JP2020000955A - Through-hole filling method and apparatus used therefor - Google Patents

Abstract

To provide a through-hole filling method for reliably filling a through-hole formed on a film with a coating material, and an apparatus used therefor.SOLUTION: A method for filling a through-hole in a coating object region with a coating material by an ink jet system includes processes of: acquiring an image in a coating object region by a plurality of line scan cameras arranged in a gantry part while moving the gantry part in one direction in a plane view; calculating coordinates of the through-hole from the image in the coating object region; and filling the through-hole with the coating material by discharging the coating material from at least one nozzle which is arranged in the gantry part and is configured to change the position based on the coordinates while moving the gantry part in a direction opposite from the direction in acquiring the image in the coating object region.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a through hole filling method and an apparatus used for the method.

  2. Description of the Related Art There is known a method of discharging a coating material onto a coating target region of a film using an inkjet head. For example, in Patent Literature 1, a plurality of linear grooves 110 are formed in a coating target area 100a of a film 100, and a plurality of pairs of a head 210 and a camera 220 installed in a gantry section 200 are formed in the grooves 110. The application material is discharged (see FIGS. 17A and 17B). If the entire application target area 100a cannot be applied at once, the application target area 100a is divided into a plurality of partial areas. In FIG. 17B, the area is divided into three partial areas 100b to 100d. The head 210 and the camera 220 are integrated, and each set is movable in the X-axis direction. The gantry unit 200 is movable in the Y-axis direction. In FIG. 17B, the gantry section 200 is omitted for convenience.

  The application method is as follows. First, an image of the groove 110 included in the partial region 100b is acquired while moving the camera 220 in the X-axis and Y-axis directions. Next, image processing is performed to calculate a correction value based on the amount of deviation of the groove 110 from the center of the camera visual field. Next, the camera and the head are returned to their original positions, and the coating material is discharged from the head 210 into the groove included in the partial area 100b while reflecting the correction value. When the head moves to the left end of the partial area 100b and starts coating, the camera acquires an image of a groove included in the next partial area 100c and calculates a correction value. That is, in the filling method of Patent Document 1, during the coating operation by the head, an image of the next partial area is acquired, the correction value is calculated, and the coating material can be accurately applied to the groove based on the correction value.

JP 2011-143390 A

  However, a method of filling a coating material into a through hole formed in a film and an apparatus used for the method have not yet been found. Further, even if a conventional coating method as disclosed in Patent Document 1 is applied to a film in which a through hole is formed, there is a problem that it is difficult to reliably fill the through hole with a coating material. This is for the following reason. In the conventional method, since the next partial area needs to be in the field of view of the camera during the application, the interval between the application locations, that is, the interval between the through holes adjacent in the X-axis direction must be substantially constant. . Film has the property of easily expanding and contracting, and in actual manufacturing, the film often expands and contracts. Therefore, the next partial region does not enter the field of view of the camera, and it is difficult to calculate an accurate correction value. Therefore, it is difficult to reliably fill the through hole with the coating material.

  The present invention has been made to solve the above-described problems, and provides a through-hole filling method capable of reliably filling a coating material into a through-hole formed in a film, and an apparatus used for the method. With the goal.

  Hereinafter, a plurality of modes will be described as means for solving the problems. These embodiments can be arbitrarily combined as needed.

The filling method of the through hole of the present invention,
A method of filling a coating material by an inkjet method into through holes formed in a plurality of application target areas of the film,
While moving the gantry part in one direction in a plan view, a step of acquiring an image of an application target area including a plurality of through holes with a plurality of line scan cameras arranged in the gantry part,
A step of calculating the coordinates of the through hole from the image of the application target area,
While moving the gantry in the direction opposite to the direction in which the image of the application target area is acquired, the coating material is discharged from at least one nozzle arranged in the gantry and configured to be able to change its position based on coordinates. Filling a through-hole with a coating material.

