JP2018132493A - Physical quantity sensor, physical quantity sensor device, electronic apparatus, and movable body - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a physical quantity sensor that has excellent impact resistance, a physical quantity sensor device, an electronic apparatus, and a movable body.SOLUTION: A physical quantity sensor of the present invention comprises a base, and an element part that is provided on the base and detects the physical quantity. The element part includes a stationary electrode part that is fixed to the base, and a movable electrode part that can be displaced with respect to the base. The stationary electrode part includes a stationary part that is connected to the base, a support part that is connected to the stationary part, and a stationary electrode finger that is connected to the support part. A connection of the support part and the stationary part has a tapered shape in which the width is gradually increased toward the stationary part.SELECTED DRAWING: Figure 3

Description

  The present invention relates to a physical quantity sensor, a physical quantity sensor device, an electronic apparatus, and a moving object.

  For example, a configuration described in Patent Document 1 is known as an acceleration sensor that can detect acceleration (physical quantity).

  The acceleration sensor of Patent Literature 1 includes a substrate, a fixed electrode portion fixed to the substrate, and a movable electrode portion that can be displaced with respect to the substrate. The fixed electrode section includes a fixed section (support conduction section) fixed to the substrate, a support section (electrode support section) connected to the fixed section, and a fixed electrode finger (counter electrode) connected to the support section. ,have. The movable electrode part includes a fixed part (support conduction part) fixed to the substrate, a support part (support arm part) connected to the fixed part, and a movable part (weight part) displaceable with respect to the support part. And an elastic part that connects the support part and the movable part.

JP 2010-238921 A

  In such an acceleration sensor of Patent Document 1, in the fixed electrode portion, a substantially perpendicular corner is formed at the connection portion between the fixed portion and the support portion. Therefore, when an impact due to dropping or the like is applied to the acceleration sensor, stress concentrates on the connection portion between the fixed portion and the support portion, and the possibility that the portion is damaged increases. Similarly, in the movable electrode portion, a corner portion having a substantially right angle is formed at the connection portion between the fixed portion and the support arm. Therefore, when an impact due to dropping or the like is applied to the acceleration sensor, stress concentrates on the connection portion between the fixed portion and the support arm portion, and the risk of damaging the portion increases. As described above, the acceleration sensor of Patent Document 1 has a problem of low impact resistance.

  An object of the present invention is to provide a physical quantity sensor, a physical quantity sensor device, an electronic apparatus, and a moving body having excellent impact resistance.

  SUMMARY An advantage of some aspects of the invention is to solve at least a part of the problems described above, and the invention can be implemented as the following inventions.

The physical quantity sensor of the present invention includes a base,
An element part that is provided at the base and detects a physical quantity;
The element portion is
A fixed electrode portion fixed to the base, and
A movable electrode part displaceable with respect to the base part,
The fixed electrode portion is
A fixed portion connected to the base;
A support portion connected to the fixed portion;
A fixed electrode finger connected to the support,
The connecting portion of the support portion with the fixing portion has a tapered shape with a width gradually increasing toward the fixing portion.
As a result, stress concentration on the connection portion is alleviated, and a physical quantity sensor having excellent impact resistance can be obtained.

In the physical quantity sensor of the present invention, it is preferable that at least one of the outer edges in the width direction of the connection portion be curved in a concave shape.
As a result, stress concentration on the connection portion is more effectively mitigated, and a physical quantity sensor having better impact resistance can be obtained.

In the physical quantity sensor of the present invention, the support portion is
A first extending portion extending in a first direction and connected to the fixed electrode finger;
A second extension portion extending in a second direction different from the first direction and connecting the first extension portion and the fixed portion;
It is preferable that a connection portion between the second extension portion and the first extension portion has a tapered shape in which a width gradually increases toward the first extension portion.
Thereby, the stress concentration on the connection portion between the second extension portion and the first extension portion is alleviated, and a physical quantity sensor having more excellent impact resistance can be obtained.

In the physical quantity sensor according to the aspect of the invention, it is preferable that the connection portion of the fixed electrode finger with the support portion has a tapered shape whose width gradually increases toward the support portion.
Thereby, the stress concentration on the connection portion with the support portion of the fixed electrode finger is effectively relieved, and a physical quantity sensor having more excellent impact resistance can be obtained.

In the physical quantity sensor according to the aspect of the invention, it is preferable that at least one of both outer edges in the width direction of the connection portion of the fixed electrode finger with the support portion is curved in a concave shape.
As a result, the stress concentration on the connection portion with the support portion of the fixed electrode finger is more effectively mitigated, and a physical quantity sensor having better impact resistance is obtained.

In the physical quantity sensor according to the aspect of the invention, it is preferable that the amount of change in the width of the connection portion of the fixed electrode finger with the support portion is smaller than the amount of change in the width of the connection portion of the support portion with the fixed portion.
Thereby, the opposing area of a movable electrode finger and a fixed electrode finger can be enlarged, reducing the gap of a movable electrode finger and a fixed electrode finger. Therefore, the electrostatic capacitance between the movable electrode finger and the fixed electrode finger can be increased, and the physical quantity can be detected with higher accuracy.

In the physical quantity sensor according to the aspect of the invention, it is preferable that the connection portion of the fixed electrode finger with the support portion has a constant width toward the support portion side.
Thereby, the opposing area of a movable electrode finger and a fixed electrode finger can be enlarged, reducing the gap of a movable electrode finger and a fixed electrode finger. Therefore, the electrostatic capacitance between the movable electrode finger and the fixed electrode finger can be increased, and the physical quantity can be detected with higher accuracy.

The physical quantity sensor of the present invention includes a base,
An element part that is provided at the base and detects a physical quantity;
The element portion is
A fixed electrode portion fixed to the base, and
A movable electrode part displaceable with respect to the base part,
The movable electrode portion is
A fixed portion connected to the base;
A support portion connected to the fixed portion;
A movable part displaceable with respect to the support part;
An elastic part connecting the support part and the movable part;
A movable electrode finger provided on the movable part,
The connecting portion of the support portion with the fixing portion has a tapered shape with a width gradually increasing toward the fixing portion.
As a result, stress concentration on the connection portion is alleviated, and a physical quantity sensor having excellent impact resistance can be obtained.

In the physical quantity sensor of the present invention, it is preferable that at least one of the outer edges in the width direction of the connection portion be curved in a concave shape.
As a result, stress concentration on the connection portion is more effectively mitigated, and a physical quantity sensor having better impact resistance can be obtained.

In the physical quantity sensor according to the aspect of the invention, it is preferable that the connection portion of the movable electrode finger with the movable portion has a tapered shape whose width gradually increases toward the movable portion side.
Thereby, the stress concentration on the connection portion of the movable electrode finger with the movable portion is effectively relieved, and a physical quantity sensor having more excellent impact resistance can be obtained.

In the physical quantity sensor of the present invention, it is preferable that at least one of both outer edges in the width direction of the connecting portion of the movable electrode finger with the movable portion is curved in a concave shape.
Thereby, the stress concentration on the connection portion of the movable electrode finger with the movable portion is more effectively mitigated, and a physical quantity sensor having better impact resistance can be obtained.

In the physical quantity sensor according to the aspect of the invention, it is preferable that the change amount of the width of the connection portion of the movable electrode finger with the movable portion is smaller than the change amount of the width of the connection portion of the support portion with the fixed portion.
Thereby, the opposing area of a movable electrode finger and a fixed electrode finger can be enlarged, reducing the gap of a movable electrode finger and a fixed electrode finger. Therefore, the electrostatic capacitance between the movable electrode finger and the fixed electrode finger can be increased, and the physical quantity can be detected with higher accuracy.

In the physical quantity sensor according to the aspect of the invention, it is preferable that the connection portion of the movable electrode finger with the movable portion has a constant width toward the movable portion side.
Thereby, the opposing area of a movable electrode finger and a fixed electrode finger can be enlarged, reducing the gap of a movable electrode finger and a fixed electrode finger. Therefore, the electrostatic capacitance between the movable electrode finger and the fixed electrode finger can be increased, and the physical quantity can be detected with higher accuracy.

The physical quantity sensor device of the present invention includes the physical quantity sensor of the present invention.
Thereby, the physical quantity sensor device which can enjoy the effect of the physical quantity sensor mentioned above and has high reliability is obtained.

The electronic device of the present invention includes the physical quantity sensor of the present invention.
Thereby, the electronic device which can enjoy the effect of the physical quantity sensor mentioned above and has high reliability is obtained.

The moving body of the present invention has the physical quantity sensor of the present invention.
Thereby, the moving body which can enjoy the effect of the physical quantity sensor mentioned above and has high reliability is obtained.

It is a top view which shows the physical quantity sensor which concerns on 1st Embodiment of this invention. It is the sectional view on the AA line in FIG. It is the elements on larger scale of an element part. It is a partial enlarged plan view which shows the modification of an element part. It is the elements on larger scale which show the movable electrode finger and fixed electrode finger which an element part has. It is the elements on larger scale which show the movable electrode finger and fixed electrode finger which an element part has. It is a top view which shows the physical quantity sensor which concerns on 2nd Embodiment of this invention. It is a partial enlarged plan view which shows the physical quantity sensor which concerns on 3rd Embodiment of this invention. It is a partial enlarged plan view which shows the physical quantity sensor which concerns on 4th Embodiment of this invention. FIG. 10 is a partially enlarged plan view showing a modification of the physical quantity sensor shown in FIG. 9. It is a top view which shows the physical quantity sensor which concerns on 5th Embodiment of this invention. It is a top view which shows the physical quantity sensor which concerns on 6th Embodiment of this invention. It is a top view which shows the physical quantity sensor which concerns on 7th Embodiment of this invention. It is a top view which shows the physical quantity sensor which concerns on 8th Embodiment of this invention. It is sectional drawing which shows the physical quantity sensor device which concerns on 9th Embodiment of this invention. It is a perspective view which shows the electronic device which concerns on 10th Embodiment of this invention. It is a perspective view which shows the electronic device which concerns on 11th Embodiment of this invention. It is a perspective view which shows the electronic device which concerns on 12th Embodiment of this invention. It is a perspective view which shows the mobile body which concerns on 13th Embodiment of this invention.

  Hereinafter, a physical quantity sensor, a physical quantity sensor device, an electronic apparatus, and a moving body of the present invention will be described in detail based on embodiments shown in the accompanying drawings.

<First Embodiment>
First, the physical quantity sensor according to the first embodiment of the invention will be described.

