JP2019148311A - Ball screw device, and machine facility including ball screw device - Google Patents

Abstract

To evaluate a peeling state of a ball screw shaft by capturing a progress state of peeling from the phenomenon occurring in a nut, in order to grasp the progress state of peeling occurring in the ball screw shaft.SOLUTION: A ball screw device 10 includes a ball screw shaft 16 and a nut 18 assembled to the ball screw shaft 16. Then, it also includes: coordinate acquisition means 40 for acquiring a machine coordinate position on a ball screw shaft of the nut 18; nut information detection means 34(nut sensor 36) mounted on the nut 18, and for capturing a peeling state occurring in the ball screw shaft 16 as a phenomenon occurring in the nut in the peeling position; peeling state detection unit 35 for determining presence/absence and the degree of the peeling state based on the vibration information detected by the nut sensor 36; a ball screw shaft state recording unit 44 for recording the information about the peeling state as the entire ball screw shaft; and a peeling evaluation unit 46 for evaluating the peeling state of the ball screw shaft 16. Also, it has an alarm unit 48 for issuing an alert when the peeling evaluation part 46 has made abnormality evaluation.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a ball screw device and mechanical equipment including the ball screw device. In particular, the present invention relates to a technique for detecting the presence or absence of a peeling phenomenon occurring on a ball screw shaft.

  Machine tool facilities such as machining centers are equipped with ball screw devices. The ball screw device includes a ball screw shaft and a nut that is assembled to the ball screw shaft. A ball circulation path is formed on the outer peripheral surface of the ball screw shaft and the inner peripheral surface of the nut, and the ball is disposed in the circulation path. The rotation of the ball screw shaft causes the ball to circulate through the circulation path, and the nut moves in the axial direction on the ball screw shaft. As a result, moving bodies such as saddles, columns, and tables of the machine tool integrated with the nut move.

  As described above, the ball screw device used for the linear movement element in the machine tool equipment is a machine element that changes the rotational motion into the linear motion. In this ball screw device, the fatigue life and separation due to the intrusion of foreign matter occur at the contact portion of the ball screw shaft and the nut raceway surface where the ball contacts the ball. In particular, there is a strong tendency for peeling to occur on the ball screw shaft. The peeling phenomenon is generally referred to as pitting in the initial state of peeling, and is referred to as fretting in the state where peeling has progressed.

  In the ball screw device, since the relative position of the ball screw shaft and the nut always changes, it is particularly difficult to detect the peeling that occurs on the ball screw shaft in the initial state of occurrence. For this reason, there has been a problem that the ball screw device must be replaced urgently at the stage where it is confirmed that machining accuracy is poor or abnormal noise is generated in the machine tool equipment due to the peeling phenomenon.

  For this reason, conventionally, there is a proposal as shown in the following patent document as a method for detecting an abnormality such as peeling occurring on a ball screw shaft in a ball screw device. For example, there is a method in which the displacement of the surface of the contact portion of the ball screw shaft that is in contact with the ball is directly measured and detected by a detection sensor (see Patent Documents 1 and 2 below). There is also a method of detecting vibration of a nut, extracting a frequency component within a certain range, and determining the presence or absence of an abnormality based on a standard deviation of a ball passage period (see Patent Document 3 below).

JP 2004-12209 A JP 2007-333195 A JP 2009-257806 A

  By the way, since the peeling phenomenon does not appear as abnormal noise or a conspicuous defective processing accuracy in the initial stage of peeling, it is difficult to notice the occurrence and progress of peeling. The peeling phenomenon spreads around the generation point, and the peeling often spreads when it appears as abnormal noise or obvious poor processing accuracy.

  Therefore, the present inventors focused on evaluating the peeling phenomenon in a range, and considered the prediction of the life of the ball screw shaft and the timing of replacement by detecting the spread and progress of the peeling. .

