JP2019095406A - Displacement meter - Google Patents

Abstract

To provide a displacement meter capable of digitally output the measurement results of the displacement, not affected by the color and reflectance of the surface of the object to be measured with high accuracy and low cost.SOLUTION: A displacement meter includes a measuring device 20 having a displaceable tip ball 21 by swinging in contact with the object to be measured by a lever type mechanism at the tip of the shaft member 22, a surface member 25 having a surface that can be displaced in conjunction with the displacement of the tip ball, and a displacement measuring unit for measuring the displacement of the surface of the surface member, and is equipped with a light source for irradiating the light beam to the surface, an objective lens 32 for focusing the light beam provided between the light source and the surface, a light receiving unit for receiving the reflected light reflected on the surface by the light beam that passes through the objective lens irradiated by the light source, and a displacement calculating unit for calculating the displacement of the surface based on the beam diameter of the reflected light reflected by the light beam on the surface using the amount of the light received by the light receiving unit.SELECTED DRAWING: Figure 3

Description

  The present invention relates to a displacement meter that detects displacement of a probe that is in contact with an object to be measured.

  Conventionally, as a high-precision displacement meter, a non-contact type laser displacement meter that performs measurement without touching a measuring element with an object to be measured is generally known (see Patent Document 1). In this laser displacement meter, there is a problem that the measurement result of the displacement is easily influenced by the color, the reflectance, and the like of the surface of the object to be measured to which the laser light is irradiated. Recently, devices that are not affected by the color or reflectance of the surface of the object to be measured have been studied, but processing has become complicated and high cost can not be avoided.

  On the other hand, a ladder-type dial gauge is widely and generally used as an inexpensive displacement gauge which is not affected by the color of the surface of the object to be measured, the reflectance or the like (see Patent Document 2). Since this ladder type dial gauge is a contact type in which the measuring element is brought into contact with the object to be measured for measurement, the measurement result of the displacement is stabilized without being affected by the color or reflectance of the surface of the object to be measured. Because it consists only of classical mechanical elements such as gears, it can be done at low cost.

JP 2005-221451 A JP 10-89902 A

  However, in the conventional ladder-type dial gauge as described in Patent Document 2, there is a limit to high precision because it is a configuration of only classical mechanical elements such as gears, and the displacement measurement results are digitally output. There is a problem that it can not be incorporated into the recent Internet of Things (IoT) and lacks versatility.

  The present invention has been made to solve the problems as described above, and is not affected by the color or reflectance of the surface of the object to be measured, and digital output of displacement measurement results with high accuracy and low cost. Aims to provide a displacement gauge that can be

In order to solve the above-mentioned problems, the present invention relates to a measuring element having a tip ball which is in contact with an object to be measured and which is displaceable in a lever-type manner at a tip of a shaft member and displacement of the tip ball. The displacement amount of the tip sphere according to the displacement of the surface measured by the displacement measuring unit for measuring the displacement of the surface of the surface member having the surface displaced in conjunction with the surface member, the displacement of the surface is displayed And a display unit, and the displacement measurement unit is a light source for irradiating a light beam to the surface, an objective lens provided between the light source and the surface to condense the light beam. And a light receiving unit for receiving the light reflected by the surface, the light beam emitted by the light source and transmitted through the objective lens, and the light amount received by the light receiving unit to reflect the light beam on the surface Displacement of the surface based on the diameter of the reflected light It has a displacement calculating unit that calculates, and characterized in that.
According to the present invention, it is possible to provide a displacement meter capable of digitally outputting the measurement result of displacement with high precision and at low cost without being affected by the color or reflectance of the surface of the object to be measured. .

The present invention is also a displacement meter, characterized in that it has an output unit for outputting the displacement amount of the tip ball according to the displacement of the surface measured by the displacement measurement unit.
According to the present invention, the displacement amount of the tip ball can be output by the output unit, and may be used in an external device.

The present invention is further characterized in that the displacement meter further comprises a pinhole which is disposed in front of the light receiving section and allows the light beam to reflect the reflected light from the surface.
According to the present invention, it is possible to detect only the light in the vicinity of the focal point by narrowing the reflected light by the pinhole, and it may be possible to measure the displacement of the object based on the received light with high accuracy.

The present invention is also the displacement meter, wherein the surface is displaced at a position between the objective lens and the focal point of the objective lens, or at a position farther from the objective lens than the focal point of the objective lens. It is characterized by
According to the present invention, the range of displacement of the surface is either a position between the objective lens and the focal point of the objective lens or a position farther from the objective lens than the focal point of the objective lens. In some cases, the change direction of the beam diameter of the reflected light due to the displacement of the measurement object is consistent, and the displacement of the object to be measured may be easily measured based on the received light.

