JP2019020326A - Pressure-sensitive sensor, and operation device and operation system having the same - Google Patents

Abstract

To allow detection of intensity and a direction of force which acts by contact with an object by a simple structure, and avoid excessive force acting on a detection element to increase durability.SOLUTION: A pressure-sensitive sensor 100 according to the present invention includes: a pressing member 1, which can move along an X-axis, a Y-axis, and a Z-axis and can also rotate around the X-axis, the Y-axis, and the Z-axis by action of external force; a plurality of detection elements 2a, 2b, 2c, and 2d connected to the pressing member 1, the detection elements generating charges according to an amount of expansion and an amount of twisting; and a base member 4 connected to edges of the detection elements 2a, 2b, 2c, and 2d, the pressing member 1 being supported by the detection elements 2a, 2b, 2c, and 2d.SELECTED DRAWING: Figure 2

Description

  The present invention relates to a pressure-sensitive sensor, and a work device and work system including the pressure sensor.

  In recent years, with the declining birthrate and aging population, the working age population has been decreasing. The decline in the working-age population can be a factor that causes labor shortages, excessive labor, and reduced productivity in the manufacturing industry. Furthermore, the decrease in the working-age population can be a cause of labor shortage, labor in harsh environments, and deterioration of service quality in the service fields such as medical care, welfare, life support, disaster prevention, and maintenance inspection. In order to solve such social issues, it is advocated to use robots (devices that have movement functions similar to the movements and functions of human arms and hands by automatic control and that perform various tasks by programs). Has been. A robot is a mechanical system having three elemental technologies: sensor technology, actuator technology, and control technology. In order to use the robot to solve the above-mentioned social problems, it is essential that the robot can replace complicated, precise and flexible work performed by humans. Therefore, a pressure-sensitive sensor for grasping how to handle an object and a state when the object is handled is particularly important.

  There are various types of pressure-sensitive sensors. As typical pressure-sensitive sensors, a resistance-change-type pressure-sensitive sensor whose resistance value changes when pressed, and a capacitance whose capacitance changes There is a change detection type pressure-sensitive sensor.

  A resistance change detection type pressure-sensitive sensor is configured such that an insulator and a conductive material are almost uniformly dispersed between electrodes. In a state where no pressing force is applied to the pressure sensor, the electrode and the conductive material are not in contact with each other, and a high electric resistance value is shown. On the other hand, when a pressing force is applied to the pressure-sensitive sensor, the electrode and the conductive material begin to come into contact with each other and a conduction path is formed. Depending on the magnitude of the pressing force acting on the pressure sensor, the formed conduction path is three-dimensionally enlarged or reduced, so that the force can be detected by the resistance value. The resistance change detection type pressure-sensitive sensor has a limit in the minimum detection force because the resistance does not change until the conduction path is formed. Also, since the conduction path is formed by the contact of the conductive material, the contact state between the conductive materials changes with time due to wear when a pressing force is repeatedly applied to the pressure sensor, so the relationship between force and resistance value May change from the initial state.

  In the capacitance change type pressure-sensitive sensor, a capacitor having a capacitance C is formed between the electrodes. When a pressing force is applied to the pressure sensor, the distance between the electrodes changes, and the capacitance between the electrodes changes to C + ΔC. Therefore, the force can be detected by measuring this capacitance change. In a capacitance change type pressure sensitive sensor, the sensitivity can be changed by changing the elastic modulus between the electrodes. In addition, detection of capacitance change includes a method of measuring a frequency change by configuring a transmission circuit, a method of detecting using heterodyne detection, and the like. However, it is difficult in principle to reduce the size of the pressure-sensitive sensor of the capacitance change type. As the detection element becomes smaller, the capacitance value also becomes smaller. If the capacitance value is about the same as the error factor (stray capacitance of the sensor wiring or stray capacitance with the external conductor), measurement may become difficult. It is. Therefore, it is difficult to detect with high spatial resolution.

  As a kind of pressure sensor, the diaphragm is formed on the silicon substrate, the rim part that supports the diaphragm is formed, the gauge resistance is formed on the surface of the diaphragm opposite to the rim part, and the diaphragm is in contact with the diaphragm. Some sapphire spheres are bonded to each other and the magnitude of the force is detected by bending deformation of the diaphragm (see Patent Document 1). And a pressure receiving member having a quadrangular pyramid-shaped pressure receiving member, a mounting base having a recess formed corresponding to the shape of the pressure receiving member, and a detection element provided on the inclined surface of the recess facing the pressure receiving member. There is one that detects the magnitude and direction of the force by pressing the detection element (see Patent Document 2 and the like).

Japanese Patent Laid-Open No. 63-196080

JP-A-63-89282

  In Patent Document 1, damage to the diaphragm is avoided by receiving the external force directly at the rim portion without receiving it directly at the diaphragm. However, since the diaphragm and the rim portion are integrally formed of the silicon material, the diaphragm and the rim portion are weak against impact force and may be damaged when the force is applied. In addition, a special apparatus and a joining technique are required for joining by a semiconductor process, which may increase costs.

  In Patent Document 2, the detection element is only required to detect a force in one direction. However, since the detection element is attached to the inclined surface, the force component in the inclined direction is inevitably received. There is a possibility that the detection element is damaged by the force of the direction. In addition, pressure-sensitive conductive rubber is used as the detection element. Generally, pressure-sensitive conductive rubber is formed by dispersing a conductor approximately uniformly in an insulator. Thus, the force is detected by the conductor approaching and contacting to form a conductive path and the resistance value to change. In order for the conductive path to be formed, contact of the conductor is essential, but if a repeated force is applied, the characteristics may change due to wear. Further, since rubber has viscoelasticity, the force and the resistance value have a hysteresis relationship, and the detection value may change depending on the direction of the force. Furthermore, it is difficult to place the detection element with high accuracy facing the pressure receiving member formed in a quadrangular pyramid shape.

  The present invention has been made in view of the above, and an object thereof is to provide a pressure-sensitive sensor that can detect the magnitude and direction of external force with a simple configuration and can improve the durability of a detection element. And

  In order to achieve the above object, the pressure-sensitive sensor 100 according to the present invention can move along the X-axis, Y-axis, and Z-axis by the action of an external force and around the X-axis, Y-axis, and Z-axis. A plurality of detecting elements that are connected to the pressing elements and generate charges corresponding to the amount of expansion and contraction and the amount of twist, and a base member connected to the ends of the plurality of detecting elements. The pressing element is supported by the plurality of detection elements.

  According to the present invention, it is possible to provide a pressure-sensitive sensor that can detect the magnitude and direction of external force with a simple configuration and can improve the durability of the detection element.