  Thus, the present invention was devised in view of the above points, and the problem to be solved by the present invention is to determine the progress of peeling in order to grasp the progress of peeling occurring on the ball screw shaft. By capturing the state from the phenomenon occurring in the nut, it is possible to evaluate the peeled state of the ball screw shaft.

  In order to solve the above problems, the present invention takes the following means.

  According to a first aspect of the present invention, there is provided a ball screw device having a ball screw shaft and a nut assembled to the ball screw shaft, wherein the nut mounted on the ball screw shaft is a machine on the ball screw shaft. Detected by a coordinate acquisition means for acquiring a coordinate position, a nut information detection means that is attached to the nut and that detects a peeling state generated on the ball screw shaft as a phenomenon occurring on the nut at the peeling position, and the nut information detection means A peeling state detection unit that determines the presence or absence and degree of the peeling state based on a phenomenon that occurs in the nut, and a ball screw shaft state that records information on the peeling state for each axial position of the ball screw shaft as the entire ball screw shaft A recording unit; and a peeling evaluation unit that evaluates a peeling state of the ball screw shaft based on information of the ball screw shaft state recording unit. A Lumpur screw device.

  According to the first aspect of the invention, the machine coordinate position on the ball screw shaft of the nut assembled to the ball screw shaft is obtained by the coordinate obtaining means. That is, the position of the nut fitted to the ball screw shaft is grasped. And the peeling state which arose in the ball screw axis | shaft is caught as a phenomenon which arises in the nut in the said peeling position by the nut information detection means attached to the nut. Then, the presence / absence or degree of the peeled state is determined based on the phenomenon occurring in the nut detected by the nut information detecting means by the peeled state detecting unit. Then, the ball screw shaft state recording unit records information on the peeling state for each axial position of the ball screw shaft as the entire ball screw shaft. And the peeling state of a ball screw shaft is evaluated based on the information of the peeling state detection part and ball screw shaft state recording part which judge the presence or absence and degree of a peeling state by a peeling evaluation part. As a result, it is possible to grasp information on the peeling state for each axial position, so that the spread of the peeling phenomenon that has occurred on the surface of the ball screw shaft can be grasped, judgment of replacement at a more appropriate timing, and prediction of the life of the ball screw shaft. Is easier to do.

  According to a second aspect of the present invention, there is provided the ball screw device according to the first aspect described above, and further, an influence on a phenomenon occurring in the nut in the nut information detecting means due to an operating state of the ball screw shaft or a peeled state It is a ball screw device which has an information storage device which memorizes beforehand the relation of influence on exfoliation state detection information by a detecting part.

  According to the second aspect of the invention, the information storage device is further provided, and the relationship between the phenomenon occurring in the nut by the nut information detecting means or the peeling state detection information by the peeling state detection unit and the operation state of the ball screw shaft is obtained. Store in advance. As a result, the peeling state can be evaluated in consideration of the effect on the nut caused by the operating state of the ball screw shaft or the influence on the peeling state detection information. Can be judged.

  A third invention of the present invention is the ball screw device according to the first invention or the second invention described above, and further alarms based on the evaluation information of the peeling state of the ball screw shaft in the peeling evaluation unit. A ball screw device having an alarm unit.

  According to the third invention, an alarm unit is further provided, and an alarm is issued based on the evaluation information of the peeled state of the ball screw shaft in the above-described peel evaluating unit. Thereby, it can be known that the evaluation of the peeled state of the ball screw shaft is in an abnormal state that the ball screw device is in a state to be repaired or replaced.

  A fourth invention of the present invention is the ball screw device according to the third invention described above, wherein the evaluation information of the peeling state is a range amount of a peeling occurrence location or a peeling change amount, It is a ball screw device that issues an alarm when the range amount or the change amount exceeds a predetermined threshold value.

