JP2018142620A - Power semiconductor device - Google Patents

Power semiconductor device Download PDF

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JP2018142620A
JP2018142620A JP2017035669A JP2017035669A JP2018142620A JP 2018142620 A JP2018142620 A JP 2018142620A JP 2017035669 A JP2017035669 A JP 2017035669A JP 2017035669 A JP2017035669 A JP 2017035669A JP 2018142620 A JP2018142620 A JP 2018142620A
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power semiconductor
semiconductor device
base
fin
circuit body
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JP6767898B2 (en
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円丈 露野
Enjo Tsuyuno
円丈 露野
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Hitachi Astemo Ltd
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Hitachi Automotive Systems Ltd
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/29—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the material, e.g. carbon
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/40—Mountings or securing means for detachable cooling or heating arrangements ; fixed by friction, plugs or springs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
    • H01L25/03—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
    • H01L25/04—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
    • H01L25/07—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L29/00
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
    • H01L25/18—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof the devices being of types provided for in two or more different subgroups of the same main group of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M7/00—Conversion of ac power input into dc power output; Conversion of dc power input into ac power output
    • H02M7/42—Conversion of dc power input into ac power output without possibility of reversal
    • H02M7/44—Conversion of dc power input into ac power output without possibility of reversal by static converters
    • H02M7/48—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/34—Strap connectors, e.g. copper straps for grounding power devices; Manufacturing methods related thereto
    • H01L2224/39—Structure, shape, material or disposition of the strap connectors after the connecting process
    • H01L2224/40—Structure, shape, material or disposition of the strap connectors after the connecting process of an individual strap connector
    • H01L2224/401—Disposition
    • H01L2224/40135—Connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip
    • H01L2224/40137—Connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip the bodies being arranged next to each other, e.g. on a common substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805—Shape
    • H01L2224/4809—Loop shape
    • H01L2224/48091—Arched
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481—Disposition
    • H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48245—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • H01L2224/48247—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/71—Means for bonding not being attached to, or not being formed on, the surface to be connected
    • H01L2224/72—Detachable connecting means consisting of mechanical auxiliary parts connecting the device, e.g. pressure contacts using springs or clips
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/181—Encapsulation

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Inverter Devices (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)

Abstract

PROBLEM TO BE SOLVED: To improve reliability of a power semiconductor device.SOLUTION: A power semiconductor device comprises: a circuit body having a power semiconductor element; a case configured to store the circuit body; and an insulation member disposed between the circuit body and the case. The case comprises: a first base part opposite to the circuit body; a frame part; and a connection part configured to connect the frame part to the first base, and formed to be thinner than the first base, therein the first base comprises: a first fin base having a fin; and a first intermediate base formed to be thinner than the first fin base, and to be thicker than the connection part, and configured to be connected to the connection part.SELECTED DRAWING: Figure 1

Description

本発明は、パワー半導体素子を搭載したパワー半導体装置に関し、特に電力変換装置に用いられるパワー半導体装置に関する。   The present invention relates to a power semiconductor device equipped with a power semiconductor element, and more particularly to a power semiconductor device used in a power conversion device.

パワー半導体素子のスイッチングによる電力変換装置は、変換効率が高いため、民生用、車載用、鉄道用、変電設備等に幅広く利用されている。このパワー半導体素子は通電により発熱するため、高い放熱性が求められる。   Since power conversion devices by switching power semiconductor elements have high conversion efficiency, they are widely used in consumer, in-vehicle, railway, substation facilities, and the like. Since this power semiconductor element generates heat when energized, high heat dissipation is required.

特に車載用途においては、小型、軽量化のため水冷を用いた高効率な冷却システムが採用されている。水冷による冷却システムは冷媒流路の形成する必要があり複雑な構造となる。この冷媒流路の形成を用意にする技術として、特許文献１には、パワー半導体装置を水没する事で冷媒流路を形成する構造が開示されている。   Particularly in in-vehicle applications, a high-efficiency cooling system using water cooling is adopted to reduce the size and weight. The cooling system using water cooling requires a refrigerant flow path and has a complicated structure. As a technique for preparing the formation of the coolant channel, Patent Document 1 discloses a structure in which the coolant channel is formed by submerging the power semiconductor device.

特許文献１に記載されたパワー半導体装置は、放熱板を囲む薄肉部を有するケースに半導体素子を封止した封止体を収納し、封止体とケースとの間には絶縁シートが挿入されている。   The power semiconductor device described in Patent Document 1 stores a sealing body in which a semiconductor element is sealed in a case having a thin portion surrounding a heat sink, and an insulating sheet is inserted between the sealing body and the case. ing.

しかしながら、この絶縁シートが封止体またはケースから剥離することによる信頼性の低下に対策が必要になった。   However, it has become necessary to take measures to reduce the reliability due to the insulating sheet peeling off from the sealing body or the case.

特開２０１１−２３３６０６号公報JP 2011-233606 A

本発明の課題は、パワー半導体装置の信頼性を向上させることである。   An object of the present invention is to improve the reliability of a power semiconductor device.

本発明に係るパワー半導体装置は、パワー半導体素子を有する回路体と、前記回路体を収納するケースと、前記回路体と前記ケースに間に配置される絶縁部材と、を備え、前記ケースは、前記回路体と対向する第１ベース部と、枠部と、当該枠部と当該第１ベースを接続するとともに当該第１ベースよりも薄く形成される接続部と、を有し、前記第１ベースは、フィンを有する第１フィンベースと、当該第１フィンベースよりも薄くかつ前記接続部よりも厚く形成されさらに当該接続部と接続される第１中間ベースと、を有する。   A power semiconductor device according to the present invention includes a circuit body having a power semiconductor element, a case for housing the circuit body, and an insulating member disposed between the circuit body and the case. A first base portion facing the circuit body; a frame portion; and a connection portion that connects the frame portion and the first base and is formed thinner than the first base. Includes a first fin base having fins, and a first intermediate base that is thinner than the first fin base and thicker than the connection portion and is connected to the connection portion.

