JP2018132332A - Inspection system - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an inspection system capable of efficiently inspecting the degree of wear of a wheel provided to a transporting vehicle which travels along a traveling route as an object.SOLUTION: The inspection system for inspecting the degree of degradation of a wheel (13) of a transportation vehicle traveling along a traveling route, includes: a dentification mark (40) unique to each wheel (13) attached to a side face of the wheel (13); an imaging device that picks up images so that entire image of the wheel (13) is within an imaging range (S) from the side of the traveling route; and an inspection part that inspect the degree of wear of the wheel (13) based on a piece of image data (I) of the side face of the wheel (13) and identifies the individual wheel (13) as inspection object at the same time.SELECTED DRAWING: Figure 7

Description

  The present invention relates to an inspection system.

  For example, in an article manufacturing facility or the like for manufacturing articles, a transport vehicle that has a plurality of wheels and travels along a predetermined travel route is used to transport materials and intermediate products between processes. In such a transport vehicle, since deterioration of each part of the vehicle body over time is unavoidable, it is preferable that an inspection for the transport vehicle is performed for the purpose of, for example, preventing the occurrence of problems. At this time, from the viewpoint of inspection efficiency, it is preferable that such inspection is automatically performed.

  For example, Japanese Patent Laying-Open No. 2005-61933 (Patent Document 1) automatically inspects the degree of deterioration of a wheel bearing portion [bearing portion 6 supporting a roller 5] provided in a transport vehicle [trolley 2]. An inspection system [bearing portion deterioration inspection apparatus 1] is disclosed. In the inspection system of Patent Document 1, the right and left rails on which the transport vehicle travels are provided with deflection slopes, and light is emitted from obliquely upward toward the side surface of the wheel [roller 5] passing through the deflection slopes. The degree of deterioration of the bearing portion is inspected by measuring the inclination of the optical axis.

  However, the object to be inspected as the degree of deterioration may affect the traveling of the transport vehicle is not limited to the bearing portion. For example, when the wear of the wheel progresses, the actual travel distance becomes shorter than the estimated travel distance due to the decrease in the outer diameter of the wheel, and the control accuracy (for example, stop accuracy) of the transport vehicle may decrease. In this regard, Patent Document 1 does not include a description regarding the necessity of inspecting the degree of wear of the wheel, and of course, there is no description regarding how to inspect it.

JP 2005-61933 A

  Realization of an inspection system capable of efficiently inspecting the degree of wear of wheels provided in the conveyance vehicle is desired for a conveyance vehicle traveling along a traveling route.

The inspection system according to the present disclosure is:
An inspection system for inspecting the degree of deterioration of the wheel for a transport vehicle having a plurality of wheels and traveling along a predetermined travel route,
A unique identification mark for each wheel, attached to each side surface of the plurality of wheels;
An imaging device that captures the wheels of the transport vehicle traveling along the travel route from the side of the travel route so that the entire image of the wheels is within the imaging range;
Based on the image data of the side surface of the wheel obtained by the imaging device, inspecting the degree of wear of the wheel, and in combination, an inspection unit for performing individual identification of the wheel that is the inspection target;
Is provided.

  According to this configuration, the individual side of the wheel is identified based on the obtained image data only by photographing the side surface of the wheel with the identification mark with the photographing device installed on the side of the travel route. The degree of wheel wear can be inspected. Thus, it is possible to efficiently inspect the degree of wear for each wheel and relate the result to that wheel. In addition, since it is possible to perform both wear inspection and individual identification based on image data photographed by a common photographing apparatus, in such a case, the system configuration can be simplified.

  Further features and advantages of the technology according to the present disclosure will become more apparent from the following description of exemplary and non-limiting embodiments described with reference to the drawings.

Schematic diagram showing the transport path in an article transport facility incorporating an inspection system Side view of the overhead transport vehicle Front view of the overhead transport vehicle at the inspection position Plan view showing the state of the overhead transport vehicle at the branch point of the transport route Schematic diagram showing the state of the side of each wheel of the overhead transport vehicle Control system block diagram Schematic diagram showing the principle of wheel wear inspection The schematic diagram which shows the mode of the side surface of each wheel of the overhead conveyance vehicle of another aspect Schematic diagram of another aspect of inspection system The schematic diagram which shows the mode of the side surface of each wheel of the overhead conveyance vehicle of another aspect

  An embodiment of an inspection system will be described. In the present embodiment, as an example, an inspection system 1 incorporated in an article conveyance facility 2 used in, for example, a manufacturing facility (factory) for various products will be described. The article transport facility 2 includes a transport vehicle 10 that has a plurality of wheels 13 and travels along a predetermined travel route R. The inspection system 1 inspects the degree of deterioration of the wheels 13 provided in the transport vehicle 10 for the transport vehicle 10. Hereinafter, the inspection system 1 and the article conveyance facility 2 of the present embodiment will be described in detail.

