JP2018129318A - Method for manufacturing light-emitting device - Google Patents

Method for manufacturing light-emitting device Download PDF

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JP2018129318A
JP2018129318A JP2017019242A JP2017019242A JP2018129318A JP 2018129318 A JP2018129318 A JP 2018129318A JP 2017019242 A JP2017019242 A JP 2017019242A JP 2017019242 A JP2017019242 A JP 2017019242A JP 2018129318 A JP2018129318 A JP 2018129318A
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emitting device
light emitting
elastic sheet
assembly
surface groove
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JP6866664B2 (en
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元清 白浜
Motokiyo Shirahama
元清 白浜
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Nichia Chemical Industries Ltd
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Nichia Chemical Industries Ltd
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Abstract

PROBLEM TO BE SOLVED: To provide a method for manufacturing a light-emitting device, which is arranged so that a ceramic substrate is hardly damaged.SOLUTION: A method for manufacturing a light-emitting device comprises the steps of: preparing a light-emitting device assembly including a ceramic board assembly having an upper-face groove portion in an upper face and a lower-face groove portion in a lower face; holding the light-emitting device assembly between a first elastic sheet disposed on an upper face side of the ceramic board assembly, and a second elastic sheet disposed on a lower face side of the ceramic board assembly; and pressing the first elastic sheet from above by a first roller and the second elastic sheet from below by a second roller disposed just below the first roller, thereby stretching the first and second elastic sheets laterally and dividing the light-emitting device assembly at positions including the upper-face groove portion and lower-face groove portion of the ceramic board assembly.SELECTED DRAWING: Figure 3B

Description

本発明は、発光装置の製造方法に関する。   The present invention relates to a method for manufacturing a light emitting device.

半導体発光素子(以下、「発光素子」ともいう)を用いた発光装置として、セラミック基板を用いた発光装置が知られている。セラミック基板を用いた発光装置は、その製造工程において、発光装置複数個分の集合基板として取り扱われている。そして、最終的に分割されることで個々の発光装置とされる。分割方法としては、例えば、セラミック基板の上下にコンベアベルトを配置して、上下コンベアベルト対接面を段差状に配設し、この段差を利用して分割する方法が知られている(例えば、特許文献1)   As a light-emitting device using a semiconductor light-emitting element (hereinafter also referred to as “light-emitting element”), a light-emitting device using a ceramic substrate is known. A light emitting device using a ceramic substrate is handled as an aggregate substrate for a plurality of light emitting devices in the manufacturing process. And finally, it is divided into individual light emitting devices. As a dividing method, for example, a method is known in which conveyor belts are arranged above and below a ceramic substrate, and upper and lower conveyor belt contact surfaces are arranged in a stepped shape and divided using this step (for example, Patent Document 1)

実開昭62−185009号公報Japanese Utility Model Publication No. 62-185009

特許文献1に記載された方法では、セラミック基板が上下方向に傾斜するようして分割される。そのため、隣接するセラミック基板同士が接触し易い。そのため、セラミック基板の一部が欠けるなど損傷が発生し易い。   In the method described in Patent Document 1, the ceramic substrate is divided so as to be inclined in the vertical direction. Therefore, adjacent ceramic substrates are easy to contact. For this reason, damage such as a part of the ceramic substrate is easily generated.

本発明の実施形態に係る発光装置の製造方法は、以下の構成を含む。
上面に上面溝部を有し、下面に下面溝部を有するセラミック基板の集合体を備える発光装置の集合体を準備する工程と、セラミック基板の集合体の上面側に配置した第1弾性シートと、セラミック基板の集合体の下面側に配置した第2弾性シートで前記発光装置の集合体を挟持する工程と、第1弾性シートを上側から第1ローラーで押圧すると共に、第1ローラーの直下に配置される第2ローラーで第2弾性シートを下側から押圧することで、第1弾性シート及び第2弾性シートを横方向に伸身させ、セラミック基板の集合体の上面溝部及び下面溝部を含む位置で発光装置の集合体を分割する工程と、を備える発光装置の製造方法。
The manufacturing method of the light-emitting device which concerns on embodiment of this invention contains the following structures.
A step of preparing an assembly of a light emitting device including an assembly of ceramic substrates having an upper surface groove on the upper surface and a lower surface groove on the lower surface; a first elastic sheet disposed on the upper surface side of the ceramic substrate assembly; and a ceramic A step of sandwiching the assembly of the light emitting devices with a second elastic sheet disposed on the lower surface side of the assembly of substrates, a first elastic sheet is pressed from above with a first roller, and disposed immediately below the first roller. By pressing the second elastic sheet from the lower side with the second roller, the first elastic sheet and the second elastic sheet are stretched in the lateral direction, at a position including the upper surface groove portion and the lower surface groove portion of the ceramic substrate assembly. Dividing the aggregate of light emitting devices. A method of manufacturing a light emitting device.

