JP2020016591A - Circuit board inspection method and circuit board inspection device - Google Patents

Circuit board inspection method and circuit board inspection device Download PDF

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JP2020016591A
JP2020016591A JP2018140840A JP2018140840A JP2020016591A JP 2020016591 A JP2020016591 A JP 2020016591A JP 2018140840 A JP2018140840 A JP 2018140840A JP 2018140840 A JP2018140840 A JP 2018140840A JP 2020016591 A JP2020016591 A JP 2020016591A
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circuit board
inspected
inspection
mounting table
sheet
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英雄 松林
Hideo Matsubayashi
英雄 松林
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Hioki EE Corp
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Abstract

To provide a circuit board inspection method and a circuit board inspection device, in which, when performing electrical inspection by heating or cooling a circuit board to be inspected up to a predetermined temperature, the time to reach a certain temperature is shortened, the constant circuit board temperature is made to be easily kept, and furthermore, a measurement system is made to be not affected in terms of temperature.SOLUTION: When a circuit board 1 to be inspected is placed on a board mounting table 10 and heated or cooled up to a predetermined temperature, the entire upper surface of the circuit board 1 to be inspected is covered with a heat insulation sheet 40 which has electrical insulation and heat/cold resistance and is flexible with low thermal conductivity.SELECTED DRAWING: Figure 2

Description

本発明は、回路基板検査方法および回路基板検査装置に関し、さらに詳しく言えば、被検査回路基板を所定温度にまで加熱もしくは冷却して電気的に検査する回路基板の検査技術に関するものである。   The present invention relates to a circuit board inspection method and a circuit board inspection apparatus, and more particularly, to a circuit board inspection technique for electrically inspecting a circuit board to be inspected by heating or cooling it to a predetermined temperature.

高温下や低温下で使用される回路基板、特には車載用途や自己発熱するCPUなどの接続に使われる回路基板では、その信頼性を担保するうえで、想定される使用温度(例えば−15℃〜120℃)での電気的検査が求められている。   For a circuit board used under high or low temperature, particularly a circuit board used for connection to an in-vehicle application or a self-heating CPU, etc., in order to secure its reliability, an assumed operating temperature (for example, −15 ° C.) 〜120 ° C.).

そこで従来では、加熱源および/または冷却源を有する基板載置台(好ましくは負圧吸着型の基板載置台)を用い、被検査回路基板を基板載置台に一時的に固定し、加熱源または冷却源にて被検査回路基板を所定温度にまで加熱もしくは冷却して電気的検査を行うようにしている。   Therefore, conventionally, a circuit board to be inspected is temporarily fixed to the substrate mounting table using a substrate mounting table having a heating source and / or a cooling source (preferably, a negative pressure suction type substrate mounting table), and the heating source or the cooling source is cooled. The electrical inspection is performed by heating or cooling the circuit board to be inspected to a predetermined temperature at the source.

しかしながら、基板載置台に置かれる被検査回路基板の上面は開放状態のため、所定の温度に到達するまで時間がかかるうえに、所定温度到達後において、その温度を保ちにくい、という問題がある。   However, since the upper surface of the circuit board to be inspected placed on the substrate mounting table is in an open state, it takes a long time to reach a predetermined temperature, and it is difficult to maintain the temperature after reaching the predetermined temperature.

また、別の問題として、被検査回路基板に加えられる温度によって測定装置全体が加熱もしくは冷却されることから、測定系にも温度的な影響により誤差が生ずる、という問題がある。   Further, as another problem, since the entire measurement apparatus is heated or cooled by the temperature applied to the circuit board to be inspected, an error occurs in the measurement system due to the influence of temperature.

特許文献1には、被検査回路基板を基板載置台に負圧吸着により固定する際に、被検査回路基板の上面を基板保持用フィルムによって覆うことが記載されているが、これは被検査回路基板に生じている反りや歪みを矯正するためであり、温度に関しては何ら考慮されていない。   Patent Document 1 describes that when a circuit board to be inspected is fixed to a substrate mounting table by negative pressure suction, an upper surface of the circuit board to be inspected is covered by a substrate holding film. This is for correcting the warpage and distortion generated in the substrate, and no consideration is given to the temperature.

