JP2018088821A - Vibration-type actuator, device and optical equipment - Google Patents

Abstract

PROBLEM TO BE SOLVED: To suppress in a vibration-type actuator a deviation of a contact position between a pressure application member and a pressure transmission member, and a deviation of a relative position between the pressure transmission member and a vibrator, with a simple configuration.SOLUTION: A vibration-type actuator 100 includes: a vibrator holding member 105 which holds a vibrator 103; a friction member 113 which contacts to the vibrator; a pressure application member 111 which generates a pressing force to make a vibrator pressure-contact to the friction member in a first direction; and a pressure transmission member 109 which is disposed between the vibrator and the pressure application member, to transmit the pressing force to the vibrator. A first contact part 109a disposed on one of the pressure transmission member and the vibrator holding member restricts a relative displacement to a second contact part 105a, disposed on another member, in a second direction which is a relative movement direction of the pressure transmission member and the vibrator holding member, so as to make a contact in a manner to permit relative rotation in a plane in parallel to the first and second directions of the pressure transmission member and the vibrator holding member.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a vibration type actuator used in an apparatus such as an optical apparatus.

  A vibration type actuator that excites a vibration body by electro-mechanical energy conversion to move the vibration body and a friction member in pressure contact with the vibration body in an optical device such as a camera or an interchangeable lens. Used to drive the lens. As such a vibration type actuator, there is a linear type vibration type actuator as disclosed in Patent Document 1 in addition to a ring type or a rod type vibration type actuator.

  The vibration type actuator disclosed in Patent Document 1 is provided with a pressurizing member that generates a pressurizing force for bringing the vibrating body into pressure contact with the friction member. And between the vibrating body and the pressurizing member, a pressurizing transmission member (pressurizing plate) that contacts the pressurizing member and transmits the applied pressure to the vibrating body is provided. By holding the pressurizing transmission member so as to be rotatable, it is possible to always uniformly pressurize the friction member with a vibrating body whose posture is changed (rotated) by vibration.

JP 2014-212682 A

  However, in the vibration type actuator disclosed in Patent Document 1, the contact position between the pressure member and the pressure transmission member may be shifted. Furthermore, the relative position between the pressure transmission member and the vibrating body may be shifted. When these deviations occur, the vibrating member cannot be uniformly pressed against the friction member by the applied pressure generated by the pressing member, and the characteristics of the vibration actuator become unstable.

  The present invention is a vibration type in which stable characteristics can be obtained by suppressing the displacement of the contact position between the pressure member and the pressure transmission member and the displacement of the relative position between the pressure transmission member and the vibrating body with a simple configuration. An actuator is provided. The present invention also provides an optical apparatus using the vibration type actuator.

  A vibration type actuator according to one aspect of the present invention includes a vibrating body in which vibration is excited by electro-mechanical energy conversion, a vibrating body holding member that holds the vibrating body, a friction member that contacts the vibrating body, and a vibrating body Is disposed between the vibrating member and the pressurizing member, and transmits the pressurizing force to the vibrating member. And a vibration member and the friction member relatively move in a second direction orthogonal to the first direction. And a 1st contact part provided in one member among a pressurization transmission member and a vibrating body holding member is a pressurization transmission member and a vibrating body with respect to the 2nd contact part provided in the other member. Limiting the relative displacement of the holding member in the second direction and contacting the pressure transmitting member and the vibrating body holding member so as to allow relative rotation in a plane parallel to the first and second directions. It is characterized by.

  Note that an optical apparatus and other devices having the vibration type actuator and a driven member such as a lens driven by the vibration type actuator also constitute another aspect of the present invention.

  According to the present invention, the contact between the pressure member and the pressure transmission member can be achieved with a simple configuration in which the first and second contact portions provided on the pressure transmission member and the vibrating body holding member are brought into contact with each other. It is possible to suppress the displacement of the position and the displacement of the relative position between the pressure transmission member and the vibrating body. Therefore, it is possible to realize a vibration type actuator that can obtain a small and stable characteristic. Furthermore, according to the present invention, by using such a vibration type actuator, it is possible to realize an optical apparatus and other devices capable of controlling the position and movement of a driven member such as a lens with high accuracy. .

1 is an exploded perspective view of a vibration type actuator that is Embodiment 1 of the present invention. FIG. FIG. 3 is a cross-sectional view of the vibration actuator according to the first embodiment. FIG. 3 is an enlarged perspective view of a part of the vibration type actuator according to the first embodiment. FIG. 3 is a partial cross-sectional view of the vibration type actuator according to the first embodiment. Sectional drawing of the interchangeable lens which is Example 2 of this invention.