以上により、セラミック基板が損傷しにくい発光装置の製造方法とすることができる。   Thus, a method for manufacturing a light-emitting device in which a ceramic substrate is hardly damaged can be obtained.

図1は、実施形態に係る発光装置の製造方法によって得られる発光装置の一例を占める概略上面図である。FIG. 1 is a schematic top view occupying an example of a light-emitting device obtained by the method for manufacturing a light-emitting device according to the embodiment. 図2Aは、実施形態に係る発光装置の製造方法を示す概略上面図である。FIG. 2A is a schematic top view illustrating the method for manufacturing the light emitting device according to the embodiment. 図2Bは、図2Aの2B−2B線における概略断面図である。2B is a schematic cross-sectional view taken along line 2B-2B in FIG. 2A. 図3Aは、実施形態に係る発光装置の製造方法を示す概略断面図である。FIG. 3A is a schematic cross-sectional view illustrating the method for manufacturing the light emitting device according to the embodiment. 図3Bは、実施形態に係る発光装置の製造方法を示す概略断面図である。FIG. 3B is a schematic cross-sectional view illustrating the method for manufacturing the light emitting device according to the embodiment.

本発明を実施するための形態を、以下に図面を参照しながら説明する。ただし、以下に示す形態は、本発明の技術思想を具体化するための発光装置の製造方法を例示するものであって、本発明は、発光装置の製造方法を以下に限定するものではない。   A mode for carrying out the present invention will be described below with reference to the drawings. However, the form shown below illustrates the manufacturing method of the light-emitting device for materializing the technical idea of this invention, and this invention does not limit the manufacturing method of a light-emitting device below.

また、本明細書は、特許請求の範囲に示される部材を、実施の形態の部材に特定するものでは決してない。特に、実施の形態に記載されている構成部品の寸法、材質、形状、その相対的配置等は、特定的な記載がない限りは、本発明の範囲をそれのみに限定する趣旨ではなく、単なる説明例にすぎない。尚、各図面が示す部材の大きさや位置関係等は、説明を明確にするため誇張していることがある。さらに以下の説明において、同一の名称、符号については同一もしくは同質の部材を示しており、詳細説明を適宜省略する。   Further, the present specification by no means specifies the member shown in the claims as the member of the embodiment. In particular, the dimensions, materials, shapes, relative arrangements, and the like of the components described in the embodiments are not intended to limit the scope of the present invention only to the extent that there is no specific description. It is just an example. It should be noted that the size and positional relationship of the members shown in each drawing may be exaggerated for clarity of explanation. Furthermore, in the following description, the same name and symbol indicate the same or the same members, and detailed description thereof will be omitted as appropriate.

図1は、本実施形態に係る発光装置の製造方法で得られる発光装置1の一例を示す概略上面図である。発光装置1は、凹部を備えたセラミック基板10を備える。セラミック基板10は、母材であるセラミック11と、セラミック11の上面及び下面に配置される導電部材12と、を備える。セラミック11の上面の導電部材12と下面の導電部材12とは、ビア等によって電気的に接続されている。   FIG. 1 is a schematic top view showing an example of a light emitting device 1 obtained by the method for manufacturing a light emitting device according to this embodiment. The light emitting device 1 includes a ceramic substrate 10 having a recess. The ceramic substrate 10 includes a ceramic 11 that is a base material, and conductive members 12 that are disposed on the upper and lower surfaces of the ceramic 11. The conductive member 12 on the upper surface of the ceramic 11 and the conductive member 12 on the lower surface are electrically connected by vias or the like.

セラミック基板10の凹部の底面には発光素子20が載置されている。発光素子20と導電部材12とは、ワイヤ30で電気的に接続されている。発光素子20とワイヤ30とを覆うように、凹部内には封止部材40が配置されている。このような発光装置1は、以下に示す製造方法によって得ることができる。   A light emitting element 20 is placed on the bottom surface of the recess of the ceramic substrate 10. The light emitting element 20 and the conductive member 12 are electrically connected by a wire 30. A sealing member 40 is disposed in the recess so as to cover the light emitting element 20 and the wire 30. Such a light emitting device 1 can be obtained by the manufacturing method shown below.

