JP2018107942A - Single-axis actuator - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a single-axis actuator which is capable of shortening a full length while comprising an electromagnetic brake, has high rigidity and reduces a drive loss.SOLUTION: A single-axis actuator 1 comprises: a motor 2; a ball screw mechanism 3 including a ball screw shaft 26 and a ball screw nut 27 for converting a rotation of the motor 2 into a linear motion; an electromagnetic brake 4 that is disposed between the motor 2 and the ball screw mechanism 3; and a coupling 5 that connects a motor shaft 38 with the ball screw shaft 26. The coupling 5 includes a cylindrical hub 39. The ball screw shaft 26 is screwed and fixed to the hub 39 closer to the ball screw mechanism 3, and the motor 38 is inserted and pivoted to the hub closer to the motor 2. An end face 39B of the hub 39 closer to the motor 2 regulates a movement position of a movable magnetic plate 48 of the electromagnetic brake 4 in an axial direction, and a side face 39A of the hub closer to the ball screw mechanism 3 presses and fixes an angular ball bearing 37 that pivots the ball screw shaft 26, between the ball screw mechanism and a step 57 of the ball screw shaft 26.SELECTED DRAWING: Figure 2

Description

  The present invention relates to a single-axis actuator.

  2. Description of the Related Art Conventionally, there is a one-axis actuator that has a motor (a ball screw mechanism), a coupling (a coupling mechanism) that connects the motor and the ball screw mechanism, and converts rotational motion into linear motion. Patent Document 1 discloses a single-axis actuator in which an electromagnetic brake for braking is disposed between a motor and a ball screw mechanism. This single-axis actuator has a coupling for connecting the electromagnetic brake and the motor shaft of the motor to the ball screw shaft of the ball screw mechanism on the motor side.

  Further, a single-axis actuator that is generally used conventionally has a ball screw mechanism 100 shown in FIG. FIG. 6 is a cross-sectional view showing a ball screw mechanism 100 of a single-axis actuator showing an example of the prior art and orthogonal to the axial direction of the ball screw shaft 101. The ball screw mechanism 100 includes a ball screw shaft 101, a ball screw nut 102 that is screwed onto the ball screw shaft 101, and a table block 103 that can move integrally with the ball screw nut 102. The table block 103 has a pair of linear guides 104, 104, and the pair of linear guides 104, 104 are guided by a pair of guide rails 106, 106 arranged on the same plane of the main body case 105. The table block 103 is movable in the axial direction of the ball screw shaft 101 along the guide rails 106 and 106. The shaft center 107 of the ball screw shaft 101 is disposed at a position away from the linear guides 104 and 104 and the guide rails 106 and 106 in the cross-sectional direction (radial direction of the ball screw shaft 101).

JP 2007-89374 A

  The single-axis actuator described in Patent Document 1 has a motor shaft fixed to a brake hub (coupling) of an electromagnetic brake and a ball screw shaft slidably connected to the brake hub in the axial direction. There exists a subject that the space | interval of a ball screw mechanism becomes large and the full length becomes long.

  Further, in the conventional ball screw mechanism 100 shown in FIG. 6, the axial center 107 of the ball screw shaft 101 serving as a power point is disposed away from the linear guides 104 and 104 and the guide rails 106 and 106 serving as operating points in the radial direction. Has been. Therefore, a rotational moment due to the force applied from the ball screw shaft acts on the linear guides 104, 104 and the guide rails 106, 106, which causes problems such as poor drive balance (or load balance) and increased drive loss. Further, since the distance between the guide rails 106 is small, the load applied to the linear guide is increased when a rotational moment is applied to the table block, resulting in a problem that the overall rigidity is lowered.

  Further, in the ball screw mechanism 100 shown in FIG. 6, a ball (not shown) is arranged as a rolling member between the linear guides 104 and 104 and the guide rails 106 and 106. In this conventional structure, when the linear guides 104 and 104 and the guide rails 106 and 106 and the ball are assembled, a clearance (ball backlash) may occur between the ball and the table block. There are problems such as instability and easy bending. Further, since the guide rails 106 and 106 project toward the shaft center 107, there is also a problem that the size of the guide rails 106 and 106 increases when the rigidity and the conveyance capability are increased.

  The present invention has been made in view of the above problems, and the object of the present invention is to solve at least a part of the above-described problems, enable the shortening of the overall length while providing an electromagnetic brake, and provide high rigidity. In addition, a single-axis actuator with a small drive loss is to be realized.