特開2001−235500号公報JP 2001-235500 A

したがって、本発明の課題は、被検査回路基板を所定温度にまで加熱もしくは冷却して電気的な検査を行うにあたって、所定温度までの到達時間を短くするとともに、到達後においてその基板温度を一定に保持し易くし、さらには測定系に温度的な影響を与えないようにすることにある。   Therefore, an object of the present invention is to shorten the time required to reach a predetermined temperature when heating or cooling a circuit board to be tested to a predetermined temperature to perform an electrical test, and to keep the substrate temperature constant after the temperature is reached. The purpose of the present invention is to make it easier to hold and not to affect the measuring system with temperature.

本発明には、第1の発明としての回路基板検査方法と、第2の発明としての回路基板検査装置とが含まれており、上記課題を解決するため、第1の発明は、基板載置台上に被検査回路基板を載置し、上記被検査回路基板を所定温度にまで加熱もしくは冷却した状態で所定の電気的検査を行う回路基板検査方法において、上記基板載置台上に被検査回路基板を載置して所定温度にまで加熱もしくは冷却するにあたって、上記被検査回路基板の上面全体を、電気絶縁性かつ耐熱・耐寒性を有し低熱伝導率で柔軟な保温シートで覆うことを特徴としている。   The present invention includes a circuit board inspection method as a first invention and a circuit board inspection apparatus as a second invention. In order to solve the above-described problems, the first invention is a board mounting table. A circuit board inspection method for mounting a circuit board to be inspected on the circuit board and performing a predetermined electrical inspection while the circuit board to be inspected is heated or cooled to a predetermined temperature. When mounting or heating or cooling to a predetermined temperature, the entire upper surface of the circuit board to be inspected is covered with a flexible heat insulating sheet having electrical insulation, heat resistance and cold resistance, low thermal conductivity and low thermal conductivity. I have.

また、第2の発明は、被検査回路基板が載置される基板載置台と、上記基板載置台上の上記被検査回路基板を加熱もしくは冷却する加熱・冷却手段と、検査プローブを含む電気的検査手段と、上記加熱・冷却手段および上記電気的検査手段を制御する制御手段とを備え、上記基板載置台上の上記被検査回路基板を上記加熱・冷却手段により所定温度にまで加熱もしくは冷却した状態で上記電気的検査手段にて所定の電気的検査を行う回路基板検査装置において、上記基板載置台上に載置されている上記被検査回路基板の上面全体を上記電気的検査が終了するまでの間覆う電気絶縁性かつ耐熱・耐寒性を有し低熱伝導率で柔軟な保温シートを備えていることを特徴としている。   According to a second aspect of the present invention, there is provided an electric circuit including a substrate mounting table on which a circuit board to be inspected is mounted, heating / cooling means for heating or cooling the circuit board to be inspected on the substrate mounting table, and an inspection probe. Inspection means, and control means for controlling the heating / cooling means and the electrical inspection means, wherein the circuit board to be inspected on the substrate mounting table is heated or cooled to a predetermined temperature by the heating / cooling means. In a circuit board inspection apparatus that performs a predetermined electrical inspection by the electrical inspection unit in a state, the entire upper surface of the circuit board to be inspected mounted on the substrate mounting table is subjected to the electrical inspection. It is characterized by being provided with a flexible heat insulating sheet having electrical insulation, heat resistance and cold resistance, low thermal conductivity, and a low thermal conductivity.

上記第1の発明および上記第2の発明において、上記保温シートとして、シリコーンシートが好ましく採用される。また、上記保温シートとして、異方性導電ゴムシートが用いられてもよい。   In the first invention and the second invention, a silicone sheet is preferably employed as the heat retaining sheet. Further, an anisotropic conductive rubber sheet may be used as the heat retaining sheet.