(発光装置の集合体を準備する工程)
図2Aは、実施形態に係る発光装置の集合体1Aを示す概略上面図であり、図2Bは、図2Aの2B−2B線における概略断面図である。尚、ここでは、便宜上、4つの発光装置を含む領域を拡大した概略上面図を示している。1つの発光装置の集合体1Aに含まれる発光装置の数はこれに限らないことは言うまでもない。
(Process for preparing an assembly of light emitting devices)
2A is a schematic top view showing an assembly 1A of the light emitting device according to the embodiment, and FIG. 2B is a schematic cross-sectional view taken along line 2B-2B of FIG. 2A. Here, for convenience, a schematic top view in which a region including four light emitting devices is enlarged is shown. It goes without saying that the number of light emitting devices included in one light emitting device assembly 1A is not limited thereto.

発光装置の集合体1Aは、セラミック基板の集合体10Aを備える。セラミック基板の集合体10Aは、全体に渡って平板状であり、上面110及び下面120を備えている。セラミック基板の集合体10Aは、セラミック11と、導電部材12と、を備えている。導電部材12は、セラミック11の上面及び下面に配置されており、ビア等で電気的に接続されている。セラミック基板の集合体10Aは、上面110側に発光素子20が載置された凹部13を備える。凹部13の底面には導電部材12が配置されている。発光素子20は、ワイヤ30によって導電部材12と電気的に接続されている。セラミック基板の集合体10Aの上面視形状は、例えば、四角形、長方形等であり、割れ・欠けの防止等のために、角は丸められている。セラミック基板の集合体10Aの大きさは、例えば100mm×60mm程度であり、これから約500個〜800個の発光装置が得られる。   The light emitting device assembly 1A includes a ceramic substrate assembly 10A. The aggregate 10A of ceramic substrates has a flat plate shape as a whole and includes an upper surface 110 and a lower surface 120. The ceramic substrate assembly 10 </ b> A includes a ceramic 11 and a conductive member 12. The conductive member 12 is disposed on the upper and lower surfaces of the ceramic 11 and is electrically connected by vias or the like. The ceramic substrate assembly 10A includes a recess 13 on the upper surface 110 side where the light emitting element 20 is placed. A conductive member 12 is disposed on the bottom surface of the recess 13. The light emitting element 20 is electrically connected to the conductive member 12 by a wire 30. The shape of the ceramic substrate assembly 10A viewed from above is, for example, a quadrangle, a rectangle, or the like, and the corners are rounded to prevent cracking and chipping. The size of the ceramic substrate aggregate 10A is, for example, about 100 mm × 60 mm, and about 500 to 800 light-emitting devices can be obtained therefrom.

セラミック基板の集合体10Aの厚みは、500μm〜1000μmであり、200μm〜500μmのセラミック層が1層又は2層以上積層されている。セラミックとしては、Al、AlN、SiC等、で導電部材としては、W、Cu等を用いることができる。また、銅で鵜部材の表面にAg、Al、Auなどのメッキを設けてもよい。 The thickness of the ceramic substrate assembly 10A is 500 μm to 1000 μm, and one or more ceramic layers of 200 μm to 500 μm are laminated. As ceramic, Al 2 O 3 , AlN, SiC, and the like can be used, and as the conductive member, W, Cu, and the like can be used. Moreover, you may provide plating, such as Ag, Al, Au, on the surface of a collar member with copper.

発光素子20は、半導体発光素子を用いることができる。発光素子20としては、青色、緑色、赤色などの可視光を発光する半導体発光素子を用いることができる。あるいは、紫外光を発する発光素子を用いてもよい。また、ツェナーダイオードなどの保護素子が載置されていてもよい。凹部13内には、発光素子等を被覆する封止部材40が配置されている。封止部材40は、透光性であり、例えば、シリコーン樹脂、エポキシ樹脂等が挙げられる。封止部材40は、1層又は2層以上の複数層としてもよく、目的や用途に応じては、そのいずれか、または全部に、拡散材や顔料、蛍光体等を混入させてもよい。   As the light emitting element 20, a semiconductor light emitting element can be used. As the light-emitting element 20, a semiconductor light-emitting element that emits visible light such as blue, green, and red can be used. Alternatively, a light emitting element that emits ultraviolet light may be used. Further, a protective element such as a Zener diode may be placed. A sealing member 40 that covers the light emitting element or the like is disposed in the recess 13. The sealing member 40 is translucent, and examples thereof include a silicone resin and an epoxy resin. The sealing member 40 may be a single layer or a plurality of layers of two or more layers, and a diffusing material, a pigment, a phosphor or the like may be mixed in any or all of them depending on the purpose and application.