It is a top view which shows the pressure sensor which concerns on 1st Embodiment of this invention. It is a perspective view which shows the pressure sensor which concerns on 1st Embodiment of this invention. It is arrow sectional drawing by the arrow III-III line of FIG. It is arrow sectional drawing by the arrow IV-IV line of FIG. It is a block diagram which shows the processing content of the signal processing apparatus which concerns on 1st Embodiment of this invention. It is a figure explaining the 1st connection method of a detection element and a signal extraction part. It is a figure explaining the 2nd connection method of a detection element and a signal extraction part. It is a figure explaining the 3rd connection method of a detection element and a signal extraction part. It is the schematic showing the example of 1 structure of the working device which concerns on 2nd Embodiment of this invention. It is the schematic showing the example of 1 structure of the work system which concerns on 3rd Embodiment of this invention. It is a flowchart which shows the operation | movement procedure of the work system which concerns on 3rd Embodiment of this invention.

<First Embodiment>
(Constitution)
1 is a top view showing a pressure-sensitive sensor according to this embodiment, FIG. 2 is a perspective view showing the pressure-sensitive sensor according to this embodiment, and FIG. 3 is a cross-sectional view taken along line III-III in FIG. 4 is a cross-sectional view taken along arrow IV-IV in FIG.

  As shown in FIGS. 1 to 4, the pressure-sensitive sensor 100 according to this embodiment includes a presser 1, a detection element 2 (2a, 2b, 2c, 2d), a shoulder member 3 (3a, 3b, 3c, 3d), A base member 4, a fixing member 5 (5a, 5b, 5c, 5d) and a cover member 6 are provided.

-Presser The presser 1 is a part to which a force (hereinafter referred to as an external force) received from the object acts when the pressure sensor 100 contacts the object. In the present specification, an object refers to an object that is gripped by a working device on which the pressure-sensitive sensor 100 is mounted. The pressing element 1 is supported by detection elements 2a, 2b, 2c, and 2d. The pressing element 1 includes a pressing surface 17, a cylindrical member 12, shaft members 14a and 15a, and guide shaft members 14b and 15b.

  The pressing surface 17 is a surface facing the object in the pressing element 1. In this embodiment, the pressing surface 17 is formed in a curved surface shape so as to be convex toward the object. In the present embodiment, the pressing surface 17 is formed in a quadrangular shape (a square in FIG. 1) when viewed from the object. In the following description, a straight line extending through the intermediate point of the opposite side (opposite side) of the pressing surface 17 is the X axis, orthogonal to the X axis, and a straight line extending through the intermediate point of the opposite side of the pressing surface 17 is the Y axis, X A straight line perpendicular to the axis and the Y axis and extending in the vertical direction with respect to the tangent plane at the center point of the pressing surface 17 is defined as the Z axis.

  As shown in FIGS. 3 and 4, the cylindrical member 12 is a rod-shaped member that extends in the Z-axis negative direction from the pressing surface 17 toward the base member 4. A diameter D1 of the cylindrical member 12 is smaller than a diameter D2 of a hole 13 (described later) formed in the base member 4 (D1 <D2). That is, the cylindrical member 12 is inserted into the hole 13 so as to have a gap with respect to the inner peripheral surface of the hole 13. Above and below the hole 13, relief portions 11a and 11b formed in a conical shape are provided. The cylindrical member 12 is inserted into the hole 13 so that the upper side is located in the escape portion 11a and the lower side is located in the escape portion 11b. A stopper member 16 is provided at the lower end of the cylindrical member 12 (the end opposite to the Z-axis direction). The diameter D3 of the stop member 16 is larger than the diameter D2 of the hole 13 (D2 <D3). With these configurations, when the pressure sensor 100 comes into contact with the object and an external force acts on the pressing surface 17, the pressing element 1 moves linearly along the X axis, the Y axis, and the Z axis, or the X axis, the Y axis. And rotate around the Z axis.

  The shaft members 14a and 15a are cylindrical members that extend along the Y axis. Both end portions of the shaft members 14a and 15a are connected to the leg portions 18 (see FIG. 2) of the presser 1. The loop members (described later) of the detection elements 2b and 2d are wound around the shaft members 14a and 15a. The shaft members 14a and 15a are arranged on the inner side (the center point side of the pressing surface 17) than the outer edge portion of the pressing surface 17 when viewed from above. The pressing element 1 also includes a shaft member (see FIG. 2) extending along the X axis. The shaft member extending along the X-axis has the same configuration as the shaft members 14a and 15a.

  The guide shaft members 14b and 15b are cylindrical members extending along the Y axis. Both end portions of the guide shaft members 14b and 15b are connected to the leg portions 18 (see FIG. 2) of the presser 1. The guide shaft members 14b and 15b guide the detection elements 2b and 2d toward the shoulder members 3b and 3d. The guide shaft members 14b and 15b are disposed inside the outer edge portion of the pressing surface 17 and below the shaft members 14a and 15a when viewed from above. The presser 1 also includes a guide shaft member (see FIG. 2) extending along the X axis. The guide shaft member extending along the X axis has the same configuration as the guide shaft members 14b and 15b.

Detection element As shown in FIG. 1, the detection elements 2 a to 2 d are pressed so as to extend along the X axis and the Y axis from the press 1 toward the shoulder members 3 a to 3 d when viewed from above. 1 (pressing surface 17) is provided in a cross shape. As shown in FIGS. 3 and 4, in this embodiment, the detection elements 2b and 2d have one end connected to the fixing members 5b and 5d and are wound around the shaft members 14a and 15a of the presser 1, Guided to the shoulder members 3b and 3d by the shaft members 14b and 15b, the other end is provided so as to be connected to the fixing members 5b and 5d. That is, in the present embodiment, the detection elements 2b and 2d are formed by looping one end side toward the other end side and extending from one end portion of the loop portion 24 toward the shoulder members 3b and 3d. A first extending portion 25 that is present and a second extending portion 26 that extends from the other end of the loop portion 24 toward the shoulder members 3b and 3d are provided. In this embodiment, the 1st extension part 25 and the 2nd extension part 26 are formed so that it may be laminated | stacked and overlapped by the guide shaft members 14b and 15b.

  The detection elements 2b and 2d are piezoelectric sheets formed in a strip shape. In the present embodiment, the detection elements 2b and 2d are made of polyvinylidene fluoride (PVDF). In the present embodiment, the case where the detection elements 2b and 2d are formed of PVDF has been described as an example. However, the detection elements 2b and 2d may be replaced with other members having the same function as PVDF. The detection elements 2b and 2d expand and contract when an external force acts on the presser 1 and moves along the X, Y, and Z axes or rotates around the X, Y, and Z axes. A signal (charge signal) related to charges (plus charge and minus charge) generated according to the amount of expansion and contraction and the amount of twist is generated. Electrode pads are provided at the ends of the detection elements 2b and 2d. The electrode pad takes out the charge signal generated by the detection elements 2b and 2d. Although the detection elements 2b and 2d have been described in the present embodiment, the same applies to the detection elements 2a and 2c.

