JP2018085266A - Excimer lamp unit and excimer lamp device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an excimer lamp unit and an excimer lamp device capable of suppressing variation of temperature distribution of the excimer lamp, while including a long excimer lamp, while ensuring high uniformity of illumination distribution of light.SOLUTION: An excimer lamp unit consists of a long tubular excimer lamp, and a cooling gas blower pipe provided oppositely to the outer peripheral surface of the excimer lamp, in the longitudinal direction thereof, and is used while being housed in a mantle tube transmitting vacuum ultraviolet ray radiated from the excimer lamp. The cooling gas blower pipe is provided with multiple cooling gas outlets in the longitudinal direction, and each cooling gas outlet is located at such a position that the cooling gas discharged from the cooling gas outlet is directed in the same circumferential direction of the excimer lamp.SELECTED DRAWING: Figure 5

Description

  The present invention relates to a long excimer lamp unit and an excimer lamp device that irradiates a fluid with ultraviolet rays, for example.

  As a certain type of ultraviolet treatment apparatus, there is an apparatus that irradiates a fluid such as gas or liquid with ultraviolet rays. In this ultraviolet treatment apparatus, treatments such as sterilization of water, decomposition of organic substances (TOC) in water, and decomposition of NOx in exhaust gas are performed.

For example, Patent Document 1 describes that in water purification treatment, sewage treatment, food wastewater treatment, chemical wastewater treatment, ocean vessel ballast water treatment, etc., ultraviolet rays are treated to inactivate or detoxify algae, microorganisms, pathogenic protozoa, etc. An ultraviolet treatment apparatus for irradiating a fluid (water to be treated) is disclosed.
In the ultraviolet processing apparatus disclosed in Patent Document 1, a long ultraviolet lamp inserted into a mantle tube is disposed in a processing tank in which a processing fluid flows, and the processing fluid is supplied to an inlet pipe of the processing tank. Then, after irradiating 254 nm ultraviolet rays from an ultraviolet lamp in the treatment tank, the ultraviolet rays are irradiated by discharging from the outlet tube.

JP 2007-144386 A

  As an ultraviolet lamp used in such an ultraviolet processing apparatus, a lamp that radiates vacuum ultraviolet rays in particular as ultraviolet rays is used, and ultraviolet rays having various wavelengths can be used depending on the type of phosphor to be selected. Excimer lamps are preferably used.

On the other hand, in the ultraviolet treatment apparatus, the treatment tank through which the fluid to be treated flows becomes longer due to an increase in the amount of the fluid to be treated with the ultraviolet irradiation treatment, and the excimer lamp tends to become longer accordingly. .
However, the excimer lamp generally has the characteristic that the illuminance of the emitted ultraviolet light decreases as a result of the decrease in luminous efficiency when the temperature rises. Therefore, in the long excimer lamp, it is caused by variation in temperature distribution. There is a problem that uneven illuminance occurs.
In addition, when a phosphor is used for an excimer lamp, there is a problem that unevenness in illuminance occurs due to temperature characteristics of the phosphor if there is a variation in temperature distribution.

  The present invention has been made based on the circumstances as described above, and the object thereof is to provide a long excimer lamp, while suppressing variations in the temperature distribution of the excimer lamp. An object of the present invention is to provide an excimer lamp unit capable of obtaining high uniformity in illuminance distribution and an excimer lamp device including the same.

The excimer lamp unit of the present invention includes a long tubular excimer lamp,
Along with the longitudinal direction of the excimer lamp, a cooling gas blower pipe provided to face the outer peripheral surface of the excimer lamp,
An excimer lamp unit used by being housed in an outer tube that transmits vacuum ultraviolet rays radiated from the excimer lamp,
The cooling gas blowing pipe is provided with a plurality of cooling gas blowing ports along the longitudinal direction,
Each of the cooling gas blowing ports is arranged at a position where the cooling gas discharged from the cooling gas blowing port is directed in the same circumferential direction of the excimer lamp.

In the excimer lamp unit of the present invention, it has a plurality of the cooling gas blower tubes,
It is preferable that the plurality of cooling gas blower tubes are equally spaced along the outer periphery of the excimer lamp.

