JP2019144449A - Image forming element manufacturing method - Google Patents

Abstract

To form one continuous surface in which adjacent surfaces are smoothly contiguous with each other in the vicinity of ends as compared with conventional one when bonding the ends of two unit reflection elements together that are arranged so as to adjoin.SOLUTION: Provided is a manufacturing method of an image forming element for causing the real image of an object arranged at a spatial position on one surface side to be formed at a spatial position on the other surface side. This method comprises: an element preparation step for preparing a first and a second unit reflection element each having a plurality of reflection surfaces; and a planar body preparation step for preparing a planar body, the surface of which is formed at least partly in shape of a plate, in which a through hole penetrating from the surface to the revere side is provided. In an arrangement step, the first and the second unit reflection elements are arranged so that the through hole of the planar body faces a space between the first and the second unit reflection elements and a gap is provided between the space and the planar body. In a bonding step, an adhesive is cured while the first and the second unit reflection elements are drawn in from the planar body side by a suction step.SELECTED DRAWING: Figure 10

Description

  The present invention relates to a method for manufacturing an imaging element, and more particularly to a method for manufacturing an imaging element used in an aerial image display device that enables display of an aerial image.

  The aerial image display device includes an imaging element and can display an aerial image. The imaging element forms a real image (mirror image) of an object arranged at a spatial position on one surface side at a spatial position on the other surface side. As an example of the configuration of the imaging element, an aerial image can be displayed by having a configuration in which two composite reflection elements are stacked in the thickness direction (see Patent Document 1), and an aerial image can be displayed using only one composite reflection element. What can be displayed is mentioned (refer patent document 2, 3).

  In the case of an imaging element in which two composite reflective elements are stacked in the thickness direction, each composite reflective element includes a plurality of reflective surfaces and a plurality of transparent bodies, and these are in a direction orthogonal to the surface of the element. Are stacked alternately. The two composite reflective elements are overlapped with each other so that a plurality of reflective surfaces provided on one composite reflective element and a plurality of reflective surfaces provided on the other composite reflective element are orthogonal to each other.

  In the case of an imaging element that can display an aerial image with only one composite reflective element, the composite reflective element includes a transparent substrate and a plurality of protrusions arranged in a matrix at intervals on the transparent substrate. Each protrusion has a rectangular parallelepiped shape, and a plurality of reflecting surfaces extending in the row direction and the column direction are formed on the peripheral surface thereof.

  Even if the composite reflective element has any of the above-described configurations, a large area can be achieved by connecting (tiling) a plurality of unit reflective elements in the surface direction (see Patent Documents 1 to 3). Since a general aerial image device forms a real image of an object at an equal magnification, it is possible to display a large aerial image with a sense of reality by increasing the area of the composite reflection element.

JP2013-101230A JP2013-088556A JP 2013-195983 A

  The unit reflection element is manufactured using various methods such as cutting, polishing, adhesion, and molding. However, it is difficult to manufacture a unit reflection element having a flat surface with high flatness. One of the causes is, for example, warpage generated in the unit reflection element when the unit reflection element is manufactured.

  It is assumed that two unit reflection elements are arranged adjacent to each other and their end portions are connected to each other with an adhesive. Ideally, the surface of one unit reflective element and the surface of the other unit reflective element form one smoothly continuous surface, but if the unit reflective element is warped, the adjacent surface It is difficult to form one surface having high flatness that is smoothly continuous in the vicinity of the end portion. When adjacent surfaces are not smoothly continuous, the reflecting surfaces of adjacent unit reflecting elements are not parallel to each other, and there is a high possibility that an image shift occurs in an aerial image formed through the vicinity of the end portion. Become.

  In the present invention, when adhering the end portions of two unit reflecting elements arranged adjacent to each other, adjacent surfaces form one surface that is smoothly continuous in the vicinity of the end portions as compared with the conventional case. It is an object of the present invention to provide a method for manufacturing an imaging element that can be used.

One embodiment of the present invention provides:
A method of manufacturing an imaging element that forms a real image of an object arranged at a spatial position on one surface side at a spatial position on the other surface side,
An element preparation step of preparing a first unit reflection element and a second unit reflection element each having a plurality of reflection surfaces;
A plane body preparing step of preparing a plane body in which at least a part of the surface is formed into a flat plate and provided with a through hole penetrating from the surface to the back surface;
An arrangement step of arranging the first unit reflection element and the second unit reflection element along the flat plate of the planar body so as to be adjacent to each other in a direction parallel to the flat plate of the planar body;
A suction step of sucking the first unit reflection element and the second unit reflection element, which are arranged along the flat plate of the planar body in the placement step, from the planar body side and fixing them along the flat plate; ,
A supply step of supplying an adhesive between the first unit reflective element and the second unit reflective element fixed in the suction step;
An adhesive step of curing the adhesive and adhering the first unit reflective element and the second unit reflective element to each other;
In the arranging step, a gap is provided between the gap and the plane body so that the hole in the plane body faces the gap between the first unit reflection element and the second unit reflection element. The first unit reflective element and the second unit reflective element are arranged,
In the bonding step, the adhesive is cured in a state where the first unit reflection element and the second unit reflection element are sucked from the plane body side by the suction step.

  According to this aspect, in the bonding step, the adhesive is cured in a state where the first unit reflection element and the second unit reflection element are sucked from the plane body side by the suction step. For this reason, even if the first unit reflection element and the second unit reflection element are warped, the surfaces of the first unit reflection element and the second unit reflection element are smoother in the vicinity of the end than in the conventional case. It is possible to form one continuous surface. In addition, the first unit reflection element is formed so that the hole in the plane body faces the gap between the first unit reflection element and the second unit reflection element, and the gap is provided between the gap and the plane body. And a second unit reflection element are disposed. For this reason, since a space | gap does not become a negative pressure, it becomes possible to prevent that an adhesive spreads in a plane from between the edge parts of two unit reflective elements.

  In the above aspect, for example, in the element preparation step, the first unit reflection element and the second unit reflection element each having a rectangular shape may be prepared, and in the arrangement step, the first unit provided on the planar body may be prepared. The first unit reflective element and the second unit reflective element are arranged so that a through hole of the first unit reflective element and the second unit reflective element are opposed to substantially the center of the adjacent side. Also good.

  The air gap is considered to be the negative pressure most at the center of the side where the rectangular first unit reflection element and the second unit reflection element are adjacent to each other. However, in this aspect, the first punch hole is opposed to this position. For this reason, according to this aspect, it can prevent effectively that a space | gap becomes a negative pressure. As a result, it is possible to prevent the adhesive from spreading from between the end portions of the two unit reflection elements to the planar body.

  In the above aspect, for example, in the element preparation step, a third unit reflection element and a fourth unit reflection element each having a rectangular shape may be prepared, and in the arrangement step, the first unit reflection element of the first unit reflection element, The third unit reflective element may be arranged adjacent to the side adjacent to the second unit reflective element so as to be adjacent to the first unit reflective element, and the second unit reflective element and the third unit reflective element may be disposed. The fourth unit reflective element may be disposed adjacent to both of the unit reflective elements, and a second punch hole provided in the planar body is provided for each of the first to fourth unit reflective elements. The first to fourth unit reflection elements may be arranged so as to face a region surrounded by the corners.

  In the regions surrounded by the respective corners of the first to fourth unit reflective elements, the adhesive comes into contact with the first to fourth unit reflective elements with lines, so that the surface tension of the adhesive is weakened. For this reason, when a space | gap becomes a negative pressure even a little, possibility that an adhesive will spread on a plane body from between the edge parts of four unit reflective elements will become high. However, according to this aspect, the 2nd punch hole has opposed the area | region enclosed by each corner | angular part of a 1st-4th unit reflective element. Therefore, it can prevent effectively that a space | gap becomes a negative pressure. As a result, it is possible to prevent the adhesive from spreading on the planar body from between the end portions of the four unit reflection elements.

  In the above aspect, for example, in the suction step, the gas is sucked from the suction portion that opens to the front surface side of the planar body and penetrates from the front surface to the rear surface, toward the rear surface side of the planar body. The first unit reflection element and the second unit reflection element may be fixed along the flat plate.

  In the above aspect, for example, in the suction step, after the first unit reflection element is sucked from the plane body side and fixed along the flat plate, the second unit reflection element is sucked from the plane body side. And may be fixed along the flat plate.

  According to this aspect, since the second unit reflection element is fixed after the first unit reflection element is fixed, the second unit reflection element can be easily positioned with respect to the first unit reflection element.

  In the above aspect, for example, a shim member disposing step of disposing a shim member between the first unit reflecting element and the second unit reflecting element disposed in the disposing step, and the first member using the shim member. An adjustment process for adjusting the positions of the unit reflection element and the second unit reflection element, and after the adjustment process and before the supply process, the first unit reflection element and the second unit reflection A shim member removing step of removing the shim member from between the elements.

  According to this aspect, since the shim member is used, the second unit reflective element can be easily positioned with respect to the first unit reflective element.

  According to the present invention, when adhering the end portions of two unit reflecting elements arranged adjacent to each other, adjacent surfaces are smoothly connected to each other in the vicinity of the end portions in comparison with the conventional one. It is possible to form.

