JP2019002431A - Heat insulation wall structure for heating furnace - Google Patents

Abstract

To provide a heat insulation wall structure for a heating furnace which prevents the exfoliation and the vacuum breakage of a sealing member when a force is applied to a direction in which an outer cylinder and an inner cylinder are separated from each other, and prevents the breakage of an inserted fixture and the inner cylinder even if positional displacement between a penetration hole of the inner cylinder and a penetration hole of the outer cylinder occurs.SOLUTION: This heat insulation wall structure for a heating furnace comprises: an outer cylinder 2; an inner cylinder 3 arranged inside the outer cylinder 2; sealing members 41, 42 for sealing a decompressed space between the outer cylinder 2 and the inner cylinder 3 by being pressure-gripped by the outer cylinder 2 and the inner cylinder 3; and a fixture 8 for gripping and fastening the outer cylinder 2 and the inner cylinder 3. The fixture 8 is loosely inserted into penetration holes 27, 37 which are formed at the outer cylinder 2 and the inner cylinder 3 via the sealing member 41, spherically contact with the outer cylinder 2 and the inner cylinder 3, and can follow positional displacement between the penetration hole 37 of the inner cylinder 3 and the penetration hole 27 of the outer cylinder 2 which occurs accompanied by the thermal expansion of the inner cylinder 3 while gripping and fastening the outer cylinder 2 and the inner cylinder 3.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a heat insulating wall structure for a heating furnace, and particularly to a heat insulating wall structure for a heating furnace for a heat insulating wall for a heating furnace having no bottom.

  The outer cylinder and the inner cylinder having the bottom are respectively sealed and integrated, and the enclosed space is in a vacuum state to insulate the outside of the outer cylinder and the space inside the inner cylinder. A vacuum heat insulating container is known (see Patent Document 1).

JP 2011-219125 A

  In the structure of the vacuum heat insulating wall in which the outer cylinder and the inner cylinder having no bottom are combined and the opening is sealed with the sealing member, the sealing member is compressed only by the atmospheric pressure applied to the opening. When a force is applied in a direction to separate the inner cylinder, the sealing member may be peeled off and vacuum breakage may occur. In order to solve this problem, a method is conceivable in which a through hole is formed in the outer cylinder and the inner cylinder, and a fastener is inserted and clamped. However, in such a configuration, for example, when only the inner cylinder undergoes thermal expansion deformation due to heat applied to the inner cylinder, the fixed insertion that is inserted due to the displacement of the through hole of the inner cylinder and the through hole of the outer cylinder There was a problem that the tool and the inner cylinder would be deformed or damaged.

  The present invention has been made to solve such a problem, and in a heat insulating wall for a heating furnace having no bottom, a sealing member when a force is applied in a direction in which the outer cylinder and the inner cylinder are separated from each other is provided. Insulating wall structure for heating furnace that prevents peeling and vacuum breakage and prevents damage to the inserted fixture and inner cylinder even when the inner cylinder's through hole and outer cylinder's through hole are displaced. It is to provide.

  The heat insulating wall structure for a heating furnace according to the present invention includes an outer cylinder, an inner cylinder disposed inside the outer cylinder, and the outer cylinder and the inner cylinder by being sandwiched between the outer cylinder and the inner cylinder. A sealing member that seals a decompressed space with the inner cylinder, and a fixture that clamps and fastens the outer cylinder and the inner cylinder, and the fixture is interposed via the sealing member. The outer cylinder and the inner cylinder are loosely inserted into through holes provided in the outer cylinder and the inner cylinder, and are in spherical contact with the outer cylinder and the inner cylinder, respectively, and clamped and fastened between the outer cylinder and the inner cylinder. In addition, it is possible to follow a positional deviation between the through hole of the inner cylinder and the through hole of the outer cylinder that is caused by the thermal expansion of the inner cylinder.

