JP2019012484A - Conversion system, interface device, and conversion control program - Google Patents

Abstract

To realize trajectory operation by converting detection data about a position and so on, output from a position recognition sensor or the like, into drive data for a driving unit.SOLUTION: A conversion system comprises: a driving device that has an X driving unit for moving an object in an X direction and a Y driving unit that moves the object in a Y direction; a position recognition sensor that detects the position of a target in the object as X detection data and Y detection data; and a table formation unit provided in the driving device and that forms, for example, an X conversion table that converts the X detection data and the Y detection data into X drive data and a Y conversion table that converts target X detection data and Y detection data into Y drive data. The X driving unit is driven using the X drive data into which the target X detection data is converted on the basis of the X conversion table, and the Y driving unit is driven using Y drive data into which the target Y detection data is converted on the basis of the Y conversion table.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a conversion system, an interface device, and a conversion control program.

Conventionally, a quality monitoring system in plant operation is known (see Patent Document 1).
This quality monitoring system includes a plurality of analyzer means for measuring input / output properties of a plurality of production processes in plant operation online, a remote centralized management means for collecting measurement data of these analyzers and operation data of the production processes, And the analyzer is monitored and calibrated by the remote centralized management means.

JP 2002-91552 A

However, in the quality monitoring system described in Patent Document 1, the remote centralized management means belongs to the “manufacturer management area”, and although it depends on a fixed period or on-demand request from the customer side, the “manufacturer side Since the service by the remote centralized management means is carried out for a fee, monitoring and calibration cannot be performed only on the customer side (user side), the time to wait for the service from the manufacturer side, and the paid portion of the service, There is an extra problem.
The quality monitoring system of Patent Document 1 is most clearly understood by the user who normally uses it, but it is the “manufacturer” who has the authority to monitor and calibrate the service. As a result, an optimal quality monitoring system cannot be constructed.

  In view of these points, the present invention provides a conversion table itself based on the difference between detection data and drive data, or by creating this conversion table in a table creation unit provided in the drive device. It is also possible to provide a conversion system, an interface device, and a conversion control program that can simultaneously realize “monitoring / calibration”, “reduction of service waiting time / cost”, and “construction of optimum system”.

A conversion system according to a first aspect of the present invention includes a drive device having a drive unit that moves an object using drive data, and a position recognition sensor that detects the position of the target of the object as detection data. The conversion system also includes a table creation unit that creates a conversion table for converting the detection data into drive data based on a difference between the drive data and the detection data, and when target detection data is input The driving unit is driven using the driving data converted based on the conversion table, and the table creating unit is provided in the driving device.
Note that “the table creation unit is provided in the drive device” means that the table creation unit is not only physically attached to the drive device, but also can be monitored and calibrated only by the user. It also includes that the drive device and the sensor and the table creation unit are connected regardless of wired or wireless so that drive data and detection data can be exchanged.

  The interface device according to the first aspect of the present invention is based on a difference between detection data output from a sensor that detects a state of the drive device and drive data that drives a drive unit provided in the drive device. A conversion table for converting detection data into drive data is created.

  The conversion control program according to the first aspect of the present invention is based on a difference between detection data output from a sensor that detects a state of the drive device and drive data that drives a drive unit provided in the drive device. A conversion table for converting the detection data into drive data is created by a table creation unit provided in the drive device, and the drive data converted from the detection data using the conversion table is used to drive the drive device. Drive part.

  According to the conversion system, the interface device, and the conversion control program according to the present invention, the conversion table based on the difference between the detection data and the drive data, the creation of the conversion table in the table creation unit provided in the drive device, etc. "Monitoring and calibration only by the user", "Reduction of service waiting time and cost" and "Building an optimal system" can be realized at the same time.

The conversion system according to the first embodiment is an example of acquiring map data for creating a conversion table for a drive device having an X drive unit and a Y drive unit and a position recognition sensor (vision sensor, etc.). a) shows an outline of the positional relationship among the vision sensor, the X drive unit, the Y drive unit, and the stage, and (b) shows an example of acquiring map data. 1 is a schematic diagram of a conversion system according to a first embodiment. It is the schematic diagram which represented the map data used at the time of conversion table creation with the three-dimensional graph, (a) is the drive data corresponding to the X detection data and the Y detection data at the time of map data acquisition represented with the three-dimensional graph; The maximum value and the minimum value of the X detection data and the Y detection data are shown, and (b) shows the maximum value of the X detection data and the Y detection data when the map data is acquired in the conversion table using the map data. It shows the transition of drive data when the X detection data and the Y detection data that are the target values that have been exceeded are given. It is a schematic diagram which shows one example (3-point mapping) of the mapping in a conversion system. It is a schematic diagram which shows another example (grid mapping) of the mapping in a conversion system. FIG. 6 shows still another example of mapping in the conversion system (three-point mapping + grid mapping), (a) is a schematic diagram showing three-point mapping + grid mapping, and (b) shows map data used when creating a conversion table. It is the schematic diagram represented by the three-dimensional graph. It is a schematic diagram which shows the example of the mapping in a conversion system. It is a schematic diagram which shows the interface apparatus (table preparation part) which concerns on this invention, (a) shows the creation screen of a conversion system, (b) shows the operation confirmation screen of a conversion system. It is a flowchart which shows the conversion control program which concerns on this invention. It is a schematic diagram of the conversion system which concerns on 2nd Embodiment, (a) is X detection data, Y detection data, and the temperature data of X drive part to X interpolation conversion table, X detection data, Y detection data, and Y drive part (B) shows X detection data, Y detection data, and X velocity data in the X interpolation conversion table, and X detection data, Y detection data, and Y velocity data. Shows a conversion system when Y is given to the Y interpolation conversion table. Example of obtaining map data for creating a conversion table for a drive device having an X drive unit, a Y drive unit, and a θ drive unit and a position recognition sensor (vision sensor, etc.) in the conversion system according to the third embodiment. (A) shows an outline of the positional relationship between the vision sensor, the X drive unit, the Y drive unit, the θ drive unit, and the stage, and (b) and (c) are maps acquired when the stage is rotated by the θ drive unit. An example of data acquisition is shown. It is a schematic diagram of the conversion system which concerns on 3rd Embodiment. It is a schematic diagram of the data acquired with the conversion system (coating apparatus) and CADCAM etc. which concern on 4th Embodiment, (a) shows the outline | summary about a coating device and a workpiece | work, (b) shows the data acquired with CADCAD etc. Show. It is a schematic diagram of the conversion system which concerns on 4th Embodiment. Example of acquisition of map data for creating a conversion table for a drive device having an X drive unit and a Y drive unit and a position recognition sensor (a vision sensor for imaging a V plane) in the conversion system according to the fifth embodiment. (A) shows the positional relationship among the V plane, the X drive unit, the Y drive unit, and the stage, (b) shows the concept of map data acquired during the operation of each drive unit, and (c) shows the acquisition. An example of the map data is shown. It is a schematic diagram of the conversion system which concerns on 5th Embodiment. The first and fifth embodiments are operated under the test conditions and the test conditions, respectively, and the detection data results after reaching the target positions of the X drive unit and the Y drive unit are shown. The positional relationship between the V plane and the S plane is shown, and (b) shows the ideal target position and the detection data results of the X drive unit and the Y drive unit after reaching the target position in each of the first and fifth embodiments. Indicates. It is a schematic diagram of the conversion system which concerns on 6th Embodiment, (a) shows the condition (mechanical play) of a drive device, (b) shows a feedback loop. In the conversion system which concerns on 6th Embodiment, the example of the acquired map data is shown. 20 is a graph of the map data in FIG. It is a schematic diagram of the conversion system which concerns on other embodiment.

The conversion system 1 according to the present invention connects a position recognition sensor (sensor) S such as a vision sensor and a table creation unit 3 and also includes a driving device K including a driving unit (X driving unit and Y driving unit) K ′ The table creation unit 3 is connected. The table creation unit 3 has speed data for determining the moving speed of the drive unit K ′, drive data D2 for determining the position of the drive unit K ′, and the like, and is driven by adjusting the speed and position of the drive unit K ′. In addition, the detection data D1 obtained from the sensor S such as a position recognition sensor is converted into drive data D2 of the X drive unit and the Y drive unit and output.
The “conversion system 1” in the present invention includes, as described above, one that adjusts and drives the position of the drive unit K ′ of the drive device K, and uses the drive unit K ′ to make a substrate of an electronic device. Mounting electronic components (the drive device is a substrate mounting device (substrate mounting robot)), transporting the wafer (the drive device is a wafer transfer device (wafer transfer robot)), and applying (The driving device may be a coating device (coating robot)).

The “table creation unit 3” in the present invention includes, as described above, speed data for determining the moving speed of the drive unit K ′, drive data D2 for determining the position of the drive unit K ′, and the like. In addition to adjusting and driving (moving) the speed and position of the part K ′, the detection data D1 obtained from the sensor S such as the position recognition sensor is converted into drive data D2 of the X drive part K ′ and the Y drive part K ′. And outputs the X drive data D2 of the X drive unit K ′ and the Y drive data D2 of the Y drive unit K ′ at each predetermined number of points as map drive data D2, and a sensor such as a position recognition sensor X detection data D1 and Y of the target at the target T at each point a after the X drive unit K ′ and the Y drive unit K ′ are driven based on the map detection data D1 detected by S Detection data D1 for map detection Data D1, and the target T is moved to target X detection data D1 and Y detection data D1 based on a number of map drive data D2 and corresponding map detection data D1. Create X conversion table 2 for converting target X detection data D1 and Y detection data D1 into X drive data D2 so that later X detection data D1 and Y detection data D1 approach each other, and A Y conversion table 2 for converting the X detection data D1 and the Y detection data D1 to be converted into Y drive data D2 may be created.
Furthermore, the “stage” in the present invention refers not only to a work (work object, work object, etc.) on which a work (work object, work object, etc.) is placed, but also to a part where the drive device K moves (board mounting) In addition to the gripping portion of the apparatus, the wafer gripping portion of the wafer transfer device, and the paint spraying portion (coating portion) of the coating apparatus, a sensor S may be installed.
First, the drive device K will be described in detail.

<Drive device K>
The driving device K includes a second number n2 (including n2 being an integer of 2 or more) including at least the X driving unit K ′ and the Y driving unit K ′, the X driving unit K ′, the Z driving unit K ′, and the like. Drive unit K ′, or only one drive unit K ′ (only X drive unit K ′, only Y drive unit K ′, only Z drive unit K ′, only θ drive unit K ′, At this time, n2 is 1). The drive unit K ′ is a part that is driven according to the drive data D2 output from the table creation unit 3. The drive unit K ′ included in the drive device K may have any configuration as long as it can be driven according to the drive data D2 output from the table creation unit 3. For example, a servo motor, a stepping motor (pulse motor), a linear motor, or the like can be used. Among them, the servo motor, stepping motor, and the like that are rotationally driven include a mechanism that converts rotational drive force such as a ball screw mechanism and a rack and pinion mechanism into a straight drive force.
The X drive unit K ′ and the Y drive unit K ′ included in the drive device K adjust the position of the target T such as a stage in the vertical direction (Y direction (front-rear direction)) and the horizontal direction (X direction (left-right direction)). The other drive unit K ′ is a component that moves linearly in the moving part of the conversion system 1 described above (for example, a Z drive unit K ′ that adjusts the position in the height direction), or around a predetermined axis. (Θ drive unit K ′).
By these n2 drive units K ′, the planar operation of the XY stage by the X drive unit K ′ and the Y drive unit K ′ and the XYZ stage by the X drive unit K ′, the Y drive unit K ′ and the Z drive unit K ′ are performed. A three-dimensional operation or a plane and rotation operation of the XYθ stage is performed by the X drive unit K ′, the Y drive unit K ′, and the θ drive unit K ′.

<Status J of drive device K>
The situation J of the drive device K means the current position in each axial direction where each drive unit K ′ is positioned (for example, the position in the X direction (X axis direction) where each drive unit K ′ is positioned (current X Value), current position in Y direction (Y-axis direction) (current Y value), position in Z direction (Z-axis direction) (current Z value), etc.), that is, "current position in drive unit K '" However, the current position in the drive unit K ′ is the drive data D2 described above.
Further, the situation J of the driving device K indicates that if the sensor S described later is a vision sensor or the like, the displacement of the sensor S and the driving device K (for example, the X axis and the Y axis in the vision sensor (X in the V plane described later) Although the axis and the Y axis are arranged so as to overlap the X axis and the Y axis in the driving device K (S plane described above), they are not actually arranged so as to overlap (the X axis and the Y axis in the V plane). In contrast, the X-axis and the Y-axis in the S plane are rotating or translating).
In addition, the situation J of the driving device K is the displacement of the target T such as the substrate and the driving device K (the X and Y axes of the target T such as the substrate are the S plane ( The operation plane) is arranged in parallel to the X axis and the Y axis, etc., but is not actually arranged in parallel), or the crossing displacement of each axis in the driving device K (the above-described driving). Although the part K ′ intends to configure each axis for positioning so as to be orthogonal to each other, it may actually include a situation where the angle between the axes is not exactly 90 °.
In addition to these, the situation J of the drive device K includes the inclination of the drive device K itself (the situation in which the drive device K is intended to be installed horizontally but is actually inclined in any direction), and the drive unit K ′. Mechanical backlash (gap between slider and slide rail, gear backlash, etc.), temperature in the environment where the drive device K is placed, and humidity, pressure, wind speed in the environment where the drive device K is placed , Wind direction etc. may be included.