本発明により、パワー半導体装置の信頼性を向上させることができる。   According to the present invention, the reliability of a power semiconductor device can be improved.

本実施形態のパワー半導体装置３００の平面図及びＡ−Ａ‘面で切断した断面図である。It is the top view of the power semiconductor device 300 of this embodiment, and sectional drawing cut | disconnected by the A-A 'surface. パワー半導体装置３００のリードフレームを中心にした製造工程の平面図である。4 is a plan view of a manufacturing process centering on a lead frame of a power semiconductor device 300. FIG. パワー半導体装置３００の製造工程で作製するリード体９１０の平面図である。FIG. 11 is a plan view of a lead body 910 that is manufactured in the manufacturing process of the power semiconductor device 300. パワー半導体装置３００の製造工程で作製する回路体９００の平面図及びＡ−Ａ‘面で切断した断面図である。FIG. 6 is a plan view of a circuit body 900 manufactured in the manufacturing process of the power semiconductor device 300 and a cross-sectional view cut along an A-A ′ plane. 回路体９００をケース９５０に挿入するまでの製造工程の断面模式図である。10 is a schematic cross-sectional view of a manufacturing process until a circuit body 900 is inserted into a case 950. FIG. 絶縁シート９０６を中心にしたパワー半導体装置３００の製造工程の断面模式図である。It is a cross-sectional schematic diagram of the manufacturing process of the power semiconductor device 300 with the insulating sheet 906 as the center. 本実施形態のパワー半導体装置の変形例である構造を説明する模式図である。It is a schematic diagram explaining the structure which is a modification of the power semiconductor device of this embodiment. 変形例に係る、絶縁シート９０６を中心にしたパワー半導体装置３００の製造工程の断面模式図である。It is a cross-sectional schematic diagram of a manufacturing process of a power semiconductor device 300 centering on an insulating sheet 906 according to a modification. パワー半導体装置３００の熱応力解析モデル及びポイントＣの応力解析結果を示す。The thermal stress analysis model of the power semiconductor device 300 and the stress analysis result of the point C are shown. 本実施形態のパワー半導体装置３００の回路図である。It is a circuit diagram of power semiconductor device 300 of this embodiment. 本実施形態のパワー半導体装置３００を用いた電力変換装置２００の回路図である。It is a circuit diagram of power converter 200 using power semiconductor device 300 of this embodiment. 電力変換装置２００の外観を示す斜視図である。1 is a perspective view showing an external appearance of a power conversion device 200. FIG. 電力変換装置２００の断面構造を示す概略図である。1 is a schematic diagram showing a cross-sectional structure of a power conversion device 200. FIG. 図１２の断面Ａにおける電力変換装置２００の断面図である。It is sectional drawing of the power converter device 200 in the cross section A of FIG.

以下、本発明に係る構造体の実施の形態として、車両搭載用の電力変換装置に用いられるパワー半導体装置について説明する。   Hereinafter, as an embodiment of a structure according to the present invention, a power semiconductor device used in a vehicle-mounted power conversion device will be described.

以下に説明するパワー半導体装置の実施形態においては、発熱体としてのパワー半導体素子、当該発熱体と熱的に接続される放熱板としてのＡｌベース板やフィン部、及び当該発熱体と当該放熱板を固定する樹脂材としての封止樹脂等の各構成要素について、図面を参照して説明する。なお、各図において同一要素については同一の符号を記し、重複する説明は省略する。   In an embodiment of a power semiconductor device described below, a power semiconductor element as a heat generator, an Al base plate or fin as a heat sink thermally connected to the heat generator, and the heat generator and the heat sink Each component such as a sealing resin as a resin material for fixing the substrate will be described with reference to the drawings. In addition, in each figure, the same code | symbol is described about the same element and the overlapping description is abbreviate | omitted.

図１は、本実施形態のパワー半導体装置３００の平面図及びＡ−Ａ‘面で切断した断面図である。   FIG. 1 is a plan view of a power semiconductor device 300 according to the present embodiment and a cross-sectional view taken along the A-A ′ plane.

パワー半導体装置３００は、封止樹脂９０７と、直流端子３１５Ｂ及び３１９Ｂと、交流端子３２０Ｂと、信号端子３２５Ｕ及び３２５Ｌを有する。   The power semiconductor device 300 includes a sealing resin 907, DC terminals 315B and 319B, an AC terminal 320B, and signal terminals 325U and 325L.

回路体９００は、リードフレームに搭載したパワー半導体素子を封止した構造体である。信号端子３２５Ｌ、交流端子３２０Ｂ、信号端子３２５Ｕは、パワー半導体装置３００の一面から突出し、一列に並べられる。また、直流端子３１５Ｂ及び直流端子３１９Ｂは、パワー半導体装置３００の他方の一面から突出し、一列に並べられる。直流端子３１５Ｂ及び直流端子３１９Ｂが隣接することで、入出力の電流を近接させインダクタンスを低減する効果がある。   The circuit body 900 is a structure in which a power semiconductor element mounted on a lead frame is sealed. The signal terminal 325L, the AC terminal 320B, and the signal terminal 325U protrude from one surface of the power semiconductor device 300 and are arranged in a line. The DC terminal 315B and the DC terminal 319B protrude from the other surface of the power semiconductor device 300 and are arranged in a line. The DC terminal 315B and the DC terminal 319B are adjacent to each other, so that there is an effect of reducing input and output currents and reducing inductance.

