JP2019117099A - Physical quantity sensor, manufacturing method of physical quantity sensor, composite sensor, inertial measurement unit, portable electronic device, electronic device, and mobile device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a gyro sensor capable of reducing an increase in a quadrature signal. SOLUTION: A substrate, a fixed portion fixed to the substrate, a fixed electrode portion provided on the substrate, a drive unit, and the drive unit are connected to each other and can be displaced in the drive direction of the drive unit. A movable portion that is connected to the mass portion, faces the fixed electrode portion, and can be displaced in the facing direction, and a center of gravity of the mass portion along the drive direction in a plan view. It includes an elastic portion provided on both sides of the line segment to pass through and connecting the mass portion and the fixed portion, and each of the elastic portions has a plan view of the line segment. A gyro sensor with a line-symmetrical notch. [Selection diagram] FIG. 4

Description

  The present invention relates to a physical quantity sensor, a method of manufacturing a physical quantity sensor, a combined sensor, an inertial measurement unit, a portable electronic device, an electronic device, and a moving body.

  In recent years, as an example of a physical quantity sensor, a gyro sensor using a gyro sensor element using a silicon MEMS (Micro Electro Mechanical System) technology has been developed. Among physical quantity sensors, gyro sensors that detect angular velocity are rapidly expanding, for example, in applications such as motion sensing functions of game machines and attitude control of mobile devices.

  As such a gyro sensor, for example, Patent Document 1 discloses a sensor element constituting an angular velocity sensor. The sensor element includes a support substrate, a fixed portion fixed to the support substrate, a vibrator supported on the fixed portion via an elastic beam (support beam), and a comb-tooth shape provided on the vibrator. And a fixed comb-teeth electrode meshing with the movable electrode via a gap. In the angular velocity sensor having such a configuration, when a voltage is applied to the fixed comb electrode, the vibrator vibrates (drives vibrate) in the X-axis direction by the electrostatic force generated between the movable electrode and the fixed comb electrode. . When an angular velocity around the Z axis (or Y axis) acts on the vibrating body in such a vibrating state, the vibrator vibrates (detects and vibrates) in the Y axis (or Z axis) direction by the Coriolis force. The angular velocity of rotation can be detected by detecting an electrical signal corresponding to the magnitude of the vibration amplitude in the Y-axis (or Z-axis) direction of the vibrator due to the Coriolis force.

Such a sensor element can be manufactured by dry etching. For example, Patent Document 2 discloses reactive plasma of two systems, SF ₆ (gas for etching) and C ₄ F ₈ (gas for volume). A deep reactive ion etching (Si), so-called Bosch process, has been described, in which the gas is alternately switched to repeat the etching and sidewall protective film volume steps.

JP, 2009-175079, A Japanese Patent Publication No. 7-503815

  However, when the sensor element described in Patent Document 1 is to be manufactured by dry etching described in Patent Document 2, a density distribution exists in the etching gas, and the etching gas is perpendicular to the silicon wafer. In some cases, the processing wall may be machined at an angle deviated from the ideal vertical depending on the incident angle of the etching gas. Thus, although the cross-sectional shape of the sensor element, in particular the cross-sectional shape of the elastic beam (support beam) should ideally be, for example, rectangular (rectangular or square), the parallel error occurs due to processing errors. The drive vibration of the vibrator includes not only the vibration component in the X-axis direction that is the desired drive vibration direction but also the vibration component in the Y-axis direction or the Z-axis direction by being shaped or trapezoidal. It becomes. As a result, the quadrature signal (signal in the unnecessary mode), which is a type of unnecessary signal, increases to adversely affect the detection signal, and as a result, there is a problem that the detection accuracy is lowered.

  The present invention has been made to solve at least a part of the above-described problems, and can be realized as the following modes or application examples.

  Application Example 1 A physical quantity sensor according to this application example detects a physical quantity and detects a substrate, a fixing unit fixed to the substrate, a fixed electrode unit provided on the substrate, a driving unit, and A mass unit which is connected to a drive unit and is displaceable in the drive direction of the drive unit, and a movable unit which is connected to the mass unit and which is opposed to the fixed electrode unit and which is displaceable in the opposing direction And a resilient portion provided on both sides of a line segment passing the center of gravity of the mass portion along the driving direction, and connecting the mass portion and the fixing portion; Each has a cutout in line symmetry with respect to the line segment in plan view.

According to the physical quantity sensor according to the application example, with respect to a line segment passing the center of gravity of the mass portion along the driving direction in plan view, each elastic portion provided on both sides is line symmetric with respect to the line segment The notch part (shape adjustment part) is provided in. As described above, by providing symmetry in the notched portion (shape adjusting portion) provided in the elastic portion, in the elastic portion, a balance is achieved on both sides with respect to a line passing through the center of gravity of the mass portion. The vibration component of the elastic portion other than the direction, that is, the unnecessary vibration component generated by the vibration of the elastic portion in the direction other than the drive direction is reduced. As a result, a quadrature signal, which is a type of unnecessary signal, can be reduced, and a decrease in detection accuracy of the physical quantity sensor can be reduced.
In the present specification, the “notched portion” refers to a portion whose shape is changed by adjusting the elastic portion in order to reduce the unnecessary vibration component of the elastic portion, for example, a chamfered shape or a recessed shape. .

  Application Example 2 In the physical quantity sensor described in the application example, it is preferable that the notch portion is provided on at least one of the substrate side and the side opposite to the substrate.

  According to this application example, the vibration component of the elastic portion other than the vibration direction of the drive vibration can be reduced by providing the notch portion on at least one of the substrate side of the elastic portion and the side opposite to the substrate. , Quadrature signal can be reduced.

  Application Example 3 In the physical quantity sensor according to the application example described above, the elastic portion has a serpentine shape including a plurality of long beam portions and a connecting portion that connects the beam portions so as to turn back; The portions are directed in the opposite directions, and are connected to the first main surface and the second main surface which are in a relationship of front and back, and one end of the first main surface and one end of the second main surface. And a second side surface connected to the other end of the first main surface and the other end of the second main surface, wherein the first side surface and the second side surface It is preferable to be inclined with respect to the opposing direction.

  According to this application example, since the vibration component of the elastic portion other than the driving direction is easily generated by such a beam portion, providing the cutout portion provided with symmetry in the elastic portion Thus, the reduction of the quadrature signal can be realized more remarkably.

  Application Example 4 In the physical quantity sensor according to the application example described above, the notch portion is a concave portion recessed from at least one of the first main surface side or the second main surface side of the beam portion. Is preferred.

  According to this application example, by providing the recess as the notch in the elastic portion, vibration components other than the drive direction of the elastic portion can be reduced, and displacement in the drive portion other than the vibration direction can be reduced. That is, unnecessary vibration modes (quadrature) of the drive unit can be reduced.

  Application Example 5 In the physical quantity sensor described in the application example, it is preferable that a plurality of the concave portions be provided, and the plurality of concave portions be separated from each other.

  According to this application example, the vibration component of the elastic portion other than the drive direction can be further reduced, and the quadrature signal, which is a type of unnecessary signal, can be effectively reduced.

  Application Example 6 In the physical quantity sensor according to the application example, the notch portion is formed by the first main surface and the second main surface, and the first side surface and the second side surface of the beam portion. It is preferable to provide a curved surface portion provided in the connection region and having a curved surface shape.

  According to this application example, since the notches including the curved surface portion are provided in the connection region between the first main surface and the second main surface of the beam and the first side surface and the second side surface. Vibration components other than the drive direction of the elastic portion can be reduced, and displacement of the drive portion in the other direction than the vibration direction can be reduced. That is, unnecessary vibration modes (quadrature) of the drive unit can be reduced.

  Application Example 7 In the physical quantity sensor according to the application example described above, it is preferable that a plurality of the curved surface portions be provided, and the plurality of curved surface portions be separated from each other.

  According to this application example, the effect of reducing the increase of the quadrature signal can be more significantly exhibited.

  Application Example 8 In the physical quantity sensor described in the application example, it is preferable that the notch portion be provided in a part of the longitudinal shape of the beam portion.

  According to this application example, it is possible to provide a notch of an appropriate size necessary to reduce the quadrature signal.

  Application Example 9 In the physical quantity sensor described in the application example, it is preferable that the notch portion is a process-altered layer.

  According to this application example, it is possible to reduce vibration components other than the drive direction of the elastic portion, and to reduce displacement of the drive portion in the other than the vibration direction. That is, unnecessary vibration (quadrature) of the drive unit can be suppressed.

  Application Example 10 In the physical quantity sensor described in the application example, the physical quantity is preferably an angular velocity.

  According to this application example, the angular velocity can be detected with high detection accuracy in which the quadrature signal, which is a type of unnecessary signal, is reduced.

  Application Example 11 A composite sensor according to this application example includes the physical quantity sensor according to Application Example 10 and an acceleration sensor.

  According to the composite sensor of this application example, it is possible to easily configure a composite sensor including an angular velocity sensor and an acceleration sensor in which a decrease in detection accuracy due to variations in resonant frequencies of a plurality of beam portions is reduced, stable angular velocity data And acceleration data can be acquired.

  Application Example 12 An inertial measurement unit according to this application example includes the physical quantity sensor described in the application example 10, an acceleration sensor, and a control unit that controls the physical quantity sensor and the acceleration sensor.

  According to the inertial measurement unit according to the application example, the control unit controls the physical quantity sensor (angular velocity sensor) and the acceleration sensor in which the decrease in the detection accuracy due to the dispersion of the resonant frequencies of the plurality of beam portions is reduced. It is possible to obtain an inertial measurement unit capable of outputting highly reliable physical quantity data.

  Application Example 13 A portable electronic device according to this application example includes the physical quantity sensor according to any one of the above application examples, a case containing the physical quantity sensor, and the case containing the physical quantity sensor. A processing unit configured to process output data from the display unit, a display unit accommodated in the case, and a translucent cover closing an opening of the case.

  According to the portable electronic device according to the application example, the processing unit performs control based on the output data output from the physical quantity sensor described above, so that the effect of the physical quantity sensor described above can be obtained, and the reliability is high. A portable electronic device can be obtained.

  Application Example 14 In the portable electronic device described in the application example, it is preferable to include a satellite positioning system and to measure the movement distance and movement locus of the user.

  According to this application example, it is possible to obtain a highly reliable portable electronic device capable of measuring the movement distance and movement trajectory of the user by the satellite positioning system.

  Application Example 15 The electronic device according to this application example includes the physical quantity sensor according to any one of the above application examples, and a control unit that performs control based on a detection signal output from the physical quantity sensor. There is.

  According to the electronic device according to the application example, the control unit performs control based on the detection signal output from the physical quantity sensor described above, so that the effect of the physical quantity sensor described above can be achieved, and the electronic apparatus has high reliability. You can get

  Application Example 16 The mobile unit according to this application example includes the physical quantity sensor according to any one of the above application examples, and an attitude control unit that controls an attitude based on a detection signal output from the physical quantity sensor; Is equipped.

  According to the mobile object of the application example, since the attitude control unit controls the attitude based on the detection signal output from the physical quantity sensor described above, the effect of the physical quantity sensor described above can be achieved, and reliability can be improved. A high moving body can be obtained.

  In the mobile unit according to the application example described above, the mobile unit includes at least one of an engine system, a brake system, and a keyless entry system, and the posture control unit performs the system based on the detection signal. It is preferable to control.

  According to this application example, the attitude control unit controls at least one of the engine system, the brake system, and the keyless entry system based on the detection signal output from the physical quantity sensor described above. It is possible to obtain the effect of the physical quantity sensor and to obtain a highly reliable moving body.

  Application Example 18 In the method of manufacturing a physical quantity sensor according to this application example, a step of preparing a substrate, a fixing portion fixed to the substrate, a fixed electrode portion provided on the substrate, and a driving portion A mass portion which is connected to the drive portion and which is displaceable in the drive direction of the drive portion, a movable portion which faces the fixed electrode portion and which is displaceable in the opposite direction, the mass portion and the fixation Forming an elastic part connecting the part, processing the elastic part, and line symmetry with respect to a line segment passing through the center of gravity of the mass part along the drive direction in plan view The elastic portion is further processed based on the first processing step of forming the notched portion and the processing result of the first processing step, and a line passing through the center of gravity of the mass portion in addition to the notched portion And second processing steps of forming second notches in line symmetry with respect to That.

  According to the method of manufacturing a physical quantity sensor according to the application example, the elastic portion is processed in the first processing step, and in plan view, along the driving direction, in line symmetry with respect to a line passing through the center of gravity of the mass portion. Form a processed notch. Then, in the second processing step, the elastic portion is further processed based on the processing result in the first processing step, and in addition to the notch portion formed in the first processing step, a line segment passing through the center of gravity of the mass portion On the other hand, fine adjustments such as the balance on both sides and the reduction amount of the quadrature signal can be performed by the second notches formed in line symmetry. Thereby, the appearance amount of the quadrature signal can be controlled in detail, and a physical quantity sensor with higher detection accuracy can be manufactured.

  Application Example 19 In the method of manufacturing a physical quantity sensor according to the application example, the elastic part has a serpentine shape, and includes a plurality of beams and a connecting part that connects the beams so as to turn back. Preferably, in the first processing step, the notch portion is formed in a part of the beam portion.

