JP2019174404A - Environmental test device - Google Patents

Abstract

To provide an environmental test device capable of reducing the influence of the test-room indoor environment on a vibration generation device or the like.SOLUTION: An environmental test device includes: a test room 11; an attachment unit (sample table) for fixing a testing object; a drive unit; and a drive-unit installation unit 16. The attachment unit is disposed in the test room 11, and the drive unit is disposed in the drive-unit installation unit 16. A partition member 7 partitions the test room 11 and the drive-unit installation unit 16. The partition member 7 has a multilayer structure having at least a test-room-side thin film 52 and a drive-unit-side thin film 53. An inter-film space 80 is disposed between the test-room-side thin film 52 and the drive-unit-side thin film 53, and gas exists in the inter-film space 80.SELECTED DRAWING: Figure 7

Description

  The present invention relates to an environmental test apparatus capable of exposing a device under test to a predetermined environment. In particular, the present invention relates to an environmental test apparatus having a function of giving a motion such as vibration to a device under test.

One method for evaluating product performance is environmental testing. In the environmental test, a product is placed in a specific environment and a change in performance or the like is tested. The environmental test may be performed using an apparatus called an environmental test apparatus.
The environmental test apparatus has a test room in which a DUT is installed. The environmental test apparatus is an apparatus that artificially creates a desired environment such as a high temperature environment, a low temperature environment, high humidity, or low humidity in a test chamber.
One of the environmental test apparatuses is an apparatus called a vibration combined environmental test apparatus. In addition to the function of creating an environment such as a desired temperature, the vibration composite environment test apparatus has a function of vibrating a device under test.
The vibration combined environment test apparatus is for testing the durability of a member mounted on an automobile, for example.For example, in order to reproduce the environment inside the hood of a running automobile, Expose to low temperature environment and test performance and durability.

The vibration composite environment test apparatus includes a test room that creates a desired environment and a vibration generator that vibrates a device under test as described in Patent Document 1.
The vibration generator may have a large outer shape and may be installed outside the test room.
For example, there is a partition member at the bottom of the test chamber, and a vibration generator may be installed outside the partition member.

Japanese Patent No. 3694829 Utility Model Registration No. 2578999 (Japanese Utility Model Publication No. 6-53958)

Since vibration generators have many drive parts, they hate rust. Therefore, it is contraindicated that moisture that causes rust adheres.
On the other hand, a high temperature environment and a low temperature environment are created in the test chamber. When the test chamber is in a low temperature environment, the temperature of the outer surface (vibration generator side) of the partition member may decrease, causing condensation on the outer surface of the partition member and dripping onto the vibration generator.
In the environmental test apparatus disclosed in Patent Document 2, since the vibration table is installed outside the test room, it may not be possible to guarantee that the environment in which the DUT is placed is the same as the environment in the test room.

  The present invention eliminates the above-mentioned concerns of the prior art, and an object of the present invention is to provide an environmental test apparatus that can reduce the influence of the environment in the tank on the vibration generator and the like.

  An aspect for solving the above-described problems includes: a test chamber capable of creating a desired environment therein; an attachment portion that fixes a test object; a drive portion that moves the attachment portion; and a drive portion installation portion. In the environmental test apparatus, the attachment portion is in the test chamber, the drive portion is in the drive portion installation portion, and includes a partition member that partitions the test chamber and the drive portion installation portion, and the drive portion It is possible to perform a test while moving the attachment portion and applying motion to the DUT, and the partition member has a multilayer structure having at least a test chamber side thin film and a drive portion side thin film, and the test chamber There is an intermembrane space between the side thin film and the drive unit side thin film, and the environment test apparatus is characterized in that gas exists in the intermembrane space.