  FIG. 1 is a plan view showing a physical quantity sensor according to the first embodiment of the present invention. 2 is a cross-sectional view taken along line AA in FIG. FIG. 3 is a partially enlarged plan view of the element portion. FIG. 4 is a partially enlarged plan view showing a modification of the element portion. 5 and 6 are partially enlarged plan views showing movable electrode fingers and fixed electrode fingers of the element portion, respectively. In the following, for the sake of convenience of explanation, the front side in FIG. 1 and the upper side in FIG. 2 are also referred to as “up”, and the back side in FIG. 1 and the lower side in FIG. Also, as shown in each figure, the three axes orthogonal to each other are the X axis, Y axis, and Z axis, the direction parallel to the X axis is “X axis direction”, and the direction parallel to the Y axis is “Y axis direction” The direction parallel to the Z axis is also referred to as the “Z axis direction”. Further, the tip end side of each axis in the arrow direction is also referred to as “plus side”, and the opposite side is also referred to as “minus side”.

  A physical quantity sensor 1 shown in FIG. 1 is an acceleration sensor that can detect an acceleration Ax in the X-axis direction. Such a physical quantity sensor 1 has a substrate 2 (base portion), an element portion 3 disposed on the substrate 2, and a lid portion 8 joined to the substrate 2 so as to cover the element portion 3. . Hereinafter, each of these units will be described in detail in order.

(substrate)
As shown in FIG. 1, the board | substrate 2 has comprised the plate shape which has a rectangular planar view shape. The substrate 2 also has a recess 21 that opens to the upper surface side. Further, the concave portion 21 is formed larger than the element portion 3 so as to enclose the element portion 3 inside in a plan view from the Z-axis direction. Such a recess 21 functions as an escape portion for preventing (suppressing) contact between the element portion 3 and the substrate 2.

  As shown in FIG. 2, the substrate 2 has three projecting mount portions 22, 23, 24 provided on the bottom surface of the recess 21. The element unit 3 is bonded to the mount units 22, 23, and 24. Thereby, the element part 3 can be fixed to the board | substrate 2 in the state spaced apart from the bottom face of the recessed part 21. FIG.

  Moreover, as shown in FIG. 1, the board | substrate 2 has the groove parts 25, 26, and 27 opened to the upper surface side. In addition, one end portions of the groove portions 25, 26, and 27 are respectively positioned outside the lid portion 8, and the other end portions are respectively connected to the recesses 21.

  As such a substrate 2, for example, a glass substrate made of a glass material containing alkali metal ions (movable ions) (for example, borosilicate glass such as Pyrex glass (registered trademark)) can be used. Thereby, for example, depending on the constituent material of the lid portion 8, the substrate 2 and the lid portion 8 can be joined by anodic bonding, and these can be firmly joined. In addition, since the light-transmitting substrate 2 is obtained, the state of the element unit 3 (for example, the element unit 3 sticks to the bottom surface of the recess 21 from the outside of the physical quantity sensor 1 through the substrate 2). The presence or absence of “sticking” can be visually recognized.

  However, the substrate 2 is not particularly limited, and for example, a silicon substrate or a ceramic substrate may be used. In the case where a silicon substrate is used as the substrate 2, from the viewpoint of preventing a short circuit, a high resistance silicon substrate is used, or a silicon substrate having a silicon oxide film (insulating oxide) formed on the surface by thermal oxidation or the like is used. It is preferable.

  Further, as shown in FIG. 1, wirings 71, 72, and 73 are provided in the groove portions 25, 26, and 27. Further, one end portions of the wirings 71, 72, and 73 are exposed to the outside of the lid portion 8, and function as electrode pads P that are electrically connected to an external device. As shown in FIG. 2, the other end portion of the wiring 71 is routed to the mount portion 22 through the bottom surface of the concave portion 21 and is electrically connected to the element portion 3 on the mount portion 22. . The other end of the wiring 72 is routed to the mount portion 23 through the bottom surface of the recess 21 and is electrically connected to the element portion 3 on the mount portion 23. The other end portion of the wiring 73 is routed to the mount portion 24 through the bottom surface of the recess 21, and is electrically connected to the element portion 3 on the mount portion 24.

  The constituent material of the wiring 71, 72, 73 is not particularly limited. For example, gold (Au), silver (Ag), platinum (Pt), palladium (Pd), iridium (Ir), copper (Cu), aluminum (Al), nickel (Ni), Ti (titanium), tungsten (W) and other metal materials, alloys containing these metal materials, ITO (Indium Tin Oxide), IZO (Indium Zinc Oxide), ZnO (Zinc Oxide), Examples thereof include oxide-based transparent conductive materials such as IGZO (amorphous semiconductor composed of Indium, Gallium, Zinc, Oxide), and a combination of one or more of these (for example, a laminate of two or more layers) As body).

(Cover)
As shown in FIG. 1, the lid portion 8 has a plate shape having a rectangular plan view shape. Moreover, as shown in FIG. 2, the cover part 8 has the recessed part 81 opened to a lower surface side (board | substrate 2 side). Such a lid portion 8 is bonded to the upper surface of the substrate 2 so as to accommodate the element portion 3 in the recess 81. A storage space S for storing the element portion 3 is formed inside the lid portion 8 and the substrate 2.

  Further, as shown in FIG. 2, the lid 8 has a communication hole 82 that communicates the inside and outside of the storage space S. The storage space S can be replaced with a desired atmosphere through the communication hole 82. A sealing member 83 is disposed in the communication hole 82, and the communication hole 82 is hermetically sealed by the sealing member 83.

  The sealing member 83 is not particularly limited as long as the communication hole 82 can be sealed. For example, gold (Au) / tin (Sn) alloy, gold (Au) / germanium (Ge) alloy, gold (Au) / Various alloys such as aluminum (Al) alloys, glass materials such as low melting point glass, and the like can be used.

  The storage space S is an airtight space. The storage space S is preferably filled with an inert gas such as nitrogen, helium, or argon and is at atmospheric pressure at the operating temperature (about −40 ° C. to 80 ° C.). By setting the storage space S to atmospheric pressure, the viscous resistance is increased and the damping effect is exhibited, and the vibration of the element unit 3 (movable unit 53 described later) can be quickly converged. Therefore, the detection accuracy of the acceleration Ax of the physical quantity sensor 1 is improved.

  As such a cover part 8, a silicon substrate can be used, for example. However, the lid 8 is not particularly limited, and for example, a glass substrate or a ceramic substrate may be used. Moreover, it does not specifically limit as a joining method of the board | substrate 2 and the cover part 8, What is necessary is just to select suitably by the material of the board | substrate 2 and the cover part 8, For example, the joining surface activated by anodic bonding and plasma irradiation Examples include activation bonding for bonding together, bonding with a bonding material such as glass frit, diffusion bonding for bonding metal films formed on the upper surface of the substrate 2 and the lower surface of the lid 8, and the like.

In the present embodiment, as shown in FIG. 2, the substrate 2 and the lid portion 8 are bonded via a glass frit 89 (low melting point glass) which is an example of a bonding material. In the state where the substrate 2 and the lid 8 are overlapped, the inside and outside of the storage space S communicate with each other through the grooves 25, 26, and 27. However, by using the glass frit 89, the substrate 2 and the lid 8 And the grooves 25, 26, and 27 can be sealed. Therefore, the storage space S can be hermetically sealed more easily. When the substrate 2 and the lid 8 are bonded by anodic bonding or the like (a bonding method in which the groove portions 25, 26, and 27 cannot be sealed), for example, formed by a CVD method using TEOS (tetraethoxysilane) or the like. The groove portions 25, 26, and 27 can be closed by the formed SiO ₂ film.

(Element part)
As shown in FIG. 1, the element unit 3 includes a fixed electrode unit 4 fixed to the substrate 2 and a movable electrode unit 5 that can be displaced with respect to the substrate 2. In addition, the fixed electrode portion 4 includes a first fixed electrode portion 41 and a second fixed electrode portion 42.

  Such an element part 3 can be formed, for example, by patterning a silicon substrate doped with impurities such as phosphorus (P) and boron (B). The element part 3 is joined to the substrate 2 (mount parts 22, 23, 24) by anodic bonding. However, the material of the element part 3 and the bonding method of the element part 3 to the substrate 2 are not particularly limited.

  The movable electrode part 5 includes a fixed part 51 having a joint part 51a joined to the mount part 24, a support part 52 connected to the fixed part 51, and a movable part that can be displaced in the X-axis direction with respect to the support part 52. 53, spring portions 54 and 55 (elastic portions) that connect the support portion 52 and the movable portion 53, and movable electrode fingers 56 provided on the movable portion 53. Note that the fixed portion 51, the support portion 52, the movable portion 53, the spring portions 54 and 55, and the movable electrode finger 56 are integrally formed.

  As shown in FIG. 1, the fixing portion 51 is located substantially at the center of the element portion 3. The fixing portion 51 has a joint portion 51 a joined to the mount portion 24. As shown in FIG. 2, the fixing portion 51 is electrically connected to the wiring 73. Hereinafter, a virtual axis that bisects the fixing portion 51 in the Y-axis direction in a plan view as viewed from the Z-axis direction is referred to as a central axis L.

  Further, as shown in FIG. 1, a pair of support portions 52 are provided side by side in the X-axis direction with the fixing portion 51 interposed therebetween. One support portion 52 extends from the fixed portion 51 toward the X axis direction plus side, and the other support portion 52 extends from the fixed portion 51 toward the X axis direction minus side. These two support parts 52 are each supported by the fixing part 51 in a state of floating from the substrate 2. Each support portion 52 has a longitudinal shape extending in the X-axis direction, but the shape of each support portion 52 is not particularly limited.

  As shown in FIG. 1, the movable portion 53 has a frame shape in a plan view as viewed from the Z-axis direction, and includes the fixed portion 51, the support portion 52, the spring portions 54 and 55, and the fixed electrode portion 4. Surrounding. Thus, the mass of the movable part 53 can be made larger by making the movable part 53 into a frame shape. Therefore, the movable part 53 comes to move sensitively in response to the received acceleration, and the sensitivity of the physical quantity sensor 1 can be improved. The movable portion 53 is formed symmetrically with respect to the central axis L.

  The shape of the movable portion 53 will be specifically described. The movable portion 53 includes an opening 538 in which the first fixed electrode portion 41 is disposed on the inner side and an opening 539 in which the second fixed electrode portion 42 is disposed on the inner side. And have. The movable portion 53 is positioned on the positive side in the X axis direction of the opening portion 538 and the frame portion 531 that surrounds the fixed portion 51, the support portion 52, the spring portions 54 and 55, and the first and second fixed electrode portions 41 and 42. The first Y-axis extending part 532a extending from the frame part 531 to the Y-axis direction minus side, and the first X-axis extending part extending from the tip of the first Y-axis extending part 532a to the X-axis direction minus side 533a, a first Y-axis extending part 532b that is located on the minus side in the X-axis direction of the opening 538 and extends from the frame part 531 to the minus side in the Y-axis, and an X from the tip of the first Y-axis extending part 532b A first X-axis extending portion 533b extending toward the positive side in the axial direction, and a second Y-axis extending portion 534a positioned on the positive side in the X-axis direction of the opening 539 and extending from the frame portion 531 toward the positive side in the Y-axis direction. And the X-axis direction minus side from the tip of the second Y-axis extending part 534a A second X-axis extending portion 535a that extends, a second Y-axis extending portion 534b that is located on the minus side in the X-axis direction of the opening 539, and that extends from the frame portion 531 to the plus side in the Y-axis direction, and a second Y-axis And a second X-axis extending portion 535b extending from the distal end portion of the extending portion 534b to the plus side in the X-axis direction.

