JP2019063704A - Enlargement displacement mechanism and liquid injection device using the same - Google Patents

Abstract

To enhance responsiveness to displacement of an actuator of an enlargement displacement mechanism.SOLUTION: An enlargement displacement mechanism enlarging a displacement amount of an actuator comprises: a liquid chamber filled with liquid; a first wall part constituting a part of a wall surface of the liquid chamber, being displaced according to displacement of the actuator and imparting a pressure to the liquid; and a second wall part constituting a part of the wall surface of the liquid chamber, having an area facing the liquid smaller than an area of the first wall part facing the liquid and being displaced in a state where elastic force acting in a second direction opposite to a first direction is generated in the first direction being a direction separating from the liquid chamber by the pressure of the liquid when the first wall part is displaced and the pressure is imparted to the liquid.SELECTED DRAWING: Figure 1

Description

  The present invention relates to an enlargement displacement mechanism and a liquid ejecting apparatus using the same.

  Conventionally, an enlargement displacement mechanism has been proposed for mechanically enlarging and transmitting the displacement amount of an actuator such as a piezoelectric element. For example, in the expansion displacement mechanism of Patent Document 1 below, the actuator pushes a large diameter piston to generate pressure in the liquid, and the pressure displaces a small diameter piston having an area facing the liquid smaller than the large diameter piston. I am doing it. According to the expanding displacement mechanism of Patent Document 1, the displacement amount of the small diameter piston is larger than the displacement amount of the large diameter piston according to the Pascal's principle.

Japanese Patent Application Laid-Open No. 7-301354

  However, in the technique of Patent Document 1, when the piezoelectric element is contracted rapidly and the large diameter piston is pulled back, the displacement of the small diameter piston can not sufficiently follow the displacement of the large diameter piston. The pressure may drop sharply and bubbles may be generated in the liquid. Once such air bubbles are generated in the liquid, the ability to follow the movement of the small diameter piston to the drive timing of the piezoelectric element is reduced. As described above, in the expansion displacement mechanism, there is still room for improvement in improving the responsiveness to the displacement of the actuator.

  The present invention has been made to solve at least a part of the above-mentioned problems, and can be realized as the following modes.

[1] According to a first aspect of the present invention, there is provided an expansion displacement mechanism for expanding the displacement amount of an actuator. The expansion displacement mechanism of this aspect forms a liquid chamber in which the liquid is sealed; and a part of a wall surface of the liquid chamber, which is displaced according to the displacement of the actuator to apply pressure to the liquid. A part of a wall surface of the liquid chamber and a wall surface of the liquid chamber, and an area facing the liquid is smaller than an area of the first wall facing the liquid; A state in which when the liquid is displaced to apply pressure, the pressure of the liquid generates an elastic force acting in a second direction opposite to the first direction, which is a direction away from the liquid chamber. And a second wall which is displaced by
According to the magnifying and displacing mechanism of this aspect, when the first wall portion is displaced back to the position before displacement by the elastic force acting in the second direction generated when the second wall portion is displaced in the first direction In addition, displacement of the second wall in the second direction is promoted. Thus, the responsiveness of the second wall to the displacement of the first wall by the actuator is enhanced. Therefore, for example, after the second wall is displaced in the first direction, when the first wall is displaced in the direction in which the volume of the liquid chamber is expanded, the displacement of the second wall in the second direction As a result, the pressure in the liquid chamber is reduced to suppress the formation of bubbles in the liquid.

[2] In the expansion and displacement mechanism of the above aspect, the second wall portion is a diaphragm that is deformed so as to generate the elastic force acting in the second direction when displaced in the first direction by pressure of the liquid. May be configured by
According to the magnifying and displacing mechanism of this aspect, the second wall can be simply configured by the diaphragm.

[3] In the magnifying and displacing mechanism of the above aspect, the second wall is supported by an elastic member, and the elastic member is configured to apply pressure to the liquid when the first wall is displaced. The position of the second wall may be moved in the first direction by elastically deforming so as to generate an elastic force acting in the second direction.
According to the magnifying and displacing mechanism of this aspect, the elastic force can be easily generated by the elastic member to displace the second wall portion in the second direction.

[4] In the expanding and displacing mechanism of the above aspect, the liquid chamber may be filled with a liquid and a filler that suppresses a change in volume of the liquid when pressure is applied to the liquid.
According to the expansion and displacement mechanism of this aspect, since the filler can suppress the compression of the liquid in the liquid chamber, it can be suppressed that the driving force of the actuator is absorbed by the compression of the liquid. Thus, the pressure can be efficiently transmitted from the first wall to the second wall.

[5] According to a second aspect of the present invention, a liquid ejecting apparatus is provided. The liquid ejecting apparatus of this aspect is connected to the expansion displacement mechanism of each of the above aspects, the actuator, a pressure chamber in communication with the nozzle, and the discharge liquid discharged from the nozzle, and the pressure chamber And a flow path through which the discharge liquid flows. The actuator changes the volume of the pressure chamber by displacing the first wall of the expanding and displacing mechanism to displace the second wall so that the discharge liquid is discharged from the nozzle. A pressure is generated in the pressure chamber.
According to the liquid ejecting apparatus of this aspect, since the displacement amount of the actuator can be expanded by the expansion displacement mechanism, the pressure for discharging the discharge liquid can be efficiently increased. Further, since the response of the expansion displacement mechanism to the displacement of the actuator is enhanced, the accuracy of the liquid discharge can be enhanced.

[6] In the liquid ejecting apparatus according to the above aspect, a wall surface of the second wall portion of the expanding and displacing mechanism opposite to the liquid chamber constitutes a part of a wall surface of the pressure chamber; The wall portion is displaced so as to generate pressure in the pressure chamber for discharging the discharge liquid from the nozzle and to close the flow path when the actuator displaces the first wall portion. You may
According to the liquid ejecting apparatus of this aspect, the pressure for discharging the discharge liquid generated by the displacement of the second wall from the nozzle is prevented from escaping to the flow path. Therefore, the discharge efficiency of the discharge liquid can be enhanced.

[7] In the liquid ejecting apparatus according to the above aspect, the flow path includes a supply flow path configured to supply the discharge liquid to the pressure chamber, and the liquid ejecting apparatus is configured to discharge the discharge liquid to the pressure chamber through the supply flow path. A feed unit for pumping the
According to the liquid ejecting apparatus of this aspect, it is possible to appropriately control the pressure in the pressure chamber by pumping the discharge liquid to the pressure chamber by the supply unit.

[8] In the liquid ejecting apparatus according to the above aspect, the flow path further includes a discharge flow path for causing the discharge liquid to flow out from the pressure chamber, and the liquid ejecting apparatus is configured to discharge the discharge discharged through the discharge flow path. A circulation unit may be provided to circulate liquid to the pressure chamber through the supply flow channel.
According to the liquid ejecting apparatus of this aspect, the deterioration of the discharged liquid caused by the stagnation in the pressure chamber is suppressed. Moreover, since the discharge liquid discharged from the pressure chamber through the discharge flow path is reused, the utilization efficiency of the discharge liquid can be enhanced.

[9] The liquid ejecting apparatus according to the above aspect may include a plurality of the nozzles, a plurality of the pressure chambers, and a plurality of the enlargement and displacement mechanisms.
According to the liquid ejecting apparatus of this aspect, it is possible to efficiently execute the ejection of the ejection liquid from each of the plurality of nozzles.

  The present invention can also be realized in various forms other than the enlargement displacement mechanism and the liquid ejecting apparatus including the same. For example, the present invention can be realized in the form of a method of expanding and transmitting the displacement amount of the actuator, a control method of the displacement amount of the actuator, and various devices including an enlargement displacement mechanism other than the liquid ejection device.

Schematic which shows a structure of a displacement generator provided with the expansion displacement mechanism of 1st Embodiment. The 1st explanatory view showing the operating characteristic of expansion displacement mechanism 20A of a 1st embodiment. The 2nd explanatory view showing the operating characteristic of expansion displacement mechanism 20A of a 1st embodiment. Schematic which shows the structure of the expansion displacement mechanism in 2nd Embodiment. FIG. 13 is a schematic block diagram showing the entire configuration of a liquid ejection device in a third embodiment. The schematic sectional drawing which shows typically the internal structure of the head part of 3rd Embodiment. The schematic sectional drawing which shows typically the internal structure of the head part of 4th Embodiment. The schematic sectional drawing which shows typically the internal structure of the head part of 5th Embodiment. The schematic sectional drawing which shows typically the internal structure of the head part of 6th Embodiment. The schematic sectional drawing which shows typically the internal structure of the head part of 7th Embodiment. The schematic sectional drawing which shows typically the internal structure of the head part of 8th Embodiment. The schematic sectional drawing which shows typically the internal structure of the head part of 9th Embodiment. The schematic sectional drawing which shows typically the internal structure of the head part of 10th Embodiment. The schematic sectional drawing which shows typically the internal structure of the head part of 11th Embodiment. The schematic sectional drawing which shows typically the internal structure of the head part of 12th Embodiment. FIG. 21 is a schematic block diagram showing the overall configuration of a liquid ejection device in a thirteenth embodiment. FIG. 21 is a schematic cross-sectional view showing an internal configuration of a head portion of a thirteenth embodiment. The schematic sectional drawing which shows the internal structure of the head part of 14th Embodiment. Schematic which shows a structure of a displacement generator provided with the expansion displacement mechanism of 15th Embodiment. The schematic which shows the structure of a displacement generator provided with the expansion displacement mechanism of 16th Embodiment.

