JP2019109125A - Measurement device, laser marking device, and measurement method - Google Patents

Abstract

To easily specify each bright spot in an object generated by two laser beams.SOLUTION: The measurement device includes a first irradiation unit for irradiating the object with a first laser light, a second irradiation unit for irradiating the object with the second laser light, an imaging unit for generating an image including a first bright point as a bright spot of the first laser light in the object and a second bright point as a bright spot of the second laser light in the object, and a measurement unit for measuring the position of the object on the basis of the image generated by the imaging unit. A surface normal to the first laser light and another surface normal to the second laser light are not parallel to each other, and the first irradiation unit and the second irradiation unit are provided so that the first laser light and the second laser light cannot cross each other at a point.SELECTED DRAWING: Figure 1

Description

  One embodiment of the present invention relates to a measurement device and the like using two laser beams.

  There is a method of irradiating an object with two laser beams and measuring the position of the object based on the appearance of the bright spot of the laser beam on the object. Such a measurement method is disclosed, for example, in Patent Document 1 and the like.

JP 2014-134475 A

  There are cases in which bright spots of two laser beams emitted to an object are imaged, and the position information of the object is measured using position information of each bright spot in the imaged image. In such a case, it may be required to specify which laser light causes each bright spot in the image. There is a need for a technique for easily identifying each bright spot on an object generated by two laser beams.

  The present invention adopts the following means in order to solve the above-mentioned problems and the like. In the following description, in order to facilitate understanding of the invention, reference numerals and the like in the drawings are appended in parentheses, but each component of the present invention is not limited to the appended ones. It should be interpreted broadly to the extent that the vendor can understand technically.

One means of the present invention is
A first irradiation unit (11A) for irradiating the object (33) with the first laser beam (LA);
A second irradiation unit (11B) for irradiating the object (33) with a second laser beam (LB);
At a first bright spot (SA) which is a bright spot of the first laser beam (LA) in the object (33) and at a bright spot of the second laser beam (LB) in the object (33) An imaging unit (12) that generates an image including a certain second bright spot (SB);
A measuring unit (13) for measuring the position of the object (33) based on the image generated by the imaging unit (12);
The plane normal to the first laser light (LA) and the plane normal to the second laser light (LB) are not parallel to each other,
The first irradiation unit (11A) and the second irradiation unit (11B) are provided such that the first laser light (LA) and the second laser light (LB) can not intersect at a point. Be
It is a measuring device (1).

  According to the measuring apparatus of the above configuration, the range in which the two bright spots in the image can be positioned does not overlap regardless of the position of the object, so for example, the range in which the first bright spot can be located and the second bright spot The two bright spots in the image can be easily associated with the first bright spot and the second bright spot, respectively, by imaging the range where the image can be positioned to be in the upper half and the lower half of the image.

In the above measuring apparatus, preferably
The second bright spot (SB) occurs in a region not overlapping the region where the first bright spot (SA) is generated.

  According to the measuring apparatus having the above configuration, it can be easily specified from the area including the bright spot whether the bright spot in the image is the first bright spot or the second bright spot.

Another means of the invention is
A first irradiation unit (11A) for irradiating the object (33) with the first laser beam (LA);
A second irradiation unit (11B) for irradiating the object (33) with a second laser beam (LB);
A control unit (64) for irradiating the first laser light (LA) and the second laser light (LB) one by one;
At a timing when the first laser beam (LA) is irradiated, a first image including a first bright spot (SA) which is a bright spot of the first laser beam (LA) in the object (33) is selected. A second bright spot (SB), which is a bright spot of the second laser beam (LB) in the object (33), at a timing when the second laser beam (LB) is generated. An imaging unit (12) that generates two images;
A measuring unit (63) for measuring the position of the object (33) based on the first image and the second image generated by the imaging unit (12);
The plane normal to the first laser light (LA) and the plane normal to the second laser light (LB) are not parallel to each other.
It is a measuring device (51).

  According to the measuring apparatus having the above configuration, it can be easily specified from the timing at which the image is generated, which one of the first and second luminescent points is one of the bright spots in the image. It is possible to easily identify each bright spot on the object generated by the two laser beams without performing complicated processing such as storing in a memory the range in which each bright spot in the image may be located.

In the above measuring apparatus, preferably
The object (33) has the first illumination more than the proximity position which is the position of the object (33) in a state where the first bright spot (SA) and the second bright spot (SB) are closest to each other. It may be located at both a position close to the part (11A) and a position farther from the first irradiation part (11A) than the close position.

  According to the measuring apparatus having the above-described configuration, for example, in the case where the imageable unit and the measurable range of the position of the object are the same, the object is located only on the first irradiation unit side with respect to the proximity position Or the angle of incidence of the first laser beam on the object and the second laser beam on the object, as compared to the case where the object is located only on the opposite side of the first irradiation section with respect to the proximity position. Since the incident angle can be increased, the measurement accuracy of the position of the object can be enhanced. Also, for example, with respect to each position as a reference, by using the position in the image of the first bright spot and the position in the image of the second bright spot when the object is in the proximity position, Based on the position of the first bright spot and the position of the second bright spot in the captured image, the target is positioned on the first irradiation unit side with respect to the close position, or It can be easily specified whether it is located on the opposite side of the 1 irradiation part.

In the above measuring apparatus, preferably
The aspect of the first bright spot (SA) and the aspect of the second bright spot (SB) are the same.

  When the aspect of the first bright spot and the aspect of the second bright spot are the same, it is difficult to identify which of the first bright spot and the second bright spot the bright spot is from the aspect of the bright spot in the image However, according to the measuring device having the above configuration, the bright spot in the image can be identified, for example, from the range in which the bright spot can be located and the timing at which the image including the bright spot is generated. Therefore, it is not necessary to design the irradiation part which produces the luminescent point from which an aspect differs separately, and it becomes possible to design an apparatus comparatively easily.

In the above measuring apparatus, preferably
The measuring unit (13, 63) is configured to select the object based on a position of the first bright spot (SA) and a position of the second bright spot (SB) in the image captured by the imaging unit (12). Calculate the position of (33).

