JP2019090668A - Reference value acquisition device, measuring system, and reference value acquisition method - Google Patents

Abstract

To provide a reference value acquisition device with which it is possible to exactly verify or calibrate a measuring device that measures the physical quantity of a measurement object gas even when there is no standard gas available.SOLUTION: Provided is a reference value acquisition device 100 used for verifying or calibrating a measuring device that measures the physical quantity of a measurement object gas, comprising: a condition acquisition line 1 having a portion that is in contact with the measurement object gas, in which one or a plurality of condition acquisition sensors for acquiring a verification or calibration condition are provided; and a reference value acquisition line 2 connected at end point to a collector 21 in which the measurement object gas is collected or a reference measuring instrument for measuring the physical quantity of the measurement object gas, for introducing the measurement object gas having passed through the measuring device into the collector or the reference measuring instrument. The condition acquisition line or the reference value acquisition line is branched off from a gas lead-out line for leading out the measurement object gas from the measuring device, or the condition acquisition line is branched off from a gas introduction line for introducing the measurement object gas into the measuring device.SELECTED DRAWING: Figure 1

Description

  The present invention relates to the acquisition of reference values for calibration or calibration of a measuring device that measures the physical quantity of a gas to be measured that may undergo condensation or decomposition under given environmental conditions.

  For example, in a semiconductor manufacturing process, it is required to supply various kinds of gases to a film forming chamber etc. while accurately maintaining the target concentration. For this reason, a measuring device such as a concentration sensor provided in a line through which various gases flow needs to properly perform calibration or calibration in order to keep the measured value accurate.

  When calibrating a measuring device for measuring the concentration of gas, a standard gas whose concentration is adjusted to a predetermined value is introduced into the measuring device and the voltage output from the measuring device at that time The standard gas concentration value may be priced against the value etc.

  On the other hand, hydrogen peroxide gas, which is used for stronger oxidizing power in semiconductor manufacturing processes in recent years, has the property of decomposition due to heat or contact with metal, and condensation tends to occur under normal environmental conditions. (See Patent Document 1). For this reason, even if the hydrogen peroxide gas can be adjusted to a predetermined concentration, it is difficult to store the hydrogen peroxide gas for a long time with the concentration maintained, and there is no calibration standard gas in the hydrogen peroxide gas.

  Therefore, for example, in order to calibrate the measuring apparatus for measuring the concentration of the unstable measurement target gas such as hydrogen peroxide gas, the measurement target gas is generated at the time of calibration, and the measurement target gas in the same state as possible is measured. It must be measured and compared with the device and another measuring instrument that serves as a reference.

  By the way, if the conditions such as the temperature and pressure of the gas to be measured are different, the output of the measuring apparatus to be calibrated will change even if the gas of the same concentration is introduced. Therefore, instead of providing only the measuring device to be calibrated and another measuring device as a reference for the line through which the gas to be measured flows, a pressure sensor and a temperature sensor are provided on the same line to You need to know the status.

  However, if such a pressure sensor or temperature sensor is upstream of the measuring device to be calibrated or another measuring device to be a reference, the gas to be measured adheres to each sensor and condenses, and the metal constituting the sensor Dissolve on contact with In such a case, there is a possibility that the measuring device to be calibrated and the other measuring device serving as the reference may measure different concentrations of the gas to be measured, so that accurate calibration can not be performed in the first place.

Patent No. 2932072

  The present invention has been made in view of the problems as described above, and a measuring device for measuring a physical quantity of a gas to be measured which may cause condensation or decomposition under a predetermined environmental condition is accurately calibrated even in the absence of a standard gas. Or it aims at providing the reference value acquisition device which enables calibration.