<Sensor S>
The sensor S detects the situation J of the driving device K described above, and outputs a first (n1) number of detection data D1 described later.
The configuration of the sensor S itself is that it detects the status J of the driving device K and outputs detection data D1 (X detection data D1, Y detection data D1, Z detection data D1, θ detection data D1, etc.). Any of these may be used, for example, a sensor that captures an image such as a vision sensor (camera) or a stereo vision sensor (a sensor having a plurality of vision sensors), an encoder, a potentiometer, an acceleration sensor, a gyro sensor, an inclination angle sensor, etc. It may be a sensor that detects the number of rotations or an angle, or a sensor that detects a distance, such as a laser distance sensor (laser range finder or the like) or an ultrasonic distance sensor.
In addition, the sensor S may be a temperature sensor, a humidity sensor, an atmospheric pressure sensor, a wind direction wind speed sensor, or the like, and the sensor S is a sensor that picks up the image described above, a sensor that detects the rotation speed or the angle, A sensor for detecting a distance and a sensor for detecting temperature and humidity may include a plurality and / or a plurality of types at the same time.
The sensor S outputs the first several pieces of detection data D1, but the first several pieces (n1 pieces) are not particularly limited. For example, there are two pieces, three pieces, four pieces or more, and 1 It may be individual.
The first number n1 may be the same value as the second number n2 described above, but may be a different value.

  A conversion system 1 according to the present invention converts detection data D1 obtained from a sensor S such as a position recognition sensor by a table creation unit 3, and an X drive unit according to the drive data D2 output by the table creation unit 3 The conversion system 1 that is the most basic form will be described in detail below as a first embodiment.

<First Embodiment>
As shown in FIGS. 1 to 9, the conversion system 1 according to the first embodiment of the present invention converts the first number (n1) of detection data D1 into the second number (n2) of drive data D2. A table 2 is provided.
<Conversion system 1>
Hereinafter, a conversion system 1 according to a first embodiment of the present invention will be described with reference to the drawings.
FIG. 1B shows a conversion system 1 according to the first embodiment for a drive device K having an X drive unit K ′ and a Y drive unit K ′ and a conversion for a position recognition sensor (vision sensor or the like) S. An example of acquiring map data for creating the table 2 is shown. FIG. 2 shows a schematic diagram of the conversion system 1 according to the first embodiment.

In the conversion system 1 shown in FIG. 1A, the detection data D1 of the target (“Point 1” in FIG. 1A) detected by the vision sensor S and the target in the vision sensor coordinate system (V plane). Position difference data with respect to the position is given to the X drive unit K ′ and Y drive unit K ′, which are drive units K ′, to drive them. However, the detection data D1 detected by the vision sensor S is the data on the plane recognized by the vision sensor S (the V plane consisting of the VX value and the VY value. The VX value is the X direction on the screen imaged by the vision sensor S. The position (X value on the V plane) and the VY value are the Y direction position (Y value on the V plane) on the screen imaged by the vision sensor S, and are on the plane on which the XY stage drives in the X direction and the Y direction. (S plane composed of SX value and SY value. SX value is the position of X drive unit K ′ (X value in S plane), SY value is the position of Y drive unit K ′ (Y value in S plane)) and In addition to differences, corrections such as projective transformation are required to take into account the rotational misalignment around the Z direction (Z axis) that occurs when the vision sensor S and the XY stage are installed, and distortion of the lens used for the vision sensor S. It is necessary to perform the calculation.
On the other hand, when the target is at the point 1, the point V1, which is the point 1 on the V plane, is represented only by the point S1 viewed from the S plane. Therefore, in order to convert the movement amount obtained on the V plane basis into the position data on the S plane, the SX value and SY value (VX1 value on the S plane corresponding to the VX value and VY value on the V plane). And VY1 values may be converted into SX1 values and SY1 values.
That is, at each of three or more points, the detected target VX value and VY value are acquired as map detection data D1, and the SX value and SY value at each point are acquired as map drive data D2. As shown in FIG. 1B, the X conversion table 2 using the SX data group composed of the VX value, the VY value and the SX value as map data, and the SY data group composed of the VX value, the VY value and the SY value are mapped. A Y conversion table 2 as data for use is created by the table creation unit. The SX data group and the SY data group are data groups that can be expressed by a three-dimensional graph.
The X conversion table 2 and Y conversion table 2, the X drive unit K ′, the Y drive unit K ′, and the vision sensor S are connected as shown in FIG.
The X conversion table 2 outputs the SX value corresponding to the given VX value and VY value as the X drive data D2 based on the SX data group which is the map data, and the Y conversion table 2 is the map data. Based on the SY data group, the given VX value and the SY value corresponding to the VY value are output as the Y drive data D2, so that the X drive data D2 and the Y drive data D2 are three-dimensional as shown in FIG. The target detected by the vision sensor S is obtained by tracing the surface represented by the graph, and giving the X drive data D2 to the X drive unit K ′ and the Y drive data D2 to the Y drive unit K ′. The data D1 is converted into drive data D2 of the X drive unit K ′ and the Y drive unit K ′ without performing correction calculation, and the X drive unit K ′ and the Y drive unit K ′ are driven.
In addition, the SX value and SY value corresponding to the VX value and the VY value include the positional relationship between the vision sensor S and the XY stage when the map data is acquired. Conversion accuracy can be improved, for example, by taking into account the distortion of the lens used.

Note that the conversion table 2 in the present embodiment uses the VX value and the VY value, which are the detection data D1, and the drive data D2 of the X drive unit K ′ or the Y drive unit K ′ as map data, as described above. For example, when the map data in the conversion table 2 is represented by a three-dimensional graph as shown in FIG. 3A, VX exceeds the maximum value of the VX value and the VY value at the time of map data acquisition. When the value and the VY value are given to the conversion table 2 as target values, the conversion process performed by the conversion table 2 continues conversion following the surface drawn by the three-dimensional graph as shown in FIG.
In addition, since the trajectory drawn by the drive data D2 is continuously converted so as to be the same linear trajectory according to the linear trajectory drawn by the VX value and the VY value which are target values from the start point, The processing is not only the data conversion to the drive data D2 corresponding to the VX value and VY value which are target values, but also until the drive unit K ′ reaches the drive data D2 corresponding to the VX value and VY value which are target values. During this period, the data is continuously converted to drive data D2, resulting in data conversion accompanied by a trajectory operation.
That is, only by acquiring the map data and creating the conversion table, without being aware of the X value and Y value (SX value and SY value in this example) of the drive plane that actually operates such as the S plane. It is only necessary to specify the X value and Y value (VX value, VY value in this example) on the plane to be set as a command such as the V plane on the vision sensor S. For example, the locus drawn by the target on the V plane It is also possible to easily perform the operation so as to be horizontal in the VX direction.

<Conversion table 2>
The conversion table 2 converts the first number (n1) of detection data D1 into a second number (n2) of drive data D2.
This conversion is performed based on the “difference” between the n1 detection data D1 and the n2 drive data D2.
Here, the “difference” between the detection data D1 and the drive data D2 depends on the position of the moving part in the drive device K detected by the sensor S (for example, “position on the V plane”) and each drive unit K ′. It includes the difference in the position of the moving part in the driving device K ("position on the S plane").
For example, when the state J of the driving device K is “displacement of the sensor S and the driving device K” (the X axis and Y axis in the S plane are −30 with respect to the X axis and Y axis in the V plane described above) If it is rotated), the coordinates on the V plane (two-dimensional image captured by the vision sensor): the point P1 (VX, VY) = (2.0 mm, 0.0 mm) is the S plane (operation plane) ): Corresponding to the point P1 ′ (SX, SY) = (1.732050808 mm (= √3), 1.000000000 mm).
However, the point P1 and the point P1 ′ are greatly different in X value (VX value and SX value) and Y value (VY value and SY value).
This large difference also occurs in the same way other than the points P1 and P1 ′. For example, the coordinate in the V plane: the point P2 (VX, VY) = (0.0 mm, 2.0 mm) is the coordinate in the S plane: the point. P2 ′ (SX, SY) = (− 1,000,000,000), 1.732050808 mm (= √3)).
However, the point P2 and the point P2 ′ are also greatly different in X value (VX value and SX value) and Y value (VY value and SY value).
Even if such a difference occurs, since the conversion table 2 includes the X conversion table 2 that is the SX data group and the Y conversion table 2 that is the SY data group, any point on the V plane The position (value of the detection data D1) can be made to correspond to an appropriate point / position on the S plane (“appropriate value” of the drive data D2).

As shown in FIG. 1B, the X conversion table 2 and the Y conversion table 2 display the VY values on the horizontal axis by changing the VX values from 0.0 mm to 2.0 mm at intervals of 0.2 mm. Similarly, it is displayed on the vertical axis by changing from 0.0 mm to 2.0 mm at intervals of 0.2 mm, and a predetermined VX value and an SX value or SY value corresponding to the predetermined VY value are displayed in a column ( (Column) and a column (cell) where a row (horizontal row) corresponding to the VY value intersects.
For example, in the X conversion table 2, the SX value corresponding to (VX, VY) = (0.0, 0.0) is “0.00”, and (VX, VY) = (2.0, 0. The SX value corresponding to (0) is “1.73”, the SX value corresponding to (VX, VY) = (0.0, 2.0) is “−1.00”, and (VX, VY ) = (1.0,1.0) corresponds to “0.37”, and (VX, VY) = (1.4,0.8) corresponds to “0.81”. The SX value corresponding to (VX, VY) = (0.4, 1.4) is “−0.35”.
Similarly, in the Y conversion table 2, the SY value corresponding to (VX, VY) = (0.0, 0.0) is “0.00”, and (VX, VY) = (2.0, 0). .SY) corresponding to (VX, VY) = (0.0,2.0) is "1.73" and (VX, VY). ) = (1.0,1.0) is the SY value corresponding to “1.37”, and the SY value corresponding to (VX, VY) = (1.4,0.8) is “1.39”. The SY value corresponding to (VX, VY) = (0.4, 1.4) is “1.41”.

These X conversion table 2 and Y conversion table 2 can be created as long as there are at least three points associated with “(VX, VY) → (SX, SY)” in advance, for example, FIG. {(VX, VY) → (SX, SY)} = {(0,0) → (0,0)}, {(2,0) → (√3,1)}, {(0,2) → (-1, √3)} is used to fill the upper left, upper right, and lower left three cells in the X conversion table 2 and Y conversion table 2.
Thereafter, from the X conversion table 2 of the X conversion table 2 and the Y conversion table 2, the value “1.73 (specifically, 1.73050808)” in the upper right cell is equally divided into 10 in the horizontal axis direction. 0.17 (specifically, 0.173205081) "is added one cell at a time from the upper left cell" 0.00 "to the right (by linear interpolation) to fill the top row.
On the other hand, the vertical axis direction of the X conversion table 2 is “−0.10” obtained by dividing the value “−1.00” in the lower left cell into 10 equal parts, one cell at a time from the upper left cell “0.00”. Add (by linear interpolation) to fill the leftmost column.
For cells other than these, for example, in the second row from the top, the value “−0.10” in the leftmost cell is changed to “0.17 (more specifically,. 173205081) "to the right one cell at a time (by linear interpolation) to fill the second row from the top, and so on, from the third row from the top to the bottom row, An X conversion table 2 can be created.

In the X conversion table 2, even if (VX, VY) has no value such as (0.3, 0.3) or (0.5, 0.5), the VX value or Any VX value or VY value can be handled by adding the VY value, which is divided into 10 equal parts between 0.2 mm and 0.4 mm, one by one in order (linear interpolation). It becomes possible to output the SX value and the SY value.
Further, in the X conversion table 2, the range of values on the horizontal and vertical axes ((VX, VY) is (3.0, 3.0), (-1.0, -1.0), etc.) For example, even in the case of exceeding 0.0 to 2.0), in the horizontal axis direction, “0.17 (specifically, 0.173205081)” is set to 1 from the rightmost cell to the right. Add cells one by one in order, pull one cell from the leftmost cell in order, and in the vertical direction, add "-0.10" one cell at a time from the bottom cell, By subtracting one cell from the top cell in order (linear interpolation), even if the VX value or VY value is larger than “2.0” or smaller than “0.0”, the corresponding SX value or It is possible to output the SY value.
In addition, if the target T of the driving device K is a minute object such as a microchip or a nanochip, the VX value and the VY value are in a range from 0.0 mm to 2.0 mm.