  According to the measuring apparatus having the above configuration, for example, information indicating the relationship between the positional relationship between the first and second bright spots and the position of the object, and the information between the first and second bright spots in the image. By preparing information indicating the relationship between the distance and the position of the object, the object is either on the side closer to the first irradiation unit with respect to the proximity position or on the opposite side of the first irradiation unit relative to the proximity position The position of the object can be correctly calculated together with the determination as to whether it is positioned.

In the above measuring apparatus, preferably
The first irradiation unit (11A) and the second irradiation unit (11B) are provided such that the first laser light (LA) and the second laser light (LB) can intersect at a point. .

  According to the measuring apparatus having the above configuration, each of the first bright spot and the second bright spot is separate even when the object is located in the vicinity where the first laser beam and the second laser beam intersect at a point. Since it is included in the image, it can be easily specified whether each bright spot is the first bright spot or the second bright spot.

Also, another means of the present invention is
The measuring device (1) above,
And (d) a marking unit (32) for performing laser marking on the object (33) based on the result measured by the measuring device (1).
It is a laser marking device (31).

  According to the measuring apparatus having the above configuration, for example, two bright spots in an image can be easily associated with the first bright spot and the second bright spot, respectively. Thereby, since the position of the object can be measured correctly, for example, even when the object is provided with a step, the condensing position of the laser beam for laser marking is properly adjusted based on the measurement result, Good marking patterns can be formed.

Also, another means of the present invention is
The above measuring device (51),
And (d) a marking unit (32) for performing laser marking on the object (33) based on the result measured by the measuring device (51).
It is a laser marking device (81).

  According to the measuring apparatus having the above configuration, for example, each bright spot on the object generated by the two laser beams is processed without performing complicated processing such as storing in memory the range in which each bright spot in the image may be located. It can be easily identified. Thereby, since the position of the object can be measured correctly, for example, even when the object is provided with a step, the condensing position of the laser beam for laser marking is properly adjusted based on the measurement result, Good marking patterns can be formed.

Also, another means of the present invention is
A first irradiation unit (11A) for irradiating the object (33) with a first laser beam (LA), and a second irradiation unit for irradiating the object (33) with a second laser beam (LB) (11B), and the measuring method in the measuring device (1),
At a first bright spot (SA) which is a bright spot of the first laser beam (LA) in the object (33) and at a bright spot of the second laser beam (LB) in the object (33) Generating an image including a second bright spot (SB);
Measuring the position of the object (33) based on the generated image.
The plane normal to the first laser light (LA) and the plane normal to the second laser light (LB) are not parallel to each other,
The first irradiation unit (11A) and the second irradiation unit (11B) are provided such that the first laser light (LA) and the second laser light (LB) can not intersect at a point. Be
It is a measurement method.

  According to the measuring apparatus of the above configuration, the range in which the two bright spots in the image can be positioned does not overlap regardless of the position of the object, so for example, the range in which the first bright spot can be located and the second bright spot The two bright spots in the image can be easily associated with the first bright spot and the second bright spot, respectively, by imaging the range where the image can be positioned to be in the upper half and the lower half of the image.

Also, another means of the present invention is
A first irradiation unit (11A) for irradiating the object (33) with a first laser beam (LA), and a second irradiation unit for irradiating the object (33) with a second laser beam (LB) (11B), and the measuring method in the measuring device (51),
Irradiating the first laser beam (LA) to generate a first image including a first bright spot (SA) which is a bright spot of the first laser beam (LA) on the object (33); When,
Irradiating the second laser beam (LB) to generate a second image including a second bright spot (SB) which is a bright spot of the second laser beam (LB) in the object (33) When,
Measuring the position of the object (33) based on the generated first image and the second image;
The plane normal to the first laser light (LA) and the plane normal to the second laser light (LB) are not parallel to each other.
It is a measurement method.

  According to the measuring apparatus having the above configuration, it can be easily specified from the timing at which the image is generated, which one of the first and second luminescent points is one of the bright spots in the image. It is possible to easily identify each bright spot on the object generated by the two laser beams without performing complicated processing such as storing in a memory the range in which each bright spot in the image may be located.

FIG. 1 is a view showing the configuration of the laser marking device of the first embodiment. FIG. 2 is a view showing an example of an image generated by the camera of the first embodiment. FIG. 3 is a view showing an example of an image generated by the camera of the first embodiment. FIG. 4 is a view showing an example of an image generated by the camera of the first embodiment. FIG. 5 is a flowchart showing a marking process in the laser marking device of the first embodiment. FIG. 6 is a view showing the configuration of the laser marking device of the second embodiment. FIG. 7 is a diagram illustrating an example of a first image generated by the camera of the second embodiment. FIG. 8 is a view showing an example of a second image generated by the camera of the second embodiment. FIG. 9 is a view showing an example of a combined image combined by the measurement unit of the second embodiment. FIG. 10 is a flowchart showing a marking process in the laser marking device of the second embodiment. FIG. 11 is a diagram for explaining the measurement method of the comparative example. FIG. 12 is a diagram showing an image captured by the measurement method of the comparative example shown in FIG. FIG. 13 is a diagram for explaining the measurement method of the comparative example. FIG. 14 is a diagram for explaining the measurement method of the comparative example. FIG. 15 is a view showing an image captured by the measurement method of the comparative example shown in FIG. FIG. 16 is a view showing an image captured by the measurement method of the comparative example shown in FIG.

Embodiments according to the present invention will be described according to the following configuration. However, the embodiments described below are merely examples of the present invention, and the technical scope of the present invention is not to be interpreted in a limited manner. In the drawings, the same components are denoted by the same reference numerals, and the description thereof may be omitted.
1. Embodiment 1
(1) Configuration example of laser marking device (2) Operation example (3) Summary 2. Embodiment 2
(1) Configuration example of laser marking device (2) Operation example (3) Comparative example (4) Summary 3. Supplementary items

<1. Embodiment 1>
<(1) Configuration Example of Laser Marking Device>
One feature of the measuring apparatus of the first embodiment is that the object is irradiated with two laser beams so that they can not cross each other at points.

  Embodiments of the present invention will be described with reference to the drawings. FIG. 1 is a view showing the configuration of the laser marking device of the first embodiment. As shown in FIG. 1, the laser marking device 31 of Embodiment 1 is configured to include the measuring device 1 and the marking unit 32. The measuring apparatus 1 includes a laser light source 11A, a laser light source 11B, a camera 12, and a measuring unit 13. In the present embodiment, the laser marking device 31 marks the object 33 using laser light of a marking laser (not shown).