The present invention is the displacement meter, wherein the pinhole is a first pinhole, the light receiving portion is a first light receiving portion, and the displacement measuring portion is a second pinhole. And a second light receiving unit for receiving light passing through the second pinhole, the second pinhole receiving the light from the light source and passing through the objective lens. And the first pinhole is disposed at a position between the focal point of the objective lens and the first light receiving section, and the second pinhole The pinhole is disposed at a position farther from the second light receiving unit than the focal point of the objective lens, or the first pinhole is larger than the focal point of the objective lens. Disposed at a position away from the second pin hole and the second pin hole The displacement calculating unit is disposed at a position between the focal point of the objective lens and the second light receiving unit, and the displacement calculating unit receives the amount of light received by the first light receiving unit and the second light receiving unit. The displacement of the surface is calculated based on the amount of light.
According to the present invention, by calculating the displacement of the surface based on the amount of light received by the first light receiving portion and the amount of light received by the second light receiving portion, the range of displacement of the surface is the objective lens and the objective lens. Even at a position between the lens and the focal point of the lens, or even at a position farther from the objective lens than the focal point of the objective lens, it may be possible to measure the displacement of the object based on the received light. .

The present invention is also the displacement meter, wherein the surface is a flat surface, and the reflectance at a predetermined position of the surface is substantially equal to the reflectance at another position of the surface.
According to the present invention, as a surface member, for example, a mirror surface in which the surface has a reflectance at a predetermined position on the surface and a reflectance at another position on the surface is substantially equal. In some cases, the displacement of the object to be measured can be measured with a simple configuration.
Further, according to the present invention, the displacement of the tip sphere may be able to be accurately calculated by the reflectance of the surface being approximately equal between the predetermined position and another position.

The present invention is the displacement meter, wherein the tip ball is located at the force point of the forceps, the surface member is located at the action point of the forceps, and the distance between the force point of the forceps and the fulcrum is the forceps It is characterized in that it is longer than the distance from the fulcrum to the point of action.
According to the present invention, the displacement of the tip sphere can be brought into a range that can be measured by a displacement measurement unit using a light beam by means of a forceps, and the displacement of the tip sphere may be able to be accurately calculated.

The present invention is the displacement gauge, wherein the tip ball can swing in a plus direction which is a predetermined direction with respect to the origin position, and in a minus direction which is the opposite direction across the plus position and the origin position. And has an urging unit that holds the tip ball at the home position when no external force is applied to the tip ball, and the displacement calculating unit is interlocked with the displacement of the tip ball in the positive direction. The displacement of the surface and the displacement of the tip ball in the negative direction are calculated.
According to the present invention, since the distal end ball is held at the origin position by the biasing unit, there are cases where it is possible to accurately calculate the displacement of the distal end ball in each case.

The present invention is the displacement meter, wherein the display section has a bar graph display section for displaying the displacement amount of the tip sphere according to the displacement of the surface measured by the displacement measurement section in a bar graph. It is characterized by
According to the present invention, since the amount of displacement of the tip ball is displayed as a bar graph by the bar graph display unit, there are cases where it is possible to provide a user-friendly displacement meter that is easy for the operator to view.

Further, the present invention is a displacement gauge, comprising an input unit for receiving an input by the operator, and the display unit is configured to indicate the position of the tip ball when the input by the operator is received by the input unit. It is characterized in that it is displayed in association with the center position of the graph.
According to the present invention, when the operation by the operator is accepted by the input unit, the current position of the tip ball is displayed in association with the center position of the bar graph, thereby displacing the tip ball from the current position. It is effective when you want to measure, etc., and it may be possible to provide a user-friendly displacement meter that is easy for the operator to see.

Further, the present invention is a displacement meter, wherein a measuring element having a tip ball at the tip of a shaft member that is in contact with an object to be measured and swings in a lever-type manner and is interlocked with the displacement of the tip ball. Outputting a displacement amount of the tip sphere according to the displacement of the surface measured by the displacement measuring unit for measuring the displacement of the surface of the surface member having a surface to be displaced, the displacement of the surface of the surface member A displacement meter having an output unit, wherein the displacement measurement unit is a light source for irradiating a light beam to the surface, and an objective lens provided between the light source and the surface for condensing the light beam A light receiving unit for receiving the light reflected by the surface, the light beam emitted by the light source and transmitted through the objective lens, and the surface based on the beam diameter of the reflected light using the light amount received by the light receiving unit; And a displacement calculation unit that calculates the displacement of And wherein the door.
According to the present invention, it is possible to provide a displacement meter capable of digitally outputting the measurement result of displacement with high precision and at low cost without being affected by the color or reflectance of the surface of the object to be measured. .

