JP2018116064A - Sensor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a position sensor.SOLUTION: A sensor which can include an optical element that supports a first light source operable so as to direct first light beam and a second light source operable so as to send second light beam is disclosed. The sensor also includes an imaging device which is arranged in proximity to an optical element and can operate to convert them into electric signals by directly receiving the first light beam and the second light beam. The imaging device and the optical element can move to each other. The sensor can further include an optical position module which receives an electric signal and obtains positions of the first light beam and the second light beam on the imaging device. In addition, the sensor can include a position module configured so as to obtain a relative position of an imaging device and an optical element on the basis of the positions of the first light beam and the second light beam on the imaging device.SELECTED DRAWING: Figure 1

Description

  Sensors are used in a wide range of applications and are adapted to measure a wide variety of quantities. Many sensors, such as position sensors, strain gauges, load cells, accelerometers, inertial measurement devices, pressure gauges, can determine the desired amount using displacement measurements.

  The features and advantages of the present invention will become apparent from the following detailed description when read in conjunction with the accompanying drawings, which together illustrate, by way of example, the features of the present invention.

1 is a schematic side view of a sensor according to an embodiment of the present invention. FIG. 2 is a schematic top view of an optical element of the sensor in FIG. It is a schematic side view of the light source of the sensor by one Embodiment of this invention. FIG. 6 is a schematic side view of a light source of a sensor according to another embodiment of the present invention. FIG. 2 is a schematic top view of the sensor of FIG. 1 subject to relative movement of two translational freedom optical elements and an imaging element, in accordance with an embodiment of the present invention. 2 is a schematic top view of the sensor of FIG. 1 undergoing relative movement of one rotational freedom optical element and an imaging element, in accordance with one embodiment of the present invention. FIG. 2 is a schematic side view of the sensor of FIG. 1 subject to relative movement of one translational freedom optical element and an imaging element, in accordance with another embodiment of the present invention. FIG. 2 is a schematic side view of the sensor of FIG. 1 subject to relative movement of one rotational freedom optical element and an imaging element, in accordance with another embodiment of the present invention. FIG. 5 is a schematic side view of the sensor of FIG. 1 subject to relative movement of one rotational freedom optical element and an imaging element, according to yet another embodiment of the present invention. FIG. 6 is a schematic top view of an optical element of a sensor according to another embodiment of the present invention. FIG. 6 is a schematic perspective view of a sensor according to still another embodiment of the present invention. FIG. 6 is a schematic side view of a sensor according to still another embodiment of the present invention. FIG. 6 is a schematic side view of a sensor according to still another embodiment of the present invention.

  Reference is now made to the illustrated exemplary embodiments, and specific language will be used herein to describe it. It will nevertheless be understood that no limitation of the scope of the invention is thereby intended.

  As used herein, the term “substantially” refers to a complete or nearly complete degree or degree of action, property, property, state, structure, item, or result. For example, a “substantially” sealed object will mean either a fully sealed object or an almost completely sealed object. The exact tolerance for deviation from absolute completeness may in some cases depend on the particular situation. However, generally speaking, the similarity of completion is to achieve the same overall result as if an absolute and complete completion was obtained. The term “substantially” is equally applicable to use in negative connotations to represent complete or nearly complete lack of behavior, properties, properties, states, structures, items, or results It is.

  As used herein, the term “adjacent” refers to the proximity of two structures or elements. Specifically, each element identified as “adjacent” may be in contact or connected. Such elements may be close to each other and not necessarily in contact with each other. The exact degree of proximity may depend on the specific situation in some cases.

  An initial overview of technology embodiments is given below, and then specific technology embodiments are described in more detail later. This initial summary is intended to assist the reader in understanding the technology more quickly, but identifies the main or important features of the technology and the scope of claimed subject matter. It is not intended to limit or limit.

  A typical sensor is generally effective for a given purpose, but does not provide the same level of resolution at each degree of freedom. In addition, obtaining measurement redundancy and / or measurements with multiple degrees of freedom can significantly increase size, complexity, and cost, and in some applications, redundant sensors or multiple degrees of freedom. This may interfere with the use of other sensors. Thus, redundant sensors or multiple-degree-of-freedom sensors can more easily take advantage of size, complexity, and cost by maintaining substantial limits such as those approximating single-degree-of-freedom sensors. Can do.