Also, the Y conversion table 2 which is another conversion table can be created in the same manner as the X conversion table 2.
The X and Y conversion tables 2 and 2 created in this way can be illustrated in a three-dimensional space having an X axis, a Y axis, and a Z axis. By representing the value as the Y value and the SX value as the Z value, it can be represented by a plane in the three-dimensional space (see FIG. 1B).
Similarly, the Y conversion table 2 can also be represented by a plane in a three-dimensional space by associating the VX value with the X value, the VY value with the Y value, and the SY value with the Z value (FIG. 1B). )reference).
The creation of the conversion table 2 in this case can also be said to be “three-dimensional (3D) graphing”.

Note that the two X and Y conversion tables 2 and 2 are not limited to those described above, but are ternary linear equations (A ₁ · VX + A ₂ · VY + A ₃ · SX + A ₄ = 0, A ₁ '· VX + A ₂ ' · VY + A ₃ ′ · SY + A ₄ ′ = 0), {(VX, VY) → (SX, SY)} = {(0,0) → (0,0)} in FIG. 15 described above, {(2,0 ) → (√3,1)} and {(0,2) → (−1, √3)} to solve the simultaneous equations, A ₁ = −√3, A ₂ = 1, Since A ₃ = 2 and A ₄ = 0, A ₁ ′ = 1, A ₂ ′ = √3, A ₃ ′ = −2, and A ₄ ′ = 0, SX = (√3VX−VY) / 2, SY = (VX + √3VY) / 2, and these expressions SX = (√3VX−VY) / 2 correspond to the X conversion table 2, and the expression SY = (VX + √3VY) / 2 is Y-converted. Also said to correspond to Table 2 That.
Further, the situation J of the driving device K described above indicates that the X axis and the Y axis in the S plane rotate by θ with respect to the X axis and the Y axis in the V plane, and the x axis direction is in the x1 and Y axis directions. In the case of translation by y1, the expression SX = VX · cos θ + VY · sin θ−x1 corresponds to the X conversion table 2, and the expression SY = −VX · sin θ + VY · cos θ−y1 corresponds to the Y conversion table 2. .

In addition, the situation J of the driving device K is the dislocation of the object T and the driving device K (the X axis and the Y axis in the S plane are parallel to the X axis and the Y axis in the object T such as the substrate). In this case, the expression SX = VX · cos θ ′ + VY · sin θ ′ corresponds to the X conversion table 2, and the expression SY = −VX · sin θ ′ + VY · cos θ ′ It can be said that it corresponds to the Y conversion table 2.
Then, the situation J of the driving device K is an intersection shift of each axis in the driving device K (the angle between the X axis and the Y axis in the S plane of the driving device K is not exactly 90 ° (90 In this case, the expression SX = VX−VY · (sin ε) / cos ε) corresponds to the X conversion table 2, and the expression SY = VY / cos ε is the Y conversion. It can be said that it corresponds to Table 2.
In addition to these, the situation J of the drive device K is a gear backlash (gap is ζ), which is one of the mechanical play, and the rotation direction of the drive unit K ′ (servo motor, stepping motor, etc.) is reversed. In this case, it can be said that the expression SX = VX + ζη (η ≦ ζ) corresponds to the X conversion table 2, and the expression SY = VY + ζη (η ≦ ζ) corresponds to the Y conversion table 2.
Also, by having such X and Y conversion tables 2 and 2, two data are represented by values in the X-axis and Y-axis directions, respectively, and one corresponding data is represented in the Z-axis direction. It can be expressed by a plane in a three-dimensional (3D) space represented by the value of (3D graph), and corresponds to the difference between n1 detection data D1 and n2 drive data D2 (for example, detection data D1 and drive Even if the difference in the data D2 is large, it is possible to create the conversion table 2 (according to the difference).

<Table creation unit 3>
Regarding the creation of the X and Y conversion tables 2 and 2 explained in detail so far, in the above description, as an example, {(VX, VY) → (SX, SY)} = {(0,0) → (0,0) in FIG. )}, {(2,0) → (√3,1)}, {(0,2) → (−1, √3)}, but the actual drive device K and sensor (vision) It is necessary to create the X, Y conversion tables 2, 2 etc. according to the sensor S.
The table creation unit 3 that performs this creation will be described below.

As shown in FIGS. 4 to 7 and 9, the table creation unit 3 creates the conversion table 2.
Creation of the table creation unit 3 includes <1> three-point mapping, <2> grid mapping, and <3> fusion of grid mapping and three-point mapping (grid mapping + three-point mapping).
The “mapping” in the present invention refers to collecting (acquiring) data relating to the actual driving device K and sensor S, and preliminarily converting the conversion table 2 and the corresponding table 4 corresponding to the driving device K and sensor S. It means creating.

<1> Three-Point Mapping As shown in FIG. 4, the three-point mapping is based on any three points on the target T of the driving device K, based on the conversion table 2 (one set of X, Y conversion tables 2, 2 ) In advance.
To explain the three-point mapping in detail, first, the object T of the driving device K (a substrate if the driving device K is a substrate mounting device, a wafer if the driving device K is a wafer transfer device, a coating device if the driving device K is a coating device). For example, in a two-dimensional image (“V plane”, a virtual plane referred to in FIG. 6A described later) including a moving part and a moving part, the entire surface of the object T in the V plane is formed in a mesh shape. Divide into sections (3x3 squares in Fig. 6 (a)), and three of these squares ((1,1) squares, (1,3) squares in Fig. 6 (a) , (3,3) square).

A point (VX, VY) on the “V plane” is selected one by one from each of the selected three squares, and a point (“S plane”) corresponding to each of the three points (VX, VY) ( Three values of “SX, SY) (“ (VX, VY) → (SX, SY) ”) are acquired.
Based on the obtained three “(VX, VY) → (SX, SY)”, the XX conversion table 2 and the Y conversion table 2 are created as described above.
Two equations corresponding to the X and Y conversion tables 2 and 2 may be calculated from the three “(VX, VY) → (SX, SY)”.
By such three-point mapping, it is possible to reduce the data of points to be acquired, and it is possible to suppress the effort and load for creating the conversion table 2.
In the above-described three-point mapping, the entire surface of the object T is divided into sections, but any three points on the object T in the V plane may be selected suddenly.

<2> Grid Mapping As shown in FIG. 5, the grid mapping is performed by preliminarily converting the conversion table 2 (a set of X and Y conversion tables 2 and 2) based on points on the entire surface of the target T of the driving device K. Is to create. Of course, the number of points based is four or more, and the accuracy increases as the number of points increases.
If the grid mapping is explained in detail, in the two-dimensional image (“V plane”) including the object T and the moving part of the driving device K, the entire surface of the object T is drawn at predetermined intervals from the vicinity of the lower left corner of the object T. A point (VX, VY) on the “V plane” is selected so that it can be traced by writing.

A point selected with a value (“(VX, VY) → (SX, SY)”) of a point (SX, SY) on the motion plane (“S plane”) corresponding to each selected point (VX, VY) Get as many as
Based on all the acquired “(VX, VY) → (SX, SY)”, the X conversion table 2 and the Y conversion table 2 are put into cells, and the corresponding SX value and SY value are put one by one. , Y conversion tables 2 and 2 are created.
In this way, each value is put in a cell because the three-point mapping of <1> is created by approximating that the 3D X and Y conversion tables 2 and 2 become planes in space. , Each cell in the Y conversion tables 2 and 2 changes regularly (the value of the adjacent cell can be derived by adding or subtracting a predetermined value), but in the actual object T, A plurality of situations J of the drive device K may occur simultaneously (an arrangement deviation between the sensor S and the drive apparatus K and an arrangement deviation between the object T and the drive apparatus K occur simultaneously, an arrangement deviation between the sensor S and the drive apparatus K, and driving. The crossing of each axis in the device K, the displacement of the sensor S and the driving device K, the mechanical play, etc. may occur at the same time), so that the inclinations of the X and Y conversion tables 2 and 2 which are 3D graphed in a three-dimensional space Is partially different or 3D graphing The X and Y conversion tables 2 and 2 may be curved surfaces in a three-dimensional space (see FIG. 5). If only three points of data are acquired, accurate X and Y conversion tables 2 and 2 are obtained. It may not be created.
However, in the case of grid mapping in which each value is entered in each cell of the X and Y conversion tables 2 and 2, the X, Y conversion tables 2 and 2 that are 3D graphs having different slopes or curved surfaces are used. In contrast, the accuracy of correspondence is increased, and the position can be adjusted more accurately by the drive unit K ′. In the case of grid mapping, even if distortion such as a fish-eye effect of a lens occurs in a two-dimensional image captured by a vision sensor (camera) that is a sensor S, an X, Y conversion table 2 corresponding to this distortion. 2 can be created.

In the grid mapping, like the three-point mapping, first, the entire surface of the object T in the V plane is divided into a mesh shape, and a point (VX, Select VY) one by one.
Then, the value (“(VX, VY) → (SX, SY)”) of the point (SX, SY) on the operation plane (“S plane”) corresponding to each of the selected points (VX, VY) is selected. Acquire the number of points, and based on all the acquired “(VX, VY) → (SX, SY)”, enter the X conversion table 2 and the Y conversion table 2 in the cell and the corresponding SX value and SY value. Thus, the X and Y conversion tables 2 and 2 may be created.

<3> Grid mapping + 3-point mapping As shown in FIG. 6A, the grid mapping + 3-point mapping is performed with respect to all the squares on the entire surface of the object T of the driving device K. Based on the above, a conversion table 2 (a set of X, Y conversion tables 2 and 2) is created in advance.
If the grid mapping (correction of machine operation by the grid mapping shown in FIG. 6A) + three-point mapping (virtual plane by the three-point mapping shown in FIG. 6A) is described in detail, first, in the V plane The entire surface of the object T is divided into a mesh shape, and three points (VX, VY) on the “V plane” are selected from each of these squares.

When attention is paid to one square among all the squares for which three points (VX, VY) are selected, operation planes corresponding to the three points (VX, VY) selected in the square (“S plane”). Three values (“(VX, VY) → (SX, SY)”) of the upper point (SX, SY) are acquired, and based on the acquired “(VX, VY) → (SX, SY)”, An X conversion table 2 and a Y conversion table 2 for the square are created.
Hereinafter, the same applies to other squares, and the value ("(VX, VY) of the point (SX, SY) on the operation plane (" S plane ") corresponding to each of the three points (VX, VY) selected in each square. ) → (SX, SY) ”), and based on the acquired“ (VX, VY) → (SX, SY) ”, separate X conversion table 2 and Y conversion table 2 for each square are obtained. create.

Here, the X and Y conversion tables 2 and 2 created by grid mapping + three-point mapping will be described. In grid mapping + three-point mapping, the X conversion table 2 and the Y conversion table 2 for each square are created. A set of X, Y conversion tables 2 and 2 is created for the number of cells.
As shown in FIG. 6B, when each set of the X, Y conversion tables 2 and 2 is expressed in a three-dimensional (3D) space, one polyhedron (polyvesicle) is represented by the X conversion table 2. It can be said that another polyhedron (polyvesicle) is formed by the Y conversion table 2, and the conversion table 2 is created by these two polyhedrons. This is a conversion table 2 in which a set of X, Y conversion tables 2 and 2 can be expressed by a polyhedron in a three-dimensional (3D) space, not only in the case of grid mapping + three-point mapping, but also in the case of only grid mapping. Also good.
In the above <3> grid mapping + 3 point mapping, the grid mapping is performed first and then the 3 point mapping is performed. Conversely, after the 3 point mapping is performed, the grid mapping (first, the entire surface of the object is performed). It is also possible to divide into areas, perform a three-point mapping that maps only three of the areas, and then perform grid mapping in each of the three areas.
In addition, when creating a batch of conversion tables 2 as <3> grid mapping + three-point mapping, each cell of the X, Y conversion tables 2, 2 (table which is a data group) created by grid mapping is used. Each of the X and Y conversion tables 2 and 2 created by the three-point mapping is inserted, and it can be said that it has a “nested structure”, and the X and Y conversion table 2 created by the grid mapping. It can also be said that “consecutive conversion” is performed based on the X and Y conversion tables 2 and 2 created by 2 and 3 point mapping.
In <3> grid mapping + 3-point mapping, instead of 3-point mapping, X conversion table 2 and Y conversion table 2 conversion formulas for each square (grid) are created based on the four points that divide each square. (At this time, it can also be said to be grid mapping + 4-point mapping).

