JP2018143968A - Bearing washing device and bearing washing method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To remove oil content of an inner ring and an outer ring without generating cause of a torque failure to prevent an adhesive failure of a bearing.SOLUTION: A bearing washing device 1 includes: a plasma generation device 7 for generating plasma; and a bearing support jig 3 for forming a plasma flow passage P1 for circulating plasma generated by the plasma generation device 7 therethrough along an inner peripheral surface of an inner ring 13 or outer peripheral surface of an outer ring 15 of a bearing 11 and hermetically sealing an annular space between the inner ring 13 and the outer ring 15 relative to the plasma flow passage P1.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a bearing cleaning device and a bearing cleaning method.

  2. Description of the Related Art Conventionally, there is known a pivot that is used in HDDs (Hard Disk Drives) or the like and is assembled by joining an inner ring and an outer ring of a bearing to a shaft and a housing with an adhesive, respectively (for example, see Patent Document 1). As for the assembly of such a pivot, it is the mainstream that the bearing is bonded and fixed with a pre-load applied, but it is sealed in the bearing because the bearing is originally insufficiently washed or stored for a long time. If the oil component is attached to the inner ring and the outer ring of the bearing, such as the oil component of the grease that has flown out and the cleaning degree of the inner ring and the outer ring deteriorates, normal adhesive strength cannot be obtained.

  In order to prevent such poor adhesion of the bearing, it is common to clean the inner and outer rings of the bearing before assembling the pivot. As a method for cleaning the bearing, for example, there is cleaning performed by applying a solvent to a cloth or a brush.

JP 2011-220427 A

  However, in the method of cleaning the bearing by applying a solvent to the cloth or brush, the oil in the bearing cannot be removed sufficiently, or the solvent applied to the cloth or brush flows into the bearing and the oil in the bearing is removed from the inner ring. And may leak to the outer ring. Further, by using a cloth or a brush, contaminants such as dust or brush residue may flow into the bearing and cause a torque failure.

  In general, as an effective method for removing oil from metal parts without using a solvent or a brush, there is dry cleaning such as UV (ultraviolet) cleaning or plasma cleaning. When dry cleaning is applied to the bearing, a cleaning atmosphere such as ozone or plasma may flow into the bearing, altering the grease inside the bearing and causing torque failure.

  The present invention has been made in view of the above-described circumstances, and removes oil from the inner ring and the outer ring without causing a cause of torque failure, thereby preventing a bearing adhesion failure and a bearing cleaning device. An object is to provide a cleaning method.

In order to achieve the above object, the present invention provides the following means.
According to a first aspect of the present invention, a plasma generating section for generating plasma and a plasma flow path for circulating the plasma generated from the plasma generating section along an inner peripheral surface of an inner ring or an outer peripheral surface of an outer ring of a bearing are formed. And a bearing cleaning device including a bearing support jig for sealing an annular space between the inner ring and the outer ring with respect to the plasma flow path.

  According to this aspect, the plasma flow path extending in the axial direction along the inner peripheral surface of the inner ring or the outer peripheral surface of the outer ring is formed by the bearing support jig. Therefore, by circulating the plasma generated from the plasma generating portion along the plasma flow path, the inner peripheral surface of the inner ring of the bearing or the outer peripheral surface of the outer ring that forms the plasma flow path can be plasma cleaned.

  In this case, the bearing support jig seals the annular space formed between the inner and outer rings of the bearing with respect to the plasma flow path, so that the plasma flows between the inner and outer rings of the bearing and the grease in the bearing Can be prevented from being altered. Further, since no cloth or brush is used, contamination such as dust and brush residue does not enter the bearing. Moreover, since no solvent is used, the oil content in the bearing does not flow out to the inner ring or the outer ring. Therefore, the oil content of the inner ring and the outer ring can be removed without causing the cause of torque failure, and bearing adhesion failure can be prevented.

  In the above aspect, the bearing support jig includes a substantially cylindrical guide part that accommodates the outer ring of the bearing in a fitted state, and the inner ring and the guide part of the bearing that are accommodated by the guide part. A cylindrical space extending in the axial direction formed by the inner peripheral surface of the inner ring.

  With this configuration, the bearing of the bearing between the guide portion and the inner ring that accommodates the outer ring in a fitted state is sealed by the seal portion with respect to the plasma flow path formed along the inner peripheral surface of the inner ring of the bearing. The annular space between the inner and outer rings is sealed. Therefore, the inner peripheral surface of the inner ring can be plasma cleaned while preventing the plasma from flowing between the inner and outer rings of the bearing.

  In the above aspect, the guide portion accommodates the outer rings in a fitted state in a state where the plurality of bearings are arranged in the axial direction, and the seal portion is formed by the guide portion. Are closed between the inner rings at both ends in the axial direction of the bearing arrangement body arranged in the axial direction and the end portions in the axial direction of the guide portion, and the plasma flow path includes a plurality of plasma flow paths. It may be formed by the inner peripheral surface of the inner ring.

  By comprising in this way, a bearing arrangement body can be formed only by accommodating a some outer ring | wheel in a fitting state with a guide part. In addition, the seal portion is formed between the inner and outer rings of the plurality of bearings only by closing the space between the inner rings at both ends in the axial direction of the bearing array and the end portions in the axial direction of the guide portions. An annular space continuous in the axial direction can be sealed. Therefore, the inner peripheral surface of each inner ring can be easily plasma-cleaned at once while preventing the plasma from flowing between the inner and outer rings of each bearing.

  In the above aspect, the inner ring is shorter in the axial direction than the outer ring, and the bearing support jig is disposed between the inner rings in the axial direction, together with the inner peripheral surface of the inner ring, the plasma. It is good also as providing the spacer part which forms a flow path.

  With this configuration, even when the inner ring of the bearing is shorter in the axial direction than the outer ring, the inner peripheral surface of each inner ring is formed by the spacer without causing a gap between the inner rings in the axial direction. A plasma channel extending in the axial direction can be formed. Therefore, such a bearing can also efficiently clean the inner peripheral surface of the inner ring without plasma flowing between the inner and outer rings.

  In the above aspect, the bearing support jig includes a substantially shaft-shaped guide portion that is inserted into the inner ring of the bearing in a fitted state, the outer ring of the bearing in which the guide portion is inserted into the inner ring, and the A seal portion that closes the annular space with the guide portion; and a substantially cylindrical cover portion that covers an outer peripheral surface of the bearing, wherein the plasma flow path includes an inner peripheral surface of the cover portion and the outer ring. It may be a cylindrical space formed between the outer peripheral surface and extending in the axial direction.

  With this configuration, the plasma flow path is formed between the outer peripheral surface of the outer ring and the inner peripheral surface of the cover portion only by covering the outer peripheral surface of the bearing with the substantially cylindrical cover portion. Then, the annular space between the inner and outer rings of the bearing is sealed between the outer ring and the substantially shaft-shaped guide part inserted into the inner ring of the bearing by the seal portion with respect to the plasma flow path. . Therefore, the outer peripheral surface of the outer ring can be plasma cleaned while preventing the plasma from flowing between the inner and outer rings of the bearing.

