JP2019086327A - Method and apparatus for inspecting leakage of valve gear - Google Patents

Abstract

To provide a method and apparatus for inspecting leakage of a valve gear, capable of easily and reliably inspecting leakage from a sealing member of sealing an operation member for opening/closing a valve element of the valve gear.SOLUTION: The inspection apparatus of leakage of a valve gear includes: a valve body having an inflow port in which fluid flows, and an outflow port from which the fluid flows out; a valve element for opening/closing a flow passage communicating the inflow port and the outflow port; an operation member fitted to the valve body in a sealed state via a sealing member and provided integrally with or separately from the valve element to open/close the valve element; and an inspection opening 68 that is opened to a member covering a non-sealed part located outward with respect to the sealing member of the operation member, and communicates the non-sealed part of the operation member and the outside. The inspection method of leakage of the valve gear includes: a press-in step of, in a state where one of the inflow port and outflow port of the valve gear is closed, pressing in inspection gas from the other; and a detection step of causing gas detection means to detect the inspection gas leaking out from the inspection opening to the outside.SELECTED DRAWING: Figure 20

Description

  BACKGROUND OF THE INVENTION Field of the Invention The present invention relates to a method and apparatus for inspecting leaks of valve devices.

  Conventionally, valve devices such as two-way valves and three-way valves are inspected for leaks of the valve devices as one of product inspections when assembly is completed. As a technique related to the leak inspection of the valve device, for example, the one disclosed in Patent Document 1 etc. has already been proposed.

  Patent Document 1 is a gas leak detection device (1) for detecting a leak of a gas sealed inside a test object (3) whose air tightness is to be tested, and a chamber (20) for containing the test object A concentration detection means (30) for detecting the concentration of a specific gas in the chamber and outputting a signal according to the concentration of the gas; and a gas supply unit (40) for supplying a gas detectable by the concentration detection means And at least one is provided between the gas supply unit and the inspection target, and the cylindrical port housing (16, 46) is accommodated in the port housing so as to be reciprocally movable, and the first space in the port housing is a first space (161, 162, 463, 464, 465) and a second space (151, 451) having communication passages (174, 471, 771) capable of communicating the first space with the second space. Valve member 17, 47, 77) and an end face (178, 473) of the valve member forming an opening (177, 472) on the second space side of the communication passage on the inner wall (160, 460) of the port housing A port (15) is formed of biasing members (19, 49) for biasing the valve member so as to abut and shut off the first space and the second space, and through which gas supplied by the gas supply unit can flow. , 45, 75), and when a force against the biasing force of the biasing member acts on the valve member, the valve member separates from the inner wall of the port housing, and It is comprised so that 1 space and the said 2nd space may connect.

Unexamined-Japanese-Patent No. 2015-105861

  An object of the present invention is to provide a method and an apparatus for inspecting a leak of a valve device capable of detecting a leak from a sealing member for sealing an operating member for opening and closing a valve body of the valve device easily and reliably. I assume.

The invention described in claim 1 is a valve body having an inlet through which fluid flows in and an outlet through which the fluid flows out;
A valve body for opening and closing a flow path connecting the inflow port and the outflow port;
An operating member mounted on the valve body in a sealed state via a sealing member and integrally or separately provided to the valve body to open and close the valve body;
Inspect the leak of a valve device having an opening for inspection which is opened in a member covering a non-sealing portion located outside the sealing member of the operation member and which communicates the non-sealing portion of the operation member with the outside In the leak check method of the valve device
A press-in step of pressing in a test gas from the other of the valve device with the one of the inlet and the outlet closed;
A detection step of detecting an inspection gas leaking from the inspection opening to the outside by a gas detection unit;
A method of inspecting a leak of a valve device, comprising:

  The invention described in claim 2 is the leak inspection method for a valve device according to claim 1, wherein the inspection gas is helium gas, and the gas detection means is a helium leak detector device.

  The invention described in claim 3 is the leak inspection method for the valve device according to claim 1 or 2, wherein the sealing member rotatably seals the rotation shaft of the valve body.

  The invention described in claim 4 is the leak inspection method for the valve device according to claim 3, wherein a plurality of the sealing members are provided along the axial direction of the rotation axis of the valve body.

  The invention described in claim 5 is the cylindrical member connecting the valve body and the drive unit for driving the valve body, wherein the member covering the non-sealing portion of the operating member is a cylindrical member according to any one of claims 1 to 4. It is a leak inspection method of the valve apparatus in any one.

  The invention described in claim 6 is the valve device according to any one of claims 1 to 5, wherein the gas detection means detects a leak of the inspection gas by bringing the detection unit close to the inspection opening. Leak inspection method.

The invention described in claim 7 is that the valve device has an inflow member connected to the inflow port to allow the fluid to flow in, and an outflow member connected to the outflow port to cause the fluid to flow out.
The leak inspection method according to any one of claims 1 to 6, wherein at the time of inspection, the valve device is closed by the closing member instead of the inflow member or the outflow member by a closing member. is there.

  The invention according to claim 8 is characterized in that in the press-in step, the pressure of the test gas pressed in from the other is 0.3 MPa or more in a state in which one of the inlet and the outlet of the valve device is closed. It is 1.5 Mpa or less, It is a leak inspection method of the valve apparatus in any one of the Claims 1 thru | or 7.

The invention described in claim 9 is a valve body having an inlet through which fluid flows in and an outlet through which the fluid flows out;
A valve body for opening and closing a flow path connecting the inflow port and the outflow port;
An operating member mounted on the valve body in a sealed state via a sealing member and integrally or separately provided to the valve body to open and close the valve body;
Inspect the leak of a valve device having an opening for inspection which is opened in a member covering a non-sealing portion located outside the sealing member of the operation member and which communicates the non-sealing portion of the operation member with the outside Leak check device of the valve device
A closing member closing at least one of the inlet and the outlet of the valve device;
A movable member and a fixed member that close the inlet or the outlet of the valve device not closed by the closing member by sandwiching the valve device;
Press-fit means provided on one of the movable member or the fixed member for press-fitting the test gas into the inside of the valve body;
A gas detection unit that detects a test gas leaking from the test opening to the outside;
And a leak inspection device for a valve device.

  The invention described in claim 10 is the leak inspection device for a valve device according to claim 9, characterized in that the press-fitting means is provided to the fixing member.

  According to the present invention, it is possible to provide a method and an apparatus for inspecting a leak of a valve device capable of detecting a leak from a sealing member for sealing an operating member for opening and closing a valve body of the valve device easily and reliably. Can.

It is an appearance perspective view showing a three-way valve type motor valve as an example of valve apparatus (three-way valve for flow control) which can apply a leak inspection method of a valve apparatus concerning Embodiment 1 of the present invention. They are a front view showing a three-way valve type motor valve as an example of a three-way valve for flow control concerning Embodiment 1 of the present invention, the same right side view, and a bottom view of an actuator part. It is the sectional view on the AA line of FIG.2 (b) which shows the three-way valve type motor valve as an example of the three way valve for flow control which concerns on Embodiment 1 of this invention. It is a BB line sectional view of Drawing 2 (a) showing a three-way valve type motor valve as an example of a three-way valve for flow control concerning Embodiment 1 of the present invention. It is the CC sectional view taken on the line of FIG. 2 (a) which shows the three-way valve type motor valve as an example of the three-way valve for flow control which concerns on Embodiment 1 of this invention. It is a cross-sectional block diagram which shows a valve main body. It is a cross-sectional perspective view which shows the principal part of the three-way valve type motor valve as an example of the three-way valve for flow control which concerns on Embodiment 1 of this invention. It is a disassembled perspective view which shows the principal part of the three-way valve type motor valve as an example of the flow control three-way valve which concerns on Embodiment 1 of this invention. It is a block diagram which shows a valve seat. It is a cross-sectional block diagram which shows the principal part of the three-way valve type motor valve as an example of the three-way valve for flow control which concerns on Embodiment 1 of this invention. It is a block diagram which shows a wave washer. It is a perspective view showing an adjustment ring. It is a cross-sectional block diagram which shows operation | movement of a valve shaft. It is a block diagram which shows a valve shaft. It is a block diagram which shows another valve stem. It is a block diagram which shows another valve stem. It is a cross-sectional block diagram which shows an effect | action of the three-way valve type motor valve as an example of the three way valve for flow control which concerns on Embodiment 1 of this invention. It is a cross-sectional block diagram which shows the three-way valve type motor valve as an example of the three-way valve for flow control which concerns on Embodiment 2 of this invention. It is a cross-sectional block diagram which shows the two-way valve type motor valve which concerns on Embodiment 3 of this invention. It is a block diagram which shows the leak inspection method of the valve apparatus which concerns on embodiment of this invention. It is a block diagram which shows the obstruction | occlusion state of a valve apparatus. It is a block diagram which shows the closing jig of a valve apparatus. It is a block diagram which shows the other closed state of a valve apparatus. It is a cross-sectional block diagram which shows the closing jig of a valve apparatus. It is a perspective view showing a closing jig of a valve device. It is a cross-sectional block diagram which shows the leakage path of the three-way valve type motor valve as an example of the flow control three-way valve which concerns on Embodiment 2 of this invention. It is a block diagram which shows the leak inspection apparatus of the valve apparatus which concerns on embodiment of this invention. It is a cross-sectional block diagram which shows the air cylinder of the leak inspection apparatus of the valve apparatus which concerns on embodiment of this invention. It is a circuit diagram showing a drive system which drives a leak inspection device of a valve device concerning an embodiment of the invention. It is a cross-sectional block diagram which shows a 5 port solenoid valve. It is a schematic block diagram which shows operation | movement of 5 port solenoid valve and an air cylinder.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

First Embodiment
FIG. 1 is an external perspective view showing a three-way valve type motor valve as an example of a valve device (three-way valve for flow rate control) to which the leak inspection method for a valve device according to Embodiment 1 of the present invention can be applied; (B) and (c) are a front view, the right side view and a bottom view of the actuator portion, FIG. 3 is a cross-sectional view taken along the line AA of FIG. 2 (b), and FIG. 4 is a line B-B of FIG. 5 is a sectional view taken along the line C-C in FIG. 2A, FIG. 6 is a sectional view showing a valve body of a three-way valve type motor valve, and FIG. 7 is a sectional view showing an essential part of the three way valve type motor valve FIG. 8 is an exploded perspective view showing an essential part of a three-way valve type motor valve.