It is a top view which shows roughly the image formation element in 1st Embodiment. It is arrow sectional drawing along line II-II of FIG. FIG. 3 is a cross-sectional view taken along line III-III in FIG. 1. It is a conceptual diagram which shows the principle by which an aerial image | video is displayed by using an image formation element. It is a perspective view which shows a mode that a unit reflective element is arrange | positioned on the surface of a plane body. FIG. 6 is a cross-sectional view taken along line VI-VI in FIG. 5. It is sectional drawing which shows a mode that the negative pressure is provided to the unit reflection element by attracting | sucking gas from a suction part. It is sectional drawing which shows a mode that the unnecessary adhesive agent is removed using the suction nozzle. It is sectional drawing which shows a mode that the negative pressure by the suction | attraction provided to the unit reflective element was cancelled | released after the adhesive agent hardened | cured and formed the contact bonding layer. It is a flowchart which shows roughly the manufacture procedure of the imaging element of 1st Embodiment. It is a perspective view which shows a mode that a 1st composite reflective element and a 2nd composite reflective element are overlaid. It is a perspective view which shows the state by which the frame-shaped member was attached to the imaging element and integrated. It is a perspective view which shows the state with which the transparent flat plate was attached to the image formation element, and was integrated. It is sectional drawing for demonstrating that it can suppress that an unnecessary angle difference arises in the light which passes the vicinity of an adhesive layer. It is sectional drawing for demonstrating the effect | action and effect of a recessed part of a plane body. It is a perspective view which shows the plane body used for the manufacturing method of the imaging element of 2nd Embodiment. It is arrow sectional drawing along line XVII-XVII of FIG. It is sectional drawing which shows a mode that the negative pressure is provided to the unit reflection element. It is a perspective view which shows 3rd Embodiment of the manufacturing method of an image formation element. It is sectional drawing which shows 3rd Embodiment of the manufacturing method of an image formation element. It is a flowchart which shows roughly the manufacture procedure of the image formation element in 3rd Embodiment. 6 is a perspective view showing a planar body used in Comparative Example 1. FIG. It is arrow sectional drawing along line XXIII-XXIII of FIG. 10 is a cross-sectional view showing a planar body used in Comparative Example 2. FIG. It is a figure which shows roughly the presence or absence of the space | gap in the plane body used for the Example and the comparative examples 1 and 2, and the presence or absence of an aperture, and an experimental result.

(Knowledge that became the basis of the present invention)
First, the knowledge that forms the basis of the present invention will be described. As described above, even when the unit reflection element is warped, when adhering the end portions of two unit reflection elements arranged adjacent to each other, the adjacent surfaces are smooth in the vicinity of the end portions. It is desirable to form one continuous surface.

  Therefore, in a state where two unit reflecting elements are arranged on a flat body having a flat surface, the two unit reflecting elements are sucked from the flat body side, and the two unit reflecting elements are fixed along the flat plate. It is conceivable to supply an adhesive between the end portions of the two unit reflection elements. According to this procedure, since the two unit reflection elements are fixed along the flat plate by the suction force, even when the unit reflection element is warped, the unit reflection element is bonded in a state in which the warp is eliminated. It will be.

  However, in this procedure, it is also conceivable that the adhesive spreads on the planar body from between the end portions of the two unit reflecting elements. In this case, the two unit reflection elements are bonded to the plane body, and the two unit reflection elements cannot be removed from the plane body. Therefore, it is required to prevent the adhesive from spreading on the planar body from between the end portions of the two unit reflection elements.

  Based on the above considerations, the present inventor, when adhering the end portions of two unit reflecting elements arranged adjacent to each other, the adjacent surfaces are more smoothly continuous in the vicinity of the end portions than in the prior art. The inventors have come up with an invention in which one surface is formed and the adhesive can be prevented from spreading from a gap between the end portions of the two unit reflection elements to the plane body.

(Embodiment)
Hereinafter, an embodiment according to the present invention will be described with reference to the drawings. In addition, the structure which attached | subjected the same code | symbol in each figure shows that it is the same structure, The description is abbreviate | omitted suitably.

(First embodiment)
(Constitution)
FIG. 1 is a plan view schematically showing an imaging element 1 in the first embodiment. FIG. 2 is a cross-sectional view taken along line II-II in FIG. 3 is a cross-sectional view taken along line III-III in FIG. The imaging element 1 includes a first composite reflective element 10, a second composite reflective element 20, and a translucent adhesive layer 30, and has a flat plate shape as a whole.

  The 1st composite reflective element 10 is formed in flat form as a whole, and has the outer side main surface 10a and the inner side main surface 10b (refer FIG. 2, FIG. 3). The first composite reflective element 10 includes a plurality of unit reflective elements 10A to 10I, and is configured by bonding and joining the end portions of these unit reflective elements 10A to 10I.

  The first composite reflective element 10 includes unit reflective elements 10A to 10I arranged in a plane in three rows and three columns, and an adhesive layer serving as a lattice-like joint portion in a plan view located between the unit reflective elements 10A to 10I. And have. The end portions of the adjacent unit reflection elements among the unit reflection elements 10 </ b> A to 10 </ b> I are bonded to each other by an adhesive layer (hereinafter also referred to as “adhesion layer 13”) formed of the adhesive 13. The composite reflective element 10 constitutes one composite reflective element that is enlarged as a whole.

  Each of the unit reflection elements 10 </ b> A to 10 </ b> I constituting the first composite reflection element 10 has a plurality of reflection surfaces 11 and a plurality of transparent bodies 12. In FIG. 1, the reflecting surface 11 is indicated by a broken line. The plurality of reflecting surfaces 11 are arranged in parallel to each other so as to be arranged at intervals along a direction (left-right direction in FIG. 1) orthogonal to the thickness direction of the unit reflecting elements 10A to 10I. Each of the plurality of transparent bodies 12 is located between two reflecting surfaces 11 adjacent in the same direction (left-right direction in FIG. 1).

  The 2nd composite reflective element 20 is formed in flat form as a whole, and has the outer side main surface 20a and the inner side main surface 20b (refer FIG. 2, FIG. 3). The second composite reflective element 20 has the same thickness as the first composite reflective element 10. When the second composite reflective element 20 is viewed along the thickness direction, the second composite reflective element 20 has a square shape having the same size as the first composite reflective element 10.

  The second composite reflective element 20 includes a plurality of unit reflective elements 20 </ b> A to 20 </ b> I and is configured by adhering and joining these end portions. The unit reflecting elements 20A to 20I have the same size and shape as the unit reflecting elements 10A to 10I, respectively.

  The second composite reflection element 20 includes unit reflection elements 20A to 20I arranged in a plane in three rows and three columns, and an adhesive layer as a grid-like seam portion located between the unit reflection elements 20A to 20I in a plan view. And have. The end portions of the adjacent unit reflection elements among the unit reflection elements 20 </ b> A to 20 </ b> I are bonded to each other by an adhesive layer (hereinafter also referred to as “adhesion layer 23”) formed of the adhesive 23. The composite reflective element 20 constitutes one composite reflective element that is enlarged as a whole.

  Each of the unit reflection elements 20 </ b> A to 20 </ b> I constituting the second composite reflection element 20 includes a plurality of reflection surfaces 21 and a plurality of transparent bodies 22. The plurality of reflecting surfaces 21 are arranged in parallel so as to be arranged at intervals along a direction (vertical direction in FIG. 1) orthogonal to the thickness direction of the unit reflecting elements 20A to 20I. Each of the plurality of transparent bodies 22 is located between two reflecting surfaces 21 adjacent in the same direction (up and down direction in FIG. 1).

  As shown in FIGS. 2 and 3, the first composite reflective element 10 and the second composite reflective element 20 are arranged so that the inner main surfaces 10b and 20b face each other, and are overlapped in the thickness direction. The 1st composite reflective element 10 and the 2nd composite reflective element 20 are piled up so that the reflective surface 11 and the reflective surface 21 which are contained in each may orthogonally cross.

  The translucent adhesive layer 30 is provided between the first composite reflective element 10 and the second composite reflective element 20, and joins the first composite reflective element 10 and the second composite reflective element 20. In a state where the first composite reflective element 10 and the second composite reflective element 20 are bonded to each other, the first main surface 1a (one surface) of the imaging element 1 is formed by the outer main surface 10a of the first composite reflective element 10. The second main surface 1b (the other surface) of the imaging element 1 is configured by the outer main surface 20a of the second composite reflective element 20.

  Here, the magnitude | size of each above-mentioned member is illustrated. The thicknesses of the first composite reflective element 10 and the second composite reflective element 20 are 900 [μm] or more and 6000 [μm] or less. The length of one side orthogonal to the thickness direction of each of the unit reflecting elements 10A to 10I and 20A to 20I is 10 [cm] or more and 50 [cm] or less. The length of one side orthogonal to the thickness direction of the first composite reflective element 10 and the second composite reflective element 20 is 30 [cm] or more and 150 [cm] or less.

  The material of each above-mentioned member is illustrated. The reflecting surfaces 11 and 21 are made of metal such as aluminum or silver, and the transparent bodies 12 and 22 are made of glass or transparent resin. The adhesive layers 13 and 23 are composed of a cured product of an epoxy adhesive. The translucent adhesive layer 30 is also composed of a cured product of an epoxy adhesive. As the epoxy adhesive, a two-component adhesive can be used.

  The viscosity of the adhesive constituting the adhesive layers 13 and 23 is preferably 1000 [mPa · s] or less. According to the said structure, when the clearance gap between adjacent unit reflective element 10A-10I and 20A-20I is about 0.01 [mm] or more and 0.05 [mm] or less, the clearance gap between these In addition, it becomes possible to easily supply the adhesive by utilizing the capillary phenomenon. The detail regarding supplying the adhesives 13 and 23 to the clearance gap between adjacent unit reflective elements is mentioned later.

