JP2018105836A - Inner surface inspection device and inner surface inspection system - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an inner surface inspection device and an inner surface inspection system capable of performing, for instance, an inner inspection of an inspection object with high accuracy.SOLUTION: An inner surface inspection device includes: an inspection rod having a light guide path internally and an opening configured to introduce external light into the light guide path; a plurality of light sources disposed at the inspection rod and configured to emit irradiation light for irradiating an inspection object surface; an imaging part configured to image the inspection object surface with the light introduced inside the light guide path via the opening from among reflection light at the inspection object surface of the irradiation light; and an irradiation changeover part configured to changeover an irradiation pattern of the plurality of light sources. The opening is positioned among the plurality of light sources.SELECTED DRAWING: Figure 4

Description

  The present invention relates to an inner surface inspection apparatus and an inner surface inspection system.

  2. Description of the Related Art Conventionally, a technique is known in which an inner surface (inspection target surface) of an inspection target is imaged with light irradiated from an end of a cylindrical inspection target, and the inner surface is inspected. There is also known a technique in which an inner surface of an inspection object is imaged by light irradiated from coaxial incident illumination such as a prism inserted into a cylindrical inspection object, and the inner surface is inspected.

Japanese Utility Model Publication No. 6-041163 Japanese Patent Laying-Open No. 2015-132588 Japanese Patent No. 4339094

  However, in the above prior art, it is difficult to change the irradiation direction (irradiation pattern) of the light on the inspection target surface, and therefore it is difficult to determine the presence or absence of the abnormality depending on the shape of the abnormality that may occur on the inspection target surface. There was a case.

  Then, one of the subjects of this invention is obtaining the inner surface inspection apparatus and inner surface inspection system which can perform the test | inspection of the inner surface of a test target object with higher precision.

  In the inner surface inspection apparatus according to the embodiment, a light guide is provided inside and an inspection rod provided with an opening for introducing light from the outside into the light guide, and the inspection rod provided on the inspection rod illuminates the surface to be inspected. A plurality of light sources that emit irradiation light, an imaging unit that images the inspection target surface by light introduced into the light guide path through the opening of the reflected light on the inspection target surface, and irradiation patterns of the plurality of light sources And an irradiation switching section that switches between the plurality of light sources.

FIG. 1 is a block diagram illustrating an example of the overall configuration of the inner surface inspection system according to the first embodiment. FIG. 2 is a schematic and exemplary external view of the inner surface inspection apparatus according to the first embodiment. FIG. 3 is a schematic and exemplary diagram of a schematic configuration of the inner surface inspection apparatus according to the first embodiment. FIG. 4 is a schematic and exemplary external view of the distal end portion of the inner surface inspection rod according to the first embodiment. FIG. 5 is a schematic and exemplary bottom view of the distal end portion of the inner surface inspection rod according to the first embodiment. FIG. 6 is a schematic and exemplary cross-sectional view of the distal end portion of the inner surface inspection rod according to the first embodiment. FIG. 7 is a block diagram illustrating an example of a hardware configuration of the control device according to the first embodiment. FIG. 8 is a diagram illustrating an example of a hardware configuration of the PC according to the first embodiment. FIG. 9 is a block diagram illustrating an example of a functional configuration of the PC according to the first embodiment. FIG. 10 is a diagram schematically illustrating an example of image composition according to the first embodiment. FIG. 11 is a flowchart illustrating an example of the procedure of the inner surface imaging process according to the first embodiment. FIG. 12 is a flowchart illustrating an exemplary procedure of image processing and pass / fail determination processing according to the first embodiment. FIG. 13A is a diagram illustrating an example of a captured image according to the first modification of the first embodiment. FIG. 13B is a diagram illustrating an example of a captured image according to the first modification of the first embodiment. FIG. 13C is a diagram illustrating an example of a captured image according to the first modification of the first embodiment. FIG. 13D is a diagram illustrating an example of a captured image according to the first modification of the first embodiment. FIG. 14 is a schematic and exemplary diagram of a schematic configuration of the tip portion of the inner surface inspection rod according to the third modification of the first embodiment. FIG. 15 is a schematic and exemplary external view of the inner surface inspection apparatus according to the second embodiment. FIG. 16 is a schematic and exemplary cross-sectional view of a schematic configuration of the inner surface inspection system according to the second embodiment. FIG. 17 is a block diagram illustrating an example of a functional configuration of a PC according to the second embodiment. FIG. 18 is a flowchart illustrating an example of the procedure of the inner surface imaging process according to the second embodiment.

  Hereinafter, exemplary embodiments of the present invention are disclosed. The configuration and control of the embodiment shown below, and the operation and result (effect) brought about by the configuration and control are examples. The present invention can be realized by other than the configurations and controls disclosed in the following embodiments. Further, the present invention can obtain various effects including derivative effects obtained by basic configuration and control.

(Embodiment 1)
FIG. 1 is a block diagram showing an example of the overall configuration of the inner surface inspection system S according to the present embodiment. As shown in FIG. 1, the inner surface inspection system S according to the present embodiment includes an inner surface inspection device 4, a control device 2, and a PC 1.

  The PC 1 is a computer that performs image processing of a captured image captured by the camera 42 of the inner surface inspection apparatus 4 and processing for determining a defect on the inner surface of the inspection object captured by the camera 42. Further, the PC 1 controls the inspection start position of the inner surface inspection apparatus 4. The PC 1 is an example of an information processing apparatus in the present embodiment. Details of the configuration and functions of the PC 1 will be described later. The cable 10 is a communication line that transmits signals and data between the PC 1 and the control device 2.

  The control device 2 is a device that performs signal conversion and power supply to the inner surface inspection device 4. Details of the configuration and functions of the control device 2 will be described later. The cable 9 is a power supply line that supplies power from the power supply 8 to the control device 2.

  As shown in FIG. 1, the inner surface inspection device 4 includes a main body portion 40, a rotary connector 41, a stepping motor 45, and a rotary encoder 46.

  The cable 3 a is a cable that connects the control device 2 and the rotary connector 41. The cable 3 a includes a power supply line that supplies power to the main body 40 of the inner surface inspection apparatus 4 and a communication line that transmits signals and data between the control device 2 and the inner surface inspection apparatus 4.

  The cable 3 b is a cable that connects the control device 2 and the rotary encoder 46. The cable 3 b includes a power supply line that supplies power to the rotary encoder 46 and a communication line that transmits a signal from the rotary encoder 46 to the control device 2.

  The cable 3 c is a cable that connects the control device 2 and the stepping motor 45. The cable 3 c includes a power supply line that supplies power to the stepping motor 45 and a communication line that transmits a signal from the control device 2 to the stepping motor 45.

  As shown in FIG. 1, the main body 40 includes a camera 42, LEDs (Light Emitting Diodes) 53A to 53D, and LED control circuits 47A to 47D. The internal cable 7 is an internal cable that supplies power to each component of the main body 40 and transmits signals and data.

  The LEDs 53A to 53D are a plurality of light sources that irradiate the inspection target surface with diffused light. The LEDs 53A to 53D are an example of a plurality of light sources in the present embodiment, and other lighting devices may be employed. The LEDs 53C and 53D are also referred to as a plurality of first light sources, and the LEDs 53A and 53B are also referred to as a plurality of second light sources.

  The LED control circuits 47A to 47D are circuits that individually control the lighting and light amount of the LEDs 53A to 53D. The LED control circuits 47A to 47D switch the irradiation patterns of the LEDs 53A to 53D on the inspection target surface by controlling the lighting of the LEDs 53A to 53D. The LEDs 53A to 53D are not limited to switching lighting, and may be all lighting control. For example, the LED control circuits 47A to 47D may light all the LEDs 53A to 53D.

  In the present embodiment, the first irradiation pattern includes a plurality of first light sources LED 53C and 53D that emit irradiation light, and a plurality of second light sources LED 53A and 53B that emit irradiation light. No irradiation pattern. In addition, the second irradiation pattern is an irradiation pattern in which the LEDs 53C and 53D that are the plurality of first light sources do not emit irradiation light, and the LEDs 53A and 53B that are the plurality of second light sources emit irradiation light. LED control circuit 47A-47D of this embodiment switches a 1st irradiation pattern and a 2nd irradiation pattern alternately. The LED control circuits 47A to 47D input the pulse signal output from the rotary encoder 46 via the control device 2 and the rotary connector 41 as a trigger for turning on or off. When the pulse signals are input, the LED control circuits 47A to 47D switch the irradiation pattern by turning on or off the LEDs 53A to 53D. LED control circuit 47A-47D is an example of the irradiation switching part in embodiment.

