JP2019086361A - Detector and detection method - Google Patents

Detector and detection method Download PDF

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JP2019086361A
JP2019086361A JP2017213660A JP2017213660A JP2019086361A JP 2019086361 A JP2019086361 A JP 2019086361A JP 2017213660 A JP2017213660 A JP 2017213660A JP 2017213660 A JP2017213660 A JP 2017213660A JP 2019086361 A JP2019086361 A JP 2019086361A
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illumination
light emitting
imaging
inspection jig
emitting element
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JP6942031B2 (en
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裕行 小野
Hiroyuki Ono
裕行 小野
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Canon Machinery Inc
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Abstract

To provide a detector with which it is possible to detect the state of each of a plurality of light-emitting diodes (LEDs) and improve the accuracy of detecting degradation or abnormality.SOLUTION: Provided is a detector for detecting the state of a plurality of light-emitting diodes of illumination means, the detector comprising illumination means capable of illuminating an imaging subject from various directions by the plurality of light-emitting diodes, and imaging means for imaging the imaging subject illuminated by the illumination means. An illumination inspection jig having mirror surface reflection characteristics and capable of illuminating by the illumination means is arranged. The imaging means is provided with a focus adjustment mechanism for focusing on each light-emitting diode. At the time of imaging of the illumination inspection jig, each light-emitting diode is imaged while each light-emitting diode is being focused on by the focus adjustment mechanism.SELECTED DRAWING: Figure 1

Description

本発明は、検知装置に関し、特に、発光素子(LED)を用いた装置(例えば観察装置)における発光素子の劣化状態を検知する検知装置及び検知方法に関するものである。   The present invention relates to a detection apparatus, and more particularly to a detection apparatus and a detection method for detecting a deterioration state of a light emitting element in an apparatus (for example, an observation apparatus) using the light emitting element (LED).

各種の製品等の物品(ワーク)を検査する場合、一般には、照明システムを用いて物品を撮像することになる。照明システムとしては、図8に示すような単純な照明システムや図9に示すようなドーム照明システム等がある。   When inspecting articles (workpieces) such as various products, generally, an illumination system is used to image the articles. Examples of the illumination system include a simple illumination system as shown in FIG. 8 and a dome illumination system as shown in FIG.

図8に示す照明システムは、物品(ワーク)1に対して、LED2からの直接光を当てて、カメラ3にてその画像を撮像するものである。また、図8に示す照明システムは、ドーム部材4の凹曲面4aに沿って、複数個のLED2を配置したものであり、各LED2からの直接光を物品(ワーク)1に対して当てて、カメラ3にてその画像を撮像するものである。このように、図9に示す照明システムでは、複数のLED2の照射方向が、それぞれ異なるように配設され、撮像対象であるワーク1をあらゆる方向から照らすことができる構成となっている。   In the illumination system shown in FIG. 8, direct light from the LED 2 is applied to an article (workpiece) 1, and the image is captured by the camera 3. Moreover, the illumination system shown in FIG. 8 arranges a plurality of LEDs 2 along the concave surface 4 a of the dome member 4, and direct light from each LED 2 is applied to the article (work) 1, The camera 3 picks up the image. As described above, in the illumination system shown in FIG. 9, the irradiation directions of the plurality of LEDs 2 are arranged to be different from one another, and the work 1 to be imaged can be illuminated from all directions.

ところで、LED2には寿命がある。LED2の劣化によって明るさの低下を招くことになって、検査精度が低下し、システム(装置)の信頼性低下に繋がっていた。そのため、従来には、撮像した画像の輝度に基づいてLED2の劣化の度合を判断するものがある(特許文献1)。すなわち、この場合、LED2からの直接光(照明光)を撮像対象に当てて撮像し、その画像の輝度値を確認することで、照明の劣化による明るさの低下を検知している。   By the way, LED2 has a life. Deterioration of the LED 2 causes a decrease in brightness, leading to a decrease in inspection accuracy, leading to a decrease in the reliability of the system (device). Therefore, in the related art, there is one that determines the degree of deterioration of the LED 2 based on the luminance of a captured image (Patent Document 1). That is, in this case, direct light (illumination light) from the LED 2 is applied to an imaging target to perform imaging, and the luminance value of the image is confirmed to detect a decrease in brightness due to deterioration of the illumination.

また、従来には、撮像装置により撮像された入力画像の領域である反射領域を検出し、この反射領域の解析を行って、この反射領域の解析結果に基づいて、照明装置および撮像装置の異常を検出するものも提案されている(特許文献2)。すなわち、反射板に照明を当てて撮像し、その画像の輝度を確認することで、照明装置および撮像装置の異常を検出するものである。   Also, conventionally, a reflection area, which is an area of an input image captured by an imaging device, is detected, analysis of the reflection area is performed, and an abnormality of the illumination device and the imaging device There is also proposed one that detects That is, illumination is applied to the reflection plate for imaging, and the luminance of the image is confirmed to detect an abnormality of the illumination device and the imaging device.

特開2007−265287号公報JP 2007-265287 A 特開2009−159568号公報JP, 2009-159568, A

前記特許文献1では、図7に示すような単純な照明システムを用いることになる。このような場合、LEDの劣化による照度の低下が、そのまま画像の輝度低下に繋がることになる。しかしながら、この場合、LED自体を撮像したものではなく、LEDの劣化や異常を正確に把握することができなかった。また、特許文献2においても、反射板を用いるものであるが、LED自体を撮像したものではなく、LEDの劣化や異常(ばらつき、配置ずれ及び/又は光軸ずれ等の異常)を正確に把握することができなかった。   In Patent Document 1, a simple illumination system as shown in FIG. 7 is used. In such a case, the decrease in the illuminance due to the deterioration of the LED directly leads to the decrease in the luminance of the image. However, in this case, the LED itself was not imaged, and it was not possible to accurately grasp the deterioration or abnormality of the LED. Also in Patent Document 2, although a reflector is used, the LED itself is not imaged, and degradation or abnormality of the LED (variation, positional deviation and / or abnormality such as optical axis deviation) is accurately grasped I could not do it.