  The refractive index after curing of the adhesive layer formed of the adhesive 13 is preferably substantially equal to the refractive index of the transparent body 12. The difference between the refractive index after curing of the adhesive layer 13 and the refractive index of the transparent body 12 may be, for example, 0.02 or less. The refractive index after curing of the adhesive layer formed of the adhesive 23 is preferably substantially equal to the refractive index of the transparent body 22. The difference between the refractive index after curing of the adhesive layer 23 and the refractive index of the transparent body 22 may be 0.02 or less, for example. According to these configurations, it is unnecessary at each interface between the transparent bodies 12 and 22 and the translucent adhesive layer 30 and at each interface between the adhesive layers 13 and 23 and the translucent adhesive layer 30. The occurrence of reflection, refraction, scattering, etc. can be suppressed.

  FIG. 4 is a conceptual diagram showing the principle that an aerial image is displayed by using the imaging element 1. In order to display an aerial image using the imaging element 1, an object 100 as a projection object is arranged at a spatial position on the first main surface 1 a side of the imaging element 1. The light emitted from the object 100 in different directions enters the inside of the first composite reflective element 10 via the first main surface 1a of the imaging element 1 (the outer main surface 10a of the first composite reflective element 10). The light is reflected by the reflective surface 11 (see FIGS. 1 and 2) located in front of the light traveling direction, and reaches the light-transmitting adhesive layer 30 via the inner main surface 10b of the first composite reflective element 10.

  The light that has passed through the translucent adhesive layer 30 enters the inside of the second composite reflective element 20 via the inner main surface 20b of the second composite reflective element 20, and is a reflective surface that is located in front of the traveling direction of the light. 21, and reaches the outside of the imaging element 1 through the second main surface 1 b (the outer main surface 20 a of the second composite reflecting element 20) of the imaging element 1. The light emitted to the outside of the imaging element 1 is brought into a symmetrical position of the object 100 with respect to the plane on which the imaging element 1 is arranged by retroreflection at the first composite reflection element 10 and the second composite reflection element 20. As a result, the mirror image 200 (real image) of the object 100 is imaged at a spatial position on the second principal surface 1 b side of the imaging element 1.

  For example, when a liquid crystal display is arranged as the object 100, an image displayed on the liquid crystal display is displayed as an aerial image. The object 100 is not limited to a liquid crystal display, and any object may be arranged regardless of two-dimensional or three-dimensional types.

  In the first composite reflective element 10 described above, nine unit reflective elements 10A to 10I having a square shape are arranged in a plane in 3 rows and 3 columns. In the second composite reflective element 20, unit reflective elements 20 </ b> A to 20 </ b> I having a square shape are arranged in 3 rows and 3 columns in a planar shape. The 1st composite reflective element 10 and the 2nd composite reflective element 20 are piled up so that the reflective surface 11 and the reflective surface 21 which are contained in each may orthogonally cross.

  The first composite reflective element 10 constituting the imaging element 1 is not limited to the above configuration, and includes four unit reflective elements having a square shape and eight unit reflective elements having a right isosceles triangular shape. It may be configured. For example, four unit reflection elements having a square shape are arranged in two rows and two columns in a plane so as to exhibit one large square shape. The two unit reflecting elements having the shape of a right isosceles triangle connect the short sides so as to exhibit one large right isosceles triangle shape.

  The long sides of one large right-angled isosceles triangle obtained are joined to one side of the one large square shape. By repeating this, one large first composite reflective element 10 having a square shape can be obtained. Also in the first composite reflective element 10, the plurality of reflective surfaces 11 are arranged in parallel so as to be arranged at intervals along a direction orthogonal to the thickness direction of each unit reflective element (the left-right direction in FIG. 1). . The second composite reflective element 20 can also be manufactured to have a similar configuration.

(Production method)
FIG. 5 is a perspective view showing a state in which the unit reflecting elements 10 </ b> A to 10 </ b> C are arranged on the surface of the plane body 40. 6 is a cross-sectional view taken along line VI-VI in FIG. FIG. 7 is a cross-sectional view showing a state in which a negative pressure is applied to the unit reflection element by sucking gas from the suction part. FIG. 8 is a cross-sectional view showing a state where unnecessary adhesive is removed using a suction nozzle. FIG. 9 is a cross-sectional view illustrating a state in which the negative pressure due to suction applied to the unit reflective element is released after the adhesive is cured to form an adhesive layer. FIG. 10 is a flowchart schematically showing a manufacturing procedure of the imaging element 1 in the first embodiment.

(Element preparation process)
In step S100 of FIG. 10, a unit reflection element is prepared. First, a plurality of flat transparent members are prepared, and coating layers are formed on both main surfaces thereof. This transparent member comprises the transparent body 12 or the transparent body 22 mentioned above, and glass or transparent resin can be utilized suitably here. As a specific example, a sheet glass D263 (refractive index of 1.532) manufactured by Schott can be used. A coating layer comprises the reflective surface 11 or the reflective surface 21 mentioned above, and an aluminum film or a silver film can be utilized suitably here. The coating layer can be formed by sputtering, for example.

  Next, for example, an epoxy-based adhesive was applied onto one exposed surface (that is, the surface of one of the coating layers) of the transparent member in which both main surfaces were covered with the coating layer, and the adhesive was applied. Another transparent member is superimposed on the transparent member, and the adhesive is cured. Thereby, two transparent members are bonded together. By repeating this bonding operation as many times as necessary, a plurality of transparent members whose both main surfaces are covered with the coating layer are laminated through an adhesive, thereby forming one laminated body block.

  Next, a laminated body block is cut | disconnected several times along the direction orthogonal to the lamination direction of a transparent member. The laminate block is thinly cut so that the outer shape of the member cut out from the laminate block is a flat plate. For cutting the laminated body block, for example, wire cutting can be used. Next, the cut surface of each member cut out after cutting is polished. Through the above-described steps, a plurality of unit reflection elements 10A to 10I and 20A to 20I each having reflection surfaces 11 and 21 (that is, one unit reflection element that is not yet connected) are obtained. Each of the plurality of unit reflection elements 10A to 10I and 20A to 20I has a size of, for example, 180 [mm] × 180 [mm] in plan view.

(Planar body preparation process)
Next, in step S105 of FIG. 10, the planar body 40 is prepared. The planar body 40 of the first embodiment is composed of a surface plate, and the surface 41S has high flatness. The planar body 40 is made of glass, for example. A plurality of rectangular regions R1 shown in FIG. 5 indicate approximate positions where the unit reflecting elements 10A to 10I are planned to be arranged on the surface 41S of the planar body 40.

  The planar body 40 of the first embodiment has a plurality of suction portions 42 and 43 that open on the surface 41S. The suction part 43 is provided so as to open at a position just in the center in one rectangular region R1. The four suction portions 42 are provided so as to open at positions in the vicinity of the four corner portions in one rectangular region R1. When the suction part 42 opens at a position near the corner in the rectangular area R1, for example, if a small area having a similarity ratio of 0.75 to the rectangular area R1 is drawn at the center of the rectangular area R1, the suction part 42 This means that most or all of 42 is located outside a small region having a similarity ratio of 0.75 with respect to the rectangular region R1. Details of application of the negative pressure by suction to the unit reflection element will be described later. The four suction portions 42 provided near the corners of the rectangular region R1 can efficiently apply negative pressure due to suction to the unit reflecting elements 10A to 10I.

  The surface 41S of the planar body 40 of the first embodiment is further provided with a recess 40P. As shown in FIG. 5, the recesses 40 </ b> P are provided in a lattice shape along the boundaries of the plurality of rectangular regions R <b> 1. As shown in FIG. 7 to be described later, the recess 40P is formed wider than the gap between the unit reflecting elements 10A to 10I arranged adjacent to each other.

  The recess 40P of the planar body 40 of the first embodiment is further provided with punched holes 40T1 and 40T2. As shown in FIG. 5, the punch hole 40T1 (corresponding to an example of the first punch hole) is formed at the center of each side of the plurality of adjacent rectangular regions R1 from the bottom surface of the recess 40P to the back surface 41R of the planar body 40. It is provided to penetrate. In the example of FIG. 5, since nine rectangular regions R1 of 3 rows and 3 columns are arranged, twelve through holes 40T1 are provided. The punch hole 40T2 (corresponding to an example of the second punch hole) is provided at a position where the lattice-shaped recess 40P intersects so as to penetrate from the bottom surface of the recess 40P to the back surface 41R of the planar body 40. In the example of FIG. 5, four punched holes 40T2 are provided.

(Arrangement process)
Next, the unit reflecting elements 10A to 10I manufactured through the element preparation step are adjacent to each other in the direction parallel to the surface 41S on the surface 41S of the plane body 40 prepared in the plane body preparation step. Arranged.

  As shown in FIG. 6, the suction units 42 and 43 are connected to a suction device 45 configured by, for example, a vacuum pump via a pipe 44. The pipe 44 is provided with a valve 46 capable of adjusting the flow rate of suction air flowing through the pipe 44. In the first embodiment, one valve 46 is provided for the plurality of suction portions 42 and 43 opened in one rectangular region R1.

