JP2018179820A - Contact probe - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a contact probe having a rotary mechanism which breaks a natural oxide film without destroying a device structure.SOLUTION: A probe pin 1 is provided with a projection 4, and a barrel 2 internally having a cavity part into which the probe pin 1 is inserted is provided with a groove 10 guiding a movement of the projection 4 and also having a vertical part 10B and a first inclined part 10A inclined upward from a top part of the vertical part 10B. A spring 3 is provided at the cavity part of the barrel 2, and the spring 3 is provided between an upper surface of the probe pin 1 and an upper part of the barrel 2 so as to limit a rotational angle of the pressed-in probe pin 1.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a contact probe for measuring the electrical characteristics of a semiconductor device.

  In the conventional contact probe pin, when the probe pin contacts and overdrives the electrode surface of the semiconductor element, the guide ball embedded in the probe support is guided along the groove dug outside the probe pin, and the probe pin It rotates and it is comprised so that the natural oxide film of an electrode surface may be pierced (refer patent document 1).

JP, 2009-115659, A

  In the probe pin as described above, when the guide ball is guided along the groove of the probe pin, the groove and the guide ball are rubbed to generate metal scrap from the groove of the probe pin or the guide ball, and the scrap is in the groove There is a possibility that the accumulated probe pin may not rotate. As a result, there is a problem that the natural oxide film on the electrode surface can not be broken. Furthermore, after the probe pin overdrives, there is also a problem that the probe pin is rotated too much and the semiconductor device structure located below the native oxide film is broken.

  The present invention has been made to solve the above-mentioned problems, and it is an object of the present invention to obtain a contact probe having a rotation mechanism that breaks a natural oxide film without destroying the device structure.

  The contact probe according to the present invention has a probe pin having a protrusion, and a hollow portion into which the probe pin is inserted, and guides the movement of the protrusion and extends upward from the vertical portion and the top of the vertical portion. A barrel provided with a groove having a first inclined portion, and a spring provided in the hollow portion and provided between the upper surface of the probe pin and the upper portion of the barrel.

  According to the contact probe configured as described above, since the rotation angle of the probe pin is limited, the probe pin can pierce only the natural oxide film without destroying the device structure.

FIG. 1 is a perspective view showing a contact probe according to a first embodiment. FIG. 1 is a perspective view showing a probe pin portion according to a first embodiment. 5 is a front view showing a barrel portion according to Embodiment 1. FIG. It is the DD sectional drawing in FIG. 1, the EE sectional drawing in FIG. 1, and the figure which showed the state which looked at the barrel from the bottom face. It is the BB sectional drawing in FIG. FIG. 6 is a perspective view showing a protruding portion of a probe pin according to Embodiment 1; FIG. 5 is a front view showing a protruding portion of a probe pin according to Embodiment 1; FIG. 2 is a perspective view showing a spring hooking portion according to Embodiment 1; FIG. 2 is a perspective view showing a spring hooking portion according to Embodiment 1; FIG. 1 is a perspective view showing a contact probe according to a first embodiment. FIG. 1 is a perspective view showing a contact probe according to a first embodiment. FIG. 1 is a perspective view showing a contact probe according to a first embodiment. FIG. 10 is a cross-sectional side view showing a contact probe according to Embodiment 2; FIG. 20 is a perspective view showing a probe pin in the contact probe according to the third embodiment. FIG. 14 is a cross-sectional side view showing a probe pin in a contact probe according to Embodiment 3. FIG. 10 is a perspective view showing a contact probe according to a fourth embodiment. FIG. 10 is a side view showing a barrel according to Embodiment 4; It is sectional drawing which shows the GG line | wire in FIG. FIG. 21 is a partial perspective view showing a probe pin in a contact probe according to a sixth embodiment. It is the front view which looked at the processus | protrusion in FIG. 19 from the K direction. FIG. 21 is a cross-sectional side view showing a contact probe according to a sixth embodiment. FIG. 21 is a front view showing a protrusion according to a seventh embodiment.

