JP2019046752A - Fluid heating device - Google Patents

Abstract

To provide a fluid heating device capable of releasing heated clean fluid and easy to replace a heater.SOLUTION: A fluid heating device 1 includes: a cylindrical shell 2 with one end 200a opened, having a fluid supply port 23 and a fluid discharge port 24; a heater cover 3 having a bottomed cylindrical shape with one end opened, inserted from the bottom side into the opening at one end of the shell 2, and disposed inside the shell 2; and a sheathed heater 4 inserted into the heater cover 3. A flange 33 for sealing the opening of the one end 200a of the shell 2 is formed on the side surface of the heater cover 3. A plurality of annular fins 34 surrounding the side surface may be formed along the axial direction in the heater cover 3.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a fluid heating apparatus that heats a fluid, and more particularly, to a fluid heating apparatus that is suitable for drying a processing target by spraying a heated clean gas onto the processing target in a manufacturing process of a semiconductor, liquid crystal, or the like.

  Conventionally, a fluid heating apparatus for heating a fluid is known. For example, Patent Document 1 discloses a cylindrical shell having a fluid inlet, a fluid outlet, and a heater insertion port, a bottom portion at the front end, and an opening portion at the rear end. A cylindrical heater outer shell inserted inside, a heater wire inserted into the heater outer shell from the opening of the heater outer shell, and insulation that fills the heater outer shell and insulates the heater wire from the heater outer shell And a cylindrical lid that is fitted to the outer periphery of the heater shell and joined by welding or brazing, and joined to the heater insertion port of the shell by welding or brazing to seal the heater insertion port of the shell. A fluid heating device is disclosed. In this fluid heating apparatus, the heat generated from the heater wire moves to the heater outer shell through the insulating material. On the other hand, the fluid supplied to the inside of the shell from the fluid inlet of the shell moves in the axial direction along the surface of the heater outer shell while being heated by heat transfer from the surface (outer peripheral surface) of the heater outer shell. And discharged from the fluid outlet of the shell. Thereby, the fluid heating apparatus can heat and discharge the supplied fluid.

JP, 2016-110740, A

  By the way, a cylindrical heater outer shell (sheath), a heater wire, and an insulating material are a so-called cartridge type sheathed heater (cartridge) of a straight tube type in which a heater wire is sealed together with an insulating material in a cylindrical heater outer shell. It is already on the market as a heater. If a fluid heating device can be manufactured by incorporating commercially available sheathed heater general-purpose products as they are, compared to the case where a fluid heating device is manufactured by separately procuring a heater outer shell, a heater wire, and an insulating material, The manufacturing cost can be reduced and the fluid heating device can be made cheaper. However, when the conventional fluid heating device is manufactured using a general-purpose sheathed heater, the following problems occur.

  That is, it is rare that a general-purpose product of a sheathed heater is strictly managed in each process such as production, transportation, and sales. For this reason, particles (fine dust) may adhere to the surface of the heater outer shell. In the conventional fluid heating apparatus using such a sheathed heater, when the fluid in the shell is heated by heating the sheathed heater, particles may be released from the surface of the heater outer shell and mixed into the fluid. is there. Therefore, it is not suitable for a fluid heating device that blows a heated clean gas onto a processing target and dries the processing target as used in a manufacturing process of a semiconductor, liquid crystal, or the like.

  In addition, in the above conventional fluid heating device, in order to seal the heater insertion port of the shell, the cylindrical lid is fitted to the outer periphery of the heater outer shell and joined by welding or brazing. It is joined to the heater insertion port of the shell by welding or brazing. For this reason, even if the heater wire is disconnected, it is difficult to replace the sheathed heater.

  Further, in the above conventional fluid heating apparatus, the fluid supplied to the fluid inlet provided on the outer periphery of the shell moves in the shell in the axial direction along the surface of the outer shell of the heater and is provided at the bottom of the shell. From the fluid outlet. Therefore, the residence time in the shell of the fluid supplied to the fluid inlet of the shell depends on the length of the shell and the flow velocity of the fluid. There is also a problem that the heat efficiency is low because the heat cannot be heated.