1. First embodiment:
FIG. 1 is a schematic view showing a configuration of a displacement generating device 10A provided with the enlargement and displacement mechanism 20A of the first embodiment. The displacement generation device 10A includes a housing 11 and an actuator 15 in addition to the enlargement displacement mechanism 20A. The displacement generator 10A enlarges the displacement generated by the actuator 15 by the magnifying displacement mechanism 20A and transmits the displacement to an external load (not shown) connected to the displacement generator 10A. Inside the housing 11, a drive chamber 12 in which the actuator 15 is accommodated, and a liquid chamber 21 which is one of the components of the enlargement and displacement mechanism 20A are provided.

  The actuator 15 generates displacement by telescopic movement. In the first embodiment, the actuator 15 is configured by a piezoelectric element (piezo element) that generates a displacement by performing expansion and contraction in response to an applied voltage. The first end 15 a in the expansion and contraction direction of the actuator 15 is fixed to the housing 11 via the fixing portion 13. The elastic deformation of the actuator 15 moves the position of the second end 15b opposite to the first end 15a. The amount of displacement of the actuator 15 is the amount of movement of the second end 15 b due to the expansion and contraction of the actuator 15.

  The expansion displacement mechanism 20A of the first embodiment is configured of a liquid chamber 21, a liquid 22, a first wall portion 23, and a second wall portion 24. The liquid chamber 21 is a hollow portion provided inside the housing 11 as described above, and is sealed by the first wall portion 23 and the second wall portion 24. The liquid 22 is sealed in the liquid chamber 21.

  The type of liquid 22 is not particularly limited. The liquid 22 may be any one having liquid fluidity. The liquid 22 may be, for example, water, oil, liquid metal, fluorine-based inert liquid, liquid resin, or gel-like fluid such as slime. It is desirable that the liquid 22 be filled in the liquid chamber 21 in a pressurized state in order to increase the pressure transmission efficiency described later. In addition, it is desirable that the liquid 22 be defoamed in advance so that the generation of bubbles due to cavitation when the pressure changes is suppressed. The expansion displacement mechanism 20A, for example, is configured to check the pressure state of the liquid chamber 21 by forming a part of the wall of the liquid chamber 21 with a member that is bent and deformed according to the pressure of the liquid 22. An indicator unit may be provided.

  The first wall portion 23 is a wall portion that airtightly separates the liquid chamber 21 and the drive chamber 12. The outer peripheral end of the first wall portion 23 is fixed to the housing 11. The first wall surface 23 a of the first wall portion 23 faces the liquid 22 of the liquid chamber 21 and constitutes a part of the wall surface of the liquid chamber 21. The second wall 23 b opposite to the first wall 23 a is connected to the second end 15 b of the actuator 15 via the connecting portion 14. The first wall portion 23 functions as a diaphragm that is bent and deformed in the thickness direction according to the displacement of the actuator 15. In the first embodiment, the first wall portion 23 is configured by a rubber film member. In addition, the 1st wall part 23 does not need to be comprised by the member made from rubber. The first wall portion 23 may be made of another resin member, or may be made of a metal plate.

  The second wall portion 24 is a wall portion that airtightly separates the liquid chamber 21 and the outside. The outer peripheral end of the second wall portion 24 is fixed to the housing 11. The first wall surface 24 a of the second wall portion 24 faces the liquid 22 of the liquid chamber 21 and constitutes a part of the wall surface of the liquid chamber 21. The second wall 24b opposite to the first wall 24a is connected to the aforementioned external load (not shown). The second wall portion 24 functions as a diaphragm that is bent and deformed in the thickness direction according to the change in pressure of the liquid chamber 21. The second wall portion 24 is configured by a member that generates an elastic force as a restoring force when it is bent and deformed. In the first embodiment, the second wall portion 24 is configured of a rubber film member. In addition, the 2nd wall part 24 does not need to be comprised with the member made from rubber, may be comprised with another resin member, and may be comprised with metal.

  When the first wall portion 23 is displaced and the pressure of the liquid 22 in the liquid chamber 21 is increased, the second wall portion 24 moves in the first direction D1, which is a direction away from the liquid chamber 21, and in the first direction D1. Are displaced in a state in which an elastic force acting in the opposite second direction D2 is generated. The first direction D1 is a direction along the thickness direction of the second wall portion 24, and is a direction from the liquid chamber 21 toward the second wall portion 24. In the first embodiment, the elastic force acting in the second direction D2 generated by the displacement of the second wall 24 is generated as a restoring force against the bending deformation of the second wall 24.

  In the expansion displacement mechanism 20A, the area S2 where the first wall surface 24a of the second wall portion 24 faces the liquid 22 of the liquid chamber 21 is the first wall surface 23a of the first wall portion 23 a liquid 22 of the liquid chamber 21. It is smaller than the facing area S1. The area S1 of the first wall section 23 is the area of the area of the first wall surface 23a facing the liquid 22 projected in the displacement direction on a virtual plane orthogonal to the displacement direction of the first wall section 23 is there. Similarly, the area S2 of the second wall portion 24 is a region obtained by projecting, in the displacement direction, a region facing the liquid 22 of the first wall surface 24a on a virtual plane orthogonal to the displacement direction of the second wall portion 24. Area of

  In the enlargement displacement mechanism 20A, as described above, a difference is provided between the area S1 of the first wall portion 23 and the area S2 of the second wall portion 24. Therefore, according to the Pascal's principle, the displacement Dp2 of the second wall 24 is larger than the displacement Dp1 of the first wall 23 according to the difference between the areas S1 and S2. Further, according to the enlargement displacement mechanism 20A, when the actuator 15 expands and contracts, an elastic force in the second direction D2 is generated in the second wall portion 24. Therefore, the displacement of the second wall 24 in the second direction D2 when the actuator 15 contracts is assisted by the elastic force, and it is suppressed that the displacement of the first wall 23 is delayed. Therefore, even when the actuator 15 is contracted at high speed, the pressure in the liquid chamber 21 is rapidly reduced due to the response delay of the second wall portion 24, and air bubbles are generated in the liquid 22. Is suppressed.

  FIGS. 2 and 3 are explanatory diagrams showing the operating characteristics of the magnifying displacement mechanism 20A verified by the experiment of the inventor of the present invention. In FIG. 2, graphs Ds and Df showing changes in displacement amounts of the first wall portion 23 and the second wall portion 24 with respect to the drive voltage applied to the actuator 15 are illustrated. The graph Df of a dashed dotted line indicates the displacement of the first wall portion 23, and the solid graph Ds indicates the displacement of the second wall portion 24. In the expansion displacement mechanism 20A, it was confirmed that the displacement amount of each of the wall portions 23 and 24 linearly increases with the increase of the driving voltage. It is also confirmed that the displacement of the second wall 24 is larger than the displacement of the first wall 23 in accordance with the difference between the areas S1 and S2 (FIG. 1) for the same drive voltage. The

  FIG. 3 shows a graph showing the change in the displacement speed of the first wall 23 and the second wall 24 with respect to the drive voltage applied to the actuator 15. In the graph of FIG. 3, the displacement velocity when displaced in the first direction D1 (FIG. 1) is positive (+), and the displacement velocity when displaced in the second direction D2 (FIG. 1) is negative (−) is there. The graph Vfa of the one-dot chain line and the graph Vfb of the two-dot chain line indicate the displacement velocity of the first wall portion 23, and the solid graph Vsa and the dashed graph Vsb indicate the displacement velocity of the second wall portion 24. . In the expansion displacement mechanism 20A, the displacement speed of the second wall 24 when displaced in the first direction D1 is the displacement speed of the first wall 23 according to the difference between the areas S1 and S2 as in the displacement amount. Was also confirmed to be increased. In addition, the displacement speed of the second wall 24 when displaced in the second direction D2 is also increased at a rate substantially the same as that when displaced in the first direction D1 over the displacement speed of the first wall 23. Was confirmed.

  As described above, according to the magnifying and displacing mechanism 20A in the first embodiment, the displacement amount of the actuator 15 can be easily magnified by using the Pascal principle. Further, the responsivity of the second wall 24 to the displacement of the actuator 15 is enhanced by the elastic force acting in the second direction D2 generated when the second wall 24 is displaced in the first direction D1. In addition, according to the enlargement displacement mechanism 20A of the first embodiment and the displacement generator 10A including the same, various effects and effects described in the above embodiment can be achieved.

2. Second embodiment:
The configuration of the enlargement and displacement mechanism 20B in the second embodiment will be described with reference to FIG. FIG. 4 is a schematic view showing a configuration of a displacement generating device 10B provided with the enlargement and displacement mechanism 20B of the second embodiment. The configuration of the displacement generator 10B of the second embodiment is the displacement generation of the first embodiment except that the magnification displacement mechanism 20B of the second embodiment is provided instead of the magnification displacement mechanism 20A of the first embodiment. The configuration is substantially the same as that of the device 10A. The configuration of the expansion displacement mechanism 20B of the second embodiment is substantially the same as the configuration of the expansion displacement mechanism 20A of the first embodiment except that the filler 25 is dispersed in the liquid 22.

  The filler 25 is constituted by a member in which a material having a smaller compression rate than the liquid 22 is formed into particles. The filler 25 may be made of, for example, metal, resin, ceramics, glass or the like. According to the expansion displacement mechanism 20B of the second embodiment, the filler 25 suppresses the pressure applied from the actuator 15 from being absorbed by the compression of the volume of the liquid 22. Therefore, the transmission efficiency of the pressure from the first wall 23 to the second wall 24 via the liquid chamber 21 is enhanced, and the responsiveness of the expansion displacement mechanism 20B to the displacement of the actuator 15 is enhanced. In addition, according to the enlarged displacement mechanism 20B of the second embodiment and the displacement generator 10B provided with the same, various effects and effects described in the first embodiment and the second embodiment can be obtained.