<Example of mapping>
An example in which the conversion table 2 is specifically created by mapping (<2> grid mapping or the like) in the table creation unit 3 described so far will be shown.
As shown in FIG. 7, in this mapping example, the substrate T of the electronic device on which the electronic component is mounted is the target T.

The substrate of the object T has a long shape (or a substantially rectangular shape), and one of the four corners (for example, the upper left corner) is a vision target (reference mark, origin) G. In addition, two of the three corners are marks C for determining angles (angles between the X axis and Y axis on the V plane and the X axis and Y axis on the substrate T).
Further, for each position (mounting destination M1, M ′, etc.) where the electronic component is mounted, the relative position P with respect to the vision target G, the relative position P between the mounting destinations M1, M ′, etc. can be specified in advance.
When such a substrate T is moved to a mounting station (a place where electronic components are mounted), the angle or position between the X axis and Y axis on the V plane and the X axis and Y axis on the substrate T In some cases, a deviation (situation J of the driving device K) may occur.

Therefore, even if the angle or position is deviated, the conversion table 2 in the vision target G and the mounting destination (first mounting destination) M1 closest to the vision target G, for example, by the grid mapping of <2> described above. Is created (see T1 in FIG. 7).
This conversion table 2 includes not only the vision target G and the first mounting destination M1, but also the relative positions P of the first mounting destination M1 and other mounting destinations M ′, which are known in advance, and a mark C for determining the angle. The X value and the Y value on the virtual plane on the substrate T are converted into the X value and the Y value on the S plane of the drive device K (drive unit K ′) (see T2 in FIG. 7).
By creating this conversion table 2, the X axis and the Y axis in the virtual plane on the substrate T are rotated many times with respect to the X axis and the Y axis in the S plane of the drive device K (drive unit K ′). Since the amount of translation is known (that is, the deviation between the virtual plane on the substrate T and the S plane is known), the virtual plane on the substrate T is overlapped with the S plane so as to eliminate this deviation. It can be said that it is tilted (corrected) (see T3 in FIG. 7).
In this example of the substrate T, the conversion table 2 is created and corrected by the grid mapping of <2>, but the conversion is performed by the three-point mapping of <1> and the grid mapping of + <3> + three-point mapping. Table 2 may be created and corrected.

The table creation unit 3 for creating the conversion table 2 (X, Y conversion table 2, 2, etc.) by the mapping described so far is provided in the driving device K.
Here, “the table creation unit 3 is provided in the drive device K” in the present invention means that the table creation unit 3 is integrated with the drive device K or the table creation unit 3 operates the drive device K. Means that the table creation unit 3 is provided in the drive device K anyway, such as when the table creation unit 3 is a motion controller or a computer terminal connected to the drive device K so that the drive device K can be operated. .
Such a table creation unit 3 can be monitored and calibrated only by the customer side (user side) without the service by the remote centralized management means being paid for from the “maker side”. It is possible to reduce the waiting time for services and paid services ("monitoring and calibration only on the user side" and "reduction of service waiting time and cost").
At the same time, since the customer side (user side) who understands the system most can create the conversion table 2 based on the difference between the n1 detection data D1 and the n2 drive data D2 according to the system, An optimal system can be constructed ("Optimal system construction").

Therefore, it can be said that the table creation unit 3 is the interface device 30 because the conversion table 2 can be created only by the user side.
The interface device 30 will be described below.

<Interface device 30>
As shown in FIG. 8 and the like, the interface device 30 creates the conversion table 2 described so far, and it can be said that the table creation unit 3 described above is also the interface device 30.
The interface device 30 is not particularly limited in its configuration as long as the conversion table 2 can be created. In addition to the motion controller that operates the above, a GUI (Graphical User Interface) that allows the customer side (user side) to create the conversion table 2 may be used by a computer terminal (see FIG. 8).
The GUI that is the interface device 30 may be configured such that the <A> conversion system 1 can be created and the operation check of the <B> conversion system 1 can be performed. .

<A> Creation of Conversion System 1 As shown in FIG. 8A, the interface device 30 creates the conversion system 1, so that the conversion table 2 can be created. In addition to the conversion table 2, the sensor S The number of detection data D1 from (n1), the number of drive units K ′ (that is, drive data D2) of the drive device K (n2), the number and type of the conversion table 2, and the detection Which conversion table 2 each data D1 is input to, and which connection line determines which value is output as drive data D2, and which clutch is used to switch input / output of detection data D1 and drive data D2 Etc. can be decided.
In FIG. 8, since the detection data D1 from the sensor S is only the X value or Y value of the drive unit K ′ (motor) recognized by the sensor S, the detection data D1 is a virtual drive unit. It can be said that it is the value of K ′ (motor).

Note that the interface device 30 may be capable of dragging and dropping a connection line or setting the color of the connection line when the user is creating the conversion system 1.
Further, the interface device 30 is a GUI, and for the user, the type and number are displayed by automatic numbering outside the part name, and the property sheet (name and number (VJ1, VJ2,... J1, J2..., Cam1, Cam2. May be displayed, or the creation screen may be displayed as a single screen, or the creation screen may be enlarged or reduced.

<B> Operation Confirmation of Conversion System 1 As shown in FIG. 8B, the interface device 30 can also confirm the operation of the created conversion system 1, and this operation confirmation is performed on the same screen as the above-described creation screen. It is also possible to monitor (visually) with.
In addition, the interface device 30 can confirm the operation state (conversion table 2 and the motor is moving), the ON / OFF state of the clutch, the input value and the output value of the conversion table 2 and the motor on the operation confirmation screen. May be displayed.

Such an interface device 30 enables monitoring and calibration only on the customer side (user side), and can reduce the time to wait for service from the manufacturer side and the paid service (“monitoring on the user side only” At the same time as “calibration” and “reduction of service waiting time / cost”), the customer (user side) who knows the system most can create the conversion table 2 according to the system, so an optimal system is constructed. ("Building an optimal system").
Such an interface device 30 specifically creates a conversion control program for driving the actual drive device K and controlling the sensor S.
Next, this conversion control program will be described.

<Conversion control program>
The conversion control program controls (drives) the driving device K using the created conversion table 2. Specifically, the conversion control program includes a first number (n1) of detection data D1 and a second number (n2). This is a program that creates the conversion table 2 based on the difference between the drive data D2 and drives the drive unit K ′ of the drive device K with the drive data D2 converted using the conversion table 2.
In other words, as shown in FIG. 9, the process of the conversion control program is started (step S-0), and then the detection data D1 is output from the sensor S (step S-1). Then, drive data D2 is output from the drive unit K ′ of the drive device K (step S-2), and a conversion table 2 is created based on the difference between the detection data D1 and the drive data D2 (step S-3). The second several drive units K ′ in the driving device K are driven by the second several drive data converted from the n1 detection data D1 using the conversion table 2 (step S-4).

Note that step S-4 for driving the driving device K by the conversion table 2 may have finer steps. Specifically, the target point (V) expressed by the detection data D1 from the sensor S may be included. A target point on the plane) is set (step S-4-1), and the target point is represented by the drive data D2 from the drive device K (drive unit K ′) using the conversion table 2. The point is converted to a point (corresponding point on the S plane, etc.) (step S-4-2), and the driving device K (driving unit K ′) is driven until it moves to the corresponding point represented by the driving data D2 by the conversion. Thereafter, the process may return to step S-4-1 (step S-4-3).
The conversion control program described so far enables "monitoring and calibration only by the user", "reduction of service waiting time and cost", and "construction of an optimal system", and conversion table 2 is used. The driving of the driving device K (each driving unit K ′) can be controlled.
Moreover, it can be said that the drive apparatus and sensor controlled by this program are performing the following methods.
The conversion control method is to control (drive) the driving device K using the created conversion table 2, and more specifically, the first number (n1) of detection data D1 and the second number (n2). ) Based on the difference of the drive data D2, a conversion table 2 for converting the detection data D1 into the drive data D2 is created. Using the conversion table 2, the drive data D2 converted from the detection data D1 This is a method of driving the drive unit K ′ in K.
This method enables “monitoring / calibration only on the user side”, “reduction of service waiting time / cost”, and “establishment of an optimal system”. The drive of the drive unit K ′) can be controlled.

  Also in the conversion system 1 according to the first embodiment, the shape change of the operation part of the drive unit K ′ and the support part occurs according to the ambient temperature of the system and the temperature change due to the heat generation of the drive unit itself, A change in behavior occurs. When aiming for high-precision operation, correction calculation such as multiplying a value calculated by projective transformation or the like by a coefficient is performed in order to cope with such a change. This will be described in detail below as a second embodiment.

Second Embodiment
Hereinafter, a conversion system 1 according to a second embodiment of the present invention will be described with reference to the drawings.
FIG. 10 shows a schematic diagram of the conversion system 1 according to the second embodiment. A temperature sensor that detects temperature data (temperature detection data D1) of the X drive unit K ′ and the Y drive unit K ′ is shown as a sensor. Further provided as S.

When it is desired to change the conversion contents depending on the temperature, that is, when the map data (SX value and SY value corresponding to the VX value and VY value) of the conversion table shown in FIG. As shown in (a), the SX data group and the SY data group are acquired for each of two or more temperature detection data D1 (α, β in this example) (in FIG. 10A, Each data group was expressed as a three-dimensional graph). Then, an X interpolation conversion table 2 using the entire SX data group as map data and a Y interpolation conversion table 2 using the SY data group collectively as map data are created, and the VX value, the VY value, and the X drive unit K ′ The temperature detection data D1 is connected (input) to the X interpolation conversion table 2, and the VX value, the VY value, and the temperature detection data D1 of the Y drive unit K ′ are connected (input) to the Y interpolation conversion table 2.
If the conversion contents performed by these interpolation conversion tables 2 are described using the X interpolation conversion table 2 as an example, the VX value and the SX value corresponding to the target values are the X drive data when the temperature detection data D1 = α. When the temperature detection data D1 which is temporarily converted as the X drive data β ′ when the temperature detection data D1 = β and is given to the X interpolation conversion table 2 is γ (α ≦ γ ≦ β), The X drive data α ′ and the X drive data β ′ are linearly interpolated according to the value of γ, and are output from the X interpolation conversion table 2 as X interpolation drive data γ ′.
That is, the interpolation conversion table 2 can be expressed as a three-dimensional graph, and can be said to be a conversion table 2 having a four-dimensional structure by adding one-dimensional data to be given to the conversion table 2.
Further, the temperature detection data D1 to be acquired needs to have two or more points. However, by increasing the number of points to acquire data, it is possible to cope with a change in a curve or a change at a certain point. And accuracy can be improved.

The detection data D1 given to the interpolation conversion table 2 in addition to the VX value and the VY value does not necessarily need to be data outside the conversion system 1 and the table creation unit 3, such as the temperature detection data D1. For example, if the position after the operation changes depending on the speed of the drive unit K ′ due to the backlash of the drive unit K ′ in the drive device K, as shown in FIG. 10B, the temperature detection data D1. Instead, the speed data, which is data in the conversion system 1 and the table creation unit 3, can be handled as the detected speed data D1.
Other configurations of the conversion system 1, the interface device 30, and the conversion control program, operational effects, and usage modes are the same as those in the first embodiment.
Note that the conversion system 1 according to the present embodiment uses the detection data D1 obtained from the position recognition sensor S or the detection data D1 obtained from the position recognition sensor S as the temperature detection data D1 obtained from the temperature sensor S. Since the data to which the one-dimensional data is added is converted into drive data D2 for driving n (n is an arbitrary positive integer) drive units K ′, the “conversion system 1 that performs n-dimensional data conversion” is used. Although it can be said, another drive unit K ′ is added in addition to the X drive unit K ′ and the Y drive unit K ′, and each drive unit K ′ is driven based on the drive data D 2 converted by the conversion table 2. The conversion system 1 will be described in detail below as a third embodiment.

<Third Embodiment>
Hereinafter, a conversion system 1 according to a third embodiment of the present invention will be described with reference to the drawings.
FIG. 11 (a) shows a drive device K having an X drive unit K ′, a Y drive unit K ′, and a θ drive unit K ′ in the conversion system 1 according to the third embodiment, and a position recognition sensor S. An example of acquiring map data for creating the conversion table 2 is shown. The conversion system 1 is configured such that the XY stage shown in FIG. 1 is also moved by a θ drive unit K ′, and a target (on a θ stage rotated by the θ drive unit K ′) ( The angle of the point A) is further detected by the vision sensor S, and the difference between the target θ detection data D1 detected by the vision sensor S and the target angle on the V plane is the θ driving unit K that rotates the θ stage. Give to 'and drive. FIG. 12 shows a schematic diagram of the conversion system 1 according to the third embodiment.

