JP2019117680A5 - - Google Patents

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JP2019117680A5
JP2019117680A5 JP2018220520A JP2018220520A JP2019117680A5 JP 2019117680 A5 JP2019117680 A5 JP 2019117680A5 JP 2018220520 A JP2018220520 A JP 2018220520A JP 2018220520 A JP2018220520 A JP 2018220520A JP 2019117680 A5 JP2019117680 A5 JP 2019117680A5
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Claims (20)

装置であって、A device,
放電トランジスタと、A discharge transistor;
選択されたビット線を前記放電トランジスタに接続するように構成された第1の放電経路と、A first discharge path configured to connect a selected bit line to the discharge transistor;
センスノードを前記放電トランジスタに接続するように構成された第2の放電経路と、A second discharge path configured to connect a sense node to the discharge transistor;
前記放電トランジスタのゲート電圧を前記第1の放電経路の電圧レベルで設定し、続いて、前記放電トランジスタの前記ゲート電圧を前記電圧レベルで浮動させたままにしながら、前記第1の放電経路を遮断し、前記放電トランジスタを介して前記第2の放電経路を介して前記センスノードを放電することによって、前記選択されたビット線に接続されたメモリセルを感知するように構成されたバイアス回路と、を備える、装置。Setting the gate voltage of the discharge transistor at the voltage level of the first discharge path, and subsequently interrupting the first discharge path while leaving the gate voltage of the discharge transistor floating at the voltage level A bias circuit configured to sense a memory cell connected to the selected bit line by discharging the sense node via the second discharge path via the discharge transistor; An apparatus comprising:
前記放電トランジスタを介して補助電流を提供するように構成された電流ソースを更に備え、前記バイアス回路が、前記第1の放電経路を遮断した後、かつ前記センスノードを放電する前に、前記電流ソースをオンにして、前記放電トランジスタを介して前記補助電流を提供し、かつ、前記放電トランジスタを介して前記センスノードを放電しながら、前記放電トランジスタを介して前記補助電流を提供し続けるように更に構成されている、請求項1に記載の装置。A current source configured to provide an auxiliary current via the discharge transistor, wherein the bias circuit disconnects the first discharge path and discharges the sense node before the sense node discharges the sense node. Turning on a source to provide the auxiliary current through the discharge transistor, and to continue to provide the auxiliary current through the discharge transistor while discharging the sense node through the discharge transistor. The device of claim 1 further configured. 前記放電トランジスタのゲートに接続された第1のプレートを有するコンデンサを更に備え、前記バイアス回路が、動作条件に応じた電圧レベルを前記コンデンサの第2のプレートに印加するように更に構成されている、請求項1に記載の装置。A capacitor having a first plate connected to a gate of the discharge transistor, wherein the bias circuit is further configured to apply a voltage level to the second plate of the capacitor according to an operating condition. The apparatus of claim 1. 装置であって、
トランジスタと、
選択されたメモリセルと前記トランジスタとの間に直列に接続された第1のスイッチ及び第2のスイッチであって、前記トランジスタの制御ゲートが、前記第1のスイッチと前記第2のスイッチとの間のノードに接続され、前記第1のスイッチ及び前記第2のスイッチが、同時にオンであるときに、前記トランジスタを介して前記選択されたメモリセルを放電するように構成され、前記第1のスイッチ及び前記第2のスイッチが同時にオフであるときに、前記トランジスタの前記制御ゲートを前記第1のスイッチと前記第2のスイッチとの間の前記ノードの電圧レベルで浮動させるよう設定するように構成されている、第1のスイッチ及び第2のスイッチと、
センスノードと前記トランジスタとの間に接続された第3のスイッチであって、前記第1のスイッチと前記第2のスイッチとの間の前記ノードの前記電圧レベルで浮動するように設定された前記トランジスタの前記制御ゲートを用いて、前記トランジスタを介して前記センスノードを放電するように構成されている、第3のスイッチと、を備える、装置。
A device,
Transistors and
A first switch and a second switch connected in series between a selected memory cell and the transistor, wherein a control gate of the transistor is connected between the first switch and the second switch. And the first switch and the second switch are configured to discharge the selected memory cell via the transistor when the first switch and the second switch are on at the same time. Setting the control gate of the transistor to float at the voltage level of the node between the first switch and the second switch when the switch and the second switch are off simultaneously. A first switch and a second switch, which are configured;
A third switch connected between a sense node and the transistor, wherein the third switch is configured to float at the voltage level of the node between the first switch and the second switch. A third switch configured to discharge the sense node through the transistor using the control gate of the transistor.