セラミック基板の集合体10Aの上面110は、分割位置(分割予定位置)に上面溝部111を備える。同様に、セラミック基板の集合体10Aの下面120は、分割位置(分割予定位置)に下面溝部121を備える。上面溝部111は、上面視において凹部13を囲むように配置されている。尚、ここでは1つの凹部13を囲むように上面溝部111が配置されている。つまり、1つの発光装置が1つの凹部を備えるように、上面溝部111が備えられている。1つの発光装置が2以上の凹部を備えてもよく、その場合は、2以上の凹部13を囲む位置に上面溝部111を配置する。   The upper surface 110 of the ceramic substrate assembly 10A includes an upper surface groove portion 111 at a division position (division planned position). Similarly, the lower surface 120 of the ceramic substrate assembly 10 </ b> A includes a lower surface groove 121 at a division position (scheduled division position). The upper surface groove 111 is disposed so as to surround the recess 13 in a top view. In addition, the upper surface groove part 111 is arrange | positioned here so that the one recessed part 13 may be enclosed. That is, the upper surface groove portion 111 is provided so that one light emitting device includes one concave portion. One light-emitting device may include two or more recesses. In that case, the upper surface groove 111 is disposed at a position surrounding the two or more recesses 13.

上面溝部111の位置は、上面視において下面溝部121と重なる位置に配置されることが好ましい。上面溝部111の幅は、下面溝部121の幅の50%〜100%程度とすることができ、略同じであることが好ましい。また、上面溝部111の深さは、下面溝部121の深さの20%〜100%程度とすることができ、略同じであることが好ましい。上面溝部111の深さ及び下面溝部121の深さは、セラミックの厚みの10%〜70%程度とすることができる。上面溝部111と下面溝部121は、断面視がV字状、U字状等とすることができ、V字状が好ましい。   The position of the upper surface groove portion 111 is preferably arranged at a position overlapping the lower surface groove portion 121 in a top view. The width of the upper surface groove 111 can be about 50% to 100% of the width of the lower surface groove 121 and is preferably substantially the same. Moreover, the depth of the upper surface groove part 111 can be about 20% to 100% of the depth of the lower surface groove part 121, and is preferably substantially the same. The depth of the upper surface groove 111 and the depth of the lower surface groove 121 can be about 10% to 70% of the thickness of the ceramic. The upper surface groove portion 111 and the lower surface groove portion 121 can be V-shaped, U-shaped or the like in cross-sectional view, and are preferably V-shaped.

上面溝部111及び下面溝部121は、例えば、スクライバを用いて形成することができる。また、上面溝部111及び下面溝部121を備えたセラミック基板の集合体を購入してもよい。   The upper surface groove part 111 and the lower surface groove part 121 can be formed using a scriber, for example. Moreover, you may purchase the aggregate | assembly of the ceramic substrate provided with the upper surface groove part 111 and the lower surface groove part 121. FIG.

(弾性シートで発光装置の集合体を挟持する工程)
上述のように準備した発光装置の集合体1Aを、第1弾性シート51と第2弾性シート52とで挟持する。詳細には、図3Aに示すように、発光装置の集合体を構成するセラミック基板の集合体を、第1弾性シート51と第2弾性シート52とで挟持する。第1弾性シート51はセラミック基板の集合体10Aの上面110側に配置される。第2弾性シート52はセラミック基板の集合体10Aの下面120側に配置される。
(Process of sandwiching the assembly of light emitting devices with an elastic sheet)
The light emitting device assembly 1 </ b> A prepared as described above is sandwiched between the first elastic sheet 51 and the second elastic sheet 52. Specifically, as shown in FIG. 3A, a ceramic substrate assembly constituting an assembly of light emitting devices is sandwiched between a first elastic sheet 51 and a second elastic sheet 52. The first elastic sheet 51 is disposed on the upper surface 110 side of the ceramic substrate assembly 10A. The second elastic sheet 52 is disposed on the lower surface 120 side of the ceramic substrate assembly 10A.