ところで、図8に示すドーム照明を用いた場合、前記したように、複数のLED2の照射方向が、それぞれ異なるように配設され、撮像対象であるワーク1をあらゆる方向から照らすことができる構成となっている。   By the way, when the dome illumination shown in FIG. 8 is used, as described above, the irradiation directions of the plurality of LEDs 2 are arranged to be different from one another, and the work 1 to be imaged can be illuminated from all directions. It has become.

このため、各LEDが撮像画像の明るさに及ぼす影響は、均一ではない。例えば、撮像対象表面の状態や姿勢によって、ある特定方向の照射が撮像画像の明るさに影響を及ぼす場合がある。従って、複数存在するLEDの劣化や異常を、LED個別に認識することが困難で、見逃しやすいものとなっていた。   For this reason, the influence which each LED has on the brightness of a captured image is not uniform. For example, irradiation in a specific direction may affect the brightness of a captured image depending on the state or posture of the surface to be imaged. Therefore, it is difficult to recognize the deterioration or abnormality of a plurality of LEDs individually for each LED, and it is easy to miss.

本発明は、上記課題に鑑みて、複数個の発光素子(LED)のそれぞれの状態を検知することができて、劣化や異常の検知精度の向上を図ることが可能な検知装置を提供する。   The present invention provides a detection device which can detect the state of each of a plurality of light emitting elements (LEDs) and can improve the detection accuracy of deterioration or abnormality in view of the above-mentioned problems.

本発明の検知装置は、複数の発光素子にて撮像対象を種々の方向から照らすことが可能な照明手段と、この照明手段にて照明されている撮像対象を撮像する撮像手段とを備えた観察装置における、前記照明手段の複数の発光素子の状態を検知する検知装置であって、鏡面反射特性を持ち前記照明手段にて照明が可能な照明点検治具を配置するとともに、前記撮像手段は各発光素子にフォーカスを合わせるフォーカス調整機構を備え、照明点検治具の撮像時において、このフォーカス調整機構にて各発光素子にフォーカスを合わせた状態で、各発光素子を撮像するものである。ここで、発光素子の状態とは、劣化状態、ばらつき、配置ずれ及び/又は光軸ずれ等の異常状態である。   The detection apparatus according to the present invention is an observation unit including an illumination unit capable of illuminating an imaging target from various directions by a plurality of light emitting elements, and an imaging unit imaging an imaging target illuminated by the illumination unit. A detection device for detecting a state of a plurality of light emitting elements of the illumination means in the device, wherein a light inspection jig having specular reflection characteristics and capable of being illuminated by the illumination means is disposed, and the imaging means is provided A focus adjustment mechanism for focusing on the light emitting elements is provided, and at the time of imaging of the illumination inspection jig, each light emitting element is imaged in a state where the respective light emitting elements are focused by the focus adjustment mechanism. Here, the state of the light emitting element is an abnormal state such as a deteriorated state, a variation, an arrangement deviation, and / or an optical axis deviation.

本発明の検知装置によれば、フォーカス調整機構にて各発光素子にフォーカスを合わせた状態で、各発光素子を撮像手段にて撮像することができる。このため、発光素子自体を撮像することができる。また、既存の観察装置等に、この観察装置の照明手段にて撮像が可能な照明点検治具を配置し、この照明点検治具に反射させて各発光素子を映し出すようにすればよいので、装置として複雑化を招くことなく、簡単に構成することができる。   According to the detection device of the present invention, each light emitting element can be imaged by the imaging unit in a state where each light emitting element is focused by the focus adjustment mechanism. Therefore, the light emitting element itself can be imaged. Further, it is sufficient to arrange an illumination inspection jig capable of imaging with the illumination means of this observation device in an existing observation device or the like, and reflect the illumination inspection jig so as to project each light emitting element, The device can be easily configured without complication.

照明手段は、照明点検治具に対して直接光を照射するものであっても、照明点検治具に対して間接光を照射するものであってもよい。   The illumination means may direct light to the illumination inspection jig or may emit indirect light to the illumination inspection jig.

前記撮像手段は、フォーカスを合わせた全発光素子の画像を一度に映し出すようにしたり、全発光素子の内のフォーカスを合わせた所定数の発光素子の画像を順次映し出すようにしたりできる。一度に映し出すものであれば、作業性の向上を図ることができ、順次映し出すものでは、各発光素子の画像をより鮮明に映し出すことができ、高精度の検知が可能となる。   The imaging means can display the images of all the light emitting elements in focus at one time, or can sequentially display the images of a predetermined number of light emitting elements in focus among all the light emitting elements. If it is projected at one time, the workability can be improved, and if it is projected sequentially, the image of each light emitting element can be projected more clearly, and detection with high accuracy becomes possible.

照明点検治具を前記撮像手段にて撮像した画像に基づいて各発光素子の明るさを確認する画像処理手段を備えたものが好ましい。この場合、画像処理手段は、初期状態の各発光素子の画像と、点検時の各発光素子の画像とを比較するように設定できる。このように比較することによって、発光素子が劣化等しているか否かを安定して判断できる。   It is preferable to have an image processing means for confirming the brightness of each light emitting element based on an image obtained by imaging the illumination inspection jig by the imaging means. In this case, the image processing means can be set to compare the image of each light emitting element in the initial state with the image of each light emitting element at the time of inspection. By comparing in this manner, it can be stably determined whether the light emitting element is deteriorated or the like.

前記照明手段による照明点検治具の照明可能位置と、前記照明手段による前記撮像対象の照明可能位置とに、照明手段側と照明点検治具側との少なくともいずれか一方を移動させる移動手段を備えたものが好ましい。   It comprises moving means for moving at least one of the illumination means side and the illumination inspection jig side to the illuminable position of the illumination inspection jig by the illumination means and the illuminable position of the imaging object by the illumination means. Are preferred.

このように構成することによって、照明点検治具の照明可能状態と撮像対象の照明可能状態とを切り換えることができる。このため、通常の撮像対象の観察と発光素子の観察とを行うことができ、しかも、照明点検治具が通常の撮像対象の観察を阻害せず、撮像対象が発光素子の観察を阻害しない。   With this configuration, it is possible to switch between the illuminable state of the illumination inspection jig and the illuminable state of the imaging target. Therefore, normal observation of the imaging target and observation of the light emitting element can be performed, and furthermore, the illumination inspection jig does not inhibit observation of the normal imaging target, and the imaging target does not inhibit observation of the light emitting element.