  Accordingly, sensors are disclosed that can provide redundancy and / or multiple degrees of freedom measurement without significantly increasing size, complexity, or cost. In one aspect, the sensor can be adapted to measure a given quantity that can be determined using displacement measurements. The sensor can include an optical element that supports a first light source operable to direct a first light beam and a second light source operable to direct a second light beam. The sensor may also include an imaging device disposed proximate to the optical element and operable to directly receive the first and second light rays and convert them into electrical signals. The imaging device and the optical element are movable relative to each other. The sensor can further include an optical position module configured to receive the electrical signal and determine a position of the first light beam and the second light beam on the imaging device. In addition, the sensor can include a position module configured to determine a relative position of the imaging device and the optical element based on the positions of the first and second light rays on the imaging device.

  In one aspect, a multi-degree of freedom sensor is disclosed. The multi-degree-of-freedom sensor includes a first light source operable to direct a first light beam and a second light source operable to direct a second light beam that is non-parallel to the first light beam. The optical element which supports can be included. The multi-degree-of-freedom sensor may also include an imaging device that is disposed proximate to the optical element and operable to directly receive the first and second light rays and convert them into electrical signals. The imaging device and the optical element are movable relative to each other with at least two translational degrees of freedom and at least two degrees of freedom of rotation. The multi-degree-of-freedom sensor can further include an optical position module configured to receive the electrical signal and determine a position of the first light beam and the second light beam on the imaging device. In addition, the multi-degree-of-freedom sensor can include a position module configured to determine a relative position of the imaging device and the optical element based on the positions of the first ray and the second ray on the imaging device. .

  In another aspect, a multi-degree of freedom sensor is disclosed. The multi-degree-of-freedom sensor can include an optical element that supports a plurality of light sources and is operable to direct a light beam. The multi-degree-of-freedom sensor may also include an imaging device that is disposed proximate to the optical element and operable to receive each light beam directly and convert it into an electrical signal. The imaging device and the optical element are movable relative to each other with a plurality of translational degrees of freedom and a plurality of rotational degrees of freedom. The multi-degree-of-freedom sensor can further include an optical position module configured to receive an electrical signal and determine the position of each ray on the imaging device. In addition, the multi-degree-of-freedom sensor may include a position module configured to determine a relative position between the imaging device and the optical element based on the position of each light beam on the imaging device.

  One embodiment of sensor 100 is schematically illustrated in FIGS. The sensor 100 can include an imaging device 110. The imaging device 110 can comprise an imaging sensor 111 such as a pixel sensor, a photographic sensor, or any other suitable type of imaging device that can convert light into an electrical signal. In one aspect, the active pixel sensor that the imaging device 110 can comprise has an integrated circuit containing an array of pixel sensors, each pixel containing a photodetector and an active amplifier. A circuit next to each photodetector can convert light energy into a voltage. Additional circuitry for converting the voltage to digital data may be included. An example of an active pixel sensor is a complementary metal oxide semiconductor (CMOS) imaging sensor. In another aspect, the imaging device 110 can comprise a charge coupled device (CCD) imaging sensor. In a CCD imaging sensor, a pixel can be represented by a p-type doped MOS capacitor. When light collection begins, these capacitors are biased above the threshold for inversion, allowing conversion of incoming photons to electronic charge at the semiconductor-oxide interface. The CCD is then used to read these charges. Additional circuitry can convert the voltage into digital information. Thus, the imaging device 110 may be any suitable device that is operable to capture light and convert it into an electrical signal, such as an imaging sensor commonly found in digital cameras, cell phones, web cams, etc. Devices or sensors can be included.

  The sensor 100 can also include an optical element 120 that supports one or more light sources 121, 122 and is operable to direct the light rays 123, 124, respectively. The light sources 121 and 122 are arranged outside the LED, laser, organic LED, field emission display element, surface conduction electron emitter display unit, quantum dot, cell containing charged ionized gas, fluorescent lamp, and light emitting surface. Holes through which light from a large light source can pass and / or any other suitable light source can be provided. FIG. 3A shows a lens 227 operable with the light source 221 to focus or direct light from the light source 221 to an appropriate ray. FIG. 3B shows a collimator 328 operable with the light source 321 to “reduce” the light from the light source 321 to an appropriate ray. It should be understood that the lens and collimator can be used alone or in any combination with the light source to achieve the appropriate light beam.