According to the present invention, it is possible to provide a displacement meter capable of digitally outputting the measurement result of displacement with high precision and at low cost without being affected by the color or reflectance of the surface of the object to be measured. .
Problems, configurations, and effects other than those described above will be clarified by the description of the embodiments below.

It is a perspective view which shows the displacement meter which concerns on Example 1 of this invention. It is a figure which expands and shows the button 13 and the display part 14 which were provided in the upper surface part 12 of case 11 shown in FIG. It is a figure which shows the outline of a structure which concerns on the positioning of the displacement meter 10 shown in FIG. It is a figure which shows the relationship between the shaft member 22 shown in FIG. 3, and the shaft member 24, Comprising: It is a figure which shows the example different from FIG. 3, (a) shows the case where tip ball 21 exists in an origin position. FIG. 4B is a view showing a case where the tip ball 21 is displaced downward from the origin position by δ. It is a figure explaining the relationship between the position of the surface member 25 and the light quantity light-received by the light receiving element 34, Comprising: (a) is a figure which shows the case where the position of the surface member 25 is the farthest from the focus of the objective lens 32, b) is a view showing the case where the position of the surface member 25 is closer to (a) and farther than (c) from the focal point of the objective lens 32, and (c) shows the position of the surface member 25 of the objective lens 32. It is a figure which shows the case closest to a focus. FIG. 2 is a block diagram showing a configuration relating to the electrical components in the first embodiment. It is a figure which shows the flow of the signal which concerns on the displacement measurement in the structure which concerns on the electrical component shown in FIG. FIG. 7 is a diagram showing an outline of a configuration related to positioning of a displacement gauge in Example 2.

  Hereinafter, the displacement gauge according to the present invention will be described in detail with reference to the drawings.

  FIG. 1 is a perspective view showing a displacement gauge according to a first embodiment of the present invention. The displacement gauge 10 has a case 11 containing a configuration including an optical system 50 described later with reference to FIG. 3, and a probe 20 having a tip ball 21 at the tip which is one end of the shaft member 22. The optical system 50 measures the displacement of the tip ball 21 to enable digital output. The tip ball 21 may be, for example, a ruby ball or an iron ball. The tip ball 21 mechanically contacts an object to be measured, and the tip ball 21 is displaced due to unevenness or the like of the object to be measured. The displacement gauge 10 can detect the unevenness or the like of the object to be measured by measuring the displacement of the tip ball 21.

  The case 11 is a hollow case, and on the front side thereof has an opening 16 which is an opening leading to the hollow in the case 11. The probe 20 extends from the opening 16 of the case 11 to the outside. The shaft member 22 of the probe 20 has a pivot 23 at the other end (the end opposite to the tip ball 21). The rotating shaft 15 passes through the shaft support portion 23, and the shaft member 22 is rotatably provided with the rotating shaft 15 as a rotating shaft. The opening 16 is larger than the pivotable range of the shaft member 22 in the pivoting direction of the shaft member 22.

  The probe 20 is biased by an elastic member (for example, a wire spring) (not shown), and by this biasing force, the tip ball 21 of the probe 20 is positioned at the home position when no external force is applied. The tip ball 21 can rotate in both clockwise and counterclockwise directions from this origin position. Here, the clockwise direction from the origin position is a plus direction which is a predetermined direction with respect to the origin position, and the counterclockwise direction from the origin position is a plus direction and a minus direction which is the opposite direction across the origin position. The tip ball 21 can swing in both positive and negative directions.

  A button 13 and a display unit 14 are provided on the top surface 12 of the case 11. FIG. 2 is an enlarged view of the button 13 and the display unit 14 provided on the upper surface 12 of the case 11 shown in FIG.

  The button 13 is a switch operated by the operator, and is used as a power switch and as a zero set button. The button 13 is used, for example, as a button for inputting an instruction to turn on / off the power of the displacement meter 10 when there is a long press operation (an operation to continue pressing for a predetermined time or more). When there is an operation), it is used as a button for inputting a zero set instruction. Here, the zero set is an operation of setting the display position on the display unit 14 to the zero position (the center position of the bar graph display described later), which will be described in detail later.

  The display unit 14 includes thirteen lamps 14a to 14m and performs bargraph display with these lamps 14a to 14m. Each of the lamps 14a to 14m is configured by, for example, an LED. The measurement result of the displacement of the tip ball 21 by the displacement meter 10 is displayed by lighting any one of the 13 lamps 14a to 14m. The lamp 14a is a lamp that lights in blue, the lamps 14b, 14c, 14h and 14i are lamps that lights in green, and the lamps 14d, 14e, 14f, 14j, 14k and 14l are lamps that are lit in yellow, the lamp 14g and 14m are lamps which light up in red.