  Embodiments of the present invention will be described below with reference to the drawings.

  FIG. 1 shows an exploded view of a vibration type actuator 100 that is Embodiment 1 of the present invention. In FIG. 1, the Y direction indicates a pressurizing direction (first direction) in which a vibration body, which will be described later, is urged against the friction member by the vibration actuator 100, that is, the Z direction indicates friction with the vibration body The direction of relative movement with respect to the member (second direction) is shown. The X direction indicates the width direction (third direction) orthogonal to the Y direction and the Z direction. FIG. 2 shows a YZ cross section as a plane parallel to the Y direction and the Z direction in the assembled state of the vibration type actuator 100 of the present embodiment.

  Reference numeral 101 denotes a diaphragm as a metal elastic member, and reference numeral 102 denotes a piezoelectric element as an electro-mechanical energy conversion element. The vibration plate 101 and the piezoelectric element 102 are bonded together to form a vibrating body 103.

  A wiring board 104 is electrically connected to the piezoelectric element 102. The vibration plate 101 has two protrusions 101a arranged in the Z direction. The tips (lower ends) of the two protrusions 101a are in contact with a friction contact surface 113a of a friction member 113 described later.

  Reference numeral 105 denotes a vibrating body holding member that holds the entire vibrating body 103 by holding both ends of the vibration plate 101. Reference numeral 106 denotes a rolling member, and 107 denotes a rolling spring member, which are attached to the vibrating body holding member 105. The moving base member 110 described later holds the vibrating body holding member 105 via the rolling member 106 and the rolling spring member 107 so as to be displaceable in the Y direction and limit displacement in the Z direction.

  In the present embodiment, “limiting the displacement” includes completely preventing the displacement and allowing a slight allowable amount of displacement and preventing a displacement larger than the allowable amount.

  Reference numeral 109 denotes a pressure transmission member. Reference numeral 108 denotes a buffer member made of an elastic material, and is disposed between the piezoelectric element 102 and the pressure transmission member 109. The buffer member 108 suppresses the vibration of the vibrating body 103 from being transmitted to the pressure transmission member 109 and other members provided above the pressure transmission member 109.

  The pressure transmission member 109 has a displacement in the Z direction of the pressure transmission member 109 with respect to the vibration body holding member 105 (that is, the pressure transmission member 109 and the vibration body holding member 105 in one direction in the width direction (X direction)). Projection portion 109a as a first contact portion for limiting the relative displacement). Further, the pressure transmission member 109 is displaced in two directions in the Z direction in the X direction of the pressure transmission member 109 relative to the moving base member 110 (that is, relative to the pressure transmission member 109 and the vibrating body holding member 105). It has a shaft portion 109b as a third contact portion for restricting (displacement).

  Further, in the center of the pressure transmission member 109, that is, the center between the two shaft portions 109b in the Z direction and the center in the X direction, a fitting hole in which a fitting shaft of the pressure member 111 described later is engaged. A portion 109c is provided. By disposing the fitting hole 109c in the center of the pressure transmission member 109, the applied pressure from the pressure member 111 can be evenly transmitted to the two protrusions 101a.

  The moving base member 110 includes a vibrating body 103, a vibrating body holding member 105, a pressure transmission member 109, a holding portion 110a that holds the pressing member 111, and an upper surface portion 110b. The upper surface part 110b has three guide groove parts 110b-1, 110b-2, 110b-3 formed so as to extend in the Z direction on both sides in the width direction (X direction). A ball 110d is engaged with each of the three guide groove portions 110b-1, 110b-2, and 110b-3. The moving base member 110, the vibrating body 103 held thereby, the vibrating body holding member 105, the pressure transmission member 109, and the pressure member 111 constitute a moving unit.

  The pressurizing member 111 generates a pressurizing force for bringing the vibrating body 103 into pressure contact with the friction member 113 in the Y direction. The pressure member 111 includes a pressure shaft member 111a, a pressure spring 111b, and a fixed shaft member 111c.

  Reference numeral 112 denotes a cover plate, which is fixed to a housing member 114 described later by four screws 112a. The cover plate 112 has guide portions 112b-1, 112b-2, 112b-3 extending in the Z direction at positions corresponding to the three guide portions 110b-1, 110b-2, 110b-3 of the moving base member 110. . The ball 110d can roll in the Z direction between the guide portions 110b-1, 110b-2, 110b-3 of the movable base member 110 and the guide portions 112b-1, 112b-2, 112b-3 of the cover plate 112. It is pinched.

