JP2018202701A - Optical device manufacturing method - Google Patents

Abstract

To achieve an optical member mounted on a closure using an adhesive while being corrected.SOLUTION: The optical device manufacturing method comprises: a straightening step for forming an enclosure corrected state 110, in which correction force F1 is applied to a lengthy enclosure 58 to correct the enclosure 58 with respect to a jig 102 in a state where the enclosure 58 having an optical member 54 inserted into an opening part 74 thereof is mounted on the jig 102, and an optical member corrected state 116 in which clamping force F2 for pinching the enclosure in a short direction TH is applied to the enclosure 58 to correct the optical member 54 with respect to the enclosure 58; and a fixing step of fixing the optical member 54 to the enclosure 58 using an adhesive 82 in the optical member corrected state 116.SELECTED DRAWING: Figure 11

Description

  The present invention relates to a method for manufacturing an optical device.

  Patent Document 1 discloses a housing having a rectangular frame body into which a rod optical member is inserted above a head substrate on which a plurality of light emitting element array chips are linearly arranged in the main scanning direction. An optical printer head is described.

JP 2002-225339 A

  An object of the present invention is to obtain an optical device in which an optical member is attached to a casing using an adhesive in a corrected state.

  The method of manufacturing an optical device according to claim 1 is characterized in that, in a state in which a long casing having an optical member inserted into an opening is attached to a jig, a correction force is applied to the casing, and the casing is attached to the casing. A correction process for forming a housing correction state for correcting the jig, and an optical member correction state for correcting the optical member with respect to the housing by applying a clamping force to the housing from a short direction. And a fixing step of fixing the optical member to the housing with an adhesive in the optical member correction state.

  In the manufacturing method of the optical device according to claim 2, the correction step forms the optical member correction state after forming the casing correction state.

  In the manufacturing method of the optical device according to claim 3, the correction step forms the optical member correction state after releasing the correction force after forming the casing correction state.

  In the method of manufacturing an optical device according to a fourth aspect, the correction step forms the optical member correction state while maintaining the casing correction state.

  6. The method of manufacturing an optical device according to claim 5, wherein the correction step includes applying a pressing force that generates the correction force and the clamping force as a component force to both side portions in the short direction of the casing, and correcting the casing. And the optical member correction state is formed.

  In the method of manufacturing an optical device according to claim 6, in the correction step, the correction force and the clamping force are separated by applying a pressing force in a direction intersecting the inclined surfaces formed on the both side portions of the casing. As a force.

  In the method of manufacturing an optical device according to the first aspect, an optical member attached to the housing using an adhesive in a corrected state can be obtained.

  In the method for manufacturing the optical device according to the second aspect, it is possible to suppress the correction failure of the optical member as compared with the case where the casing is sandwiched from the short side in a state of being displaced with respect to the jig.

  In the method of manufacturing the optical device according to the third aspect, it is possible to suppress the correction failure of the optical member with a small clamping force as compared with the case where the correction force is not released after the housing correction state is formed.

  In the method of manufacturing the optical device according to the fourth aspect, the positional accuracy of the optical member with respect to the casing can be increased as compared with the case where the optical member correction state is formed after the casing correction state is released.

  In the method of manufacturing the optical device according to the fifth aspect, the configuration can be simplified as compared with the case of using the mechanism for forming the casing correction state and the mechanism for forming the optical member correction state.

  In the method of manufacturing the optical device according to the sixth aspect, the configuration can be simplified as compared with the case where the housing is pushed obliquely.

1 is a schematic configuration diagram illustrating an image forming apparatus according to a first embodiment. It is the perspective view which showed the exposure apparatus which concerns on 1st embodiment. 1 is an exploded perspective view showing an exposure apparatus according to a first embodiment. It is AA sectional drawing of FIG. It is a side view which shows the manufacturing apparatus which concerns on 1st embodiment. It is BB sectional drawing of FIG. It is a perspective view which shows the manufacturing apparatus which concerns on 1st embodiment. (A) is a side view which shows the state which the shift | offset | difference produced in the housing | casing set to the jig | tool, (B) is CC sectional drawing of FIG. 8 (A). (A) is a side view which shows the state in which the housing | casing with a curvature was set to the jig | tool, (B) is DD sectional drawing of FIG. 9 (A). It is explanatory drawing which shows a mode that an optical member is corrected with the housing | casing which the shift | offset | difference produced, and the housing | casing with curvature. It is a side view which shows the housing | casing correction state of the correction process which concerns on 1st embodiment. It is sectional drawing which shows the state which filled the housing | casing which concerns on 1st embodiment with the adhesive agent. It is a side view which shows the optical member correction state of the correction process which concerns on 1st embodiment. It is explanatory drawing which shows the state which apply | coated sealing agent to the housing | casing which concerns on 1st embodiment, and attached the mounting board | substrate. It is explanatory drawing which shows the correction process which concerns on 2nd embodiment. It is explanatory drawing which shows the correction process which concerns on 3rd embodiment. It is explanatory drawing which shows the correction process which concerns on 4th embodiment. It is explanatory drawing which shows the correction process which concerns on 5th embodiment.

