JP2019007059A5 - - Google Patents
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- JP2019007059A5 JP2019007059A5 JP2017125159A JP2017125159A JP2019007059A5 JP 2019007059 A5 JP2019007059 A5 JP 2019007059A5 JP 2017125159 A JP2017125159 A JP 2017125159A JP 2017125159 A JP2017125159 A JP 2017125159A JP 2019007059 A5 JP2019007059 A5 JP 2019007059A5
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- Prior art keywords
- carbon
- base material
- hard coating
- steel
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- 239000000463 material Substances 0.000 claims 10
- 239000011248 coating agent Substances 0.000 claims 8
- 238000000576 coating method Methods 0.000 claims 8
- 239000002344 surface layer Substances 0.000 claims 7
- 239000010410 layer Substances 0.000 claims 6
- 229910001315 Tool steel Inorganic materials 0.000 claims 5
- 239000011203 carbon fibre reinforced carbon Substances 0.000 claims 4
- 229910052739 hydrogen Inorganic materials 0.000 claims 4
- 239000001257 hydrogen Substances 0.000 claims 4
- 229910000851 Alloy steel Inorganic materials 0.000 claims 2
- 229910000975 Carbon steel Inorganic materials 0.000 claims 2
- 238000001069 Raman spectroscopy Methods 0.000 claims 2
- 229910000831 Steel Inorganic materials 0.000 claims 2
- 229910045601 alloy Inorganic materials 0.000 claims 2
- 239000000956 alloy Substances 0.000 claims 2
- REDXJYDRNCIFBQ-UHFFFAOYSA-N aluminium(3+) Chemical class [Al+3] REDXJYDRNCIFBQ-UHFFFAOYSA-N 0.000 claims 2
- 230000015572 biosynthetic process Effects 0.000 claims 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 2
- 229910052799 carbon Inorganic materials 0.000 claims 2
- 239000010962 carbon steel Substances 0.000 claims 2
- 238000005755 formation reaction Methods 0.000 claims 2
- 125000004435 hydrogen atoms Chemical group [H]* 0.000 claims 2
- 239000000314 lubricant Substances 0.000 claims 2
- 239000000203 mixture Substances 0.000 claims 2
- 239000010959 steel Substances 0.000 claims 2
- 229910001018 Cast iron Inorganic materials 0.000 claims 1
- 229910052782 aluminium Inorganic materials 0.000 claims 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminum Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims 1
- 239000010949 copper Substances 0.000 claims 1
- 229910052802 copper Inorganic materials 0.000 claims 1
- 238000010891 electric arc Methods 0.000 claims 1
- 230000004907 flux Effects 0.000 claims 1
- 239000005078 molybdenum compound Substances 0.000 claims 1
- 150000002752 molybdenum compounds Chemical class 0.000 claims 1
- 239000010935 stainless steel Substances 0.000 claims 1
- 229910001220 stainless steel Inorganic materials 0.000 claims 1
- 239000010936 titanium Substances 0.000 claims 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N titanium Chemical group [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims 1
- 229910052719 titanium Inorganic materials 0.000 claims 1
Claims (8)
前記表面層は、炭素−炭素結合、炭素−水素結合及び炭素−酸素結合を有する膜であり、前記炭素−炭素結合及び前記炭素−水素結合のうちｓｐ2混成軌道を形成しているもの
のｓｐ3混成軌道を形成しているものに対する比が１．４以上、１．６以下であり、膜中
に含まれる水素原子の量が０．５原子％以上、５原子％以下であり、ラマン分光法によるＩＤ／ＩＧが０．４５以上、０．７５以下である、硬質被膜。 With a surface layer formed on the surface of the base material,
The surface layer is a film having a carbon-carbon bond, a carbon-hydrogen bond, and a carbon-oxygen bond. Of the carbon-carbon bond and the carbon-hydrogen bond, sp 3 that forms sp 2 hybrid orbitals is used. A ratio of those having a hybrid orbital of not less than 1.4 and not more than 1.6, the amount of hydrogen atoms contained in the film being not less than 0.5 atomic% and not more than 5 atomic%, and Raman spectroscopy A hard coating having an ID / IG of 0.45 or more and 0.75 or less.
前記密着層と前記表面層との間に設けられ、前記密着層を構成する材料と前記表面層を構成する材料とが混合された混合層とをさらに備え、
前記密着層は、チタンであり、
前記混合層は、厚さが３ｎｍ以上である、請求項１に記載の硬質被膜。 An adhesion layer provided between the base material and the surface layer,
Further provided is a mixture layer provided between the adhesion layer and the surface layer, a mixture of a material constituting the adhesion layer and a material constituting the surface layer,
The adhesion layer is titanium,
The hard coating according to claim 1, wherein the mixed layer has a thickness of 3 nm or more.