  The imaging device 110 can be positioned proximate to the optical element 120 and is operable to directly receive the light rays 123, 124 and convert them into electrical signals. The optical position module 130 may be configured to receive an electrical signal and determine the position of the light rays 123, 124 on the imaging device 110. For example, the pixels of the imaging device 110 may be individually addressed so that the light position module 130 can know or determine the light intensity on the individual pixels.

  The imaging device 110 and the optical element 120 are movable relative to each other with one or more degrees of freedom. Accordingly, the position module 140 may be configured to determine the relative position of the imaging device 110 and the optical element 120 based on the positions of the light rays 123, 124 on the imaging device 110. In one aspect, imaging device 110 and optical element 120 may be coupled 112 to each other in a manner that facilitates relative movement. For example, optical element 120 can be “fixed” and imaging device 110 is supported around optical element 120 by a structure, device, or mechanism that can facilitate movement of imaging device 110 relative to optical element 120. obtain. It should be understood that in some embodiments, the imaging device 110 may be “fixed”. Imaging device 110 and optical element 120 may be constrained to relative movement with only one or more selected degrees of freedom, such as translational movement in the X-axis or rotational movement about the Z-axis. Any suitable mechanism of imaging device 110 and optical element 120 that facilitates relative movement of imaging device 110 and optical element 120 in one or more desired degrees of freedom is contemplated.

  Such relative motion of the imaging device 110 and the optical element 120 may facilitate measurement of relative motion, such as relative displacement and / or relative rotation. Thus, a sensor according to the present disclosure is operable to measure or sense any amount that can be based on or derived from relative motion such as displacement, rotation, velocity, acceleration, etc. possible. For example, a sensor as described herein utilizes a relative sensor to provide a position sensor, strain gauge, accelerometer, load sensor, or a desired type of measurement mechanically and / or computationally. It can function as another type of sensor that can. Thus, in one aspect, the sensor 100 can also include a clock 150 for measuring elapsed time associated with relative motion, which is useful for determining velocity, acceleration, or other dynamic measurements. possible.

  In addition, since the individual address of the pixel is known, the sensor 100 can be considered an “absolute” sensor. Due to this nature, when not needed (ie to save energy), it is necessary to initialize or calibrate to determine the relative position of the imaging device 110 and the optical element 120 in order to take measurements or readings when power is off It becomes possible to turn on the power again without any problems.

  The imaging device 110 can comprise a pixel array of any suitable size, dimension, aspect ratio, and / or number of pixels. For example, the pixel array can be a one-dimensional array or a two-dimensional array, such as an array of pixels arranged in rows and columns. In one aspect, the range of motion of the sensor may be limited by the size of the imaging device, but arranging multiple imaging devices adjacent to each other can give the sensor a greater range of motion. it can. In another aspect, the range of motion of the sensor may be affected by the position and / or size of the light source. Thus, the light source can be positioned and / or dimensioned to accommodate the desired relative movement between the optical element and the imaging device. It should be understood that a sensor according to the present disclosure can provide substantially the same level of resolution in each degree of freedom.

  In one aspect, the center positions of the rays 123 and 124 on the imaging device 110 can be determined by applying a statistical technique to the positions of the rays 123 and 124 on the imaging device 110. Such a calculation may be performed by the location module 140. For example, each ray 123, 124 can be distributed over many pixels on the imaging device 110 to show an intensity gradient, which is analyzed using statistical techniques to determine the center of the ray. Can do.

  In another aspect, the imaging device 110 may be monochromatic or chromatic, and the light sources 121, 122 may generate any suitable light color, such as white, red, green, or blue. In order to efficiently increase the pixel populations, the chromatic pixel color selectivity for a particular ray wavelength can be used, which does not degrade the ray from nearby rays on the imaging device. Can be used to determine the center position of. For example, instead of using a single light source with a monochromatic imaging device to determine the relative motion of the optical element 120 and the imaging device 110 without interference from each other, three light sources in close proximity (red, green, and blue) Can be used with a chromatic imaging device. Even if the light rays overlap on the imaging device, the chromatic imaging device can separately track or sense different color rays. Different parts of the imaging device corresponding to different colors generate separate signals that can be used to determine the relative motion of the light source and the imaging device, such as by providing redundancy for calculations and / or additional data points can do.

  Thus, in one aspect, the imaging device can include a color separation mechanism 160. Bayer sensor with color filter array that passes red, green, or blue light through selected pixel sensor, pixel sensor layered so that every position senses all three color channels Any suitable color separation, such as a Foveon X3 sensor that separates light by the inherent wavelength-dependent absorption characteristics of silicon, or a 3CCD sensor that has three separate imaging sensors and color separation by a dichroic prism A mechanism can be used.