  According to the fourth aspect of the invention, the alarm is evaluated based on at least one of the amount of peeling in the axial direction of the ball screw shaft and the amount of change in peeling, and these numerical values exceed a predetermined threshold value. Be alerted in case. This ensures a warning. Note that the range amount of peeling is the size of the area where peeling is determined to occur, that is, the length in the axial direction, and the amount of change means the speed of progress of the peeling phenomenon.

  A fifth invention of the present invention is the ball screw device according to any one of the first to fourth inventions, wherein the nut information detecting means is a nut sensor for acquiring nut vibration information. The ball screw device.

  According to the fifth aspect, the nut sensor that acquires nut vibration information detects the peeled state of the ball screw shaft as a phenomenon occurring in the nut. Thereby, the presence or absence of the peeling state of a ball screw axis can be grasped reliably.

  A sixth invention of the present invention is the ball screw device according to the fifth invention described above, wherein the vibration information of the nut is a magnitude of vibration.

  According to the sixth aspect, since the peeled state appears as the magnitude of vibration in the vibration information of the nut, the presence or absence of the peeled state can be grasped from the difference in the magnitude of vibration.

  A seventh invention of the present invention is the ball screw device according to any one of the third to sixth inventions subordinate to the second invention described above, wherein the operating state of the ball screw shaft is a ball It is a ball screw device which is the rotational speed of the screw shaft.

  According to the seventh aspect of the invention, the operating state of the ball screw shaft is the rotational speed of the ball screw shaft, and the nut moves on the ball screw shaft as controlled by the rotational speed. The peeling phenomenon generated on the ball screw shaft is detected as a vibration amplitude corresponding to the rotational speed. That is, the vibration of the nut varies not only due to the peeled state but also due to the rotational speed. For this reason, a more accurate peeling state can be determined by determining the presence / absence and degree of peeling in consideration of the influence of the rotation speed.

  An eighth invention of the present invention is the ball screw device according to any one of the first to seventh inventions, wherein the evaluation by the peeling evaluation unit that evaluates the peeling state of the ball screw shaft is the above-described evaluation. In the case of the evaluation showing the peeling phenomenon over the entire length of the ball screw shaft, it is a ball screw device that evaluates that the peeling has occurred in the nut by the peeling evaluation unit.

  According to the eighth aspect of the invention, in the evaluation showing the peeling phenomenon over the entire length of the ball screw shaft, the peeling state generated in the nut is grasped as the evaluation that the nut has caused the peeling phenomenon. That is, when the vibration factor of the nut is caused by the separation on the ball screw side, there is a difference in the presence or absence and degree of separation depending on the axial position, so that the presence or absence of vibration appears as the axial position changes. When peeling / damage occurs on the nut side, it becomes a vibration factor regardless of the position in the axial direction, and vibration continues to occur. Therefore, it can be estimated that peeling is on the nut side.

  According to a ninth aspect of the present invention, there is provided mechanical equipment including the above-described ball screw device according to the first aspect, wherein each position of the ball screw shaft recorded in the ball screw shaft state recording unit in the ball screw device is described. This is a mechanical equipment having a monitor on which information on the peeled state of the ball screw shaft is visually displayed as a graphic.

  According to the ninth aspect of the invention, since the mechanical equipment provided with the ball screw device has the monitor that is visually displayed in the form of a graphic or the like, it is possible to visually check the peeled state for each position of the ball screw shaft.

  A tenth aspect of the present invention is the mechanical facility according to the ninth aspect, wherein the monitor visually displays information when an alarm is given by the alarm unit according to the third aspect. It is.

  According to the tenth aspect of the invention, the information at the time of alarming by the alarm unit in the third aspect is also displayed by the monitor in the eighth aspect, so that the alarm state is reliably notified.

  According to the present invention, in order to grasp the progress state of the peeling occurring on the ball screw shaft, the peeling state of the ball screw shaft can be evaluated by capturing the progressing state of the peeling from the phenomenon occurring in the nut.

