JP2018076569A - Film deposition apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To facilitate a maintenance work of each electrode in a film deposition apparatus equipped with a plurality of electrodes.SOLUTION: A film deposition apparatus 7 comprises: a chamber 10 capable of accommodating a base material and opened in one direction; and four or more electrodes 25 disposed in the chamber 10 and arranged along a predetermined arranging direction; and a plurality of covers 51 and 52 disposed in a number smaller than that of the electrodes 25 and capable of covering said opening while mutually overlaying each other. The electrodes 25 are attached separately of the covers 51 and 52, and the maximum number of the electrodes 25 continuously attached along said arranging direction individually in the covers 51 and 52 is 2.SELECTED DRAWING: Figure 4

Description

  The present invention relates to a film forming apparatus for forming a thin film on a substrate.

  For example, chemical vapor deposition (CVD) is known as a method for forming a silicon nitride film on a substrate used for a thin film transistor for display, a solar cell, and the like. Among them, plasma CVD is widely used. A conventional plasma CVD apparatus includes a chamber for containing a base material and a discharge electrode, a gas introduction part for introducing a source gas into the chamber, a gas discharge part for discharging the gas in the chamber, and a high-frequency current to the electrode. A power supply unit and the like for supply are provided.

  In such film forming apparatuses such as a plasma CVD apparatus, in recent years, technological development for enabling film formation on a substrate having a larger area has been promoted. This is because, for example, the production efficiency is increased by increasing the number of products obtained from the base material having a predetermined area, and the size of the display or solar cell is increased. If the base material is increased in size as described above, the chamber for housing the base material needs to be widened in the film forming apparatus, and the electrode needs to be elongated and installed in a wider area accordingly.

  Further, in the film forming apparatus as described above, a plurality of (four in the illustrated example) electrodes 91 are provided in one chamber 95 as shown in FIG. The structure which provides is proposed (for example, refer patent document 1).

JP 2010-274562 A

  As described above, as the apparatus becomes complicated and large in size by providing a plurality of electrodes 91 in the chamber 95, it becomes difficult to perform maintenance such as cleaning of the electrodes 91 and replacement of parts in the chamber 95. Therefore, the electrode 91 may be pulled out of the chamber 95 for maintenance, and the following two methods are conceivable as means for realizing this.

  First, as a first means, all the electrodes 91 are pulled out from the chamber 95 at once. FIG. 13 is a cross-sectional view of the film forming apparatus as viewed from above. This film forming apparatus includes a chamber 95, four electrodes 91 provided in the chamber 95 along a predetermined arrangement direction (a circumferential direction around the roll 98 shown in FIG. 12), a chamber One cover 96 that can be opened and closed with respect to 95 openings 95 b is provided, and all the electrodes 91 are attached to the cover 96. As shown in FIG. 13A, when the cover 96 is closed with the chamber 95 closed, the cover 96 is opened as shown in FIG. In this case, although not shown, piping and wiring connected to each electrode 91 can be collected in one cover 96, so that there is an advantage that the device configuration is simplified. However, as shown in FIG. 13B, the electrodes 91 and 91 on both sides can be further maintained by the operator in the space K on both sides. However, there is a problem that it is difficult to perform the operation when the space between the electrodes on both sides is narrow, especially when the depth dimension of the apparatus is increased.

  Next, as a second means for extracting the electrodes from the chamber, there is a means for extracting the electrodes one by one. FIG. 14 is a cross-sectional view of the film forming apparatus as viewed from above. In this film forming apparatus, one flange 97 is provided for one electrode 91, and the electrodes 91 to be maintained can be pulled out from the chamber 95 one by one. However, in this case, although not shown, it is necessary to handle the piping and wiring connected to each electrode 91 separately from the piping and wiring for the other electrodes 91, which complicates the apparatus configuration. In addition, in order to pull out all the electrodes 91 and perform maintenance at the same time, there is a problem that a large work area for arranging the extracted electrodes 91 is required in front of the chamber 95. For this reason, it is necessary to perform the maintenance by pulling out the electrodes 91 one by one. In this case, the work efficiency is poor and a lot of time and labor are required for the maintenance.

