JP2018125546A5

JP2018125546A5 -

Info

Publication number: JP2018125546A5
Application number: JP2018051079A
Authority: JP
Filing date: 2018-03-19
Publication date: 2018-11-15
Anticipated expiration: 2032-06-25

Claims

An oxide containing Ba, Ca, Ti, and Zr;
And Mn,
A piezoelectric material containing
X, which is the molar ratio of Ca to the sum of Ba and Ca, is 0.02 ≦ x ≦ 0.30,
Y, which is the molar ratio of Zr to the sum of Ti and Zr, is 0.020 ≦ y ≦ 0.095, and y ≦ x,
A which is the molar ratio of the sum of Ba and Ca to the sum of Ti and Zr is 1.00 ≦ a ≦ 1.01;
The Mn content with respect to 100 parts by weight of the oxide is 0.02 parts by weight or more and 0.40 parts by weight or less in terms of metal,
The average equivalent circle diameter of crystal grains constituting the piezoelectric material is 1 μm or more and 10.8 μm or less, the relative density of the piezoelectric material is 91.8% or more and 100% or less, and the piezoelectric constant d ₃₃ is 110 pC / N or more. Piezoelectric material.

The piezoelectric material according to claim 1, wherein the oxide has a perovskite structure.

The oxide is
The following general formula (1):
Formula _{_{_{_{(1) (Ba 1-x}}}} Ca x) a (Ti 1-y Zr y) O 3 (1.00 ≦ a ≦ 1.01,0.02 ≦ x ≦ 0.30,0.020 ≦ y The piezoelectric material according to claim 1, wherein ≦ 0.095 and y ≦ x).

4. The piezoelectric material according to claim 1, wherein an average equivalent circle diameter of crystal grains constituting the piezoelectric material is 1 μm or more and 10 μm or less. 5.

5. The piezoelectric material according to claim 1, wherein a relative density of the piezoelectric material is 91.8% or more and 98.7% or less.

The piezoelectric material according to claim 1, wherein a relative density of the piezoelectric material is 93% or more and 98.7% or less.

In the piezoelectric material, x and y are in a range of 0.125 ≦ x ≦ 0.175 and 0.055 ≦ y ≦ 0.09, respectively, and the Mn content is a metal with respect to 100 parts by weight of the oxide. It is 0.02 weight part or more and 0.10 weight part or less in conversion, The piezoelectric material as described in any one of the Claims 1 thru | or 6 characterized by the above-mentioned.

X and y in the piezoelectric material are in a range of 0.155 ≦ x ≦ 0.300 and 0.041 ≦ y ≦ 0.069, respectively, and the Mn content is a metal with respect to 100 parts by weight of the oxide. It is 0.12 weight part or more and 0.40 weight part or less in conversion, The piezoelectric material as described in any one of the Claims 1 thru | or 6 characterized by the above-mentioned.

The total of Li, Na, Mg, and Al contained in the piezoelectric material is 0.5 parts by weight or less in terms of metal with respect to 100 parts by weight of the piezoelectric material. The piezoelectric material according to one item.

A piezoelectric element having at least an electrode and a piezoelectric material portion, wherein the piezoelectric material portion contains the piezoelectric material according to any one of claims 1 to 9.

The piezoelectric element according to claim 10, wherein the electrodes and the piezoelectric material portions are alternately stacked.

A liquid discharge head comprising: a liquid chamber having a vibrating portion in which the piezoelectric element according to claim 10 or 11 is disposed; and a discharge port communicating with the liquid chamber.

A liquid ejecting apparatus comprising the object placing portion and the liquid ejecting head according to claim 12.

An ultrasonic motor comprising: a vibrating body provided with the piezoelectric element according to claim 10; and a moving body that contacts the vibrating body.

An optical apparatus comprising the ultrasonic motor according to claim 14 in a drive unit.

A piezoelectric acoustic component comprising the piezoelectric element according to claim 10.

The electronic device which has arrange | positioned the piezoelectric element of Claim 10 or 11.

An oxide having a perovskite structure containing Ba, Ca, Ti, and Zr;
And Mn,
A piezoelectric material containing
X, which is the molar ratio of Ca to the sum of Ba and Ca, is 0.02 ≦ x ≦ 0.30,
Y, which is the molar ratio of Zr to the sum of Ti and Zr, is 0.020 ≦ y ≦ 0.095, and y ≦ x,
The Mn content with respect to 100 parts by weight of the oxide is 0.02 to 0.40 parts by weight in terms of metal, and the relative density of the piezoelectric material is 91.8% to 100%, a piezoelectric material the piezoelectric constant _{d 33} is 110pC / N or more.

The oxide is
The following general formula (1):
General formula (1) (Ba _１−ｘ1-x Ca _ｘx ) _ａa (Ti _１−ｙ1-y Zr _ｙy ) O _３3 The piezoelectric material according to claim 18, represented by (1.00 ≦ a ≦ 1.01, 0.02 ≦ x ≦ 0.30, 0.020 ≦ y ≦ 0.095, and y ≦ x).

The piezoelectric material according to claim 18 or 19 relative density of the piezoelectric material, characterized in that at 98.7% or less than 91.8%.

The piezoelectric material according to any one of claims 18 to 20, wherein an average equivalent circle diameter of crystal grains constituting the piezoelectric material is 1 µm or more and 10.8 µm or less.

The x and y in the piezoelectric material are in a range of 0.125 ≦ x ≦ 0.175 and 0.055 ≦ y ≦ 0.09, respectively. Piezoelectric material.

The piezoelectric material according to claim 22, wherein the Mn content is 0.02 parts by weight or more and 0.10 parts by weight or less in terms of metal with respect to 100 parts by weight of the oxide.

The x and y in the piezoelectric material are in a range of 0.155 ≦ x ≦ 0.300 and 0.041 ≦ y ≦ 0.069, respectively. Piezoelectric material.

The piezoelectric material according to claim 24, wherein the content of Mn is 0.12 parts by weight or more and 0.40 parts by weight or less in terms of metal with respect to 100 parts by weight of the oxide.

26. The total amount of Li, Na, Mg, and Al in the piezoelectric material is 0.5 parts by weight or less in terms of metal with respect to 100 parts by weight of the piezoelectric material. The piezoelectric material according to item.

27. A piezoelectric element having at least an electrode and a piezoelectric material portion, wherein the piezoelectric material portion contains the piezoelectric material according to any one of claims 18 to 26 .

28. The piezoelectric element according to claim 27 , wherein the electrodes and the piezoelectric material portions are alternately stacked.

29. A liquid discharge head comprising: a liquid chamber having a vibration part in which the piezoelectric element according to claim 27 or 28 is disposed; and a discharge port communicating with the liquid chamber.

30. A liquid ejection apparatus comprising the object mounting portion and the liquid ejection head according to claim 29.

An ultrasonic motor comprising: a vibrating body provided with the piezoelectric element according to claim 27 or 28; and a moving body that contacts the vibrating body.

An optical apparatus comprising the ultrasonic motor according to claim 31 in a drive unit.

A piezoelectric acoustic component comprising the piezoelectric element according to claim 27 or 28.

An electronic device provided with the piezoelectric element according to claim 27 or 28 .