  That is, the reference value acquisition device according to the present invention is a reference value acquisition device used to perform verification or calibration of a measurement device that measures the physical quantity of the measurement target gas, and has a portion in contact with the measurement target gas , A condition acquisition line at least provided with one or more condition acquisition sensors for acquiring conditions of verification or calibration, a collector for collecting the gas to be measured, or a reference measurement to measure the physical quantity of the gas to be measured And a reference value acquisition line for introducing the gas to be measured after passing through the measurement apparatus to the collector or the reference measurement apparatus, the condition acquisition line and the reference value An acquisition line is branched from a gas lead-out line that leads out the gas to be measured from the measuring device, or a condition acquisition line introduces a gas to introduce the gas to be measured into the measuring device Characterized in that it branches off from the Inn.

  Here, the verification means determining whether there is a deviation between the physical quantity of the gas to be measured indicated by the measuring apparatus and the actual value, or determining whether the deviation is within an allowable range. Further, calibration means grasping the amount of deviation between the physical quantity of the gas to be measured indicated by the measuring apparatus and the actual value, or adjusting the amount of deviation.

  If it is such, the condition acquisition line provided in the condition acquisition line is sent to the condition acquisition line, and the condition of the verification or calibration is acquired by the condition acquisition sensor, and the condition that is the premise of the calibration is satisfied or not Can understand.

  Therefore, there is no need to provide a device for measuring the physical quantity for confirming the premise of calibration in the reference value acquisition line, and condensation or decomposition due to the contact of the gas to be measured with such a device does not occur.

  Furthermore, the gas to be measured which has passed through the condition acquisition sensor provided in the condition acquisition line is not introduced into the measuring device or the collector provided in the reference value acquisition line or the reference measurement device. . Therefore, even if the gas to be measured is condensed or decomposed in the pressure sensor, the influence does not appear in the measuring device, the collector, and the reference measuring device.

  From these facts, the gas to be measured which has passed through the measuring device can be collected by the collector in almost the same state or can be measured by the reference measuring device, so even if it is an unstable gas to be measured Accurate calibration is possible.

  That is, the physical quantity indicating the state of the gas to be measured, which is the premise of the calibration, is measured by the condition acquisition line, and the physical quantity as the reference for pricing to the output of the measuring device is measured by the reference value acquisition line We can separate each one.

  If provided in the reference value acquisition line, it may cause condensation or decomposition of the gas to be measured, and by providing only in the condition acquisition line, the accuracy of the acquired reference value can be improved. As one of the typical aspect, that in which the said condition acquisition sensor is a pressure sensor which measures the pressure of measurement object gas is mentioned.

  In order to further improve the calibration accuracy by not providing any sensor for grasping the premise of calibration in the reference value acquisition line, the condition acquisition sensor measures the temperature of the gas to be measured. Any temperature sensor may be used.

  For example, even if condensation occurs due to a temperature change or the like while the measurement target gas that has passed through the measurement device flows through the reference value acquisition line, the same amount of measurement target gas as measured by the measurement device is captured In order to be able to collect by the collector or to be able to measure by the reference measuring device, the reference value acquiring line further includes a purge gas line for introducing a purge gas, and the purge gas flows from the purge gas line to the reference value acquiring line It may be configured to reach the collector or the reference measuring device via at least a part of

  For example, when the calibrator determines that the pressure measured by the pressure sensor is a value suitable for calibration, the line through which the gas to be measured that has passed through the measuring device flows is taken from the condition acquisition line. In order to change the reference value acquisition line and collect the gas to be measured by the collector or to measure the physical quantity of the gas to be measured by the reference measuring device, the condition acquisition line and the reference line The value acquisition line is branched from the gas outlet line, and further includes a flow path switching mechanism that causes the gas to be measured which has passed through the measurement device to flow to either the condition acquisition line or the reference value acquisition line. What is necessary.

  If the gas to be measured is hydrogen peroxide gas and the physical quantity measured by the measuring device is the concentration of hydrogen peroxide gas, the reference value acquiring device according to the present invention enables more accurate verification or calibration than before. Thus, the reliability of the measuring device can be enhanced.

  The condition acquisition line and the reference value acquisition line can be used to prevent decomposition from occurring even when the gas to be measured is in contact with the wall surface while flowing through the lines, and to improve calibration accuracy. It may be made of resin.