  First, the main structure of the article conveyance equipment 2 will be described. As shown in FIGS. 1 to 4, the article transport facility 2 includes a travel rail 6 disposed along the travel route R, and a transport vehicle 10 that travels along the travel rail 6 and transports the article A. I have. The manufacturing facility has a plurality of bays (processes), and the travel route R (the travel route of the transport vehicle 10) connects the in-bay routes Ra provided for each bay and the plurality of in-bay routes Ra. And an interbay path Re. A plurality of processing devices 21 are provided along the in-bay path Ra. A mounting table 22 is provided at a position adjacent to each processing device 21 and overlapping the traveling rail 6 in the vertical direction (a position directly below the traveling rail 6 in this example). The processing apparatus 21 may be, for example, a semiconductor processing apparatus that processes a semiconductor substrate.

  As shown in FIG. 3, the traveling rails 6 are provided as a pair of left and right and are supported by being suspended from the ceiling. The transport vehicle 10 is configured to travel on the upper surface of the travel rail 6. That is, the transport vehicle 10 of this embodiment is configured as a tracked ceiling transport vehicle. A guide rail 8 is installed at a branch point of the travel route R (see also FIG. 4). The guide rail 8 is installed above the traveling rail 6 at the center position in the width direction of the pair of left and right traveling rails 6. The guide rail 8 is bifurcated at the branch point.

  As shown in FIGS. 2 and 3, the transport vehicle 10 includes a traveling body 11 and a transfer unit 17. The traveling body 11 includes a vehicle body 12 and a plurality of wheels 13 that are rotatably supported by the vehicle body 12. A pair of front and rear body bodies 12 are provided. A pair of left and right wheels 13 are provided in each of the pair of front and rear body bodies 12. Thus, the traveling body 11 of the present embodiment includes a total of four wheels 13, that is, a right front wheel, a left front wheel, a right rear wheel, and a left rear wheel. The wheel 13 rolls on the traveling rail 6. At least one of the plurality of wheels 13 is a drive wheel that is rotationally driven by a drive motor, and applies propulsive force to the transport vehicle 10.

  The traveling body 11 further includes a guide roller 14. The guide roller 14 includes a lower roller 14D and an upper roller 14U. The lower roller 14D is rotatably supported by the vehicle body 12 below the vehicle body 12. The lower roller 14 </ b> D rolls in contact with the side surface of the traveling rail 6. The upper roller 14U is rotatably supported by a switching mechanism provided in the vehicle body 12 above the vehicle body 12. The switching mechanism is configured to be capable of switching the position of the upper roller 14U to the left and right. The upper roller 14U rolls in contact with any side surface of the guide rail 8 at the branch point of the travel route R depending on the state of the switching mechanism.

  A connection shaft 15 is connected to each of the pair of front and rear body bodies 12, and a body case 16 is suspended and supported on the traveling body 11 via these connection shafts 15. Inside the main body case 16, a transfer unit 17 that holds the article A and performs a transfer operation of the article A is accommodated. The transfer unit 17 is configured to be able to move the article A up and down while holding the article A.

  In such an article transporting facility 2, the transport vehicle 10 travels along the travel route R (travel rail 6) and transports the article A between different mounting tables 22. As described above, when the processing apparatus 21 is a semiconductor processing apparatus, the article A may be, for example, a container (Front Opening Unified Pod; FOUP) that stores a semiconductor substrate.

  The wheels 13 of the transport vehicle 10 are worn and worn over time (more specifically, as the cumulative travel distance becomes longer). As the wear of the wheel 13 progresses, the outer diameter of the wheel 13 becomes smaller, so that the actual travel distance becomes shorter than the estimated travel distance estimated based on the rotation angle of the wheel 13. As a result, the control accuracy (for example, stop accuracy) of the transport vehicle 10 is lowered. Further, when the wear of the wheel 13 progresses to some extent, the wear becomes easier to progress, and the amount of dust generated may increase.