  In detail, when performing laser marking, marking is performed on the object 33 by focusing a laser for marking on the surface of the object 33. For example, if there is no level difference on the surface of the marking object, the distance between the marking laser and the surface can be easily kept constant while marking. That is, during marking, a laser for marking is focused on the surface, so that good marking is performed.

  As shown in FIG. 1, when there is a step on the surface of the object 33, the distance between the marking laser and the surface of the object 33 (hereinafter referred to as the measurement target surface 33A) changes. In order to focus the marking laser on the measurement target surface 33A, the measurement of the position of the measurement target surface 33A is required. Even if the marking object 33 does not have a step, the height of the object 33 varies and the distance between the marking laser and the object changes. It may be necessary to measure the position. Here, the object 33 is, for example, a product having a level difference on the surface, and an identifier for securing traceability, specifically, a micro QR code, a logo, and the like are engraved.

<Laser Light Sources 11A and 11B>
The laser light source 11A irradiates the object 33 with the laser light LA. The laser light source 11B irradiates the object 33 with the laser light LB. Specifically, the laser light sources 11A and 11B are fixed by the holding portion (not shown) such that the plane normal to the laser light LA and the plane normal to the laser light LB are nonparallel. . The laser light sources 11A and 11B are one specific example of the "irradiation part" in the present invention. In the present embodiment, the laser light sources 11A and 11B are semiconductor lasers, and are fixed by a holding unit (not shown) so that the laser lights LA and LB can not cross at points. Here, “the laser beams LA and LB can not cross at a point” means that the laser beams LA and LB can not cross at one point when the object 33 is not provided. In the measurement target surface 33A of the object 33, the bright spots SA and the bright spots SB are respectively generated by the laser beams LA and LB. The laser light sources 11A and 11B may be lasers of types other than semiconductor lasers.

<Definition>
In the present specification, the position of the object 33 in the state in which the bright spot SA1 and the bright spot SB1 are closest to each other is defined as the “close position”. In the state where the object 33 exists in the proximity position, a plane including the bright spots SA and SB and having the same magnitude of the incident angle α of the laser beam LA and the magnitude of the incident angle α of the laser beam LB is referred to It is defined as "surface SS". A normal which is a normal to the reference surface SS and passes through the middle point of the line connecting the bright point SA and the bright point SB is defined as a "mid point normal NV". The laser light sources 11A and 11B side with respect to the reference plane SS will be referred to as "light source side". Further, the opposite side of the laser light sources 11A and 11B with respect to the reference surface SS is referred to as "non-light source side". In the example of FIG. 1, the measurement target surface 33A and the reference surface SS are parallel. The measurement target surface 33A is located on the light source side. Further, the laser beam LB is located on the back side with respect to the laser beam LA.

<Aspect of bright spot>
In the present embodiment, the aspect of the bright spot SA and the aspect of the bright spot SB are the same. Specifically, the laser light sources 11A and 11B are, for example, lasers of the same type. Further, the distance between the laser light source 11A and the bright spot SA and the distance between the laser light source 11B and the bright spot SB are substantially the same. Therefore, for the bright spot SA and the bright spot SB, for example, the aspect such as the size, the brightness, the shape, and the color is the same.

<Position of Target 33>
The object 33 can be located at a position closer to the laser light sources 11A and 11B than the proximity position and at a position farther from the laser light sources 11A and 11B than the proximity position. In the present embodiment, the measurement target surface 33A is located on the reference surface SS in the state where the object 33 is in the proximity position. That is, the measurement target surface 33A can be located at both the position closer to the laser light sources 11A and 11B than the reference surface SS and the position farther from the laser light sources 11A and 11B than the reference surface SS.

<Camera 12>
The camera 12 generates an image including the bright spot SA and the bright spot SB. The camera 12 of the present embodiment is a specific example of the “imaging unit” in the present invention. In the present embodiment, the camera 12 has an imaging element capable of capturing a black and white or color image, receives an imaging command from the measurement unit 13, and measures the measurement target surface 33A of the object 33 according to the received imaging command. Capture and generate an image.

  The camera 12 is provided on the light source side such that the optical axis is along the midpoint normal NV. The camera 12 has, for example, a telecentric optical system, and the imageable range FR does not change with the distance from the camera 12. The measurable range MR is a range in which the bright spots SA and SB fall within the imaging range FR.

  2 to 4 each show an example of an image generated by the camera of the first embodiment. Images ISA and ISB are images of bright point SA and bright point SB, respectively. FIG. 2 shows an image when the measurement target surface 33A is present at the position on the reference surface SS. In the state shown in FIG. 2, an axis from the image ISA to the image ISB is defined as a Y axis. Also, a vector directed from the image ISA to the image ISB is defined as a measurement vector MV. In FIG. 2, the measurement vector MV is parallel to the Y axis.

  FIG. 3 shows an image in the case where the surface to be measured 33A is located at a distance Dv from the reference surface SS on the laser light sources 11A and 11B side. In FIG. 3, the angle of the measurement vector MV with respect to the Y axis (hereinafter, also referred to as a target angle) is + β when the clockwise direction is positive toward the image. Here, β is positive.

  FIG. 4 shows an image in the case where the surface to be measured 33A is located at a distance Dv on the opposite side of the laser light sources 11A and 11B with respect to the reference surface SS. In FIG. 4, the target angle is −β.

  As shown in FIGS. 2 to 4, in the captured image, the aspect of the bright point SA and the bright point SB is substantially the same. In the present embodiment, the bright spot SB occurs in a region not overlapping the region where the bright spot SA occurs. In this example, the images ISA and ISB are included in the lower half and the upper half of the image, respectively, regardless of the position of the measurement surface 33A. Thus, in the image, the range in which the image ISA is located and the range in which the image ISB is different are different, so even if the aspect of the bright spot is the same, the laser light of the generation source of each bright spot is easily identified. be able to. In addition, it is possible to specify whether the measurement target surface 33A is located on the light source side or the non-light source side based on the angle formed by the vector from the image ISA to the image ISB and the Y axis. The camera 12 outputs image information including the generated image to the measuring unit 13.