  Further, the lamp 14a is disposed at the center position of the bar graph, and the lamps 14b, 14c, 14d, 14e, 14f, 14g are disposed in the direction away from the lamp 14a corresponding to the displacement of the tip ball 21 in the positive direction. The lamps 14h, 14i, 14j, 14k, 14l and 14m are disposed in order in the direction away from the lamp 14a in a direction opposite to the lamp 14b corresponding to the displacement of the tip ball 21 in the negative direction.

  When the operator performs a long press operation on the button 13, the power of the displacement meter 10 is turned on, and the lamp 14a at the center position of the bar graph is lit. As the tip ball 21 is displaced in the positive direction, the lamps that light up according to the displacement amount change from the lamp 14a to the lamps 14b, 14c, 14d, 14e, 14f, 14g in order. As the tip ball 21 is displaced in the negative direction, the lamps that light up according to the displacement amount change from the lamp 14a to the lamps 14h, 14i, 14j, 14k, 14l, 14m in order.

  In a state where the tip ball 21 is displaced in the positive or negative direction from the origin position and the lamp corresponding to the current position of the tip ball 21 is lit (here, the lamp 14 c is lit), the operator When the button 13 is operated normally, the lamp 14c which has been lit is turned off, the lamp 14a at the central position of the bar graph is lit, and the current position of the tip ball 21 is associated with the central position of the bar graph. . This operation is referred to as zero set. After this, when the tip ball 21 is displaced in the positive direction from the current position, the lamps that light up according to the displacement amount are in order from the lamp 14a to the lamps 14b, 14c, 14d, 14e , 14f, and 14g, and when the tip ball 21 is displaced in the negative direction from the current position, the lamps that light up according to the displacement amount from the lamp 14a sequentially from the lamps 14h, 14i, 14j, 14k, 14l It changes to 14m.

  FIG. 3 is a diagram showing an outline of the configuration relating to the positioning of the displacement gauge 10 shown in FIG. The probe 20 of the displacement gauge 10 has a tip ball 21 at the tip of the shaft member 22. At the rear end of the shaft member 22, a shaft support 23 is provided. Further, the shaft support portion 23 is provided at the front end of the shaft member 24, and the surface member 25 is provided at the rear end of the shaft member 24.

  The tip ball 21, the shaft member 22, the shaft support 23 and the shaft member 24 are integrated, and the shaft support 23 integrally supports the rotary shaft 15 shown in FIG. The member 22, the bearing portion 23 and the shaft member 24 can swing around the rotation shaft 15. The tip ball 21, the shaft member 22, the shaft support portion 23, and the shaft member 24 may be separate parts and may be fixed to each other, or may be one part integrally molded. In the present embodiment, the tip ball 21 is located at the force point of the forceps, the shaft support 23 is located at the fulcrum of the forceps, and the plane member 25 is located at the action point of the forceps.

  Since displacement detectable by the optical system 50 is less than several hundred μm at most, in this embodiment, displacement of the tip ball 21 is machined using a forceps type arm (shaft member 22, shaft support 23 and shaft member 24). Shrink. Specifically, the positional relationship such that the displacement of the tip ball 21 (actual measurement range, about several mm) can be reduced to the displacement (less than several hundred μm) of the surface member 25 detectable by the optical system 50, for example, Assuming that the distance from the tip ball 21 to the bearing 23 is 10, the distance from the bearing 23 to the plane member 25 is 1, and the distance from the force point of the forceps to the fulcrum is from the distance from the fulcrum to the action point It also has long.

  Although FIG. 3 illustrates the forceps in the case where the shaft member 22 and the shaft member 24 are disposed on a straight line, the present invention is not limited to this. The forceps in the case where the shaft member 22 and the shaft member 24 are not arranged on a straight line will be described below with reference to FIG.

  FIG. 4 is a view showing the relationship between the shaft member 22 and the shaft member 24 shown in FIG. 3, and is a view showing an example different from FIG. FIG. 4 (a) is a view showing the case where the tip ball 21 is at the origin position, and FIG. 4 (b) is a view showing the case where the tip ball 21 is displaced downward from the origin position by δ. Here, the distance from the tip ball 21 to the shaft support 23 (the length of the shaft member 22) is L, and the distance from the shaft support 23 to the surface member 25 (the length of the shaft member 24) is r. The angle between the shaft member 22 when the tip ball 21 is at the origin position and the shaft member 22 when the tip ball 21 is displaced downward from the origin position by δ is θ, and the tip ball 21 is at the origin position Let 変 位 be the displacement of the surface member 25 when it is displaced by δ downward from.

ただし、θが十分小さければ、数２であらわされる。

At this time, the displacement δ of the tip ball 21 can be expressed by equation 1.