  Therefore, in the article transport facility 2 of the present embodiment, the inspection system 1 for inspecting the level of deterioration (specifically, the level of wear) of the wheels 13 provided in the transport vehicle 10 for the transport vehicle 10. Is incorporated. The inspection system 1 is configured to automatically inspect the degree of wear of the wheels 13. The inspection system 1 includes an imaging device 32 (see FIG. 3) installed in the vicinity of the traveling rail 6 and identification marks 40 (see FIG. 5) attached to the side surfaces of the plurality of wheels 13 of the transport vehicle 10. ) And an inspection unit 54 (see FIG. 6) for performing substantial processing of wear inspection. The inspection unit 54 can be configured by a computer in which an inspection program (application) is installed.

  As shown in FIG. 3, support tables 31 are respectively installed at the same height as the traveling rail 6 on both sides of the traveling rail 6 (traveling route R). The photographing devices 32 are respectively installed on the support bases 31 on both sides so as to face the traveling rail 6 side (that is, the traveling rail 6 side can be photographed). The imaging device 32 images the wheels 13 of the transport vehicle 10 traveling along the travel route R from the side of the travel route R. The imaging device 32 is installed so that the entire image of the wheel 13 of the transport vehicle 10 traveling on the travel route R is within the imaging range S (see FIG. 7) of the imaging device 32. As the imaging device 32, for example, a high-speed camera capable of imaging 2000 frames or more per second with about 1 million pixels can be used. Of course, such a specification is not essential, and the performance of the imaging device 32 may be appropriately set according to the required level.

  The installation position of the imaging device 32 is not particularly limited, and the imaging device 32 can be installed at an arbitrary position in the travel route R. However, in the case where the travel route R is formed in a loop shape and includes a straight section and a curve section, it is preferable that the photographing device 32 is installed in the straight section from the viewpoint of securing the installation space. Further, from the viewpoint of efficiency when photographing the wheels 13 of each transport vehicle 10, the photographing device 32 is installed in the inter-bay route Re where more transport vehicles 10 can travel than the intra-bay route Ra. It is preferable.

  Moreover, it is preferable that the photographing device 32 is installed at a predetermined stop position P (see FIG. 1) of the transport vehicle 10 in the travel route R. In the article transport facility 2, for example, the transport vehicle 10 stops when another transport vehicle 10 exists in the intra-bay route Ra that is about to enter before the branch point from the inter-bay route Re to the intra-bay route Ra. In some cases, a standby position W (see FIG. 1) is set. Such a standby position W is exemplified as an example of the stop position P. The imaging device 32 is preferably installed at any one of the standby positions W (stop positions P) set at a plurality of locations. The installation position of the imaging device 32 can also be referred to as an “inspection position”.

  The imaging device 32 is connected to the inspection unit 54 via the communication cable 33. That is, information communication between the imaging device 32 and the inspection unit 54 is performed by wired communication. Image data I (see FIG. 7) including the side surface of the wheel 13 of the transport vehicle 10 photographed by the photographing device 32 is transmitted to the inspection unit 54 by wired communication via the communication cable 33. If the imaging device 32 is installed at a standby position W (stop position P) that is closest to the control room or server room in the building where the article transport facility 2 is installed, a wired LAN (Local Area Network) can be constructed. Since it becomes comparatively easy, it is preferable.

  As shown in FIG. 3, a support member 35 that protrudes downward is fixed to one lower surface of the pair of left and right traveling rails 6. The support member 35 is formed to have a U shape (angular U shape) when viewed along the travel route R (travel rail 6). For example, an optical sensor 36 (not shown in FIG. 3, see FIG. 6) is fixed to the support member 35. The optical sensor 36 includes a light projecting portion and a light receiving portion. The light projecting portion is fixed to one support leg of the U-shaped support member 35 and the light receiving portion is fixed to the other support leg.