  The first and second Y-axis extending portions 532a and 534a are provided near the spring portion 54 and arranged along the spring portion 54, and the first and second Y-axis extending portions 532b and 534b are provided. Are provided in the vicinity of the spring portion 55 and are disposed along the spring portion 55. The first and second X-axis extending portions 533a and 535a are each provided near one support portion 52 (X-axis direction plus side) and are disposed along the support portion 52. The second X-axis extending portions 533 b and 535 b are provided near the other support portion 52 (minus side in the X-axis direction), and are disposed along the support portion 52.

  Further, the movable portion 53 has a protruding portion 536 that protrudes from the frame portion 531 into the opening portion 538 so as to fill a surplus space of the opening portion 538, and a frame portion 531 so as to fill a surplus space of the opening portion 539. A projecting portion 537 projecting into the opening 539. Thus, by providing the protrusions 536 and 537, the mass of the movable portion 53 can be increased without increasing the size of the movable portion 53. Therefore, the sensitivity is further improved and the physical quantity sensor 1 with high sensitivity is obtained.

  The spring portions 54 and 55 are elastically deformable, and the movable portion 53 is displaced in the X-axis direction with respect to the support portion 52 by elastically deforming the spring portions 54 and 55. As shown in FIG. 1, the spring portion 54 connects the end portion on the plus side in the X-axis direction of one support portion 52 and the end portion on the plus side in the X-axis direction of the frame portion 531. The end portion on the minus side in the X-axis direction of the support portion 52 and the end portion on the minus side in the X-axis direction of the frame portion 531 are connected. When the spring portions 54 and 55 are arranged in this way, the movable portion 53 can be supported on both sides in the X-axis direction, and the posture and behavior of the movable portion 53 are stabilized. Therefore, unnecessary vibration (displacement in directions other than the X-axis direction) of the movable portion 53 can be reduced, and the physical quantity sensor 1 can detect the acceleration Ax with higher accuracy.

  Next, the fixed electrode part 4 will be described. As shown in FIG. 1, the fixed electrode portion 4 includes a first fixed electrode portion 41 located in the opening 538 and a second fixed electrode portion 42 located in the opening 539. These first and second fixed electrode portions 41 and 42 are arranged side by side in the Y-axis direction, and are arranged so that the central axis L is located between them.

  As shown in FIG. 1, the first fixed electrode portion 41 is connected to the fixed portion 411 having the bonded portion 411 a bonded to the substrate 2, the support portion 412 connected to the fixed portion 411, and the support portion 412. A plurality of fixed electrode fingers 413. The fixed portion 411, the support portion 412 and the fixed electrode finger 413 are integrally formed.

  The fixed part 411 has a joint part 411 a joined to the mount part 22. In addition, the fixing portion 411 is located side by side with the fixing portion 51 in the Y-axis direction, and is provided near the fixing portion 51. In addition, as shown in FIG. 2, the fixing portion 411 is electrically connected to the wiring 71.

  The support portion 412 has a T-shape that is bifurcated in the middle. Specifically, the support portion 412 extends in the X-axis direction (first direction), the first extension portion 412a, and in the Y-axis direction (second direction different from the first direction). It has the 2nd extension part 412b which connects the extension part 412a and the fixing | fixed part 411. As shown in FIG.

  The first extending part 412a is located on the Y axis direction plus side with respect to the fixed part 411, and has a rod shape extending in the X axis direction. And the fixed electrode finger 413 is connected to the 1st extension part 412a. On the other hand, the second extending portion 412b is located between the first extending portion 412a and the fixed portion 411, and has a rod shape extending in the Y-axis direction. One end (end on the Y axis direction plus side) of the second extending portion 412b is connected to the center portion in the extending direction of the first extending portion 412a, and the other end (end on the minus side in the Y axis direction). It is connected to the fixed part 411.

  The fixed electrode fingers 413 extend from the first extending portion 412a to both sides in the Y-axis direction. That is, the fixed electrode finger 413 includes a fixed electrode finger 413 ′ positioned on the Y axis direction plus side of the first extending portion 412a and a fixed electrode finger 413 ″ positioned on the Y axis direction minus side. In addition, a plurality of fixed electrode fingers 413 ′ and 413 ″ are provided apart from each other along the X-axis direction.

  Similarly to the first fixed electrode portion 41 described above, the second fixed electrode portion 42 includes a fixed portion 421 having a bonding portion 421a bonded to the substrate 2, a support portion 422 connected to the fixed portion 421, and a support. A plurality of fixed electrode fingers 423 connected to the portion 422. The fixed portion 421, the support portion 422, and the fixed electrode finger 423 are integrally formed.

  The fixed part 421 has a joint part 421 a joined to the mount part 23. In addition, the fixing portion 421 is located side by side on the Y axis direction minus side of the fixing portion 51, and is provided near the fixing portion 51. Further, as shown in FIG. 2, the fixing portion 421 is electrically connected to the wiring 72.

  The support portion 422 has a T-shape that is branched into two forks. Specifically, the support part 422 extends in the X-axis direction and extends in the Y-axis direction, and the second extension that connects the first extension part 422a and the fixing part 421. And resident portion 422b.

  The first extending portion 422a is located on the negative side in the Y-axis direction with respect to the fixed portion 421 and has a rod shape extending in the X-axis direction. And the fixed electrode finger 423 is connected to the 1st extension part 422a. On the other hand, the second extending portion 422b is located between the first extending portion 422a and the fixed portion 421 and has a rod shape extending in the Y-axis direction. One end (end on the negative side in the Y-axis direction) of the second extending portion 422b is connected to the central portion in the extending direction of the first extending portion 422a, and the other end (end on the positive side in the Y-axis direction). It is connected to the fixed part 421.

  The fixed electrode fingers 423 extend from the first extending portion 422a to both sides in the Y-axis direction. That is, the fixed electrode finger 423 includes a fixed electrode finger 423 ′ positioned on the Y axis direction plus side of the first extending portion 412a and a fixed electrode finger 423 ″ positioned on the Y axis direction minus side. Further, a plurality of fixed electrode fingers 423 ′ and 423 ″ are provided apart from each other along the X-axis direction.

  The first fixed electrode portion 41 and the second fixed electrode portion 42 have been described above. The shapes and arrangements of the first and second fixed electrode portions 41 and 42 are symmetrical with respect to the central axis L (except that the fixed electrode fingers 413 and 423 are displaced in the X-axis direction). ).

  As shown in FIG. 1, the movable electrode finger 56 has a movable electrode finger 561 located in the opening 538 and a movable electrode finger 562 located in the opening 539.

  The movable electrode fingers 561 are located on both sides of the support portion 412 in the Y-axis direction and extend in the Y-axis direction. That is, the movable electrode finger 561 has a movable electrode finger 561 ′ located on the Y axis direction plus side of the support portion 412 and a movable electrode finger 561 ″ located on the Y axis direction minus side. A plurality of movable electrode fingers 561 ′ and 561 ″ are provided apart from each other along the X-axis direction. The movable electrode finger 561 ′ extends from the frame portion 531 toward the Y axis direction minus side, and the movable electrode finger 561 ″ extends from the first X axis extension portions 533a and 533b toward the Y axis direction plus side. I'm out.

  In addition, each movable electrode finger 561 is located on the X axis direction plus side with respect to the corresponding fixed electrode finger 413 and is opposed to the fixed electrode finger 413 through a gap (gap).

  The movable electrode fingers 562 are located on both sides in the Y-axis direction of the support portion 422 and extend in the Y-axis direction. In other words, the movable electrode finger 562 includes a movable electrode finger 562 ′ located on the Y axis direction plus side of the support portion 422 and a movable electrode finger 562 ″ located on the Y axis direction minus side. A plurality of movable electrode fingers 562 ′ and 562 ″ are provided apart from each other along the X-axis direction. The movable electrode finger 562 ′ extends from the second X-axis extending portions 535a and 535b toward the Y axis direction minus side, and the movable electrode finger 562 ″ extends from the frame portion 531 toward the Y axis direction plus side. I'm out.

  Each second movable electrode finger 562 is positioned on the minus side in the X-axis direction with respect to the corresponding fixed electrode finger 423 and is opposed to the fixed electrode finger 423 through a gap (gap).

  When acceleration Ax is applied to such a physical quantity sensor 1, the movable portion 53 is displaced in the X-axis direction while elastically deforming the spring portions 54 and 55 based on the magnitude of the acceleration Ax. Along with such a displacement, a gap between the movable electrode finger 561 and the fixed electrode finger 413 and a gap between the movable electrode finger 562 and the fixed electrode finger 423 change, respectively. The capacitance between the electrode finger 413 and the capacitance between the movable electrode finger 562 and the fixed electrode finger 423 change. Therefore, the acceleration Ax can be detected based on these changes in capacitance.

  Here, as described above, each movable electrode finger 561 is located on the X axis direction plus side with respect to the corresponding fixed electrode finger 413, and conversely, each movable electrode finger 562 is placed on the corresponding fixed electrode finger 423. On the other hand, it is located on the negative side in the X-axis direction. That is, each movable electrode finger 561 is positioned on one side in the X axis direction with respect to the pair of fixed electrode fingers 413, and each movable electrode finger 562 is in the X axis direction with respect to the pair of fixed electrode fingers 423. Located on the other side. Therefore, when acceleration Ax is applied, the gap between the movable electrode finger 561 and the fixed electrode finger 413 is reduced, the gap between the movable electrode finger 562 and the fixed electrode finger 423 is widened, or the movable electrode finger 561 and the fixed electrode finger 413 are expanded. And the gap between the movable electrode finger 562 and the fixed electrode finger 423 is reduced. Therefore, by differentially calculating the first detection signal obtained between the fixed electrode finger 413 and the movable electrode finger 561 and the second detection signal obtained between the fixed electrode finger 423 and the movable electrode finger 562, Noise can be canceled and acceleration Ax can be detected with higher accuracy.