  For example, four suction portions 42 and one suction portion 43 are provided in the rectangular region R1 where the unit reflection element 10A is disposed. These suction parts 42 and 43 are independent of the suction parts 42 and 43 in the other rectangular area R1 (the other eight rectangular areas R1 in which the unit reflecting elements 10B to 10I are arranged) by one valve 46. The flow rate can be adjusted.

  The nine unit reflecting elements 10A to 10I are arranged side by side on the surface 41S of the planar body 40 over 3 rows and 3 columns. At this time, the unit reflection elements 10A to 10I are arranged so that the stacking directions of the plurality of reflection surfaces 11 and the plurality of transparent bodies 12 of the unit reflection elements 10A to 10I are all in the same direction. A gap having a predetermined interval is provided between adjacent unit reflection elements.

  As shown in FIG. 7 to be described later, the unit reflection elements 10A to 10I are configured such that the gap provided between the adjacent unit reflection elements faces the recess 40P provided on the surface 41S of the planar body 40. It arrange | positions on the surface 41S of the plane body 40. FIG. When the adhesive 13 is supplied between the unit reflecting elements 10A and 10B, as shown in FIG. 7, due to the presence of the recess 40P, the unit reflecting elements 10A and 10B in the surface 41S of the plane body 40 are removed. A space 40 </ b> S is provided in a portion located on the flat body 40 side when viewed from the portion in between.

  In FIG. 6, when attention is paid to the two unit reflection elements, the unit reflection element 10A (corresponding to an example of the first unit reflection element) and the unit reflection element 10B (corresponding to an example of the second unit reflection element) Are arranged adjacent to each other in a direction parallel to the surface 41S. At this time, the average thickness 10AH of the end 10AT of the unit reflective element 10A bonded to the unit reflective element 10B and the average thickness 10BH of the end 10BT of the unit reflective element 10B bonded to the unit reflective element 10A Is preferably 0.03 [mm] or less. In this way, by reducing the difference between the average thickness 10AH and the average thickness 10BH, it is possible to suppress the occurrence of a step between the end portions 10AT and 10BT after the end portions 10AT and 10BT are bonded to each other. As a result, it is possible to suppress unnecessary reflection, refraction, scattering, and the like due to this step.

(Suction process)
After the unit reflecting elements 10A to 10I are arranged in a plane by the above arrangement step, the suction device 45 sucks the gas from the suction portions 42 and 43, thereby applying a negative pressure to the unit reflecting elements 10A to 10I. Is granted. By applying a negative pressure to the unit reflecting elements 10A to 10I, the unit reflecting elements 10A to 10I are fixed so as to follow the shape of the surface 41S of the planar body 40.

  The step of sucking and fixing the unit reflecting elements 10A to 10I with a negative pressure may be performed collectively for the unit reflecting elements 10A to 10I, but may be sequentially performed for the unit reflecting elements 10A to 10I. preferable. For example, in step S110 of FIG. 10, the unit reflecting element 10A is disposed on the surface 41S of the planar body 40. In this state, the unit reflecting element 10A is positioned. At this time, the unit reflecting element 10A is positioned so that the end 10AT of the unit reflecting element 10A is located above the recess 40P provided on the surface 41S of the planar body 40.

  At the time of positioning, the suction device 45 may suck the unit reflective element 10A with a certain amount of negative pressure via the suction portions 42 and 43 so that the unit reflective element 10A can be easily positioned. If suction is performed with excessive pressure, the unit reflective element 10A may be scratched when the unit reflective element 10A is moved on the surface 41S. For this reason, when using a negative pressure at the time of positioning, it is good to set to the minimum necessary pressure.

  After the position of the unit reflecting element 10A is determined, in step S115 in FIG. 10, the unit reflecting element 10A is placed on the surface 41S so as to follow the shape of the surface 41S of the planar body 40 using a necessary and sufficient suction force. Fixed to. Even if the unit reflection element 10A has a warp, while the suction by the suction device 45 is continued, the warp of the unit reflection element 10A is canceled by the suction force, and the outer main surface of the unit reflection element 10A. 10a and the inner main surface 10b have high flatness.

  Next, in step S120 of FIG. 10, it is determined whether or not the arrangement and fixing of all the unit reflection elements have been completed. If arrangement and fixing of all the unit reflection elements have not been completed (NO in step S120), the process returns to step S110, and the above steps are repeated.

  Here, the processing returns to step S110, and the unit reflection element 10B is arranged on the surface 41S of the planar body 40 so as to be adjacent to the unit reflection element 10A in a direction parallel to the surface 41S. The reflecting element 10B is positioned. At this time, the unit reflection element 10B is positioned so that the end portion 10BT of the unit reflection element 10B is positioned above the recess 40P provided on the surface 41S of the planar body 40.

  At the time of positioning, the suction device 45 may suck the unit reflection element 10B with a certain amount of negative pressure via the suction portions 42 and 43 so that the unit reflection element 10B can be easily positioned. After the position of the unit reflection element 10B is determined, the unit reflection element 10B is fixed on the surface 41S so as to follow the shape of the surface 41S of the planar body 40 by using a necessary and sufficient suction force.

  Next, the process returns to step S110 again, and the unit reflection element 10C is arranged on the surface 41S of the planar body 40 so as to be adjacent to the unit reflection element 10B in a direction parallel to the surface 41S. The reflecting element 10C is positioned. At this time, the unit reflection element 10C is positioned so that the end of the unit reflection element 10C is located above the recess 40P provided on the surface 41S of the planar body 40.

  At the time of positioning, the suction device 45 may suck the unit reflection element 10C with a certain amount of negative pressure via the suction portions 42 and 43 so that the unit reflection element 10C can be easily positioned. After the position of the unit reflection element 10C is determined, the unit reflection element 10C is fixed on the surface 41S so as to follow the shape of the surface 41S of the planar body 40 by using a necessary and sufficient suction force.

  Before the unit reflecting element 10C is positioned and fixed by suction, the unit reflecting element 10D (corresponding to an example of the third unit reflecting element in FIG. 1) is adjacent to the unit reflecting element 10A in a direction parallel to the surface 41S. As described above, the unit reflecting element 10 </ b> D may be positioned and fixed by suction while being disposed on the surface 41 </ b> S of the planar body 40. Alternatively, before the unit reflecting element 10C is positioned and fixed by suction, the unit reflecting element 10E (corresponding to an example of the fourth unit reflecting element in FIG. 1) is arranged in the direction parallel to the surface 41S. The unit reflecting element 10E may be positioned and fixed by suction while being disposed on the surface 41S of the planar body 40 so as to be adjacent to each other.

  Positioning of the unit reflection elements as described above and fixation by suction are performed in order on the unit reflection elements 10A to 10I. By providing one valve 46 for each rectangular region R1 (FIG. 5), the unit reflecting elements can be positioned and fixed by suction with respect to the unit reflecting elements 10A to 10I. This can be easily done in order. According to this configuration, it is possible to sequentially arrange the next unit reflection elements with reference to the unit reflection elements arranged in advance, and the panel size can be easily expanded. When positioning of all the unit reflection elements 10A to 10I and fixation by suction are completed (YES in step S120), the process proceeds to step S125.

(Supply process)
As described above, in step S115 (FIG. 10), by applying a negative pressure by suction to the unit reflecting elements 10A to 10I, the unit reflecting elements 10A to 10I are arranged along the shape of the surface 41S of the plane body 40. Is fixed. In this state, in step S125 (FIG. 10), as shown in FIG. 7, the adhesive 13 is supplied between the ends of the adjacent unit reflecting elements 10A to 10I using the dispenser 50. As the adhesive 13, for example, a two-component epoxy adhesive may be used.

  The adhesive 13 supplied between the ends of the adjacent unit reflecting elements 10A to 10I is cured to become the above-described adhesive layer. Between the ends of the adjacent unit reflecting elements 10A to 10I, the adhesive 13 is applied drop by drop at an interval of, for example, 10 [mm]. As described above, the viscosity of the adhesive 13 constituting the adhesive layer is preferably 1000 [mPa · s] or less. According to the said structure, when the clearance gap between adjacent unit reflective element 10A-10I is 0.01 [mm] or more, for example, about 0.05 [mm], it is a capillary phenomenon in the clearance gap between these. It becomes possible to easily supply the adhesive 13 by using. Specific examples of the adhesive 13 include Epoxy Technology Inc. 301-2 (refractive index 1.533, viscosity 150 [cP] (150 [mPa · s])) manufactured by the company can be used.

  After confirming that the adhesive 13 has sufficiently spread between the ends of the adjacent unit reflecting elements 10A to 10I (for example, after several minutes have passed since the application of the adhesive 13), FIG. 8 shows. Thus, it is preferable to remove the unnecessary adhesive 13 protruding from the portion between the unit reflecting elements 10 </ b> A to 10 </ b> I using the suction nozzle 51. Since it becomes difficult to remove the adhesive 13 after it is cured, it is preferable to remove the unnecessary adhesive 13 using the suction nozzle 51 before the adhesive 13 is completely cured.

  In the first embodiment, by applying negative pressure by suction to the unit reflecting elements 10A to 10I, the unit reflecting elements 10A to 10I are fixed so as to follow the shape of the surface 41S of the planar body 40. The unit reflecting elements 10A to 10I are bonded to each other when the adhesive 13 is cured.