Embodiment 1
FIG. 1 is a perspective view showing a contact probe according to a first embodiment. FIG. 2 is a perspective view showing a probe pin portion, and FIG. 3 is a front view showing a barrel portion. The contact probe has a cylindrical probe pin 1 having a protrusion 4 as shown in FIG. 2 and a groove 10 for guiding the movement of the protrusion 4 as shown in FIG. It comprises a cylindrical barrel 2 having a hollow and a spring 3 provided inside the barrel 2. In the barrel 2, the groove 10 is provided with a vertical portion 10B having an opening 101 at the lower portion, and a sloped portion 10A (first sloped portion) inclined from the top of the vertical portion 10B toward the top of the barrel 2 The width b of the groove at 10A and the width c of the groove at the vertical portion 10B are configured to form a gap of 0.1 mm to 0.5 mm on both sides M and N between the protrusion 4 of the probe pin 1 and The height a of the groove has the same height as the amount of depression of the spring 3 when the probe pin 1 is pushed in, and in the inclined portion 10A (first inclined portion) of the groove 10, θ ₁ = It has a slope that has an angle of 10 degrees to 15 degrees.

The curvature of the arc-shaped portion of the groove 10 from the vertical portion 10B of the groove 10 having the height a to the inclined portion 10A is R. The curvature R has a curvature equal to or greater than the curvature R of the cylindrical projection 4 of the probe pin 1 shown later. 4A is a cross-sectional view taken along the line D-D in FIG. 1, FIG. 4B is a cross-sectional view taken along the line E-E in FIG. 1, and FIG. The state which piled up B), ie, the state which looked at the barrel 2 from the bottom, is shown. 3 and FIG. 4 (C), the rotation angle theta ₂ between the X point and the Y point is set to be theta _{2 =} 5 to 30 degrees.

  FIG. 5 is a cross-sectional view taken along line B-B in FIG. FIG. 6 is a perspective view showing the protrusion 4 of the probe pin, and FIG. 7 is a front view of the same. The protrusion 4 is formed in a cylindrical shape having a curvature R as shown in FIG. 7, and the height of the protrusion 4 is larger than the thickness h of the barrel 2. Also, a spring hook 5 is provided inside the barrel 2 so that the spring 3 is sandwiched. 8 and 9 are perspective views showing the spring hooking portion, and the spring hooking portion may be constituted by a cylindrical projection structure 5A having an inner diameter smaller than the diameter of the spring 3 as shown in FIG. Or as shown in FIG. 9, you may comprise by the 2 or more protrusion part 5B which protrudes inside. FIG. 9 shows a structure having two protrusions. The spring 3 is joined to the probe pin 1 by point or surface contact with the upper surface of the probe pin 1. In the present embodiment, a structure is shown in which the top surface of the probe pin 1 and the tip portion of the spring 3 are joined at a point Q.

According to the above configuration, the protrusion 4 of the probe pin 1 is pushed along the vertical portion 10B of the barrel 2 to the height a after the tip of the probe pin 1 comes in contact with the object of electrical measurement . Thereafter, while being pushed into the inclined portion 10A having an angle of θ ₁ = 10 ° to 15 °, the probe pin 1 is rotated in the range of the rotation angle having θ ₂ = 5 ° to 30 °, and electric measurement is performed in this state Do. When the electrical measurement is completed, the probe pin 1 returns to its original position by returning the spring 3 to its original state. At this time, since the spring hooking portion 5 sandwiches the spring 3, it is possible to prevent the probe pin 1 from falling from the barrel 2.

  In addition, when the probe pin 1 returns to the original position, the groove 10 of the barrel 2 has a curvature R equal to or greater than that of the projection 4 and therefore, when the probe pin 1 moves from rotational operation to linear operation, the projection The lubrication can be operated without the 4 being caught in the groove 10 of the barrel 2. Further, since the bottom of the projection 4 is also configured to have a curvature R, the projection 4 can operate to lubricate when the probe pin 1 shifts from the rotational operation to the linear operation. In addition, by providing a gap of 0.1 mm to 0.5 mm on both sides M and N between the projection 4 and the groove 2 of the barrel 2, the probe pin 1 is pushed into the barrel 2 and returns to the original state In this case, the contact surface between the tip of the probe pin 1 and the target of the electrical measurement is not fixed because it can move slightly randomly in the lateral direction.