回路体９００は、ケース９５０に絶縁シート９０６を介して密着し、パワー半導体素子の熱を冷却媒体に伝達している。ケース９５０は、冷却媒体が回路体９００に接触したり、回路体９００を形成する封止樹脂９０７が吸湿又は膨潤したりするのを防止している。なお、絶縁シート９０６は、シート状でなく膜状に絶縁層を形成してもよく、絶縁機能を有する絶縁部材であればよい。   The circuit body 900 is in close contact with the case 950 via an insulating sheet 906, and transfers the heat of the power semiconductor element to the cooling medium. The case 950 prevents the cooling medium from contacting the circuit body 900 and the sealing resin 907 forming the circuit body 900 from absorbing moisture or swelling. Note that the insulating sheet 906 may have an insulating layer formed in a film shape instead of a sheet shape, and may be any insulating member having an insulating function.

ケース９５０は、Ｏリング等の部材により冷却冷媒の液密性を確保するシール部９８０と、機械的強度を持たせる枠部９６０と、回路体９００に内蔵されるパワー半導体素子の熱を冷却媒体に伝達する第１ベース９５１と、枠部９６０と第１ベース９５１を接続するとともに第１ベース９５１よりも薄く形成される接続部９７０と、を有する。   The case 950 includes a seal portion 980 that ensures the liquid-tightness of the cooling refrigerant by a member such as an O-ring, a frame portion 960 that provides mechanical strength, and heat of the power semiconductor element built in the circuit body 900 as a cooling medium. And a connection portion 970 that connects the frame portion 960 and the first base 951 and is formed thinner than the first base 951.

また、第１ベース部９５１は、フィンを有する第１フィンベース９５２と、第１フィンベース９５２よりも薄くかつ接続部９７０よりも厚く形成されさらに接続部９７０と接続される第１中間ベース９５３と、を有する。   The first base portion 951 includes a first fin base 952 having fins, a first intermediate base 953 formed thinner than the first fin base 952 and thicker than the connection portion 970, and further connected to the connection portion 970. Have.

第１中間ベース９５３は、第１フィンベース９５２より薄く形成されるため低応力となり密着性を担保する効果がある。低応力となる第１中間ベース９５３が第１フィンベース９５２を囲っているため、絶縁シート９０６が外周から剥離するのを防止し、信頼性を向上する効果がある。さらに追加の効果として、回路体９００とケース９５０との間のポッティング樹脂を省略して生産性を高めることできる効果もある。   Since the first intermediate base 953 is formed thinner than the first fin base 952, the first intermediate base 953 has an effect of reducing stress and ensuring adhesion. Since the first intermediate base 953 having low stress surrounds the first fin base 952, it is possible to prevent the insulating sheet 906 from being peeled off from the outer periphery and to improve the reliability. Further, as an additional effect, there is an effect that the potting resin between the circuit body 900 and the case 950 can be omitted to increase productivity.

特に、絶縁シート９０６の端部が第１中間ベース９５１とケース９５０の間に配置されると、剥離の始点となる絶縁シート９０６の端部を第１中間ベース９５１により押さえ、剥離をする効果を高めることができる。   In particular, when the end portion of the insulating sheet 906 is disposed between the first intermediate base 951 and the case 950, the end portion of the insulating sheet 906, which is the starting point of peeling, is pressed by the first intermediate base 951, and the peeling effect is achieved. Can be increased.

本実施形態のように、第１ベース部９５１の回路体９５０を挟んだ反対面に第２ベース部９５５を設けてもよい。第２ベース部９５５に、第１フィンベース９５２及び第１中間ベース９５３と同様の機能を有する第２フィンベース９５６及び第２中間ベース９５７を形成してもよい。   As in the present embodiment, the second base portion 955 may be provided on the opposite surface of the first base portion 951 across the circuit body 950. A second fin base 956 and a second intermediate base 957 having functions similar to those of the first fin base 952 and the first intermediate base 953 may be formed in the second base portion 955.

ケース９５０は、防水性を有する材料であれば、特に制約されないが、接続部９７０の変形を容易にするため金属材料が好まれる。金属材料でも、重量及びコストの点からアルミニウムを主成分とする材料が好ましい。   The case 950 is not particularly limited as long as it is a waterproof material, but a metal material is preferred to facilitate the deformation of the connection portion 970. Even a metal material is preferably a material mainly composed of aluminum in terms of weight and cost.

本実施例のパワー半導体装置３００の製造手順について、図２から図６を用いて説明する。   A manufacturing procedure of the power semiconductor device 300 of the present embodiment will be described with reference to FIGS.

図２は、パワー半導体装置３００のリードフレームを中心にした製造工程の平面図である。   FIG. 2 is a plan view of the manufacturing process centering on the lead frame of the power semiconductor device 300.

コレクタ側リードフレーム９０１に、後述するパワー半導体素子である上アーム側ＩＧＢＴ１５５、上アーム側ダイオード１５６、下アーム側ＩＧＢＴ１５７、下アーム側ダイオード１５８がはんだ接続される。ここで、ＩＧＢＴとは、絶縁ゲート型バイポーラトランジスタ（Ｉｎｓｕｌａｔｅｄ Ｇａｔｅ Ｂｉｐｏｌａｒ Ｔｒａｎｓｉｓｔｏｒ）の略である。   An upper arm side IGBT 155, an upper arm side diode 156, a lower arm side IGBT 157, and a lower arm side diode 158, which are power semiconductor elements described later, are solder-connected to the collector side lead frame 901. Here, the IGBT is an abbreviation for an insulated gate bipolar transistor (Insulated Gate Bipolar Transistor).