  In the above aspect, the guide portion is inserted into each inner ring in a state of being fitted in the axial direction with the plurality of bearings arranged in the axial direction, and the seal portion is inserted into the plurality of bearings by the guide portion. Are closed in the axial direction between the outer rings at both ends in the axial direction and the end portions in the axial direction of the guide portion, and the cover portion is arranged in the bearing arrangement. The outer peripheral surface of the body may be covered, and the plasma channel may be formed between the inner peripheral surface of the cover part and the outer peripheral surfaces of the plurality of outer rings.

  By comprising in this way, a bearing arrangement body can be formed only by inserting a guide part in a fitting state to a plurality of inner rings. Further, the seal portion closes the space between the outer rings at both ends in the axial direction of the bearing array and the end portions in the axial direction of the guide portion, and only covers the outer peripheral surface of the bearing array with the cover portion. The annular space which is continuous between the inner and outer rings of the plurality of bearings and which is continuous in the axial direction can be sealed. Therefore, it is possible to easily clean the outer peripheral surface of each outer ring at a time while preventing the plasma from flowing between the inner and outer rings of each bearing.

  In the above aspect, the outer ring has a shorter length in the axial direction than the inner ring, and the bearing support jig is disposed between the outer rings in the axial direction so that the plasma flow is performed together with the outer peripheral surface of these outer rings. It is good also as providing the spacer part which forms a path | route.

  By configuring in this way, even when the outer ring of the bearing is shorter in the axial direction than the inner ring, the spacer portion does not create a gap between the outer rings in the axial direction, and the outer circumferential surface of each outer ring. A plasma flow path extending in the axial direction can be formed. Therefore, such a bearing can also efficiently clean the outer peripheral surface of the outer ring without causing plasma to flow between the inner and outer rings.

  According to a second aspect of the present invention, a plasma generating unit that generates plasma, and a first plasma channel that circulates the plasma generated from the plasma generating unit along the inner peripheral surface of the inner ring of the bearing, A first bearing support jig that seals an annular space between the inner ring and the outer ring with respect to the first plasma flow path, and is emitted from the plasma generator along the outer peripheral surface of the outer ring of the bearing. The bearing cleaning device includes a second bearing support jig that forms a second plasma flow path for circulating the plasma and seals the annular space with respect to the second plasma flow path.

  According to this aspect, the first bearing support jig forms the first plasma flow path extending in the axial direction along the inner circumferential surface of the inner ring, and the second bearing support jig runs along the outer circumferential surface of the outer ring. A second plasma channel extending in the axial direction is formed. Therefore, by causing the plasma generated from the plasma generating portion to flow along the first plasma flow path and the second plasma flow path, the inner peripheral surface of the inner ring of the bearing and the second plasma flow forming the first plasma flow path. The outer peripheral surface of the outer ring of the bearing that forms the path can be plasma cleaned.

  In this case, each bearing support jig seals the annular space formed between the inner and outer rings of the bearing with respect to the plasma flow path, thereby preventing plasma from flowing between the inner and outer rings of the bearing. Can do. In addition, since no cloth, brush, or solvent is used, contamination such as dust or brush residue does not enter the bearing, and oil in the bearing does not flow out to the inner ring or the outer ring. Therefore, the oil content of the inner ring and the outer ring can be removed without causing the cause of torque failure, and bearing adhesion failure can be prevented.

  In the above aspect, the first bearing support jig includes a substantially cylindrical first guide portion that accommodates the outer ring of the bearing in a fitted state, and the inner ring of the bearing that is accommodated by the first guide portion. And a first seal portion that closes the annular space between the first guide portion, and the first plasma flow path is a cylindrical shape that extends in the axial direction formed by the inner peripheral surface of the inner ring. The second bearing support jig is a space, and the second bearing support jig is inserted into the inner ring of the bearing in a fitted state. The second guide part is inserted into the inner ring, and the bearing is inserted into the inner ring. A second seal portion that closes the annular space between the outer ring and the second guide portion, and a substantially cylindrical cover portion that covers an outer peripheral surface of the bearing, wherein the second plasma flow path is The inner peripheral surface of the cover part It may be a cylindrical space extending in the axial direction is formed between the outer peripheral surface of the outer ring.

  In the above aspect, the first guide portion accommodates the outer rings in a fitted state in a state where a plurality of the bearings are arranged in the axial direction, and the first seal portion is the first guide portion. The plurality of bearings are closed in the axial direction between the inner rings at both ends in the axial direction and the end portions in the axial direction of the first guide portion. The first plasma flow path is formed by the inner peripheral surfaces of the plurality of inner rings, and the second guide portion is fitted to each inner ring in a state where the plurality of bearings are arranged in the axial direction. And the second seal portion is inserted in a joint state, and the outer ring at both ends in the axial direction of the second bearing arrangement body in which a plurality of the bearings are arranged in the axial direction by the second guide portion, The axial direction of the second guide part Each of the end portions of the cover portion, the cover portion covers an outer peripheral surface of the second bearing array, and the second plasma flow path includes an inner peripheral surface of the cover portion and a plurality of the outer rings. It is good also as forming between the said outer peripheral surfaces.

  According to a third aspect of the present invention, a plasma flow path is formed that supports the bearing and causes plasma to flow along the inner peripheral surface of the inner ring or the outer peripheral surface of the outer ring, and the inner ring and the outer ring with respect to the plasma flow path. A bearing support step for sealing the annular space between and a plasma flow step for flowing the plasma along the plasma flow path formed by the bearing support step.

  According to this aspect, the plasma flow path extending in the axial direction along the inner peripheral surface of the inner ring of the supported bearing or the outer peripheral surface of the outer ring is formed by the bearing support step. Therefore, by circulating the plasma along the plasma flow path in the plasma flow process, the inner peripheral surface of the inner ring of the bearing or the outer peripheral surface of the outer ring that forms the plasma flow path can be plasma cleaned.

  In this case, the bearing support process seals the annular space formed between the inner and outer rings of the bearing with respect to the plasma flow path, so that plasma flows between the inner and outer rings of the bearing in the plasma distribution process. It is possible to prevent the grease in the bearing from being altered. In addition, since no cloth or brush is used, contamination such as dust or brush residue does not enter the inside of the bearing, and no solvent is used, so that oil in the bearing does not flow out to the inner ring or the outer ring. Therefore, the oil content of the inner ring and the outer ring can be removed without causing the cause of torque failure, and bearing adhesion failure can be prevented.

  In the above aspect, the bearing supporting step includes an accommodating step of accommodating the outer ring of the bearing in a fitted state by a substantially cylindrical guide portion, and the inner ring and the guide portion of the bearing accommodated by the accommodating step. A cylindrical space extending in the axial direction formed by the inner peripheral surface of the inner ring.

  With such a configuration, a substantially cylindrical guide in which the outer ring of the bearing is accommodated in the fitted state in the closing process with respect to the plasma flow path formed along the inner peripheral surface of the inner ring of the bearing. An annular space between the inner and outer rings of the bearing is sealed between the portion and the inner ring. Therefore, the inner peripheral surface of the inner ring can be plasma cleaned while preventing the plasma from flowing between the inner and outer rings of the bearing.

