JP2019144140A - Plane inspection device and plane inspection method - Google Patents

Abstract

To provide a plane inspection device and a plane inspection method with which it is possible to correct a shift in height level of a test object on the basis of the result of liquid surface level measurement.SOLUTION: The present invention is a plane inspection device (1) for inspecting the flatness of a test object (2), comprising a level measurement container (6) capable of accommodating a fluid and a liquid surface sensor (7) capable of measuring the liquid surface level of the fluid accommodated in the level measurement container, and characterized by including: a plurality of liquid surface tools (3) installed at different positions on the top face of the test object; a flow path pipe (4) connected between each level measurement container and enabling the fluid to flow between each level measurement container; and a correction device (9) for correcting a shift in the height of the test object on the basis of the detection result of the liquid surface sensor.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a plane inspection apparatus and a plane inspection method.

  2. Description of the Related Art A flatness measuring device that measures the flatness of an object to be inspected using a measuring device is known. In the invention described in Patent Document 1, a plurality of fluid tanks are installed on the surface of an object to be inspected, and the liquid level of the fluid stored in the liquid tank is measured using a height measuring device. Each fluid tank is connected by a hose so that fluid can be circulated between the fluid tanks.

  The height measuring device measures the liquid level of the fluid stored in each fluid tank, obtains the level difference, and calculates the flatness.

Japanese Patent Laying-Open No. 2005-227081

  However, in the invention described in Patent Document 1, although the flatness can be measured, there is no means for correcting the deviation of the height level of the object to be inspected.

  As described above, in the invention described in Patent Document 1, even when the flatness of the object to be inspected can be measured, the flatness cannot be corrected.

  The present invention has been made in view of the above points, and in particular, a planar inspection apparatus and a planar inspection method capable of correcting a deviation of the height level of an object to be inspected based on a liquid level measurement result. The purpose is to provide.

  The present invention is a flat surface inspection device for inspecting the flatness of an object to be inspected, a level measuring container capable of containing a fluid, and a liquid level capable of measuring a liquid level of the fluid contained in the level measuring container A sensor is provided, and is connected between a plurality of liquid level tools installed at different positions on the upper surface of the object to be inspected and each level measuring container, and enables the fluid to flow between the level measuring containers. And a correction device that corrects a deviation of a height level of the object to be inspected based on a detection result of the liquid level sensor.

  In the present invention, the correction device is installed on the lower surface of the object to be inspected corresponding to each liquid level tool and the arithmetic device for calculating each liquid level, and based on the calculation result of the arithmetic device, the inspected It is preferable to have a plurality of lifting devices that correct height level deviations at each measurement position of the body.

  In the present invention, in the correction device, the liquid level is defined as a reference leg corresponding to the liquid level tool closest to the reference level, and the lifting device other than the reference leg is driven, It is preferable to control each liquid level so as to approach the reference level.

  In the present invention, the correction device detects whether or not the lifting device other than the reference leg is within a predetermined driving range when the lifting device is moved up and down so as to approach the reference level. It is preferable that the reference leg is moved up and down so that all the lifting devices other than the reference leg are lifted and lowered within the predetermined driving range.

  The present invention is a plane inspection method for inspecting the flatness of an object to be inspected, wherein a plurality of lifting devices are arranged at different positions on the lower surface of the object to be inspected, and the inspection object corresponding to the lifting device is arranged. A step of installing a plurality of liquid level tools including a level measuring container capable of storing a fluid and a liquid level sensor capable of measuring a liquid level of the fluid stored in the level measuring container on the upper surface; The liquid level of the liquid contained in each level measuring container connected by the liquid level sensor is detected by the liquid level sensor, and based on the detection result of the liquid level sensor, the inspection object is moved up and down by the lifting device. However, the method includes a step of correcting a deviation in height level at each measurement position of the object to be inspected.