3. Third embodiment:
FIG. 5 is a schematic block diagram showing the entire configuration of a liquid ejecting apparatus 100C in the third embodiment. The liquid ejecting apparatus 100C includes a head unit 30C including the enlargement and displacement mechanism 20C of the third embodiment, a control unit 101, and a supply unit 110.

  The head unit 30C discharges the discharge liquid DL using the enlargement and displacement mechanism 20C of the third embodiment. The ejection liquid DL is, for example, an ink having a predetermined viscosity. The operation of the head unit 30C is controlled by the control unit 101. The configuration of the head unit 30C and the configuration of the expansion displacement mechanism 20C of the third embodiment will be described later.

  The control unit 101 is configured as a computer including a CPU and a memory, and the CPU reads and executes control programs and instructions stored in the memory to execute various functions for controlling the liquid ejecting apparatus 100C. To realize. The control program may be recorded on various non-temporary tangible recording media. The control unit 101 may be configured by a circuit.

  The supply unit 110 supplies the discharge liquid DL to the head unit 30C. The supply unit 110 is configured of a tank 111, a pressure adjustment unit 115, and a supply path 116. In the tank 111, the discharge liquid DL is accommodated. The discharge liquid DL in the tank 111 is supplied to the head unit 30C through the supply path 116 connected to the head unit 30C.

  The pressure adjustment unit 115 is provided in the supply passage 116, and adjusts the pressure of the discharge liquid DL supplied to the head unit 30C through the supply passage 116 to a predetermined pressure. The pressure adjustment unit 115 includes a pump for sucking the discharge liquid DL from the tank 111, a valve for opening and closing the pressure on the side of the head unit 30C to a predetermined pressure, and the like (not shown).

  FIG. 6 is a schematic cross-sectional view schematically showing an internal configuration of the head portion 30C of the third embodiment. The head unit 30C includes a metal case 31. The head portion 30C is provided with a nozzle 32, a pressure chamber 33, a supply flow passage 35, a drive chamber 40, and an actuator 41 in the housing 31 in addition to the enlargement displacement mechanism 20C of the third embodiment. .

  The nozzle 32 communicates with the pressure chamber 33 and is provided as a through hole that opens to the outside of the housing 31. In the third embodiment, since the head unit 30C discharges the discharge liquid DL in the gravity direction, the nozzles 32 are opened in the gravity direction.

  The pressure chamber 33 contains the discharge liquid DL discharged from the nozzle 32. The pressure chamber 33 is connected to the supply passage 116 of the supply unit 110 via the supply passage 35 which is a passage through which the discharge liquid DL flows. The discharge liquid DL is pressure-fed from the supply unit 110 to the pressure chamber 33 through the supply flow channel 35. The pressure of the pressure chamber 33 when the discharge liquid DL is not discharged from the nozzle 32 is adjusted by the pressure adjusting unit 115 (FIG. 5) of the supply unit 110 to a pressure equal to or less than the meniscus pressure resistance of the nozzle 32.

  The drive chamber 40 is provided above the pressure chamber 33 in the direction of gravity with the magnifying displacement mechanism 20C interposed therebetween. The drive chamber 40 accommodates the actuator 41. The actuator 41 changes the volume of the pressure chamber 33 via the expansion displacement mechanism 20C, and generates pressure in the pressure chamber 33 for discharging the discharge liquid DL from the nozzle 32 (described later). In the third embodiment, the actuator 41 is configured of a piezoelectric element that is elastically deformed in the same manner as the actuator 15 described in the first embodiment. The first end 41 a in the expansion and contraction direction of the actuator 41 is fixed to the housing 31 via the fixing portion 42.

  The expansion displacement mechanism 20C has the same configuration as the expansion displacement mechanism 20B of the second embodiment. The expansion displacement mechanism 20C includes a liquid chamber 21 in which the liquid 22 is filled, and a first wall 23 and a second wall 24 which are configured as diaphragms that are bent and deformed in the thickness direction.

  The liquid chamber 21 is configured as an airtight hollow space between the drive chamber 40 and the pressure chamber 33. In the liquid 22 of the liquid chamber 21, the same filler 25 as that described in the second embodiment is dispersed.

  The first wall portion 23 airtightly separates the drive chamber 40 and the liquid chamber 21. The outer peripheral end of the first wall portion 23 is fixed to the housing 31. The first wall surface 23 a of the first wall portion 23 constitutes a part of the wall surface of the liquid chamber 21 and faces the liquid 22. The second wall surface 23 b of the first wall portion 23 is connected to the second end 41 b in the expansion and contraction direction of the actuator 41 via the connection portion 43.

  The second wall portion 24 airtightly separates the pressure chamber 33 and the liquid chamber 21. The outer peripheral end of the second wall portion 24 is fixed to the housing 31. The first wall surface 24 a of the second wall portion 24 constitutes a part of the wall surface of the liquid chamber 21 and faces the liquid 22. The second wall surface 24b of the second wall portion 24 constitutes a part of the wall surface of the pressure chamber 33, and faces the discharge liquid DL. Preferably, the second wall portion 24 is disposed such that the central portion thereof faces the nozzle 32.

  In the head portion 30C, the second wall portion is received by the pressure received from the liquid 22 of the liquid chamber 21 when the actuator 41 is extended momentarily and the first wall portion 23 is displaced as illustrated by a broken line. 24 are displaced in the first direction D1 as illustrated by a broken line. As a result, the pressure in the pressure chamber 33 is raised to a pressure equal to or higher than the meniscus pressure resistance, and the discharge liquid DL is discharged from the nozzle 32.

  Here, in the area S2 where the first wall surface 24a of the second wall portion 24 faces the liquid 22 of the liquid chamber 21, the first wall surface 23a of the first wall portion 23 faces the liquid 22 of the liquid chamber 21. Is smaller than the area S1. Therefore, as described in the first embodiment, the displacement amount Dp2 of the second wall portion 24 is larger than the displacement amount Dp1 of the first wall portion 23. Therefore, in the head portion 30C, a larger discharge pressure can be easily generated in the pressure chamber 33 by the expansion displacement mechanism 20C having a simple configuration. In the head portion 30C, even if a small actuator 41 with a small amount of expansion and contraction is adopted, the amount of displacement of the second wall 24 can be compensated by the enlarged displacement mechanism 20C. Therefore, if the enlargement displacement mechanism 20C is used, it is possible to miniaturize the actuator 41 and miniaturize the head portion 30C.

  In addition, in the enlargement displacement mechanism 20C, as described in the first embodiment, the second wall portion 24 is displaced in the first direction D1 in a state in which an elastic force acting in the second direction D2 is generated. Therefore, the followability of the displacement of the second wall portion 24 in the second direction D2 when the actuator 41 is displaced in the contracting direction is enhanced by the elastic force. As a result, even if the actuator 41 contracts instantaneously, the pressure in the liquid chamber 21 is reduced and generation of air bubbles in the liquid 22 is suppressed. Thus, the head unit 30C can be stably driven. In the liquid ejecting apparatus 100 </ b> C, since the actuator 41 may repeat expansion and contraction at high speed, the advantage obtained by the effect of suppressing the generation of air bubbles is large.

  Further, according to the head portion 30C, by suppressing the response delay of the second wall portion 24 as described above, it is possible to suppress that the generation timing of the negative pressure in the pressure chamber 33 is delayed from the target timing. . Therefore, after discharge of the discharge liquid DL from the nozzle 32 is started, negative pressure can be generated in the pressure chamber 33 at an appropriate timing, and the discharge liquid DL discharged from the nozzle 32 wastes its tail. In addition, it is possible to suppress the generation of useless mist due to the discharge. Therefore, the accuracy of the discharge amount of the discharge liquid DL is enhanced, and the deterioration of the flying state of the droplets is suppressed.

  As described above, according to the liquid ejecting apparatus 100C of the third embodiment, the discharge performance of the discharge liquid DL can be enhanced by providing the enlargement displacement mechanism 20C to which the Pascal principle is applied. Further, the actuator 41 can be miniaturized, and the head portion 30C can be miniaturized. In addition, according to the liquid ejecting apparatus 100C of the third embodiment, various effects and effects described in the first embodiment, the second embodiment, and the third embodiment can be obtained.

4. Fourth Embodiment:
The configuration of an enlargement and displacement mechanism 20D and a liquid jet apparatus 100D including the same in the fourth embodiment will be described with reference to FIG. FIG. 7 is a schematic cross-sectional view showing an internal configuration of a head unit 30D of the fourth embodiment. The configuration of a liquid ejection device 100D of the fourth embodiment is the same as that of the liquid ejection device 100C of the third embodiment except that the head portion 30D of the fourth embodiment is provided instead of the head portion 30C of the third embodiment. It is almost the same as the configuration. The configuration of the head portion 30D of the fourth embodiment is the third embodiment except that the enlarged displacement mechanism 20D of the fourth embodiment is partially different from the magnified displacement mechanism 20C of the third embodiment. The configuration is substantially the same as that of the head portion 30C. The configuration of the enlarged displacement mechanism 20D of the fourth embodiment is different from the configuration of the third embodiment in that elastic members 26a and 26b supporting the second wall 24D and the second wall 24D are provided instead of the second wall 24. It differs from the configuration of the enlargement displacement mechanism 20C of the embodiment.

