JP2019219226A - Sensor device - Google Patents

Abstract

To measure a differential AC voltage with good accuracy.SOLUTION: A conversion unit of a sensor device converts an inputted AC or DC voltage into other energy. A conversion amount measurement unit measures the amount of energy converted by the conversion unit. A differential voltage calculation unit corrects the voltage value of a reference voltage and thereby calculates the voltage value of a differential voltage using the amount of energy measured by the conversion amount measurement unit when a differential voltage between a first AC voltage and a second AC voltage is inputted to the conversion unit and the amount of energy measured by the conversion amount measurement unit when a single-end reference voltage is inputted to the conversion unit.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a sensor device.

Phase (angle) measurement is performed in various fields (for example, see Patent Documents 1 and 2). Many of these measurements use the cosine theorem, and are also called trivoltmeter methods in the electrical field. This is because, in the case of the electric field, when measuring the phase difference (θ ₂ −θ ₁ ) between two AC signals having phases θ ₁ and θ ₂ , respectively, the AC voltage values V ₁ and V _{2 of} these AC signals are measured. If, measured and the difference voltage V _D, is a method for obtaining the phase difference using the cosine theorem as shown in the following equation (1).

Japanese Patent No. 6230489 Japanese Patent No. 5171925

When the phase difference is obtained as described above, the AC voltage values V ₁ and V ₂ of the two AC signals are used. These can be measured with high accuracy. Meanwhile, the difference voltage (differential AC voltage) V _D of the alternating current, for single-ended (one end is the ground potential) are not, cause a reduction in measurement accuracy of such expansion of the measurement error and uncertainty. The decrease in the accuracy of the difference voltage measurement affects the accuracy of the phase difference measurement.

  In view of the above circumstances, an object of the present invention is to provide a sensor device that can accurately measure an AC difference voltage.

  One embodiment of the present invention is a conversion unit that converts an input AC or DC voltage to another energy, a conversion amount measurement unit that measures the amount of the energy converted by the conversion unit, and a first AC voltage. The amount of energy measured by the conversion amount measurement unit when a differential voltage with respect to the second AC voltage is input to the conversion unit, and the conversion amount measurement when a single-ended reference voltage is input to the conversion unit. A differential voltage calculating unit that calculates the voltage value of the differential voltage by correcting the voltage value of the reference voltage using the amount of energy measured by the unit. It is.

  One embodiment of the present invention is a conversion unit that converts an input AC or DC voltage to another energy, a conversion amount measurement unit that measures the amount of the energy converted by the conversion unit, and a first AC voltage. The amount of energy measured by the conversion amount measurement unit when a differential voltage with respect to the second AC voltage is input to the conversion unit, and the conversion amount measurement when a single-ended reference voltage is input to the conversion unit. Using the amount of energy measured by the unit, a differential voltage calculation unit that calculates the voltage value of the differential voltage by correcting the voltage value of the reference voltage, and the voltage value of the first AC voltage Using the voltage value of the second AC voltage and the voltage value of the differential voltage calculated by the differential voltage calculation unit, the phase difference between the first AC voltage and the second AC voltage by cosine theorem. And a phase difference calculator for calculating Preparative a sensor apparatus according to claim.

  One embodiment of the present invention is the above-described sensor device, wherein the conversion unit is a thermal converter, and the conversion amount measurement unit measures heat converted by the conversion unit using a DC voltage.

  One embodiment of the present invention is the above-described sensor device, wherein the first AC voltage and the second AC voltage when the differential voltage is input to the conversion unit, and the conversion unit converts the reference voltage into the conversion unit. A measuring unit that measures the reference voltage when inputting the, and instructs the correction of the voltage value of the first AC voltage according to the voltage value of the first AC voltage measured by the measuring unit, Instruct the correction of the voltage value of the second AC voltage according to the voltage value of the second AC voltage measured by the measurement unit, the voltage of the reference voltage according to the voltage value of the reference voltage measured by the measurement unit A control unit for instructing the correction of the value.

  One embodiment of the present invention is the above-described sensor device, further including a voltage compensating unit that compensates for a voltage drop of the first AC voltage, the second AC voltage, and the reference voltage due to a load effect in the conversion unit. .

  One embodiment of the present invention is the above-described sensor device, wherein the reference voltage is a DC voltage or an AC voltage.

  According to the present invention, it is possible to accurately measure an AC difference voltage.