<Measurement unit 13>
As shown in FIGS. 1 to 4, the measuring unit 13 measures the position of the measurement target surface 33 </ b> A based on the image generated by the camera 12. Specifically, the measuring unit 13 calculates the position of the measurement target surface 33A based on the positions of the bright spot SA and the bright spot SB in the image captured by the camera 12. In the present embodiment, the measurement unit 13 calculates the position of the measurement target surface 33A based on the positional relationship between the bright spot SA and the bright spot SB. Specifically, the measurement unit 13 receives a measurement instruction from the marking unit 32 and outputs an imaging instruction to the camera 12 according to the received measurement instruction. The measuring unit 13 receives from the camera 12 image information which is a response to the imaging command, and calculates the distance Dv based on the received image information.

  In detail, the measuring unit 13 calculates, for example, the target angle based on the received image information. More specifically, the measuring unit 13 calculates, for example, a curved surface indicating the correspondence between pixel coordinates and pixel brightness around the image ISA in the image, and calculates the coordinates of the calculated peak of the curved surface as the coordinates of the image ISA. Get as. The measuring unit 13 similarly acquires coordinates for the image ISB in the image. The measurement unit 13 calculates the target angle based on the coordinates of the acquired image ISA and the coordinates of the image ISB. In addition, when calculating the above-mentioned curved surface, the measurement unit 13 may thin pixels by using every other pixel, every second pixel, or the like.

  The measuring unit 13 determines whether the measurement target surface 33A is located on the laser light source 11A side or the opposite side of the laser light source 11A with respect to the reference surface SS based on the calculated positive or negative of the target angle.

  The measuring unit 13 may use, for example, positions in the images of the images ISA and ISB in the case where the target 33 is in the proximity position, as a reference instead of the target angle. In the arrangement shown in FIG. 1, measurement unit 13 determines the positions in images of images ISA and ISB when measurement target surface 33A is located on reference surface SS, ie, the positions in the images of images ISA and ISB shown in FIG. Is used as a standard. In this case, for example, when the image ISA is located on the left side of the reference image ISA in the captured image, the measurement unit 13 determines that the measurement target surface 33A is located on the light source side. On the other hand, if the image ISA is located on the right side with respect to the image ISA as the reference in the captured image, for example, the measurement unit 13 determines that the measurement target surface 33A is located on the non-light source side.

  The measurement unit 13 calculates the distance Dv between the measurement target surface 33A and the reference surface SS based on the calculated target angle. Specifically, the measuring unit 13 holds, for example, a formula indicating the correspondence between the target angle and the distance Dv, and calculates the distance Dv from the target angle using the formula. The measurement unit 13 may use, for example, a table indicating the correspondence between a plurality of target angles and the plurality of distances Dv, instead of the above equation.

  If the measurement unit 13 determines that the measurement target surface 33A is located on the laser light source 11A side with respect to the reference surface SS, the light source side is taken from the intersection point of the reference surface SS and the midpoint normal NV along the midpoint normal NV. The position separated by the distance Dv is calculated as the position of the dot MD on the measurement target surface 33A. On the other hand, when the measurement unit 13 determines that the measurement target surface 33A is located on the opposite side of the laser light source 11A with respect to the reference surface SS, the distance Dv is away from the intersection toward the non-light source side along the midpoint normal NV. The position is calculated as the position of the dot MD on the measurement target surface 33A. The measuring unit 13 transmits distance information including the calculation result to the marking unit 32.

<Marking unit 32>
As shown in FIG. 1, the marking unit 32 performs laser marking on the measurement target surface 33 </ b> A of the object 33 based on the result of measurement by the measurement unit 13 in the measurement apparatus 1. In the present embodiment, the marking unit 32 performs marking in dot units, for example, on the measurement target surface 33A. Specifically, for example, when marking the target dot MD on the measurement target surface 33A, the marking unit 32 transmits a measurement instruction to the measurement unit 13, and receives distance information as a response to the measurement instruction from the measurement unit 13. Do. The marking unit 32 acquires the distance between the laser for marking and the measurement target surface 33A based on the received distance information, and adjusts the focusing position of the laser for marking based on the acquired distance. Then, the marking unit 32 oscillates a laser for marking to mark the dot MD. In addition, the marking by the marking part 32 may employ | adopt the conventional various methods.

<(2) Operation example>
Next, the marking process in the laser marking apparatus of the present embodiment will be described with reference to FIG. FIG. 5 is a flowchart showing a marking process in the laser marking device of the first embodiment.

<S102>
It is assumed that the marking unit 32 transmits a measurement command to the measurement unit 13 when the marking unit 32 marks the target dot MD. The measurement unit 13 receives a measurement instruction from the marking unit 32 and outputs an imaging instruction to the camera 12 according to the received measurement instruction. Further, the laser light sources 11A and 11B respectively irradiate the laser lights LA and LB onto the measurement target surface 33A (S102).

<S104>
When the camera 12 receives an imaging command from the measurement unit 13, the camera 12 images the measurement target surface 33A of the object 33 to generate an image, and outputs image information including the generated image to the measurement unit 13 (S104).

<S106>
Next, when receiving the image information from the camera 12, the measuring unit 13 analyzes the image included in the received image information, and acquires the positions of the bright spots SA and SB in the image (S106).

<S108>
Next, the measurement unit 13 calculates the target angle based on the positions of the bright spots SA and SB in the acquired image (S108).

<S110 to S114>
Next, when the target angle is positive as shown in FIG. 3 (YES in S110), measurement unit 13 assumes that measurement target surface 33A of target object 33 is located on the side of laser light sources 11A and 11B with respect to reference surface SS. It determines (S112).

  On the other hand, as shown in FIG. 4, when the target angle is negative (NO in S110), the measurement unit 13 sets the measurement target surface 33A of the target 33 to the opposite side of the laser light sources 11A and 11B with respect to the reference surface SS. It is determined that it is located (S114).

<S116>
Next, the measuring unit 13 calculates the distance Dv from the calculated target angle using, for example, an expression indicating the correspondence between the target angle and the distance Dv (S116).

<S118>
Next, the measurement unit 13 calculates the position of the measurement target surface 33A on the object 33 based on the calculated distance Dv and the determination result, and transmits distance information including the calculation result to the marking unit 32 (S118).

<S120>
Next, when the marking unit 32 receives the distance information from the measuring unit 13, the marking unit 32 adjusts the focusing position of the marking laser based on the received distance information, and oscillates the marking laser to generate the target dot MD. Mark it (S120).