In the environmental test apparatus according to this aspect, the test object can be attached to the attachment part, and a motion such as vibration can be given to the test object.
In the environmental test apparatus of this aspect, since the attachment portion is in the test chamber, the DUT is placed in an environment created in the test chamber.
In the environmental test apparatus of this aspect, the test chamber and the drive unit installation space are partitioned by a partition member, and the partition member has an intermembrane space inside and has a gas layer.
Therefore, the partition member has high heat insulating properties, and even if the temperature in the test chamber is low, the temperature of the outer surface of the driving unit side thin film does not become so low. For this reason, dew condensation is unlikely to occur on the drive part installation part side of the partition member.

  In the above-described aspect, it is desirable that the test chamber-side thin film has a solid layer and a foam layer, and the foam layer is disposed on the intermembrane space side.

  In the environmental test apparatus of this aspect, the test chamber side thin film has a foam layer. Since the foam layer has high heat insulating properties, dew condensation is unlikely to occur on the drive portion installation portion side of the partition member.

  In each aspect described above, it is desirable that the driving unit side thin film has a solid layer and a foam layer, and the foam layer is disposed on the intermembrane space side.

  In the environmental test apparatus of this aspect, the drive part side thin film has a foam layer. Since the foam layer has high heat insulating properties, dew condensation is unlikely to occur on the drive portion installation portion side of the partition member.

  In each of the above embodiments, it is desirable that a dry gas exists in the intermembrane space.

  The dry gas is a gas having a dew point lower than the temperature in the test chamber, for example, dehumidified air or nitrogen supplied from a cylinder.

  In each aspect described above, it is desirable that the dry gas pass through the intermembrane space.

  In the environmental test apparatus according to this aspect, the dry gas passes through the intermembrane space between the test chamber side thin film and the drive unit side thin film. Therefore, the gas in the intermembrane space is replaced and the low temperature gas does not stagnate. Therefore, even when the test chamber is at a low temperature, the surface temperature of the driving unit side thin film is not so low.

  In the above aspect, it is desirable that the dry gas is introduced into the intermembrane space from the outside of the test chamber and escapes into the test chamber.

In the environmental test apparatus according to this aspect, the dry gas is introduced between the test chamber side thin film and the drive unit side thin film from the outside of the test chamber. Therefore, the dry gas is introduced into the intermembrane space in a state where it is not cooled by the cool air in the test chamber.
Further, the temperature of the dry gas that passes through may be lowered due to the influence of the cold air in the test chamber, but since it is discharged into the test chamber, condensation is unlikely to occur on the drive unit installation side.

  In the above-described aspect, each of the test chamber side thin film and the drive unit side thin film is a combination of a plurality of sheet pieces, and at least a part of the partition member has a corrugated portion having an uneven appearance, The portion of the bellows portion that protrudes outward is convex in the test chamber side thin film and the driving portion side thin film, and the portion in the concave portion is both the test chamber side thin film and the driving portion side thin film. It is desirable that the sheet pieces are bonded so that the surfaces of the protruding end portions of the convex portions and the protruding end portions of the concave portions of the test chamber side thin film and the driving unit side thin film overlap each other.

In this aspect, the partition member has a bellows-like portion. In this aspect, the partition member has a double structure constituted by the test chamber side thin film and the drive unit side thin film, and there is an intermembrane space between them. The positions of the convex portions of the portion side thin film are in a corresponding positional relationship, and the positions of the concave portions of the test chamber side thin film and the positions of the concave portions of the driving portion side thin film are also in a corresponding positional relationship. For this reason, when the bellows-like portion expands and contracts, it is difficult for the test chamber side thin film and the drive unit side thin film to be caught.
In addition, since the projecting end portions of the convex portions and the concave portions are configured by joining the surfaces of the sheet pieces so as to overlap each other, the resilience of the bellows portion is high. For this reason, the partition member has both high deformability and shape restoring property, deforms in accordance with the movement of the mounting portion, and returns to the original shape.

  According to the environmental test apparatus of the present invention, the influence of the test room environment on the vibration generator and the like can be reduced.