  In the conversion system 1 as shown in FIG. 11A, when the θ drive unit K ′ rotates, blurring occurs due to the slight gap of the sliding portion in the θ drive unit K ′, and the θ drive unit The trajectory drawn by K ′ draws a trajectory that approximates an ellipse without drawing a true circular trajectory, and the angle at which the actual θ drive unit K ′ operates slightly differs from the commanded angle (FIG. 18 ( The same applies to a), and it is necessary to perform correction calculations such as elliptical approximation and linear interpolation in consideration of these. According to the present embodiment, the point A, which is a target placed on the θ stage, is drawn from the locus on the V plane drawn with the rotation by the θ drive unit K ′, and the X, Y detection data D1 and θ detection data D1, The conversion table 2 using the θ drive data D2 which is the drive data D2 of the θ drive unit K ′ as map data is created and used together with the X conversion table 2 and the Y conversion table 2 shown in FIG. In addition to making the locus drawn by the part K ′ closer to a perfect circle, the operating angle deviation of the θ drive part K ′ with respect to the command can also be corrected.

As shown in FIG. 11B, when the θ drive unit K ′ is rotated at an arbitrary angle pitch (may be performed using θ drive data D2 (Sθ value)), it is on the V plane. When there is a locus of point A (a series from start point A to point An), Vθ values as θ detection data D1 are acquired as θ map input data at each of two or more points, and each of the points The difference (θΔX, θΔY) transition obtained by inverting the sign of the VX value and the VY value at the time is also acquired as θ map output data, and a θΔX conversion table using a θΔX data group composed of the Vθ value and the θΔX value as map data. 2 and a θΔY conversion table 2 using the θΔY data group composed of the Vθ value and the θΔY value as map data. The transition of the θΔX data group and the θΔY data group that can be expressed by a two-dimensional graph shows the VX value and the VY value that are the distance between the target point A on the V plane and the θ stage center (rotation center) point, and each Vθ. A value based on the VX value and the VY value (for example, the point A as the target on the V plane and the θ stage) necessary to cancel out the blur due to the slight gap of the sliding portion of the θ drive unit K ′ in the value VX value and VY value that are distances from the center (rotation center) point, and VX value and VY value necessary to cancel out blur due to the slight gap of the sliding portion of the θ drive unit K ′ at each Vθ value The total value).
Similarly, as shown in FIG. 11C, the locus of point A on the V plane when the θ drive unit K ′ is rotated at an arbitrary angle pitch using θ drive data D2 (Sθ value). When there are two or more points, the Vθ value that is the θ detection data D1 is acquired as the θ detection data for the map, and between each point A (points A1 to An) and the point A By obtaining the θ drive data D2 (Sθ value) of the θ drive unit K ′, the θ conversion table 2 is created using the Sθ data group composed of the Vθ value and the Sθ value as map data. The transition of the Sθ data group that can be expressed by a two-dimensional graph is a comparison between the θ detection data D1 at each angle on the V plane and the actual operating angle of the θ drive unit K ′.

Using these created θΔX, θΔY, θ conversion tables 2, 2, 2 and the X conversion table 2 and Y conversion table 2 shown in FIG. 2, they are output from the vision sensor S as shown in FIG. The X detection data D1 (VX value) and the θΔX output data of the θΔX conversion table 2 are combined (or a value based on the θΔX value) and the Y detection data D1 (VY value) and the θΔY output of the θΔY conversion table 2 A value obtained by adding up the θΔY values as data (or a value based on the value) is connected to be given to the X conversion table 2 and the Y conversion table 2, and the θ drive data D2 is given to be given to the θ drive unit K ′. To do.
As described above, in the conventional apparatus, in order to calculate the drive data D2 of the θ drive unit K ′, the X drive unit K ′, and the Y drive unit K ′ as the drive unit K ′, it is necessary to perform individual correction calculations. It was complicated. According to the present embodiment, the VX value, VY value, and Vθ value output from the vision sensor S (that is, the distance and angle to be moved on the V plane) are converted into X, Y, θΔX, θΔY, θ conversion table 2, By giving (input) to 2, 2, 2, 2 and operating each conversion table 2 at the same time, conversion to drive data D2 of each drive unit K ′ is performed without performing correction calculation, and Vθ The X drive unit K ′, the Y drive unit K ′, and the θ drive unit K ′ are driven in conjunction with each other only by giving a value, and the locus drawn by the target on the V plane draws a rotation locus around the point A. It will be. Further, when calculating the θΔX value and the θΔY value, an arbitrary point can be set as the rotation center by taking the difference between the point desired to be the rotation center on the V plane and the detection data D1 of the target sensor S instead of the point A. For example, when the center of the θ stage is the center of rotation, the motion trajectory drawn by the θ stage becomes a trajectory that approaches a perfect circle by increasing the number of data acquisition points.

In the conversion table 2 explained in detail in the present embodiment, a data group that can be expressed as a two-dimensional graph, such as a θΔX conversion table, is described as map data. However, in this way, data used as map data is used. The group does not necessarily need to be a data group that can be represented by a three-dimensional graph, and may be a data group that can be represented by a two-dimensional graph.
Further, the output data output from the conversion table 2 does not necessarily have to be given to the drive unit K ′, and may be given to another conversion table 2 or converted according to the data conversion to be performed even when it is complicated to calculate simultaneously. By creating the table 2 and concatenating the conversion tables 2 as necessary, the degree of freedom of data conversion is increased and correction calculation is omitted, leading to simplification.
The table creation unit 3 acquires θ drive data D2 of the θ drive unit K ′ at at least two points, and is detected by the position recognition sensor S on the position recognition sensor S. ΘΔX output data that is the difference between the X detection data D1 as the rotation center of the target and the X detection data D1 of the target at each of the at least two points, and the Y detection data as the rotation center on the position recognition sensor S ΘΔY output data that is a difference between D1 and target Y detection data D1 at each of the at least two points may be acquired as θ map output data.
In addition, the table creating unit 3 receives the target X detection data D1 when given target θ detection data based on the θ drive data D2 and the corresponding θ map output data. And the YX conversion table 2 for converting the θ drive data D2 into θΔX output data so that the Y detection data D1 rotates about the rotation center on the position recognition sensor S, and the θ drive data D2 as θΔY. A θY conversion table 2 for converting into output data, and obtaining θ drive data D2 of the θ drive unit K ′ at each of at least two points, and detected by the position recognition sensor S Based on the θ drive data D2, the θ detection data D1 of the target at each of the at least two points after the θ drive unit K ′ is driven is acquired, and the θ drive Based on the data D2 and the corresponding θ detection data D1, the target θ detection data D1 after moving the object T approaches the target θ detection data D1. A θ conversion table 2 for converting D1 into θ drive data D2 may be created.
When the target θ detection data D1 is input to the conversion system 1, the θ drive unit K ′ is driven using the θ drive data D2 converted based on the θ conversion table 2, The X drive unit K ′ inputs values based on the target X detection data D1 and θΔX output data to the X conversion table 2 and θX conversion table 2 to enter the X conversion table 2 and θX conversion table 2. The Y drive unit K ′ is driven using the X drive data D2 converted based on the Y conversion table 2 and the θY conversion table 2 based on target Y detection data D1 and θΔY output data. May be driven using the Y drive data D2 converted based on the Y conversion table 2 and the θY conversion table 2.
Further, the horizontal axis in the θΔX data group represented by the two-dimensional graph of FIG. 11B and the θΔY data group represented by the two-dimensional graph may be Sθ.
Other configurations of the conversion system 1, the interface device 30, and the conversion control program, operational effects, and usage modes are the same as those in the first and second embodiments. Next, an example of changing (re-creating) the conversion table 2 for each operation, which is different from the form of the driving device K, will be described in detail below as a fourth embodiment.

<Fourth embodiment>
Hereinafter, a conversion system 1 according to a fourth embodiment of the present invention will be described with reference to the drawings.
FIG. 13A shows a schematic diagram of data acquired by the conversion system (coating apparatus) and CADCAM according to the fourth embodiment. The conversion system 1 includes an XYZ stage that is moved by an X drive unit K ′, a Y drive unit K ′, and a Z drive unit K ′, a vision sensor S and a coating head that are fixed to the stage, and a coating target. After the workpiece is transported, the vision sensor S detects the three targets that are the positions of the workpiece, and each driving unit K ′ is driven to apply to the application start point according to the position of the workpiece. When the head is moved and the X drive unit K ′ and the Y drive unit K ′ are driven in conjunction with each other, the coating head travels along a desired locus on the surface of the workpiece, and coating is performed. FIG. 14 shows a schematic diagram of the conversion system 1 according to the fourth embodiment.
Note that “CADCAM (Computer Aided Design / Computer Aided (or Assisted) Manufacturing)” means that design and manufacturing are performed consistently using a computer, and CAD is a computer-aided design (machine or electrical circuit). CAM refers to computer-aided manufacturing (such as using a computer to produce a designed machine or electrical circuit).
In addition to the X detection data D1 and the Y detection data D1, the sensor S has a position recognition sensor S such as a vision sensor separately from the vision sensor S fixed to the stage so that the Z detection data D1 can be output. You may have.

When drawing an arbitrary trajectory (in this example, a trajectory that the coating head wants to draw) as shown in FIG. 13B by the operation of a plurality of driving units K ′, CAD data or the like that describes the positional relationship between dimensions and marks is used. By drawing a trajectory to be traveled and using CADCAM or the like, a line length of the travel trajectory and a series of drive data groups of the drive unit K ′ corresponding to the line length are acquired.
However, in this example, every time the workpiece is transported, a slight positional deviation (rotation around the axes in the XY direction and the Z direction) occurs. The position data of 'must be converted again, and the detection data D1 detected by the vision sensor S is detected after calibration or the like that matches the detection data D1 output from the vision sensor S with the coordinate system of the actual drive data D2. Based on D1, it is necessary to recalculate a series of drive data D2 of the X drive unit K ′ and Y drive unit K ′ acquired from CADCAM or the like by affine transformation or the like.

In such a case, first of all, with CADCAM or the like, a trajectory line length data (CS value) serving as a command for a curve desired to be drawn by the coating head and an ideal coordinate system corresponding to the CS value (coordinate system on the conveyed workpiece (W Data group (or CX value and CY value on the W plane) of the ideal drive data D2 of the X drive unit K ′ and Y drive unit K ′ in the plane)), and the CS value and CX value are obtained by the table creation unit 3 The CX conversion table 2 using the CX data group consisting of the map data and the CY conversion table 2 using the CY data group consisting of the CS value and the CY value as the map data are created. At this time, output data (CTX value and CTY value) which are ideal targets in the ideal coordinate system are acquired together and recorded in the table creation unit 3.
Next, with the workpiece placed at an arbitrary location, the vision sensor S detects three target positions (VX1 to 3 values, etc. and VY1 to 3 values, etc.) on the workpiece, and then puts the workpiece at the same position. In this state, by manually operating the coating head, the three target positions on the workpiece are aligned with the tip of the coating head, and the driving data D2 (SX) of the X driving unit K ′ and the Y driving unit K ′ at that time Value and SY value), the X conversion table 2 using the X drive data D2 group consisting of the VX value, VY value and SX value as map data, and the Y drive data D2 consisting of the VX value, VY value and SY value A Y conversion table 2 using the group as map data is created. The X conversion table 2 and the Y conversion table 2 convert the detection data D1 detected by the vision sensor S into X drive data D2 of the corresponding X drive unit K ′ and Y drive data D2 of the Y drive unit K ′. It becomes Table 2.
The vision sensor S fixed to the XYZ stage moved by the X drive unit K ′, the Y drive unit K ′, and the Z drive unit K ′ has a relative positional relationship between the V plane and the W plane every time the stage is operated. Therefore, every time the change is made, the CX value on the W plane, the CY value and the CTX value of the ideal target, and the CTY value on the V plane for inputting to the X and Y conversion tables 2 and 2 described above. From the VX conversion table 2 for outputting the output data (VX value) indicating the X value, and the above-described X, Y conversion tables 2, 2 from the CX value on the W plane, the CY value, and the CTX value and CTY value of the ideal target. A VY conversion table that outputs output data (VY value) indicating the Y value on the V plane for input to the V plane is created, and a conversion system 1 is constructed in which the conversion tables 2 are connected as shown in FIG.