Thus, after the projection 4 is pushed to the height a portion of the groove 10, the probe pin 1 is in the range of θ ₂ = 5 to 30 degrees while being pushed at an inclination angle of θ ₁ = 10 to 15 degrees. By having a mechanism that rotates, the groove design of the barrel 2 becomes easier as compared with the conventional structure as shown in Japanese Patent Application Laid-Open No. 2009-115659, and the manufacturing cost can be reduced. By limiting the rotation range of the probe pin 1 to θ ₂ = 5 degrees to 30 degrees in a state of being in contact with the target of electrical measurement, a natural oxide film can be obtained without destroying the device structure located below the natural oxide film. It is possible to break only. In general, the film thickness of the natural oxide film is 2 nm or less, and when θ ₂ = 5 ° or less, complete oxide film removal can not be performed. When θ ₂ = 30 ° or more, the electrode located below the native oxide film is excessively pressed, and the pressure applied to the electrode causes a crack or shape breakage in the device structure below the electrode. Therefore, the above effect can be obtained by limiting the rotation range to 5 degrees to 30 degrees.

Further, for example, as shown in FIG. 10, when the probe pin 1 is designed so that θ ₂ in the groove of the barrel ₂ is 30 degrees, the amount of indentation is set to the amount of indentation up to θ ₂ = 10 degrees. It is also possible to limit. Such setting of the pressing amount is to control the torque of the motor by controlling the current flowing to the servomotor on the test device side, and to perform numerical control so as to achieve a predetermined rotation angle by controlling the rotation angle. . Figure 11 is designed to be ₂ to 30 times theta, it is a perspective view of the pressing amount and a theta _{2 =} 10 degrees. Furthermore, in a structure designed to have θ ₂ of 30 °, when the indentation amount is θ ₂ = 10 °, oxide film removal is insufficient and the tip of the probe pin 1 is a new surface of the electrode (natural oxide film If the electric characteristics can not be measured without reaching the lower device surface) and if there is an abnormality in the characteristics, further removal of the native oxide film is required. At that time, the angle θ ₂ is designed to be 30 degrees, and since the amount of depression up to 10 degrees is not sufficient, the angle θ ₂ can be further pushed to 20 degrees. Therefore, if the above-mentioned failure occurs, it is possible to break the natural oxide film simply by changing the setting of the pressing amount by 20 degrees and 30 degrees on the test device side. Figure 12 is designed to be ₂ to 30 times theta, it is a perspective view of the pressing amount and a theta _{2 =} 30 degrees.

  Further, by designing a gap between the groove 2 and the projection 4 of the probe pin in the groove width of the barrel 2, the amount of friction between the groove and the projection 4 is suppressed, and metal scraps are generated from the groove 10 and the projection 4 It is possible to operate without pushing the probe pin 1 into the groove 10 of the barrel 2 or inhibiting rotation. In addition, since there is a gap between the groove 10 and the projection 4, the probe pin 1 can move slightly in the lateral direction at random, and the position at which the contact between the tip of the probe pin 1 and the object of electrical measurement starts also changes. be able to. Therefore, it is possible to change the deposition location of metal dust adhering to the tip of the probe pin 1 and to reduce the frequency of replacement of the probe pin 1 and the frequency of maintenance of the probe pin 1 such as removal of metal dust.

  Further, in the contact probe of the present embodiment, the barrel 2 and the probe pin 1 to which the spring 3 is joined are not integrated. If maintenance of either the probe pin 1 or the barrel 2 to which the spring 3 is joined becomes necessary, in the structure in which the barrel, the probe pin and the spring are integrated, it is necessary to replace the entire contact probe. The On the other hand, in the contact probe according to the present embodiment, for example, when there is an abnormality in the probe pin 1, the probe pin 1 to which the spring 3 is joined is removed from the barrel 2 and the probe pin to which the new spring 3 is joined. Maintenance is completed by inserting 1 into the barrel 2 and sandwiching the spring 3 in the spring hooking portion 5. Therefore, the cost of maintenance can be reduced.

Second Embodiment
In FIG. 5, the upper surface of the probe pin 1 is configured to be joined to the spring 3 in a point or surface contact state, and the probe pin 1 and the spring 3 are configured to be electrically connected by being directly joined. An example is shown. On the other hand, a metal plate 6 such as copper, silver, gold, iron is joined with the end of the spring 3 by solder or the like so that electrical conduction can be taken, and the metal plate 6 and the probe pin 1 are joined by solder or the like By doing this, electrical conduction may be made between the probe pin 1 and the spring 3 through the metal plate 6. Further, in FIG. 5, the electrical conduction between the barrel 2 and the spring 3 is realized by direct contact between the barrel 2 and the spring 3. On the other hand, even if metal plate 7 is joined to spring 3 with solder or the like, metal plate 7 and barrel 2 are brought into contact, and spring 3 and barrel 2 are electrically connected via metal plate 7. good.