1 is a perspective view of an environmental test apparatus according to an embodiment of the present invention. It is a cross-sectional perspective view of the environmental test apparatus of FIG. It is side surface sectional drawing of the main body apparatus of the environmental test apparatus of FIG. It is a front view of the partition member vicinity of the environmental test apparatus of FIG. It is a disassembled perspective view of a sample table and a partition member. FIG. 5 is a cross-sectional view of FIG. 4. It is the enlarged view of FIG. 6, and the enlarged view of each part. It is a cross-sectional perspective view of the environmental testing apparatus of other embodiment of this invention. It is sectional drawing of the partition member vicinity of the environmental test apparatus of FIG.

Embodiments of the present invention will be further described below.
The environment test apparatus 1 according to the present embodiment is a vibration composite environment test apparatus, and includes a main body device 2, a vibration generator 3, and a partition member 7. As shown in FIG. 1, the main unit 2 is installed on a gantry 38. The drive unit installation unit 16 is located below the gantry 38, and most of the vibration generator 3 described above is installed.

The vibration generator 3 is 6-axis driven, and can not only give vibration but also make the test object have a complicated movement. For example, the device under test can be pitched, rolled, or swung, and the device under test can be vibrated or swiveled in a tilted state.
The vibration generator 3 has a drive unit 5 and a drive shaft 6 as shown in FIG. Actually, the drive shaft 6 has a plurality of joint portions and is divided into a plurality of shafts. In this embodiment, a mounting flange 8 is provided at the tip of the drive shaft 6 as shown in FIGS. A sample table 10 is attached via an attachment flange 8. The sample table 10 functions as an article attachment unit for fixing the test object.
The sample table 10 is a metal plate having considerable rigidity, and is a quadrangle close to a square. A flange member 15 is provided on the lower surface side of the sample table 10 as shown in FIG.

  The drive unit 5 of the vibration generator 3 is installed on the floor surface 18 of the pit 13 via the vibration-proof rubber 12 as shown in FIG.

Next, the main unit 2 will be described. The main unit 2 has a test chamber 11 and an air conditioner installation unit 17 as shown in FIG.
That is, the main body device 2 has a heat insulating tank 22 covered with a heat insulating wall 20 in the same manner as a known environmental test device. As shown in FIG. 3, there is an internal partition wall 23 inside the heat insulation tank 22, which is partitioned into a test chamber 11 and an air conditioner installation unit 17.

In the present embodiment, a humidifying device 25, a cooling device 26, a heating device 27, and a blower 28 are arranged in the air conditioner installation unit 17.
The air conditioner installation unit 17 is partitioned from the test chamber 11 by an internal partition wall 23, and the internal partition wall 23 has openings 30 and 31 at an upper end portion and a lower end portion. Therefore, the air conditioner installation unit 17 communicates with the test chamber 11 through the openings 30 and 31 described above.
In the present embodiment, the air conditioner installation unit 17 forms a series of air flow paths 32, and the humidifying device 25, the cooling device 26, the heating device 27, and the blower 28 are placed in the air flow channel 32. ing.
A temperature sensor 33 and a humidity sensor 34 are provided on the outlet side (opening 30 side) of the air flow path 32. In the environmental test apparatus 1, a predetermined environment can be created in the test chamber 11 by the above-described members in the air-conditioning apparatus installation unit 17, the temperature sensor 33, and the humidity sensor 34, and this environment can be maintained.

The test chamber 11 of the main body device 2 is a space formed in a part of the heat insulation tank 22, and is a member for installing a test object and performing a test.
The test chamber 11 employed in the present embodiment includes a front wall 35, a top wall 36, a bottom wall 37, left and right side walls 40 and 41, and a back wall (internal partition wall 23).
The front wall 35, the top wall 36, the bottom wall 37, and the left and right side walls 40 and 41 are all heat insulating walls.
In the present embodiment, the test chamber 11 is provided with a door 21 on the front side as shown in FIGS. 1 and 3, the front side can be opened, and the test object is tested by opening the front door 21. It can be taken in and out of the chamber 11.