  In the above aspect, the accommodating step accommodates the outer rings in a fitted state by a substantially cylindrical guide portion in a state where a plurality of the bearings are arranged in the axial direction, and the closing step includes the accommodating step. A plurality of the bearings are arranged in the axial direction according to a process, and each of the inner rings at both ends in the axial direction of the bearing arrangement body and the end portions in the axial direction of the guide portions are respectively closed. A plasma flow path may be formed by the inner peripheral surfaces of the plurality of inner rings.

  By comprising in this way, a bearing arrangement | sequence body can be formed only by accommodating a some outer ring | wheel in a fitting state with a guide part in an accommodating process. Further, in the closing step, the bearing array is formed between the inner and outer rings of the plurality of bearings only by closing each of the inner rings at both ends in the axial direction of the bearing array and each end of the guide portion in the axial direction. An annular space continuous in the axial direction can be sealed. Therefore, the inner peripheral surface of each inner ring can be easily plasma-cleaned at once while preventing the plasma from flowing between the inner and outer rings of each bearing.

  In the above aspect, the bearing support step includes an insertion step of inserting a substantially shaft-shaped guide portion into the fitted state in the inner ring of the bearing, and the bearing in which the guide portion is inserted into the inner ring by the insertion step. A closing step of closing the annular space between the outer ring and the guide portion, and a covering step of covering the outer peripheral surface of the bearing with a substantially cylindrical cover portion, wherein the plasma flow path includes the cover It may be a cylindrical space extending in the axial direction formed between the inner peripheral surface of the portion and the outer peripheral surface of the outer ring.

  With this configuration, the plasma flow path is formed between the outer peripheral surface of the outer ring and the inner peripheral surface of the cover portion only by covering the outer peripheral surface of the bearing with the substantially cylindrical cover portion in the cover step. . Then, an annular space between the inner and outer rings of the bearing is formed between the outer ring and the substantially shaft-shaped guide portion inserted into the inner ring of the bearing in the closing process with respect to the plasma flow path. Sealed. Therefore, the outer peripheral surface of the outer ring can be plasma cleaned while preventing the plasma from flowing between the inner and outer rings of the bearing.

  In the above aspect, in the insertion step, the guide portions are inserted into the inner rings in a fitted state in a state where a plurality of the bearings are arranged in the axial direction, and a plurality of the closing steps are performed by the insertion step. A plurality of the bearings are arranged in the axial direction, each of the outer rings at both ends in the axial direction of the bearing array and the end portions in the axial direction of the guide portions are respectively closed; The cover portion may cover the outer peripheral surface of the bearing array, and the plasma channel may be formed between the inner peripheral surface of the cover portion and the outer peripheral surfaces of the plurality of outer rings.

  By comprising in this way, a bearing arrangement body can be formed only by inserting a guide part in a fitting state in a plurality of inner rings in an insertion process. Further, in the closing step, the outer circumferential surface of the bearing arrangement body is closed by the cover portion in the covering step while closing between the outer rings at both ends in the axial direction of the bearing arrangement body and the end portions in the axial direction of the guide portion. It is possible to seal the annular space that is continuous between the inner and outer rings of the plurality of bearings in the axial direction. Therefore, it is possible to easily clean the outer peripheral surface of each outer ring at a time while preventing the plasma from flowing between the inner and outer rings of each bearing.

  According to a fourth aspect of the present invention, a first plasma flow path for supporting a bearing and circulating plasma along the inner peripheral surface of the inner ring is formed, and the inner ring and the outer ring are connected to the first plasma flow path. A first bearing support step for sealing an annular space between the first plasma flow step, a first plasma flow step for flowing the plasma along the first plasma flow path formed by the first bearing support step, and a support for the bearing. Forming a second plasma flow path for circulating the plasma along the outer peripheral surface of the outer ring, and sealing the annular space with respect to the second plasma flow path; And a second plasma circulation step for flowing the plasma along the second plasma flow path formed by the bearing support step.

  According to this aspect, the first plasma flow path extending in the axial direction along the inner peripheral surface of the inner ring of the bearing is formed by the first bearing support process, and the first plasma flow path is formed by the first plasma circulation process. The inner peripheral surface of the inner ring of the bearing is cleaned by plasma. The second bearing support step forms a second plasma flow path extending in the axial direction along the outer peripheral surface of the outer ring of the bearing, and the second plasma flow step forms a second plasma flow path of the bearing outer ring forming the second plasma flow path. The outer peripheral surface is plasma cleaned.

  In this case, the annular space formed between the inner and outer rings of the bearing is sealed with respect to these plasma flow paths by each bearing support process, so that the plasma flows between the inner and outer rings of the bearing in each plasma circulation process. It is possible to prevent the grease in the bearing from being deteriorated by flowing into the bearing. In addition, since no cloth, brush, or solvent is used, contamination such as dust or brush residue does not enter the bearing, and oil inside the bearing does not flow out to the inner ring or the outer ring. Therefore, the oil content of the inner ring and the outer ring can be removed without causing the cause of torque failure, and bearing adhesion failure can be prevented.

  In the above aspect, the first bearing support step includes a housing step of housing the outer ring of the bearing in a fitted state by the substantially cylindrical first guide portion, and the inner ring of the bearing accommodated by the housing step. And a first closing step for closing the annular space between the first guide portion, and the first plasma flow path is a columnar shape extending in the axial direction formed by the inner peripheral surface of the inner ring A space, and the second bearing support step includes an insertion step of inserting a substantially shaft-shaped second guide portion into the inner ring of the bearing in a fitting state, and the second guide portion is inserted into the inner ring by the insertion step. A second closing step for closing the annular space between the outer ring of the inserted bearing and the second guide portion; and a covering step for covering the outer peripheral surface of the bearing with a substantially cylindrical cover portion; Wherein said second plasma channel may be a cylindrical space extending in the axial direction formed between the inner peripheral surface of the cover portion and the outer peripheral surface of the outer ring.

  In the above aspect, the accommodating step accommodates the outer rings in a fitted state by the first guide portion in a state where the plurality of bearings are arranged in the axial direction, and the first closing step includes Between the inner rings at both ends in the axial direction of the first bearing arrangement body in which a plurality of the bearings are arranged in the axial direction by the housing step and between the end portions in the axial direction of the first guide portion. The first plasma flow path is formed by the inner peripheral surfaces of the plurality of inner rings, and the insertion step includes the plurality of bearings arranged in the axial direction in the inner rings. The second guide portion is inserted in a fitted state, and the second closing step includes a plurality of the bearings arranged in the axial direction in the insertion step, and each of the axial ends of the second bearing arrangement body. The outer ring and the Two guide portions are respectively closed between the end portions in the axial direction, the cover step covers the outer peripheral surface of the second bearing arrangement body by the cover portion, and the second plasma flow path is formed by the cover. It is good also as forming between the internal peripheral surface of a part and the said outer peripheral surface of the said some outer ring | wheel.

  According to the present invention, the oil content of the inner ring and the outer ring can be removed without causing the cause of torque failure, and the bearing adhesion failure can be prevented.