In addition, the gantry unit has means for acquiring position information of the gantry unit in the moving direction,
The step of acquiring an image of the application target area includes adding position information to a linear image acquired by a line scan camera, and constructing a plurality of acquired linear images into a plane image,
The step of calculating the coordinates may include detecting an image of the through-hole from the surface image using a pattern search and calculating the coordinates of the image of the through-hole.

The through-hole filling apparatus of the present invention is an apparatus for filling a coating material by an inkjet method into a plurality of through-holes formed in a region to be coated of a film,
A gantry part that can move on a plane,
A plurality of line scan cameras arranged in the gantry section and acquiring an image of an application target area including through holes while the gantry section moves,
A nozzle that is disposed at least in the gantry, is individually changeable in position, and discharges a coating material;
Means for calculating the coordinates of the through hole from the image of the application target area.

  In addition, the gantry unit may include a unit that acquires position information of the gantry unit in the moving direction.

  The method of filling a through hole according to the present invention is a method of filling an application material by an inkjet method into a plurality of through holes formed in a coating target region of a film, and moving the gantry part in one direction in a plan view, Obtaining an image of a coating target area including a plurality of through holes with a plurality of line scan cameras arranged in the unit, calculating the coordinates of the through hole from the image of the coating target area, and calculating the image of the coating target area. While moving the gantry in the direction opposite to the direction of acquisition, the coating material is discharged from at least one nozzle arranged in the gantry and configured to be able to change the position based on coordinates, and the coating material is discharged into the through hole. And a filling step.

  Therefore, according to the through-hole filling method of the present invention, it is possible to reliably fill the through-hole formed in the film with the coating material.

  The through-hole filling apparatus of the present invention is an apparatus that fills a plurality of through-holes formed in an application target region of a film with an application material by an ink-jet method, and a plurality of gantry sections that can move in a plane and a plurality of gantry sections are arranged. A line scan camera for acquiring an image of an application target area including a through-hole while the gantry section moves, a nozzle which is disposed in the gantry section and can be individually changed in position and discharges an application material, Means for calculating the coordinates of the through hole from the image of the target area.

  Therefore, the through-hole filling apparatus of the present invention can reliably fill the through-hole formed in the film with the coating material.

It is a typical perspective view showing one embodiment of a through hole filling method of the present invention. (A) It is a typical sectional view showing an example of the system containing one embodiment of the through-hole filling device of the present invention. (B) It is a schematic plan view showing one embodiment of a through-hole filling device. FIG. 3 is a schematic cross-sectional view illustrating an example of a location of a line scan camera. It is a typical sectional view showing an example of an arrangement place of a nozzle. FIG. 2 is a schematic cross-sectional view illustrating an example of a location where a line scan camera and a nozzle are arranged. FIG. 2 is a schematic cross-sectional view illustrating an example of a location where a line scan camera and a nozzle are arranged. 1 is a flowchart illustrating an embodiment of a through hole filling method according to the present invention. It is a schematic plan view which shows an example of the calculation method of the coordinate of a through hole. 5 is a flowchart showing another embodiment of the through hole filling method of the present invention. FIG. 4 is a schematic partial enlarged plan view illustrating an example of a position information acquisition unit. FIG. 9 is a schematic plan view illustrating an example of a process of constructing a plane image from a line-shaped image. FIG. 9 is a schematic plan view showing a method of calculating through-hole coordinates by pattern search. It is a schematic plan view which shows another embodiment of the through-hole filling method of this invention. It is a schematic plan view which shows another embodiment of the through-hole filling method of this invention. FIG. 3 is a schematic plan view showing a positional relationship between a nozzle and a film. FIG. 3 is a schematic plan view showing a positional relationship between a nozzle and a film. (A) It is a schematic plan view which shows an example of the conventional coating device. (B) It is a typical perspective view showing an example of the conventional application device.

  Hereinafter, an example of each embodiment of the through-hole filling method of the present invention and an apparatus used therefor will be described with reference to the drawings.