The excimer lamp device of the present invention includes a long tubular excimer lamp, and
An excimer lamp unit comprising a cooling gas blower tube provided so as to face the outer peripheral surface of the excimer lamp along the longitudinal direction of the excimer lamp;
The excimer lamp unit is accommodated coaxially, and is composed of an outer tube that transmits vacuum ultraviolet rays radiated from the excimer lamp, with one end opened and the other end closed.
The cooling gas blowing pipe is provided with a plurality of cooling gas blowing ports along the longitudinal direction,
Each of the cooling gas blowing ports is arranged at a position where the cooling gas discharged from the cooling gas blowing port is directed in the same circumferential direction of the excimer lamp.

In the excimer lamp device of the present invention, it has a plurality of the cooling gas blower tubes,
The plurality of cooling gas blower tubes are arranged evenly spaced along the outer periphery of the excimer lamp,
Each of the cooling gas blowing ports in the plurality of cooling gas blowing pipes has a longitudinal level position in the cooling gas blowing pipe sequentially shifted in one direction along the outer periphery of the excimer lamp in a direction toward one end side of the outer tube. It is preferable that they are arranged.

  In the excimer lamp unit according to the present invention, in the cooling gas blower pipe provided so as to face the outer peripheral surface of the excimer lamp, a plurality of the cooling gas blower ports are connected to the excimer lamp. It is provided at a position oriented in the same circumferential direction of the lamp. As a result, the cooling gases supplied from the plurality of cooling gas blowing ports collide with each other and are not dispersed and are distributed in a constant direction along the same circumferential direction of the excimer lamp. Therefore, while providing a long excimer lamp, variation in the temperature distribution of the excimer lamp can be suppressed, and high uniformity can be obtained in the illuminance distribution of light.

It is a figure which shows an example of a structure of the excimer lamp unit of this invention, Comprising: (a) is a front view, (b) is a perspective view. FIG. 3 is a cross-sectional view showing the vicinity of the other end base in a state where the excimer lamp unit of FIG. 1 is inserted into the outer tube. It is a perspective view which shows the intermediate | middle base and lamp holder vicinity in the excimer lamp unit of FIG. It is sectional drawing which shows the one end base vicinity in the state in which the excimer lamp unit of FIG. 1 was inserted in the mantle tube. It is a schematic diagram which shows an example of the distribution path | route of the cooling gas in the excimer lamp apparatus of this invention. It is a schematic diagram which shows the distribution | circulation state of the cooling gas in the excimer lamp apparatus of this invention. It is a schematic diagram which shows another example of the distribution path | route of the cooling gas in the excimer lamp apparatus of this invention. It is a schematic diagram which shows another example of the distribution path | route of the cooling gas in the excimer lamp apparatus of this invention.

  Hereinafter, embodiments of an excimer lamp unit and an excimer lamp device according to the present invention will be described.

1A and 1B are diagrams showing an example of the configuration of an excimer lamp unit according to the present invention, where FIG. 1A is a front view and FIG. 1B is a perspective view. FIG. 2 is a cross-sectional view showing the vicinity of the other end base in a state where the excimer lamp unit of FIG. 3 is a perspective view showing the vicinity of the intermediate base and the lamp holder in the excimer lamp unit of FIG. FIG. 4 is a cross-sectional view showing the vicinity of one end base in a state where the excimer lamp unit of FIG.
The excimer lamp device according to the present invention includes an excimer lamp unit 10 which is long as a whole and an outer tube 60 in which the excimer lamp unit 10 is housed. The excimer lamp device is disposed in a processing tank and emits vacuum ultraviolet rays. .
Specifically, the excimer lamp unit 10 includes an end base 20, an intermediate base 30, and an other end base 40 provided in this order along one direction, and the one end base 20, the intermediate base 30 and the other end base 40 are mutually connected. The excimer lamp 11 is connected between the intermediate base 30 and the other end base 40 by the cooling gas blower pipe 35, and the power supply terminal 21 for the excimer lamp 11 projects outward from the one end base 20 in one direction. It is provided to do.
In addition, a lead wire support rod 25 that supports a lead wire (not shown) that electrically connects the excimer lamp 11 and the power supply terminal 21 is provided so as to extend between the one end base 20 and the intermediate base 30. Yes.