  On the other hand, an opaque shielding plate 38 that protrudes upward is fixed to the upper surface of the main body case 16 of the transport vehicle 10. The shielding plate 38 is fixed so as to be able to pass between a pair of support legs of a U-shaped support member 35 fixed to the traveling rail 6. When the transport vehicle 10 travels along the travel route R (travel rail 6) and the shielding plate 38 passes through the support member 35, light from the light projecting unit is shielded by the shielding plate 38 and cannot be detected by the light receiving unit. Using this phenomenon, the imaging device 32 is configured to perform imaging for a certain period of time triggered by a change from detection to non-detection in the light receiving unit.

  As shown in FIG. 5, the wheel 13 of the transport vehicle 10 is provided with a unique identification mark 40 for each wheel 13. In the identification mark 40, information of an identification number (wheel ID) assigned to each wheel 13 is embedded. As such an identification mark 40, a two-dimensional barcode 41 (QR code) is used in this embodiment. The two-dimensional barcode 41 is preferable because it can be read regardless of the inclination in the rotation direction, and can be read even while the transport vehicle 10 is running (while the wheels 13 are rotating). In this embodiment, a two-dimensional barcode 41 as an identification mark 40 is affixed to all the wheels 13.

  Further, the attaching position of the two-dimensional barcode 41 is not particularly limited, and the two-dimensional barcode 41 can be attached to an arbitrary position on the side surface of the wheel 13. In the present embodiment, the two-dimensional barcode 41 is affixed to the center position (axle position) of the wheel 13. In this way, the diameter of the rotation trajectory of the two-dimensional barcode 41 can be kept small, which is preferable because the two-dimensional barcode 41 can be accurately read in a narrow reading region.

  FIG. 6 shows a control system for the inspection system 1 and the article conveyance facility 2. This control system includes a host control unit 50, a conveyance control unit 52, and an inspection unit 54. The host control unit 50 performs integrated control of the transport control unit 52 and the inspection unit 54. The conveyance control unit 52 controls the operation of the conveyance vehicle 10. In the present embodiment, information communication between the transport control unit 52 and the transport vehicle 10 is performed by wireless communication. The control command of the transport vehicle 10 generated by the transport control unit 52 is transmitted to each transport vehicle 10 by wireless communication.

  The inspection unit 54 inspects the degree of wear of the wheel 13 based on the image data I of the side surface of the wheel 13 obtained by the imaging device 32, and also identifies the individual wheel 13 to be inspected. In order to realize such a function, the inspection unit 54 includes an image data acquisition unit 55, an individual identification unit 56, an image processing unit 57, and a determination unit 58. In the present embodiment, the inspection unit 54 further includes a notification unit 59 and is connected to the display device 60.

  The image data acquisition unit 55 acquires the image data I of the side surface of the wheel 13 obtained by the imaging device 32. When the imaging device 32 captures the side surface of the wheel 13 and the image data I is generated, the image data acquisition unit 55 receives and acquires the image data I via the communication cable 33. The acquired image data I may be stored in a storage device such as a flash memory or a hard disk. The image data I on the side surface of the wheel 13 (see FIG. 7) is used to inspect the degree of wear of the wheel 13.

  The individual specifying unit 56 performs individual specification of the wheel 13 to be inspected based on the image data I on the side surface of the wheel 13. As shown on the upper right side in FIG. 7, the individual specifying unit 56 performs a reading process on a certain region including the center of the wheel 13 in the image data I. Since the center part of the wheel 13 includes an image of the two-dimensional barcode 41 as the identification mark 40, the individual specifying unit 56 obtains information on the identification number of the wheel 13 by reading the two-dimensional barcode 41. The wheel 13 to be inspected is uniquely specified based on the identification number. In addition, in the inspection unit 54, information on the location (which wheel is at which position in which transport vehicle 10) of all the wheels 13 included in all the transport vehicles 10 provided in the article transport facility 2 is an identification number. Is stored in association with. For this reason, the individual specifying unit 56 can specify the position of the wheel 13 to be inspected in which transport vehicle 10.

  The image processing unit 57 performs image processing on the image data I on the side surface of the wheel 13. As shown in the lower part of FIG. 7, the image processing unit 57 performs, for example, binarization processing, edge detection processing, and the like to obtain the contour line E of the wheel 13 included in the image data I on the side surface of the wheel 13. Extract.

