JP2018123041A - Method and apparatus for manufacturing glass tube - Google Patents

Method and apparatus for manufacturing glass tube Download PDF

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JP2018123041A
JP2018123041A JP2017018499A JP2017018499A JP2018123041A JP 2018123041 A JP2018123041 A JP 2018123041A JP 2017018499 A JP2017018499 A JP 2017018499A JP 2017018499 A JP2017018499 A JP 2017018499A JP 2018123041 A JP2018123041 A JP 2018123041A
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glass tube
modified region
continuously
glass
modified
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和田　正紀
Masanori Wada
正紀 和田
井上　雅登
Masato Inoue
雅登 井上
大祐 河口
Daisuke Kawaguchi
大祐 河口
佳祐 荒木
Keisuke Araki
佳祐 荒木
高橋　徹
Toru Takahashi
徹 高橋
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Hamamatsu Photonics KK
Nippon Electric Glass Co Ltd
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Hamamatsu Photonics KK
Nippon Electric Glass Co Ltd
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  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a method and apparatus for manufacturing a glass tube, capable of accurately cutting the glass tube continuously fed by use of a laser beam.SOLUTION: An apparatus 1 for manufacturing a glass tube comprises: a glass tube feeding part 2 for continuously feeding a glass tube 10; and a glass tube cut part 3 for cutting the glass tube 10 at a place having a modified region formed in the glass tube 10 by irradiating the glass tube 10 continuously fed with a laser-beam L. In the glass tube cut part 3, the modified region is exposed at each of first and second positions at which a straight line along a direction intersecting a direction A of feeding the glass tube 10 intersects the outer surface of the glass tube 10, and in the side wall of the glass tube 10, the laser-beam L is emitted so as to connect the modified regions or cracks occurring from the modified regions over between the first and second positions.SELECTED DRAWING: Figure 1

Description

本発明は、ガラス管製造方法及びガラス管製造装置に関する。   The present invention relates to a glass tube manufacturing method and a glass tube manufacturing apparatus.

特許文献１には、ホウケイ酸ガラス製のアンプルの首にレーザ光を照射することで、周方向に沿って所定間隔で並ぶ複数の破断点をアンプルの首に形成する方法が記載されている。   Patent Document 1 describes a method of forming a plurality of break points arranged at predetermined intervals along the circumferential direction on the neck of the ampoule by irradiating the neck of the ampoule made of borosilicate glass with laser light.

特開平１１−７１１２４号公報JP-A-11-71124

しかしながら、連続的に送り出されるガラス管を所定長ごとに切断するような場合、特許文献１に記載の方法のように、周方向に沿って所定間隔で並ぶ複数の破断点を形成することは困難である。   However, when continuously cutting glass tubes that are fed out at predetermined lengths, it is difficult to form a plurality of break points arranged at predetermined intervals along the circumferential direction as in the method described in Patent Document 1. It is.

そこで、本発明は、連続的に送り出されるガラス管をレーザ光の利用によって精度良く切断することができるガラス管製造方法及びガラス管製造装置を提供することを目的とする。   Then, an object of this invention is to provide the glass tube manufacturing method and glass tube manufacturing apparatus which can cut | disconnect the glass tube sent out continuously with precision using a laser beam.

本発明のガラス管製造方法は、ガラス管を連続的に送り出す第１ステップと、連続的に送り出されるガラス管にレーザ光を照射することでガラス管に改質領域を形成し、改質領域が形成された箇所でガラス管を切断する第２ステップと、を備え、第２ステップでは、ガラス管の送出し方向と交差する方向に沿った直線がガラス管の外面と交わる第１位置及び第２位置のそれぞれにおいて改質領域が露出し、且つガラス管の側壁内において第１位置と第２位置との間に渡って改質領域又は改質領域から生じた亀裂が繋がるように、レーザ光を照射する。   In the glass tube manufacturing method of the present invention, a modified region is formed in the glass tube by first irradiating the glass tube continuously with the first step, and irradiating the continuously irradiated glass tube with laser light. A second step of cutting the glass tube at the formed place, and in the second step, a first position and a second position where a straight line along a direction intersecting the feeding direction of the glass tube intersects the outer surface of the glass tube The laser beam is irradiated so that the modified region is exposed at each of the positions and a crack generated from the modified region or the modified region is connected between the first position and the second position in the side wall of the glass tube. Irradiate.

このガラス管製造方法では、連続的に送り出されるガラス管にレーザ光を照射することで、ガラス管の送出し方向と交差する方向に沿った直線がガラス管の外面と交わる第１位置及び第２位置のそれぞれにおいて改質領域を露出させ、且つガラス管の側壁内において第１位置と第２位置との間に渡って改質領域又は改質領域から生じた亀裂を繋げる。これにより、連続的に送り出されるガラス管を、改質領域を形成した箇所で精度良く切断することができる。   In this glass tube manufacturing method, the first position and the second position where the straight line along the direction intersecting with the feeding direction of the glass tube intersects the outer surface of the glass tube by irradiating the continuously fed glass tube with laser light. The modified region is exposed at each of the positions, and a crack generated from the modified region or the modified region is connected between the first position and the second position in the side wall of the glass tube. Thereby, the glass tube sent out continuously can be cut | disconnected with a sufficient precision in the location in which the modified area | region was formed.