コレクタ側リードフレーム９０１は、トランスファーモールド時に端子部に樹脂が流出するのを防止するためにタイバー９１２を有する。コレクタ側リードフレーム９０１や後述するその他のリードフレームは、電気伝導性と放熱性を兼ね備える金属材料が望ましい。金属材料の中でも、銅またはアルミニウムを主成分とする材料が好ましい。その中でも特に銅を主成分とする材料が電気伝導性の点から望ましい。   The collector-side lead frame 901 has a tie bar 912 to prevent the resin from flowing out to the terminal portion during transfer molding. The collector-side lead frame 901 and other lead frames described later are preferably made of a metal material having both electrical conductivity and heat dissipation. Among metal materials, a material mainly composed of copper or aluminum is preferable. Among these, a material mainly composed of copper is preferable from the viewpoint of electrical conductivity.

図３は、パワー半導体装置３００の製造工程で作製するリード体９１０の平面図である。   FIG. 3 is a plan view of the lead body 910 manufactured in the manufacturing process of the power semiconductor device 300.

パワー半導体素子のエミッタ側にエミッタ側リードフレーム９０２及び９０３がはんだ接続される。この後、Ａｌワイヤ９０５により、ＩＧＢＴゲートパットとリードフレームを電気的に接続する。このようにして、トランスファーモールド前のリード体９１０が作製される。   Emitter-side lead frames 902 and 903 are solder-connected to the emitter side of the power semiconductor element. Thereafter, the Al gate 905 electrically connects the IGBT gate pad and the lead frame. In this way, the lead body 910 before transfer molding is manufactured.

図４は、パワー半導体装置３００の製造工程で作製する回路体９００の平面図及びＡ−Ａ‘面で切断した断面図である。   FIG. 4 is a plan view of a circuit body 900 manufactured in the manufacturing process of the power semiconductor device 300 and a cross-sectional view cut along the A-A ′ plane.

リード体９１０を封止樹脂９０７としてトランスファーモールドにて封止した後、タイバー９１２をカットして回路体９００が作製される。封止樹脂９０７は、樹脂材料であれば特に制約されないが、熱応力を低減するためリードフレームの熱膨張率に近い材料が望ましい。   After the lead body 910 is sealed with a transfer mold as the sealing resin 907, the tie bar 912 is cut to manufacture the circuit body 900. The sealing resin 907 is not particularly limited as long as it is a resin material, but a material close to the thermal expansion coefficient of the lead frame is desirable in order to reduce thermal stress.

図５は、回路体９００をケース９５０に挿入するまでの製造工程の断面模式図である。   FIG. 5 is a schematic cross-sectional view of the manufacturing process until the circuit body 900 is inserted into the case 950.

上側の絶縁シート９０６は、封止樹脂９０７から露出したエミッタ側リードフレーム９０２及び９０３を少なくとも覆うように回路体９００に接続される。下側の絶縁シート９０６は、封止樹脂９０７から露出したコレクタ側リードフレーム９０１を少なくとも覆うように回路体９００に接続される。絶縁シート９０６と回路体９００との接続は、接着等の仮固定によって為される。そして、絶縁シート９０６を接続した回路体９００を、ケース９５０に挿入する。   The upper insulating sheet 906 is connected to the circuit body 900 so as to cover at least the emitter-side lead frames 902 and 903 exposed from the sealing resin 907. The lower insulating sheet 906 is connected to the circuit body 900 so as to cover at least the collector-side lead frame 901 exposed from the sealing resin 907. The insulating sheet 906 and the circuit body 900 are connected by temporary fixing such as adhesion. Then, the circuit body 900 connected with the insulating sheet 906 is inserted into the case 950.

図６は、絶縁シート９０６を中心にしたパワー半導体装置３００の製造工程の断面模式図である。   FIG. 6 is a schematic cross-sectional view of the manufacturing process of the power semiconductor device 300 with the insulating sheet 906 as the center.

両面に絶縁シート９０６を仮固定しケース９５０に挿入した回路体９００は、真空プレス機を用いて加熱圧着される。プレス熱板９９０にクッション材９９１を用いて取り付けられた圧着治具Ａ９９２及び圧着治具Ｂ９９３を用いて、ケース９５０のフィン先端及び第１中間ベース部９５３を加圧する。   The circuit body 900 in which the insulating sheets 906 are temporarily fixed on both surfaces and inserted into the case 950 is heat-pressed using a vacuum press. The tip of the fin of the case 950 and the first intermediate base portion 953 are pressurized using the crimping jig A992 and the crimping jig B993 attached to the press hot plate 990 using the cushion material 991.

これにより接続部９７０が変形し、絶縁シート９０６が第１フィンベース９５２、第２フィンベース９５６、第１中間ベース９５３及び第２中間ベース９５７と密着する。この密着状態を保持したまま、所定の温度、時間で絶縁シート９０６を硬化させて、回路体９００とケース９５０を絶縁シート９０６により接着させる。このようにしてパワー半導体装置３００が得られる。   As a result, the connecting portion 970 is deformed, and the insulating sheet 906 is in close contact with the first fin base 952, the second fin base 956, the first intermediate base 953, and the second intermediate base 957. The insulating sheet 906 is cured at a predetermined temperature and time while the close contact state is maintained, and the circuit body 900 and the case 950 are bonded to each other by the insulating sheet 906. In this way, the power semiconductor device 300 is obtained.

図７に本実施形態のパワー半導体装置の変形例である構造を説明する模式図を示す。図１ないし図６で説明された実施形態と異なる点は、第１中間ベース部９５３に、第１フィンベース９５２に形成されたフィンと同じ高さの凸部９５８を有する。   FIG. 7 is a schematic diagram for explaining a structure which is a modification of the power semiconductor device of this embodiment. A difference from the embodiment described with reference to FIGS. 1 to 6 is that the first intermediate base portion 953 has convex portions 958 having the same height as the fins formed on the first fin base 952.