  The second wall 24D of the fourth embodiment is made of, for example, a metal plate. It is desirable that the second wall portion 24D have a rigidity to such an extent that generation of bending deformation in the thickness direction due to pressure received through the liquid 22 of the liquid chamber 21 when the actuator 41 extends is suppressed. The second wall 24D is not limited to a metal plate, and may be made of another member. The second wall 24D may be made of, for example, a resin plate. Ribs may be formed on the wall surfaces 24a and 24b of the second wall portion 24D to suppress the bending deformation.

  The second wall portion 24D is fixed to the housing 31 so as to be displaceable in the thickness direction by supporting the outer peripheral end of the second wall portion 24D by the two elastic members 26a and 26b. Each of the two elastic members 26a and 26b has a frame shape surrounding a central portion of the second wall 24D. The outer peripheral end of the second wall 24D is sandwiched in the thickness direction of the second wall 24D by the first elastic member 26a and the second elastic member 26b.

  The first elastic member 26a constitutes a part of the wall of the liquid chamber 21 and supports the second wall 24D from the side of the first wall 24a. The first elastic member 26 a also functions as a seal that prevents the liquid from leaking from the liquid chamber 21. The second elastic member 26b constitutes a part of the wall of the pressure chamber 33, and supports the second wall 24D from the side of the second wall 24b. The second elastic member 26 b also functions as a seal that prevents the discharge liquid DL from leaking from the pressure chamber 33.

  The area S2 of the first wall 24a of the second wall 24D facing the liquid 22 of the liquid chamber 21 is the area S1 of the first wall 23a of the first wall 23 facing the liquid 22 of the liquid chamber 21. Less than. In the first wall surface 24a of the second wall portion 24D, the area facing the liquid 22 of the liquid chamber 21 is an area surrounded by the first elastic member 26a.

  When the actuator 41 is extended and the first wall portion 23 is displaced in the direction toward the liquid chamber 21 as illustrated by a broken line, the second wall portion 24D receives pressure from the liquid 22 of the liquid chamber 21. Then, the first elastic member 26a extends in the thickness direction of the second wall 24D, and the second elastic member 26b contracts in the thickness direction of the second wall 24D, and the second wall 24D is illustrated by a broken line. In the first direction D1. As described above, in the enlargement and displacement mechanism 20D of the fourth embodiment, when the first wall portion 23 is displaced and pressure is applied to the liquid 22, the elastic members 26a and 26b work in the second direction D2. The second wall portion 24D is moved in the first direction D1 by being elastically deformed to be generated.

  According to the magnifying and displacing mechanism 20D of the fourth embodiment, the displacement amount Dp2 of the second wall portion 24D corresponds to the first wall according to the difference between the areas S1 and S2, as described in the above embodiments. The displacement amount Dp1 of the portion 23 is enlarged. Further, since the second wall 24D is displaced in the first direction D1 in a state in which the elastic force is generated in the second direction D2 by the elastic members 26a and 26b, the response delay of the second wall 24D to the contraction of the actuator 41 Occurrence is suppressed.

  In the expansion displacement mechanism 20D of the fourth embodiment, since the bending deformation of the second wall 24D when the second wall 24D is displaced is suppressed, the pressure transmitted from the liquid 22 is the second wall 24D. It is suppressed that it is absorbed by such bending deformation of. Therefore, according to the head unit 30D of the fourth embodiment, the pressure generated by the actuator 41 is efficiently transmitted to the pressure chamber 33. Therefore, the discharge performance of the discharge liquid DL by the head unit 30D is further enhanced.

  In the enlarged displacement mechanism 20D of the fourth embodiment, a configuration in which the first elastic member 26a and the second elastic member 26b are connected to each other on the outer periphery of the second wall 24D may be employed. Further, in the enlargement and displacement mechanism 20D of the fourth embodiment, any one of the two elastic members 26a and 26b may be omitted. When the second elastic member 26 b is omitted, the second wall 24 D is prevented from falling off, the leakage of the liquid 22 from the liquid chamber 21, and the leakage of the discharge liquid DL from the pressure chamber 33 are suppressed. It is desirable that the second wall 24D be bonded to the first elastic member 26a.

  As described above, according to the enlarged displacement mechanism 20D of the fourth embodiment, the response of the second wall 24D when the actuator 41 is contracted by the elastic deformation of the elastic members 26a and 26b supporting the second wall 24D. The occurrence of a delay can be suppressed. In addition, according to the enlargement and displacement mechanism 20D of the fourth embodiment and the liquid ejecting apparatus 100D including the same, various effects and effects described in the above embodiments can be achieved.

5. Fifth embodiment:
With reference to FIG. 8, the configurations of an enlargement and displacement mechanism 20E and a liquid ejecting apparatus 100E including the same in the fifth embodiment will be described. FIG. 8 is a schematic cross-sectional view showing an internal configuration of a head unit 30E of the fifth embodiment. The configuration of a liquid ejection device 100E of the fifth embodiment is the same as that of the liquid ejection device 100D of the fourth embodiment except that a head portion 30E of the fifth embodiment is provided instead of the head portion 30D of the fourth embodiment. It is almost the same as the configuration. The configuration of the head portion 30E of the fifth embodiment is the fourth embodiment except that the enlarged displacement mechanism 20E of the fifth embodiment differs in part of the configuration from the enlarged displacement mechanism 20D of the fourth embodiment. The configuration of the head portion 30D is substantially the same as that of the first embodiment. The configuration of the magnifying and displacing mechanism 20E of the fifth embodiment is that the fourth embodiment includes an elastic member 27 that supports the first wall 23E and the first wall 23E instead of the first wall 23. This is different from the configuration of the magnification displacement mechanism 20D.

  The first wall 23E of the fifth embodiment is made of, for example, a metal plate. It is desirable that the first wall portion 23E have a rigidity to such an extent that generation of bending deformation in the thickness direction is suppressed when the actuator 41 extends. The first wall portion 23E is not limited to a metal plate, and may be configured by another member. The first wall portion 23E may be made of, for example, a resin plate. Ribs may be formed on the wall surfaces 23a and 23b of the first wall portion 23E to suppress the bending deformation.

  The first wall portion 23E is fixed to the housing 31 via an elastic member 27 so as to be displaceable in the thickness direction. The elastic member 27 has a frame-like shape surrounding a central portion of the first wall portion 23E. The elastic member 27 supports the outer peripheral end of the first wall 23E from the side of the first wall 23a of the first wall 23E so that a reaction force against the actuator 41 is generated. The elastic member 27 constitutes a part of the wall of the liquid chamber 21 and also functions as a seal that prevents the liquid from leaking from the liquid chamber 21. When the actuator 41 extends, the elastic member 27 is compressed, whereby the first wall portion 23E is displaced toward the liquid chamber 21 in a state in which the bending deformation is suppressed as illustrated by a broken line.

  According to the enlarged displacement mechanism 20E of the fifth embodiment, it is possible to suppress that the propulsive force of the actuator 41 is absorbed by the bending deformation of the first wall portion 23E. In addition, the elastic force of the elastic member 27 can improve the followability of the first wall portion 23E to the contraction of the actuator 41. In addition, according to the enlargement and displacement mechanism 20E of the fifth embodiment and the liquid injection device 100E of the fifth embodiment including the same, various effects and advantages described in the above-described embodiments can be obtained.

6. Sixth embodiment:
The configuration of an enlargement and displacement mechanism 20F and a liquid ejecting apparatus 100F including the same in the sixth embodiment will be described with reference to FIG. FIG. 9 is a schematic cross-sectional view showing an internal configuration of a head unit 30F of the sixth embodiment. The configuration of the liquid ejecting apparatus 100F of the sixth embodiment is the same as that of the liquid ejecting apparatus 100E of the fifth embodiment except that the head unit 30F of the sixth embodiment is provided instead of the head unit 30E of the fifth embodiment. It is almost the same as the configuration. The configuration of the head portion 30F of the sixth embodiment differs from the configuration of the head portion 30E of the fifth embodiment in that a third elastic member 26c is added. The configuration of the head unit 30F of the sixth embodiment is substantially the same as the configuration of the head unit 30E of the fifth embodiment except for the points described below.

  A third elastic member 26c is added to the enlargement and displacement mechanism 20F of the sixth embodiment provided in the head portion 30F of the sixth embodiment. The third elastic member 26c is arranged on the outer side of the second elastic member 26b to apply an elastic force in the second direction D2 to the outer peripheral end of the second wall 24D. The third elastic member 26c is constituted by, for example, a disc spring disposed so as to surround the second elastic member 26b. The third elastic member 26c may be configured by a coil spring.

  In the housing 31 of the head portion 30F of the sixth embodiment, a space for arranging the three elastic members 26a, 26b, and 26c is provided so as to surround the outer periphery of the second wall portion 24D. Since the third elastic member 26c is disposed in the space sealed by the first elastic member 26a and the second elastic member 26b, the deterioration due to contact with the liquid 22 or the discharge liquid DL is suppressed.

  According to the enlarged displacement mechanism 20F of the sixth embodiment, the followability of the second wall 24D when the actuator 41 contracts can be enhanced by the elastic force of the third elastic member 26c. In addition, according to the enlargement and displacement mechanism 20F of the sixth embodiment and the liquid injection device 100F of the sixth embodiment including the same, various effects and advantages described in the above embodiments can be obtained.