Shoulder members The shoulder members 3b and 3d are members that support the detection elements 2b and 2d. In the present embodiment, the shoulder members 3b and 3d are disposed on the outer edge portion of the base member 4 so as to face each side of the pressing surface 17 when viewed from above (see FIG. 1). In addition, although shoulder member 3b, 3d was demonstrated in this embodiment, shoulder member 3a, 3c is also the same.

Base member The base member 4 is provided below the presser 1 so as to have a gap between the lower end of the leg portion 18 of the presser 1. In this embodiment, the base member 4 is formed in a square shape when viewed from above (see FIG. 1). As described above, the hole 13 is formed in the base member 4. The cylindrical member 12 of the presser 1 is inserted into the hole 13.

Fixing member As shown in FIGS. 3 and 4, the fixing members 5 b and 5 d are provided below the base member 4. The fixing members 5b and 5d are configured so as to be able to take in a signal extraction portion (described later) that is coupled (engaged) with the electrodes of the detection elements 2b and 2d. In the present embodiment, the fixing members 5b and 5d have been described, but the same applies to the fixing members 5a and 5c.

Cover member As shown in FIGS. 1 and 2, the cover member 6 is located above the presser 1 so as to cover part or all of the presser 1, the detection elements 2 a to 2 d, the shoulder members 3 a to 3 d and the base member 4. Is provided. The cover member 6 can be formed of a member having flexibility and at the same time having high toughness and compression resistance. In the present embodiment, the cover member 6 is made of a high-strength polymer material (gel) or silicon rubber.

(Operation)
The operation of the presser 1 will be described.

  As shown in FIG. 3, when an external force F in the direction opposite to the Z-axis direction is applied to the cover member 6, the presser 1 is pushed in the direction opposite to the Z-axis direction by the external force F transmitted through the cover member 6. The cylindrical member 12 of the presser 1 moves in the direction opposite to the Z-axis direction along the central axis of the hole 13.

  As shown in FIG. 4, when an external force F opposite to the Z-axis direction acts on the cover member 6 and an external force G in the X-axis direction acts, the cylindrical member 12 of the presser 1 causes the hole 13 to move in the Z-axis direction. While being moved in the opposite direction, the gap formed between the inner peripheral surface of the hole 13 and the cylindrical member 12 is tilted in the X-axis direction (rotates about the Y-axis) with the hole 13 as a base point. Thus, when the external force in the direction opposite to the Z-axis direction acts on the cover member 6 and the external force in an arbitrary direction on the plane (XY plane) composed of the X-axis and the Y-axis acts, the presser 1 is moved to the Z-axis. While moving in the direction, it tilts in an arbitrary direction (direction in which an external force acts) with the hole 13 as a base point. As described above, the diameter D1 of the cylindrical member 12 is smaller than the diameter D2 of the hole 13, and the hole 13 is formed to extend in the Z-axis direction. It does not tilt in any direction indefinitely, and the tilt angle is not more than the geometrically calculated tilt angle (the angle formed by the central axis of the hole 13 and the central axis of the cylindrical member 12).

  3 and 4, the case where the external force F in the direction opposite to the Z-axis direction is applied to the cover member 6 has been described as an example. In this case, since the pressing element 1 is covered with the cover member 6, it moves together with the cover member 6 in the Z-axis direction. Similarly, when an external force in the Z-axis direction acts on the cover member 6 and an external force in any direction on the XY plane acts, the cover member 6 tilts in any direction with the hole 13 as a base point.

  Next, the operation of the detection elements 2a, 2b, 2c, 2d will be described.

  As shown in FIG. 3, when an external force F in the direction opposite to the Z-axis direction acts on the cover member 6, the presser 1 moves in the direction opposite to the Z-axis direction as described above. At this time, the detection elements 2b and 2d supported by the presser 1 and the shoulder members 3b and 3d expand and contract in the directions indicated by the arrows Lb and Ld. When the detection elements 2b and 2d expand and contract, charges proportional to the expansion and contraction amount are generated on the surfaces of the detection elements 2b and 2d. The detection elements 2b and 2d generate a charge signal proportional to the charge generated on the surface. The magnitude and direction of the external force F can be detected from this charge signal. In the present embodiment, the operation of the detection elements 2b and 2d arranged along the X axis has been described as an example. However, the operation of the detection elements 2a and 2c arranged along the Y axis is also the detection element 2b. , 2d.

  As shown in FIG. 4, when an external force F acting in the direction opposite to the Z-axis direction acts on the cover member 6 and an external force G acting in the X-axis direction, the presser 1 faces in the direction opposite to the Z-axis direction as described above. And tilting in the X-axis direction with the hole 13 as a base point. Therefore, when the detection element 2d is pulled and extended, and the detection element 2b is compressed and contracted, the amount of charge generated on the surfaces of the detection elements 2b and 2d changes. The magnitude and direction of the external force F and external force G can be detected from the change in the charge amount.

  In this embodiment, the case where the external force G in the X-axis direction acts on the cover member 6 has been described as an example. However, the cover member 6 is also extended when an external force in any direction on the XY plane acts. be able to. That is, when an external force in an arbitrary direction on the XY plane acts on the cover member 6, the magnitude of the external force acting on the cover member 6 is detected by detecting a change in the amount of charge generated on the surfaces of the detection elements 2 a to 2 d. The action direction in the XY plane can be detected.

  Next, charge signal processing will be described.

  FIG. 5 is a block diagram showing the processing contents of the signal processing apparatus according to the present embodiment.

  The signal processing device 150 according to the present embodiment is a device that processes a charge signal extracted from the pressure-sensitive sensor 100 (specifically, the detection elements 2a to 2d). As shown in FIG. 5, the signal processing device 150 according to the present embodiment includes a signal extraction unit 20 (20a, 20b, 20c, 20d), a charge amplifier 8, and a signal processing unit 9.

  The signal extraction units 20 a to 20 d connect the detection elements 2 a to 2 d and the charge amplifier 8. The signal extraction units 20 a to 20 d extract the charge signals generated by the detection elements 2 a to 2 d and output them to the charge amplifier 8. A method of connecting the detection elements 2a to 2d and the signal extraction units 20a to 20d will be described later.

  The charge amplifier 8 inputs the charge signals generated by the detection elements 2 a to 2 d from the signal extraction units 20 a to 20 d and outputs them to the signal processing unit 9. In the present embodiment, the charge amplifier 8 includes an amplifier 7 (7a, 7b, 7c, 7d). The amplifiers 7a to 7d are connected to the charge extraction units 20a to 20d. The charge signals generated by the detection elements 2a to 2d are input from the signal extraction units 20a to 20d, and the charge obtained based on the input charge signals is obtained. A signal (amplified signal) proportional to the total amount (current integrated value) is output.