図８は、変形例に係る、絶縁シート９０６を中心にしたパワー半導体装置３００の製造工程の断面模式図である。   FIG. 8 is a schematic cross-sectional view of a manufacturing process of the power semiconductor device 300 centering on the insulating sheet 906 according to the modification.

両面に絶縁シート９０６を仮固定しケース９５０に挿入した回路体９００は、真空プレス機を用いて加熱圧着される。プレス熱板９９０にクッション材９９１を用いて取り付けられた圧着治具Ａ９９２を用いて、ケース９５０のフィン先端を加圧する。第１中間ベース部９５３にフィンと同じ高さの凸部９５８が形成されているため、圧着治具を簡略化しても、第１中間ベース部９５３を加圧できる効果がある。圧着により接続部９７０が変形し、絶縁シート９０６が第１フィンベース９５２、第２フィンベース９５６、第１中間ベース９５３及び第２中間ベース９５７と密着する。この密着状態を保持したまま、所定の温度、時間で絶縁シートを硬化させて、回路体９００とケース９５０を絶縁シートにより接着させる。このようにしてパワー半導体装置３００が得られる。   The circuit body 900 in which the insulating sheets 906 are temporarily fixed on both surfaces and inserted into the case 950 is heat-pressed using a vacuum press. The tip of the fin of the case 950 is pressurized using a crimping jig A992 attached to the press hot plate 990 using a cushioning material 991. Since the convex portion 958 having the same height as the fin is formed on the first intermediate base portion 953, there is an effect that the first intermediate base portion 953 can be pressurized even if the crimping jig is simplified. The connecting portion 970 is deformed by the pressure bonding, and the insulating sheet 906 is in close contact with the first fin base 952, the second fin base 956, the first intermediate base 953, and the second intermediate base 957. While maintaining this tight contact state, the insulating sheet is cured at a predetermined temperature and time, and the circuit body 900 and the case 950 are bonded together by the insulating sheet. In this way, the power semiconductor device 300 is obtained.

図９は、パワー半導体装置３００の熱応力解析モデル及びポイントＣの応力解析結果を示す。   FIG. 9 shows a thermal stress analysis model of the power semiconductor device 300 and a stress analysis result at point C.

Ｔ１は第１フィンベース部９５２と第２フィンベース９５６のそれぞれの厚さ、Ｔ２は第１中間ベース部９５３と第２中間ベース９５７のそれぞれの厚さを示す。ケース９５０の材料はＡｌ材、リードフレームは銅材とし封止樹脂９０７は銅材と同じ熱膨張率で計算した。また解析は、動作温度である１５０℃を応力０として、−４０℃における最大主応力を求めた。また、Ｔ２は２．５ｍｍとした。   T1 indicates the thickness of each of the first fin base portion 952 and the second fin base 956, and T2 indicates the thickness of each of the first intermediate base portion 953 and the second intermediate base 957. The case 950 was made of an Al material, the lead frame was made of a copper material, and the sealing resin 907 was calculated with the same thermal expansion coefficient as that of the copper material. In the analysis, the maximum principal stress at −40 ° C. was obtained by setting the operating temperature of 150 ° C. to zero stress. T2 was 2.5 mm.

Ｔ１＝Ｔ２の最大主応力を１として、これに対する比を相対応力とした。第１中間ベース部９５３と第２中間ベース９５７が薄くなるにともない応力が低減する効果が確認できた。特に相対厚さが０．４以下になると傾きが大きくなり応力低減の効果が大きいことが確認できた。   The maximum principal stress at T1 = T2 was set to 1, and the ratio to this was defined as relative stress. It was confirmed that the stress was reduced as the first intermediate base portion 953 and the second intermediate base 957 became thinner. In particular, it was confirmed that when the relative thickness was 0.4 or less, the inclination increased and the effect of stress reduction was great.

絶縁シート９０６の端部が剥離すると、その剥離は内部に進展する。ケース９５０と回路体９００にはパワー半導体素子の動作により高電圧加わる。端部からの剥離が回路体９００のリードフレーム露出に達すると、高電圧が加わるリードフレームとケース９５０の間に空気層ができ、絶縁性が低下する。絶縁シート９０６の端部の応力を低減するとこのような剥離を抑制できるため信頼性寿命が向上できる効果がある。   When the end portion of the insulating sheet 906 is peeled off, the peeling progresses to the inside. A high voltage is applied to the case 950 and the circuit body 900 by the operation of the power semiconductor element. When the peeling from the end reaches the lead frame exposure of the circuit body 900, an air layer is formed between the lead frame to which a high voltage is applied and the case 950, and the insulation is deteriorated. If the stress at the end of the insulating sheet 906 is reduced, such peeling can be suppressed, and the reliability life can be improved.

図１０は、本実施形態のパワー半導体装置３００の回路図である。端子３１５Ｂは、上アーム回路のコレクタ側から出力しており、バッテリー又はコンデンサの正極側に接続される。端子３２５Ｕは、上アーム回路のＩＧＢＴ１５５のゲート及びエミッタセンスから出力している。端子３１９Ｂは、下アーム回路のエミッタ側から出力しており、バッテリー若しくはコンデンサの負極側、又はＧＮＤに接続される。端子３２５Ｌは、下アーム回路のＩＧＢＴ１５７のゲート及びエミッタセンスから出力している。端子３２０Ｂは、下アーム回路のコレクタ側から出力しており、モータに接続される。中性点接地をする場合は、下アーム回路は、ＧＮＤでなくコンデンサの負極側に接続する。   FIG. 10 is a circuit diagram of the power semiconductor device 300 of this embodiment. The terminal 315B outputs from the collector side of the upper arm circuit, and is connected to the positive side of the battery or capacitor. The terminal 325U outputs from the gate and emitter sense of the IGBT 155 of the upper arm circuit. The terminal 319B outputs from the emitter side of the lower arm circuit, and is connected to the negative side of the battery or capacitor, or to GND. The terminal 325L outputs from the gate and emitter sense of the IGBT 157 of the lower arm circuit. The terminal 320B outputs from the collector side of the lower arm circuit and is connected to the motor. In the case of neutral point grounding, the lower arm circuit is connected to the negative electrode side of the capacitor instead of GND.