  For example, when a thermosetting adhesive is used as the adhesive 13, when the adhesive 13 is heated and cured, negative pressure due to suction is continuously applied to the unit reflecting elements 10A to 10I. In the case where an ultraviolet curable adhesive is used as the adhesive 13, when the adhesive 13 is irradiated with ultraviolet rays and cured, negative pressure by suction is continuously applied to the unit reflecting elements 10A to 10I. With these configurations, the unit reflecting elements 10 </ b> A to 10 </ b> I are bonded to each other in a state of being fixed along the shape of the surface 41 </ b> S of the planar body 40.

  Due to the curing of the adhesive 13, an adhesive layer 13 as a lattice-like joint is formed between the adjacent unit reflecting elements 10A to 10I in a plan view, and the ends of the adjacent unit reflecting elements 10A to 10I are connected to each other. Be joined. As described above, the nine unit reflective elements 10A to 10I are integrated to form a single first composite reflective element 10.

  After the adhesive 13 is cured and the adhesive layer is formed, in step S135 (FIG. 10), the suction device 45 stops the suction and is applied to the unit reflecting elements 10A to 10I as shown in FIG. The negative pressure due to the suction was released. Depending on the degree of warpage that the unit reflection elements 10A to 10I had, as shown in FIG. 9, the unit reflection elements 10A to 10I that are joined will also bend as a whole.

  In the first embodiment, the unit reflecting elements 10A to 10I are bonded to each other in a state of being fixed along the shape of the surface 41S of the planar body 40, so that the surfaces of the adjacent unit reflecting elements are In the vicinity of the adhesive layer 13 (the end of the unit reflection element), one smoothly continuous surface is formed. For example, the outer principal surfaces 10a and 10a of the unit reflecting elements 10A and 10B adjacent to each other form one smoothly continuous surface in the vicinity of the adhesive layer 13. Further, the inner main surfaces 10b and 10b of the unit reflecting elements 10A and 10B adjacent to each other also form one smoothly continuous surface in the vicinity of the adhesive layer 13.

  Not only between the unit reflecting elements 10A and 10B, but also between the unit reflecting elements 10A and 10D (FIG. 1), the outer principal surfaces 10a and 10a are formed with one surface that is smoothly continuous in the vicinity of the adhesive layer 13. The inner main surfaces 10b and 10b are also formed as one surface that is smoothly continuous in the vicinity of the adhesive layer 13. As a result, the difference in inclination between the reflection surfaces of adjacent unit reflection elements in the vicinity of the adhesive layer 13 is suppressed, and an image shift hardly occurs in an aerial image that passes through the vicinity of the adhesive layer 13 and forms an image.

(Configuration example of imaging element)
FIG. 11 is a perspective view showing a state in which the first composite reflective element and the second composite reflective element are overlaid. FIG. 12 is a perspective view showing a state in which the frame-shaped member is attached to and integrated with the imaging element 1. FIG. 13 is a perspective view showing a state in which the transparent flat plate is attached to and integrated with the imaging element 1.

  Also for the unit reflecting elements 20A to 20I, by executing the procedure of FIG. 10, the unit reflecting elements 20A to 20I are integrated to form a single second composite reflecting element 20 as shown in FIG. The Next, the first composite reflective element 10 and the second composite reflective element 20 are overlapped so that the reflective surface 11 and the reflective surface 21 included in each are orthogonal to each other.

  For example, an epoxy adhesive is poured between the second composite reflective element 20 and the first composite reflective element 10, and when this is cured, the first composite reflective element 10 and the second composite reflective element 20 are joined. The The cured adhesive forms a translucent adhesive layer 30 as shown in FIG. In FIG. 11, illustration of the adhesive and the translucent adhesive layer 30 is omitted.

  As described above, the imaging element 1 shown in FIGS. 1 to 4 is manufactured. In summary, the method of manufacturing the imaging element 1 includes the step of forming the first composite reflective element 10 by bonding the end portions of the plurality of unit reflective elements 10A to 10I constituting the first composite reflective element 10; A step of forming the second composite reflective element 20 by bonding ends of the plurality of unit reflective elements 20A to 20I constituting the second composite reflective element 20, and the first composite reflective element 10 and the second composite reflective element And 20 are superposed on each other.

  After the first composite reflective element 10 and the second composite reflective element 20 are overlapped to form the imaging element 1, the frame-shaped member 2A is attached to the imaging element 1 as shown in FIG. You may attach and integrate. With this configuration, it is possible to obtain an imaging element 1A having high rigidity by being integrated with the frame-shaped member 2A.

  Alternatively, after forming the imaging element 1 by superimposing the first composite reflective element 10 and the second composite reflective element 20, as shown in FIG. It may be attached to the child 1 and integrated. With this configuration, the imaging element 1B having high rigidity can be obtained by being integrated with the transparent flat plate 2B.

  The imaging elements 1A and 1B having high rigidity can suppress the occurrence of defects and cracks in the elements during transportation by the frame-like member 2A and the transparent flat plate 2B. The imaging element 1 having an enlarged shape is particularly susceptible to defects on the outer periphery of the panel, but the generation of defects can be effectively suppressed by the frame-shaped member 2A.

(Function and effect)
FIG. 14 is a cross-sectional view for explaining that an unnecessary angular difference can be suppressed from occurring in the light passing through the vicinity of the adhesive layer 13. FIG. 15 is a cross-sectional view for explaining the function and effect of the concave portion of the planar body.

  As described above, the unit reflection elements 10A to 10I and 20A to 20I are manufactured using various methods such as cutting, polishing, adhesion, and molding. However, the manufactured unit reflecting elements 10A to 10I and 20A to 20I are likely to be warped. Ideally, the surfaces of the adjacent unit reflective elements 10A to 10I and 20A to 20I form one surface that is smoothly continuous after bonding. However, when the unit reflecting elements 10A to 10I and 20A to 20I are warped, it is difficult to form one surface in which adjacent surfaces smoothly continue in the vicinity of the adhesive layer 13. When adjacent surfaces are not smoothly continuous, an inclination difference occurs in the reflection surfaces of the adjacent unit reflection elements 10A to 10I and 20A to 20I, and an aerial image formed through the vicinity of the adhesive layer 13 is formed. The possibility of image shift increases.

  However, in the first embodiment, the adhesive 13 is cured in a state where the unit reflecting elements 10A to 10I are fixed so as to follow the shape of the surface 41S of the planar body 40, and the unit reflecting elements 10A to 10I are formed. Are joined together. As a result, as shown in FIG. 14, the surfaces of the adjacent unit reflection elements can form one surface that is smoothly continuous in the vicinity of the adhesive layer 13.

  Specifically, for example, when the two unit reflecting elements 10A and 10B are arranged adjacent to each other and the end portions 10AT and 10BT are joined to each other by the adhesive 13, by applying a negative pressure by suction, Warpage of the unit reflecting elements 10A and 10B is corrected. That is, the outer main surface 10a of the unit reflecting element 10A and the outer main surface 10a of the unit reflecting element 10B are both located on substantially the same plane. In addition, both the inner main surface 10b of the unit reflecting element 10A and the inner main surface 10b of the unit reflecting element 10B are located on substantially the same plane.

  Further, the end portions 10AT and 10BT of the unit reflecting elements 10A and 10B form a state in which they face each other from the front. That is, the end surface of the end portion 10AT and the end surface of the end portion 10BT are parallel to each other. With the warping of the unit reflection elements 10A and 10B being corrected, the adhesive 13 is cured and the unit reflection elements 10A and 10B are bonded to each other.

  As a result, the outer principal surfaces 10a and 10a of the unit reflecting elements 10A and 10B adjacent to each other form one smoothly continuous surface in the vicinity of the adhesive layer 13. In addition, the inner main surfaces 10b and 10b of the unit reflecting elements 10A and 10B adjacent to each other also form one smoothly continuous surface in the vicinity of the adhesive layer 13.

  In the first composite reflective element 10, the plurality of unit reflective elements 10A to 10I are joined so as to have such a smoothly continuous surface shape. Similarly, in the second composite reflective element 20, a plurality of unit reflective elements 20A to 20I are joined so as to have a smoothly continuous surface shape. According to the imaging element 1 including the first composite reflective element 10 and the second composite reflective element 20 having such a configuration, the reflective surfaces of adjacent unit reflective elements are arranged in parallel. For this reason, as shown by the arrow in FIG. 14, it is possible to suppress the occurrence of an unnecessary angular difference in the light passing through the vicinity of the adhesive layer 13. It is possible to reduce the possibility of image shift in the video.

  The interval L1 (FIG. 14) between the unit reflecting elements 10A and 10B bonded to each other by the adhesive 13 is preferably 0.01 [mm] or more and 0.05 [mm] or less. If the distance L1 is within this range, it is possible to suppress the occurrence of poor adhesion or to suppress the deterioration of the quality of the aerial image due to image omission. As a specific example of the setting method of the interval L1, examples using the shim member 71 (FIGS. 19 to 21) will be described later.

  As shown in FIG. 7, the adhesive 13 is supplied between the end 10AT of the unit reflecting element 10A and the end 10BT of the unit reflecting element 10B. At this time, if the gap 40S does not exist, the adhesive 13 tends to enter between the unit reflecting elements 10A and 10B and the surface 41S of the plane body 40 by capillary action. However, in the first embodiment, the air gap 40S exists. Moreover, in the first embodiment, as shown in FIGS. 5, 7, and 15, the through holes 40 </ b> T <b> 1 and 40 </ b> T <b> 2 that penetrate from the recess 40 </ b> P to the back surface 41 </ b> R of the planar body 40 are provided.