However, if θ is sufficiently small, it is expressed by Equation 2.

ただし、θが十分小さければ、数４であらわされる。

At this time, the displacement 変 位 of the surface member 25 can be expressed by Equation 3.

However, if θ is sufficiently small, it is expressed by Equation 4.

  According to the structures of the shaft member 22 and the shaft member 24 shown in FIG. 4, the ladder ratio is L: r, as can be understood with reference to Equation 4.

  Returning to the explanation of FIG. 3, the surface member 25 is fixed to the rear end of the shaft member 24. An optical system 50 is provided on the side to which one surface of the surface member 25 (the surface facing upward in FIG. 3 and the surface facing the optical system 50) is directed. When the tip ball 21 is displaced, the surface of the surface member 25 facing the optical system 50 is also displaced in conjunction with the displacement. Hereinafter, the detection of the displacement of the surface member 25 by the optical system 50 will be described in detail.

  The optical system 50 includes, in order of optical path, a light emitting element 30 that emits laser light, a beam splitter 31 that reflects the emitted light that is emitted from the light emitting element 30 and that allows the return light reflected by the surface member 25 to pass And an objective lens 32 for condensing the laser light reflected by 31 on the surface of the surface member 25 facing the optical system 50, and a pinhole 33 for narrowing the return light reflected by the surface member 25 and transmitted through the beam splitter 31. And a light receiving element 34 for receiving the return light that has passed through the pinhole 33.

  A surface of the surface member 25 facing the optical system 50 is a flat surface, and the reflectance at a predetermined position of the surface and the reflectance at another position of the surface are almost equal, for example, a mirror surface It is desirable that the surface has a high reflectance. The optical system 50 measures the displacement of the surface member 25 based on the return light from the surface of the surface 25 facing the optical system 50 received by the light receiving element 34.

  The optical system 50 applies a confocal optical system. In the confocal optical system, when the laser beam passing through the objective lens 32 focuses on the surface of the surface member 25, the return light reflected on the surface of the surface member 25 and passing through the objective lens 32 is focused in the vicinity of the pinhole 33. An optical system that connects According to this confocal optical system, when the plane member 25 is displaced, the beam diameter of the return light reaching the light receiving element 34 also changes. In this embodiment, the displacement of the surface member 25 is measured based on the beam diameter of this return light. Specifically, a pinhole 33 is provided, and the amount of light passing through without being blocked by the pinhole 33 is determined depending on the size of the beam diameter of the return light reaching the pinhole 33. The displacement of the surface member 25 is measured using the change in the amount of light received at 34.

  For example, when the surface member 25 is positioned at the focal point of the objective lens 32, the light amount received by the light receiving element 34 is the largest, and as the surface member 25 moves away from the focal point of the objective lens 32, the light amount received by the light receiving element 34 gradually Decrease. The direction in which the surface member 25 separates from the focal point of the objective lens 32 may be the direction in which the surface member 25 approaches the objective lens 32 or the direction in which the surface member 25 separates from the objective lens 32. However, if the amount of displacement from the focal point of the objective lens 32 is the same in the case where the surface member 25 is displaced in the direction approaching the objective lens 32 and in the case where it is displaced in the direction away from the objective lens 32 The amount of light received is the same, and it is unclear whether it is approaching the objective lens 32 or away from the objective lens 32. Therefore, in the present embodiment, the restricting portion 40 is provided, and the displaceable range of the surface member 25 is determined in advance.

  The restricting portion 40 shown in FIG. 3 is a protrusion fixed to the case 11 and is a mechanical stopper. When the surface member 25 at a position farther from the objective lens 32 than the focal point of the objective lens 32 tries to come closer to the objective lens 32 than the focal point of the objective lens 32, the restricting portion 40 abuts on the surface member 25. The displaceable range of the member 25 is restricted. When the surface member 25 at a position closer to the objective lens 32 than the focal point of the objective lens 32 tries to move away from the objective lens 32 than the focal point of the objective lens 32, the restricting portion 40 abuts on the surface member 25. A configuration in which the displaceable range of the surface member 25 is restricted may be adopted. In this case, it is preferable to provide another restricting portion (not shown) for preventing the surface member 25 from coming into contact with the objective lens 32 so that the surface member 25 does not damage the objective lens 32.

  FIG. 5 is a view for explaining the relationship between the position of the surface member 25 and the amount of light received by the light receiving element 34. 5A shows the case where the position of the surface member 25 is farthest from the focal point of the objective lens 32, and FIG. 5B shows the position of the surface member 25 from the focal point of the objective lens 32. 5C is a diagram showing the case where the position of the surface member 25 is closest to the focal point of the objective lens 32. In FIG. 5 (a), 5 (b) and 5 (c), the top row shows the output voltage of the light receiving element 34 corresponding to the amount of light received by the light receiving element 34. As shown in FIG.