  The LED control circuits 47A to 47D each include a variable resistor (not shown). The resistance value of the variable resistor (not shown) can be changed manually by the user. By changing the resistance values of the variable resistors (not shown) of the LED control circuits 47A to 47D, the light amounts of the LEDs 53A to 53D are changed. The LED control circuits 47A to 47D are not limited to being manually operated by the user, and may adopt a configuration in which the light amounts of the LEDs 53A to 53D are changed by a signal input from the control device 2.

  The stepping motor 45 is a rotation drive mechanism for rotating a rotation unit including the camera 42 and the like by a certain angle. The configuration included in the rotating unit will be described later. The stepping motor 45 rotates the rotating portion by transmitting rotational power to the main body via a rotation transmission mechanism (not shown in FIG. 1). The stepping motor 45 is an example of a rotation drive mechanism in the present embodiment. The stepping motor 45 according to the present embodiment rotates the camera 42 and the like by dividing one round (360 degrees) into 4000 times. That is, the “certain angle” in the stepping motor 45 of the present embodiment is 0.09 degrees. The rotation angle and the number of rotations per rotation are examples, and the present invention is not limited to this.

  Further, the stepping motor 45 inputs a signal for designating a rotation starting position arbitrarily designated by the user from the PC 1 through the control device 2 and the cable 3c in the inner surface inspection. The stepping motor 45 rotates to a designated start position and then rotates by a certain angle from the start position.

  The rotary encoder 46 is a rotation detection mechanism that detects the rotation of the stepping motor 45. When the rotary encoder 46 detects that the stepping motor 45 has rotated by a certain angle, the rotary encoder 46 outputs a pulse signal to the control device 2 via the cable 3b. The pulse signal is a signal that triggers the camera 42 to capture an image, and that triggers LED control circuits 47A to 47D to switch the irradiation pattern. In this embodiment, the rotary encoder 46 outputs a pulse signal serving as a trigger for 4000 times per round. The rotary encoder 46 is an example of a rotation detection mechanism, and the inner surface inspection apparatus 4 may detect the rotation of the stepping motor 45 by another configuration.

  The camera 42 is, for example, a dual line camera including two TDI (Time Delayed Integration) type sensor elements that are time delay integration types. For example, the camera 42 inputs a pulse signal output from a rotary encoder 46 described later via the control device 2, the rotary connector 41, and the internal cable 7. When the pulse signal is input, the inspection target surface is imaged. The camera 42 captures images alternately by the first sensor element and the second sensor element.

  For example, the camera 42 images the inspection target surface irradiated with the first irradiation pattern with the first sensor element, and then the inspection target surface irradiated with the second irradiation pattern with the second sensor. Take an image with the element. In the present embodiment, since the camera 42 is rotated by 0.09 degrees by the stepping motor 45, the camera 42 is imaged by the first sensor element, then rotated 0.09 degrees, and then the second sensor Take an image with the element. The camera 42 alternately captures images with the two sensor elements while rotating in this way, so that each time the inside of the inspection object 62 rotates, the captured image irradiated with two types of irradiation patterns can be captured. it can. Further, there is a certain difference in the imaging area between the first captured image captured by the first sensor element and the second captured image captured by the second sensor element. The difference is adjusted in image processing described later.

  The camera 42 outputs the captured image data to the rotary connector 41 via the internal cable 7. The camera 42 is an example of an imaging unit in the present embodiment.

  The rotation connector 41 is a connector capable of infinite rotation in the forward and reverse 360 degrees. Specifically, the rotary connector 41 electrically connects the rotating side that rotates infinitely and the fixed side in a non-contact manner. In the rotary connector 41 of the present embodiment, the side in contact with the main body 40 is the rotation side, and the side connected to the cable 3a is the fixed side. Even when the main body 40 is rotated by the stepping motor 45, the side of the rotary connector 41 connected to the cable 3a does not rotate.

  Specifically, the rotary connector 41 inputs the power input from the control device 2 via the cable 3a and the control signal to the camera 42 to the main body 40 in a non-contact manner. The rotary connector 41 acquires the pulse signal output from the rotary encoder 46 via the control device 2 and the cable 3a, and inputs the pulse signal to the camera 42 and the LED control circuits 47A to 47D of the main body 40 in a non-contact manner. Further, the rotary connector 41 acquires the captured image data captured by the camera 42 from the main body 40 in a non-contact manner, and outputs it to the control device 2 via the cable 3a.

  Next, details of the inner surface inspection apparatus 4 in the present embodiment will be described. FIG. 2 is a schematic and exemplary external view of the inner surface inspection apparatus 4 according to the present embodiment. The covers 403 </ b> A to 403 </ b> B cover the outside of the inner surface inspection apparatus 4. The camera 42 and the LED control circuits (irradiation switching units) 47A to 47D of the inner surface inspection apparatus 4 described in FIG. 1 are positioned inside the cover 403A. The rotary connector 41 is located inside the cover 403B. Further, the stepping motor 45 and the rotary encoder 46 are located inside the cover 403C.

  As shown in FIG. 2, the inner surface inspection device 4 includes an inner surface inspection rod 5 exposed to the outside of the cover 403A. The inner surface inspection rod 5 is included in the main body 40 of FIG. LEDs 53 </ b> A to 53 </ b> D are provided at the tip of the inner surface inspection rod 5. In the inner surface inspection, the inner surface inspection rod 5 is positioned inside the inspection object. The inner surface inspection rod 5 can also be referred to as an inspection rod, a rod-shaped member, a support member, or a passage member. Details of the configuration of the tip of the inner surface inspection rod 5 will be described later.

  FIG. 3 is a schematic and exemplary diagram of a schematic configuration of the inner surface inspection apparatus 4 according to the present embodiment. In FIG. 3, the axial direction of the central axis Ax1 and the central axis Ax2 parallel to each other and from the inner surface inspection rod 5 toward the lens 43 is referred to as a B direction.

  As described in FIG. 2, the rotary connector 41 is positioned inside the cover 403B. The stepping motor 45 and the rotary encoder 46 are located inside the cover 403C. The cable 3c connected to the stepping motor 45 and the cable 3b connected to the rotary encoder 46 extend outside the cover 403C.

  As shown in FIG. 3, the main body 40 includes a camera 42, a lens 43, an adapter 44, an inner surface inspection rod 5, a plurality of bearings 400 </ b> A and B, a fixing portion 401, and a connection member 404. . The inner cover 402 is positioned inside the cover 403A. The inner cover 402 is a protective wall that covers the camera 42 and the lens 43 of the inner surface inspection apparatus 4.

  The lens 43 is, for example, a telecentric lens. The lens 43 is connected to the camera 42. The lens 43 extends in the axial direction of the central axis Ax1.

  The adapter 44 is a connection member that connects the inner surface inspection rod 5 and the lens 43. For example, the adapter 44 grips the inner surface inspection rod 5. The inner surface inspection rod 5 extends in the axial direction of the central axis Ax1.

  The camera 42, the lens 43, the adapter 44, and the inner surface inspection rod 5 are connected and fixed by a connection member 404. The camera 42, the lens 43, the adapter 44, the inner surface inspection rod 5, the board 405, and the coupling 406 are integrated, and a plurality of bearings 400 </ b> A, B are rotatable about the central axis Ax <b> 1. It is supported by the fixing part 401 via The fixing unit 401 is a bearing holder, for example, but is not limited thereto. The camera 42, the lens 43, the adapter 44, the inner surface inspection rod 5, the board 405, the coupling 406, and the connection member 404 are an example of a rotating unit in the present embodiment. In other words, the rotating portion of the present embodiment includes the inner surface inspection rod 5 and the camera 42, and is supported by the fixed portion 401 so as to be rotatable around the central axis Ax1 along the longitudinal direction of the inner surface inspection rod 5. The center axis Ax1 is an example of the rotation center in the present embodiment.