  When the holes 40T1 and 40T2 are not provided, in the space 40S formed by the recess 40P, particularly in the region near the center away from the end of the plane body 40, the suction device 45 sucks the gas. It becomes easy to become negative pressure. For this reason, there is a high possibility that the adhesive 13 supplied between the end portions 10AT and 10BT spreads wet to the plane body 40 side.

  However, in the first embodiment, the through holes 40T1 and 40T2 that penetrate from the recess 40P to the back surface 41R of the planar body 40 are provided. For this reason, the air gap 40S communicates with the outside through the punched holes 40T1 and 40T2. Thereby, even if it is an area | region close | similar to the center distant from the edge part of the plane body 40 among the space | gap 40S, the space | gap 40S does not become a negative pressure. As a result, the adhesive 13 supplied between the end portions 10AT and 10BT stays in the vicinity of the end portions 10AT and 10BT by the action of the surface tension as shown in FIG. As described above, according to the first embodiment, since the gap 40S and the through holes 40T1 and 40T2 are provided, it is possible to suppress unnecessary wetting and spreading of the adhesive 13. As shown in FIG. 5, the other unit reflecting elements 10C to 10I are similarly provided with the recess 40P and the through holes 40T1 and 40T2 in the plane body 40, so that unnecessary spreading of the adhesive 13 is suppressed. can do.

(Modified First Embodiment)
In the first embodiment, when the adhesive 13 is cured and the unit reflective element 10A and the unit reflective element 10B are joined, negative pressure due to suction is applied to both the unit reflective element 10A and the unit reflective element 10B. These are fixed along the surface 41S of the planar body 40. Without being limited to such a configuration, when the unit reflective element 10A and the unit reflective element 10B are joined, a negative pressure by suction is applied to either the unit reflective element 10A or the unit reflective element 10B, One unit reflection element may be fixed along the surface 41S of the flat body 40, and the adhesive 13 may be cured in this state. That is, negative pressure by suction is applied to at least one of the unit reflecting element 10A and the unit reflecting element 10B, and the at least one unit reflecting element is fixed along the surface 41S of the planar body 40, and in this state The adhesive 13 may be cured.

  In the first embodiment, the nine unit reflecting elements 10A to 10I are arranged in the direction parallel to the surface 41S of the planar body 40 and joined to each other. However, the present invention is not limited to this. For example, only two unit reflection elements of the unit reflection element 10A (corresponding to an example of the first unit reflection element) and the unit reflection element 10B (corresponding to an example of the second unit reflection element) are formed on the surface of the plane body 40. They may be arranged in a direction parallel to 41S and joined together.

  In the first embodiment described above, negative suction is applied to the unit reflecting elements 10A and 10B before step S125 (FIG. 10) in which the adhesive 13 is supplied between the ends of the adjacent unit reflecting elements 10A and 10B. Pressure is applied and these are fixed along the surface 41S of the planar body 40 (step S115 in FIG. 10). However, it is not limited to this configuration. For example, before the supply of the adhesive 13 is completed (step S125 in FIG. 10) and the adhesive 13 is cured (step S130 in FIG. 10), a negative pressure by suction is applied to the unit reflecting elements 10A and 10B. These may be fixed along the surface 41S of the planar body 40.

  The unit reflecting elements 20A and 20B are also positioned and fixed by suction. After the supply of the adhesive is completed and before the adhesive is cured, the unit reflecting elements 20A and 20B are fixed by positioning and suction. Also good. According to the first embodiment in which the adhesive 13 is supplied between the unit reflective elements 10A and 10B after positioning and suction, according to the first embodiment, the adhesive 13 is cut and the adhesive 13 is unnecessary. Adhesion to the location can be suppressed.

  In the first embodiment described above, one valve 46 is provided for the plurality of suction portions 42 and 43 opened in one rectangular region R1. Without being limited to this configuration, one valve 46 may be provided for the plurality of suction portions 42 and 43 opened in the nine rectangular regions R1. In this configuration, it becomes difficult to sequentially fix the nine unit reflecting elements 10A to 10I by positioning and suction. However, according to this configuration, the number of installed valves 46 can be reduced, and the control and mechanical configuration of the valves 46 can be simplified.

(Second Embodiment)
FIG. 16 is a perspective view showing a planar body 40D used in the imaging element manufacturing method according to the second embodiment. 17 is a cross-sectional view taken along line XVII-XVII in FIG. FIG. 18 is a cross-sectional view showing a state in which a negative pressure is applied to the unit reflection element. With reference to FIGS. 16-18, the manufacturing method of the imaging element in 2nd Embodiment is demonstrated centering on difference with 1st Embodiment.

  In the second embodiment, a plane body 40D is used instead of the plane body 40 of the first embodiment. The planar body 40D includes a flat base 47 and a plurality of spacers 60A to 60I that are detachably disposed on the surface 47S of the base 47. The spacers 60A to 60I are made of, for example, a metal member having a thickness of 0.5 [mm].

  The surface 47S of the base part 47 has a flat surface shape and is formed to have high flatness. A region R <b> 2 shown in FIG. 16 indicates an approximate position where the spacer 60 </ b> A is planned to be disposed on the surface 47 </ b> S of the base portion 47. In FIG. 16, illustration of the area | region corresponding to the other spacers 60B-60I is abbreviate | omitted. The base part 47 has a plurality of suction parts 43 opened on the surface 47S. In FIG. 16, only one suction part 43 corresponding to the spacer 60A is shown. The suction part 43 is provided so as to open at a substantially central position in one region R2.

  The base portion 47 of the planar body 40D of the second embodiment is further provided with holes 40U1 and 40U2. As shown in FIG. 16, the punch hole 40U1 (corresponding to an example of the first punch hole) is located approximately at the center of each side between a plurality of adjacent spacers, from the front surface 47S to the rear surface 47R. It is provided so that it may penetrate. In the example of FIG. 16, nine spacers 60A to 60I of 3 rows and 3 columns are arranged, and thus twelve punch holes 40U1 are provided. The punch hole 40U2 (corresponding to an example of the second punch hole) penetrates from the front surface 47S of the base 47 to the rear surface 47R at a position surrounded by the corners of the four spacers in 2 rows and 2 columns. Is provided. In the example of FIG. 16, four punched holes 40U2 are provided.

  The spacers 60 </ b> A to 60 </ b> I have a plate shape that has a square shape in plan view. The spacers 60 </ b> A to 60 </ b> I have an outer shape smaller than the outer shape of the unit reflection element disposed on the surface 61 of the spacers 60 </ b> A to 60 </ b> I. For example, the surface 61 of the spacer 60A has a square shape, and has an outer shape smaller than the outer shape of the unit reflecting element 10A disposed on the surface 61 of the spacer 60A. The other spacers 60B to 60I have the same shape.

  Preferably, the outer shape of the spacer 60A is similar to the outer shape of the unit reflecting element 10A disposed on the surface 61 of the spacer 60A. For example, even if the length L2 of one side constituting the outer shape of the spacer 60A is set to 95% or less of the length L3 of one side of the outer shape of the unit reflecting element 10A corresponding to this one side. Good. When the unit reflection element 10A has an outer shape of L3 × L3 = 180 [mm] × 180 [mm], the spacer 60A has, for example, an outer shape of L2 × L2 = 170 [mm] × 170 [mm]. It may be set.

  It is preferable that the dimensional relationship represented by the similarity ratio between the lengths L2 and L3 is established in all of the spacers 60A to 60I. If the length L2 is 95% or less of the length L3, the spacer surface 61 can stably hold one unit reflection element with high positional accuracy. More preferably, the length L2 may be 50% or more of the length L3.

  Each of the spacers 60 </ b> A to 60 </ b> I has a plurality of suction portions 62 and 63 that open on the surface 61. Each of the plurality of suction parts 62 and 63 penetrates each of the spacers 60A to 60I in the thickness direction. The suction part 63 is provided so as to open at a substantially central position on the surface 61.

  The four suction parts 62 are provided so as to open at positions near the four corners of the unit reflection element arranged on the surface 61 of the surface 61. For at least one of the spacers 60A to 60I, four suction portions 62 are provided so as to open at positions near the four corners of the unit reflection element disposed on the surface 61 of the surface 61. Preferably it is. The suction part 62 opens at positions near the four corners of the unit reflection element arranged on the surface 61 of the surface 61. For example, a square region having a similarity ratio of 0.75 to the surface 61 is defined. If it is drawn at the center of the surface 61, it means that most or all of the suction part 62 is located outside the square region where the similarity ratio to the surface 61 is 0.75.

  By the four suction portions 62 provided in the vicinity of the corner portions, the negative pressure due to the suction of the suction device 45 can be efficiently applied to the unit reflection element. When the outer shape of the unit reflection element has a rectangular shape, the suction portions 62 are preferably provided in the vicinity of the four corner portions. When the outer shape of the unit reflection element has a triangular shape, it is preferable that the suction portions 62 are provided in the vicinity of the three corner portions.

  As shown in FIG. 17, each of the spacers 60 </ b> A to 60 </ b> I has a recess 64 and an annular leg 65 on the side opposite to the surface 61. In a state where the leg portions 65 of the spacers 60 </ b> A to 60 </ b> I are disposed on the base portion 47, a space 66 is formed between the concave portion 64 and the surface 47 </ b> S of the base portion 47. The plurality of suction parts 62 and 63 communicate with the suction part 43 provided on the base part 47 via the space 66.