  The three-way valve type motor valve 1 is configured as a rotary three-way valve. As shown in FIG. 1, the three-way valve type motor valve 1 is roughly divided into a valve portion 2 disposed at the lower portion, an actuator portion 3 disposed at the upper portion, and disposed between the valve portion 2 and the actuator portion 3 The seal portion 4 and the coupling portion 5 are provided. The actuator unit 3 is disposed on the top of the coupling unit 5, and the inside constitutes a closed space.

  The valve part 2 is provided with the valve | bulb main body 6 formed in substantially rectangular parallelepiped shape by metals, such as SUS, as shown in FIG. 2 thru | or FIG. As shown in FIGS. 3 and 4, the valve body 6 includes a first outlet 7 from which fluid flows out to one side surface (left side in the illustrated example), and a valve seat including a cylindrical space A first valve port 9 having a rectangular cross section communicating with 8 is provided.

  In the present embodiment, the first outlet 7 and the first valve port 9 are not directly provided to the valve main body 6, but an example of a first valve port forming member in which the first valve port 9 is formed. By attaching the first valve seat 70 and the first flow path forming member 15 forming the first outlet 7 to the valve main body 6, the first outlet 7 and the first valve port 9 can be obtained. It is provided. The first outlet 7 and the first valve port 9 may of course be provided directly in the valve body 6.

  As shown in FIG. 9, the first valve seat 70 is formed into a rectangular cylindrical portion 71 formed in a rectangular cylindrical shape disposed inside the valve main body 6 and a cylindrical shape disposed outside the valve main body 6 The cylindrical portion 72 is integrally provided with a tapered portion 73 disposed between the rectangular cylindrical portion 71 and the cylindrical portion 72 so that the outer diameter is increased toward the cylindrical portion 82 side. A prismatic first valve port 9 having a rectangular (in the present embodiment, a square) cross section is formed in the inside of the rectangular cylindrical portion 71 of the first valve seat 70. In addition, one end portion of the first flow passage forming member 15 forming the first outlet 7 is inserted into the cylindrical portion 72 of the first valve seat 70 in a sealed state. ing. As shown in FIG. 4, the space between the cylindrical portion 72 of the first valve seat 70 and the first flow path forming member 15 is sealed by an O-ring 15a. As shown in FIG. 9, a recessed groove 75 for accommodating the O-ring 15 a is provided on the inner peripheral surface of the cylindrical portion 72 of the first valve seat 70.

  As a material of the first valve seat 70, for example, a so-called "super engineering plastic" is used. Super engineering plastics have heat resistance and mechanical strength at high temperatures that exceed conventional engineering plastics. As super engineering plastics, polyetheretherketone (PEEK), polyphenylene sulfide (PPS), polyethersulfone (PES), polyamide imide (PAI), liquid crystal polymer (LCP), polytetrafluoroethylene (PTFE), polychlorotriol Fluoroethylene (PCTFE), polyvinylidene fluoride (PVDF), or a composite material of these, etc. may be mentioned. In addition, as a material of the first valve seat 70, for example, “TECAPEEK” (registered trademark), which is a PEEK resin material for cutting process manufactured by Enzinger Japan Co., Ltd., in particular 10% PTFE, is used as a sliding property. And “TECAPEEK TF 10 blue” (trade name), etc. are preferably used.

  As shown in FIG. 6 and FIG. 7, a recess 76 having a shape similar to that of the first valve seat 70 is formed in the valve body 6 by cutting or the like. The recess 76 is provided with a square cylinder 76 a corresponding to the square cylinder 71 of the first valve seat 70, a cylinder 76 b corresponding to the cylinder 72, and a taper 76 c corresponding to the taper 73. . The cylindrical portion 76 b of the valve body 6 is set to be longer than the cylindrical portion 72 of the first valve seat 70. The cylindrical portion 76b of the valve body 6 forms a first pressure acting portion 94, as described later. The first valve seat 70 is movably attached to the recess 76 of the valve main body 6 in a direction in which the first valve seat 70 abuts on and away from the valve shaft 34 serving as the valve body, though at a minute distance.

  When the first valve seat 70 is mounted in the recess 76 of the valve main body 6, the first valve seat 70 is minute between the outer peripheral surface of the first valve seat 70 and the inner peripheral surface of the recess 76 of the valve main body 6. Gap is formed. The fluid that has flowed into the inside of the valve seat 8 can leak and flow into the region of the outer periphery of the first valve seat 70 through a minute gap. Further, the fluid that has leaked to the area of the outer periphery of the first valve seat 70 is introduced to the first pressure application portion 94 formed of a space located outside the cylindrical portion 72 of the first valve seat 70. . The first pressure acting portion 94 causes the pressure of the fluid to act on the surface 70 a of the first valve seat 70 opposite to the valve stem 34. The fluid flowing into the inside of the valve seat 8 is a fluid flowing out through the second valve port 18 as described later, in addition to the fluid flowing out through the first valve port 9. The first pressure application portion 94 is partitioned between the first outlet 7 and the first flow passage forming member 15 in a sealed manner.

  The pressure of the fluid acting on the valve stem 34 disposed inside the valve seat 8 depends on the flow rate of the fluid depending on the degree of opening and closing of the valve stem 34. The fluid flowing into the inside of the valve seat 8 also flows into a minute gap formed between the valve seat 8 and the outer peripheral surface of the valve shaft 34 via the first valve port 9 and the second valve port 18. (Leakage). Therefore, the first pressure application portion 94 corresponding to the first valve seat 70 is formed between the valve seat 8 and the outer peripheral surface of the valve shaft 34 in addition to the fluid flowing out from the first valve port 9. The fluid flowing out of the second valve port 18 that has flowed into the minute gap also flows in (leaks in).

  Further, as shown in FIGS. 3, 4 and 7, a minute gap is formed between the tapered portion 73 of the first valve seat 70 and the tapered portion 76 c of the recess 76. As a result, when the first valve seat 70 is mounted, the recess 76 of the valve main body 6 is a valve corresponding to a minute gap between the tapered portion 73 and the tapered portion 76 c of the recess 76. The seat 70 is movable (displaced) about several hundred μm to several mm along the inside and outside direction of the valve body 6, and the mounting position of the valve seat 70 is adjustable.

  As shown in FIG. 9B, a portion of a cylindrical curved surface corresponding to a cylindrical valve seat 8 formed on the valve main body 6 is provided at the end of the rectangular cylindrical portion 71 of the first valve seat 70. The recessed part 74 as an example of the space | interval shrinking | reduction part of the plane circular arc shape to comprise is provided. The radius of curvature R of the recess 74 is set to a value substantially equal to the radius of curvature of the valve seat 8 or the radius of curvature of the valve shaft 34. The valve seat 8 of the valve body 6 forms a slight gap with the outer peripheral surface of the valve stem 34 in order to prevent turning of the valve stem 34 rotating inside the valve seat 8 as described later. There is. The recessed portion 74 of the first valve seat 70 projects toward the valve shaft 34 from the valve seat 8 of the valve body 6 in a state where the first valve seat 70 is mounted on the valve body 6 as shown in FIG. Or mounted in contact with the outer peripheral surface of the valve stem 34. As a result, the gap G between the valve shaft 34 and the inner surface of the valve seat 8 of the valve main body 6 as a member facing the valve shaft 34 corresponds to the gap of the valve seat 8 corresponding to the protrusion of the first valve seat 70. It is set to a partially reduced value compared to the other parts. Thus, the gap G1 between the recess 74 of the first valve seat 70 and the valve shaft 34 is smaller than the gap G2 between the valve shaft 34 and the inner surface of the valve seat 8 (G1 <G2) It is set. The gap G1 between the recess 74 of the first valve seat 70 and the valve stem 34 is in a state where the recess 74 of the valve seat 70 contacts the valve stem 34, that is, no gap (gap G1 = 0). Also good.

  However, when the recess 74 of the first valve seat 70 contacts the valve shaft 34, the drive torque of the valve shaft 34 may increase due to the contact resistance of the recess 74 when the valve shaft 34 is rotationally driven. . Therefore, the degree to which the recess 74 of the first valve seat 70 contacts the valve stem 34 is adjusted in consideration of the rotational torque of the valve stem 34. That is, the drive torque of the valve shaft 34 does not increase, or even if it increases, the amount of increase is small, and adjustment is made to such an extent that the rotation of the valve shaft 34 is not hindered.

  As shown in FIG. 8, the first flow path forming member 15 is formed of a metal such as SUS in a relatively thin cylindrical shape. The first flow path forming member 15 internally has a first outlet 7 communicated with the first valve port 9 regardless of the positional change of the first valve seat 70.

  While allowing the first valve seat 70 to be displaced in a direction in which the first valve seat 70 comes in contact with or separates from the valve shaft 34, the first valve seat 70 can be displaced to the outside along the axial direction of the cylindrical portion 72 of the first valve seat 70. A first wave washer (wave washer) 16 is provided as an example of an elastic member that allows the valve seat 70 to move in the direction of coming into and coming out of contact with the valve shaft 34. As shown in FIG. 11, the first wave washer 16 is made of stainless steel, iron, phosphor bronze or the like, and the shape projected on the front is formed in an annular shape having a required width. Further, the first wave washer 16 is formed in a wave shape (wave shape) in side surface shape, and can be elastically deformed along the thickness direction. The elastic modulus of the first wave washer 16 is determined by the thickness, the material, the number of waves, or the like. The first wave washer 16 is accommodated in the first pressure acting portion 94.

  Furthermore, on the outside of the first wave washer 16, as an example of an adjustment member for adjusting the gap G1 between the valve shaft 34 and the recess 74 of the first valve seat 70 via the first wave washer 16, One adjustment ring 77 is disposed. The first adjustment ring 77 is, as shown in FIG. 12, formed of a cylindrically-shaped member having a relatively short length and a male screw 77a formed on the outer peripheral surface by a synthetic resin or metal having heat resistance. . When the first adjustment ring 77 is tightened to the female screw portion 78 provided on the valve main body 6 at the outer end face of the first adjustment ring 77, the amount of tightening adjustment is not shown. Recesses 77 b for locking the jig and rotating the first adjustment ring 77 are provided at positions facing each other 180 degrees.

  As shown in FIG. 6, the valve body 6 is provided with a first female screw portion 78 for mounting the first adjustment ring 77. A tapered portion 79 is provided at the open end of the valve body 6 so as to expand in diameter toward the outer periphery. An O-ring 79 a is interposed in the tapered portion 79.