  The stepping motor 45 rotates the shaft 45a around the central axis Ax2 parallel to the central axis Ax1. The rotation of the shaft 45 a is transmitted to the rotating unit via the rotation transmission mechanism 49. That is, the stepping motor 45 is an example of a rotating mechanism that rotates the rotating portion around the central axis Ax1. In the present embodiment, the rotation transmission mechanism 49 includes, for example, two pulleys and a belt covering the two pulleys, and transmits the rotation between the two pulleys by the belt, but is not limited thereto. For example, a configuration in which rotation is transmitted by a plurality of gears meshing with each other may be used.

  Next, details of the inner surface inspection rod 5 according to the present embodiment will be described. FIG. 4 is a schematic and exemplary external view of the distal end portion of the inner surface inspection rod 5 according to the present embodiment. As shown in FIG. 4, the inner surface inspection rod 5 is provided with an opening 50 for introducing light from the outside into the light guide inside the inner surface inspection rod 5. As shown in FIG. 4, in the inner surface inspection rod 5, the LEDs 53C and 53D (a plurality of first light sources) are positioned away from each other in the circumferential direction of the central axis Ax1. In the inner surface inspection rod 5, the LEDs 53A and 53B (a plurality of second light sources) are positioned away from each other in the axial direction of the central axis Ax1. The inner surface inspection rod 5 may also be referred to as a support member that supports the LEDs 53A to 53D.

  The opening 50 is, for example, a through hole that penetrates the outer wall of the inner surface inspection rod 5, and introduces light from the outside into the light guide path inside the inner surface inspection rod 5. The opening 50 is located between the LEDs 53C and 53D and between the light sources of the LEDs 53A and 53B. The opening 50 is, for example, a rectangle (rectangle) that is long in the longitudinal direction of the inner surface inspection rod 5. The shape of the opening 50 is not limited to this. Further, a panel made of a light-transmitting material such as glass or acrylic resin may be fitted into the opening 50. The opening 50 can also be referred to as a slit or an imaging window.

  FIG. 5 is a schematic and exemplary bottom view of the distal end portion of the inner surface inspection rod 5 according to the present embodiment. As shown in FIG. 5, the outer surface of the inner surface inspection rod 5 includes four surfaces. Of the outer surfaces of the inner surface inspection rod 5, the surface provided with the opening 50 is defined as a first outer surface 55a. In addition, of the outer surfaces of the inner surface inspection rod 5, two surfaces intersecting (for example, orthogonal to) the first outer surface 55a are referred to as a second outer surface 55b and a third outer surface 55c, respectively. Moreover, let the surface on the opposite side of the 1st outer surface 55a among the outer surfaces of the inner surface inspection rod 5 be the 4th outer surface 55d. Further, the first to fourth outer surfaces are collectively referred to as an outer surface 55. The first outer surface 55 a can be referred to as the front surface of the inner surface inspection rod 5. The second outer surface 55 b and the third outer surface 55 c can be referred to as side surfaces of the inner surface inspection rod 5. The fourth outer surface 55 d can be referred to as the back surface of the inner surface inspection rod 5.

  LED53A and LED53B are located in the 1st outer surface 55a. The LED 53C is located on the second outer surface 55b. The LED 53D is positioned on the third outer surface 55c. In other words, the LED 53A and the LED 53B are positioned on the front surface of the inner surface inspection rod 5, and the LED 53C and the LED 53D are positioned on the side surface of the inner surface inspection rod 5.

  The LED 53C and the LED 53D are positioned on the second outer surface 55b and the third outer surface 55c, respectively, so that the first outer surface 55a and the LEDs 53A to 53D are positioned on the first outer surface 55a. The width | variety of the inner surface inspection rod 5 containing LED53A-53D at the time of seeing from the orthogonal direction can be made small. A control circuit (not shown) for the LEDs 53A to 53D is provided on the board 405, and the control circuit and the LEDs 53A to 53D are electrically connected via a wiring (not shown).

  Next, the internal configuration of the inner surface inspection rod 5 according to the present embodiment will be described. FIG. 6 is a schematic and exemplary cross-sectional view of the distal end portion of the inner surface inspection rod 5 according to the present embodiment. As shown in FIG. 6, the inner surface inspection rod 5 includes an inner surface 57, a first outer surface 55a, a mirror 52, and LEDs 53A and 53B attached to the first outer surface 55a. The LEDs 53C and 53D are not shown in FIG.

  The internal space 54 of the inner surface inspection rod 5 can be referred to as a light guide, a passage, or a cylinder. The outer surface 55 has a cylindrical shape extending along the central axis Ax1, that is, extending in the B direction. The opening 50 is provided through the inner surface 57 of the inner surface inspection rod 5 and the first outer surface 55a.

  The mirror 52 is an optical component that reflects (deflects) light introduced from the opening 50.

  The inspection object 62 is configured in a cylindrical shape centered on the central axis Ax1, for example, and the inspection target surface 62A is, for example, a cylindrical surface. The inspection target surface 62A may also be referred to as an inner surface of the inspection target 62. The inspection object 62 is not limited to a cylindrical object.

  The irradiation light 56A is an example of light included in the diffused light irradiated by the LED 53A. The irradiation light 56B is an example of light included in the diffused light irradiated by the LED 53B. As shown in FIG. 6, the irradiation light 56A and the irradiation light 56B are irradiated at different angles with respect to the inspection target surface 62A. The reflected light 56C is an example of reflected light that is reflected by the irradiation light 56A on the inspection target surface 62A. The reflected light 56D is an example of reflected light that is reflected by the irradiation light 56B on the inspection target surface 62A. The refracted light 56E is an example of refracted light that is reflected by the mirror 52 from the reflected light 56C and the reflected light 56D.

  In the inner surface inspection rod 5, the reflected lights 56 </ b> C and 56 </ b> D from the inspection object surface 62 </ b> A are introduced into the inner space 54 of the inner surface inspection rod 5 through the opening 50. The reflected lights 56C and 56D introduced into the internal space 54 are reflected and refracted by the mirror 52 to become refracted light 56E. The refracted light 56E travels through the internal space 54 in the B direction. That is, light traveling in the B direction from the mirror 52 passes through the internal space 54 of the inner surface inspection rod 5.

  The refracted light 56E that has passed through the internal space 54 reaches the lens 43 and the camera 42. The camera 42 images a region facing the opening 50 on the inspection target surface 62A by the refracted light 56E that has passed through the internal space 54 and the lens 43. In other words, the camera 42 images the inner surface of the inspection object 62 (inspection object surface 62A) with the light introduced from the opening 50. The inner surface inspection rod 5 functions as a shielding wall that prevents light reflected by the mirror 52 from leaking. The inner surface inspection rod 5 may be formed in a cylindrical shape by a metal material, a synthetic resin material, or the like that does not transmit light, or may be coated with a material that does not transmit light to the inner surface 57 and the outer surface 55.

  Next, the control device 2 in the present embodiment will be described. FIG. 7 is a block diagram illustrating an example of a hardware configuration of the control device 2 according to the present embodiment. As shown in FIG. 7, the control device 2 according to the present embodiment includes a power transformer circuit 21, a signal conversion circuit 22, an emergency stop switch 23, and a communication interface 24.

  The power transformer circuit 21 is a circuit that transforms the voltage of the electric power input from the power supply 8 into a voltage that can be input to each of the rotary connector 41, the stepping motor 45, and the rotary encoder 46. The power transformer circuit 21 inputs the transformed power to the rotary connector 41, the stepping motor 45, and the rotary encoder 46 via the cables 3a to 3c, respectively. A plurality of power transformer circuits 21 may be provided in accordance with the type of voltage to be converted.

  The signal conversion circuit 22 is a circuit that converts a pulse signal input from the rotary encoder 46 via the cable 3 b into a signal that can be input to the rotary connector 41. For example, the signal conversion circuit 22 performs conversion by changing the voltage of the pulse signal. The signal conversion circuit 22 inputs the converted pulse signal to the rotary connector 41 via the cable 3a.