It is a figure showing composition of a sensor device in one embodiment of the present invention. FIG. 4 is a diagram illustrating an output voltage from a thermal converter and a relative error according to the first embodiment. FIG. 4 is a diagram illustrating a phase difference calculated by a calculation unit and a phase difference measured by a phase meter in the same embodiment. FIG. 4 is a diagram illustrating a phase difference calculated by a calculation unit and a phase difference measured by a phase meter in the same embodiment. FIG. 4 is a diagram illustrating a phase difference calculated by a calculation unit and a phase difference measured by a phase meter in the same embodiment. FIG. 4 is a diagram illustrating a phase difference calculated by a calculation unit and a phase difference measured by a phase meter in the same embodiment. It is a figure showing other composition of a sensor device in the embodiment. It is a figure showing still another composition of the sensor device in the embodiment.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
FIG. 1 is a diagram showing a configuration of a sensor device 1 according to one embodiment of the present invention. The sensor device 1 operates as a differential voltage measurement sensor and a phase difference sensor. The sensor device 1 inputs two channels of AC voltages, a first AC voltage and a second AC voltage, and measures a differential voltage (difference voltage) that is a differential AC voltage between them. Further, the sensor device 1 measures a phase difference between the first AC voltage and the second AC voltage using the measured differential voltage. In the present embodiment, a case where the two-channel (Ch) AC voltage generator 3 generates the two-channel AC voltage to be measured will be described as an example. The AC generator that generates the first AC voltage may be different from the AC generator that generates the second AC voltage.

  As shown in FIG. 1, the sensor device 1 includes a multiplexer (MUX) 11, a reference voltage generator 12, a first voltage measuring device 13, a second voltage measuring device 14, a thermal converter (TVC) 15, A third voltage measuring device 16, a phase meter 17, a clock 18, control units 20 a, 20 b, 20 c and a calculation unit 21 are provided. Note that one or more of the control units 20a, 20b, 20c and the arithmetic unit 21 may be realized by an external device such as a computer device connected to the sensor device 1. Further, the sensor device 1 may be configured not to include the phase meter 17 and the control unit 20c.

  The multiplexer 11 switches the voltage to be output to the first voltage measuring device 13, the second voltage measuring device 14, the thermal converter 15, and the phase meter 17. The reference voltage generator 12 generates a single-ended reference voltage having one end at the ground potential. The first voltmeter 13 and the second voltmeter 14 are voltmeters. The first voltage measuring device 13 measures the voltage value of the first AC voltage or the reference voltage output from the multiplexer 11. The second voltage measuring device 14 measures a voltage value of the second AC voltage output from the multiplexer 11. The thermal converter 15 receives a differential voltage or a reference voltage between the first AC voltage and the second AC voltage, converts the input voltage into heat as another energy, converts the converted heat into a DC voltage, and outputs the DC voltage. The third voltage measuring device 16 is a voltmeter. The third voltage measuring device 16 measures the value of the DC voltage output from the thermal converter 15. The phase meter 17 is a conventional phase difference sensor. The phase meter 17 measures a differential voltage between the first AC voltage and the second AC voltage. The clock 18 outputs a clock signal for instructing the switching timing to the multiplexer 11.

  The control unit 20a performs feedback control so that the voltage value measured by the first voltage measuring device 13 becomes a predetermined voltage value. The control unit 20b performs feedback control so that the voltage value measured by the second voltage measuring device 14 becomes a predetermined voltage value. The control unit 20c performs feedback control of the phases of the first AC voltage and the second AC voltage based on the measurement value of the phase meter 17. The calculation unit 21 includes a differential voltage calculation unit 22 and a phase difference calculation unit 23. The differential voltage calculator 22 calculates the DC voltage value measured by the third voltage measuring device 16 when the differential voltage is input to the thermal converter 15 and the third voltage measurement when the reference voltage is input to the thermal converter 15. The differential voltage is calculated by correcting the voltage value of the reference voltage using the DC voltage value measured by the detector 16. The phase difference calculation unit 23 uses the voltage value of the first AC voltage, the voltage value of the second AC voltage, and the differential voltage calculated by the differential voltage calculation unit 22 to calculate the first AC voltage Calculate the phase difference between the two AC voltages.