  If it is a measurement system provided with the reference value acquisition device according to the present invention and the measurement device that is tested or calibrated by the reference value acquisition device, it is an unstable measurement target gas that is prone to decomposition or condensation. Accurate calibration also keeps the measured values reliable.

  The reference value acquiring method according to the present invention is a reference value acquiring method for calibration or calibration of a measuring device that measures the physical quantity of a gas to be measured, and has a portion in contact with the gas to be measured. Whether or not the gas to be measured satisfies the stability condition based on the standby step of flowing the gas to be measured in the condition acquisition line provided with one or more condition acquisition sensors for acquiring the condition, and the output of the condition acquisition sensor A stability determination step to be determined, a collector for collecting the gas to be measured that has passed through the measuring device when the stability condition is satisfied, or a physical quantity of the gas to be measured that has passed through the measuring device The reference value acquisition line to which the reference measuring instrument to be measured is connected is provided with a reference value acquisition step of flowing the gas to be measured which has passed through the measuring device.

  Such a calibration method is likely to cause condensation or decomposition similarly to the reference value acquisition device according to the present invention, and is an accurate calibration even if it is a measurement device that measures the physical quantity of the measurement target gas in which the standard gas does not exist. Is possible.

  As described above, in the reference value acquiring apparatus according to the present invention, the physical quantity indicating the state of the gas to be measured, which is the premise of the calibration, is measured by the condition acquisition line, and the physical quantity used for pricing the calibration is the reference value Each can be measured separately on the acquisition line. Therefore, by not providing the reference value acquisition line with devices such as various sensors that cause condensation or decomposition, even if it is an unstable measurement target gas, it is possible to accurately obtain the physical quantity necessary for pricing. It becomes possible to calibrate the measuring device.

The schematic diagram which shows the measurement system which concerns on one Embodiment of this invention. The schematic diagram which shows the reference value acquisition apparatus in the embodiment. The flowchart which shows the calibration procedure in the embodiment. The schematic diagram which shows the measurement system which concerns on another embodiment of this invention.

  A reference value acquisition device 100 according to an embodiment of the present invention and a measurement system 200 using the same will be described with reference to the drawings.

A measurement system 200 shown in FIG. 1 includes a measurement device 101 for measuring the concentration of hydrogen peroxide gas (H ₂ O ₂ gas) which is a measurement target gas, and a reference value acquisition device for calibrating the measurement device 101. And 100, a measuring apparatus 101 that generates a hydrogen peroxide gas for calibration, and a vaporization apparatus VA that supplies the hydrogen peroxide gas to a reference value acquisition apparatus 100.

  The vaporizer VA and the measuring apparatus 101 are used, for example, to supply hydrogen peroxide gas into a chamber for forming an oxide film on a substrate in a semiconductor manufacturing process. The respective devices constituting the vaporizer VA are feedback-controlled based on the concentration of the hydrogen peroxide gas measured by the measuring device 101, and the concentration of the hydrogen peroxide gas is maintained at a predetermined concentration. Further, the reference value acquisition device 100 is used, for example, to calibrate the measuring device 101 at the time of maintenance every predetermined period.

As shown in FIG. 1, the vaporizer VA includes a carrier gas line CL provided with a mass flow controller MFC for controlling the flow rate of nitrogen gas (N ₂ gas) as a carrier gas, and a hydrogen peroxide solution accommodated therein. A material liquid line ML provided with a tank TN and a liquid mass flow meter LMFM for measuring the flow rate of a hydrogen peroxide solution, provided at the junction of the carrier gas line CL and the material liquid line ML And a vaporizer VP for heating and evaporating. In the material liquid line ML, the hydrogen peroxide solution stored in the tank TN is pressure-fed to the vaporizer VP by supplying nitrogen gas into the tank TN at a predetermined pressure.

  When the hydrogen peroxide gas is supplied to the chamber, the mass flow controller MFC provided in the carrier gas line CL is a carrier so that the deviation between the measured concentration of the hydrogen peroxide gas measured by the measuring device 101 and the target concentration becomes small. Control the gas flow rate. On the other hand, when calibrating the measuring device 101, the mass flow controller MFC does not perform feedback control based on the measured concentration of the hydrogen peroxide gas measured by the measuring device 101, and continues to supply the carrier gas at a constant flow rate.