  According to this application example, in the first processing step, the notch portion is formed in a part of the beam portion, thereby forming the notch portion of an appropriate size necessary to reduce the quadrature signal. Can.

  Application Example 20 In the method of manufacturing a physical quantity sensor according to the application example, the notch may be formed by irradiating the elastic portion with laser light or etching the elastic portion. preferable.

  According to this application example, the notch portion can be easily formed in a part of the beam portion in the first processing step.

FIG. 1 is a perspective view showing a schematic configuration of a gyro sensor (angular velocity sensor) according to a first embodiment of a physical quantity sensor of the present invention. FIG. 2 is a cross-sectional view showing a schematic configuration of the gyro sensor shown in FIG. 1; FIG. 2 is a plan view schematically showing the gyro sensor element shown in FIG. 1; FIG. 4 is a plan view schematically showing a part (A part) of an elastic part shown in FIG. 3; FIG. 5 is a perspective sectional view schematically showing a part of the elastic portion shown in FIG. 4; FIG. 5 is a cross-sectional view of a beam portion constituting the elastic portion shown in FIG. 4. The top view which shows the example of arrangement | positioning of the shape adjustment part as a notch part in an elastic part. The perspective view which shows the model of the elastic part used for simulation. The expansion perspective view which shows the model of the elastic part which does not have a shape adjustment part used for simulation. The expansion perspective view which shows the model of the elastic part which has a shape adjustment part used for simulation. The graph which shows the length (ratio) of a shape adjustment part, and the correlation of an unnecessary signal. The circuit diagram which shows an example of the detection circuit which detects angular velocity. The wave form diagram of the charge amplifier output before shape adjustment part formation. The wave form diagram of the charge amplifier output (feedback capacity 1000fF) after shape adjustment part formation. The wave form diagram of the charge amplifier output (feedback capacity 2400fF) after shape adjustment part formation. The top view which shows the modification of the shape adjustment part as a notch part of 1st Embodiment. The top view which shows the example of arrangement | positioning of the recessed part as a notch part in the elastic part of the gyro sensor (angular velocity sensor) which concerns on 2nd Embodiment of the physical quantity sensor of this invention. FIG. 16 is a plan view schematically showing a part of the elastic portion shown in FIG. 15; FIG. 17 is a perspective sectional view schematically showing a part of the elastic portion shown in FIG. 16; Sectional drawing which shows a part of elastic part typically. The top view which shows the modification of the recessed part as a notch part of 2nd Embodiment. 7 is a process flowchart showing a method of manufacturing the gyro sensor according to the first embodiment and the second embodiment. Sectional drawing which shows schematic structure of a physical quantity sensor device. The functional block diagram which shows schematic structure of a compound sensor. The disassembled perspective view which shows schematic structure of an inertial measurement unit. The perspective view which shows the example of arrangement | positioning of the inertial sensor element of an inertial measurement unit. FIG. 2 is a plan view schematically showing the configuration of a portable electronic device. FIG. 2 is a functional block diagram showing a schematic configuration of a portable electronic device. FIG. 1 is a perspective view schematically illustrating a configuration of a mobile personal computer that is an example of an electronic device. The perspective view which shows typically the structure of the smart phone (mobile telephone) which is an example of an electronic device. FIG. 1 is a perspective view showing a configuration of a digital still camera which is an example of an electronic device. BRIEF DESCRIPTION OF THE DRAWINGS The perspective view which shows the structure of the motor vehicle which is an example of a mobile body.

  Hereinafter, a physical quantity sensor, a method of manufacturing a physical quantity sensor, a composite sensor, an inertial measurement unit, a portable electronic device, an electronic apparatus, and a moving body according to the present invention will be described in detail based on embodiments shown in the attached drawings.

1. Physical Quantity Sensor, and Method of Manufacturing Physical Quantity Sensor <First Embodiment>
First, a gyro sensor (angular velocity sensor) is illustrated as a first embodiment of the physical quantity sensor, and will be described with reference to FIGS. 1, 2 and 3. FIG. 1 is a perspective view showing a schematic configuration of a gyro sensor (angular velocity sensor) according to a first embodiment of a physical quantity sensor of the present invention. FIG. 2 is a cross-sectional view showing a schematic configuration of the gyro sensor shown in FIG. FIG. 3 is a plan view schematically showing the gyro sensor element shown in FIG. In FIG. 1, the substrate (base) is schematically illustrated, and the lid member is omitted.

  Further, in the following description (including the first embodiment, the second embodiment, and the modification), three axes orthogonal to one another are taken as an X-axis, a Y-axis, and a Z-axis unless otherwise specified. Further, a direction along the X axis is also referred to as "X axis direction", a direction along the Y axis direction is also referred to as "Y axis direction", and a direction along the Z axis is also referred to as "Z axis direction". Further, the Z axis is an axis showing a thickness direction in which the substrate and the lid member overlap (the direction in which the fixed detection portion as the fixed electrode portion and the movable portion are opposed), and the Y axis is in the driving direction of the gyro sensor element It is an axis along. Furthermore, for convenience of explanation, in plan view when viewed from the Z-axis direction, the + Z-axis direction side that is the lid member side is “upper” or the surface on the + Z-axis direction side is the “upper surface”, which is the opposite side − The Z-axis direction side may be described as the "lower side" or the surface on the -Z-axis direction side as the "lower surface". Further, in the respective drawings, for convenience of explanation, the dimensions of each part are appropriately exaggerated and shown as needed, and the dimensional ratio between the parts does not necessarily coincide with the actual dimensional ratio.

[Gyro sensor]
As shown in FIG. 1, the gyro sensor 1 according to the embodiment of the physical quantity sensor is an angular velocity sensor capable of detecting an angular velocity around the X axis. As shown in FIG. 2, the gyro sensor 1 has a gyro sensor element (angular velocity sensor element) 4 and a package 10 in which the gyro sensor element 4 is housed.

(package)
The package 10 has a substrate 2 (base) supporting the gyro sensor element 4 and a lid member 3 joined to the substrate 2. Between the substrate 2 and the lid member 3, a space S in which the gyro sensor element 4 is housed is formed. The substrate 2 and the lid member 3 have a plate shape, and are arranged along an XY plane (reference plane) which is a plane including the X axis and the Y axis.

  The substrate 2 is provided with a recess 21 opened upward (on the side of the gyro sensor element 4). At a central portion of the recess 21, a protrusion 22 protruding from the bottom surface 212 of the recess 21 is provided. In addition, on the upper surface 23 of the substrate 2 excluding the recess 21, a part of the gyro sensor element 4 (a fixing portion 42 and fixing driving portions 45 and 46 described later) is fixed.

  The lid member 3 is provided with a recess 31 which opens downward (on the side of the substrate 2). The lid member 3 is provided on the substrate 2 so as to cover the gyro sensor element 4 in a noncontact manner, and the lower surface 33 excluding the recess 31 is joined to the upper surface 23 of the substrate 2.

The space S functioning as a cavity is an airtight space formed by the recess 21 and the recess 31 and is in a reduced pressure state (for example, about 1 × 10 ² to 1 × 10 ⁻² Pa). Thereby, the detection sensitivity of angular velocity can be improved.

  The constituent material of the substrate 2 is not particularly limited, but it is preferable to use an insulating material, and specifically, it is preferable to use a high-resistance silicon material and a glass material, for example, alkali metal ions (movable It is preferable to use a glass material containing a fixed amount of ions (for example, borosilicate glass such as Pyrex (registered trademark) glass). Thereby, when the gyro sensor element 4 is mainly made of silicon, the substrate 2 and the gyro sensor element 4 can be anodically bonded. Otherwise, it may be a quartz substrate, a quartz substrate, or an SOI (Silicon on Insulator) substrate.

  Moreover, it does not specifically limit as a constituent material of the cover member 3, For example, the material similar to the board | substrate 2 mentioned above can be used.

  The method of bonding the substrate 2 and the lid member 3 is not particularly limited, and may differ depending on the constituent materials of the substrate 2 and the lid member 3. As a method of bonding the substrate 2 and the lid member 3, for example, a bonding method using a bonding material such as an adhesive or a brazing material, a direct bonding method, a solid bonding method such as anodic bonding, or the like can be used.

(Gyro sensor element)
As shown in FIG. 3, the gyro sensor element (angular velocity sensor element) 4 includes two structural bodies 40 (40a, 40b) aligned in the Y-axis direction and two fixed detection units 49 (49a, 49b). Have. The two structures 40a and 40b are vertically symmetrical in the + (plus) Y-axis direction and the-(minus) Y-axis direction in FIG. 3 and have the same configuration as each other.

  Each of the structures 40a and 40b includes a mass portion 41, a plurality of fixing portions 42, a plurality of elastic portions 43, a plurality of driving portions 44 (movable driving electrodes), and a plurality of fixed driving portions 45 and 46 (fixed driving And a plurality of support beam portions 48. The detection beams 471 and 472 (movable detection electrodes) serve as movable portions. The mass unit 41 is integrally formed including the drive unit 44, the frame 473, the detection units 471 and 472, and the support beam unit 48. That is, the detection units 471 and 472 have a shape included in the mass unit 41.

  The outer shape of the mass portion 41 has a rectangular frame shape in a plan view (hereinafter simply referred to as a "plan view") viewed from the Z-axis direction, and as described above, the drive portion 44, the frame 473, and the detection It comprises the parts 471 and 472. Specifically, the outer shape of the mass portion 41 connects a pair of portions extending parallel to each other along the Y-axis direction, and ends of the pair of portions, and extends parallel to each other along the X-axis direction. And a pair of extending parts.

  Four fixing portions 42 are provided for one structural body 40, and each fixing portion 42 is fixed to the upper surface 23 of the substrate 2 described above. In addition, each fixing portion 42 is disposed outside the mass portion 41 in a plan view, and is disposed at a position corresponding to each corner of the mass portion 41 in the present embodiment. In the drawing, the fixing portion 42 positioned on the −Y axis side of the structure 40 a and the fixing portion 42 positioned on the + Y axis side of the structure 40 b are used as a common fixing portion.

  Four elastic portions 43 are provided for one structural body 40 in the present embodiment, and each elastic portion 43 connects a part of the mass portion 41 and the fixing portion 42. The elastic portions 43 are provided on both sides with respect to a line segment J passing the center of gravity G of the mass portion 41 in a plan view along the driving direction (Y-axis direction) of the driving portion 44. The elastic portion 43 is preferably provided in line symmetry with respect to the line segment J. With such an arrangement of the elastic portion 43, since the balance on both sides with respect to the line segment J is maintained, the vibration component of the elastic portion 43 other than the drive direction of the drive portion 44 can be reduced.

  In the present embodiment, the elastic portion 43 is connected to the corner portion of the frame 473 in the mass portion 41. However, the present invention is not limited to this, as long as the mass portion 41 can be displaced relative to the fixed portion 42. In the embodiment shown in FIG. 3, the mass portion 41 can be displaced in the Y-axis direction. Further, each elastic portion 43 has a meandering shape in plan view in the drawing, and a first portion 4301 as a plurality of beam portions extending along the X-axis direction and a connecting portion extending along the Y-axis direction And a second portion 4302 (see FIG. 4). Each elastic portion 43 has a meandering shape in a plan view by the plurality of first portions 4301 and the second portions 4302 connected so as to turn back the opposing first portions 4301. The shape of the elastic portion 43 is not limited to the illustrated shape as long as it can be elastically deformed in a desired drive direction (in the present embodiment, the Y-axis direction).

  Eight driving units 44 are provided for one structural body 40, and each driving unit 44 is connected to a portion of the mass unit 41 extending along the Y-axis direction. Specifically, four drive units 44 are located on the + X side of the mass unit 41, and the remaining four drive units 44 are located on the −X side of the mass unit 41. Each drive unit 44 has a comb shape including a trunk extending from the mass section 41 in the X-axis direction and a plurality of branches extending from the trunk in the Y-axis direction.

  The eight fixed driving units 45 and 46 are provided for one structural body 40, and the fixed driving units 45 and 46 are fixed to the upper surface 23 of the substrate 2 described above. Further, each fixed drive unit 45, 46 has a comb-tooth shape corresponding to the drive unit 44, and is provided with the drive unit 44 interposed therebetween.

  The detecting portions 471 and 472 as movable portions are plate-like members each having a rectangular shape in plan view, and are disposed inside the mass portion 41 and connected to the mass portion 41 by the support beam portion 48. Each of the detection units 471 and 472 can be rotated (displaced) around the rotation axis J4.

  Moreover, the fixed detection part 49 (fixed detection electrode) as a fixed electrode part is provided on the protrusion part 22 located in the recessed part 21 of the board | substrate 2 (refer FIG. 2). The fixed detection unit 49 has a rectangular shape in plan view, and faces the detection units 471 and 472. In addition, the fixing detection unit 49 is separated from the detection units 471 and 472.

  Further, the mass portion 41, the elastic portion 43, the drive portion 44, a portion of the fixed drive portion 45, a portion of the fixed drive portion 46, the detection portions 471, 472 and the support beam portion 48 having the configuration described above. Are provided above the recess 21 of the substrate 2 and are separated from the substrate 2.

  The structure 40 as described above is a Bosch method in which a conductive silicon substrate doped with an impurity such as phosphorus or boron is combined with, for example, an etching process using a reactive plasma gas and a deposition process. It is collectively formed by patterning using Bosch process).