第１ステップでは、管引き成形によってガラス管を連続的に成形しつつ送り出してもよい。これにより、ガラス管の成形及びガラス管の切断を効率良く実施することができる。   In the first step, the glass tube may be sent out while being continuously formed by tube drawing. Thereby, the shaping | molding of a glass tube and the cutting | disconnection of a glass tube can be implemented efficiently.

第２ステップでは、複数の改質領域が互いに離間し、且つ複数の改質領域のそれぞれから生じた亀裂が繋がるように、レーザ光を照射してもよい。これにより、連続的に送り出されるガラス管をより精度良く切断することができる。   In the second step, laser light may be irradiated so that the plurality of modified regions are separated from each other and cracks generated from each of the plurality of modified regions are connected. Thereby, the glass tube sent out continuously can be cut | disconnected more accurately.

第２ステップでは、改質領域から生じた亀裂が第１位置と第２位置との間に渡ってガラス管の外面に至るように、レーザ光を照射してもよい。これにより、連続的に送り出されるガラス管をより精度良く切断することができる。   In the second step, laser light may be irradiated so that a crack generated from the modified region reaches the outer surface of the glass tube between the first position and the second position. Thereby, the glass tube sent out continuously can be cut | disconnected more accurately.

第２ステップでは、ガラス管の内面に比べガラス管の外面に近い領域に改質領域が位置するように、レーザ光を照射してもよい。これにより、連続的に送り出されるガラス管をより精度良く切断することができる。   In the second step, the laser beam may be irradiated so that the modified region is located in a region closer to the outer surface of the glass tube than the inner surface of the glass tube. Thereby, the glass tube sent out continuously can be cut | disconnected more accurately.

本発明のガラス管製造装置は、ガラス管を連続的に送り出すガラス管送出部と、連続的に送り出されるガラス管にレーザ光を照射することでガラス管に改質領域を形成し、改質領域が形成された箇所でガラス管を切断するガラス管切断部と、を備え、ガラス管切断部は、ガラス管の送出し方向と交差する方向に沿った直線がガラス管の外面と交わる第１位置及び第２位置のそれぞれにおいて改質領域が露出し、且つガラス管の側壁内において第１位置と第２位置との間に渡って改質領域又は改質領域から生じた亀裂が繋がるように、レーザ光を照射する。   The glass tube manufacturing apparatus of the present invention forms a modified region in a glass tube by irradiating a glass tube with a glass tube sending unit that continuously sends out the glass tube and a laser beam that is continuously sent out, and the modified region A glass tube cutting part that cuts the glass tube at a place where the glass tube is formed, and the glass tube cutting part is a first position where a straight line along a direction intersecting the feeding direction of the glass tube intersects with the outer surface of the glass tube And the modified region is exposed at each of the second positions, and a crack generated from the modified region or the modified region is connected between the first position and the second position in the side wall of the glass tube. Irradiate with laser light.

このガラス管製造装置では、上記ガラス管製造方法と同様の理由により、連続的に送り出されるガラス管を、改質領域を形成した箇所で精度良く切断することができる。   In this glass tube manufacturing apparatus, for the same reason as the above glass tube manufacturing method, the continuously fed glass tube can be accurately cut at the location where the modified region is formed.

ガラス管送出部は、管引き成形によってガラス管を連続的に成形しつつ送り出してもよい。これにより、ガラス管の成形及びガラス管の切断を効率良く実施することができる。   The glass tube delivery section may send out the glass tube while continuously forming the glass tube by tube drawing. Thereby, the shaping | molding of a glass tube and the cutting | disconnection of a glass tube can be implemented efficiently.

本発明によれば、連続的に送り出されるガラス管をレーザ光の利用によって精度良く切断することができるガラス管製造方法及びガラス管製造装置を提供することが可能となる。   ADVANTAGE OF THE INVENTION According to this invention, it becomes possible to provide the glass tube manufacturing method and glass tube manufacturing apparatus which can cut | disconnect the glass tube sent out continuously with precision using a laser beam.

一実施形態のガラス管製造装置の構成図である。It is a block diagram of the glass tube manufacturing apparatus of one Embodiment. 図１のガラス管製造装置のガラス切断部の構成図である。It is a block diagram of the glass cutting part of the glass tube manufacturing apparatus of FIG.

以下、本発明の実施形態について、図面を参照して詳細に説明する。なお、各図において同一又は相当部分には同一符号を付し、重複する説明を省略する。   Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. In addition, in each figure, the same code | symbol is attached | subjected to the same or an equivalent part, and the overlapping description is abbreviate | omitted.