本発明の検査方法は、複数の発光素子にて撮像対象を種々の方向から照らすことが可能な照明手段と、この照明手段にて照明されている撮像対象を撮像する撮像手段とを備えた観察装置における、前記照明手段の複数の発光素子の状態を検知する検知方法であって、鏡面反射特性を持ち前記照明手段にて照明が可能な照明点検治具を配置するとともに、この照明点検治具を撮像し、この照明点検治具の撮像時において、各発光素子にフォーカスを合わせ、この状態で、各発光素子を撮像して、各発光素子の画像を得るものである。   An inspection method according to the present invention is an observation method comprising: illumination means capable of illuminating an imaging object from various directions by a plurality of light emitting elements; and imaging means for imaging an imaging object illuminated by the illumination means A detection method for detecting the states of a plurality of light emitting elements of the illumination means in an apparatus, the illumination inspection jig having specular reflection characteristics and capable of being illuminated by the illumination means is disposed, and the illumination inspection jig Is imaged, and at the time of imaging of the illumination inspection jig, each light emitting element is focused, and in this state, each light emitting element is imaged to obtain an image of each light emitting element.

本発明の検査方法によれば、各発光素子にフォーカスを合わせた状態で、各発光素子を撮像手段にて撮像することができる。このため、発光素子自体を撮像することができる。   According to the inspection method of the present invention, each light emitting element can be imaged by the imaging unit in a state in which each light emitting element is focused. Therefore, the light emitting element itself can be imaged.

本発明では、発光素子自体を撮像することができるので、発光素子の1つ1つの明るさ(劣化)、ばらつき、配置ずれ及び/又は光軸ずれ等の異常の確認が可能となり、劣化及び異常の検知能力が高くなり、劣化や異常の部位を特定でき、これら部位の状態(様子)の把握も安定して行える。また、劣化等している発光素子に対して点灯光量を補正することによって、劣化していない発光素子と同様の明るさとすることができる。   In the present invention, since the light emitting element itself can be imaged, it becomes possible to confirm an abnormality such as brightness (deterioration), variation, positional deviation and / or optical axis deviation of each light emitting element, and deterioration and abnormality The detection capability of is increased, and it is possible to identify the site of deterioration or abnormality, and to stably grasp the state (state) of these sites. In addition, by correcting the amount of lighting with respect to a light emitting element that is deteriorated or the like, the same brightness as the light emitting element that is not deteriorated can be obtained.

また、装置として複雑化を招くことなく、簡単に構成することができ、低コスト化を達成できる。   In addition, the apparatus can be easily configured without complication and cost reduction can be achieved.

本発明の実施形態を示す検知装置を示し、(a)は照明手段による撮像対象の照明可能位置に配置されている状態の簡略図であり、(b)は照明手段による照明点検治具の照明可能位置に配置されている状態の簡略図であり、(c)はフォーカス調整後の簡略図である。The detection apparatus which shows embodiment of this invention is shown, (a) is a simplified diagram of the state arrange | positioned in the illumination possible position of the imaging object by an illumination means, (b) is illumination of the illumination inspection jig by an illumination means. It is the simplification figure of the state arrange | positioned in the possible position, (c) is a simplification figure after focus adjustment. 図1に示す検知装置の簡略ブロック図である。FIG. 2 is a simplified block diagram of the sensing device shown in FIG. 各発光素子が映し出されている状態の画面の簡略図である。It is a simplification figure of a screen in the state where each light emitting element is projected. 図1に示す検知装置を用いた劣化検知工程を示すフローチャート図である。It is a flowchart figure which shows the deterioration detection process using the detection apparatus shown in FIG. 図1に示す検知装置を用いた異常検知工程を示すフローチャート図である。It is a flowchart figure which shows the abnormality detection process using the detection apparatus shown in FIG. 他の照明手段を示す簡略図である。FIG. 6 is a simplified view of another illumination means. 別の照明手段を示す簡略図である。FIG. 6 is a simplified view of another illumination means. 単純な照明システムの簡略図である。FIG. 1 is a simplified diagram of a simple lighting system. ドーム照明の簡略図である。It is a simplified view of dome lighting.

以下本発明の実施の形態を図1〜図7に基づいて説明する。   Hereinafter, an embodiment of the present invention will be described based on FIGS. 1 to 7.

図1に本発明に係る検知装置を搭載した既存の観察装置(検査装置)を示し、既存の観察装置は、複数の発光素子11にて撮像対象を種々の方向から照らすことが可能な照明手段12と、この照明手段12にて照明されている撮像対象Wを撮像する撮像手段13とを備える。   FIG. 1 shows an existing observation apparatus (inspection apparatus) equipped with a detection apparatus according to the present invention, and the existing observation apparatus is an illumination means capable of illuminating an imaging object with various light emitting elements 11 from various directions. 12 and an imaging means 13 for imaging the imaging object W illuminated by the illumination means 12.

照明手段(照明システム)12は、いわゆるドーム照明であり、内面が凹曲面15aとされたドーム15と、このドーム15の凹曲面15aに沿って配設された図示省略のプリント基板に、配列される複数個の発光素子11とを備える。例えば、発光素子11は複数の同心円上に周方向に沿って所定ピッチで配設されている。具体的には、図3(この図は、後述するように発光素子11を写し出した画面を示している)に示すように、6個の同心円上に周方向にほぼ隙間なく配置されている。プリント基板には、複数のスルーホールが設けられ、各発光素子11は、そのリードが挿入され、プリント基板のランドに実装されている。なお、以下、発光素子11を単にLED11と称す場合がある。   The illumination means (illumination system) 12 is a so-called dome illumination, and is arranged on a dome 15 whose inner surface is a concave surface 15a, and a printed circuit board (not shown) disposed along the concave surface 15a of the dome 15. And a plurality of light emitting elements 11. For example, the light emitting elements 11 are disposed on a plurality of concentric circles at a predetermined pitch along the circumferential direction. Specifically, as shown in FIG. 3 (this figure shows a screen in which the light emitting element 11 is shown as described later), the six concentric circles are arranged substantially without gaps in the circumferential direction. The printed circuit board is provided with a plurality of through holes, and the leads of the light emitting elements 11 are inserted and mounted on lands of the printed circuit board. Hereinafter, the light emitting element 11 may be referred to simply as the LED 11.