  In the heat insulating wall structure for a heating furnace according to the present invention, the fixture is loosely inserted into the through-holes provided in the outer cylinder and the inner cylinder via the sealing member, and is spherical with respect to the outer cylinder and the inner cylinder, respectively. They are in contact with each other and can follow the positional deviation between the through hole of the inner cylinder and the through hole of the outer cylinder, which is caused by the thermal expansion of the inner cylinder, while clamping the outer cylinder and the inner cylinder. Therefore, when a force is applied in the direction separating the outer cylinder and the inner cylinder, the sealing member is prevented from being peeled off and the vacuum is broken, and the inner cylinder through hole and the outer cylinder through hole are displaced. In this case, it is possible to prevent breakage of the inserted fixture and inner cylinder.

  According to the present invention, when a force is applied in a direction in which the outer cylinder and the inner cylinder are separated from each other, peeling of the sealing member and vacuum breakage are prevented, and displacement between the inner cylinder through hole and the outer cylinder through hole occurs. In this case, it is possible to provide a heat insulating wall structure for a heating furnace that prevents damage to the inserted fixture and inner cylinder.

It is the longitudinal cross-sectional view which cut | disconnected the heat insulation wall for heating furnaces concerning this invention along the longitudinal direction. It is a cross-sectional view in the cutting line II-II of the heat insulation wall for heating furnaces shown in FIG. It is a schematic diagram explaining the state which the inner cylinder received the heat | fever from the accommodation space of the heat insulation wall for heating furnaces shown in FIG. It is a partial view when the circumference | surroundings of the fixing tool of the heat insulation wall for heating furnaces concerning the modification 1 are cut | disconnected along a longitudinal direction. It is a schematic diagram explaining the state which the inner cylinder received the heat from the accommodation space of the heat insulation wall for heating furnaces shown in FIG. It is a fragmentary figure when the periphery of the fixing tool of the heat insulation wall for heating furnaces concerning the modification 2 is cut | disconnected along a longitudinal direction. It is a schematic diagram explaining the state which the inner cylinder received the heat from the accommodation space of the heat insulation wall for heating furnaces shown in FIG. It is a cross-sectional view when the heat insulation wall for a heating furnace according to Modification 3 is cut by a cut surface corresponding to FIG. It is a cross-sectional view when the heat insulation wall for a heating furnace according to Modification 4 is cut by a cut surface corresponding to FIG.

Hereinafter, specific embodiments to which the present invention is applied will be described in detail with reference to the drawings. However, the present invention is not limited to the following embodiments. In addition, for clarity of explanation, the following description and drawings are simplified as appropriate.
As a matter of course, the right-handed xyz coordinates shown in FIG. 1 and other drawings are for convenience in explaining the positional relationship of the components. Usually, the z-axis positive direction is vertically upward, and the xy plane is a horizontal plane, which is common between the drawings.

  First, with reference to FIG. 1 and FIG. 2, the heat insulation wall structure for heating furnaces of this invention is demonstrated. FIG. 1 is a longitudinal sectional view of a heat insulating wall 1 for a heating furnace according to the present invention cut along a longitudinal direction (x-axis direction). It is a cross-sectional view in the cutting line II-II of the heat insulation wall 1 for heating furnaces shown in FIG. As shown in FIGS. 1 and 2, the heat insulating wall 1 for a heating furnace includes an outer cylinder 2 and an inner cylinder 3 arranged inside the outer cylinder 2.

The material of the outer cylinder 2 and the inner cylinder 3 is, for example, stainless steel or steel.
As shown in FIGS. 1 and 2, the outer cylinder 2 is horizontally placed with the x axis in the longitudinal direction. The outer cylinder 2 includes a cylinder part 21, a first annular outer wall part 22 extending inward along one end of the cylinder part 21, and a second annular outer wall part 23 extending inward along the other end of the cylinder part 21. It is equipped with.