It is a schematic whole block diagram which shows the ball screw apparatus of this embodiment. It is sectional drawing which shows the combination structure of a ball screw shaft and a nut. It is a wave form diagram which shows the vibration information detected by the nut sensor when peeling arises in a ball screw shaft. It is a peeling condition map visually displayed on a monitor.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. Note that this embodiment is a case of a ball screw device provided in a machine tool facility such as a machining center.

  FIG. 1 is a schematic overall configuration diagram of a ball screw device 10 provided in a machine tool facility 12 such as a machining center. The ball screw device 10 is provided as a device for moving the moving body 14 in the machine tool facility 12. Examples of the moving body 14 of the machine tool equipment 12 include a table, a column, and a saddle. Note that a plurality of ball screw devices 10 are provided as operating mechanisms for the respective axes such as the X axis, the Y axis, and the Z axis in machine tool equipment.

  The ball screw device 10 includes a ball screw shaft 16 and a nut 18 as mechanical elements that change the rotational motion into a linear motion, and the nut 18 moves on the ball screw shaft 16 in the axial direction by the rotation of the ball screw shaft 16. In this embodiment, the moving range of the nut 18 is shown as a range L in FIG. The position states of the left and right nuts 18 in the movement range are indicated by phantom lines.

  The moving body 14 is connected to the nut 18 via the connecting member 15 and moves as the nut 18 moves in the axial direction. The ball screw shaft 16 is rotatably supported by support bearings 20 and 22 installed at both ends thereof. The support bearings 20 and 22 are installed on the base 24 of the machine tool facility 12.

  A servo motor 26 is disposed on the right support bearing 22 as viewed in FIG. 1 and rotationally drives the ball screw shaft 16. By controlling the rotational speed of the servo motor 26, the axial movement speed of the nut 18 that moves the ball screw shaft 16 is controlled. The rotation speed of the servo motor 26 is controlled by a command from the NC device 38.

  FIG. 2 shows details of the combined configuration of the ball screw shaft 16 and the nut 18. A ball raceway V-groove 28 is spirally formed on the outer peripheral surface of the ball screw shaft 16. Correspondingly, a ball raceway V-groove 30 is spirally formed on the inner peripheral surface of the nut 18. A plurality of balls 32 are interposed between the ball raceway V groove 28 of the ball screw shaft 16 and the ball raceway V groove 30 of the nut 18. Then, when the ball 32 circulates due to the rotation of the ball screw shaft 16, the nut 18 moves in the axial direction. The range of the ball track V-groove 28 formed on the outer peripheral surface of the ball screw shaft 16 is the range of movement of the nut 18 indicated by L in FIG. 1, but it may be formed over the entire length of the ball screw shaft 16. Good. In this embodiment, it is formed over the entire length. Further, the cross-sectional V shape of the ball raceway V-grooves 28 and 30 may be a semicircular cross-sectional shape.

  In the ball screw device 10 configured as described above, due to the fatigue life of the ball screw shaft 16 due to the circulation of the balls 32 and the entry of foreign matter between the nut 18 and the ball raceway V groove 28 of the ball screw shaft 16. A peeling phenomenon occurs. The peeling phenomenon is generally referred to as pitting or fretting as described in the background art. Although the peeling phenomenon may also occur in the ball raceway V groove 30 of the nut 18, it tends to occur remarkably on the ball screw shaft 16 side on the side where torque is applied to the ball 32.

  In this embodiment, the occurrence state of peeling occurring in the ball screw device 10 is monitored in the following manner to evaluate the peeling state, and a replacement alarm (replacement warning) before product stoppage due to poor product accuracy or machine stoppage. , Exchange instructions) are shown correctly.