  In the present invention, before installing the liquid level tool on the upper surface of the object to be inspected, placing the liquid level tool on a horizontal reference surface and setting the liquid level to a reference level, Setting the lifting device corresponding to the liquid level tool at the liquid level closest to the reference level to a reference leg after installing the liquid level tool on the upper surface of the object to be inspected, and In the step of correcting the deviation of the height level, based on the detection result of the liquid level sensor, the lifting device other than the reference leg is lifted and controlled so that each liquid level approaches the reference level. It is preferable.

  In the present invention, in the step of correcting the deviation of the height level, it is detected whether or not the lifting device other than the reference leg is within a predetermined driving range when the lifting device other than the reference leg is lifted so as to approach the reference level. When it is outside the predetermined driving range, it is preferable that the reference leg is moved up and down so that all the lifting devices other than the reference leg are moved up and down within the predetermined driving range.

  According to the planar inspection apparatus and the planar inspection method of the present invention, it is possible to correct the deviation of the height level of the object to be inspected based on the liquid level measurement result, and to measure and calculate the level deviation and to correct the level deviation. Can be performed automatically.

It is a schematic diagram of the plane inspection apparatus of this embodiment. It is a schematic diagram which shows the relationship between the height of a leg and a liquid level. It is a flowchart of the plane inspection method of this embodiment. It is a schematic diagram for demonstrating the liquid level of the initial condition of experiment. FIG. 5A is a graph showing the transition of each liquid level, and FIG. 5B is a graph showing the transition of the height level (%) of each leg.

  Hereinafter, an embodiment of the present invention (hereinafter abbreviated as “embodiment”) will be described in detail. In addition, this invention is not limited to the following embodiment, It can implement by changing variously within the range of the summary.

<Flat inspection device>
FIG. 1 is a schematic diagram of a planar inspection apparatus according to the present embodiment. A flat surface inspection apparatus 1 shown in FIG. 1 is an apparatus for inspecting the flatness of an object 2 to be inspected. The object to be inspected 2 is not particularly limited, and is, for example, a floor.

  As shown in FIG. 1, the flat inspection apparatus 1 includes a liquid level tool 3, a flow channel pipe 4, and a correction device 5.

(Liquid level tool 3)
The liquid level tool 3 includes a level measuring container 6 and a liquid level sensor 7. As shown in FIG. 1, the level measuring container 6 is, for example, a cylindrical bottomed container, but may have any shape as long as it can accommodate a liquid. A liquid level sensor 7 is installed above the level measuring container 6. The liquid level sensor 7 is, for example, a laser sensor, which irradiates the liquid level with laser light from the liquid level sensor 7 and measures the liquid level from the reflected light. The float as a reflector may be floated on the liquid surface and the reflected light of the float may be measured. However, if a float is used, the measurement accuracy of the liquid surface level is likely to decrease, so in this embodiment, no float should be used. Is preferred.

  As shown in FIG. 1, the plurality of liquid level tools 3 are installed at different positions on the upper surface 2 a of the inspection object 2. In FIG. 1, four liquid level tools 3 are installed at the four corners of the inspection object 2. The installation location and number of the liquid level tool 3 are not limited, and the installation location and number of the liquid level tool 3 are arbitrarily selected according to the usage pattern of the inspection object 2 and the flatness required of the inspection object 2. I can decide. In addition, by installing and measuring the liquid level tool 3 at the four corners of the inspection object 2, the level shift of the entire upper surface 2a of the inspection object 2 can be corrected with high accuracy.

(Channel pipe 4)
As shown in FIG. 1, the level measuring containers 6 are connected by a flow channel pipe 4. Thereby, the liquid accommodated in each level measuring container 6 can flow between the level measuring containers 6 through the flow path pipe 4.

  Although the flow path pipe | tube 4 is not specifically limited, For example, it is a flexible hose. The material of the hose is not particularly limited, but is preferably made of a thermoplastic resin, particularly preferably urethane.

(Correction device 5)
The correction device 5 corrects the deviation of the height level of the device under test 2 based on the detection result of the liquid level sensor 7. Thus, in the present embodiment, not only the height level deviation is calculated, but also the height level deviation can be corrected. In particular, in the present embodiment, the height level deviation at the measurement position of the liquid level tool 3 (four corners of the inspection object 2 shown in FIG. 1) is corrected, and level measurement and level correction are repeated by automatic control. It is possible to control the height levels so as to substantially coincide with each other. As a result, the deviation of the height level of the device under test 2 can be corrected with high accuracy.