  With continued reference to FIGS. 1 and 2, FIGS. 4-7B illustrate a sensor 100 that experiences relative motion of the imaging device 110 and the optical element 120. The light source 121 generates a light beam 123 that may be referred to generally as a “perpendicular” light beam, the light beam 123 being perpendicular to the imaging device 110 in the nominal relative direction of the imaging device 110 and the optical element 120, or It is substantially vertical. The light source 122 produces a ray 124 that may be referred to generally as an “angular” ray that is non-perpendicular and non-perpendicular to the imaging device 110 in the nominal relative orientation of the imaging device 110 and the optical element 120. At a parallel angle. Thus, the light source 121 can be referred to as a vertical light source, and the light source 122 can be referred to as an angular light source.

  In general, a single light source can be used to determine the relative motion of two translational degrees of freedom. For example, as shown in FIG. 4, a light source 121 that directs a ray 123 substantially perpendicular to the X and Y translational degrees of freedom is relative to the imaging device 110 and the optical element 120 in these two translational degrees of freedom. Can be used to seek exercise. In addition, a light source 122 that directs a ray 124 that is non-parallel to ray 123 can be used to determine the relative motion of imaging device 110 and optical element 120 in X and Y translational degrees of freedom. When the imaging device 110 ′ moves from the initial position along the imaging device 110 to the final position of the imaging device 110, the movement by the light rays 123 and 124 can follow paths 125a and 126a, respectively. The pixels along each of the paths 125a, 126a can be used to determine the relative motion of the imaging device 110 and the optical element 120, such as by providing redundancy for calculations and / or additional data points.

  As shown in FIG. 5 and with further reference to FIGS. 1 and 2, the imaging device 110 and the optical element 120 can move relative to each other in this case in a rotational degree of freedom about the Z axis. . When the imaging device 110 ′ moves from the initial position along the imaging device 110 to the final position of the imaging device 110, the movement by the light rays 123 and 124 can follow the paths 125b and 126b, respectively. The pixels along the respective paths 125b, 126b of both rays 123, 124 can be used to determine the relative movement of the imaging device 110 and the optical element 120, in this case with the center of rotation 101. As shown, ray 123 is directed substantially parallel to the axis of rotational freedom and ray 124 is non-parallel to ray 123. In other words, vertical rays and angular rays are used. However, it should be understood that the relative motion of translational and rotational degrees of freedom shown in FIGS. 5 and 6 can be measured using two vertical or two angular rays.

  FIG. 6 shows that the imaging device and the optical element are movable with respect to each other in this case in translational freedom along the Z axis. In other words, the vertical ray 123 is an axis of translational freedom such that the relative movement of the imaging device 110 and the optical element 120 in translational degrees of freedom directs the ray 123 and / or the ray 124 to different positions on the imaging device 110. , And the angular ray 124 is non-parallel to the ray 123. For example, when the imaging device 110 approaches the optical element 120 in the direction 102 along the Z-axis, the angular ray 124 moves in the direction 103 along the imaging device 110. This movement of the angular ray 124 can be used to determine the relative translation along the Z axis. In addition, the lack of motion of the vertical ray 123 can also take into account the relative translational motion along the Z axis. Thus, it should be understood that a single angular ray can be used to determine the relative motion in three orthogonal translational degrees of freedom.

  FIGS. 7A and 7B further illustrate the use of angular ray 124 to determine the relative motion of imaging device 110 and optical element 120 in this case in rotational degrees of freedom about the X axis. Accordingly, the vertical ray 123 is oriented substantially perpendicular to the axis of rotational freedom. As shown in FIG. 7A, the angular ray 124 moves in the direction 104 along the imaging device 110 and the vertical ray 123 moves in the opposite direction 105 along the imaging device 110. The difference and relative position of the rays 123 and 124 on the imaging device 110 and the angle 127 of the angular ray 124 determine the rotation of the imaging device 110 relative to the optical element 120 in the direction 106a around the center of rotation 107a. Can be used. In this case, the light rays 123 and 124 are both on the “same surface” of the rotation center 107a.