  The through-hole filling apparatus 2 of the present invention is an apparatus that fills a plurality of through-holes 10 formed in an application target area 1a of a film 1 with an application material 11 by an ink-jet method. A plurality of line scan cameras 21 are arranged in the unit 20 and acquire an image I1 of the application target area including the through hole 10 while the gantry unit 20 moves, and at least one is arranged in the gantry unit 20 and can be individually changed in position. And a means for calculating the coordinates Ct of the through holes from the image I1 of the application target area (see FIG. 2).

  FIG. 2A is a schematic cross-sectional view illustrating an example of the entire device including the through-hole filling device 2. The film 1 having a plurality of through-holes is unwound from the unwinding device 3, the through-hole is filled with the coating material by the through-hole filling device 2, and the coating material is dried by the drying device 5 through the dancer device 4. The film 1 is wound by the winding device 6.

  A plurality of through holes 10 are formed in the film 1. The arrangement of the through holes is not particularly limited. For example, an array having regularity such as a matrix shape or a random array having no regularity may be used. The through hole can be formed by a known method such as a laser, and has a diameter of, for example, 30 μm to 100 μm.

  The application target area 1a is an area that can be filled by a single filling operation. When the filling of the coating target area 1a is completed, the film 1 is fed in the X-axis direction in the drawing, and the next coating target area 1a is arranged on the stage 26. Note that a circuit may be formed on the film 1 by printing or photolithography.

  The through-hole filling device 2 includes a gantry unit 20 that can move in a plane (see FIG. 2B). The gantry unit 20 is configured to be movable in the Y-axis direction by two Y-axis driving units 23 disposed at both ends of the application target region 1a so as to straddle the film 1. As the Y-axis driving means 23, for example, a mechanism combining a motor and a ball screw can be used.

  In the gantry section 20, a plurality of line scan cameras 21 are arranged. A line scan camera is a camera equipped with a one-dimensional sensor (for example, a linear CCD) as an image sensor. One line scan camera acquires an image of one line within the field of view by one scan. Since a plurality of line scan cameras are arranged, a line-shaped image of the application target region 1a can be acquired by one scan by the plurality of line scan cameras. By repeating scanning over the application target area 1a while moving the gantry unit 20 in the Y-axis direction, a plurality of line-shaped images of the application target area 1a are obtained. A plurality of line images are constructed on the surface image, and the entire image of the application target area 1a can be obtained. The number of the line scan cameras 21 can be arbitrarily determined depending on the desired resolution and the area of the application target region 1a. The location of the line scan camera 21 is not particularly limited as long as an image of the application target area 1a can be acquired (see FIGS. 3A to 3C).

  In the gantry section 20, at least one nozzle 22 is arranged. The method of discharging the coating material from the nozzle 22 is an ink jet method. The nozzle 22 is configured such that the position can be changed in the X-axis direction by, for example, the X-axis driving unit 24. As the X-axis driving means 24, for example, a mechanism combining a motor and a ball screw can be used. In FIG. 2B, four nozzles are arranged, but each nozzle 22 can be individually moved in the X-axis direction by each X-axis driving unit 24. Note that the nozzle 22 may be configured to be able to change its position in the Z-axis direction by, for example, the Z-axis driving unit 25. The number of the nozzles 22 can be any number depending on the number of through holes and the area of the application target region 1a. The location of the nozzle 22 is not particularly limited as long as the application material can be discharged to the through hole 10 (see FIGS. 4A to 4C).

  The line scan camera 21 and the nozzle 22 may be arranged on the same surface of the gantry unit 20 (see FIGS. 6A and 6B) or may be arranged on different surfaces (FIGS. 5A to 5B). f)). When the nozzles are arranged on the same plane, the line scan camera 21 does not prevent the nozzle from moving in the X-axis direction. FIGS. 5A and 5B show an example in which the line scan camera 21 and the nozzle 22 are respectively arranged on opposing surfaces of the gantry unit 20. FIGS. 5C and 5D show an example in which the nozzle 22 is arranged on the lower surface of the gantry section 20. FIGS. 5E and 5F show examples in which the line scan camera 21 is arranged on the lower surface of the gantry section 20. FIG.