  In FIG. 5A, the beam diameter of the return light reaching the pinhole 33 is the largest, so the amount of light blocked by the pinhole 33 is the largest, and the amount of light received by the light receiving element 34 is the smallest. In FIG. 5B, the beam diameter of the return light reaching the pinhole 33 is smaller than that in FIG. 5A and larger than that in FIG. 5C. Therefore, the amount of light received by the light receiving element 34 is as shown in FIG. More) and less than FIG. 5 (c). In FIG. 5C, the beam diameter of the return light reaching the pinhole 33 is the smallest, so most of the return light passes through the pinhole 33 and the amount of light received by the light receiving element 34 is the largest. As described above, since there is a fixed relationship between the amount of light received by the light receiving element 34 and the position of the surface member 25, according to the displacement meter 10, the amount of light received by the light receiving element 34 is The displacement can be measured.

  As described above, according to the embodiment described above, the optical system 50 constantly measures the displacement of the surface member 25 to always obtain a stable measurement result, and the unevenness of the object to be measured is mechanically measured by the tip ball 21. Because it measures in contact, it is not affected by the color or reflectance of the object to be measured.

  Further, according to the present embodiment, the displacement (the actual measurement range) of the tip ball 21 is converted into a small displacement by the forceps ratio (for example, 10: 1) according to the position of the pivot 23. Even when the optical system 50 having a narrow detection range is used, the amount of displacement that can be measured can be reduced.

  FIG. 6 is a block diagram showing a configuration according to the electrical component in the first embodiment. The displacement meter 10 is required to operate the displacement meter 10, a microcomputer (MCU) 60 executing a software program for operating the displacement meter 10, a battery 61 serving as a power source for driving each component, and a displacement meter 10 A ROM 62, which is a non-volatile memory for storing software programs and various data, a RAM 63, which is a memory for storing various data necessary for the operation of the displacement gauge 10, and analog data of digital data from the microcomputer 60 are converted and output to the LD 67 A D / A converter 64, an A / D converter 65 that converts analog data from the PD 68 into a digital signal and outputs the digital data to the microcomputer 60, a digital interface 66 that is an interface related to external input / output, and a light emitting element LD (laser diode) 67 and PD (photodiode) ) And 68, a LED (light emitting diode) 69, and includes a switch (SW) 70, a.

  The LD 67 is the light emitting element 30 shown in FIG. 3, and the PD 68 is the light receiving element 34. The microcomputer 60 is a small-sized, low-cost, low-power-consumption microcomputer that drives the LD 67 which is the light emitting element 30 (light emitting element driving process) or detects a light receiving signal by the PD 68 which is the light receiving element 34 (light receiving signal Detection processing), processing (displacement conversion processing) for converting the detected light reception signal into displacement is executed, and the result is output. The optical system 50 shown in FIG. 3 and the light emitting element drive processing and the light reception signal detection processing by the microcomputer 60 correspond to a displacement measurement unit that measures the displacement of the surface of the surface member 25. Further, the displacement conversion process by the microcomputer 60 corresponds to a displacement calculation unit that calculates the displacement of the surface of the surface member 25.

  The SW 70 is the button 13 shown in FIG. The LED 69 is the display unit 14 shown in FIG. The digital interface 66 is an interface for transmitting the operation status of the SW 70 to the microcomputer 60, and is an interface for transmitting a display instruction (lighting instruction) from the microcomputer 60 to the LED 69.

  The digital interface 66 can also be an interface with an external device (not shown). The external device may be an input device that performs operation input to the displacement gauge 10 similar to the SW 70. In addition, the external device may be a display device that displays the measurement result by the displacement meter 10 similar to the LED 69 (for example, the state of a displacement of the tip ball 21 or an error of the displacement meter 10) It may be a storage device that stores the measurement results of the total 10. In this case, the digital interface 66 corresponds to an output unit that outputs the measurement result by the displacement gauge 10. A personal computer etc. can be used as an external device. The digital interface 66 may include a wired interface such as USB (Universal Serial Bus), or may include a wireless interface such as Wi-Fi or Bluetooth (registered trademark).

  The battery 61 is a storage battery that can be charged from the outside. Charging of the battery 61 may be wireless or wired. For example, when the digital interface 66 includes a USB, the USB may be used to charge the battery 61.

  FIG. 7 is a diagram showing the flow of signals related to displacement measurement in the configuration according to the electrical component shown in FIG. The PD 68, that is, the light receiving element 34 converts the amount of light received into a voltage value. The A / D converter 65 digitally converts the analog voltage value from the PD 68. The microcomputer 60 executes the above-mentioned displacement conversion processing based on the voltage value input from the A / D converter 65 to determine the displacement of the tip ball 21, and the result is displayed via the digital interface 66 as a display unit. Display on 14 or output to an external device.