  The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a fluid heating apparatus that can discharge a heated clean fluid and that allows easy heater replacement. Furthermore, the other objective is to improve the thermal efficiency of such a fluid heating apparatus.

  In order to solve the above-mentioned problems, in the present invention, a cylinder having a fluid supply port and a discharge port on the opening side of a bottomed cylindrical heater cover that is closed at one end and opened at the other end, and that is open at one end. Forming a flange that acts as a lid for the shaped shell. Then, the heater cover is inserted into the shell from the closed end side, and the opening of the shell is sealed with the flange of the heater cover. Further, the heater is inserted into the heater cover. Here, the heater is preferably a sheathed heater.

For example, the present invention
A fluid heating device for heating a fluid,
A cylindrical shell having a fluid supply port and a discharge port, with one end opened;
A flange with a bottom that is closed at one end and opened at the other end and that seals the opening of the shell when inserted into the shell from the closed end side is formed on the side surface at the open end side. A heater cover;
A heater inserted into the heater cover.

  Here, a plurality of annular fins surrounding the outer peripheral surface of the heater cover may be formed along the axial direction of the heater cover.

  In the present invention, since the inside of the shell is isolated from the heater by the heater cover, even when a general-purpose sheathed heater product that is not strictly managed as a heater is used, the heater is heated to generate fluid in the shell. When heated, particles released from the heater do not enter the fluid in the shell. In addition, since the opening of the shell is sealed by the flange formed on the outer peripheral surface of the opening end side of the heater cover and the inside of the shell is isolated from the heater, there is no need to seal the opening of the heater cover in which the heater is inserted. . Therefore, according to the present invention, it is possible to provide a fluid heating apparatus that can discharge a heated clean fluid and can easily replace the heater.

  Further, in the present invention, when a plurality of annular fins surrounding the outer peripheral surface of the heater cover are formed along the axial direction of the heater cover, these fins function as a heat radiating plate and the moving distance of the fluid in the shell Increases the residence time. Therefore, the fluid can be sufficiently heated, and the thermal efficiency of the fluid heating device is improved.

1A, 1B, and 1C are a front view, a left side view, and a right side view of a fluid heating apparatus 1 according to the present embodiment, and FIG. It is AA sectional drawing of the fluid heating apparatus 1 shown to FIG. 1 (A). It is a component expanded view of the fluid heating apparatus 1 which concerns on one embodiment of this invention. 3A, 3B, and 3C are a front view, a left side view, and a right side view of the shell 2, and FIG. 3D is a shell shown in FIG. 3A. FIG. 4A, 4B, and 4C are a front view, a left side view, and a right side view of the heater cover 3, and FIG. 4D is shown in FIG. 4A. It is CC sectional drawing of the heater cover 3. FIG. 5A and 5B are a front view and a right side view of the sheathed heater 4, and FIG. 5C is a DD cross-sectional view of the sheathed heater 4 shown in FIG. 5A. is there. FIG. 6A schematically shows a flow until the fluid F supplied to the fluid supply port 23 is discharged from the fluid discharge port 24 in the fluid heating apparatus 1 according to the embodiment of the present invention. FIG. 6B schematically shows a flow until the fluid F supplied to the fluid supply port 23 is discharged from the discharge port 24 in the finless fluid heating apparatus 5 according to the comparative example. FIG. FIG. 7 is a diagram showing a result (graph) of a test for measuring the temperature of the fluid discharged from the discharge port 24 of each of the fluid heating device 1 and the comparative example 5 under the conditions shown in Table 1.

  Hereinafter, an embodiment of the present invention will be described.

  1A, 1B, and 1C are a front view, a left side view, and a right side view of a fluid heating apparatus 1 according to the present embodiment, and FIG. It is AA sectional drawing of the fluid heating apparatus 1 shown to FIG. 1 (A). FIG. 2 is a component development view of the fluid heating apparatus 1 according to the present embodiment.

  As shown in the figure, a fluid heating apparatus 1 according to the present embodiment includes a cylindrical shell 2 constituting a double-structure casing 6, a cylindrical heater cover 3 housed in the shell 2, and a heater cover 3. And a sheathed heater 4 accommodated therein. For example, the sheathed heater 4 is incorporated in the piping line as an in-line heater for heating fluid flowing in the piping line.