本発明によれば、被検査回路基板の上面全体を電気絶縁性で低熱伝導率の柔軟な保温シートで覆うことにより、所定温度までの到達時間を短くし得るとともに、到達後においてその基板温度を一定に保持し易くなり、さらには測定系への温度的な影響も少なくすることができる。   According to the present invention, by covering the entire upper surface of the circuit board to be inspected with a flexible heat insulating sheet having electrical insulation and low thermal conductivity, the time required to reach a predetermined temperature can be shortened, and the temperature of the substrate after reaching the predetermined temperature can be reduced. It is easy to keep the temperature constant, and it is also possible to reduce the influence of temperature on the measurement system.

本発明による回路基板検査装置の構成を示す模式図。FIG. 1 is a schematic diagram illustrating a configuration of a circuit board inspection device according to the present invention. 本発明の要部を示す斜視図。FIG. 2 is a perspective view showing a main part of the present invention.

次に、図1および図2を参照して、本発明の実施形態について説明するが、本発明はこれに限定されるものではない。 Next, an embodiment of the present invention will be described with reference to FIGS. 1 and 2, but the present invention is not limited to this.

図1および図2に示すように、この実施形態に係る回路基板検査装置は、被検査回路基板1が載置される基板載置台10と、電気的検査手段としての検査プローブ20と、装置全体を制御する制御手段30とを備えている。被検査回路基板1は、部品が実装されていないベアボード基板、部品が実装されている部品実装基板のいずれでもよい。   As shown in FIGS. 1 and 2, a circuit board inspection apparatus according to this embodiment includes a substrate mounting table 10 on which a circuit board 1 to be inspected is mounted, an inspection probe 20 as an electrical inspection means, and an entire apparatus. And control means 30 for controlling the The circuit board 1 to be inspected may be either a bare board substrate on which components are not mounted or a component mounting substrate on which components are mounted.

基板載置台10は、内部が空洞の扁平な直方体からなり、その上面10aに被検査回路基板1が載置される。この実施形態において、基板載置台10の上面10aには、内部の空洞に通ずる多数の空気吸込孔11が穿設されている。   The substrate mounting table 10 is formed of a flat rectangular parallelepiped with a hollow inside, and the circuit board 1 to be inspected is mounted on the upper surface 10a. In this embodiment, a large number of air suction holes 11 are formed in the upper surface 10a of the substrate mounting table 10 so as to communicate with the internal cavity.

基板載置台10はエアポンプ(真空ポンプ)Pに接続されており、エアポンプPによって内部の空気が吸引されることにより負圧となり、これによって、上面10aに載置されている被検査回路基板1が一時的に吸着固定される。エアポンプPのオンオフは、制御手段30によって制御される。   The substrate mounting table 10 is connected to an air pump (vacuum pump) P, and the internal air is sucked by the air pump P to be in a negative pressure, whereby the circuit board 1 to be inspected mounted on the upper surface 10a is reduced. Temporarily fixed by suction. ON / OFF of the air pump P is controlled by the control unit 30.

なお、基板載置台10の上面10aに連続気泡を有する通気性の絶縁シートを被せ、その上に被検査回路基板1を載置して吸着固定するようにしてもよい。また、吸着固定ではなく、図示しない例えば押圧ピンにて被検査回路基板1を固定するようにしてもよい。   Alternatively, the upper surface 10a of the substrate mounting table 10 may be covered with a permeable insulating sheet having open cells, and the circuit board 1 to be inspected may be mounted thereon and fixed by suction. Further, the circuit board 1 to be inspected may be fixed by, for example, a pressing pin (not shown) instead of the suction fixing.

図示しないが、基板載置台10は、被検査回路基板1を加熱するための加熱手段と、被検査回路基板1を冷却するための冷却手段とを備えている。加熱手段には電気ヒーターが用いられ、冷却手段にはチラーなどの空冷式が用いられてよい。検査目的によっては加熱手段もしくは冷却手段のいずれか一方が採用されてもよい。   Although not shown, the substrate mounting table 10 includes a heating unit for heating the circuit board 1 to be inspected, and a cooling unit for cooling the circuit board 1 to be inspected. An electric heater may be used as the heating means, and an air-cooled type such as a chiller may be used as the cooling means. Either heating means or cooling means may be employed depending on the purpose of inspection.