  In the present embodiment, the displacement meter 10 outputs a displacement of the tip ball 21 which is a measurement result of the displacement meter 10 (digital interface 66), and a displacement of the tip ball 21 which is a measurement result of the displacement meter 10. However, the present invention is not limited to this, and the displacement gauge 10 includes only the output unit among the output unit and the display unit. Among the output unit and the display unit, only the display unit may be provided.

  FIG. 8 is a diagram showing an outline of a configuration related to the positioning of the displacement gauge in the second embodiment. The present embodiment includes a semiconductor laser 131, a beam splitter 133, and an objective lens 135. The semiconductor laser 131 functions as a light source. The light beam generated by the semiconductor laser 131 is irradiated to the surface M of the surface member 25 via the beam splitter 133 and the objective lens 135.

  The reflected light reflected by the surface M of the surface member 25 is incident on the objective lens 135 and then guided to the beam splitter 133 again. The present embodiment further includes a beam splitter 137 that reflects the light reflected by the surface M of the surface member 25 and reflected by the beam splitter 133 into two split lights.

  A plate 141 having a pinhole 139 is disposed in front of an imaging point P of one split light emitted through the beam splitter 137. Further, behind the imaging point Q of the other split light emitted through the beam splitter 137, a plate 145 having a pinhole 143 is disposed.

  The split light passing through the pin hole 139 of the plate 141 is received by the photodiode 147, photoelectrically converted, and converted into a voltage by the current-voltage converter 151. Further, the divided light having passed through the pin hole 143 of the plate 145 is received by the photodiode 149, photoelectrically converted, and converted into a voltage by the current-voltage converter 153.

  The signals converted into voltages by the voltage-current converters 151 and 153 are input to a difference calculator 155 such as an operational amplifier and a sum calculator 157, respectively. The difference calculator 155 calculates the difference (A−B) between the outputs of the photodiodes 147 and 149. The sum calculator 157 calculates the sum (A + B) of the outputs of the photodiodes 147 and 149.

  Further, a divider 159 is connected to the difference calculator 155 and the sum calculator 157. The divider 159 divides the output voltage of the difference calculator 155 by the output voltage of the sum calculator 157 ((A−B) / (A + B)), and outputs a focus error signal FE. The focus error signal FE is 0 when the surface M of the surface member 25 coincides with the focal position F of the objective lens 135 as shown in FIG. In addition, when the surface M of the surface member 25 is close to the focal position F of the objective lens 135, it takes a positive value, and when the surface M of the surface member 25 is far from the focal position F of the objective lens 135, it is negative. Take a value.

  In Example 1 shown in FIG. 3, the case where the plane member 25 is closer to the objective lens 32 than the focal point of the objective lens 32, and the case where the plane member 25 is farther from the objective lens 32 than the focal point of the objective lens 32. The displacement of the surface member 25 was measured separately. On the other hand, in the present embodiment, even when the surface member 25 is closer to the objective lens 135 than the focal position F of the objective lens 135, the objective lens 135 is more than the focal position F of the objective lens 135. Even if it is far from the above, the displacement of the surface member 25 can be measured without being divided. Therefore, according to the present embodiment, the measurable range of the displacement of the surface member 25 is wider than that of the first embodiment.

  In FIG. 8, a plate 141 having a pinhole 139 is disposed in front of an imaging point P of one split beam emitted via the beam splitter 137, and the other split beam emitted via the beam splitter 137. Although the plate 145 having the pinhole 143 is disposed behind the imaging point Q of the present invention, according to the present invention, a pin is placed behind the imaging point P of one split light emitted through the beam splitter 137. The plate 141 having the hole 139 may be disposed, and the plate 145 having the pinhole 143 may be disposed in front of the imaging point Q of the other split light emitted through the beam splitter 137.

  The present invention is not limited to the embodiments described above, but includes various modifications. For example, the embodiments described above are described in detail in order to explain the present invention in an easy-to-understand manner, and are not necessarily limited to those having all the configurations described. Also, part of the configuration of one embodiment can be replaced with the configuration of another embodiment, and the configuration of another embodiment can be added to the configuration of one embodiment. In addition, with respect to a part of the configuration of each embodiment, it is possible to add, delete, and replace other configurations.

  DESCRIPTION OF SYMBOLS 10 ... Displacement gauge, 11 ... Case, 12 ... Upper surface part, 13 ... Button, 14 ... Display part, 15 ... Rotational axis, 16 ... Opening part, 20 ... Measuring element, 21 ... Tip ball, 22 ... Shaft member, 23 ... Axis support portion 24 Axis member 25 Surface member 30 Light emitting element 31 Beam splitter 32 Objective lens 33 Pinhole 34 Light receiving element 40 Regulating portion 50 Optical system.