  On the other hand, as shown in FIG. 7B, the angular ray 124 moves in the direction 108 along the imaging device 110 and the vertical ray 123 moves in the same direction 109 along the imaging device 110. The similarity and relative position of the rays 123 and 124 on the imaging device 110 and the angle 127 of the angular ray 124 determine the rotation of the imaging device 110 relative to the optical element 120 in the direction 106b around the center of rotation 107b. Can be used. In this case, both rays 123 and 124 are on the “opposite surface” of the center of rotation 107b. Accordingly, the motion and direction of the angular ray 124 and the vertical ray 123 along the imaging device 110 can be used to determine the relative motion of the imaging device 110 and the optical element 120 in rotational degrees of freedom. Tends to move the part of the imaging device 110 and the part of the optical element 120 toward each other, such as rotation about the X axis.

  It should be understood that a sensor according to the present disclosure may have multiple translational degrees of freedom and / or multiple rotational degrees of freedom. With additional light sources above the two light sources 121, 122 of the sensor 100, the sensor is “stood” in relative motion, especially when complex motion is combined into multiple translational and rotational degrees of freedom. The situation where the measurement becomes inaccurate can be reduced or eliminated. Another benefit of the additional light source is generally more light movement across the imaging device, and therefore more pixels that receive a response command signal to obtain data, relative to the imaging device and the optical element. Sensor resolution may be improved in that it can be used to determine motion. An additional benefit of additional light sources over two light sources may be simplification of the calculation algorithm.

  Thus, one embodiment of the sensor 400 shown in FIG. 8 eliminates possible computational ambiguity due to the number, placement, and orientation of light sources, especially when subjected to multiple degrees of freedom of relative motion. In addition to the resolution can be improved. For example, sensor 400 can include four vertical light sources 421a-421d and four angular light sources 422a-422d. In one aspect, the angular light sources 422a-422d can be oriented to direct the light rays 424a-424d in a plane parallel to the degrees of freedom axis. For example, the rays 424a and 424b are in a plane parallel to the Y axis, and the rays 424c and 424d are in a plane parallel to the X axis. However, it should be understood that cornered rays can be oriented in any direction, as indicated by rays 424a 'oriented in some random direction.

  The particular mechanism shown in the figure consists of a vertical light source 421a-421d disposed in the central portion of the optical element 420 and a corner light source disposed around the periphery of the generally vertical light source 421a-421d. 422a to 422d. The rays generated by the vertical light sources 421a-421d are such that the nominal orientation is perpendicular to the imaging device 410, so that the imaging device 410 and optical elements, such as Z-axis translation, or rotation about the X and Y axes, During the movement of the relative position in the Z-axis, the imaging device 410 should not “sweep over a large area” as much as the rays 424a-424d of the angular light sources 422a-422d. Accordingly, light sources such as angular light sources 422a-422d are arranged to provide greater motion across the imaging device 410 and / or due to the relative motion of the imaging device 410 and optical element 420 in a particular degree of freedom, and / or Or it can be oriented to increase the resolution of the sensor data. Therefore, collecting vertical light sources 421a-421d in the central part and arranging angled light sources 422a-422d around its periphery is available with an increased number of light sources 421a-421d, 422a-422d It can be an efficient arrangement for maximizing the effective use of the imaging device area. In one aspect, colored light sources and color separation mechanisms may be employed to adapt the increased number of light sources to a small area without degrading sensor performance.

  The number of light sources and the arrangement and orientation of the light sources shown in the figure are such that any relative movement of the imaging device and the optical elements will not cause the sensor to be “spoofed” resulting in false or inaccurate readings. It is merely an example of a configuration that can be used to confirm. Thus, it should be understood that any number of vertical or angular light sources can be used in any relative position or orientation to achieve a desired result, such as a level of redundancy or resolution.

