JP2018167576A5 - - Google Patents
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- Publication number
- JP2018167576A5 JP2018167576A5 JP2017247345A JP2017247345A JP2018167576A5 JP 2018167576 A5 JP2018167576 A5 JP 2018167576A5 JP 2017247345 A JP2017247345 A JP 2017247345A JP 2017247345 A JP2017247345 A JP 2017247345A JP 2018167576 A5 JP2018167576 A5 JP 2018167576A5
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric device
- partition member
- wall
- space
- further satisfied
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000005192 partition Methods 0.000 claims 6
- 238000002347 injection Methods 0.000 claims 3
- 239000007924 injection Substances 0.000 claims 3
- 239000007788 liquid Substances 0.000 claims 3
- 239000000463 material Substances 0.000 claims 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical group O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
- 230000003647 oxidation Effects 0.000 claims 1
- 238000007254 oxidation reaction Methods 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
- 229910052814 silicon oxide Inorganic materials 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US15/923,891 US20180287046A1 (en) | 2017-03-29 | 2018-03-16 | Piezoelectric device, liquid ejecting head, and liquid ejecting apparatus |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2017064532 | 2017-03-29 | ||
| JP2017064532 | 2017-03-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2018167576A JP2018167576A (ja) | 2018-11-01 |
| JP2018167576A5 true JP2018167576A5 (enExample) | 2021-01-07 |
Family
ID=64018351
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2017247345A Withdrawn JP2018167576A (ja) | 2017-03-29 | 2017-12-25 | 圧電デバイス、液体噴射ヘッド、及び、液体噴射装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2018167576A (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7380202B2 (ja) | 2019-12-26 | 2023-11-15 | ブラザー工業株式会社 | 液体吐出ヘッド、及び、液体吐出装置 |
| JP7508848B2 (ja) | 2020-04-22 | 2024-07-02 | ブラザー工業株式会社 | 液体吐出ヘッド |
| JP7452223B2 (ja) | 2020-04-22 | 2024-03-19 | ブラザー工業株式会社 | 液体吐出ヘッド |
| JP7540189B2 (ja) | 2020-04-30 | 2024-08-27 | ブラザー工業株式会社 | 液体吐出ヘッド |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3460218B2 (ja) * | 1995-11-24 | 2003-10-27 | セイコーエプソン株式会社 | インクジェットプリンタヘッドおよびその製造方法 |
| JP3451623B2 (ja) * | 1996-10-28 | 2003-09-29 | セイコーエプソン株式会社 | インクジェット記録ヘッド |
| WO2001074590A1 (en) * | 2000-03-31 | 2001-10-11 | Fujitsu Limited | Multinozzle ink-jet head |
| JP5058717B2 (ja) * | 2006-09-08 | 2012-10-24 | キヤノン株式会社 | 液体吐出ヘッドおよびその製造方法 |
| JP6273893B2 (ja) * | 2014-02-24 | 2018-02-07 | セイコーエプソン株式会社 | 液体噴射ヘッド、及び、液体噴射装置 |
| EP3072693B1 (en) * | 2015-03-23 | 2018-11-28 | Brother Kogyo Kabushiki Kaisha | Piezoelectric actuator and recording head |
-
2017
- 2017-12-25 JP JP2017247345A patent/JP2018167576A/ja not_active Withdrawn
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