It is a longitudinal cross-sectional view of the bearing support jig for inner ring washing | cleaning with which the bearing washing | cleaning apparatus which concerns on one Embodiment of this invention is equipped. It is a longitudinal cross-sectional view of the bearing support jig for outer ring washing | cleaning with which the bearing washing | cleaning apparatus which concerns on one Embodiment of this invention is provided. It is a longitudinal cross-sectional view of the plasma generator with which the bearing cleaning apparatus which concerns on one Embodiment of this invention is provided. It is a flowchart explaining the bearing cleaning method which concerns on one Embodiment of this invention. Comparison of the pivoting force of the pivot using the bearing cleaned by the cleaning device and the bearing cleaning method according to one embodiment of the present invention and the pivoting force of the pivot using the bearing cleaned by the conventional cleaning device and the bearing cleaning method It is a figure explaining. It is a longitudinal cross-sectional view of the bearing support jig for inner ring washing | cleaning with which the bearing washing | cleaning apparatus which concerns on the modification of one Embodiment of this invention is provided. It is a longitudinal cross-sectional view of the bearing support jig | tool for outer ring | wheel washing | cleaning with which the bearing washing | cleaning apparatus which concerns on the modification of one Embodiment of this invention is provided.

Hereinafter, a bearing cleaning device and a bearing cleaning method according to an embodiment of the present invention will be described with reference to the drawings.
As shown in FIGS. 1 and 2, the bearing cleaning device 1 according to the present embodiment supports a plurality of (eight in the example shown in FIGS. 1 and 2) bearings 11, and supports each of the bearings 11. Bearing support jig (first bearing support jig) 3 for cleaning the inner ring that forms a plasma flow path (first plasma flow path) P1 along the inner peripheral surface of the inner ring 13 and the outer peripheral surface of the outer ring 15 of each bearing 11 A bearing support jig (second bearing support jig) 5 for cleaning the outer ring, which forms a plasma flow path (second plasma flow path) P2 along with a plasma generator (plasma generator) 7 for generating plasma, It has.

  Examples of the bearing 11 include those having an outer diameter of about 5 mm to 10 mm used for HDDs and the like. The bearings 11 are arranged in an annular inner ring 13 and an outer ring 15 that are coaxially arranged adjacent to each other in the radial direction, and a plurality of annular rings arranged in the annular space between the inner ring 13 and the outer ring 15 in the circumferential direction. Each of the rolling elements 17 and two shields 19 arranged at positions to close both ends of the annular space in the axial direction are provided. Further, grease (not shown) is sealed in the annular space of each bearing 11 as a lubricant.

Here, it is assumed that the inner ring 13 and the outer ring 15 have the same axial length.
The shield 19 is, for example, an annular plate member made of metal or plastic, and has an inner diameter larger than the outer diameter dimension of the inner ring 13 and an outer diameter larger than the inner diameter dimension of the outer ring 15. Yes. These shields 19 are arranged so that the outer edge portions are fixed to the inner wall surface of the outer ring 15 and block between the inner ring 13 and the outer ring 15. In the present embodiment, the configuration in which the bearing 11 includes two shields 19 will be described as an example. However, the bearing 11 includes one shield 19 disposed at a position where one end in the axial direction is closed, The other end in the axial direction may be opened.

  As shown in FIG. 1, the bearing support jig 3 for cleaning the inner ring has a substantially cylindrical guide (first guide) that accommodates the outer rings 15 in a fitted state in a state where eight bearings 11 are arranged in the axial direction. 1 guide portion) 21 and the inner rings 13 at both ends in the axial direction of the bearing array body (first bearing array body) 12 in which these bearings 11 are arrayed in the axial direction by the guide 21 and the axial direction of the guide 21. A seal (first seal portion) 23 that closes each end portion is provided.

  The guide 21 is formed of stainless steel or the like, and has fitting holes 21 a for fitting the outer rings 15 of the eight bearings 11. The guide 21 has a length dimension substantially equal to the length in which the eight bearings 11 are continuously arranged in the axial direction. The guide 21 is formed with a male screw 21b on the outer peripheral surface at one end in the axial direction over a predetermined length.

  The seal 23 includes a first seal 25 disposed at one end in the axial direction of the bearing array 12 and the guide 21, and a second seal 27 disposed at the other end in the axial direction of the bearing array 12 and the guide 21. ing. The first seal 25 and the second seal 27 are both made of stainless steel or the like and have a substantially annular shape.

  The first seal 25 includes an inner ring seal portion 25a that rises in the thickness direction along the inner peripheral edge, and a guide seal portion 25b that rises higher in the thickness direction along the outer peripheral edge than the inner ring seal portion 25a. The inner ring seal portion 25 a has a diameter dimension substantially equal to that of the inner ring 13 of the bearing 11. The guide seal portion 25b has a diameter dimension larger than the outer diameter dimension of the guide 21, and can be fitted with the other end of the guide 21 opposite to the male screw 21b side in the axial direction.

  The first seal 25 has one end in the axial direction of the guide 21 fitted to the guide seal portion 25b, and the inner ring seal portion 25a is abutted against the end surface in the axial direction of the inner ring 13 at one end in the axial direction of the bearing array body 12. Thus, the space between the inner ring 13 and one end of the guide 21 in the axial direction is closed.

  Similarly to the first seal 25, the second seal 27 rises in the thickness direction, and has an inner ring seal portion 27a having a diameter substantially equal to that of the inner ring 13 of the bearing 11, and a thickness direction greater than the inner ring seal portion 27a. It has a guide seal portion 27b that rises high and has a diameter larger than the outer diameter of the guide 21. The guide seal portion 27 b is provided with a female screw 28 on the inner peripheral surface, and the female screw 28 is fastened to the male screw 21 b of the guide 21.

  The second seal 27 is formed by fastening the female screw 28 of the guide seal portion 27 b to the male screw 21 b of the guide 21, and attaching the inner ring seal portion 27 a to the axial end surface of the inner ring 13 at the other axial end of the bearing array 12. By abutting, the space between the inner ring 13 and the other end of the guide 21 in the axial direction is closed.

  The bearing support jig 3 for cleaning the inner ring configured in this way is sealed in a state where the eight bearings 11 are continuously arranged in the axial direction by the guide 21 and each outer ring 15 is accommodated in a fitted state. 23, the inner ring 13 at both ends in the axial direction of the bearing array 12 and the both ends in the axial direction of the guide 21 are respectively closed, so that the space between each inner ring 13 and each outer ring 15 of the eight bearings 11 is reduced. An annular space L that is continuous in the axial direction is sealed, and a plasma flow path P1 that is a cylindrical space can be formed by the inner peripheral surfaces of the plurality of inner rings 13 that are arranged in the axial direction. It has become. Further, plasma is caused to flow into the plasma flow path P1 from the through hole surrounded by the inner peripheral edge of the second seal 27, and the plasma flowing through the plasma flow path P1 is discharged from the through hole surrounded by the inner peripheral edge of the first seal 25. Be able to.

  As shown in FIG. 2, the bearing support jig 5 for cleaning the outer ring has a substantially shaft-shaped guide (inserted in a fitted state in each inner ring 13 in a state where eight bearings 11 are arranged in the axial direction ( (Second guide portion) 31, and the outer ring 15 at both ends in the axial direction of the bearing array (second bearing array) 12 in which these bearings 11 are arranged in the axial direction by the guide 31 and the axial direction of the guide 31. A seal (second seal portion) 33 that closes each end portion and a substantially cylindrical cover (cover portion) 39 that covers the outer peripheral surface of the bearing array 12 are provided.