In the present embodiment, there is a large opening 45 on the bottom surface of the test chamber 11.
That is, the test chamber 11 is provided with a large circular opening 45 in the bottom wall 37 as shown in FIGS. 2 and 3, and the sample table 10 fixed to the vibration generator 3 projects from the opening 45 into the test chamber 11. ing.
In the environmental test apparatus 1 of the present embodiment, the main body apparatus 2 is mounted on the gantry 38 as shown in FIGS. 1 and 2 and is supported in a hollow position by the pit 13. A vibration generator 3 is arranged. That is, most of the vibration generator 3 is installed in the pit 13. In the present embodiment, the pit 13 is a drive unit installation unit 16.
The sample table 10 attached to the vibration generator 3 is in the test chamber 11, and the drive shaft 6 connects the drive unit 5 in the drive unit installation unit 16 and the sample table 10 in the test chamber 11.
That is, the drive shaft 6 or the like connects the inside and outside of the test chamber 11 through the opening 45 of the test chamber 11.

In the present embodiment, the inside of the test chamber 11 in which the sample table 10 is installed and the drive unit installation unit 16 in which the drive unit 5 is installed are partitioned by the partition member 7.
That is, the partition member 7 exists between the inner edge of the opening 45 of the bottom wall 37 of the test chamber 11 and the outer edge of the flange member 15 of the sample table 10.
The partition member 7 is a bellows having a double wall structure as shown in FIGS.
Hereinafter, the double wall is observed as one body, and the outer side of the entire bellows is referred to as the outer surface of the bellows or the outer side of the bellows, and the inner side of the bellows is referred to as the inner surface of the bellows or the inner side of the bellows.
Further, paying attention to the double wall of the bellows, the inner side of the double wall is referred to as the inner surface or the inner side of the double wall, and the outer side is referred to as the outer surface or the outer side of the double wall. Accordingly, there are two outer sides of the double wall, one corresponding to the outer side of the bellows and the other corresponding to the inner side of the bellows.

The appearance of the partition member 7 is a substantially conical bellows as shown in FIG. As shown in FIG. 6, the bellows has a small-diameter side opening 43 and a large-diameter side opening 46, which has a shape approximating a conical shape and a plurality of nodes 50.
When the partition member 7 is macroscopically observed, there is a communication hole 51 that communicates from the large diameter side opening 46 to the small diameter side opening 43 as shown in FIG. That is, the inner surface of the bellows is a cavity, and there is a communication hole 51 that approximates a conical shape based on the installation posture.
As described above, the partition member 7 has a double wall structure, and is a combination of the test chamber side thin film 52 and the drive part side thin film 53 as shown in FIGS.
Each of the test chamber side thin film 52 and the drive section side thin film 53 is formed by forming a laminated sheet into a bellows shape as shown in FIG.

The test chamber side thin film 52 constitutes the outline (the outer surface of the bellows) of the partition member 7. When the laboratory thin film 52 is observed macroscopically, it is a substantially conical bellows and has a plurality of nodes.
The driving portion side thin film 53 constitutes the inner surface of the partition member 7 (the inner surface of the bellows), and when viewed macroscopically, is a substantially conical bellows and has a plurality of nodes.
The test chamber side thin film 52 and the drive unit side thin film 53 are similar in shape, and at the position of the projection corresponding to the projecting portion outside the test chamber side thin film 52 (FIG. 7C), the projecting unit side thin film 53 also projects. (FIG. 7F). Similarly, in the position corresponding to the concave portion (FIG. 7D) recessed inside the test chamber side thin film 52, the driving portion side thin film 53 is also a concave portion (FIG. 7E).
The driving unit side thin film 53 is slightly smaller than the test chamber side thin film 52.

The test chamber side thin film 52 is formed by laminating a foam layer 63 on the inner surface of a solid layer 62 as shown in FIG.
The solid layer 62 of the test chamber side thin film 52 is a rubber having high heat resistance and cold resistance, such as silicon rubber.
The inner foam layer 63 is a closed-cell foam layer, for example, and contains a gas inside. The foamed layer 63 is not limited to a material as long as the adhesiveness with the solid layer 62 is good. For example, the foam layer is made of a material close to the material of the solid layer 62. In this embodiment, a silicon sponge is employed.

