of detecting the vertical movement of the movable unit 30 by the detection unit 50. FIG.

  As shown in FIG. 3, when the movable unit 30 is at the ascending position P2, the detected unit 33 connected to the nozzle flange 35 is also ascended. As a result, as shown in FIG. 8A, when the movable portion 30 is at the raised position P2, the lower end 33a of the detected portion 33 moves above the gap 56 of the detection portion 50, and Is not located at the lower end 33a of the detected portion 33. Therefore, the light from the light emitting section 52 reaches the light receiving section 54 without being blocked by the detected section 33, and the light receiving section 54 detects that the movable section 30 is at the ascending position P2.

  On the other hand, as shown in FIG. 4, when the movable portion 30 is at the lowered position P1, the detected portion 33 connected to the nozzle flange 35 is also lowered. Thus, as shown in FIG. 8B, when the movable unit 30 is at the lowered position P1, the lower end 33a of the detected unit 33 passes through the gap 56 of the detection unit 50 and is located in the gap 56. Therefore, the light from the light emitting section 52 is blocked by the detected section 33 and does not reach the light receiving section 54, and the light receiving section 54 detects that the movable section 30 is at the lowered position P1.

  The detection unit 50 outputs a signal regarding the position information of the movable unit 30 to the control unit 70 (see FIG. 1). The signal from the detection unit 50 is input to the control unit 70 via the wiring unit 58 shown in FIG. As shown in FIG. 5, the vertical length L1 from the lower surface of the nozzle flange 35 to the lower end of the detection target 33 is determined by the nozzle 34 and the joint forming the flow path 32 from the lower surface of the nozzle flange 35. It is shorter than the length L2 of the portion 36 in the vertical direction. Thereby, the overall size of the bottom purge unit 20 having the detection unit 50 can be made compact. Note that the length L1 of the detected portion 33 is longer than the length L3 in the vertical direction from the upper surface 40a to the lower surface 40b of the base portion 40 (see FIG. 4). The position of the detection target 33 can be reliably detected.

  In the load port device 10 shown in FIG. 1, the control unit 70 controls the bottom purge unit 20 to introduce a cleaning gas into the hoop 80 placed on the placement unit 12 in the following procedure, for example. can do. That is, in the first step, the control unit 70 of the load port device 10 detects that the hoop 80 has been placed on the placement unit 12. At this time, the movable section 30 of the bottom purge unit 20 is located at the lowered position P1 shown in FIGS.

  Next, in the second step, the control unit 70 of the load port device 10 controls the bottom purge unit 20 to move the movable unit 30 to the raised position P2 shown in FIGS. When the movable section 30 has moved to the ascending position P2, the detection section 50 of the bottom purge unit 20 causes the light-receiving section 54 to receive the light from the light-emitting section 52 as shown in FIG. The movement is detected, and a detection signal is output to the control unit 70.

  Next, in the third step, after the control unit 70 of the load port device 10 recognizes that the movable unit 30 is at the ascending position P2 based on the detection signal from the detection unit 50, the gas supply unit illustrated in FIG. By controlling 60, the cleaning gas is supplied to the flow path 32 of the bottom purge unit 20, and the cleaning gas is introduced into the hoop 80 through the port 84 at the bottom 82 of the hoop 80.

  Since the load port device 10 includes the detection unit 50 that detects the movement of the movable unit 30 between the ascending position P2 and the descending position P1, the connection between the port 84 of the hoop 80 and the flow path 32 of the nozzle unit 34 is established. , Can be properly detected. Since the detection unit 50 is disposed below the upper surface 40a of the base unit 40, even if the gap between the placement unit 12 and the bottom 82 of the hoop 80 is narrowed, there is no problem in setting the detection unit 50. Therefore, the load port device 10 can reduce the stroke of the movable portion 30 to reduce the size of the bottom purge unit 20 and also detect the connection between the port 84 and the flow path 32.