  The signal processing unit 9 is connected to the charge amplifier 8 (specifically, amplifiers 7a to 7d). The signal processing unit 9 receives the amplified signals output from the amplifiers 7a to 7d, and acts on the magnitude and direction of the external force acting along the X axis, Y axis, and Z axis and in any direction on the XY plane. The magnitude and direction of the external force are calculated to generate a signal (external force signal) indicating the magnitude and direction of the external force. The external force signal generated by the signal processing unit 9 is output to, for example, the controller 10 that controls the working device on which the pressure sensor is mounted.

  Next, a method of connecting the detection elements 2a to 2d and the signal extraction units 20a to 20d will be described.

First Connection Method FIG. 6 is a diagram illustrating a first connection method between the detection element and the signal extraction unit. Hereinafter, a case where the detection element 2e and the signal extraction unit 20e are connected will be described as an example.

  As shown in FIG. 6, in the detection element 2e, the end portion of the first extension portion 25 and the end portion of the second extension portion 26 are separated from each other in the thickness direction of the detection element 2e (vertical direction in FIG. 6). It is divided and formed. An electrode pad (first electrode pad) 2e ′ is provided on the upper surface corresponding to the inner surface of the loop portion 24 at the end portion of the first extension portion 25 of the detection element 2e, and the end portion of the second extension portion 26 is provided. Electrode pads (second electrode pads) 2e ″ are provided on the upper and lower surfaces corresponding to the inner and outer surfaces of the loop portion 24 in FIG. Other configurations are the same as those of the detection elements 2a to 2d. In FIG. 6, the second electrode pad 2 e ″ provided on the lower surface corresponding to the inner surface of the loop portion 24 at the end of the second extending portion 26 is not shown.

  As shown in FIG. 6, the signal extraction part 20e is divided and formed so that the end part facing the end part of the detection element 2e is separated in the thickness direction of the signal extraction part 20e. Of the divided end portions of the signal extraction portion 20e, electrode pads (third electrode pads) 20e ′ are provided on the upper surface and the lower surface of the end portion facing the end portion of the first extension portion 25, and the second extension An electrode pad (fourth electrode pad) 20 e ″ is provided on the lower surface of the end facing the end of the existing portion 26. The signal extraction unit 20e may be a hard substrate such as a glass / epoxy resin substrate, or may be a film-like and soft substrate such as an FPC (Flexible Printed Circuits) substrate. Other configurations are the same as those of the signal extraction units 20a to 20d. The upstream side of the signal extraction unit 20e (opposite the divided end) may be connected to a cable, connected to a part of the circuit board, or formed integrally with the circuit board. Also good.

  In this connection method, the first electrode pad 2e ′ of the detection element 2e is inserted by inserting the end portion of the signal extraction portion 20e into the end portions of the first extension portion 25 and the second extension portion 26 of the detection element 2e. And the third electrode pad 20e ′ of the signal extraction unit 20e, the second electrode pad 2e ″ of the detection element 2e and the fourth electrode pad 20e ″ of the signal extraction unit 20e are in contact with each other, and the charge signal generated by the detection element 2e Can be taken out.

  As in this connection method, the end portions of the first extension portion 25 and the second extension portion 26 of the detection element 2e are divided so as to be separated from each other in the thickness direction of the detection element 2e. In addition to providing electrode pads on the upper surface and the upper and lower surfaces of the end portion of the second extending portion 26, the end portion of the signal extraction portion 20e opposite to the end portion of the detection element 2e is divided in the thickness direction of the signal extraction portion 20e. Electrode pads are provided on the upper and lower surfaces of the end facing the end of the first extending portion 25 and the lower surface of the end facing the end of the second extending portion 26, and a signal is sent to the end of the detection element 2e. By sandwiching the end portion of the take-out portion 20e, a circuit can be formed by pressure bonding without performing bonding by a semiconductor process such as soldering. This eliminates the need for a special device or joining technique, thereby suppressing an increase in cost.

Second Connection Method FIG. 7 is a diagram illustrating a second connection method between the detection element and the signal extraction unit. Hereinafter, a case where the detection element 2f and the signal extraction unit 20f are connected will be described as an example.

  As shown in FIG. 7, the detection element 2 f has the second extension so that the end of the first extension 25 and the end of the second extension 26 do not overlap with each other in the extension direction. The end portion of the existing portion 26 is formed so as to be divided in the width direction of the detection element 2f and separated in the thickness direction. An electrode pad (first electrode pad) 2f ′ is provided on the lower surface corresponding to the inner surface of the loop portion 24 at one end portion of the end portions of the second extending portion 26 of the detection element 2f, and the other end portion. An electrode pad (second electrode pad) 2 f ″ is provided on the upper surface corresponding to the outer surface of the loop portion 24. Other configurations are the same as those of the detection elements 2a to 2d.

  As illustrated in FIG. 7, the signal extraction unit 20 f includes an electrode pad (third electrode pad) 20 f ′ on the upper surface of the end facing the end of the detection element 2 f and an electrode pad (fourth electrode pad) 20 f ′ on the lower surface. 'Is provided. Other configurations are the same as those of the signal extraction units 20a to 20d.

  In this connection method, the end of the signal extraction unit 20f is inserted into the end of the second extending portion 26 of the detection element 2f so as to sandwich the first electrode pad 2f ′ of the detection element 2f and the second of the signal extraction unit 20f. The three-electrode pad 20f ′, the second electrode pad 2f ″ of the detection element 2f and the fourth electrode pad 20f ″ of the signal extraction unit 20f come into contact with each other, and the charge signal generated by the detection element 2f can be extracted.

  As in this connection method, the end portions of the first extension portion 25 and the second extension portion 26 of the detection element 2f are shifted in the extension direction so as not to overlap with each other, and the end portions of the second extension portion 26 are overlapped. Are formed so as to be divided in the width direction of the detection element 2f and separated in the thickness direction, and electrode pads are provided on the lower surface of one end portion and the upper surface of the other end portion of the end portions of the second extending portion 26. Each is provided, and electrode pads are respectively provided on the upper surface and the lower surface of the end portion of the signal extraction portion 20f facing the end portion of the detection element 2f, and the signal extraction portion 20f is provided at the end portion of the second extending portion 26 of the detection element 2f. By sandwiching the end of the circuit, a circuit can be formed by pressure bonding without performing bonding by a semiconductor process such as soldering. This eliminates the need for a special device or joining technique, thereby suppressing an increase in cost.

Third Connection Method FIG. 8 is a diagram for explaining a third connection method between the detection element and the signal extraction unit. Hereinafter, a case where the detection element 2g and the signal extraction unit 20g are connected will be described as an example.

  As shown in FIG. 8, the detection element 2g is formed so that the end of the first extending portion 25 and the end of the second extending portion 26 are shifted in the extending direction and do not overlap. An electrode pad (first electrode pad) 2g ′ is provided on the lower surface corresponding to the outer surface of the loop portion 24 at the end portion of the first extension portion 25 of the detection element 2g, and the loop at the end portion of the second extension portion 26 is provided. An electrode pad (second electrode pad) 2 g ″ is provided on the lower surface corresponding to the inner surface of the portion 24. Other configurations are the same as those of the detection elements 2a to 2d.