In the present embodiment, the test chamber side thin film 52 is made by sewing and joining a plurality of laminated sheet pieces 65.
That is, the test chamber side thin film 52 is obtained by overlapping the surfaces of the planar and annular laminated sheet pieces 65 on the foam layer 63 side, as shown in FIGS. 7C and 7D, and sewing the parts together. is there.

The driving unit side thin film 53 is the same, and the driving unit side thin film 53 is obtained by laminating a foam layer 73 on a solid layer 72 as shown in FIG.
The solid layer 72 of the driving unit side thin film 53 is a known rubber having elasticity such as synthetic rubber such as neoprene rubber or natural rubber.
The foam layer 73 is a closed-cell foam layer, for example, and contains a gas inside. The foam layer 73 is not limited to a material as long as the adhesiveness with the solid layer 72 is good. For example, it is a foam layer made of a material close to the material of the solid layer 72, and a neoprene sponge or the like can be adopted.

The driving unit side thin film 53 is also formed by sewing and joining a plurality of laminated sheet pieces 75.
That is, as shown in FIGS. 7E and 7F, the driving portion side thin film 53 is obtained by overlapping the surfaces on the foam layer 73 side of the planar and annular laminated sheet pieces 75 and sewing and joining the portions. .

  The driving unit side thin film 53 is slightly smaller than the test room side thin film 52, and there is an inter-membrane space 80 between the test room side thin film 52 and the driving unit side thin film 53.

Both the foam layer 63 of the test chamber side thin film 52 and the foam layer 73 of the driving unit side thin film 53 face the intermembrane space 80 side.
The test chamber side thin film 52 and the drive unit side thin film 53 are similar in shape, and as shown in FIGS. 6 and 7, the drive unit side thin film 53 also projects at a position corresponding to the projecting portion outside the test room side thin film 52. The drive unit side thin film 53 is also recessed at a position corresponding to a recess recessed inside the chamber side thin film 52.
Moreover, both are made by stitching the sides of the planar laminated sheet pieces 65 and 75, bent by the elasticity of the laminated sheet pieces 65 and 75, and expanded and contracted in the height direction.
On the other hand, since the planar laminated sheet pieces 65 and 75 try to return to the planar shape, the shape restoration property is high.
Therefore, the test chamber side thin film 52 and the drive unit side thin film 53 are not easily deformed, and even if the partition member 7 is deformed by applying an external force, the inter-membrane space 80 is formed between the test chamber side thin film 52 and the drive unit side thin film 53. Secured.

The test chamber side thin film 52 is attached with a base 81 that communicates the inside of the double wall (intermembrane space 80) and the outside of the double wall. In addition, the drive unit side thin film 53 is also provided with a base 82 that communicates the inside of the double wall (intermembrane space 80) and the outside of the double wall.
The upper end side (small diameter side opening 43 side) and the lower end side (large diameter side opening 46 side) of the test chamber side thin film 52 and the drive part side thin film 53 are joined to other members. Except for this, the intermembrane space 80 is closed. That is, the inside and outside of the double wall are shielded except for the caps 81 and 82.

The inner surface (intermembrane space 80) of the double wall of the partition member 7 is in communication from the skirt side of the bellows to the side of the part. The end of the partition member 7 on the skirt side is attached to the inner edge of the opening 45 of the bottom wall 37 of the test chamber 11 with a screw (not shown). A packing (not shown) is provided between the inner edge of the opening 45 of the bottom wall 37 and the skirt side of the partition member 7, and airtightness is ensured between the bottom wall 37 and the partition member 7.
Further, the end of the partition member 7 on the side of the flange is fixed to a flange member 15 on the lower surface side of the sample table 10 with a screw (not shown). There is a packing (not shown) between the flange of the partition member 7 and the flange member 15, and airtightness is ensured between the partition member 7 and the flange member 15.