前記第1及び第2のスイッチをオフにした後、かつ前記第3のスイッチをオンにする前に、前記トランジスタを介して補助電流を提供するように構成された補助電流ソースを更に備える、請求項に記載の装置。 Further comprising an auxiliary current source configured to provide an auxiliary current through the transistor after turning off the first and second switches and before turning on the third switch. Item 5. The apparatus according to Item 4 . 前記トランジスタの前記制御ゲートに接続された第1のプレートを有するデカップリングコンデンサを更に備える、請求項4に記載の装置。The apparatus of claim 4, further comprising a decoupling capacitor having a first plate connected to the control gate of the transistor. 前記第1及び第2のスイッチをオフにした後、かつ前記第3のスイッチをオンにする前に、動作条件に応じた電圧レベルを前記デカップリングコンデンサの第2のプレートに印加するように構成されたバイアス回路を更に備える、請求項6に記載の装置。A voltage level corresponding to an operating condition is applied to the second plate of the decoupling capacitor after turning off the first and second switches and before turning on the third switch. The apparatus of claim 6, further comprising a bias circuit configured. ビット線であって、前記選択されたメモリセルは、前記ビット線を介して前記第1及び第2のスイッチに接続されている、ビット線と、
ソース線であって、前記選択されたメモリセルが、前記ソース線と前記ビット線との間に接続されている、ソース線と、
感知動作中に、前記ソース線を前記ビット線よりも高い電圧に設定するように構成されたバイアス回路と、を更に備える、請求項に記載の装置。
A bit line, wherein the selected memory cell is connected to the first and second switches via the bit line;
A source line, wherein the selected memory cell is connected between the source line and the bit line;
The apparatus of claim 4 , further comprising: a bias circuit configured to set the source line to a higher voltage than the bit line during a sensing operation.
前記選択されたメモリセルの制御ゲートに接続されたワード線であって、前記バイアス回路が、負ではない電圧を前記ワード線に印加することによって、負の閾値電圧状態に対する感知動作を実施するように構成されている、ワード線を更に備える、請求項8に記載の装置。A word line connected to a control gate of the selected memory cell, wherein the bias circuit performs a sensing operation for a negative threshold voltage condition by applying a non-negative voltage to the word line. 9. The apparatus of claim 8, further comprising a word line configured as: 前記バイアス回路が、前記メモリセルを介して前記ソース線に前記ビット線を放電することによって、正の閾値電圧状態に対する感知動作を実施するように更に構成されている、請求項9に記載の装置。The device of claim 9, wherein the bias circuit is further configured to perform a sensing operation for a positive threshold voltage condition by discharging the bit line to the source line through the memory cell. . 前記装置が、前記選択されたメモリセルを含むメモリセルがシリコン基板上の複数の物理レベルに配置され、かつ電荷蓄積媒体を含む、モノリシック3次元半導体メモリデバイスのメモリアレイを含む、請求項4に記載の装置。5. The apparatus of claim 4, wherein the apparatus includes a memory array of a monolithic three-dimensional semiconductor memory device, wherein the memory cells including the selected memory cells are located at a plurality of physical levels on a silicon substrate and include a charge storage medium. The described device. 前記選択されたメモリセルが、位相変化メモリ材料を含む、請求項4に記載の装置。The apparatus of claim 4, wherein the selected memory cell comprises a phase change memory material. 方法であって、
第1の放電経路を経由してセンスアンプを介して、選択されたメモリセルを放電することと、
放電トランジスタの制御ゲートの電圧を前記第1の放電経路に沿った電圧レベルに設定することであって、前記電圧レベルが、前記選択されたメモリセルのデータ状態によって決まる、設定することと、
続いて、前記放電トランジスタを介して補助電流を提供することと、
前記放電トランジスタを介して前記補助電流を提供しながら、前記選択されたメモリセルの前記データ状態に応じた前記電圧レベルに設定された前記放電トランジスタの前記制御ゲートを用いて、前記放電トランジスタを介してセンスノードを放電することと、を含む、方法。
The method,
Discharging the selected memory cell via the first discharge path via the sense amplifier;
Setting a voltage of a control gate of a discharge transistor to a voltage level along the first discharge path, wherein the voltage level is determined by a data state of the selected memory cell;
Subsequently, providing an auxiliary current through the discharge transistor;
Using the control gate of the discharge transistor set to the voltage level according to the data state of the selected memory cell while providing the auxiliary current through the discharge transistor, through the discharge transistor Discharging the sense node.
前記センスノードが放電されるクランプトランジスタを介して、前記放電トランジスタに前記補助電流を提供することと、
前記クランプトランジスタと前記放電トランジスタとの間のノードで一定の電圧レベルを維持するように、前記クランプトランジスタをバイアスすることと、を更に含む、請求項13に記載の方法。
Providing the auxiliary current to the discharge transistor via a clamp transistor from which the sense node is discharged;
14. The method of claim 13 , further comprising: biasing the clamp transistor to maintain a constant voltage level at a node between the clamp transistor and the discharge transistor.
