JP2019165108A5 - - Google Patents
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- Publication number
- JP2019165108A5 JP2019165108A5 JP2018052022A JP2018052022A JP2019165108A5 JP 2019165108 A5 JP2019165108 A5 JP 2019165108A5 JP 2018052022 A JP2018052022 A JP 2018052022A JP 2018052022 A JP2018052022 A JP 2018052022A JP 2019165108 A5 JP2019165108 A5 JP 2019165108A5
- Authority
- JP
- Japan
- Prior art keywords
- pipe
- forming apparatus
- film forming
- opening area
- liquid storage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
- 239000007788 liquid Substances 0.000 claims 9
- 230000005484 gravity Effects 0.000 claims 1
- 239000000203 mixture Substances 0.000 claims 1
- 238000009428 plumbing Methods 0.000 claims 1
- 238000000926 separation method Methods 0.000 claims 1
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2018052022A JP2019165108A (ja) | 2018-03-20 | 2018-03-20 | 成膜装置及び気液分離装置 |
| US16/110,184 US20190291040A1 (en) | 2018-03-20 | 2018-08-23 | Film forming apparatus and gas-liquid separating apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2018052022A JP2019165108A (ja) | 2018-03-20 | 2018-03-20 | 成膜装置及び気液分離装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2019165108A JP2019165108A (ja) | 2019-09-26 |
| JP2019165108A5 true JP2019165108A5 (enExample) | 2020-03-12 |
Family
ID=67984315
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2018052022A Abandoned JP2019165108A (ja) | 2018-03-20 | 2018-03-20 | 成膜装置及び気液分離装置 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US20190291040A1 (enExample) |
| JP (1) | JP2019165108A (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114733270B (zh) * | 2022-05-23 | 2024-02-27 | 北京北方华创微电子装备有限公司 | 一种反流冷凝水分离装置及半导体工艺设备 |
-
2018
- 2018-03-20 JP JP2018052022A patent/JP2019165108A/ja not_active Abandoned
- 2018-08-23 US US16/110,184 patent/US20190291040A1/en not_active Abandoned
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