  The guide 31 is made of stainless steel or the like. Further, the guide 31 extends in the axial direction and is fitted to the cover 39 and extends to the outside in the radial direction on the base end side of the fitting shaft 31a. And a flange 31b.

  The fitting shaft 31a has a dimension longer than the length in which the eight bearings 11 are continuously arranged in the axial direction. On the fitting shaft 31a, a male screw 32 is formed over a predetermined length on the outer peripheral surface of the tip portion protruding in the axial direction while being fitted to the eight bearings 11.

  The seal 33 includes a first seal 35 disposed at one end in the axial direction of the bearing array 12 and the guide 31, and a second seal 37 disposed at the other end in the axial direction of the bearing array 12 and the guide 31. ing. Each of the first seal 35 and the second seal 37 is made of stainless steel or the like and has a substantially annular shape.

  The first seal 35 is formed integrally with the guide 31 and is provided between the fitting shaft 31a of the guide 31 and the flange 31b. The first seal 35 includes an inner ring seal portion 35a that also serves as a base end portion of the fitting shaft 31a of the guide 31, and an outer ring seal that extends radially outward from the inner ring seal portion 35a and rises in the thickness direction along the circumferential direction. Part 35b. The inner ring seal portion 35 a has the same diameter as the fitting shaft 31 a of the guide 31, and the outer ring seal portion 35 b has a diameter that is substantially equal to the outer ring 15 of the bearing 11.

  The first seal 35 is formed by fitting the inner ring seal portion 35 a together with the fitting shaft 31 a of the guide 31 to the inner rings 13 of the eight bearings 11, and the axial direction of the outer ring 15 at one end of the bearing array 12 in the axial direction. The outer ring seal portion 35b is abutted against the end surface of the outer ring 15 so as to close the space between the outer ring 15 and one end of the guide 31 in the axial direction.

  The second seal 37 has a guide seal portion 37a in which a female screw 38 is formed along the thickness direction on the inner peripheral surface, and an outer ring seal portion 37b that rises in the thickness direction along the outer peripheral edge. The guide seal portion 37 a has a diameter dimension substantially equal to that of the inner ring 13 of the bearing 11 and is fastened to the male screw 32 of the guide 31. The outer ring seal portion 37 b has a diameter dimension substantially equal to that of the outer ring 15 of the bearing 11.

  The second seal 37 is formed by fastening the female screw 38 of the guide seal portion 37 a to the male screw 32 of the guide 31, and the outer ring seal portion 37 b on the axial end surface of the outer ring 15 at the other axial end of the bearing array 12. By abutting, the space between the outer ring 15 and the other end of the guide 31 in the axial direction is closed.

  The cover 39 is formed of stainless steel or the like, and has a hollow structure including an internal space that accommodates the bearing array body 12 supported by the guide 31. The inner space of the cover 39 has a larger diameter than the outer ring 15 of the bearing 11.

  Further, the cover 39 has an insertion port 39a into which the bearing arrangement body 12 accommodated in the internal space is inserted and engages the flange 31b of the guide 31 at one end in the axial direction, and the plasma generated from the plasma generator 7 is generated. A plasma inlet 39b that flows into the internal space is provided at the other end in the axial direction. Further, the cover 39 has a plurality of discharge holes 39c penetrating in the thickness direction formed at intervals in the circumferential direction at the end on the axial insertion port 39a side.

  The outer ring cleaning bearing support jig 5 configured as described above has eight bearings 11 arranged continuously in the axial direction, and the fitting shafts 31a of the guides 31 are inserted into the respective inner rings 13 in a fitted state. In this state, the inner ring 13 and the outer ring of each of the eight bearings 11 are closed by the seal 33 between the outer ends 15 of the guide 31 and the outer rings 15 at both ends of the bearing array 12 in the axial direction. The annular space L that is formed in the axial direction and is continuous with the annular space L can be sealed.

  Further, the bearing array 12 is accommodated in the inner space of the cover 39, and the flange 31b of the guide 31 is fitted by the insertion port 39a of the cover 39, whereby the outer peripheral surfaces of the plurality of outer rings 15 arranged in the axial direction. And the inner peripheral surface of the cover 39 can form a plasma flow path P2 composed of a cylindrical space extending in the axial direction. Further, plasma is allowed to flow into the plasma flow path P2 from the plasma inlet 39b of the cover 39, and the plasma flowing through the plasma flow path P2 can be discharged from the plurality of discharge holes 39c of the cover 39.

  As shown in FIG. 3, the plasma generator 7 is disposed in a housing 41 that forms a gas passage N that allows nitrogen gas to pass therethrough, and is accommodated in the housing 41, with the gas passage N sandwiched in the width direction. Electrodes 43A and 43B, and a voltage supply unit 45 for applying a voltage to the electrodes 43A and 43B.

  The plasma generator 7 applies a high frequency high voltage to the electrodes 43A and 43B by the voltage supply unit 45, flows nitrogen gas into the gas passage N, and forms plasma formed between the electrodes 43A and 43B in the gas passage N. By passing through the discharge area, the nitrogen gas is activated and the plasma can be discharged.

Next, the bearing cleaning method according to the present embodiment will be described with reference to the flowchart shown in FIG.
In the bearing cleaning method according to the present embodiment, eight bearings 11 are arranged and supported in the axial direction, and the first bearing support step of forming the plasma flow path P1 along the inner peripheral surface of the inner ring 13 of each bearing 11 is performed. The first plasma circulation step S2 for flowing the plasma generated from the plasma generator 7 along the plasma flow path P1 formed by S1, the first bearing support step S1, and the eight bearings 11 are arranged in the axial direction. The second bearing support step S3 for forming the plasma flow path P2 along the outer peripheral surface of the outer ring 15 of each bearing 11, and the plasma flow path P2 formed by the second bearing support step S3, And a second plasma distribution step S4 for flowing plasma generated from the plasma generator 7.

  In the first bearing support step S1, each outer ring 15 is accommodated in the fitting hole 21a of the guide 21 in a state where the eight bearings 11 are arranged in the axial direction (accommodating step). . The first bearing support step S1 seals between the inner rings 13 at both ends in the axial direction of the bearing array 12 in which these bearings 11 are arranged in the axial direction and the end portions in the axial direction of the guides 21. 23 is closed (first closing step).

  In the second bearing support step S3, the fitting shafts 31a of the guides 31 are inserted into the respective inner rings 13 in a fitted state in a state where the eight bearings 11 are arranged in the axial direction (insertion step). . In the second bearing support step S3, a seal is provided between the outer rings 15 at both ends in the axial direction of the bearing array 12 in which these bearings 11 are arranged in the axial direction and the ends in the axial direction of the guide 31. Each is closed by 33 (second closing step). Further, in the second bearing support step S3, the cover 39 covers the outer peripheral surface of the bearing array body 12 (cover step).

The operation of the bearing cleaning device 1 and the bearing cleaning method configured as described above will be described.
When the inner ring 13 of the bearing 11 is cleaned by the bearing cleaning device 1 and the bearing cleaning method of the present embodiment, the bearing support jig 3 is used as shown in FIGS. Eight bearings 11 are inserted into 21a and continuously arranged in the axial direction, and the outer ring 15 of each bearing 11 is accommodated in a fitted state (first bearing support step S1, accommodation step).