また、撮像手段13は例えばCCDカメラやCMOSカメラ等を用いることができる。この撮像手段13は、フォーカス調整機構21(図2参照)によって、ワークWに対して接近・離間することによって、ワークWとの距離を変化させて上下方向に焦点が異なる画像を取得することができる。この場合、素子側を移動させるものであっても、レンズ系側を移動させるものであっても、素子側及びレンズ系側を移動させるものであってもよい。また、移動させる手段としては、例えば、ねじ構造にて構成することができる。すなわち、操作用つまみを廻すことによって、ねじ構造の雄ねじ側または雌ねじ側が上下方向に移動することによって、素子側及び/又はレンズ系側を移動させることができる。   Further, as the imaging means 13, for example, a CCD camera or a CMOS camera can be used. The imaging unit 13 changes the distance to the work W by moving closer to or away from the work W by the focus adjustment mechanism 21 (see FIG. 2) to obtain an image with different focal points in the vertical direction. it can. In this case, the element side may be moved, the lens system side may be moved, or the element side and the lens system side may be moved. Moreover, as a means to move, it can comprise by screw structure, for example. That is, the element side and / or the lens system side can be moved by moving the male screw side or the female screw side of the screw structure up and down by turning the operation knob.

また、撮像対象Wは、図1に示すように、ステージ16上に配置され、照明手段(照明システム)12からの直接光がワークWに照射され、ドーム15上に配置された撮像手段13で、ドーム15の観察窓15bを介してワークWを映し出すことができる。この際、フォーカス調整機構21にて、カメラ焦点をワークWに合わせることができる。   Further, as shown in FIG. 1, the imaging target W is disposed on the stage 16, and direct light from the illumination unit (illumination system) 12 is irradiated to the work W, and the imaging unit 13 disposed on the dome 15 The workpiece W can be projected through the observation window 15b of the dome 15. At this time, the camera can be focused on the work W by the focus adjustment mechanism 21.

本発明に係る検知装置は、図2に示すように、照明点検治具20と、フォーカス調整機構21を具備した撮像手段13と、画像処理手段22等を備える。照明点検治具20は、図1に示すように、鏡面反射特性を持ち照明手段12による照明が可能な凸球面20aとするものであって、撮像対象Wが配置されるステージ16上に配置される。なお、照明点検治具20は、鏡面反射特性を持つものであれば、ガラス製であっても、プラスチック製であっても、金属製であってもよい。   The detection apparatus according to the present invention includes, as shown in FIG. 2, an illumination inspection jig 20, an imaging unit 13 equipped with a focus adjustment mechanism 21, an image processing unit 22 and the like. The illumination inspection jig 20 is, as shown in FIG. 1, a convex spherical surface 20a having specular reflection characteristics and capable of being illuminated by the illumination means 12, and is disposed on the stage 16 on which the imaging target W is disposed. Ru. The illumination inspection jig 20 may be made of glass, plastic, or metal as long as it has a specular reflection characteristic.

また、照明点検治具20及び撮像対象Wが配置されたステージ16は、図1(a)に示す状態から図1(b)に示すように、移動手段23(図2参照)を介して矢印A方向にスライドできる。また、この図1(b)に示す状態から移動手段23を介して矢印B方向にスライドできて、図1(a)に示す状態に戻すことができる。   Further, the stage 16 on which the illumination inspection jig 20 and the imaging target W are arranged is an arrow from the state shown in FIG. 1A via the moving means 23 (see FIG. 2) as shown in FIG. It can slide in the A direction. Further, it can be slid in the direction of arrow B from the state shown in FIG. 1 (b) via the moving means 23, and can be returned to the state shown in FIG. 1 (a).

図1(a)に示す状態では、照明手段12によるワークWの照明可能位置となり、図1(b)(c)に示す状態では、照明手段12による照明点検治具20の照明可能位置となる。このため、移動手段23は、照明点検治具側を移動させて、照明手段12によるワークWの照明可能位置と、照明手段12による照明点検治具20の照明可能位置とに変位させるものである。移動手段23は、例えば、シリンダ機構、ボールねじ機構、リニアモータ機構等の種々の公知・公用の機構にて構成することができる。   In the state shown in FIG. 1 (a), it becomes the lightable position of the work W by the lighting means 12, and in the state shown in FIG. 1 (b) (c), it becomes the lightable position of the lighting inspection jig 20 by the lighting means 12. . For this reason, the moving means 23 moves the light inspection jig side to displace it to the lightable position of the work W by the lighting means 12 and the lightable position of the light inspection jig 20 by the light means 12. . The moving means 23 can be configured by, for example, various known and public mechanisms such as a cylinder mechanism, a ball screw mechanism, and a linear motor mechanism.

次に前記のように構成された検知装置にてLED11の状態を検知する方法を図4と図1を用いて説明する。なお、照明手段12としては、LED11の劣化(照度の低下)、LED11毎の明るさのバラツキ、配置ずれ及び/又は光軸ずれ等の異常がある。このため、説明の簡略化のため、図4ではLED11が劣化(照度の低下)しているものを検知するフローチャートを示している。   Next, a method for detecting the state of the LED 11 by the detection device configured as described above will be described using FIGS. 4 and 1. In addition, as the illumination means 12, there exist abnormalities, such as degradation (fall of illumination intensity) of LED11, variation in the brightness for every LED11, arrangement shift, and / or optical axis shift. For this reason, in order to simplify the explanation, FIG. 4 shows a flowchart for detecting the LED 11 that is deteriorated (the illuminance is reduced).