本実施例のパワー半導体装置は、上アーム回路及び下アーム回路の２つのアーム回路を、１つのモジュールに一体化した構造である２ｉｎ１構造である。２ｉｎ１構造の他にも、３ｉｎ１構造、４ｉｎ１構造、６ｉｎ１構造等を用いた場合、パワー半導体装置からの出力端子の数を低減し小型化することができる。   The power semiconductor device according to the present embodiment has a 2-in-1 structure in which two arm circuits of an upper arm circuit and a lower arm circuit are integrated into one module. In addition to the 2in1 structure, when a 3in1 structure, a 4in1 structure, a 6in1 structure, or the like is used, the number of output terminals from the power semiconductor device can be reduced and the size can be reduced.

図１１は、本実施形態のパワー半導体装置３００を用いた電力変換装置２００の回路図である。電力変換装置２００は、インバータ回路部１４０、１４２と、補機用のインバータ回路部４３と、コンデンサモジュール５００と、を備えている。インバータ回路部１４０及び１４２は、パワー半導体装置３００を複数備えており、それらを接続することにより３相ブリッジ回路を構成している。電流容量が大きい場合には、更にパワー半導体装置３００を並列接続し、これら並列接続を３相インバータ回路の各相に対応して行うことにより、電流容量の増大に対応できる。また、パワー半導体装置３００に内蔵しているパワー半導体素子を並列接続することでも電流容量の増大に対応できる。   FIG. 11 is a circuit diagram of a power conversion device 200 using the power semiconductor device 300 of the present embodiment. The power conversion device 200 includes inverter circuit units 140 and 142, an auxiliary inverter circuit unit 43, and a capacitor module 500. The inverter circuit units 140 and 142 include a plurality of power semiconductor devices 300, and constitute a three-phase bridge circuit by connecting them. When the current capacity is large, the power semiconductor device 300 is further connected in parallel, and the parallel connection is performed corresponding to each phase of the three-phase inverter circuit, so that an increase in the current capacity can be dealt with. Further, it is possible to cope with an increase in current capacity by connecting power semiconductor elements built in the power semiconductor device 300 in parallel.

インバータ回路部１４０とインバータ回路部１４２とは、基本的な回路構成は同じであり、制御方法や動作も基本的には同じである。インバータ回路部１４０等の回路的な動作の概要は周知であるため、ここでは詳細な説明を省略する。   The inverter circuit unit 140 and the inverter circuit unit 142 have the same basic circuit configuration and basically the same control method and operation. Since the outline of the circuit operation of the inverter circuit unit 140 and the like is well known, detailed description thereof is omitted here.

上述のように、上アーム回路は、スイッチング用のパワー半導体素子として上アーム用ＩＧＢＴ１５５と上アーム用ダイオード１５６とを備えており、下アーム回路は、下アーム用ＩＧＢＴ１５７と下アーム用ダイオード１５８とを備えている。ＩＧＢＴ１５５及び１５７は、ドライバ回路１７４を構成する２つのドライバ回路の一方あるいは他方から出力された駆動信号を受けてスイッチング動作し、バッテリー１３６から供給された直流電力を三相交流電力に変換する。   As described above, the upper arm circuit includes the upper arm IGBT 155 and the upper arm diode 156 as power semiconductor elements for switching, and the lower arm circuit includes the lower arm IGBT 157 and the lower arm diode 158. I have. The IGBTs 155 and 157 perform a switching operation in response to a drive signal output from one or the other of the two driver circuits constituting the driver circuit 174, and convert DC power supplied from the battery 136 into three-phase AC power.

上アーム用ＩＧＢＴ１５５や下アーム用ＩＧＢＴ１５７は、コレクタ電極、エミッタ電極（信号用エミッタ電極端子）、ゲート電極（ゲート電極端子）を備えている。上アーム用ダイオード１５６や下アーム用ダイオード１５８は、カソード電極およびアノード電極の２つの電極を備えている。上アーム用ＩＧＢＴ１５５や下アーム用ＩＧＢＴ１５７のエミッタ電極からコレクタ電極に向かう方向が順方向となるように、ダイオード１５６、１５８のカソード電極がＩＧＢＴ１５５、１５７のコレクタ電極に、アノード電極がＩＧＢＴ１５５、１５７のエミッタ電極にそれぞれ電気的に接続されている。なお、パワー半導体素子としてはＭＯＳＦＥＴ（金属酸化物半導体型電界効果トランジスタ）を用いても良く、この場合は上アーム用ダイオード１５６、下アーム用ダイオード１５８は不要となる。   The upper arm IGBT 155 and the lower arm IGBT 157 include a collector electrode, an emitter electrode (signal emitter electrode terminal), and a gate electrode (gate electrode terminal). The upper arm diode 156 and the lower arm diode 158 include two electrodes, a cathode electrode and an anode electrode. The cathode electrodes of the diodes 156 and 158 are the collector electrodes of the IGBTs 155 and 157, and the anode electrodes are the emitters of the IGBTs 155 and 157 so that the direction from the emitter electrode to the collector electrode of the upper arm IGBT 155 and the lower arm IGBT 157 is the forward direction. Each is electrically connected to the electrode. As the power semiconductor element, a MOSFET (metal oxide semiconductor field effect transistor) may be used. In this case, the upper arm diode 156 and the lower arm diode 158 are not necessary.