  3A, 3B, and 3C are a front view, a left side view, and a right side view of the shell 2, and FIG. 3D is a shell shown in FIG. 3A. FIG.

  The shell 2 is formed of a metal such as stainless steel, and as shown in the figure, a bottomed cylindrical shell body 20 in which one end portion 200a is opened and a heater cover insertion port 21 is formed; A fluid supply port 23 for supplying a fluid to the shell body 20 and a fluid discharge port 24 for discharging the fluid from the shell body 20.

  The fluid supply port 23 is disposed on the one end 200 a side of the side surface 25 of the shell main body 20 so that the fluid flows into the shell main body 20 from the one end 200 a side of the shell main body 20. The fluid discharge port 24 is connected to the other end of the shell main body 20 so that the fluid supplied from the fluid supply port 23 passes through the inside of the shell main body 20 and is discharged to the other end 200b side of the shell main body 20. It arrange | positions at the bottom part 22 by the part 200b side. A joint for connecting to the piping of the piping line may be provided at the tip of the fluid supply port 23 and the fluid discharge port 24, respectively.

  4A, 4B, and 4C are a front view, a left side view, and a right side view of the heater cover 3, and FIG. 4D is shown in FIG. 4A. It is CC sectional drawing of the heater cover 3. FIG.

  The heater cover 3 is made of a metal such as stainless steel, and as shown in the drawing, the overall length (distance from the one end portion 300a to the other end portion 300b) is shorter than the depth of the shell body 20, and the one end portion 300a is open. The bottomed cylindrical heater cover body 30 in which the heater insertion port 31 is formed, the flange 33 formed on the one end portion 300a side of the side surface 35 of the heater cover body 30, and the axial direction of the heater cover body 30 And an annular fin 34 surrounding the side surface 35 of the heater cover main body 30. In the figure, only some fins 34 are denoted by reference numerals.

  A sheathed heater 4 inserted from the heater insertion port 31 is disposed inside the heater cover body 30.

  The flange 33 has an annular shape smaller than the inner diameter of the heater cover insertion port 21 of the shell main body 20, and the heater cover 3 is connected to the shell main body of the shell 2 from the bottom 32 side of the other end portion 300 b of the heater cover main body 30. When it is inserted into the heater cover insertion port 21, it functions as a lid that closes the heater cover insertion port 21 of the shell body 20.

  The fin 34 functions as a heat radiating plate for radiating the heat of the sheathed heater 4 accommodated in the heater cover main body 30 into the shell main body 20 and is supplied into the shell main body 20 from the fluid supply port 23 of the shell 2. It has the function of extending the residence time of the fluid in the shell body 20 by increasing the flow path (movement distance) until the fluid is discharged from the fluid discharge port 24 of the shell 2. Here, the heater cover 3 is inserted into the heater cover insertion port 21 of the shell body 20 of the shell 2 from the bottom 32 side of the other end portion 300 b of the heater cover body 30, and the outer periphery of the flange 33 is formed on the inner periphery of the heater cover insertion port 21. Is in contact with each other, a slight gap t (see FIG. 1) of about 0.25 to 0.5 mm is formed as a flow path between the inner wall 26 of the shell body 20 and the entire outer periphery of the fin 34. As described above, the outer diameter R2 of each fin 34 is set to a value (R2 = R1-2t) smaller than the outer diameter R3 of the flange 33 and the inner diameter R1 of the shell body 20.

  5A and 5B are a front view and a right side view of the sheathed heater 4, and FIG. 5C is a DD cross-sectional view of the sheathed heater 4 shown in FIG. 5A. is there.

  The sheathed heater 4 is a so-called cartridge-type sheathed heater of a straight tube type, and is formed of a metal such as stainless steel, and has a bottom with a heater wire insertion port 41 formed by opening one end portion 400a. A cylindrical sheath 40, a heater wire 43 such as a nichrome wire inserted into the sheath 40 from the heater wire insertion port 41, and the sheath wire 40 filled to insulate the heater wire 43 from the inner peripheral surface 45 of the sheath 40. And an insulating powder 44 such as magnesium oxide. The sheathed heater 4 may be a commercially available general-purpose product in which a heater wire is encapsulated in advance with an insulating powder in a cylindrical sheath.