図１に示されるガラス管製造装置１は、スリーブが用いられたダンナー方式の管引き装置である。図１に示されるように、ガラス管製造装置１は、ガラス溶融炉２１と、スリーブ２２と、スリーブ駆動装置２３と、マッフル炉２４と、走行路２５と、複数の搬送ローラ２６と、管引き機２７と、レーザ加工機３１と、応力印加機構３２と、搬送コンベア３３と、を備えている。ガラス管製造装置１では、ガラス溶融炉２１、スリーブ２２、スリーブ駆動装置２３、マッフル炉２４、走行路２５、複数の搬送ローラ２６、及び管引き機２７によって、ガラス管送出部２が構成されており、レーザ加工機３１、応力印加機構３２、及び搬送コンベア３３によって、ガラス管切断部３が構成されている。   A glass tube manufacturing apparatus 1 shown in FIG. 1 is a Danner type tube drawing apparatus using a sleeve. As shown in FIG. 1, the glass tube manufacturing apparatus 1 includes a glass melting furnace 21, a sleeve 22, a sleeve driving device 23, a muffle furnace 24, a traveling path 25, a plurality of conveying rollers 26, and a tube drawing. Machine 27, laser processing machine 31, stress application mechanism 32, and transfer conveyor 33. In the glass tube manufacturing apparatus 1, a glass tube delivery unit 2 is configured by a glass melting furnace 21, a sleeve 22, a sleeve driving device 23, a muffle furnace 24, a traveling path 25, a plurality of transport rollers 26, and a tube drawing machine 27. The glass tube cutting unit 3 is configured by the laser processing machine 31, the stress applying mechanism 32, and the transfer conveyor 33.

ガラス溶融炉２１は、ガラス原料を溶融させる。スリーブ２２は、マッフル炉２４内に配置されている。スリーブ２２は、耐火物によって円筒状に形成されている。スリーブ２２の先端部２２ａは、先端側ほど縮径するテーパ状に形成されている。スリーブ２２は、基端部２２ｂよりも先端部２２ａが低くなるように傾斜している。スリーブ２２内には、基端部２２ｂ側から、スリーブ駆動装置２３のシャフト２３ａが挿入されている。シャフト２３ａは、基端部２２ｂと先端部２２ａとの間に渡ってスリーブ２２内に挿入されており、その状態でスリーブ２２と固定されている。これにより、スリーブ駆動装置２３は、マッフル炉２４内において、スリーブ２２を回転させることができる。   The glass melting furnace 21 melts the glass raw material. The sleeve 22 is disposed in the muffle furnace 24. The sleeve 22 is formed in a cylindrical shape by a refractory material. The distal end portion 22a of the sleeve 22 is formed in a tapered shape with a diameter decreasing toward the distal end side. The sleeve 22 is inclined so that the distal end portion 22a is lower than the proximal end portion 22b. A shaft 23a of a sleeve driving device 23 is inserted into the sleeve 22 from the base end 22b side. The shaft 23a is inserted into the sleeve 22 between the proximal end portion 22b and the distal end portion 22a, and is fixed to the sleeve 22 in this state. Thereby, the sleeve drive device 23 can rotate the sleeve 22 in the muffle furnace 24.

マッフル炉２４には、溶融ガラス供給口２４ａ及びガラス管排出口２４ｂが設けられている。溶融ガラス供給口２４ａは、スリーブ２２の基端部２２ｂの直上に配置されている。ガラス溶融炉２１内の溶融ガラスは、溶融ガラス供給口２４ａを介して、スリーブ２２の基端部２２ｂに連続的に供給される。このとき、スリーブ駆動装置２３によってスリーブ２２が回転させられ、シャフト２３ａに形成された孔からブローエアーが噴射されることで、供給された溶融ガラスが円筒状のガラス管１０に成形され、円筒状のガラス管１０がスリーブ２２の先端部２２ａから連続的に供給される。ガラス管排出口２４ｂは、スリーブ２２の先端部２２ａと対向する位置に配置されている。スリーブ２２で成形されたガラス管１０は、ガラス管排出口２４ｂを介して、マッフル炉２４外に連続的に供給される。   The muffle furnace 24 is provided with a molten glass supply port 24a and a glass tube discharge port 24b. The molten glass supply port 24 a is disposed immediately above the base end portion 22 b of the sleeve 22. The molten glass in the glass melting furnace 21 is continuously supplied to the base end portion 22b of the sleeve 22 through the molten glass supply port 24a. At this time, the sleeve 22 is rotated by the sleeve driving device 23, and blown air is injected from the hole formed in the shaft 23a, whereby the supplied molten glass is formed into the cylindrical glass tube 10 and is cylindrical. The glass tube 10 is continuously supplied from the distal end portion 22 a of the sleeve 22. The glass tube discharge port 24 b is disposed at a position facing the distal end portion 22 a of the sleeve 22. The glass tube 10 formed by the sleeve 22 is continuously supplied to the outside of the muffle furnace 24 through the glass tube discharge port 24b.