  The friction member 113 has a friction contact surface 113 a that comes into contact with the two protrusions 101 a of the vibration plate 101. The friction member 113 is fixed to the housing member 114 by two screws 113b at both ends in the Z direction.

  The housing member 114 holds the cover plate 112 and the friction member 113 and holds the moving base member 110 of the moving unit while guiding it in the Z direction.

  Next, pressurization of the vibrating body 103 by the pressurizing member 111 and rotation of the pressurizing transmission member 109 will be described with reference to FIGS. 2, 3, and 4. 3 shows a state in which the pressure transmission member 109 is assembled to the vibrating body holding member 105, and FIG. 4 shows the pressure transmission member 109 and the vibrating body holding member 105 cut along line AA in FIG. The cross-section is shown. In FIG. 3, the vibrating body holding member 105 holds the vibrating body 103 to which the wiring board 104 is connected.

  In FIG. 2, the pressure member 111 is constituted by the pressure shaft member 111a, the pressure spring 111b, and the fixed shaft member 111c as described above. The fixed shaft member 111c is inserted into a fixed shaft holding hole 110e formed in the movable base member 110 and is rotated around an axis extending in the Y direction, so that the fixed shaft member 111c is bayonet-coupled to the fixed shaft holding hole 110e. , Fixed to the moving base member 110. Thereby, the fixed shaft member 111c is prevented from being displaced (disengaged) in the + Y direction (upward direction opposite to the vibrating body 103) with respect to the moving base member 110.

  The pressing shaft member 111a has two claw portions 111a-1 formed at the upper end of the fixed shaft member 111c from the lower side with respect to the hole portion 111c-1 formed at the center of the fixed shaft member 111c. Are inserted while being elastically deformed so as to reduce the distance between them. The two claw portions 111a-1 after being inserted into the hole portion 111c-1 are returned to their original positions so that the distance between them is increased. The pressure shaft member 111c has a Y-direction within a range in which the claw portion 111a-1 is locked by a claw locking portion 111c-2 formed in the upper portion of the hole 111c-1 of the fixed shaft member 111c. It is held by the fixed shaft member 111c in a state where it can be moved to the position.

  The pressure spring 111b is sandwiched between the pressure shaft member 111a and the fixed shaft member 111c in a compressed state. As a result, pressure is generated in the pressure shaft member 111a in the −Y direction (downward toward the vibrating body 103). Further, the above-described fitting shaft 111 a-2 formed at the tip (lower end) of the pressure shaft member 111 a is inserted into and fitted into the fitting hole 109 c formed in the pressure transmission member 109. Therefore, the pressure shaft member 111a is held at two locations in the Y direction of the hole portion 111c-1 of the fixed shaft member 111c and the fitting hole portion 109c of the pressure transmission member 109. Stable pressurization is possible.

  Further, the two shaft portions 109b of the pressure transmission member 109 are respectively inserted into the long hole portions 110a-1 as the two fourth contact portions formed in the holding portion 110a of the moving base member 110. The long hole portion 110a-1 has the Z direction as the longitudinal direction, and allows the shaft portion 109b to be displaced in the Z direction, while engaging (contacting) the shaft portion 109b so as to limit the displacement in the X direction. As a result, displacement of the pressure transmission member 109 in the Y direction relative to the movable base member 110 and rotation in the YZ plane (relative rotation between the pressure transmission member 109 and the movable base member 110) are allowed, and in the X direction. The displacement is limited.

  Further, in the pressure transmission member 109, the protrusion 109a described above is engaged in the Z direction with the recess 105a as the second contact portion formed on one side wall in the width direction (X direction) of the vibrating body holding member 105. (Contact). Thereby, the displacement in the Z direction of the pressure transmission member 109 with respect to the vibrating body holding member 105 is limited. On the other hand, this engagement is caused by displacement of the pressure transmission member 109 in the Y direction relative to the vibration body holding member 105 (relative displacement between the pressure transmission member 109 and the vibration body holding member 105) and rotation (addition) in the YZ section. Relative rotation between the pressure transmission member 109 and the vibrating body holding member 105 is allowed.

  Since the moving base member 110 holds the vibrating body holding member 105 with the displacement in the Z direction being restricted via the rolling member 106 and the rolling spring member 107, the moving base member 110 is also pressurized. The displacement of the transmission member 109 in the Z direction is limited.