  Another embodiment of the sensor 500 shown in FIG. 9 uses multiple light sources 521a-521c and adjacent to each other to provide a continuous motion measurement that is effective over a larger range using only a single imaging device. A plurality of imaging devices 510a to 510f disposed in the same manner. For example, sensor 500 includes light sources 521a-521c (perpendicular light sources and / or corners) that direct light rays 523a-523c to one or more of imaging devices 510a-510f, respectively, at a predetermined time. Any of the mechanisms and elements described above can be included, such as an optical element 520 that supports a light source). As shown, the imaging devices 510a-510f are staggered with regions 514 between imaging devices in which no imaging sensor is present, such as boundaries between adjacent imaging devices. The light beam 523a may terminate at 529a in the region 514 between adjacent imaging devices 510a and 510b, in which case the light beam 523a will not contribute to the position measurement function of the sensor 500. However, in this case, even if the light beam 523a cannot contribute, the light beams 523b and 523c can be terminated at 529b and 529c on the imaging devices 510b and 510e, respectively, and contribute to the position measurement function of the sensor 500. In other words, the other imaging devices 510b, 510e can still receive the rays 523b, 523c, respectively, and compensate for signal loss from a given light source, such as 521a. In one aspect, the number and / or arrangement of imaging devices and / or light sources results in at least one light source terminating on the imaging device in any degree of freedom of the sensor throughout the desired range of sensor motion. It can be configured to ensure that it should be. Thus, in this way, it is guaranteed that the sensor 500 is operable to determine the relative position of the optical element 520 and the imaging devices 510a-510f even when the light source is directing light rays into an area without the imaging sensor. In order to do so, multiple light sources can be used.

  Referring to FIGS. 10A and 10B, two additional sensors according to the present disclosure are shown. For example, FIG. 10A shows a sensor 600 having elastic members 670, 671 coupled to the imaging device 610 and the optical element 620 to facilitate relative movement between the imaging device 610 and the optical element 620. The elastic members 670, 671 can establish a nominal relative position with respect to the imaging device 610 and the optical element 620, and also facilitate relative movement of any suitable degree of freedom between the imaging device 610 and the optical element 620. be able to. The springs that the resilient members 670, 671 can comprise can be configured as any suitable metal spring or elastomeric spring. Accordingly, in one aspect, the elastic members 670, 671 can act as a polymer suspension system for the imaging device 610 and the optical element 620.

  In one aspect, the elastic members 670, 671 can be disposed outside the light sources 621, 622. In another aspect, the elastic member can comprise a transparent layer disposed between the imaging device 610 and the optical element 620. In one embodiment, the elastic member can comprise a silicon layer that acts as a separator between the imaging device 610 and the optical element 620, which can result in a high resolution sensor with less displacement. In one aspect, the range of motion of the sensor 600 may be limited by the size of the imaging device 610 and the type of suspension or separation structure, depending on the size of the desired range of motion and / or the particular sensor application. Can do.

  For example, one application for sensor 600 may be as a strain gauge. In this case, the imaging device 610 may be fixed to the surface 613 at the position 614 and the optical element may be fixed to the surface 613 at the position 615. When the surface 613 is distorted, the imaging device 610 and the optical element 620 will move relative to each other, and this movement may help facilitate measurement of the distortion in one or more degrees of freedom.

  FIG. 10B shows another example of a sensor 700 having a mass 780 associated with an optical element 720, whereby the sensor 700 measures acceleration and / or functions as a navigation aid. be able to. Mass 780 and optical element 720 can be supported by an elastic member 770, such as a spring, to facilitate relative movement of imaging device 710 and optical element 720 in one or more degrees of freedom. In one aspect, the support structure 790 to which the elastic member 770 can be coupled can be coupled to the imaging device 710. Although optical element 720 is shown in the figure as being associated with mass 780 and suspended by elastic member 770, it is understood that imaging device 710 can be associated with mass 780 and suspended by elastic member 770. I want to be.

  In another example of a sensor (not shown), a whisker coupled to an imaging device or optical element may be placed in the flow path to determine the boundary layer thickness. In yet another example of a sensor (not shown), the imaging sensor and optical element can be configured for continuous relative rotation to measure the rotational position.

  According to one embodiment of the present invention, a method for facilitating displacement measurement is disclosed. The method may include providing an optical element supporting a first light source operable to direct a first light beam and a second light source operable to direct a second light beam. it can. The method may also include providing an imaging device disposed proximate to the optical element and operable to directly receive the first and second light rays and convert them into electrical signals. The method can further include providing an optical position module configured to receive the electrical signal and determine a position of the first light beam and the second light beam on the imaging device. The method may further include providing a position module configured to determine a relative position between the imaging device and the optical element based on the positions of the first ray and the second ray on the imaging device. In addition, the method can include facilitating relative movement of the imaging device and the optical element. Although this method does not require a specific order, it is noted that in one embodiment, in general, the steps of these methods may be performed sequentially.

  In one aspect of this method, the second ray is non-parallel to the first ray. In another aspect of the method, facilitating relative movement of the imaging device and the optical element includes facilitating relative movement in at least one of translational and rotational degrees of freedom.

