JP2018177424A - Slit device of photosensitive resin laminate - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a slit device for a photosensitive resin laminate that suppresses occurrence of core loss caused by an inner surface of a core and a winding shaft being rubbed against each other when rotated and suppresses occurrence of a photosensitive resin laminate which causes development failure.SOLUTION: The slit device for slitting a roll of a photosensitive resin laminate at a predetermined width, in a winding shaft 1 to which a cylindrical winding core 10 on which a slit photosensitive resin laminate is wound is mounted, a plurality of small diameter rollers 5 embedded in the outer peripheral surface of the winding shaft is included. Each of the small diameter rollers has a part of the outer peripheral surface protruding to the outside of the outer periphery of the winding shaft. The outer peripheral surface portion projecting to the outside of the winding shaft rotates at least in both an axial direction (arrow A direction) and a circumferential direction (arrow B direction) of the winding shaft.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a slit device of a photosensitive resin laminate. Specifically, the present invention relates to a slitting device provided with a winding shaft on which a core (referred to as a core) is fitted on a shaft and on which a web of a photosensitive resin laminate is wound.

  Conventionally, the photolithography method is widely used in applications such as printed wiring boards. In the photolithography method, a photosensitive resin composition is applied on a substrate, pattern exposure is performed, the exposed portion of the photosensitive resin composition is polymerized and cured, and the unexposed portion is removed by a developer, or A resist pattern is formed on the substrate by solubilizing the exposed portion and removing it with a developer. Then, etching or plating is performed to form a conductor pattern, and then the resist pattern is peeled off from the substrate to form a conductor pattern on the substrate.

In the above photolithography method, usually, when applying a photosensitive resin composition onto a substrate, a method of applying a solution of the photosensitive resin composition onto the substrate and drying it, or a support, a photosensitive resin composition A method of laminating on a substrate a photosensitive resin laminate (hereinafter also referred to as "dry film resist") in which a layer consisting of (hereinafter also referred to as "photosensitive resin layer") and, if necessary, protective layers are sequentially laminated. Is used. The latter method is often used in the manufacture of printed wiring boards.
Such a dry film resist is usually sold and traded as a dry film resist roll in which a photosensitive resin laminate is wound around a winding core.

The dry film resist roll is manufactured, for example, by the following steps.
(1) A photosensitive resin composition is applied onto a base film, dried, and covered with a cover film to produce a large photosensitive resin laminate (dry film resist) called a master roll. Such a film is usually configured as a wound body (mother roll) wound around a circular tubular core.
(2) The master roll is cut (slit) to a width used by a customer, and the cut film is wound around a core to produce a slit roll (slit process).
(3) Pack and ship the slit roll.

In the above (2) slitting step, the master roll is cut (slitted) as follows using a slitting device.
(A) Insert the core (core) of the master roll into the unwinding shaft of the slitting device.
(B) Insert a winding core (winding core) into the winding shaft of the slit device.
(C) Unwind the photosensitive resin laminate from the master roll and cut (slit) it into a predetermined width. A slit roll is produced by winding the cut | judged photosensitive resin laminated body around a core.
To take out the rolled roll product (slit roll) after winding, take out the roll with the shaft and place it on the table and pull out only the shaft or hold the shaft in a cantilever state, and only roll Methods such as pulling out from the shaft have been adopted.

As shown in FIG. 7, when inserting the winding core 10 into the slitting device, it is inserted in the axial direction indicated by the arrow A. In such a winding shaft 20, a roller 21 rotating in the direction of arrow A is provided on the surface of the winding shaft so as to facilitate the insertion of the core 10 (for example, Patent Document 1).
Then, when the photosensitive resin laminate after being slit is wound around the core, the core 10 and the winding shaft 20 rotate in the circumferential direction indicated by the arrow B.
As a drive type of the take-up shaft, the core is fitted on the take-up shaft and tightened with a nut or the like from one end thereof to unite the core with the take-up shaft and positively drive the take-up shaft to hold the web on the core. A variety of structures, such as winding, and winding cores called so-called individual friction winding, in which a large number of cores are fitted on a single winding shaft and each is driven at an independent torque and rotational speed There is something.

Japanese Utility Model Application Publication 6-73018

If the take-up shaft and the core are in close contact with each other at the time of winding, there is no problem even if it rotates. However, actually, there is a gap between the take-up shaft and the core, and the core is rotated The inner surface of the roller and the winding shaft rub against each other. When scraped, scraps of the core (core scraps) are generated.
In particular, in order to give strength to the core 10 of the photosensitive resin laminate, ribs 11 are provided on the inner surface of the core (see FIG. 8A). The rib 11 is in contact with the winding shaft 20 to easily generate core residue (see FIG. 8B). When the core residue adheres to the photosensitive resin laminate, light shielding occurs at that portion. Due to this, the portion that is desired to be cured by exposure may not be cured or may not be reproduced in a desired shape. As a result, development failure occurs.

