JP2018524190A5 - - Google Patents
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- Publication number
- JP2018524190A5 JP2018524190A5 JP2017566716A JP2017566716A JP2018524190A5 JP 2018524190 A5 JP2018524190 A5 JP 2018524190A5 JP 2017566716 A JP2017566716 A JP 2017566716A JP 2017566716 A JP2017566716 A JP 2017566716A JP 2018524190 A5 JP2018524190 A5 JP 2018524190A5
- Authority
- JP
- Japan
- Prior art keywords
- pressing surface
- finishing
- shape
- pressing
- circumferential surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000006185 dispersion Substances 0.000 description 1
Description
即ち、特に、互いに依存せずに膨張可能な複数の膨張チャンバを設け、これら膨張チャンバによって、一部材で連続的な押付け面のプロフィルを、半径方向の変形によって変更し得ることが、企図されている。従って、仕上げベルトを半径方向の周面に押し付ける押付けシューの押付け面の形状を、少なくとも局所的に変更し得ることが達成でき、これは、周面に作用する仕上げベルトの圧力が局所的に影響可能であることに帰結する。従って、押付け面にわたる圧力の分散を適切に設定することが可能であり、これにより、加工すべきワークピース部分の仕上げ加工によって達成可能な形状が影響可能である。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102015008814.9A DE102015008814A1 (de) | 2015-07-10 | 2015-07-10 | Andrückschuh mit Expansionskammer |
DE102015008814.9 | 2015-07-10 | ||
PCT/EP2016/066123 WO2017009169A1 (de) | 2015-07-10 | 2016-07-07 | Andrückschuh mit expansionskammer |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2018524190A JP2018524190A (ja) | 2018-08-30 |
JP2018524190A5 true JP2018524190A5 (ja) | 2019-05-09 |
Family
ID=56404107
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2017566716A Pending JP2018524190A (ja) | 2015-07-10 | 2016-07-07 | 膨張チャンバを有する押付けシュー |
Country Status (6)
Country | Link |
---|---|
US (1) | US10589396B2 (ja) |
EP (1) | EP3319756B1 (ja) |
JP (1) | JP2018524190A (ja) |
DE (1) | DE102015008814A1 (ja) |
TR (1) | TR201909261T4 (ja) |
WO (1) | WO2017009169A1 (ja) |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3167889A (en) * | 1962-02-07 | 1965-02-02 | Walter Jacobi & Sons Inc | Apparatus for finishing wood and the like |
US4084356A (en) * | 1976-06-01 | 1978-04-18 | Macmillan Bloedel Limited | Method of finishing a random contoured surface |
US4527359A (en) * | 1984-04-23 | 1985-07-09 | Timesavers, Inc. | Segmented platen with diaphragm cylinder control |
DE3643914A1 (de) * | 1986-12-22 | 1988-06-30 | Zeiss Carl Fa | Verfahren und vorrichtung zum laeppen bzw. polieren optischer flaechen |
US5230184A (en) * | 1991-07-05 | 1993-07-27 | Motorola, Inc. | Distributed polishing head |
DE59700607D1 (de) | 1996-04-19 | 1999-12-02 | Thielenhaus Ernst Gmbh & Co Kg | Vorrichtung für die Feinschleifbearbeitung von Wellen, insbesondere Kurbelwellen |
DE19650155C1 (de) * | 1996-12-04 | 1998-06-25 | Supfina Grieshaber Gmbh & Co | Bearbeitungsvorrichtung |
DE19738818B4 (de) * | 1997-09-05 | 2005-03-24 | Institut für Werkzeugmaschinen und Fertigungstechnik TU Braunschweig | Verfahren und Vorrichtung zur formgeregelten Feinstbearbeitung eines Werkstücks |
US6607425B1 (en) * | 2000-12-21 | 2003-08-19 | Lam Research Corporation | Pressurized membrane platen design for improving performance in CMP applications |
JP4193513B2 (ja) | 2003-02-14 | 2008-12-10 | 日産自動車株式会社 | ラッピング加工装置 |
TW575085U (en) * | 2003-06-06 | 2004-02-01 | Yu-Chau Jau | Fine adjustable hydraulic driving apparatus |
KR101236855B1 (ko) | 2005-12-09 | 2013-02-26 | 어플라이드 머티어리얼스, 인코포레이티드 | 기판 처리 방법 및 장치 |
US7335088B1 (en) * | 2007-01-16 | 2008-02-26 | Taiwan Semiconductor Manufacturing Company, Ltd. | CMP system with temperature-controlled polishing head |
FR2913904B1 (fr) * | 2007-03-21 | 2009-07-17 | Renault Soc Par Actions Simpli | Machoires asservies localement pour le toilage de portees |
DE102007051047B4 (de) * | 2007-10-16 | 2023-03-23 | Nagel Maschinen- Und Werkzeugfabrik Gmbh | Andrückeinrichtung für Finishband sowie Vorrichtung und Verfahren zur Finishbearbeitung von Umfangsflächen an zylindrischen Werkstückabschnitten |
-
2015
- 2015-07-10 DE DE102015008814.9A patent/DE102015008814A1/de not_active Withdrawn
-
2016
- 2016-07-07 EP EP16736852.1A patent/EP3319756B1/de active Active
- 2016-07-07 WO PCT/EP2016/066123 patent/WO2017009169A1/de active Application Filing
- 2016-07-07 US US15/741,956 patent/US10589396B2/en not_active Expired - Fee Related
- 2016-07-07 JP JP2017566716A patent/JP2018524190A/ja active Pending
- 2016-07-07 TR TR2019/09261T patent/TR201909261T4/tr unknown
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