  In addition, as a constituent material of the fixing detection unit 49, for example, aluminum, gold, platinum, ITO (Indium Tin Oxide), ZnO (zinc oxide) or the like can be used.

  Although not shown, the fixed portion 42, the fixed drive portion 45, the fixed drive portion 46, the fixed detection portion 49a, and the fixed detection portion 49b are electrically connected to wiring and terminals not shown, respectively. ing. These wires and terminals are provided, for example, on the substrate 2.

  The configuration of the gyro sensor 1 has been briefly described above. The gyro sensor 1 having such a configuration can detect the angular velocity ωx as follows.

  First, when a drive voltage is applied between the drive unit 44 and the fixed drive units 45 and 46 included in the gyro sensor 1, electrostatics whose intensity periodically changes between the fixed drive units 45 and 46 and the drive unit 44 Gravity arises. As a result, with the elastic deformation of each elastic portion 43, each drive portion 44 vibrates in the Y-axis direction. At this time, the plurality of driving units 44 of the structure 40 a and the plurality of driving units 44 of the structure 40 b vibrate (drive vibration) in opposite phases to each other in the Y-axis direction.

  As described above, when the angular velocity ωx is applied to the gyro sensor 1 in a state where the drive unit 44 vibrates in the Y-axis direction, Coriolis force is exerted and the detection units 471 and 472 are displaced around the rotation axis J4. At this time, the detection units 471 and 472 included in the structure 40 a and the detection units 471 and 472 included in the structure 40 b are displaced in opposite directions to each other. For example, when the detection units 471 and 472 included in the structure 40a are displaced in the + Z-axis direction, the detection units 471 and 472 included in the structure 40b are displaced in the −Z-axis direction. When the detection units 471 and 472 included in the structure 40a are displaced in the −Z-axis direction, the detection units 471 and 472 included in the structure 40b are displaced in the + Z-axis direction.

  The displacement (detection vibration) of the detection units 471 and 472 changes the distance between the detection units 471 and 472 and the fixed detection unit 49. With the change of the distance, the capacitance between the detection units 471 and 472 and the fixed detection unit 49 changes. The angular velocity ωx applied to the gyro sensor 1 can be detected based on the amount of change in capacitance.

  As described above, when the drive unit 44 vibrates (drives vibrate) in the Y-axis direction, ideally, the drive unit 44 preferably vibrates substantially in parallel to the Y-axis direction from the non-driven state. However, due to processing errors, etc., the shape of the gyro sensor element 4, in particular, the shape of the elastic portion 43 does not become an ideal rectangular shape, and hence the vibration of the drive portion 44 connected to the elastic portion 43 via the mass portion 41. Not only the vibration component in the Y-axis direction, which is the direction of the desired drive vibration, but also the vibration component in the X-axis direction or Z-axis direction (the unwanted vibration component), which is the other vibration direction. May increase.

  In the present embodiment, the elastic portion 43 is characterized to reduce such an increase in the quadrature signal. Hereinafter, the elastic portion 43 will be described in detail with reference to FIGS. 4, 5, 6, 7, 8, 9, and 10.

(Elastic part)
FIG. 4 is a plan view schematically showing a part (A part) of the elastic part shown in FIG. FIG. 5 is a perspective sectional view schematically showing a part of the elastic portion shown in FIG. FIG. 6 is a cross-sectional view of a beam portion constituting the elastic portion shown in FIG. FIG. 7 is a plan view showing an arrangement example of a shape adjusting portion as a notch in the elastic portion. FIG. 8 is a perspective view showing a model of an elastic part used in the simulation. FIG. 9 is an enlarged perspective view showing a model of an elastic part having no shape adjusting part used in the simulation. FIG. 10 is an enlarged perspective view showing a model of an elastic part having a shape adjustment part used in the simulation. In FIG. 4, the elastic portion 43 in a region A surrounded by an alternate long and short dash line shown in FIG. 3 is representatively shown.

  As shown in FIG. 4, the elastic portion 43 has a meandering shape in a plan view, and includes a plurality of first portions 4301 as a plurality of longitudinal beams extending along the X-axis direction (longitudinal direction), and the Y-axis direction And a second portion 4302 as a plurality of connecting portions extending along the (short side direction). The first portion 4301 is longer than the second portion 4302. Note that the first portion 4301 is a portion that is divided by imaginary lines QL1, QL2, QL3, QL4, QL5, QL6, QL7, and QL8 shown in the drawing as a general boundary line. The second portion 4302 connects and folds back the two first portions 4301 of the first portion 4301 and the adjacent first portion 4301. The plurality of first portions 4301 are folded back by a connecting portion including the second portion 4302 to form a serpentine shape. In addition, the elastic portion 43 is connected to an end of the mass portion 41 via a second portion 4302 whose one end is indicated by an imaginary line QL8 and an imaginary line QL9 in the drawing, and the other end is a fixed portion indicated by an imaginary line QL1. It is connected to the end of 42.

  As shown in FIGS. 5 and 6, elastic portion 43 has a cross-sectional shape in a direction along the X-axis direction (a cross-sectional shape parallel to YZ plane which is a plane including Y-axis and Z-axis) It has a parallelogram shape. The outer peripheral surface 430 of the elastic portion 43 is directed in the Z-axis direction, and has a first main surface 431 and a second main surface 432 in a relationship of front and back, and a first side surface 433 and a second side surface 434 as a pair of side surfaces. ,have.

  The first major surface 431 and the second major surface 432 are flat surfaces along the XY plane, which is a plane including the X axis and the Y axis, respectively. The first major surface 431 is a surface (upper surface) on the + Z-axis side, and the second major surface 432 is a surface on the −Z-axis side (lower surface on the substrate 2 side). In the present embodiment, each of the first main surface 431 and the second main surface 432 has a serpentine shape, and has a portion extending along the X-axis direction and a portion extending along the Y-axis direction.

  The first side surface 433 is a surface on the −Y axis side, and the second side surface 434 is a surface on the + Y axis side. In the present embodiment, four of the first side surface 433 and the second side surface 434 are provided for one elastic portion 43 (see FIG. 4). The first side surface 433 is connected to one end of the first major surface 431 and one end of the second major surface 432. The second side surface 434 is connected to the other end of the first major surface 431 and the other end of the second major surface 432. Further, as shown in FIGS. 5 and 6, the first side surface 433 and the second side surface 434 are flat surfaces inclined with respect to the XZ plane which is a plane including the X axis and the Z axis. Specifically, the angle (inclination angle) between the first side surface 433 and the XZ plane is deviated from the ideal shape due to, for example, a processing error, and when viewed at θ1, 0 ° <θ1 <3 ° (or -3 ° < It is about (theta) 1 <0 degree). The same applies to the second side surface 434 in the same manner as -3 ° <θ1 <0 ° (or 0 ° <θ1 <3 °). In the first side surface 433, the side on the + Z-axis side is connected to the first main surface 431, and the side on the −Z-axis side is connected to the second main surface 432. On the other hand, the + Z-axis side of the second side surface 434 is connected to the first main surface 431, and the −Z-axis side of the second side surface 434 is connected to the second main surface 432.

  Longitudinal shaped first portions 4301 as a plurality of beam portions extending along the X-axis direction (longitudinal direction) are provided as a pair of side surfaces with the first main surface 431 and the second main surface 432 arranged as described above The outer circumferential surface 430 is constituted by the first side surface 433 and the second side surface 434. As described above, the cross-sectional shape of the elastic portion 43 having the outer peripheral surface 430 having such a configuration is a substantially parallelogram shape. And in this embodiment, angle theta 1 of the virtual surface 431c which made the 1st principal surface 431 extend, and the virtual surface 433c which made the 1st side 433 extend out is less than 90 degrees. That is, the angle θ1 is an acute angle. In addition, an angle θ2 between the second major surface 432 and the second side surface 434 is also an acute angle. On the other hand, an angle θ3 between the first main surface 431 and the second side surface 434 and an angle θ4 between the second main surface 432 and the first side surface 433 exceed 90 °. That is, the angles θ3 and θ4 are obtuse angles, respectively.

  The number of first portions 4301 as beam portions may be two or more, and is not limited to four. Also, the cross-sectional shape of each beam may be, for example, a substantially parallelogram from the design stage, or it was rectangular in the design, but each beam may be due to the processing error or the characteristics of the processing device as described above. For example, the cross-sectional shape may be a substantially parallelogram, a trapezoid, a shape whose side width is wider than the upper surface or the lower surface, or a shape whose side surface is narrower than the upper surface or the lower surface.

  In the first portion 4301 constituting the elastic portion 43, as shown in FIG. 7, the shape as a notch provided in line symmetry with respect to the line segment J passing through the center of gravity G of the mass portion 41 in plan view An adjustment unit 435 is provided. The shape adjusting portion 435 as a notch in the present embodiment has a so-called chamfered shape. The “notched portion” is a portion where the shape is changed by post-processing (adjustment processing) of the elastic portion 43 in order to reduce the unnecessary vibration component of the elastic portion 43, and the first embodiment In the second embodiment, the shape adjustment unit 435 corresponds to the first shape adjustment unit 435a and the second shape adjustment unit 435b of the modification described later, and in the second embodiment described later, the recess 438 and the first recess 438a of the modification And the second recess 438 b correspond.

  In particular, the elastic portion 43 of the gyro sensor element 4 is a portion connected to the fixed portion 42 fixed to the substrate 2 and is not an ideal shape due to a processing error, so that vibration including components other than the drive vibration component ( Unwanted vibration is likely to occur. Therefore, providing the shape adjustment unit 435 having the curved surface portion 401 in the elastic portion 43 is particularly effective in reducing the increase of the quadrature signal in the gyro sensor 1. This is because the elastic portion 43 determines the direction of the drive amplitude, and the deviation of the elastic portion 43 from the ideal shape is the main factor causing the quadrature signal. Therefore, providing the shape adjusting portion 435 as a notch in the elastic portion 43 connected to the fixing portion 42 as in the present embodiment is effective for suppressing the quadrature signal.

  As described above, the elastic portion 43 has the first portion 4301 which is a portion extending in a direction (in the present embodiment, the X axis) intersecting both the Y axis and the Z axis. Then, in a cross-sectional view parallel to both the Y axis and the Z axis, an angle θ1 between extension lines of the first main surface 431 and the first side surface 433 is less than 90 °. That is, as described above, the angle θ1 between the virtual surface 431c and the virtual surface 433c is less than 90 °. As described above, the shape adjusting portion 435 as a notch is provided at a portion (apex) where the angle θ1 is an acute angle. Thereby, even if the sectional view shape of the elastic portion 43 is asymmetrical, the effect of reducing the increase of the quadrature signal can be more significantly exhibited.

  The shape adjusting portion 435 as the notch portion is provided in a connection region between the first main surface 431 and the first side surface 433 of the longitudinally shaped first portion 4301, that is, in the connection region on the opposite side to the substrate 2, and The curved surface portion 401 is included. The shape adjusting portion 435 having such a configuration can be said to be a chamfered portion provided in a connection region between the first main surface 431 and the first side surface 433 of the first portion 4301. The curved surface portion 401 is a rounded surface, and can also be said to be a surface having a curvature. The radius of curvature of the curved surface portion 401 is appropriately set according to the configuration, the shape, and the like of the elastic portion 43 and is not particularly limited, and is, for example, about 0.1 μm or more and 20 μm or less. By providing such a shape adjusting portion 435 in the first portion 4301, the cross-sectional view shape of the elastic portion 43 viewed from the X-axis direction has a substantially parallelogram, a trapezoid or the like as in this embodiment. Even an asymmetric shape can reduce the increase in quadrature signal. Therefore, the decrease in detection accuracy can be reduced.

  The shape adjusting portion 435 can be provided by a method of irradiating a laser beam, an etching method, or the like. In particular, the shape adjustment unit 435 including the curved surface portion 401 can be provided by a method of irradiating a laser beam. Note that the shape adjusting unit 435 may include a process-altered layer formed by irradiating a laser beam. Generally, when single-crystal silicon is irradiated with laser light, an amorphous silicon layer or polysilicon layer is formed on the silicon surface (for example, 1 to 100 nm in depth) depending on the wavelength of the laser light. Although not shown in the figure, such a silicon-deteriorated layer is contained over the surface layer of the shape adjusting portion 435 or a predetermined depth from the surface.

  As described above, by providing the shape adjustment portion 435 provided in the elastic portion 43 with symmetry with respect to the line segment J passing through the center of gravity G of the mass portion 41, in the elastic portion 43, both sides with respect to the line segment J The vibration component of the elastic portion 43 other than the driving direction is reduced. As a result, it is possible to reduce the quadrature signal which is a kind of unnecessary signal.

  On the other hand, in FIG. 7, with respect to the line segment J passing the center of gravity G of the mass portion 41, when the shape adjustment portion 435 to be post-processed is not line symmetrical but formed only on one side of the line segment J The reduction effect of the quadrature signal is half or less as compared with the case where the shape adjustment portion 435 is formed to be line symmetrical. That is, if the shape adjustment unit 435 does not have symmetry with respect to the line segment J, the balance on both sides of the line segment J is lost, and vibration components other than the vibration direction of the driving vibration are sufficiently reduced. Not. Therefore, the quadrature signal can be reduced more efficiently by providing the shape adjustment portion 435 as the notch portion in line symmetry with respect to the line segment J passing through the center of gravity G of the mass portion 41.