  Next, a method for manufacturing the fluid heating apparatus 1 having the above configuration will be described.

  First, the shell 2 and the heater cover 3 are cleaned, and impurities attached to the inner and outer peripheral surfaces thereof are removed. The heater cover 3 is inserted into the heater cover insertion port 21 of the shell body 20 of the shell 2 from the bottom 32 side of the other end portion 300b of the heater cover body 30 while maintaining the clean state of both. The flange 33 is positioned at the heater cover insertion port 21 of the shell body 20 of the shell 2. Thereby, the heater cover 3 is accommodated in the shell 2.

  Next, the inner periphery of the heater cover insertion port 21 of the shell body 20 of the outer shell 2 and the outer periphery of the flange 33 of the inner heater cover 3 accommodated in the shell 2 are joined by welding or brazing, and the shell The heater cover insertion port 21 of the shell body 20 is sealed. Thereby, the casing 6 having a double structure of the outer shell 2 and the inner heater cover 3 is assembled.

  Next, an appropriate amount of an adhesive such as heat-resistant cement is introduced into the heater cover main body 30 of the heater cover 3 accommodated in the shell 2 from the heater insertion port 31, and then the sheathed heater 4 is connected to the other end 400b of the sheath 40. The heater cover 3 is inserted into the heater insertion port 31 of the heater cover 3 from the bottom 42 on the side. Thereby, the sheathed heater 4 is accommodated in the heater cover 3 inside the shell 2. Here, in order to be able to replace the sheathed heater 4 in the heater cover 3, the adhesive to be introduced from the heater insertion port 31 of the heater cover main body 30 is set to a type and amount capable of peeling the sheathed heater 4.

  In the fluid heating apparatus 1 having the above configuration, heat generated from the heater wire 43 of the sheathed heater 4 is transmitted to the sheath 40 via the insulating powder 44 and is radiated from the surface (outer peripheral surface) of the sheath 40. The heat generated from the surface of the sheath 40 is transmitted to the heater cover main body 30 of the heater cover 3 and is radiated from the side surface 35 and the fin 34 of the heater cover main body 30 into the shell main body 20 of the shell 2.

  On the other hand, the fluid supplied to the fluid supply port 23 of the shell 2 is heated from the side surface 35 of the heater cover main body 30 of the heater cover 3 and the heat from the fins 34, and from the one end 200 a side of the shell main body 20 of the shell 2. It moves to the other end portion 200b side and is discharged from the fluid discharge port 24 of the shell 2. Thereby, the fluid heating apparatus 1 heats and discharges the supplied fluid.

  The embodiment of the present invention has been described above.

  In the present embodiment, since the fluid flow path inside the shell main body 20 of the shell 2 is isolated from the sheathed heater 4 by the heater cover 3, a commercially available general-purpose product that is not strictly cleaned as the sheathed heater 4. Even when the sheathed heater 4 is heated to heat the fluid in the shell body 20 of the shell 2, particles emitted from the sheathed heater 4 are mixed into the fluid in the shell body 20 of the shell 2. There is no.

  Further, the heater cover insertion port 21 of the shell main body 20 of the shell 2 is closed by the flange 33 formed on the side surface 35 of the heater cover main body 30 of the heater cover 3 on the heater insertion port 31 side. Since the flow path is isolated from the sheathed heater 4, it is not necessary to seal the heater insertion port 31 of the heater cover body 30 of the heater cover 3. For this reason, it is not necessary to cover the heater insertion port 31 into which the sheathed heater 4 is inserted and to join the lid to the heater insertion port 31 by welding or brazing. Can be replaced.

  Therefore, according to this Embodiment, the fluid heating apparatus 1 which can discharge | release the heated clean fluid and can replace | exchange the sheathed heater 4 easily can be provided.

  In the present embodiment, since the so-called cartridge type of the straight tube type is used as the sheathed heater 4, the fluid heating device 1 can be made compact.

  In the present embodiment, the sheathed heater 4 is fixed to the heater cover 3 by using an adhesive (heat-resistant cement or the like) set to a peelable type and amount, so that the sheathed heater 4 is replaced. It can be made easier.