[Excimer lamp]
The excimer lamp 11 includes an arc tube 12 having a double tube structure including an inner tube and an outer tube, in which a discharge gas for generating excimer discharge is enclosed. An electrode (not shown) is provided, and a net-like outer electrode (not shown) is provided on the outer wall surface of the arc tube 12. Both ends of the arc tube 12 are fitted into the bottomed cylindrical metal cap 13 having an inner diameter that matches the outer diameter of the arc tube 12 so that the outer electrode contacts, and the metal cap 13 has a bottomed cylindrical shape. The ceramic cap 14 is fixed to the arc tube 12 by being inserted into the ceramic cap 14 and screwed from its peripheral wall. Further, a lead wire (not shown) that is electrically connected to the inner electrode extends outward from one ceramic cap 14.
For example, stainless steel (SUS304) is used as the material of the outer electrode and the inner electrode.
Further, the discharge gas is, for example, xenon, and the wavelength of the ultraviolet rays emitted from the excimer lamp 11 is, for example, 172 to 380 nm.

[Other end base]
As shown in FIG. 2, the other end base 40 includes a substantially disc-shaped other end base body 41, and a truncated cone-shaped convex portion 42 protruding from the lower surface (the lower surface in FIG. 2) of the other end base body 41. Consists of. On the upper surface (the upper surface in FIG. 2) of the other end base body 41, a recess 41a for fitting the end of the excimer lamp 11 is provided in the central region, and the end of the cooling gas blower pipe 35 is fitted. The recess 41b is provided evenly along the outer periphery.
Since the other end base 40 has the convex portion 42, when the excimer lamp unit 10 is inserted into the bottomed cylindrical outer tube 60, the excimer lamp unit 10 and the tube wall of the outer tube 60 are connected to each other. Since the distance is ensured and a gap is formed around the convex portion 42, it is possible to suppress the accumulation of heat.

In the other end base 40, the lower end portion (lower end portion in FIG. 2) of the cooling gas blower pipe 35 and the lower end portion (lower end portion in FIG. 2) of the excimer lamp 11 are fixed.
Specifically, the excimer lamp 11 is attached to the other end base 40 by inserting the ceramic cap 14 on the side where the lead wire of the excimer lamp 11 is not disposed into the recess 41 a of the other end base body 41. Holding fixed.
The cooling gas blower pipe 35 has a lower end fitted into the recess 41b of the other end base body 41 and welded, and a screw hole 46 opened from the lower surface of the other end base body 41 to the recess 41b. The cooling gas blowing pipe 35 is fixed to the other end base 40 by being screwed to the lower end portion of the cooling gas blowing pipe 35 with a screw 47 inserted from above.

  The other end base 40 is made of an insulator such as polytetrafluoroethylene.

(Lamp holder)
The upper end portion (the upper end portion in FIG. 1) of the excimer lamp 11 is disposed between the intermediate base 30 and the other end base 40 and is held and fixed by a lamp holder 50 held by the cooling gas blower pipe 35.
The lamp holder 50 is a substantially disk-like structure in which three members 51, 51, 51 having the same shape are combined by screwing, and fits the outer diameter of the metal cap 13 of the excimer lamp 11 in the center. A lamp holder through hole 53 having an inner diameter is provided, and a through hole 54 through which the cooling gas blower pipe 35 is inserted is provided uniformly along the periphery. Further, a notch 58 for allowing a cooling gas to be described later to pass therethrough is provided at the outer edge of each member 51 constituting the lamp holder 50.
Specifically, the lamp holder through-hole 53 is formed by a notch having an arcuate cross section formed in the opposing peripheral edge of each member 51, 51, 51 constituting the lamp holder 50. , 51 are formed into a circular hole having an inner diameter that matches the outer diameter of the metal cap 13 of the excimer lamp 11.
The through hole 54 through which the cooling gas blowing pipe 35 is inserted has an inner diameter that matches the outer diameter of the cooling gas blowing pipe 35.

In the lamp holder 50, the members 51, 51, 51 having the same shape are arranged around the metal cap 13 of the excimer lamp 11, and the adjacent members 51 are screwed to each other to fix the outer surface of the metal cap 13 of the excimer lamp 11. The excimer lamp 11 is fixed by the lamp holder 50 by pressing the lamp holder 50 and the inner surface of the lamp holder through-hole 53 formed by the notch of the member 51 of the lamp holder 50.
Further, the cooling gas blower pipe 35 is fixed to the lamp holder 50 by being inserted into the through hole 54 of the lamp holder 50.