<S122>
Next, when the marking of the target dot MD is completed by the marking unit 32, the marking process in the laser marking device 31 ends (S122).

<(3) Summary>
According to the measuring apparatus of the above configuration, the range in which the two bright spots in the image can be positioned does not overlap regardless of the position of the object 33. For example, the range in which the bright spot SA can be located and the bright spot SB The two bright spots in the image can be easily corresponded to the bright spot SA and the bright spot SB, respectively, by imaging the range which can be located in the upper half and the lower half of the image.

  In the measuring apparatus having the above configuration, the bright spot SB occurs in a region not overlapping the region where the bright spot SA occurs, so the bright spot in the image is either the bright spot SA or the bright spot SB, the bright spot It can be easily identified from the area where the point is included.

  In the measurement apparatus of the above configuration, the object 33 can be located at a position closer to the laser light source 11A than the proximity position and at a position farther from the laser light source 11A than the proximity position. Thereby, for example, in the case where the image captureable range FR by the camera 12 and the measurable range MR of the position of the object 33 are the same, the object 33 is located only on the laser light source 11A side with respect to the proximity position, or The incident angle of the laser beam LA on the object 33 and the incident angle of the laser beam LB on the object 33 may be increased as compared with the case where the position 33 is located only on the opposite side of the laser light source 11A with respect to the proximity position. Since it is possible, the measurement accuracy of the position of the object 33 can be enhanced. Also, for example, when the object 33 is in the proximity position, imaging with respect to each position as a reference is performed by using the position in the image of the bright point SA and the position in the image of the bright point SB as a reference. Based on the position of the bright spot SA and the position of the bright spot SB in the captured image, the object 33 is located on the laser light source 11A side with respect to the proximity position, or the object 33 is located for the proximity position. It can be easily specified whether it is located on the opposite side.

  In the measuring apparatus having the above configuration, since the aspect of the bright spot SA and the aspect of the bright spot SB are the same, it is specified from the aspect of the bright spot in the image whether the bright spot is the bright spot SA or the bright spot SB. Although it is difficult to do, bright spots in the image can be specified from the range in which the bright spots can be located. Therefore, it is possible to design the measuring apparatus relatively easily, without the need to individually design the laser light sources for generating the bright spots having different aspects.

  In the measurement apparatus having the above configuration, the measurement unit 13 calculates the position of the object 33 based on the position of the bright spot SA and the position of the bright spot SB in the image captured by the camera 12. By preparing information indicating the relationship between the positional relationship of SB and the position of the object 33, either of the object 33 on the laser light source 11A side with respect to the proximity position and the opposite side of the laser light source 11A with respect to the proximity position The position of the object 33 can be correctly calculated in combination with the determination of whether the object 33 is positioned at the position.

<2. Embodiment 2>
Next, a second embodiment of the present invention will be described. The measuring apparatus according to the second embodiment is characterized in that two laser beams are irradiated to the object 33 at different timings, and the position of the object 33 is measured based on the two images captured at each timing. One of the

  FIG. 6 is a view showing the configuration of the laser marking device of the second embodiment. The present embodiment is different from the first embodiment in that the measurement unit 13 is replaced by a measurement unit 63 and further includes a control unit 64, and the other configuration is the same. Hereinafter, points in which the present embodiment is different from the contents of the first embodiment will be specifically described.

<(1) Configuration Example of Laser Marking Device>
As shown in FIG. 6, the laser marking device 81 of the present embodiment is configured to include the marking unit 32 and the measuring device 51. The measuring device 51 includes a laser light source 11A, a laser light source 11B, a camera 12, a measuring unit 63, and a control unit 64.

<Laser Light Sources 11A and 11B>
In the present embodiment, the laser light sources 11A and 11B are provided such that the laser lights LA and LB can intersect. Here, “the laser beams LA and LB can cross at a point” means that the laser beams LA and LB can cross at one point when the object 33 is not provided. Specifically, the laser beams LA and LB intersect at an angle γ at the intersection point CS when the object 33 is not provided. A plane having a bisector bisecting the angle γ as a normal and including the intersection point CS is defined as a “regular reflection surface MRS”. In the second embodiment, the side of the laser light sources 11A and 11B with respect to the regular reflection surface MRS is the “light source side”. Further, the opposite side of the laser light sources 11A and 11B to the regular reflection surface MRS is referred to as "non-light source side". In the example of FIG. 6, the camera 12 is provided on the light source side such that the optical axis is along the bisector Bis. The measurement target surface 33A and the regular reflection surface MRS are parallel. The measurement target surface 33A is located on the light source side.

<Control unit 64>
The control unit 64 causes the laser light sources 11A and 11B to emit the laser lights LA and LB at different timings. In the present embodiment, for example, upon receiving a measurement instruction from the marking unit 32, the control unit 64 sets the period PA and the period PB. Here, the periods PA and PB do not overlap. The control unit 64 causes the laser light source 11A to emit the laser light LA during the period PA, and outputs the on signal SA to the measurement unit 63. Then, the control unit 64 causes the laser light source 11B to emit the laser light LB in the period PB, and outputs the on signal SB to the measurement unit 63.

<Camera 12 and Measurement Unit 63>
The camera 12 generates a first image including a bright spot SA which is a bright spot of the laser light LA on the object 33 at the timing when the laser light LA is emitted, and at the timing when the laser light LB is radiated, the object A second image including a bright spot SB which is a bright spot of the laser light LB at 33 is generated.

  FIG. 7 is a diagram illustrating an example of a first image generated by the camera of the second embodiment. FIG. 8 is a view showing an example of a second image generated by the camera of the second embodiment. FIGS. 7 and 8 show images when the measurement target surface 33A is located at a distance Dv from the regular reflection surface MRS on the laser light sources 11A and 11B.

  For example, after receiving the measurement instruction from the marking unit 32, the measurement unit 63 outputs an imaging instruction to the camera 12 when receiving the on signal SA from the control unit 64. The camera 12 receives an imaging command from the measurement unit 63, captures a first image (see FIG. 7) including the bright spot SA according to the received imaging command, and measures first image information including the captured first image Output to section 63. Measurement unit 63 receives the first image information from camera 12 and holds the received first image information.