第1弾性シート51は、セラミック基板の集合体10Aの上面110の面積よりも大きい面積であることが好ましい。第2弾性シート52は、セラミック基板の集合体10Aの下面120の面積よりも大きい面積であることが好ましい。第1弾性シート51及び第2弾性シート52は、例えば、弾性率が2GPa〜5GPaのシートを用いることができる。第1弾性シート51及び第2弾性シート52としては、例えば、アクリル、ゴム等を用いることができる。第1弾性シート51及び第2弾性シート52の厚みは、例えば、1mm〜20mmとすることができる。   The first elastic sheet 51 preferably has an area larger than the area of the upper surface 110 of the ceramic substrate assembly 10A. The second elastic sheet 52 preferably has an area larger than the area of the lower surface 120 of the ceramic substrate assembly 10A. As the first elastic sheet 51 and the second elastic sheet 52, for example, a sheet having an elastic modulus of 2 GPa to 5 GPa can be used. As the first elastic sheet 51 and the second elastic sheet 52, for example, acrylic, rubber, or the like can be used. The thickness of the 1st elastic sheet 51 and the 2nd elastic sheet 52 can be 1 mm-20 mm, for example.

(発光装置の集合体を分割する工程)
次に、ローラーを用いてセラミック基板の集合体10Aを押圧し、発光装置の集合体1Aを分割する。
(Step of dividing the assembly of light emitting devices)
Next, the ceramic substrate assembly 10A is pressed using a roller to divide the light emitting device assembly 1A.

図3Aに示すように、第1弾性シート51の上側に第1ローラー61を配置する。第1ローラー61を下方向に押圧しながら回転させて進行方向(図3Aでは右方向)に移動させる。   As shown in FIG. 3A, the first roller 61 is disposed on the upper side of the first elastic sheet 51. The first roller 61 is rotated while being pressed downward to move in the traveling direction (rightward in FIG. 3A).

同時に、第2弾性シート52の下側に第2ローラー62を配置する。第2ローラー62を上方向に押圧しながら回転させて進行方向(図3Aでは右方向)に移動させる。   At the same time, the second roller 62 is disposed below the second elastic sheet 52. The second roller 62 is rotated while being pressed upward and moved in the traveling direction (rightward in FIG. 3A).

尚、第1ローラー61と第2ローラー62を移動させずに同じ位置で回転させておき、第1弾性シート51及び第2弾性シート52で挟持した発光装置の集合体10Aを移動させてもよい。   The first roller 61 and the second roller 62 may be rotated at the same position without being moved, and the light emitting device assembly 10 </ b> A sandwiched between the first elastic sheet 51 and the second elastic sheet 52 may be moved. .

第1ローラー61及び第2ローラー62は、直径が同じローラーを用いるのが好ましい。また、発光装置の集合体1Aの上下において、第1ローラー61の回転軸の中心と、第2ローラー62の回転軸の中心とが、上面視において同じ位置に配置されることが好ましい。第1ローラー61及び第2ローラー62は、それぞれ同じ押圧力で発光装置の集合体1Aを押圧することが好ましい。   The first roller 61 and the second roller 62 are preferably rollers having the same diameter. Moreover, it is preferable that the center of the rotation axis of the first roller 61 and the center of the rotation axis of the second roller 62 are arranged at the same position in the top and bottom of the light emitting device assembly 1A. It is preferable that the 1st roller 61 and the 2nd roller 62 each press the aggregate | assembly 1A of a light-emitting device with the same pressing force.

図3Bに示すように、第1ローラー61及び第2ローラー62を回転させながら移動させて上面溝部111及び下面溝部121を上下方向から押圧し、セラミック基板の集合体10Aを割断する。このとき、第1弾性シート51及び第2弾性シート52は、第1ローラー61及び第2ローラー62によって上下方向から押圧されると共に、左右方向に伸ばされる。セラミック基板の集合体10Aは、第1弾性シート51及び第2弾性シート52が左右方向に伸ばされるのに伴って、左右方向に引っ張られる。このような横方向への力が作用することでセラミック基板の集合体10Aが割断される。割断の際に、セラミック基板の集合体10Aには、上下方向においては均等な力が作用しているため、割断されて得られた発光装置1同士の割断面が接触しにくい。そのため、セラミック基板10の割れや欠けなど損傷が生じにくい。   As shown in FIG. 3B, the first roller 61 and the second roller 62 are moved while being rotated to press the upper surface groove portion 111 and the lower surface groove portion 121 from above and below to cleave the aggregate 10A of ceramic substrates. At this time, the first elastic sheet 51 and the second elastic sheet 52 are pressed in the vertical direction by the first roller 61 and the second roller 62 and are extended in the horizontal direction. The aggregate 10A of ceramic substrates is pulled in the left-right direction as the first elastic sheet 51 and the second elastic sheet 52 are extended in the left-right direction. Such a lateral force acts to break the ceramic substrate aggregate 10A. At the time of cleaving, an equal force is acting on the ceramic substrate aggregate 10A in the vertical direction, so that the cleaved surfaces of the light emitting devices 1 obtained by cleaving are difficult to contact. Therefore, damage such as cracks or chipping of the ceramic substrate 10 is unlikely to occur.

