JP2018533034A5 - - Google Patents
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- Publication number
- JP2018533034A5 JP2018533034A5 JP2018507668A JP2018507668A JP2018533034A5 JP 2018533034 A5 JP2018533034 A5 JP 2018533034A5 JP 2018507668 A JP2018507668 A JP 2018507668A JP 2018507668 A JP2018507668 A JP 2018507668A JP 2018533034 A5 JP2018533034 A5 JP 2018533034A5
- Authority
- JP
- Japan
- Prior art keywords
- optical assembly
- light absorber
- optical
- optical element
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims 24
- 239000006096 absorbing agent Substances 0.000 claims 11
- 239000002318 adhesion promoter Substances 0.000 claims 6
- 239000000853 adhesive Substances 0.000 claims 6
- 230000001070 adhesive effect Effects 0.000 claims 6
- 230000004888 barrier function Effects 0.000 claims 6
- 239000011248 coating agent Substances 0.000 claims 6
- 238000000576 coating method Methods 0.000 claims 6
- 239000000463 material Substances 0.000 claims 5
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims 4
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 claims 3
- 239000011651 chromium Substances 0.000 claims 3
- 229910004261 CaF 2 Inorganic materials 0.000 claims 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical group [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims 2
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 claims 2
- 229910052782 aluminium Inorganic materials 0.000 claims 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 2
- 229910052804 chromium Inorganic materials 0.000 claims 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims 2
- 229910052737 gold Inorganic materials 0.000 claims 2
- 239000010931 gold Substances 0.000 claims 2
- 229910052735 hafnium Inorganic materials 0.000 claims 2
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 claims 2
- 229910052742 iron Inorganic materials 0.000 claims 2
- WPBNNNQJVZRUHP-UHFFFAOYSA-L manganese(2+);methyl n-[[2-(methoxycarbonylcarbamothioylamino)phenyl]carbamothioyl]carbamate;n-[2-(sulfidocarbothioylamino)ethyl]carbamodithioate Chemical compound [Mn+2].[S-]C(=S)NCCNC([S-])=S.COC(=O)NC(=S)NC1=CC=CC=C1NC(=S)NC(=O)OC WPBNNNQJVZRUHP-UHFFFAOYSA-L 0.000 claims 2
- 150000001247 metal acetylides Chemical class 0.000 claims 2
- 238000000034 method Methods 0.000 claims 2
- 229910052759 nickel Inorganic materials 0.000 claims 2
- 229910052758 niobium Inorganic materials 0.000 claims 2
- 239000010955 niobium Substances 0.000 claims 2
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 claims 2
- 150000004767 nitrides Chemical class 0.000 claims 2
- 229910052709 silver Inorganic materials 0.000 claims 2
- 239000004332 silver Substances 0.000 claims 2
- 229910052715 tantalum Inorganic materials 0.000 claims 2
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims 2
- 229910052719 titanium Inorganic materials 0.000 claims 2
- 239000010936 titanium Substances 0.000 claims 2
- 229910052725 zinc Inorganic materials 0.000 claims 2
- 239000011701 zinc Substances 0.000 claims 2
- 230000003667 anti-reflective effect Effects 0.000 claims 1
- 230000015556 catabolic process Effects 0.000 claims 1
- 239000003795 chemical substances by application Substances 0.000 claims 1
- 238000006731 degradation reaction Methods 0.000 claims 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201562206521P | 2015-08-18 | 2015-08-18 | |
| US62/206,521 | 2015-08-18 | ||