  The lamp holder 50 is provided with a grounding through hole (not shown) penetrating from the side peripheral surface to the metal cap 13, and a metal screw is inserted into the grounding through hole so that the metal cap 13 and the member are inserted. 51 is electrically connected. Furthermore, a ground wire (not shown) electrically connected to the ground terminal 22 extends from the metal screw.

  The lamp holder 50 is made of a metal such as stainless steel or aluminum.

[Intermediate base]
The intermediate base 30 is a generally disk-shaped member in which two semi-disc members 31A and 31B are combined, and a vent 33 for passing a cooling gas, which will be described later, and a lead wire support rod on one side of the central region. The fixing holes 39 through which the cooling gas blow pipes 35 are inserted are equally provided along the peripheral edge so as to be separated from the fixing holes 39. Further, a notch 38 for passing a ground wire is provided on the outer edge of the intermediate base 30.
Specifically, the fixing holes 39 are formed by forming notches formed in the opposing peripheral edges of the semi-disc-like members 31A and 31B and assembling the semi-disc-like members 31A and 31B and fixing them with screws. A rectangular hole having a short diameter that matches the outer diameter of a groove provided in advance on the peripheral surface of the lead wire support rod 25 is used.
The cutout 34 through which the cooling gas blowing pipe 35 is inserted has an inner shape that matches the outer shape of the cooling gas blowing pipe 35 and has a substantially semicircular cross section.

In the intermediate base 30, the cooling gas blower pipe 35 and the lead wire support rod 25 are fixed.
Specifically, the lead wire support rod 25 is fixed to the intermediate base 30 by inserting the lower end portion of the lead wire support rod 25 into the fixing hole 39 and sandwiching it.
Further, the cooling gas blower pipe 35 is fixed to the intermediate base 30 by being inserted or inserted into the notch 34 of the intermediate base 30.
The lead wire support rod 25 is fixed by the fixing hole 39 of the intermediate base 30, and the cooling gas blower pipe 35 is fixed by the notch 34 of the intermediate base 30, so that a distance is reliably ensured between them. The

  The intermediate base 30 is made of an insulator such as polytetrafluoroethylene.

[Lead wire support rod]
The lead wire support rod 25 is for supporting a lead wire extending from one ceramic cap 14 of the excimer lamp 11. Specifically, the lead wire support rod 25 is arranged along the outer periphery of the lead wire support rod 25, thereby Supports the line.
The lead wire support rod 25 is made of an insulator such as glass epoxy.

[One end base]
The one-end base 20 has a substantially disc shape, and has an exhaust port 23 for exhausting a cooling gas, which will be described later, on one side of the central region, and a fixing hole 29 that communicates with the exhaust port 23 and into which the lead wire support rod 25 is inserted. And the through holes 24 through which the cooling gas blowing pipes 35 are inserted are provided uniformly along the outer periphery. Further, a notch 28 for passing a ground wire is provided on the outer edge of the one end base 20.
Specifically, the fixing hole 29 has an L-shaped protrusion that fits into a groove provided in advance on the peripheral surface of the lead wire support rod 25.

In the one-end base 20, the upper end portion (the upper end portion in FIG. 1A) of the cooling gas blower pipe 35 and the upper end portion of the lead wire support rod 25 (the upper end portion in FIG. 1A) are fixed.
Specifically, the cooling gas blower pipe 35 is in pressure contact with a set screw (not shown) inserted into a screw hole (not shown) opened from the side peripheral surface of the one end base 20 toward the through hole 24. This is fixed to the one end base 20. A nut 32 is attached to the upper end of the cooling gas blower pipe 35.
The lead wire support rod 25 is fixed to the one end base 20 by being hooked on the L-shaped protrusion of the fixing hole 29.

  The one end base 20 is made of an insulator such as polytetrafluoroethylene.

A power supply terminal 21 made of a metal such as brass connected to the high voltage side electrode (inner electrode) of the excimer lamp 11 is screwed to the upper end portion of the lead wire support rod 25 that protrudes and is fixed from the upper surface of the one end base 20. In addition to being fixed, a ground terminal 22 made of metal such as brass connected to the low voltage side electrode (outer electrode) is fixed to the upper surface of the one end base 20 by screwing.
In the power supply terminal 21, a lead wire disposed in the lead wire support rod 25 and extending from the inner electrode of the excimer lamp 11 is electrically connected. In the ground terminal 22, the ground wire extending from the lamp holder 50 is cooled. It is disposed along the gas blowing pipe 35 and is electrically connected.
As a result, power is supplied to the excimer lamp 11 via the power supply terminal 21.