  In order to solve the above problems, a single-axis actuator according to the present invention includes a motor, a ball screw mechanism including a ball screw shaft and a ball screw nut that converts rotation of the motor into linear motion, and a motor and a ball screw mechanism. An electromagnetic brake disposed between the motor brake and a coupling connecting the motor shaft of the motor and the ball screw shaft. The coupling includes a cylindrical hub, and the ball screw shaft is provided on the side of the ball screw mechanism of the hub. The motor shaft is inserted and fixed to the motor side, the end surface on the motor side of the hub regulates the axial movement position of the movable magnetic plate of the electromagnetic brake, and the end surface on the ball screw mechanism side controls the ball screw shaft. The angular ball bearing that supports the shaft is pressed and fixed between the stepped portion of the ball screw shaft.

  In the uniaxial actuator of the present invention, the ball screw mechanism is arranged so as to be sandwiched between a pair of linear guides facing each other with a gap therebetween, and moves in the axial direction integrally with the ball screw nut. It has a table block, the axial center of the ball screw shaft is arranged coaxially with the center of the pair of guide rails, and the radial center of the table block is arranged coaxially with the axial center of the ball screw shaft. It is preferable.

  In the uniaxial actuator of the present invention, it is preferable that the table block includes guide rails protruding from two opposing surfaces and supported by the pair of linear guides via the guide rails.

  In the single-axis actuator according to the present invention, the pair of linear guides includes rail grooves into which each of the guide rails is inserted, and the table block is linearly connected to the guide rails via balls arranged on both sides in the width direction of the rail grooves. Preferably, the guide is held so as to be movable in the axial direction, and one of the pair of linear guides is pressed against the other side with a predetermined force to adjust the clearance between the ball, the guide rail, and the linear guide.

BRIEF DESCRIPTION OF THE DRAWINGS The outline | summary of the single axis actuator which concerns on embodiment of this invention is shown, (A) is an external appearance perspective view, (B) is the front view which looked at (A) from the illustration right side. It is sectional drawing which shows the uniaxial actuator cut | disconnected by the AA cutting line of FIG. It is sectional drawing which shows the uniaxial actuator cut | disconnected by the BB cutting line of FIG. It is a figure which expands and shows the cross section of the ball screw mechanism cut | disconnected by the CC cutting line of FIG. It is sectional drawing which shows the structure of the electromagnetic brake and coupling which concern on embodiment of this invention. It is sectional drawing which shows the ball screw mechanism of the uniaxial actuator which shows an example of a prior art, and is orthogonal to the axial direction of a ball screw shaft.

  Hereinafter, preferred embodiments of the single-axis actuator 1 according to the embodiments of the present invention will be described and described in detail with reference to the drawings. In the following description of each drawing, the long side direction in FIG. 1 is described as an axial direction, and the direction orthogonal to the axial direction is described as a radial direction or a cross-sectional direction.

  FIG. 1 shows a single-axis actuator 1 according to an embodiment, (A) is an external perspective view showing an outline, and (B) is a front view of (A) as viewed from the right side (in the direction of a thick arrow) (however, It is enlarged and shown). In FIG. 1, illustration of screws, screw holes, holes and the like arranged on the surface is omitted. As shown in FIG. 1A, a uniaxial actuator 1 includes a motor 2 that is a rotation drive source capable of normal rotation and reverse rotation, a ball screw mechanism 3 that converts rotation of the motor 2 into linear motion, and a motor 2. The electromagnetic brake 4 and the coupling 5 arranged between the ball screw mechanism 3 and the ball screw mechanism 3 are arranged in the axial direction. The motor 2 is stored in a motor case 6, and the ball screw mechanism 3 is stored in a main body case 7 (a general term for a plurality of case members). A hole 8 that penetrates the inside of the main body case 7 (see the case member 17, see FIG. 1B) is provided on the upper surface side of the body case 7, and a part of the table block 9 is exposed in the hole 8. Has been placed. A table block 9, a pair of linear guides 10 and 11, and a pair of guide rails 12 and 13 constituting the ball screw mechanism 3 are arranged on the end surface on the right side in the figure so as to face each other at a distance.