  Further, the through-hole filling device 2 includes means (not shown) for calculating the coordinates Ct of the through-hole from the image I1 of the application target area. The means is, for example, image processing, and a computer can be used for the image processing.

  The through-hole filling device 2 may include a stage 26 (see FIG. 2B). A suction hole for fixing the film 1 to the stage 26 may be formed in the stage 26. The through-hole filling device 2 may include a film push-up bar 27 whose position can be changed in the Z-axis direction (see FIG. 2B). The film lifting bar 27 is raised when the film 1 is fed in the X-axis direction, and can separate the film 1 fixed to the stage 26 from the stage 26. While the film is being fed, the film push-up bar 27 may be lowered.

  In addition, the through-hole filling device 2 may be provided with illumination such as an LED. Illumination can be installed, for example, in a line scan camera, beside a line scan camera, a lower surface of a gantry, or beside a nozzle.

  The method of filling a through hole according to the present invention is a method of filling a plurality of through holes 10 formed in an application target region 1a of a film 1 with an application material 11 by an ink jet method. Step S1 of acquiring an image I1 of a coating target area including a plurality of through holes 10 with a plurality of line scan cameras 21 arranged in a gantry unit 20 while moving, and coordinates Ct of through holes from the image I1 of the coating target area. , And moving the gantry unit 20 in a direction opposite to the direction in which the image I1 of the application target area is acquired, and configured to change the position based on the coordinates Ct disposed on the gantry unit 20. Discharging the coating material 11 from at least one nozzle 22 to fill the through-hole 10 with the coating material 11. Those (see FIG. 1, FIG. 7).

(Step S1)
First, an image I1 of the application target area 1a is acquired by the plurality of line scan cameras 21 while moving the gantry unit 20 in one direction in a plan view. In the state where the film feeding is stopped, the gantry unit 20 is moved in the direction of the arrow shown in FIG. Scan in the shape. The image obtained by one scan is a line. The line image of the application target area 1a thus obtained is processed into an image of the entire application target area 1a. That is, it becomes a plane image. The timing of processing the line-shaped image into the surface image may be after scanning of the entire application target area 1a or during the scanning of the application target area 1a.

(Step S2)
Next, the coordinates Ct of the through holes are calculated from the image I1 of the application target area obtained above. In order to accurately fill the through hole 10 with the coating material, the center of the through hole 10 and the center of the nozzle 22 need to be aligned. Therefore, the coordinates Ct of the through hole become the center of the through hole 10. The coordinates Ct can be calculated by a known image processing method, for example, the following method.
(1) An arbitrary point in the image I1 of the application target area is set as the origin (0, 0), and the coordinates Ct of each through hole are obtained based on the origin (see FIG. 8A)
(2) An arbitrary point of the image I1 of the application target area is set as the origin (0, 0), and the coordinates Ct1 of any one of the through holes are obtained based on this point. Next, the coordinates of Ct1 are set to the temporary origin (0, 0), and the coordinates Ct2 of the next through hole are obtained. Using Ct2 as the temporary origin (0, 0), the next coordinate Ct3 is obtained. Hereinafter, similarly, the coordinates of each through hole are obtained (see FIG. 8B).
(3) An origin mark is set on the stage 26 itself, and the coordinates Ct of the through hole are obtained based on the origin mark. In the cases (1) and (3), the coordinates Ct are absolute coordinates, and in the case of (2), the relative coordinates are relative coordinates. It is. The arbitrary point in the above (2) may be a positioning mark provided in the application target area 1a.

  In addition, the gantry unit 20 has a unit that acquires position information of the gantry unit 20 in the moving direction, and the step S1 of acquiring the image I1 of the application target area includes the position information The step of calculating the coordinates Ct includes constructing the plurality of acquired line-shaped images I2 into the plane image I3, and detecting the through-hole image I4 from the plane image I3 by using a pattern search. May be calculated (see FIG. 9).