  The determination unit 58 determines the degree of wear of the wheel 13 to be inspected. The determination unit 58 obtains the outer diameter D of the wheel 13 to be inspected by calculation based on the extracted information on the contour line E of the wheel 13, and determines the degree of wear of the wheel 13 to be inspected based on the estimated value. judge. The inspection unit 54 stores information on the initial diameter of each wheel 13. The determination unit 58 compares the magnitude relationship between the estimated value of the outer diameter D of the wheel 13 and a reference diameter preset to a value smaller than the initial diameter, and when the estimated value is equal to or less than the reference diameter, the wheel It determines with progressing to such an extent that wear of 13 cannot be overlooked. In this case, the reference diameter can be set to an outer diameter of about 95% to 99% of the initial diameter, for example.

  A plurality of reference diameters may be set without being limited to a configuration in which only one reference diameter is set. For example, a first reference diameter preset to a value smaller than the initial diameter and a second reference diameter preset to a value smaller than the first reference diameter may be set. In this case, the determination unit 58 compares the estimated value of the outer diameter D of the wheel 13 with each of the first reference diameter and the second reference diameter, and when the estimated value is equal to or less than the first reference diameter, It may be configured to determine that the wear of the wheel 13 is proceeding and to determine that the wear of the wheel 13 is proceeding to an extent that cannot be overlooked when the estimated value is equal to or smaller than the second reference diameter. In this case, the first reference diameter can be set to an outer diameter of, for example, about 99% to 99.5% of the initial diameter, and the second reference diameter is, for example, an outer diameter of about 95% to 99% of the initial diameter. Can be set to

  As described above, in the inspection system 1 of the present embodiment, the inspection unit 54 inspects the degree of wear of the wheel 13 based on the image data I of the side surface of the wheel 13 obtained by the imaging device 32, and combines them with the inspection object. Individual wheel 13 is identified. More specifically, the inspection unit 54 detects the outer diameter of the wheel 13 by image processing on the image data I, and inspects the degree of wear of the wheel 13 based on the detected value, and from the image data I The individual identification of the wheel 13 is performed by detecting the identification mark 40. Since the degree of wear of the wheel 13 is inspected while performing individual identification of the wheel 13 based on the image data I obtained by photographing with the photographing device 32, the degree of wear of each wheel 13 is efficiently inspected. can do.

  When the estimated value of the outer diameter D of the wheel 13 is determined to be equal to or less than the reference diameter (or equal to or less than the first reference diameter or equal to or less than the second reference diameter), the notification unit 59 notifies the content according to them. Do. For example, the notification unit 59 displays a warning message or a warning message on the display device 60 such as a monitor connected to a computer constituting the inspection unit 54 while specifying the location of the target wheel 13. The warning message can be, for example, a message that prompts the wheel 13 to be replaced immediately, and the alert message can be, for example, a message that prompts the wheel 13 to undergo a close inspection. The notification unit 59 may also display, for example, the estimated value of the outer diameter D of the wheel 13 and the image data I of the side surface of the wheel 13 on the display device 60.

  If it does in this way, the wheel 13 in which wear has progressed can be replaced | exchanged at an early stage, requiring little special work time by an operator. Therefore, it can suppress that the control precision of the conveyance vehicle 10 falls with abrasion of the wheel 13, and can suppress the generation amount of dust small.

[Other Embodiments]
(1) In the above embodiment, the identification mark 40 is configured by only the two-dimensional barcode 41, and the configuration in which the two-dimensional barcode 41 as the identification mark 40 is attached to all the wheels 13 has been described as an example. However, without being limited to such a configuration, for example, as shown in FIG. 8, the identification mark 40 is configured by a combination of the first identification mark 40 </ b> A and the second identification mark 40 </ b> B for each transport vehicle 10. Also good. The first identification mark 40A is a unique mark for each transport vehicle 10, and information on an identification number (transport vehicle ID) assigned to each transport vehicle 10 is embedded in the first identification mark 40A. The first identification mark 40A may be a two-dimensional barcode 44, for example. The 2nd identification mark 40B is a mark which shows the installation position for every wheel 13 in the conveyance vehicle 10, and is made into a different shape for every installation position. The second identification mark 40B may be, for example, a geometric mark 45, and is 1 to 4 concentric circle marks in the illustrated example. The second identification marks 40B are affixed to the center positions of the side surfaces of all the wheels 13 according to the installation positions of the wheels 13, respectively. 40 A of 1st identification marks are affixed on the side surface of one wheel 13 among all the wheels 13 which the said conveyance vehicle 10 has for every conveyance vehicle 10. FIG. In such a configuration, the imaging device 32 installed on the side where only the second identification mark 40 </ b> B is affixed to the wheel 13 on both sides of the travel route R does not need to read the two-dimensional barcode 44. Only different geometric marks 45 need be identified. For this reason, a low-speed low-speed camera can be used as the photographing device 32, and there is an advantage that the cost of the entire system can be reduced.