  The configuration of the physical quantity sensor 1 has been briefly described above. As described above, the physical quantity sensor 1 has a plurality of fixed electrode fingers 413 extending from the support portion 412 to both sides in the Y-axis direction, and is positioned on both sides of the support portion 412 in the Y-axis direction. A plurality of movable electrode fingers 561 facing each other in the X-axis direction. Therefore, the length of each electrode finger 413, 561 can be shortened while forming a sufficiently large capacitance between the fixed electrode finger 413 and the movable electrode finger 561. Similarly, the physical quantity sensor 1 is positioned on both sides of the support unit 422 in the Y-axis direction, and is opposed to the fixed electrode finger 423 in the X-axis direction. A plurality of movable electrode fingers 562. Therefore, the length of each electrode finger 413, 423, 561, 562 can be shortened while forming a sufficiently large capacitance between the fixed electrode finger 423 and the movable electrode finger 562. Thereby, while being able to exhibit the outstanding detection accuracy, the damage of the electrode finger 413, 423, 561, 562 is suppressed, and it becomes the physical quantity sensor 1 which can exhibit the outstanding impact resistance. Furthermore, the thickness of the electrode fingers 413, 423, 561, and 562 can be reduced by the amount that damage to the electrode fingers 413, 423, 561, and 562 is suppressed, and the physical quantity sensor 1 can be made smaller and more sensitive. Can be achieved.

  In addition, as described above, the fixing portions 411 and 421 are arranged in the vicinity of the fixing portion 51 and aligned with the fixing portion 51 in the Y-axis direction, respectively. Therefore, the difference in the displacement in the Z-axis direction between the movable portion 53 and the fixed electrode portion 4 when the substrate 2 is warped or bent due to heat, residual stress or the like, specifically, the movable electrode finger 561 The difference in the Z-axis direction deviation from the fixed electrode finger 413 and the difference in the Z-axis direction deviation between the movable electrode finger 562 and the fixed electrode finger 423 can be more effectively suppressed.

  Next, the element unit 3 will be described in more detail. In the following, manufacturing problems, specifically, for example, mask misalignment when etching the silicon substrate to form the element portion 3, etching residue (residue portion), and the like will be described without consideration. .

  First, the fixed electrode portion 4 will be described in detail. However, the first fixed electrode portion 41 and the second fixed electrode portion 42 have the same configuration as each other. A description of the second fixed electrode portion 42 will be omitted.

  As described above, in the first fixed electrode portion 41, the second extending portion 412b extends from the fixed portion 411 to the Y axis direction plus side. Further, as shown in FIG. 3, the width W1 of the second extending portion 412b (the length in the direction orthogonal to the extending direction of the second extending portion 412b in a plan view viewed from the Z-axis direction. The length in the axial direction is smaller than the width W2 of the fixing portion 411 (the length in the same direction as the direction of the width W1, ie, the length in the X-axis direction). That is, the relationship of W1 <W2 is satisfied. The second extending portion 412b is connected to the central portion in the width direction of the fixed portion 411.

  Then, the connecting portion 412A of the second extending portion 412b and the fixing portion 411 (that is, the end portion on the Y axis direction minus side of the second extending portion 412b) is on the fixing portion 411 side (Y axis direction minus side). The taper is formed such that the width W1 gradually increases. Therefore, the following effects can be exhibited. For example, when an impact due to dropping or the like is applied to the physical quantity sensor 1, stress is transmitted from the fixed portion 411 bonded to the substrate 2 to the first fixed electrode portion 41. Therefore, if the connecting portion of the fixed portion 411 and the second extending portion 412b is a corner as in the conventional case, stress concentrates on the portion, and the first fixed electrode portion 41 is easily damaged. . On the other hand, in the present embodiment, the connection portion 412A has a tapered shape and is not a corner, so stress concentration on the connection portion 412A is alleviated. Therefore, the physical quantity sensor 1 has excellent impact resistance. Here, in this specification, the “taper” includes, for example, a linear taper, an exponential taper, a parabolic taper, etc., and the rate of increase in width (taper angle) is along the longitudinal direction (direction perpendicular to the width). It is a concept that includes both cases of increasing, constant, and decreasing. In the illustrated connecting portion 412A, the increasing rate of the width W1 increases toward the fixed portion 411.

  In particular, in this embodiment, the support portion 412 has a T shape, and the mass on the tip side (the Y axis direction plus side) is large. Therefore, stress is easily applied to the connecting portion 412A. Therefore, the stress concentration on the connection portion 412A is alleviated, so that the breakage of the first fixed electrode portion 41 can be more effectively suppressed.

  Further, the outer edges 412A ′ and 412A ″ located on both sides in the width direction of the connecting portion 412A are respectively curved in a concave shape. Thereby, the fixing portion 411 and the second extending portion 412b are more smoothly connected. In this embodiment, the outer edges 412A ′ and 412A ″ are each curved in a reverse arc shape. Thereby, the fixing | fixed part 411 and the 2nd extension part 412b are connected more smoothly, and the stress concentration to 412A of connection parts can be relieve | moderated more effectively. Therefore, the physical quantity sensor 1 has more excellent impact resistance. In this embodiment, the outer edges 412A ′ and 412A ″ are both concavely curved, but the present invention is not limited to this. For example, only one of the outer edges 412A ′ and 412A ″ may be curved in a concave shape. That is, the connecting portion 412A may have a single taper shape.

  Further, for example, as shown in FIG. 4, the outer edges 412A ′ and 412A ″ may each extend linearly (not necessarily curved). That is, the connecting portion 412A in FIG. The increase rate of W1 is a constant (linear) taper, which is the same for each of the connecting portions 412B, 413A, 52A, and 561A described later.

  Further, the connecting portion 412B of the second extending portion 412b and the first extending portion 412a (that is, the end portion on the Y axis direction plus side of the second extending portion 412b) is on the first extending portion 412a side (Y A taper shape in which the width W1 gradually increases toward the positive side in the axial direction). Therefore, similarly to the case where the connection portion 412A is tapered, for example, stress concentration on the connection portion 412B when an impact due to dropping or the like is applied to the physical quantity sensor 1 can be reduced. Therefore, the physical quantity sensor 1 has more excellent impact resistance.

  Furthermore, the outer edges 412B ′ and 412B ″ located on both sides in the width direction of the connecting portion 412B are respectively curved in a concave shape. Thereby, the first extending portion 412a and the second extending portion 412b are smoother. The stress concentration on the connection portion 412B can be more effectively mitigated. In particular, in this embodiment, the outer edges 412B ′ and 412B ″ are each curved in a reverse arc shape. Thereby, the 1st extension part 412a and the 2nd extension part 412b are connected more smoothly, and it can relieve | moderate the stress concentration to the connection part 412B more effectively. Therefore, the physical quantity sensor 1 has more excellent impact resistance. In the present embodiment, the outer edges 412B ′ and 412B ″ are both curved in a concave shape. However, the present invention is not limited to this. For example, only one of the outer edges 412B ′ and 412B ″ may be curved in a concave shape. That is, the connection part 412B may be a single taper shape.

  Such a connecting portion 412B has substantially the same shape and size as the connecting portion 412A.

  Further, the connection portion 413A of the fixed electrode finger 413 and the support portion 412 (that is, the end portion on the negative side in the Y-axis direction of the fixed electrode finger 413) is the width W4 (viewed from the Z-axis direction) toward the support portion 412 side. In a plan view, the length in the direction orthogonal to the extending direction of the fixed electrode finger 413 (that is, the length in the X-axis direction) is gradually tapered. Therefore, similarly to the case where the connecting portions 412A and 412B are tapered, for example, stress concentration on the connecting portion 413A when an impact due to dropping or the like is applied to the physical quantity sensor 1 can be reduced. Therefore, the physical quantity sensor 1 has more excellent impact resistance.

  Furthermore, the outer edges 413A ′ and 413A ″ located on both sides in the width direction of the connection portion 413A are respectively curved in a concave shape. This allows the fixed electrode finger 413 and the support portion 412 to be connected more smoothly and connected. The stress concentration on the portion 413A can be more effectively mitigated. Particularly, in the present embodiment, the outer edges 412A ′ and 412A ″ are each curved in a reverse arc shape. Thereby, the fixed electrode finger 413 and the support part 412 are connected more smoothly, and the stress concentration on the connection part 413A can be more effectively mitigated. Therefore, the physical quantity sensor 1 has more excellent impact resistance. In the present embodiment, the outer edges 413A ′ and 413A ″ are both curved in a concave shape. However, the present invention is not limited to this. For example, only one of the outer edges 413A ′ and 413A ″ may be curved in a concave shape. That is, the connection portion 413A may have a single taper shape.

  Further, the change amount ΔW4 (the difference between the minimum width W4 ′ and the maximum width W4 ″ of the connection portion 413A) of the connection portion 413A is the change amount ΔW1 of the width W1 of the connection portion 412A (the minimum width W1 ′ of the connection portion 412A). And the maximum width W1 ″). That is, the relationship ΔW4 <ΔW1 is satisfied. Further, the length of the connecting portion 413A is shorter than the length of the connecting portion 412A. In particular, in the present embodiment, both outer edges 413A ′, 413A ″ of the connecting portion 413A and both outer edges 412A ′, 412A ″ of the connecting portion 412A are arcuate, so that the radii of curvature of the outer edges 413A ′, 413A ″ are It can also be said that it is smaller than the radius of curvature of each outer edge 412A ′, 412A ″. Thereby, the following effects can be exhibited.

  As described above, the physical quantity sensor 1 is configured to detect the acceleration Ax based on a change in capacitance between the movable electrode finger 561 and the fixed electrode finger 413. In such a detection method, in order to detect the acceleration Ax with higher accuracy, it is effective to increase the capacitance between the movable electrode finger 561 and the fixed electrode finger 413. In order to increase the capacitance, it is effective to reduce the gap between the movable electrode finger 561 and the fixed electrode finger 413 and to increase the facing area between the movable electrode finger 561 and the fixed electrode finger 413. .

  In view of this point, if the change amount ΔW4 of the width W4 of the connecting portion 413A is too large, the gap between the movable electrode finger 561 and the fixed electrode finger 413 is reduced, and the movable electrode finger 561 and the fixed electrode finger 413 are opposed to each other. It becomes difficult to increase the area. That is, as shown in FIG. 5, when the gap between the movable electrode finger 561 and the fixed electrode finger 413 is reduced, the movable electrode finger 561 is shortened in order to avoid the movable electrode finger 561 from colliding with the connection portion 413A. This makes it difficult to increase the facing area between the movable electrode finger 561 and the fixed electrode finger 413. On the other hand, as shown in FIG. 6, when the movable electrode finger 561 is lengthened to increase the facing area between the movable electrode finger 561 and the fixed electrode finger 413, the movable electrode finger 561 may collide with the connecting portion 413A. In order to avoid this, the gap between the movable electrode finger 561 and the fixed electrode finger 413 must be increased. Therefore, in the present embodiment, it is designed to satisfy the relationship of ΔW4 <ΔW1, thereby reducing the gap between the movable electrode finger 561 and the fixed electrode finger 413 and reducing the gap between the movable electrode finger 561 and the fixed electrode finger. It is easy to increase the area facing 413.