  As illustrated in FIG. 8, the signal extraction unit 20 g has a first electrode pad of the detection element 2 g when the detection element 2 g and the signal extraction unit 20 g are connected to each other on the upper surface of the end opposite to the end of the detection element 2 g. An electrode pad (third electrode pad) 20g ′ is provided in a portion facing 2g ′, and an electrode pad (fourth electrode pad) 20g ″ is provided in a portion facing the second electrode pad 2g ″. Other configurations are the same as those of the signal extraction units 20a to 20d.

  In this connection method, the first electrode pad 2g ′ of the detection element 2g and the third electrode pad 20g ′ of the signal extraction part 20g are bonded by pressure-bonding the end of the signal extraction part 20g and the end of the detection element 2g. The second electrode pad 2g ″ of the detection element 2g and the fourth electrode pad 20g ″ of the signal extraction unit 20g come into contact with each other, and the charge signal generated by the detection element 2g can be extracted.

  As in this connection method, the end portions of the first extension portion 25 and the second extension portion 26 of the detection element 2g are formed so as not to be shifted and overlap in the extension direction, and the first extension of the detection element 2g. The electrode pads are provided on the lower surfaces of the end portions of the portion 25 and the second extending portion 26, and the detection element 2g and the signal extraction portion 20g among the upper surfaces of the end portions of the signal extraction portion 20g opposite to the end portions of the detection element 2g. When connecting the electrode pads, electrode pads are provided in a portion facing the first electrode pad 2g ′ of the detection element 2g and a portion facing the second electrode pad 2g ″, and the facing electrode pads are brought into contact with each other. Thus, a circuit can be formed by pressure bonding without performing bonding by a semiconductor process such as soldering. This eliminates the need for a special device or joining technique, thereby suppressing an increase in cost.

(effect)
(1) The pressure-sensitive sensor 100 according to the present embodiment is configured so that it can move along the X-axis, Y-axis, and Z-axis and can rotate about the X-axis, Y-axis, and Z-axis by the action of an external force. And a base member 4 connected to end portions of the plurality of detection elements. The plurality of detection elements 2 are used to press the presser 1. Support. Therefore, the pressure 1 is tilted due to the external force acting, and the magnitude and direction of the external force can be grasped by detecting the amount of charge corresponding to the amount of expansion and contraction and the amount of twist generated by the plurality of detection elements 2. it can. Therefore, the magnitude and direction of the external force can be detected with a simple configuration without complicating the structure of the pressure-sensitive sensor 100. In addition, in the pressure-sensitive sensor 100 according to the present embodiment, since the presser 1 is supported by the plurality of detection elements 2, it is possible to avoid the external force from acting directly on the plurality of detection elements 2. Accordingly, the durability of the plurality of detection elements can be improved.

  Further, as described above, the pressure-sensitive sensor 100 according to the present embodiment supports the presser 1 with the plurality of detection elements 2 and has an amount of charge corresponding to the amount of expansion and contraction generated by the plurality of detection elements 2. By detecting, the magnitude and direction of the external force are grasped. Thereby, it can avoid that the external force of a shearing direction acts on the some detection element 2, and is damaged. In addition, it is possible to suppress the occurrence of friction and wear that may affect the sensing characteristics of the plurality of detection elements 2. Furthermore, since the pressing element 1 is supported by the plurality of detection elements 2, the positioning accuracy of the plurality of detection elements 2 can be ensured.

  (2) In the pressure-sensitive sensor 100 according to the present embodiment, the cylindrical member 12 of the presser 1 is inserted into the hole 13 formed in the base member 4 so as to have a gap. Therefore, the tilting amount of the pressing element 1 can be limited while allowing the pressing element 1 to tilt. Thereby, it can avoid that the some detection element 2 expands-contracts or twists excessively, and it can improve the durability of the some detection element 2 by that much.

  (3) The pressure-sensitive sensor 100 according to this embodiment includes a pressing member 1, a plurality of detection elements 2, and a cover member 6 that covers part or all of the base member 4. Therefore, an external force does not act directly on the presser 1 or the detection element 2. Therefore, durability of the presser 1 and the plurality of detection elements 2 can be further improved.

Second Embodiment
(Constitution)
FIG. 9 is a schematic diagram illustrating a configuration example of the working device according to the present embodiment. In FIG. 9, parts that are the same as in the first embodiment are given the same reference numerals, and descriptions thereof are omitted as appropriate.

  The work device 200 is a device that executes gripping, movement, arrangement, and the like of an object. As shown in FIG. 9, the working device 200 according to the present embodiment includes an articulated finger 201, a fixed grip member 103, a first support member 101, a second support member 102, a third support member 105, and a first support member. 4 support members 104 are provided.

  The articulated finger 201 includes a force input connecting member 106, a rotating shaft 107, a rotating shaft 108, a rotating shaft 109, a first contact member 110, a rotating shaft 111, a first force transmission connecting member 112, a rotating shaft 113, a first shaft. 1 constraining connecting member 114, second contact member 115, rotating shaft 116, rotating shaft 117, second force transmission connecting member 118, rotating shaft 119, second restricting connecting member 120, third contact member 121, A rotation shaft 122, a third force transmission connecting member 123, a rotation shaft 124, a fourth contact member 125, and pressure sensitive sensors 100a, 100b, 100c, and 100d are provided. In the present embodiment, a configuration including one articulated finger unit 201 is described as an example, but a configuration in which a plurality of multi-joint finger units are arranged in parallel may be employed.

  The force input connecting member 106 is a member that inputs power applied from a power unit (not shown). A rotating shaft 107, a rotating shaft 108, and a rotating shaft 109 are connected to the force input connecting member 106. The force input connecting member 106 is connected to the power unit via the rotating shaft 108.

  The rotating shaft 107 is a shaft member that connects the force input connecting member 106, the first contact member 110, and the third support member 105.

  The rotating shaft 108 is a shaft member that connects the force input connecting member 106 and the power unit. The power applied from the power unit is input to the force input connecting member 106 via the rotating shaft 108.

  The rotating shaft 109 is a shaft member that connects the force input connecting member 106 and the first force transmission connecting member 112.

  The first contact member 110 is formed so as to extend upward in the vertical direction (the direction away from the force input connecting member 106 in FIG. 9) from the rotating shaft 107 (the connecting portion with the force input connecting member 106). . The rotating shaft 107 is connected to one end of the first contact member 110, and the rotating shaft 111 is connected to the other end (the end opposite to the end to which the rotating shaft 107 is connected). The first contact member 110 is connected to the force input connecting member 106 via the rotating shaft 107. A pressure-sensitive sensor 100a is provided in a portion of the first contact member 110 that faces the fixed gripping member 103.

  The rotation shaft 111 is a shaft member that connects the first contact member 110, the second contact member 115, and the first restraint connection member 114.