  Here, the “height level” refers to the height position of the upper surface 2 a of the inspection object 2. In the present embodiment, when there is a deviation in the height level of the upper surface 2a of the inspection object 2, the deviation in the height level can be corrected. However, in this embodiment, the height level deviation is measured as a liquid level deviation. That is, in this embodiment, the deviation of the height level of the object 2 is corrected by correcting the deviation of the liquid level.

  In the present embodiment, the correction device 5 includes an arithmetic device 8 that calculates the liquid level of each liquid level tool 3 and a plurality of lifting devices 9 that are arranged on the lower surface of the inspection object 2 corresponding to each liquid level tool 3. And is configured.

  As shown in FIG. 1, the arithmetic device 8 is electrically connected to the liquid level sensor 7 of each liquid level tool 3. In the arithmetic device 8, the liquid level of the liquid stored in each level measuring container 6 is calculated based on the detection signal from the liquid level sensor 7.

  As shown in FIG. 1, the lifting device 9 includes, for example, a leg 10 that can be lifted and a drive unit 11. The leg 10 is a jack, for example. A driving unit 11 such as a motor is connected to the leg 10, and the leg 10 can be raised and lowered by a predetermined amount according to the driving force of the driving unit 11.

  In the arithmetic unit 8, each liquid level is calculated and the deviation of each liquid level is obtained. As will be described later, the deviation of the liquid level can be obtained as a deviation from the reference level. The computing device 8 computes the lift amount of the legs 10 of each lifting device 9 for correcting the level shift based on the liquid level shift. The calculation result of the calculation device 8 is sent to each drive unit 11, and each drive unit 11 corrects the deviation of the height level of the device under test 2 while raising and lowering each leg 10 based on the calculation result. .

  Regarding the level deviation correction described above, the leg 10 of the lifting device 9 corresponding to the liquid level tool 3 whose liquid level is closest to the reference level among the liquid level is defined as the reference leg. Then, the legs 10 other than the reference leg are moved up and down to control each liquid level to approach the reference level.

  As described above, in this embodiment, the reference leg is determined, and the other leg 10 is moved up and down in a state where the reference leg is fixed to perform level correction. If all of the legs 10 are driven, it may be difficult to pick up the reference level. Therefore, the reference legs are not moved, and the other legs 10 are driven so that the liquid level approaches the reference level. It is possible to correct the deviation of the height level of the device under test 2 simply and accurately.

  Here, although it is a “reference level”, as will be described in detail in the plane inspection method described later, the liquid level of the liquid level sensor 7 when each liquid level tool 3 is placed on a horizontal reference plane before the inspection. Is defined as the “reference level”. Actually, the output value from the liquid level sensor 7 obtained at this time is used as a reference value. For example, the output value is reset to zero.

  In the present embodiment, it is detected whether or not the legs 10 other than the reference leg are within a predetermined driving range when the legs 10 are moved up and down to approach the reference level. Since the leg 10 has an upper limit and a lower limit, it is possible to provide a drive range inside the limit range (limit range> drive range) and drive the leg 10 within the drive range. It is possible to prevent a problem that hinders the lifting and lowering of 10.

  When the leg 10 is out of the drive range, the reference leg is raised and lowered, and all the legs 10 other than the reference leg are raised and lowered within a predetermined drive range.

  Here, raising and lowering of the legs will be described with reference to the drawings. For example, the left leg 10a shown in FIG. 2 is a reference leg (hereinafter referred to as the reference leg 10a), and the right leg 10b in FIG. 2 is a leg to be driven. As shown in FIG. 2, the level measurement container 6a on the reference leg 10a and the level measurement container 6b on the leg 10b are connected by a flow path pipe 4, and the fluid 12 accommodated in the level measurement container 6a is better. More than the level measuring container 6b. As a result, the liquid level L1 of the fluid 12 accommodated in the level measuring container 6a is higher than the liquid level L2 of the fluid 12 accommodated in the level measuring container 6b.