  Next, the first seal 25 closes the space between the inner ring 13 at one end in the axial direction of the bearing array 12 in which these bearings 11 are arranged in the axial direction by the guide 21 and one end in the axial direction of the guide 21. The space between the inner ring 13 at the other end of the bearing array 12 in the axial direction and the other end portion of the guide 21 in the axial direction is closed by the second seal 27 (first bearing support step S1, first closing step).

  At this time, one end portion of the guide 21 in the axial direction is fitted to the guide seal portion 25b of the first seal 25, and the inner ring 13 at one end in the axial direction of the bearing array 12 is fitted to the inner ring seal portion 25a of the first seal 25. The guide seal portion 27b of the second seal 27 is fastened to the other end portion of the guide 21 in the axial direction in a state of being abutted in the axial direction, and the bearing array body 12 is By pressing the inner ring 13 at the other end in the axial direction in the axial direction, the inner rings 13 adjacent to each other in the axial direction of the eight bearings 11 constituting the bearing array 12 can be brought into close contact with each other.

  As a result, the annular space L which is formed between the inner rings 13 and the outer rings 15 of the eight bearings 11 and which is continuous in the axial direction is sealed, and the inner rings 13 of the inner rings 13 arranged in the axial direction are sealed. A cylindrical plasma flow path P1 surrounded by the peripheral surface is formed.

  Next, plasma is generated from the plasma generator 7, plasma is introduced from the through hole surrounded by the inner peripheral edge of the second seal 27, plasma is caused to flow along the plasma flow path P 1 of the bearing array 12, and Plasma is discharged from a through hole surrounded by the inner periphery of one seal 25 (first plasma circulation step S2). Thereby, the inner peripheral surface of each inner ring 13 of the eight bearings 11 forming the plasma flow path P1 can be plasma cleaned.

  Next, when cleaning the outer ring 15 of the bearing 11, as shown in FIGS. 2 and 3, the bearing support jig 5 is used and the fitting shaft 31 a of the guide 31 is fitted to each inner ring 13 of the eight bearings 11. Are inserted into the fitted state, and the bearings 11 are continuously arranged in the axial direction (second bearing support step S3, insertion step).

  Next, the first seal 35 closes the space between the outer ring 15 at one end in the axial direction of the bearing array 12 in which these bearings 11 are arranged in the axial direction by the guide 31 and one end in the axial direction of the guide 31. The space between the outer ring 15 at the other axial end of the bearing array 12 and the other axial end of the guide 31 is closed by the second seal 37 (second bearing support step S3, second closing step).

  At this time, the guide seal portion 37a of the second seal 37 is fitted to the guide 31 in a state where the outer ring 15 at one end in the axial direction of the bearing array 12 is abutted against the outer ring seal portion 35b of the first seal 35 in the axial direction. The bearing arrangement body 12 is configured by fastening the outer ring 15 at the other end in the axial direction of the bearing arrangement body 12 in the axial direction by being fastened to the tip end of the shaft 31a and by the outer ring seal portion 37b of the second seal 37. The outer rings 15 adjacent to each other in the axial direction of the individual bearings 11 can be brought into close contact with each other. As a result, the annular space L which is formed between the inner rings 13 and the outer rings 15 of the eight bearings 11 and which is continuous in the axial direction is sealed.

  Subsequently, the bearing array 12 supported by the guide 31 is inserted into the inner space from the insertion port 39 a of the cover 39, the flange 31 b of the guide 31 is fitted by the insertion port 39 a of the cover 39, and the bearing arrangement is performed by the cover 39. The outer peripheral surface of the body 12 is covered (second bearing support step S3, cover step). Thus, a cylindrical plasma flow path P2 extending in the axial direction is formed by the outer peripheral surfaces of the plurality of outer rings 15 arranged in the axial direction and the inner peripheral surface of the cover 39.

  Next, plasma is generated from the plasma generator 7, plasma flows in from the plasma inlet 39 b of the cover 39, plasma flows along the plasma flow path P <b> 2 of the bearing array 12, and the discharge holes 39 c of the cover 39. The plasma is discharged from (second plasma distribution step). Thereby, the outer peripheral surface of each outer ring 15 of the eight bearings 11 forming the plasma flow path P2 can be plasma cleaned.

  As described above, according to the bearing cleaning device 1 and the bearing cleaning method according to the present embodiment, the inner peripheral surfaces of the inner rings 13 and the outer rings 15 of the eight bearings 11 that form the plasma flow paths P1 and P2. Each outer peripheral surface can be plasma-cleaned once.

  In this case, the bearing support jigs 3 and 5 are formed along the outer peripheral surfaces of the plasma flow paths P1 formed along the inner peripheral surfaces of the inner rings 13 of the eight bearings 11 and the outer rings 15. An annular space L that is continuous in the axial direction formed between the inner ring 13 and the outer ring 15 is sealed with respect to the plasma flow path P <b> 2, so that plasma is interposed between the inner ring 13 and the outer ring 15 of the bearing 11. It is possible to prevent the grease in the bearing 11 from being deteriorated by flowing in. Further, since no cloth or brush is used, contamination such as dust or brush residue does not enter the bearing 11. Further, since no solvent is used, the oil in the bearing 11 does not flow out to the inner ring 13 and the outer ring 15. Therefore, the oil content of the inner ring 13 and the outer ring 15 can be removed without causing the cause of torque failure, and adhesion failure of the bearing 11 can be prevented.

  For example, as shown in FIG. 5, when the pivot is assembled with the bearing 11 cleaned by the conventional cleaning method, the inner ring and the outer ring of the bearing 11 are not sufficiently cleaned, so that the extraction force varies for each pivot. On the other hand, when the pivot is assembled with the bearing 11 cleaned by the cleaning device 1 and the bearing cleaning method according to the present embodiment, the inner ring and the outer ring of the bearing 11 are sufficiently cleaned, thereby causing variation in the pulling force for each pivot. And the average value of the pulling force can be increased. In FIG. 5, the vertical axis represents POF (Push Out Force, the unit is kg).

  Here, for example, in the pivot, two bearings 11 are arranged coaxially with a spacer between outer rings 15 and a preload is applied in a direction in which the inner rings 13 approach each other. The inner ring 13 and the shaft are assembled by being fitted and fixed with an adhesive. The pulling force refers to a force applied until the adhesive between the inner ring 13 and the shaft is peeled off when the shaft is moved in the axial direction with the outer ring 15 of the pivot fixed. If the pulling force is low, the bonded portion between the inner ring 13 and the shaft is damaged in the process of applying axial force to the bearing 11 when the pivot is incorporated into the HDD drive, and the inner ring 13 and the outer ring 15 are disposed between them. The preload that has worked between the rolling elements 17 may not be applied. By removing the inner ring 13 and the outer ring 15 of the bearing 11 by the cleaning device 1 and the bearing cleaning method according to the present embodiment, the drawing force can be improved.

  In the present embodiment, the example in which the inner ring 13 and the outer ring 15 have the same axial length has been described as an example. However, the inner ring 13 and the outer ring 15 may have different axial lengths. Good.