走行路２５は、箱状のカバー２５ａによって覆われている。マッフル炉２４外に連続的に供給されるガラス管１０は、走行路２５を連続的に走行する。複数の搬送ローラ２６は、走行路２５内、及び走行路２５の下流側（ガラス管１０の走行方向における下流側）において、水平方向に沿って所定間隔ごとに配置されている。マッフル炉２４外に連続的に供給されるガラス管１０は、複数の搬送ローラ２６によって、下側から支持されつつ管引き機２７に向かって連続的に搬送される。管引き機２７は、一対の無端ベルトユニット２７ａによって、ガラス管１０を挟みつつガラス管１０を一定速度でけん引する。一定速度でけん引されるガラス管１０は、レーザ加工機３１に向かって連続的に送り出される。以下、管引き機２７によってガラス管１０が連続的に送ら出される方向を送出し方向Ａという。   The traveling path 25 is covered with a box-shaped cover 25a. The glass tube 10 continuously supplied to the outside of the muffle furnace 24 travels continuously on the travel path 25. The plurality of transport rollers 26 are arranged at predetermined intervals along the horizontal direction in the travel path 25 and on the downstream side of the travel path 25 (downstream side in the travel direction of the glass tube 10). The glass tube 10 continuously supplied to the outside of the muffle furnace 24 is continuously conveyed toward the tube drawing machine 27 while being supported from below by a plurality of conveying rollers 26. The tube drawing machine 27 pulls the glass tube 10 at a constant speed while sandwiching the glass tube 10 by a pair of endless belt units 27a. The glass tube 10 towed at a constant speed is continuously sent out toward the laser processing machine 31. Hereinafter, the direction in which the glass tube 10 is continuously sent out by the tube drawing machine 27 is referred to as a sending direction A.

以上のように、ガラス溶融炉２１、スリーブ２２、スリーブ駆動装置２３、マッフル炉２４、走行路２５、複数の搬送ローラ２６、及び管引き機２７によって構成されたガラス管送出部２は、管引き成形によってガラス管１０を連続的に成形しつつ送り出す部分である。つまり、ガラス管送出部２では、管引き成形によってガラス管１０を連続的に成形しつつ送り出す第１ステップが実施される。   As described above, the glass tube delivery section 2 constituted by the glass melting furnace 21, the sleeve 22, the sleeve driving device 23, the muffle furnace 24, the traveling path 25, the plurality of conveying rollers 26, and the tube drawing machine 27 is provided with a tube drawing unit. This is a portion that is fed out while continuously forming the glass tube 10 by molding. That is, in the glass tube delivery part 2, the 1st step which sends out while forming the glass tube 10 continuously by tube drawing is implemented.

レーザ加工機３１は、管引き機２７によって連続的に送り出されるガラス管１０にレーザ光Ｌを照射することでガラス管１０に改質領域を形成する。応力印加機構３２は、レーザ加工機３１の下流側（ガラス管１０の送出し方向Ａにおける下流側）において、管引き機２７によって連続的に送り出されるガラス管１０を、改質領域が形成された箇所で切断する。応力印加機構３２は、改質領域が形成された箇所に、例えばナイフエッジで衝撃を与えることで、ガラス管１０を切断する。搬送コンベア３３は、切断されたガラス管１０を次工程に搬送する。一例として、ガラス管１０の直径は、数ｍｍ〜十数ｍｍであり、ガラス管１０の肉厚は、数ｍｍ程度である。ガラス管１０の色は、無色透明、茶色透明等である。切断されたガラス管１０は、理化学機器（試験管、光電子増倍管）、医薬容器（アンプル、バイアル）等に用いられる。   The laser processing machine 31 forms a modified region in the glass tube 10 by irradiating the glass tube 10 continuously sent out by the tube drawing machine 27 with the laser light L. The stress application mechanism 32 has a modified region formed on the glass tube 10 continuously fed by the tube drawing machine 27 on the downstream side of the laser processing machine 31 (downstream side in the feeding direction A of the glass tube 10). Cut at a point. The stress application mechanism 32 cuts the glass tube 10 by applying an impact to the portion where the modified region is formed, for example, with a knife edge. The conveyor 33 conveys the cut glass tube 10 to the next process. As an example, the diameter of the glass tube 10 is several mm to several tens of mm, and the thickness of the glass tube 10 is about several mm. The color of the glass tube 10 is colorless and transparent, brown and transparent. The cut glass tube 10 is used for physics and chemistry instruments (test tubes, photomultiplier tubes), pharmaceutical containers (ampoules, vials) and the like.

以上のように、レーザ加工機３１、応力印加機構３２、及び搬送コンベア３３によって構成されたガラス管切断部３は、連続的に送り出されるガラス管１０にレーザ光Ｌを照射することでガラス管１０に改質領域を形成し、改質領域が形成された箇所でガラス管１０を切断する。つまり、ガラス管切断部３では、連続的に送り出されるガラス管１０にレーザ光Ｌを照射することでガラス管１０に改質領域を形成し、改質領域が形成された箇所でガラス管１０を切断する第２ステップが実施される。   As described above, the glass tube cutting unit 3 constituted by the laser processing machine 31, the stress applying mechanism 32, and the transfer conveyor 33 irradiates the glass tube 10 that is continuously sent out with the laser light L, thereby the glass tube 10. Then, the modified region is formed, and the glass tube 10 is cut at the place where the modified region is formed. That is, in the glass tube cutting part 3, a modified region is formed in the glass tube 10 by irradiating the glass tube 10 sent out continuously with the laser beam L, and the glass tube 10 is formed at the place where the modified region is formed. A second step of cutting is performed.

