JP2018176068A - Protective jacket for uv radiation - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a protective jacket for UV radiation that increases the UV radiation strength of UV radiation means and prevents long-term deterioration thereof.SOLUTION: There is provided a protective jacket 10 for UV radiation disposed between an object to be irradiated with UV rays and UV radiation means 12 to protect the UV radiation means 12, which UV protective jacket 10 is characterized by comprising a molten quartz glass body 20 that covers the UV radiation face of the UV radiation means 12, with an aluminum oxide film 30 formed on the molten quartz glass body 20.SELECTED DRAWING: Figure 1

Description

  BACKGROUND OF THE INVENTION Field of the Invention The present invention relates to a protective jacket for ultraviolet radiation which covers an ultraviolet radiation surface such as an ultraviolet radiation lamp and transmits ultraviolet radiation.

  FIG. 2: is explanatory drawing of a ultraviolet-ray water treatment apparatus, (1) is a side view, (2) is AA sectional drawing of (1). As shown, the ultraviolet water treatment apparatus 1 has a cylindrical chamber body 2 having a water supply port at one end and a drainage port at the other end, and is attached to the inside of the chamber body 2 along the longitudinal direction. A plurality of protection jackets 3 connected to both ends of the chamber body 2 and an ultraviolet irradiation lamp 4 attached to the inside of the cylinder of each protection jacket 3 are mainly configured. In the UV water treatment apparatus 1 having such a configuration, the water supplied from the water supply port of the chamber body 2 passes between the protective jackets 3 along the longitudinal direction of the chamber body 2. When the water passes through the inside of the chamber body 2, the ultraviolet rays of the ultraviolet ray irradiation lamp 4 are irradiated, and the sterilizing process and the organic substance decomposing process are performed to become pure water and discharged from the drainage port.

  Such an ultraviolet water treatment apparatus is applied as a production apparatus for industrial ultrapure water in the semiconductor manufacturing field (for example, disclosed in Patent Documents 1 and 2). The protective jacket is generally made of quartz glass having a predetermined strength as a material and transmitting ultraviolet light. This quartz glass is classified into synthetic quartz glass and fused quartz glass which are different in manufacturing method. In fused silica glass, raw materials are melted at high temperature, cooled and vitrified. On the other hand, synthetic quartz glass is deposited by chemical vapor deposition (CVD).

Unexamined-Japanese-Patent No. 1-164488 JP 10-151450 A

The aforementioned synthetic quartz glass has fewer impurities than fused silica glass, and has a high transmittance of ultraviolet light. As an example, the transmittance of ultraviolet light in the wavelength range of 100 to 200 nm is 85% or more for synthetic quartz glass and 60% to 70% for fused silica glass.
However, since synthetic quartz glass is expensive, there is a problem that the cost of the entire apparatus is increased in the case of a pure water production apparatus using a combination of a large number of quartz glass.
In addition, since fused silica glass has a low transmittance of ultraviolet light, heat and ozone are easily generated in the space between the protective jacket and the ultraviolet irradiation lamp, and the protective jacket may be deteriorated to affect ultrapure water. there were.

  SUMMARY OF THE INVENTION In view of the above-described problems of the prior art, it is an object of the present invention to provide a protective jacket for ultraviolet irradiation, which enhances the ultraviolet irradiation intensity of the ultraviolet irradiation means and prevents deterioration over time.

As a first means for solving the above problems, the present invention relates to a protective jacket for ultraviolet irradiation which is provided between an object to be irradiated with ultraviolet light and ultraviolet irradiation means to transmit ultraviolet light to protect the ultraviolet irradiation means.
It has a fused silica glass body covering the ultraviolet ray irradiation surface of the ultraviolet ray irradiation means,
An object of the present invention is to provide a protective jacket for ultraviolet irradiation characterized in that an aluminum oxide film is formed on the fused silica glass body.
According to the first means, the protective jacket carries a positive potential from the original negative potential of the quartz glass by the aluminum oxide film, and the ionization of mercury particles in the lamp of the ultraviolet irradiation lamp is facilitated to proceed. The irradiation intensity can be increased. Further, by the increase of the ultraviolet irradiation intensity of the ultraviolet irradiation means, the generation of heat and ozone gas generated in the space between the protective jacket and the ultraviolet irradiation means can be reduced, and the deterioration of the jacket main body and the adverse effect on pure water can be suppressed.