  Further, in the present embodiment, a shape adjustment portion 435 (curved surface portion 401) as a notch portion in a part (a part of the longitudinal shape) of the connection region arranged in the longitudinal direction of the first portion 4301 as a beam portion. Is provided. As described above, by providing the shape adjustment unit 435 (curved surface portion 401) in a part of the connection region, excessive adjustment such as excessive shape change can be prevented in order to reduce the quadrature signal. The effect of reducing the quadrature signal can be more significantly exhibited.

  In the present embodiment, an example in which the shape adjusting portion 435 is provided in the connection region on the opposite side to the substrate 2 is shown, but the shape adjusting portion 435 is not limited to this. It is preferable to be provided in at least any one of the above. As described above, by providing the shape adjusting portion 435 on at least one of the substrate 2 side and the side opposite to the substrate 2, the vibration component of the elastic portion 43 other than the driving direction can be reduced, and the quadrature signal is reduced. can do.

  Next, as described above, the elastic portion 43 of the gyro sensor 1 includes the shape adjusting portion 435 having the curved surface portion 401 to reduce the increase of the quadrature signal, based on the following simulation results. Do. In FIGS. 8 to 10, three axes orthogonal to each other are taken as an x-axis, a y-axis, and a z-axis. Also, the direction along the x-axis is also referred to as "x-axis direction", the direction along the y-axis direction is also referred to as "y-axis direction", and the direction along the z-axis is also referred to as "z-axis direction".

  As a model used in the simulation, a flat elastic portion 9 (9a, 9b) shown in FIG. 8 was used. The outer peripheral surface 90 of the elastic portion 9 has a pair of first and second main surfaces 91 and 92, a pair of first and second side surfaces 93 and 94, a base end surface 97 located on the -y axis side, and + y And a tip surface 98 located on the shaft side. The elastic portion 9 has a width of 3 μm in the x-axis direction, a width of 25 μm in the z-axis direction, and a width of 100 μm in the y-axis direction. The elastic portion 9 is substantially parallelogram in cross section and is inclined 0.3 ° with respect to the yz plane which is a plane including the y axis and the z axis.

  Further, as the elastic portion 9, an elastic portion 9a as shown in FIG. 9 and an elastic portion 9b as shown in FIG. 10 were used. The elastic portion 9 b has a shape adjusting portion 95 configured of a curved surface portion 901 having a curved surface shape. That is, the elastic portion 9 a does not have the “curved surface portion”, and the elastic portion 9 b has the curved surface portion 901.

  The displacement (vibration) of the elastic portion 9 in the z-axis direction was simulated when the elastic portion 9 (9a, 9b) having such a configuration was displaced (vibrated) in the + x-axis direction. Specifically, as shown in FIG. 8, the base end surface 97 of the elastic portion 9 is a connection surface supported by a desired fixing point (the fixing portion 42 in the case of the elastic portion 43 described above), and the base end surface 97 The displacement of the tip surface 98 in the z-axis direction was simulated when the tip surface 98 of the elastic portion 9 was displaced in the + x-axis direction while being supported by the fixed portion. The displacement amount in the + x axis direction is 10 μm.

  As a result, the elastic portions 9a and 9b are displaced in the + z-axis direction on the base end surface 97 side, the tip end surface 98 is displaced in the −z-axis direction, and the tip end surface 98 of the elastic portion 9a is the elastic portion 9b. It was found that the displacement is greater in the −z-axis direction than the tip surface 98. Thus, the elastic portion 9a is displaced more largely in the z-axis direction which is a direction different from the x-axis direction which is the displaced direction than the elastic portion 9b.

  Therefore, as in the elastic portion 9 b, by providing the shape adjusting portion 95 having the curved surface portion 901 in the connection region, the vibration component in the z-axis direction other than the x-axis direction which is the desired driving vibration direction is reduced. can do. Moreover, compared with the elastic part 9a which is not provided with the "curved part 901", the unnecessary vibration component can be largely reduced to about half. For this reason, according to the elastic part 9b, the increase of the quadrature signal can be effectively reduced as compared with the elastic part 9a.

  Here, as described above, the gyro sensor 1 includes the substrate 2, the fixing unit 42 fixed to the substrate 2, the driving unit 44 that drives along the Y axis, and the Coriolis force acting on the driving unit 44. Detectors 471 and 472 displaceable along the Z axis orthogonal to the Y axis and the X axis, a mass portion 41 connecting the drive portion 44 and the fixing portion 42, a mass portion 41 and the fixing portion 42 And an elastic portion 43 connecting the two.

  The elastic portion 43 of the gyro sensor element 4 is a portion connected to the fixed portion 42 fixed to the substrate 2 and has a non-ideal shape due to a processing error, for example, a parallelogram or trapezoid shape. Vibration containing components other than the vibration component is likely to occur. Therefore, providing the above-described shape adjusting unit 435 (curved surface section 401) in the elastic unit 43 is particularly effective in reducing the increase of the quadrature signal in the gyro sensor 1. This is because the elastic portion 43 determines the direction of the drive amplitude, and the deviation of the elastic portion 43 from the ideal shape is the main factor causing the quadrature signal. That is, as in the present embodiment, by providing the shape adjusting portion 435 (curved surface portion 401) in the first portion 4301 constituting the elastic portion 43, the vibration component in the Z axis direction of the elastic portion 43 can be reduced. , Effective in suppressing the quadrature signal. The length of the shape adjustment unit 435 (curved surface portion 401) in the X-axis direction (longitudinal direction) is changed, or the number of first portions 4301 provided with the shape adjustment portion 435 (curved surface portion 401) is changed (shape adjustment portion By changing 435 (the number of curved surface portions 401), the vibration component in the Z-axis direction of the elastic portion 43 can be further reduced (preferably to 0).

  Here, the suppression effect of the quadrature signal which could be confirmed will be described with reference to FIGS. 11, 12 and 13A to 13C. FIG. 11 is a graph showing the correlation between the length (ratio) of the shape adjustment unit and the unnecessary signal. FIG. 12 is a circuit diagram showing an example of a detection circuit that detects an angular velocity. FIG. 13A is a waveform diagram of the charge amplifier output before the formation of the shape adjustment unit. FIG. 13B is a waveform diagram of the charge amplifier output (feedback capacitance 1000 fF) after the formation of the shape adjustment unit. FIG. 13C is a waveform diagram of the charge amplifier output (feedback capacitance 2400 fF) after the formation of the shape adjustment unit.

  The graph shown in FIG. 11 shows the correlation between the ratio [%] of the length of the shape adjustment portion 435 (curved surface portion 401) to the length in the longitudinal direction of the first portion 4301 and the magnitude of the quadrature signal which is an unnecessary vibration. It is the figure which plotted. In the graph shown in FIG. 11, the abscissa represents the ratio of the length (processed length) of the shape adjusting portion 435 to the length of the first portion 4301 as “processed length / spring length (ratio) [%]”. The magnitude of the quadrature signal is indicated by "Quad signal" on the vertical axis. Further, the horizontal axis “0%” of the graph indicates a state in which the shape adjustment unit 435 is not provided. As shown in FIG. 11, as a result of providing the shape adjusting portion 435 at a predetermined ratio with respect to a plurality of samples (the four samples AD, BD, ED, and FD are shown in the figure), the behavior for each sample , But the quadrature signal approaches “0 (zero)” in all the samples AD, BD, ED, FD. That is, in all the samples AD, BD, ED, and FD, the absolute value of the quadrature signal which is an unnecessary signal was reduced. At this time, all of the eight elastic parts 43 possessed by each sample were processed so as to be line symmetrical to the line segment J. As described above, when the processing of the elastic portion 43 is performed at only one place on one side of the line segment J, the reduction effect is 1⁄8 or less. Further, as will be described in detail in a modified example (see FIG. 14) described later, as in the sample ED, in addition to the formation of the first shape adjustment unit 435 (indicated by line segment ED1 in the drawing), further additional shape adjustment When the formation of the portion 435 (indicated by a line segment ED2 in the drawing), the quadrature signal can be eliminated by the state close to zero. That is, the magnitude of the quadrature signal can be adjusted by adjusting the processing area (processing length) of the shape adjusting unit 435 with respect to the first portion 4301.

  Detection signals at this time will be described with reference to FIGS. 12 and 13A to 13C. The detection signal (charge amplifier output signal) after charge amplification (points S10P and S20P in FIG. 12) using a detection circuit as shown in FIG. 12 exhibits the following output waveform.

  First, when the shape adjustment unit 435 is not provided for the first portion 4301, as shown in FIG. 13A, the two charge amplifier output signals S10 and S20 have unbalanced waveform states different in phase due to unnecessary vibration. It shows.

  On the other hand, the charge amplifier output signals S10a and S20a (feedback capacitance 1000 fF) in the case where the shape adjustment unit 435 is provided for the first portion 4301 have a waveform that is substantially flat and stable as shown in FIG. 13B. Shows the waveform state. That is, it shows that almost no quadrature signal can be seen. However, when the value of the feedback capacitance of the charge amplifier is increased to, for example, 2400 fF, as shown in FIG. 13C, in-phase waveform signals S10b and S20b appear. At this time, the difference between the two signal intensities was 5% or less, and the phase difference was 2.7 °. However, as the gyro characteristics, a signal intensity difference of 10% or less and a phase difference of 10 ° or less are desired. Therefore, even when the value of the feedback capacitance is increased to 2400 fF, the gyro characteristics are adversely affected. Level.

  Further, in the present embodiment, since the elastic portion 43 displaced by the vibration of the drive portion 44 and the support beam portion 48 not displaced relative to the vibration of the drive portion 44 but displaced according to the Coriolis force, the elastic portion There is a feature that the influence on the support beam portion 48 by the processing of 43 is small. The support beam portion 48 may be any one that can be displaced in the Z-axis direction, and may be, for example, a torsion spring, a folded spring, or a plate-like spring that is thin in the Z direction.

  As described above, according to the gyro sensor 1 described above, elasticity provided on both sides with respect to the line segment J passing the center of gravity G of the mass portion 41 along the driving direction (Y-axis direction) of the driving portion 44 in plan view In each of the portions 43, a notch (shape adjustment portion 435) provided in line symmetry with respect to the line segment J is provided. As described above, by providing symmetry to the notched portion (shape adjusting portion 435) provided in the elastic portion 43, in the elastic portion 43, both sides of the line segment J passing the center G of the mass portion 41 are obtained. Since the balance is maintained, the vibration component of the elastic portion 43 other than the drive direction is reduced. As a result, a quadrature signal, which is a type of unnecessary signal, is reduced, and a decrease in detection accuracy of the gyro sensor 1 can be reduced.

  In addition, the notch (shape adjusting portion 435) is a connection region between the first main surface 431 and the first side surface 433, that is, an angle θ1 between extension lines of the first main surface 431 and the first side surface 433 is an acute angle. It is provided in the part (top) which is. Thereby, even if the sectional view shape of the elastic portion 43 is asymmetrical, the effect of reducing the increase of the quadrature signal can be more significantly exhibited.

  In the first embodiment described above, an example is illustrated in which all the first portions 4301 are provided with the shape adjustment unit 435 (curved surface portion 401), but the present invention is not limited to this. The shape adjustment portion 435 (curved surface portion 401) as the notch portion may be provided in one or more of the first portions 4301 according to the necessity (adjustment amount).

[Modification of Notch (Shape Adjustment Unit)]
Next, a modification of the notch portion according to the first embodiment will be described with reference to FIG. FIG. 14 is a plan view showing a modification of the shape adjusting unit of the first embodiment. In the following description, components different from the first embodiment described above will be mainly described, and the same components as those in the first embodiment may be denoted by the same reference numerals and descriptions thereof may be omitted.

  The notch portion of this modification includes a first shape adjusting portion 435a and a second shape adjusting portion 435b in a connection region disposed in the longitudinal direction of the first portion 4301 as a beam portion. . That is, the notch portion of this modification corresponds to the first shape adjusting portion 435a and the second shape adjusting portion 435b. The first shape adjusting portion 435a as the notch portion is provided in the connection region between the first main surface 431 and the first side surface 433 of the first portion 4301 in the longitudinal shape, and a curved surface similar to that of the first embodiment. -Shaped curved surface (not shown). In addition, the second shape adjusting portion 435 b as a notch portion is provided in a connection region between the first main surface 431 and the first side surface 433 of the first portion 4301 in the longitudinal shape. The second shape adjusting portion 435b is provided side by side with the first shape adjusting portion 435a with a slight gap, and a curved surface portion (not shown) similar to the first shape adjusting portion 435a. Contains. In other words, the curved surface portions are disposed apart from each other.

  According to this modification, the first shape adjusting unit 435a and the second shape adjusting unit 435b are provided as a plurality of notches in a part of the connection region. Thus, for example, after providing the first shape adjusting unit 435a, the state of the quadrature signal is confirmed, and based on the result, the length of the second shape adjusting unit 435b is set, and the second shape adjusting unit 435b Can be provided. As described above, in order to reduce the quadrature signal, it is possible to prevent excessive adjustment such as causing excessive shape change, and it is possible to more effectively exhibit the effect of reducing the quadrature signal.

