JP2020016789A5 - - Google Patents

Claims (31)

A porous film formed on the substrate a including film has a dense film carrying the fluorine compound on the front surface of the porous film, the surface of the porous film of the dense membrane area occupancy rate is 70% or less than 30% film you, wherein the thickness of the dense membrane is 30nm hereinafter more 10nm against. The film according to claim 1, wherein the fluorine compound is attached to the surface of the dense film opposite to the porous film. The thickness of the porous membrane, characterized in that at 80nm or more 200nm or less, films according to claim 1 or 2. The area occupancy to the surface of the porous membrane, characterized in that it is 65% or less 40%, the film according to any one of claims 1 to 3 of the dense membrane. The dense film thickness of the film, characterized in that at 15nm or more 25nm or less, the film according to any one of claims 1 4. The dense arithmetic average roughness of the surface of the membrane, characterized in that it is 3nm or less, the film according to any one of claims 1 to 5. The dense membrane, characterized in that consists of silicon oxide binder or resin, film according to any one of claims 1 to 6. Said porous membrane, characterized in that it comprises a particle element and a binder, film according to any one of claims 1 to 5. The average particle diameter before Symbol grains element, characterized in that at 10nm or more 80nm or less, the film of claim 8. Before Symbol particles child, characterized in that it is a hollow particle or a chain of particles, film according to claim 8 or 9. Hollow particles before Symbol particles child, wherein the thickness of the shell of the hollow particles is 10% to 50% of the average particle diameter, film according to any one of claims 8 10 .. The film according to any one of claims 8 to 11, wherein the particles contain a metal oxide or magnesium fluoride. The film according to claim 12, wherein the particles are silicon oxide particles. The film according to claim 12 or 13, wherein the binder is a silicon oxide binder. Wherein the fluorine compound is characterized by having a monolayer structure, the film according to any one of claims 1 14. Before the refractive index of Kimaku, characterized in that at 1.19 or more 1.32 or less, the film according to any one of claims 1 to 15. Member, wherein the base material is formed on the substrate, to have a film according to any one of claims 1 to 16. An optical member having a transparent base material and the film according to claim 16 formed on the transparent base material. The optical member according to claim 18 , wherein the transparent base material is a lens. An imaging device comprising the optical member according to claim 18 or 19. A projection device comprising the optical member according to claim 18 or 19. A step of forming a first film least the first coating material also contains a particle element and a binder and a solvent by coating the surface of the substrate, the porous membrane by drying the first film A step of forming, a step of applying a second paint composed of a film material and a solvent to a part of the surface of the porous film to form a dense film, and a step of supporting a fluorine compound on the surface of the dense film. film production method of you and a step. In the step of forming the dense layer, by adjusting the concentration and the application amount of the second coating film material of the second paint, the area occupancy with respect to the surface of the porous film of the dense membrane The method according to claim 22 , wherein the content is 30% or more and 70% or less. The method according to claim 22 or 23 , wherein the step of forming the first film is performed at 20 ° C. or higher and 30 ° C. or lower. In the above first film forming step, wherein the viscosity at the time of coating of the first coating material is less than 1.3 mPa · s or more 2 mPa · s, the method of claim 24. The method according to any one of claims 22 to 25, wherein a silicon oxide binder coating material is used as the second coating material in the step of forming the dense film. A step of preparing a base material, a step of applying a first paint containing at least particles, a binder and a solvent to the surface of the base material to form a first film, and a step of drying the first film. A step of forming a porous film, a step of applying a second paint composed of a film material and a solvent to a part of the surface of the porous film to form a dense film, and a step of forming a dense film on the surface of the dense film. A method for producing a member, which comprises a step of supporting a fluorine compound in the coating film. In the step of forming the dense film, the area occupancy of the dense film with respect to the surface of the porous film is determined by adjusting the concentration of the film material in the second coating film and the amount of the second coating film applied. The method according to claim 27, wherein the content is 30% or more and 70% or less. The method according to claim 27 or 28, wherein the step of forming the first film is performed at 20 ° C. or higher and 30 ° C. or lower. The method according to claim 29, wherein in the step of forming the first film, the viscosity of the first coating film at the time of coating is 1.3 mPa · s or more and 2 mPa · s or less. The method according to any one of claims 27 to 30, wherein a silicon oxide binder coating material is used as the second coating material in the step of forming the dense film.