  The first adjustment ring 77 adjusts the amount of tightening of the valve body 6 with respect to the female screw portion 78 so that the first adjustment ring 77 passes the first valve seat 70 via the first wave washer 16. The amount (distance) of pushing inward is adjusted. When the amount of tightening of the first adjustment ring 70 is increased, the first valve seat 70 is pushed by the first adjustment ring 77 through the first wave washer 16 as shown in FIG. 74 protrudes from the inner circumferential surface of the valve seat 8 and is displaced in the direction approaching the valve stem 34, and the gap G1 between the recess 74 and the valve stem 34 is reduced. Further, when the tightening amount of the first adjustment ring 77 is set to a small amount in advance, the distance pressed by the first adjustment ring 77 decreases and the first valve seat 70 is separated from the valve shaft 34 The gap G1 between the recess 74 of the first valve seat 70 and the valve stem 34 is relatively increased. The male screw 77a of the first adjustment ring 77 and the female screw 78 of the valve main body 6 are set to have a small pitch, so that the amount of protrusion of the first valve seat 70 can be finely adjusted.

  Further, as shown in FIG. 3 and FIG. 4, a first flange member 10 as an example of a connecting member is connected to one side surface of the valve main body 6 to connect a pipe or the like (not shown) for discharging the fluid. It is attached by the bolt 11 with a hole. The code | symbol 11a has shown the screw hole by which the hexagon socket head cap bolt 11 is fastened in FIG. The first flange member 10 is formed of a metal such as SUS similarly to the valve body 6. The first flange member 10 has a flange portion 12 formed in a side surface rectangular shape substantially the same as the side surface shape of the valve main body 6, and an insertion portion 13 projecting in a cylindrical shape on the inner side surface of the flange portion 12 (FIG. 3) And a pipe connection portion 14 which is provided in a thick and substantially cylindrical shape on the outer surface of the flange portion 12 and is connected to a pipe (not shown). As shown in FIG. 4, an O-ring 13 a seals the space between the insertion portion 13 of the first flange member 10 and the first flow path forming member 15. The inner peripheral surface of the insertion portion 13 of the first flange member 10 is provided with a recessed groove 13 b for accommodating the O-ring 13 a. The inner circumference of the pipe connection portion 14 is set, for example, to Rc1 / 2, which is a tapered female thread having a diameter of about 21 mm, or a female thread having a diameter of about 0.58 inch. Note that the shape of the pipe connection portion 14 is not limited to a tapered female screw or female screw, and may be a tube fitting or the like to which a tube is attached. Just do it.

  As shown in FIGS. 3 and 4, the valve body 8 includes a second outlet 17 from which the fluid flows out to the other side (the right side in the drawing) and a cylindrical seat 8 as shown in FIGS. A second valve port 18 having a rectangular cross-section communicating with each other is provided.

  In the present embodiment, the second outlet 17 and the second valve port 18 are not directly provided to the valve body 6, but a second valve port forming member in which the second valve port 18 is formed. A second flow outlet 17 and a second valve port 18 are provided by mounting the valve seat 80 and the second flow passage forming member 25 having the second flow outlet 17 on the valve body 6. .

  The second valve seat 80 is configured in the same manner as the first valve seat 70, as indicated by the reference numerals in parentheses in FIG. That is, the second valve seat 80 has a rectangular cylindrical portion 81 formed in a rectangular cylinder shape disposed inside the valve main body 6 and a cylindrical portion 82 formed in a cylindrical shape disposed outside the valve main body 6 And a tapered portion 83 disposed between the rectangular tube portion 81 and the cylindrical portion 82 so as to increase in outer diameter toward the cylindrical portion 82 side. Inside the square tube portion 81 of the second valve seat 80, a rectangular second valve port 18 having a rectangular (in the present embodiment, a square) cross section is formed. In addition, one end portion of the second flow path forming member 25 forming the second outlet 17 is arranged to be inserted in a sealed state inside the cylindrical portion 82 of the second valve seat 80 ing. An O-ring 25a seals the space between the cylindrical portion 82 of the second valve seat 80 and the second flow passage forming member 25 as shown in FIG. As shown in FIG. 9, a recessed groove 85 for accommodating the O-ring 25 a is provided on the inner peripheral surface of the cylindrical portion 82 of the second valve seat 80.

  As shown in FIGS. 6 and 7, a recess 86 having a shape similar to that of the second valve seat 80 is formed in the valve body 6 by cutting or the like. The recess 86 includes a rectangular cylinder 86 a corresponding to the rectangular cylinder 81 of the second valve seat 80, a cylinder 86 b corresponding to the cylinder 82, and a taper 86 c corresponding to the taper 83. . The cylindrical portion 86 b of the valve body 6 is set to be longer than the cylindrical portion 82 of the second valve seat 80. The cylindrical portion 86 b of the valve body 6 forms a second pressure acting portion 96 as described later. The second valve seat 80 is movably attached to the recess 86 of the valve main body 6 in a direction in which the second valve seat 80 is in contact with and separated from the valve shaft 34 as a valve element.

  When the second valve seat 80 is mounted in the recess 86 of the valve body 6, a minute gap is formed between the square tube portion 81 of the valve seat 80 and the square tube portion 86 a of the valve body 6. It is done. The fluid that has flowed into the valve seat 8 can flow into the area of the outer periphery of the second valve seat 80 through a minute gap. Further, the fluid that has flowed into the area of the outer periphery of the second valve seat 80 is introduced into the second pressure application portion 96 formed of a space located outside the cylindrical portion 82 of the second valve seat 80. . The second pressure acting portion 96 exerts the pressure of the fluid on the surface 80 a of the second valve seat 80 opposite to the valve stem 34. The fluid flowing into the valve seat 8 includes the fluid flowing out through the second valve port 18 and the fluid flowing out through the first valve port 9. The second pressure application portion 98 is partitioned between the second outlet 17 and the second flow passage forming member 25 in a sealed manner.

  The pressure of the fluid acting on the valve stem 34 disposed inside the valve seat 8 depends on the flow rate of the fluid depending on the degree of opening and closing of the valve stem 34. The fluid flowing into the inside of the valve seat 8 also flows into a minute gap formed between the valve seat 8 and the outer peripheral surface of the valve shaft 34 via the first valve port 9 and the second valve port 18. (Leakage). Therefore, the second pressure acting portion 96 corresponding to the second valve seat 80 is formed between the valve seat 8 and the outer peripheral surface of the valve shaft 34 in addition to the fluid flowing out from the second valve port 18. The fluid flowing out of the first valve port 9 that has flowed into the very small gap also flows in.

  Further, as shown in FIGS. 3 and 4, a minute gap is formed between the tapered portion 83 of the second valve seat 80 and the tapered portion 86 c of the recess 86. As a result, when the second valve seat 80 is mounted, the recess 86 of the valve main body 6 is a valve corresponding to a minute gap between the tapered portion 83 and the tapered portion 86c of the recess 86. The seat 80 is movable along the inward and outward directions of the valve body 6 over several hundred μm to several mm, and the mounting position of the valve seat 80 can be adjusted. The second valve seat 80 is formed of the same material as the first valve seat 70.

  As shown in FIG. 9 (b), a portion of a cylindrical curved surface corresponding to a cylindrical valve seat 8 formed on the valve main body 6 is provided at the tip of the rectangular cylindrical portion 81 of the second valve seat 80. The recessed part 84 as an example of the space | interval shrinking | reduction part of the plane circular arc shape to comprise is provided. The radius of curvature R of the recess 84 is set to a value substantially equal to the radius of curvature of the valve seat 8 or the radius of curvature of the valve shaft 34. The valve seat 8 of the valve body 6 forms a slight gap with the outer peripheral surface of the valve stem 34 in order to prevent turning of the valve stem 34 rotating inside the valve seat 8 as described later. There is. The concave portion 84 of the second valve seat 80 is mounted so as to protrude from the valve seat 8 of the valve main body 6 toward the valve shaft 34 in a state where the second valve seat 70 is mounted to the valve main body 6, or It is mounted so as to contact the outer peripheral surface of the valve stem 34. As a result, the gap G between the valve shaft 34 and the inner surface of the valve seat 8 of the valve main body 6 as a member facing the valve shaft 34 corresponds to the gap of the valve seat 8 corresponding to the protrusion 84 of the second valve seat 80 It is set to a partially reduced value compared to the other parts. Thus, the gap G3 between the recess 84 of the second valve seat 80 and the valve shaft 34 is a required value (G3 <G2) narrower (smaller) than the gap G2 between the valve shaft 34 and the inner surface of the valve seat 8 It is set. The gap G3 between the recess 84 of the second valve seat 80 and the valve shaft 34 is in a state where the recess 84 of the valve seat 80 is in contact with the valve shaft 34, that is, no gap (gap G3 = 0) Also good.

  However, when the recess 84 of the second valve seat 80 contacts the valve shaft 34, the drive torque of the valve shaft 34 may increase due to the contact resistance of the recess 84 when the valve shaft 34 is rotationally driven. . Therefore, the extent to which the recess 84 of the second valve seat 70 contacts the valve stem 34 is initially adjusted in consideration of the rotational torque of the valve stem 34. That is, the drive torque of the valve shaft 34 does not increase, or even if it increases, the amount of increase is small, and adjustment is made to such an extent that the rotation of the valve shaft 34 is not hindered.

  While allowing the second valve seat 80 to be displaced in a direction in which the second valve seat 80 comes in contact with or separates from the valve stem 34, the second valve seat 80 is provided outside the cylindrical portion 82 of the second valve seat 80. A second wave washer (corrugated washer) 26 is provided as an example of an elastic member that pushes in a direction of contact with the valve stem 34. As shown in FIG. 11, the second wave washer 26 is made of stainless steel, iron, phosphor bronze or the like, and the shape projected on the front is formed in an annular shape having a required width. Further, the second wave washer 26 is formed in a wave shape (wave shape) in side surface shape, and can be elastically deformed along the thickness direction. The elastic modulus of the second wave washer 26 is determined by the thickness, the material, the number of waves, or the like. As the second wave washer 26, the same one as the first wave washer 16 is used.

  Furthermore, on the outside of the second wave washer 26, as an example of an adjustment member for adjusting the gap G3 between the valve shaft 34 and the recess 84 of the second valve seat 80 via the second wave washer 26, Two adjustment rings 87 are arranged. The second adjustment ring 87 is, as shown in FIG. 12, formed of a cylindrically shaped member having a relatively short length and having an external thread 87a formed on the outer peripheral surface by a synthetic resin or metal having heat resistance. . When the second adjustment ring 87 is tightened to the female screw portion 88 provided on the valve main body 6 at the outer end face of the second adjustment ring 87, the amount of tightening adjustment is not shown. Recesses 87b for locking the jig and rotating the second adjustment ring 87 are provided at positions facing each other 180 degrees.