  Further, by providing the second shape adjusting portion 435b, it is possible to finely adjust the vibration component of the elastic portion 43 in the Z-axis direction. As described above, the vibration component in the Z-axis direction is roughly adjusted by providing the first shape adjusting unit 435a, and the vibration component in the Z-axis direction is finely adjusted by providing the second shape adjusting unit 435b. Can. Thereby, the vibration component in the Z-axis direction of the elastic portion 43 can be reduced more accurately.

  In addition, although the example of a structure in two shape adjustment parts of the 1st shape adjustment part 435a and the 2nd shape adjustment part 435b was shown above as a notch part, it does not restrict to this. As a notch part, you may be comprised by three or more shape adjustment parts.

Second Embodiment
Next, a gyro sensor (angular velocity sensor) is illustrated as a second embodiment of the physical quantity sensor, and will be described with reference to FIG. 15, FIG. 16, FIG. 17, and FIG. The gyro sensor (angular velocity sensor) as the second embodiment is different from the first embodiment in the configuration of the shape adjusting portion (recess) as a notch provided in the elastic portion. Therefore, in the following description, it demonstrates focusing on the shape adjustment part (recessed part) of a different structure. The same components as those in the first embodiment are given the same reference numerals, and the description thereof may be omitted.

  FIG. 15 is a plan view showing an arrangement example of recesses as notches in an elastic part of a gyro sensor (angular velocity sensor) according to a second embodiment of the physical quantity sensor of the present invention. FIG. 16 is a plan view schematically showing a part of the elastic portion shown in FIG. FIG. 17 is a perspective sectional view schematically showing a part of the elastic portion shown in FIG. FIG. 18 is a cross-sectional view schematically showing a part of the elastic portion.

[Gyro sensor]
The gyro sensor (angular velocity sensor) according to the second embodiment is an angular velocity sensor capable of detecting an angular velocity around the X axis, similarly to the gyro sensor 1 of the first embodiment described with reference to FIGS. 1 to 3. It is. Therefore, in the description according to the second embodiment, the description of the configuration and the part related to the gyro sensor 1 will be omitted.

(Concave part as notch part)
Similar to the first embodiment, four elastic portions 43 are provided in the present embodiment with respect to one structural body 40 (see FIG. 2), and each elastic portion 43 is a part of the mass portion 41. The fixed portion 42 is connected. The elastic portions 43 are provided on both sides with respect to the line segment J passing the center of gravity G of the mass portion 41 in plan view along the driving direction (Y-axis direction) of the driving portion 44, as shown in FIG. There is. The elastic portion 43 is preferably provided in line symmetry with respect to the line segment J. With such an arrangement of the elastic portion 43, since the balance on both sides with respect to the line segment J is maintained, the vibration component of the elastic portion 43 other than the drive direction of the drive portion 44 can be reduced.

  As shown in FIG. 16, the elastic portion 43 has a serpentine shape in a plan view, and includes a plurality of first portions 4301 as a plurality of longitudinal beams extending along the X-axis direction (longitudinal direction), and the Y-axis direction And a plurality of second portions 4302 extending along the (short side direction). Since this configuration is the same as that of the first embodiment, the detailed description will be omitted.

  The first portion 4301 constituting the elastic portion 43 is provided with a recessed portion 438 as a notch portion provided in line symmetry with respect to a line segment J passing through the center of gravity G of the mass portion 41 in a plan view. The portion provided with the recess 438 of the first portion 4301 becomes a thin portion 439 having a thinner thickness T (length in the Z-axis direction) than the other portions of the elastic portion 43, as shown in FIG. The recess 438 in the present embodiment is provided on the first main surface 431 side of the first portion 4301.

  The elastic portion 43 is a portion connected to the fixed portion 42 fixed to the substrate 2 as shown in FIG. 1 and includes components other than the drive vibration component by not being an ideal shape due to processing errors. Vibration is likely to occur. Therefore, it is particularly effective to reduce the increase of the quadrature signal by providing the elastic portion 43 with the recess 438 as the notch. This is because the elastic portion 43 determines the direction of the drive amplitude, and the deviation of the elastic portion 43 from the ideal shape is the main factor causing the quadrature signal. Therefore, providing the recess 438 as a notch in the elastic portion 43 connected to the fixing portion 42 as in the present embodiment is effective for suppressing the quadrature signal.

  Further, in the present embodiment, as shown in FIG. 16 and FIG. 17, the recess 438 is provided in a part of the first portion 4301 in the longitudinal direction. Thus, by providing the recess 438 in a part of the first portion 4301 in the longitudinal direction, excessive adjustment such as excessive shape change can be prevented in order to reduce the quadrature signal, and the quadrature signal can be prevented. The effect of reducing the

  The method for forming the recess 438 as the notch is not particularly limited, but for example, it is preferable to form by dry etching. In dry etching, since the mask is used, the concave portion 438 (thin portion 439) can be formed more precisely and finely.

  As described above, in the elastic portion 43, the balance on both sides with respect to the line segment J is obtained by giving the symmetry with respect to the line segment J passing through the center of gravity G of the mass portion 41 in the recess 438 provided in the elastic portion 43. As a result, vibration components of the elastic portion 43 other than in the drive direction are reduced. As a result, it is possible to reduce the quadrature signal which is a kind of unnecessary signal.

  Specifically, a recess 438 (thin-walled portion 439) is provided in at least one of the first portions 4301 located on the tip side (tip side of the center) of the first portion 4301 in the inclination direction (−Y-axis direction). Thus, the vibration component in the Z-axis direction of the elastic portion 43 can be reduced, and conversely, the recess 438 (thin-walled) in at least one of the first portions 4301 located on the proximal side (proximal to the center) By providing the portion 439), the vibration component in the Z-axis direction of the elastic portion 43 can be increased. In the present embodiment, the “inclination direction of the first portion 4301” refers to the displacement direction of the upper surface (first major surface 431) with respect to the lower surface (second major surface 432) of the first portion 4301 in FIG. , -Y axis direction is meant.

  This is to reduce the vibration component of the elastic portion 43 in the Z-axis direction by removing the acute-angled portion of the parallelogram corner when the four first portions 4301 are regarded as an integral beam portion. It is considered that the reason is that the vibration component in the Z-axis direction of the elastic portion 43 can be increased by removing the obtuse-angled portion.

  Here, as in the present embodiment, when the plurality of first portions 4301 are provided with the recess 438 (thin portion 439), the thickness T (or the depth of the recess 438) of each thin portion 439 is Preferably, they are equal to one another. Moreover, it is preferable that thickness T of all the thin part 439 formed in several (four) elastic part 43 is mutually the same. Thereby, the plurality of concave portions 438 (thin portions 439) can be formed in the same process. In addition, "the thickness T is mutually equal" mentioned above is the meaning including the case where it has not only the case where it corresponds completely, but it has an unavoidable difference | error on manufacture, for example.

  The thickness T of the thin portion 439 defined by the depth of the recess 438 is not particularly limited, but may be 5/10 or more and 9/10 or less of the thickness of the other portion of the elastic portion 43. preferable. As the thickness T of the thin portion 439 is reduced, the vibration component in the Z-axis direction of the elastic portion 43 can be largely reduced. Therefore, the vibration component in the Z-axis direction of the elastic portion 43 can be effectively reduced, and an excessive reduction in the mechanical strength of the thin portion 439 can be prevented.

  According to the second embodiment described above, elasticity is provided on both sides of the line segment J passing the center of gravity G of the mass portion 41 along the driving direction (Y-axis direction) of the driving portion 44 in plan view Each of the portions 43 is provided with a notch (concave portion 438) provided in line symmetry with respect to the line segment J. In this manner, by providing symmetry in the notched portion (recessed portion 438) provided in the elastic portion 43, in the elastic portion 43, the balance on both sides with respect to the line segment J passing the center of gravity G of the mass portion 41 is The vibration component of the elastic portion 43 other than in the drive direction is reduced because it can be removed. As a result, a quadrature signal, which is a type of unnecessary signal, is reduced, and a decrease in detection accuracy of the gyro sensor can be reduced.

  In the second embodiment described above, an example is shown in which all the first portions 4301 are provided with the recessed portions 438 (thin-walled portions 439) as notched portions, but the present invention is not limited to this. Recesses 438 (thin-walled portions 439) may be provided as one or more first portions 4301 as the notched portions according to the necessity (adjustment amount).

  In the second embodiment described above, although the example in which the recess 438 is provided on the first main surface 431 side has been described, the recess 438 may be provided on the second main surface 432 side. You may provide in both the side and the 2nd main surface 432 side.

[Modification of Notch (Concave Part)]
Next, a modification of the notch according to the second embodiment will be described with reference to FIG. FIG. 19 is a plan view showing a modification of the recess as the notch in the second embodiment. In the following description, components different from the first embodiment described above will be mainly described, and the same components as those in the first embodiment may be denoted by the same reference numerals and descriptions thereof may be omitted.

  The notch of this modification includes a first recess 438 a and a second recess 438 b in the connection area arranged in the longitudinal direction of the first portion 4301 as a beam. That is, the notches in this modification correspond to the first recess 438a and the second recess 438b. The first recess 438 a as a notch is provided on the first main surface 431 side of the first portion 4301 in the longitudinal shape. In addition, the second concave portion 438 b as a notch portion is provided on the first main surface 431 side of the first portion 4301 in the longitudinal shape. The second recess 438 b is provided side by side with the first recess 438 a with a slight gap. In other words, the second recess 438 b and the first recess 438 a are spaced apart from each other.

  According to this modification, a first recess 438a and a second recess 438b are provided as a plurality of notches in a part of the connection region. Thus, for example, after the first recess 438a is provided, the state of the quadrature signal can be confirmed, and the length of the second recess 438b can be set based on the result, and the second recess 438b can be provided. As described above, in order to reduce the quadrature signal, it is possible to prevent excessive adjustment such as causing excessive shape change, and it is possible to more effectively exhibit the effect of reducing the quadrature signal.

  Further, by providing the second recess 438 b in addition to the first recess 438 a, fine adjustment of the vibration component in the Z-axis direction of the elastic portion 43 can be performed. As described above, the vibration component in the Z-axis direction can be roughly adjusted by providing the first recess 438a, and the vibration component in the Z-axis direction can be finely adjusted by providing the second recess 438b. Thereby, the vibration component in the Z-axis direction of the elastic portion 43 can be reduced more accurately.

  Further, although the configuration example of the two shape adjustment portions of the first concave portion 438a and the second concave portion 438b as the notch portion is described above, the present invention is not limited to this. As a notch part, you may be comprised by three or more recessed parts (thin part).

[Method of manufacturing gyro sensor]
Next, a method of manufacturing the gyro sensor of the present invention will be described with reference to FIG. FIG. 20 is a process flowchart showing a method of manufacturing the gyro sensor according to the first embodiment and the second embodiment. In the following (Manufacturing method 1), a method of manufacturing the gyro sensor 1 according to the above-described first embodiment will be described, and constituent parts will be described using the same configuration names and reference numerals as in the first embodiment. In (Manufacturing method 2), a method of manufacturing the gyro sensor according to the above-described second embodiment will be described, and constituent parts will be described using component names and reference numerals similar to those of the second embodiment.

(Manufacturing method 1)
The manufacturing method 1 here shows a method of manufacturing the gyro sensor 1 according to the first embodiment described above. As shown in the flowchart of FIG. 20, in the method of manufacturing the gyro sensor 1, the step of preparing the [1] substrate 2 (step S101), the step of [2] forming the element (step S103), and [3] A first processing step (step S105) for forming a notch (first notch), and [4] a step (step S107) for determining whether or not an unnecessary signal is equal to or more than a prescribed value; The second processing step (step S109) of determining and forming the size of the second notch on the basis of the step (6), and the step (6) of bonding the lid member to the substrate (step S111). The respective steps will be sequentially described below.

  In the following description, the substrate 2 is made of a glass material containing alkali metal ions, the member to be the gyro sensor element 4 is made of a silicon material, and the lid member 3 is made of a silicon material. . A plurality of gyro sensor elements 4 can be arranged in the plane of the wafer.

[1] Step of Preparing Substrate 2 (Step S101)
First, in the step of preparing the substrate 2 (step S101), the flat base material is patterned by photolithography and etching to prepare the substrate 2 (see FIG. 2) provided with the recess 21 having the projecting portion 22. .

[2] Step of Forming Element (Step S103)
Next, in the step of forming the element (step S103), the mass portion 41 as shown in FIG. 3 described above, the plurality of fixing portions 42, the plurality of elastic portions 43, the plurality of driving portions 44, and the plurality The element having the fixed drive portions 45 and 46, the detection portions 471 and 472 and the plurality of support beam portions 48 is formed. The element here is to be the gyro sensor element 4 through the process described later. In addition, the fixing detection unit 49 can be formed on the upper surface of the protrusion 22.

  Specifically, first, a plate-like member is prepared, and the member is bonded onto the substrate 2 by, for example, an anodic bonding method. Then, a hard mask is formed on the joined members, and the members are patterned by etching to form an element. In the present embodiment, the Bosch process, which is a deep etching technique in which an etching process using a reactive plasma gas and a deposition process are combined, is preferably used as the etching of a member. The member may be thinned by polishing, for example, before patterning.