本発明の発光装置は、照明用光源、各種インジケーター用光源、車載用光源、ディスプレイ用光源、液晶のバックライト用光源、センサー用光源、信号機、車載部品、看板用チャンネルレター等、種々の光源に使用することができる。   The light-emitting device of the present invention can be used for various light sources such as illumination light sources, various indicator light sources, in-vehicle light sources, display light sources, liquid crystal backlight light sources, sensor light sources, traffic lights, in-vehicle components, signboard channel letters, etc. Can be used.

1…発光装置
10…セラミック基板
11…セラミック
12…導電部材
13…凹部
20…発光素子
30…ワイヤ
40…封止部材
1A…発光装置の集合体
10A…セラミック基板の集合体
110…上面
111…上面溝部
120…下面
121…下面溝部
51…第1弾性シート
52…第2弾性シート
61…第1ローラー
62…第2ローラー
DESCRIPTION OF SYMBOLS 1 ... Light-emitting device 10 ... Ceramic substrate 11 ... Ceramic 12 ... Conductive member 13 ... Recessed part 20 ... Light emitting element 30 ... Wire 40 ... Sealing member 1A ... Assembly of light-emitting device 10A ... Assembly of ceramic substrate 110 ... Upper surface 111 ... Upper surface Groove 120 ... lower surface 121 ... lower surface groove 51 ... first elastic sheet 52 ... second elastic sheet 61 ... first roller 62 ... second roller

Claims (5)

上面に上面溝部を有し、下面に下面溝部を有するセラミック基板の集合体を備える発光装置の集合体を準備する工程と、
前記セラミック基板の集合体の上面側に配置した第1弾性シートと、前記セラミック基板の集合体の下面側に配置した第2弾性シートで前記発光装置の集合体を挟持する工程と、
前記第1弾性シートを上側から第1ローラーで押圧すると共に、前記第1ローラーの直下に配置される第2ローラーで前記第2弾性シートを下側から押圧することで、前記第1弾性シート及び前記第2弾性シートを横方向に伸身させ、前記セラミック基板の集合体の前記上面溝部及び前記下面溝部を含む位置で前記発光装置の集合体を分割する工程と、
を備える発光装置の製造方法。
Preparing an assembly of light emitting devices comprising an assembly of ceramic substrates having an upper surface groove on the upper surface and a lower surface groove on the lower surface;
Sandwiching the assembly of light emitting devices with a first elastic sheet disposed on the upper surface side of the assembly of ceramic substrates and a second elastic sheet disposed on the lower surface side of the assembly of ceramic substrates;
While pressing the first elastic sheet from above with a first roller, and pressing the second elastic sheet from below with a second roller disposed directly below the first roller, the first elastic sheet and Extending the second elastic sheet in a lateral direction, and dividing the assembly of light emitting devices at a position including the upper surface groove portion and the lower surface groove portion of the ceramic substrate assembly;
A method for manufacturing a light emitting device.
前記上面溝部と前記下面溝部は、上面視において重なる位置に配置されている請求項1記載の発光装置の製造方法。   The method for manufacturing the light emitting device according to claim 1, wherein the upper surface groove portion and the lower surface groove portion are arranged at positions overlapping each other when viewed from above. 前記上面溝部の幅は、前記下面溝部の幅の50%〜100%程度である請求項1又は請求項2記載の発光装置の製造方法。   The method for manufacturing a light emitting device according to claim 1, wherein a width of the upper surface groove is about 50% to 100% of a width of the lower surface groove. 前記上面溝部の深さは、前記下面溝部の深さの20%〜100%程度である請求項1〜請求項3のいずれか1項に記載の発光装置の製造方法。   4. The method for manufacturing a light emitting device according to claim 1, wherein a depth of the upper surface groove is about 20% to 100% of a depth of the lower surface groove. 5. 前記上面溝部及び前記下面溝部は、断面視がV字状である請求項1〜請求項4のいずれか1項に記載の発光装置の製造方法。   The method for manufacturing a light emitting device according to any one of claims 1 to 4, wherein the upper surface groove portion and the lower surface groove portion are V-shaped in cross-sectional view.
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