  The emergency stop switch 23 is a switch that stops power supply to the rotary connector 41, the stepping motor 45, and the rotary encoder 46. The emergency stop switch 23 is, for example, a button or the like provided outside the control device 2 and can be pressed by the user.

  The communication interface 24 is an interface for inputting and outputting signals and data between the rotary connector 41 and the PC 1. For example, the communication interface 24 inputs data of a captured image captured by the camera 42 from the rotary connector 41 via the cable 3a. The communication interface 24 outputs the input captured image data to the PC 1 via the cable 10. The structure of the control apparatus 2 shown in FIG. 7 is an example, and is not limited to this.

  Next, the PC 1 in this embodiment will be described. FIG. 8 is a diagram illustrating an example of a hardware configuration of the PC 1 according to the present embodiment. As shown in FIG. 8, the PC 1 includes an input device 11, a CPU 12, a memory 13, an HDD (Hard Disk Drive) 14, a display 15, an interface 16, and a bus 17.

  The input device 11 is, for example, a keyboard, a mouse, a touch panel, or the like, and is a device that accepts user operations.

  The CPU 12 is a control device that performs overall control of the PC 1. For example, the CPU 12 implements various configurations by executing a program or the like stored in the memory 13. The memory 13 is a memory that stores readable data, and is, for example, a ROM. Further, the PC 1 may employ a configuration further including a memory such as a writable RAM.

  The HDD 14 is an external storage device (auxiliary storage device). The PC 1 may adopt a configuration including a storage medium such as a flash memory instead of the HDD 14.

  The display 15 is a display device including a liquid crystal panel and the like, and is an example of a display unit in the present embodiment. The interface 16 is an interface for transmitting and receiving signals and data to and from the control device 2 via the cable 10. The bus 17 is a data transmission path inside the PC 1. The hardware configuration of the PC 1 shown in FIG. 8 is an example, and the present invention is not limited to this. PC1 should just be provided with the structure of a normal computer.

  FIG. 9 is a block diagram illustrating an example of a functional configuration of the PC 1 according to the present embodiment. As shown in FIG. 9, the PC 1 according to the present embodiment includes a reception unit 100, an inspection position setting unit 101, an input unit 102, an image adjustment unit 103, an image composition unit 104, an abnormality detection unit 105, The determination unit 106, the display control unit 107, and the storage unit 150 are provided.

  The storage unit 150 is configured by the HDD 14, for example. The storage unit 150 stores pass / fail reference data. The acceptance / rejection criterion data is data defining a criterion as to whether or not the inspection object 62 is a non-defective product. The acceptance / rejection reference data defines, for example, the area occupied by an abnormal part such as a scratch in the composite image, and the upper and lower dimensions. The acceptance / rejection reference data may define different criteria depending on, for example, the position of an abnormal part such as a scratch on the inspection target surface 62A.

  The accepting unit 100 accepts user operations via the input device 11. For example, the reception unit 100 receives the coordinates of the rotation start position of the stepping motor 45 input by the user.

  The inspection position setting unit 101 acquires the coordinates of the rotation start position of the stepping motor 45 received by the receiving unit 100. The inspection position setting unit 101 sends a signal specifying the rotation start position of the stepping motor 45 to the control device 2 via the interface 16 based on the coordinates input by the user.

  The input unit 102 inputs data of a captured image captured by the camera 42 from the control device 2 via the cable 10.

  The image adjustment unit 103 displays positions (ranges) for the first captured image captured by the first sensor element of the camera 42 and the second captured image captured by the second sensor element of the camera 42. Adjust so that For example, as described above, the first captured image and the second captured image have a certain difference in the imaging region on the inspection target surface 62A. For this reason, the image adjustment unit 103 corrects the position difference between the first captured image and the second captured image to align the positions. Image adjustment performed by the image adjustment unit 103 is preprocessing for combining the first captured image and the second captured image. The image adjustment unit 103 sends the adjusted first captured image and second captured image to the image composition unit 104.

  The image combining unit 104 combines a plurality of captured images captured by the camera 42. For example, the image synthesis unit 104 synthesizes the first captured image adjusted by the image adjustment unit 103 and the second captured image. FIG. 10 is a diagram schematically illustrating an example of image composition according to the present embodiment.

  An image 900 shown in FIG. 10 is a first image in which the camera 42 images the inspection target surface 62A in a state (first irradiation pattern) in which the LEDs 53C and 53D emit irradiation light and the LEDs 53A and 53B do not emit irradiation light. It is the image which represented typically the picked-up image. Further, in the image 901 shown in FIG. 10, the camera 42 images the inspection target surface 62A in a state (second irradiation pattern) in which the LEDs 53C and 53D do not emit irradiation light and the LEDs 53A and 53B emit irradiation light. It is the image which represented the 2nd captured image typically. Assume that the positions of the images 900 and 901 shown in FIG.

  An image 903 is an image schematically representing a composite image obtained by combining the first captured image and the second captured image by the image composition unit 104. A white range in the images 900 to 903 indicates a streak wound that has entered the inspection target surface 62A, and a black range indicates a base of the inspection target surface 62A. The scratch is an example of an abnormal part on the inspection target surface 62A, and the present invention is not limited to this.

  In the first irradiation pattern, the scratch in the axial direction (direction along the central axis Ax1) of the inspection target surface 62A reflects the irradiation light irradiated from the LEDs 53C and 53D. For this reason, in the first captured image, the brightness of the range of the captured image corresponding to the scratch in the axial direction of the inspection target surface 62A is increased, and as illustrated in the image 900, the scratch in the axial direction of the inspection target surface 62A is Expressed more clearly.

  Further, in the second irradiation pattern, the scratch in the circumferential direction of the inspection target surface 62A reflects the irradiation light irradiated from the LEDs 53A and 53B. For this reason, in the second captured image, the brightness of the range of the captured image corresponding to the scratch in the circumferential direction of the inspection target surface 62A increases, and as shown in the image 901, the circumferential direction (center axis Ax1) of the inspection target surface 62A Scratches in the direction intersecting with) more clearly.

  The image combining unit 104 combines the first captured image and the second captured image to generate a combined image. A known technique is used for image synthesis in the present embodiment. As shown in an image 903, the composite image clearly represents both the scratch clearly shown in the first captured image and the scratch clearly expressed in the second captured image, and the scratch on the inspection target surface 62A. The overall picture of is displayed more clearly. That is, in the composite image, the feature amount corresponding to the abnormal portion is larger than that of the first captured image and the second captured image, so that the abnormal portion on the inspection target surface 62A is easily discriminated. The image composition unit 104 sends the generated composite image to the abnormality detection unit 105.

  Returning to FIG. 9, the abnormality detection unit 105 detects an abnormal part such as a scratch from the synthesized image synthesized by the image synthesis unit 104. For example, the abnormality detection unit 105 detects a range where the luminance value exceeds a predetermined threshold as an abnormal part. The method of abnormality detection by the abnormality detection unit 105 is not limited to this. The abnormality detection unit 105 detects the area, size, position, etc. of the abnormal part and sends it to the determination unit 106.

  The determination unit 106 determines whether the inspection object 62 is acceptable, that is, whether the inspection object 62 is a good product or a defective product. For example, the determination unit 106 compares information such as the area, length, and position of the abnormal part acquired from the abnormality detection unit 105 with pass / fail standard data stored in the storage unit 150, and the abnormal part satisfies the acceptance standard. If it is determined that there is no such object, the inspection object 62 is determined to be defective. The determination unit 106 determines that the inspection object 62 is a non-defective product when it is determined that the abnormal part satisfies the acceptance criteria.

  The area, length, position, and the like of the abnormal part are merely examples, and the determination unit 106 may adopt a configuration for determining pass / fail based on other information. The determination unit 106 sends the determination result of pass / fail of the inspection object 62 to the display control unit 107.

  The display control unit 107 displays the determination result of the pass / fail of the inspection object 62 on the display 15. Further, the display control unit 107 may adopt a configuration in which the first captured image, the second captured image, and the composite image are displayed on the display 15.

  Next, the inner surface imaging process of the present embodiment configured as described above will be described. FIG. 11 is a flowchart illustrating an example of the procedure of the inner surface imaging process according to the present embodiment. The process of the flowchart is started after the inner surface inspection rod 5 is inserted into the inner surface of the inspection object 62.