上述したレーザ加工機３１について、より詳細に説明する。図２に示されるように、レーザ加工機３１は、支持台３４と、レーザヘッド３５と、を有している。支持台３４の表面３４ａには、一対のガイド部材３４ｂが設けられている。一対のガイド部材３４ｂは、送出し方向Ａに沿って延在している。これにより、ガラス管１０は、支持台３４の表面３４ａを滑るように、送出し方向Ａに沿って安定して送られる。レーザヘッド３５は、ガラス管１０の送出し方向Ａと交差する（例えば、直交する）方向に沿った直線Ｂ上をレーザ光Ｌの集光点Ｐが移動するように、動作する。実際には、ガラス管１０が送出し方向Ａに沿って送られているから、ガラス管１０が送り出される速度を加味して、所望の直線Ｂ上をレーザ光Ｌの集光点Ｐが移動するように、レーザヘッド３５を動作させる。   The laser processing machine 31 mentioned above is demonstrated in detail. As shown in FIG. 2, the laser processing machine 31 includes a support base 34 and a laser head 35. A pair of guide members 34 b are provided on the surface 34 a of the support base 34. The pair of guide members 34b extends along the delivery direction A. Thereby, the glass tube 10 is stably sent along the sending direction A so as to slide on the surface 34 a of the support base 34. The laser head 35 operates so that the condensing point P of the laser light L moves on a straight line B along a direction intersecting (for example, orthogonal to) the sending direction A of the glass tube 10. Actually, since the glass tube 10 is sent in the sending direction A, the condensing point P of the laser light L moves on the desired straight line B in consideration of the speed at which the glass tube 10 is sent. Thus, the laser head 35 is operated.

レーザ光Ｌとしては、ガラス管１０の側壁１１に対して透過性を有するものが用いられる。レーザ光Ｌの照射条件は、ガラス管１０の側壁１１内における集光点Ｐ近傍にて吸収現象が生じるように調整される。これにより、ガラス管１０の側壁１１内における集光点Ｐ近傍に、改質領域５が形成される。   As the laser beam L, one having transparency to the side wall 11 of the glass tube 10 is used. The irradiation condition of the laser beam L is adjusted so that an absorption phenomenon occurs in the vicinity of the condensing point P in the side wall 11 of the glass tube 10. Thereby, the modified region 5 is formed in the vicinity of the condensing point P in the side wall 11 of the glass tube 10.

改質領域５は、密度、屈折率、機械的強度、その他の物理的特性が周囲とは異なる状態になった領域をいう。改質領域５としては、例えば、溶融処理領域（一旦溶融後再固化した領域、溶融状態中の領域及び溶融から再固化する状態中の領域のうち少なくとも何れか一つを意味する）、クラック領域、絶縁破壊領域、屈折率変化領域等があり、これらが混在した領域もある。更に、改質領域５としては、加工対象物の材料において改質領域の密度が非改質領域の密度と比較して変化した領域、格子欠陥が形成された領域がある。   The modified region 5 is a region where the density, refractive index, mechanical strength, and other physical characteristics are different from the surroundings. Examples of the reforming region 5 include a melting treatment region (meaning at least one of a region once solidified after melting, a region in a molten state, and a region in a state of being resolidified from melting), a crack region, and the like. In addition, there are a dielectric breakdown region, a refractive index change region, and the like, and there is a region where these are mixed. Further, the modified region 5 includes a region in which the density of the modified region is changed compared to the density of the non-modified region in the material of the workpiece, and a region where lattice defects are formed.

レーザ光Ｌがパルス発振されると、パルスレーザ光の１パルスのショット（つまり１パルスのレーザ照射：レーザショット）で形成された各改質領域５が互いに離間する場合がある。このような場合、各改質領域５からは、レーザ光Ｌの入射方向及び出射方向だけでなく、隣の改質領域５に向かっても亀裂７が伸展し易い。   When the laser beam L is oscillated, the modified regions 5 formed by one pulse shot of the pulse laser beam (that is, one pulse of laser irradiation: laser shot) may be separated from each other. In such a case, the crack 7 easily extends from each modified region 5 not only to the incident direction and the emitting direction of the laser light L but also to the adjacent modified region 5.