  The present invention has been proposed in view of such conventional circumstances. To provide a slit device for a photosensitive resin laminate, suppressing generation of core residue due to rubbing of the inner surface of a core with a take-up shaft when rotating, and suppressing the development failure of the photosensitive resin laminate. With the goal.

As a result of continuous investigations, the present inventors can solve the above problems by rotating a plurality of small diameter rollers provided on the outer periphery of the winding shaft in at least both the axial direction and the circumferential direction of the winding shaft. In the end, the present invention has been completed. That is, the present invention is as follows.
[1]
A slit device for slitting a roll of a photosensitive resin laminate with a predetermined width, comprising:
In a winding shaft on which a cylindrical winding core on which the slit photosensitive resin laminate is wound is attached,
A plurality of small diameter rollers are provided in the outer peripheral surface of the winding shaft,
In the small diameter roller, a part of the outer peripheral surface protrudes outside the outer periphery of the winding shaft, and an outer peripheral surface portion protruding outside the winding shaft at least extends in the axial direction of the winding shaft and A slitting device of a photosensitive resin laminate characterized in that it rotates in both circumferential directions.
[2]
The slit device of the photosensitive resin laminate according to [1], wherein the core has a rib on an inner circumferential surface.

  According to the present invention, a plurality of small diameter rollers provided on the outer periphery of the winding shaft rotate at least in both the axial direction and the circumferential direction of the winding shaft to rotate the inner surface of the core when the shaft is rotated. The impact when the shaft rubs against the shaft can be mitigated, thereby providing a slit device in which the generation of core residue is suppressed. As a result, it is possible to suppress the development failure of the photosensitive resin laminate due to the adhesion of the core residue and to improve the product yield.

The figure which shows one Embodiment of the winding shaft of this invention. The figure which shows one Embodiment of the winding shaft of this invention. The figure which shows one structural example of a roller. The figure which shows the state in which the roller was attached to the roller support plate. The figure which shows the other structural example of a roller. The figure which shows one structural example of a dry film resist roll. The figure which shows one structural example of the conventional winding shaft. Sectional drawing which shows the state in which the core and the core were attached to the winding shaft.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
FIG. 1 and FIG. 2 are diagrams showing one configuration example of the winding shaft mounted in the slit device of the present invention. FIG. 2 is a front view showing the upper half of the winding shaft in cross section.
In the winding shaft 1, a large number of roller support plates 3 and spacing collars 4 are alternately fitted on the central shaft 2, and are tightened with a nut or the like from one end and fixed to the central shaft 2. The roller support plate 3 is provided with cuts 7 and concentric grooves 8 which divide the circumference into several equal parts (4 to 8 equal parts) on the outer periphery, and the rollers 5 (small diameter rollers) can freely rotate in each cut 7 The pin 6 is supported by the pin 6, and the pin 6 is fixed in the groove 8 by caulking or the like. One configuration example of the roller is shown in FIG. Then, as shown in FIG. 4, a part of the outer peripheral surface of each roller 5 protrudes slightly outside the outer diameter of the roller support plate 3 and the distance collar 4.

And in the slit device of the present invention, in the winding shaft 1, the outer peripheral surface portion of each roller 5, which protrudes to the outside of the roller support plate 3, is at least in the axial direction of the central shaft 2 (arrow A direction in the figure). The rollers 5 are arranged to rotate in both directions (direction of arrow B in the drawing).
When the outer peripheral surface portion of each roller 5 rotates in at least both axial and circumferential directions of the central axis 2, the impact when the inner surface of the core 10 and the winding shaft are rubbed when the winding shaft is rotated. Can be mitigated, thereby suppressing the generation of core waste. As a result, it is possible to suppress the development failure of the photosensitive resin laminate due to the adhesion of the core residue and to improve the product yield.
There are no particular limitations on the shape, number, arrangement, and mounting method of the roller 5 on the winding shaft, and it is possible to rotate the roller 5 in at least both the axial and circumferential directions of the central axis 2. Shapes and mounting methods can be employed. For example, as shown in FIG. 5, the roller 5 may be spherical. Further, the roller 5 can be attached to the take-up shaft 1 via a ball bearing or the like.
Moreover, since the slit apparatus of this invention has the structure similar to the conventional slit apparatus except the structure of a winding-up axis | shaft, the description is abbreviate | omitted.