The inner cylinder 3 is placed horizontally in the longitudinal direction on the x axis in parallel with the outer cylinder 2. The inner cylinder 3 includes a cylinder part 31, a first annular inner wall part 32 extending inward along one end of the cylinder part 31, and a second annular inner wall part 33 extending outward along the other end of the cylinder part 31. It is equipped with.
The first annular outer wall portion 22 and the first annular inner wall portion 32 are provided so as to face each other while being separated from each other. The second annular outer wall portion 23 is disposed on the inner side (x-axis negative side) than the second annular inner wall portion 33, and the second annular outer wall portion 23 and the second annular inner wall portion 33 are provided so as to face each other while being separated from each other. ing. The second annular outer wall portion 23 is also separated from the cylindrical portion 31 of the inner cylinder 3.

  The sealing members 41 and 42 are annular and are formed of an elastic body having a lower thermal conductivity than the outer cylinder 2 and the inner cylinder 3, for example, silicon resin or Teflon (registered trademark) resin. The sealing member 41 is clamped between the first annular outer wall portion 22 and the first annular inner wall portion 32, and the sealing member 42 is clamped between the second annular outer wall portion 23 and the second annular inner wall portion 33. Is done. In this way, the sealing members 41 and 42 seal the space between the outer cylinder 2 and the inner cylinder 3. A space between the sealed outer cylinder 2 and the inner cylinder 3 is evacuated between the outer cylinder 2 and the inner cylinder 3 by evacuating the space between the outer cylinder 2 and the inner cylinder 3 through the exhaust hole 24 provided on the side surface of the outer cylinder 2. A space 6 is formed.

  As shown in FIGS. 1 and 2, the first annular outer wall portion 22, the first annular inner wall portion 32, and the sealing member 41 are provided with a plurality of through holes 27, 37, 47 on the same circumference, respectively. Yes. The through holes 27, 37, and 47 overlap on the same axis and form a plurality of through holes 7 that penetrate from the first annular outer wall portion 22 to the first annular inner wall portion 32. Fixing tools 8 are inserted into the through holes 7 with a gap. That is, the fixture 8 is loosely inserted into the through hole 7. The fixture 8 clamps and fastens the outer cylinder 2 and the inner cylinder 3 so as to sandwich the outside of the first annular outer wall portion 22 and the inside of the first annular inner wall portion 32.

When the space between the sealed outer cylinder 2 and the inner cylinder 3 is evacuated by the vacuum pump 5 and depressurized, the outer cylinder 2 and the inner cylinder 3 are fastened by the fixture 8 in this manner, thereby sealing. The seal pressure applied to the member 41 is increased, the adhesion between the outer cylinder 2 and the inner cylinder 3 and the sealing member 41 is increased, and the exhaust can be efficiently performed.
Further, when a force is applied in a direction in which the outer cylinder 2 and the inner cylinder 3 are separated from each other, that is, when a force is applied to move the inner cylinder 3 in the positive x-axis direction, the outer cylinder 2 and the inner cylinder 3 are sealed. The member 41 is prevented from peeling off. For this reason, the formed vacuum space 6 can be prevented from being broken.

The fixture 8 includes a bolt 81, a nut 82, and two balls 83a and 83b.
The diameters of the balls 83a and 83b are larger than the inner diameter of the through-hole 7, and the balls 83a and 83b cannot be inserted through the through-hole 7. However, the outer diameter of the bolt 81 is sufficiently smaller than the inner diameter of the through-hole 7, 7 is inserted with a gap. That is, the bolt 81 is loosely inserted into the through hole 7. The inner diameter of the nut 82 is slightly larger than the outer diameter of the bolt 81, and the bolt 81 and the nut 82 are screwed together. The balls 83a and 83b are also provided with through holes substantially the same as the inner diameter of the nut 82, and the bolts 81 are inserted therethrough.

In the present embodiment, the bolt 81 is inserted through the ball 83a, the through hole 7, the ball 83b, and the nut 82 in this order. In the example shown in FIG. 1, the ball 83 b is disposed in contact with the first annular inner wall portion 32 so that the ball 83 a contacts the first annular outer wall portion 22.
When the bolt 81 and the nut 82 are tightened in this state, the balls 83a and 83b are brought into close contact with the first annular outer wall portion 22 and the first annular inner wall portion 32 while being in spherical contact with each other. In this way, the outer cylinder 2 and the inner cylinder 3 are clamped and fastened.