Subsequently, the operation of the sensor device 1 will be described. It is assumed that the first voltmeter 13, the second voltmeter 14, and the third voltmeter 16 have been calibrated. The two-channel AC voltage generator 3 outputs a Ch1 AC voltage signal SV ₁ (first AC voltage) and a Ch2 AC voltage signal SV ₂ (second AC voltage) having different phase angles. Multiplexer 11, by switching to the code A side, alternating voltage signal SV ₁ a first voltage measuring device 13, and outputs to the thermal converter 15 and the phase meter 17, an AC voltage signal SV ₂ second voltage measuring device 14. Output to the thermal converter 15 and the phase meter 17. At this time, the multiplexer 11, an AC voltage signal SV ₁ at one end of the thermal converter 15, and inputs an AC voltage signal SV ₂ to the other end of the thermal converter 15. Thus, the differential voltage of the two AC voltage and an AC voltage signal SV ₁ and an AC voltage signal SV ₂ is input to the thermal converter 15.

The thermal converter 15 includes a heater resistor and a thermocouple. Therefore, when inputting an AC voltage signal SV ₁ and the AC voltage signal SV ₂ to the thermal converter 15, the voltage drop of the two AC voltage signals are caused by the loading effect of the heater resistor. Therefore, the control unit 20a performs feedback control of the alternating voltage signal SV _1. That is, the control section 20a, two channels alternating a command instructing the voltage change of the voltage value of the AC voltage signal SV ₁ measured by the first voltage measuring unit 13 is corrected so that the desired voltage value V ₁ Transmit to the voltage generator 3. Similarly, the control unit 20b performs feedback control of the alternating voltage signal SV _2. That is, the control portion 20b, 2-channel AC command for voltage changes of the voltage value of the AC voltage signal SV ₂ measured by the second voltage measuring device 14 is corrected so that the desired voltage value V ₂ Transmit to the voltage generator 3.

The above feedback control, the measured value of the AC voltage signal SV ₁ in the first voltage measuring device 13 into a voltage value V _1, the measurement value of the AC voltage signal SV ₂ in the second voltage measuring device 14 becomes a voltage value V ₂ After the adjustment, the third voltage measuring device 16 measures the output value of the thermal converter 15 to obtain the voltage value TVC _DIF . Further, the phase meter 17 measures the phase difference φ of the AC voltage signal SV ₁ and an AC voltage signal SV ₂ input by the different electrical path from the multiplexer 11. When receiving the notification from the control unit 20a and the control unit 20b that the measured value has become the desired voltage value, the calculation unit 21 calculates the voltage value TVC _DIF measured by the third voltage measurement device 16 and the phase meter 17 To obtain the measured phase difference φ. Further, the arithmetic unit 21, the voltage value _{V 1} from the control unit 20a or the first voltage measuring unit 13 obtains the voltage value _{V 2} from the control unit 20b or the second voltage measuring device 14. The voltage value V ₁ and the voltage value V ₂ may be registered in advance in the calculation unit 21.

The reference voltage generator 12 generates a single-ended DC voltage signal SV _DC (reference voltage). The multiplexer 11 switches to the code B side at a timing based on the external clock signal output from the clock 18. Thus, multiplexer 11 switches the voltage signal _{SV DC} the reference voltage generator 12 inputs occurs. Multiplexer 11 outputs a voltage signal _{SV DC} input to the first voltage measuring device 13 and the thermal converter 15.

First voltage measuring device 13 measures the voltage of the voltage signal _{SV DC.} Control unit 20a performs feedback control of the voltage signal _{SV DC} by using this measurement result. That is, the control unit 20a transmits to the reference voltage generator 12 a command instructing a voltage change so that the voltage value of the voltage signal SV _DC measured by the first voltage measuring device 13 becomes a desired voltage value _VDC. . It is desirable that the voltage value V _DC and the voltage value V ₁ be the same, but they may be different. After the measured value of the voltage signal SV _DC in the first voltage measuring device 13 is adjusted to the voltage value _VDC by the feedback control, the third voltage measuring device 16 measures the output value of the thermal converter 15 and Obtain the value TVC _SE . Calculating section 21 acquires the voltage value TVC _SE of the third voltage measuring device 16 is measured when the measured value from the control unit 20a receives a notification that a desired voltage value. Further, the calculation unit 21 acquires the voltage value _VDC from the control unit 20a or the first voltage measurement device 13. In addition, the voltage value _VDC may be registered in the calculation unit 21 in advance.

The differential voltage calculator 22 of the calculator 21 calculates the relative error ρ of the output of the thermal converter by using the following expression (2) using the voltage value TVC _DIF and the voltage value TVC _SE .