  The second contact member 115 is formed to extend upward in the vertical direction from the rotating shaft 111 (the connecting portion with the first contact member 110). The rotary shaft 111 is connected to one end of the second contact member 115, and the rotary shafts 116 and 117 are connected to the other end (the end opposite to the end to which the rotary shaft 111 is connected). A pressure-sensitive sensor 100b is provided in a portion of the second contact member 115 that faces the fixed gripping member 103.

  The rotating shaft 116 is a shaft member that connects the second contact member 115 and the second restraint connecting member 120.

  The rotating shaft 117 is disposed apart from the rotating shaft 116 above the rotating shaft 116 in the second contact member 115 in the vertical direction. The rotation shaft 117 is a shaft member that couples the second contact member 115 and the third contact member 121.

  The third contact member 121 is formed to extend upward in the vertical direction from the rotating shaft 117 (the connecting portion with the second contact member 115). The rotating shaft 117 is connected to one end of the third contact member 121, and the rotating shaft 122 is connected to the other end (the end opposite to the end to which the rotating shaft 117 is connected). A pressure sensitive sensor 100 c is provided in a portion of the third contact member 121 that faces the fixed gripping member 103.

  The rotating shaft 122 is a shaft member that connects the third contact member 121, the fourth contact member 125, and the third restraint connecting member 126.

  The fourth contact member 125 is a rod-like member formed to extend upward in the vertical direction from the rotating shaft 122 (the connecting portion with the third contact member 121). A pressure sensitive sensor 100d is provided in a portion of the fourth contact member 125 that faces the fixed gripping member 103.

  The first force transmission connecting member 112 is formed to extend upward in the vertical direction from the rotating shaft 109 (the connecting portion with the force input connecting member 106). The rotating shaft 109 is connected to one end of the first force transmission connecting member 112, and the rotating shaft 113 is connected to the other end (the end opposite to the end to which the rotating shaft 109 is connected). The first force transmission connecting member 112 is connected to the force input connecting member 106 via the rotation shaft 109.

  The rotating shaft 113 is a shaft member that connects the first force transmission connecting member 112, the first restraint connecting member 114, and the second force transmission connecting member 118.

  The first restraining connecting member 114 is connected to the rotating shaft 111 and the rotating shaft 113. The first restraining connecting member 114 is a member that connects and restrains the first contact member 110 and the first force transmission connecting member 112.

  The second force transmission connecting member 118 is formed to extend upward in the vertical direction from the rotating shaft 113 (the connecting portion between the first force transmitting connecting member 112 and the first restraining connecting member 114). The rotating shaft 113 is connected to one end of the second force transmission connecting member 118, and the rotating shaft 119 is connected to the other end (the end opposite to the end to which the rotating shaft 113 is connected).

  The rotation shaft 119 is a shaft member that connects the second force transmission connecting member 118, the second restraint connecting member 120, and the third force transmission connecting member 123.

  The second restraint connecting member 120 is connected to the rotating shaft 116 and the rotating shaft 119. The second restraint connecting member 120 is a member that connects and restrains the second contact member 115 and the second force transmission connecting member 118.

  The third force transmission connecting member 123 is a rod-like member that extends upward in the vertical direction from the rotating shaft 119 (the connecting portion between the second force transmitting connecting member 118 and the second restraining connecting member 120). It is. The rotating shaft 119 is connected to one end of the third force transmission connecting member 123, and the rotating shaft 124 is connected to the other end (the end opposite to the end to which the rotating shaft 119 is connected).

  The rotating shaft 124 is a shaft member that connects the third force transmission connecting member 123 and the third restraint connecting member 126.

  The third restraining connecting member 126 is connected to the rotating shaft 122 and the rotating shaft 124. The third restraint connecting member 126 is a member that connects and restrains the third contact member 121 and the third force transmission connecting member 123.

  The third support member 105 is provided connected to the rotation shaft 107.

  The fourth support member 104 is provided in connection with the third support member 105.

  The second support member 102 is fixed to the fourth support member 104. A fixed grip member 103 is attached to the second support member 102.

  The first support member 101 is provided so as to extend downward in the vertical direction from the lower surface of the second support member 102.

  The fixed grip member 103 is fixed to the second support member 102. The fixed grip member 103 is provided to extend upward in the vertical direction from the upper surface of the second support member 102 so as to face the multi-joint finger unit 201.

  The rotation shafts 107, 109, 111, 113, 116, 117, 119, 122 and 124 are provided with a rotation control device (not shown). The rotation control device inputs a command from the host device so that members sharing the rotation axis are fixed or rotated around the rotation axis, and the rotation shafts 107, 109, 111, 113, 116, 117, 119, The operations of 122 and 124 are controlled.

(Operation)
When power from the power section is applied to the rotation shaft 108 of the force input connecting member 106, the force input connecting member 106 rotates counterclockwise (counterclockwise in FIG. 9) about the rotation shaft 107. . At this time, the rotation control device (not shown) rotates the first contact member 110 around the rotation axis 107, rotates the second contact member 115 around the rotation axis 111, and the third contact. The rotational movement of the member 121 around the rotation shaft 117 is suppressed. When the force input connecting member 106 rotates around the rotating shaft 107, the first force transmission connecting member 112 connected to the rotating shaft 109 rotates counterclockwise. When the first force transmission coupling member 112 rotates counterclockwise, the first restraint coupling member 114 and the second force transmission coupling member 118 coupled to the first force transmission coupling member 112 via the rotation shaft 113. Also rotate counterclockwise. When the second force transmission connecting member 118 rotates counterclockwise, the third force transmission connecting member 123 connected to the second force transmission connecting member 118 via the rotation shaft 119 rotates counterclockwise. . When the third force transmission connecting member 123 rotates and rotates counterclockwise, the rotating shaft 124 rotates counterclockwise around the rotating shaft 122. In this way, power from the power unit acts on the rotating shaft 108 of the force input connecting member 106 to rotate and move the force input connecting member 106, and a rotation control device (not shown) performs a predetermined operation. The fourth contact member 125 is rotated counterclockwise around the rotation shaft 122, and the pressure-sensitive sensor 110d is brought into contact with the object, thereby performing operations such as gripping the object.

  In the present embodiment, the rotation control device causes the rotational movement of the first contact member 110 about the rotational shaft 107, the rotational movement of the second contact member 115 about the rotational shaft 111, and the third contact member. Although the description has been given by taking as an example the case where the rotational movement around the rotation axis 117 of 121 is suppressed and the fourth contact member 125 is rotated counterclockwise around the rotation axis 122 as an example, The rotation movement of the contact member 110 around the rotation axis 107, the rotation movement of the second contact member 115 around the rotation axis 111, or the rotation movement of the third contact member 121 around the rotation axis 117, respectively. By making it possible, the first contact member 110, the second contact member 115, or the third contact member 121 can be rotated counterclockwise around the rotation shaft 122, respectively.

