JP2019522925A5 - - Google Patents
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- Publication number
- JP2019522925A5 JP2019522925A5 JP2018564926A JP2018564926A JP2019522925A5 JP 2019522925 A5 JP2019522925 A5 JP 2019522925A5 JP 2018564926 A JP2018564926 A JP 2018564926A JP 2018564926 A JP2018564926 A JP 2018564926A JP 2019522925 A5 JP2019522925 A5 JP 2019522925A5
- Authority
- JP
- Japan
- Prior art keywords
- cmut cells
- cmut
- layer
- group
- transducer array
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP16174192 | 2016-06-13 | ||
| EP16174192.1 | 2016-06-13 | ||
| PCT/EP2017/064363 WO2017216139A1 (en) | 2016-06-13 | 2017-06-13 | Broadband ultrasound transducer |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2019522925A JP2019522925A (ja) | 2019-08-15 |
| JP2019522925A5 true JP2019522925A5 (enExample) | 2020-07-27 |
| JP7216550B2 JP7216550B2 (ja) | 2023-02-01 |
Family
ID=56120966
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2018564926A Active JP7216550B2 (ja) | 2016-06-13 | 2017-06-13 | 広帯域超音波トランスジューサ |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US11400487B2 (enExample) |
| EP (1) | EP3468726B1 (enExample) |
| JP (1) | JP7216550B2 (enExample) |
| CN (1) | CN109311055B (enExample) |
| WO (1) | WO2017216139A1 (enExample) |
Families Citing this family (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9917535B2 (en) * | 2012-05-31 | 2018-03-13 | Koninklujke Philips N.V. | Wafer and method of manufacturing the same |
| JP2018013368A (ja) * | 2016-07-20 | 2018-01-25 | 古野電気株式会社 | 水中探知装置 |
| US11039814B2 (en) | 2016-12-04 | 2021-06-22 | Exo Imaging, Inc. | Imaging devices having piezoelectric transducers |
| US10656007B2 (en) * | 2018-04-11 | 2020-05-19 | Exo Imaging Inc. | Asymmetrical ultrasound transducer array |
| US10648852B2 (en) * | 2018-04-11 | 2020-05-12 | Exo Imaging Inc. | Imaging devices having piezoelectric transceivers |
| CN112470214A (zh) | 2018-05-21 | 2021-03-09 | 艾科索成像公司 | 具有q值突变的超声换能器 |
| EP3830877B8 (en) | 2018-08-01 | 2026-05-13 | Exo Imaging, Inc. | Systems and methods for integrating ultrasonic transducers with hybrid contacts |
| WO2021050853A1 (en) | 2019-09-12 | 2021-03-18 | Exo Imaging, Inc. | Increased mut coupling efficiency and bandwidth via edge groove, virtual pivots, and free boundaries |
| CN110749343A (zh) * | 2019-09-29 | 2020-02-04 | 杭州电子科技大学 | 基于六边形网格布局的多频带mems超声换能器阵列 |
| EP3909691A1 (en) * | 2020-05-14 | 2021-11-17 | Koninklijke Philips N.V. | An ultrasound transducer and a tiled array of ultrasound transducers |
| US11472537B2 (en) * | 2020-12-07 | 2022-10-18 | Gregory Hubert Piesinger | Artificial buoyancy method and apparatus |
| CN112845002B (zh) * | 2020-12-31 | 2022-01-14 | 武汉大学 | Mems宽频带超声波换能器阵列 |
| US11819881B2 (en) | 2021-03-31 | 2023-11-21 | Exo Imaging, Inc. | Imaging devices having piezoelectric transceivers with harmonic characteristics |
| US11951512B2 (en) | 2021-03-31 | 2024-04-09 | Exo Imaging, Inc. | Imaging devices having piezoelectric transceivers with harmonic characteristics |
| US12486159B2 (en) | 2021-06-30 | 2025-12-02 | Exo Imaging, Inc. | Micro-machined ultrasound transducers with insulation layer and methods of manufacture |
| CN114367431B (zh) * | 2022-01-10 | 2023-05-23 | 京东方科技集团股份有限公司 | 一种换能器及其制备方法 |
| CN114950925B (zh) * | 2022-06-06 | 2023-05-23 | 清华大学 | 柔性可延展微机电系统超声阵列及医用超声诊断设备 |
| CN117654862A (zh) * | 2022-08-30 | 2024-03-08 | 华为技术有限公司 | 一种超声换能组件和超声换能阵列 |
| WO2024130610A1 (en) * | 2022-12-21 | 2024-06-27 | Nec Corporation | Method, device and computer readable medium for communications |
| CN115971020B (zh) * | 2023-01-17 | 2024-09-10 | 京东方科技集团股份有限公司 | 超声换能器及其制作方法以及超声换能系统 |
| WO2025003867A1 (en) * | 2023-06-26 | 2025-01-02 | Terumo Kabushiki Kaisha | Ultrasound measurement device |
| US12611697B2 (en) | 2023-09-01 | 2026-04-28 | GE Precision Healthcare LLC | Higher bandwidth micromachined transducers mixed with biasing scheme |