  As shown in FIGS. 6 and 7, the valve body 6 is provided with a second female screw portion 88 for mounting a second adjustment ring 87. A tapered portion 89 is provided at the open end of the valve body 6 so as to expand in diameter toward the outer periphery. An O-ring 89 a is interposed in the tapered portion 89.

  The second adjustment ring 87 adjusts the amount of tightening of the valve body 6 with respect to the female screw portion 88 so that the second adjustment ring 877 passes the second valve seat 80 via the second wave washer 26. The amount (distance) of pushing inward is adjusted. When the amount of tightening of the second adjustment ring 87 is increased, the second valve seat 80 is pushed by the second adjustment ring 87 through the second wave washer 26, as shown in FIG. 84 protrudes from the inner circumferential surface of the valve seat 8 and is displaced in the direction approaching the valve stem 34, and the gap G3 between the recess 84 and the valve stem 34 is reduced. In addition, when the tightening amount of the second adjustment ring 87 is set to a small amount in advance, the distance by which the second valve ring 80 is pushed by the second adjustment ring 87 decreases, and the second valve seat 80 is separated from the valve shaft 34 The gap G3 between the recess 84 of the second valve seat 80 and the valve stem 34 is relatively increased. The pitch of the male screw 87a of the second adjustment ring 87 and the female screw portion 88 of the valve main body 6 are set to be small, and the amount of projection of the second valve seat 80 can be finely adjusted.

  On the other side of the valve body 6, as shown in FIG. 3 and FIG. 4, a second flange member 19 as an example of a connecting member for connecting a pipe (not shown) for draining fluid is provided with four hexagonal holes It is attached by a bolt 20. Similar to the first flange member 10, the second flange member 19 is formed of a metal such as SUS. The second flange member 19 has a flange portion 21 formed in the same side rectangular shape as the side shape of the valve main body 6, an insertion portion 22 projectingly provided in a cylindrical shape on the inner side surface of the flange portion 21, and a flange portion A thick and substantially cylindrical shape is provided on the outer surface of the housing 21 so as to project therefrom, and has a pipe connection portion 23 to which a pipe (not shown) is connected. As shown in FIG. 4, the O-ring 22 a seals the space between the insertion portion 22 of the second flange member 19 and the second flow path forming member 25. The inner peripheral surface of the insertion portion 22 of the second flange member 19 is provided with a recessed groove 22 b for accommodating the O-ring 22 a. The inner circumference of the pipe connection portion 23 is set, for example, to Rc1 / 2, which is a tapered female thread having a diameter of about 21 mm, or a female thread having a diameter of about 0.58 inch. The shape of the pipe connection portion 23 is not limited to the tapered female screw or female screw similarly to the pipe connection portion 14, and may be a tube fitting or the like for mounting a tube, and the fluid from the second outlet 17 As long as it can leak out.

  In the embodiment shown in FIGS. 3 and 4, the case where the first and second flow passage forming members 15 and 25 are provided to extend over the first and second flange members 10 and 19 is illustrated. The first and second flow path forming members 15 and 25 may be shorter than this. That is, as shown in FIG. 7, the first and second flow passage forming members 15 and 25 are disposed on the inner side of the first and second adjustment rings 77 and 87 respectively. It may be set to a relatively short length reaching up to 97, 98. The first and second adjustment rings 77 and 87 are disposed inside the first and second pressure acting portions 96 in the same manner as the first and second wave washers 16 and 26. A concave groove 97a for accommodating an O-ring (not shown) for sealing between the first and second flow path forming members 15, 25 on the inner and outer peripheral surfaces of the first and second adjustment rings 77, 87 , 98a are formed. Further, the first and second flange members 10 and 19 are not sealed by the O-ring 89a interposed in the taper portion 89 provided in the valve main body 6, but as shown in FIG. It may be configured to be sealed by O-rings 79a, 89a mounted in the recessed grooves 12a, 21a provided on the inner surfaces of the flange portions 12, 21 of the second flange members 10, 19.

  Here, as the fluid, for example, water (pure water or the like) whose pressure is adjusted to a temperature of about 0 to 1 MPa and a temperature of about 0 to 80 ° C. is suitably used. Further, as a fluid, for example, in a temperature range of about -20 to + 120 ° C., it does not freeze even at a temperature of about -20 ° C., and does not boil at about + 120 ° C. And fluids such as ethylene glycol are used.

  Further, as shown in FIG. 3, the valve main body 6 has an inflow port 26 having a circular cross-sectional shape as a third valve port through which the fluid flows into the lower end surface thereof. A third flange member 27 as an example of a connection member is attached to the lower end surface of the valve main body 6 by four hexagonal socket bolts 28 in order to connect a pipe (not shown) into which fluid flows. At the lower end portion of the inflow port 26, a cylindrical portion 26b is opened via a tapered portion 26a which is enlarged in diameter in order to mount the third flange member 27. As shown in FIG. 7, only the cylindrical portion 26 b may be provided at the lower end portion of the inflow port 26 without providing the tapered portion 26 a. The third flange member 27 is formed of metal such as SUS similarly to the first and second flange members 10 and 19. The third flange member 27 has a flange portion 29 formed in a flat rectangular shape smaller than the lower end surface shape of the valve body 6, an insertion portion 30 provided in a cylindrical shape so as to project from the upper end surface of the flange portion 29, and a flange portion It has a thick and substantially cylindrical shape projecting from the lower end face of the joint 29, and has a pipe connection portion 31 to which a pipe (not shown) is connected. The inner circumference of the pipe connection portion 31 is set, for example, to Rc1 / 2, which is a tapered female thread having a diameter of about 21 mm, or a female thread having a diameter of about 0.58 inch. A chamfer 33 for mounting an O-ring 32 between the lower end inner peripheral end of the inflow port 26 of the valve main body 6 and the flange portion 29 of the third flange member 27 is provided. The shape of the pipe connection portion 31 is not limited to a tapered female screw or a female screw, and may be a tube fitting or the like to which a tube is attached, as long as the fluid can flow from the inflow port 26. In addition, the sealing structure of the flange part 29 of the 3rd flange member 27 is not shown provided in the inner surface of the flange part 29 like the 1st and 2nd flange members 10 and 19 as shown in FIG. It may be configured to be sealed by an O-ring attached to the recessed groove.

  A valve seat provided with a first valve port 9 having a rectangular cross-sectional shape and a second valve port 18 having a rectangular cross-sectional shape by mounting first and second valve seats 70, 80 at the center of the valve body 6 It has eight. The valve seat 8 is formed of a hollow space formed in a cylindrical shape corresponding to the outer shape of the valve body described later. Further, a part of the valve seat 8 is formed by the first and second valve seats 70 and 80. A cylindrical valve seat 8 is provided to penetrate the upper end surface of the valve body 6. As shown in FIG. 13, the first valve port 9 and the second valve port 18 provided in the valve main body 6 are axially symmetrical with respect to the central axis (rotational axis) C of the valve seat 8 formed in a cylindrical shape. Is located in More specifically, the first valve port 9 and the second valve port 18 are disposed orthogonal to the cylindrical valve seat 8, and one end of the first valve port 9 is disposed. The edge is opened at a position (a position different by 180 degrees) opposite to the other edge of the second valve port 18 via the central axis C. The other end of the first valve port 9 is opened at a position (a position different by 180 degrees) opposite to one end of the second valve port 18 via the central axis C. In FIG. 13, the gap between the valve seat 8 and the valve shaft 34 is not shown for convenience.

  In addition, as shown in FIGS. 3 and 4, the first valve port 9 and the second valve port 18 have the first and second valve seats 70 and 80 attached to the valve body 6 as described above. And an opening formed in a rectangular shape in cross section such as a square shape in cross section. The length of one side of the first valve port 9 and the second valve port 18 is set smaller than the diameters of the first outlet 7 and the second outlet 17, and the first outlet 7 And the second outlet 17 is formed in a rectangular shape in cross section.

  As shown in FIG. 14, the outer diameter of the valve shaft 34 as an example of the valve body is formed in a substantially cylindrical shape by a metal such as SUS. The valve stem 34 is roughly divided into a valve body 35 which functions as a valve body, upper and lower bearing portions 36 and 37 which are respectively provided above and below the valve body 35 and rotatably support the valve stem 34, and A seal portion 38 provided on the upper portion of the bearing portion 36 and a coupling portion 40 provided on the upper portion of the seal portion 38 via a taper portion 39 are integrally provided.

  The upper and lower shaft support portions 36 and 37 are each formed in a cylindrical shape set so as to have a smaller outside diameter than the valve body portion 35 and have the same or different diameters. The length of the lower shaft support 37 in the axial direction is set to be slightly longer than the upper shaft support 36. As shown in FIG. 3, the lower shaft support portion 37 is rotatably supported at the lower end portion of the valve seat 8 provided in the valve main body 6 via a bearing 41. At the lower part of the valve seat 8, an annular support portion 42 for supporting the bearing 41 is provided so as to protrude toward the inner periphery. The bearing 41, the support portion 42, and the third valve port 26 are set to the same inner diameter, and the temperature control fluid flows into the inside of the valve body portion 35 with almost no resistance. . On the other hand, a thrust washer 43 is attached to the upper shaft support portion 36, and a load generated when the valve shaft 34 is pressed by a seal housing 53 described later is reduced.

  Further, as shown in FIGS. 3 and 14B, the valve body portion 35 has a substantially semi-cylindrical shape having an opening height H2 whose height is lower than the opening height H1 of the first and second valve ports 9 and 18. The opening 44 is formed in a cylindrical shape. The valve operation unit 45 provided with the opening 44 of the valve body 35 has a semi-cylindrical shape (a cylindrical shape with a predetermined central angle α (for example, about 190 degrees)) excluding the opening 44 (Generally semi-cylindrical shape). The valve operation unit 45 switches the first valve port 9 from the closed state to the open state including the valve body portions 35 located above and below the opening 44, and at the same time opens the second valve port 18 in the reverse direction. It is rotatably disposed in the valve seat 8 so as to be switched to the closed state and on the inner circumferential surface of the valve seat 8 so as to be in a non-contact state via a minute gap in order to prevent turning of metals. The upper and lower valve stems 46 and 47 disposed above and below the valve operating portion 45 are formed in a cylindrical shape having the same outer diameter as the valve operating portion 45 as shown in FIG. It is rotatable in a non-contact state with a minute gap on the inner circumferential surface. Inside the valve operating portion 45, the upper and lower valve stem portions 46 and 47, and the sealing portion 38, a cylindrical space 48 is provided so as to penetrate toward the lower end portion.