As a second means for solving the above problems, the present invention is characterized in that, in the first means, the fused silica glass main body has the aluminum oxide film formed on the surface facing the ultraviolet irradiation means. And providing a protective jacket for ultraviolet radiation.
According to the second means, when the protective jacket for ultraviolet irradiation is applied to the ultraviolet water treatment apparatus, the aluminum oxide film is formed on the inside of the glass body, so that the contamination of pure water by the aluminum oxide film can be prevented. And sterilization treatment and organic matter decomposition treatment can be performed efficiently.

As a third means for solving the above problems, according to the present invention, in the first or second means, the aluminum oxide film is formed of a mixture of aluminum oxide and butyl acetate in a mixing ratio of 3: 7. An object of the present invention is to provide a protective jacket for ultraviolet radiation characterized by being formed.
According to the second means, the aluminum oxide film can be formed uniformly on the inner surface of the protective jacket with a predetermined film thickness.

  According to the present invention, the protective jacket carries a positive potential from the original negative potential of quartz glass by the aluminum oxide film, so that ionization of mercury particles in the inside of the ultraviolet irradiation lamp is facilitated, and the ultraviolet irradiation intensity is improved. It can be enhanced.

FIG. 1 is a schematic view of the constitution of a protective jacket for ultraviolet irradiation of the present invention. It is explanatory drawing of a ultraviolet-ray water treatment apparatus.

Embodiments of the protective jacket for UV irradiation of the present invention will be described in detail below with reference to the attached drawings.
[UV protective jacket 10]
FIG. 1 is a schematic view of the construction of the protective jacket for ultraviolet irradiation according to the present invention, (1) is a perspective view, (2) is a sectional view along the longitudinal direction with ultraviolet irradiation means mounted inside, (3) is internal Is a cross-sectional view in the direction orthogonal to the longitudinal direction with the UV irradiation means attached thereto. As shown, the protective jacket 10 for ultraviolet irradiation of the present invention is a cylindrical fused silica glass main body 20, and a low pressure discharge lamp or the like serving as the ultraviolet irradiation means 12 can be disposed in the cylinder.

The fused silica glass main body 20 has an aluminum oxide film 30 formed (coated) on the cylindrical inner surface covering the ultraviolet light irradiation surface of the ultraviolet light irradiation means 12. The film forming method of the aluminum oxide film 30 is, for example, spray-spraying a mixed solution of aluminum oxide (alumina oxide) powder and a butyl acetate estate container, and then sinter and adhere by hot air at 200 ° C. to 300 ° C. in an electric furnace. Film formation can be performed.
The mixing ratio of the butyl acetate estate solution and the aluminum oxide powder is preferably 7: 3. Thereby, a predetermined film thickness (thin film) can be uniformly formed on the inner surface.
The ultraviolet irradiation means is a means capable of irradiating ultraviolet light with a main wavelength of 254 nm using an amalgam amplifier (alloy lamp), a low pressure discharge lamp, and an LED.

[Effect]
The operation of the protective jacket for ultraviolet irradiation of the present invention according to the above configuration will be described below.
The ultraviolet irradiation means 12 is disposed inside the cylindrical shape of the protective jacket 10 for ultraviolet irradiation such as an ultraviolet water treatment apparatus, and the ultraviolet irradiation target such as water is irradiated with ultraviolet light having a main wavelength of 254 nm. By the aluminum oxide film 30, the inner surface of the protective jacket for ultraviolet irradiation 10 carries a positive potential from the original negative potential of the quartz glass, so that ionization of mercury particles in the inside of the ultraviolet irradiation lamp is facilitated and the ultraviolet irradiation intensity Can be enhanced. In addition, the generation of heat and ozone gas generated in the space between the protective jacket for ultraviolet irradiation 10 and the ultraviolet irradiation means 12 is reduced by the increase of the ultraviolet irradiation intensity of the ultraviolet irradiation means 12 so that the fused silica glass main body 20 is deteriorated and pure. We can control the adverse effects on water.