(effect)
In the present embodiment, in addition to the same effects as those of the first embodiment, the following effects can be obtained.

  By applying the pressure-sensitive sensor 100 to the work apparatus 200 as in the present embodiment, the object 518 can be gripped, moved, arranged, and the like more reliably using the work apparatus 200.

<Third Embodiment>
(Constitution)
FIG. 10 is a schematic diagram illustrating a configuration example of a work system according to the present embodiment. In FIG. 10, parts that are the same as in the second embodiment are given the same reference numerals, and descriptions thereof are omitted as appropriate.

  As illustrated in FIG. 10, the work system 500 according to the present embodiment includes a control unit 510, a work unit 540, and an imaging device 530.

  The working unit 540 is a part that executes gripping, movement, arrangement, and the like of the object 518. The working unit 540 includes an arm unit 520 and a working device 200.

  The arm unit 520 is a member that supports the work device 200. By driving the arm unit 520, the work device 200 can be disposed in the vicinity of the object 518.

  The imaging device 530 is a device that images (observes) the object 518, the arm unit 520, and the like. The imaging device 530 is, for example, a video camera that uses a charge coupled devices (CCD) or a complementary metal oxide semiconductor (CMOS) as an imaging element. In the present embodiment, a configuration including one imaging device 530 is described as an example. However, two or more imaging devices 530 may be provided so as to perform stereo viewing.

  The control unit 510 includes an image processing unit 513, a detection unit 514, a power control unit 516, a rotation control unit 515, an arm control unit 512, and a central control unit 511.

  The image processing unit 513 is electrically connected to the imaging device 530. The image processing unit 513 inputs and processes the imaging information acquired by the imaging device 530. In the present embodiment, the imaging information includes information for recognizing the shape of the object 518, information for grasping the position of the work device 200 with respect to the object 518, and the like.

  The detection unit 514 is electrically connected to the pressure-sensitive sensor 100 (see FIG. 9) mounted on the work apparatus 200. The detection unit 514 inputs and processes sensor information acquired by the pressure sensor 100. In the present embodiment, the sensor information includes information regarding the magnitude and direction of external force acting on the pressure sensor 100.

  The rotation control unit 515 is electrically connected to the rotation shafts 107, 109, 111, 113, 116, 117, 119, 122, and 124 (see FIG. 9) of the work device 200. The rotation control unit 515 controls the rotation shafts 107, 109, 111, 113, 116, 117, 119, 122, and 124 so that the working device 200 has a desired shape (for example, a shape that can grip the object 518). It is something to control.

  The power control unit 516 is electrically connected to a power unit 517 that applies power to the work device 200. The power control unit 516 controls the power unit 517 to apply power to the force input connecting member 106 (see FIG. 9) of the work device 200.

  The arm control unit 512 is electrically connected to the arm unit 520. The arm control unit 512 controls the operation of the arm unit 520 to move the work device 200 closer to the object 518 or away from the object 518.

  The central control unit 511 is electrically connected to the arm control unit 512, the image processing unit 513, the detection unit 514, the rotation control unit 515, and the power control unit 516. The central control unit 511 inputs the imaging information acquired by the imaging device 530 to recognize the shape or the like of the object 518, or inputs the sensor information acquired by the detection unit 514 to hold the object 518 or the like. , Based on the imaging information and sensor information, formulate an operation plan for the working unit 540, and output command signals to the arm control unit 512, the rotation control unit 515, and the power control unit 516 based on the formulated operation plan Then, the working unit 540 and the power unit 517 are driven.

(Operation)
FIG. 11 is a flowchart showing an operation procedure of the work system according to the present embodiment. In the present embodiment, a series of operation procedures for grasping, moving, and arranging the object 518 will be described as an example.

  When the central control unit 511 receives a signal requesting handling of the object 518, the central control unit 511 acquires imaging information from the image processing unit 513 (step S1), and recognizes the shape of the object 518 based on the acquired imaging information (step S1). S2).

  Subsequently, the central control unit 511, among a plurality of known shape data (known shape data) accumulated in the database, shape data (matching shape data) that matches the shape data (recognized shape data) recognized in step S2. ) Exists (step S3). When the central control unit 511 determines that the matching shape data exists (Yes), the central control unit 511 quotes a known operation plan corresponding to the matching shape data (step S5). On the other hand, when the central control unit 511 determines that the matching shape data does not exist (No), the central control unit 511 newly creates the shape information of the target portion based on the recognized shape data, and is similar to the recognized shape data from the known shape data. The shape data (similar shape data) to be searched is retrieved and an operation plan corresponding to the similar shape data is cited (step S5).

  Subsequently, the central control unit 511 starts gripping work of the object 518. The central control unit 511 outputs a command signal to the arm control unit 512, the rotation control unit 515, and the power control unit 516 based on the cited operation plan, and drives the working unit 540 and the power unit 517 (step S6).

  Subsequently, the central control unit 511 monitors the working state of the working device 200 while driving the working unit 540 and the power unit 517, and determines whether the working device 200 has gripped the object 518 (that is, the target device 518). Whether or not the gripping operation of the object 518 is completed. Specifically, in the present embodiment, the central control unit 511 acquires the output value P of the pressure sensor 100 mounted on the work device 200 from the detection unit 514, and the acquired output value P of the pressure sensor 100 is a predetermined value. It is determined whether or not the set value T is greater than or equal to (step S7). When the output value P of the pressure sensor 100 is equal to or greater than the set value T, the central control unit 511 determines that the work device 200 has gripped the object 518 (that is, the gripping operation of the object 518 has been completed) ( Yes), the procedure is moved to step S8. On the other hand, when the output value P of the pressure sensor 100 is less than the set value T, the central control unit 511 does not grip the target object 518 (that is, the gripping operation of the target object 518 has been completed). And the procedure returns to step S6.

  Subsequently, the central control unit 511 starts moving the object 518. The central control unit 511 outputs a command signal to the arm control unit 512, the rotation control unit 515, and the power control unit 516 based on the cited operation plan, and drives the working unit 540 and the power unit 517 (step S8).

  Subsequently, the central control unit 511 monitors the working state of the working device 200 while driving the working unit 540 and the power unit 517, and determines whether or not the object 518 is dropped from the working device 200 ( That is, it is determined whether or not the moving operation of the object 518 can be maintained. Specifically, in the present embodiment, the central control unit 511 acquires the output value P of the pressure sensor 100 mounted on the work device 200 from the detection unit 514, and the acquired output value P of the pressure sensor 100 is a predetermined value. It is determined whether or not it is within the range of set values U1, U2 (U1 <U2) (step S9). The central control unit 511 moves the object 518 when the output value P of the pressure-sensitive sensor 100 is within the range of the set values U1 and U2, that is, when the output value P is U1 or more and U2 or less (Yes). Is determined to be maintained, and the procedure proceeds to step S10. On the other hand, when the output value P of the pressure-sensitive sensor 100 is not within the range of the set values U1 and U2, that is, when the output value P is less than U1 or greater than U2 (No), the central control unit 511 It is determined that the moving work cannot be maintained, and the procedure returns to step S6 to grip the object 518 again.