  Then, upon receiving the on signal SB from the control unit 64, the measuring unit 63 outputs an imaging command to the camera 12. The camera 12 receives an imaging command from the measurement unit 63, captures a second image (see FIG. 8) including the bright spot SB according to the received imaging command, and measures second image information including the captured second image Output to section 63. The measuring unit 63 receives the second image information from the camera 12 and holds the received second image information. As shown in FIGS. 7 and 8, the image ISA is included in the first image, and the image ISB is included in the second image, so that it is possible to specify the laser light from which each bright spot is generated.

  FIG. 9 is a view showing an example of a combined image combined by the measurement unit of the second embodiment. The measuring unit 63 measures the position of the object 33 based on the first image and the second image generated by the camera 12. In the present embodiment, the measuring unit 63 generates a composite image obtained by combining the first image and the second image based on the first image information and the second image information.

  Measurement unit 63 determines, for example, on the side of laser light source 11A or the opposite side of laser light source 11A with respect to specular reflection surface MRS, based on the order of arrangement of images ISA and ISB in the composite image. judge.

  The measuring unit 63 also calculates, for example, the distance IDh between the image ISA and the ISB in the composite image, based on the composite image. The measurement unit 63 calculates the distance Dv between the measurement target surface 33A and the regular reflection surface MRS based on the calculated distance IDh. Specifically, the distance Dh between the bright spots SA and SB on the measurement target surface 33A changes in accordance with the distance Dv between the regular reflection surface MRS and the measurement target surface 33A (see FIG. 6). Therefore, it is possible to calculate the distance Dv based on the distance IDh in the image.

  In the present embodiment, the measuring unit 63 holds, for example, an equation indicating the correspondence between the distance IDh and the distance Dv, and calculates the distance Dv from the distance IDh using the equation. The measuring unit 63 may use, for example, a table indicating the correspondence between the plurality of distances IDh and the plurality of distances Dv, instead of the above equation.

  When it is determined that the measurement target surface 33A is located on the laser light source 11A side with respect to the regular reflection surface MRS, the measurement unit 63 measures a position at a distance Dv away from the intersection point CS along the bisector Bis to the light source It is calculated as the position of the dot MD on the surface 33A. On the other hand, when the measuring unit 63 determines that the measurement target surface 33A is located on the opposite side of the laser light source 11A with respect to the regular reflection surface MRS, the distance Dv is separated from the intersection CS to the non-light source side along the bisector Bis. The calculated position is calculated as the position of the dot MD on the measurement target surface 33A. The measuring unit 63 transmits distance information including the calculation result to the marking unit 32.

<(2) Operation example>
Next, the marking process in the laser marking device of the present embodiment will be described with reference to FIG. FIG. 10 is a flowchart showing a marking process in the laser marking device of the second embodiment.

<S202>
In a case where the marking unit 32 marks the target dot MD, it is assumed that the marking unit 32 transmits a measurement instruction to the measurement unit 63 and the control unit 64. When receiving the measurement instruction from the marking unit 32, the control unit 64 sets a period PA and a period PB (S202).

<S204>
Next, the control unit 64 causes the laser light source 11A to emit the laser light LA during the period PA, and outputs the on signal SA to the measurement unit 63 (S204).

<S206>
Next, after receiving the measurement instruction from the marking unit 32, the measurement unit 63 receives the ON signal SA from the control unit 64, outputs an imaging instruction to the camera 12, and outputs the first image information as a response to the imaging instruction. It receives from the camera 12 and holds it (S206).

<S208>
Next, the control unit 64 causes the laser light source 11A to stop the irradiation of the laser light LA at the end timing of the period PA (S208).

<S210>
Next, the control unit 64 causes the laser light source 11B to emit the laser light LB in the period PB, and outputs the on signal SB to the measurement unit 63 (S210).

<S212>
Next, upon receiving the on signal SB from the control unit 64, the measuring unit 63 outputs an imaging command to the camera 12, receives the second image information as a response to the imaging command from the camera 12, and holds the received second image information (S212).

<S214>
Next, the control unit 64 causes the laser light source 11B to stop the irradiation of the laser light LB at the end timing of the period PB (S214).

<S216>
Next, the measurement unit 63 generates a composite image based on the first image information and the second image information (S216).

<S218 to S222>
Next, as shown in FIG. 9, when the image ISA is positioned on the left side with respect to the image ISB as shown in FIG. 9 (YES in S218), the measurement target surface 33A of the object 33 is specularly reflected. It is determined that the surface MRS is located on the laser light sources 11A and 11B side (S220).

  On the other hand, unlike the case shown in FIG. 9, when the image ISA is positioned on the right side with respect to the image ISB in the composite image (NO in S218), the measurement unit 63 measures specular surface 33A of the object 33 It is determined that it is located on the opposite side of the laser light sources 11A and 11B with respect to the surface MRS (S222).

<S224>
Next, the measurement unit 63 analyzes the composite image, and calculates a distance IDh between two images in the image (S224).

<S226>
Next, the measuring unit 63 calculates the distance Dv from the calculated distance IDh using, for example, an expression indicating the correspondence between the distance IDh and the distance Dv (S226).

<S228>
Next, the measuring unit 63 calculates the position of the measurement target surface 33A on the object 33 based on the calculated distance Dv and the determination result, and transmits distance information including the calculation result to the marking unit 32 (S228).

<S230>
Next, when the marking unit 32 receives the distance information from the measuring unit 63, the marking unit 32 adjusts the focusing position of the marking laser based on the received distance information, oscillates the marking laser, and generates the target dot MD. Mark it (S230).

<S232>
Next, when the marking of the target dot MD is completed by the marking unit 32, the marking process in the laser marking device 81 ends (S232).

  Note that each process in the above flowchart may be replaced as long as the operation is not affected. For example, the order of the processing of S214 and S216 in the flowchart may be switched.

<(3) Comparative example>
<Case where the measurable range is on the laser light source side with respect to the intersection point CS>
FIG. 11 is a diagram for explaining the measurement method of the comparative example. FIG. 12 is a diagram showing an image captured by the measurement method of the comparative example shown in FIG. FIG. 11 shows a comparative example of a method of measuring the position of the measurement target surface 33A, and the method will be described below.