  When the leg 10 b is lowered from the state of FIG. 2, the fluid 12 flows from the level measurement container 6 a to the level measurement container 6 b through the flow path pipe 4. As a result, the liquid level L2 of the fluid 12 in the level measurement container 6b is higher than the initial state, and the liquid level L1 of the fluid 12 in the level measurement container a is lower than the initial state.

  Further, it is assumed that when the leg 10b is driven to bring the liquid level L2 closer to the reference level, the leg 10b exceeds the driving range. For example, it is assumed that the leg 10b shown in FIG. 2 exceeds the drive range.

  At this time, the reference leg 10a is raised from the state shown in FIG. Thereby, the fluid 12 of the level measurement container 6a on the reference leg 10a flows through the flow path pipe 4 to the level measurement container 6b on the leg 10b. As a result, the liquid level L2 of the fluid 12 stored in the level measuring container 6b becomes higher than that in FIG. Accordingly, the leg 10b can be lowered to bring the liquid level L2 closer to the reference level, and the leg 10b can be accommodated within a predetermined driving range.

  As described above, the flat surface inspection apparatus 1 of the present embodiment not only measures and calculates the height level deviation (liquid level deviation) of the object to be inspected 2 but also the height level at each measurement position. The deviation can be corrected. In addition, in the present embodiment, measurement / calculation of level deviation and correction of level deviation can be performed by automatic control.

<Planar inspection method>
Next, the plane inspection method for the object to be inspected in the present embodiment will be described with reference to the flowchart of FIG.

  In step ST1 shown in FIG. 3, first, as a preparation stage, a plurality of liquid level tools 3 are placed on a horizontal reference plane. At this time, the liquid level tool 3 is connected by the flow path pipe 4 similarly to FIG. 1, and the liquid is accommodated in the level measuring container 6 of each liquid level tool 3. Therefore, the liquid can circulate between the level measuring containers 6 through the flow path pipe 4.

  The liquids stored in the level measuring containers 6 of the respective liquid level tools 3 are all at the same liquid level, and the liquid level at this time is defined as a “reference level”.

  In step ST2 shown in FIG. 3, the liquid level of the liquid stored in each level measuring container 6 is measured by the liquid level sensor 7 installed above the liquid level. At this time, the liquids contained in the level measuring containers 6 of the respective liquid level tools 3 are all at the same liquid level (reference level), and the outputs of the respective liquid level sensors 7 are the same. Use the reference value. For example, the output value is reset to zero.

  Next, in step ST3 shown in FIG. 3, as shown in FIG. 1, elevating devices 9 as correcting devices 5 are arranged at the four corners of the lower surface 2b of the object 2 to be inspected. The lifting device 9 includes a leg 10 and a drive unit 11. The object to be inspected 2 is placed on the four legs 10. Further, the liquid level tools 3 are installed at the four corners of the upper surface 2a of the inspection object 2 facing the leg 10 with the inspection object 2 interposed therebetween.

  Next, in step ST <b> 4 shown in FIG. 3, the liquid level of the liquid stored in the level measuring container 6 of each liquid level tool 3 is measured by the liquid level sensor 7. The output of the liquid level sensor 7 is sent to the arithmetic device 8. In the arithmetic unit 8, based on the output of the liquid level sensor 7, the leg 10 below the liquid level tool 3 that has obtained the output closest to the reference value (zero value) defined in step ST2 is set as the reference leg.

  Thereafter, the level deviation is corrected while driving the legs other than the reference leg. The following level deviation correction will be described with reference to the experimental examples shown in FIGS. In addition, the numerical value of the experimental example shown in FIG. 4, FIG. 5 is an example to the last. In the experimental example shown in FIG. 5, each leg is moved one by one, but actually, a plurality of legs can be moved simultaneously.