  As shown in FIG. 1 (B), the body case 7 is arranged on the left side of the figure, the case member 15 having an L-shaped cross section, the case member 16 arranged to face the side wall portion 15B of the case member 15, and on the upper side in the figure. The case member 17 is arranged to connect and fix the case member 15 and the case member 16 to each other. In the case member 16, the upper side in the figure is fixed to the case member 17, and the lower side in the figure is fixed to the bottom surface portion 15 </ b> A of the case member 15. As shown in FIG. 1B, the case members 15, 16, and 17 are combined and fixed together by fixing means such as screws (not shown). The linear guide 10 is fitted inside the side wall 15 </ b> B of the case member 15, and the linear guide 11 is fitted inside the case member 16. The linear guide 10 and the linear guide 11 are arranged facing each other so as to sandwich the table block 9.

  Guide rails 12 and 13 project from the two opposing surfaces 22 and 23 of the table block 9 in the outward direction, respectively. The tip end surface of the table block 9 is a workpiece or tool attachment portion 9A (tool attachment portion 9A) (not shown), and is provided with a plurality of holes 9C and screw holes 9D that determine the position of the workpiece or tool. . A hole 8 is opened in the case member 17, and a part of the table block 9 penetrates the hole 8 and slightly protrudes from the upper surface of the case member 17. Similar to the attachment portion 9A, it is a workpiece or tool attachment portion 9E (not shown).

  As shown in FIG. 1B, a ball screw shaft 26 is disposed at the center of the radial cross section of the table block 9. A radial cross-sectional center P1 of the table block 9 is disposed on the same axis as the axial center P0 of the ball screw shaft 26. Further, the axial center P0 of the ball screw shaft 26 is arranged coaxially with the facing center P2 of the pair of guide rails 12 and 13. The table block 9 is integrally supported with the pair of guide rails 12 and 13 and supported between the pair of linear guides 10 and 11, and is movable in the axial direction. The configurations of the ball screw mechanism 3, the electromagnetic brake 4, and the coupling 5 will be described in detail with reference to FIGS.

  2 is a cross-sectional view showing the single-axis actuator 1 cut along the line AA in FIG. 1, and FIG. 3 is a cross-sectional view showing the single-axis actuator 1 cut along the line BB in FIG. Both the AA cutting line and the BB cutting line pass through the axial center P 0 of the ball screw shaft 26. As shown in FIGS. 2 and 3, a ball screw nut 27 is screwed onto the ball screw shaft 26. A support plate 28 is provided at the end of the ball screw nut 27 on the motor 2 side, and the support plate 28 is fixed to the end surface of the table block 9 by screws 29 and 29 (see FIG. 3). The table block 9 moves in conjunction with the axial movement of the ball screw nut 27. A plurality of balls (not shown) are inserted between the ball screw shaft 26 and the ball screw nut 27, and the table block 9 is moved via the plurality of balls and the ball screw nut 27 by rotating the ball screw shaft 26. Convert to axial linear motion. That is, when the ball screw nut 27 moves to the right side in the figure, the table block 9 is moved to the right side in the axial direction, and when the ball screw nut 27 moves to the left side in the figure, the table block 9 is moved to the left side in the axial direction. The moving direction of the table block 9 is determined by the rotation direction of the ball screw shaft 26 (that is, the motor 2). The table block 9 is provided with a hole 24 through which the ball screw shaft 26 is inserted.

  As shown in FIG. 1B, the ball screw mechanism 3 is disposed in a space surrounded by the case members 15, 16, and 17. As shown in FIGS. 1B and 2, a pair of linear guides 10 and 11 are arranged on both sides of the ball screw shaft 26. The linear guides 10 and 11 are fitted into recesses 30 and 31 provided in the side wall portion 15B of the case member 15 and the case member 16 facing each other. Opposed rail grooves 32 and 33 are formed in the linear guides 10 and 11, respectively (see FIG. 1B). Guide rails 12 and 13 project from the table block 9 so as to face the two linear guides 10 and 11, respectively. The guide rails 12 and 13 are inserted into the rail grooves 32 and 33, and the guide rail grooves 32 together with the table block 9 through a plurality of balls 35 (see FIG. 4) disposed along the rail grooves 32 and 33. , 33 and can be moved in the axial direction.