The bottom surface side of the test chamber 11 is partitioned from the outside by a partition member 7. That is, the region above the partition member 7 is the test chamber 11, and the lower region is outside the test chamber. In the present embodiment, the lower part of the partition member 7 is the drive unit installation unit 16. Most of the drive unit installation unit 16 is the pit 13. Airtightness is ensured between the inside of the test chamber 11 and the lower drive unit installation unit 16 except for the portions of the caps 81 and 82 described above.
In the present embodiment, the drive unit 5 of the vibration generating device 3 is installed in the drive unit installation unit 16 configured by the pits 13 and is shielded from the test chamber 11 by the partition member 7.

The sample table 10 is in the test chamber 11, and the lower part is connected to the drive unit 5 installed in the drive unit installation unit 16.
By fixing the device under test to the sample table 10 and driving the drive unit 5, it is possible to give a motion such as vibration to the device under test in the test chamber 11.

The environmental test apparatus 1 according to the present embodiment includes a cooling device 26 in the air-conditioning apparatus installation unit 17, and can create a low-temperature environment in the test chamber 11.
In the environmental test apparatus 1 according to the present embodiment, even when the inside of the test chamber 11 is in a low temperature environment, the partition member 7 has high heat insulation properties, so that condensation is unlikely to occur on the drive unit installation portion 16 side of the partition member 7.
This will be described below.

When creating a low temperature environment in the test chamber 11, a dry gas such as nitrogen gas is passed through the intermembrane space 80.
Specifically, the nitrogen gas cylinder 100 is connected to the base 82 of the drive unit side thin film 53, and the dry gas is introduced into the intermembrane space 80 from the drive unit side thin film 53 side. That is, a dry gas is introduced from outside the test chamber 11 into the intermembrane space 80.
The dry gas passes through the intermembrane space 80 and is discharged into the test chamber 11 from the base 81 of the test chamber side thin film 52.

In the present embodiment, the test chamber 11 and the drive unit installation unit 16 are partitioned by the partition member 7.
The partition member 7 is composed of a test chamber side thin film 52 and a drive unit side thin film 53, and there is an intermembrane space 80 between them.
Each of the test chamber side thin film 52 and the drive unit side thin film 53 has a two-layer structure in which solid layers 62 and 72 and foam layers 63 and 73 are laminated.
Between the test chamber 11 and the drive unit installation unit 16, the solid layer 62 of the test chamber side thin film 52, the foam layer 63 of the test chamber side thin film 52, the dry gas layer (intermembrane space 80), and the drive unit side thin film 53. There is a foam layer 73 and a solid layer 72 of the drive unit side thin film 53.
Therefore, it is difficult for cold air to be transmitted to the outer surface of the driving unit side thin film 53, and the temperature of the outer surface of the driving unit side thin film 53 does not go out from the room temperature even if the inside of the test chamber 11 is extremely low temperature. Even if the inside of the test chamber 11 becomes extremely low temperature and the outer surface of the bellows is exposed to a low temperature, the surface temperature on the inner surface side of the bellows serving as the driving unit side does not come out from the room temperature range.
In particular, in the present embodiment, since there is a thick dry gas layer between the test chamber side thin film 52 and the drive unit side thin film 53, heat conduction is blocked by the dry gas layer, and the outer surface of the drive unit side thin film 53 (the inner side of the bellows) ) Temperature should not be too low.

  In the present embodiment, since the dry gas in the intermembrane space 80 is replaced, cold heat conduction through the dry air is small.

The heat conduction system will be described. Since the solid layer 62 of the test chamber side thin film 52 of the partition member 7 faces the test chamber 11, the solid layer 62 of the partition member 7 is exposed to a low temperature environment.
The cold heat of the solid layer 62 is transmitted from the solid layer 62 of the test chamber side thin film 52 to the foam layer 63, and the foam layer 63 contains bubbles inside. The foam layer 63 has a low thermal conductivity and is difficult to transmit cold heat in the test chamber 11. Therefore, the temperature of the surface of the foam layer 63 (on the intermembrane space 80 side) is considerably higher than the temperature in the test chamber 11.