<First embodiment>
Hereinafter, the manufacturing method of the optical device according to the first embodiment will be described with reference to FIGS.

  FIG. 1 is a schematic diagram illustrating an image forming apparatus 10 according to the present embodiment, and the image forming apparatus 10 is an apparatus that forms an image on a long medium. In the drawing, an arrow H indicates the vertical direction of the apparatus (vertical direction), an arrow W indicates the apparatus width direction (horizontal direction), and an arrow D indicates the depth direction of the apparatus (horizontal direction).

(overall structure)
The apparatus main body 10A of the image forming apparatus 10 includes an endless belt-like intermediate transfer member that constitutes a transfer unit 32, is stretched around a plurality of rollers 12, and is circulated in the direction of arrow A by driving a motor (not shown). A belt 14 is provided.

  The image forming apparatus 10 corresponds to the formation of a color image, and forms an image forming unit that forms toner images corresponding to four colors of yellow (Y), magenta (M), cyan (C), and black (K). 28Y, 28M, 28C, and 28K are disposed along the circumferential direction of the intermediate transfer belt 14, and are detachably supported by the apparatus main body 10A.

  In addition, about the member provided in each color, the alphabet (Y / M / C / K) which shows each color is attached | subjected to the end of a code | symbol, but when it demonstrates without distinguishing especially a color, this The explanation will be made by omitting the alphabet at the end.

[Image forming unit]
The image forming unit 28 includes an image carrier 16 that is rotated clockwise by a driving unit including a motor and a gear (not shown). Further, a charging roller 18 that uniformly charges the surface of the image carrier 16 to a predetermined potential is disposed on the peripheral surface of the image carrier 16.

  An exposure device 20 that irradiates light onto the image carrier 16 to form an electrostatic latent image is formed in the axial direction of the image carrier 16 on the downstream side of the charging roller 18 in the rotation direction of the image carrier 16. It extends. The exposure apparatus 20 forms an electrostatic latent image on the image carrier 16 by irradiating the image carrier 16 with a light beam according to the image data. Details of the exposure apparatus 20 will be described later.

  Further, on the downstream side of the exposure device 20 in the rotation direction of the image carrier 16, the electrostatic latent image formed on the image carrier 16 is developed with toner of a predetermined color (yellow / magenta / cyan / black). A developing device 22 for forming a toner image is disposed.

[Transfer unit]
On the downstream side of the developing device 22 in the rotation direction of the image carrier 16, a transfer roller 30 constituting the transfer unit 32 is disposed on the opposite side of the image carrier 16 with the intermediate transfer belt 14 interposed therebetween.

  On the other hand, a transfer device 34 including two rollers 34 </ b> A and 34 </ b> B facing each other is disposed downstream of the image carrier 16 of each color in the circumferential direction of the intermediate transfer belt 14. Then, it is taken out from the paper tray 36 provided at the bottom of the image forming apparatus 10 and formed on the intermediate transfer body belt 14 on a sheet member P as a recording medium which is conveyed between the rollers 34A and 34B. The final toner image is transferred.

[Fusing unit]
Further, a fixing device 40 is provided in the conveyance path of the sheet member P to which the final toner image has been transferred. The sheet member P conveyed to the fixing device 40 is nipped and conveyed by the heating roller 40A and the pressure roller 40B, so that the toner on the sheet member P melts and is pressed against the sheet member P to be pressed. To be established.

(Operation of the overall configuration)
In the image forming apparatus 10, an image is formed as follows.

  First, the charging roller 18 uniformly negatively charges the surface of the image carrier 16 with a predetermined charging portion potential. Further, exposure is performed by the exposure device 20 so that the image portion on the charged image carrier 16 has a predetermined exposure portion potential, and an electrostatic latent image is formed on the image carrier 16. Then, the electrostatic latent image on the rotating image carrier 16 is visualized as a toner image by the developing device 22.