  For example, as shown in FIG. 6, when cleaning the inner ring 13 of the bearing 51 whose inner ring 13 is shorter in the axial direction than the outer ring 15, the bearing support jig 3 is disposed between the inner rings 13 in the axial direction. An inner ring cleaning spacer (spacer portion) 53 may be provided. In this case, the spacer 53 may be formed of a ring shape having an inner diameter dimension substantially equal to the inner diameter dimension of the inner ring 13 using stainless steel or the like that is difficult to be altered by plasma. Moreover, the spacer 53 should just have the thickness dimension according to the difference of the length of the axial direction of the inner ring | wheel 13 and the outer ring | wheel 15 of each bearing 51.

  Thus, when a plurality of bearings 51 are arranged in the axial direction, the spacer 53 extends in the axial direction together with the inner peripheral surface of each inner ring 13 without generating a gap between the inner rings 13 in the axial direction. A plasma flow path P1 can be formed. Therefore, such a bearing 51 can also efficiently clean the inner peripheral surface of the inner ring 13 without causing plasma to flow between the inner ring 13 and the outer ring 15.

  On the other hand, as shown in FIG. 7, when cleaning the outer ring 15 of the bearing 55 whose outer ring 15 is shorter in the axial direction than the inner ring 13, the bearing support jig 5 is disposed between the outer rings 15 in the axial direction. An outer ring cleaning spacer (spacer portion) 57 may be provided. In this case, the spacer 57 should just be formed in the ring shape which has the outer diameter dimension substantially equal to the outer diameter dimension of the outer ring | wheel 15 using the stainless steel etc. which cannot change easily with plasma as a material. Moreover, the spacer 57 should just have the thickness dimension according to the difference of the length of the axial direction of the inner ring | wheel 13 and the outer ring | wheel 15 of each bearing 55. FIG.

  Also in this case, when a plurality of bearings 55 are arranged in the axial direction, the plasma flow path P2 extending in the axial direction together with the outer peripheral surface of each outer ring 15 by the spacer 57 without generating a gap between the outer rings 15 in the axial direction. Can be formed. Therefore, such a bearing 55 can also efficiently clean the outer peripheral surface of the outer ring 15 without causing plasma to flow between the inner ring 13 and the outer ring 15.

  In the present embodiment, the plasma generator 7 that generates plasma using nitrogen gas has been described as an example of the plasma generator. However, the plasma generator generates plasma along the plasma flow paths P1 and P2. However, the present invention is not limited to this as long as it can be distributed.

  Further, in the present embodiment, the configuration in which the eight bearings 11, 51, 55 are cleaned at a time has been described as an example, but the number of the bearings 11, 51, 55 and the size of the bearing support jigs 3, 5 are described. However, the present invention is not limited to this. For example, the bearings 11, 51, 55 may be one or plural. Further, the size of the bearing support jigs 3 and 5 may be changed according to the number of the bearings 11, 51, and 55, or the bearings 11, The numbers 51 and 55 may be changed.

  In the present embodiment, the seal 23 has an annular space between the inner ring 13 and the substantially cylindrical guide 21 with respect to the plasma flow path P <b> 1 formed along the inner peripheral surface of the inner ring 13 of the bearing 11. Although L is closed, it is only necessary that the annular space L be sealed with respect to the plasma flow path P1 so that plasma does not flow into the annular space L, and the annular space L need not be closed. . For example, the annular space L is isolated from the discharge port of the plasma generator 7 and the plasma flows into the plasma flow path P1, and the plasma flowing through the plasma flow path P1 is discharged outside so as not to flow into the annular space L. You can make it.

  Similarly, in the present embodiment, the seal 33 has an annular space between the outer ring 15 and the substantially axial guide 31 with respect to the plasma flow path P2 formed along the outer peripheral surface of the outer ring 15 of the bearing 11. Although L is closed, the annular space L only needs to be sealed against the plasma flow path P2 so that plasma does not flow into the annular space L, and the annular space L does not have to be closed. Good. For example, the annular space L is isolated from the discharge port of the plasma generator 7 and plasma flows into the plasma flow path P2, and the plasma flowing through the plasma flow path P2 is discharged outside so as not to flow into the annular space L. You can make it.

1 Cleaning device 3 Bearing support jig (first bearing support jig)
5 Bearing support jig (second bearing support jig)
7 Plasma generator (plasma generator)
11, 51, 55 Bearing 12 Bearing array (first bearing array, second bearing array)
13 Inner ring 15 Outer ring 21 Guide (first guide part)
31 Guide (2nd guide part)
23 Seal (first seal part)
33 Seal (second seal part)
53, 57 Spacer (Spacer part)
L Toroidal space P1 Plasma channel (first plasma channel)
P2 Plasma channel (second plasma channel)
S1 First bearing support process (bearing support process)
S2 First plasma distribution process (plasma distribution process)
S3 Second bearing support process (bearing support process)
S4 Second plasma distribution process (plasma distribution process)

Claims (18)