  Further, the valve operating portion 45 is formed to have a curved shape in cross section along the direction in which both end surfaces 45a and 45b along the circumferential direction (rotational direction) intersect (orthogonal) with the central axis C. More specifically, as shown in FIG. 14, the valve operating portion 45 has an arc shape in which the cross-sectional shape intersecting the rotation axes C of both end portions 45 a and 45 b along the circumferential direction forms a convex shape toward the opening 44. It is formed. The radius of curvature of the end portions 45 a and 45 b is set to, for example, one half of the thickness T of the valve operation unit 45. As a result, the cross-sectional shape of the both end portions 45a and 45b is semicircular.

  The valve operating portion 45 is not limited to a circular arc in cross section intersecting the rotation axes C of both end portions 45a and 45b along the circumferential direction, and both end surfaces 45a and 45b along the circumferential direction (rotational direction) May be formed in a curved shape. As the valve operation portion 45, as shown in FIG. 15 (b), a first curved portion 50 whose cross-sectional shape intersecting the rotation axes C of both end portions 45a, 45b along the circumferential direction is located on the outer peripheral surface side It is also possible to form a second curve portion 51 located on the inner peripheral surface side and having a curvature radius smaller than that of the first curve portion 50 in a smoothly connected curve shape.

  As shown in FIG. 15, when the valve shaft 34 is rotationally driven to open and close the first and second valve ports 9, 18 as shown in FIG. The first and second valve ports 9, 9 are moved (rotated) so as to project or retract from the end along the circumferential direction of the first and second valve ports 9, 18 in the flow of 18 is shifted from the open state to the closed state or from the closed state to the open state. At this time, both end portions 45a and 45b along the circumferential direction of the valve operation portion 45 make the opening areas of the first and second valve ports 9, 18 with respect to the rotation angle of the valve shaft 34 more linear (linearly). In order to change, it is desirable that the cross-sectional shape is formed in a curved shape.

  Moreover, both ends 45a and 45b along the circumferential direction of the valve operation part 45 are not limited to this, As shown in FIG. 16, you may form in the planar shape along the radial direction. Even when both end portions 45a and 45b along the circumferential direction of the valve operation portion 45 are formed in a planar shape, the opening areas of the first and second valve ports 9 and 18 with respect to the rotation angle of the valve shaft 34 Can be changed to

  The seal portion 4 seals the valve stem 34 in a fluid-tight state, as shown in FIG. The seal portion 4 has a seal housing 53 formed in a cylindrical shape having a through hole 52 through which the valve shaft 34 is inserted by a metal such as SUS. As shown in FIG. 6, the seal housing 53 is disposed in a cylindrical recess 54 provided on the upper end surface of the valve body 6. The seal housing 53 has a positional relationship with the valve shaft 34 determined through the annular seal members 55 and 56, and is prevented from rotating with respect to a spacer member 59 described later via the positioning pin 58 (see FIG. 2B). It is a structure fixed to the state. On the inner peripheral surface of the seal housing 53, two annular seal members 55 and 56, which are O-rings or the like for sealing the valve shaft 34, are vertically disposed. For example, an O-ring made of ethylene propylene rubber (EPDM) is used as the sealing members 55 and 56. The seal member 56 located at the upper side is pressed by the pressing member 56 a. Further, the seal housing 53 is sealed to the valve main body 6 by an annular seal member 57 formed of an O-ring or the like.

  The coupling portion 5 is disposed between the valve body 6 in which the seal portion 4 is incorporated and the actuator portion 3. The coupling portion 5 is for connecting the valve shaft 34 and a rotating shaft (not shown) that integrally rotates the valve shaft 34. The coupling portion 5 penetrates the spacer member 59 disposed between the seal portion 4 and the actuator portion 3, the adapter plate 60 fixed to the upper portion of the spacer member 59, and the spacer member 59 and the adapter plate 60. And a coupling member 62 for connecting the valve shaft 34 and a rotary shaft (not shown). The spacer member 59 is formed of a metal such as SUS or a heat-resistant synthetic resin in a rectangular tube shape having a plane shape substantially the same as that of the valve main body 6 and relatively low in height. The spacer member 59 is fixed to both the valve body 6 and the adapter plate 60 by means such as screwing. Further, as shown in FIG. 2C, the adapter plate 60 is formed in a planar polygonal plate shape from a metal such as SUS or a synthetic resin having heat resistance. The adapter plate 60 is attached in a fixed state to the base 64 of the actuator unit 3 by the hexagonal hole bolt 63.

  As shown in FIG. 3, the coupling member 62 is formed in a cylindrical shape by metal, a synthetic resin having heat resistance, or ceramics. A recessed groove 65 is provided at the upper end of the valve stem 34 so as to penetrate along the horizontal direction. The valve shaft 34 is connected and fixed to the coupling member 62 by fitting a convex portion 66 provided on the coupling member 62 into the recessed groove 65. On the other hand, a recessed groove 67 is provided at the upper end of the coupling member 62 so as to penetrate along the horizontal direction. The rotary shaft (not shown) is connected and fixed to the coupling member 62 by fitting a convex portion (not shown) into a recessed groove 67 provided in the coupling member 62. The spacer member 59 has an inspection opening 68 on the side surface for inspecting a leak from the seal members 55 and 56. The opening 68 is formed, for example, in a cylindrical shape having a diameter of about 4 mm.

  As shown in FIG. 2, the actuator unit 3 includes a base 64 formed in a planar rectangular shape. At the upper part of the base 64, a casing 90 configured as a rectangular parallelepiped box body incorporating a driving means including a stepping motor, an encoder and the like is attached by screws 91. The drive means of the actuator unit 3 may be any one as long as it can rotate a rotating shaft (not shown) in a desired direction with a predetermined accuracy based on the control signal, and the configuration is not limited. The driving means includes a stepping motor, a driving force transmission mechanism for transmitting the rotational driving force of the stepping motor to the rotating shaft through the driving force transmitting means such as a gear, and an angle sensor such as an encoder for detecting the rotational angle of the rotating shaft. Configured

  In FIG. 2, reference numeral 92 denotes a stepping motor side cable, and 93 denotes an angle sensor side cable. The stepping motor side cable 92 and the angle sensor side cable 93 are respectively connected to a control device (not shown) that controls the three-way valve type motor valve 1.

<Operation of three-way valve type motor valve>
In the three-way valve type motor valve 1 according to the present embodiment, the flow rate of fluid is controlled as follows.

  As shown in FIG. 8, in the three-way valve type motor valve 1, the first and second flange members 10 and 19 are temporarily removed from the valve body 6 at the time of assembly or adjustment at the time of use. Is exposed to the outside. In this state, by adjusting the tightening amount of the adjusting rings 77 and 87 to the valve main body 6 using a jig not shown, as shown in FIG. 10, the valves in the first and second valve seats 70 and 80 The protrusion amount of the main body 6 with respect to the valve seat 8 is changed. When the tightening amount of the adjustment rings 77 and 87 to the valve main body 6 is increased, the concave portions 74 and 84 of the first and second valve seats 70 and 80 are from the inner peripheral surface of the valve seat 8 of the valve main body 6 The gap G1 between the recessed portions 74 and 84 of the first and second valve seats 70 and 80 and the outer peripheral surface of the valve stem 34 decreases, and the recessed portions 74 and 84 of the first and second valve seats 70 and 80 protrude. And the outer peripheral surface of the valve stem 34 come into contact with each other. On the other hand, when the tightening amount of the adjusting rings 77 and 87 to the valve body 6 is reduced, the concave portions 74 and 84 of the first and second valve seats 70 and 80 are the inner circumference of the valve seat 8 of the valve body 6 The length of protrusion from the surface decreases, and the gap G1 between the recesses 74 and 84 of the first and second valve seats 70 and 80 and the outer peripheral surface of the valve stem 34 increases.

  In the present embodiment, the gap G1 between the recessed portions 74 and 84 of the first and second valve seats 70 and 80 and the outer peripheral surface of the valve shaft 34 is set to less than 10 μm. However, the gap G1 between the recesses 74 and 84 of the first and second valve seats 70 and 80 and the outer peripheral surface of the valve shaft 34 is not limited to this value, and a value smaller than the value, for example, the gap G1 It may be 0 μm (contact state), and may be set to 10 μm or more.

  As shown in FIG. 1, the three-way valve type motor valve 1 allows a fluid to flow in through a third flange member 27 via a pipe (not shown) and through the first flange member 10 and the second flange member 19. The fluid flows out through piping (not shown). Further, in the three-way valve type motor valve 1, as shown in FIG. 13A, for example, the valve operation portion 45 of the valve shaft 34 closes the first valve port 9 in an initial state before starting operation At the same time as fully closing), the second valve port 18 is opened (fully open).

  As shown in FIG. 3, in the three-way valve type motor valve 1, when a stepping motor (not shown) provided in the actuator unit 3 is rotationally driven by a predetermined amount, a rotary shaft (not shown) is rotationally driven according to the amount of rotation of the stepping motor. Be done. When the rotary shaft of the three-way valve type motor valve 1 is driven to rotate, the valve shaft 34 connected and fixed to the rotary shaft rotates by the same angle as the rotation amount (rotation angle) of the rotary shaft. As the valve stem 34 rotates, the valve operating unit 45 rotates inside the valve seat 8, and as shown in FIG. 15A, one end 45a along the circumferential direction of the valve operating unit 45 is the first valve The port 9 is gradually opened, and the fluid flowing in from the inlet 26 flows into the inside of the valve seat 8 and flows out from the first housing member 10 through the first outlet 7.

  At this time, since the second valve port 18 is opened at the other end 45b of the valve operation section 45 along the circumferential direction as shown in FIG. 15A, the fluid flowing from the inflow port 27 is The gas flows into the inside of the valve seat 8 and is distributed according to the amount of rotation of the valve shaft 34, and flows out of the second housing member 19 through the second outlet 17 to the outside.

  As shown in FIG. 15A, in the three-way valve type motor valve 1, the valve shaft 34 is rotationally driven, and one end 45a along the circumferential direction of the valve operation unit 45 gradually opens the first valve port 9 Then, fluid is supplied to the outside through the valve seat 8 and the inside of the valve stem 34 via the first and second valve ports 9 and 18 via the first and second outlets 9 and 18.