  As shown in FIG. 1, the measuring apparatus 101 is configured to allow the hydrogen peroxide gas to be measured to flow, and the measuring cell GS transmits the measuring light to the hydrogen peroxide gas, and the measuring light And a gas concentration monitor GM for measuring the absorbance of the measuring light which has been generated and which has passed through the hydrogen peroxide gas in the measuring cell GS.

  The gas introduction side of the measurement cell GS is connected to the output port of the vaporizer VP of the vaporizer VA via an introduction line GL1, and the hydrogen peroxide gas generated by the vaporizer VA is introduced into the inside. Further, the gas derivation side of the measurement cell GS is connected to the reference value acquisition device 100 at the time of calibration. In actual use, the gas lead-out side of the measurement cell GS is, for example, connected to a chamber or the like by another line.

  The gas concentration monitor GM includes an optical system for causing light to enter the measurement cell GS and detecting the passed light, a CPU, a memory, an A / D / D / A converter, an input / output means, etc. Equipped with a computer. The program stored in the memory is executed, and various devices cooperate to calculate the absorbance from the light intensity obtained by the optical system, and a calibration curve showing the relationship between the absorbance, the absorbance and the gas concentration The gas concentration is calculated on the basis of In the present embodiment, the calibration of the calibration curve is performed using the reference value acquisition device 100.

  As shown in FIG. 2, the reference value acquisition device 100 includes a condition acquisition line 1 branched from a gas lead-out line GL2 provided on the outlet side of the measurement device 101 and a reference value acquisition line 2. That is, the condition acquisition line 1 and the reference value acquisition line 2 are lines provided in parallel with each other as viewed from the measurement cell GS. In addition, the gas contact surfaces of the condition acquisition line 1 and the reference value acquisition line 2 with hydrogen peroxide gas are made of resin, and the temperature is higher than the condensation point by the heater to prevent condensation of the hydrogen peroxide gas. It is configured to be kept at.

  Furthermore, the reference value acquisition device 100 supplies the purge gas to the reference value acquisition line 2 and the hydrogen peroxide gas derived from the measurement cell GS of the measuring device 101 as the condition acquisition line 1 or the reference value acquisition line And a flow path switching mechanism 4 for flowing to one of the two.

  Each part will be described in detail.

  The condition acquisition line 1 is a line for confirming the temperature and pressure which are the calibration conditions when the measurement device 101 is calibrated, and includes a temperature sensor 11 and a pressure sensor 12 which are condition acquisition sensors. In the temperature sensor 11 and the pressure sensor 12, for example, a metal is partially used for the sensing member, and the hydrogen peroxide gas may cause decomposition and condensation although it is slight. In the present embodiment, at the downstream end of the temperature sensor 11 and the pressure sensor 12 of the condition acquisition line 1, a collection bin 13 for blowing hydrogen peroxide gas into water and dissolving it is provided. That is, hydrogen peroxide which is water soluble is dissolved in water so that the hydrogen peroxide gas is not discharged from the condition acquisition line 1 into the atmosphere as it is. The total amount of hydrogen peroxide collected in the collecting bin 13 is smaller than the amount measured by the measuring device 101 because condensation or decomposition occurs in the temperature sensor 11 and the pressure sensor 12. For this reason, the hydrogen peroxide collected in the collection bin 13 is not used as a reference value for calibration and is discarded.

  The reference value acquisition line 2 is a line for acquiring the concentration that becomes the reference value when calibrating the measuring device 101, and at its end, a collector 21 for dissolving hydrogen peroxide in water and collecting it Is provided. As shown in FIG. 2, the reference value acquisition line 2 is not provided with a sensor for measuring the temperature or pressure, and only a material other than metal is present in the line.