  The visualized toner images of the respective colors are sequentially transferred to the intermediate transfer belt 14 by the electrostatic force of the transfer roller 30, and a color final toner image is formed on the intermediate transfer belt 14.

  The final toner image is sent between rollers 34A and 34B provided in the transfer device 34. The final toner image is transferred from the sheet tray 36 and transferred to the sheet member P that has been conveyed between the rollers 34A and 34B.

  Further, the toner image transferred to the sheet member P is fixed to the sheet member P by the fixing device 40, and the sheet member P is discharged outside the device.

(Main part configuration)
Next, the configuration of the exposure apparatus 20 will be described.

[Configuration of exposure apparatus]
The exposure apparatus 20 disposed below the image carrier 16 is an LED print head extending in the apparatus depth direction D as shown in FIGS. 2 and 3, and the exposure apparatus 20 is an example of an optical apparatus.

  The exposure apparatus 20 includes a housing 58, a mounting substrate 50 attached to the housing 58, and an optical member 54 fixed to the housing 58. As shown in FIG. 4, the optical member 54 is fixed to the housing 58 with an adhesive 82, and the surface of the adhesive 82 is covered with a sealant 84.

[Mounting board]
The mounting board 50 is a printed wiring board as shown in FIGS. 2 and 3 and extends in the apparatus depth direction D. The mounting board 50 includes a board body 52, a light emitting diode array 62 composed of a plurality of light emitting diodes 62A mounted on the board body 52, and an electronic component 64 (see FIG. 4) mounted on the board body 52. ing.

  The substrate body 52 is disposed such that the plate surface faces in the up-down direction, and has a rectangular shape extending in the apparatus depth direction D when viewed from above.

  The light emitting diodes 62 </ b> A are an example of light emitting elements, and are mounted on the upper surface of the substrate body 52 in a staggered manner so as to extend in the apparatus depth direction.

  As shown in FIG. 4, the electronic component 64 is mounted on the lower surface of the substrate body 52, and the electronic component 64 controls the light emission of each light emitting diode 62A.

[Optical member]
The optical member 54 forms a lens array, and has a rectangular parallelepiped shape that is disposed above the mounting substrate 50 and extends in the apparatus depth direction D, as shown in FIGS. 2 and 3. The optical member 54 includes a plurality of rod lenses 56 arranged in a staggered manner so as to extend in the apparatus depth direction D, and light from the light emitting diodes 62 </ b> A of the light emitting diode array 62 passes through the rod lenses 56. .

  In the present embodiment, the optical member 54 is not attached to the housing 58, and in a free state where no load is applied, the optical member 54 has a small twist of about 1.5 °. Yes. The twist of the optical member 54 in this case is a deformation that changes so that the optical member 54 is inclined between one end and the other end of the optical member 54 in a cross section orthogonal to the longitudinal direction NH of the optical member 54. is there. In each figure, the twist of the optical member 54 is omitted because the twist is small.

  In this configuration, the rod lens 56 and the light emitting diode array 62 of the optical member 54 face each other in a state where the optical member 54 and the mounting substrate 50 are attached to a casing 58 described later. Further, the upper portion of the optical member 54 protrudes from the housing 58. The light emitted from the light emitting diode 62A passes through the rod lens 56 and forms an image on the image carrier 16 (see FIG. 1).

[Case]
The casing 58 is integrally formed of a resin material, and is formed in a long shape extending in the apparatus depth direction D. Further, as shown in FIGS. 3 and 4, the housing 58 has an opening 74 penetrating in the vertical direction extending in the apparatus depth direction D. The opening 74 is provided below the optical member 54. The side part is inserted. The housing 58 includes a main body unit 70 to which the mounting substrate 50 is attached and a lens holding unit 76 that holds the optical member 54.

  As shown in FIG. 4, the opening 74 has an insertion portion 74A into which the optical member 54 is inserted, a wide portion 74B which is provided below the insertion portion 74A and is wider than the insertion portion 74A, and a lower portion of the wide portion 74B. And an open portion 74C that is wider than the wide portion 74B and is opened downward. A step portion 70A is formed between the wide portion 74B and the open portion 74C, and is fixed to the step portion 70A with an adhesive or the like (not shown) in a state where the outer peripheral portion of the mounting substrate 50 is supported. Yes.