7. Seventh embodiment:
With reference to FIG. 10, the configuration of an enlargement and displacement mechanism 20G and a liquid ejecting apparatus 100G including the same in the seventh embodiment will be described. FIG. 10 is a schematic cross-sectional view showing an internal configuration of a head unit 30G of the seventh embodiment. The configuration of a liquid ejection device 100G of the seventh embodiment is the same as that of the liquid ejection device 100E of the fifth embodiment except that the head portion 30G of the seventh embodiment is provided instead of the head portion 30E of the fifth embodiment. It is almost the same as the configuration. The configuration of the head portion 30G of the seventh embodiment is that the second wall portion 24G corresponding to the second wall portion 24D does not constitute a part of the wall surface of the pressure chamber 33 is that of the head portion 30E of the fifth embodiment. Different from the configuration. The configuration of the head unit 30G of the seventh embodiment is substantially the same as the configuration of the head unit 30E of the fifth embodiment except for the points described below.

  An intermediate chamber 38 is provided between the liquid chamber 21 and the pressure chamber 33 in the housing 31 of the head portion 30G of the seventh embodiment. The second wall surface 24b of the second wall portion 24G included in the enlargement and displacement mechanism 20G of the seventh embodiment constitutes a part of the wall surface of the intermediate chamber 38. A piston 50 for discharging the discharge liquid DL of the pressure chamber 33 from the nozzle 32 by piston movement is connected to the central portion of the second wall surface 24b.

  The piston 50 is connected at its rear end to the second wall 24 b so as to project in a direction perpendicular to the second wall 24 b. The tip of the piston 50 is disposed in the pressure chamber 33. In order to increase the discharge efficiency of the discharge liquid DL from the nozzle 32, it is desirable that the tip of the piston 50 be disposed to face the nozzle 32.

  The discharge liquid DL leaks to the intermediate chamber 38 in air-tight contact with the outer periphery of the piston 50 in the through hole 39 into which the piston 50 provided between the intermediate chamber 38 and the pressure chamber 33 is inserted. The seal part which controls is provided (illustration is omitted). The piston 50 reciprocates up and down while rubbing the seal portion.

  The second elastic member 26bG of the magnifying and displacing mechanism 20G of the seventh embodiment is disposed in the intermediate chamber 38 so as to surround the outer periphery of the piston 50. The second elastic member 26bG supports the second wall 24G from below so as to apply an elastic force to the second wall 24D in the second direction D2. In the seventh embodiment, the second elastic member 26bG is formed of a disc spring. The second elastic member 26bG may be configured by a coil spring.

  In the head portion 30G, the tip of the piston 50 is displaced in the first direction D1 and the second direction D2 within the pressure chamber 33 in response to the instantaneous expansion and contraction of the actuator 41, whereby the liquid discharged from the nozzle 32 is discharged. DL is discharged. The amount of displacement of the piston 50 is based on the amount of displacement of the actuator 41 according to the difference in the area of the first wall portion 23E and the second wall portion 24G in contact with the liquid 22 of the liquid chamber 21 by the expansion displacement mechanism 20G. Is also expanded. Further, when the actuator 41 is contracted, the movement of the piston 50 in the second direction D2 is assisted by the elastic force of the first elastic member 26a and the second elastic member 26bG. Therefore, the occurrence of the response delay of the piston 50 to the drive of the actuator 41 is suppressed.

  In the head portion 30G of the seventh embodiment, the discharge liquid DL can be discharged from the nozzle 32 by the instantaneous sharp displacement of the piston 50 having a small diameter. According to the head unit 30G, discharge of the high viscosity discharge liquid DL can be performed efficiently. In the magnifying and displacing mechanism 20G of the seventh embodiment, the intermediate chamber 38 is provided between the liquid chamber 21 and the pressure chamber 33, whereby the inflow of the discharge liquid DL into the liquid chamber 21 and the liquid into the pressure chamber 33. 22 entry is suppressed. Further, by disposing the second elastic member 26bG in the intermediate chamber 38, the second elastic member 26bG is prevented from being exposed to the liquid 22 or the discharge liquid DL and deteriorating. In addition, according to the enlargement and displacement mechanism 20G of the seventh embodiment and the liquid injection device 100G of the seventh embodiment including the same, various effects and advantages described in the above embodiments can be obtained.

8. Eighth embodiment:
The configuration of the enlargement and displacement mechanism 20H and the liquid ejecting apparatus 100H including the same in the eighth embodiment will be described with reference to FIG. FIG. 11 is a schematic cross-sectional view showing an internal configuration of a head unit 30H of the eighth embodiment. The configuration of the liquid ejecting apparatus 100H of the eighth embodiment is the liquid ejecting apparatus 100G of the seventh embodiment except that the head unit 30H of the eighth embodiment is provided instead of the head unit 30G of the seventh embodiment. It is almost the same as the composition of The configuration of the head portion 30H of the eighth embodiment differs from the configuration of the head portion 30G of the seventh embodiment in that pistons 55 having different shapes are provided, and the configuration for applying elastic force to the pistons 55 is changed. The configuration of the head unit 30H of the eighth embodiment is substantially the same as the configuration of the head unit 30G of the seventh embodiment except for the points described below.

  The enlargement and displacement mechanism 20H of the eighth embodiment has a configuration in which the first elastic member 26a is omitted and the intermediate chamber 38 and the liquid chamber 21 described in the seventh embodiment are integrated. The enlargement displacement mechanism 20H includes a second wall 24H disposed in the liquid chamber 21 instead of the second wall 24G of the seventh embodiment. A piston 55 is connected to the central portion of the second wall 24b of the second wall 24G instead of the piston 50 described in the seventh embodiment. The second wall portion 24H functions as a wall portion of the liquid chamber 21 closing the through hole 39 into which the piston 55 is inserted, and can be interpreted as constituting a part of the wall surface of the liquid chamber 21. The area S2 of the area of the first wall 24a of the second wall 24H facing the liquid 22 is smaller than the area S1 of the area of the first wall 23a of the first wall 23E facing the liquid 22.

  The second wall portion 24H is supported from below by an elastic member 28 arranged to surround the piston 55 in the liquid chamber 21. In the seventh embodiment, the elastic member 28 is made of resin rubber and also functions as a seal portion for suppressing the leakage of the liquid 22 from the liquid chamber 21. The elastic member 28 may be configured by a disc spring or a coil spring. In this case, it is desirable that the liquid 22 be sealed by the seal portion provided in the through hole 39.

  At the tip end portion of the piston 55 of the eighth embodiment, an overhanging portion 56 that protrudes in a direction intersecting the central axis of the piston 55 is provided. The overhanging portion 56 overhangs so as to have a width larger than the opening diameter of the through hole 39. The overhanging portion 56 contacts the upper surface of the liquid chamber 21 so as to close the through hole 39 when the piston 55 moves in the second direction D2. The overhanging portion 56 functions as a stopper portion that defines a movement range of the piston 55 in the second direction D2.

  In the state where the overhanging portion 56 reaches the upper surface of the liquid chamber 21, the elastic member 28 supporting the second wall portion 24H is compressed, and the elastic force in the second direction D2 is applied to the second wall portion 24H. It is desirable to be in the state of giving Thereby, the sealability between the liquid chamber 21 and the pressure chamber 33 is enhanced.

  The second wall portion 24H of the expansion displacement mechanism 20H is displaced in the liquid chamber 21 in a state of receiving the elastic force from the elastic member 28. When the actuator 41 extends, the second wall portion 24H is displaced in the first direction D1 in a state where an elastic force in the second direction D2 is generated by the compression of the elastic member 28 by the pressure received from the liquid 22 at the first wall surface 24a. Do. When the second wall portion 24H is displaced in the first direction D1, the displacement of the projecting portion 56 of the piston 55 causes the nozzle 32 to eject the discharge liquid DL. When the actuator 41 contracts, the second wall portion 24H is displaced by the elastic force of the elastic member 28 in the second direction D2.

  According to the magnifying and displacing mechanism 20H of the eighth embodiment, the first wall portion 24G is configured with a simpler structure than the magnifying and displacing mechanism 20G of the seventh embodiment, and an elastic force acting in the second direction D2 is generated. It can be displaced in the direction D1. Further, according to the head portion 30H of the eighth embodiment, the discharge amount of the discharge liquid DL discharged from the nozzle 32 can be increased by the projecting portion 56 of the piston 55. In addition, according to the enlargement and displacement mechanism 20H of the eighth embodiment and the liquid ejecting apparatus 100H including the same, various effects and effects described in each of the above embodiments can be achieved.

9. Ninth embodiment:
The configuration of an enlargement and displacement mechanism 20I and a liquid jet apparatus 100I including the same in the ninth embodiment will be described with reference to FIG. FIG. 12 is a schematic cross-sectional view showing an internal configuration of the head portion 30I of the ninth embodiment. The configuration of a liquid ejection device 100I of the ninth embodiment is the liquid ejection device 100H of the eighth embodiment except that the head portion 30I of the ninth embodiment is provided instead of the head portion 30H of the eighth embodiment. It is almost the same as the composition of The configuration of the head portion 30I of the ninth embodiment is that the additional elastic member 28s and the support wall portion 29 are added, and that the projecting portion 56 is omitted from the piston 55, the eighth embodiment. The configuration is different from the configuration of the head unit 30H. The configuration of the head portion 30I of the ninth embodiment is substantially the same as the configuration of the head portion 30H of the eighth embodiment except for the points described below.