  Further, the load port device prevents the cleaning operation from being started in a state where the connection between the port 84 of the hoop 80 and the flow path 32 of the nozzle portion 34 of the load port device 10 is not complete, and cleans the factory. It is possible to prevent a problem such as gas leakage and to reliably introduce the cleaning gas into the hoop 80. Further, since the detected part 33 is provided separately from the nozzle part 34, the size of the detecting part 50 can be reduced as compared with the case where the nozzle part 34 is directly detected. In addition, since the detected portion 33 and the nozzle portion 34 are inserted through the second opening 46 and the first opening 44 which are separate openings, the movable portion 30 relatively rotates with respect to the base portion 40. Can be prevented.

  As shown in FIGS. 3 and 4, in the bottom purge unit 20 according to the embodiment, the detection unit 50 detects the movement of the detection target 33 at a position below the lower surface 40 b of the base unit 40. Such a bottom purge unit 20 can reduce the size in the planar direction, which is advantageous for miniaturization. However, the arrangement of the detection unit 50 is not limited to this, and the detection unit 50 may be arranged so that the gap 56 is located between the upper surface 40a and the lower surface 40b of the base unit 40. Such a bottom purge unit 20 is advantageous from the viewpoint of thinning.

  As described above, the present invention has been described with reference to the embodiment. However, it is needless to say that the present invention is not limited to only the above-described embodiment, and has many other embodiments and modifications. For example, the method of moving the movable section 30 relative to the base section 40 is not limited to the air cylinder method, and another driving method such as driving by a motor may be used. Further, the movable unit 30 only needs to be able to change its position between the descending position P1 and the ascending position P2. , And combinations of these with other movement directions.

  Further, as shown in FIG. 5, the detected portion 33 of the movable portion 30 has a rod shape that blocks light, but the detected portion is not limited to this, and at least a part of the movement of the movable portion 30 emits light. What is necessary is to pass between the part 52 and the light receiving part 54. FIGS. 8C and 8D are conceptual diagrams illustrating a detection method in which the detection unit 50 detects the vertical movement of the movable unit 130 according to the first modification. The movable section 130 is the same as the movable section 30 shown in FIGS. 8A and 8B except that a slit-shaped through-hole 133b is formed at the lower end 133a of the detected section 133. . Regarding the modified example, the description of the common parts with the embodiment will be omitted, and only the differences from the embodiment will be described.

  As shown in FIG. 8C, when the movable unit 130 is at the ascending position P <b> 2, the through-hole 133 b formed in the lower end 133 a of the detected unit 133 is located in the gap 56 of the detecting unit 50. Therefore, the light from the light emitting section 52 passes through the through hole 133b and reaches the light receiving section 54 without being blocked by the detected section 133, and the light receiving section 54 detects that the movable section 130 is at the ascending position P2. .

  On the other hand, as shown in FIG. 8D, when the movable portion 130 is at the lowered position P1, the lower end portion 33a of the detected portion 33 moves below the gap 56 of the detection portion 50, and the gap 56 The portion where the through-hole 133b is not formed in the detected part 33 is located inside. Therefore, the light from the light emitting unit 52 is blocked by the detected unit 133 and does not reach the light receiving unit 54, and the light receiving unit 54 detects that the movable unit 130 is at the lowered position P1.

  FIGS. 8E and 8F are conceptual diagrams illustrating a detection method in which the detection unit 50 detects the vertical movement of the movable unit 230 according to the second modification. The movable part 230 is the same as the movable part 30 shown in FIGS. 8A and 8B except that a slit-like through hole 233d is formed in the middle part 233c of the detected part 233. .

  As shown in FIG. 8E, when the movable portion 230 is at the rising position P2, the lower end of the detected portion 233 where the through hole 233d is not formed is located. Therefore, the light from the light emitting section 52 is blocked by the detected section 233 and does not reach the light receiving section 54, and the light receiving section 54 detects that the movable section 230 is at the ascending position P2.

  On the other hand, as shown in FIG. 8D, when the movable part 230 is at the lowered position P1, the lower end of the detected part 233 moves below the gap 56 of the detection part 50, and the gap 56 Inside, a through hole 233d formed in the intermediate portion 233c of the detected portion 233 is located in the gap 56 of the detecting portion 50. Therefore, the light from the light emitting section 52 passes through the through hole 233d and reaches the light receiving section 54 without being blocked by the detected section 233. The light receiving section 54 detects that the movable section 230 is at the lowered position P1. .