[Outer tube]
The excimer lamp unit 10 is in a state where the other end base 40 is accommodated in the outer tube 60 having only one end opened, specifically, the bottomed cylindrical outer tube 60 so as to be close to the bottom of the outer tube 60. Used as an excimer lamp device. Specifically, the entirety is immersed in a fluid to be treated to be irradiated with ultraviolet rays. This excimer lamp device may be used in a vertical posture or in a horizontal posture.
When the excimer lamp unit 10 is housed in the outer tube 60 and used, the cooling gas can be circulated in the cylindrical space between the outer tube 60 and the excimer lamp 11. Moreover, it is possible to prevent the excimer lamp 11 from coming into direct contact with the fluid to be processed.

  The excimer lamp unit 10 is arranged in a non-contact state so that the convex portion 42 of the other end base 40 faces the bottom surface of the outer tube 60 via a slight space. On the other hand, a recess 20a provided on the entire circumference of the lower part of the peripheral side surface of the one end base 20 is inserted into the upper end of the outer tube 60, and a jaw part 20b provided on the entire circumference of the upper part of the peripheral side surface of the one end base 20. Is placed on the upper end surface of the outer tube 60.

(Cooling mechanism)
In the excimer lamp device of the present invention, a cooling mechanism is provided.
Specifically, the cooling mechanism cools from a cooling gas blower port 36 provided through the side peripheral wall of the cooling gas blower pipe 35 connecting the intermediate base 30 and the other end base 40 facing the excimer lamp 11. A gas is blown.

[Cooling gas blow pipe]
The cooling gas blower pipe 35 is made of, for example, a stainless steel (SUS) pipe and is arranged to extend in the same direction as the axial direction of the excimer lamp 11.
The cooling gas blower pipe 35 may be a long type integrally extending from the one end base 20 to the other end base 40, or a short type extending from the one end base 20 to the intermediate base 30. A separate short type extending from the intermediate base 30 to the other end base 40 may be combined, or these may be used in combination.

It is preferable to have a plurality of cooling gas blowing pipes 35 connecting the intermediate base 30 and the other end base 40. In addition, the plurality of cooling gas blower tubes 35 are equally spaced along the outer periphery of the excimer lamp 11, that is, adjacent to each other in a cross section perpendicular to the tube axis of the arc tube 12 of the excimer lamp 11. It is preferable that the two cooling gas blower tubes 35 are arranged so that the angles from the axial center of the arc tube 12 are substantially equal.
The number of cooling gas blowing pipes 35 connecting the intermediate base 30 and the other end base 40 is preferably three or four. When the number of the cooling gas blowing pipes 35 is excessively large, the ultraviolet light emitted from the excimer lamp 11 is blocked by the cooling gas blowing pipe 35, and there is a possibility that the light use efficiency is low. Moreover, when the number of the cooling gas blower pipes 35 is excessively small, there is a possibility that sufficient mechanical strength cannot be obtained in the excimer lamp unit 10.
The cooling gas blower tube 35 is preferably disposed at a position close to the inner surface of the outer tube 60 from the viewpoint of reducing the light blocking rate of the light emitted from the excimer lamp 11 and ensuring the light use efficiency. .

  The cooling gas blower tube 35 also functions as a holding mechanism for the excimer lamp unit 10. That is, the one end base 20, the intermediate base 30, and the other end base 40 are connected to each other by a plurality of cooling gas blower pipes 35, and the excimer lamp 11 is held between the intermediate base 30 and the other end base 40. The whole is integrated while providing a long excimer lamp 11, and high mechanical strength is obtained.

[Cooling gas vent]
A plurality of cooling gas blowing ports 36 are provided along the longitudinal direction of the cooling gas blowing pipe 35 that connects the intermediate base 30 and the other end base 40. Each of the plurality of cooling gas blowing ports 36 is disposed at a position where the cooling gas discharged from the cooling gas blowing port 36 is directed in the same circumferential direction of the excimer lamp 11. Specifically, as shown in FIG. 5, the cooling gas blower port is located at a position where the cooling gas discharged from the cooling gas blower port 36 is directed in the tangential direction of the outer circumference circle in a cross section perpendicular to the tube axis of the excimer lamp 11. 36 is arranged. In FIG. 5, the tangential direction of the outer circumference circle in the cross section perpendicular to the tube axis of the excimer lamp 11 is indicated by a black arrow.

