JP2018524190A5 - - Google Patents

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Publication number
JP2018524190A5
JP2018524190A5 JP2017566716A JP2017566716A JP2018524190A5 JP 2018524190 A5 JP2018524190 A5 JP 2018524190A5 JP 2017566716 A JP2017566716 A JP 2017566716A JP 2017566716 A JP2017566716 A JP 2017566716A JP 2018524190 A5 JP2018524190 A5 JP 2018524190A5
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JP
Japan
Prior art keywords
pressing surface
finishing
shape
pressing
circumferential surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2017566716A
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English (en)
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JP2018524190A (ja
Filing date
Publication date
Priority claimed from DE102015008814.9A external-priority patent/DE102015008814A1/de
Application filed filed Critical
Publication of JP2018524190A publication Critical patent/JP2018524190A/ja
Publication of JP2018524190A5 publication Critical patent/JP2018524190A5/ja
Pending legal-status Critical Current

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Description

即ち、特に、互いに依存せずに膨張可能な複数の膨張チャンバを設け、これら膨張チャンバによって、一部材で連続的な押付け面のプロフィルを、半径方向の変形によって変更し得ることが、企図されている。従って、仕上げベルトを半径方向の周面に押し付ける押付けシューの押付け面の形状を、少なくとも局所的に変更し得ることが達成でき、これは、周面に作用する仕上げベルトの圧力が局所的に影響可能であることに帰結する。従って、押付け面にわたる圧力の分散を適切に設定することが可能であり、これにより、加工すべきワークピース部分の仕上げ加工によって達成可能な形状が影響可能である。
JP2017566716A 2015-07-10 2016-07-07 膨張チャンバを有する押付けシュー Pending JP2018524190A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102015008814.9A DE102015008814A1 (de) 2015-07-10 2015-07-10 Andrückschuh mit Expansionskammer
DE102015008814.9 2015-07-10
PCT/EP2016/066123 WO2017009169A1 (de) 2015-07-10 2016-07-07 Andrückschuh mit expansionskammer

Publications (2)

Publication Number Publication Date
JP2018524190A JP2018524190A (ja) 2018-08-30
JP2018524190A5 true JP2018524190A5 (ja) 2019-05-09

Family

ID=56404107

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2017566716A Pending JP2018524190A (ja) 2015-07-10 2016-07-07 膨張チャンバを有する押付けシュー

Country Status (6)

Country Link
US (1) US10589396B2 (ja)
EP (1) EP3319756B1 (ja)
JP (1) JP2018524190A (ja)
DE (1) DE102015008814A1 (ja)
TR (1) TR201909261T4 (ja)
WO (1) WO2017009169A1 (ja)

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3167889A (en) * 1962-02-07 1965-02-02 Walter Jacobi & Sons Inc Apparatus for finishing wood and the like
US4084356A (en) * 1976-06-01 1978-04-18 Macmillan Bloedel Limited Method of finishing a random contoured surface
US4527359A (en) * 1984-04-23 1985-07-09 Timesavers, Inc. Segmented platen with diaphragm cylinder control
DE3643914A1 (de) * 1986-12-22 1988-06-30 Zeiss Carl Fa Verfahren und vorrichtung zum laeppen bzw. polieren optischer flaechen
US5230184A (en) * 1991-07-05 1993-07-27 Motorola, Inc. Distributed polishing head
DE59700607D1 (de) 1996-04-19 1999-12-02 Thielenhaus Ernst Gmbh & Co Kg Vorrichtung für die Feinschleifbearbeitung von Wellen, insbesondere Kurbelwellen
DE19650155C1 (de) * 1996-12-04 1998-06-25 Supfina Grieshaber Gmbh & Co Bearbeitungsvorrichtung
DE19738818B4 (de) * 1997-09-05 2005-03-24 Institut für Werkzeugmaschinen und Fertigungstechnik TU Braunschweig Verfahren und Vorrichtung zur formgeregelten Feinstbearbeitung eines Werkstücks
US6607425B1 (en) * 2000-12-21 2003-08-19 Lam Research Corporation Pressurized membrane platen design for improving performance in CMP applications
JP4193513B2 (ja) 2003-02-14 2008-12-10 日産自動車株式会社 ラッピング加工装置
TW575085U (en) * 2003-06-06 2004-02-01 Yu-Chau Jau Fine adjustable hydraulic driving apparatus
KR101236855B1 (ko) 2005-12-09 2013-02-26 어플라이드 머티어리얼스, 인코포레이티드 기판 처리 방법 및 장치
US7335088B1 (en) * 2007-01-16 2008-02-26 Taiwan Semiconductor Manufacturing Company, Ltd. CMP system with temperature-controlled polishing head
FR2913904B1 (fr) * 2007-03-21 2009-07-17 Renault Soc Par Actions Simpli Machoires asservies localement pour le toilage de portees
DE102007051047B4 (de) * 2007-10-16 2023-03-23 Nagel Maschinen- Und Werkzeugfabrik Gmbh Andrückeinrichtung für Finishband sowie Vorrichtung und Verfahren zur Finishbearbeitung von Umfangsflächen an zylindrischen Werkstückabschnitten

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