FIG. 13 is a cross-sectional side view showing the contact probe according to the second embodiment. In FIG. 13, the metal plate 6 and the metal plate 7 are joined to both ends of the spring 3 by solder or the like, and the metal plate 6 and the upper portion of the probe pin 1 are further joined by solder or the like. The metal plate 7 is configured to have a thickness and a size such that it can enter the gap in the upper portion of the barrel 2 from the spring hook portion 5.
In the first embodiment, with regard to the electrical conduction between the probe pin 1 and the spring 3, the contact area of the probe pin 1 and the spring 3 is only the tip of the spring 3 or a part of the spring 3. The area taking electrical conduction was only the diameter of the spring. On the other hand, in the present embodiment, since the metal plate 6 is interposed, the contact area is increased, and stable electrical conduction can be secured. Further, in the first embodiment, the contact area of the spring 3 and the barrel 2 is only the tip of the spring or only a partial surface of the spring as described above, so the area taking electrical conduction is only the diameter of the spring The On the other hand, in the present embodiment, since the metal plate 7 is interposed, the contact area is increased, and stable electrical conduction can be secured. As a result, it is possible to obtain accurate numerical values of electrical characteristics.

Third Embodiment
FIG. 14 is a perspective view showing a probe pin in the contact probe according to the third embodiment, and FIG. 15 is a cross-sectional side view of the same. FIG. 5 shows an example in which the probe pin 1 and the spring 3 are directly joined and in FIG. 13 the probe pin 1 and the spring 3 are joined via the metal plate 6. On the other hand, as shown in FIGS. 14 and 15, a spring hook portion 32 having an inner diameter smaller than the diameter of the spring 3 is formed on the upper surface of the probe pin 31 and a cavity 33 is provided on the probe pin 31 , And the spring 3 may be hooked. Furthermore, the metal plate 6 and the metal plate 7 may be joined to the spring 3. In FIG. 15, the metal plate 6 and the metal plate 7 are joined to the spring 3, the cylindrical cavity 33 is processed inside the probe pin 31, and the end portions of the metal plate 6 and the spring 3 are inserted therein. It has a structure in which 3 is hooked. The barrel 2 and the metal plate 7 are not directly bonded, and the metal plate 6 and the probe pin 31 are not directly bonded.

  According to such a configuration, as in the second embodiment, the electrical conduction is stabilized, and it is possible to obtain accurate numerical values of the electrical characteristics. Furthermore, when the probe pin rotates along the groove 10 of the barrel 2, in the structure of FIGS. 5 and 13, the joint portion of the probe pin and the spring 3 or the joint portion of the metal plate 6 and the spring 3 is twisted to There is a possibility that the probe pin may drop from the barrel 2 due to disconnection or deterioration of the On the other hand, in the present embodiment, since the metal plate 6 and the probe pin are not directly bonded, no twisting occurs in the above-described bonded portion. Accordingly, the deterioration of the spring 3 can be suppressed, and the probe pin can be prevented from dropping from the barrel 2. Although FIG. 15 shows an example in which the metal plates 6 and 7 are provided, the metal plate may not be provided.

Fourth Embodiment
16 is a perspective view showing the contact probe according to the fourth embodiment, FIG. 17 is a side view showing a barrel, and FIG. 18 is a cross-sectional view showing a G-G line in FIG. In the third embodiment, an example in which the spring hook portion is provided on the upper portion of the probe pin 1 is shown. However, a barrel 42 having a groove 40 as shown in FIG. 17 is provided to prevent the probe pin 1 from falling. May be In FIG. 17, the groove 40 has a first inclined portion 40A, a first vertical portion 40B, a second inclined portion 40C, and a second vertical portion 40D, and the width b of the groove of the first inclined portion 40A Between the groove width c of the first vertical portion 40B and the width d of the groove of the second vertical portion 40D, a gap of 0.1 mm to 0.5 mm is formed on both sides with the projection 4 of the probe pin 1 The width e of the groove of the second inclined portion 40C is equal to the diameter of the protrusion 4 of the probe pin 1, or a gap of 0.1 mm or less is formed between the groove and the protrusion 4 of the probe pin 1 Ru. The height a of the groove has the same height as the amount of depression of the spring 3 when the probe pin 1 is pushed in, and in the first inclined portion 40A, an angle of θ ₁ = 10 to 15 degrees with respect to the horizontal line There is a slope that has