The coefficient n in the equation (2) is, for example, 2. Differential voltage calculation unit 22 uses the voltage value _{V DC} relative error ρ and the voltage signal _{SV DC,} calculates the differential voltage _{V 12} according to the following equation (3).

Phase difference calculation unit 23 of the arithmetic unit 21 calculates the equation (4) below the phase difference θ of the AC voltage signal SV ₁ by using the cosine theorem and an AC voltage signal SV _2.

  The difference (φ−θ) between the phase difference θ calculated by the phase difference calculation unit 23 according to the above equation and the phase difference φ measured by the phase meter 17 is an error of the phase meter 17. The phase difference calculation unit 23 may calibrate the phase meter 17 using this error (φ−θ).

Further, the adjustment of the phase angle of the AC voltage signal SV ₁ and an AC voltage signal SV _2, may be used a measurement result by the phase meter 17. Specifically, it switches the multiplexer 11 to the code A side inputs the AC voltage signal SV ₁ and the AC voltage signal SV ₂ to the phase meter 17. Control unit 20c, so that the phase difference between the alternating voltage signal SV ₁ measured by the phase meter 17 and an AC voltage signal SV ₂ becomes a desired value, for adjusting the phase to two-channel AC voltage generator 3 Output a command.

  The reference voltage generator 12 may generate an AC reference voltage. When the reference voltage generator 12 generates an AC reference voltage, the sensor device 1 operates in the same manner as described above.

Subsequently, a result of measurement using the sensor device 1 will be described.
FIG. 2 is a diagram illustrating an output voltage (TVC output) from the thermal converter 15 and a relative error. In the figure, the voltage value TVC _DIF when the differential voltage is input to the thermal converter 15, the voltage value TVC _SE when the reference voltage is input to the thermal converter 15, the voltage value TVC _DIF and the voltage value TVC _{SE are shown.} And the calculated relative error ρ. FIG. 3 is a diagram illustrating a calculation result of the phase difference θ by the phase difference calculation unit 23 when the measurement illustrated in FIG. 2 is performed, and a phase difference φ measured by the phase meter 17.

2 and 3, V ₁ = V ₂ = 1 V and the phase difference is 60 °. After the thirteenth measurement, V ₁ = V ₂ = 3 V, and the measurement was returned to V ₁ = V ₂ = 1 V again and the 14th and subsequent measurements were performed. Similarly, after the 18th measurement, V ₁ = V ₂ = 5 V was set, V ₁ = V ₂ = 1V again, and the 19th and subsequent measurements were performed. After the 23rd measurement, V ₁ = V ₂ = 10 V, and the measurement was returned to V ₁ = V ₂ = 1 V again, and the 24th and subsequent measurements were performed. Then, after the 28th measurement, after the elapse of 2 days, the 29th and subsequent measurements were performed. In one measurement, input of a differential voltage, input of a reference voltage of 1 V AC, input of a differential voltage, input of a reference voltage of 1 V AC, and input of a differential voltage are performed in this order, and the voltage values TVC _DIF , The average value of each of the voltage values TVC _SE was taken. The above measurement procedure is for canceling the output drift from the thermal converter 15. When the reference voltage is a DC voltage, the input of a differential voltage, the input of a DC 1 V reference voltage, the input of a differential voltage, the input of a DC-1 V reference voltage, and the input of a differential voltage are performed in this order. The average value of each of the value TVC _DIF and the voltage value TVC _SE is taken.

  As shown in FIG. 2, it can be seen that the output from the thermal converter 15 changes due to the influence of application of 3 to 10 V or the influence of drift on the way, but the relative error ρ has almost no effect. As a result, as shown in FIG. 3, it can be understood that the phase difference θ calculated by the calculation unit 21 substantially matches the phase difference φ measured by the phase meter 17.

4 shows a phase difference θ and a phase difference φ when V ₁ = V ₂ = 3 V and a phase difference of 60 °, and FIG. 5 shows a phase difference θ when V ₁ = V ₂ = 5 V and a phase difference of 60 °. FIG. 6 is a diagram showing the phase difference θ and the phase difference φ when V ₁ = V ₂ = 10 V and the phase difference is 60 °. 4 and 5, the sixth measurement was performed two days after the fifth measurement. According to these figures, a deviation of 1 to 2 m ° (millidegree) is seen in the case of 3 V shown in FIG. 4 and in the case of 10 V shown in FIG. 6, but this can be said to be an error of the phase meter 17 itself.

  As described above, according to the sensor device 1 of the present embodiment, the differential voltage and the phase difference of the two-channel AC signal can be measured with high accuracy, and the phase meter can be calibrated.