  First, as shown in FIG. 1, the nut 18 is provided with nut information detection means 34. The nut information detection unit 34 is a detection unit that captures the peeled state generated in the ball screw shaft 16 as a phenomenon occurring in the nut 18 fitted at the position where the peeling occurs. In this embodiment, it is the nut sensor 36, and the peeling state generated on the ball screw shaft 16 is captured as a vibration phenomenon generated on the nut 18. The nut sensor 36 is, for example, a displacement sensor that is attached to the nut 18 and measures the distance from the surface of the ball screw shaft 16. Since the nut 18 moves in the movement range L of the ball screw shaft 16, the nut 18 always passes through the separation portion generated in the ball raceway V groove 28 of the ball screw shaft 16 and detects the separation as the magnitude of the vibration amplitude.

  Based on the vibration information detected by the nut sensor 36 which is the nut information detection means 34, the peeling state detection unit 35 determines the presence or absence (level) of the peeling state.

  As shown by D in FIG. 3, the nut sensor 36 is larger than the vibration amplitude at the position of the ball screw shaft 16 where the peeling phenomenon has occurred, and at the position of the ball screw shaft 16 where the peeling phenomenon shown by N in FIG. The vibration amplitude. Thereby, the presence or absence of a peeling phenomenon can be detected. That is, when the magnitude of the vibration amplitude exceeds the threshold value K at which the peeling phenomenon is considered to occur, it is determined that the peeling state has occurred. As will be described later, the magnitude of the vibration amplitude varies depending on the rotational speed of the ball screw shaft 16, and the threshold value K varies accordingly.

  Next, speed information is also acquired based on a speed (rotational speed) command from the NC device 38 to the servo motor 26. Further, the machine coordinate position on the ball screw shaft 16 of the nut 18 assembled to the ball screw shaft 16 is acquired by the coordinate acquisition means 40. That is, by obtaining the position of the nut 18 from the machine coordinates of the NC device 38, the position of the separation generated in the ball raceway V groove 28 of the ball screw shaft 16 is obtained, and the position of the nut 18 with respect to the ball screw shaft 16 is detected. Further, speed information is also acquired based on information from the NC device 38.

  Note that the information storage device stores in advance the relationship between the nut sensor 36 that is the nut information detection means 34 and the rotational speed of the ball screw shaft 16 that is the operating state of the ball screw shaft 16 from the previously acquired information. The magnitude of the vibration amplitude when the separation detected by the nut sensor 36 depends on the rotational speed of the ball screw shaft 16 (the axial movement speed of the nut 18), so that the relationship is stored from previously acquired information. Keep it. Then, when evaluating the peeling state in the peeling evaluation unit 46 to be described later, a reference value (threshold value) at the time of evaluating the alarm is determined by changing it according to the rotational speed of the ball screw shaft 16.

  The relationship between the nut sensor 36 and the rotational speed of the ball screw shaft 16 that is the operating state of the ball screw shaft 16 is, for example, how the magnitude of vibration of the nut varies when the rotational speed and the degree of peeling are changed. Whether it changes or not is obtained by an experiment in advance, and the experimental data is used as a database indicating the relationship. Further, it may be based on a logical expression or a simulation result.

  Next, the ball screw shaft state recording unit 44 records information on the peeled state for each position of the ball screw shaft 16 as the entire ball screw shaft. That is, the state of FIG. 3 is recorded in the ball screw shaft state recording unit 44 as data.

  Then, the peeling evaluation unit 46 evaluates the peeling state of the ball screw shaft 16 based on information from the information storage device 42 and the ball screw shaft state recording unit 44. The evaluation of the peeling evaluation unit 46 evaluates the level of the abnormal state of the peeling phenomenon occurring on the ball screw shaft 16 and the nut 18. The evaluation by the peeling evaluation unit 46 is performed in consideration of the size of the peeling occurrence range, the amount of change in the peeling range per time, the magnitude of vibration amplitude, and the like.

  Note that, in the evaluation of the peeling evaluation unit 46 described above, in the case of an evaluation showing a peeling phenomenon over the entire length of the ball screw shaft 16, it is not evaluated that the peeling phenomenon has occurred in the ball screw shaft 16. Assume that the peeling evaluation part 46 has caused a peeling phenomenon in the nut 18. Thereby, the peeling state which arose in the nut 18 is also detectable.