Furthermore, it has the 2nd inclination part 40C which had the angle of (theta) ₃ = 2 degree-5 degree. The curvature of the arc-like portion of the groove from the first vertical portion 40B having the height a to the first inclined portion 40A is R. The curvature R has a curvature equal to or greater than the curvature R of the protrusion 4 of the probe pin 1. Also in FIG. 16, as in FIG. 1, the DD section and the E-E section have the shapes as shown in FIG. 4 as in the first embodiment, and also for θ ₂ as well. Similar to 1, it has an angle of θ ₂ = 5 to 30 degrees. In FIG. 18, a spring hooking portion as shown in the first embodiment may or may not be provided inside the barrel 42. FIG. 18 shows the internal structure of the barrel 42 without a spring hook. Further, as shown in the first embodiment, the spring 3 is not joined to the upper surface of the probe pin 1 in the state of point contact or surface contact.

According to such a structure, the protrusion 4 of the probe pin 1 passes from the opening 401 of the second vertical portion 40D to the second vertical portion 40D and the second inclined portion 40C, and has a first height a. After the insertion to the bottom of the vertical portion 40B, the probe pin 1 is weighted to bring the tip of the probe pin 1 into contact with the object of the electrical measurement. Thereafter, the protrusion 4 of the probe pin 1 is pushed along the groove 40 of the barrel 42 to the height a portion, and then pushed into the first inclined portion 40A having an angle of θ ₁ = 10 ° to 15 °, The probe pin 1 is rotated at a rotation angle in the range of θ ₂ = 5 to 30 degrees, and electrical measurement is performed in this state. When the electrical measurement is completed, the probe pin 1 returns to the lowermost portion (bottom) of the first vertical portion 40B by returning the spring 3 to the original state. At this time, in the first embodiment, since the spring 3 is caught in the spring hooking portion 5, the probe pin 1 is prevented from falling from the barrel 2.

On the other hand, in the present embodiment, the bottom of the first vertical portion 40B of the barrel 42 is provided to prevent the probe pin 1 from falling. Also, a second inclined portion 40C having a gap equal to the diameter of the protrusion 4 of the probe pin 1 or 0.1 mm or less between the groove width e and the protrusion 4 of the probe pin 1, and this second When the inclined portion has an angle of θ ₃ = 2 ° to 5 °, the projection 4 of the probe pin 1 is pushed from the bottom of the first vertical portion 40B of the barrel 42 toward the portion having the height a. The structure is such that it is not accidentally pushed in the direction of the second inclined portion 40C having the groove width e. Further, as in the first embodiment, by providing a gap of 0.1 mm to 0.5 mm between the widths b and c of the groove of the barrel 42 and the projection 4 of the probe pin 1, the probe pin 1 can The probe pin 1 can be moved randomly in the left and right direction slightly when it is pushed into the groove of the and returned to its original state. Accordingly, the contact surface between the tip of the probe pin 1 and the target of the electrical measurement is not fixed. In this manner, the probe pin 1 can be prevented from dropping from the barrel 42 by returning the probe pin 1 to the lowermost portion of the first vertical portion 40B of the barrel 42 after the electrical measurement is completed.

Embodiment 5
In the fourth embodiment, the spring 3 is in point or surface contact with the upper surface of the probe pin 1 and is not directly joined. On the other hand, in the structure of FIGS. 16 to 18, a metal plate 6 such as copper, silver, gold, tin, or iron which can be electrically conducted to the end of the spring 3 is interposed between the spring 3 and the probe pin 1. You may Further, in the structure shown in FIG. 18, the electrical connection between the barrel 42 and the spring 3 is achieved by direct contact between the barrel 42 and the spring 3. On the other hand, a metal plate 7 as shown in FIG. 15 may be interposed between the spring 3 and the barrel 42 to make electrical conduction.

