JP2019023732A5 - - Google Patents

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Publication number
JP2019023732A5
JP2019023732A5 JP2018150800A JP2018150800A JP2019023732A5 JP 2019023732 A5 JP2019023732 A5 JP 2019023732A5 JP 2018150800 A JP2018150800 A JP 2018150800A JP 2018150800 A JP2018150800 A JP 2018150800A JP 2019023732 A5 JP2019023732 A5 JP 2019023732A5
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JP
Japan
Prior art keywords
illumination
optical
substrate
pattern
light
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JP2018150800A
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English (en)
Japanese (ja)
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JP6547887B2 (ja
JP2019023732A (ja
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Priority claimed from JP2018150800A external-priority patent/JP6547887B2/ja
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Publication of JP2019023732A5 publication Critical patent/JP2019023732A5/ja
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Publication of JP6547887B2 publication Critical patent/JP6547887B2/ja
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JP2018150800A 2018-08-09 2018-08-09 照明光学系、露光装置およびデバイス製造方法 Expired - Fee Related JP6547887B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2018150800A JP6547887B2 (ja) 2018-08-09 2018-08-09 照明光学系、露光装置およびデバイス製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2018150800A JP6547887B2 (ja) 2018-08-09 2018-08-09 照明光学系、露光装置およびデバイス製造方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2017094910A Division JP6493445B2 (ja) 2017-05-11 2017-05-11 照明光学装置、露光装置および露光方法

Publications (3)

Publication Number Publication Date
JP2019023732A JP2019023732A (ja) 2019-02-14
JP2019023732A5 true JP2019023732A5 (zh) 2019-03-28
JP6547887B2 JP6547887B2 (ja) 2019-07-24

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ID=65368923

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2018150800A Expired - Fee Related JP6547887B2 (ja) 2018-08-09 2018-08-09 照明光学系、露光装置およびデバイス製造方法

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JP (1) JP6547887B2 (zh)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111830616B (zh) * 2019-04-16 2021-11-09 致晶科技（北京）有限公司 利用晶体制成的消色差相位延迟器和制作方法

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