なお、必ずしも基板載置台10自体に加熱手段や冷却手段を備える必要はなく、高温雰囲気内や低温雰囲気内での加熱・冷却、または、高温空気や低温空気の送風による加熱・冷却も本発明に含まれる。   Note that it is not always necessary to provide a heating means or a cooling means on the substrate mounting table 10 itself, and heating / cooling in a high-temperature atmosphere or a low-temperature atmosphere, or heating / cooling by blowing high-temperature air or low-temperature air is also included in the present invention. included.

基板載置台10には、温度センサー12が設けられている。温度センサー12は、被検査回路基板1の温度を測定するため、好ましくは基板載置台10の上面(基板載置面)10aの近傍に配置される。温度センサー12にて測定された温度信号は制御手段30に送られる。   A temperature sensor 12 is provided on the substrate mounting table 10. The temperature sensor 12 is preferably disposed near the upper surface (substrate mounting surface) 10 a of the substrate mounting table 10 to measure the temperature of the circuit board 1 to be inspected. The temperature signal measured by the temperature sensor 12 is sent to the control means 30.

検査プローブ20には、少なくとも2本の検査プローブ20a,20bが含まれている。この2本の検査プローブ20a,20bに加えて、図示しないガード用の検査プローブがさらに設けられてもよい。用いる検査プローブ20の本数には特に制限はない。   The inspection probe 20 includes at least two inspection probes 20a and 20b. In addition to the two inspection probes 20a and 20b, a guard inspection probe (not shown) may be further provided. There is no particular limitation on the number of test probes 20 used.

この実施形態において、検査プローブ20a,20bはフライングプローブで、その各々がプローブ移動機構21a,21bに保持されている。プローブ移動機構21a,21bは、制御手段30からのアドレス情報に基づいて、検査プローブ20a,20bをX−Y−Z(左右−前後−垂直)方向に個別に移動させる。   In this embodiment, the inspection probes 20a and 20b are flying probes, each of which is held by the probe moving mechanisms 21a and 21b. The probe moving mechanisms 21a and 21b individually move the inspection probes 20a and 20b in the XYZ (left-right-front-back-vertical) directions based on the address information from the control means 30.

制御手段30には、好ましくはマイクロコンピュータもしくはそれと同等の機能を有する電子デバイスが用いられる。制御手段30は、温度センサー12からの温度情報に基づいて、加熱手段もしくは冷却手段を制御する。   As the control means 30, a microcomputer or an electronic device having a function equivalent thereto is preferably used. The control unit 30 controls the heating unit or the cooling unit based on the temperature information from the temperature sensor 12.

また、制御手段30は、検査プローブ20a,20bからの測定信号に基づいて、例えば被検査回路基板1の良否判定を行い、その結果を表示部31に表示する。   In addition, the control unit 30 determines, for example, the quality of the circuit board 1 to be inspected based on the measurement signals from the inspection probes 20a and 20b, and displays the result on the display unit 31.

この回路基板検査装置では、高温検査として、加熱手段により被検査回路基板1を所定温度にまで加熱してから、もしくは、低温検査として、冷却手段により被検査回路基板1を所定温度にまで冷却してから、検査プローブ20a,20bにより例えば2つの端点間の導通検査等を行う。   In this circuit board inspection apparatus, the circuit board under test 1 is heated to a predetermined temperature by a heating means as a high temperature test, or the circuit board 1 is cooled down to a predetermined temperature by a cooling means as a low temperature test. Thereafter, for example, a continuity test between two end points is performed by the test probes 20a and 20b.

この高温検査時や低温検査時において、被検査回路基板1を所定温度に到達させる時間を短縮するため、本発明では、被検査回路基板1に保温シート40を被せる。   In order to reduce the time required for the circuit board 1 to be inspected to reach a predetermined temperature during the high-temperature inspection and the low-temperature inspection, in the present invention, the heat-insulating sheet 40 is put on the circuit board 1 to be inspected.