レーザ加工機３１は、第１条件及び第２条件が満たされるように、レーザ光Ｌを照射する。第１条件は、ガラス管１０の送出し方向Ａと交差する（例えば、直交する）方向に沿った直線Ｂがガラス管１０の側壁１１の外面１１ａと交わる第１位置ｂ１及び第２位置ｂ２のそれぞれにおいて改質領域５が露出していることである。第２条件は、ガラス管１０の側壁１１内において第１位置ｂ１と第２位置ｂ２との間に渡って（すなわち、直線Ｂに沿って）複数の改質領域５が互いに離間し、且つ複数の改質領域５のそれぞれから生じた亀裂７が繋がることである。なお、第１位置ｂ１及び第２位置ｂ２のそれぞれにおいて改質領域５が露出するとは、第１位置ｂ１及び第２位置ｂ２のそれぞれにおいて改質領域５が側壁１１の外面１１ａに現れていることを意味する。レーザ光Ｌの集光点Ｐを直線Ｂに沿って移動させる場合、第１位置ｂ１及び第２位置ｂ２の一方が加工開始位置となり、第１位置ｂ１及び第２位置ｂ２の他方が加工終了位置となる。   The laser processing machine 31 irradiates the laser beam L so that the first condition and the second condition are satisfied. The first condition is that the straight line B along the direction intersecting (for example, orthogonal to) the glass tube 10 delivery direction A intersects the outer surface 11a of the side wall 11 of the glass tube 10 at the first position b1 and the second position b2. In each case, the modified region 5 is exposed. The second condition is that a plurality of modified regions 5 are separated from each other across the first position b1 and the second position b2 (that is, along the straight line B) in the side wall 11 of the glass tube 10, and That is, the crack 7 generated from each of the modified regions 5 is connected. Note that the modified region 5 is exposed at each of the first position b1 and the second position b2 that the modified region 5 appears on the outer surface 11a of the side wall 11 at each of the first position b1 and the second position b2. Means. When the condensing point P of the laser beam L is moved along the straight line B, one of the first position b1 and the second position b2 is a processing start position, and the other of the first position b1 and the second position b2 is a processing end position. It becomes.

更に、レーザ加工機３１は、第３条件及び第４条件が満たされるように、レーザ光Ｌを照射する。第３条件は、複数の改質領域５のそれぞれから生じた亀裂７が第１位置ｂ１と第２位置ｂ２との間に渡ってガラス管１０の側壁１１の外面１１ａ（直線Ｂを基準としてガラス管１０の側壁１１の内面１１ｂとは反対側の外面１１ａ）に至ることである。第４条件は、ガラス管１０の側壁１１の内面１１ｂに比べガラス管１０の側壁１１の外面１１ａに近い領域に複数の改質領域５が位置することである。なお、ガラス管１０の側壁１１の内面１１ｂに比べガラス管１０の側壁１１の外面１１ａに近い領域に複数の改質領域５が位置するとは、側壁１１の厚さの中心を通る円柱面Ｃよりも外側の領域に複数の改質領域５が位置することを意味する。   Furthermore, the laser processing machine 31 irradiates the laser beam L so that the third condition and the fourth condition are satisfied. The third condition is that the crack 7 generated from each of the plurality of modified regions 5 extends between the first position b1 and the second position b2, and the outer surface 11a of the side wall 11 of the glass tube 10 (glass B with reference to the straight line B). The outer surface 11 a) opposite to the inner surface 11 b of the side wall 11 of the tube 10. The fourth condition is that a plurality of modified regions 5 are located in a region closer to the outer surface 11 a of the side wall 11 of the glass tube 10 than the inner surface 11 b of the side wall 11 of the glass tube 10. Note that the plurality of modified regions 5 are located in a region closer to the outer surface 11a of the side wall 11 of the glass tube 10 than the inner surface 11b of the side wall 11 of the glass tube 10 from the cylindrical surface C passing through the center of the thickness of the side wall 11. Also means that a plurality of modified regions 5 are located in the outer region.

以上説明したように、ガラス管製造装置１、及びガラス管製造装置１で実施されるガラス管製造方法では、ガラス管切断部３が、連続的に送り出されるガラス管１０にレーザ光Ｌを照射することで、ガラス管１０の送出し方向Ａと交差する方向に沿った直線Ｂがガラス管１０の外面１１ａと交わる第１位置ｂ１及び第２位置ｂ２のそれぞれにおいて改質領域５を露出させ、且つガラス管１０の側壁１１内において第１位置ｂ１と第２位置ｂ２との間に渡って複数の改質領域５のそれぞれから生じた亀裂７を繋げる（第２ステップ）。これにより、連続的に送り出されるガラス管１０を、改質領域５を形成した箇所で精度良く切断することができる。なお、連続的に送り出されるガラス管１０を、改質領域５を形成した箇所で切断することで、切断時における発塵を減少させることができる。   As described above, in the glass tube manufacturing apparatus 1 and the glass tube manufacturing method implemented by the glass tube manufacturing apparatus 1, the glass tube cutting unit 3 irradiates the glass tube 10 that is continuously sent out with the laser light L. Thus, the modified region 5 is exposed at each of the first position b1 and the second position b2 where the straight line B along the direction intersecting the feeding direction A of the glass tube 10 intersects the outer surface 11a of the glass tube 10, and In the side wall 11 of the glass tube 10, the crack 7 generated from each of the plurality of modified regions 5 is connected between the first position b1 and the second position b2 (second step). Thereby, the glass tube 10 sent out continuously can be cut | disconnected with a sufficient precision in the location in which the modification | reformation area | region 5 was formed. In addition, the glass tube 10 sent out continuously is cut | disconnected in the location in which the modification | reformation area | region 5 was formed, and dust generation at the time of a cutting | disconnection can be reduced.