In addition, each of the cooling gas blowing ports 36 in the plurality of cooling gas blowing pipes 35 has a longitudinal level position in the cooling gas blowing pipe 35 sequentially in one direction along the outer periphery of the excimer lamp 11, and one end of the outer tube 60. It is preferable that the electrodes are displaced in the lateral direction, that is, arranged in a so-called spiral shape around the tube axis of the excimer lamp 11.
By arranging the cooling gas blowing ports 36 in a spiral manner in this way, the number of cooling gas blowing ports 36 provided per one cooling gas blowing tube 35 can be reduced, and thereby the cooling gas flow rate can be reduced. Variations in the flow rate of the cooling gas on the supply side (the intermediate base 30 side of the excimer lamp unit 10) and the terminal side (the other end base 40 side of the excimer lamp unit 10) can be reduced.

The diameter and pitch of the cooling gas blower ports 36 in the cooling gas blower pipe 35 need only be able to obtain a substantially uniform discharge amount from each of the cooling gas blower openings 36 in one cooling gas blower pipe 35. The number varies depending on the number, the inner diameter, and the flow rate of the cooling gas.
For example, when the inner diameter of the cooling gas blowing pipe 35 is φ4 mm, the cooling gas blowing port 36 in one cooling gas blowing pipe 35 has a diameter of φ0.7 mm and a pitch of 90 mm. That is, the closest cooling gas blowing port 36 in the adjacent cooling gas blowing pipe 35 is displaced by 30 mm in the level position in the longitudinal direction.
Further, the cooling gas blowing ports 36 in one cooling gas blowing pipe 35 are not limited to being provided at a constant pitch, and the interval between the adjacent cooling gas blowing ports 36 from the other end base 40 side. The inclination distribution may be increased by 50 mm, 60 mm, 70 mm,.

  The cooling gas blowing port 36 in the cooling gas blowing pipe 35 is a through hole extending in a direction perpendicular to the tube wall of the cooling gas blowing pipe 35 and can be formed by, for example, drilling.

In the excimer lamp device as described above, when the cooling gas is supplied into the cooling gas blower pipe 35 from the upper end portion (the upper end portion in FIG. 1A) positioned outward in one direction of the one end base 20. The cooling gas is circulated in the cooling gas blower pipe 35 toward the other end base 40.
In each cooling gas blower port 36, the cooling gas is discharged along a plane perpendicular to the axial direction of the excimer lamp 11 in a tangential direction of the outer circumference circle in a cross section perpendicular to the tube axis of the excimer lamp 11. 11 is sent to the peripheral wall.
At this time, in each of the plurality of cooling gas blowing ports 36, the cooling gas is directed and blown in the same circumferential direction. As a result, a flow of cooling gas that moves in the circumferential direction of the excimer lamp 11 is formed in the space between the outer tube 60 and the excimer lamp 11.
Further, each of the plurality of cooling gas blowing ports 36 is arranged in a spiral shape, and one end (side on which the other end base 40 is accommodated) of the outer tube 60 is closed, so that the cooling gas flows upward. As a result, as shown in FIG. 6, the cooling gas is spirally circulated.

For example, nitrogen gas or CDA (Clean Dry Air) is preferably used as the cooling gas.
The flow rate for supplying the cooling gas is preferably as low as the temperature of the excimer lamp 11 is low. Therefore, the flow rate for supplying the cooling gas is preferably 30 L / min or more from the viewpoint of reliably cooling the excimer lamp 11. 200 L / min.