  The wiring board 104 is drawn out through a wiring lead-out part 105 b formed in the vibrating body holding member 105 so as to have a concave shape. The wiring lead-out portion 105b is provided at a position facing the concave portion 105a in the X direction. Thus, the strength of the vibrating body holding member 105 is ensured by providing the recessed portion 105 a and the wiring lead-out portion 105 b at different locations in the vibrating body holding member 105.

  Further, in the pressure transmission member 109, the fitting hole 109c described above is provided at the center of the pressure transmission member 109 in the Z direction and the X direction. On the back side of the pressure transmission member 109, the vibrating body 103 is held by the vibrating body holding member 105 with the buffer member 108 described above interposed therebetween. Since the fitting shaft 111a-2 of the pressure shaft member 111a in the pressure member 111 is fitted into the fitting hole 109c of the pressure transmission member 109, pressure is generated at this position. The pressing force from the pressure member 111 acts on the center in the Z direction and X direction. Thereby, as shown in FIG. 2, it is possible to apply an equal pressure to the two protrusions 101 a of the vibration plate 101, and stably press the protrusion 101 a against the friction contact surface 113 a of the friction member 113. Can be contacted.

  As shown in FIG. 4, the recess 105 a of the vibrating body holding member 105 has flat surfaces 105 c as contact surfaces on both sides in the Z direction. On the other hand, the protrusion 109a of the pressure transmission member 109 has an arcuate curved surface 109d as contact surfaces on both sides in the Z direction. The arcuate curved surface 109d is in contact with the plane 105c in a linear shape extending in the X direction (line contact).

  With the above configuration, the pressure transmission member 109 is held in a state where the displacement in the Z direction and the X direction is restricted with respect to the vibrating body holding member 105 and there is a degree of freedom in the Y direction and the YZ cross section. . At this time, the fitting shaft 111a-2 of the pressure shaft member 111a is fitted into the fitting hole 109c of the pressure transmission member 109 with a slight gap. Moreover, the fitting length with respect to the fitting hole 109c of the fitting shaft 111a-2 is set short as shown by the dimension d in FIG. Therefore, the pressure transmission member 109 can rotate in the direction indicated by the arrow B in FIG. 2 around the fitting hole 109c with respect to the pressure member 111 in the YZ section. Further, since the vibrating body holding member 105 is also held by the moving base member 110 via the rolling member 106 and the rolling spring member 107, not only the displacement in the Y direction but also the arrow with respect to the moving base member 110. It can rotate in the direction indicated by B.

  Therefore, even if a relative inclination occurs between the cover plate 112 and the friction member 113 due to a manufacturing error or the like, the good frictional contact state of the vibrating body 103 with respect to the frictional contact surface 113a of the friction member 113 can be maintained. Moreover, even when the flatness of the friction contact surface 113a of the friction member 113 is not high, a good friction contact state can be similarly maintained. For example, in FIG. 2, when the friction member 113 is tilted upward to the right with respect to the cover plate 112, the vibrating body 103 and the vibrating body holding member 105 are simultaneously rotated counterclockwise to be in the right upward state. . Accordingly, the buffer member 108 and the pressure transmission member 109 also rotate counterclockwise. As a result, the two protrusions 101a of the vibration plate 101 come into pressure contact with the friction contact surface 113a of the friction member 113 with an equal applied pressure, and a stable friction contact state can be realized.

  Further, the pressure transmission member 109 is limited in displacement in the Z direction by the engagement between the protrusion 109a and the recess 105a of the vibrating body holding member 105, and the displacement in the X direction is also limited to the two shaft portions 109b and the moving base member. 110 is limited by the engagement with the elongated hole portion 110a-1. In this state, the fitting shaft 111a-2 of the pressure shaft member 111a that transmits the applied pressure allows the fitting hole 109c of the pressure transmission member 109 to rotate within the YZ section of the pressure transmission member 109. Are mated. For this reason, the contact position between the pressure transmission member 109 and the pressure shaft member 111 a is not shifted by the rotation of the pressure transmission member 109. Accordingly, it is possible to always transmit the pressing force to the center of the pressure transmitting member 109, and the pressing force transmitted to the two protruding portions 101a of the diaphragm 101 is also equalized.