  The disclosed embodiments of the invention are not limited to the specific structures, process steps, or materials disclosed herein, but are extended to equivalents that would be understood by one of ordinary skill in the art. I want you to understand. It is also to be understood that the terminology employed herein is used only to describe a particular embodiment and is not intended to be limiting.

  Throughout this specification, references to “one embodiment” or “an embodiment” include in the at least one embodiment of the invention the particular feature, structure, or characteristic described in connection with the embodiment. Means that. Thus, throughout this specification, the occurrences of the idioms “in one embodiment” or “in an embodiment” in various locations are not necessarily all referring to the same embodiment.

  As used herein, a plurality of items, structural elements, components, and / or materials may be shown in a common list for convenience. However, these lists should be interpreted as if each component of the list was individually identified as if it were an independent unique element. Thus, each element of such a list is interpreted as a de facto equivalent to other elements of the same list based solely on being displayed in a common group without an indication that it is not. Should not. In addition, various embodiments and examples of the invention may be referred to herein, along with alternatives relating to the various components thereof. It is understood that such embodiments, examples, and alternatives should not be construed as mutually equivalent to each other, but should be regarded as an independent autonomy expression of the invention. .

  Furthermore, the described features, structures, or characteristics may be combined in any suitable manner in one or more embodiments. In the description, numerous specific details are provided, such as examples of lengths, widths, shapes, etc., in order to provide a thorough understanding of embodiments of the present invention. However, one of ordinary skill in the art will understand that the invention may be practiced without one or more of the specific details, or that the invention may be practiced using other methods, components, materials, and the like. You will understand. In other instances, well-known structures, materials, or operations are not shown or described in detail to avoid obscuring aspects of the invention.

  The foregoing examples are illustrative of the principles of the present invention in one or more specific applications, but numerous modifications of the embodiments, applications and details of the present invention can be made without training inventive power. It will be apparent to those skilled in the art that fabrication can be made without departing from the principles and concepts. Accordingly, the invention is not intended to be limited except as by the claims set forth below.

100 sensors
101 center of rotation
102 direction
103 direction
104 direction
105 direction
106a direction
106b direction
107a Center of rotation
107b Center of rotation
108 directions
109 direction
110 Imaging device
110 'imaging device
111 Image sensor
112 bonds
120 optical elements
121 Light source
122 Light source
123 rays
124 rays
125a pathway
125b pathway
126a route
126b pathway
130 Optical position module
140 position module
150 clock
160 Color separation mechanism
221 Light source
227 lenses
321 light source
328 collimator
400 sensors
410 Imaging device
420 optical elements
421a Light source
421b Light source
421c light source
421d light source
422a Light source
422b light source
422c light source
422d light source
424a ray
424a 'ray
424b ray
424c ray
424d ray
500 sensors
510a imaging device
510b imaging device
510c imaging device
510d imaging device
510e imaging device
510f Imaging device
514 Area between imaging devices
520 optical elements
521a Light source
521b Light source
521c light source
523a rays
523b rays
523c rays
529a End point
529b End point
529c End point
600 sensors
610 Imaging device
613 faces
614 position
615 position
620 optics
621 Light source
622 light source
670 Elastic member
671 Elastic member
700 sensors
710 Imaging device
720 optics
770 Elastic member
780 mass
790 Support structure

Claims (27)