まず、照明点検治具20を撮影可能位置(照明可能位置)とする(ステップS1)。すなわち、図1(a)に示す状態から、ステージ16を図1(b)に示すように矢印A方向に移動させて、照明点検治具20の上に照明手段12と撮像手段13とが位置する状態とする。   First, the illumination inspection jig 20 is set to a photographing possible position (illuminable position) (step S1). That is, the stage 16 is moved in the direction of arrow A as shown in FIG. 1B from the state shown in FIG. 1A, and the illumination means 12 and the imaging means 13 are positioned on the illumination inspection jig 20. State.

次に、ステップS2に移行して、フォーカス調整機構21にて各LED11にフォーカスを合わせる。すなわち、照明手段12のLED11から直接光を照明点検治具20に当てて、この照明点検治具20にて反射させて、その反射光を撮像手段13に入光させる。そして、各LED11の画像を図3に示すように取得する(ステップS3)。   Next, in step S2, the focus adjustment mechanism 21 focuses each LED 11. That is, light is directly applied from the LED 11 of the illumination means 12 to the illumination inspection jig 20, reflected by the illumination inspection jig 20, and the reflected light is incident on the imaging means 13. And the image of each LED11 is acquired as shown in FIG. 3 (step S3).

その後、ステップS4へ移行して、劣化しているLED11があるか否かを判断する。この場合、初期状態の各LED11の画像と、この点検時のLED11の画像とを比較する。この比較は、画像処理手段22にて行うことができる。画像処理手段22の処理方法としては、例えば、初期状態(劣化していない状態)のLED11の画像の明るさを100として、点検時のLED11の画像の明るさがこの100に対して所定値以下の暗さに低下しているかを判断し、その所定値以下に低下してものを劣化していると判断する。図3では、劣化しているLED11にドットを付している。画像処理手段22としては、例えば、CPU(Central Processing Unit)を中心としてROM(Read Only Memory)やRAM(Random Access Memory)等がバスを介して相互に接続されたマイクロコンピューターにて構成できる。また、画像処理手段22には、この記憶手段としての記憶装置が接続され、この記憶装置は、HDD(Hard Disc Drive)やDVD(Digital Versatile Disk)ドライブ、CD−R(Compact Disc-Recordable)ドライブ、EEPROM(Electronically Erasable and Programmable Read Only Memory)等からなる。なお、ROMには、CPUが実行するプログラムやデータが格納されている。この記憶装置には、初期の各LED11の画像が記憶されている。   Then, it transfers to step S4 and it is judged whether there is any LED11 which has deteriorated. In this case, the image of each LED 11 in the initial state and the image of the LED 11 at the time of inspection are compared. This comparison can be performed by the image processing means 22. As a processing method of the image processing means 22, for example, the brightness of the image of the LED 11 in the initial state (state not deteriorated) is 100, and the brightness of the image of the LED 11 at the time of inspection is a predetermined value or less with respect to 100. It is determined whether the image quality is lowered to the level below the predetermined value or not. In FIG. 3, the deteriorated LED 11 is dotted. The image processing means 22 can be configured, for example, by a microcomputer in which a ROM (Read Only Memory), a RAM (Random Access Memory), etc. are connected to each other via a bus, centering on a CPU (Central Processing Unit). Further, a storage device as the storage means is connected to the image processing means 22, and the storage device is an HDD (Hard Disc Drive), a DVD (Digital Versatile Disk) drive, a CD-R (Compact Disc-Recordable) drive And EEPROM (Electronically Erasable and Programmable Read Only Memory). The ROM stores programs and data to be executed by the CPU. The image of each initial LED 11 is stored in this storage device.

ステップS4で劣化しているLED11がなければ、この検知工程を終了する。また、ステップS4で劣化しているLED11があれば、ステップS5へ移行して、検知工程を終了するか否かを判断する。検知工程を終了する場合には終了する。この場合、複数のLED11のうち劣化しているLED11の位置を検知して終了することになる。   If there is no degraded LED 11 in step S4, this detection process is ended. In addition, if there is an LED 11 that has deteriorated in step S4, the process proceeds to step S5, and it is determined whether the detection process is ended. When the detection process is ended, the process is ended. In this case, the position of the deteriorated LED 11 among the plurality of LEDs 11 is detected and the process ends.

ステップS5で検知工程を終了しない場合、ステップS6へ移行して、劣化しているLED11の光量を補正して、劣化していないLED11の明るさに合わせる。その後は、ステップS4に戻る。   If the detection process is not completed in step S5, the process proceeds to step S6, and the light amount of the deteriorated LED 11 is corrected to match the brightness of the undeteriorated LED 11. After that, the process returns to step S4.

また、LED11毎の明るさのバラツキ、配置ずれ、又は光軸ずれ等の異常がある場合も、初期状態の各LED11の画像と、この点検時のLED11の画像とを比較することによって検知できるので、図5に示すフローチャートに従ってこれらの異常を検知できる。   Further, even if there is an abnormality such as a variation in brightness for each LED 11, a positional deviation, or an optical axis deviation, it can be detected by comparing the image of each LED 11 in the initial state with the image of this LED 11 at the time of inspection. These abnormalities can be detected according to the flowchart shown in FIG.

図5のステップS7〜ステップS9までは、図4に示すステップS1〜ステップS3と同様であるので、これらの説明は省略する。ステップS10では、異常なLED11を有るか否かを判断する。ステップS10で、異常なLED11が無ければ、この検知工程を終了する。   Steps S7 to S9 in FIG. 5 are the same as steps S1 to S3 shown in FIG. In step S10, it is determined whether there is an abnormal LED 11. In step S10, if there is no abnormal LED 11, this detection process is ended.

ステップS10で、異常なLED11があれば、ステップS11へ移行して、異常なLED11の修正が可能か否かを判断する。すなわち、LED11毎の明るさのバラツキであれば、そのバラツキを解消できるか否かを判断し、配置ずれ、又は光軸ずれ等の異常であれば、配置や光軸の修正が解消できるか否かを判断する。ステップS11で、修正できると判断すれば、ステップS12へ移行して修正した後、ステップ10に戻る。ステップS11で修正ができないと判断すれば、この検知工程を終了する。   In step S10, if there is an abnormal LED 11, the process proceeds to step S11, and it is determined whether correction of the abnormal LED 11 is possible. That is, if it is the variation of the brightness for every LED11, it will be judged whether the variation can be eliminated, and if it is abnormality, such as a position shift or an optical axis shift, whether a correction of an arrangement or an optical axis can be canceled To judge. If it is determined in step S11 that the correction is possible, the process proceeds to step S12, and after the correction, the process returns to step S10. If it is determined in step S11 that the correction can not be made, this detection process is ended.