  This is because when the vibration factor of the nut is caused by separation on the ball screw side, there is a difference in the presence or absence and degree of separation depending on the position in the axial direction. However, if peeling / damage occurs on the nut side, it becomes a vibration factor regardless of the position in the axial direction, and vibration continues to occur, so that it can be estimated that the peeling is on the nut side.

  Next, an alarm is issued by the alarm unit 48 based on the evaluation by the peeling evaluation unit 46. The warning is issued when the peeling evaluation unit 46 evaluates the peeling state and needs to replace the ball screw device. There are two types of alarms: a voice alarm method and a visual alarm method. From these alarms, it is known that the evaluation of the peeled state of the ball screw shaft 16 is in an abnormal state. The evaluation of the alarm is performed by comprehensively evaluating the size of the peeling occurrence range, the amount of change in the peeling range per time, the magnitude of vibration amplitude, etc. in the evaluation of the peeling evaluation unit 46 described above, and a predetermined reference value. Issued when (threshold) is exceeded.

  Note that the peeling that occurs on the ball screw shaft 16 usually occurs in a narrow range, and grows and spreads as the operation continues. In practice, an alarm is issued in consideration of the progress of the separation spread. Repair such as replacement of the ball screw device 10 in the machine tool facility 12 usually takes several days due to the number of days required for obtaining and procuring replacement parts and the work time required for replacement work. The timing for issuing an alarm is based on the number of days required to obtain and procure replacement parts and the work time required for replacement work. Is preferable because it can reduce the influence of the production plan on the production plan. In this way, sign management is also performed as necessary.

  The alarm according to the present embodiment is visually displayed as shown in FIG. 4, and is displayed on the monitor 50 of the NC device 38 provided in the machine tool facility 12 of FIG. In this embodiment, as shown in FIG. 4, the “replacement warning” and / or “replacement instruction” display of the ball screw shaft device 10 is turned on.

  In the present embodiment, the monitor 50 visually displays the peel state information for each axial position of the ball screw shaft 16 recorded in the ball screw shaft state recording unit 44 in the form of a graphic or the like as the entire ball screw shaft. . That is, the evaluation state of the peeled state of the ball screw shaft 16 is visually displayed. The visual display of FIG. 4 shows a peeling situation map of the ball screw shaft 16. In the map, the entire length of the ball screw shaft 16 is illustrated, and a portion corresponding to the position where the separation occurs is illustrated as a diagram. As a result, it is possible to know the position and range size where peeling occurred (the length in the axial direction of peeling occurring on the ball screw shaft), and the speed of progress (change amount).

  In addition, the monitor 50 displays the history of observation of the peeled state. The observation history is sequentially displayed as Observation 1, Observation 2, and Observation 3. For example, observation 1 shows a state six months after the installation of machine tool equipment, observation 2 shows a state one year later, and observation 3 shows a state one and a half years later. Note that observation 3 also shows that new peeling occurred. From this observation history, it is possible to know the size of the peeling range and the traveling speed (change amount) at each time. Then, when the magnitude of separation (range area) exceeds a predetermined area (threshold value) in observation 3, an alarm is issued. An alarm is also issued when it is determined that the progress speed (change amount) that causes separation until observation 3 exceeds the threshold before the next factory leave.

  In addition, not only the presence / absence of peeling for each axial part, but also the progress of peeling for each axial part may be displayed by color shading. For example, minor peeling at a stage that does not significantly affect machine operation at the beginning of peeling is displayed in a light color, and large peeling at a stage where peeling is concerned and there is a concern about the machine operation or considering ball screw replacement is displayed in a dark color. . Further, the degree of peeling may be displayed not by a figure but by a numerical display.

  As mentioned above, although this invention was demonstrated about specific embodiment, this invention can be implemented also with other various forms.