  First, the inspection position setting unit 101 sends a signal for designating the rotation start position of the stepping motor 45 to the control device 2 via the interface 16 based on the coordinates input by the user. The stepping motor 45 rotates to move the opening 50 of the inner surface inspection rod 5 to the inspection start position (S1).

  The stepping motor 45 rotates a predetermined angle starting from the inspection start position (S2). In this embodiment, since the predetermined angle is 0.09 degrees, the stepping motor 45 rotates 0.09 degrees. When the rotation of the stepping motor 45 is transmitted via the rotation transmission mechanism 49, the camera 42, the lens 43, the adapter 44, the inner surface inspection rod 5, the board 405, the coupling 406, and the connection member 404 Is rotated by 0.09 degrees around the central axis Ax1.

  The rotary encoder 46 detects the rotation of the stepping motor 45 and outputs the first trigger pulse signal, that is, the trigger 1 signal (S3). The signal conversion circuit 22 of the control device 2 inputs the signal of the trigger 1 input via the cable 3 b and converts it into a signal format that can be input to the rotary connector 41. The signal conversion circuit 22 outputs the signal of the trigger 1 to the rotary connector 41 via the cable 3a. The rotary connector 41 inputs the trigger 1 signal input via the cable 3 a to the LED control circuits 47 </ b> A to 47 </ b> D and the camera 42 via the internal cable 7.

  The LED control circuits 47A to 47D receiving the trigger 1 signal control the LEDs 53A to 53D to irradiate them with the first irradiation pattern (S4). That is, in S4, the first light source (LEDs 53C and 53D) emits irradiation light, and the second light source (LEDs 53A and 53B) does not emit irradiation light. Irradiation light emitted by the first light source (LEDs 53C, 53D) is reflected by the inspection target surface 62A to be reflected light, and deflected by the mirror 52 to be refracted light 56E. As shown in FIG. 6, the refracted light 56E travels in the B direction through the internal space 54 of the inner surface inspection rod 5. The refracted light 56E that has passed through the internal space 54 reaches the lens 43 and the camera 42.

  Further, the camera 42 that has received the trigger 1 signal images the inspection target surface 62A by the first sensor element (S5). That is, the camera 42 images an area facing the opening 50 on the inspection target surface 62A by the refracted light 56E that has passed through the internal space 54 and the lens 43. The camera 42 and the LED control circuits 47 </ b> A to 47 </ b> D start operating by the same trigger signal, but the imaging of the camera 42 is performed as necessary so that the timing of irradiation by the LEDs 53 </ b> A to 53 </ b> D is not delayed from the imaging by the camera 42. The camera 42 may be set so as to delay.

  After a predetermined time has elapsed, the stepping motor 45 further rotates by a predetermined angle, that is, 0.09 degrees (S6). The camera 42, the lens 43, the adapter 44, the inner surface inspection rod 5, the board 405, the coupling 406, and the connecting member 404 rotate 0.09 degrees around the central axis Ax1.

  The rotary encoder 46 detects the rotation of the stepping motor 45 and outputs a pulse signal that is the second trigger, that is, the signal of the trigger 2 (S7). The signal conversion circuit 22 of the control device 2 inputs the signal of the trigger 2 input via the cable 3 b and converts it into a signal format that can be input to the rotary connector 41. The signal conversion circuit 22 outputs the signal of the trigger 2 to the rotary connector 41 via the cable 3a. The rotary connector 41 inputs the trigger 2 signal input via the cable 3 a to the LED control circuits 47 </ b> A to 47 </ b> D and the camera 42 via the internal cable 7.

  The LED control circuits 47A to 47D receiving the trigger 2 signal control the LEDs 53A to 53D to irradiate with the second irradiation pattern (S8). That is, in S8, the first light source (LEDs 53C and 53D) does not emit irradiation light, and the second light source (LEDs 53A and 53B) emits irradiation light.

  Further, the camera 42 to which the trigger 2 signal is input images the inspection target surface 62A by the second sensor element (S9).

  After a certain period of time, the stepping motor 45 further rotates by a predetermined angle, that is, 0.09 degrees (S10), and the imaging by the first illumination pattern and the second illumination pattern is alternately performed as in S3-9. Repeated. The stepping motor 45 rotates 360 degrees when it is rotated n times by a predetermined angle.

  The rotary encoder 46 detects the rotation of the stepping motor 45 and outputs a pulse signal that is the n-th trigger, that is, a trigger n signal (S11). In this embodiment, the stepping motor 45 rotates 360 degrees after rotating 4000 times by 0.09 degrees. Since the pulse signal output while the stepping motor 45 rotates 360 degrees is 4000 times, n = 4000.

  Similarly to S8, the LED control circuits 47A to 47D control the LEDs 53A to 53D to irradiate with the second irradiation pattern (S12). Similarly to S9, the camera 42 images the inspection target surface 62A with the second sensor element (S13).

  Here, imaging for one round of the inspection target surface 62A in the circumferential direction is completed. An image in which the first sensor element of the camera 42 images the inspection target surface 62A in one circumferential direction is a first captured image, and the second sensor element has one inspection in the circumferential direction of the inspection target surface 62A. The captured image is a second captured image. When the imaging for one round is completed, the process of the flowchart ends.

  In the flowchart of FIG. 11, the LED control circuits 47 </ b> A to 47 </ b> D first irradiate with the first irradiation pattern and then irradiate with the second irradiation pattern, but this is not restrictive. For example, the second irradiation pattern may be first and the first irradiation pattern may be later.

  Next, image processing and pass / fail determination processing in the present embodiment will be described. FIG. 12 is a flowchart illustrating an example of image processing and pass / fail determination processing procedures according to the present embodiment. The process of the flowchart is executed in the PC 1.

  The input unit 102 inputs data of the first captured image and the second captured image captured by the camera 42 via the control device 2 (S11).

  The image adjustment unit 103 adjusts the positions of the first captured image and the second captured image (S12).

  The image composition unit 104 synthesizes the first captured image and the second captured image that have been aligned by the image adjustment unit 103, and generates a composite image as described with reference to FIG. 10 (S13).

  The abnormality detection unit 105 detects an abnormal part, for example, a scratch, from the composite image generated by the image composition unit 104 (S14). The abnormality detection unit 105 detects the area, size, position, etc. of the detected abnormal part and sends it to the determination unit 106.

  The determination unit 106 determines whether the inspection object 62 is acceptable, that is, whether it is a good product or a defective product (S15). For example, the determination unit 106 compares information such as the area, length, and position of the abnormal part acquired from the abnormality detection unit 105 with pass / fail standard data stored in the storage unit 150, and the abnormal part satisfies the acceptance standard. If it is determined that there is no such object, the inspection object 62 is determined to be defective. The determination unit 106 determines that the inspection object 62 is a non-defective product when it is determined that the abnormal part satisfies the acceptance criteria. The determination unit 106 sends the determination result of pass / fail of the inspection object 62 to the display control unit 107.

  The display control unit 107 displays the determination result of the pass / fail of the inspection object 62 on the display 15 (S16). Here, the process of the flowchart ends.

  In the prior art, it was difficult to change the light irradiation direction (irradiation pattern) on the surface to be inspected, so it may be difficult to determine the presence or absence of the abnormality depending on the shape of the abnormality that may occur on the surface to be inspected. It was. For example, in a conventional inner surface inspection apparatus that irradiates light from an end of a cylindrical inspection object, it is difficult to accurately detect a line-like (linear) defect along the axial direction of the inspection object. there were. Further, in such a conventional inner surface inspection apparatus, a shadow is generated when there is a step or unevenness on the inner surface of the object to be inspected, so it may be difficult to inspect the inner surface with high accuracy depending on the shape of the inspection surface. there were. Alternatively, in a conventional inner surface inspection apparatus using coaxial epi-illumination, since it was difficult to switch the irradiation pattern of the irradiation light on the inspection target surface, depending on the direction of the scratch on the inspection target surface with respect to the irradiation light, detection can be performed with high accuracy. There were cases where it was difficult to do.