特に、ガラス管切断部３は、複数の改質領域５が互いに離間し、且つ複数の改質領域５のそれぞれから生じた亀裂７が繋がるように、レーザ光Ｌを照射する（第２ステップ）。更に、ガラス管切断部３は、改質領域５から生じた亀裂７が第１位置ｂ１と第２位置ｂ２との間に渡ってガラス管１０の外面１１ａに至るように、レーザ光Ｌを照射する（第２ステップ）。また、ガラス管切断部３は、ガラス管１０の内面１１ｂに比べガラス管１０の外面１１ａに近い領域に改質領域５が位置するように、レーザ光Ｌを照射する（第２ステップ）。これらにより、連続的に送り出されるガラス管１０をより精度良く切断することができる。   In particular, the glass tube cutting unit 3 irradiates the laser beam L so that the plurality of modified regions 5 are separated from each other and the cracks 7 generated from each of the plurality of modified regions 5 are connected (second step). . Furthermore, the glass tube cutting part 3 irradiates the laser beam L so that the crack 7 generated from the modified region 5 reaches between the first position b1 and the second position b2 and reaches the outer surface 11a of the glass tube 10. (Second step). Moreover, the glass tube cutting part 3 irradiates the laser beam L so that the modified region 5 is positioned in a region closer to the outer surface 11a of the glass tube 10 than the inner surface 11b of the glass tube 10 (second step). By these, the glass tube 10 sent out continuously can be cut | disconnected more accurately.

また、ガラス管送出部２は、管引き成形によってガラス管１０を連続的に成形しつつ送り出す（第１ステップ）。これにより、ガラス管１０の成形及びガラス管１０の切断を効率良く実施することができる。   Further, the glass tube delivery unit 2 sends out the glass tube 10 while continuously forming the glass tube 10 by tube drawing (first step). Thereby, the shaping | molding of the glass tube 10 and the cutting | disconnection of the glass tube 10 can be implemented efficiently.

以上、本発明の一実施形態について説明したが、本発明は、上述した実施形態に限定されない。   As mentioned above, although one Embodiment of this invention was described, this invention is not limited to embodiment mentioned above.

例えば、１つのレーザ光Ｌを複数の集光点Ｐに集光させて、複数の集光点Ｐが直線Ｂ上に位置するようにレーザ光Ｌを照射してもよい。また、１本の直線Ｂに対して複数列の改質領域５を形成してもよい。   For example, one laser beam L may be condensed at a plurality of condensing points P, and the laser beam L may be irradiated so that the plurality of condensing points P are positioned on the straight line B. A plurality of rows of modified regions 5 may be formed for one straight line B.

また、上記実施形態では、第１条件、第２条件、第３条件及び第４条件が満たされるように、レーザ光Ｌを照射したが、少なくとも第１条件及び第２条件が満たされるように、レーザ光Ｌを照射すれば、連続的に送り出されるガラス管１０を精度良く切断することができる。更に、第２条件については、ガラス管１０の側壁１１内において第１位置ｂ１と第２位置ｂ２との間に渡って改質領域５又は改質領域５から生じた亀裂７が繋がるように、レーザ光Ｌを照射してもよい。   Moreover, in the said embodiment, although irradiated with the laser beam L so that 1st condition, 2nd condition, 3rd condition, and 4th condition were satisfy | filled, at least 1st condition and 2nd condition were satisfy | filled. If the laser beam L is irradiated, the glass tube 10 sent out continuously can be cut with high accuracy. Further, for the second condition, the modified region 5 or the crack 7 generated from the modified region 5 is connected between the first position b1 and the second position b2 in the side wall 11 of the glass tube 10. Laser light L may be irradiated.

また、ガラス管送出部２は、管引き成形によってガラス管１０を連続的に成形しつつ送り出すものに限定されず、例えば管引き成形によって予め成形されたガラス管１０を単に連続的に送り出すものであってもよい。つまり、ガラス管送出部２では、例えば管引き成形によって予め成形されたガラス管１０を単に連続的に送り出す第１ステップが実施されてもよい。   Moreover, the glass tube delivery part 2 is not limited to what is sent out while continuously forming the glass tube 10 by tube drawing, for example, it simply sends out the glass tube 10 previously formed by tube drawing. There may be. That is, in the glass tube delivery part 2, the 1st step which simply sends out the glass tube 10 previously shape | molded by tube drawing, for example continuously may be implemented.