  The tool attachment portion 9A disposed on the opposite side of the table block 9 with respect to the motor 2 protrudes from the case members 15, 16, and 17 when the table block 9 is moved most toward the motor 2. The tool attachment portion 9A is provided with a screw hole 9D and a hole portion 9C (see FIG. 1B). Further, as shown in FIG. 3, the tool attachment portion 9E on the case member 17 side is provided with a screw hole 9F and a hole (not shown) similarly to the tool attachment portion 9A, and a part of the tool attachment portion 9E is formed. Projecting from the upper surface of the case member 17. The tool attachment portion 9E is movable within the range of the hole 8 provided in the case member 17.

  As shown in FIGS. 2 and 3, an electromagnetic brake 4 and a coupling 5 are disposed between the motor 2 and the ball screw mechanism 3. The coupling 5 is a multi-function coupling that shares functional elements with the electromagnetic brake 4. The coupling 5 has a cylindrical hub 39 that connects the motor shaft 38 and the ball screw shaft 26. The hub 39 has a coupling function of screwing and fixing the ball screw shaft 26 on the ball screw mechanism 3 side and stopping the insertion of the motor shaft 38 on the motor 2 side. The hub 39 has a function of restricting the axial movement position of the movable magnetic plate 48 of the electromagnetic brake 4 on the end surface 39B on the motor 2 side, and the end surface 39A on the ball screw mechanism 3 side supports the ball screw shaft 26. It has a function of pressing and fixing the angular ball bearing 37. Detailed configurations of the electromagnetic brake 4 and the coupling 5 will be described later with reference to FIG. Next, the fitting relationship between the linear guides 10 and 11 and the guide rails 12 and 13 will be described in detail with reference to FIG.

  FIG. 4 is an enlarged view showing a cross section of the ball screw mechanism 3 cut along the line CC in FIG. The guide rails 12 and 13 are inserted into the rail grooves 32 and 33 of the linear guides 10 and 11 via balls 35, respectively. Since the linear guide 10 and the guide rail 12, and the linear guide 11 and the guide rail 13 are symmetrically arranged with respect to the straight line S1 passing through the axis center P0 of the ball screw shaft 26 vertically, the linear guide 11 and the guide rail 13 are arranged. The side will be described as a representative example. The linear guide 11 and the guide rail 13 are symmetrical with respect to the straight line S2 orthogonal to the straight line S1. The ball 35 is disposed between the slope portion 40 of the linear guide 11 and the slope portion 41 of the guide rail 13. The ball 35 is circulated between the linear guide 11 and the guide rail 13 by the ball circulation portion 42.

  When the linear guide 11, the guide rail 13 (table block 9), and the ball 35 are assembled, a clearance (referred to as ball play) may occur between the linear guide 11, the guide rail 13, and the ball 35. When this clearance is large, the support of the table block becomes unstable, and it becomes easy to bend. Therefore, it is required to adjust this clearance appropriately. Next, this will be described.

  As shown in FIG. 4, the case member 16 is fixed to the bottom surface portion 15 </ b> A of the case member 15 and the case member 17 by screws 43 and 43. If a predetermined pressure F is applied to the case member 16 in the direction of the thick arrow in the figure before the screws 43 are completely tightened, the linear guide 11 moves in the same direction together with the case member 16. On the other hand, the linear guide 10 facing the linear guide 11 does not move because it is held by the side wall portion 15B of the case member 15. The case member 17 is fixed to the side wall portion 15B with screws 43 (not shown). Accordingly, by applying a pressure F to the linear guide 11 toward the linear guide 10, the pressure F is transmitted in the order of the guide rail 13, the table block 9, and the guide rail 12 via the ball 35, and the slope 40 It is possible to adjust the clearance by shifting the relative position with the slope portion 41.

  By tightening the screw 43 on the case member 16 side with a predetermined pressure F applied, the clearance between the linear guide 11 and the guide rail 13 and the ball 35 and the linear guide 10 and the guide rail 12 and the ball 35 are The clearance between them can be adjusted and maintained appropriately. The amount of movement of the linear guide 11 is in a range of ½ of the difference between the diameter of the screw shaft portions 44 and 44 of the screw 43 and the diameter of the hole 45 of the case member 15 and the hole 45 of the case member 17.