  In the lens holding portion 76, an insertion portion 74A of the opening 74 is formed, and as shown in FIG. 3, a pair of inner wall surfaces 76A that sandwich the optical member 54 from the apparatus width direction W are formed. In addition, the lens holding portion 76 is formed with a pair of outer wall surfaces 76B facing the outside in the apparatus width direction W (opposite side of the optical member 54). The lens holding portion 76 is formed with an upward surface 76C facing upward.

  As shown in FIGS. 2 and 3, a plurality of application portions 80 to which an adhesive 82 for attaching the optical member 54 to the housing 58 is applied are formed on the upward surface 76 </ b> C.

  Specifically, the applying unit 80 is formed so as to be opposed to the apparatus width direction W with the opening 74 interposed therebetween, and a plurality of opposed applying units 80 are arranged at intervals in the apparatus depth direction D. ing. Each imparting portion 80 has a tapered shape with an upper portion opened.

  In this configuration, the lower portion of the optical member 54 is inserted into the opening 74 of the housing 58 and the optical surface 54 and the inner wall surface 76A are optically aligned in the apparatus width direction W before the optical member 54 is attached to the housing 58. There is a gap between the member 54 (see FIG. 12 in which the gap is exaggerated).

[Adhesives and sealants]
The adhesive 82 is an ultraviolet curable adhesive. As shown in FIGS. 2 and 3, the adhesive 82 is filled in the applying portion 80 formed in the lens holding portion 76 of the housing 58. The adhesive 82 is attached in a free state by adhering the optical member 54 to the housing 58 in a state where the shape of the optical member 54 in which the twist is generated is corrected.

  Here, “the optical member 54 is bonded and attached to the housing 58 in a state where the shape of the optical member 54 in which the twist has occurred is corrected” means that the restriction of the optical member 54 by the adhesive 82 is released. Then, the twist of the optical member 54 is reproduced. Specifically, when the optical member 54 attached to the housing 58 is removed from the housing 58, the flatness (JIS B 0419 1991) of the side surface 54A (see FIG. 3) facing the device width direction W of the optical member 54 is The deterioration is 0.05 or more, and the twist of the optical member 54 is reproduced.

  As shown in FIG. 4, the sealant 84 is applied so as to seal between the optical member 54 and the housing 58. The sealant 84 prevents dust and the like from entering the exposure apparatus 20 from the outside of the exposure apparatus 20.

[Exposure device manufacturing equipment]
Next, an exposure apparatus manufacturing apparatus 100 for manufacturing the exposure apparatus 20 will be described with reference to FIGS.

  The manufacturing apparatus 100 includes a jig 102 on which the exposure apparatus 20 is set. As shown in FIGS. 5 and 6, the manufacturing apparatus 100 applies a correction force F <b> 1 to the casing 58 of the exposure apparatus 20 to correct the attachment state of the casing 58 to the jig 102. It has. Further, as shown in FIG. 7, the manufacturing apparatus 100 applies a clamping force F <b> 2 for clamping the housing 58 from the short direction TH to correct the attachment state of the optical member 54 to the housing 58. Part 106.

[jig]
As shown in FIGS. 5 to 7, the jig 102 includes a flat base 102 </ b> A whose length is longer than that of the exposure apparatus 20, a convex portion 102 </ b> B protruding from the center of the base 102 </ b> A, And a plate-like extension part 102C extending from the center part.

  As shown in FIG. 6, the convex portion 102 </ b> B is formed in a size that can be fitted into the wide portion 74 </ b> B in the opening 74 of the set housing 58. The upper surface 102D of the convex portion 102B constitutes a reference surface that defines the amount of insertion of the jig 102 into the housing 58 (position in the vertical direction of the apparatus) with the stepped portion 70A of the housing 58 in surface contact. . That is, the convex portion 102 </ b> B constitutes a standard for determining the amount of insertion of the optical member 54 into the insertion portion 74 </ b> A in the opening 74, and the extension amount of the extension portion 102 </ b> C from the convex portion 102 </ b> B The distance between 70A and the lower surface 54B of the optical member 54 is set to the same size as a defined value that defines the distance.

[Case correction part]
As shown in FIGS. 5 and 6, the case correction unit 104 is formed in a rectangular long shape, and a pair of case correction portions 104 are provided corresponding to the upward surfaces 76 </ b> C on both sides of the opening 74 formed in the case 58. ing. The lower surface 104 </ b> A of each casing correction unit 104 is configured as a flat surface, and applies the correction force F <b> 1 by surface contact with the upward surfaces 76 </ b> C on both sides of the opening 74.