  Further, in the three-way valve type motor valve 1, both end portions 45a and 45b along the circumferential direction of the valve operation portion 45 are formed in a curved surface shape or a sectional flat shape. It is possible to change the opening area of the first and second valve ports 9 and 18 linearly (linearly). Further, it is considered that the fluid whose flow rate is regulated by the both end portions 45 a and 45 b of the valve operation unit 45 flows in a state close to laminar flow, according to the opening areas of the first valve port 9 and the second valve port 18 The distribution ratio (flow rate) of the fluid can be controlled with high accuracy.

  In the three-way valve type motor valve 1 according to the present embodiment, as described above, at the same time the valve operating portion 45 of the valve shaft 34 closes the first valve port 9 (fully closed) at the same time as the second valve The mouth 18 is open (fully open).

  At this time, when the valve operation unit 45 of the valve shaft 34 closes the first valve port 9 (fully closed), the three-way valve type motor valve 1 ideally has a fluid flow rate of zero.

  However, in the three-way valve type motor valve 1, as shown in FIG. 10, the outer peripheral surface of the valve stem 34 and the valve seat are prevented in order to prevent the valve stem 34 from turning around metal with respect to the inner peripheral surface of the valve seat 8. It is rotatably disposed so as to be in a non-contact state with a minute gap with the inner circumferential surface of the unit 8. As a result, a minute gap G2 is formed between the outer peripheral surface of the valve stem 34 and the inner peripheral surface of the valve seat 8. Therefore, in the three-way valve type motor valve 1, even when the valve operation unit 45 of the valve shaft 34 closes the first valve port 9 (fully closed), the flow rate of fluid does not become zero, and the valve shaft 34 The fluid tries to flow into the second valve port 18 side through a small gap G2 existing between the outer peripheral surface of the valve seat 8 and the inner peripheral surface of the valve seat 8 in a small amount.

  By the way, in the three-way valve type motor valve 1 according to the present embodiment, as shown in FIG. 10, the first and second valve seats 70 and 80 are provided with the recesses 74 and 84, respectively. Projects from the inner circumferential surface of the valve seat 8 toward the valve shaft 34 to partially reduce the gap G1 between the outer circumferential surface of the valve shaft 34 and the inner circumferential surface of the valve seat 8.

  Therefore, in the three-way valve type motor valve 1, between the outer peripheral surface of the valve shaft 34 and the inner peripheral surface of the valve seat 8 in order to prevent the valve shaft 34 from turning around metal against the inner peripheral surface of the valve seat 8. Fluid is disposed between the outer peripheral surface of the valve stem 34 and the inner peripheral surface of the valve seat 8 from the first valve port 9 even if the fluid is rotatably disposed so as to be in a noncontact state via a minute gap. The flow into the very small gap G2 is greatly restricted and suppressed by the gap G1, which is a region in which the gap between the outer peripheral surface of the valve stem 34 and the inner peripheral surface of the valve seat 8 is partially reduced.

  Therefore, in the three-way valve type motor valve 1, the recesses 74 and 84 provided to partially reduce the gap between the valve shaft 34 and the first and second valve seats 70 and 80 facing the valve shaft 34 are used. As compared with a three-way valve type motor valve not provided, it is possible to significantly suppress the fluid leakage when the three-way valve type motor valve 1 is fully closed.

  Desirably, the three-way valve type motor valve 1 according to the present embodiment makes the gaps G1, G2 by bringing the recesses 74, 84 of the first and second valve seats 70, 80 into contact with the outer peripheral surface of the valve shaft 34. Can be significantly reduced, and fluid leakage when the three-way valve type motor valve 1 is fully closed is significantly suppressed.

  Similarly, in the three-way valve type motor valve 1, even when the valve operation portion 45 of the valve shaft 34 closes the second valve port 18 (full closing), fluid is passed through the second valve port 18. The leakage to the other first valve port 9 side can be significantly suppressed.

  Furthermore, in the present embodiment, as shown in FIG. 3, the outer peripheral surface of the valve stem 34 and the valve seat 8 are provided on the surfaces 70 a and 80 a of the first and second valve seats 70 and 80 opposite to the valve stem 34. The first and second pressure application parts 94 and 96 are provided to apply the pressure of the fluid through a minute gap between the inner peripheral surface of the first and the second. Therefore, as shown in FIG. 13A, in the three-way valve type motor valve 1, the opening degree is 0%, that is, the first valve port 9 is fully closed, and the opening degree is 100%, that is, the first valve port 9 is In the vicinity of the full opening, when the first and second valve ports 9, 18 approach the full closing, the amount of fluid flowing out from the first and second valve ports 9, 18 is significantly reduced. Along with this, at the valve port where the three-way valve type motor valve 1 approaches the fully closed state, the pressure of the outflowing fluid decreases. Therefore, for example, when the opening degree is 0%, that is, when the first valve port 9 is fully closed, a fluid having a pressure of about 700 KPa flows in from the inflow port 26 and flows out from the second valve port 18 with about 700 KPa. At this time, the pressure on the outlet side of the first valve port 9 side, which is in a state close to full closing, decreases to, for example, about 100 KPa. As a result, a pressure difference of about 600 KPa is generated between the second valve port 18 and the first valve port 9.

  Therefore, in the three-way valve type motor valve 1 which does not take measures, the pressure difference between the second valve port 18 and the first valve port 9 causes the valve shaft 34 to have a relatively low pressure. It moves to the side (displacement), and the valve shaft 34 is in a state of being in contact with the bearing 41. Therefore, there is a possibility that the driving torque at the time of rotationally driving the valve shaft 34 in the closing direction may be increased to cause malfunction.

  On the other hand, in the three-way valve type motor valve 1 according to the present embodiment, as shown in FIG. 17, the valve shaft is provided on the side opposite to the valve shaft 34 of the first and second valve First and second pressure acting parts that apply pressure of fluid leaking through the minute gap between the outer peripheral surface of the valve seat 34 and the inner peripheral surface of the valve seat 8 to the first and second valve seats 70, 80 94, 96 are provided. Therefore, in the three-way valve type motor valve 1 according to the present embodiment, even when a pressure difference between the second valve port 18 and the first valve port 9 occurs, the side having a relatively high pressure is used. The pressure of the fluid acts on the first and second pressure acting portions 94 and 96 through a minute gap between the outer peripheral surface of the valve stem 34 and the inner peripheral surface of the valve seat 8. As a result, the first valve seat 70 on the side where the pressure is relatively low at about 100 KPa is a valve by the pressure of the fluid on the side at which the relative pressure acting on the first pressure acting part 94 is relatively high at about 100 KPa. It acts to return the shaft 34 to its proper position. Therefore, in the three-way valve type motor valve 1 according to the present embodiment, the first valve whose valve stem 34 has a relatively low pressure due to the pressure difference between the second valve port 18 and the first valve port 9. The valve shaft 34 can be maintained smoothly supported by the bearing 41 by preventing (displacement) movement (displacement) to the port 9 side, and the driving torque when the valve shaft 34 is rotationally driven in the closing direction Can be prevented or suppressed.

  Further, in the three-way valve type motor valve 1 according to the present embodiment, the same operation is performed even when the first valve port 9 is near full opening, that is, when the second valve port 18 is near full closing. It is possible to prevent or suppress an increase in drive torque when rotationally driving 34.

Second Embodiment
FIG. 18 shows a three-way valve type motor valve as an example of the flow control valve according to the second embodiment of the present invention.

  The three-way valve type motor valve 1 according to the second embodiment is not a mixture of two different types of fluid, but is configured as a distribution three-way valve type motor valve 1 for distributing the same fluid into two. It is.

  The three-way valve motor valve 1 for distribution has the same structure as the three-way valve motor valve 1 for mixing described above. However, as shown in FIG. 18, the three-way valve type motor valve 1 for distribution has the inlet 26 at the lower end of the valve body 6 and the first outlet 7 at both sides of the valve body 6. And a second outlet 17. The other structure is the same as that of the three-way valve motor valve 1 for mixing described above.

Third Embodiment
FIG. 19 shows a two-way valve type motor valve as an example of the flow control valve according to the third embodiment of the present invention.

  The two-way valve type motor valve 1 according to the third embodiment is configured as a two-way valve type motor valve 1 for flow rate control that controls the flow rate of one type of fluid.

  That is, as shown in FIG. 19, the two-way valve type motor valve 1 for flow control has a single inlet 17 on one side of the valve body 6 and an outlet on the bottom of the valve body 6. It has 26. The other structure is the same as that of the three-way valve motor valve 1 for mixing described above.

<Method for inspecting leak of valve device>
The leak detection method of the three-way valve type motor valve 1 according to the present embodiment is, for example, at the completion of assembly or the final assembly step of the three-way valve type motor valve 1 configured as described above. Prior to shipping, to check for leaks in the seal 38 of the valve stem 34 of the three-way valve type motor valve 1.

  As shown in FIG. 3, the three-way valve type motor valve 1 rotatably supports the valve shaft 34, which is an example of a valve body, relative to the valve body 6. The sealing members 55 and 56 seal (seal) to prevent the fluid from leaking to the outside. At this time, the three-way valve type motor valve 1 has various problems such as damage to the seal members 55 and 56, dimensional error of the outer diameter of the seal portion 38 of the valve shaft 34, and dimensional error of the concave groove accommodating the seal members 55 and 56. There is a possibility that fluid may leak from the seal portion 38 of the valve stem 34 to the outside due to a factor.

  Therefore, in the leak detection method for the three-way valve type motor valve 1 according to the present embodiment, as shown in FIG. 20, instead of the first and second housing members 10 and 19 for the three-way valve type motor valve 1. The first and second closing jigs 201 and 202 for closing the first and second outlets 7 and 17 are mounted. At this time, although the three-way valve type motor valve 1 may be completely assembled, it may be an unfinished product in a state before the first and second housing members 10 and 19 are mounted.

  Unlike the first and second housing members 10 and 19, as shown in FIGS. 21 and 22, the first and second closing jigs 201 and 202 have flat circular flat plates having no opening. And a jig main body 203 made of Screw holes for screwing the valve body 6 of the three-way valve type motor valve 1 with the four hexagonal socket bolts 11 and 20 in the jig body 203 of the first and second closing jigs 201 and 202 204 is open. Further, an annular packing member 205 for sealing the side surface of the valve body 6 of the three-way valve type motor valve 1 is provided on the inner side surfaces of the first and second closing jigs 201 and 202 by means such as adhesion. ing.