本発明では、フォーカス調整機構21にて各発光素子11にフォーカスを合わせた状態で、各発光素子11を撮像手段12にて撮像することができるので、発光素子11自体を撮像することができる。従って、発光素子11の1つ1つの明るさ(劣化)、ばらつき、配置ずれ、光軸ずれ等の異常の確認が可能となり、劣化及び異常の検知能力が高くなり、劣化や異常の部位を特定でき、この部位の状態(様子)の把握も安定して行える。また、劣化等している発光素子11に対して点灯光量を補正することによって、劣化していない発光素子11と同様の明るさとすることができる。   In the present invention, since each light emitting element 11 can be imaged by the imaging unit 12 in a state where each light emitting element 11 is focused by the focus adjustment mechanism 21, the light emitting element 11 itself can be imaged. Therefore, it becomes possible to confirm abnormalities such as each brightness (deterioration), variation, positional deviation, optical axis deviation, etc. of the light emitting element 11, the detection capability of deterioration and abnormality becomes high, and the site of deterioration or abnormality is specified It is possible to stably understand the state of this part. In addition, by correcting the lighting light amount for the light emitting element 11 that is deteriorated or the like, it is possible to obtain the same brightness as the light emitting element 11 that is not deteriorated.

また、検知装置としては、既存の観察装置等に、この観察装置の照明手段12にて撮像が可能な照明点検治具20を配置し、この照明点検治具20に反射させて各発光素子11を映し出すようにすればよいので、装置として複雑化を招くことなく、簡単に構成することができ、低コスト化を達成できる。   Moreover, as a detection apparatus, the illumination inspection jig 20 which can be imaged with the illumination means 12 of this observation apparatus is arrange | positioned to the existing observation apparatus etc., It is made to reflect on this illumination inspection jig 20, Each light emitting element 11 Therefore, the apparatus can be easily configured without complication and cost reduction can be achieved.

画像処理手段22は、初期状態の各発光素子11の画像と、点検時の各発光素子11の画像とを比較するように設定できる。このように比較することによって、発光素子が劣化しているか否か及び/又は異常が発生しているか否かを安定して判断できる。   The image processing means 22 can be set to compare the image of each light emitting element 11 in the initial state with the image of each light emitting element 11 at the time of inspection. By comparing in this manner, it can be stably determined whether the light emitting element is deteriorated and / or whether or not an abnormality has occurred.

ところで、前記実施形態では、撮像手段13は、フォーカスを合わせた全発光素子11の画像を一度に映し出すようにしていたが、全発光素子11の内のフォーカスを合わせた所定数の発光素子11の画像を順次映し出すようにしたりできる。一度に映し出すものであれば、作業性の向上を図ることができ、順次映し出すものでは、各発光素子11の画像をより鮮明に映し出すことができ、高精度の検知が可能となる。   By the way, in the above-mentioned embodiment, although the image pickup means 13 was made to project the image of all the light emitting elements 11 which made the focus at once, of the predetermined number of light emitting elements 11 which made the focus in all the light emitting elements 11 Images can be projected sequentially. If it is projected at one time, the workability can be improved, and if it is projected sequentially, the image of each light emitting element 11 can be projected more clearly, and detection with high accuracy becomes possible.

また、照明点検治具20の照明可能状態と撮像対象の照明可能状態とを切り換えることができる。このため、通常の撮像対象Wの観察と発光素子11の観察とを行うことができ、しかも、照明点検治具が通常の撮像対象Wの観察を阻害せず、撮像対象Wが発光素子11の観察を阻害しない。   Further, it is possible to switch between the illuminable state of the illumination inspection jig 20 and the illuminable state of the imaging target. Therefore, normal observation of the imaging target W and observation of the light emitting element 11 can be performed, and furthermore, the illumination inspection jig does not disturb observation of the normal imaging target W, and the imaging target W is the light emitting element 11. It does not inhibit the observation.

ところで、図1では、照明手段12として、LED11から照明点検治具20等に直接光を照射できるダイレクト型ドーム照明を用いたが、図6に示すように、内面反射型のドーム照明を用いてもよい。この場合、ドーム15の下方開口部の内部側に周方向に沿ってLED11を複数個配置し、このLED11からの照射光をドーム内面15aに当てて、このドーム内面15aにて反射光(拡散光)を照明点検治具20やワークWに当てるものである。これによって、撮像手段13にて照明点検治具20やワークWの画像を得ることができる。   By the way, in FIG. 1, although direct type dome illumination which can irradiate light to LED inspection jig 20 grade | etc., Directly from LED11 was used as the illumination means 12, As shown in FIG. 6, using internal reflection type dome illumination It is also good. In this case, a plurality of LEDs 11 are disposed along the circumferential direction on the inner side of the lower opening of the dome 15, and the irradiation light from the LEDs 11 is applied to the dome inner surface 15a, and reflected light (diffuse light ) Is applied to the light inspection jig 20 and the work W. Thereby, the image of the illumination inspection jig 20 and the work W can be obtained by the imaging means 13.

このため、この図6に示す照明手段12では、照明点検治具20やワークWに対して間接光を照射することになる。このような場合であっても、照明点検治具20にて反射された反射光を撮像手段13に入光させることができる。これによって、フォーカス調整機構にて発光素子にフォーカスを合わせることができ、LED11の劣化、LED11毎の明るさのバラツキ、配置ずれ、又は光軸ずれ等の異常を検知することができる。   For this reason, in the illumination means 12 shown in FIG. 6, indirect light is irradiated to the illumination inspection jig 20 and the work W. Even in such a case, the reflected light reflected by the illumination inspection jig 20 can be incident on the imaging unit 13. By this, it is possible to focus on the light emitting element by the focus adjustment mechanism, and it is possible to detect an abnormality such as deterioration of the LED 11, variation in brightness among the LEDs 11, positional deviation, or optical axis deviation.