  The collector 21 has the same structure as the above-described air collection bin 13, and is configured to dissolve hydrogen peroxide gas in water in the bin and exhaust nitrogen gas as a carrier gas to the atmosphere. Yes. The collected hydrogen peroxide is measured by the collector 21 by, for example, titration with potassium permanganate. Based on the weight of the hydrogen peroxide collected in the collector 21 and the flow rate of the carrier gas sent to the measuring cell GS by the vaporizer VA during the period when the hydrogen peroxide is collected in the collector 21 The concentration of hydrogen peroxide gas that has passed through the measuring device 101 is calculated and used as a reference value for calibration.

  The purge gas line 3 provided to merge with the reference value acquisition line 2 supplies the same nitrogen gas as the carrier gas as a purge gas, condenses and adheres to the gas contact surface in the reference value acquisition line 2. Can be sent to hydrogen peroxide. That is, substantially the same amount of hydrogen peroxide as the hydrogen peroxide gas having passed through the measurement cell GS is collected by the collector 21.

  The flow path switching mechanism 4 includes a condition acquisition line 1 and a first valve 41 and a second valve 42 provided at the start ends of the reference value acquisition line 2, respectively. Only the valve provided in the line to which hydrogen oxide gas is to flow is opened. In the present embodiment, the calibrator manually opens and closes the first valve 41 and the second valve 42.

  The reference value acquiring device 100 configured as described above and the calibration procedure of the measuring device 101 by the measuring system 200 will be described with reference to the flowchart of FIG.

  First, in the vaporization device VA, the supply flow rate of the carrier gas by the mass flow controller MFC is constant, and the supply pressure to the tank TA is also constant, so that the hydrogen peroxide gas of a constant concentration is generated and supplied to the measurement cell GS. It is set to keep (step S1).

  In addition, the proofreader opens the first valve 41 provided in the condition acquisition line 1 of the reference value acquisition device 100 and closes the second valve 42 provided in the reference value acquisition line 2 to use the vaporization device VA. After the generated hydrogen peroxide gas passes through the measurement cell GS, it flows only into the condition acquisition line 1 (step S2).

  The proofreader monitors the temperature and pressure indicated by the temperature sensor 11 and the pressure sensor 12, and, for example, keeps the hydrogen peroxide in the condition acquisition line 1 until the temperature and pressure are kept constant. The gas is kept flowing (step S3). This state is continued until the indicated value of each sensor is stabilized at the temperature or pressure at which hydrogen peroxide gas is supplied in the semiconductor manufacturing process.

  If the proofreader determines that the indicated values of the temperature sensor 11 and the pressure sensor 12 on the condition acquisition line 1 are stable and the supply state of the hydrogen peroxide gas is stable, the proofreader determines the first valve 41 on the condition acquisition line 1. Is closed, and the second valve 42 on the reference value acquisition line 2 is opened (step S4). That is, after the hydrogen peroxide gas generated by the vaporizer VA passes through the measurement cell GS, the line is switched so that it flows only to the reference value acquisition line 2.

  A hydrogen peroxide gas generated by the vaporizer VA is blown into the collector 21 at the end of the reference value acquisition line 2 via the measurement cell GS for a predetermined period (step S5). During this time, the output of the absorbance measured by the concentration monitor is stored (step S6).

  Next, after the second valve 42 on the reference value acquisition line 2 is closed, a purge gas is blown from the purge gas line 3 to the collector 21 via the reference value acquisition line 2 (step S7). In this way, the hydrogen peroxide in the liquid condensed and attached to the gas contact surface of the reference value acquisition line 2 is also blown into the collector 21 and dissolved in water.

  Further, the proofreader performs titration with potassium permanganate in order to obtain the weight of hydrogen peroxide dissolved in water in the collector 21 (step S8).

  Furthermore, based on the weight of hydrogen peroxide obtained by the collector 21 and the flow rate of the carrier gas supplied in the vaporization device VA while the hydrogen peroxide gas was flowing in the reference value acquisition line 2, The proofreader calculates the concentration of the hydrogen peroxide gas that has passed through the measurement cell GS, and uses it as the calibration reference value (step S9).