  As means for acquiring the position information of the gantry unit 20 in the moving direction, for example, a linear encoder can be used. Examples of the linear encoder system include an optical system, a magnetic system, an electromagnetic induction system, and a capacitance system, and an optical system capable of detecting with high resolution is preferable. The optical system uses a diffracted light generated by irradiating a diffraction grating, which is a scale, with light, and converts a light intensity change corresponding to a displacement amount into an electric signal by a light receiving element. As an example, FIG. 10 shows a reflective optical linear encoder. FIG. 10 is a partially enlarged view of FIG. In FIG. 10, the main scale 23a is installed on the side surface of the Y-axis driving means 23, and the detection head 7 is installed on the upper surface of the gantry unit 20 at a position facing the main scale 23a. The main scale 23a is fixed to the Y-axis driving means 23 and does not move, but the detection head 7 is fixed to the gantry section 20 and moves together with the gantry section 20. The detection head 7 includes an index scale 71, a light receiving element 72, and a light emitting element 73 therein. The index scale 71 corresponds to the above-described diffraction grating.

  With the above-described means, the accurate position of the gantry unit 20 in the moving direction can be known.

  The step S1 of acquiring the image I1 of the application target area (see FIG. 7) includes the following. While acquiring the linear image I2 with the plurality of line scan cameras 21 (FIG. 9; S11), the positional information acquiring means acquires the positional information of the gantry unit 20 in the moving direction (FIG. 9; S12). Each time the line-shaped image I2 is obtained, position information is added to the line-shaped image I2, and a plurality of obtained line-shaped images I2 are constructed as a plane image I3 (FIG. 9; S13).

This will be described specifically. For example, the X coordinate of the initial position of the gantry portion 20 x, the Y coordinate is 0, and obtains the line-shaped image I2 ₁ at a point from which linearly moved by y ₁ in the Y axis direction (FIG. 11 (a) (B)). Linear image I2 ₁ is obtained by as already described above, a plurality of line-shaped images obtained by a plurality of line scan cameras in one long line-shaped image. The position information acquisition means, the position of the gantry portion 20 is (x, -y ₁₎ is detected and, the location information is added to the line-shaped image I2 _1. Thereafter gantry section 20 is line-shaped image I2 ₂ at a point which is linearly moved by y ₁ is obtained by the line scan camera 21. At this time gantry portion 20 due to the position apart 2y ₁ from the initial position, the position information added to the line-shaped image I2 ₂ becomes (x, -2y _1). Similarly, the gantry unit 20 further _{y 1} only linearly moved by the line-shaped image I2 ₃ acquired at the point was, the position information (x, -3y ₁₎ is added.

  In this way, a plurality of linear images I2 are continuously obtained over the application target area 1a, and position information is added to the linear images. Since a plurality of linear images are constructed as the surface image I3 based on the position information, it is possible to prevent the surface image I3 from expanding or contracting more than the actual application target region 1a. That is, the actual application target area 1a can be accurately formed into a surface image.

  The step S2 (see FIG. 7) of calculating the coordinates Ct of the through hole includes the following. An image I4 of the through hole 10 is detected from the surface image I3 obtained as described above by a pattern search (FIG. 9; S21), and the coordinates of the image I4 are calculated (FIG. 9; S22). The calculated coordinates become the coordinates Ct of the through hole.

  The pattern search is a method of searching for a portion similar to a reference pattern (search model) registered in advance from within a search range. For example, the search model S is moved in the X-axis direction in the plane image I3 to search for a similar pattern (see FIG. 12A). At this time, a correlation value between the search model and a similar through-hole pattern is calculated to determine how similar the two are. Therefore, the use of the pattern search makes it possible to accurately detect through-hole patterns. In addition, it is possible to inspect the through hole having a low correlation value for the presence or absence of deformation, chipping, inclusion of foreign matter, and the like. If there is a similar pattern, the position (x, y) of the pattern is output (see FIG. 12B). In this manner, the surface image I3 is searched, and the position of the pattern similar to the search model S is output as the through-hole coordinates Ct. Based on the coordinates of the through holes, the coating material is discharged from the nozzle 22 and filled in the through holes (FIG. 9; S3).