  For example, in the above-described embodiment, the nut information detection unit 34 is the nut sensor 36 that detects vibration information of the nut 18, but a unit that can capture the peeling phenomenon that occurs in the ball screw shaft 16 as a phenomenon that occurs in the nut 18. If it is. For example, it may be a load from a ball applied to the nut.

  In the above-described embodiment, the case where the ball screw device is applied to the machine tool facility 12 such as a machining center has been described. However, the ball screw device may be applied to facilities other than the machine tool.

  In the above-described embodiment, the relationship with the operating state of the ball screw shaft 16 in the information storage device 42 is not necessarily required. That is, if the rotational speed (rotational speed) of the ball screw shaft 16 is constant, the peeled state can be estimated from the vibration information detected by the nut sensor 36 without being affected by the rotational speed.

DESCRIPTION OF SYMBOLS 10 Ball screw apparatus 12 Machine tool equipment 14 Moving body 15 Connecting member 16 Ball screw shaft 18 Nut 20 Support bearing 22 Support bearing 24 Base 26 Servo motor 28 Ball track V groove 30 (Nut side) ball Track V-groove 32 Ball 34 Nut information detection means 35 Peeling state detection section 36 Nut sensor 38 NC device 40 Coordinate acquisition means 42 Information storage device 44 Ball screw shaft state recording section 46 Peeling evaluation section 48 Alarm section 50 Monitor

Claims (10)

In a ball screw device having a ball screw shaft and a nut assembled to the ball screw shaft,
Coordinate acquisition means for acquiring a machine coordinate position of the nut assembled to the ball screw shaft on the ball screw shaft;
Nut information detecting means attached to the nut and capturing the peeling state generated on the ball screw shaft as a phenomenon occurring in the nut at the peeling position;
A peeling state detection unit that determines the presence or absence and degree of a peeling state based on a phenomenon that occurs in the nut detected by the nut information detection unit;
A ball screw shaft state recording unit for recording information on a peeling state for each axial position of the ball screw shaft as a whole ball screw shaft;
A ball screw device comprising: a peeling evaluation unit that evaluates a peeling state of the ball screw shaft based on information of the ball screw shaft state recording unit. The ball screw device according to claim 1,
And an information storage device for preliminarily storing the relationship between the effect on the nut in the nut information detecting means due to the operating state of the ball screw shaft or the influence on the peeled state detection information by the peeled state detecting unit. , Having a ball screw device. The ball screw device according to claim 1 or 2,
And a warning unit that issues an alarm based on evaluation information on a peeling state of the ball screw shaft in the peeling evaluation unit. The ball screw device according to claim 3,
The evaluation information of the peeling state is a range amount or a peeling change amount at a peeling occurrence location, and the alarm unit issues a warning when the range amount or the change amount exceeds a predetermined threshold. The ball screw device according to any one of claims 1 to 4, wherein
The nut information detecting means is a ball screw device which is a nut sensor for acquiring nut vibration information. The ball screw device according to claim 5,
A ball screw device, wherein the vibration information of the nut is the magnitude of vibration. The ball screw device according to any one of claims 3 to 6, which is dependent on claim 2,
The ball screw device is an operation state of the ball screw shaft, which is a rotation speed of the ball screw shaft. The ball screw device according to any one of claims 1 to 7,
In the case where the evaluation by the peeling evaluation unit that evaluates the peeling state of the ball screw shaft is an evaluation showing a peeling phenomenon over the entire length of the ball screw shaft, the peeling evaluation unit has caused the peeling phenomenon of the nut. Ball screw device to evaluate. A mechanical facility comprising the ball screw device according to claim 1,
The machine equipment which has the monitor by which the information of the peeling state for every position of the ball screw shaft recorded in the ball screw shaft state recording part in the ball screw device according to claim 1 is visually displayed as a figure etc. as the whole ball screw shaft. The mechanical equipment according to claim 9,
The equipment for visually displaying information when the alarm is given by the alarm unit according to claim 3 on the monitor.

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