  For example, the calibration curve is corrected by the function of the gas concentration monitor GM based on the output of absorbance at the gas concentration monitor GM obtained in step S6 and the reference value obtained in step S9 (step S10).

  Further, the setting of the vaporizer VA is changed to generate hydrogen peroxide gas having different concentrations, and steps S1 to S10 are repeated to perform calibration curve creation processes at a plurality of points.

  According to the reference value acquisition device 100 of the present embodiment and the measurement system 200 configured as described above, the concentration of the hydrogen peroxide gas generated by the vaporization device VA is stabilized in order to start the calibration. The hydrogen peroxide gas can be first supplied to the condition acquisition line 1 to determine whether it is present based on the indicated values indicated by the temperature sensor 11 and the pressure sensor 12.

  After that, by changing the opening and closing of the first valve 41 and the second valve 42, the hydrogen peroxide gas that has passed through the measurement cell GS flows only to the reference value acquisition line 2, and the output of absorbance is measured in the measuring device 101. While being obtained, hydrogen peroxide can be collected in the collector 21 and the concentration actually flowing can be obtained based on the weight to be used as a reference value. At this time, since the temperature sensor 11 or the pressure sensor 12 is not provided in the reference value acquisition line 2, the hydrogen peroxide gas after passing through the measurement cell GS minimizes condensation or decomposition due to contact with metal. It can be suppressed.

  Further, even if the hydrogen peroxide gas is condensed in the reference value acquisition line 2 due to the temperature change, the purge gas supplied from the purge gas line 3 can be fed to the collector 21. Therefore, since the hydrogen peroxide collected by the collector 21 can be substantially equal to the total amount of hydrogen peroxide that has passed through the measuring cell GS, even a gas consisting of an unstable substance such as hydrogen peroxide is accurate Calibration of the concentration.

  Therefore, the measurement accuracy of the measurement apparatus 101 can be further improved than before, and for example, the concentration of the hydrogen peroxide gas supplied in the semiconductor manufacturing process can be accurately kept constant. Therefore, the film thickness of the oxide film formed on the substrate can be more precisely controlled.

  Another embodiment of the present invention will be described.

  As shown in FIG. 4, the condition acquisition line 1 in which various sensors are provided may be provided on the introduction side of the measurement apparatus 101 instead of the measurement side of the gas to be measured. Specifically, the condition acquisition line 1 may be branched from the gas introduction line GL1 for introducing the gas to be measured into the measurement apparatus 101.

  Even in such a case, even if condensation or decomposition of the gas to be measured occurs in the sensor provided in the condition acquisition line, such gas to be measured is not supplied to the measurement device and the reference value acquisition line. It does not affect the calibration accuracy. Therefore, accurate calibration can be performed as in the above embodiment.

  Further, at least a pressure sensor may be provided in the condition acquisition line, and the temperature sensor may not be provided. For example, a temperature sensor which is formed only of resin parts and in which condensation or decomposition of the gas to be measured does not easily occur is provided in the reference value acquisition line or a line communicating therewith, and used to determine the stability of the temperature of the gas to be measured You may Even in such a case, the calibration accuracy can be enhanced as compared with the prior art.

  The end of the reference value acquisition line is not limited to that connected to the collector. For example, a measurement device having the same or different measurement principle as the measurement device to be calibrated may be connected. That is, the physical quantity measured by the measuring device to be calibrated may be directly measured from the gas to be measured flowing through the reference value acquisition line without passing through the process of collection. In addition, the collector may be one using a liquid other than water, for example, one using a filter or one by solvent extraction.

  The gas to be measured is not limited to hydrogen peroxide gas, and may be any gas that can be condensed or decomposed under predetermined environmental conditions. The predetermined environmental conditions include so-called standard conditions and temperature or pressure in the environment where the gas to be measured is used. Moreover, nitric acid gas, formaldehyde gas, etc. are mentioned as a specific example of measurement object gas.

  The measuring principle of the measuring device is not limited to one based on absorbance, but may be based on another measuring principle.