装置であって、A device,
第1のトランジスタと、A first transistor;
選択されたメモリセルと前記第1のトランジスタのゲートとの間に接続された第1のスイッチであって、前記選択されたメモリセルのデータ状態に対応する前記第1のトランジスタの前記ゲートの電圧レベルを設定するように構成されている、第1のスイッチと、A first switch connected between a selected memory cell and a gate of the first transistor, wherein a voltage of the gate of the first transistor corresponding to a data state of the selected memory cell; A first switch configured to set a level;
センスノードと前記第1のトランジスタとの間に接続され、前記選択されたメモリセルの前記データ状態に対応する前記電圧レベルに設定された前記第1のトランジスタの前記ゲートを用いて、前記第1のトランジスタを介して前記センスノードを放電するように構成された第2のスイッチと、The first transistor is connected between a sense node and the first transistor and is set to the voltage level corresponding to the data state of the selected memory cell by using the gate of the first transistor; A second switch configured to discharge the sense node through the transistor of
前記選択されたメモリセルの前記データ状態に対応する前記第1のトランジスタの前記ゲートの前記電圧レベルを設定した後、かつ前記第1のトランジスタを介して前記センスノードを放電する前に、前記第1のトランジスタを介して補助電流を供給するように構成された電流ソースと、を備える、装置。After setting the voltage level of the gate of the first transistor corresponding to the data state of the selected memory cell, and before discharging the sense node through the first transistor, A current source configured to provide an auxiliary current through one of the transistors.
ビット線であって、前記選択されたメモリセルは、前記ビット線を介して前記第1のスイッチに接続されている、ビット線と、A bit line, wherein the selected memory cell is connected to the first switch via the bit line;
ソース線であって、前記選択されたメモリセルが、前記ソース線と前記ビット線との間に接続されている、ソース線と、A source line, wherein the selected memory cell is connected between the source line and the bit line;
感知動作中に、前記ソース線を前記ビット線よりも高い電圧に設定するように構成されているバイアス回路と、を更に備える、請求項15に記載の装置。The apparatus of claim 15, further comprising: a bias circuit configured to set the source line to a higher voltage than the bit line during a sensing operation.
前記選択されたメモリセルの制御ゲートに接続されたワード線であって、前記バイアス回路が、負でない電圧を前記ワード線に印加することによって、負の閾値電圧状態に対する感知動作を実施するように構成されている、ワード線を更に備える、請求項16に記載の装置。A word line connected to a control gate of the selected memory cell, wherein the bias circuit performs a sensing operation for a negative threshold voltage condition by applying a non-negative voltage to the word line. 17. The apparatus of claim 16, further comprising a word line configured. 前記選択されたメモリセルの制御ゲートに接続されたワード線であって、前記バイアス回路が、複数の対応する負でない電圧のうちの1つを前記ワード線に印加することによって、複数の閾値電圧状態に対する感知動作を実施するように構成されている、ワード線を更に備える、請求項16に記載の装置。A word line connected to a control gate of the selected memory cell, wherein the bias circuit applies one of a plurality of corresponding non-negative voltages to the word line to generate a plurality of threshold voltages. 17. The apparatus of claim 16, further comprising a word line configured to perform a state sensitive operation. 第2のトランジスタであって、前記補助電流は、前記第2のトランジスタを介して前記第1のトランジスタに供給され、前記センスノードは、前記第2のトランジスタを介して前記第1のトランジスタを介して放電される、第2のトランジスタを更に備え、前記バイアス回路が、前記第1のトランジスタと前記第2のトランジスタとの間のノードで一定の電圧レベルを維持するように構成されている、請求項16に記載の装置。A second transistor, wherein the auxiliary current is supplied to the first transistor via the second transistor, and the sense node is supplied via the first transistor via the second transistor. Further comprising a second transistor, which is discharged at a predetermined voltage, wherein the bias circuit is configured to maintain a constant voltage level at a node between the first transistor and the second transistor. Item 17. The apparatus according to Item 16. センスアンプ回路であって、A sense amplifier circuit,
放電ノードに接続されたトランジスタと、A transistor connected to the discharge node;
前記センスアンプ回路の放電経路を介して、選択されたメモリセルを放電する手段と、Means for discharging a selected memory cell via a discharge path of the sense amplifier circuit;
前記選択されたメモリセルを放電しながら、前記放電経路のノードにおいて、前記トランジスタの制御ゲートを前記選択されたメモリセルのデータ状態に応じた電圧レベルに設定する手段と、Means for setting a control gate of the transistor to a voltage level according to a data state of the selected memory cell at a node of the discharge path while discharging the selected memory cell;
前記トランジスタの前記制御ゲートが、前記選択されたメモリセルの前記データ状態に応じた前記電圧レベルに設定されている間に、前記トランジスタを介してセンスノードを放電する手段と、を備える、センスアンプ回路。Means for discharging a sense node via the transistor while the control gate of the transistor is set to the voltage level according to the data state of the selected memory cell. circuit.
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