  In the second embodiment, the unit reflecting elements 10 </ b> A and 10 </ b> B are not directly arranged on the surface 47 </ b> S of the base portion 47. That is, as shown in FIG. 18, the unit reflecting elements 10A and 10B are disposed on the surfaces 61 of the spacers 60A and 60B, respectively. With the unit reflective element 10A disposed on the spacer 60A and the unit reflective element 10B disposed on the spacer 60B, the positions of the unit reflective elements 10A and 10B are adjusted. Although not shown, the same applies to the other unit reflection elements 10C to 10I.

  After the unit reflecting elements 10A to 10I are respectively disposed on the spacers 60A to 60I, the suction device 45 sucks the gas through the suction portions 62 and 63, thereby applying a negative pressure to the unit reflecting elements 10A to 10I. Is done. By applying a negative pressure to the unit reflection elements 10A to 10I, the unit reflection elements 10A to 10I are fixed so as to follow the shape of the surface 61 of the spacers 60A to 60I parallel to the surface 47S of the planar body 40D.

  The step of fixing the unit reflecting elements 10A to 10I with negative pressure may be performed collectively for the unit reflecting elements 10A to 10I, but it is preferable to sequentially perform the unit reflecting elements 10A to 10I. Is the same as in the first embodiment. For example, the unit reflecting element 10A is disposed on the surface 61 of the spacer 60A, and the unit reflecting element 10A is positioned. At the time of positioning, the suction device 45 may suck the unit reflective element 10A with a certain amount of negative pressure via the suction parts 62 and 63 so that the unit reflective element 10A can be easily positioned.

  After the position of the unit reflecting element 10A is determined, the unit reflecting element 10A is placed on the surface 61 of the spacer 60A so as to conform to the shape of the surface 61 of the spacer 60A using the necessary and sufficient suction force by the suction device 45. Fixed to. If the unit reflection element 10A has a warp, the warp of the unit reflection element 10A is eliminated by following the shape of the surface 61 of the spacer 60A while the suction by the suction device 45 is continued. The outer main surface 10a and the inner main surface 10b of the unit reflecting element 10A have high flatness.

  Next, the unit reflection element 10B is positioned on the surface 61 of the spacer 60B so that the unit reflection element 10B is adjacent to the unit reflection element 10A in a direction parallel to the surface 61 of the spacer 60B. At the time of positioning, the suction device 45 may suck the unit reflection element 10B with a certain amount of negative pressure via the suction portions 62 and 63 so that the unit reflection element 10B can be easily positioned. After the position of the unit reflection element 10B is determined, the unit reflection element 10B is fixed so as to follow the shape of the surface 61 of the spacer 60B by using a necessary and sufficient suction force by the suction device 45.

  Next, the unit reflecting element 10C is positioned on the surface 61 of the spacer 60C so that the unit reflecting element 10C is adjacent to the unit reflecting element 10B in a direction parallel to the surface 61 of the spacer 60B, and the unit reflecting element 10C is positioned. At the time of positioning, the suction device 45 may suck the unit reflective element 10C with a certain amount of negative pressure via the suction portions 62 and 63 so that the unit reflective element 10C can be easily positioned. After the position of the unit reflection element 10C is determined, the position of the unit reflection element 10C is fixed so as to follow the shape of the surface 61 of the spacer 60C by using a necessary and sufficient suction force by the suction device 45.

  Before the unit reflecting element 10C is positioned and fixed by suction, the unit reflecting element 10D (corresponding to an example of the third unit reflecting element in FIG. 1) is arranged in the direction parallel to the surface 61 of the spacer 60D. The unit reflecting element 10D may be positioned and fixed by suction in a state of being disposed on the surface 61 of the spacer 60D so as to be adjacent to 10A. Alternatively, before the unit reflecting element 10C is positioned and fixed by suction, the unit reflecting element 10E (corresponding to an example of the fourth unit reflecting element in FIG. 1) is united in a direction parallel to the surface 61 of the spacer 60D. The unit reflective element 10E may be positioned and fixed by suction in a state of being disposed on the surface 61 of the spacer 60E so as to be adjacent to the reflective element 10B.

  Positioning of the unit reflection elements as described above and fixation by suction are performed in order on the unit reflection elements 10A to 10I. By providing one valve 46 for each region R2 (FIG. 16), positioning of the unit reflecting elements and fixing by suction as described above are sequentially performed with respect to the unit reflecting elements 10A to 10I. It can be easily done. According to this configuration, it is possible to sequentially arrange the next unit reflection elements with reference to the unit reflection elements arranged in advance, and the panel size can be easily expanded.

  As described above, the unit reflection elements 10A to 10I are fixed so as to follow the shape of the surfaces of the spacers 60A to 60I by applying a negative pressure by suction to the unit reflection elements 10A to 10I. In this state, as shown in FIG. 18, using the dispenser 50, the adhesive 13 is supplied between the end portions 10AT and 10BT of the adjacent unit reflecting elements 10A to 10I. For example, an epoxy adhesive may be used as the adhesive 13. The adhesive 13 supplied here becomes the above-mentioned adhesive layer by curing.

  As in the case of the first embodiment, by applying negative pressure by suction to the unit reflecting elements 10A to 10I, the unit reflecting elements 10A to 10I are fixed so as to follow the shape of the surface of the planar body 40D. In this state, the adhesive 13 is cured, so that the unit reflecting elements 10A to 10I are bonded to each other.

  Due to the curing of the adhesive 13, an adhesive layer 13 as a lattice-like joint is formed between the adjacent unit reflecting elements 10A to 10I in a plan view, and the ends of the adjacent unit reflecting elements 10A to 10I are connected to each other. Be joined. As described above, the nine unit reflective elements 10A to 10I are integrated to form a single first composite reflective element 10 (see FIG. 11). As described above, in the second embodiment, the first composite is performed in the same procedure as that of the first embodiment shown in FIG. 10 except that the unit reflecting elements 10A to 10I are arranged on the spacers 60A to 60I. A reflective element 10 (see FIG. 11) is formed. With respect to the unit reflection elements 20A to 20I (see FIG. 11), the unit reflection elements 20A to 201 are integrated by the same procedure, and a single second composite reflection element 20 is formed.

(Function and effect)
In the second embodiment, the spacers 60A and 60B have outer shapes that are smaller than the outer shapes of the unit reflecting elements 10A and 10B arranged on the surfaces 61 of the spacers 60A and 60B, respectively. Therefore, as shown in FIG. 18, the surface of the planar body 40D (the surface of each spacer 60A, 60B) is located on the planar body 40D side when viewed from the portion between the unit reflecting elements 10A, 10B. A gap 40V is provided in the portion.

  Furthermore, in the second embodiment, as shown in FIGS. 16 to 18, through holes 40 </ b> U <b> 1 and 40 </ b> U <b> 2 penetrating from the front surface 47 </ b> S of the base portion 47 of the planar body 40 </ b> D to the rear surface 47 </ b> R are provided. Accordingly, the gap 40V communicates with the outside air through the punched holes 40U1 and 40U2. For this reason, the air gap 40V does not become negative pressure by the suction force of the suction device 45. As a result, according to the second embodiment, similarly to the first embodiment, it is possible to suppress unnecessary wetting and spreading of the adhesive 13 to the planar body 40D. Similar actions and effects can be obtained between the other spacers 60C to 60I. As in the case of the first embodiment, it is preferable to remove the unnecessary adhesive protruding from the portion between the unit reflecting elements 10A to 10I using the suction nozzle 51 (see FIG. 8).

(Third embodiment)
FIG. 19 is a perspective view showing a method for manufacturing an imaging element in the third embodiment. FIG. 20 is a cross-sectional view illustrating the method of manufacturing the imaging element in the third embodiment. FIG. 21 is a flowchart schematically showing a manufacturing procedure of the imaging element in the third embodiment. With reference to FIGS. 19 to 21, the manufacturing method of the imaging element in the third embodiment will be described focusing on differences from the second embodiment. The third embodiment is different from the second embodiment in that a shim member 71 is used. The shim member 71 is formed of a thin metal plate having a thickness of 0.03 [mm], for example.

  Steps S100 to S110 in FIG. 21 are the same as steps S100 to S110 in FIG. In step S105, the same planar body 40D as in the second embodiment is prepared.

  In step S200 of FIG. 21, for example, a shim member 71 is disposed between the unit reflecting element 10A (corresponding to an example of the first unit reflecting element) and the unit reflecting element 10B (corresponding to an example of the second unit reflecting element). Is done. In step S205, the position of the unit reflection elements 10A and 10B is adjusted using the shim member 71. Step S115 is the same as step S115 in FIG. 10, and negative pressure is applied to the unit reflecting elements 10A and 10B by the suction device 45 to fix these positions. In step S210, the shim member 71 is extracted from between the unit reflecting elements 10A and 10B. The following steps S120 to S130 are the same as steps S120 to S130 in FIG. 10, respectively. That is, the shim member 71 is pulled out before the adhesive 13 is supplied between the unit reflecting elements 10A and 10B.

  In addition, after arrange | positioning all the unit reflective elements 10A-10I on the spacers 60A-60I, the shim member 71 is arrange | positioned between all the adjacent unit reflective elements 10A-10I, and all the unit reflective elements 10A. After adjusting the position of -10I, negative pressure may be applied to all the unit reflecting elements 10A to 10I to fix these positions. Alternatively, as shown in FIGS. 19 and 20, first, after the unit reflecting elements 10A and 10B are fixed, the unit reflecting element 10D is arranged next, and the shim member 71 is disposed between the unit reflecting elements 10A and 10D. After arranging and adjusting the positions of the unit reflecting elements 10A and 10D, the unit reflecting elements 10A and 10D may be fixed, and the unit reflecting elements may be fixed one by one in order.