Claims (11)

A measuring element having a tip ball at the tip end of the shaft member, the tip ball being in contact with the object to be measured and being able to displace in a lever-type manner and displace;
A surface member having a surface that is displaced in conjunction with the displacement of the tip ball;
A displacement measuring unit that measures displacement of the surface of the surface member;
A display unit for displaying a displacement amount of the tip ball according to the displacement of the surface measured by the displacement measurement unit;
A displacement gauge having
The displacement measurement unit includes a light source for irradiating a light beam to the surface, an objective lens provided between the light source and the surface for condensing the light beam, and light emitted by the light source and passed through the objective lens The light receiving portion receives the light reflected by the surface, and the light amount received by the light receiving portion is used to displace the surface based on the diameter of the light reflected by the surface. And a displacement calculation unit to calculate
Displacement gauge characterized by It has an output part which outputs the amount of displacement of the above-mentioned tip ball according to displacement of the above-mentioned field measured by the above-mentioned displacement measurement part,
The displacement gauge according to claim 1, characterized in that: The light receiving unit further includes a pin hole disposed on the front surface of the light receiving unit to allow the light beam to pass reflected light reflected from the surface.
The displacement gauge according to claim 1 or 2, characterized in that: The surface is displaced at a position between the objective lens and the focal point of the objective lens, or at a position farther from the objective lens than the focal point of the objective lens.
The displacement gauge according to any one of claims 1 to 3, characterized in that. The pinhole is a first pinhole,
The light receiving unit is a first light receiving unit,
The displacement measurement unit further includes a second pinhole and a second light receiving unit that receives light passing through the second pinhole.
The second pinhole allows the light beam emitted by the light source and transmitted through the objective lens to pass the light reflected by the surface and further reflected by the predetermined surface,
The first pinhole is disposed at a position between the focal point of the objective lens and the first light receiving unit, and the second pinhole is from the second light receiving unit rather than the focal point of the objective lens. The first pinhole is disposed at a distant position, or the first pinhole is disposed at a position farther from the first light receiving portion than the focal point of the objective lens, and the second pinhole is disposed at the objective. It is disposed at a position between the focal point of the lens and the second light receiving portion,
The displacement calculation unit calculates the displacement of the surface based on the amount of light received by the first light receiving unit and the amount of light received by the second light receiving unit.
The displacement gauge according to claim 3, characterized in that. The surface is a plane, and the reflectance at a given position of the surface and the reflectance at another position of the surface are approximately equal.
The displacement gauge according to any one of claims 1 to 5, characterized in that. The tip ball is located at the force point of the forceps,
The face member is located at an action point of the forceps,
The distance from the force point to the fulcrum of the forceps is longer than the distance from the fulcrum to the action point of the forceps,
The displacement gauge according to any one of claims 1 to 6, characterized in that: The tip ball can swing in a plus direction that is a predetermined direction with respect to the origin position, and in a minus direction that is the opposite direction across the origin position with the plus direction.
It has an urging unit that holds the tip ball at the home position when no force is applied to the tip ball, and
The displacement calculation unit calculates the displacement of the surface interlocked with the displacement of the tip ball in the positive direction, and the displacement of the tip ball in the negative direction.
The displacement gauge according to any one of claims 1 to 7, characterized in that: The display unit has a bar graph display unit that displays the displacement amount of the tip sphere according to the displacement of the surface measured by the displacement measurement unit in a bar graph.
The displacement gauge according to any one of claims 1 to 8, characterized in that. Has an input unit that accepts input by the operator,
The display unit displays the position of the tip ball when the input unit receives an input from the operator in association with the center position of the bar graph.
The displacement gauge according to claim 9, characterized in that. A measuring element having a tip ball at the tip end of the shaft member, the tip ball being in contact with the object to be measured and being able to displace in a lever-type manner and displace;
A surface member having a surface that is displaced in conjunction with the displacement of the tip ball;
A displacement measuring unit that measures displacement of the surface of the surface member;
An output unit that outputs a displacement amount of the tip ball according to the displacement of the surface measured by the displacement measurement unit;
A displacement gauge having
The displacement measurement unit includes a light source for irradiating a light beam to the surface, an objective lens provided between the light source and the surface for condensing the light beam, and light emitted by the light source and passed through the objective lens The light receiving unit receives the light reflected from the surface by the light beam, and the displacement calculating unit calculates the displacement of the surface based on the beam diameter of the reflected light using the amount of light received by the light receiving unit. ,
Displacement gauge characterized by

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