As an example of the dimensions of the excimer lamp device, the excimer lamp unit 10 has an overall length of 2 m, the outer diameter of the jaw 20b of the one end base 20 is φ60 mm, the outer diameter of the recess 20a is φ54 mm, the intermediate base 30, and the lamp holder 50, the maximum outer diameter of the other end base 40 is φ54 mm, the distance between the one end base 20 and the intermediate base 30 is 735 mm, the distance between the intermediate base 30 and the lamp holder 50 is 100 mm, and the distance between the lamp holder 50 and the other end base 40 Is 1000 mm.
The cooling gas blowing pipe 35 has an outer diameter of 6 mm, an inner diameter of 4 mm, a length of 2 m, a number of three, a cooling gas blowing port 36 having a diameter of 0.7 mm, and a single cooling gas blowing pipe 35. The pitch of the mouth 36 is 90 mm.
The excimer lamp 11 has a lamp length of 1 m, an inner tube inner diameter of 14 mm, an outer diameter of 16 mm, a thickness of 1 mm, an outer tube inner diameter of 24.5 mm, an outer diameter of 26.5 mm, a thickness of 1 mm, The sealing pressure is 33.3 kPa.
The outer tube 60 has an inner diameter of 58 mm and a thickness of 3 mm.

  In the excimer lamp unit 10 as described above, a plurality of cooling gas blowing ports 36 are discharged from the cooling gas blowing port 36 in the cooling gas blowing pipe 35 provided so as to face the outer peripheral surface of the excimer lamp 11. The cooling gas is provided at a position directed in the same circumferential direction of the excimer lamp 11. As a result, the cooling gases supplied from the plurality of cooling gas blowing ports 36 are distributed in a constant direction along the same circumferential direction of the excimer lamp 11 without colliding with each other and being dispersed. Therefore, the variation of the temperature distribution of the excimer lamp 11 can be suppressed while the long excimer lamp 11 is provided, and high uniformity can be obtained in the illuminance distribution of light.

Although the excimer lamp device of the present invention has been specifically described above, the present invention is not limited to the above example, and various modifications can be made.
For example, as shown in FIG. 7, the cooling gas blower port 36 is parallel to the tangential direction of the outer circumference circle in a cross section perpendicular to the tube axis of the excimer lamp 11, and is positioned in the direction toward the peripheral wall of the excimer lamp 11. May be provided. Specifically, the position closer to the excimer lamp 11 and closer to the excimer lamp 11 than the position where the cooling gas is directed in the tangential direction of the outer circumference circle in the cross section perpendicular to the tube axis of the excimer lamp 11. May be provided at an outer position. In FIG. 7, the cooling gas blower port is indicated by reference numeral 36A.
Further, as shown in FIG. 8, the excimer lamp 11 may be provided at a position outward in the radial direction from the peripheral wall of the excimer lamp 11. Specifically, it is a position farther from the excimer lamp 11 than the position where the cooling gas is directed in the tangential direction of the outer circumference circle in the cross section perpendicular to the tube axis of the excimer lamp 11, and the position farthest from the excimer lamp 11. It may be provided at an inner position. In FIG. 8, the cooling gas blower opening is indicated by reference numeral 36B.

  Hereinafter, specific examples of the excimer lamp device of the present invention will be described, but the present invention is not limited to the following examples.

<Example 1>
An excimer lamp device [1] according to FIGS. 1 to 6 was produced. Specifically, it is as follows.
[Excimer lamp unit]
・ Total length: 2m
・ Distance between one end base and intermediate base: 735mm
・ Distance between the intermediate base and the lamp holder: 100 mm
・ Distance between the lamp holder and the other end base: 1000 mm
[One end base]
・ Jaw outer diameter: φ60mm
・ Outside diameter of recess: φ54mm
[Intermediate base]
・ Maximum outer diameter: φ54mm
(Lamp holder)
・ Maximum outer diameter: φ54mm
[Other end base]
・ Maximum outer diameter: φ54mm
[Excimer lamp]
・ Lamp length: 1m
・ Inner tube: inner diameter 14mm, outer diameter 16mm, thickness 1mm
Outer tube: inner diameter 24.5mm, outer diameter 26.5mm, thickness 1mm
-Discharge gas (xenon): enclosed pressure 33.3 kPa
・ Power: 190W
[Cooling gas blow pipe]
・ Length: 2m
・ Number: 3 ・ Outer diameter: φ6mm
・ Inner diameter: φ4mm
[Cooling gas vent]
・ Inner diameter: φ0.7mm
・ Pitch: 90mm
・ Spiral arrangement (outer tube)
・ Inner diameter: φ58mm
・ Thickness: 3mm

<Example 2>
In Example 1, the cooling gas blowing ports are not arranged in a spiral shape, but the cooling gas blowing ports closest to each other in the adjacent cooling gas blowing pipes are arranged so as to be arranged at the same level position in the longitudinal direction. Produced a similar excimer lamp device [2].