[Example]
The UV irradiance of ultraviolet light having a main wavelength of 254 nm of the amalgam lamp (no-load voltage 250 V, maximum current 1.3 A, starting voltage 8000 V) serving as the ultraviolet irradiation means was 43.33 mw / cm 2.
In the present invention, the above-mentioned amalgam lamps were disposed in a tube of a protective jacket for ultraviolet irradiation, B: fused silica glass tube (without aluminum oxide film), C: synthetic quartz glass tube, and each UV illuminance was measured. As a result, it was A: 37.59 mw / cm 2, B: 35.32 mw / cm 2, C: 38.20 mw / cm 2.
Each transmittance was A = 83%, B = 77%, C = 84%.
Thereby, the protective jacket for ultraviolet irradiation of the present invention had a 6% increase in transmittance as compared to the fused silica glass tube, and a transmittance comparable to that of the synthetic quartz glass tube was obtained. Therefore, cost reduction of the whole apparatus can be achieved by using cheap fused silica glass for the protective jacket for ultraviolet irradiation. In addition, even if fused silica glass is used, the ultraviolet irradiation intensity can be increased to that of synthetic quartz glass.

In the present embodiment, the aluminum oxide film is formed on the inner side (inner surface) of the fused silica glass body, but the location is not limited to this, and may be formed on the outer side (outer surface) of the fused silica glass body. When the aluminum oxide film is formed on the outside, the sterilization treatment and the organic substance decomposition treatment in air can be mainly performed.
In addition, the protective jacket for ultraviolet radiation of the present invention can significantly reduce the transmission of ultraviolet radiation with a main wavelength of 185 nm. Therefore, when the protective jacket for ultraviolet irradiation of the present invention is applied to an inexpensive low-pressure discharge lamp (capable of irradiating ultraviolet light of wavelengths 185 nm and 254 nm), the irradiation intensity of ultraviolet light of wavelength 254 nm is increased and transmission of ultraviolet light of wavelength 184 nm Thus, the generation of heat and ozone gas generated in the space between the protective jacket for ultraviolet irradiation and the ultraviolet irradiation means can be significantly reduced to suppress the deterioration of the fused quartz glass body and the adverse effect on pure water.
Moreover, it was as follows about temperature rise (after 1 hour after lighting) of the protective jacket under ultraviolet irradiation.
The protective jacket for ultraviolet irradiation of the present invention had an internal temperature of 19.2 ° C. before lighting, and a temperature of 49.8 ° C. after one hour.
The fused silica glass had an internal temperature of 18.3 ° C. before lighting and a temperature of 53.3 ° C. after one hour.
The synthetic quartz glass had an internal temperature of 20.1 ° C. before lighting, and a temperature of 49.3 ° C. after one hour.
As mentioned above, the protective jacket for ultraviolet irradiation of this invention can suppress a temperature rise rather than fused silica glass, and can maintain the temperature rise comparable to synthetic quartz glass. For this reason, generation | occurrence | production of the heat which arises in the space between a protective jacket and an ultraviolet irradiation means can be reduced, and deterioration of a jacket main body and the bad influence to a pure water can be suppressed.

1 ...... UV water treatment device, 2 ...... Chamber body, 3 ...... Protective jacket, 4 ...... UV irradiation lamp,
10: Protective jacket for ultraviolet irradiation, 12: Ultraviolet irradiation means, 20: Fused quartz glass body, 30: Aluminum oxide film.

Claims (3)

In a protective jacket for ultraviolet irradiation provided between an object to be irradiated with ultraviolet light and ultraviolet irradiation means to transmit ultraviolet light to protect the ultraviolet irradiation means,
It has a fused silica glass body covering the ultraviolet ray irradiation surface of the ultraviolet ray irradiation means,
A protective jacket for ultraviolet irradiation characterized in that an aluminum oxide film is formed on the fused silica glass body.   The ultraviolet radiation protection jacket according to claim 1, wherein the fused silica glass body has the aluminum oxide film formed on the surface facing the ultraviolet radiation means.   The ultraviolet radiation protective jacket according to claim 1 or 2, wherein the aluminum oxide film is formed using a mixture of aluminum oxide and butyl acetate in a mixing ratio of 3: 7.

Images