  After slitting the master roll of the photosensitive resin laminate with a predetermined width using a slit device having a winding shaft having the above-described configuration, first, on the winding shaft 1, to wind up on the core. Fit the core 10 The core 10 is provided with ribs 11 on the inner surface of the core in order to provide strength (see FIG. 8). The core 10 is fixed (gripped) to the winding shaft 1 by the claws 9 protruding from the outer peripheral surface of the winding shaft 1. The photosensitive resin laminate web cut (slit) to a predetermined width is wound thereon. The claws 9 grip and fix the inner diameter of the core 10 during film winding. At the time of film winding, both the central shaft 2 and the winding shaft 1 and core 10 rotate in the circumferential direction (the direction of the arrow B in the figure). After completion of film winding, when the core 10 is taken out from the winding shaft 1, the claws 9 are recessed to release fixation, and the core 10 is removed from the winding shaft. By relatively pressing the winding shaft 1 and the core 10 on which the film is wound in the axial direction relatively, the core 4 can be taken out from the winding shaft 1 very lightly and smoothly by rotating the roller 4 in the axial direction. .

Below, an example of the photosensitive resin laminated body (dry film resist roll) cut | judged by the slit apparatus of this invention is demonstrated.
<Dry film resist roll>
FIG. 6 is a view showing a configuration example of a dry film resist roll.
A dry film resist roll in which a photosensitive resin laminate 30 is wound on a winding core 34, the photosensitive resin laminate comprising (A) a support 31, (B) a photosensitive resin layer 32 and (C) A thermoplastic polymer having a protective layer 33 so as to be positioned in this order, and (B) a photosensitive resin layer containing (a) a carboxyl group (hereinafter referred to as “(a) thermoplastic polymer” 20 to 90% by mass, (b) an addition polymerizable monomer having at least one polymerizable ethylenic unsaturated bond in its molecule (hereinafter sometimes referred to as “(b) addition polymerizable monomer”) 5 (C) A protective layer is a propylene-based copolymer film, containing -75 mass%, and (c) 0.01-30 mass% of photoinitiators.

[(A) Support]
As the support (A), a transparent one that transmits light emitted from the exposure light source is desirable. As such a support, polyethylene terephthalate film, polyvinyl alcohol film, polyvinyl chloride film, vinyl chloride copolymer film, polyvinylidene chloride film, vinylidene chloride copolymer film, polymethyl methacrylate copolymer film, polystyrene film And polyacrylonitrile films, styrene copolymer films, polyamide films, and cellulose derivative films. As these films, those stretched as necessary can also be used.

[(B) Photosensitive resin layer]
(B) The photosensitive resin layer is (a) 20 to 90% by mass of a thermoplastic polymer, (b) 5 to 75% by mass of an addition polymerizable monomer, and (c) 0.01 to 30% by mass of a photopolymerization initiator And a layer which can be formed by applying a photosensitive resin composition prepared to contain, for example, the components (a), (b) and (c) above onto any substrate.

(A) Thermoplastic Polymer The (a) thermoplastic polymer used in the present invention has a carboxyl group, and is typically a polymer having an α, β-unsaturated carboxyl group-containing monomer as a polymerization component . The carboxyl group in the thermoplastic polymer (a) is necessary for the photosensitive resin layer (B) to have developability and releasability with respect to a developer and a remover solution composed of an alkaline aqueous solution.

(B) Addition polymerizable monomer (b) The addition polymerizable monomer has at least one polymerizable ethylenic unsaturated bond in the molecule. The ethylenically unsaturated bond is typically a terminal ethylenically unsaturated group.

(C) Photopolymerization initiator (c) As the photopolymerization initiator, one usually used as a photopolymerization initiator of a photosensitive resin can be appropriately used, but from the viewpoint of sensitivity and resolution, especially hexaarylbisimidazole (described below And triarylimidazolyl dimers are preferably used. In particular, 2- (o-chlorophenyl) -4,5-diphenylimidazolyl dimer is a photopolymerization initiator having a high effect on the resolution and the strength of the cured resist film, and is preferably used. These may be used alone or in combination of two or more.

  The content of the photopolymerization initiator (c) in the photosensitive resin layer (B) is in the range of 0.01 to 30% by mass, and preferably in the range of 0.05 to 10% by mass.