  The bottom purge unit having the movable portions 130 and 230 according to the first and second modifications as shown in FIGS. 8B to 8D also has the same effect as the bottom purge unit 20 according to the embodiment. . Note that the light receiving unit 54 of the detection unit may detect the light reflected by the detected units 33, 133, and 233.

  As shown in FIG. 3, the detected part 33 of the movable part 30 shown in the embodiment passes through the second opening 46 formed in the base part 40, and the base part 40 is used as the detected part. The shape may not be inserted. FIG. 9 is a front view illustrating the movable section 330 according to the third modification. The movable part 330 is the same as the movable part 30 shown in FIG. 5 except that the shape and the connection position of the detected part 333 are different.

  As shown in FIG. 9, the detected part 333 of the movable part 330 is connected to the side surface of the nozzle flange 35, and is connected to the first part 333f extending in the horizontal direction and the tip of the first part 333f. A second portion 333g extending downward from the tip of the first portion 333f. The detected part 333 has an L-shaped outer shape, and extends to the detecting part bypassing the base part 40 shown in FIG.

  The detection unit that detects the movement of the movable unit 330 may be attached to the base unit 40 similarly to the detection unit 50 illustrated in FIG. 3, but the mounting unit 12 to which the base unit 40 is fixed (see FIG. 1). It may be attached to. The bottom purge unit having such a movable portion 330 has the same effect as the bottom purge unit 20 according to the embodiment.

DESCRIPTION OF SYMBOLS 10 ... Load port apparatus 12 ... Placement part 12a ... Installation part 12b ... Installation part opening 14 ... Door 16 ... Frame 16a ... Frame opening 20 ... Bottom purge unit 30, 130, 230, 330 ... Movable part 32 ... Flow path 33, 133, 233, 333... Detected portions 33a, 133a... Lower end 33b... Upper end 133b, 233d... Through hole 333f. Part P1 Descending position P2 Ascending position 40 Base part 40a Upper surface 40b Lower surface 42 Upper base part 42a First connecting part 43 Lower base part 43a Second connecting part 44 First opening 46 ... Second opening 50... Detection unit 52. Light emitting unit 54. Light receiving unit 56. Crevice 58. Wiring unit 60. Gas supply unit 62. Connection path 70. 4 ... port 86 ... main opening

Claims (9)

A load port device having a mounting portion for mounting a container,
A movable portion having a flow path that can contact a port provided at the bottom of the container placed on the placement portion by moving to the ascending position, and has a flow path that can communicate with the inside of the container via the port; ,
A base portion that supports the movable portion so as to be relatively movable, so that the movable portion can move between the raised position and a lowered position below the raised position;
A load port device disposed below an upper surface of the base portion, the detection portion detecting movement of the movable portion. The movable portion has a detected portion extending below the lower surface of the base portion at the lowered position,
2. The load port device according to claim 1, wherein the detection unit detects the movement of the detection target at a position below the lower surface of the base unit. 3.   In the base portion, a nozzle portion in which the flow path is formed in the movable portion has a first opening through which the base portion is vertically inserted, and the detected portion moves the base portion vertically in the vertical direction. 3. The load port device according to claim 2, wherein a second opening to be inserted is formed. The movable portion has a nozzle flange portion protruding in an outer radial direction from a nozzle portion in which the flow path is formed in the movable portion,
4. The load port device according to claim 2, wherein an upper end of the detected portion is connected to the nozzle flange. 5.   The load port device according to claim 1, wherein the detection unit is attached to a lower surface of the base unit.   The load port device according to any one of claims 1 to 4, wherein the detection unit is attached to the placement unit to which the base unit is fixed.   7. The optical sensor according to claim 1, wherein the detecting unit is an optical sensor having a light emitting unit that generates light and a light receiving unit that receives the light and outputs a signal. Load port equipment.   The load port device according to claim 7, wherein the detected part passes between the light emitting part and the light receiving part in at least a part of the movement of the movable part. A gas supply unit for supplying a cleaning gas to the flow path,
And a control unit to which a signal of the detection unit is input,
The control unit controls the gas supply unit to supply the cleaning gas to the flow path after recognizing that the movable unit is at the raised position by the signal from the detection unit. The load port device according to any one of claims 1 to 8, wherein the cleaning gas is introduced into the container via a port.

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