  In the present embodiment, since a plurality of annular fins 34 surrounding the side surface 35 of the heater cover main body 30 of the heater cover 3 are formed along the axial direction of the heater cover main body 30, these fins 34 dissipate heat. While functioning as a plate, the movement distance of the fluid in the shell main body 20 of the shell 2 can be extended. For this reason, the fluid supplied to the shell main body 20 of the shell 2 can be efficiently heated.

  FIG. 6A schematically shows the flow until the fluid F supplied to the fluid supply port 23 of the shell 2 is discharged from the fluid discharge port 24 of the shell 2 in the fluid heating apparatus 1 according to the present embodiment. FIG. 6B schematically illustrates the flow until the fluid F supplied to the fluid supply port 23 is discharged from the discharge port 24 in the finless fluid heating apparatus 5 according to the comparative example. FIG.

  When the fins 34 are omitted from the fluid heating device 1 according to the present embodiment as in the finless fluid heating device 5 according to the comparative example shown in FIG. 6B, the fluid is supplied to the fluid supply port 23 of the shell 2. While the fluid F is heated by heat radiation from the side surface 35 of the heater cover body 30 of the heater cover 3, the fluid F extends along the side surface 35 of the heater cover body 30 from the one end portion 200 a side of the shell body 20 of the shell 2 to the other end portion 200 b. It moves in the axial direction to the side and is discharged from the fluid discharge port 24 of the shell 2.

  On the other hand, in the fluid heating apparatus 1 according to the present embodiment, as shown in FIG. 6A, the fluid F supplied to the fluid supply port 23 of the shell 2 is the side surface 35 of the heater cover body 30 of the heater cover 3. And while being heated by heat radiation from the fins 34, the flow is prevented in the chambers separated by the adjacent fins 34, and the chamber 2 on the shell body 20 of the shell 2 is sequentially moved from the chamber on the one end 200a side to the chamber on the other end 200b side. It moves in the axial direction and is finally discharged from the fluid discharge port 24 of the shell 2. Therefore, as compared with the finless fluid heating apparatus 5 according to the comparative example, the flow path length of the fluid F in the shell body 20 of the shell 2 greatly increases, and more fluid F is present in the side surface 35 of the heater cover body 30. In contact and overheated more efficiently. In addition to heat radiation from the side surface 35 of the heater cover body 30 of the heater cover 3, heat is also radiated from the fins 34. For this reason, compared with the finless fluid heating apparatus 5 which concerns on a comparative example, the fluid F can fully be heated and the thermal efficiency of the fluid heating apparatus 1 improves.

  The inventor conducted a test for measuring the temperature of the fluid F discharged from the fluid discharge port 24 of the shell 2 of each of the fluid heating device 1 and the comparative example finless fluid heating device 5 under the conditions shown in Table 1 below. It was.

  The conditions shown in Table 1 are common to the fluid heating apparatus 1 according to the present embodiment and the finless fluid heating apparatus 5 according to the comparative example, except for the presence or absence of the fins 34.

  FIG. 7 shows the results of a test for measuring the temperature F of the fluid discharged from the discharge ports 24 of the fluid heating device 1 according to this embodiment and the finless fluid heating device 5 according to the comparative example under the conditions shown in Table 1. It is a figure which shows (graph).

  Here, the vertical axis indicates the temperature of the fluid F, and the horizontal axis indicates the elapsed time since the supply of the fluid F to the fluid supply port 23 of the shell 2 is started. Reference numeral 60 is a graph showing the temperature of the fluid F at the fluid discharge port 24 of the shell 2 of the fluid heating apparatus 1 according to this embodiment, and reference numeral 61 is the shell of the finless fluid heating apparatus 5 according to the comparative example. 2 is a graph showing the temperature of fluid F at two fluid discharge ports 24.

  As shown in the figure, the temperature of the fluid F at the fluid discharge port 24 of the shell 2 of the finless fluid heating apparatus 5 according to the comparative example is stabilized at about 96 ° C. (graph 61), but according to the present embodiment. The temperature of the fluid F at the fluid discharge port 24 of the fluid heating device 1 is stable at about 142 ° C. (graph 60), and the fluid heating device 1 according to this embodiment is the finless fluid heating device 5 according to the comparative example. In contrast, the temperature increased by about 48%, and the thermal efficiency was greatly improved.