An optical element supporting a first light source operable to direct a first light beam and a second light source operable to direct a second light beam;
An imaging device disposed proximate to the optical element, wherein the imaging device is operable to directly receive the first and second light rays and convert them into electrical signals; An imaging device, wherein the device and the optical element are movable relative to each other;
An optical position module configured to receive the electrical signal and determine a position of the first ray and the second ray on the imaging device;
A position module configured to determine a relative position between the imaging device and the optical element based on the positions of the first light beam and the second light beam on the imaging device.   The imaging device and the optical element are moveable relative to each other in translational degrees of freedom, and the first ray is directed substantially perpendicular to the axis of translational freedom. Sensor.   The imaging device and the optical element are movable relative to each other in a second translational degree of freedom, and the first light beam is oriented substantially perpendicular to the axis of the second translational degree of freedom. The sensor according to claim 2.   3. The sensor according to claim 2, wherein the second light beam is non-parallel to the first light beam.   The imaging device and the optical element are movable with respect to each other in a translational degree of freedom, and the first light ray and the second light ray are caused by relative movement of the imaging device and the optical element in the translational degree of freedom. The first ray is directed substantially parallel to the axis of translational freedom, and the second ray is directed to the first such that at least one is directed to a separate location of the imaging device. 2. The sensor according to claim 1, which is non-parallel to the light beam.   The imaging device and the optical element are movable with respect to each other in rotational degrees of freedom, and the first light beam is directed substantially perpendicular to the axis of rotational degrees of freedom. Sensor.   The imaging device and the optical element are movable relative to each other in a second rotational degree of freedom, and the first light beam is oriented substantially parallel to the axis of the second rotational degree of freedom. 7. The sensor according to claim 6, wherein:   7. The sensor according to claim 6, wherein the second light beam is non-parallel to the first light beam.   The imaging device and the optical element are moveable relative to each other in rotational degrees of freedom, and the first light beam is directed substantially parallel to the axis of rotational degrees of freedom. Sensor.   The center position of the first ray and the second ray on the imaging device is obtained by applying a statistical method to the position of the first ray and the second ray on the imaging device. Item 1. The sensor according to Item 1.   The sensor according to claim 1, wherein the imaging device comprises a charge coupled device (CCD) or a complementary metal oxide semiconductor (CMOS).   The sensor according to claim 1, wherein the imaging device includes a color separation mechanism.   The sensor according to claim 1, wherein the imaging device comprises a plurality of imaging devices.   The first light source is disposed outside the LED, laser, organic LED, field emission display element, surface conduction electron emitter display unit, quantum dot, cell containing charged ionized gas, fluorescent lamp, light emitting surface 2. The sensor according to claim 1, further comprising a hole through which light from a large light source can pass or a combination thereof.   The sensor according to claim 1, further comprising at least one of a collimator and a lens operable with the first light source.   2. The sensor according to claim 1, further comprising an elastic member coupled to the imaging device and the optical element so as to facilitate relative movement between the imaging device and the optical element.   The sensor of claim 1, further comprising a mass associated with at least one of the imaging device and the optical element.   The sensor of claim 1, further comprising a clock. An optical element supporting a first light source operable to direct a first light beam and a second light source operable to direct a second light beam non-parallel to the first light beam; When,
An imaging device disposed proximate to the optical element, wherein the imaging device is operable to directly receive the first and second light rays and convert them into electrical signals; An imaging device, wherein the device and the optical element are movable relative to each other with at least two translational degrees of freedom and at least two degrees of freedom of rotation;
An optical position module configured to receive the electrical signal and determine a position of the first ray and the second ray on the imaging device;
A multi-degree-of-freedom sensor comprising: a position module configured to obtain a relative position between the imaging device and the optical element based on the positions of the first light beam and the second light beam on the imaging device.   20. The multi-degree-of-freedom sensor according to claim 19, further comprising a clock. An optical element supporting a plurality of light sources operable to direct light rays;
An imaging device disposed proximate to the optical element, wherein the imaging device is operable to directly receive the light and convert it to an electrical signal, the imaging device and the optical element having a plurality of translations An imaging device movable relative to each other in a degree of freedom and a plurality of rotational degrees of freedom;
An optical position module configured to receive the electrical signal and determine the position of the light beam on the imaging device;
A position module configured to determine a relative position of the imaging device and the optical element based on a position of the light beam on the imaging device;
A multi-degree-of-freedom sensor.   The multi-degree-of-freedom sensor according to claim 21, wherein the at least one light beam is directed substantially perpendicular to the axis of translational freedom.   The multi-degree-of-freedom sensor according to claim 21, wherein the at least one light beam is directed substantially parallel to an axis of rotational freedom.   The multi-degree-of-freedom sensor according to claim 21, wherein at least two of the light beams are non-parallel to each other. Providing an optical element supporting a first light source operable to direct a first light beam and a second light source operable to direct a second light beam; and
Providing an imaging device disposed proximate to the optical element, the imaging device operable to directly receive and convert the first and second light rays into electrical signals;
Providing an optical position module configured to receive the electrical signal and determine a position of the first ray and the second ray on the imaging device;
Providing a position module configured to determine a relative position of the imaging device and the optical element based on the positions of the first light beam and the second light beam on the imaging device;
Facilitating relative movement of the imaging device and the optical element;
A method for facilitating displacement measurement.   26. The method of claim 25, wherein the second ray is non-parallel to the first ray.   26. The method of claim 25, wherein facilitating relative movement of the imaging device and the optical element comprises facilitating relative movement in at least one of translational and rotational degrees of freedom.