  Further, the closing jig is not limited to this, and as shown in FIGS. 23 to 25, using the closing jig 210 for closing the inflow port 26 etc. of the three-way valve type motor valve 1. Also good. The closing jig 210 is screwed to the first to third housing members 10, 19 and 27 of the three-way valve type motor valve 1, and the inflow port 26 of the three-way valve type motor valve 1 and the first and second It is formed in the male screw shape which obstruct | occludes the outflow ports 7 and 17 of. The male screw portion 211 of the closing jig 210 is Rc1 / 2, which is a tapered female screw with a diameter of about 21 mm, which is the diameter of the first to third housing members 10, 19 and 27, or about 0.58 inch in diameter. Are formed on PT (R) 1/2, which is a tapered external thread having a diameter of about 21 mm, and an external thread having a diameter of about 0.58 inch.

  At the end of the closing jig 210, a disc-shaped operation unit 212 is integrally provided which is opened and closed by the operator rotating the closing jig 210 by hand. The outer periphery of the operation portion 212 of the closing jig 210 is knurled 213 in order to prevent slippage. Further, on the inner side surface of the operation portion 212 of the closing jig 210, a packing member 214 for sealing the end faces of the first to third housing members 10, 19 and 27 of the three-way valve type motor valve 1 and an O ring. 215 are provided. The O-ring 215 is inserted into a recessed groove 216 provided on the inner side surface of the operation unit 212. The material of the closing jig 210 is not particularly limited and may be stainless steel or the like, but brass (BS) or the like which is plated in consideration of processability and the like is used. In addition, the size of the closing jig 210 may be PT (R) 1/8 according to the size of the first to third housing members 10, 19 and 27 of the three-way valve type motor valve 1, as necessary. , PT1 / 4, PT3 / 8, PT1 / 2, PT3 / 4, etc. are prepared.

  Further, as shown in FIG. 20, in the three-way valve type motor valve 1, a supply pipe 220 for pressing helium gas as an example of the inspection gas into the third housing member 27 into the inside of the three-way valve type motor valve 1. Is connected. The supply pipe 220 is connected to a helium gas cylinder 222 containing helium gas via an on-off valve 221. The helium gas cylinder 222 contains helium gas at a predetermined pressure.

  Next, in the leak detection method of the three-way valve type motor valve 1 according to the present embodiment, as shown in FIG. 21, the first and second outlets 7, 17 are used as first and second closing jigs. After the step of connecting the supply pipe 220 to the third housing member 27 is completed as well as closing by 201, 202, as shown in FIG. 20, the container valve 223 of the helium gas cylinder 222 is opened and required from the helium gas cylinder 222 Helium gas at a pressure of 3 is supplied from the third housing member 27 to the inside of the three-way valve motor valve 1. At this time, the internal pressure of the three-way valve type motor valve 1, that is, the pressure of the helium gas to be press-fit is set to 0.3 MPa or more and 1.5 MPa or less. If the pressure of the helium gas is less than 0.3 MPa, it is difficult to reliably detect the leak between the seal portion 38 of the valve stem 34 and the two annular seal members 55 and 56, and the pressure of the helium gas When it exceeds 1.5 MPa, it becomes difficult to press-fit with existing equipment. In the present embodiment, for example, the pressure of helium gas is set to be 0.45 MPa.

  Thus, after the first and second outlets 9 and 18 are closed by the first and second closing jigs 201 and 202, respectively, the third housing member 27 of the three-way valve type motor valve 1 is produced. Helium gas of the required pressure is supplied from. Therefore, as shown in FIG. 3, the three-way valve type motor valve 1 is supplied to the inside of the three-way valve type motor valve 1 if there is no leak in the seal members 55 and 56 for sealing the seal portion 38 of the valve shaft 34 Helium gas does not leak to the outside.

  However, in the three-way valve type motor valve 1, the seal members 55 and 56 which seal the seal portion 38 of the valve stem 34 are damaged, the dimensional error of the groove for accommodating the seal members 55 and 56, or the seal portion 38 of the valve stem 34 If there is a processing error or the like, the seal between the seal portion 38 of the valve stem 34 and the seal members 55, 56 becomes insufficient, and the required pressure supplied to the inside of the valve seat 8 (see FIG. 26) Helium gas of 0.45 MPa may leak from the gap between the seal portion 38 of the valve stem 34 and the seal members 55 and 56 to the outside.

  The helium gas leaked from the gap between the seal portion 38 of the valve stem 34 and the seal members 55 and 56 has a density smaller than that of air and moves vertically along the outer periphery of the seal portion 38 of the valve stem 34 It leaks from the inspection opening 68 provided in the spacer member 59 of the coupling portion 5 to the outside.

  Therefore, in the leak detection method of the three-way valve type motor valve 1 according to the present embodiment, as shown in FIG. 20, helium leak as an example of the gas detection device in the vicinity of the inspection opening 68 of the three way valve type motor valve 1 By bringing the sniffer probe 251 of the detector 250 closer, the concentration of helium gas leaked from the gap between the seal portion 38 of the valve stem 34 and the seal members 55, 56 is measured and detected. The test time is set to 10 to 120 seconds after the injection of helium gas is started. If there is a leak in the gap between the seal portion 38 of the valve shaft 34 and the seal members 55 and 56, the leaked helium gas is reliably detected by the sniffer probe 251 of the helium leak detector 250 after 10 seconds or more. 120 seconds or less is to prevent the detection process from becoming unnecessarily long. The helium leak detector 250 includes a main body 252 containing a vacuum pump and the like, and a display unit 253 formed of a liquid crystal panel and the like provided on the upper portion of the main body 252. As the helium leak detector 250, for example, "Helium leak detector sniffer machine" manufactured by Inficon, type: Protec P3000 is used.

When the concentration of helium gas detected by the helium leak detector 250 is less than the predetermined reference value of 5.0 × 10 ⁻⁷ (Pa · m ³ / s), the three-way valve type motor valve 1 is used. The three-way valve type motor valve 1 is determined to be a passable product because no leak occurs or the leak is within an allowable range. In this case, the helium leak detector 250 may be configured to notify the operator of the determination result by sound or the like. Here, the reason why the reference value of the concentration of helium gas is set to 5.0 × 10 ⁻⁷ (Pa · m ³ / s) is that 5.0 × 10 ⁻⁷ when the airtightness test is performed experimentally. If it is less than (Pa · m ³ / s), it is because no abnormality has occurred in the leak of the three-way valve type motor valve 1.

On the other hand, when the concentration of helium gas detected by the helium leak detector 250 is equal to or higher than a predetermined reference value of 5.0 × 10 ⁻⁷ (Pa · m ³ / s), the three-way valve motor valve 1 is used. It is determined that a leak exceeding the allowable range has occurred. Therefore, this three-way valve type motor valve 1 is regarded as a rejection item. The three-way valve type motor valve 1 that has been rejected is inspected for the seal state by the seal members 55 and 56 and the like, and the seal members 55 and 56 are replaced if necessary, and the leak inspection is performed again.

  As described above, in the leak detection method of the three-way valve type motor valve 1 according to the present embodiment, the first and second outlets 7 and 17 of the three-way valve type motor valve 1 The seal portion 38 and the seal portion 38 of the valve shaft 34 of the three-way valve type motor valve 1 are sealed by supplying helium gas of a required pressure from the third housing member 27 through the supply pipe 220 while closing with the fittings 201 and 202 respectively. Leakage from the gap between the members 55 and 56 can be detected easily and reliably.

  Further, in the leak detection method of the three-way valve type motor valve 1 according to the present embodiment, the three-way valve type motor valve 1 to be inspected does not need to be covered with the chamber. It can be detected.

<Leakage inspection device for valve device>
FIG. 27 is a schematic configuration view showing a leak detection device 300 suitable for applying the leak detection method of the three-way valve type motor valve 1 according to the present embodiment.

  The leak detection apparatus 300 of the three-way valve type motor valve 1 according to the present embodiment includes a flat apparatus substrate 301 as shown in FIG. An air cylinder 302 is fixed to an upper end of the device substrate 301 at one end (left end in the drawing). A block shape holding one end of a three-way valve type motor valve 1 as a valve device for a test object at an end (right end in the figure) on the side opposite to the air cylinder 302 on the top of the device substrate 301 The fixing member 303 is provided in a fixed state. In the fixing member 303, a press-in hole 304 for press-fitting helium gas as an example of a test gas into the inside of the three-way valve type motor valve 1 is opened so as to penetrate along the horizontal direction. The fixing member 303 constitutes an example of a press-fit member. A packing member 305 as an example of a closing member for closing one discharge port of the three-way valve type motor valve 1 is provided on the side surface of the fixing member 303 on the air cylinder 302 side. A press-fit hole 306 is opened in the packing member 305 so as to communicate with the press-fit hole 304 of the fixing member 303. The packing member 305 is made of a non-breathable elastic body such as silicone rubber. The packing member 305 is airtightly provided on the side surface of the fixing member 303 by means such as adhesion.

  As shown in FIG. 28, the air cylinder 302 is mounted inside the cylinder body 321 so that the piston 322 can slide. The tip of the piston rod 323 connected to the piston 322 protrudes to the outside of the cylinder body 321. A movable member 324 is attached to the tip of the piston rod 323. A packing member 325 as an example of a closing member for closing the other discharge port of the three-way valve type motor valve 1 is provided on the side surface of the movable member 324 located on the fixed member 303 side. Similar to the packing member 305, the packing member 325 is made of a non-breathable elastic body such as silicone rubber. The packing member 325 is provided on the side surface of the movable member 324 by means such as adhesion. The movable member 324 holds the three-way valve type motor valve 1 in an airtight state between the movable member 324 and the fixed member 303 by moving along with the piston rod 323 along the direction in which the movable member 324 contacts and separates from the fixed member 303.

  The cylinder body 321 has a first supply port 327 for supplying compressed air to one air chamber 326 partitioned by the piston 322 and a second supply port for supplying compressed air to the other air chamber 328 partitioned by the piston 322. And a supply port 329 of the The first and second supply ports 328 and 329 function as exhaust ports when the piston 322 moves in the opposite direction when compressed air is supplied to the other supply ports 329 and 327. As the air cylinder 302, for example, an air cylinder manufactured by SMC Corporation is used.

  FIG. 29 is a circuit diagram showing a drive system for driving the leak detection device 300. As shown in FIG.