１…ガラス管製造装置、２…ガラス管送出部、３…ガラス管切断部、５…改質領域、７…亀裂、１０…ガラス管、１１…側壁、１１ａ…外面、１１ｂ…内面、Ａ…送出し方向、Ｂ…直線、ｂ１…第１位置、ｂ２…第２位置、Ｌ…レーザ光。   DESCRIPTION OF SYMBOLS 1 ... Glass tube manufacturing apparatus, 2 ... Glass tube sending part, 3 ... Glass tube cutting part, 5 ... Modified | denatured area | region, 7 ... Crack, 10 ... Glass tube, 11 ... Side wall, 11a ... Outer surface, 11b ... Inner surface, A ... Sending direction, B ... straight line, b1 ... first position, b2 ... second position, L ... laser beam.

Claims (7)

ガラス管を連続的に送り出す第１ステップと、
連続的に送り出される前記ガラス管にレーザ光を照射することで前記ガラス管に改質領域を形成し、前記改質領域が形成された箇所で前記ガラス管を切断する第２ステップと、を備え、
前記第２ステップでは、前記ガラス管の送出し方向と交差する方向に沿った直線が前記ガラス管の外面と交わる第１位置及び第２位置のそれぞれにおいて前記改質領域が露出し、且つ前記ガラス管の側壁内において前記第１位置と前記第２位置との間に渡って前記改質領域又は前記改質領域から生じた亀裂が繋がるように、前記レーザ光を照射する、ガラス管製造方法。 A first step of continuously feeding the glass tube;
A second step of forming a modified region in the glass tube by irradiating the glass tube that is continuously sent out, and cutting the glass tube at a position where the modified region is formed; ,
In the second step, the modified region is exposed at each of a first position and a second position where a straight line along a direction intersecting a feeding direction of the glass tube intersects an outer surface of the glass tube, and the glass The glass tube manufacturing method of irradiating the laser beam so that a crack generated from the modified region or the modified region is connected between the first position and the second position in a side wall of the tube. 前記第１ステップでは、管引き成形によって前記ガラス管を連続的に成形しつつ送り出す、請求項１に記載のガラス管製造方法。   The glass tube manufacturing method according to claim 1, wherein in the first step, the glass tube is sent out while being continuously formed by tube drawing. 前記第２ステップでは、複数の前記改質領域が互いに離間し、且つ複数の前記改質領域のそれぞれから生じた亀裂が繋がるように、前記レーザ光を照射する、請求項１又は２に記載のガラス管製造方法。   3. The laser beam irradiation according to claim 1, wherein, in the second step, the laser beam is irradiated so that the plurality of modified regions are separated from each other and cracks generated from the plurality of modified regions are connected. Glass tube manufacturing method. 前記第２ステップでは、前記改質領域から生じた亀裂が前記第１位置と前記第２位置との間に渡って前記ガラス管の前記外面に至るように、前記レーザ光を照射する、請求項１〜３のいずれか一項に記載のガラス管製造方法。   In the second step, the laser light is irradiated so that a crack generated from the modified region reaches the outer surface of the glass tube between the first position and the second position. The glass tube manufacturing method as described in any one of 1-3. 前記第２ステップでは、前記ガラス管の内面に比べ前記ガラス管の前記外面に近い領域に前記改質領域が位置するように、前記レーザ光を照射する、請求項１〜４のいずれか一項に記載のガラス管製造方法。   5. The laser light irradiation according to claim 1, wherein, in the second step, the laser light is irradiated so that the modified region is located in a region closer to the outer surface of the glass tube than an inner surface of the glass tube. The glass tube manufacturing method of description. ガラス管を連続的に送り出すガラス管送出部と、
連続的に送り出される前記ガラス管にレーザ光を照射することで前記ガラス管に改質領域を形成し、前記改質領域が形成された箇所で前記ガラス管を切断するガラス管切断部と、を備え、
前記ガラス管切断部は、前記ガラス管の送出し方向と交差する方向に沿った直線が前記ガラス管の外面と交わる第１位置及び第２位置のそれぞれにおいて前記改質領域が露出し、且つ前記ガラス管の側壁内において前記第１位置と前記第２位置との間に渡って前記改質領域又は前記改質領域から生じた亀裂が繋がるように、前記レーザ光を照射する、ガラス管製造装置。 A glass tube delivery section for continuously feeding the glass tube;
A glass tube cutting part that forms a modified region in the glass tube by irradiating the glass tube that is continuously sent out, and cuts the glass tube at a place where the modified region is formed. Prepared,
The glass tube cutting portion exposes the modified region at each of a first position and a second position where a straight line along a direction intersecting a feeding direction of the glass tube intersects an outer surface of the glass tube, and A glass tube manufacturing apparatus that irradiates the laser beam so that a crack generated from the modified region or the modified region is connected between the first position and the second position in a side wall of the glass tube. . 前記ガラス管送出部は、管引き成形によって前記ガラス管を連続的に成形しつつ送り出す、請求項６に記載のガラス管製造装置。   The said glass tube sending part is a glass tube manufacturing apparatus of Claim 6 which sends out, forming the said glass tube continuously by pipe drawing.
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