The center of the excimer lamp in the axial direction when nitrogen gas was supplied to the excimer lamp device [1] and the excimer lamp device [2] at flow rates of 0 L / min, 30 L / min, and 90 L / min, respectively. And the temperature of a total of five points was measured at positions spaced apart by 200 mm and 400 mm respectively outward in the axial direction. Respective positions are denoted by A to E from positions close to the other end base. In A to E, the temperature was measured in contact with the peripheral wall of the excimer lamp.
And the uniformity of temperature was computed from the temperature of A-E according to following formula (1).
Formula (1): Uniformity of temperature (%) =
{(Maximum temperature in A to E) − (minimum temperature in A to E)} / (average temperature of A to E) × 100
The smaller the temperature uniformity, the smaller the difference between the maximum temperature and the minimum temperature, indicating that the variation in the temperature distribution of the excimer lamp can be suppressed.
The results are shown in Table 1.

As is clear from Table 1, it was confirmed that the temperature of the excimer lamp can be lowered by circulating the cooling gas (nitrogen gas) through the excimer lamp device as compared with the case where it is not distributed.
Further, the excimer lamp device [1] in which the cooling gas blowing ports are provided in a spiral shape is more than the excimer lamp device [2] in which the cooling gas blowing ports of adjacent cooling gas blowing pipes are provided at the same level position. The temperature uniformity is reduced to about 1/3, and it is shown that the variation in the temperature distribution of the excimer lamp can be further suppressed.

DESCRIPTION OF SYMBOLS 10 Excimer lamp unit 11 Excimer lamp 12 Light emission tube 13 Metal cap 14 Ceramic cap 20 One end base 20a Recess 20b Jaw part 21 Feeding terminal 22 Grounding terminal 23 Exhaust port 24 Through hole 25 Lead wire support rod 28 Notch 29 Fixing hole 30 Intermediate base 31A, 31B Semi-disc member 32 Nut 33 Ventilation hole 34 Notch 35 Cooling gas blowing pipe 36, 36A, 36B Cooling gas blowing hole 38 Notch 39 Fixing hole 40 Other end base 41 Other end base body 41a, 41b Recess 42 Projection 46 Screw hole 47 Screw 50 Lamp holder 51 Member 53 Through hole 54 for lamp holder Through hole 58 Notch 60 Outer tube

Claims (4)

A long tubular excimer lamp,
Along with the longitudinal direction of the excimer lamp, a cooling gas blower pipe provided to face the outer peripheral surface of the excimer lamp,
An excimer lamp unit used by being housed in an outer tube that transmits vacuum ultraviolet rays radiated from the excimer lamp,
The cooling gas blowing pipe is provided with a plurality of cooling gas blowing ports along the longitudinal direction,
Each of the cooling gas blowing ports is arranged at a position where the cooling gas discharged from the cooling gas blowing port is directed in the same circumferential direction of the excimer lamp. A plurality of the cooling gas blowing pipes;
2. The excimer lamp unit according to claim 1, wherein the plurality of cooling gas blower tubes are equally spaced along an outer periphery of the excimer lamp. A long tubular excimer lamp, and
An excimer lamp unit comprising a cooling gas blower tube provided so as to face the outer peripheral surface of the excimer lamp along the longitudinal direction of the excimer lamp;
The excimer lamp unit is accommodated coaxially, and is composed of an outer tube that transmits vacuum ultraviolet rays radiated from the excimer lamp, with one end opened and the other end closed.
The cooling gas blowing pipe is provided with a plurality of cooling gas blowing ports along the longitudinal direction,
Each of the cooling gas blowing ports is arranged at a position where the cooling gas discharged from the cooling gas blowing port is directed in the same circumferential direction of the excimer lamp. A plurality of the cooling gas blowing pipes;
The plurality of cooling gas blower tubes are arranged evenly spaced along the outer periphery of the excimer lamp,
Each of the cooling gas blowing ports in the plurality of cooling gas blowing pipes has a longitudinal level position in the cooling gas blowing pipe sequentially shifted in one direction along the outer periphery of the excimer lamp in a direction toward one end side of the outer tube. The excimer lamp device according to claim 3, wherein the excimer lamp device is arranged to