  Next, the configuration of the electromagnetic brake 4 and the coupling 5 will be described with reference to FIG. FIG. 5 is a cross-sectional view showing the configuration of the electromagnetic brake 4 and the coupling 5, and shows the electromagnetic brake 4 and the coupling 5 shown in FIG. 3 in an enlarged manner. Two angular ball bearings 37 are fitted into the recess 18 formed in the end wall portion 15C on the motor 2 side of the case member 15. The angular ball bearing 37 supports the ball screw shaft 26 in the axial direction (axial direction) and the radial direction. In the angular ball bearing 37, an outer ring 49 is sandwiched between the bottom surface of the recess 18 and the fixing plate 50, and an inner ring 51 is sandwiched between the stepped portion 57 of the ball screw shaft 26 and the end surface of the hub 39. The fixing plate 50 is fixed to the end surface wall portion 15 </ b> C of the case member 15 by screws 52 and 52. On the other hand, on the side of the angular contact ball bearing 37 of the hub 39, a screw hole 53 is formed to be screwed with the screw portion 46 formed in the shaft portion 36 of the ball screw shaft 26, and the hub 39 is screwed into the ball screw shaft 26. Press the inner ring 51 side. The motor shaft 38 is inserted into a hole 54 provided on the motor 2 side of the hub 39. The hub 39 is fixed from the side surfaces with set screws 55 and 56 (not shown) at the tip of the shaft portion 36 of the ball screw shaft 26 and the tip of the motor shaft 38, respectively, so that the motor 2 and the ball screw shaft 26 are connected. Coaxially connected, the rotation of the motor 2 is transmitted to the ball screw shaft 26.

  The electromagnetic brake 4 has a yoke 60 and a coil 61 attached to the motor 2 side. A movable magnetic plate 48 is disposed between the yoke 60 and the hub 39, and the movable magnetic plate 48 is movable between the yoke 60 and the end face 39B of the hub 39. A brake pad 64 is disposed between the movable magnetic plate 48 and the friction plate 63. The brake pad 64 is provided with a square hole 64A that fits into a prism portion 39C formed in the hub 39, and the brake pad 64 is rotatable with the hub 39 and movable in the axial direction. In addition, a coil spring 65 is disposed inside the coil 61 in the radial direction. As shown in FIG. 5, when no current is supplied to the motor 2 and the coil 61 (OFF), the electromagnetic attractive force does not act on the movable magnetic plate 48, so that the movable magnetic plate 48 is braked by the elastic force of the coil spring 65. The brake pad 64 moves until it abuts against the friction plate 63, and the rotation of the motor 2 and the ball screw shaft 26 is braked. In addition, when a current is supplied to the motor 2 and the coil 61 (ON), the movable magnetic plate 48 is attracted to the coil 61 side, and the brake pad 64 is in a free state in which no force acts, so the motor 2 and the ball screw shaft 26 rotates.

  The single-axis actuator 1 according to the present embodiment described above includes a motor 2, a ball screw mechanism 3 including a ball screw shaft 26 and a ball screw nut 27 that convert rotation of the motor 2 into linear motion, The electromagnetic brake 4 is disposed between the ball screw mechanism 3 and the coupling 5 that connects the motor shaft 38 of the motor 2 and the ball screw shaft 26. The coupling 5 includes a cylindrical hub 39, the ball screw shaft 26 is screwed and fixed to the ball screw mechanism 3 side of the hub 39, the motor shaft 38 is inserted into the motor 2 side, and the motor shaft side of the hub 39 is fixed. The end face 39B of the electromagnetic brake 4 restricts the axial movement position of the movable magnetic plate 48 of the electromagnetic brake 4, and the end face 39A of the ball screw mechanism 3 side supports the angular ball bearing 37 that supports the ball screw shaft 26. It is pressed and fixed with the part 57.

  Thus, by providing the coupling 5 with the function of connecting the motor 2 and the ball screw mechanism 3, a part of the braking element of the electromagnetic brake 4, and the function of fixing the angular ball bearing 37 of the ball screw mechanism 3. Even with the configuration including the electromagnetic brake 4, the single-axis actuator 1 can be shortened in the axial direction.

  The ball screw mechanism 3 is disposed so as to be sandwiched between a pair of linear guides 10 and 11 facing each other with a gap therebetween and moved in the axial direction integrally with the ball screw nut 27. The table center 9 is arranged such that the axial center P0 of the ball screw shaft 26 is coaxial with the facing center P2 of the pair of guide rails 12 and 13, and the radial cross-sectional center P1 of the table block 9 is the ball screw shaft 26. Is arranged coaxially with the axial center P0.