  FIG. 4 shows the initial state of each leg. As shown in FIG. 4, the leftmost leg A is defined as the reference leg A. Also, as shown in FIG. 4, for example, the height position of each leg A to D in the initial state is 0% when the legs A to D are contracted most, and the height when the legs A to D are extended most. If it is 100%, it is assumed that it is at the position of 50% in the middle.

  Further, as shown in FIG. 4, it is assumed that the liquid level L1 of the fluid 12 accommodated in the level measurement container a on the reference leg A is at a position of 0 mm with respect to the reference level L0. That is, the liquid level L1 of the reference leg A matches the reference level L0 in the initial state. On the other hand, the liquid level L2 of the fluid 12 accommodated in the level measuring container b on the leg B is at a position higher by 0.8 mm than the reference level L0. Further, the liquid level L3 of the fluid 12 accommodated in the level measuring container c on the leg C is at a position lower by 0.5 mm than the reference level L0. Further, the liquid level L4 of the fluid 12 accommodated in the level measuring container d on the leg D is at a position lower by 0.3 mm than the reference level L0.

  In step ST5 of FIG. 3, the legs other than the reference leg are driven so that each liquid level approaches the reference level, that is, the output value obtained from the liquid level sensor approaches the reference value (zero value). Execute level shift correction (push in).

  Next, in step ST6 of FIG. 3, it is determined whether legs other than the reference leg are within a predetermined driving range. In step ST6 of FIG. 3, for example, the driving range is set within 70% of the leg limit range.

  If all the legs are within the driving range, the process proceeds to step ST7. In step ST7, for example, it is measured whether or not the level deviation is within ± 2.0%. In addition, a numerical value is an example to the last. In this step, it can be determined from the output of the liquid level sensor 7. That is, if the output value is within ± 2.0% with respect to the reference value, step ST7 is satisfied and the plane inspection ends. On the other hand, if the level deviation exceeds ± 2.0%, the process returns to step ST5 and the above steps are repeated.

  On the other hand, when at least one leg is outside the driving range in step ST6 of FIG. 3, the process proceeds to step ST7. The process from step ST5 to step ST10 will be described with reference to FIGS. The horizontal axis of the graph shown in FIG. 5A indicates the number of times of driving, and the vertical axis indicates the amount of deviation (mm) from the reference level. The horizontal axis of the graph shown in FIG. 5B indicates the number of times of driving, and the vertical axis indicates the height level (%) of the leg. In the experimental example shown in FIG. 5, it is assumed that when a certain liquid level falls by 0.3 mm, the other liquid level rises by 0.1 mm. Further, it was assumed that to move only one leg and move the liquid level by 0.036 mm, it was necessary to move 1% of the driving range. In the experiment, among the legs B to C, the leg that is farthest from the reference level L0 was moved to the reference level.

  In the first drive, the leg B farthest from the reference level L0 was moved upward so as to coincide with the reference level L0. As a result, the fluid 12 in the level measurement container b flows into the level measurement containers a, c, d, and the liquid level L1, L3, L4 varies (see FIG. 5A).

  At this time, as shown in FIG. 5B, it was found that the driving range of the leg B exceeded 70% or more. For this reason, the leg B does not apply to the condition of step ST6 in FIG. 3, and the process proceeds to step ST8.

  In step ST7 of FIG. 3, it is measured whether the leg B exceeding 70% is closer to the upper limit or the lower limit of the driving range. In the experimental example of FIG. 5, the leg B is close to the upper limit of the driving range, so the process proceeds to step ST9.

  In step ST9 of FIG. 3, the reference leg A is moved downward from the initial state of FIG. When the reference leg A is moved downward, the fluid in the level measurement containers b, c, d flows in the level measurement container a, so that the liquid level L1 rises, while the liquid level L2, L3, L4 is Go down. For this reason, the liquid level L2 of the leg B falls from the reference level L0. Therefore, the leg B can be lowered to increase the liquid level L2 of the leg B. As a result, the leg B can be accommodated in the driving range of 70%.

  In step ST7, when the leg exceeding the driving range is close to the lower limit, the process proceeds to step ST10 and the reference leg is raised.