  On the other hand, the inner surface inspection apparatus 4 in the present embodiment is provided with the inner surface inspection rod 5 and emits irradiation light that illuminates the inspection target surface 62A, and LED control circuits 47A to 47A that switch irradiation patterns of the LEDs 53A to 53D. Since 47D is provided and the opening part 50 is located between LED53A-53D, light can be irradiated to 62A of test object surfaces from various directions. For this reason, according to the inner surface inspection apparatus 4 in the present embodiment, the inner surface of the inspection object 62 can be inspected with higher accuracy in accordance with various shapes and the like of abnormalities that can occur on the inspection object surface 62A. it can.

  Further, in the conventional inner surface inspection apparatus that irradiates light from the end of the cylindrical inspection object, the brightness of the inspection object surface varies depending on the distance from the end of the cylindrical inspection object, and imaging conditions In some cases, it was difficult to maintain a uniform thickness. In contrast, in the inner surface inspection apparatus 4 according to the present embodiment, the LEDs 53A to 53D are provided on the inner surface inspection rod 5, and the opening 50 is positioned between the LEDs 53A to 53D. The positional relationship is constant, and the imaging conditions can be kept uniform.

  Further, according to the inner surface inspection apparatus 4 in the present embodiment, the inner surface inspection rod 5 and the camera 42 can rotate around the central axis Ax1 along the longitudinal direction of the inner surface inspection rod 5, and thus the inspection object 62. Without rotating the image, it is possible to capture a captured image of one round of the inspection target surface 62A. For this reason, according to the inner surface inspection apparatus 4 in the present embodiment, for example, even when the inspection object 62 is difficult to rotate in terms of shape or weight, the inner surface inspection of the inspection object 62 can be performed. .

  Moreover, according to the inner surface inspection apparatus 4 in the present embodiment, the LEDs 53C and 53D, which are first light sources separated from each other in the circumferential direction of the rotation axis Ax1, are provided, and the opening 50 is located between the LEDs 53C and 53D. In addition, it is possible to detect a line-like (linear) defect along the axial direction of the inspection object 62 on the inspection object surface 62A with high accuracy.

  In the inner surface inspection apparatus 4 according to the present embodiment, the LED control circuits 47A to 47D are configured such that the LEDs 53C and 53D as the first light source emit irradiation light, and the LEDs 53A and 53B as the second light source emit irradiation light. The first irradiation pattern that is not present and the second irradiation pattern in which the first light source does not emit irradiation light and the second light source emits irradiation light are alternately switched. For this reason, according to the inner surface inspection apparatus 4 in the present embodiment, both the defect along the axial direction of the inspection object 62 and the defect along the circumferential direction can be detected with high accuracy.

  Further, according to the inner surface inspection system S in the present embodiment, since the inner surface inspection device 4 and the image composition unit 104 that combines a plurality of images captured by the camera 42 are provided, the abnormal portion on the inspection target surface 62A can be detected with higher accuracy. Can be determined.

(Modification 1 of Embodiment 1)
In the inner surface inspection apparatus 4 of the first embodiment, the first irradiation pattern and the second irradiation pattern are alternately switched to irradiate the inspection target surface 62A, but the irradiation pattern is not limited to this.

  For example, the LED control circuits 47A to 47D have the third irradiation pattern in which the LEDs 53A are turned on and the LEDs 53B to D are turned off, the LEDs 53B are turned on, and the LEDs 53A, C, and D are turned off. You may employ | adopt the structure which switches a certain 4th irradiation pattern alternately. In the case of adopting this configuration, it is possible to detect an abnormality such as a flaw that reflects the irradiation light from the LED 53A and the irradiation light from the LED 53B differently on the inspection target surface 62A with higher accuracy.

  13A and 13B are diagrams illustrating an example of a captured image according to the present modification. FIG. 13A is a captured image in which the camera 42 images the inspection target surface 62A irradiated with the third irradiation pattern in which the LEDs 53A are turned on and the LEDs 53B to D are turned off. FIG. 13B is a captured image obtained by the camera 42 capturing the inspection target surface 62A irradiated with the fourth irradiation pattern in which the LEDs 53B are turned on and the LEDs 53A, C, and D are turned off.

  In both the third irradiation pattern and the fourth irradiation pattern, since the wound along the circumferential direction of the inspection object 62 reflects the irradiation light, the scratch along the circumferential direction can be accurately detected. However, even with the same scratch, the third irradiation pattern shown in FIG. 13A and the fourth irradiation pattern shown in FIG. 13B may reflect differently. In such a case, the LED control circuits 47A to 47D alternately irradiate the third irradiation pattern and the fourth irradiation pattern, so that the shape, area, etc. of the abnormal part such as a scratch on the inspection target surface 62A can be determined. It is possible to detect with higher accuracy.

  The LED control circuits 47A to 47D have the fifth irradiation pattern in which the LED 53D is turned on and the LEDs 53A to C are turned off, the LED 53C is turned on, and the LEDs 53A, 53B and D are turned off. You may employ | adopt the structure which switches with a certain 6th irradiation pattern alternately. 13C and 13D are diagrams illustrating an example of a captured image according to the present modification. FIG. 13C is a captured image in which the camera 42 images the inspection target surface 62A irradiated with the fifth irradiation pattern in which the LED 53D is turned on and the LEDs 53A to 53C are turned off. FIG. 13D is a captured image obtained by the camera 42 capturing a sixth irradiation pattern in a state where the LED 53C is turned on and the LEDs 53A, 53B, and D are turned off.

  In both the fifth irradiation pattern and the sixth irradiation pattern, since the scratch along the axial direction of the inspection object 62 reflects the irradiation light, the scratch along the axial direction can be accurately detected. However, even with the same flaw, the fifth irradiation pattern shown in FIG. 13C and the sixth irradiation pattern shown in FIG. 13D may reflect differently. In such a case, the LED control circuits 47A to 47D alternately irradiate the fifth irradiation pattern and the sixth irradiation pattern, so that the shape, area, etc. of the abnormal part such as a scratch on the inspection target surface 62A can be determined. It is possible to detect with higher accuracy.

  In the present modification, the image composition unit 104 may generate a composite image by combining captured images captured in the third to fifth irradiation patterns.

  According to the inner surface inspection apparatus 4 of this modification, in addition to the same effects as those of the first embodiment, it is possible to more accurately detect the shape, area, and the like of an abnormal part such as a scratch on the inspection target surface 62A. The irradiation patterns shown in FIGS. 13A to 13D are examples, and the present invention is not limited to these.

(Modification 2 of Embodiment 1)
In the first embodiment, the camera 42 is a TDI type dual-line camera, but is not limited thereto. For example, the camera 42 may employ a single line camera.

  When the configuration is employed, the camera 42 images the inspection target surface 62A for one round while the LED control circuits 47A to 47D irradiate the inspection target surface 62A with the first irradiation pattern. Then, the camera 42 images the inspection target surface 62A for one round while the LED control circuits 47A to 47D irradiate the inspection target surface 62A with the second irradiation pattern. That is, the camera 42 captures the first captured image and the second captured image in the same manner as in the first embodiment by capturing one turn for each irradiation pattern.

According to the inner surface inspection apparatus 4 of the present modification, the inner surface inspection apparatus 4 having a simpler configuration can be provided by adopting a single line camera as the camera 42. Further, according to the inner surface inspection apparatus 4 of the present modification, the first captured image and the second captured image have the same imaging position by capturing images for each round separately for each irradiation pattern. Position adjustment by the adjustment unit 103 is not essential. For this reason, according to the inner surface inspection apparatus 4 of this modification, the flow of image processing can be simplified.

(Modification 3 of Embodiment 1)
In Embodiment 1, the inner surface inspection rod 5 of the inner surface inspection apparatus 4 includes four LEDs 53A to 53D, but the number of light sources is not limited to this. The inner surface inspection apparatus 4 may include a larger number of light sources, and may employ a configuration that irradiates the inspection target surface 62A with more various irradiation patterns.

