JP2019045836A - 直接描画露光装置 - Google Patents
直接描画露光装置 Download PDFInfo
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- JP2019045836A JP2019045836A JP2017207280A JP2017207280A JP2019045836A JP 2019045836 A JP2019045836 A JP 2019045836A JP 2017207280 A JP2017207280 A JP 2017207280A JP 2017207280 A JP2017207280 A JP 2017207280A JP 2019045836 A JP2019045836 A JP 2019045836A
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- liquid
- projection lens
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- 238000005286 illumination Methods 0.000 claims abstract description 29
- 239000007788 liquid Substances 0.000 claims abstract description 20
- 239000011521 glass Substances 0.000 claims description 8
- 239000005357 flat glass Substances 0.000 abstract description 4
- 230000005540 biological transmission Effects 0.000 abstract 1
- 239000000758 substrate Substances 0.000 description 16
- 238000001514 detection method Methods 0.000 description 3
- 238000003384 imaging method Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
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Abstract
Description
2 露光照明系
3 露光照明光
4 ミラー
5 DMD
6 制御装置
7 第1の投影レンズ
8 マイクロレンズアレー
9 第2の投影レンズ
10 可変焦点ユニット
Claims (1)
- プリント基板を露光するための照明光を出力する露光光源と、当該露光光源からの照明光が入射される2次元空間変調器と、当該2次元空間変調器の反射光が入射される第1の投影レンズと、当該第1の投影レンズを透過した照明光が入射されるマイクロレンズアレーと、当該マイクロレンズアレーからの照明光が入射される第2の投影レンズとからなる直接描画露光装置において、
互いに平行な面を構成する2つの板状ガラス部材と、前記平行面間に収容された液体であって当該液体の量によって当該液体の厚みが変化するものと、
当該液体の量を変化させる手段とを設け、
前記第2投影レンズからの照明光を前記板状ガラス部材の一方へ入射させ、他方の板状ガラス部材から前記プリント基板に出射させるようにしたことを特徴とする直接描画露光装置。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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JP2017168161 | 2017-09-01 | ||
JP2017168161 | 2017-09-01 |
Publications (1)
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JP2019045836A true JP2019045836A (ja) | 2019-03-22 |
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ID=65814345
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JP2017207280A Pending JP2019045836A (ja) | 2017-09-01 | 2017-10-26 | 直接描画露光装置 |
Country Status (1)
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JP (1) | JP2019045836A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE112020001196T5 (de) | 2019-03-13 | 2021-11-25 | Denso Corporation | Batterieüberwachungsgerät |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5872127A (ja) * | 1981-10-24 | 1983-04-30 | Canon Inc | 光学的焦点位置調整方法 |
US5134468A (en) * | 1989-02-21 | 1992-07-28 | Canon Kabushiki Kaisha | Optical apparatus for varying the lengths of optical path of color component light beams |
JP2004177915A (ja) * | 2002-11-27 | 2004-06-24 | Akira Ishii | 可変焦点光学装置 |
JP2004335692A (ja) * | 2003-05-07 | 2004-11-25 | Fuji Photo Film Co Ltd | 投影露光装置 |
JP2006030791A (ja) * | 2004-07-20 | 2006-02-02 | Fuji Photo Film Co Ltd | 光学装置 |
US20070195424A1 (en) * | 2006-02-22 | 2007-08-23 | Nokia Corporation | Hydraulic optical focusing-stabilizer |
JP2009080324A (ja) * | 2007-09-26 | 2009-04-16 | Hitachi Via Mechanics Ltd | マスクレス露光装置 |
JP2013171241A (ja) * | 2012-02-22 | 2013-09-02 | Nikon Corp | 光学系、レンズ鏡筒、撮像装置、および撮像装置用アダプタ |
-
2017
- 2017-10-26 JP JP2017207280A patent/JP2019045836A/ja active Pending
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5872127A (ja) * | 1981-10-24 | 1983-04-30 | Canon Inc | 光学的焦点位置調整方法 |
US4600275A (en) * | 1981-10-24 | 1986-07-15 | Canon Kabushiki Kaisha | Projection system capable of effecting precise focus adjustment |
US5134468A (en) * | 1989-02-21 | 1992-07-28 | Canon Kabushiki Kaisha | Optical apparatus for varying the lengths of optical path of color component light beams |
JP2004177915A (ja) * | 2002-11-27 | 2004-06-24 | Akira Ishii | 可変焦点光学装置 |
JP2004335692A (ja) * | 2003-05-07 | 2004-11-25 | Fuji Photo Film Co Ltd | 投影露光装置 |
JP2006030791A (ja) * | 2004-07-20 | 2006-02-02 | Fuji Photo Film Co Ltd | 光学装置 |
US20070195424A1 (en) * | 2006-02-22 | 2007-08-23 | Nokia Corporation | Hydraulic optical focusing-stabilizer |
JP2009080324A (ja) * | 2007-09-26 | 2009-04-16 | Hitachi Via Mechanics Ltd | マスクレス露光装置 |
JP2013171241A (ja) * | 2012-02-22 | 2013-09-02 | Nikon Corp | 光学系、レンズ鏡筒、撮像装置、および撮像装置用アダプタ |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE112020001196T5 (de) | 2019-03-13 | 2021-11-25 | Denso Corporation | Batterieüberwachungsgerät |
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