  In the expansion displacement mechanism 20I of the ninth embodiment, the additional elastic member 28s that applies an elastic force to the second wall 24H in the first direction D1 in the initial state in which the actuator 41 is not extended is the second wall It is arranged above 24H. In the liquid chamber 21 of the ninth embodiment, a support wall 29 for receiving the additional elastic member 28s from above is provided above the second wall 24H. The additional elastic member 28 s is disposed in a compressed state by being sandwiched between the second wall portion 24 H and the support wall portion 29. In the ninth embodiment, the additional elastic member 28s is constituted by a disc spring. The additional elastic member 28s may not be constituted by a disc spring. The additional elastic member 28s may be constituted by, for example, a spring coil.

  According to the enlarged displacement mechanism 20I of the ninth embodiment, since the elastic member 28 is initially compressed by the elastic force of the additional elastic member 28s even if the overhanging portion 56 is omitted, the liquid by the elastic member 28 is used. The state in which the sealing performance of the chamber 21 is enhanced is maintained. Further, according to the head portion 30I of the ninth embodiment, the extension portion 56 is omitted, so that the resistance that the piston 55 receives from the discharge liquid DL in the pressure chamber 33 is reduced. Therefore, the piston 55 can be efficiently moved at high speed. In addition, according to the enlargement and displacement mechanism 20I of the ninth embodiment and the liquid ejecting apparatus 100I including the same, various effects and effects described in the above embodiments can be achieved.

10. Tenth embodiment:
The configuration of an enlargement and displacement mechanism 20J and a liquid jet apparatus 100J including the same in the tenth embodiment will be described with reference to FIG. FIG. 13 is a schematic cross-sectional view showing an internal configuration of the head unit 30J of the tenth embodiment. The configuration of a liquid ejection device 100J of the tenth embodiment is the liquid ejection device 100C of the third embodiment except that the head portion 30J of the tenth embodiment is provided instead of the head portion 30C of the third embodiment. It is almost the same as the composition of The configuration of the head portion 30J of the tenth embodiment differs from the configuration of the head portion 30C of the third embodiment mainly in that the expansion / contraction direction of the actuator 41 and the displacement direction of the first wall portion 23 are changed. The configuration of the head unit 30J of the tenth embodiment is basically the same as the configuration of the head unit 30C of the third embodiment, except for the points described below.

  In the head portion 30J of the tenth embodiment, the actuator 41 is disposed such that the expansion and contraction direction thereof is substantially orthogonal to the direction from the liquid chamber 21 toward the pressure chamber 33 (that is, the gravity direction). Further, in the enlargement and displacement mechanism 20J of the tenth embodiment, the first wall portion 23 is disposed along the gravity direction such that the displacement direction thereof is substantially orthogonal to the displacement direction of the second wall portion 24. The enlarged displacement mechanism 20J is configured such that the height along the gravity direction is larger than the width along the horizontal direction.

  According to the enlargement and displacement mechanism 20J of the tenth embodiment, the area S1 of the region facing the liquid 22 faces the liquid 22 of the second wall 24 by increasing the width of the first wall 23 in the gravity direction. Can be larger than the area S2 of the Therefore, the enlarging and displacing mechanism 20J can be configured to be compact in the horizontal direction. Therefore, when arranging the plurality of nozzles 32 in the horizontal direction, the enlargement displacement mechanism 20J can suppress the interval between the nozzles 32 from being extended. In addition, according to the enlargement and displacement mechanism 20J of the tenth embodiment and the liquid ejecting apparatus 100J including the same, various effects and advantages described in the above embodiments can be obtained.

11. Eleventh embodiment:
The configuration of an enlargement and displacement mechanism 20K and a liquid jet apparatus 100K including the same in the eleventh embodiment will be described with reference to FIG. FIG. 14 is a schematic cross-sectional view showing an internal configuration of the head portion 30K of the eleventh embodiment. The configuration of a liquid ejection device 100K of the eleventh embodiment is the liquid ejection device 100J of the tenth embodiment except that the head portion 30K of the eleventh embodiment is provided instead of the head portion 30J of the tenth embodiment. It is almost the same as the composition of The configuration of the head portion 30K of the eleventh embodiment is the enlargement and displacement mechanism 20K of the eleventh embodiment to which the configurations of the second wall portion 24D and the elastic members 26a and 26b (FIG. 7) described in the fourth embodiment are applied. Is basically the same as the configuration of the head portion 30J of the tenth embodiment except that the second embodiment is provided. Also in the enlargement and displacement mechanism 20K of the eleventh embodiment and the liquid ejecting apparatus 100K including the same, various effects and advantages described in the above-described embodiments can be achieved.

12. Twelfth embodiment:
The configuration of a magnifying displacement mechanism 20L and a liquid ejecting apparatus 100L including the same in the twelfth embodiment will be described with reference to FIG. FIG. 15 is a schematic cross-sectional view showing an internal configuration of the head portion 30L of the twelfth embodiment. The configuration of a liquid ejecting apparatus 100L according to the twelfth embodiment is the liquid ejecting apparatus 100K according to the eleventh embodiment except that the head unit 30L according to the twelfth embodiment is provided instead of the head unit 30K according to the eleventh embodiment. It is almost the same as the composition of The configuration of the head portion 30L according to the twelfth embodiment is such that the second wall portion 24D is disposed along the direction of gravity similarly to the first wall portion 23, and constitutes the side wall surface of the pressure chamber 33. The configuration is basically the same as the configuration of the head portion 30K of the eleventh embodiment, except for the following points. The second wall portion 24D is provided at a position offset below the first wall portion 23. According to the head portion 30L of the twelfth embodiment, the discharge liquid DL can be discharged in a direction different from the displacement direction of the second wall portion 24D. Also, the various functions and effects described in each of the above embodiments can be exhibited by the enlargement and displacement mechanism 20L of the twelfth embodiment and the liquid ejecting apparatus 100L including the same.

13. Thirteenth embodiment:
FIG. 16 is a schematic block diagram showing an entire configuration of a liquid ejecting apparatus 100M according to a thirteenth embodiment. The liquid ejecting apparatus 100M of the thirteenth embodiment is substantially the same as the liquid ejecting apparatus 100C (FIG. 5) of the third embodiment, except for the points described below. The supply unit 110 of the liquid ejecting apparatus 100M includes a pressure pump 117 instead of the pressure adjustment unit 115, and includes a head unit 30M of the thirteenth embodiment instead of the head unit 30C of the third embodiment. . The liquid ejecting apparatus 100 </ b> M also includes a circulation unit 120. The circulation unit 120 includes a discharge passage 121, a liquid storage unit 122, a negative pressure generation source 123, and a circulation passage 124.

  The pressure pump 117 pumps the discharge liquid DL in the tank 111 to the head unit 30 M through the supply passage 116. The configuration of the head unit 30M will be described later. The discharge path 121 connects the head unit 30M and the liquid storage unit 122. The discharged liquid DL not discharged by the head unit 30M is discharged to the liquid storage unit 122 through the discharge passage 121. A negative pressure generation source 123 is connected to the liquid storage unit 122. The negative pressure generation source 123 sucks the discharge liquid DL from the head unit 30M through the discharge passage 121 by making the inside of the liquid storage unit 122 negative pressure. The negative pressure source 123 is composed of various pumps.

  In the liquid ejecting apparatus 100M, the pressure of the pressure chamber 33 (shown in FIG. 17 to be referred to later) of the head unit 30M is adjusted by the pressurization by the pressurization pump 117 and the pressure reduction by the negative pressure generation source 123. In the liquid ejecting apparatus 100M, either one of the pressure pump 117 and the negative pressure generation source 123 may be omitted. When the pressure pump 117 is omitted, the negative pressure generation source 123 functions as one component of the supply unit 110 that generates a pressure for pumping the discharge liquid DL from the tank 111 to the head unit 30M. It can be interpreted as

  The circulation path 124 is a flow path for circulating the discharge liquid DL discharged from the head portion 30M through the discharge path 121 to the pressure chamber 33 of the head portion 30M. The circulation path 124 connects the liquid storage unit 122 and the tank 111. The discharge liquid DL stored in the liquid storage portion 122 through the discharge path 121 is returned to the tank 111 through the circulation path 124, and is again supplied to the pressure chamber 33 of the head portion 30M through the supply path 116. The circulation path 124 may be provided with a pump for suctioning the liquid from the liquid storage unit 122.

  In the liquid ejecting apparatus 100M, by providing the circulation path 124, it is possible to reuse the discharge liquid DL that has flowed out of the head unit 30M. Therefore, it can suppress that the discharge liquid DL is consumed wastefully, and can improve the utilization efficiency of the discharge liquid DL. The liquid storage unit 122 or the tank 111 may be provided with an adjustment unit that adjusts various conditions such as the concentration, viscosity, and temperature of the discharge liquid DL to be reused. In addition, the discharge passage 121 and the circulation passage 124 may be provided with a filter unit for removing air bubbles and foreign substances contained in the discharge liquid DL.

  FIG. 17 is a schematic cross-sectional view showing an internal configuration of a head unit 30M of the thirteenth embodiment. The configuration of the head unit 30M of the thirteenth embodiment differs from the configuration of the head unit 30C of the third embodiment in that a discharge flow passage 60 is added. The configuration of the head unit 30M of the thirteenth embodiment is substantially the same as the configuration of the head unit 30C of the third embodiment except for the points described below, and the head unit 30M has the enlargement and displacement mechanism described in the third embodiment. It has 20C.

  The discharge flow channel 60 is one of the flow channels through which the discharge liquid DL flows. The discharge flow path 60 is provided in the housing 31 and connected to the pressure chamber 33. The discharge liquid DL of the pressure chamber 33 flows out to the discharge passage 121 through the discharge passage 60.