  In addition, this invention is not limited to said embodiment, Many deformation | transformation are possible within the range of the summary.

  For example, in the above embodiment, a so-called cartridge type of a straight pipe type is used as the heater accommodated in the heater cover 3, but the present invention is not limited to this. A sheathed heater other than the cartridge type may be used. Alternatively, a heater other than a sheathed heater such as a ceramic heater, a carbon heater, or a halogen heater may be used.

  Further, in the above embodiment, the fluid supply port 23 is disposed on the one end 200 a side of the side surface 25 of the shell body 20 of the shell 2, and the discharge port 24 is disposed on the other end 200 b side of the shell body 20 of the shell 2. However, the present invention is not limited to this. For example, the fluid supply port 23 is disposed on the bottom 22 formed on the other end 200 b side of the shell body 20 of the shell 2, and the discharge port 24 is disposed on the one end 200 a side of the side surface 25 of the shell body 20 of the shell 2. You may arrange.

  In the above embodiment, the annular fin 34 is formed on the side surface 35 of the heater cover main body 30 of the heater cover 3, but the present invention is not limited to this. The fins 34 may be formed on the inner wall 26 of the shell body 20 of the shell 2. In this case, a slight gap t of, for example, about 0.25 to 0.5 mm is formed as a flow path between the side surface 35 of the heater cover main body 30 and the fin 34.

  INDUSTRIAL APPLICABILITY The present invention is applicable to various fluid heating devices that heat fluids such as gas and liquid. In particular, in a manufacturing process for semiconductors, liquid crystals, and the like, a heated clean gas is sprayed onto a processing target to be processed. It is suitable for a fluid heating device that dries.

  1: fluid heating device, 2: shell, 3: heater cover, 4: sheathed heater, 6: casing, 20: shell main body, 21: heater cover insertion port, 22: bottom of shell main body 20, 23: fluid supply port, 24: Fluid discharge port, 25: Side surface of the shell body 20, 26: Inner wall of the shell body 20, 30: Heater cover body, 31: Heater insertion port, 32: Bottom part of the heater cover body 30, 33: Flange, 34: Fin 35: Side surface of the heater cover body 30, 40: Sheath, 41: Heater wire insertion port, 42: Bottom portion of the sheath 40, 43: Heater wire, 44: Insulating powder, 45: Inner circumferential surface of the sheath 40, 200a, 200b : End of shell body 20, 300 a, 300 b: end of heater cover body 30, 400 a, 400 b: end of sheath 40

Claims (6)

A fluid heating device for heating a fluid,
A cylindrical shell having a fluid supply port and a discharge port, with one end opened;
A heater cover having a bottomed cylindrical shape with one end closed and the other end opened, and a flange that seals the opening of the shell when inserted into the shell from the closed end side. When,
And a heater inserted into the heater cover. The fluid heating device according to claim 1,
The flange of the heater cover is
The fluid heating apparatus, wherein the fluid heating apparatus is joined to the opening of the shell by welding or brazing. The fluid heating apparatus according to claim 1 or 2,
The heater is
A cylindrical sheath with a bottom closed at one end and opened at the other end;
A heater wire inserted into the sheath;
A fluid heating apparatus comprising: an insulating material that fills the sheath and insulates the heater wire and the inner peripheral surface of the sheath. The fluid heating device according to claim 3,
The heater is
The fluid heating apparatus, wherein the sheath is detachably bonded to an inner peripheral surface of the heater cover with an adhesive. The fluid heating apparatus according to any one of claims 1 to 4,
The heater cover or the shell is
A fluid heating apparatus, further comprising: an annular fin formed between the supply port and the discharge port along the axial direction of the heater cover and surrounding a side surface of the heater cover. A fluid heating apparatus according to any one of claims 1 to 5,
The supply port and the discharge port are
One is formed on the side of the open end of the shell,
The other side is formed in the end surface on the opposite side to the opening end of the said shell. The fluid heating apparatus characterized by the above-mentioned.

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