保温シート40は、電気絶縁性および耐熱・耐寒性があり、かつ、低熱伝導率で柔軟性に富むシートであることが好ましく、このようなシートとしては、例えば30μm〜100μm(特には50μm)程度の極めて薄いシリコーンシートが最適である。   The heat retaining sheet 40 is preferably a sheet having electrical insulation, heat and cold resistance, low thermal conductivity, and high flexibility. Such a sheet is, for example, about 30 μm to 100 μm (particularly, about 50 μm). An extremely thin silicone sheet is best.

検査ステップについて説明すると、基板載置台10の上面10aに被検査回路基板1を載置した後、その上に保温シート40を被せる。そして、エアポンプPを起動して被検査回路基板1を吸着する。   The inspection step will be described. After the circuit board 1 to be inspected is mounted on the upper surface 10a of the substrate mounting table 10, the heat insulating sheet 40 is placed thereon. Then, the air pump P is activated to suck the circuit board under test 1.

保温シート40は、被検査回路基板1よりも面積的に大きいことが好ましく、これによれば、保温シート40を被検査回路基板1とともに基板載置台10の上面10aに吸着固定することができる。   The heat retaining sheet 40 is preferably larger in area than the circuit board 1 to be inspected. According to this, the heat retaining sheet 40 can be suction-fixed together with the circuit board 1 to be inspected to the upper surface 10a of the substrate mounting table 10.

しかる後、加熱手段もしくは冷却手段を動作させて、被検査回路基板1を加熱もしくは冷却し、所定温度になるまで待つ。このとき、被検査回路基板1は保温シート40によって覆われて熱が逃げにくくなっているため、所定温度になるまでの時間を短縮することができる。   Thereafter, the heating means or the cooling means is operated to heat or cool the circuit board 1 to be inspected, and wait until a predetermined temperature is reached. At this time, since the circuit board 1 to be inspected is covered with the heat retaining sheet 40 and it is difficult for heat to escape, it is possible to reduce the time required to reach the predetermined temperature.

所定温度に到達したら、検査プローブ20a,20bを下降させ、保温シート(シリコーンシート)40を突き破って測定ポイント(例えば、所定の端点)に接触させて、2端点間の導通検査を行う。検査が終了したら、吸着を解除して被検査回路基板1を保温シート40とともに基板載置台10から外し、次の検査待ちの状態とする。   When the temperature reaches the predetermined temperature, the inspection probes 20a and 20b are lowered, the heat insulation sheet (silicone sheet) 40 is pierced and brought into contact with a measurement point (for example, a predetermined end point) to conduct a continuity test between the two end points. When the inspection is completed, the suction is released, and the circuit board 1 to be inspected is removed from the substrate mounting table 10 together with the heat retaining sheet 40, and the state is awaiting the next inspection.

以上説明したように、本発明によれば、被検査回路基板1を保温シート40によって覆うことにより被検査回路基板1から熱が逃げにくくなっているため、所定温度になるまでの時間を短縮することができる。   As described above, according to the present invention, since the circuit board under test 1 is covered with the heat retaining sheet 40, it is difficult for heat to escape from the circuit board 1 under test, so that the time required to reach the predetermined temperature is reduced. be able to.

また、所定温度に到達後において、その基板温度を一定に保持し易くなり、さらには測定系への温度的な影響も少なくすることができる。   Further, after reaching the predetermined temperature, the substrate temperature can be easily maintained at a constant value, and the influence of the temperature on the measurement system can be reduced.

上記実施形態では、保温シート40をシリコーンシートとしているが、保温シート40として、異方性導電ゴムシートを使用することもできる。これによれば、検査プローブ20a,20bで保温シート40を突き破ることなく、検査プローブ20a,20bを所定の測定ポイントに電気的に接続することができる。   In the above embodiment, the heat retaining sheet 40 is a silicone sheet. However, the heat retaining sheet 40 may be an anisotropic conductive rubber sheet. According to this, the inspection probes 20a and 20b can be electrically connected to predetermined measurement points without breaking through the heat retaining sheet 40 with the inspection probes 20a and 20b.