  In the head unit 30M of the liquid ejecting apparatus 100M, in the pressure chamber 33, the flow of the discharge liquid DL from the supply flow channel 35 toward the discharge flow channel 60 can be generated. Therefore, the deterioration of the discharge liquid DL caused by the stagnation of the discharge liquid DL in the head unit 30M, such as the deposition of the sedimentation component in the discharge liquid DL in the head unit 30M and the concentration change due to the evaporation of the solvent component of the discharge liquid DL is suppressed Be done. Therefore, the occurrence of a discharge failure caused by the deterioration of the discharge liquid DL of the pressure chamber 33 is suppressed. Further, in the liquid ejecting apparatus 100M, even if bubbles are generated in the pressure chamber 33, the bubbles can be discharged from the discharge flow path 60 together with the discharge liquid DL. Therefore, the occurrence of discharge failure caused by the air bubbles in the pressure chamber 33 is suppressed. In addition, according to the liquid injection device 100M of the thirteenth embodiment provided with the enlarging and displacing mechanism 20C, various effects and effects described in each of the above embodiments can be achieved.

14. Fourteenth embodiment:
The configuration of a liquid ejecting apparatus 100N according to the fourteenth embodiment will be described with reference to FIG. FIG. 18 is a schematic cross-sectional view showing an internal configuration of the head portion 30N of the fourteenth embodiment. The configuration of a liquid ejecting apparatus 100N according to the fourteenth embodiment is the liquid ejecting apparatus 100M according to the thirteenth embodiment except that the head unit 30N according to the fourteenth embodiment is provided instead of the head unit 30M according to the thirteenth embodiment. It is almost the same as the composition of In the configuration of the head portion 30N of the fourteenth embodiment, the supply flow passage 35 and the discharge flow passage 60 which are flow passages connected to the pressure chamber 33 when the second wall 24 of the expansion displacement mechanism 20C is displaced. It differs from the configuration of the head portion 30M of the thirteenth embodiment in that the pressure chamber 33 is closed. The configuration of the head unit 30N of the fourteenth embodiment is substantially the same as the configuration of the head unit 30M of the thirteenth embodiment except for the points described below.

  In the head portion 30N of the fourteenth embodiment, when the actuator 41 extends, the second wall portion 24b contacts the opening end portions of the supply flow passage 35 and the discharge flow passage 60 so that the supply flow is performed. It bends towards the nozzle 32 so that the passage 35 and the discharge passage 60 are substantially closed to the pressure chamber 33. As a result, the connection between each of the supply flow channel 35 and the discharge flow channel 60 and the pressure chamber 33 is cut off, and the pressure generated in the pressure chamber 33 for discharging the discharge liquid DL from the nozzle 32 It is possible to suppress the passage to the passages 35, 60. Therefore, the discharge efficiency of the discharge liquid DL in the head unit 30N can be enhanced. In addition, if the nozzle 32 is closed by the pressure-deflection-deformed second wall 24, the pressure of the discharge liquid DL supplied to the supply flow path 35 through the supply path 116 by the pressure pump 117 (FIG. 16) Even if the pressure is increased, the leakage of the discharge liquid DL from the nozzle 32 is suppressed. Therefore, by increasing the pressure of the discharge liquid DL in the supply flow channel 35, the filling time of the discharge liquid DL into the pressure chamber 33 after the supply flow channel 35 is opened can be shortened. In addition, according to the liquid injection device 100N of the fourteenth embodiment including the enlargement and displacement mechanism 20C, various effects and effects described in each of the above embodiments can be achieved.

15. Fifteenth Embodiment:
FIG. 19 is a schematic view showing a configuration of a displacement generating device 10P provided with the magnifying displacement mechanism 20P of the fifteenth embodiment. The configuration of the displacement generator 10P of the fifteenth embodiment is the displacement generation of the second embodiment except that the magnification displacement mechanism 20P of the fifteenth embodiment is provided instead of the magnification displacement mechanism 20B of the second embodiment. It is almost the same as the configuration of the device 10B. The configuration of the enlarged displacement mechanism 20P of the fifteenth embodiment is substantially the same as the configuration of the enlarged displacement mechanism 20B of the second embodiment except that the convex structure 65 is provided on the first wall surface 23a of the first wall portion 23. It is.

  In the enlarged displacement mechanism 20P of the fifteenth embodiment, a convex structure 65 is provided on the first wall surface 23a of the first wall portion 23 so as to protrude in the displacement direction of the first wall portion 23. In the fifteenth embodiment, the convex structure 65 has a cylindrical shape extending toward the second wall 24. The shape of the convex structure 65 is not limited to a cylindrical shape. The convex structure 65 may have, for example, a rectangular parallelepiped shape. Also, a plurality of convex structures 65 may be provided on the first wall portion 23.

  In the expansion displacement mechanism 20P, the space volume capable of containing the liquid 22 in the liquid chamber 21 is reduced by the volume of the convex structure 65, and the amount of the liquid 22 filled in the liquid chamber 21 is reduced. . Therefore, the pressure generated by the expansion and contraction of the actuator 41 is suppressed from being absorbed by the compression of the volume of the liquid 22 without being transmitted to the second wall 24. Thus, the driving force of the actuator 41 can be efficiently transmitted to the second wall portion 24. In addition, according to the enlargement and displacement mechanism 20P of the fifteenth embodiment, various effects and effects described in the first embodiment, the second embodiment, and the fifteenth embodiment can be achieved. The convex structure 65 of the fifteenth embodiment may be applied to the enlargement displacement mechanism 20A of the first embodiment, and the enlargement displacement mechanisms 20C to 20N of the third embodiment and the subsequent embodiments.

16. Sixteenth embodiment:
The configuration of the enlargement and displacement mechanism 20Q in the sixteenth embodiment will be described with reference to FIG. FIG. 20 is a schematic view showing a configuration of a displacement generating device 10Q provided with the magnifying displacement mechanism 20Q of the sixteenth embodiment. The configuration of the displacement generator 10Q of the sixteenth embodiment is the displacement generation of the second embodiment except that the magnification displacement mechanism 20Q of the sixteenth embodiment is provided instead of the magnification displacement mechanism 20B of the second embodiment. It is almost the same as the configuration of the device 10B. The enlargement and displacement mechanism 20Q of the sixteenth embodiment is substantially the same as the configuration of the enlargement and displacement mechanism 20B of the second embodiment except that the adjustment unit 70 is provided.

  The enlargement displacement mechanism 20Q of the sixteenth embodiment is provided with an adjustment unit 70 for adjusting the displacement characteristic thereof. The adjusting unit 70 is configured of an adjusting screw 71, a screw hole 72 provided in the housing 11, and a pressing plate 73. The adjustment screw 71 is inserted into a screw hole 72 penetrating to the drive chamber 12. The adjustment screw 71 is attached to the screw hole 72 so that the tip end of the adjustment screw 71 presses the first end 15 a of the actuator 15 via the pressing plate 73 disposed in the drive chamber 12.

  In the enlargement displacement mechanism 20Q, the position of the actuator 15 is moved toward the liquid chamber 21 by rotating the adjustment screw 71 of the adjustment unit 70 and increasing the length of the adjustment screw 71 projecting into the drive chamber 12 be able to. If the position of the actuator 15 is changed by the adjusting screw 71, the displacement amount of the first wall 23 in the direction toward the liquid chamber 21 and the liquid of the second wall 24 in the initial state when the actuator 15 is not extended The amount of displacement in the direction away from the chamber 21 changes. Therefore, in the expansion displacement mechanism 20Q, the displacement amount of the first wall portion 23 and the second wall portion 24 in the initial state can be adjusted by the rotation of the adjustment screw 71 of the adjustment portion 70, whereby the expansion displacement mechanism The displacement characteristics of 20Q can be adjusted. In addition, according to the enlargement and displacement mechanism 20Q of the sixteenth embodiment, various effects and effects described in the first embodiment, the second embodiment, and the sixteenth embodiment can be achieved. The adjusting unit 70 of the sixteenth embodiment may be applied to the magnifying displacement mechanism 20A of the first embodiment, and the magnifying displacement mechanisms 20C to 20N in the third embodiment and each of the subsequent embodiments.

17. Other embodiments:
The various configurations described in the above embodiments can be modified as follows, for example. Any of the other embodiments described below, like the above-described embodiments, can be regarded as an example of a mode for carrying out the invention.

17-1. Other embodiment 1:
In each of the embodiments described above, the actuator 41 may not be configured by a piezo element. The actuator 41 may be configured by, for example, an air cylinder, a solenoid, a magnetostrictive element, or the like.

17-2. Other embodiment 2:
In the above embodiments, the filler 25 dispersed in the liquid 22 may be omitted. In each of the embodiments described above, a stirring mechanism for stirring the liquid 22 may be provided in the liquid chamber 21 in order to suppress the sedimentation of the filler 25.

17-3. Other embodiment 3:
In the liquid jet apparatuses 100E to 100I according to the fifth embodiment, the seventh embodiment, the seventh embodiment, the eighth embodiment, and the ninth embodiment described above, the first wall portion 23E corresponds to the tenth embodiment or the eleventh embodiment. It may be disposed along the direction of gravity as described in the form.

17-4. Other embodiment 4:
In the head portion 30M of the liquid ejecting apparatus 100M of the thirteenth embodiment described above, the fourth embodiment, the fifth embodiment, the sixth embodiment, the seventh embodiment, the eighth embodiment, the ninth embodiment, the seventh embodiment described above The configurations of the enlargement displacement mechanisms 20D to 20L of the tenth embodiment, the eleventh embodiment, and the twelfth embodiment may be applied.