  The case correction unit 104 is moved up and down by a lifting device 108, and the lifting device 108 is constituted by a plurality of solenoids as an example. The lifting device 108 is connected to a control unit (not shown) and operates according to a control signal from the control unit.

  In accordance with a control signal from the control unit, the lifting / lowering device 108 descends the case correction unit 104 and presses the upward surface 76C of the case 58 downward with the correction force F1 (see FIG. 11). Then, the casing correction unit 104 is raised to form a casing correction release state 112 that is separated from the upward surface 76C of the casing 58 (see FIGS. 5 and 6).

  In the case correction state 110, as shown in FIG. 11, the case correction unit 104 presses the case 58 downward, pressing the stepped portion 70A of the case 58 against the upper surface 102D of the convex portion 102B of the jig 102, The housing 58 is corrected with respect to the jig 102. Thereby, the attachment state of the housing | casing 58 to the jig | tool 102 is corrected.

  Examples of correction of the mounting state of the housing 58 include correction of the mounting position and posture of the housing 58. As shown in FIG. 8 (a diagram exaggerating the state in which the housing 58 is displaced), when the housing 58 is attached to the jig 102 in a state in which the housing 58 is displaced, the stepped portion 70A of the housing 58 is spread over the entire area. It correct | amends so that it may contact the upper surface 102D of the convex part 102B of the jig | tool 102 across. Further, correction of the mounting state of the housing 58 includes correction of the shape of the housing 58. For example, as shown in FIG. 9, when the case 58 is warped upward, the stepped portion 70A of the case 58 is in contact with the upper surface 102D of the convex portion 102B of the jig 102 over the entire area. And correct so that there is no warping.

[Optical member correction part]
As shown in FIG. 7, a pair of optical member correcting portions 106 are provided so as to extend in the apparatus depth direction D and sandwich the outer wall surface 76B of the housing 58 from the apparatus width direction W. Each optical member correcting portion 106 has a plurality of protruding portions 106 </ b> A protruding toward the outer wall surface 76 </ b> B of the housing 58. The protrusions 106 </ b> A are spaced from each other in the apparatus depth direction D, and are disposed at positions different from the application part 80 of the housing 58 in the apparatus depth direction D.

  The optical member correcting unit 106 is moved in the apparatus width direction W by the moving device 114, and the moving device 114 is configured by a plurality of solenoids as an example. The moving device 114 is connected to a control unit (not shown) and operates according to a control signal from the control unit.

  In accordance with a control signal from the control unit, the moving device 114 has an optical member correction state 116 in which the pair of optical member correction units 106 are moved in a direction approaching (see FIG. 13), and a direction in which the pair of optical member correction units 106 are separated. And the optical member correction release state 118 moved to (see FIGS. 7 and 11).

  In the optical member correction state 116, the protrusion 106 </ b> A of the optical member correction unit 106 presses the outer wall surface 76 </ b> B of the lens holding unit 76 from both sides, and the optical member 54 is sandwiched between the optical member 54 via the housing 58. To correct against. Thereby, the attachment state of the optical member 54 is corrected.

  Examples of the correction of the mounting state of the optical member 54 include correction of the shape (twist) of the optical member 54. Further, correction of the mounting state of the optical member 54 includes correction of the mounting position of the optical member 54 that moves the optical member 54 to the center of the housing 58.

  On the other hand, in the optical member correction release state 118, the protruding portions 106A of the pair of optical member correction portions 106 are separated from the outer wall surface 76B.

[Method of manufacturing exposure apparatus]
Next, an exposure apparatus manufacturing method for manufacturing the exposure apparatus 20 using the manufacturing apparatus 100 will be described. In the non-operating state of the manufacturing apparatus 100, the casing correction unit 104 is in the casing correction cancellation state 112, and the optical member correction unit 106 is in the optical member correction cancellation state 118. Further, the direction used for explaining the manufacturing method of the exposure apparatus is the direction used for the description of the exposure apparatus 20.

  First, as shown in FIG. 6, the housing 58 is attached to the jig 102, and the lower portion of the optical member 54 is inserted into the insertion portion 74 </ b> A in the opening 78 of the housing 58. Specifically, the optical member 54 is inserted into the opening 78 so that the direction in which light passes through the rod lens 56 is the vertical direction of the apparatus, and the lower surface 54B of the optical member 54 is connected to the top surface 102E of the extending portion 102C. Support in surface contact. In this state, the optical member 54 is not constrained with respect to the casing 58, and is loose with respect to the casing 58 in the apparatus width direction W.