  In the embodiment described above, the measuring apparatus measures the concentration as the physical quantity of the gas to be measured, but the reference value acquiring apparatus according to the present invention is used to calibrate the measuring apparatus that measures other physical quantities. May be The physical quantity measured by the measuring device may be, for example, a flow rate.

  The switching from the condition acquisition line to the reference value acquisition line is not manual switching by the proofreader, but may be automatically switched by the controller based on, for example, the outputs of the temperature sensor and the pressure sensor.

  The condition acquisition sensor is not limited to the pressure sensor and the temperature sensor, and may be another sensor.

  The reference value acquisition device according to the present invention may be used not only for calibration but also for verification. That is, the present invention can also be used to perform a test to determine whether the difference between the output of the measurement apparatus and the physical quantity of the gas actually being measured is within an allowable range.

  In addition, unless it is contrary to the meaning of the present invention, a part of each embodiment may be modified or a part of each embodiment may be combined.

200 measurement system 100 reference value acquisition device 101 measurement device 1 condition acquisition line 11 temperature sensor 12 pressure sensor 13 collection bin 2 Reference value acquisition line 21 ··· Collector 3 · · · Purge gas line 4 · · · Flow path switching mechanism 41 · · · First valve 42 · · · Second valve

Claims (9)

A reference value acquisition device used to perform verification or calibration on a measurement device that measures the physical quantity of a gas to be measured,
A condition acquisition line provided with one or more condition acquisition sensors that have a part in contact with the gas to be measured and acquire conditions for verification or calibration;
A terminal is connected to a collector in which the gas to be measured is collected or a reference measuring device for measuring the physical quantity of the gas to be measured, and after passing through the measuring device to the collector or the reference measuring device A reference value acquisition line to introduce the target gas of
The condition acquisition line and the reference value acquisition line are branched from a gas lead-out line that derives the gas to be measured from the measurement device, or the gas for the condition acquisition line introduces the gas to be measured to the measurement device The reference value acquisition device characterized by having branched from the introductory line.   The reference value output device according to claim 1, wherein the condition acquisition sensor is a pressure sensor that measures the pressure of a measurement target gas.   The reference value acquisition device according to claim 1, wherein the condition acquisition sensor is a temperature sensor that measures a temperature of a measurement target gas. The system further comprises a purge gas line for introducing a purge gas into the reference value acquisition line,
The criterion according to any one of claims 1 to 3, wherein a purge gas is configured to reach the collector or the reference measuring device from the purge gas line via at least a part of the reference value acquisition line. Value acquisition device. The condition acquisition line and the reference value acquisition line are branched from the gas outlet line,
The reference value acquisition device according to any one of claims 1 to 4, further comprising: a flow path switching mechanism which causes the gas to be measured which has passed through the measurement device to flow through either the condition acquisition line or the reference value acquisition line. The gas to be measured is hydrogen peroxide gas,
The reference value acquisition device according to any one of claims 1 to 5, wherein the physical quantity measured by the measurement device is a concentration of hydrogen peroxide gas.   The reference value acquisition device according to any one of claims 1 to 6, wherein the condition acquisition line and the reference value acquisition line are formed of a resin. The reference value acquisition device according to any one of claims 1 to 7.
A measuring system that is verified or calibrated by the reference value acquiring device. A reference value acquiring method for calibration or calibration of a measuring device for measuring a physical quantity of a gas to be measured, comprising:
A standby step of flowing the gas to be measured in a condition acquisition line provided with one or a plurality of condition acquisition sensors having a portion in contact with the gas to be measured and acquiring conditions of verification or calibration;
A stability determination step in which it is determined whether the gas to be measured satisfies a stability condition based on the output of the condition acquisition sensor;
A collector that collects the measurement target gas that has passed through the measurement device when the stability condition is satisfied, or a reference measurement device that measures the physical quantity of the measurement target gas that has passed through the measurement device is connected And D. a reference value acquiring step of causing the gas to be measured which has passed through the measuring device to flow in the reference value acquiring line.