The cold heat of the surface of the foam layer 63 of the test chamber side thin film 52 is conducted to the foam layer 73 of the driving unit side thin film 53 facing in the inter-membrane space 80.
Here, there is an intermembrane space 80 between the foam layer 63 of the test chamber side thin film 52 and the foam layer 73 of the drive unit side thin film 53, and a dry gas exists inside. There are two types of heat transfer during this period: diffusion between gases, convection, and radiation.
Here, diffusion between gases is heat transfer caused by contact of gas molecules. In the first place, heat transfer by diffusion takes time. In other words, the heat transfer by diffusion causes the gas to come into contact with the low temperature member to lower the temperature, which propagates to the surrounding gas and lowers the overall temperature. And gas contacts the high temperature side member (this embodiment foam layer 73 of the drive part side thin film 53), and moves cold.

In contrast, in the present embodiment, the dry gas passes through the intermembrane space 80 and does not stop in the intermembrane space 80.
Therefore, even if the temperature of the dry air in the intermembrane space 80 tends to decrease due to diffusion between gases, the cooled dry air is discharged to the outside (test chamber 11 side). Therefore, the temperature of the dry gas in the intermembrane space 80 does not excessively decrease. That is, since the dry gas in the intermembrane space 80 is replaced, the temperature of the dry gas does not decrease excessively.
Even if the temperature of the dry air in the intermembrane space 80 decreases, the dew point of the dry air is low, so that no condensation occurs in the intermembrane space 80.
The dry gas whose temperature has decreased is released to the test chamber 11 side. However, since the inside of the test chamber 11 is a low-temperature environment, the influence on the environment of the test chamber 11 is small.

Moreover, since the dry air in the intermembrane space 80 is replaced as described above, there is little heat transfer by convection.
In the first place, there is little movement of cold heat by radiation.
Therefore, the cold heat on the surface of the foam layer 63 of the test chamber side thin film 52 is not easily transmitted to the foam layer 73 of the drive unit side thin film 53, and the temperature of the foam layer 73 of the drive unit side thin film 53 is the temperature of the test chamber side thin film 52. It is higher than the surface temperature of the foam layer 63.
Further, since the foam layer 73 of the driving unit side thin film 53 contains bubbles and has low thermal conductivity, the surface temperature of the solid layer 72 of the driving unit side thin film 53 is higher than the temperature in the intermembrane space 80, and the outside air Close to temperature.
Therefore, the surface temperature of the driving unit side thin film 53 is not much different from the external temperature, and condensation is unlikely to occur. Therefore, there is little concern that condensed water will fall on the vibration generator 3 or that condensation will occur on the surface of the vibration generator 3 itself.

In the embodiment described above, the dry air is passed through the intermembrane space 80, but the dry air may be sealed in the intermembrane space 80. The gas sealed in the intermembrane space 80 is not necessarily dry air. Further, there may be a hole communicating between the intermembrane space 80 and the outside, and air having a dew point lower than the temperature in the test chamber 11 may enter and exit from the hole.
The gas introduced into the intermembrane space 80 may be discharged to a place other than the test chamber 11.
Although it is desirable to allow the dry gas to pass through the intermembrane space 80, the present invention is not limited to this, and the bases 81 and 82 may be opened. Further, the bases 81 and 82 themselves may be eliminated, and the intermembrane space 80 may be a sealed space.

  The partition member 7 is not necessarily a bellows, and may be a diaphragm, for example.

In the embodiment described above, the test chamber side thin film 52 and the drive unit side thin film 53 are both formed by laminating the foam layers 63 and 73 on the solid layers 62 and 72.
This configuration is recommended because the solid layers 62 and 72 can ensure airtightness and strength, and the foam layers 63 and 73 can improve heat insulation.
However, only one of them may be a laminate, and the other may be a single layer. Furthermore, both the test chamber side thin film 52 and the drive part side thin film 53 may be a single layer. Conversely, the test chamber side thin film 52 and the drive unit side thin film 53 may be a laminate of three or more layers.