  At this time, as shown in FIG. 8, the housing 58 may be attached to the jig 102 in an inclined manner. In this case, as shown in FIG. It will be in the state of floating from the upper surface 102D of the convex part 102B of the jig 102.

  Also, as shown in FIG. 9, when the case 58 warps upward, the stepped portion 70 </ b> A of the case 58 is formed on the protrusion 102 </ b> B of the jig 102 as shown in FIG. 9B. A part of the housing 58 is shifted from the upper surface 102D.

  In such a state, when the optical member correction unit 106 is operated to be in the optical member correction state 116, as shown in FIG. 10 (a comparative example in which the housing correction state 110 is not formed), the protruding portion of the optical member correction unit 106 106A may press a portion other than the lens holding portion 76 of the housing 58. In this case, the correction failure of the optical member 54 may occur, or the protrusion 106A of the optical member correction portion 106 may be damaged.

  Therefore, in the present embodiment, in the correction process, as shown in FIG. 11, a case correction state 110 in which the correction force F1 is applied to the case 58 to correct the case 58 with respect to the jig 102 is formed.

  Specifically, the casing correction unit 104 is lowered by the lifting device 108 and the upward surface 76C of the casing 58 is pressed downward, so that the stepped portion 70A of the casing 58 extends over the entire area. A state of surface contact with the upper surface 102D of 102B is formed.

  Thereby, when the housing | casing 58 has shifted | deviated with respect to the jig | tool 102, a shift | offset | difference can be corrected. Further, when the case 58 is warped, it can be corrected so that the warp is eliminated.

  Then, as shown in FIG. 12, the case correction release state 112 is formed in which the case correction unit 104 is raised by the elevating device 108 and separated from the upward surface 76 </ b> C of the case 58.

  In this state, the adhesive 82 is applied to the applying portion 80, and the adhesive 82 is filled in the gap between the side surface 54 </ b> A of the optical member 54 and the inner wall surface 76 </ b> A of the housing 58.

  Next, as shown in FIG. 13, an optical member correction state 116 in which the holding force F <b> 2 for holding the case 58 from the short-side direction TH is applied to correct the 54 optical members with respect to the case 58 is formed.

  Specifically, the moving device 114 moves the pair of optical member correcting portions 106 in the approaching direction, and the outer wall surface 76B is pressed from both sides in the device width direction W by the protruding portions 106A of the pair of optical member correcting portions 106. The mounting state is corrected by sandwiching the optical member 54 via the housing 58. Thereby, the shape (twist) of the optical member 54 is corrected. Further, the mounting position of the optical member 54 is corrected by moving the optical member 54 to the center of the housing 58.

  In this state, the casing correction unit 104 is lowered again by the elevating device 108 and the upward surface 76C of the casing 58 is pressed downward, and the holding force F2 and the correction force F1 are simultaneously applied to the casing 58. Form. In the fixing step, the control unit controls an irradiation member (not shown) to irradiate the adhesive 82 with ultraviolet rays, thereby curing the adhesive 82. Thereby, the optical member 54 is fixed to the housing 58 with the adhesive 82.

  Here, in the present embodiment, a case where the optical member 54 is fixed to the housing 58 with the adhesive 82 in a state where the clamping force F2 and the correction force F1 are simultaneously applied to the housing 58 will be described, but the present invention is not limited thereto. It is not something. For example, when it is not necessary to fix the casing 58 with the correction force F1 applied, such as when correcting the displacement of the casing 58 with respect to the jig 102, only the correction force F1 is applied to the casing 58. In this state, the optical member 54 may be fixed to the housing 58 with the adhesive 82.

  Next, the control unit controls the moving device 114 to move the pair of optical member correction units 106 in the direction of separating, as shown in FIG. At this time, since the adhesive 82 has already been cured, the state in which the shape (twist) of the optical member 54 is corrected is maintained even if the clamping force F2 from the optical member correcting portion 106 is released.

  Then, the housing 58 to which the optical member 54 is attached is removed from the jig 102, and a sealant 84 is applied between the optical member 54 and the housing 58 as shown in FIG. Cover. Thereby, the space between the optical member 54 and the housing 58 is sealed. Further, the outer peripheral portion of the mounting substrate 50 is brought into contact with the stepped portion 70 </ b> A of the housing 58, and the mounting substrate 50 is fixed to the housing 58 with the adhesive 120. Thereby, the exposure apparatus 20 is manufactured.

(Action / Effect)
The operation of this embodiment will be described.