  According to the third embodiment, by using the shim member 71, the positions of the unit reflection elements 10A and 10B can be easily adjusted. In addition, about the thickness of the shim member 71, you may adjust position using the shim member 71 which has different thickness instead of using the shim member 71 which always has one kind of thickness as needed. .

  In order to express the present invention, the present invention has been properly and fully described through the embodiments with reference to the drawings. However, those skilled in the art can easily change and / or improve the above-described embodiments. It should be recognized that this is possible. Therefore, unless the modifications or improvements implemented by those skilled in the art are at a level that departs from the scope of the claims recited in the claims, the modifications or improvements are not covered by the claims. To be construed as inclusive.

  FIG. 22 is a perspective view showing a planar body 40X used in Comparative Example 1. 23 is a cross-sectional view taken along line XXIII-XXIII in FIG. FIG. 24 is a cross-sectional view showing a planar body 40Y used in Comparative Example 2. FIG. 25 is a diagram schematically showing the presence or absence of voids and punched holes in the planar bodies used in Examples and Comparative Examples 1 and 2, and the experimental results. 22 to 24, the same elements as those of FIG. 5 used in the embodiment are denoted by the same reference numerals.

  As described in the first embodiment, the planar body 40 shown in FIG. 5 used in the example is provided with the recess 40P and the through holes 40T1 and 40T2. Therefore, as described in the first embodiment, when the adhesive 13 is supplied between the unit reflecting elements 10A and 10B, as shown in FIG. 7, the unit reflecting elements 10A and 10B A gap 40S is provided in a portion located on the flat body 40X side when viewed from the portion in between.

  On the other hand, as shown in FIGS. 22 and 23, the planar body 40X used in Comparative Example 1 is not provided with a recess or a punched hole. Since there is no recess, when the adhesive 13 is supplied between the unit reflecting elements 10A and 10B in Comparative Example 1, as seen from the portion between the unit reflecting elements 10A and 10B, as shown in FIG. There is no air gap in the portion located on the flat body 40X side.

  Further, as shown in FIG. 24, the planar body 40Y used in Comparative Example 2 is provided with a recess 40P, but is not provided with a hole. For this reason, when the adhesive 13 is supplied between the unit reflecting elements 10A and 10B, due to the presence of the recess 40P, the unit reflecting element 10A in the surface 41S of the surface 41S of the planar body 40 is shown in FIG. , 10B, a gap 40S is provided in a portion located on the flat body 40 side when viewed from the portion between them.

  The experimental conditions of the examples and comparative examples 1 and 2 are as follows. Configurations other than the recesses and the punched holes, for example, the configurations of the suction units 42 and 43, the suction device 45, and the like are the plane body 40 used in the examples and the plane bodies 40X and 40Y used in the comparative examples 1 and 2, The same. The sizes of the planar bodies 40, 40X, and 40Y are all □ 600 [mm]. The sizes of the nine unit reflecting elements used in the example and the comparative examples 1 and 2 are all □ 180 [mm].

  As the flat transparent member used for the production of the unit reflection element, Schott's thin glass D263 (refractive index of 1.532) exemplified in the first embodiment was used. The adhesive 13 is made of Epoxy Technology Inc. exemplified in the first embodiment. 301-2 (refractive index 1.533, viscosity 150 [cP] (150 [mPa · s])) manufactured by the company was used.

  In the experiment, first, nine unit reflecting elements are arranged on a plane body with a shim member having a thickness of 0.03 [mm] sandwiched between adjacent unit reflecting elements, and negative pressure is applied by a suction device. Thus, nine unit reflecting elements were fixed on the plane body. Next, an adhesive was applied drop by drop at an interval of 10 [mm] between the ends of adjacent unit reflection elements. Several minutes later, it was confirmed that the adhesive was sufficiently wet and spread between the end portions of the unit reflecting elements, and then unnecessary adhesive was removed by suction. After the adhesive was cured, the adhesive protruding from the end face of the unit reflecting element was removed. And wetting spread of the adhesive was evaluated.

  In Comparative Example 1 in which the flat body 40X in which neither a gap nor a punched hole was provided was used, as shown in FIG. 25, wetting and spreading of the adhesive onto the flat body 40X was visually recognized at all locations. The reason for this is considered to be that the adhesive has entered between the unit reflecting element and the surface 41S of the flat body 40X by capillary action as described in the first embodiment.

  In the comparative example 2 in which the flat body 40Y is provided with the gap 40S but not provided with the hole, as shown in FIG. 25, 4 surrounded by four unit reflection elements is provided. Only in the places (that is, the four places corresponding to the punched holes 40T2 (FIG. 5) in the embodiment), wetting and spreading of the adhesive to the planar body 40Y were visually recognized. In places other than the above four places (that is, places where wetting and spreading of the adhesive was not visually recognized), the adhesive is in contact with the unit reflective element on the surface. For this reason, it is considered that the surface tension becomes larger than the negative pressure of the gap 40S, and the adhesive remains in the vicinity of the end portion of the unit reflection element. On the other hand, in the four places, the adhesive is in line contact with the unit reflection element. For this reason, it is considered that the negative pressure of the gap 40S is larger than the surface tension, and the adhesive has spread from the unit reflection element to the planar body 40Y.

  On the other hand, in the embodiment using the flat body 40 in which the gap 40S is provided by the recess 40P and the through holes 40T1 and 40T2 are provided, as shown in FIG. 25, wetting and spreading are visually recognized. There was no place. This is considered to be because the gap 40S does not become negative pressure due to the holes 40T1 and 40T2, and the adhesive remains in the vicinity of the end of the unit reflection element due to the action of the surface tension. By the above experiment, the effect by the structure of the said 1st Embodiment was demonstrated.

1, 1A, 1B Imaging element 10A to 10I, 20A to 20I Unit reflection element 13 Adhesive layer 40, 40D Plane body 40P Recess 40S Cavity 40T1, 40T2 Punch hole 45 Suction device 62, 63 Suction part 71 Shim member

Claims (6)

A method of manufacturing an imaging element that forms a real image of an object arranged at a spatial position on one surface side at a spatial position on the other surface side,
An element preparation step of preparing a first unit reflection element and a second unit reflection element each having a plurality of reflection surfaces;
A plane body preparing step of preparing a plane body in which at least a part of the surface is formed into a flat plate and provided with a through hole penetrating from the surface to the back surface;
An arrangement step of arranging the first unit reflection element and the second unit reflection element along the flat plate of the planar body so as to be adjacent to each other in a direction parallel to the flat plate of the planar body;
A suction step of sucking the first unit reflection element and the second unit reflection element, which are arranged along the flat plate of the planar body in the placement step, from the planar body side and fixing them along the flat plate; ,
A supply step of supplying an adhesive between the first unit reflective element and the second unit reflective element fixed in the suction step;
An adhesive step of curing the adhesive and adhering the first unit reflective element and the second unit reflective element to each other;
In the arranging step, a gap is provided between the gap and the plane body so that the hole in the plane body faces the gap between the first unit reflection element and the second unit reflection element. The first unit reflective element and the second unit reflective element are arranged,
In the bonding step, the adhesive is cured in a state where the first unit reflection element and the second unit reflection element are sucked from the plane body side by the suction step.
Manufacturing method of imaging element. In the element preparation step, the first unit reflection element and the second unit reflection element each having a rectangular shape are prepared,
In the arranging step, the first unit hole is provided in the planar body so that the first unit reflection element and the second unit reflection element face each other at substantially the center of the adjacent side. A reflective element and the second unit reflective element are disposed;
The manufacturing method of the imaging element of Claim 1. In the element preparation step, a third unit reflection element and a fourth unit reflection element each having a rectangular shape are prepared,
In the arrangement step,
In the adjacent side of the first unit reflective element adjacent to the side adjacent to the second unit reflective element, the third unit reflective element is disposed adjacent to the first unit reflective element,
The fourth unit reflective element is disposed adjacent to both the second unit reflective element and the third unit reflective element; and
The first to fourth unit reflective elements are arranged so that a second punch hole provided in the planar body is opposed to a region surrounded by each corner of the first to fourth unit reflective elements. To be
The manufacturing method of the imaging element of Claim 2. In the suction step, the first unit reflective element is opened by sucking a gas from a suction portion that opens to the front surface side of the planar body and penetrates from the front surface to the back surface toward the back surface side of the planar body. The second unit reflection element is fixed along the flat plate,
The manufacturing method of the imaging element of any one of Claims 1-3. In the suction step, the first unit reflection element is sucked from the plane body side and fixed along the flat plate, and then the second unit reflection element is sucked from the plane body side and along the flat plate. Fixed to the
The manufacturing method of the imaging element of any one of Claims 1-4. A shim member disposing step of disposing a shim member between the first unit reflecting element and the second unit reflecting element disposed in the disposing step;
An adjustment step of adjusting the position of the first unit reflection element and the second unit reflection element using the shim member;
A shim member removal step of removing the shim member from between the first unit reflection element and the second unit reflection element after the adjustment step and before the supply step. ,
The manufacturing method of the imaging element of any one of Claims 1-5.

Images