  In this example, the laser light sources 11A and 11B are provided such that the laser light LA and LB can cross at a point. The laser beams LA and LB intersect at an angle γ at the intersection point CS when the object 33 is not provided. The camera 12 is arranged as in the case shown in FIG. The measurement target surface 33A and the regular reflection surface MRS are parallel. Further, the measurement target surface 33A is limited to be located on the light source side. The characteristics such as the wavelengths of the laser beams LA and LB, the beam diameter, the beam cross-sectional shape, and the intensity are substantially the same.

  The laser beams LA and SB respectively generate bright points SA1 and SB1 on the measurement target surface 33A. As shown in FIG. 12, the image captured by the camera 12 includes the image ISA1 of the bright spot SA1 on the measurement target surface 33A and the image ISB1 of the bright spot SB1 on the measurement target surface 33A. As described above, since the characteristics of the laser beams LA and LB are substantially the same, aspects such as the size, brightness, shape, and color of the images ISA1 and ISB1 are substantially the same.

<Case where the measurable range is on the opposite side of the laser light source with respect to the intersection point CS>
FIG. 13 is a diagram for explaining the measurement method of the comparative example. In the measurement method shown in FIG. 13, the measurement target surface 33A is limited to be located on the non-light source side. The laser beams LA and LB respectively generate bright points SA2 and SB2 on the measurement target surface 33A. The other configuration is the same as the measurement method shown in FIG.

<Case in which the intersection CS is included in the measurable range>
FIG. 14 is a diagram for explaining the measurement method of the comparative example. FIG. 15 and FIG. 16 are diagrams showing images captured by the measurement method of the comparative example shown in FIG.

  For example, when the intersection angle of the laser beams LA and LB is increased, the rate of change of the distance Dh with respect to the distance Dv can be increased, so that the measurement accuracy of the position of the measurement target surface 33A can be improved. However, for example, when the angle γ of the crossing angle is increased in the arrangement shown in FIGS. 11 and 13, the measurable range MR is reduced because the imaging range FR is fixed. On the other hand, as shown in FIG. 14, the arrangement in which the intersection point CS is included in the measurable range MR makes it possible to suppress the reduction of the measurable range MR while making the crossing angle larger.

  In the measurement method shown in FIG. 14, it is required to specify which of the light source side and the non-light source side the measurement target surface is located. However, if the measurement target surface exists at a position S1 away from the specular reflection surface MRS by the distance Dv on the light source side, and the measurement target surface at a position S2 away from the regular reflection surface MRS by a distance Dv on the non-light source side It is difficult to distinguish it from its presence.

  Specifically, when the surface to be measured is located at position S1, bright spots SA3 and SB3 are respectively generated by laser beams LA and LB. In this case, as shown in FIG. 15, the image captured by the camera 12 includes the image ISA3 of the bright point SA3 and the image ISB3 of the bright point SB3.

  On the other hand, when the surface to be measured is located at the position S2, bright spots SA4 and SB4 are respectively generated by the laser beams LA and LB. In this case, as shown in FIG. 16, the image captured by the camera 12 includes the image ISA4 of the bright spot SA4 and the image ISB4 of the bright spot SB4.

  Since the image shown in FIG. 15 and the image shown in FIG. 16 are substantially the same, it is difficult to specify from these images whether the measurement target surface is located on the light source side or the non-light source side.

  On the other hand, for example, a method using an arrangement in which the laser beams LA and LB can not cross at a point or an arrangement in which the optical axis of the camera 12 is offset from the bisector Bis can be considered. In such an arrangement, an image when the measurement target surface is located at the position S1 and an image when the measurement target surface is located at the position S2 can be different, so the measurement target surface is the light source side and the non-light source It becomes possible to specify which side of the side. In detail, for example, range information including a range in which the bright spot by the laser light LA can be positioned in the image and a range in which the bright spot by the laser beam LB can be positioned in the image is stored in the memory. Then, based on the range information, it is determined whether the bright spot in the image is a bright spot by the laser light LA or a bright spot by the laser light LAB. However, since such processing is complicated, a technique for easily determining whether the bright spot in the image is the bright spot by the laser light LA or the bright spot by the laser light LAB is required.

<(4) Summary>
According to the measuring apparatus having the above configuration, it is possible to easily identify which of the bright spot SA and the bright spot SB the single bright spot shown in the image is from the timing at which the image is generated. It is possible to easily identify each bright spot on the object generated by the two laser beams without performing complicated processing such as storing in memory the range in which each bright spot can be located.

  In the measurement apparatus of the above configuration, the object 33 can be located at a position closer to the laser light source 11A than the proximity position and at a position farther from the laser light source 11A than the proximity position. Thereby, for example, in the case where the image captureable range FR by the camera 12 and the measurable range MR of the position of the object 33 are the same, the object 33 is located only on the laser light source 11A side with respect to the proximity position, or The incident angle of the laser beam LA on the object 33 and the incident angle of the laser beam LB on the object 33 may be increased as compared with the case where the position 33 is located only on the opposite side of the laser light source 11A with respect to the proximity position. Since it is possible, the measurement accuracy of the position of the object 33 can be enhanced. Also, for example, when the object 33 is in the proximity position, each of the positions of the bright spot SA in the first image and the position of the bright spot SB in the second image are used as references. Whether the object 33 is located on the laser light source 11A side with respect to the proximity position, based on the position of the bright spot SA in the captured first image and the position of the bright spot SB in the captured second image Alternatively, it can be easily specified whether the object 33 is located on the opposite side of the laser light source 11A with respect to the proximity position.

  In the measuring apparatus having the above configuration, since the aspect of the bright spot SA and the aspect of the bright spot SB are the same, it is specified from the aspect of the bright spot in the image whether the bright spot is the bright spot SA or the bright spot SB. Although it is difficult to do, bright spots in the image can be identified from the timing when the image including the bright spots is generated. Therefore, it is possible to design the measuring apparatus relatively easily, without the need to individually design the laser light sources for generating the bright spots having different aspects.

  In the measurement apparatus having the above configuration, the measurement unit 63 calculates the position of the object 33 based on the position of the bright spot SA in the first image captured by the camera 12 and the position of the bright spot SB in the second image, By preparing the information indicating the relationship between the distance IDh between the bright spot SA and the bright spot SB in the composite image and the position of the target 33, the target 33 is closer to the laser light source 11A and closer to the proximity position. The position of the object 33 can be correctly calculated together with the determination on which side of the laser light source 11A the laser light source 11A is located.