  In the exposure apparatus 20 thus manufactured, the optical member 54 maintained in the optical member correction state 116 is fixed to the housing 58 with an adhesive 82.

  Therefore, the exposure apparatus 20 which is an example of an optical member attached to the housing 58 using the adhesive 82 in a corrected state can be obtained.

  In the correction process, the optical member correction state 116 is formed after the housing correction state 110 is formed.

  For this reason, compared with the case where the housing | casing 58 is clamped from the transversal direction TH in the state shifted | deviated with respect to the jig | tool 102, the correction defect of the optical member 54 can be suppressed.

  Then, in the correcting step, after forming the casing correction state 110, the correction force F1 is released, and then the optical member correction state 116 is formed.

  For this reason, compared with the case where the housing | casing 58 is clamped from the transversal direction TH in the state which shifted | deviated with respect to the jig | tool 102, the correction defect of the optical member 54 or damage to a jig | tool etc. can be suppressed.

  Further, compared with the case where the housing correction state 110 is formed after the optical member correction state 116 is formed, the optical member 54 is laterally moved even if the optical member 54 is biased from the upper surface simultaneously with the housing correction state 110, for example. It is possible to suppress damage to the lens surface caused by the above. Furthermore, the correction failure of the optical member 54 can be suppressed with a small clamping force F2 as compared with the case where the correction force F1 is not canceled after the housing correction state 110 is formed.

  In this embodiment, the optical member correction state 116 is formed after the correction force F1 is released after the housing correction state 110 is formed, but the present invention is not limited to this. For example, it may be a manufacturing method of the exposure apparatus according to the following embodiment.

<Second embodiment>
FIG. 15 is a diagram showing the second embodiment. The same or equivalent parts as those in the first embodiment are denoted by the same reference numerals, and the explanation thereof is omitted, and only different parts are explained.

  This embodiment is different from the first embodiment in the correction process.

  In the correction process of the present embodiment, as shown in FIG. 15, the optical member correction unit 106 maintains the case 58 while maintaining the case correction state 110 in which the upward surface 76 </ b> C of the case 58 is pressed by the case correction unit 104. Is sandwiched from the short direction TH to form the optical member correction state 116.

  Also in the present embodiment, the same operational effects as those of the first embodiment can be obtained except for the operational effects when the case correction release state 112 is formed.

  Further, the positional accuracy of the optical member 54 with respect to the housing 58 can be improved as compared with the case where the optical member correction state 116 is formed after the housing correction state 110 is released.

  In the first and second embodiments, the case correction state 104 is formed by the case correction unit 104 that is moved up and down, and the optical member correction state 116 is formed by the optical member correction unit 106. However, the present invention is not limited thereto. Is not to be done. For example, it may be a manufacturing method of the exposure apparatus according to the following embodiment.

<Third embodiment>
FIG. 16 is a diagram showing the third embodiment, and the same or equivalent parts as those in the first embodiment are denoted by the same reference numerals and the description thereof is omitted, and only different parts are described.

  This embodiment is different from the first and second embodiments in that the correction force F1 and the clamping force F2 are applied to the housing 58 in the correction process at the same time using the same device.

  As shown in FIG. 16, the manufacturing apparatus 100 according to the present embodiment performs a pusher that simultaneously corrects the attachment state of the housing 58 to the jig 102 and corrects the attachment state of the optical member 54 to the housing 58. 130 is provided.

  The pusher 130 is provided on both sides of the lens holding portion 76 of the housing 58, and the pusher 130 is formed in a long plate shape extending in the length direction of the housing 58. One edge of the pusher 130 located on the housing 58 side is made thinner as it goes to the one edge 130A, and the edge is rounded.

  The pusher 130 is disposed to be inclined with respect to the outer wall surface 76B of the lens holding portion 76 and the upper surface 70B of the main body portion 70 of the housing 58, and the inclination angle with respect to the outer wall surface 76B and the upper surface 70B of the main body portion 70 is as follows. As an example, it is set to 45 degrees.

  The pusher 130 is moved by a driving device 132, and the driving device 132 is constituted by a plurality of solenoids as an example. The driving device 132 is connected to a control unit (not shown) and operates according to a control signal from the control unit.

  When the pusher 130 is moved to the housing 58 side by the driving device 132, one edge 130 </ b> A hits the upper surface 70 </ b> B of the main body 70 of the housing 58 and the outer wall surface 76 </ b> B of the lens holding portion 76. Then, the pressing force F3 from the pusher 130 is generated by using a correction force F1 for urging the housing 58 downward and a clamping force F2 for clamping the lens holding portion 76 of the housing 58 from the short direction TH. Let Thereby, the casing correction state 110 and the optical member correction state 116 described above are formed.