In the conversion flow performed by the conversion system 1, first, the three target positions, which are actual work positions, are detected by the vision sensor S as VX values and VY values as detection data D 1 and recorded in the table creation unit 3. Changes in the VX conversion table 2 using CTX values, VX data groups composed of CTY values and VX values as map data, and VY conversion tables 2 using VY data groups composed of CTX values, CTY values and VY values as map data I do. After that, by giving a command (CS value) to the CX conversion table 2 and the CY conversion table 2, the output data (CX value, CY value) of the CX, CY conversion table 2, 2 is transferred to the VX conversion table 2, and CX , CY conversion table 2, 2 output data (CX value, CY value) is given to VY conversion table 2, respectively. Based on these CX value and CY value, VX conversion table 2 and VY conversion table 2 are ideal targets. In addition to converting the CTX value and CTY value, which are the output data, into the actual detection data D1 (VX value and VY value), it is converted into the actual work position, and the ideal coordinate system (W plane) is the vision. It is converted into a sensor coordinate system (V plane), and these converted output data (VX value, VY value) are given to the X conversion table 2 and the Y conversion table 2.
In the X conversion table 2 and the Y conversion table 2, the map detection data VX value and VY value detected by the vision sensor S when the work is placed at an arbitrary place are used as the map position data at the same place. The detection data D1 detected by the vision sensor S is converted into the drive data D2 of each corresponding drive unit K ′ by converting the SX value and the SY value, which are drive data D2 of the drive unit K ′ and the Y drive unit K ′. Will be converted.
That is, by giving a CS value command to the table creation unit 3, the ideal coordinate system (W plane) is converted to the V plane which is the coordinate system of the vision sensor S, and the V plane is converted to the X drive unit K ′ and the Y drive unit. Two-stage coordinate system conversion is performed such as conversion to the S plane which is the coordinate system of K ′, and as a result, the X drive unit K ′ and the Y drive unit K ′ are driven by an ideal position data group that matches the work position. Thus, data conversion is performed without performing correction calculation, and the coating head performs a trajectory operation that traces a trajectory to be drawn according to the position of the workpiece.

In the conversion table 2 described in detail in the present embodiment, virtual data (CS value or CX that is data in the ideal coordinate system (W plane) in this example) that is not the detection data D1 or the drive data D2 of the drive unit K ′ In the above description, the data used to create the map data is the detection data D1 and the drive data D2 of the drive unit K ′. It is not necessary, and any data can be used as long as it can be acquired or recorded by the table creation unit 3 or has data therein.
Further, by using a plurality of conversion tables 2, data conversion can be divided into stages (or “continuous conversion”). For example, when changing a locus to be drawn, data acquired by CADCAM or the like is used as map data. This also leads to simplification of the change work in which only the converted table (CX conversion table 2 and CY conversion table 2 in this example) needs to be changed.

The table creation unit 3 uses the X detection data D1 of the X drive unit K ′ and the Y detection data D1 of the Y drive unit K ′ at each of at least three points recognized by the position recognition sensor S for mapping. Each of the a obtained after the X drive unit K ′ and the Y drive unit K ′ are driven based on the map input data acquired as input data and detected by the position recognition sensor S Target X detection data D1, Y detection data D1, and Z detection data D1 at points are acquired as map output data, and are set as targets based on the map input data and the corresponding map output data. When the X detection data D1 and the Y detection data D1 are given, the X detection data D1 and the Y detection data D1 are set so that the target becomes the desired Z detection data D1. A Z conversion table 2 for converting to Z drive data D2 is further created. When the conversion system 1 receives target X detection data D1 and Y detection data D1, the Z drive unit K ′ It is good also as driving using the said Z drive data D2 converted based on the Z conversion table 2. FIG.
The table creation unit 3 acquires the Z drive data D2 of the Z drive unit K ′ at each of at least two points, and is detected by the position recognition sensor S detected by the position recognition sensor S. ZΔX output data which is a difference between detection data D1 corresponding to the origin O on the XY plane in the XYZ space and target X detection data D1 at each of the at least two points, and the position recognition sensor S In the Z map, ZΔY output data, which is the difference between the detection data D1 corresponding to the origin O on the XY plane in the XYZ space and the Y detection data D1 of the target at each of the at least two points by the position recognition sensor S It may be acquired as output data.
Then, the table creation unit 3 receives the target X detection data D1 when given target Z detection data D1 based on the θ drive data D2 and the corresponding Z map output data. The ZX conversion table 2 for converting the Z drive data D2 into ZΔX output data and the Z drive data D2 so that the D1 and Y detection data D1 remain on the origin O in the XY plane on the position recognition sensor S. ZY conversion table 2 for converting to ZΔY output data, and obtains Z drive data D2 of the Z drive unit K ′ at each of at least two points, and is detected by the position recognition sensor S. Z detection data D of the target at each of the at least two points after the Z drive unit K ′ is driven based on the Z drive data D2. Based on the Z drive data D2 and the corresponding Z detection data D1, the Z detection data D1 after moving the object T approaches the target Z detection data D1, A Z conversion table 2 for converting the target Z detection data D1 into Z drive data D2 may be created.
In the conversion system 1, when the target Z detection data D1 is input, the Z drive unit K ′ is driven using the Z drive data D2 converted based on the Z conversion table 2, The X drive unit K ′ inputs values based on the target X detection data D1 and the ZΔX output data to the X conversion table 2 and the ZX conversion table 2 to enter the X conversion table 2 and the ZX conversion table 2. The Y drive unit K ′ is driven by using the X drive data D2 converted based on the Y conversion table 2 and the ZY conversion table 2 based on target Y detection data D1 and ZΔY output data. May be driven using the Y drive data D2 converted based on the Y conversion table 2 and the ZY conversion table 2.
Other configurations of the conversion system 1, the interface device 30, and the conversion control program, operational effects, and usage modes are the same as those in the first to third embodiments.
Next, an example constructed by combining different conversion tables 2 for the purpose of performing an operation similar to that of the conversion system 1 according to the first embodiment will be described in detail as a fifth embodiment.

<Fifth Embodiment>
Hereinafter, a conversion system 1 according to a fifth embodiment of the present invention will be described with reference to the drawings. The driving device K and the sensor S are the same as those in the first embodiment.
FIG. 15B shows the positional relationship between the XY stage moved by the X drive unit K ′ and the Y drive unit K ′ and the V plane captured by the vision sensor S in the conversion system 1 according to the fifth embodiment. It is shown. FIG. 16 shows a schematic diagram of the conversion system 1 according to the fifth embodiment.

When the XY stage is installed with respect to the V plane as shown in FIG. 15A, only the X drive unit K ′ is driven by an arbitrary distance (SX1 value) as shown in FIG. In the V plane, the VX1 value and the minus VY1 value (the VY1 value with the sign reversed, or the plus VY1 value depending on the direction of the angular deviation between the V plane and the S plane) are obtained. At this time, if it is desired to move the point 1 on the V plane by the amount of the VX1 value, the X drive unit K ′ may be driven by the amount of the SX1 value. Then, since it shifts in the VY direction (Y-axis direction in the V plane), it must be moved again by the amount of the VY1 value.
On the other hand, when only the Y drive unit K ′ is driven (moved) by an arbitrary distance (SY1 value), a minus VX2 value (a VX2 value with the sign reversed, or an angle between the V plane and the S plane). Depending on the direction of deviation, plus VX2 value) and VY2 value. At this time, if it is desired to move by the amount of the VY2 value on the V plane, the Y drive unit K ′ may be driven by the amount of the SY1 value. However, when the Y drive unit K ′ is driven, the VX direction ( In order to shift in the direction of the X axis in the V plane, it must be moved again by the amount of the VX2 value.
In order to operate this XY stage in accordance with a locus desired to be drawn on the V plane reference (replaced with an operation on the S plane), the operation described in detail in FIG. As shown by 15 (c), SX1 data group (XX conversion table 2) consisting of SX1 values (X1 drive data D2) corresponding to VX1 values (X1 detection data D1), corresponds to SX1 values (X1 drive data D2). VY1 data group (XY conversion table 2) composed of VY1 values (Y1 output data), and SY1 data group (YY conversion table 2) composed of SY1 values (Y2 drive data D2) corresponding to VY2 values (Y2 detection data D1) By acquiring a VX2 data group (YX conversion table 2) consisting of VX2 values (X2 output data) corresponding to SY1 values (Y1 drive data D2), each data is obtained. Create four conversion tables 2 and map data of the group, it may be dealt with by connecting, as shown in FIG. 16.

  For example, if it is desired to move the XY stage straightly in the VX direction on the V plane (X-axis direction on the V plane) and a command in the VX direction is given from the vision sensor S to the XX conversion table 2, the VX value on the V plane The SX value (X drive data D2) corresponding to (X detection data D1) is given to the X drive unit K ′ and the XY conversion table 2. In the XY conversion table 2, a VY value (Y output data) for canceling the shift in the VY direction on the V plane corresponding to the SX value (X drive data D2) is given to the YY conversion table 2. In the YY conversion table 2, the SY value (Y drive data D2) corresponding to the VY value (Y detection data D1) on the V plane is given to the Y drive unit K ′ and the YX conversion table 2, and in the YX conversion table 2, , The VX value (X output data) for canceling the deviation in the VX direction on the V plane corresponding to the SY value (Y drive data D2) is given to the XX conversion table 2, and as a result, the XY stage draws The movement locus is a straight movement in the VX direction when viewed from the V plane.

That is, the conversion system 1 drives the Y drive unit K ′ in response to a command to the X drive unit K ′, and drives the X drive unit K ′ in response to a command to the Y drive unit K ′. It becomes a loop structure and looks like an infinite loop, but when it reaches the target position, the value for offsetting the deviation (the output data of the XY conversion table 2 and the XY conversion table 2) converges to an extremely small value, so it appears to stop. (Behaves to tremble finely).
In order to confirm the effect of this behavior on accuracy, test conditions as shown in FIG. 17A were set and operation was confirmed. Here, assuming that there are a V plane and an S plane sharing the 0 point, and the S plane is rotated 30 degrees clockwise with respect to the V plane, a point 1 (point V1) on the V plane is represented by VX = 0. , VY = 2, point 1 on the S plane is SX = -1, SY = √3, point 2 on the V plane (point V2) is VX = 2, VY = 0 (point on the S plane) 2 is SX = √3 and SY = 1).
The conversion system 1 according to the fifth embodiment and the conversion system 1 according to the first embodiment as a comparison target are operated under the test conditions shown in FIG. 17A, and the X value and Y of the points V1 and V2 are detected. FIG. 17B shows a simulation result of the drive data D2 of the X drive unit K ′ and the Y drive unit K ′ after reaching the target position when the values are given to the table creation unit 3, respectively.
In the first embodiment, the position has reached the ideal value, and in the fifth embodiment, it is seen that the value of five decimal places fluctuates within the range of 0 to 1 with respect to the ideal value. However, even if it is assumed that the weight per numerical value is 1 millimeter, the shake is only 10 nanometers, and high-accuracy conversion was also performed in the fifth embodiment, which apparently stopped. I understand.
Thus, it can be said that the conversion system 1 has a high degree of freedom in control design regardless of the form and purpose of the drive device K and the sensor S.

Here, it can be said that the conversion table 2 in the fifth embodiment constitutes a feedback loop using values output from the conversion table 2 when driving the drive device K (drive unit K ′). The feature of the fifth embodiment is that the X and Y drive data D2 output from the XX and YY conversion tables 2 and 2 are fed back to the input of the XY and YX conversion tables 2 and 2. In this case, the X drive data D2 is fed back to the Y axis side via the XY conversion table 2, while the Y drive data D2 is fed back to the X axis side via the YX conversion table 2 (that is, task multiplication). Feedback).
Such a conversion system 1 according to the fifth embodiment includes, for example, the X axis (vision X axis (VX axis)) and Y axis (vision Y axis (VY axis)) on the V plane as the situation J of the driving device K. In contrast, the X axis (servo X axis (SX axis)) and Y axis (servo Y axis (SY axis)) on the S plane are rotating, or the axes on the S plane are not exactly orthogonal Can be used for
Other configurations of the conversion system 1, the interface device 30, and the conversion control program, operational effects, and usage modes are the same as those in the first to fourth embodiments.

<Sixth Embodiment>
Hereinafter, a conversion system 1 according to a sixth embodiment of the present invention will be described with reference to the drawings. The driving device K and the sensor S are the same as those in the third embodiment.
FIG. 18 is a schematic diagram of the conversion system 1 according to the sixth embodiment, and includes seven conversion tables 2-1 to 2-7.