図7では、照明手段12としてリング照明を用いている。すなわち、この場合、照明点検治具20側に円錐面30aを有するリング体30におけるこの円錐面30aに複数のLED11を配列したものであり、LED11から照明点検治具20等に直接光を照射できる。   In FIG. 7, ring illumination is used as the illumination means 12. That is, in this case, a plurality of LEDs 11 are arrayed on the conical surface 30a of the ring body 30 having the conical surface 30a on the lighting inspection jig 20 side, and light can be directly emitted from the LEDs 11 to the lighting inspection jig 20 etc. .

このため、このような場合であっても、照明点検治具20にて反射された反射光を撮像手段13に入光させることができる。これによって、フォーカス調整機構21にて発光素子にフォーカスを合わせることができ、LED11の劣化、LED11毎の明るさのバラツキ、配置ずれ、又は光軸ずれ等の異常を検知することができる。   Therefore, even in such a case, the reflected light reflected by the illumination inspection jig 20 can be made to enter the imaging means 13. As a result, the light emitting element can be focused by the focus adjustment mechanism 21, and an abnormality such as deterioration of the LED 11, variation in brightness among the LEDs 11, positional deviation, or optical axis deviation can be detected.

本発明は前記実施形態に限定されることなく種々の変形が可能であって、例えば、前記実施形態では、照明点検治具の照明可能状態と撮像対象の照明可能状態とを切り換える場合、照明手段12側を固定して照明点検治具20側であるステージ16を移動させていたが、逆に、照明点検治具20側であるステージ16を固定して照明手段12側を移動させるようにしてよく、さらには、照明手段12側及び照明点検治具20側を移動させるものであってもよい。すなわち、照明手段側と照明点検治具側との少なくともいずれか一方を移動させるものであればよい。この場合、照明手段12側とは、照明手段12及び撮像手段13を含み、照明手段12側を移動させる場合、少なくとも照明手段12及び撮像手段13を移動させるが好ましい。   The present invention is not limited to the above embodiment, and various modifications are possible. For example, in the above embodiment, when switching between the illuminable state of the illumination inspection jig and the illuminable state of the imaging target, illumination means The stage 16 which is the lighting inspection jig 20 side is moved while fixing the 12 side, but conversely, the stage 16 which is the lighting inspection jig 20 side is fixed and the lighting means 12 side is moved Alternatively, the lighting unit 12 side and the lighting inspection jig 20 side may be moved. That is, it is sufficient to move at least one of the illumination means side and the illumination inspection jig side. In this case, the illumination means 12 side includes the illumination means 12 and the imaging means 13. When moving the illumination means 12 side, it is preferable to move at least the illumination means 12 and the imaging means 13.

また、照明点検治具20の形状として、鏡面反射特性を持ち照明手段12にて照明が可能で、かつ照明手段12からの直接光や間接光を反射して撮像手段13にその反射光を入光できればよく、球体、円すい形状体、角錐形状体(多面体)等の種々の形状のものを用いることができる。なお、図1に示すようなドーム照明であれば、反射面を、LED11が配置されるドーム内面の凹曲面に対応した凸曲面とするのが好ましく、図7に示すようなリング照明であれば、反射面を、LED11が配置される円すい面と同様の円すい面とするのが好ましい。すなわち、照明点検治具20としては、照明手段12のLED照明の配設面と同一形状の反射面を有するものが好ましい。このように、照明手段12のLED照明の配設面と同一形状の反射面を有するものであれば、全LED11の画像を安定して取得することができる。なお、照明手段12として、LED11の数及び配置ピッチ等は任意に設定できる。   Further, the shape of the illumination inspection jig 20 has a specular reflection characteristic and can be illuminated by the illumination means 12, and direct light and indirect light from the illumination means 12 are reflected to enter the reflected light into the imaging means 13. Any shape may be used as long as it can emit light, and various shapes such as a sphere, a cone, and a pyramid (polyhedron) can be used. In the case of dome illumination as shown in FIG. 1, it is preferable that the reflection surface be a convex surface corresponding to the concave surface of the inner surface of the dome on which the LED 11 is disposed, and in the case of ring illumination as shown in FIG. Preferably, the reflecting surface is a conical surface similar to the conical surface on which the LED 11 is disposed. That is, as the illumination inspection jig 20, one having a reflecting surface having the same shape as the arrangement surface of the LED illumination of the illumination means 12 is preferable. Thus, if it has a reflective surface of the same shape as the arrangement | positioning surface of the LED illumination of the illumination means 12, the image of all LED11 can be acquired stably. In addition, as the illumination means 12, the number of LED11 and arrangement pitch etc. can be set arbitrarily.

また、LED照明の照明ムラを解消するために、拡散板(拡散シート)を配設するのが好ましい。このように拡散板(拡散シート)を配置することによって、照明ムラを抑えることができて、検知装置の検知精度及び観察装置の検査精度の向上を図ることができる。拡散板(拡散シート)は、ポリカーボネイト、ポリエステル、アクリル、ガラス等からなり、表面に微細な凹凸構造を設け、その構造による屈折/回析作用により入射光を一定の角度に拡散させるものである。   Moreover, in order to eliminate the illumination nonuniformity of LED illumination, it is preferable to arrange a diffusion plate (diffusion sheet). By arranging the diffusion plate (diffusion sheet) in this manner, it is possible to suppress the illumination unevenness and to improve the detection accuracy of the detection device and the inspection accuracy of the observation device. The diffusion plate (diffusion sheet) is made of polycarbonate, polyester, acrylic, glass or the like, has a fine uneven structure on the surface, and diffuses incident light at a certain angle by the refraction / diffraction action by the structure.