上下アーム直列回路に設けられた温度センサ（不図示）からは、上下アーム直列回路の温度情報がマイコンに入力される。また、マイコンには上下アーム直列回路の直流正極側の電圧情報が入力される。マイコンは、それらの情報に基づいて過温度検知および過電圧検知を行い、過温度或いは過電圧が検知された場合には全ての上アーム用ＩＧＢＴ１５５、下アーム用ＩＧＢＴ１５７のスイッチング動作を停止させ、上下アーム直列回路を過温度或いは過電圧から保護する。   Temperature information of the upper and lower arm series circuit is input to the microcomputer from a temperature sensor (not shown) provided in the upper and lower arm series circuit. Further, voltage information on the DC positive side of the upper and lower arm series circuit is input to the microcomputer. The microcomputer performs over temperature detection and over voltage detection based on the information, and when an over temperature or over voltage is detected, the switching operation of all the upper arm IGBT 155 and the lower arm IGBT 157 is stopped, and the upper and lower arms are connected in series. Protect the circuit from over temperature or over voltage.

図１２は、電力変換装置２００の外観を示す斜視図である。本実施の形態に係る電力変化装置２００の外観は、上面あるいは底面が略長方形の筐体１２と、筐体１２の短辺側の外周の一つに設けられた上部ケース１０と、筐体１２の下部開口を塞ぐための下部ケース１６とを固定して形成されたものである。筐体１２の底面図あるいは上面図の形状を略長方形としたことで、車両への取付けが容易となり、また生産しやすい。   FIG. 12 is a perspective view showing the external appearance of the power conversion device 200. The external appearance of the power change device 200 according to the present embodiment is as follows. The housing 12 has a substantially rectangular top or bottom surface, the upper case 10 provided on one of the outer circumferences on the short side of the housing 12, and the housing 12. The lower case 16 for closing the lower opening is fixed and formed. By making the shape of the bottom view or the top view of the housing 12 into a substantially rectangular shape, it is easy to attach to the vehicle, and it is easy to produce.

図１３は、電力変換装置２００の断面構造を示す概略図である。パワー半導体装置３００は、流路形成体１０００に設置される。パワー半導体装置３００を流路形成体に挿入した後、実装部品を搭載した積層配線板５０１を組み付け、信号端子と積層配線板５０１を電気的に接続する。さらに、大電流が流れる端子はバスバー配線を多層積層したプレート１２００から突出した端子と溶接する。積層配線板５０１とプレート１２００を立体積層することで、電力変換装置を小型化することができる。   FIG. 13 is a schematic diagram illustrating a cross-sectional structure of the power conversion device 200. The power semiconductor device 300 is installed in the flow path forming body 1000. After inserting the power semiconductor device 300 into the flow path forming body, the laminated wiring board 501 on which the mounting components are mounted is assembled, and the signal terminals and the laminated wiring board 501 are electrically connected. Furthermore, a terminal through which a large current flows is welded to a terminal protruding from a plate 1200 in which bus bar wirings are multilayered. By stacking the laminated wiring board 501 and the plate 1200 in three dimensions, the power conversion device can be reduced in size.

流路形成体１０００は、パワー半導体装置３００を冷却する冷媒を流す冷媒流路を形成する。流路形成体１０００は、パワー半導体装置３００の放熱部に、冷媒が流れる流路を形成する。パワー半導体装置３００のシール部９８０には、Ｏリング等の弾性体が設けられる。   The flow path forming body 1000 forms a coolant flow path through which a coolant that cools the power semiconductor device 300 flows. The flow path forming body 1000 forms a flow path through which the refrigerant flows in the heat dissipation portion of the power semiconductor device 300. The seal portion 980 of the power semiconductor device 300 is provided with an elastic body such as an O-ring.

図１４は、図１２の断面Ａにおける断面図である。筐体１２は、流路形成体１０００を形成する。冷却水入口１３から水路１９内に流入した冷媒は、水路１９を矢印で示すように流れ、冷却水出口１４から排出される。本実施形態においては、水路１９内に、６つのパワー半導体装置３００が冷却水の流れに沿って配置されている。   14 is a cross-sectional view taken along a cross-section A in FIG. The housing 12 forms a flow path forming body 1000. The refrigerant flowing into the water channel 19 from the cooling water inlet 13 flows through the water channel 19 as indicated by an arrow, and is discharged from the cooling water outlet 14. In the present embodiment, six power semiconductor devices 300 are arranged in the water channel 19 along the flow of the cooling water.