  As shown in FIG. 18A, in this conversion system 1 as well, in the same manner as in the third embodiment, when the θ drive unit K ′ rotates, a slight gap in the sliding portion of the θ drive unit K ′ is obtained. The trajectory drawn by the θ drive unit K ′ draws a trajectory that approximates an ellipse instead of a perfect circle trajectory, and the angle at which the actual θ drive unit K ′ operates relative to the commanded angle. Since slight deviation occurs, it is necessary to perform correction calculations such as elliptical approximation and linear interpolation in consideration of these. According to the present embodiment, X, Y detection data D1, θ detection data D1, and θ drive unit K obtained from a locus on the V plane drawn by a target placed on the θ stage as the θ drive unit K ′ rotates. The conversion table 2 using the θ drive data D2 which is the drive data D2 of 'is used as map data, and the same XX conversion table 2 (2-1) and YY conversion table 2 (2- 2) By using together with the YX conversion table 2 (2-3) and the XY conversion table 2 (2-4), the locus drawn by the θ drive unit K ′ is brought close to a perfect circle, The operating angle deviation of the θ drive unit K ′ can also be corrected.

When only the X drive unit K ′ in the XYθ stage is driven (moved) by an amount of an arbitrary distance (SX1 value), the VX1 value and the minus VY1 value (the VY1 value with the sign reversed, or the V plane and S) on the V plane. Depending on the direction of the angle shift of the plane, it becomes a value of plus VY1).
As an example of this acquisition, as shown in FIG. 19 (the unit of each conversion table 2-1 to 2-4 is 0.1 μm), only the X drive data D2 (SX1 value) of the X drive unit K ′ is (Y drive). 14 parts are increased from “0.0 μm” to “100.0 μm (= 0.1 mm)” to “1300.0 μm (= 1.3 mm)” without moving the part K ′ and the θ drive part K ′. 14 values of the X detection data D1 (VX1 value) output from the vision sensor S in correspondence with the values of XX conversion table 2-1, and the Y detection data D1 (VY1 value) output from the vision sensor S. The 14 values were used as the XY conversion table 2-4.
At this time, if it is desired to move the point 1 on the V plane by the amount of the VX1 value, the X drive unit K ′ may be driven by the amount of the SX1 value. Then, since it shifts in the VY direction (Y-axis direction in the V plane), it must be moved again by the amount of the VY1 value.
On the other hand, when only the Y drive unit K ′ is driven (moved) by an arbitrary distance (SY1 value), a minus VX2 value (a VX2 value with the sign reversed, or an angle between the V plane and the S plane). Depending on the direction of deviation, plus VX2 value) and VY2 value.
As an example of this acquisition, as shown in FIG. 19 (the unit of each conversion table 2-1 to 2-4 is 0.1 μm), only Y drive data D2 (SY1 value) of the Y drive unit K ′ is (X drive). The part K ′ and the θ driving part K ′ are not moved) from “0.0 μm (= 0.0 mm)” to “100.0 μm (= 0.1 mm)” and “1100.0 μm (= 1.1 mm)”. 12 values of the Y detection data D1 (VY2 value) output from the vision sensor S in correspondence with the 12 values increased to the YY conversion table 2-2, and the X detection data output from the vision sensor S Twelve values of D1 (VX2 value) were used as the YX conversion table 2-3.
At this time, if it is desired to move by the amount of the VY2 value on the V plane, the Y drive unit K ′ may be driven by the amount of the SY1 value. However, when the Y drive unit K ′ is driven, the VX direction ( In order to shift in the direction of the X axis in the V plane, it must be moved again by the amount of the VX2 value.
The XX conversion table 2-1, the YY conversion table 2-2, the YX conversion table 2-3, and the XY conversion table 2-4 shown in FIG. 19 are formed into a two-dimensional graph in FIG.

  Among the XYθ stages, in order to operate the X driving unit K ′ and the Y driving unit K ′ in accordance with the locus desired to be drawn on the V plane reference (replaced by the operation on the S plane), in the above, two or more SX1 data group (XX conversion table 2-1) and SX1 value (X1) consisting of SX1 value (X1 drive data D2) corresponding to the VX1 value (X1 detection data D1) are repeated at 14 points or 12 points. VY1 data group (XY conversion table 2-4) consisting of VY1 values (Y1 output data) corresponding to drive data D2), SY1 consisting of SY1 values (Y2 drive data D2) corresponding to VY2 values (Y2 detection data D1) Data group (YY conversion table 2-2), VX2 data group (YX conversion table) consisting of VX2 values (X2 output data) corresponding to SY1 values (Y1 drive data D2) 2-3) By the acquiring, may be dealt with by creating four conversion tables 2 that each data group with the map data, connected.

For example, if it is desired to move the XY stage straight in the VX direction on the V plane (X-axis direction on the V plane), when a command in the VX direction is given from the vision sensor S to the XX conversion table 2-1, The SX value (X drive data D2) corresponding to the VX value (X detection data D1) is given to the X drive unit K ′ and the XY conversion table 2-4.
In the XY conversion table 2-4, a VY value (Y output data) for canceling the shift in the VY direction on the V plane corresponding to the SX value (X drive data D2) is given to the YY conversion table 2-2. It is done.
In the YY conversion table 2-2, the SY value (Y drive data D2) corresponding to the VY value (Y detection data D1) on the V plane is given to the Y drive unit K ′ and the YX conversion table 2-3. In the conversion table 2-3, a VX value (X output data) for canceling the shift in the VX direction on the V plane corresponding to the SY value (Y drive data D2) is given to the XX conversion table 2-1. As a result, the motion trajectory drawn by the XY stage is a straight motion in the VX direction when viewed from the V plane.

On the other hand, when the locus of the point A on the V plane when the θ driving unit K ′ is rotated at an arbitrary angle pitch using the θ driving data D2 (Sθ value) in the XYθ stage, The difference (θΔX, θΔY) in which the Sθ value that is the θ drive data D2 is acquired as the θ map drive data and the signs of the VX value and the VY value at each point are inverted is obtained at each of two or more points. By obtaining as θ map output data, the θΔX conversion table 2 (2-6) using the θΔX data group consisting of Sθ value and θΔX value as map data and the θΔY data group consisting of Sθ value and θΔY value are mapped. The [theta] [Delta] Y conversion table 2 (2-7) is created as data for use.
As an example of obtaining such conversion tables 2-6 and 2-7, as shown in FIG. 19 (the unit of each conversion table 2-6 and 2-7 is 0.000001 °), the θ drive unit K ′ 361 values obtained by increasing only the θ drive data D2 (Sθ value) from “0 °” to “360 °” by “1 °” (without moving the X drive unit K ′ and the Y drive unit K ′). 361 values of θΔX output data (θΔX value) output from the vision sensor S are used as θΔX conversion table 2-6, and 361 values of Y detection data D1 (VY value) output from the vision sensor S The value was set to θΔY conversion table 2-7.
The θΔX conversion table 2-6 and θΔY conversion table 2-7 shown in FIG. 19 are actually 361 θ drive data D2, and θΔX output data and θΔY output data corresponding to these θ drive data D2. However, what is actually shown in FIG. 19 are values from “0 °” to “60 °” increased by “1 °” and values at “360 °”. In FIG. 20, a two-dimensional graph from “0 °” to “360 °” including “61 °” to “359 °” not shown in FIG. 19 is formed.
The transition of the θΔX data group and the θΔY data group depends on the VX value and VY value that are the distance between the target point A on the V plane and the θ stage center (rotation center) point, and the θ drive unit K at each Vθ value. The values based on the VX and VY values necessary to cancel out the blur due to the slight gap of the sliding part of '(for example, the target point A on the V plane and the θ stage center (rotation center) point VX value and VY value, which are distances between the VX value, and the VX value and VY value required to cancel out blur due to the slight gap of the sliding portion of the θ drive unit K ′ at each Vθ value) .

Similarly, when there is a locus of point A on the V plane when the θ drive unit K ′ is rotated at an arbitrary angle pitch using θ drive data D2 (Sθ value), two or more points are present. At each point, the Vθ value that is the θ detection data D1 is acquired as the map θ detection data, and the θ drive of the θ drive unit K ′ between the points A (points A1 to An) and the point A is performed. By obtaining the data D2 (Sθ value), the θ conversion table 2 (2-5) is created using the Sθ data group composed of the Vθ value and the Sθ value as map data.
As an example of obtaining such a conversion table 2-5, as shown in FIG. 19 (the unit of the conversion table 2-5 is 0.000001 °), only the θ drive data D2 (Sθ value) of the θ drive unit K ′ is obtained. From the vision sensor S in correspondence with 361 values increased from “0 °” to “360 °” by “1 °” (without moving the X drive unit K ′ and the Y drive unit K ′). 361 values of the output θ output data (Vθ value) are set as a θ conversion table 2-5.
In addition, the θ conversion table 2-5 shown in FIG. 19 also actually obtained 361 θ drive data D2 and θ detection data D1 corresponding to these θ drive data D2, but in FIG. These are values from “0 °” to “60 °” in increments of “1 °” and “360 °”. In FIG. 20, a two-dimensional graph from “0 °” to “360 °” including “61 °” to “359 °” not shown in FIG. 19 is formed.

These created θΔX, θΔY, θ conversion tables 2-5 to 2-7, XX conversion table 2-1, YY conversion table 2-2, YX conversion table 2-3, and XY conversion table 2-4. The X detection data D1 (VX value) output from the vision sensor S and the θΔX value which is the θΔX output data of the θX conversion table 2-6 (or a value based on the value) and the Y detection data A value (or a value based on the sum) of D1 (VY value) and θΔY value which is θΔY output data of θΔY conversion table 2-7 is given to XX conversion table 2-1 and YY conversion table 2-2. And connected so as to give the θ drive data D2 to the θ drive unit K ′.
As described above, in the conventional apparatus, in order to calculate the drive data D2 of the θ drive unit K ′, the X drive unit K ′, and the Y drive unit K ′ as the drive unit K ′, it is necessary to perform individual correction calculations. It was complicated. According to the present embodiment, the VX value, VY value, and Vθ value (that is, the distance and angle to be moved on the V plane) output from the vision sensor S are changed to XX, YY, YX, XY, θΔX, θΔY, θ In addition to being provided (inputted) to the conversion tables 2-1 to 2-7 and simultaneously operating each conversion table 2, conversion into drive data D2 of each drive unit K ′ is performed without performing correction calculation. The X drive unit K ′, the Y drive unit K ′, and the θ drive unit K ′ are driven in conjunction with each other only by giving the Vθ value, and the trajectory drawn by the target on the V plane is a rotation trajectory centered on the point A. Will be drawn. Further, when calculating the θΔX value and the θΔY value, an arbitrary point can be set as the rotation center by taking the difference between the point desired to be the rotation center on the V plane and the detection data D1 of the target sensor S instead of the point A. For example, when the center of the θ stage is the center of rotation, the motion trajectory drawn by the θ stage becomes a trajectory that approaches a perfect circle by increasing the number of data acquisition points.
In the drive device K described in the sixth embodiment, a Z drive unit K ′ may be used instead of the θ drive unit K ′.

Similarly to the fifth embodiment, the conversion system 1 according to the sixth embodiment also includes, for example, the X axis (vision X axis (VX axis)) and the Y axis (vision) on the V plane as the situation J of the driving device K. The X axis (servo X axis (SX axis)) and Y axis (servo Y axis (SY axis)) on the S plane rotate relative to the Y axis (VY axis), or each axis on the S plane is accurate. Can be used when not orthogonal to
In particular, when the YX conversion table 2-3 shown in the two-dimensional graph in FIG. 20 is compared with the XY conversion table 2-4, the vertical axis of the YX conversion table 2-3 changes from “0.0 μm” to “−”. Scales up to “4.5 μm” are provided, but only the scales from “0.0 μm” to “−0.8 μm” are provided on the vertical axis of the XY conversion table 2-4.
This is because, in the XYθ stage, only the Y drive unit K ′ is moved from “0.0 μm (= 0.0 mm)” to “1100.0 μm (= 1.1 mm)” using the Y drive data D2. The vision sensor S appears to have moved from “0.0 μm” to “3.9 μm” in the X-axis direction (VX direction) on the V plane, whereas only the X drive unit K ′ uses the X drive data D2. When moving from “0.0 μm (= 0.0 mm)” to “1300.0 μm (= 1.3 mm)”, the vision sensor S is “0.0 μm” in the Y-axis direction (VY direction) on the V plane. It means that only “0.8 μm” appears to move.
In other words, the X axis and the Y axis in the S plane are not exactly orthogonal (more specifically, the VY axis (the X axis in the S plane) is displaced from the VX axis (the X axis in the V plane). The displacement of the SY axis (Y axis in the S plane) with respect to the Y axis in the V plane is larger. Further, in the V plane picked up by the vision sensor S, the VX axis and the VY axis must be orthogonal to each other. Although it is possible, the difference between the displacement of the SX axis with respect to the VX axis and the displacement of the SY axis with respect to the VY axis indicates that the X axis and the Y axis in the S plane are not exactly orthogonal).
In this way, even when the axes (X axis, Y axis, Z axis, etc.) in the drive device K are not accurately orthogonal, by using the conversion system 1 of the sixth embodiment (or the fifth embodiment). Accurate control is possible.