  FIG. 14 is a schematic and exemplary diagram of a schematic configuration of the tip of the inner surface inspection rod 5 according to the present modification. As shown in FIG. 14, a plurality of LEDs (light sources) 153 are arranged in a ring shape on the inner surface inspection rod 5 at intervals. The plurality of LEDs 153 is 12 as an example, but is not limited thereto. The plurality of LEDs 153 are provided on the first outer surface 55 a of the inner surface inspection rod 5. Moreover, the opening part 50 is located in the ring of several LED153 arranged in a ring shape. Each of the plurality of LEDs 153 irradiates diffused light onto the inspection target surface 62A. The plurality of LEDs (light sources) 153 are individually controlled for lighting and light quantity by a plurality of LED control circuits (not shown). A plurality of LED control circuits (not shown) is an example of an irradiation switching unit in the present modification.

  According to the inner surface inspection apparatus 4 of the present modification, various irradiation patterns can be switched by individually controlling the twelve LEDs 153 by a plurality of LED control circuits (not shown). In particular, even when a scratch in a direction that obliquely intersects the axis of the inspection target 62 exists on the inspection target surface 62A, the irradiation light can be irradiated at an angle at which the scratch is reflected. For this reason, according to the inner surface inspection apparatus 4 of this modification, in addition to the same effects as those of the first embodiment, the inner surface inspection can be performed with higher accuracy regardless of the angle or position of an abnormal part such as a scratch. .

(Modification 4 of Embodiment 1)
In the first embodiment, the rotary connector 41 and the PC 1 transmit signals and data via the control device 2, but the present invention is not limited to this. For example, the rotary connector 41 and the PC 1 may be connected to each other via a cable or the like so as to be able to input and output without using the control device 2. Alternatively, the camera 42 may employ a configuration in which captured image data or the like is transmitted to the PC 1 by wireless communication means without removing the rotary connector 41.

(Embodiment 2)
In the inner surface inspection system S of the first embodiment, the position (coordinates) in the circumferential direction of the inspection object 62 is set in the setting of the inspection start position by the inner surface inspection apparatus 4, but the position (coordinates) in the axial direction is set. I did not. In the present embodiment, the inner surface inspection apparatus 4 includes a moving mechanism for moving the inspection object 62, and the position of the inspection object 62 in the axial direction is set in setting the inspection start position.

  The inner surface inspection system S in the present embodiment includes an inner surface inspection device 4, a control device 2, and a PC 1, as in the first embodiment described with reference to FIG. The configuration of the control device 2 is the same as that of the first embodiment. The inner surface inspection apparatus 4 according to the present embodiment has a configuration similar to that of the first embodiment, and further includes a moving mechanism that moves the inspection object 62.

  FIG. 15 is a schematic and exemplary external view of the inner surface inspection apparatus 4 according to the present embodiment. As shown in FIG. 15, the inner surface inspection device 4 of the present embodiment includes a gantry 6. The gantry 6 includes a safety door 64. The safety door 64 is a door that can be opened and closed, and the user opens the safety door 64 and installs the inspection object 62 inside the gantry 6. At the four corners of the gantry 6, adjustment mechanisms 61 each having a bolt and a nut are provided. Adjustment mechanisms 61A to 61C shown in FIG. 15 can adjust the position of the main body 40 of the inner surface inspection apparatus 4 installed on the gantry 6.

  FIG. 16 is a schematic and exemplary diagram of a schematic configuration of the inner surface inspection system S according to the present embodiment. As shown in FIG. 16, the inner surface inspection apparatus 4 includes a main body 40 and a gantry 6. The gantry 6 includes adjustment mechanisms 61 </ b> A and 61 </ b> B, an inspection object gripping mechanism 63, and an inspection object elevating mechanism 65 in addition to the safety door 64 described with reference to FIG. 15. The inner surface inspection rod 5 connected to the adapter 44 shown in FIG. 16 is inserted into the inner surface of the inspection object 62.

  The inspection object gripping mechanism 63 grips the inspection object 62 and fixes it in a detachable manner. The method for holding the inspection object 62 is not limited to gripping. The inspection object gripping mechanism 63 is an example of a holding unit in the present embodiment.

  The inspection object lifting mechanism 65 moves the position of the inspection object gripping mechanism 63 along the axial direction of the central axis Ax1. For example, the inspection object lifting mechanism 65 includes a drive mechanism such as a motor (not shown), and moves the inspection object gripping mechanism 63 up and down along the rail. The inspection object lifting mechanism 65 moves the inspection object 62 vertically with respect to the inner surface inspection rod 5 by moving the position of the inspection object gripping mechanism 63 along the axial direction of the central axis Ax1. The inspection object lifting mechanism 65 is an example of a moving mechanism in the present embodiment. The moving mechanism only needs to move the specimen gripping mechanism 63 along the axial direction of the central axis Ax1, and the moving direction is not limited to “lifting”.

  The inspection object lifting mechanism 65 includes a cable (not shown) that transmits signals to and from the PC 1. The inspection object raising / lowering mechanism 65 moves the raising / lowering position according to a signal input from the PC 1. The inspection object lifting mechanism 65 includes a cable (not shown) that transmits signals to and from the rotary encoder 46. The inspection object lifting mechanism 65 acquires a pulse signal that conveys the rotation of the stepping motor 45 from the rotary encoder 46. Similar to the first embodiment, the rotary encoder 46 transmits 4000 pulse signals per 360 degree rotation of the stepping motor 45. Further, the inspection object lifting mechanism 65 may be configured to be connected to the PC 1 and the rotary encoder 46 via the control device 2.

  Since the inspection object lifting mechanism 65 includes a drive mechanism (not shown), a configuration that ensures safety by separately providing an emergency stop button (not shown) may be employed.

  Further, the inspection object gripping mechanism 63 and the inspection object raising / lowering mechanism 65 may further employ a configuration having a function of rotating the inspection object 62. When this configuration is adopted, the camera 42, the lens 43, the adapter 44, and the inner surface inspection rod 5 of the inner surface inspection device 4 do not necessarily need to rotate. Moreover, the installation position of the mount frame 6 shown in FIGS. 15 and 16 is an example, and the present invention is not limited to this.

  Next, the configuration of the PC 1 according to the present embodiment will be described. The hardware configuration of the PC 1 of the present embodiment is the same as the configuration of the first embodiment described with reference to FIG.

  Next, a functional configuration of the PC 1 according to the present embodiment will be described. FIG. 17 is a block diagram illustrating an example of a functional configuration of the PC according to the present embodiment. As shown in FIG. 17, the PC 1 according to the present embodiment includes a reception unit 1100, an inspection position setting unit 1101, an input unit 102, an image adjustment unit 103, an image composition unit 104, an abnormality detection unit 105, The determination unit 106, the display control unit 107, and the storage unit 150 are provided.

  The input unit 102, the image adjustment unit 103, the image composition unit 104, the abnormality detection unit 105, the determination unit 106, the display control unit 107, and the storage unit 150 are the configurations of the first embodiment described with reference to FIG. It is the same.

  The receiving unit 1100 according to the present embodiment receives the inspection start position in the axial direction of the inspection target 62 in addition to the coordinates of the rotation start position of the stepping motor 45 input by the user. That is, in the present embodiment, the accepting unit 1100 accepts not only the circumferential position of the inspection object 62 but also the axial position in setting the inspection start position. It is assumed that the coordinates of the rotation start position of the stepping motor 45 and the inspection start position in the axial direction of the inspection object 62 are included in the inspection position in the present embodiment. Moreover, the reception part 1100 is good also as what also receives a test | inspection completion position. The accepting unit 1100 sends the examination start position input by the user to the examination position setting unit 1101.

  The inspection position setting unit 1101 of this embodiment acquires the inspection start position from the reception unit 1100. The inspection position setting unit 1101 sends a signal specifying the rotation start position of the stepping motor 45 to the control device 2 via the interface 16 based on the inspection start position input by the user. In addition, the inspection position setting unit 1101 sends a signal designating the lifting position of the inspection object lifting mechanism 65 at the start of the inspection to the inspection object lifting mechanism 65 via the interface 16. In addition, when the reception unit 1100 receives the inspection end position, the inspection position setting unit 1101 further sends a signal specifying the lifting position of the inspection object lifting mechanism 65 at the end of the inspection via the interface 16 to the inspection object lifting mechanism. To 65.

  Next, the inner surface imaging process of the present embodiment configured as described above will be described. FIG. 18 is a flowchart illustrating an example of the procedure of the inner surface imaging process according to the present embodiment. The process of the flowchart is started after the inspection object 62 is fixed to the inspection object gripping mechanism 63 of the gantry 6.