Family Cites Families (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5619476A (en) | 1994-10-21 | 1997-04-08 | The Board Of Trustees Of The Leland Stanford Jr. Univ. | Electrostatic ultrasonic transducer |
| US6283919B1 (en) | 1996-11-26 | 2001-09-04 | Atl Ultrasound | Ultrasonic diagnostic imaging with blended tissue harmonic signals |
| US6458083B1 (en) | 1996-11-26 | 2002-10-01 | Koninklijke Philips Electronics N.V. | Ultrasonic harmonic imaging with adaptive image formation |
| US6013032A (en) | 1998-03-13 | 2000-01-11 | Hewlett-Packard Company | Beamforming methods and apparatus for three-dimensional ultrasound imaging using two-dimensional transducer array |
| US5997479A (en) | 1998-05-28 | 1999-12-07 | Hewlett-Packard Company | Phased array acoustic systems with intra-group processors |
| US6530885B1 (en) | 2000-03-17 | 2003-03-11 | Atl Ultrasound, Inc. | Spatially compounded three dimensional ultrasonic images |
| US6443896B1 (en) | 2000-08-17 | 2002-09-03 | Koninklijke Philips Electronics N.V. | Method for creating multiplanar ultrasonic images of a three dimensional object |
| US6468216B1 (en) | 2000-08-24 | 2002-10-22 | Kininklijke Philips Electronics N.V. | Ultrasonic diagnostic imaging of the coronary arteries |
| US7547283B2 (en) * | 2000-11-28 | 2009-06-16 | Physiosonics, Inc. | Methods for determining intracranial pressure non-invasively |
| DE10122765A1 (de) | 2001-05-10 | 2002-12-05 | Campus Micro Technologies Gmbh | Elektroakustischer Wandler zur Erzeugung oder Erfassung von Ultraschall, Wandler-Array und Verfahren zur Herstellung der Wandler bzw. der Wandler-Arrays |
| EA013166B1 (ru) * | 2005-07-26 | 2010-02-26 | Бьорн А.Й. Ангельсен | Решетки ультразвуковых преобразователей с двумя частотными диапазонами |
| US7615834B2 (en) | 2006-02-28 | 2009-11-10 | The Board Of Trustees Of The Leland Stanford Junior University | Capacitive micromachined ultrasonic transducer(CMUT) with varying thickness membrane |
| GB2459866B (en) | 2008-05-07 | 2011-08-31 | Wolfson Microelectronics Plc | Mems transducer |
| JP5511260B2 (ja) | 2009-08-19 | 2014-06-04 | キヤノン株式会社 | 容量型電気機械変換装置、及びその感度調整方法 |
| US8563345B2 (en) * | 2009-10-02 | 2013-10-22 | National Semiconductor Corporated | Integration of structurally-stable isolated capacitive micromachined ultrasonic transducer (CMUT) array cells and array elements |
| EP2455133A1 (en) | 2010-11-18 | 2012-05-23 | Koninklijke Philips Electronics N.V. | Catheter comprising capacitive micromachined ultrasonic transducers with an adjustable focus |
| EP2750806B1 (en) | 2011-12-20 | 2019-05-08 | Koninklijke Philips N.V. | Ultrasound transducer device and method of manufacturing the same |
| JP6073855B2 (ja) * | 2012-02-23 | 2017-02-01 | 株式会社日立製作所 | 超音波診断装置及び超音波探触子 |
| JP5986441B2 (ja) | 2012-07-06 | 2016-09-06 | キヤノン株式会社 | 静電容量型トランスデューサ |
| JP6143427B2 (ja) * | 2012-07-27 | 2017-06-07 | オリンパス株式会社 | 超音波振動子及び超音波振動子を用いた超音波内視鏡 |
| US20140265720A1 (en) | 2013-03-14 | 2014-09-18 | The Royal Institution For The Advancement Of Learning / Mcgill University | Methods and devices relating to capacitive micromachined diaphragms and transducers |
| WO2015028945A2 (en) | 2013-08-27 | 2015-03-05 | Koninklijke Philips N.V. | Variable frequency control of collapsed mode cmut transducer |
| US20160199030A1 (en) * | 2013-08-27 | 2016-07-14 | Koninklijke Philips N.V. | Dual mode cmut transducer |
| WO2016008833A1 (en) * | 2014-07-16 | 2016-01-21 | Koninklijke Philips N.V. | Tiled cmut dies with pitch uniformity |
-
2017
- 2017-06-13 CN CN201780036829.9A patent/CN109311055B/zh active Active
- 2017-06-13 WO PCT/EP2017/064363 patent/WO2017216139A1/en not_active Ceased
- 2017-06-13 EP EP17731510.8A patent/EP3468726B1/en active Active
- 2017-06-13 JP JP2018564926A patent/JP7216550B2/ja active Active
- 2017-06-13 US US16/309,170 patent/US11400487B2/en active Active
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