17-5. Other embodiment 5:
In the liquid ejecting apparatuses 10C to 10N according to the third to fourteenth embodiments described above, the heads 30C to 30N may have a configuration in which the plurality of nozzles 32 are arranged. In this case, a plurality of pressure chambers 33 corresponding in number to the number of nozzles 32 and a plurality of enlargement and displacement mechanisms 20C to 20L may be provided in the housing 31. Further, from each nozzle 32, for example, a discharge liquid DL having a different composition, concentration, component, color, etc. may be discharged.

17-6. Other embodiment 6:
In the fourteenth embodiment described above, the discharge flow passage 60 may be omitted.

17-7. Other embodiment 7:
The present invention is not limited to the liquid ejecting apparatus that ejects ink, and can be applied to any liquid ejecting apparatus that ejects liquid other than ink. For example, the present invention is applicable to various liquid ejection devices as described below.
(1) Image recording apparatus such as a facsimile machine.
(2) Color material discharge device used for manufacturing a color filter for an image display device such as a liquid crystal display.
(3) An electrode material discharge device used to form an electrode of an organic EL (Electro Luminescence) display, a surface emission display (Field Emission Display, FED) or the like.
(4) A liquid ejecting apparatus that ejects a liquid containing a bioorganic substance used for manufacturing a biochip.
(5) A sample ejection device as a precision pipette.
(6) Lubricant discharge device.
(7) Dispensing device for resin liquid.
(8) A liquid injection device that discharges lubricating oil at a pinpoint on precision instruments such as watches and cameras.
(9) A liquid ejecting apparatus which ejects a transparent resin liquid such as an ultraviolet curable resin liquid onto a substrate to form a micro hemispherical lens (optical lens) or the like used for an optical communication element or the like.
(10) A liquid ejecting apparatus which ejects an acidic or alkaline etching solution to etch a substrate or the like.
(11) A liquid ejecting apparatus including a liquid ejection head which ejects another arbitrary minute amount of droplets.

  In the present specification, “liquid” may be any material that can be consumed by the liquid ejecting apparatus. For example, the “liquid” may be any material in the liquid phase when the substance is in the liquid phase, and is a liquid material having high or low viscosity, sol, gel water, other inorganic solvents, organic solvents, solutions, Materials in a liquid state such as liquid resin and liquid metal (metal melt) are also included in the “liquid”. Moreover, not only the liquid as one state of the substance, but also those obtained by dissolving, dispersing or mixing particles of functional materials consisting of solid matter such as pigment and metal particles in a solvent are included in the “liquid”. Typical examples of the liquid include ink and liquid crystal. Here, the ink includes general aqueous inks and oil-based inks, and various liquid compositions such as gel inks and hot melt inks. Further, “droplet” refers to the state of liquid discharged from the liquid ejecting apparatus, and includes granular, teardrop-like, and threadlike tails.

17-8. Other embodiment 8:
In the above embodiments, some or all of the functions and processes implemented by software may be implemented by hardware. Also, some or all of the functions and processes implemented by hardware may be implemented by software. As hardware, for example, various circuits such as integrated circuits, discrete circuits, or circuit modules combining those circuits can be used.

  The present invention is not limited to the above-described embodiment (including other embodiments) and examples, and can be realized in various configurations without departing from the scope of the invention. For example, the technical features corresponding to the technical features in the respective forms described in the section of the summary of the invention, the technical features in the examples are for solving some or all of the problems described above or Replacements or combinations can be made as appropriate to achieve part or all of the effects. In addition, the technical characteristics are not limited to those described in the present specification as not being essential, and if the technical characteristics are not described as essential in the present specification, they are appropriately deleted. Is possible.

DESCRIPTION OF SYMBOLS 10A ... displacement generator, 10B ... displacement generator, 10P ... displacement generator, 10Q ... displacement generator, 11 ... housing | casing, 12 ... drive chamber, 13 ... fixing part, 14 ... connection part, 15 ... actuator, 15a ... First end, 15b: second end, 20A: enlargement displacement mechanism, 20B: enlargement displacement mechanism, 20C: enlargement displacement mechanism, 20D: enlargement displacement mechanism, 20E: enlargement displacement mechanism, 20F: enlargement displacement mechanism, 20G ... Enlargement displacement mechanism, 20H: Enlargement displacement mechanism, 20I: Enlargement displacement mechanism, 20J: Enlargement displacement mechanism, 20K: Enlargement displacement mechanism, 20L: Enlargement displacement mechanism, 20P: Enlargement displacement mechanism, 20Q: Enlargement displacement mechanism, 21: Liquid chamber , 22: liquid, 23: first wall, 23E: first wall, 23a: first wall, 23b: second wall, 24: second wall, 24D: second wall, 24G: second wall Department, 24H ... 2 wall portion 24a: first wall surface 24b: second wall surface 25: filler 26a: first elastic member 26b: second elastic member 26bG: second elastic member 26c: third elastic member, 27: 27 Elastic member 28 Elastic member 28s Additional elastic member 29 Support wall portion 30C Head portion 30D Head portion 30E Head portion 30F Head portion 30G Head portion 30H Head portion 30I: head unit, 30J: head unit, 30K: head unit, 30L: head unit, 30M: head unit, 30N: head unit, 31: housing, 32: nozzle, 33: pressure chamber, 35: supply flow passage, 38: intermediate chamber, 39: through hole, 40: drive chamber, 41: actuator, 41a: first end, 41b: second end, 42: fixed portion, 43: connecting portion, 50: piston, 55: piston , 56 ... overhang , 60: discharge flow channel, 65: convex structure, 70: adjustment unit, 71: adjustment screw, 72: screw hole, 73: pressing plate, 100C: liquid ejection device, 100D: liquid ejection device, 100E: liquid ejection device, 100F: liquid ejection device, 100G: liquid ejection device, 100H: liquid ejection device, 100I: liquid ejection device, 100J: liquid ejection device, 100K: liquid ejection device, 100L: liquid ejection device, 100M: liquid ejection device, 100N ... Liquid ejection apparatus 101 control unit 110 supply unit 111 tank 115 pressure adjustment unit 116 supply passage 117 pressure pump 120 circulation unit 121 discharge passage 122 liquid storage unit , 123: negative pressure source, 124: circulation path, D1: first direction, D2: second direction, DL: discharge liquid

Claims (9)

An enlargement displacement mechanism that enlarges the displacement amount of the actuator, and
A liquid chamber in which the liquid is enclosed,
A first wall portion which constitutes a part of the wall surface of the liquid chamber and which is displaced according to the displacement of the actuator to apply pressure to the liquid;
The area of the liquid chamber constituting a part of the wall surface of the liquid chamber and facing the liquid is smaller than the area of the first wall facing the liquid, and the first wall is displaced. When a pressure is applied to the liquid, the pressure of the liquid displaces in a state in which an elastic force acting in a second direction opposite to the first direction is generated in a first direction which is a direction away from the liquid chamber. With 2 walls,
, An expansion displacement mechanism. The enlargement and displacement mechanism according to claim 1, wherein
The second displacement part is constituted by a diaphragm which is deformed so as to generate the elastic force acting in the second direction when being displaced in the first direction by the pressure of the liquid. The enlargement and displacement mechanism according to claim 1, wherein
The second wall portion is supported by an elastic member,
The elastic member is elastically deformed so as to generate an elastic force acting in the second direction when the first wall portion is displaced to apply pressure to the liquid, and the position of the second wall portion is Magnification displacement mechanism to move in the first direction. It is an expansion displacement mechanism according to any one of claims 1 to 3,
An expansion displacement mechanism in which a filler that suppresses change in volume of the liquid when pressure is applied to the liquid is enclosed in the liquid chamber together with the liquid. A liquid injection device,
The expansion displacement mechanism according to any one of claims 1 to 4;
The actuator;
A pressure chamber in communication with the nozzle and containing the discharge liquid discharged from the nozzle;
A flow path connected to the pressure chamber and through which the discharge liquid flows;
Equipped with
The actuator changes the volume of the pressure chamber by displacing the first wall of the expanding and displacing mechanism to displace the second wall so that the discharge liquid is discharged from the nozzle. A liquid jet device for producing pressure in the pressure chamber. The liquid ejecting apparatus according to claim 5,
The wall surface of the second wall portion of the expanding and displacing mechanism opposite to the liquid chamber constitutes a part of the wall surface of the pressure chamber,
When the actuator displaces the first wall, the second wall generates pressure in the pressure chamber to discharge the discharge liquid from the nozzle and closes the flow path. To displace, the liquid injection device. 7. The liquid ejecting apparatus according to claim 5, wherein
The flow path includes a supply flow path for supplying the discharge liquid to the pressure chamber,
The liquid ejecting apparatus further includes a supply unit configured to pressure-feed the discharge liquid to the pressure chamber through the supply flow channel. 8. The liquid ejecting apparatus according to claim 7, wherein
The flow path further includes a discharge flow path for discharging the discharge liquid from the pressure chamber,
The liquid ejecting apparatus includes a circulation unit that circulates the discharge liquid discharged through the discharge flow path to the pressure chamber. A liquid ejecting apparatus according to any one of claims 5 to 8, wherein
A liquid ejecting apparatus comprising: a plurality of the nozzles, a plurality of the pressure chambers, and a plurality of the enlargement and displacement mechanisms.

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