  Note that the sensor device 1 may include a conversion unit that converts the input voltage into another energy such as light, instead of the thermal converter 15.

  In the above-described sensor device 1, the voltage reduced by the load effect is increased by the feedback control. However, the voltage may not be reduced by using a buffer amplifier as in the sensor device 1a illustrated in FIG.

FIG. 7 is a diagram illustrating a configuration of the sensor device 1a. In the figure, the same parts as those of the sensor device 1 shown in FIG. The sensor device 1a shown in the figure differs from the sensor device 1 shown in FIG. 1 in that it does not include the control units 20a, 20b, and 20c, and that it includes a buffer amplifier 31. Buffer amplifier 31 is an AC voltage signal SV _1, AC voltage signal SV _2, provided in the path until the voltage signal _{SV AC} input from the output of the thermal converter 15. In the figure, the three buffer amplifiers 31 are described as buffer amplifiers 31a, 31b and 31c. The buffer amplifiers 31a and 31b are provided between the two-channel AC voltage generator 3 and the multiplexer 11, and the buffer amplifier 31c is provided between the reference voltage generator 12 and the multiplexer 11. The buffer amplifier 31 may be provided in the multiplexer 11 or between the multiplexer 11 and the thermal converter 15.

  When a voltage is input to the thermal converter 15, a current flows, and the voltage changes due to a load effect. The buffer amplifier 31 is an electronic circuit that senses an input voltage and suppresses a load effect by flowing a current so that the voltage becomes constant. By providing the buffer amplifier 31 in the sensor device 1a, feedback control becomes unnecessary. Note that the sensor device 1a may be provided with a resistor instead of the buffer amplifier 31.

  In each of the sensor devices 1 and 1a, the operation when the reference voltage generator 12 generates the DC reference voltage is the same as the operation when the AC reference voltage is generated, but the DC reference voltage has higher accuracy. Can be expected. When an alternating current is used, one of the voltage signals to be measured may be used instead of the reference voltage, as in a sensor device 1b shown in FIG.

FIG. 8 is a diagram illustrating a configuration of the sensor device 1b. In the figure, the same parts as those of the sensor device 1 shown in FIG. Sensor device 1b shown in the figure, different from the sensor device 1 shown in Figure 1, that it does not include a reference voltage generator 12, a multiplexer AC voltage signal SV ₁ in place of the voltage signal SV DC _(reference voltages) 11 is to be input. When the multiplexer 11 switches to the code B, the control unit 20a performs feedback control on the two-channel AC voltage generator 3.

  In order to improve the accuracy of the phase measurement, it is necessary to measure the differential AC voltage with high accuracy. According to the above-described embodiment, by using a thermal converter or the like to obtain a measurement error accompanying the measurement of the differential AC voltage based on comparison with a single-ended DC voltage or an AC voltage, phase measurement of 1 m ° or less is obtained. Was made possible.

  The control units 20a, 20b, 20c and the operation unit 21 include a CPU (Central Processing Unit), a memory, and an auxiliary storage device connected by a bus, and realize the above-described functions by executing a program. Note that all or a part of each function of the control units 20a, 20b, 20c and the arithmetic unit 21 includes hardware such as an ASIC (Application Specific Integrated Circuit), a PLD (Programmable Logic Device), and an FPGA (Field Programmable Gate Array). It may be realized by using. The program may be recorded on a computer-readable recording medium. The computer-readable recording medium is, for example, a portable medium such as a flexible disk, a magneto-optical disk, a ROM, and a CD-ROM, and a storage device such as a hard disk built in a computer system. The program may be transmitted via a telecommunication line.

  According to the embodiment described above, the sensor device includes the conversion unit, the conversion amount measurement unit, and the differential voltage calculation unit. For example, the conversion unit is the thermal converter 15, and the DC voltage measurement unit is the third voltage measurement device 16. The conversion unit converts the input AC or DC voltage into another energy. The conversion amount measuring unit measures the amount of energy converted by the conversion unit. The differential voltage calculator is configured to calculate the amount of energy measured by the conversion amount measuring unit when the differential voltage between the first AC voltage and the second AC voltage is input to the converter, and a single-ended DC or AC reference voltage. Is calculated by correcting the voltage value of the reference voltage by using the amount of energy measured by the conversion amount measuring unit when is input to the converting unit. The sensor device uses the voltage value of the first AC voltage, the voltage value of the second AC voltage, and the voltage value of the differential voltage calculated by the differential voltage calculation unit to calculate the first AC voltage and the second AC voltage by the cosine theorem. A phase difference calculator for calculating a phase difference with the AC voltage may be further provided.