[3] First Machining Step (Step S105) of Forming Notches (First Notches)
Next, in the first processing step (step S105) of forming the shape adjustment portion 435 (first shape adjustment portion 435a) as the notch portion (first notch portion) in the elastic portion 43, A shape adjusting portion 435 (first shape) is processed as a notch (first notch) of a predetermined length by processing a connection region between the first main surface 431 and the first side surface 433 of the first portion 4301. The adjustment unit 435a) is formed (see FIGS. 4 and 14). The shape adjusting unit 435 (first shape adjusting unit 435a) processes the elastic unit 43, and the center of gravity G of the mass unit 41 is along the driving direction (Y-axis direction) in plan view from the Z-axis direction. It is formed in line symmetry with respect to the passing line segment J. Note that processing the elastic portion 43 includes removing or deforming a part of the elastic portion 43. Further, as a result of this processing, a shape adjusting portion 435 (first shape adjusting portion 435a) as a notch portion (first notch portion) is formed.

  In the present embodiment, part of the connection area is processed. Thus, the shape adjustment portion 435 (first shape adjustment portion 435a) formed of the curved surface portion 401 is formed in part of the connection region between the first main surface 431 and the first side surface 433 of the first portion 4301. Can. The size (length) of the shape adjustment unit 435 (first shape adjustment unit 435 a) formed here is the size of the vibration component in the Z-axis direction of the elastic unit 43 measured in advance for each gyro sensor element 4. It is set based on. By forming the shape adjusting portion 435 (the first shape adjusting portion 435a) as a part of the first portion 4301, the shape adjusting portion 435 can be formed as a suitably sized notch necessary to reduce the quadrature signal. (The first shape adjusting portion 435a) can be formed.

  In addition, an angle θ (inner angle) at which the first main surface 431 and the first side surface 433 of the first portion 4301 are connected is less than 90 °, that is, an acute angle. The location where the elastic portion 43 is processed is preferably a portion that forms an acute angle, such as the angle θ of the connection region between the first major surface 431 and the first side surface 433 of the first portion 4301. Thereby, the effect of reducing the unnecessary vibration component (unnecessary signal) can be enhanced.

  Further, the processing in the first processing step (step S105) is performed by irradiating the connection region of the first main surface 431 and the first side surface 433 of the first portion 4301 with laser light from above the elastic portion 43. Do. The laser light is preferably irradiated particularly from the side of the first side surface 433 in the inclination direction. Thus, the shape adjusting unit 435 (first shape adjusting unit 435a) configured by the curved surface portion 401 can be formed with high accuracy.

  The wavelength of the laser beam used here is, for example, preferably 200 nm or more and 1110 nm or less, and more preferably 260 nm or more and 1100 nm or less. It can reduce that a dross, debris, etc. become too much that it is in such a range. Moreover, as a laser beam, it is preferable to use a YAG laser. In particular, in the present embodiment, laser light of the second harmonic (532 nm) of a YAG laser having a fundamental wavelength of 1064 nm is preferably used. When a wavelength smaller than the second harmonic (532 nm) of the YAG laser is applied to the elastic portion 43 made of a silicon material, an ablation (transpiration) phenomenon occurs and appropriate processing can be performed.

  In addition, the shape (cross-sectional shape) and size of the laser beam at the portion to be irradiated are not particularly limited, and for example, one side has a length of 1 μm to 200 μm and a diameter of 1 μm to 300 μm. Can. However, when irradiating a laser beam as in the present embodiment, the shape and size of the laser beam is preferably a square having a side length of about 1 μm to 100 μm or a circle having a diameter of about 1 μm to 100 μm. . In particular, in the present embodiment, a circular laser beam having a diameter of about 3 μm is preferably used.

  Further, by using a laser beam, an altered portion (deteriorated layer) 411 (see FIG. 6) whose material is changed by irradiating the laser beam is formed on a portion (top portion) of the curved portion 401 of the elastic portion 43. Be done.

  In the present embodiment, the second harmonic of the YAG laser is applied to the connection region between the first main surface 431 and the first side surface 433 of the first portion 4301 of the elastic portion 43 made of silicon material (single crystal silicon material). A laser beam having a wavelength of 532 nm was irradiated several times at an intensity of about 0.5 mJ so as to be 20 ° to 45 ° with respect to the perpendicular to the first major surface 431. As a result, the irradiated portion (connection region) is rounded, and the degenerated portion 411 which protrudes in the −Y-axis direction from the first side surface 433 (shape adjustment portion 435 as a notch portion (first shape adjustment) The portion 435a) is formed (see FIG. 6) This altered portion 411 is considered to be changed in crystallinity by the laser light, and specifically, is considered to be melted and recrystallized. By providing such a degraded portion 411, the effect of reducing the unnecessary vibration component (unnecessary signal) can be enhanced.

  The method of processing the connection region between the first main surface 431 and the first side surface 433 of the first portion 4301 is not limited to the above-described method of irradiating a laser beam, and a method of lamp heating with a halogen heater or the like It is also possible to use a method of physically removing with a focused ion beam (FIB) or the like.

[4] Step of Determining Whether the Unwanted Signal is Above the Specified Value (Step S107)
Next, in the step of determining whether the unnecessary signal is equal to or more than the specified value (step S107), a predetermined length is provided in the connection region between the first main surface 431 and the first side surface 433 of the first portion 4301 of the elastic portion 43. As a result of forming the shape adjustment unit 435 (first shape adjustment unit 435a) including the curved surface portion 401, it is determined whether the unnecessary signal of the gyro sensor 1 is within the specified value. If it is determined that the unnecessary signal is equal to or greater than the specified value (step S107: Yes), that is, if the unnecessary signal has not decreased to the specified value, the process proceeds to the next second processing step (step S109) to add A second shape adjusting portion 435b (see FIG. 14) is formed as the second notch portion. Further, in this determination, if the unnecessary signal is less than or equal to the specified value (step S107: No), that is, if the unnecessary signal is reduced to less than or equal to the specified value, the step of bonding the lid member 3 to the next substrate 2 The process proceeds to (step S111).

[5] A second processing step of determining and forming the size of the second notch (step S109)
Next, in the second processing step (step S109) of determining and forming the size of the second notch, the second notch is determined based on the determination result of the unnecessary signal in the previous step (step S107). The size (length) of the second shape adjustment unit 435b (curved surface section 401) as a section is determined. Then, the second shape adjustment unit 435 b is formed based on the determined size of the second shape adjustment unit 435 b.

  The second shape adjusting unit 435 b is disposed with a gap from the shape adjusting unit 435 (first shape adjusting unit 435 a) formed in the previous step (step S 105), and the first main portion 4301 It is formed in a part of the connection region between the surface 431 and the first side surface 433. The second shape adjustment unit 435 b is formed in line symmetry with the line segment J passing the center of gravity G of the mass unit 41 along the drive direction (Y-axis direction) in plan view from the Z-axis direction. Here, the shape adjusting unit 435 (first shape adjusting unit 435a) and the second shape adjusting unit 435b together constitute a notch. The second shape adjusting unit 435b can be formed by the same processing as the formation of the shape adjusting unit 435 (the first shape adjusting unit 435a) in the first processing step (step S105). The second shape adjusting unit 435 b is preferably formed by irradiating the same laser beam as the first processing step (step S 105).

[6] A step of bonding the lid member to the substrate (step S111)
Next, in the step of bonding the lid member 3 to the substrate 2 (step S111), the lid member 3 having the recess 31 is bonded to the upper surface 23 of the substrate 2 as described with reference to FIG. Thus, a space S for housing the gyro sensor element 4 is formed by the recess 21 of the substrate 2 and the recess 31 of the lid member 3. By the above steps, the gyro sensor 1 as shown in FIG. 2 can be obtained.

  Although not shown, the gyro sensor 1 is the same as the manufacturing method 2 described later, but a plurality of the gyro sensors 1 may be disposed and processed in the plane of the wafer WF (on the wafer WF). In the singulation step provided after the step of bonding the lid member 3 (step S111), the lid member 3 may be singulated using a dicing blade (not shown) or the like. In this process, the singulated gyro sensor 1 can be obtained.

  Although not shown, a through hole may be provided in the lid member 3 so as to communicate the inside and the outside of the space S. In the case where the lid member 3 has the through hole, after the space S is formed, the space S is evacuated using the through hole and then the through hole is sealed to reduce the pressure of the space S. can do. The same applies to manufacturing method 2 described later.

(Manufacturing method 2)
The manufacturing method 2 here indicates a manufacturing method of the gyro sensor according to the second embodiment described above. The manufacturing method 2 of the gyro sensor is, similarly to the manufacturing method 1 described above, the step of preparing the [1] substrate 2 (step S101), the step of forming the [2] element (step S103), and the [3] cutting. A first processing step (step S105) for forming a notch (first notch), and [4] a step (step S107) for determining whether or not an unnecessary signal is equal to or more than a prescribed value; The second processing step (step S109) of determining and forming the size of the second notch on the basis of the step (6), and the step (6) of bonding the lid member to the substrate (step S111).

  However, the manufacturing method 2 includes the first processing step (step S105) for forming the [3] notch (the first notch), and [5] the size of the second notch based on the determination. The second processing step (step S109) of determining and forming the height is different from the above-described manufacturing method 1, and the other steps are the same as the manufacturing method 1. Therefore, in the following, the first processing step (step S105) for forming the [3] notch portion (first notch portion), which is a step different from the manufacturing method 1, and [5] The second processing step (step S109) of determining and forming the size of the notch portion 2 will be described, and the description of the same steps as the manufacturing method 1 will be omitted. Hereinafter, the first processing step (step S105) and the second processing step (step S109) will be sequentially described.

[3] First Machining Step (Step S105) of Forming Notches (First Notches)
In the first processing step (step S105) for forming the recess 438 as the notch (first notch) or the first recess 438a in the elastic portion 43, the same step as the manufacturing method 1 [, 1) The member formed through the step of preparing the substrate 2 (step S101) and the step of forming the element [2] (step S103) are processed.

  In the first processing step (step S105) of forming the recess 438 as the notch (first notch) or the first recess 438a in the elastic portion 43, the first portion 4301 of the first portion 4301 of the elastic portion 43 is formed. The main surface 431 side is processed to form a recess 438 (first recess 438a) as a notch having a predetermined length (see FIGS. 16 and 19).

  The recess 438 (first recess 438 a) is provided by processing a part of the first portion 4301. The size (length) and arrangement of the recess 438 (first recess 438a) formed here is the size of the vibration component in the Z-axis direction of the elastic portion 43 measured in advance for each gyro sensor element 4. Set based on. In addition, the recess 438 (first recess 438a) processes the elastic portion 43, and a line passing along the center of gravity G of the mass portion 41 along the driving direction (Y axis direction) in plan view from the Z axis direction. It is formed in line symmetry with respect to the minute J. Although it does not specifically limit as a formation method of the recessed part 438 (1st recessed part 438a), For example, it is preferable to form by dry etching. In dry etching, since the mask is used, the concave portion 438 (first concave portion 438a) can be formed more precisely and finely. By forming the recess 438 (first recess 438a) in a part of the first portion 4301, the recess 438 (first recess 438a) is formed as an appropriately sized notch necessary to reduce the quadrature signal. Can be formed.

[5] A second processing step of determining and forming the size of the second notch (step S109)
[5] A second process of determining and forming the size of the second notch following the step (step S107) of determining whether or not the [4] unnecessary signal is a specified value or higher, which is the previous step. In the step (step S109), the size (length) of the second recess 438b as the second notch is determined based on the determination result of the unnecessary signal in step S107. Then, based on the determined size of the second recess 438b, the second recess 438b is formed.

  The second recess 438 b is disposed with a gap from the recess 438 (the first recess 438 a) formed in the previous step (step S 105), and a portion of the first portion 4301 on the first main surface 431 side Form in addition to. The second recess 438 b is formed in line symmetry with the line segment J passing the center of gravity G of the mass portion 41 along the drive direction (Y-axis direction) in plan view from the Z-axis direction. Here, the recess 438 (first recess 438 a) and the second recess 438 b together constitute a notch. The second recess 438 b can be formed by the same process as the formation of the recess 438 (the first recess 438 a) in the first processing step (step S 105). The second recess 438 b is preferably formed by the same dry etching as in the first processing step (step S 105).

  Then, in the step of bonding the lid member 3 to the substrate 2 (step S111), the lid member 3 having the recess 31 is bonded to the upper surface 23 of the substrate 2. Thus, a space S for housing the gyro sensor element 4 is formed by the recess 21 of the substrate 2 and the recess 31 of the lid member 3. The gyro sensor according to the second embodiment can be obtained by the above steps.

  According to manufacturing method 1 and manufacturing method 2 described above, elastic portion 43 is processed in the first processing step (step S105), and along the driving direction (Y-axis direction) in plan view from the Z-axis direction And a notch (shape adjusting portion 435, first shape adjusting portion 435a, or recess 438, first recess 438a) processed in line symmetry with respect to a line segment J passing the center of gravity G of the mass portion 41. Set up. Then, in the second processing step (step S109), the elastic portion 43 is further processed based on the processing result in the first processing step (step S105), and the notch formed in the first processing step (step S105) In addition to the portion (shape adjusting portion 435, first shape adjusting portion 435a, or recess 438, first recess 438a), the second portion is provided in line symmetry with respect to a line segment J passing the center G of the mass portion 41. The notch (the second shape adjusting portion 435b and the second recess 438b) enables fine adjustment of the balance on both sides of the line segment J, the reduction amount of the quadrature signal, and the like. Thereby, the appearance amount of the quadrature signal can be controlled in detail, and a physical quantity sensor (gyro sensor) with higher detection accuracy can be manufactured.