前記摺動面に介在し得る潤滑剤とを備え、
前記摺動面の少なくとも一方には、請求項１〜４のいずれか１項に記載の硬質被膜が設けられ、
前記潤滑剤は、有機モリブデン化合物を含んでいる、摺動部材。 A pair of sliding surfaces facing each other that can move relative to each other,
A lubricant that can be interposed on the sliding surface,
At least one of the sliding surfaces is provided with the hard coating according to any one of claims 1 to 4,
The sliding member, wherein the lubricant contains an organic molybdenum compound.
０．５原子％以上、５原子％以下であり、ラマン分光法によるＩＤ／ＩＧが０．４５以上、０．７５以下である硬質被膜を母材の表面に成膜する工程を備え、
前記成膜する工程は、前記母材を保持するワークホルダと、アーク放電を発生させるカソード及びアノードと、前記カソードの表面に固定されたターゲットから前記ワークホルダに保持された母材まで延びる磁力線を発生させる磁力線発生源とを有する成膜チャンバを用い、
前記ターゲットの主面と直交し、前記母材側に延びる方向をＸ方向とし、前記ターゲットの動径方向をｒ方向とし、前記ターゲットの中心をＸ＝０、ｒ＝０とする座標系において、前記ターゲットの半径をＲとした場合に、Ｘ＝Ｒ、ｒ＝Ｒの位置における磁束密度が０．５ｍＴ以上、５ｍＴ以下で、ｒ方向の磁力ベクトルのＸ方向の磁力ベクトルに対する比｜Ｘ／ｒ｜が１．５以下の条件で行う、硬質被膜の製造方法。 It has a carbon-carbon bond, a carbon-hydrogen bond, and a carbon-oxygen bond, and among the carbon-carbon bond and the carbon-hydrogen bond, those that form sp2 hybrid orbitals and those that form sp3 hybrid orbitals. The ratio is 1.4 or more and 1.6 or less, the amount of hydrogen atoms contained in the film is 0.5 to 5 atomic%, and the ID / IG by Raman spectroscopy is 0.45 or more. , A step of forming a hard coating of 0.75 or less on the surface of the base material,
The film forming step includes: a work holder for holding the base material; a cathode and an anode for generating arc discharge; and a magnetic field line extending from a target fixed to the surface of the cathode to the base material held by the work holder. Using a film forming chamber having a magnetic field line source to generate,
In a coordinate system in which a direction orthogonal to the main surface of the target and extending toward the base material is an X direction, a radial direction of the target is an r direction, and a center of the target is X = 0, r = 0, When the radius of the target is R, the magnetic flux density at the position of X = R and r = R is 0.5 mT or more and 5 mT or less, and the ratio of the magnetic vector in the r direction to the magnetic vector in the X direction | X / r | Is a condition of 1.5 or less.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2017125159A JP6883805B2 (en) | 2017-06-27 | 2017-06-27 | Hard coating and its manufacturing method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2017125159A JP6883805B2 (en) | 2017-06-27 | 2017-06-27 | Hard coating and its manufacturing method |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2019007059A JP2019007059A (en) | 2019-01-17 |
| JP2019007059A5 true JP2019007059A5 (en) | 2020-03-26 |
| JP6883805B2 JP6883805B2 (en) | 2021-06-09 |
Family
ID=65029275
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2017125159A Active JP6883805B2 (en) | 2017-06-27 | 2017-06-27 | Hard coating and its manufacturing method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP6883805B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7421775B2 (en) * | 2019-12-06 | 2024-01-25 | 富士電機株式会社 | steam turbine parts |
| WO2022107467A1 (en) * | 2020-11-19 | 2022-05-27 | 富士電機株式会社 | Steam turbine member |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3718664B2 (en) * | 2001-06-13 | 2005-11-24 | 住友電気工業株式会社 | Amorphous carbon coated tool and method for manufacturing the same |
| JP3719709B2 (en) * | 2001-06-13 | 2005-11-24 | 住友電気工業株式会社 | Amorphous carbon coated tool and method for manufacturing the same |
| JP4985490B2 (en) * | 2008-03-12 | 2012-07-25 | 日新電機株式会社 | Deposition equipment |
| JP5342365B2 (en) * | 2009-08-05 | 2013-11-13 | 株式会社豊田中央研究所 | Low friction sliding member |
| DE102012219930A1 (en) * | 2012-10-31 | 2014-04-30 | Federal-Mogul Burscheid Gmbh | Sliding element, in particular piston ring, with a coating |
| JP2014173129A (en) * | 2013-03-08 | 2014-09-22 | Ngk Insulators Ltd | Deposition method of thin film using plasma |
-
2017
- 2017-06-27 JP JP2017125159A patent/JP6883805B2/en active Active
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