  In the above configuration, the outside of the outer cylinder 2 is outside air, and the accommodation space 30 inside the inner cylinder 3 is a space to be heated. That is, the outer cylinder 2 is in contact with the outside air, and the inner cylinder 3 is in contact with the accommodation space 30 that is a space to be heated. Here, the outer cylinder 2 and the inner cylinder 3 are in contact with each other via sealing members 41 and 42 formed of a material having a lower thermal conductivity than the outer cylinder 2 and the inner cylinder 3, and the outer cylinder 2 and the inner cylinder 3 are in contact with each other. A vacuum space 6 is formed between the two. For this reason, even when the inner cylinder 3 receives heat from the accommodation space 30, it is possible to suppress the heat of the inner cylinder 3 from being transmitted to the outer cylinder 2. That is, it is possible to insulate between the outside air and the accommodation space 30.

In addition, in order to further suppress the heat conduction between the outer cylinder 2 and the inner cylinder 3, it is preferable to use a material having a low thermal conductivity for the fixture 8. This is because the fixture 8 contacts both the outer cylinder 2 and the inner cylinder 3. For example, the balls 83a and 83b may be formed of a material having lower thermal conductivity than the outer cylinder 2 and the inner cylinder 3, such as silicon resin or Teflon (registered trademark) resin.
Further, for the purpose of further increasing the heat insulation effect between the outside air and the accommodation space 30, a reflective film such as a metal plate may be provided in the vacuum space 6 between the outer cylinder 2 and the inner cylinder 3. With this configuration, heat conduction due to radiation can be suppressed between the outer cylinder 2 and the inner cylinder 3.

  Here, the state of the heat insulating wall 1 for a heating furnace when heat treatment is performed in the accommodation space 30 will be described with reference to FIG. FIG. 3 is a schematic diagram for explaining a state in which the inner cylinder 3 receives heat from the accommodation space 30 of the heat insulating wall 1 for the heating furnace. It is. In FIG. 3, the alternate long and two short dashes line is an imaginary line that represents the position of the inner cylinder 3 before performing the heat treatment in the accommodation space 30.

  As shown in FIG. 3, the inner cylinder 3 that has received heat from the accommodation space 30 is thermally expanded so as to extend in the longitudinal direction while spreading in the radial direction. On the other hand, since the outer cylinder 2 is thermally insulated by the vacuum space 6 and the sealing members 41 and 42, it hardly receives heat and does not move due to thermal expansion. For this reason, the relative position of the inner cylinder 3 with respect to the outer cylinder 2 changes, and shearing stress is applied to the sealing members 41 and 42 in the radial direction. At this time, since the sealing members 41 and 42 are elastic bodies, they can be elastically deformed in the direction of stress and can be prevented from being damaged.

  When only the inner cylinder 3 expands with thermal expansion, a positional shift occurs between the through hole 37 of the inner cylinder 3 and the through hole 27 of the outer cylinder 2. At this time, since the ball 83 b is in spherical contact with the inner cylinder 3, the ball 83 b rotates while maintaining spherical contact with the inner cylinder 3 against a positional shift caused by thermal expansion of the inner cylinder 3. As described above, since the bolt 81 can be slightly tilted in the through-hole 7, the bolt 81, the nut 82, and the ball 83a can also move together as the ball 83b moves. In this way, since the fixture 8 can follow the thermally expanded inner cylinder 3, an excessive force is not applied to the inner cylinder 3 and the fixture 8, and deformation and breakage of the inner cylinder 3 and the fixture 8 are prevented. Can do.