Physical quantity sensor device
Next, a physical quantity sensor device including the gyro sensor 1 as a physical quantity sensor will be described with reference to FIG. FIG. 21 is a cross-sectional view showing a schematic configuration of a physical quantity sensor device.

  The physical quantity sensor device 800 includes, as shown in FIG. 21, a base substrate 810, a gyro sensor 1 as a physical quantity sensor provided on the base substrate 810, and a circuit element 820 (IC) provided on the gyro sensor 1. A bonding wire BW1 electrically connecting the gyro sensor 1 and the circuit element 820; a bonding wire BW2 electrically connecting the base substrate 810 and the circuit element 820; and a mold for molding the gyro sensor 1 and the circuit element 820. And the part 830. Here, as the gyro sensor 1, for example, any of the first embodiment or the second embodiment described above can be used.

  The base substrate 810 is a substrate that supports the gyro sensor 1 and is, for example, an interposer substrate. A plurality of connection terminals 811 are disposed on the upper surface of such a base substrate 810, and a plurality of mounting terminals 812 are disposed on the lower surface. Further, internal wiring (not shown) is disposed in the base substrate 810, and each connection terminal 811 is electrically connected to the corresponding mounting terminal 812 through the internal wiring. The base substrate 810 is not particularly limited, and for example, a silicon substrate, a ceramic substrate, a resin substrate, a glass substrate, a glass epoxy substrate, or the like can be used.

  In addition, the gyro sensor 1 is disposed on the base substrate 810 with the substrate 2 facing downward (base substrate 810 side). The gyro sensor 1 is bonded to the base substrate 810 via a bonding member.

  Also, the circuit element 820 is disposed on the gyro sensor 1. The circuit element 820 is bonded to the lid member 3 of the gyro sensor 1 through the bonding member. Circuit element 820 is electrically connected to each electrode pad (not shown) of gyro sensor 1 through bonding wire BW1, and electrically connected to connection terminal 811 of base substrate 810 through bonding wire BW2. ing. In such a circuit element 820, a drive circuit for driving the gyro sensor 1, a detection circuit for detecting an angular velocity based on an output signal from the gyro sensor 1, and a signal from the detection circuit are converted into predetermined signals. The output circuit etc. to output are included as needed.

  In addition, the mold portion 830 molds the gyro sensor 1 and the circuit element 820. Thus, the gyro sensor 1 and the circuit element 820 can be protected from moisture, dust, impact, and the like. The mold portion 830 is not particularly limited, and for example, a thermosetting epoxy resin can be used, and for example, it can be molded by a transfer molding method.

  The physical quantity sensor device 800 as described above includes the gyro sensor 1. Therefore, the effect of the gyro sensor 1 can be enjoyed, and a highly accurate physical quantity sensor device 800 can be obtained.

  The configuration of the physical quantity sensor device 800 is not limited to the above configuration. For example, the gyro sensor 1 may be housed in a ceramic package.

[Complex sensor]
Next, with reference to FIG. 22, a configuration example of a composite sensor provided with the gyro sensor 1 as the above-mentioned physical quantity sensor will be described. FIG. 22 is a functional block diagram showing a schematic configuration of a composite sensor. In addition, below, the example using the gyro sensor 1 which concerns on 1st Embodiment is shown and demonstrated.

  As shown in FIG. 22, the compound sensor 900 includes an X-axis angular velocity sensor 920x, a Y-axis angular velocity sensor 920y, and a Z-axis angular velocity sensor 920z using the gyro sensor 1 including the gyro sensor element 4 as described above, and an acceleration sensor. And an acceleration sensor 950 including an element. The X-axis angular velocity sensor 920x, the Y-axis angular velocity sensor 920y, and the Z-axis angular velocity sensor 920z can measure the angular velocity in one axial direction with high accuracy. The acceleration sensor 950 is provided with three acceleration sensor elements in order to measure acceleration in three axial directions. In addition, the compound sensor 900 includes, for example, a drive circuit that drives the gyro sensor element 4, a detection circuit that detects angular velocity in the X axis, Y axis, and Z axis directions based on signals from the gyro sensor 1, A control circuit unit (IC) including an output circuit or the like that converts a signal from the detection circuit into a predetermined signal and outputs the signal can be provided.

  According to such a compound sensor 900, the compound sensor 900 can be easily configured by the X-axis angular velocity sensor 920x configured by the gyro sensor 1, the Y-axis angular velocity sensor 920y, and the Z-axis angular velocity sensor 920z and the acceleration sensor 950. For example, acceleration data and angular velocity data can be obtained.

[Inertial Measurement Unit]
Next, with reference to FIGS. 23 and 24, an inertial measurement unit (IMU) will be described. FIG. 23 is an exploded perspective view showing a schematic configuration of the inertial measurement unit. FIG. 24 is a perspective view showing an arrangement example of an inertial sensor element of the inertial measurement unit.

  An inertial measurement unit 2000 (IMU: Inertial Measurement Unit) shown in FIG. 23 is a device that detects the posture or behavior (inertial momentum) of a moving object (mounted device) such as a car or a robot. The inertial measurement unit 2000 functions as a so-called six-axis motion sensor provided with a three-axis acceleration sensor and a three-axis angular velocity sensor.

  The inertial measurement unit 2000 is a rectangular solid having a substantially square planar shape. In addition, screw holes 2110 as fixing portions are formed in the vicinity of two apexes located in the diagonal direction of the square. The inertial measurement unit 2000 can be fixed to the mounting surface of a mounting object such as a car by passing two screws through the two screw holes 2110. In addition, it is also possible to miniaturize to a size that can be mounted on, for example, a smartphone or a digital camera, by selecting parts or changing the design.

  Inertial measurement unit 2000 has an outer case 2100, a bonding member 2200, and a sensor module 2300. Inside of outer case 2100, a bonding member 2200 is interposed, and sensor module 2300 is inserted. There is. The sensor module 2300 also includes an inner case 2310 and a substrate 2320.

  The outer shape of the outer case 2100 is a rectangular solid having a substantially square planar shape, similar to the overall shape of the inertial measurement unit 2000, and screw holes 2110 are formed in the vicinity of two apexes located in the diagonal direction of the square. There is. The outer case 2100 is box-shaped, and the sensor module 2300 is housed inside.

  The inner case 2310 is a member that supports the substrate 2320 and has a shape that fits inside the outer case 2100. Further, in the inner case 2310, a recess 2311 for preventing contact with the substrate 2320 and an opening 2312 for exposing a connector 2330 described later are formed. Such an inner case 2310 is joined to the outer case 2100 via a joining member 2200 (for example, a packing impregnated with an adhesive). A substrate 2320 is bonded to the lower surface of the inner case 2310 via an adhesive.

  As shown in FIG. 24, on the upper surface of the substrate 2320, a connector 2330, an angular velocity sensor 2340z for detecting an angular velocity around the Z axis, an acceleration sensor 2350 for detecting acceleration in each axial direction of X, Y and Z axes, etc. Has been implemented. Further, on the side surface of the substrate 2320, an angular velocity sensor 2340x for detecting an angular velocity around the X axis and an angular velocity sensor 2340y for detecting an angular velocity around the Y axis are mounted. The angular velocity sensors 2340z, 2340x, and 2340y are not particularly limited, and the above-described gyro sensor 1 using Coriolis force can be used. The acceleration sensor 2350 is not particularly limited, and a capacitive acceleration sensor or the like can be used.

  Further, a control IC 2360 is mounted on the lower surface of the substrate 2320. The control IC 2360 is an MCU (Micro Controller Unit), incorporates a storage unit including a non-volatile memory, an A / D converter, and the like, and controls each unit of the inertial measurement unit 2000. The storage unit stores a program that defines the order and content for detecting acceleration and angular velocity, a program that digitizes detection data and incorporates it into packet data, and accompanying data. A plurality of other electronic components are mounted on the substrate 2320.

  The inertial measurement unit 2000 has been described above. Such an inertial measurement unit 2000 includes angular velocity sensors 2340z, 2340x, 2340y and an acceleration sensor 2350, and a control IC 2360 (control circuit) as a control unit that controls the driving of the respective sensors 2340z, 2340x, 2340y, 2350. It contains. As a result, the above-described effects of the gyro sensor 1 can be obtained, and a highly reliable inertial measurement unit 2000 can be obtained.

[Portable Electronics]
Next, a portable electronic device using the gyro sensor 1 will be described in detail based on FIG. 25 and FIG. Hereinafter, a wristwatch-type activity meter (active tracker) will be described as an example of the portable electronic device.

  The wrist device 1000, which is a wristwatch-type activity meter (active tracker), is attached to a site (subject) such as the wrist of a user by bands 1032 and 1037 as shown in FIG. Wireless communication is possible while being equipped. The above-described gyro sensor 1 according to the present invention is incorporated in the wrist device 1000 together with a sensor that measures acceleration as an angular velocity sensor 114 (see FIG. 26) that measures an angular velocity.

  The wrist device 1000 includes a case 1030 in which at least an angular velocity sensor 114 (see FIG. 26) is accommodated, a processing unit 100 (see FIG. 26) which is accommodated in the case 1030 and processes output data from the angular velocity sensor 114; A display unit 150 housed in 1030 and a translucent cover 1071 closing the opening of the case 1030 are provided. A bezel 1078 is provided on the outside of the case 1030 of the translucent cover 1071 of the case 1030. On the side surface of the case 1030, a plurality of operation buttons 1080 and 1081 are provided. Hereinafter, further detailed description will be made with reference to FIG. 26 as well.

  The acceleration sensor 113 detects accelerations in directions of three axes intersecting (ideally orthogonal) with each other, and outputs a signal (acceleration signal) according to the magnitude and direction of the detected three-axis acceleration. In addition, the angular velocity sensor 114 detects angular velocities in the directions of three axes intersecting (ideally orthogonal) with each other, and outputs a signal (angular velocity signal) according to the magnitude and direction of the detected three axial angular velocity. Do.

  The wrist device 1000 includes a GPS (Global Positioning System) sensor 110. GPS, also referred to as a global positioning system, is a satellite positioning system for measuring the current position on the earth based on a plurality of satellite signals. GPS has a function to perform positioning calculation using GPS time information and orbit information to acquire user's position information, a function to measure the user's movement distance and movement locus, and a time correction function in the clock function . The GPS sensor 110 can measure the current position on the earth based on satellite signals from GPS satellites.

  The liquid crystal display (LCD) constituting the display unit 150 uses, for example, position information using the GPS sensor 110 or the geomagnetic sensor 111, a movement amount, an acceleration sensor 113, or an angular velocity sensor 114 according to various detection modes. The exercise information such as the exercise amount, the biological information such as the pulse rate using the pulse sensor 115, or the time information such as the current time is displayed. In addition, the environmental temperature using the temperature sensor 116 can also be displayed.

  The communication unit 170 performs various controls for establishing communication between the user terminal and an information terminal (not shown). The communication unit 170 may be, for example, Bluetooth (registered trademark) (BTLE: including Bluetooth Low Energy), Wi-Fi (registered trademark) (Wireless Fidelity), Zigbee (registered trademark), NFC (Near field communication), ANT + (registered trademark) It is configured to include a transceiver corresponding to a short distance wireless communication standard such as a trademark, and a connector corresponding to a communication bus standard such as USB (Universal Serial Bus).

  The processing unit 100 (processor) is configured by, for example, a micro processing unit (MPU), a digital signal processor (DSP), an application specific integrated circuit (ASIC) or the like. The processing unit 100 executes various processes based on the program stored in the storage unit 140 and the signals input from the operation unit 120 (for example, operation buttons 1080 and 1081). The processing by the processing unit 100 includes data processing for each output signal of the GPS sensor 110, the geomagnetic sensor 111, the pressure sensor 112, the acceleration sensor 113, the angular velocity sensor 114, the pulse sensor 115, the temperature sensor 116, and the clock unit 130, and the display unit 150. Display processing for displaying an image on the screen, sound output processing for outputting sound to the sound output unit 160, communication processing for communicating with an information terminal via the communication unit 170, power control processing for supplying power from the battery 180 to each unit, etc. Is included.

Such a wrist device 1000 can have at least the following functions.
1. Distance: Measure the total distance from the start of measurement by high precision GPS function.
2. Pace: Displays the current running pace from the pace distance measurement value.
3. Average Speed: Calculates and displays the average speed from the start of driving to the present.
4. Elevation: Measure and display elevation by GPS function.
5. Stride: Measures and displays stride even in a tunnel where GPS radio waves do not reach.
6. Pitch: Measure and display the number of steps per minute.
7. Heart rate: The heart rate is measured and displayed by the pulse sensor.
8. Slope: Measures and displays the slope of the ground during training and trail runs in mountainous areas.
9. Auto lap: Automatic lap measurement is performed when running a certain distance or certain time set in advance.
10. Exercise calories burned: Display calories burned.
11. Number of steps: Display the total number of steps from the start of exercise.

  Note that the wrist device 1000 can be widely applied to a running watch, a runner's watch, a runner's watch compatible with multi sports such as a duathlon or a triathlon, an outdoor watch, and a satellite positioning system, for example, a GPS watch equipped with GPS.