Note that the XY conversion table 2-4 shown in a two-dimensional graph in FIG. 20 is moved while moving from “0.0 μm (= 0.0 mm)” to “1300.0 μm (= 1.3 mm)”. Although the position (VY value) in the Y-axis direction on the plane seems to increase or decrease, this is indicated by the unit of “0.1 μm” in the table of the XY conversion table 2-4. It can be said that “0.1 μm” is noise generated because the resolution is lower than the resolution of the rotary encoder for outputting the Y drive data D2 by the Y drive unit K ′, and it can be said that the VY value has not actually increased or decreased.
In addition, the θΔY conversion table 2-4 shown by the two-dimensional graph in FIG. 20 is roughly a cosine curve, but in the middle of moving from “0 °” to “360 °”, the Y axis in the V plane Although the direction position (VY value) seems to be out of the cosine curve, it can also be said that this is noise generated in relation to the resolution of the rotary encoder of the Y drive unit K ′. The cosine curve may be used after removing noise by using a low-pass filter or the like using Fourier transform.
Furthermore, in the sixth embodiment, the number of detection data D1 (first number (n1)) and the number of drive data D2 (second number (n2)) are three, respectively. In the form, n1 and n2 are each two.
In addition to the fifth and sixth embodiments described so far, n1 detection data D1 may be 4, 5 or more, or n2 drive data D2 may be 4 or 5 or more. In addition, n1 pieces of detection data D1 and n2 pieces of drive data D2 may have the same value or different values.
In addition, when each of n1 of detection data D1 and n2 of drive data D2 is 4 or more, all of those values (X, Y, θ, temperature, etc.) are fed back in a manner like a task. In addition, a part of those values (X, Y, θ, temperature, etc.) may be fed back in a manner similar to that of a task.
Other configurations of the conversion system 1, the interface device 30, and the conversion control program, operational effects, and usage modes are the same as those in the first to fifth embodiments.

<Others>
Each configuration of the conversion system 1, the interface device 30, and the conversion control program of the present invention, or the overall structure, shape, dimensions, and the like can be appropriately changed in accordance with the spirit of the present invention.

  The table creation unit 3 includes the conversion table 2 or the interpolation conversion table 2 that gives the drive data D2 to the X drive unit K ′ and the Y drive unit K ′, but the conversion table 2 and the interpolation conversion table 2 according to the target conversion. Is newly created, a plurality of conversion tables 2 and interpolation conversion tables 2 can be provided. As shown in FIG. 21, the total number of conversion tables 2 and interpolation conversion tables 2 may be the same as or different from the number of drive units K ′ (the output data of conversion table 2 is different from other conversion tables). 2).

In the first embodiment, the XY stage is operated (the target moves). However, for example, the vision sensor S is installed on the XY stage without moving the stage on which the target is mounted. The moving form can be dealt with by acquiring the map data and creating the conversion table 2 in the same procedure described in the detailed explanation of the first embodiment.
Further, in describing the example, the conversion table 2 created by the drive unit K ′ and the table creation unit 3 is described as a simple example, but another drive unit K ′ corresponding to the VX value and the VY value is described. By adding the conversion table 2 using the drive data D2 as map data, it is possible to add a drive unit K ′ that operates with the converted drive data D2. For example, when there is an XYZ stage that moves the XY stage up and down in the Z direction, by adding the conversion table 2 using the position data of the Z drive unit K ′, the VX value, and the VY value as map data, the VX value and The present invention is not limited to the first to sixth embodiments and can be applied to an example in which the XYZ stage is operated according to the VY value (the stage is three-dimensionally operated according to the VX value and the VY value). It can use suitably according to embodiment.

As described above, the conversion table 2 and the interpolation conversion table 2 are created in the table creation unit 3, are independent or connected, and the drive unit K ′ is driven using the converted data, so that the conversion contents to be performed are Depending on the content of the operation to be performed, the conversion system 1 corresponding to various embodiments that are not limited to the number of drive units K ′, the drive device K, and the sensor S can be constructed, and correction can be made by combining with data acquisition. The present invention, which performs simultaneous data conversion to n dimensions without performing calculations, can be a means that does not require the mathematical formulas and theories necessary for the operation to be performed. It can also be said that it leads to reducing the time to acquire the knowledge.
Note that the drive data D2 converted by the conversion table 2 fluctuates (meanders) at regular intervals, continuously converts the fluctuating value, or once the conversion reaches the upper limit value that designates conversion. If it repeats from a lower limit, it can be said that the conversion table 2 is an electronic cam.

  The conversion system, interface device, and conversion control program according to the present invention have industrial robots such as substrate mounting robots, wafer transfer robots, coating robots, construction machines such as backhoes, and drive units such as robot toys. It can be used for any drive device.

DESCRIPTION OF SYMBOLS 1 Conversion system 2 Conversion table 3 Table preparation part 30 Interface apparatus T Target object K Drive apparatus K 'Drive apparatus drive part S Position recognition sensor D1 Detection data D2 Drive data

Claims (9)

A conversion system comprising: a drive device having a drive unit that moves an object using drive data; and a position recognition sensor that detects a position of the target in the object as detection data,
Based on the difference between the drive data and the detection data, it also has a table creation unit that creates a conversion table for converting the detection data into drive data,
When target detection data is input, the drive unit is driven using the drive data converted based on the conversion table,
The conversion system, wherein the table creation unit is provided in the driving device. The drive device has an X drive unit that moves the object in the X direction using X drive data and a Y drive unit that moves the object in the Y direction using Y drive data,
The position recognition sensor detects the position of the target in the object as X detection data and Y detection data,
The table creation unit acquires map driving data for X driving unit and Y driving data for map of Y driving unit as map driving data at a (a is an integer of 3 or more) points, and , X detection data for map and target map at each of the a points after the X drive unit and Y drive unit are driven based on the map drive data detected by the position recognition sensor Y detection data is acquired as map detection data, and based on the a number of map drive data and the corresponding map detection data, the target X detection data and sensor Y detection data are converted into the target object. X conversion data for converting the target X detection data and Y detection data into X drive data so that the X detection data and Y detection data after moving the Create a table, and creates the Y conversion table for converting the X detection data and the Y detection data to target the Y driving data,
When target X detection data and Y detection data are input, the X drive unit is driven using the X drive data converted based on the X conversion table, and the Y drive unit performs the Y conversion. The conversion system according to claim 1, wherein the conversion system is driven using the Y drive data converted based on a table. The drive device further includes a Z drive unit that moves the object in the Z direction using Z drive data,
The position recognition sensor further detects the position of the target in the object as Z detection data,
The table creation unit obtains the X driving data for the map of the X driving unit and the Y driving data for the map of the Y driving unit at each of the a points as map driving data, and is detected by the position recognition sensor. Based on the map drive data, the target map X detection data, map Y detection data, and map Z at each of the a points after the X drive unit and the Y drive unit are driven. When detection data is acquired as map detection data, and target X detection data and Y detection data are given based on the a number of map drive data and the corresponding map detection data Further, a Z conversion table for converting the X detection data and the Y detection data into Z drive data is set so that the target becomes desired Z detection data. Create,
3. The Z drive unit is driven using the Z drive data converted based on the Z conversion table when target X detection data and Y detection data are input. Conversion system as described in. The drive device further includes a θ drive unit that rotates the object with θ drive data,
The position recognition sensor further detects the position of the target in the object as θ detection data,
The table creation unit
Each θ detection data after the θ driving unit is driven based on b (b is an integer of 2 or more) map θ driving data detected by the position recognition sensor is used as θ map input data. ΘΔX output data that is the difference between the X detection data obtained as the rotation center on the position recognition sensor and the X detection data of the target at each of the b points, and the position recognition sensor ΘΔY output data, which is the difference between the Y detection data as the center of rotation and the Y detection data of the target at each of the b points, is obtained as θ map output data, and each of the b θ map input data is obtained. When target θ detection data is given based on the corresponding θ map output data, the X detection data and Y detection data of the target are position recognition sensors. A θX conversion table for converting the θ detection data into θΔX output data and a θY conversion table for converting the θ detection data into θΔY output data so as to rotate around the rotation center And
The θ driving data for the map of the θ driving unit at each of b (b is an integer of 2 or more) points is acquired, and the θ based on the θ driving data for the map detected by the position recognition sensor Target θ detection data for the map at each of the b points after the driving unit is driven is acquired, and based on the b θ driving data for the map and the corresponding θ detection data for the map. Creating a θ conversion table for converting the target θ detection data into θ drive data so that the θ detection data after moving the object approaches the target θ detection data,
When target θ detection data is input, the θ drive unit is driven using the θ drive data converted based on the θ conversion table, and the X drive unit A value based on θΔX output data is input to the X conversion table and the θX conversion table, and is driven using the X drive data converted based on the X conversion table and the θX conversion table, and the Y drive The Y drive data converted based on the Y conversion table and the θY conversion table by inputting values based on the target Y detection data and the θΔY output data to the Y conversion table and the θY conversion table. 4. The conversion system according to claim 2, wherein the conversion system is driven by using the conversion system. The conversion system further includes a temperature sensor that detects temperature data of the drive unit,
The table creation unit obtains the map drive data and the map detection data at each temperature corresponding to c (c is an integer of 2 or more) pieces of temperature data, and the c pieces of temperature data. The X drive data at each temperature corresponding to each of the temperatures is interpolated according to the temperature data, and an X interpolation conversion table is output as X interpolation drive data, and the Y at each temperature corresponding to each of the c pieces of temperature data is created. Interpolate the drive data according to the temperature data, create a Y interpolation conversion table that outputs as Y interpolation drive data,
When the corresponding temperature data and the target target X detection data and Y detection data are input at a predetermined temperature, the X drive unit is based on the X interpolation conversion table instead of the X conversion table. The Y drive unit is driven using the Y interpolation drive data converted based on the Y interpolation conversion table instead of the Y conversion table. The conversion system according to any one of claims 2 to 4, wherein: When the X drive unit is driven using the X drive data, the X drive unit obtains X obtained from the X conversion table until the target reaches a position corresponding to the X drive data. Driven using drive data,
When the Y driving unit is driven using the Y driving data, the Y driving unit obtains Y obtained from the Y conversion table until the target reaches a position corresponding to the Y driving data. The conversion system according to any one of claims 2 to 5, wherein the conversion system is driven using drive data. The drive device has an X drive unit that moves the object in the X direction using X drive data and a Y drive unit that moves the object in the Y direction using Y drive data,
The position recognition sensor detects the position of the target in the object as X detection data and Y detection data,
The table creation unit
X drive data for map of the X drive unit at each of d (d is an integer of 2 or more) points is acquired, and the X drive is performed based on the map X drive data detected by the position recognition sensor. Target map X detection data at each of the d points after driving the unit, reference Y detection data serving as a reference among the d points, and map Y detection data at the d points XΔY output data is obtained, and the object is moved to target X detection data based on the d map X drive data and the corresponding map X detection data. An XX conversion table for converting the target X detection data into X drive data is created so that the later X detection data approaches, and the Y detection data before the X drive unit is driven So as to approach the Y detection data after moving the object, to create the XY translation table for converting the X detection data to the target in XΔY output data,
Y drive data for map of the Y drive unit at each of e (e is an integer of 2 or more) points is acquired, and the Y drive is performed based on the map Y drive data detected by the position recognition sensor. The target map Y detection data at each of the e points after the unit is driven, the reference X detection data serving as a reference among the e points, and the map X detection data at the e points YΔX output data is obtained, and the object is moved to target Y detection data based on the e map Y drive data and the corresponding map Y detection data. A YY conversion table for converting the target Y detection data into Y drive data is created so that the later Y detection data approaches, and the X detection data before the Y drive unit is driven As X detection data approaches after moving the object, to create the YX conversion table for converting the Y detection data to the target in YΔX output data,
When target X detection data and Y detection data are input, the X drive unit inputs the value based on the target X detection data and YΔX output data to the XX conversion table, thereby The Y drive unit is driven using the X drive data converted based on the conversion table, and the Y drive unit inputs a value based on target Y detection data and XΔY output data to the YY conversion table. The conversion system according to claim 1, wherein the conversion system is driven using Y drive data converted based on the conversion table.   A conversion table for converting the detection data into drive data based on a difference between detection data output from a position recognition sensor that detects a state of the drive device and drive data for driving a drive unit provided in the drive device. An interface device characterized by creating. A conversion table for converting the detection data into drive data based on a difference between detection data output from a position recognition sensor that detects a state of the drive device and drive data for driving a drive unit provided in the drive device. , Let the table creation unit provided in the drive device create,
A conversion control program for driving a drive unit in the drive device with drive data converted from the detection data using the conversion table.