(2) In the above embodiment, the configuration in which the photographing devices 32 are installed on both sides of the travel route R (travel rail 6) has been described as an example. However, the present invention is not limited to such a configuration. For example, as illustrated in FIG. 9, the imaging device 32 may be installed on only one of the both sides of the travel route R while using the optical system 70. . The optical system 70 includes two optical paths (a first optical path 71 and a second optical path 72) as optical paths connecting the imaging device 32 and the wheels 13. The first optical path 71 linearly connects the imaging device 32 and the wheel 13 on the side where the imaging device 32 is installed. The second optical path 72 connects the imaging device 32 and the wheel 13 on the side opposite to the side where the imaging device 32 is installed by a plurality of (three in this example) mirrors 74 in a broken line shape. The first optical path 71 and the second optical path 72 share a part on the imaging device 32 side, and are branched into two optical paths at the branching section B. An optical path switching device 76 is provided at a branching portion B between the first optical path 71 and the second optical path 72. The optical path switching device 76 can be constituted by a liquid crystal shutter, for example. In such a configuration, the image data I of each side surface of the pair of wheels 13 is obtained by the single photographing device 32 by switching the transmission / non-transmission of light accompanying the on / off of the liquid crystal shutter at a constant period. Can be divided and obtained at the same time. In such a configuration, for example, as shown in FIG. 10, the attaching position of the identification mark 40 may be made different between the pair of left and right wheels 13. In this way, the reading area by the individual identification unit 56 can be clearly divided by the pair of left and right wheels 13, so that the number of installed imaging devices 32 is reduced and the individual identification accuracy is thereby reduced. Can be suppressed.

(3) In the above embodiment, the configuration in which the two-dimensional barcode 41 is used as the identification mark 40 has been described as an example. However, without being limited to such a configuration, the identification mark 40 may be, for example, a one-dimensional barcode, or a simple character string (for example, an identification number for each wheel 13). .

(4) In the above embodiment, the installation position of the imaging device 32 is the stop position P of the transport vehicle 10 in the travel route R, and the stop position P is a branch point to the intra-bay route Ra in the interbay route Re. The configuration in which the standby position W set in front is set as an example. However, without being limited to such a configuration, for example, a maintenance position for performing other inspections on the transport vehicle 10, a calibration position for correcting individual differences for each transport vehicle 10, or the transport vehicle 10 is equipped with a battery. The photographing device 32 may be installed at a charging position or the like in the case where the camera is being used. Further, the imaging device 32 may be installed at the stop position P set in the intra-bay route Ra without being limited to the inter-bay route Re. As the stop position P of the intra-bay route Ra, for example, the position of the mounting table 22 where the article A may be exchanged while the transport vehicle 10 is stopped can be exemplified. Alternatively, the imaging device 32 may be installed not only at the stop position P of the transport vehicle 10 but in a curve section. For example, when a slow traveling section is set in advance, the imaging device 32 is installed in the slow traveling section. May be.

(5) In the above-described embodiment, for example, the upper control unit 50 may be configured to manage the parts of the wheel 13 based on the result of the wear inspection. More specifically, for example, when the estimated value of the outer diameter D of a wheel 13 is determined to be equal to or less than the reference diameter, the order for replacement of the parts, such as ordering a wheel of the same model number as the wheel 13, is superordinately controlled. The unit 50 may be configured to perform automatically. Or the high-order control part 50 may be comprised so that the operation rate of each conveyance vehicle 10 may be managed based on the result of an abrasion test | inspection, for example. More specifically, for example, when it is determined that the estimated value of the outer diameter D of a certain wheel 13 is equal to or less than the reference diameter, the upper control unit 50 determines the conveyance vehicle 10 having the wheel 13 until the replacement of the parts is completed. The operating rate may be reduced.