  With this configuration, the ball screw shaft 26 is rotated, and this rotational force is evenly transmitted to the linear guides 10 and 11 and the guide rails 12 and 13 via the ball screw nut 27, so that they are loaded respectively. Driving loss can be reduced by balancing the load.

  The table block 9 includes guide rails 12 and 13 projecting from two opposing surfaces 22 and 23, and is supported by a pair of linear guides 10 and 11 via the guide rails 12 and 13. Therefore, the radial cross-sectional area of the guide rails 12 and 13 is the sum of the table block 9 and can be made more rigid than the configuration of the prior art shown in FIG. Further, since the guide rails 12 and 13 project outwardly from the two opposite surfaces 22 and 23 of the table block 9, a space around the ball screw shaft 26 is large. The size of the linear guides 10 and 11 and the guide rails 12 and 13 can be increased without increasing the cross-sectional area of the ball screw mechanism 3 or the single-axis actuator 1 having high rigidity as a whole. realizable.

  The pair of linear guides 10 and 11 includes rail grooves 32 and 33 into which the guide rails 12 and 13 are inserted. The table block 9 includes guide rails 12 and 13 on both sides of the rail grooves 32 and 33 in the width direction. The linear guides 10 and 11 are held by the linear guides 10 and 11 so as to be movable in the axial direction via the balls 35 arranged on the base plate, and one of the pair of linear guides 10 and 11 (the linear guide 11) is applied to the other (linear guide 10) side with a predetermined force. The pressure between the ball 35 and the guide rails 12 and 13 and the linear guides 10 and 11 is adjusted by pressing with the (pressure F).

  If the clearance is large, the support of the table block 9 becomes unstable, and it becomes easy to bend. Thus, by applying pressure F to one of the linear guides 11 and assembling it, by adjusting this clearance appropriately, the support of the table block 9 can be stabilized and can be made difficult to bend.

  It should be noted that the present invention is not limited to the above-described embodiment, but includes modifications and improvements as long as the object of the present invention can be achieved.

DESCRIPTION OF SYMBOLS 1 ... 1 axis actuator 2 ... Motor 3 ... Ball screw mechanism 4 ... Electromagnetic brake 5 ... Coupling 9 ... Table block 10, 11 ... Linear guide 12, 13 ... Guide rail 22, 23 ... Surface 26 ... Ball screw shaft 27 ... Ball Screw nut 32, 33 ... Rail groove 35 ... Ball 37 ... Angular ball bearing 38 ... Motor shaft 39 ... Hub 48 ... Movable magnetic plate 57 ... Stepped part of ball screw shaft

Claims (4)

A motor,
A ball screw mechanism comprising a ball screw shaft and a ball screw nut for converting rotation of the motor into linear motion;
An electromagnetic brake disposed between the motor and the ball screw mechanism;
A coupling that connects the motor shaft of the motor and the ball screw shaft;
The coupling includes a cylindrical hub, the ball screw shaft is screwed and fixed to the ball screw mechanism side of the hub, and the motor shaft is inserted and fixed to the motor side.
The end surface on the motor side of the hub regulates the axial movement position of the movable magnetic plate of the electromagnetic brake, and the angular ball bearing on which the end surface on the ball screw mechanism side supports the ball screw shaft serves as the ball screw shaft. Press and fix between the steps of
A single-axis actuator characterized by the above. The single-axis actuator according to claim 1,
The ball screw mechanism has a pair of linear guides facing each other at an interval, and a table block arranged so as to be sandwiched between the pair of linear guides and moving in the axial direction integrally with the ball screw nut,
The axial center of the ball screw shaft is disposed coaxially with the facing center of the pair of guide rails,
The center of the table block in the radial direction is disposed coaxially with the center of the ball screw shaft.
A single-axis actuator characterized by the above. The single-axis actuator according to claim 2,
The table block includes guide rails projecting from two opposing surfaces, and is supported by the pair of linear guides via the guide rails.
A single-axis actuator characterized by the above. The single-axis actuator according to claim 2 or claim 3,
The pair of linear guides includes rail grooves into which each of the guide rails is inserted,
The table block is held by the linear guide so as to be movable in the axial direction via balls arranged on both sides of the rail groove in the width direction,
Pressing one of the pair of linear guides to the other side with a predetermined force, and adjusting a clearance between the ball, the guide rail, and the linear guide;
A single-axis actuator characterized by the above.

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