| PCT/US2016/047298 WO2017031179A1 (en) | 2015-08-18 | 2016-08-17 | Coating with adhesion layer for uv optics |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2018533034A JP2018533034A (ja) | 2018-11-08 |
| JP2018533034A5 true JP2018533034A5 (cg-RX-API-DMAC7.html) | 2019-09-26 |
Family
ID=56801828
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2018507668A Pending JP2018533034A (ja) | 2015-08-18 | 2016-08-17 | 紫外線用光学素子のための接着層を備えたコーティング |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US10578785B2 (cg-RX-API-DMAC7.html) |
| EP (1) | EP3338127A1 (cg-RX-API-DMAC7.html) |
| JP (1) | JP2018533034A (cg-RX-API-DMAC7.html) |
| WO (1) | WO2017031179A1 (cg-RX-API-DMAC7.html) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102017213065B3 (de) | 2017-04-13 | 2018-07-05 | Christian-Albrechts-Universität Zu Kiel | Verfahren zur Herstellung von plankonvexen Linsenelementen und zur Herstellung eines gehäusten Bauelements auf Waferebene |
| TWI676852B (zh) * | 2018-10-31 | 2019-11-11 | 白金科技股份有限公司 | 遮光片 |
| EP4314910B1 (en) * | 2021-03-23 | 2025-04-16 | Corning Incorporated | Capped blocking coating for laser optics |
| DE102024108625A1 (de) | 2023-03-27 | 2024-10-02 | Nichia Corporation | Lichtemittierende vorrichtung |
Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2996502B2 (ja) | 1990-10-01 | 2000-01-11 | キヤノン株式会社 | 現像剤量検出方法及び画像形成装置 |
| US5593852A (en) * | 1993-12-02 | 1997-01-14 | Heller; Adam | Subcutaneous glucose electrode |
| DE19733490C1 (de) * | 1997-08-01 | 1999-02-25 | Zeiss Carl Fa | Optik-Fassung mit UV-Kleber und Schutzschicht |
| US7081278B2 (en) | 2002-09-25 | 2006-07-25 | Asml Holdings N.V. | Method for protection of adhesives used to secure optics from ultra-violet light |
| NL1024722C2 (nl) | 2002-11-07 | 2005-12-23 | Corning Inc | Laag uitgassend rubberachtig polymeermateriaal dat hardbaar is door een licht- of elektronenbundel, alsmede de bereiding en het gebruik daarvan. |
| US7232595B2 (en) | 2002-11-07 | 2007-06-19 | Corning Incorporated | Device comprising low outgassing photo or electron beam cured rubbery polymer material |
| US20060033984A1 (en) | 2004-08-10 | 2006-02-16 | Carl Zeiss Smt Ag | Optical mount with UV adhesive and protective layer |
| KR101240775B1 (ko) * | 2006-09-12 | 2013-03-07 | 칼 짜이스 에스엠테 게엠베하 | 소수성 코팅을 갖는 액침 리소그래피용 광학 장치 및 이를 포함하는 투영 노광 장치 |
| US8335045B2 (en) | 2010-02-24 | 2012-12-18 | Corning Incorporated | Extending the stability of UV curable adhesives in 193NM laser systems |
| DE102014108058A1 (de) * | 2014-06-06 | 2015-12-17 | Schott Ag | Optisches Element mit hoher Kratzbeständigkeit |
| CN104114359B (zh) * | 2012-01-13 | 2018-01-09 | 日本化药株式会社 | 光学构件及用于制造该光学构件的紫外线固化型胶粘剂 |
| JP6060636B2 (ja) * | 2012-01-30 | 2017-01-18 | 旭硝子株式会社 | Ｅｕｖリソグラフィ用反射型マスクブランク、および、ｅｕｖリソグラフィ用反射型マスク |
| US9144938B2 (en) * | 2012-08-06 | 2015-09-29 | Apple Inc. | Methods for attaching structures using ultraviolet and visible light curing adhesive |
| US9958579B2 (en) | 2013-09-06 | 2018-05-01 | Corning Incorporated | UV protective coating for lens assemblies having protective layer between light absorber and adhesive |
-
2016
- 2016-08-05 US US15/229,779 patent/US10578785B2/en active Active
- 2016-08-17 EP EP16757442.5A patent/EP3338127A1/en not_active Withdrawn
- 2016-08-17 JP JP2018507668A patent/JP2018533034A/ja active Pending
- 2016-08-17 WO PCT/US2016/047298 patent/WO2017031179A1/en not_active Ceased