1 被検査回路基板
10 基板載置台
10a 上面(基板載置面)
11 空気吸込孔
12 温度センサー
20(20a,20b) 検査プローブ
21a,21b プローブ移動機構
30 制御手段
31 表示部
40 保温シート
DESCRIPTION OF SYMBOLS 1 Inspection circuit board 10 Substrate mounting base 10a Upper surface (substrate mounting surface)
DESCRIPTION OF SYMBOLS 11 Air suction hole 12 Temperature sensor 20 (20a, 20b) Inspection probe 21a, 21b Probe moving mechanism 30 Control means 31 Display part 40 Heat insulation sheet

Claims (6)

基板載置台上に被検査回路基板を載置し、上記被検査回路基板を所定温度にまで加熱もしくは冷却した状態で所定の電気的検査を行う回路基板検査方法において、
上記基板載置台上に被検査回路基板を載置して所定温度にまで加熱もしくは冷却するにあたって、上記被検査回路基板の上面全体を、電気絶縁性かつ耐熱・耐寒性を有し低熱伝導率で柔軟な保温シートで覆うことを特徴とする回路基板検査方法。
A circuit board inspection method of mounting a circuit board to be inspected on a substrate mounting table and performing a predetermined electrical inspection in a state where the circuit board to be inspected is heated or cooled to a predetermined temperature,
When the circuit board to be inspected is placed on the board mounting table and heated or cooled to a predetermined temperature, the entire upper surface of the circuit board to be inspected is electrically insulated and has heat resistance, cold resistance and low thermal conductivity. A circuit board inspection method characterized by covering with a flexible heat insulating sheet.
上記保温シートとして、シリコーンシートを用いることを特徴とする請求項1に記載の回路基板検査方法。   The circuit board inspection method according to claim 1, wherein a silicone sheet is used as the heat retaining sheet. 上記保温シートとして、異方性導電ゴムシートを用いることを特徴とする請求項1に記載の回路基板検査方法。   The circuit board inspection method according to claim 1, wherein an anisotropic conductive rubber sheet is used as the heat retaining sheet. 被検査回路基板が載置される基板載置台と、上記基板載置台上の上記被検査回路基板を加熱もしくは冷却する加熱・冷却手段と、検査プローブを含む電気的検査手段と、上記加熱・冷却手段および上記電気的検査手段を制御する制御手段とを備え、上記基板載置台上の上記被検査回路基板を上記加熱・冷却手段により所定温度にまで加熱もしくは冷却した状態で上記電気的検査手段にて所定の電気的検査を行う回路基板検査装置において、
上記基板載置台上に載置されている上記被検査回路基板の上面全体を少なくとも上記電気的検査が終了するまでの間覆う電気絶縁性かつ耐熱・耐寒性を有し低熱伝導率で柔軟な保温シートを備えていることを特徴とする回路基板検査装置。
A substrate mounting table on which a circuit board to be inspected is mounted; heating / cooling means for heating or cooling the circuit board to be inspected on the substrate mounting table; electrical inspection means including an inspection probe; Means and a control means for controlling the electrical inspection means, wherein the circuit board to be inspected on the substrate mounting table is heated or cooled to a predetermined temperature by the heating / cooling means. In a circuit board inspection device that performs a predetermined electrical inspection by
Electrical insulation, heat and cold resistance, low thermal conductivity and flexible heat insulation covering the entire upper surface of the circuit board to be inspected mounted on the substrate mounting table at least until the electric inspection is completed. A circuit board inspection device comprising a sheet.
上記保温シートとして、シリコーンシートを用いることを特徴とする請求項4に記載の回路基板検査装置。   The circuit board inspection device according to claim 4, wherein a silicone sheet is used as the heat retaining sheet. 上記保温シートとして、異方性導電ゴムシートを用いることを特徴とする請求項4に記載の回路基板検査装置。   The circuit board inspection device according to claim 4, wherein an anisotropic conductive rubber sheet is used as the heat retaining sheet.
JP2018140840A 2018-07-27 2018-07-27 Circuit board inspection method and circuit board inspection device Pending JP2020016591A (en)

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