(6) In the above embodiment, the configuration in which the information communication between the imaging device 32 and the inspection unit 54 is performed by wired communication has been described as an example. However, the information communication between the imaging device 32 and the inspection unit 54 may be performed by wireless communication without being limited to such a configuration.

(7) In the above-described embodiment, the configuration in which the transport vehicle 10 to be inspected is a tracked overhead transport vehicle has been described as an example. However, without being limited to such a configuration, for example, a track-type ground transportation vehicle can also be an inspection object by the inspection system 1. Furthermore, if the vehicle travels along a predetermined travel route, for example, a trackless ground transport vehicle can be an inspection target by the inspection system 1.

(8) In the above embodiment, the configuration in which the article A is a container (FOUP) that houses a semiconductor substrate has been described as an example. However, without being limited to such a configuration, the article A may be, for example, a small reticle pod that accommodates a reticle, or may be a container that accommodates food, medicine, or the like.

(9) The configurations disclosed in each of the above-described embodiments (including the above-described embodiments and other embodiments; the same applies hereinafter) are applied in combination with the configurations disclosed in the other embodiments unless a contradiction arises. It is also possible to do. Regarding other configurations as well, the embodiments disclosed in the present specification are examples in all respects, and can be appropriately modified without departing from the gist of the present disclosure.

[Outline of Embodiment]
In summary, the inspection system according to the present disclosure preferably includes the following configurations.

An inspection system for inspecting the degree of deterioration of the wheel for a transport vehicle having a plurality of wheels and traveling along a predetermined travel route,
A unique identification mark for each wheel, attached to each side surface of the plurality of wheels;
An imaging device that captures the wheels of the transport vehicle traveling along the travel route from the side of the travel route so that the entire image of the wheels is within the imaging range;
Based on the image data of the side surface of the wheel obtained by the imaging device, inspecting the degree of wear of the wheel, and in combination, an inspection unit for performing individual identification of the wheel that is the inspection target;
Is provided.

  According to this configuration, the individual side of the wheel is identified based on the obtained image data only by photographing the side surface of the wheel with the identification mark with the photographing device installed on the side of the travel route. The degree of wheel wear can be inspected. Thus, it is possible to efficiently inspect the degree of wear for each wheel and relate the result to that wheel. In addition, since it is possible to perform both wear inspection and individual identification based on image data photographed by a common photographing apparatus, in such a case, the system configuration can be simplified.

As one aspect,
The inspection unit detects the outer diameter of the wheel by image processing on the image data, inspects the degree of wear of the wheel based on the detected value, and detects the identification mark from the image data. Thus, it is preferable to identify the wheel individually.

  According to this configuration, it is possible to satisfactorily inspect the degree of wear of a wheel while performing individual identification of the wheel by using an image processing technique for image data and a technique for reading a specific mark in the image data. .

As one aspect,
It is preferable that the identification mark includes a two-dimensional barcode.

  According to this configuration, it is possible to appropriately identify individual wheels even when the transport vehicle is running (while the wheels are rotating) by using a two-dimensional barcode that can be read regardless of the inclination in the image data. It can be carried out.

As one aspect,
It is preferable that the photographing apparatus is installed at a predetermined stop position of the transport vehicle on the travel route.

  According to this configuration, the specific mark in the image data can be satisfactorily read while the transport vehicle is stopped at the stop position and the wheels are also stopped. Therefore, it is possible to use a relatively low-cost imaging device or to increase the accuracy of identifying the individual wheel.

As one aspect,
A transport control unit for controlling the operation of the transport vehicle;
Information communication between the transport control unit and the transport vehicle is performed by wireless communication,
It is preferable that information communication between the imaging device and the inspection unit is performed by wired communication.

  According to this configuration, it is possible to appropriately transmit a command from the transport control unit to the transport vehicle that travels freely along the travel route by wireless communication regardless of the position. Since the installation position of the imaging apparatus is basically fixed at a specific position, data transmission of the image data obtained by imaging to the inspection unit can be performed without problems even by wired communication. In addition, if the frequency band for wireless communication is limited by actually using wired communication, free up the frequency band for other devices that are highly necessary for wireless communication. Can do.

As one aspect,
The identification mark is constituted by a combination of a first identification mark unique to each transport vehicle and a second identification mark indicating an installation position for each wheel in the transport vehicle,
The second identification marks are respectively attached to the side surfaces of all the wheels according to the installation positions of the wheels, and the first identification marks are provided for each of the wheels of the transport vehicle for each transport vehicle. It is preferable to be attached to the side surface of some of the wheels.