  Further, since the protrusion 109a of the pressure transmission member 109 and the recess 105a of the vibration body holding member 105 are in linear contact with each other extending in the X direction, the pressure transmission member 109 is within the YZ cross section. 105 can rotate in the direction of arrow B shown in FIG. Here, a buffer member 108 is disposed between the vibration body holding member 105 and the pressure transmission member 109, and the vibration body holding member 105 and the pressure transmission member 109 are separated by the buffering action of the buffer member 108. Does not rotate integrally. Further, the displacement amount of the vibrating body holding member 105 with respect to the moving base member 110 in the Y direction and the YZ cross section is based on the displacement amount of the pressure transmission member 109 because the vibrating body 103 is directly attached to the vibrating body holding member 105. Also grows. Further, the buffering characteristics of the buffer member 108 slightly change depending on environmental changes such as changes with time and humidity. For example, in a high-humidity environment, the buffer characteristics change due to the buffer member 108 containing moisture.

  On the other hand, the line contact described above is stable even if the vibrating body holding member 105 and the pressure transmission member 109 do not rotate integrally with each other, the two protrusions 101a of the vibration plate 101 with respect to the friction member 113 are stabilized. Realize pressure contact. Further, stable pressure contact is maintained even with respect to changes in characteristics of the buffer member 108 with respect to changes over time and environmental changes.

  According to the above configuration, it is possible to realize a small vibration type actuator 100 that can stably press-contact the vibrating body 103 against the friction member 113 with a simple configuration. That is, the contact position between the pressurizing member 111 and the pressurizing transmission member 109 can be changed with a simple configuration in which the protrusion 109a of the pressurizing transmission member 109 and the concave portion 105a of the vibrating body holding member 105 are brought into contact (engaged). A relative positional shift between the pressure transmission member 109 and the vibrating body 103 can be suppressed. Therefore, it is possible to realize the vibration type actuator 100 that is small and has stable characteristics.

  Then, by applying a drive signal to the piezoelectric element 102 of the vibrating body 103 via the wiring substrate 104, vibration (elliptical motion) can be generated at the tips of the protrusions 101a and 101b. When the projecting portions 101a and 101b that vibrate come into pressure contact with the friction contact surface 113a of the friction member 113, a driving force in the Z direction is generated, and the moving unit moves in the Z direction. By connecting the driven member to the moving base member 110, the driven member can be driven in the Z direction.

  In the present embodiment, the case where the pressure transmission member 109 is provided with the first contact portion (projection portion 109a) and the vibrating body holding member 105 is provided with the second contact portion (recess portion 105a) has been described. However, the pressurizing transmission member 109 may be provided with a second contact portion, and the vibrating body holding member 105 may be provided with a first contact portion. That is, one member of the pressure transmission member 109 and the vibrating body holding member 105 may be provided with the first contact portion, and the other member may be provided with the second contact portion. Similarly, in the present embodiment, the case where the pressure transmission member 109 is provided with the third contact portion (shaft portion 109b) and the movable base member 110 is provided with the fourth contact portion (long hole portion 110a-1). explained. However, the pressure transmission member 109 may be provided with a fourth contact portion, and the movable base member 110 may be provided with a third contact portion. That is, the third contact portion may be provided on one member of the pressure transmission member 109 and the movable base member 110, and the fourth contact portion may be provided on the other member.

  In this embodiment, the linear vibration type actuator has been described. However, the same configuration as that of the present embodiment can also be applied to a rotary (ring type) vibration type actuator.

  FIG. 5 shows a configuration (configuration in a cross section along the optical axis α) of a lens barrel provided in an interchangeable lens as an optical apparatus that is Embodiment 2 of the present invention. The vibration actuator described in the first embodiment is provided in the lens barrel.

  Reference numeral 1 denotes a first lens unit disposed on the foremost side (subject side), and is held by a rectilinear cylinder 8. The first lens unit 1 moves in the optical axis direction, which is the direction in which the optical axis α extends, together with the rectilinear cylinder 8 by the rotation of the cam cylinder 7 during zooming. Reference numeral 2 denotes a second lens unit, which is held by a guide tube 6. Reference numeral 3 denotes a third lens unit, which is held by a guide tube 6. The third lens unit 3 moves in the optical axis direction by the rotation of the cam cylinder 7 at the time of zooming. Reference numeral 4 denotes a fourth lens unit, which is held by the guide tube 6. The fourth lens unit 4 moves in the optical axis direction by the rotation of the cam cylinder 7 at the time of zooming. Reference numeral 5 denotes a fifth lens unit, which is driven in the optical axis direction by a focus actuator 10 to be described later and performs focus adjustment.