  Further, the sensor device may further include a control unit and a correction unit. For example, the measurement units are the first voltage measurement device 13 and the second voltage measurement device 14, and the correction units are the control units 20a and 20b. The measurement unit measures the first AC voltage and the second AC voltage when the differential voltage is input to the conversion unit, and the reference voltage when the reference voltage is input to the conversion unit. The control unit instructs the correction of the voltage value of the first AC voltage according to the voltage value of the first AC voltage measured by the measurement unit, and the second AC voltage according to the voltage value of the second AC voltage measured by the measurement unit. An instruction to correct the voltage value of the voltage is issued, and an instruction to correct the voltage value of the reference voltage is issued according to the voltage value of the reference voltage measured by the measuring unit.

  Alternatively, the sensor device may further include a voltage compensation unit that compensates for a voltage drop of the first AC voltage, the second AC voltage, and the reference voltage due to a load effect in the conversion unit. For example, the voltage compensating unit is the buffer amplifier 31 or a resistor.

  As described above, the embodiments of the present invention have been described in detail with reference to the drawings. However, the specific configuration is not limited to the embodiments, and includes a design and the like within a range not departing from the gist of the present invention.

DESCRIPTION OF SYMBOLS 1 ... Sensor device, 1a ... Sensor device, 1b ... Sensor device, 11 ... Multiplexer, 12 ... Reference voltage generator, 13 ... First voltage measuring device, 14 ... Second voltage measuring device, 15 ... Thermal converter, 16 ... Tri-voltage measuring device, 17: phase meter, 18: clock, 20a: control unit, 20b: control unit, 20c: control unit, 21: arithmetic unit, 22: differential voltage calculation unit, 23: phase difference calculation unit, 31a ... buffer amplifier, 31b ... buffer amplifier, 31c ... buffer amplifier

Claims (6)

A conversion unit that converts the input AC or DC voltage to other energy,
A conversion amount measurement unit that measures the amount of the energy converted by the conversion unit,
When the amount of energy measured by the conversion amount measurement unit when a differential voltage between the first AC voltage and the second AC voltage is input to the conversion unit, and when a single-ended reference voltage is input to the conversion unit Using the amount of energy measured by the conversion amount measurement unit, a differential voltage calculation unit that calculates the voltage value of the differential voltage by correcting the voltage value of the reference voltage,
A sensor device comprising: A conversion unit that converts the input AC or DC voltage to other energy,
A conversion amount measurement unit that measures the amount of the energy converted by the conversion unit,
When the amount of energy measured by the conversion amount measurement unit when a differential voltage between the first AC voltage and the second AC voltage is input to the conversion unit, and when a single-ended reference voltage is input to the conversion unit Using the amount of energy measured by the conversion amount measurement unit, a differential voltage calculation unit that calculates the voltage value of the differential voltage by correcting the voltage value of the reference voltage,
Using the voltage value of the first AC voltage, the voltage value of the second AC voltage, and the voltage value of the differential voltage calculated by the differential voltage calculation unit, the first AC voltage and the voltage by the cosine theorem. A phase difference calculator for calculating a phase difference with the second AC voltage,
A sensor device comprising: The conversion unit is a thermal converter,
The conversion amount measurement unit measures the heat converted by the conversion unit by a DC voltage,
The sensor device according to claim 1 or 2, wherein: Measurement for measuring the first AC voltage and the second AC voltage when the differential voltage is input to the conversion unit, and the reference voltage when the reference voltage is input to the conversion unit Department and
Instruct the correction of the voltage value of the first AC voltage according to the voltage value of the first AC voltage measured by the measurement unit, the second AC voltage according to the voltage value of the second AC voltage measured by the measurement unit A control unit that instructs correction of the voltage value of the two AC voltages, and instructs correction of the voltage value of the reference voltage according to the voltage value of the reference voltage measured by the measurement unit;
The sensor device according to any one of claims 1 to 3, further comprising: A voltage compensating unit that compensates for a voltage drop of the first AC voltage, the second AC voltage, and the reference voltage due to a load effect in the conversion unit;
The sensor device according to any one of claims 1 to 3, further comprising: The reference voltage is a DC voltage or an AC voltage,
The sensor device according to any one of claims 1 to 5, wherein:

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