  In the measuring apparatus having the above configuration, the laser light source 11A and the laser light source 11B are provided such that the laser light LA and the laser light LB can cross at a point, so the target is in the vicinity where the laser light LA and the laser light LB cross at a point Even when the object 33 is located, each of the bright spot SA and the bright spot SB is included in a separate image, so that it is possible to easily identify which bright spot is the bright spot SA or bright spot SB. it can.

<3. Additional Notes>
The specific description of the embodiment of the present invention has been described above. In the above description, the description is merely an embodiment, and the scope of the present invention is not limited to the one embodiment, and can be broadly interpreted to a range that can be grasped by those skilled in the art.

  Although the laser light sources 11A and 11B have been described as one specific example of the irradiation unit in the measurement apparatus of the first and second embodiments, the irradiation unit may be configured to irradiate the object 33 with laser light, for example, a laser light source It may be a mirror that reflects the laser light from the light source to irradiate the object 33, and an exit of an optical fiber.

  In the measurement device of the first embodiment, it is described that the camera 12 is provided so that the optical axis is along the midpoint normal NV, but the camera 12 is provided at a position where the optical axis deviates from the midpoint normal NV May be configured.

  In the measurement apparatus of the second embodiment, it is described that the camera 12 is provided so that the optical axis is along the bisector Bis, but the camera 12 is provided at a position where the optical axis deviates from the bisector Bis. May be configured.

  Further, in the measurement apparatus of the second embodiment, the configuration in which the laser beams LA and LB can cross at points is described, but the configuration may be such that the laser beams LA and LB can not cross at points.

  Further, in the measurement apparatus of the first and second embodiments, the object 33 is located at both the position closer to the laser light sources 11A and 11B than the close position and the position farther from the laser light sources 11A and 11B than the close position. In the configuration described above, the object 33 is positioned at only one of the position closer to the laser light sources 11A and 11B than the proximity position and the position farther from the laser light sources 11A and 11B than the proximity position. It may be

  Further, in the measurement apparatus of the second embodiment, the configuration in which each of the laser light sources 11A and 11B is turned on and off has been described. For example, the laser light LA and the laser light sources 11A and 11B are provided with shutters. Each of the LBs may be configured to pass through and be shielded.

  The measuring device and the laser marking device of the present invention are suitably applied to, for example, marking of an object having an uneven surface.

DESCRIPTION OF SYMBOLS 1 ... measurement apparatus 11A, 11B ... laser light source 12 ... camera 13 ... measurement part 31 ... laser marking apparatus 32 ... marking part 33 ... object 33A ... measurement object surface 51 ... measurement apparatus 63 ... measurement part 64 ... control part 81 ... laser part Marking device Bis ... bisector CS ... intersection point FR ... imaging possible range ISA, ISB ... image LA, LB ... laser beam MD ... dot MR ... measurable range MRS ... regular reflection surface MV ... measurement vector NV ... middle point normal SA, SB ... bright spot SS ... reference plane

Claims (10)

A first irradiation unit that irradiates the object with a first laser beam;
A second irradiation unit that irradiates the target with a second laser beam;
An imaging unit that generates an image including a first bright spot that is a bright spot of the first laser beam on the object, and a second bright spot that is a bright spot of the second laser beam on the object;
A measuring unit that measures the position of the object based on the image generated by the imaging unit;
The plane normal to the first laser beam and the plane normal to the second laser beam are nonparallel.
The first irradiation unit and the second irradiation unit are provided such that the first laser light and the second laser light can not intersect at a point.
measuring device. The second bright spot occurs in a region not overlapping the region where the first bright spot occurs.
The measuring device according to claim 1. A first irradiation unit that irradiates the object with a first laser beam;
A second irradiation unit that irradiates the target with a second laser beam;
A control unit configured to emit the first laser beam and the second laser beam one by one;
At the timing when the first laser beam is irradiated, a first image including a first bright spot which is a bright spot of the first laser beam on the object is generated, and the second laser beam is radiated. An imaging unit that generates a second image including a second bright spot that is a bright spot of the second laser beam on the object at the timing of
A measuring unit that measures the position of the object based on the first image and the second image generated by the imaging unit;
The plane normal to the first laser beam and the plane normal to the second laser beam are nonparallel.
measuring device. The object is positioned closer to the first irradiation portion than a proximity position which is a position of the object in a state where the first bright spot and the second bright spot are closest to each other, and more than the proximity position It may be located on both sides of the first irradiation unit,
The measuring device according to any one of claims 1 to 3. The aspect of the first bright spot and the aspect of the second bright spot are the same.
The measuring device according to any one of claims 1 to 4. The measurement unit calculates the position of the object based on the position of the first bright spot and the position of the second bright spot in the image captured by the imaging unit.
The measuring device according to any one of claims 1 to 5. The first irradiation unit and the second irradiation unit are provided such that the first laser light and the second laser light can intersect at a point.
The measuring device according to claim 3. The measuring device according to any one of claims 1 to 6,
And a marking unit that performs laser marking on an object based on the result measured by the measuring device.
Laser marking device. A measuring method in a measuring apparatus, comprising: a first irradiation unit that irradiates a target with a first laser beam; and a second irradiation unit that applies a second laser beam to the target,
Generating an image including a first bright spot, which is a bright spot of the first laser beam on the object, and a second bright spot, which is a bright spot of the second laser beam on the object;
Measuring the position of the object based on the generated image.
The plane normal to the first laser beam and the plane normal to the second laser beam are nonparallel.
The first irradiation unit and the second irradiation unit are provided such that the first laser light and the second laser light can not intersect at a point.
Measuring method. A measuring method in a measuring apparatus, comprising: a first irradiation unit that irradiates a target with a first laser beam; and a second irradiation unit that applies a second laser beam to the target,
Irradiating the first laser beam to generate a first image including a first bright spot which is a bright spot of the first laser beam on the object;
Irradiating the second laser beam to generate a second image including a second bright spot which is a bright spot of the second laser beam on the object;
Measuring the position of the object based on the generated first image and the second image.
The plane normal to the first laser beam and the plane normal to the second laser beam are nonparallel.
Measuring method.

Images