  Also, although the above description has been made using the GPS (Global Positioning System) as a satellite positioning system, another Global Navigation Satellite System (GNSS) may be used. For example, one or more of satellite positioning systems such as EGNOS (European Geostationary-Satellite Navigation Overlay Service), QZSS (Quasi Zenith Satellite System), GLONASS (GLO Bal NAvigation Satellite System), GALILEO, BeiDou (BeiDou Navigation Satellite System), etc. You may use In addition, using at least one of the satellite positioning systems, the Satellite-based Augmentation System (SBAS) such as Wide Area Augmentation System (WAAS), European Geostationary-Satellite Navigation Overlay Service (EGNOS), etc. It is also good.

  Such a portable electronic device includes the gyro sensor 1 and the processing unit 100, and thus has excellent reliability.

[Electronics]
Next, an electronic device using the gyro sensor 1 will be described in detail with reference to FIGS.

  First, with reference to FIG. 27, a mobile personal computer which is an example of the electronic apparatus will be described. FIG. 27 is a perspective view schematically showing a configuration of a mobile personal computer which is an example of the electronic apparatus.

  In this figure, the personal computer 1100 comprises a main unit 1104 having a keyboard 1102 and a display unit 1106 having a display unit 1108. The display unit 1106 is rotated relative to the main unit 1104 via a hinge structure. It is supported movably. The personal computer 1100 incorporates the gyro sensor 1 functioning as an angular velocity sensor, and the control unit 1110 can perform control such as attitude control based on detection data of the gyro sensor 1.

  FIG. 28 is a perspective view schematically showing a configuration of a smartphone (mobile phone) as an example of the electronic device.

  In this figure, the smartphone 1200 incorporates the above-described gyro sensor 1. Detection data (angular velocity data) detected by the gyro sensor 1 is transmitted to the control unit 1201 of the smartphone 1200. The control unit 1201 includes a CPU (Central Processing Unit), recognizes the posture and behavior of the smartphone 1200 from the received detection data, and changes the display image displayed on the display unit 1208. Sound a warning sound or sound effect, or drive a vibration motor to vibrate the main unit. In other words, motion sensing of the smartphone 1200 can be performed, and the display content can be changed, sound, vibration, or the like can be generated from the measured attitude or behavior. In particular, when executing a game application, it is possible to experience a realistic feeling close to reality.

  FIG. 29 is a perspective view showing a configuration of a digital still camera as an example of the electronic apparatus. Note that in this figure, the connection to an external device is also shown in a simplified manner.

  In this figure, a display unit 1310 is provided on the back of the case (body) 1302 of the digital still camera 1300, and is configured to perform display based on an image pickup signal by a CCD. It also functions as a finder to display as an image. A light receiving unit 1304 including an optical lens (imaging optical system), a CCD, and the like is provided on the front side (the rear side in the drawing) of the case 1302.

  When the photographer confirms the subject image displayed on the display unit 1310 and depresses the shutter button 1306, an imaging signal of the CCD at that time is transferred and stored in the memory 1308. In the digital still camera 1300, a video signal output terminal 1312 and an input / output terminal 1314 for data communication are provided on the side of the case 1302. As shown, a television monitor 1430 is connected to the video signal output terminal 1312, and a personal computer 1440 is connected to the data communication input / output terminal 1314 as necessary. Furthermore, the imaging signal stored in the memory 1308 is configured to be output to the television monitor 1430 or the personal computer 1440 by a predetermined operation. The digital still camera 1300 incorporates the gyro sensor 1 functioning as an angular velocity sensor, and based on the detection data of the gyro sensor 1, the control unit 1316 can perform, for example, control of camera shake correction.

  Such an electronic device includes the gyro sensor 1 and the control units 1110, 1201, and 1316, and thus has excellent reliability.

  In addition to the personal computer of FIG. 27, the smartphone (mobile phone) of FIG. 28, the digital still camera of FIG. Inkjet printers), laptop personal computers, televisions, video cameras, video tape recorders, car navigation devices, pagers, electronic organizers (including communication functions), electronic dictionaries, calculators, electronic game machines, word processors, workstations, televisions Telephone, TV monitor for crime prevention, electronic binoculars, POS terminal, medical equipment (such as electronic thermometer, sphygmomanometer, blood glucose meter, electrocardiogram measuring device, ultrasound diagnostic device, electronic endoscope), fish finder, various measuring devices, instruments Class (for example, vehicles Used in aircraft and ship instruments), flight simulators, seismometers, pedometers, inclinometers, vibrometers that measure the vibration of hard disks, attitude control devices for flying objects such as robots and drones, and inertial navigation for autonomous driving of automobiles Can be applied to control devices, etc.

[Mobile body]
Next, a moving body using the gyro sensor 1 is shown in FIG. 30 and will be described in detail. FIG. 30 is a perspective view showing a configuration of a car which is an example of a moving body.

  As shown in FIG. 30, the gyro sensor 1 is built in the automobile 1500, and the attitude of the vehicle body 1501 can be detected by the gyro sensor 1, for example. The detection signal of the gyro sensor 1 is supplied to a vehicle body posture control device 1502 as a posture control unit for controlling the posture of the vehicle body, and the vehicle body posture control device 1502 detects the posture of the vehicle body 1501 based on the signal, and the detection result Depending on the situation, the hardness of the suspension can be controlled or the brakes of the individual wheels 1503 can be controlled. In addition, the gyro sensor 1 is also a keyless entry system, an immobilizer, a car navigation system, a car air conditioner, an antilock brake system (ABS), an air bag, a tire pressure monitoring system (TPMS: Tire Pressure Monitoring System), It can be widely applied to electronic control units (ECUs) such as engine control systems (engine systems), control devices for inertial navigation for autonomous driving, and battery monitors of hybrid vehicles and electric vehicles.

  In addition to the above examples, the gyro sensor 1 applied to a mobile object may be, for example, attitude control such as a biped robot or a train, remote control such as a radio controlled airplane, a radio controlled helicopter, or a drone or autonomous type. Use in control of attitude control of aircraft, attitude control of agricultural machines (growing machines) or construction machines (building machines), control of rockets, artificial satellites, ships, AGV (unmanned transport vehicles), biped robots, etc. Can. As described above, the gyro sensor 1 and each control unit (not shown) are incorporated in order to realize attitude control of various moving bodies.

  Such a moving body includes the gyro sensor 1 and the control unit (for example, the vehicle body posture control device 1502 as a posture control unit), and thus has excellent reliability.

  Although the physical quantity sensor, the inertial measurement unit, the portable electronic device, the electronic device, and the moving body have been described based on the illustrated embodiment, the present invention is not limited to this, and the configuration of each part is the same. It can be replaced with any configuration having the function of In addition, any other component may be added to the present invention.

  In the embodiment described above, the X axis, the Y axis, and the Z axis are orthogonal to each other, but the present invention is not limited to this as long as they intersect with each other. For example, the X axis is perpendicular to the YZ plane. The Y axis may be slightly inclined with respect to the normal direction of the XZ plane, or the Z axis may be slightly inclined with respect to the normal direction of the XY plane. Note that “slightly” means a range in which the physical quantity sensor (gyro sensor 1) can exhibit the effect, and the specific inclination angle (numerical value) differs depending on the configuration or the like.

  DESCRIPTION OF SYMBOLS 1 ... Gyro sensor as a physical quantity sensor, 2 ... board, 3 ... lid member, 4 ... Gyro sensor element (angular velocity sensor element) as a sensor element, 10 ... package, 21 ... recessed part DESCRIPTION OF SYMBOLS 31 recessed part 33 lower surface 40 40a 40b structure 41 mass part 42 fixed part 43 elastic part 44 drive part 45 fixed drive part 46 fixed drive part 48 ... Support beam portion, 49, 49a, 49b ... Fixed detection portion as fixed electrode portion, 212 ... Bottom surface, 401 ... Curved surface portion, 411 ... Deteriorated portion (deteriorated layer), 430 ... Outer peripheral surface, 431 ... First main surface, 432: second main surface, 433: first side, 434: second side, 435: shape adjusting portion as a notch, 435a: first shape adjusting portion as a notch, 435b as a notch Second shape tone Part 438: A recess as a notch, 438a: a first recess as a notch, 438b: a second recess as a notch, 471: a detector as a movable part, 472 as a movable part Detection unit, 473: frame, 800: physical quantity sensor device, 900: composite sensor, 1000: wrist device as a portable electronic device, 1100: personal computer as an electronic device, 1200: smartphone as an electronic device, 1300: electronic device Digital still camera as 1500, automobile as moving body, 1501 vehicle body, 2000 inertial measurement unit, 4301 first portion as beam portion, 4302 second portion as connecting portion, QL1, QL2, QL3, QL4, QL5, QL6, QL7, QL8, QL9 ... A thought that indicates the approximate boundaries Line segment that passes through the line, G ... weight portion center of gravity, the J ... center of gravity G.

Claims (20)

Detect physical quantities,
A substrate,
A fixing portion fixed to the substrate;
A fixed electrode portion provided on the substrate;
A drive unit,
A mass unit connected to the drive unit and displaceable in the drive direction of the drive unit;
A movable portion connected to the mass portion, opposed to the fixed electrode portion, and displaceable in the opposite direction;
An elastic portion provided on both sides with respect to a line segment passing the center of gravity of the mass portion along the driving direction in plan view, and connecting the mass portion and the fixing portion;
Including
Each of the elastic parts is
In plan view, notches are provided in line symmetry with respect to the line segment,
Physical quantity sensor characterized by In claim 1,
The notch portion is provided on at least one of the substrate side and the side opposite to the substrate.
Physical quantity sensor characterized by In claim 1 or 2,
The elastic portion has a serpentine shape including a plurality of elongated beams and a connecting portion connecting the beams so as to turn back.
The beam portion is
First main surface and second main surface facing in the opposite direction and in a relationship of front and back,
A first side surface connected to one end of the first main surface and one end of the second main surface;
A second side surface connected to the other end of the first main surface and the other end of the second main surface;
Including
The first side surface and the second side surface are inclined with respect to the opposing direction,
Physical quantity sensor characterized by In claim 3,
The notch portion is a concave portion recessed from at least one of the first main surface side or the second main surface side of the beam portion.
Physical quantity sensor characterized by In claim 4,
A plurality of the recesses are provided, and the plurality of recesses are separated from each other,
Physical quantity sensor characterized by In claim 3,
The notch portion is provided in a connection region between the first main surface and the second main surface of the beam portion, and the first side surface and the second side surface, and includes a curved surface portion having a curved shape.
Physical quantity sensor characterized by In claim 6,
A plurality of the curved surface portions are provided, and the plurality of curved surface portions are separated from each other,
Physical quantity sensor characterized by In any one of claims 3 to 7,
The notch portion is provided in a part of the longitudinal shape of the beam portion.
Physical quantity sensor characterized by In any one of claims 6 to 8,
The notched portion is a processing-altered layer,
Physical quantity sensor characterized by In any one of claims 1 to 9,
The physical quantity sensor is an angular velocity. A physical quantity sensor according to claim 10,
An acceleration sensor,
Including complex sensors. A physical quantity sensor according to claim 10,
An acceleration sensor,
A control unit that controls the physical quantity sensor and the acceleration sensor;
, An inertial measurement unit. A physical quantity sensor according to any one of claims 1 to 10;
A case containing the physical quantity sensor;
A processing unit housed in the case and processing output data from the physical quantity sensor;
A display unit housed in the case;
A translucent cover closing the opening of the case;
including,
Portable electronic devices. In claim 13,
Including satellite positioning systems,
A portable electronic device that measures the movement distance and movement trajectory of the user. A physical quantity sensor according to any one of claims 1 to 10;
A control unit that performs control based on a detection signal output from the physical quantity sensor;
Equipped with an electronic device. A physical quantity sensor according to any one of claims 1 to 10;
An attitude control unit that controls an attitude based on a detection signal output from the physical quantity sensor;
Equipped with a mobile. In claim 16,
Including at least one of an engine system, a brake system, and a keyless entry system,
The mobile station, wherein the attitude control unit controls the system based on the detection signal. A step of preparing a substrate;
A fixed part fixed to the substrate, a fixed electrode part provided on the substrate, a drive part, a mass part connected to the drive part and displaceable in the drive direction of the drive part, and fixed Forming a movable portion facing the electrode portion and movable in the opposite direction, and an elastic portion connecting the mass portion and the fixed portion;
A first processing step of processing the elastic portion and forming notches in line symmetry with respect to a line segment passing through the center of gravity of the mass portion along the drive direction in plan view;
The elastic portion is further processed based on the processing result in the first processing step, and in addition to the notch portion, the second notch is axisymmetrically with respect to a line segment passing through the center of gravity of the mass portion. A second processing step of forming a portion;
A method of manufacturing a physical quantity sensor, comprising: In claim 18,
The elastic portion has a serpentine shape, and includes a plurality of beam portions and a connecting portion that connects the beam portions so as to turn back.
In the first processing step, the notch portion is formed in a part of the beam portion.
A method of manufacturing a physical quantity sensor characterized by In claim 18 or 19,
The notch portion is formed by irradiating the elastic portion with laser light or etching the elastic portion.
A method of manufacturing a physical quantity sensor characterized by

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