  As described above, by providing the fixture 8 for fastening the outer cylinder 2 and the inner cylinder 3 so as to be in spherical contact with the outer cylinder 2 and the inner cylinder 3, a force is applied in a direction in which the outer cylinder 2 and the inner cylinder 3 are separated from each other. When the inner cylinder 3 is thermally expanded, deformation and breakage of the inner cylinder 3 and the fixture 8 can be prevented.

[Modification 1]
Hereinafter, with reference to FIG. 4, the modification 1 in the heat insulation wall 1 for heating furnaces is demonstrated. FIG. 4 is a partial view when the periphery of the fixture 8a of the heat insulating wall 1a for the heating furnace according to the first modification is cut along the longitudinal direction.
In addition, the same code | symbol is attached | subjected to the part which is common in embodiment mentioned above, and the description is abbreviate | omitted.

  As shown in FIG. 4, the fixture 8 a includes a bolt 81 and a nut 82. Further, the first annular outer wall portion 22 is formed with a convex surface portion 84 a that is formed in a spherical shape around the through hole 27, and is in spherical contact with the head of the bolt 81. Further, the first annular inner wall portion 32 is formed with a convex surface portion 84 b bulging around the through hole 37 in a spherical shape, and is in spherical contact with the nut 82.

When the bolt 81 and the nut 82 are tightened in this state, they are brought into close contact with the convex surface portion 84a and the convex surface portion 84b while being in spherical contact with each other. In this way, the outer cylinder 2 and the inner cylinder 3 are clamped and fastened.
By fastening the outer cylinder 2 and the inner cylinder 3 with the fixture 8a, the sealing pressure applied to the sealing member 41 is increased, and the adhesion between the outer cylinder 2 and the inner cylinder 3 and the sealing member 41 is increased, It is possible to exhaust efficiently. Further, when a force is applied in a direction in which the outer cylinder 2 and the inner cylinder 3 are separated from each other, that is, when a force is applied to move the inner cylinder 3 in the positive x-axis direction, the outer cylinder 2 and the inner cylinder 3 are sealed. The member 41 is prevented from peeling off. For this reason, the formed vacuum space 6 can be prevented from being broken.

  Here, the state of the heat insulating wall 1a for the heating furnace according to the modified example 1 when the heat treatment is performed in the accommodation space 30 will be described with reference to FIG. FIG. 5 is a schematic diagram for explaining a state in which the inner cylinder 3 receives heat from the accommodation space 30 of the heat insulating wall 1a for the heating furnace. In FIG. 5, the alternate long and two short dashes line is an imaginary line that represents the position of the inner cylinder 3 before performing the heat treatment in the accommodation space 30.

As shown in FIG. 5, the inner cylinder 3 that has received heat from the accommodation space 30 is thermally expanded so as to extend in the longitudinal direction while spreading in the radial direction. On the other hand, since the outer cylinder 2 is thermally insulated by the vacuum space 6 and the sealing members 41 and 42, it hardly receives heat and does not move due to thermal expansion. For this reason, a positional shift occurs between the through hole 37 of the inner cylinder 3 and the through hole 27 of the outer cylinder 2.
At this time, since the nut 82 is in spherical contact with the inner cylinder 3 via the convex surface portion 84b, the spherical contact with the through hole 37 of the inner cylinder 3 is maintained against the positional shift caused by the thermal expansion of the inner cylinder 3. To follow. Since the bolt 81 can be slightly tilted in the through hole 7, the bolt 81 can also move integrally with the movement of the convex surface portion 84 b and the nut 82. Thus, since the fixing tool 8a can follow the thermally expanded inner cylinder 3, an excessive force is not applied to the inner cylinder 3 and the fixing tool 8a, and deformation of the inner cylinder 3 and the fixing tool 8a can be prevented. .

[Modification 2]
Next, with reference to FIG. 6, the modification 2 in the heat insulation wall 1 for heating furnaces is demonstrated. FIG. 6 is a partial view when the periphery of the fixture 8b of the heat insulating wall 1b for the heating furnace according to the second modification is cut along the longitudinal direction.
In addition, the same code | symbol is attached | subjected to the part which is common in embodiment mentioned above, and the description is abbreviate | omitted.