  The air cylinder 302 is connected to the 5-port solenoid valve 330 via first and second pipes 331 and 332. The 5-port solenoid valve 330 operates the air cylinder 302 by switching the press-fitting direction of the high pressure air supplied to the first and second supply ports 328 and 329 of the air cylinder 302. As shown in FIG. 28, the five-port solenoid valve 330 includes, for example, a valve body 333 formed in an airtight cylindrical shape, closed at both ends along the longitudinal direction. The 5-port solenoid valve 330 includes first and second ports 334 and 335 opened on the left side surface of the valve body 333. The first and second ports 334 and 335 are connected to the first and second air inlets 327 and 329 of the air cylinder 302 via the first and second pipes 331 and 332, respectively. Further, the 5-port solenoid valve 330 includes a third port 336 provided at the center of the right side surface of the valve main body 333 to which high pressure intake is supplied, and first and second air cylinders 302 disposed above and below the valve main body 333. The fourth and fifth exhaust ports 337 and 338 for exhausting air from the two intake ports 327 and 329 are provided. Furthermore, inside the valve body 333 of the 5-port solenoid valve 330, a valve body 339 for switching the first to fifth ports 334 to 338 is arranged slidably along the vertical direction in the figure by a solenoid and a spring (not shown). ing. For example, when the solenoid (not shown) is in the OFF state, the 5-port solenoid valve 330 moves the valve body 339 to the position shown in FIG. 31 by the biasing force of the spring (not shown) and brings the third port 336 and the first port 334 into communication. The second port 335 and the fifth port 338 communicate with each other. On the other hand, when a solenoid (not shown) is in the ON state, the solenoid (not shown) operates to move the valve body 339 downward in FIG. 28 to bring the third port 336 and the second port 335 into communication with each other. And the fourth port 337 communicate with each other.

  As shown in FIG. 31, high pressure air is supplied to the third port 336 of the 5-port solenoid valve 330 from a compressor (not shown) through the third pipe 340. The third pipe 340 is provided with an on-off valve 341 for opening and closing the supply of high pressure air.

  In addition, a cylinder drive switch 342 is connected to the 5-port solenoid valve 330 to turn on / off energization of a solenoid (not shown) of the 5-port solenoid valve 330.

  In the leak detection device 300, a helium gas cylinder 343 that supplies helium gas as an example of a gas for inspection to the press-in hole 304 of the fixed substrate 303 is connected via a third pipe 344. The fourth pipe 344 is provided with an on-off valve 345 for opening and closing the supply of helium gas. Then, helium gas as an example of the inspection gas is supplied to the press-in hole 304 of the fixing member 303 through the fourth pipe 344 and the on-off valve 345 by opening the device valve 346 of the helium gas cylinder 343.

  In the leak detection device 300, as shown in FIG. 31A, when the cylinder drive switch 342 is turned on, the valve body 339 of the 5-port solenoid valve 330 moves downward, and air is output via the 5-port solenoid valve 330. High pressure air is sent to the air chamber 328 of the cylinder 302, and the air cylinder 302 operates to extend the piston rod 323. The three-way valve type motor valve 1 is held between the movable member 324 attached to the tip of the pinton rod 323 and the fixed member 303, and the first and second outflow portions 9 of the three-way valve type motor valve 1, 18 is blocked.

  Further, in the leak detection device 300, as shown in FIG. 31 (b), when the cylinder drive switch 342 is turned OFF, the valve 339 of the 5-port solenoid valve 330 moves upward, and the 5-port solenoid valve 330 The high pressure air is fed to the other air chamber 326 of the air cylinder 302 via the air cylinder 302, and the air cylinder 302 operates to draw in the piston rod 323. Then, the nipping state of the three-way valve type motor valve 1 by the movable member 324 attached to the tip of the piston rod 323 and the fixed member 303 is released, and the three-way valve type motor valve 1 is removed.

<Operation of leak inspection device for valve device>
In leak detection apparatus 300 of three-way valve type motor valve 1 according to the present embodiment, as shown in FIG. 23, for example, third housing member 27 of three-way valve type motor valve 1 is closed as a preparatory step before inspection. The jig 210 is screwed and closed.

Next, in the leak detection device 300, as shown in FIG. 27, one housing member 19 of the three-way valve type motor valve 1 to be inspected is arranged to contact the packing member 305 of the fixing member 303. At this time, in the fixing member 303, the position of the three-way valve motor valve 1 is adjusted such that the press-fitting hole 306 of the packing member 305 is positioned within the opening of the second housing member 19 of the three-way valve motor valve 1. .

  Thereafter, in the leak detection device 300, when the cylinder drive switch 342 is turned on, high pressure air is sent to the air cylinder 302 via the 5-port solenoid valve 330. Then, in the air cylinder 302, as shown in FIG. 31A, the piston 322 moves in the left direction in the drawing, and the pinton rod 323 extends. Then, the other first housing member 9 of the three-way valve type motor valve 1 is closed by the packing member 325 of the movable member 324 attached to the tip end of the pinton rod 323.

  Next, in the leak detection device 300, the on-off valve 345 supplying the helium gas from the helium gas cylinder 343 is opened, and the three-way through the press-in hole 304 of the fixing member 303 and the press-in hole 306 of the packing member 305 via the fourth pipe 344. A press-fitting step of pressing helium gas from the first housing member 9 into the interior of the valve motor valve 1 is performed.

  Thereafter, the sniffer probe 251 of the helium leak detector 250 is brought close to the inspection opening of the three-way valve type motor valve 1 to measure the leak amount of helium gas.

When the measurement value of the helium leak detector 250 is less than a predetermined reference value of 5.0 × 10 ⁻⁷ (Pa · m ³ / s), the three-way valve motor valve 1 has no leak or leak Even if it exists, it is determined as a passable product as being within the allowable range. On the other hand, if the measurement value of the helium leak detector 250 is equal to or greater than a predetermined reference value of 5.0 × 10 ⁻⁷ (Pa · m ³ / s), it is determined that the three-way valve motor valve 1 leaks. It is judged as a passing product. The three-way valve type motor valve 1 determined to be a reject product is readjusted including the parts replacement of the seal members 55 and 56, and the leak inspection is performed again.

  As described above, in the leak detection device 300 according to the present embodiment, the third housing member 27 of the three-way valve type motor valve 1 is set in the leak detection device 300 in a state of being closed by the closing jig 210. After the switch 342 is turned ON, helium gas is pressed into the interior of the three-way valve motor valve 1 from the first housing member 9, and the helium gas leaks from the inspection opening of the three-way valve motor valve 1. Since it is only necessary to measure by the leak detector 250, a leak from between the seal portion 38 of the valve shaft 34 of the three-way valve type motor valve 1 and the seal members 55, 56 can be detected easily and reliably.

  In addition, as a valve apparatus, it is not limited to the thing of the said embodiment, of course, it is applicable also to a diaphragm type | formula valve, a bellows type | mold valve, etc. FIG.

  It is possible to provide a leak inspection method and inspection apparatus for a valve device capable of detecting a leak from a sealing member that seals an operating member for opening and closing a valve body of the valve device easily and reliably.

DESCRIPTION OF SYMBOLS 1 ... Three-way valve type motor valve 2 ... Valve part 3 ... Actuator part 4 ... Seal part 5 ... Coupling part 6 ... Valve main body 7 ... 1st inflow port 8 ... Valve seat 9 ... 1st valve port 10 ... 1st Flange member 11 ... Hexagon socket head bolt 12 ... Flange part 13 ... Insertion part 14 ... Piping connection part 15 ... O ring 16 ... Chamfer 17 ... Second inflow port 18 ... Second valve port 19 ... Second flange member 20 ... Hexagon socket head cap bolt 21 ... Flange part 22 ... Insertion part 23 ... Piping connection part 34 ... Valve shaft 35 ... Valve body part 45 ... Valve operation part 45a, 45b ... Both ends 68 ... Inspection opening 70, 80 ... First And second valve seat 74, 84 ... Recess 94, 96 ... First and second pressure acting part 201, 202 ... Jig for closing 250 250 ... Helium leak detector

Claims (10)

A valve body having an inlet through which fluid flows and an outlet through which the fluid flows out;
A valve body for opening and closing a flow path connecting the inflow port and the outflow port;
An operating member mounted on the valve body in a sealed state via a sealing member and integrally or separately provided to the valve body to open and close the valve body;
Inspect the leak of a valve device having an opening for inspection which is opened in a member covering a non-sealing portion located outside the sealing member of the operation member and which communicates the non-sealing portion of the operation member with the outside In the leak check method of the valve device
A press-in step of pressing in a test gas from the other of the valve device with the one of the inlet and the outlet closed;
A detection step of detecting an inspection gas leaking from the inspection opening to the outside by a gas detection unit;
A leak inspection method for a valve device, comprising:   The method according to claim 1, wherein the inspection gas is helium gas, and the gas detection unit is a helium leak detector.   The leak inspection method of the valve apparatus according to claim 1 or 2, wherein the sealing member rotatably seals the rotation shaft of the valve body.   The leak inspection method of the valve apparatus according to claim 3, wherein a plurality of the sealing members are provided along an axial direction of a rotation shaft of the valve body.   The member for covering the non-sealing part of the operation member is a cylindrical member which connects the valve body and a drive part which drives the valve body. Leakage inspection of the valve device according to any one of claims 1 to 4 Method.   The leak inspection method for a valve device according to any one of claims 1 to 5, wherein the gas detection means detects a leak of the inspection gas by bringing a detection unit close to the inspection opening. The valve device includes an inflow member connected to the inflow port for introducing the fluid, and an outflow member connected to the outflow port for discharging the fluid.
The leak inspection method of the valve apparatus according to any one of claims 1 to 6, wherein at the time of inspection, the valve apparatus is closed by the closing member by the closing member instead of the inflow member or the outflow member.   In the press-fitting step, in a state in which one of the inlet and the outlet of the valve device is closed, the pressure of the test gas pressed from the other is 0.3 MPa or more and 1.5 MPa or less. The leak inspection method of the valve apparatus in any one of 7. A valve body having an inlet through which fluid flows and an outlet through which the fluid flows out;
A valve body for opening and closing a flow path connecting the inflow port and the outflow port;
An operating member mounted on the valve body in a sealed state via a sealing member and integrally or separately provided to the valve body to open and close the valve body;
Inspect the leak of a valve device having an opening for inspection which is opened in a member covering a non-sealing portion located outside the sealing member of the operation member and which communicates the non-sealing portion of the operation member with the outside Leak check device of the valve device
A closing member closing at least one of the inlet and the outlet of the valve device;
A movable member and a fixed member that close the inlet or the outlet of the valve device not closed by the closing member by sandwiching the valve device;
Press-fit means provided on one of the movable member or the fixed member for press-fitting the test gas into the inside of the valve body;
A gas detection unit that detects a test gas leaking from the test opening to the outside;
A leak inspection apparatus for a valve device, comprising:   10. The apparatus according to claim 9, wherein the press-fitting means is provided on the fixing member.

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