  Next, the movable electrode portion 5 will be described in detail. As described above, in the movable electrode part 5, the support part 52 extends from the fixed part 51 to both sides in the X-axis direction. Further, as shown in FIG. 3, the width W5 of the support portion 52 (the length in the direction orthogonal to the extending direction of the support portion 52 in a plan view seen from the Z-axis direction, that is, the length in the Y-axis direction). Is smaller than the width W6 of the fixing portion 51 (the length in the same direction as the direction of the width W5, that is, the length in the Y-axis direction). That is, the relationship of W5 <W6 is satisfied. In addition, the support portion 52 is connected to the center portion in the width direction of the fixed portion 51.

  The connecting portion 52A of the support portion 52 and the fixing portion 51 (that is, the end portion of the support portion 52 on the fixing portion 51 side) has a taper shape in which the width W5 gradually increases toward the fixing portion 51 side. Therefore, similarly to the case where the connection portion 412A is tapered, for example, stress concentration on the connection portion 52A when an impact due to dropping or the like is applied to the physical quantity sensor 1 can be reduced. Therefore, the physical quantity sensor 1 has more excellent impact resistance.

  In particular, in the present embodiment, the support portion 52 supports the movable portion 53 at the tip portion (the end portion opposite to the fixed portion 51). For this reason, the mass on the tip side of the support portion 52 is large, and the connection portion 52A is easily stressed. Therefore, the stress concentration on the connecting portion 52A is alleviated, so that the breakage of the movable electrode portion 5 can be more effectively suppressed.

  Furthermore, the outer edges 52A ′ and 52A ″ located on both sides in the width direction of the connection portion 52A are respectively curved in a concave shape. Thereby, the fixed portion 51 and the support portion 52 are connected more smoothly, and the connection portion The stress concentration on 52A can be more effectively mitigated. Particularly, in this embodiment, the outer edges 52A ′ and 52A ″ are each curved in a reverse arc shape. Thereby, the fixing | fixed part 51 and the support part 52 are connected more smoothly, and the stress concentration to 52 A of connection parts can be relieve | moderated more effectively. Therefore, the physical quantity sensor 1 has more excellent impact resistance. In the present embodiment, the outer edges 52A ′ and 52A ″ are both curved in a concave shape, but the present invention is not limited to this. For example, only one of the outer edges 52A ′ and 52A ″ may be curved in a concave shape. That is, the connecting portion 52A may have a single taper shape.

  Further, the connecting portion 561A of the movable electrode finger 561 with the movable portion 53 (that is, the end portion on the fixed end side of the movable electrode finger 561) has a width W7 (plan view as viewed from the Z-axis direction) toward the movable portion 53 side. Thus, the length in the direction orthogonal to the extending direction of the movable electrode finger 561 (that is, the length in the X-axis direction) is gradually tapered. Therefore, similarly to the case where the connecting portion 413A is tapered, for example, stress concentration on the connecting portion 561A when an impact due to dropping or the like is applied to the physical quantity sensor 1 can be reduced. Therefore, the physical quantity sensor 1 has more excellent impact resistance.

  Furthermore, outer edges 561A ′ and 561A ″ located on both sides in the width direction of the connecting portion 561A are respectively curved in a concave shape. This allows the movable electrode finger 561 and the movable portion 53 to be connected more smoothly and connected. The stress concentration on the portion 561A can be more effectively mitigated. Particularly, in the present embodiment, the outer edges 561A ′ and 561A ″ are each curved in a reverse arc shape. Thereby, the movable electrode finger 561 and the movable part 53 are more smoothly connected, and the stress concentration on the connection part 561A can be more effectively reduced. Therefore, the physical quantity sensor 1 has more excellent impact resistance. In the present embodiment, the outer edges 561A ′ and 561A ″ are both curved in a concave shape, but the present invention is not limited to this. For example, only one of the outer edges 561A ′ and 561A ″ may be curved in a concave shape. That is, the connecting portion 561A may have a single taper shape.

  Further, the change amount ΔW7 of the width W7 of the connection portion 561A (difference between the minimum width W7 ′ and the maximum width W7 ″ of the connection portion 561A) is the change amount ΔW5 of the width W5 of the connection portion 52A (the minimum width W5 ′ of the connection portion 52A). And the maximum width W5 ″). That is, the relationship ΔW7 <ΔW5 is satisfied. Further, the length of the connecting portion 561A is shorter than the length of the connecting portion 52A. In particular, in the present embodiment, both outer edges 561A ′ and 561A ″ of the connecting portion 561A and both outer edges 52A ′ and 52A ″ of the connecting portion 52A are reverse arcs, so that the radius of curvature of each of the outer edges 561A ′ and 561A ″ is It can also be said that it is smaller than the curvature radius of each outer edge 52A ′, 52A ″. Thereby, the same effect as satisfying the relationship of ΔW4 <ΔW1 described above can be exhibited (see FIGS. 5 and 6). That is, the opposing area between the movable electrode finger 561 and the fixed electrode finger 413 can be increased while reducing the gap between the movable electrode finger 561 and the fixed electrode finger 413, and the acceleration Ax can be detected with higher accuracy. .

  Note that the configuration of the connecting portion 562A of the movable electrode finger 562 with the movable portion 53 is the same as the configuration of the connecting portion 561A described above, and thus the description thereof is omitted.

  The physical quantity sensor 1 has been described above. As described above, the physical quantity sensor 1 includes the substrate 2 as a base and the element unit 3 that is provided on the substrate 2 and detects an acceleration Ax as a physical quantity. The element unit 3 includes a fixed electrode unit 4 fixed to the substrate 2 and a movable electrode unit 5 that can be displaced with respect to the substrate 2. The fixed electrode portion 4 includes a fixed portion 411 connected to the substrate 2, a support portion 412 connected to the fixed portion 411, and a fixed electrode finger 413 connected to the support portion 412. ing. And the connection part 412A with the fixing | fixed part 411 of the support part 412 has comprised the taper shape which width W1 increases gradually toward the fixing | fixed part 411 side. Thereby, for the reasons described above, the stress concentration on the connecting portion 412A is relaxed, and the physical quantity sensor 1 having excellent impact resistance is obtained.

  Further, as described above, at least one of the outer edges 412A ′ and 412A ″ in the width direction of the connecting portion 412A (both in the present embodiment) is curved in a concave shape. Stress concentration is more effectively relaxed, and a physical quantity sensor 1 having better impact resistance is obtained.

  Further, as described above, the support portion 412 extends in the X-axis direction (first direction), and the first extension portion 412a to which the fixed electrode finger 413 is connected is different from the X-axis direction in the Y-axis direction. The second extending portion 412b extends in the (second direction) and connects the first extending portion 412a and the fixing portion 411. Further, the connecting portion 412B of the second extending portion 412b and the first extending portion 412a has a tapered shape in which the width W1 gradually increases toward the first extending portion 412a side. Thereby, the stress concentration on the connecting portion 412B is relaxed, and the physical quantity sensor 1 having more excellent impact resistance can be obtained.

  Further, as described above, the connection portion 413A of the fixed electrode finger 413 with the support portion 412 has a tapered shape in which the width W4 gradually increases toward the support portion 412 side. Thereby, the stress concentration on the connection portion 413A is effectively relieved, and the physical quantity sensor 1 having more excellent impact resistance can be obtained.

  Further, as described above, at least one of the outer edges 413A ′ and 413A ″ in the width direction of the connecting portion 412A of the fixed electrode finger 413 and the support portion 412 (both in the present embodiment) is concavely curved. Thereby, the stress concentration on the connection portion 413A is more effectively relaxed, and the physical quantity sensor 1 having more excellent impact resistance can be obtained.

  Further, as described above, the change amount ΔW4 of the width W4 of the connection portion 413A with the support portion 412 of the fixed electrode finger 413 is larger than the change amount ΔW1 of the width W1 of the connection portion 412A with the fixation portion 411 of the support portion 412. small. Thereby, the opposing area of the movable electrode finger 561 and the fixed electrode finger 413 can be increased while reducing the gap between the movable electrode finger 561 and the fixed electrode finger 413. Therefore, the electrostatic capacitance between the movable electrode finger 561 and the fixed electrode finger 413 can be increased, and the acceleration Ax can be detected with higher accuracy.

  The physical quantity sensor 1 includes a substrate 2 as a base and an element unit 3 that is provided on the substrate 2 and detects an acceleration Ax as a physical quantity. The element unit 3 includes a fixed electrode unit 4 fixed to the substrate 2 and a movable electrode unit 5 that can be displaced with respect to the substrate 2. The movable electrode portion 5 includes a fixed portion 51 connected to the substrate 2, a support portion 52 connected to the fixed portion 51, a movable portion 53 that can be displaced with respect to the support portion 52, and a support portion 52. Spring portions 54 and 55 as elastic portions connecting the movable portion 53 and the movable portion 53, and movable electrode fingers 561 provided on the movable portion 53. And the connection part 52A with the fixing | fixed part 51 of the support part 52 has comprised the taper shape which the width W5 increases gradually toward the fixing | fixed part 51 side. Thereby, for the reasons described above, the stress concentration on the connecting portion 52A is relaxed, and the physical quantity sensor 1 having excellent impact resistance is obtained.

  Further, as described above, at least one (both in the present embodiment) of both outer edges 52A ′ and 52A ″ in the width direction of the connecting portion 52A is curved in a concave shape. Stress concentration is more effectively relaxed, and a physical quantity sensor 1 having better impact resistance is obtained.

  Further, as described above, the connection portion 561A of the movable electrode finger 561 with the movable portion 53 has a tapered shape in which the width W7 gradually increases toward the movable portion 53 side. Thereby, the stress concentration on the connecting portion 561A is effectively relieved, and the physical quantity sensor 1 having more excellent impact resistance can be obtained.

  Further, as described above, at least one of the outer edges 561A ′ and 561A ″ in the width direction of the connecting portion 561A of the movable electrode finger 561 with the movable portion 53 (both in the present embodiment) is concavely curved. Thereby, the stress concentration on the connection portion 561A is more effectively relaxed, and the physical quantity sensor 1 having more excellent impact resistance can be obtained.

  Further, as described above, the change amount ΔW7 of the width W7 of the connection portion 561A of the movable electrode finger 561 with the movable portion 53 is larger than the change amount ΔW5 of the width W5 of the connection portion 52A of the support portion 52 with the fixed portion 51. small. Thereby, the opposing area of the movable electrode finger 561 and the fixed electrode finger 413 can be increased while reducing the gap between the movable electrode finger 561 and the fixed electrode finger 413. Therefore, the electrostatic capacitance between the movable electrode finger 561 and the fixed electrode finger 413 can be increased, and the acceleration Ax can be detected with higher accuracy.

Second Embodiment
Next, a physical quantity sensor according to a second embodiment of the invention will be described.

  FIG. 7 is a plan view showing a physical quantity sensor according to the second embodiment of the present invention. For convenience of explanation, in FIG. 7, illustration of the substrate and the lid portion is omitted, and only the element portion is illustrated.

  The physical quantity sensor 1 according to the present embodiment is the same as the physical quantity sensor 1 of the first embodiment described above except that the configuration of the element unit 3 is mainly different.