  According to this configuration, the first identification mark unique to each transport vehicle is read, the second identification mark indicating the installation position for each wheel in each transport vehicle is read, and the information obtained from them is combined, thereby Individual identification can be performed appropriately. In addition, for example, a first imaging device that can read the first identification mark and a second imaging device that can read the second identification mark can be distributed and installed on both sides of the travel route. In such a case, as the second imaging device, an imaging device having a lower performance than the first imaging device is used, so that a high-performance imaging device is installed on both sides of the travel route. Thus, the cost of the entire system can be reduced.

As one aspect,
The photographing device is installed only on one of the two sides of the travel route;
A first optical path connecting the imaging device and the wheel on the side where the imaging device is installed;
A second optical path connecting the imaging device and the wheel on the side opposite to the side where the imaging device is installed, via a plurality of mirrors;
An optical path switching device provided at a branch portion between the first optical path and the second optical path,
It is preferable that image data of each side surface of the pair of wheels positioned on both sides with respect to the traveling direction of the transport vehicle is obtained at the same time by time division using the optical path switching device.

  According to this configuration, the optical system constructed using a plurality of mirrors and an optical path switching device is used, and the common imaging device is installed on one side of the travel route. Each side surface of a pair of wheels located on the side can be photographed. Therefore, the cost of the entire system can be reduced as compared with a configuration in which two photographing apparatuses are distributed and installed on both sides of the travel route.

  The inspection system according to the present disclosure only needs to exhibit at least one of the effects described above.

DESCRIPTION OF SYMBOLS 1 Inspection system 10 Carrier 13 Wheel 32 Imaging device 40 Identification mark 41 Two-dimensional barcode 40A First identification mark 40B Second identification mark 52 Conveyance control unit 54 Inspection unit 71 First optical path 72 Second optical path 74 Mirror 76 Optical path switching apparatus R Travel route P Stop position I Image data S Shooting range

Claims (7)

An inspection system for inspecting the degree of deterioration of the wheel for a transport vehicle having a plurality of wheels and traveling along a predetermined travel route,
A unique identification mark for each wheel, attached to each side surface of the plurality of wheels;
An imaging device that captures the wheels of the transport vehicle traveling along the travel route from the side of the travel route so that the entire image of the wheels is within the imaging range;
Based on the image data of the side surface of the wheel obtained by the imaging device, inspecting the degree of wear of the wheel, and in combination, an inspection unit for performing individual identification of the wheel that is the inspection target;
An inspection system comprising:   The inspection unit detects the outer diameter of the wheel by image processing on the image data, inspects the degree of wear of the wheel based on the detected value, and detects the identification mark from the image data. The inspection system according to claim 1, wherein individual identification of the wheel is performed.   The inspection system according to claim 1, wherein the identification mark includes a two-dimensional barcode.   The inspection system according to any one of claims 1 to 3, wherein the imaging device is installed at a predetermined stop position of the transport vehicle in the travel route. A transport control unit for controlling the operation of the transport vehicle;
Information communication between the transport control unit and the transport vehicle is performed by wireless communication,
The inspection system according to any one of claims 1 to 4, wherein information communication between the imaging device and the inspection unit is performed by wired communication. The identification mark is constituted by a combination of a first identification mark unique to each transport vehicle and a second identification mark indicating an installation position for each wheel in the transport vehicle,
The second identification marks are respectively attached to the side surfaces of all the wheels according to the installation positions of the wheels, and the first identification marks are provided for each of the wheels of the transport vehicle for each transport vehicle. The inspection system according to any one of claims 1 to 5, wherein the inspection system is attached to a side surface of some of the wheels. The photographing device is installed only on one of the two sides of the travel route;
A first optical path connecting the imaging device and the wheel on the side where the imaging device is installed;
A second optical path connecting the imaging device and the wheel on the side opposite to the side where the imaging device is installed, via a plurality of mirrors;
An optical path switching device provided at a branch portion between the first optical path and the second optical path,
The image data of each side surface of a pair of said wheel located in the both sides with respect to the advancing direction of the said conveyance vehicle is obtained simultaneously by the time division using the said optical path switching apparatus. Inspection system as described in.

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