  In the filling method according to this aspect, the actual application target area can be constructed into an accurate surface image by the above-described position information acquisition unit. Then, by using the pattern search, it is possible to accurately detect the pattern of the through hole from within the plane image.

  Note that the gantry section 20 and the film 1 may have a positional relationship as shown in FIGS. FIG. 13 shows the gantry unit 20 and the Y-axis driving unit 23 shown in FIG. 2B rotated 90 degrees to the left. By determining the length of the Y-axis driving means 23 in the Y-axis direction, the size of the application target area 1a can be determined. FIG. 14 shows the film 1 shown in FIG. 2B inclined at 45 degrees. Through holes 10 are formed in 4 rows and 4 columns in the application target area 1a. 15 and 16 are plan views showing the positional relationship between the nozzle 22 and the film 1, respectively. When the film 1 extends in the X-axis direction (see FIG. 15), each of the four nozzles 22a to 22d fills one row of through holes 10 arranged in the Y-axis direction with the coating material. On the other hand, when the film 1 is inclined at 45 degrees (see FIG. 16), for example, the plurality of nozzles respectively fill the plurality of rows of through holes 10 arranged in the Y-axis direction with the coating material. That is, in FIG. 16, the moving range of the nozzle in the X-axis direction can be made wider than in the case of FIG. Therefore, it is easy to finely adjust the movement of the nozzle in the X-axis direction.

  In the above embodiment, a long film is used, but a single-wafer film may be used.

1: film 10: through-hole 11: coating material 1a: coating target area 2: through-hole filling device 20: gantry section 21: line scan camera 22: nozzle 23: Y-axis driving means 23a: main scale 24: X-axis driving means 25: Z-axis driving means 26: Stage 27: Film push-up bar I1: Image of coating target area I2: Line-shaped image I3: Surface image I4: Image of through-hole Ct: Coordinate of through-hole S: Search model 3: Winding Outing device 4: Dancer device 5: Drying device 6: Winding device 7: Detection head 71: Index scale 72: Light receiving device 73: Light emitting device 100: Film 100a: Application target region 100b to 100d: Partial region 110: Groove 200: Gantry section 210: Head 220: Camera

Claims (4)

A method of filling a coating material by an inkjet method into through holes formed in a plurality of application target areas of the film,
While moving the gantry part in one direction in a plan view, a step of acquiring an image of the application target area including a plurality of the through holes with a plurality of line scan cameras arranged in the gantry part,
Calculating the coordinates of the through hole from the image of the application target area,
While moving the gantry in the direction opposite to the direction in which the image of the application target area is obtained, the coating is performed from at least one nozzle arranged in the gantry and configured to be capable of changing its position based on the coordinates. And filling the through-hole with the coating material by discharging a material. The gantry section has a unit for acquiring position information of the moving direction of the gantry section,
The step of acquiring an image of the application target area includes adding the position information to a linear image acquired by the line scan camera, and constructing a plurality of acquired linear images into a plane image,
The method of filling a through hole according to claim 1, wherein the step of calculating the coordinates includes detecting an image of the through hole using a pattern search from the surface image, and calculating coordinates of the image of the through hole. . An apparatus for filling a coating material by an inkjet method into through holes formed in a plurality of application target areas of the film,
A gantry part that can move on a plane,
A plurality of line scan cameras arranged in the gantry section and acquiring an image of the application area including the through hole while the gantry section moves,
A nozzle that is disposed at least in the gantry, is individually changeable in position, and discharges the coating material;
Means for calculating the coordinates of the through hole from the image of the application area.   4. The through-hole filling device according to claim 3, wherein the gantry unit has a unit that acquires position information of the gantry unit in a moving direction.

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