  In the following description, the physical quantity sensor 1 of the second embodiment will be described with a focus on the differences from the first embodiment described above, and description of similar matters will be omitted. Moreover, in FIG. 7, the same code | symbol is attached | subjected about the structure similar to 1st Embodiment mentioned above.

  As shown in FIG. 7, in the physical quantity sensor 1 of the present embodiment, in the first fixed electrode portion 41, the first extending portion 412 a is on the X axis direction plus side (X axis direction) from the distal end portion of the second extending portion 412 b. It extends to one side. And the connection part 412B with the 1st extension part 412a of the 2nd extension part 412b becomes the piece taper shape to which the width | variety W1 increases only only to the X-axis direction plus side. Further, the second extending portion 412b is connected to the fixed portion 411 so as to be biased toward the minus side in the X-axis direction. And the connection part 412A with the fixing | fixed part 411 of the 2nd extension part 412b becomes the piece taper shape to which the width W1 increases gradually only to the X-axis direction plus side. The first fixed electrode portion 41 has been described above, but the second fixed electrode portion 42 has the same configuration.

  Moreover, in the movable electrode part 5, the support part 52 located in the X-axis direction negative | minus side of the fixed part 51 is abbreviate | omitted from the structure of 1st Embodiment mentioned above, and the fixed part 51 and the movable part 53 are a spring part. 55 is connected.

  Also according to the second embodiment, the same effects as those of the first embodiment described above can be exhibited. Furthermore, the physical quantity sensor 1 can be downsized as compared with the first embodiment described above.

<Third Embodiment>
Next, a physical quantity sensor according to a third embodiment of the invention will be described.

  FIG. 8 is a partially enlarged plan view showing a physical quantity sensor according to the third embodiment of the present invention. For convenience of explanation, in FIG. 8, illustration of the substrate and the lid is omitted, and only a part of the element portion is shown.

  The physical quantity sensor 1 according to the present embodiment is the same as the physical quantity sensor 1 of the first embodiment described above except that the configuration of the element unit 3 is mainly different.

  In the following description, the physical quantity sensor 1 of the second embodiment will be described with a focus on the differences from the first embodiment described above, and description of similar matters will be omitted. Moreover, in FIG. 8, the same code | symbol is attached | subjected about the structure similar to 1st Embodiment mentioned above.

  As shown in FIG. 8, in the physical quantity sensor 1 of the present embodiment, the connection portion 413A of the fixed electrode finger 413 has a constant width W4 toward the support portion 412 side. Similarly, the connecting portion 561A of the movable electrode finger 561 has a constant width W7 toward the movable portion 53 side. Thereby, interference with the corresponding movable electrode finger 561 is suppressed (see FIGS. 5 and 6). Therefore, the facing area between the movable electrode finger 561 and the fixed electrode finger 413 can be increased while reducing the gap between the movable electrode finger 561 and the fixed electrode finger 413. Therefore, the electrostatic capacitance between the movable electrode finger 561 and the fixed electrode finger 413 can be increased, and the acceleration Ax can be detected with higher accuracy.

The fixed electrode finger 413 and the movable electrode finger 561 have been described above, but the fixed electrode finger 423 and the movable electrode finger 562 have the same configuration.

  Also according to the third embodiment, the same effects as those of the first embodiment described above can be exhibited.

<Fourth embodiment>
Next, a physical quantity sensor according to a fourth embodiment of the invention will be described.

  FIG. 9 is a partially enlarged plan view showing a physical quantity sensor according to the fourth embodiment of the present invention. FIG. 10 is a partially enlarged plan view showing a modification of the physical quantity sensor shown in FIG. For convenience of explanation, in FIG. 9, the substrate and the lid are not shown, and only a part of the element is shown.

  The physical quantity sensor 1 according to the present embodiment is the same as the physical quantity sensor 1 of the first embodiment described above except that the configuration of the element unit 3 is mainly different.

  In the following description, the physical quantity sensor 1 of the fourth embodiment will be described with a focus on the differences from the first embodiment described above, and description of similar matters will be omitted. Moreover, in FIG. 9, the same code | symbol is attached | subjected about the structure similar to 1st Embodiment mentioned above.

  As shown in FIG. 9, in the physical quantity sensor 1 of the present embodiment, the connection portion 413A of the fixed electrode finger 413 is a piece whose width W4 gradually increases only on the minus side in the X-axis direction (the opposite side to the corresponding movable electrode finger 561). It is tapered. On the other hand, the connecting portion 561A of the movable electrode finger 561 has a one-taper shape in which the width W7 gradually increases only on the X axis direction plus side (the side opposite to the corresponding fixed electrode finger 413).

  By setting it as such a structure, the stress concentration to each connection part 413A and 561A can be relieved. Furthermore, the facing area between the movable electrode finger 561 and the fixed electrode finger 413 can be increased while reducing the gap between the movable electrode finger 561 and the fixed electrode finger 413. Therefore, the electrostatic capacitance between the movable electrode finger 561 and the fixed electrode finger 413 can be increased, and the acceleration Ax can be detected with higher accuracy.

  The fixed electrode finger 413 and the movable electrode finger 561 have been described above, but the fixed electrode finger 423 and the movable electrode finger 562 have the same configuration.

  According to the fourth embodiment, the same effect as that of the first embodiment described above can be exhibited. In the present embodiment, the connecting portion 413A has a single taper shape, but may have a configuration as shown in FIG. 10, for example. That is, the connecting portion 413A is tapered, but the X-axis direction plus side (corresponding movable electrode finger 561 side) is wider than the X-axis direction minus side (opposite the corresponding movable electrode finger 561). A configuration with a small amount of change may be used. The same applies to the other connecting portions 561A.

<Fifth Embodiment>
Next, a physical quantity sensor according to a fifth embodiment of the invention will be described.

  FIG. 11 is a plan view showing a physical quantity sensor according to the fifth embodiment of the present invention. For convenience of explanation, in FIG. 11, illustration of the base portion and the lid portion is omitted, and only the element portion is illustrated.

  The physical quantity sensor 1 according to this embodiment is the same as the physical quantity sensor 1 of the second embodiment described above except that the configuration of the element unit 3 is mainly different.

  In the following description, the physical quantity sensor 1 of the fifth embodiment will be described with a focus on the differences from the first embodiment described above, and description of similar matters will be omitted. Moreover, in FIG. 11, the same code | symbol is attached | subjected about the structure similar to 1st Embodiment mentioned above.

  As shown in FIG. 11, in the physical quantity sensor 1 of the present embodiment, the first fixed electrode portion 41 has a pair of support portions 412 extending from the fixed portion 411 toward both sides in the X-axis direction. Each support portion 412 is provided with a plurality of fixed electrode fingers 413. Similarly, the second fixed electrode portion 42 has a pair of support portions 422 extending from the fixed portion 421 toward both sides in the X-axis direction. Each support portion 422 is provided with a plurality of fixed electrode fingers 423.

  According to the fifth embodiment, the same effect as that of the first embodiment described above can be exhibited.

<Sixth Embodiment>
Next, a physical quantity sensor according to a sixth embodiment of the invention will be described.

  FIG. 12 is a plan view showing a physical quantity sensor according to the sixth embodiment of the present invention. For convenience of explanation, in FIG. 12, illustration of the base portion and the lid portion is omitted, and only the element portion is illustrated.

  The physical quantity sensor 1 according to the present embodiment is mainly the same as the physical quantity sensor 1 of the fifth embodiment described above except that the configuration of the element unit 3 is different.

  In the following description, the physical quantity sensor 1 of the sixth embodiment will be described with a focus on the differences from the first embodiment described above, and description of similar matters will be omitted. Moreover, in FIG. 12, the same code | symbol is attached | subjected about the structure similar to 1st Embodiment mentioned above.

  As shown in FIG. 12, in the physical quantity sensor 1 of the present embodiment, the first fixed electrode portion 41 and the second fixed electrode portion 42 are provided side by side in the X-axis direction. The first fixed electrode portion 41 includes a fixed portion 411, a support portion 412 extending from the fixed portion 411 to the X axis direction plus side, and a fixed electrode finger 413 extending from the support portion 412 to both sides in the Y axis direction. ,have. The second fixed electrode portion 42 includes a fixed portion 421, a support portion 422 extending from the fixed portion 421 to the X axis direction negative side, and a fixed electrode finger 423 extending from the support portion 422 to both sides in the Y axis direction. ,have. The connecting portion 412A of the supporting portion 412 with the fixing portion 411 and the connecting portion 422A of the supporting portion 422 with the fixing portion 421 are tapered.

  The movable electrode portion 5 includes a pair of fixed portions 51, a pair of support portions 52 connected to the respective fixed portions 51, a movable portion 53 that can be displaced with respect to each support portion 52, and one support portion 52. A pair of spring portions 54 that connect the movable portion 53, a pair of spring portions 55 that connect the other support portion 52 and the movable portion 53, and a movable electrode finger 56 provided on the movable portion 53. doing.

  The pair of fixing parts 51 are arranged side by side in the Y-axis direction, and the fixing parts 411 and 421 are located between them. Thereby, the four fixing | fixed part 411,421,51,51 can be arrange | positioned near.

  Further, the support portion 52 connected to the fixing portion 411 located on the Y axis direction plus side includes a first extending portion 521 extending from the fixing portion 411 to the Y axis direction plus side, and a first extending portion 521. A second extending portion 522 extending from the tip end portion (the end portion on the plus side in the Y-axis direction) to both sides in the X-axis direction. Then, both ends of the second extending part 522 are connected to the movable part 53 via a pair of spring parts 54. In such a support part 52, the connection part 52A of the first extension part 521 with the fixed part 51 and the connection part 52B of the first extension part 521 with the second extension part 522, that is, the first extension part. Both end portions of 521 are tapered. Thereby, the stress concentration to the connection parts 52A and 52B is relieved similarly to the description in the first embodiment described above. The configuration of the connection portions 52A and 52B is not particularly limited, but for example, the same configuration as the connection portions 412A and 412B described above can be used.

  Further, the support portion 52 connected to the fixed portion 411 located on the Y axis direction minus side includes a first extending portion 521 extending from the fixed portion 411 to the Y axis direction minus side, and a first extending portion 521. A second extending portion 522 extending from the tip end portion (the end portion on the plus side in the Y-axis direction) to both sides in the X-axis direction. Then, both ends of the second extending portion 522 are connected to the movable portion 53 via a pair of spring portions 55. In such a support part 52, the connection part 52A of the first extension part 521 with the fixed part 51 and the connection part 52B of the first extension part 521 with the second extension part 522, that is, the first extension part. Both end portions of 521 are tapered. Thereby, the stress concentration to the connection parts 52A and 52B is relieved similarly to the description in the first embodiment described above. The configuration of the connection portions 52A and 52B is not particularly limited, but for example, the same configuration as the connection portions 412A and 412B described above can be used.