  The guide tube 6 has a rectilinear groove 6A that engages with a cam follower (not shown) provided in the third and fourth lens units 3 and 4 and guides them in the optical axis direction. The cam cylinder 7 has cam groove portions 7A, 7B, and 7C that engage with cam followers (not shown) provided in the third and fourth lens units 3 and 4 and the rectilinear cylinder 8 and move them in the optical axis direction. Have. The rectilinear cylinder 8 is disposed on the outer periphery of the guide cylinder 6 and the cam cylinder 7.

  Reference numeral 9 denotes a fixed cylinder, and a mount 30 that is detachably connected to a camera 200 (not shown) is fixed to an end portion on the rear side (image plane side). A manual focus ring MFR and a manual zoom ring MZR are assembled on the outer periphery of the fixed cylinder 9 so as to be rotatable around the optical axis. By rotating the manual focus ring MFR, the fifth lens unit 5 can be moved in the optical axis direction by the focus actuator 10 to perform manual focus. Further, by manually operating the manual zoom ring MZR, the first, third and fourth lens units 1, 3, 4 can be moved in the optical axis direction to perform manual zoom.

  The focus actuator 10 is the linear vibration actuator (100) described in the first embodiment. A control board 22 detects the rotation of the manual focus ring MFR and controls the drive of the focus actuator 10 (vibration excited by the vibrating body (103)), so that the fifth lens unit 5 as a driven member can be controlled. Move in the direction of the optical axis. A sensor (not shown) for detecting the rotation of the control board 22, the manual focus ring MFR, and the focus actuator 10 are electrically connected by an FPC (not shown).

  According to the present embodiment, an interchangeable lens that can control the position and movement of the fifth lens unit 5 with high accuracy by using the vibration actuator (100) described in the first embodiment as the focus actuator 10 is provided. Can be realized.

  In the present embodiment, the lens barrel of the interchangeable lens has been described. However, the vibration type actuator described in the first embodiment can also be used in the lens barrel used in the lens-integrated image pickup apparatus (optical apparatus).

  Further, the vibration type actuator of the first embodiment is not limited to the optical device as described above, and can also be used for various devices having a driven member driven by the vibration type actuator.

  Each embodiment described above is only a representative example, and various modifications and changes can be made to each embodiment in carrying out the present invention.

100 Vibrating actuator 103 Vibrating body 105 Vibrating body holding member 105a Recessed part (second contact part)
108 Buffer member 109 Pressure transmission member 109a Protrusion (first contact portion)
111 Pressure member 113 Friction member

Claims (7)

A vibrator whose vibration is excited by electro-mechanical energy conversion;
A vibrating body holding member for holding the vibrating body;
A friction member in contact with the vibrating body;
A pressurizing member that generates a pressurizing force for pressurizing and contacting the vibrating body in a first direction with respect to the friction member;
A pressure transmission member disposed between the vibrating body and the pressure member, and transmitting the applied pressure to the vibrating body;
A vibration type actuator in which the vibration body and the friction member are relatively moved in a second direction orthogonal to the first direction by the vibration;
A first contact portion provided on one member of the pressure transmission member and the vibrating body holding member is configured such that the pressure transmission member and the second contact portion provided on the other member are The relative displacement of the vibrating body holding member in the second direction is limited, and the relative rotation of the pressure transmission member and the vibrating body holding member in a plane parallel to the first and second directions is allowed. A vibration type actuator that makes contact with each other. The first contact portion is formed as a protrusion;
2. The vibration type actuator according to claim 1, wherein the second contact portion is formed as a concave portion that engages with the protrusion in the second direction.   3. The vibration type actuator according to claim 1, wherein the first and second contact portions are in linear contact extending in a third direction orthogonal to the first and second directions. The first contact portion has a curved surface as a contact surface;
4. The vibration type actuator according to claim 1, wherein the second contact portion has a flat surface as a contact surface. 5. A base member that holds the vibrating body holding member while allowing displacement in the first direction and rotation in the plane;
Of the pressure transmission member and the base member, the third contact portion provided on one member is in contrast to the fourth contact portion provided on the other member, and the pressure transmission member and the base member. To allow relative rotation in the plane and to limit relative displacement of the pressure transmission member and the base member in a third direction orthogonal to the first and second directions. The vibration type actuator according to claim 1, wherein the vibration type actuator is provided. The vibration type actuator according to any one of claims 1 to 5,
And a driven member driven by the vibration type actuator. The vibration type actuator according to any one of claims 1 to 5,
An optical device comprising a lens driven by the vibration type actuator.