前記実施形態では、各発光素子11の明るさを確認する画像処理手段22を備えたものであったが、このような画像処理手段22を備えることなく、作業者の目視によって、明るさを確認するものであってもよい。   In the embodiment described above, the image processing means 22 for confirming the brightness of each light emitting element 11 is provided, but without providing such an image processing means 22, the brightness is confirmed by visual observation by the operator. It may be

11 発光素子(LED)
12 照明手段
13 撮像手段
20 照明点検治具
21 フォーカス調整機構
22 画像処理手段
23 移動手段
W ワーク(撮像対象)
11 light emitting element (LED)
12 illumination means 13 imaging means 20 illumination inspection jig 21 focus adjustment mechanism 22 image processing means 23 moving means W work (imaging target)

Claims (9)

複数の発光素子にて撮像対象を種々の方向から照らすことが可能な照明手段と、この照明手段にて照明されている撮像対象を撮像する撮像手段とを備えた観察装置における、前記照明手段の複数の発光素子の状態を検知する検知装置であって、
鏡面反射特性を持ち前記照明手段にて照明が可能な照明点検治具を配置するとともに、前記撮像手段は各発光素子にフォーカスを合わせるフォーカス調整機構を備え、照明点検治具の撮像時において、このフォーカス調整機構にて各発光素子にフォーカスを合わせた状態で、各発光素子を撮像することを特徴とする検知装置。
In the observation device, an observation apparatus comprising: illumination means capable of illuminating an imaging object from various directions by a plurality of light emitting elements; and imaging means for imaging the imaging object illuminated by the illumination means A detection device for detecting the states of a plurality of light emitting elements, wherein
An illumination inspection jig having specular reflection characteristics and capable of being illuminated by the illumination means is disposed, and the imaging means includes a focus adjustment mechanism for focusing on each light emitting element, and the imaging means is provided with an imaging mechanism. A detection device characterized in that each light emitting element is imaged in a state in which each light emitting element is focused by a focus adjustment mechanism.
照明手段は、照明点検治具に対して直接光を照射することを特徴とする請求項1に記載の検知装置。   The detection device according to claim 1, wherein the illumination unit emits light directly to the illumination inspection jig. 照明手段は、照明点検治具に対して間接光を照射することを特徴とする請求項1に記載の検知装置。   The detection device according to claim 1, wherein the illumination unit irradiates the illumination inspection jig with indirect light. 前記撮像手段は、フォーカスを合わせた全発光素子の画像を一度に映し出すことを特徴とする請求項1〜請求項3に記載の検知装置。   The detection device according to any one of claims 1 to 3, wherein the imaging unit projects an image of all the light emitting elements in focus at one time. 前記撮像手段は、全発光素子の内のフォーカスを合わせた所定数の発光素子の画像を順次映し出すことを特徴とする請求項1〜請求項3に記載の検知装置。   The detection device according to any one of claims 1 to 3, wherein the imaging means sequentially projects an image of a predetermined number of light emitting elements which are in focus among all the light emitting elements. 照明点検治具を前記撮像手段にて撮像した画像に基づいて各発光素子の明るさを確認する画像処理手段を備えたことを特徴とする請求項1〜請求項5のいずれか1項に記載の検知装置。   The image processing means which confirms the brightness of each light emitting element based on the image which the illumination inspection jig was imaged with the said imaging means was provided, The image processing means of any one of the Claims 1-5 characterized by the above-mentioned. Detection device. 画像処理手段は、初期状態の各発光素子の画像と、点検時の各発光素子の画像とを比較することを特徴とする請求項6に記載の検知装置。   7. The detection device according to claim 6, wherein the image processing means compares the image of each light emitting element in the initial state with the image of each light emitting element at the time of inspection. 前記照明手段による照明点検治具の照明可能位置と、前記照明手段による前記撮像対象の照明可能位置とに、照明手段側と照明点検治具側との少なくともいずれか一方を移動させる移動手段を備えたことを特徴とする請求項1〜請求項7のいずれか1項に記載の検知装置。   It comprises moving means for moving at least one of the illumination means side and the illumination inspection jig side to the illuminable position of the illumination inspection jig by the illumination means and the illuminable position of the imaging object by the illumination means. The detection device according to any one of claims 1 to 7, characterized in that: 複数の発光素子にて撮像対象を種々の方向から照らすことが可能な照明手段と、この照明手段にて照明されている撮像対象を撮像する撮像手段とを備えた観察装置における、前記照明手段の複数の発光素子の状態を検知する検知方法であって、
鏡面反射特性を持ち前記照明手段にて照明が可能な照明点検治具を配置するとともに、この照明点検治具を撮像し、この照明点検治具の撮像時において、各発光素子にフォーカスを合わせ、この状態で、各発光素子を撮像して、各発光素子の画像を得ることを特徴とする検知方法。
In the observation device, an observation apparatus comprising: illumination means capable of illuminating an imaging object from various directions by a plurality of light emitting elements; and imaging means for imaging the imaging object illuminated by the illumination means A detection method for detecting the states of a plurality of light emitting elements, wherein
An illumination inspection jig having specular reflection characteristics and capable of being illuminated by the illumination means is disposed, and the illumination inspection jig is imaged, and at the time of imaging of the illumination inspection jig, each light emitting element is focused. In this state, each light emitting element is imaged to obtain an image of each light emitting element.
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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0678109A (en) * 1992-08-27 1994-03-18 Oki Electric Ind Co Ltd Illuminating light quantity reduction detector
JPH06201352A (en) * 1992-12-29 1994-07-19 Rozefu Technol:Kk Illuminance confirmation of lighting system
JPH08152311A (en) * 1994-11-28 1996-06-11 Toyota Central Res & Dev Lab Inc Profile inspection equipment for object
US20140333759A1 (en) * 2013-05-10 2014-11-13 Mettler-Toledo, LLC Machine vision inspection systems and methods and aperture covers for use therewith

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0678109A (en) * 1992-08-27 1994-03-18 Oki Electric Ind Co Ltd Illuminating light quantity reduction detector
JPH06201352A (en) * 1992-12-29 1994-07-19 Rozefu Technol:Kk Illuminance confirmation of lighting system
JPH08152311A (en) * 1994-11-28 1996-06-11 Toyota Central Res & Dev Lab Inc Profile inspection equipment for object
US20140333759A1 (en) * 2013-05-10 2014-11-13 Mettler-Toledo, LLC Machine vision inspection systems and methods and aperture covers for use therewith

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