  Also according to the sixth embodiment, the same effects as those of the first embodiment described above can be exhibited.

<Seventh embodiment>
Next, a physical quantity sensor according to a seventh embodiment of the invention will be described.

  FIG. 13 is a plan view showing a physical quantity sensor according to the seventh embodiment of the present invention. For convenience of explanation, in FIG. 13, illustration of the base portion and the lid portion is omitted, and only the element portion is illustrated.

  The physical quantity sensor 1 according to the present embodiment is mainly the same as the physical quantity sensor 1 of the fifth embodiment described above except that the configuration of the element unit 3 is different.

  In the following description, the physical quantity sensor 1 according to the seventh embodiment will be described with a focus on the differences from the first embodiment described above, and description of similar matters will be omitted. Moreover, in FIG. 13, the same code | symbol is attached | subjected about the structure similar to 1st Embodiment mentioned above.

  As shown in FIG. 13, in the physical quantity sensor 1 of the present embodiment, the first fixed electrode portion 41 includes a fixed portion 411, a pair of support portions 412 extending from the fixed portion 411 to both sides in the X-axis direction, and each support. A fixed electrode finger 413 extending from the portion 412 to the positive side in the Y-axis direction (the side opposite to the central axis L). Further, each support portion 412 is arranged so as to be biased toward the Y axis direction minus side (center axis L side) with respect to the fixed portion 411. And the connection part 412A with the fixing | fixed part 411 of each support part 412 becomes the one taper shape to which the width W1 increases gradually only to the Y-axis direction plus side. Thereby, the stress concentration on the connecting portion 412A can be relaxed.

  The second fixed electrode portion 42 includes a fixed portion 421, a pair of support portions 422 extending from the fixed portion 421 to both sides in the X-axis direction, and a Y-axis direction negative side from each support portion 422 (opposite to the central axis L). A fixed electrode finger 423 extending to the side). Further, each support portion 422 is arranged to be biased toward the Y axis direction plus side (center axis L side) with respect to the fixed portion 421. And the connection part 422A with the fixing | fixed part 421 of each support part 422 becomes the one taper shape which width W1 increases gradually only to the Y-axis direction minus side. Thereby, the stress concentration on the connecting portion 422A can be relaxed.

  Further, the movable electrode portion 5 is omitted from the configuration of the first embodiment described above, and the support portion 52 is omitted. The fixed portion 51, the movable portion 53 that can be displaced with respect to the fixed portion 51, and the fixed portion 51 are movable. A pair of spring portions 54 and 55 connecting the portion 53 and a movable electrode finger 56 provided on the movable portion 53 are provided.

  The fixed portion 51 is located outside the movable portion 53, and a pair of fixed portions 51 are provided apart from each other in the X-axis direction. A movable portion 53 is located between the pair of fixed portions 51. Further, one fixed portion 51 and the movable portion 53 are connected via a spring portion 54 on the plus side in the X-axis direction of the movable portion 53, and the other fixed portion 51 and the movable portion are connected on the minus side in the X-axis direction. 53 is connected through a spring portion 55.

  Also according to the seventh embodiment, the same effect as that of the first embodiment described above can be exhibited. In the present embodiment, a pair of fixed portions 51 are provided. However, the pair of fixed portions 51 may be integrated, for example, in a frame shape surrounding the movable portion 53.

<Eighth Embodiment>
Next, a physical quantity sensor according to an eighth embodiment of the invention will be described.

  FIG. 14 is a plan view showing a physical quantity sensor according to the eighth embodiment of the present invention. For convenience of explanation, in FIG. 14, illustration of the base portion and the lid portion is omitted, and only the element portion is illustrated.

  The physical quantity sensor 1 according to the present embodiment is mainly the same as the physical quantity sensor 1 of the fifth embodiment described above except that the configuration of the element unit 3 is different.

  In the following description, the physical quantity sensor 1 according to the eighth embodiment will be described with a focus on the differences from the first embodiment described above, and description of similar matters will be omitted. Moreover, in FIG. 14, the same code | symbol is attached | subjected about the structure similar to 1st Embodiment mentioned above.

  As shown in FIG. 14, in the physical quantity sensor 1 of the present embodiment, the first fixed electrode portion 41 includes a fixed portion 411, a pair of support portions 412 extending from the fixed portion 411 to both sides in the X-axis direction, and each support. A fixed electrode finger 413 extending from the portion 412 to the positive side in the Y-axis direction (the side opposite to the central axis L). Further, each support portion 412 is arranged so as to be biased toward the Y axis direction plus side (the opposite side to the central axis L) with respect to the fixed portion 411. And the connection part 412A with the fixing | fixed part 411 of each support part 412 becomes the one taper shape to which the width W1 increases gradually only to the Y-axis direction minus side. Thereby, the stress concentration on the connecting portion 412A can be relaxed.

  The second fixed electrode portion 42 includes a fixed portion 421, a pair of support portions 422 extending from the fixed portion 421 to both sides in the X-axis direction, and a Y-axis direction negative side from each support portion 422 (opposite to the central axis L). A fixed electrode finger 423 extending to the side). Further, each support portion 422 is arranged so as to be biased toward the Y axis direction minus side (the side opposite to the center axis L) with respect to the fixed portion 421. And the connection part 422A with the fixing | fixed part 421 of each support part 422 becomes the one taper shape which width W1 increases gradually only to the Y-axis direction plus side. Thereby, the stress concentration on the connecting portion 422A can be relaxed.

  In the movable electrode portion 5, a pair of fixed portions 51 are provided. The pair of fixing parts 51 are located in the center part of the element part 3 and are arranged side by side in the X-axis direction. Further, the pair of fixing portions 51 are positioned so as to sandwich the fixing portions 411 and 421 therebetween. Therefore, the four fixing portions 411, 421, 51, 51 can be arranged close to each other.

  Further, a support portion 52 extends from the fixed portion 51 located on the X axis direction plus side to the X axis direction plus side, and from the fixed portion 51 located on the X axis direction minus side, the X axis direction minus side. The support part 52 extends to the front.

  Further, the distal end portion of the support portion 52 located on the X axis direction plus side and the movable portion 53 are connected via the spring portion 54, and the distal end portion and the movable portion of the support portion 52 located on the minus side in the X axis direction. 53 is connected through a spring portion 55.

  Also according to the eighth embodiment, the same effects as those of the first embodiment described above can be exhibited.

<Ninth Embodiment>
Next, a physical quantity sensor device according to a ninth embodiment of the invention will be described.

FIG. 15 is a cross-sectional view showing a physical quantity sensor device according to the ninth embodiment of the present invention.
As illustrated in FIG. 15, the physical quantity sensor device 1000 includes a base substrate 1010, a physical quantity sensor 1 provided on the base substrate 1010, a circuit element 1020 (IC) provided on the physical quantity sensor 1, and a physical quantity sensor 1. A bonding wire BW1 that electrically connects the circuit element 1020 and the circuit board 1020; a bonding wire BW2 that electrically connects the base substrate 1010 and the circuit element 1020; a molding unit 1030 that molds the physical quantity sensor 1 and the circuit element 1020; have. Here, as the physical quantity sensor 1, for example, any of the first to eighth embodiments described above can be used.

  The base substrate 1010 is a substrate that supports the physical quantity sensor 1, and is, for example, an interposer substrate. A plurality of connection terminals 1011 are arranged on the upper surface of the base substrate 1010 and a plurality of mounting terminals 1012 are arranged on the lower surface. In addition, internal wiring (not shown) is arranged in the base substrate 1010, and each connection terminal 1011 is electrically connected to the corresponding mounting terminal 1012 through this internal wiring. Such a base substrate 1010 is not particularly limited, and for example, a silicon substrate, a ceramic substrate, a resin substrate, a glass substrate, a glass epoxy substrate, or the like can be used.

  Further, the physical quantity sensor 1 is disposed on the base substrate 1010 with the substrate 2 facing downward (base substrate 1010 side). The physical quantity sensor 1 is bonded to the base substrate 1010 via a bonding member.

  The circuit element 1020 is disposed on the physical quantity sensor 1. The circuit element 1020 is bonded to the lid portion 8 of the physical quantity sensor 1 via a bonding member. The circuit element 1020 is electrically connected to each electrode pad P of the physical quantity sensor 1 through the bonding wire BW1, and is electrically connected to the connection terminal 1011 of the base substrate 1010 through the bonding wire BW2. Such a circuit element 1020 includes a drive circuit that drives the physical quantity sensor 1, a detection circuit that detects acceleration based on an output signal from the physical quantity sensor 1, and a signal from the detection circuit that is converted into a predetermined signal. An output circuit or the like for output is included as necessary.

  The mold unit 1030 molds the physical quantity sensor 1 and the circuit element 1020. Thereby, the physical quantity sensor 1 and the circuit element 1020 can be protected from moisture, dust, impact, and the like. Although it does not specifically limit as the mold part 1030, For example, a thermosetting epoxy resin can be used, For example, it can mold by the transfer mold method.

  The physical quantity sensor device 1000 as described above includes the physical quantity sensor 1. Therefore, the effect of the physical quantity sensor 1 can be enjoyed, and a highly reliable physical quantity sensor device 1000 can be obtained.

  Note that the configuration of the physical quantity sensor device 1000 is not limited to the above configuration, and for example, the physical quantity sensor 1 may be configured to be housed in a ceramic package.

<Tenth Embodiment>
Next, an electronic apparatus according to a tenth embodiment of the invention will be described.

FIG. 16 is a perspective view showing an electronic apparatus according to the tenth embodiment of the present invention.
A mobile (or notebook) personal computer 1100 shown in FIG. 16 is an application of an electronic device including the physical quantity sensor of the present invention. In this figure, a personal computer 1100 includes a main body portion 1104 provided with a keyboard 1102 and a display unit 1106 provided with a display portion 1108. The display unit 1106 is rotated with respect to the main body portion 1104 via a hinge structure portion. It is supported movably. Such a personal computer 1100 incorporates a physical quantity sensor 1 that functions as an acceleration sensor. Here, as the physical quantity sensor 1, for example, any of the first to eighth embodiments described above can be used.

  Such a personal computer 1100 (electronic device) has a physical quantity sensor 1. Therefore, the effect of the physical quantity sensor 1 described above can be enjoyed and high reliability can be exhibited.

<Eleventh embodiment>
Next, an electronic apparatus according to an eleventh embodiment of the present invention will be described.

FIG. 17 is a perspective view showing an electronic apparatus according to the eleventh embodiment of the present invention.
A cellular phone 1200 (including PHS) shown in FIG. 17 is an application of an electronic device including the physical quantity sensor of the present invention. In this figure, a cellular phone 1200 includes an antenna (not shown), a plurality of operation buttons 1202, an earpiece 1204, and a mouthpiece 1206, and a display unit 1208 is provided between the operation buttons 1202 and the earpiece 1204. Has been placed. Such a cellular phone 1200 incorporates a physical quantity sensor 1 that functions as an acceleration sensor. Here, as the physical quantity sensor 1, for example, any of the first to eighth embodiments described above can be used.