１０…上部ケース、１２…筺体、１３…冷却水入口、 １４…冷却水出口、 １６…下部ケース、 １８…交流ターミナル、 １９…流路、 ２０…水路構造体、 ２１…コネクタ、 ４３…インバータ回路、１３６…バッテリ、１４０…インバータ回路、１４２…インバータ回路、１５５…上アーム用ＩＧＢＴ、１５６…上アーム用ダイオード、１５７…下アーム用ＩＧＢＴ、１５８…下アーム用ダイオード、１７４…ドライバ回路、１９２…モータジェネレータ、１９４…モータジェネレータ、２００…電力変換装置、３００…パワー半導体装置、３１５Ｂ…直流端子、３１９Ｂ…直流端子、３２０Ｂ…交流端子、３２５Ｕ…信号端子、３２５Ｌ…信号端子、５００…コンデンサモジュール、５０１…積層配線板、９００…回路体、９０１…コレクタ側リードフレーム、９０２…エミッタ側リードフレーム、９０３…エミッタ側リードフレーム、９０４…パワー半導体素子、９０５…Ａｌワイヤ、９０６…絶縁シート、９０７…封止樹脂、９１０…リード体、９１２…タイバー、９５０…ケース、９５１…第１ベース部、９５２…第１フィンベース、９５３…第１中間ベース、９５５…第２ベース部、９５６…第２フィンベース、９５７…第２中間ベース、９５８…凸部、９６０…枠部、９７０…接続部、９８０…シール部、９９０…プレス熱板、９９１…クッション材、９９２…圧着治具Ａ、９９３…圧着治具Ｂ、１０００…流路形成体、１２００…プレート DESCRIPTION OF SYMBOLS 10 ... Upper case, 12 ... Housing, 13 ... Cooling water inlet, 14 ... Cooling water outlet, 16 ... Lower case, 18 ... AC terminal, 19 ... Flow path, 20 ... Water channel structure, 21 ... Connector, 43 ... Inverter circuit DESCRIPTION OF SYMBOLS 136 ... Battery, 140 ... Inverter circuit, 142 ... Inverter circuit, 155 ... Upper arm IGBT, 156 ... Upper arm diode, 157 ... Lower arm IGBT, 158 ... Lower arm diode, 174 ... Driver circuit, 192 ... Motor generator, 194 ... motor generator, 200 ... power converter, 300 ... power semiconductor device, 315B ... DC terminal, 319B ... DC terminal, 320B ... AC terminal, 325U ... signal terminal, 325L ... signal terminal, 500 ... capacitor module, 501 ... Laminated wiring board, 900 ... Circuit body, 901 ... Lector side lead frame, 902 ... emitter side lead frame, 903 ... emitter side lead frame, 904 ... power semiconductor element, 905 ... Al wire, 906 ... insulating sheet, 907 ... sealing resin, 910 ... lead body, 912 ... tie bar, 950 ... Case, 951 ... First base portion, 952 ... First fin base, 953 ... First intermediate base, 955 ... Second base portion, 956 ... Second fin base, 957 ... Second intermediate base, 958 ... Convex portion 960 ... Frame part, 970 ... Connection part, 980 ... Seal part, 990 ... Press hot plate, 991 ... Cushion material, 992 ... Pressure bonding jig A, 993 ... Pressure bonding jig B, 1000 ... Flow path forming body, 1200 ... plate

Claims (8)

パワー半導体素子を有する回路体と、
前記回路体を収納するケースと、
前記回路体と前記ケースに間に配置される絶縁部材と、を備え、
前記ケースは、前記回路体と対向する第１ベース部と、枠部と、当該枠部と当該第１ベースを接続するとともに当該第１ベースよりも薄く形成される接続部と、を有し、
前記第１ベースは、フィンを有する第１フィンベースと、当該第１フィンベースよりも薄くかつ前記接続部よりも厚く形成されさらに当該接続部と接続される第１中間ベースと、を有するパワー半導体装置。 A circuit body having a power semiconductor element;
A case for storing the circuit body;
An insulating member disposed between the circuit body and the case,
The case includes a first base portion facing the circuit body, a frame portion, and a connection portion that connects the frame portion and the first base and is formed thinner than the first base,
The first base includes a first fin base having fins, and a first intermediate base formed thinner than the first fin base and thicker than the connection portion and connected to the connection portion. apparatus. 請求項１に記載のパワー半導体装置であって、
前記回路体を挟んで前記第１ベース部と対向する第２ベース部を備え、
前記枠部の前記接続部は、前記第１ベース部と前記第２ベース部を接続するとともに当該第１ベース及び当該第２ベースよりも薄く形成されるパワー半導体装置。 The power semiconductor device according to claim 1,
A second base portion facing the first base portion across the circuit body;
The connection portion of the frame portion is a power semiconductor device that connects the first base portion and the second base portion and is formed thinner than the first base and the second base. 請求項１または２に記載のパワー半導体装置であって、
前記絶縁部材の端部は、前記第１中間ベースと前記ケースの間に配置されるパワー半導体装置。 The power semiconductor device according to claim 1 or 2,
An end portion of the insulating member is a power semiconductor device disposed between the first intermediate base and the case. 請求項１ないし３に記載のパワー半導体装置であって、
前記第１中間ベースは、前記フィンの先端よりも高くまたは当該フィンの先端と同じ高さとなるように形成される突起部を有するパワー半導体装置。 The power semiconductor device according to claim 1, wherein
The power semiconductor device according to claim 1, wherein the first intermediate base has a protrusion formed so as to be higher than a tip of the fin or the same height as the tip of the fin. 請求項１乃至４のいずれかに記載のパワー半導体装置であって、
前記第１中間ベースに第１フィンベースのフィンと同一平面で接する突起を備えるパワー半導体装置。 A power semiconductor device according to any one of claims 1 to 4,
A power semiconductor device comprising: a protrusion that contacts the first intermediate base on the same plane as the fin of the first fin base. 請求項１乃至５のいずれかに記載のパワー半導体装置であって、
前記第１中間ベースの厚さは、前記第１フィンベースの厚さを１とした場合、０．４以下であるパワー半導体装置。 A power semiconductor device according to any one of claims 1 to 5,
The power semiconductor device, wherein the thickness of the first intermediate base is 0.4 or less when the thickness of the first fin base is 1. 請求項１乃至６のいずれかに記載のパワー半導体装置であって、
前記ケースは、アルミニウムを含む材料により構成され、
前記回路体は、銅を含む材料により構成されるリードフレームを導電部材として用いるパワー半導体装置。 A power semiconductor device according to any one of claims 1 to 6,
The case is made of a material containing aluminum,
The circuit body is a power semiconductor device using a lead frame made of a material containing copper as a conductive member. 請求項１乃至７のいずれかに記載のパワー半導体装置であって、
前記第１ベース部を挟んで前記回路体と対向するとともに冷媒を流す流路を形成する流路形成体を備えるパワー半導体装置。 A power semiconductor device according to any one of claims 1 to 7,
A power semiconductor device comprising: a flow path forming body that forms a flow path through which a coolant flows while facing the circuit body with the first base portion interposed therebetween.
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