  Subsequently, the central control unit 511 starts an arrangement operation of the object 518. The central control unit 511 outputs a command signal to the arm control unit 512, the rotation control unit 515, and the power control unit 516 based on the cited operation plan, and drives the working unit 540 and the power unit 517 (step S10).

  Subsequently, the central control unit 511 acquires the output value P of the pressure sensor 100 mounted on the work device 200 from the detection unit 514, and the acquired output value P of the pressure sensor 100 is equal to or less than a predetermined set value V. Whether or not (step S11). When the output value P of the pressure sensor 100 is equal to or less than the set value V (Yes), the central control unit 511 determines that the object 518 has been placed (that is, the placement work of the object 518 has been completed), and the step Move the procedure to S12. On the other hand, when the output value P of the pressure-sensitive sensor 100 is larger than the set value V, the central control unit 511 determines that the object 518 is not arranged (that is, the arrangement work of the object 518 is not completed). Return the procedure to step S10.

  Subsequently, when the work by the work unit 540 is completed, the central control unit 511 registers the operation procedure of the work unit 540 in the database as an operation plan (step S12) and uses it for the next and subsequent work operations. Then, the central control unit 511 ends the procedure.

  In the present embodiment, a series of operation procedures in which the object 518 is grasped, moved, and arranged by the working unit 540 is described as an example. However, for example, the work of grasping the object 518 by the working unit 540 However, if it is necessary only, the procedure (steps S8 to S11) of moving and placing the object 518 by the working unit 540 can be omitted. Although details are omitted, environmental information of a predetermined place is obtained by observing with the imaging device 530, an operation plan is formulated based on the obtained environmental information, the working unit 540 is driven, and the imaging device 530 The working state may be canceled when it is determined that the object 518 is disposed at a predetermined position while monitoring the position information of the object 518.

(effect)
In the present embodiment, the following effects are obtained in addition to the same effects as those of the above-described embodiments.

  As in the present embodiment, by applying the working device 200 equipped with the pressure-sensitive sensor 100 to the working system 500, the object 518 can be reliably gripped using the working system 500.

<Others>
The present invention is not limited to the above-described embodiments, and includes various modifications. For example, each of the above-described embodiments has been described in detail for easy understanding of the present invention, and is not necessarily limited to one having all the configurations described. For example, a part of the configuration of each embodiment can be deleted.

  In each of the above-described embodiments, the configuration in which the detection element 2 extends from the presser 1 to the shoulder member 3 has been described as an example. However, the essential effect of the present invention is that it is possible to detect the magnitude and direction of the force acting by contact with the object with a simple configuration, and avoid the excessive force acting on the detection element and durability. The pressure-sensitive sensor can be improved, and the configuration is not necessarily limited to the above as long as this essential effect is obtained. For example, it is good also as a structure which extended and provided the detection element 2 on the shoulder member 3 which opposes on both sides of the presser 1 so that it may not overlap. Even in this case, the same effects as those of the above-described embodiments can be obtained.

1 Presser 2a, 2b, 2c, 2d Detection element 4 Base member

Claims (11)

A presser that is movable along the X-axis, Y-axis, and Z-axis and capable of rotating around the X-axis, the Y-axis, and the Z-axis by the action of an external force;
A plurality of detection elements that are connected to the pressing element and generate charges according to the amount of expansion and contraction and the amount of twist;
A base member connected to ends of the plurality of detection elements,
The pressure sensor is supported by the plurality of detection elements. The pressure-sensitive sensor according to claim 1,
A pressure-sensitive sensor comprising a cover member that covers the pressing element, the plurality of detection elements, and a part or all of the base member. The pressure-sensitive sensor according to claim 1,
The pressing element includes a cylindrical member extending toward the base member,
The pressure sensor according to claim 1, wherein the cylindrical member is inserted with a gap in a hole formed in the base member. The pressure-sensitive sensor according to claim 1,
The pressure sensor is characterized in that the detection element is a resin having piezoelectricity and is formed in a thin strip shape. The pressure-sensitive sensor according to claim 4,
The detection element includes a loop portion formed by folding one end side toward the other end side, a first extension portion extending from one end portion of the loop portion toward the base member, and the loop portion. A second extending portion extending toward the base member from the other end, and the first extending portion and the second extending portion are formed so as to overlap each other. Pressure sensitive sensor. The pressure-sensitive sensor according to claim 5,
The pressing element includes a shaft member around which the loop portion is wound, and a guide shaft member that guides the first extending portion and the second extending portion from the loop portion to the base member side. A pressure-sensitive sensor. The pressure-sensitive sensor according to claim 5,
The detection element is formed such that an end portion of the first extension portion and an end portion of the second extension portion are separated from each other in the thickness direction of the detection element,
A first electrode pad is provided on a surface corresponding to an inner surface of the loop portion at an end portion of the first extending portion, and corresponds to an inner surface and an outer surface of the loop portion at an end portion of the second extending portion. A pressure-sensitive sensor, wherein a second electrode pad is provided on the surface to be operated. The pressure-sensitive sensor according to claim 5,
The detection element has an end portion of the first extension portion and an end portion of the second extension portion so that the end portion of the second extension portion does not overlap with each other in the extension direction. It is formed so as to be divided in the width direction of the detection element and separated in the thickness direction,
A first electrode pad is provided on a surface corresponding to the inner surface of the loop portion at one end portion of the end portions of the first extension portion, and corresponds to an outer surface of the loop portion at the other end portion. A pressure-sensitive sensor, wherein a second electrode pad is provided on the surface. The pressure-sensitive sensor according to claim 5,
The detection element is formed such that an end portion of the first extending portion and an end portion of the second extending portion are not shifted and overlapped in the extending direction;
A first electrode pad is provided on a surface corresponding to an outer surface of the loop portion at an end portion of the first extension portion, and a surface corresponding to an inner surface of the loop portion at an end portion of the second extension portion. A pressure sensor provided with a second electrode pad. Articulated fingers,
A fixed gripping member disposed so as to face the multi-joint fingers,
The articulated fingers are
A force input connecting member connected to the power unit and inputting a force from the power unit;
A force transmission connecting member that is connected to the force input connecting member and transmits a force input to the force input connecting member;
A contact member connected to the force input coupling member and contacting the work object;
A restraint connection member that connects the force transmission connection member and the contact member;
A plurality of rotating shafts that interconnect the force transmission connecting member, the contact member and the restraint connecting member;
The working device, wherein the pressure sensitive sensor according to claim 1 is mounted on the contact member. The working device according to claim 10 and an arm portion that supports the working device,
A control unit for controlling the arm unit;
An operation system comprising: an imaging device that images the arm unit.

Images