  In the embodiment described above, nothing is inserted into the intermembrane space 80, but a soft heat insulating material such as glass wool may be inserted.

The drive unit 5 may simply generate only vertical vibration.
The molding method of the test chamber side thin film 52 and the drive part side thin film 53 is arbitrary, and is not limited to sewing.

In the above-described embodiment, the sample table 10 and the drive unit 5 are coupled by a single drive shaft 6, and a single partition member 7 surrounds the single drive shaft 6.
On the other hand, for the purpose of making the sample table 10 perform a complicated movement, a plurality of drive shafts 6a, 6b, 6c, 6d, 6e, 6f are provided in the drive unit 5 as shown in FIG. , 6b, 6c, 6d, 6e, and 6f may be connected to the sample table 10.

When such a configuration is employed, it is recommended that the partition members 7a, 7b, 7c, 7d, 7e, and 7f be individually installed on the drive shafts 6a, 6b, 6c, 6d, 6e, and 6f.
In the environmental test apparatus 90 shown in FIGS. 8 and 9, a plurality of openings 91 are provided in the bottom wall 37 and the like, and the drive shafts 6 a, 6 b, 6 c, 6 d, 6 e, and 6 f are projected from the openings 91. I support it.
Between the sample table 10 and the opening 91, partition members 7a, 7b, 7c, 7d, 7e, and 7f having the same layer configuration as the above-described embodiment are attached.

DESCRIPTION OF SYMBOLS 1 Environmental test apparatus 2 Main body apparatus 3 Vibration generator 5 Drive part 7 Partition member 10 Sample table (attachment part)
DESCRIPTION OF SYMBOLS 11 Test chamber 16 Drive part installation part 26 Cooling device 52 Test room side thin film 53 Drive part side thin film 62 Solid layer 63 Foam layer 65 Laminated sheet piece 72 Solid layer 73 Foam layer 75 Laminated sheet piece 80 Intermembrane space

Claims (7)

In an environmental test apparatus having a test chamber capable of creating a desired environment therein, an attaching part for fixing a test object, a driving part for moving the attaching part, and a driving part installing part,
The mounting part is in the test chamber, the driving part is in the driving part installation part,
A partition member for partitioning between the test chamber and the drive unit installation unit;
It is possible to perform the test while moving the attachment part by the drive part and giving motion to the DUT.
The partition member has a multilayer structure having at least a test chamber side thin film and a drive unit side thin film, and there is an intermembrane space between the test chamber side thin film and the drive unit side thin film, and gas is contained in the intermembrane space. Environmental test equipment characterized by the existence.   The environmental test apparatus according to claim 1, wherein the test chamber-side thin film has a solid layer and a foam layer, and the foam layer is disposed on the inter-membrane space side.   The environmental testing apparatus according to claim 1, wherein the driving unit side thin film includes a solid layer and a foam layer, and the foam layer is disposed on the inter-membrane space side.   The environmental test apparatus according to claim 1, wherein a dry gas is present in the intermembrane space.   The environmental test apparatus according to claim 1, wherein a dry gas passes through the intermembrane space.   The environmental test apparatus according to claim 5, wherein the dry gas is introduced into the intermembrane space from the outside of the test chamber and escapes into the test chamber. Each of the test chamber side thin film and the driving unit side thin film is a combination of a plurality of sheet pieces, and at least a part of the partition member has an accordion-shaped bellows portion, and the bellows portion. The outwardly projecting portion is the test chamber side thin film and the drive unit side thin film are both convex, and the concave portion is the test chamber side thin film and the drive unit side thin film are both concave.
7. The protruding portion of the convex portion and the protruding end portion of the concave portion of the test chamber side thin film and the driving unit side thin film are bonded to each other with the sheet pieces overlapping each other. The environmental test apparatus described in 1.

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