  Such a cellular phone 1200 (electronic device) has a physical quantity sensor 1. Therefore, the effect of the physical quantity sensor 1 described above can be enjoyed and high reliability can be exhibited.

<Twelfth embodiment>
Next, an electronic apparatus according to a twelfth embodiment of the present invention is described.

FIG. 18 is a perspective view showing an electronic apparatus according to the twelfth embodiment of the present invention.
A digital still camera 1300 illustrated in FIG. 18 is an application of an electronic device including the physical quantity sensor of the present invention. In this figure, a display unit 1310 is provided on the back of a case (body) 1302, and is configured to display based on an image pickup signal by a CCD. The display unit 1310 is a finder that displays an object as an electronic image. Function. A light receiving unit 1304 including an optical lens (imaging optical system), a CCD, and the like is provided on the front side (the back side in the drawing) of the case 1302. When the photographer confirms the subject image displayed on the display unit 1310 and presses the shutter button 1306, the CCD image pickup signal at that time is transferred and stored in the memory 1308. Such a digital still camera 1300 incorporates a physical quantity sensor 1 that functions as an acceleration sensor. Here, as the physical quantity sensor 1, for example, any of the first to eighth embodiments described above can be used.

  Such a digital still camera 1300 (electronic device) has a physical quantity sensor 1. Therefore, the effect of the physical quantity sensor 1 described above can be enjoyed and high reliability can be exhibited.

  The electronic device of the present invention includes, for example, a smart phone, a tablet terminal, a watch (including a smart watch), an ink jet discharge, in addition to the personal computer and mobile phone of the above-described embodiment and the digital still camera of the present embodiment. Wearable terminals such as devices (for example, inkjet printers), laptop personal computers, televisions, HMDs (head-mounted displays), video cameras, video tape recorders, car navigation devices, pagers, electronic notebooks (including those with communication functions), electronic Dictionary, calculator, electronic game device, word processor, workstation, video phone, security TV monitor, electronic binoculars, POS terminal, medical device (eg electronic thermometer, blood pressure monitor, blood glucose meter, electrocardiogram measuring device, ultrasound diagnosis Device, electronic endoscope), fish finder, various measuring equipment, mobile terminal base station equipment, instruments (eg, vehicles, aircraft, ship instruments), flight simulator, network server, etc. it can.

<13th Embodiment>
Next, a mobile unit according to a thirteenth embodiment of the present invention is described.

FIG. 19 is a perspective view showing a moving body according to the thirteenth embodiment of the present invention.
An automobile 1500 shown in FIG. 19 is an automobile to which a moving body including a physical quantity sensor of the present invention is applied. In this figure, an automobile 1500 has a built-in physical quantity sensor 1 that functions as an acceleration sensor, and the physical quantity sensor 1 can detect the posture of the vehicle body 1501. The detection signal of the physical quantity sensor 1 is supplied to the vehicle body posture control device 1502, and the vehicle body posture control device 1502 detects the posture of the vehicle body 1501 based on the signal, and controls the stiffness of the suspension according to the detection result. The brakes of the individual wheels 1503 can be controlled. Here, as the physical quantity sensor 1, for example, any of the first to eighth embodiments described above can be used.

  Such an automobile 1500 (moving body) has a physical quantity sensor 1. Therefore, the effect of the physical quantity sensor 1 described above can be enjoyed and high reliability can be exhibited.

  In addition, the physical quantity sensor 1 includes a car navigation system, a car air conditioner, an anti-lock brake system (ABS), an air bag, a tire pressure monitoring system (TPMS), an engine control, and a hybrid vehicle. It can be widely applied to electronic control units (ECU) such as battery monitors for electric vehicles and electric vehicles.

  Further, the moving body is not limited to the automobile 1500, and can be applied to, for example, an unmanned airplane such as an airplane, a rocket, an artificial satellite, a ship, an AGV (automated guided vehicle), a bipedal walking robot, and a drone. .

  As described above, the physical quantity sensor, the physical quantity sensor device, the electronic apparatus, and the moving body of the present invention have been described based on the illustrated embodiment, but the present invention is not limited to this, and the configuration of each part has the same function. It can be replaced with one having any structure. In addition, any other component may be added to the present invention. Moreover, you may combine embodiment mentioned above suitably. In the above-described embodiment, the X-axis direction (first direction) and the Y-axis direction (second direction) are orthogonal to each other.

  In the above-described embodiment, the configuration of one element unit has been described. However, a plurality of element units may be provided. At this time, by arranging the plurality of element portions so that the detection axes are different from each other, accelerations in a plurality of axial directions can be detected.

  In the above-described embodiment, the acceleration sensor that detects acceleration is described as the physical quantity sensor. However, the physical quantity detected by the physical quantity sensor is not limited to acceleration, and may be angular velocity, pressure, or the like.

  DESCRIPTION OF SYMBOLS 1 ... Physical quantity sensor, 2 ... Board | substrate, 21 ... Recessed part, 22, 23, 24 ... Mount part, 25, 26, 27 ... Groove part, 3 ... Element part, 4 ... Fixed electrode part, 41 ... 1st fixed electrode part, 411 ... fixed part, 411a ... joining part, 412 ... support part, 412A ... connecting part, 412A ', 412A "... outer edge, 412B ... connecting part, 412B', 412B" ... outer edge, 412a ... first extension part, 412b ... 2nd extension part, 413, 413 ', 413 "... fixed electrode finger, 413A ... connection part, 413A', 413A" ... outer edge, 42 ... 2nd fixed electrode part, 421 ... fixed part, 421a ... joined part, 422 ... support part, 422A ... connection part, 422a ... first extension part, 422b ... second extension part, 423, 423 ', 423 "... fixed electrode finger, 5 ... movable electrode part, 51 ... fixed part, 51a ... Junction, 52 ... support, 52A ... 52A ', 52A "... outer edge, 52B ... connecting portion, 521 ... first extending portion, 522 ... second extending portion, 53 ... movable portion, 531 ... frame portion, 532a, 532b ... first Y-axis extension Existing part, 533a, 533b ... 1st X-axis extension part, 534a, 534b ... 2nd Y-axis extension part, 535a, 535b ... 2nd X-axis extension part, 536, 537 ... Projection part, 538, 539 ... Opening part, 54, 55 ... Spring part, 56, 561, 561 ', 561 "... Movable electrode finger, 561A ... Connection part, 561A', 561A" ... Outer edge, 562, 562 ', 562 "... Movable electrode finger, 562A ... Connection part , 71, 72, 73 ... wiring, 8 ... lid, 81 ... recess, 82 ... communication hole, 83 ... sealing member, 89 ... glass frit, 1000 ... physical quantity sensor device, 1010 ... base substrate, 1011 ... connection terminal, 1012 ... Terminal, 1020 ... Circuit element, 1030 ... Mold part, 1100 ... Personal computer, 1102 ... Keyboard, 1104 ... Main body part, 1106 ... Display unit, 1108 ... Display part, 1200 ... Mobile phone, 1202 ... Operation button, 1204 ... Reception Mouth, 1206 ... Mouthpiece, 1208 ... Display, 1300 ... Digital still camera, 1302 ... Case, 1304 ... Light receiving unit, 1306 ... Shutter button, 1308 ... Memory, 1310 ... Display, 1500 ... Automobile, 1501 ... Car body, 1502: Body posture control device, 1503 ... Wheel, Ax: Acceleration, BW1, BW2 ... Bonding wire, L ... Center axis, P ... Electrode pad, S ... Storage space, W1, W2, W4, W6, W7 ... Width, W1 ', W4', W5 ', W7' ... Minimum width, W1 ", W4 ", W5", W7 "... Maximum width

Claims (16)

The base,
An element part that is provided at the base and detects a physical quantity;
The element portion is
A fixed electrode portion fixed to the base, and
A movable electrode part displaceable with respect to the base part,
The fixed electrode portion is
A fixed portion connected to the base;
A support portion connected to the fixed portion;
A fixed electrode finger connected to the support,
The connecting portion of the support portion with the fixed portion has a tapered shape with a width gradually increasing toward the fixed portion.   The physical quantity sensor according to claim 1, wherein at least one of both outer edges in the width direction of the connection portion is curved in a concave shape. The support part is
A first extending portion extending in a first direction and connected to the fixed electrode finger;
A second extension portion extending in a second direction different from the first direction and connecting the first extension portion and the fixed portion;
3. The physical quantity sensor according to claim 1, wherein a connection portion between the second extension portion and the first extension portion has a tapered shape in which a width gradually increases toward the first extension portion.   4. The physical quantity sensor according to claim 1, wherein a connection portion of the fixed electrode finger with the support portion has a tapered shape whose width gradually increases toward the support portion.   The physical quantity sensor according to claim 4, wherein at least one of both outer edges in the width direction of the connection portion of the fixed electrode finger with the support portion is curved in a concave shape.   The physical quantity sensor according to claim 4 or 5, wherein a change amount of a width of a connection portion of the fixed electrode finger with the support portion is smaller than a change amount of a width of a connection portion of the support portion with the fixing portion.   The physical quantity sensor according to any one of claims 1 to 3, wherein a width of a connection portion of the fixed electrode finger with the support portion is constant toward the support portion side. The base,
An element part that is provided at the base and detects a physical quantity;
The element portion is
A fixed electrode portion fixed to the base, and
A movable electrode part displaceable with respect to the base part,
The movable electrode portion is
A fixed portion connected to the base;
A support portion connected to the fixed portion;
A movable part displaceable with respect to the support part;
An elastic part connecting the support part and the movable part;
A movable electrode finger provided on the movable part,
The connecting portion of the support portion with the fixed portion has a tapered shape with a width gradually increasing toward the fixed portion.   The physical quantity sensor according to claim 8, wherein at least one of both outer edges in the width direction of the connection portion is curved in a concave shape.   The physical quantity sensor according to claim 8 or 9, wherein a connection portion of the movable electrode finger with the movable portion has a tapered shape with a width gradually increasing toward the movable portion side.   The physical quantity sensor according to claim 10, wherein at least one of both outer edges in the width direction of the connecting portion of the movable electrode finger with the movable portion is curved in a concave shape.   The physical quantity sensor according to claim 10 or 11, wherein a change amount of a width of a connection portion between the movable electrode finger and the movable portion is smaller than a change amount of a width of a connection portion of the support portion with the fixed portion.   The physical quantity sensor according to claim 8 or 9, wherein a width of a connection portion of the movable electrode finger with the movable portion is constant toward the movable portion side.   A physical quantity sensor device comprising the physical quantity sensor according to claim 1.   An electronic apparatus comprising the physical quantity sensor according to claim 1.   A moving body comprising the physical quantity sensor according to claim 1.

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