  First, the inspection position setting unit 1101 sends a signal specifying the rotation start position of the stepping motor 45 to the control device 2 via the interface 16 based on the coordinates input by the user. In addition, the inspection position setting unit 1101 sends a signal designating the lifting position of the inspection object lifting mechanism 65 at the time of starting and ending the inspection to the inspection object lifting mechanism 65 via the interface 16.

  The stepping motor 45 moves the opening 50 of the inner surface inspection rod 5 to the inspection start position by rotating. Further, the inspection object lifting mechanism 65 moves the inspection object holding mechanism 63 up and down to move the inspection object 62 to the set inspection start position (S21).

  The process from the rotation of S2 to the imaging process of S13 is the same as S2 to S13 in the flowchart of the first embodiment described in FIG. When imaging for one round (360 degrees) of the inspection target surface 62A is completed in S13, the inspection object lifting mechanism 65 determines that imaging for one round is completed from the number of trigger signals.

  Then, the inspection object lifting mechanism 65 determines whether or not the lifting position of the inspection object lifting mechanism 65 at the end of the inspection set by the inspection position setting unit 1101, that is, the end position is reached. When the end position has not been reached (S24 “No”), the inspection object lifting mechanism 65 moves the inspection object gripping mechanism 63 up and down to move the inspection object 62 in the direction along the central axis Ax1 (S25). The inspection object lifting mechanism 65 only needs to move the inspection object gripping mechanism 63 from the inspection start position to the inspection end position, and the direction of movement is not limited.

  After the inspection object gripping mechanism 63 and the inspection object 62 are moved by the inspection object lifting mechanism 65, the processes of S2 to S13 are executed again. The processes of S2 to S25 are repeated until the inspection object gripping mechanism 63 reaches the end position.

  When the inspection object gripping mechanism 63 reaches the end position (S24 “Yes”), the inspection object lifting mechanism 65 returns the inspection object gripping mechanism 63 and the inspection object 62 to the inspection start position (S26). Here, the process of the flowchart ends.

  Image processing and pass / fail determination processing in the present embodiment are the same as those in the first embodiment described with reference to FIG.

  Thus, in the inner surface inspection apparatus 4 of the present embodiment, the inspection object gripping mechanism 63 that holds the inspection object 62 and the inspection object lifting mechanism that moves the position of the inspection object gripping mechanism 63 along the axial direction of the central axis Ax1. 65. For this reason, the inspection object 62 can be moved to an arbitrary position in the axial direction, and an arbitrary range on the inspection object surface 62A can be imaged. That is, according to the inner surface inspection apparatus 4 of the present embodiment, in addition to the same effects as those of the first embodiment, the inner surface of the inspection object 62 can be inspected more conveniently.

(Modification 1 of Embodiment 2)
The inner surface inspection device 4 may include a second moving mechanism (not shown) that holds the inner surface inspection device 4 movably along the central axis Ax1 instead of the gantry 6. When the configuration is adopted, the second moving mechanism does not move the inspection object 62 but moves the main body 40 including the camera 42, the lens 43, the adapter 44, and the inner surface inspection rod 5 of the inner surface inspection device 4. To do. For this reason, according to the inner surface inspection apparatus 4 of the present modification, in addition to the same effects as in the first embodiment, even if the inspection object 62 is difficult to move axially in terms of shape or weight, The inner surface inspection can be performed for an arbitrary range in the axial direction of the inspection object 62.

  The inner surface imaging processing, image processing, and pass / fail judgment processing program executed by the PC 1 of each of the above embodiments is a file in an installable format or an executable format in a CD-ROM, a flexible disk (FD), a CD-R, The program is provided by being recorded on a computer-readable recording medium such as a DVD (Digital Versatile Disk).

  Also, the internal imaging processing, image processing, and pass / fail judgment processing program executed by the PC 1 of each of the above embodiments is provided by being stored on a computer connected to a network such as the Internet and downloaded via the network. You may comprise. Further, the inner surface imaging processing, image processing, and pass / fail judgment processing program executed by the PC 1 of each of the above embodiments may be provided or distributed via a network such as the Internet. Moreover, you may comprise so that the inner surface imaging process of each said embodiment, an image process, and a pass / fail determination processing program may be provided by previously incorporating in ROM etc.

  The inner surface imaging processing, image processing, and pass / fail judgment processing program executed by the PC 1 of each of the above embodiments includes the above-described units (reception unit, inspection position setting unit, input unit, image adjustment unit, image composition unit, abnormality detection unit) The module includes a determination unit and a display control unit). As actual hardware, a CPU (processor) reads out and executes an inner surface imaging process, an image process, and a pass / fail determination process program from the storage medium. The above units are loaded on the main storage device, and a reception unit, an inspection position setting unit, an input unit, an image adjustment unit, an image composition unit, an abnormality detection unit, a determination unit, and a display control unit are generated on the main storage device. It has become.

  DESCRIPTION OF SYMBOLS 1 ... PC (information processing apparatus, computer), 2 ... Control apparatus, 3a-c, 9, 10 ... Cable, 4 ... Inner surface inspection apparatus, 5 ... Inner surface inspection rod (Inspection rod, rod-shaped member, support member, passage member) , 6 ... frame, 15 ... display (display unit), 42 ... camera (imaging unit), 45 ... stepping motor (rotation drive mechanism, rotation mechanism), 46 ... rotary encoder (rotation detection mechanism), 47A to D ... LED control Circuit (irradiation switching unit), 49: Rotation transmission mechanism, 50: Opening (slit, imaging window), 52 ... Mirror (optical component), 53A to D ... LED (multiple light sources, multiple first light sources: 53C) 53D, a plurality of second light sources: 53A, 53B), 54 ... internal space (light guide path, passage), 62 ... inspection object, 62A ... inspection object surface (inner surface), 63 ... inspection object gripping mechanism (holding part) ), 65 ... Inspection Object lifting mechanism (moving mechanism), 100, 1100... Accepting unit, 101, 1101 .. inspection position setting unit, 102... Input unit, 103... Image adjusting unit, 104. 107, display control unit, 150, storage unit, S, inner surface inspection system, Ax1, central axis (rotation center), Ax2, central axis

Claims (6)

An inspection rod provided with an opening for introducing light from outside into the light guide while being provided with a light guide inside,
A plurality of light sources that emit irradiation light that is provided on the inspection rod and illuminates a surface to be inspected;
An imaging unit that images the inspection target surface by light introduced into the light guide through the opening of the reflected light on the inspection target surface;
An irradiation switching unit that switches an irradiation pattern of the plurality of light sources;
With
The opening is an inner surface inspection apparatus positioned between the plurality of light sources. A fixed part;
A rotation unit that includes the inspection rod and the imaging unit, and is supported by the fixed unit so as to be rotatable about a rotation center along a longitudinal direction of the inspection rod;
A rotating mechanism for rotating the rotating part around the rotation center;
The inner surface inspection apparatus according to claim 1, comprising: The plurality of light sources includes a plurality of first light sources separated from each other in a circumferential direction of the rotation center,
The inner surface inspection apparatus according to claim 2, wherein the opening is positioned between the plurality of first light sources. The plurality of light sources includes a plurality of first light sources separated from each other in a circumferential direction of the rotation center, and a plurality of second light sources separated from each other in an axial direction of the rotation center,
The opening is positioned between the plurality of first light sources and is positioned between the plurality of second light sources,
The irradiation switching unit includes a first irradiation pattern in which the plurality of first light sources emit the irradiation light and the plurality of second light sources do not emit the irradiation light, and the plurality of first light sources include the first light source The inner surface inspection apparatus according to claim 2 or 3, wherein the second irradiation pattern in which the plurality of second light sources emit the irradiation light is switched alternately without emitting the irradiation light. A holding unit for holding the inspection object;
A moving mechanism for moving the position of the holding portion along the axial direction of the rotation center;
The inner surface inspection apparatus according to any one of claims 2 to 4, further comprising: The inner surface inspection apparatus according to any one of claims 1 to 5,
An image combining unit that combines a plurality of captured images by the imaging unit;
An internal inspection system with