According to such a configuration, the area of contact between the upper surface of the probe pin 1 and the metal plate 6 is larger than the area in the case of direct contact with the spring 3. Further, the area in which the barrel 42 and the metal plate 7 are in contact is larger than the area in the case of direct contact with the spring 3.
Since the contact area between the barrel 42 and the spring 3 and the contact area between the probe pin 1 and the spring 3 increase in this way, when the surface finish inside the barrel 42 is uneven or when the upper surface of the probe pin 1 is finished Even when there is unevenness, it is possible to take stable electrical continuity. Furthermore, since metal plate 6 and metal plate 7 are not directly joined to spring 3, spring 3 does not twist even when probe pin 1 is rotated within the range of θ ₂ = 5 to 30 degrees, and spring 3 is deteriorated. It is possible to suppress

Sixth Embodiment
FIG. 19 is a partial perspective view showing a probe pin in the contact probe according to the sixth embodiment, and FIG. 20 is a front view of the protrusion 4 in FIG. 19 viewed from the K direction. In FIGS. 19 and 20, the protrusion 4 of the probe pin 1 is provided with a fitting groove 61. The width f of the fitting groove 61 provided on the protrusion 4 of the probe pin 1 is configured to be larger than the thickness h of the barrel 2 by 0.1 mm to 0.5 mm. According to such a configuration, in the structure shown in Embodiment 1 and Embodiment 4, when the probe pin 1 is pushed to the top of the height a in the vertical portion provided in the barrel, the probe pin One protrusion 4 is fitted to the thickness portion of the barrel.

And it becomes a guide of operation pushed into the inclined part at an angle of θ ₁ = 10 degrees to 15 degrees, and further guides the rotation operation when the probe pin 1 rotates in the range of θ ₂ = 5 degrees to 30 degrees. it can. FIG. 21 is a side cross-sectional view showing a state in which the projection 4 of the probe pin 1 is engaged with the barrel when it is pushed to the top of the height a of the vertical portion provided in the barrel.
As described above, by providing the fitting groove 61 in the projection 4 of the probe pin 1, it is possible to guide the rotation of the probe pin 1 necessary for removing the natural oxide film. Furthermore, since the probe pin 1 can be rotated more easily than in the first to fourth embodiments, the natural oxide film can be reliably removed.

Embodiment 7
The fitting groove provided on the protrusion of the probe pin may have a sloped structure. FIG. 22 is a front view showing a protrusion, which corresponds to FIG. In the figure, the projection 4 is provided with an inclined fitting groove 71. Here, the inclination angle of the inclined fitting groove 71 is desirably the same as the inclination angle θ1 of the _first inclined portion provided in the barrel, but may be other than that.

According to such a configuration, when the probe pin 1 is pushed to the top of the height a in the vertical portion provided in the barrel, the protrusion 4 of the probe pin 1 is fitted to the barrel, and θ ₁ = 10 When pushed at an angle of 15 degrees, it is possible to operate more lubriciously than in the sixth embodiment.
In the present invention, within the scope of the invention, each embodiment can be freely combined, or each embodiment can be appropriately modified or omitted.

1, 31 probe pins, 2 barrels, 3 springs, 4 protrusions,
5, 32 spring hooks, 6, 7 metal plates, 10 grooves, 10A slopes,
10B vertical part, 61, 71 fitting groove.

Claims (7)

A probe pin having a protrusion;
It has a hollow portion in which the probe pin is inserted and is provided with a groove for guiding the movement of the projection and having a vertical portion and a first inclined portion inclined upward from the top of the vertical portion. With the barrel,
A contact probe comprising a spring provided in the hollow portion and provided between an upper surface of the probe pin and an upper portion of the barrel. The contact probe according to claim 1, wherein a gap of 0.1 mm to 0.5 mm is provided on each side between the protrusion and the groove. The contact probe according to claim 1 or 2, wherein a spring hooking portion is provided in the inside of the barrel such that the spring is caught. The contact probe according to claim 1 or 2, wherein a spring hook portion having an inner diameter smaller than the diameter of the spring is formed on the upper surface of the probe pin, and a cavity is provided on the upper portion of the probe pin. . The contact probe according to claim 1 or 2, wherein a bottom portion is provided on the vertical portion, and a second inclined portion connected to the bottom portion and inclined upward in the barrel is provided. The contact probe according to any one of claims 1 to 5, wherein a metal plate is provided between the probe pin and the spring, and a metal plate is provided between the spring and the barrel. The contact probe according to any one of claims 1 to 6, wherein the projection is provided with a fitting groove for fitting to the thickness portion of the barrel.

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