Other Components (B) The photosensitive resin layer can contain various additives as other components of the components (a) to (c). Specifically, for example, coloring substances such as dyes and pigments can be employed.
Further, a color former may be contained in the (B) photosensitive resin layer so that a visible image can be given by exposure.

  The thickness of the photosensitive resin layer (B) is preferably 5 to 100 μm, more preferably 7 to 60 μm. The film thickness can be appropriately selected according to the application.

(Photosensitive resin composition preparation liquid)
(B) A photosensitive resin layer can be formed by application | coating of the photosensitive resin composition prepared so that the component mentioned above may be included. (B) When forming a photosensitive resin layer, the photosensitive resin composition preparation liquid which adds a solvent to the photosensitive resin composition is employable in various uses. Suitable solvents include ketones typified by methyl ethyl ketone (MEK), and alcohols such as methanol, ethanol and isopropyl alcohol.

[(C) Protective layer]
The protective layer (C) is formed for the purpose of protecting the photosensitive resin layer (B). One of the important characteristics of the protective layer used in the dry film resist is that the protective layer is sufficiently smaller than the support in terms of adhesion to the photosensitive resin layer and can be easily peeled off.

  The (C) protective layer is, for example, a propylene-based copolymer film.

  The thickness of the protective layer (C) is preferably 10 to 100 μm, and more preferably 15 to 70 μm.

  The dry film resist roll can be produced by sequentially laminating (A) a support, (B) a photosensitive resin layer, and (C) a protective layer by a conventionally known method. For example, the photosensitive resin composition for forming (B) photosensitive resin layer is mixed with the solvent which melt | dissolves this, and the uniform solution as a photosensitive resin composition preparation liquid is prepared. This is first applied on a support (A) using a bar coater or a roll coater and dried, and (A) a photosensitive resin layer composed of a photosensitive resin composition is laminated on the support. Next, a dry film resist can be produced by laminating the (C) protective layer on the (B) photosensitive resin layer.

The dry film resist obtained as described above is, after coating and drying of the photosensitive resin layer (B), temporarily wound on a winding core to a predetermined length, and then the width and winding length according to the use purpose Slitted.
In particular, by slitting using the slit device of the present embodiment, generation of core residue can be suppressed, and generation of development defects due to adhesion of residue can be suppressed, whereby an excellent photosensitive resin laminate can be obtained. .

  The photosensitive resin laminate cut by the slit device of the present invention is, for example, a printed wiring board, a flexible printed wiring board, an IC chip mounting lead frame (hereinafter also referred to as a lead frame), a metal mask. Metal foil precision processing such as manufacturing, semiconductor package manufacturing such as BGA (ball grid array) and CSP (chip size package), TAB (Tape Automated Bonding), COF (Chip On Film): Semiconductor IC on film like fine wiring board Photosensitive resin laminates which are suitable for the manufacture of tape substrates typified by the above, the manufacture of semiconductor bumps, the manufacture of members such as ITO electrodes in the flat panel display field, address electrodes or electromagnetic wave shields, etc. It is a body.

As mentioned above, although embodiment of this invention was described, this invention is not limited to this, It can change suitably in the range which does not deviate from the meaning of invention.
For example, the present invention is not limited to the winding shaft of the slit device of the photosensitive resin laminate, but the unwinding shaft for unwinding the roll, the receiving shaft (unloader shaft) for transferring the winding roll product from the winding shaft, etc. It goes without saying that it can be applied to

By using the slit device according to the present invention, generation of core residue at the time of slitting can be suppressed, and it can be widely used as a slit device for a photosensitive resin laminate.
Further, the present invention is particularly preferable because generation of core residue can be effectively suppressed when using a core having a rib on the inner peripheral surface as a core (winding core) of the photosensitive resin laminate. Applicable to

1 take-up shaft 2 central shaft 3 roller support plate 4 spacing collar 5 roller (small diameter roller)
6 pins 7 notches 8 grooves 9 claws 10 cores 11 ribs

Claims (2)

A slit device for slitting a roll of a photosensitive resin laminate with a predetermined width, comprising:
In a winding shaft on which a cylindrical winding core on which the slit photosensitive resin laminate is wound is attached,
A plurality of small diameter rollers are provided in the outer peripheral surface of the winding shaft,
In the small diameter roller, a part of the outer peripheral surface protrudes outside the outer periphery of the winding shaft, and an outer peripheral surface portion protruding outside the winding shaft at least extends in the axial direction of the winding shaft and A slitting device of a photosensitive resin laminate characterized in that it rotates in both circumferential directions.   The slitting device of a photosensitive resin laminate according to claim 1, wherein the core has a rib on an inner circumferential surface.

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