As shown in FIG. 6, the fixture 8 b includes a spherical bolt 85 and a spherical nut 86.
The outer diameter of the ball bolt 85 is sufficiently smaller than the inner diameter of the through hole 7, and the ball bolt 85 is inserted into the through hole 7 with a gap. That is, the ball bolt 85 is loosely inserted into the through hole 7. The inner diameter of the spherical nut 86 is slightly larger than the outer diameter of the spherical bolt 85, and the spherical bolt 85 and the spherical nut 86 are screwed together.
The head of the spherical bolt 85 is in spherical contact with the first annular outer wall 22, and the spherical nut 86 is in spherical contact with the first annular inner wall 32.

When the spherical bolt 85 and the spherical nut 86 are tightened in this state, they are brought into close contact with the first annular outer wall portion 22 and the first annular inner wall portion 32 while being in spherical contact with each other. In this way, the outer cylinder 2 and the inner cylinder 3 are clamped and fastened.
By fastening the outer cylinder 2 and the inner cylinder 3 with the fixture 8b, the sealing pressure applied to the sealing member 41 is increased, and the adhesion between the outer cylinder 2 and the inner cylinder 3 and the sealing member 41 is increased, It is possible to exhaust efficiently. Further, when a force is applied in a direction in which the outer cylinder 2 and the inner cylinder 3 are separated from each other, that is, when a force is applied to move the inner cylinder 3 in the positive x-axis direction, the outer cylinder 2 and the inner cylinder 3 are sealed. The member 41 is prevented from peeling off. For this reason, the formed vacuum space 6 can be prevented from being broken.

  Here, the state of the heat insulating wall 1b for the heating furnace according to the modified example 2 when the heat treatment is performed in the accommodation space 30 will be described with reference to FIG. FIG. 7 is a schematic diagram illustrating a state in which the inner cylinder 3 receives heat from the accommodation space 30 of the heat insulating wall 1b for the heating furnace. In FIG. 7, the alternate long and two short dashes line is an imaginary line that represents the position of the inner cylinder 3 before performing the heat treatment in the accommodation space 30.

As shown in FIG. 7, the inner cylinder 3 that has received heat from the accommodation space 30 is thermally expanded so as to extend in the longitudinal direction while spreading in the radial direction. On the other hand, since the outer cylinder 2 is thermally insulated by the vacuum space 6 and the sealing members 41 and 42, it hardly receives heat and does not move due to thermal expansion. For this reason, a positional shift occurs between the through hole 37 of the inner cylinder 3 and the through hole 27 of the outer cylinder 2.
At this time, since the spherical nut 86 is in spherical contact with the inner cylinder 3, it follows the position shift caused by the thermal expansion of the inner cylinder 3 so as to keep the spherical contact with the through hole 37 of the inner cylinder 3. Since the ball bolt 85 can be slightly tilted in the through hole 7, the ball bolt 85 can also move integrally with the movement of the inner cylinder 3 and the spherical nut 86. Thus, since the fixing tool 8b can follow the thermally expanded inner cylinder 3, an excessive force is not applied to the inner cylinder 3 and the fixing tool 8b, and deformation of the inner cylinder 3 and the fixing tool 8b can be prevented. .

  Also in the first and second modifications, the outer cylinder 2 and the inner cylinder are provided by providing the fixtures 8a and 8b for fastening the outer cylinder 2 and the inner cylinder 3 so as to be in spherical contact with the outer cylinder 2 and the inner cylinder 3. When a force is applied in a direction in which the inner cylinder 3 is separated, the vacuum space 6 is prevented from being broken by vacuum, and when the inner cylinder 3 is thermally expanded, deformation and breakage of the inner cylinder 3 and the fixtures 8a and 8b can be prevented.