  When all the legs other than the reference leg are within 70% of the driving range due to the driving of the reference leg, the process proceeds to step ST10, and if the level deviation is out of ± 2.0%, the process returns to step ST5 and the reference leg is set. Drive a leg other than the leg.

  In this embodiment, each leg other than the reference leg is driven little by little, and steps ST5 to ST7 are looped a plurality of times. Thereby, as shown to FIG. 5A, the liquid level corresponding to each leg can be gradually brought close to the reference level (0 mm).

  According to the planar inspection apparatus and the planar inspection method of the present invention, it is possible to measure (calculate) the deviation of the height level of the object to be inspected and perform the correction of the deviation of the height level by automatic control.

1: Plane inspection device 2: Inspected object 3: Liquid level tool 4: Channel pipe 5: Correction device 6, ad: Level measurement container 7: Liquid level sensor 8: Calculation device 9: Lifting device 10, A D: Leg 11: Drive unit 12: Fluid L0: Reference level L1-L4: Liquid level

Claims (7)

A plane inspection apparatus for inspecting the flatness of an object to be inspected,
A level measuring container capable of containing a fluid, and a liquid level sensor capable of measuring a liquid level of the fluid contained in the level measuring container, and a plurality of sensors installed at different positions on the upper surface of the object to be inspected Liquid level tool,
A flow path pipe connected between the level measurement containers and allowing the fluid to flow between the level measurement containers;
Based on the detection result of the liquid level sensor, a correction device that corrects a deviation in the height level of the inspection object,
A plane inspection apparatus characterized by comprising:   The correction device is installed on a lower surface of the object to be inspected corresponding to each liquid level tool and an arithmetic device for calculating each liquid level, and each measurement of the object to be inspected based on a calculation result of the arithmetic device The flat inspection apparatus according to claim 1, further comprising: a plurality of lifting devices that correct height level deviations at positions.   In the correction device, the liquid level is defined as a reference leg that corresponds to the liquid level tool closest to the reference level, and the liquid level other than the reference leg is driven to drive each liquid level. The flat inspection apparatus according to claim 2, wherein control is performed so as to approach the reference level.   The correction device detects whether or not the lifting device other than the reference leg is within a predetermined driving range when the lifting device is moved up and down so as to approach the reference level. The flat inspection apparatus according to claim 3, wherein the lifting and lowering device other than the reference leg is controlled to move up and down within the predetermined driving range. A plane inspection method for inspecting the flatness of an object to be inspected,
A plurality of elevating devices are arranged at different positions on the lower surface of the object to be inspected, and a level measuring container capable of accommodating a fluid on the upper surface of the object to be inspected corresponding to the elevating device, and accommodated in the level measuring container A step of installing a plurality of liquid level tools including a liquid level sensor capable of measuring the liquid level of the fluid;
The liquid level level of the liquid contained in each level measuring container connected by a flow channel tube is detected by the liquid level sensor. Based on the detection result of the liquid level sensor, the device under test is moved to the lifting device. Correcting the deviation of the height level at each measurement position of the object to be inspected while moving up and down
A plane inspection method characterized by comprising: Before placing the liquid level tool on the upper surface of the object to be inspected, placing the liquid level tool on a horizontal reference surface and setting the liquid level to a reference level;
Setting the lifting device corresponding to the liquid level tool at the liquid level closest to the reference level after setting the liquid level tool on the upper surface of the object to be inspected,
In the step of correcting the deviation of the height level, the lifting device other than the reference leg is moved up and down based on the detection result of the liquid level sensor so that each liquid level approaches the reference level. The plane inspection method according to claim 5.   In the step of correcting the deviation of the height level, it is detected whether or not the lifting device other than the reference leg is within a predetermined driving range when the lifting device is moved up and down so as to approach the reference level. 7. The plane according to claim 6, wherein when the vehicle is outside the driving range, the reference leg is moved up and down so that all the lifting devices other than the reference leg are moved up and down within the predetermined driving range. Inspection method.

Images