A plasma generator for generating plasma;
A plasma flow path through which the plasma emitted from the plasma generating portion is circulated is formed along the inner peripheral surface of the inner ring of the bearing or the outer peripheral surface of the outer ring, and between the inner ring and the outer ring with respect to the plasma flow path A bearing cleaning device comprising a bearing support jig for sealing an annular space between the two. The bearing support jig includes a substantially cylindrical guide portion that accommodates the outer ring of the bearing in a fitted state, and the annular shape between the inner ring and the guide portion of the bearing that is accommodated by the guide portion. A seal portion for closing the space,
The bearing cleaning device according to claim 1, wherein the plasma flow path is a cylindrical space extending in an axial direction formed by the inner peripheral surface of the inner ring. The guide portion accommodates the outer rings in a fitted state with a plurality of the bearings arranged in the axial direction,
The seal portion includes a plurality of the bearings arranged in the axial direction by the guide portion, and the inner rings at both ends in the axial direction of the bearing arrangement body and the end portions in the axial direction of the guide portion. Each blockade,
The bearing cleaning device according to claim 2, wherein the plasma flow path is formed by the inner peripheral surfaces of the plurality of inner rings. The inner ring is shorter in the axial direction than the outer ring,
The bearing cleaning apparatus according to claim 3, wherein the bearing support jig includes a spacer portion that is disposed between the inner rings in the axial direction and forms the plasma flow path together with the inner peripheral surface of the inner rings. The bearing support jig is inserted between the inner ring of the bearing in a fitted state and a substantially shaft-shaped guide portion, and between the outer ring and the guide portion of the bearing in which the guide portion is inserted into the inner ring. And a seal portion that closes the annular space, and a substantially cylindrical cover portion that covers the outer peripheral surface of the bearing,
The bearing cleaning device according to claim 1, wherein the plasma channel is a cylindrical space extending in an axial direction formed between an inner peripheral surface of the cover portion and the outer peripheral surface of the outer ring. The guide portion is inserted into each inner ring in a fitted state with a plurality of the bearings arranged in the axial direction,
The seal portion includes a plurality of the bearings arranged in the axial direction by the guide portion, and the outer rings at both ends in the axial direction of the bearing arrangement body and the end portions in the axial direction of the guide portion. Each blockade,
The cover portion covers an outer peripheral surface of the bearing array;
The bearing cleaning device according to claim 5, wherein the plasma flow path is formed between an inner peripheral surface of the cover portion and the outer peripheral surfaces of the plurality of outer rings. The outer ring is shorter in the axial direction than the inner ring,
The bearing cleaning apparatus according to claim 6, wherein the bearing support jig includes a spacer portion that is disposed between the outer rings in the axial direction and forms the plasma flow path together with the outer peripheral surface of the outer rings. A plasma generator for generating plasma;
A first plasma flow path through which the plasma generated from the plasma generating portion flows is formed along an inner peripheral surface of an inner ring of the bearing, and between the inner ring and the outer ring with respect to the first plasma flow path. A first bearing support jig for sealing the annular space;
A second plasma channel for circulating the plasma emitted from the plasma generator is formed along the outer peripheral surface of the outer ring of the bearing, and the annular space is sealed with respect to the second plasma channel. A bearing cleaning device comprising a second bearing support jig. The first bearing support jig has a substantially cylindrical first guide part that accommodates the outer ring of the bearing in a fitted state, the inner ring of the bearing accommodated by the first guide part, and the first guide. A first seal portion that closes the annular space with the portion,
The first plasma flow path is a cylindrical space extending in the axial direction formed by the inner peripheral surface of the inner ring,
The second bearing support jig is inserted into the inner ring of the bearing in a fitted state, and a second guide part having a substantially shaft shape; and the outer ring of the bearing in which the second guide part is inserted into the inner ring; A second seal portion that closes the annular space with the second guide portion; and a substantially cylindrical cover portion that covers an outer peripheral surface of the bearing;
The bearing cleaning device according to claim 8, wherein the second plasma flow path is a cylindrical space extending in an axial direction formed between an inner peripheral surface of the cover portion and the outer peripheral surface of the outer ring. The first guide portion accommodates the outer rings in a fitted state with a plurality of the bearings arranged in the axial direction,
The first seal portion includes a plurality of the bearings arranged in the axial direction by the first guide portion, the inner rings at both ends in the axial direction of the first bearing arrangement body, and the first guide portion. Block between each end in the axial direction,
The first plasma flow path is formed by the inner peripheral surfaces of a plurality of the inner rings,
The second guide portion is inserted into the inner ring in a fitted state with the plurality of bearings arranged in the axial direction;
The second seal portion includes a plurality of the bearings arranged in the axial direction by the second guide portion, and the outer rings at both ends in the axial direction of the second bearing arrangement body and the second guide portion. Block between each end in the axial direction,
The cover part covers an outer peripheral surface of the second bearing array;
The bearing cleaning apparatus according to claim 9, wherein the second plasma flow path is formed between an inner peripheral surface of the cover portion and the outer peripheral surfaces of the plurality of outer rings. A plasma flow path that supports the bearing and distributes plasma along the inner peripheral surface of the inner ring or the outer peripheral surface of the outer ring is formed, and an annular space between the inner ring and the outer ring is formed with respect to the plasma flow path. A bearing support process for sealing;
And a plasma circulation step of flowing the plasma along the plasma flow path formed by the bearing support step. The bearing support step includes a housing step of housing the outer ring of the bearing in a fitted state by a substantially cylindrical guide portion, and the bearing between the inner ring and the guide portion of the bearing accommodated by the housing step. A closing step for closing the annular space,
The bearing cleaning method according to claim 11, wherein the plasma flow path is a cylindrical space extending in an axial direction formed by the inner peripheral surface of the inner ring. The accommodating step accommodates each outer ring in a fitted state by the guide portion in a state where a plurality of the bearings are arranged in the axial direction,
In the closing step, a plurality of the bearings are arranged in the axial direction in the housing step, and the inner rings at both ends in the axial direction of the bearing arrangement body and the end portions in the axial direction of the guide portion. Each blockade,
The bearing cleaning method according to claim 12, wherein the plasma flow path is formed by the inner peripheral surfaces of the plurality of inner rings. The bearing supporting step includes an insertion step of inserting a substantially shaft-shaped guide portion into the inner ring of the bearing in a fitted state, the outer ring of the bearing in which the guide portion is inserted into the inner ring by the insertion step, and the A closing step of closing the annular space between the guide portion and a cover step of covering the outer peripheral surface of the bearing with a substantially cylindrical cover portion;
The bearing cleaning method according to claim 11, wherein the plasma flow path is a cylindrical space extending in an axial direction formed between an inner peripheral surface of the cover portion and the outer peripheral surface of the outer ring. The inserting step inserts the guide portions into a fitted state in the inner rings in a state where a plurality of the bearings are arranged in the axial direction,
In the closing step, a plurality of the bearings are arranged in the axial direction in the insertion step, and the outer rings at both ends in the axial direction of the bearing arrangement body and the end portions in the axial direction of the guide portion. Each blockade,
The cover step covers the outer peripheral surface of the bearing array by the cover part,
The bearing cleaning method according to claim 14, wherein the plasma flow path is formed between an inner peripheral surface of the cover portion and the outer peripheral surfaces of the plurality of outer rings. A first plasma channel that supports the bearing and circulates plasma along the inner peripheral surface of the inner ring is formed, and an annular space between the inner ring and the outer ring is sealed with respect to the first plasma channel. A first bearing support step;
A first plasma flow step of flowing the plasma along the first plasma flow path formed by the first bearing support step;
A second bearing support step of forming a second plasma channel for supporting the bearing and circulating the plasma along the outer peripheral surface of the outer ring, and sealing the annular space with respect to the second plasma channel. When,
And a second plasma circulation step of flowing the plasma along the second plasma flow path formed by the second bearing support step. The first bearing support step includes a housing step of housing the outer ring of the bearing in a fitted state by a substantially cylindrical first guide portion, and the inner ring and the first guide of the bearing received by the housing step. A first closing step of closing the annular space with a part,
The first plasma flow path is a cylindrical space extending in the axial direction formed by the inner peripheral surface of the inner ring,
The second bearing support step includes an insertion step of inserting a substantially shaft-shaped second guide portion into the fitted state in the inner ring of the bearing, and the second guide portion is inserted into the inner ring by the insertion step. A second closing step of closing the annular space between the outer ring of the bearing and the second guide portion, and a cover step of covering the outer peripheral surface of the bearing with a substantially cylindrical cover portion,
The bearing cleaning method according to claim 16, wherein the second plasma channel is a cylindrical space extending in an axial direction formed between an inner peripheral surface of the cover portion and the outer peripheral surface of the outer ring. The accommodating step accommodates the outer rings in a fitted state by the first guide portion in a state where a plurality of the bearings are arranged in the axial direction,
In the first closing step, the inner ring and the axial direction of the first guide portion at both ends in the axial direction of a first bearing arrangement in which a plurality of the bearings are arranged in the axial direction by the accommodating step. Block between each end of the
The first plasma flow path is formed by the inner peripheral surfaces of a plurality of the inner rings,
The inserting step inserts the second guide portion in a fitted state in each inner ring in a state where a plurality of the bearings are arranged in the axial direction,
In the second closing step, the outer ring at both ends in the axial direction of the second bearing arrangement body in which a plurality of the bearings are arranged in the axial direction by the insertion step and the axial direction of the second guide portion. Block between each end of the
The cover step covers the outer peripheral surface of the second bearing array by the cover portion;
The bearing cleaning method according to claim 17, wherein the second plasma flow path is formed between an inner peripheral surface of the cover portion and the outer peripheral surfaces of the plurality of outer rings.

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