[Modification 3]
Next, with reference to FIG. 8, the modification 3 in the heat insulation wall 1 for heating furnaces is demonstrated. FIG. 8 is a transverse cross-sectional view of the heat insulating wall 1c for a heating furnace according to the modification 3 cut along a cut surface corresponding to FIG.
In addition, the same code | symbol is attached | subjected to the part which is common in embodiment mentioned above, and the description is abbreviate | omitted.

  As shown in FIG. 8, an annular sealing member 41 c is sandwiched between the outer cylinder 2 and the inner cylinder 3 instead of the sealing member 41 in FIG. 2. Unlike the sealing member 41, the sealing member 41c does not have a through hole into which the fixture 8 is loosely inserted. A plurality of through-holes 7 formed by overlapping the through-holes 27 and the through-holes 37 on the same axis are arranged on the same circumference inside the sealing member 41c. Fixing tools 8 are loosely inserted into the through holes 7 respectively.

  In the configuration of the third modification, the sealing member 41 c does not have a through hole for allowing the fixing tool 8 to be loosely inserted, and therefore it is necessary to position the sealing member 41 c with respect to the through hole 27 and the through hole 37. There is no advantage.

[Modification 4]
Next, with reference to FIG. 9, the modification 4 in the heat insulation wall 1 for heating furnaces is demonstrated. FIG. 9 is a cross-sectional view of the heat-insulating wall 1d for a heating furnace according to the modified example 4 cut along a cut surface corresponding to FIG.
In addition, the same code | symbol is attached | subjected to the part which is common in embodiment mentioned above, and the description is abbreviate | omitted.

  As shown in FIG. 9, an annular sealing member 41 d smaller than the sealing member 41 c is sandwiched between the outer cylinder 2 and the inner cylinder 3 inside the sealing member 41 c shown in Modification 3. Has been. Similar to the sealing member 41c, the sealing member 41d does not have a through hole into which the fixture 8 is loosely inserted. A plurality of through holes 7 formed by overlapping the through holes 27 and the through holes 37 on the same axis are arranged on the same circumference inside the sealing member 41c and outside the sealing member 41d. Fixing tools 8 are loosely inserted into the through holes 7 respectively.

  Also in the configuration of the modified example 4, since the sealing member 41d does not have a through hole for allowing the fixture 8 to be loosely inserted, it is necessary to position the sealing member 41d with respect to the through hole 27 and the through hole 37. Absent. Further, since the area of the elastic body sandwiched between the outer cylinder 2 and the inner cylinder 3 is increased as compared with the configuration of the third modification, the outer cylinder 2 and the inner cylinder 3 can be tightened more firmly. Can do.

  Note that the present invention is not limited to the above-described embodiment, and can be changed as appropriate without departing from the spirit of the present invention.

1, 1a, 1b, 1c, 1d Heat-insulating wall for heating furnace 2 Outer cylinder 3 Inner cylinder 5 Vacuum pump 6 Vacuum space 7 Through-hole 8, 8a, 8b Fixture 21 Cylindrical part 22 First annular outer wall part 23 Second annular outer wall Portion 24 Exhaust hole 27, 37, 47 Through hole 30 Storage space 31 Tube portion 32 First annular inner wall portion 33 Second annular inner wall portion 41, 41c, 41d, 42 Sealing member 81 Bolt 82 Nut 83a, 83b Ball 84a, 84b Convex part 85 Ball bolt 86 Spherical nut

Claims (1)

An outer cylinder,
An inner cylinder disposed inside the outer cylinder;
A sealing member that seals a reduced pressure space between the outer cylinder and the inner cylinder by being sandwiched between the outer cylinder and the inner cylinder;
A fixing tool for clamping and fastening the outer cylinder and the inner cylinder,
The fixture is loosely inserted into through holes provided in the outer cylinder and the inner cylinder via the sealing member, and is in spherical contact with the outer cylinder and the inner cylinder, While sandwiching and fastening the outer cylinder and the inner cylinder, it is possible to follow the positional deviation between the through hole of the inner cylinder and the through hole of the outer cylinder, which is caused by thermal expansion of the inner cylinder.
Heat insulation wall structure for heating furnace.

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