  Also in this embodiment, the same effect as the first embodiment can be obtained.

  Further, by operating the pusher 130 to perform the correction process, the correction force F1 and the clamping force F2 are generated as component forces, and the housing correction state 110 and the optical member correction state 116 can be formed with one operation. .

  For this reason, compared with the case where the mechanism which forms the case correction state 110 and the mechanism which forms the optical member correction state 116 are provided, a simplification of a structure can be achieved.

<Fourth embodiment>
FIG. 17 is a diagram illustrating the fourth embodiment. The same or equivalent parts as those in the third embodiment are denoted by the same reference numerals and the description thereof is omitted, and only different parts are described.

  This embodiment is different from the second and third embodiments in that an inclined surface 140 is formed between the main body portion 70 of the housing 58 and the lens holding portion 76. Each pusher 130 applies a pressing force F3 from the transverse direction TH that intersects the corresponding inclined surface 140 formed on both sides of the housing 58 to generate a correction force F1 and a clamping force F2 as component forces.

  Also in this embodiment, the same effect as 2nd embodiment can be acquired.

  Further, in the present embodiment, as in the third embodiment, the configuration is simplified as compared with the case where the mechanism for forming the casing correction state 110 and the mechanism for forming the optical member correction state 116 are provided. Can do.

<Fifth embodiment>
FIG. 18 is a diagram illustrating the fifth embodiment. The same or equivalent parts as those of the fourth embodiment are denoted by the same reference numerals and description thereof is omitted, and only different parts are described.

  This embodiment differs from the fourth embodiment in the pressing direction by the pushers 130, and each pusher 130 has a pressing force from the upper side to the lower side that intersects the inclined surfaces 140 on both sides of the housing 58. F3 is added to generate the correction force F1 and the clamping force F2 as component forces.

  Also in this embodiment, the same effect as the first embodiment can be obtained.

  Further, in the present embodiment, as in the fourth embodiment, the configuration is simplified as compared with the case where a mechanism for forming the casing correction state 110 and a mechanism for forming the optical member correction state 116 are provided. Can do.

  In each embodiment, the optical apparatus has been described as the exposure apparatus 20, but the optical apparatus may be a reading unit (for example, Contact Image Sensor).

  In the first embodiment, the outer wall surface 76B of the housing 58 is sandwiched by the optical member correcting portion 106 having a plurality of protruding portions 106A. However, the housing 58 is sandwiched by the optical member correcting portion 106 that does not have the protruding portions 106A. You may do it.

  In the above-described embodiment, the optical member correction state 116 is formed after the application part 80 of the housing 58 is filled with the adhesive 82. However, the adhesive 82 is applied to the application part 80 after the optical member correction state 116 is formed. May be filled.

54 Optical member 58 Case 74 Opening portion 82 Adhesive 102 Jig 104 Case correction unit 106 Optical member correction unit 110 Case correction state 112 Case correction release state 116 Optical member correction state 118 Optical member correction release state 140 Inclined surface F1 Correction force F2 Nipping force

Claims (6)

A case correction state in which a correction force is applied to the case to correct the case with respect to the jig while a long case with an optical member inserted into the opening is attached to the jig. And a correction step of forming an optical member correction state in which the optical member is corrected with respect to the casing by applying a clamping force to the casing from a short direction,
A fixing step of fixing the optical member to the housing with an adhesive in the optical member correction state;
A method for manufacturing an optical device comprising:   The method of manufacturing an optical device according to claim 1, wherein the correcting step forms the optical member correction state after forming the casing correction state.   The method of manufacturing an optical device according to claim 2, wherein, in the correction step, the optical member correction state is formed after the correction force is released after the housing correction state is formed.   The method of manufacturing an optical device according to claim 2, wherein the correcting step forms the optical member correction state while maintaining the casing correction state.   The said correction process adds the pressing force which produces the said correction force and the said clamping force as a component force to the both sides of the transversal direction of the said housing | casing, and forms the said housing | casing correction state and the said optical member correction state. A method for manufacturing the optical device according to 1.   The optical according to claim 5, wherein the correcting step applies a pressing force in a direction intersecting with the inclined surfaces formed on the both side portions of the casing to generate the correcting force and the clamping force as component forces. Device manufacturing method.