  Therefore, an object of the present invention is to facilitate maintenance work of each electrode in a film forming apparatus including a plurality of electrodes.

The film forming apparatus of the present invention includes a chamber capable of accommodating a substrate and opening toward one side, four or more electrodes provided side by side along a predetermined arrangement direction in the chamber, A plurality of covers that are provided in a number smaller than the number of electrodes and that can cover the openings in a state where they overlap each other, and the four or more electrodes are separately attached to the plurality of covers. In each of the covers, the maximum value of the number of the electrodes attached side by side along the arrangement direction is two.
According to this film forming apparatus, when the cover is opened with respect to the chamber and the overlap of the covers is released for maintenance, there is an empty space next to each electrode. By using this empty space, maintenance work for each electrode is facilitated.

  Further, the number of the covers can be two. That is, even if the number of electrodes is four or more, the number of covers is two (two), and the number of electrodes attached to each of the covers in a row along the arrangement direction. If the maximum value is 2, when the cover is opened with respect to the chamber and the overlap of the cover is released, an empty space is created next to each electrode.

The cover on the chamber side may have a through hole through which the electrode attached to another cover that overlaps the cover is inserted. Thus, the electrodes are placed in the chamber by overlapping the cover and closing the opening of the chamber.
In this film formation apparatus, the cover on the chamber side needs to be large enough to close the opening, but the other cover that overlaps the cover is large enough to close the through hole. It is enough. Therefore, the other cover can be configured to be smaller than the cover on the chamber side, thereby preventing the film formation apparatus from becoming unnecessarily large.

  In addition, among the covers that overlap each other, a space in which the electrodes attached to the other cover can exist on at least one side in the arrangement direction of the electrodes attached to the one cover. Can be configured. With this configuration, when the cover is opened with respect to the chamber and the overlap is released, an empty space corresponding to the size of the electrode is obtained next to each electrode.

  Moreover, between the two electrodes that are discontinuously attached to one of the covers that overlap each other, the two electrodes that are attached side by side to the other cover are arranged side by side. It can be set as the structure where the space which can exist exists. With this configuration, when the cover is opened with respect to the chamber and the overlap is released, an empty space corresponding to the size of the two electrodes exists between the two electrodes that are discontinuously attached to the one cover. By using such a wide empty space, the maintenance work of each electrode is facilitated.

  According to the film forming apparatus of the present invention, when the cover is opened and the overlap is released for maintenance, there is an empty space next to each electrode, and this empty space is used to maintain the electrode. Work becomes easy.

It is the schematic which shows one Embodiment of the film-forming apparatus of this invention. It is sectional drawing at the time of seeing the chamber with which the film-forming apparatus is provided from the top. It is a front view of a chamber. It is explanatory drawing of the state which decomposed | disassembled the chamber and the cover. It is a front view of a 1st cover. It is a front view of a 2nd cover. It is sectional drawing which looked at the film-forming apparatus (disassembly state) which has another form from the top. It is sectional drawing which looked at the film-forming apparatus (disassembled state) which has another form from the top. It is sectional drawing at the time of seeing the chamber of the film-forming apparatus provided with eight electrodes from the top. It is explanatory drawing of the state which decomposed | disassembled the chamber and the cover. It is sectional drawing which looked at the modification of the film-forming apparatus from the top. It is the schematic of the conventional film-forming apparatus. It is sectional drawing at the time of seeing a film-forming apparatus (prior art) from the top. It is sectional drawing at the time of seeing a film-forming apparatus (prior art) from the top.

  FIG. 1 is a schematic view showing an embodiment of a film forming apparatus of the present invention, and is a view when the film forming apparatus is viewed from the front. FIG. 2 is a cross-sectional view of the chamber provided in the film forming apparatus as viewed from above. The film forming apparatus 7 includes a chamber 10, a plurality of electrodes 25, and covers (doors) 51 and 52. The chamber 10 can accommodate the base material W and is open toward one side. A plurality of electrodes 25 are provided in the chamber 10, and four electrodes 25 are provided in this embodiment. As shown in FIG. 2, the covers 51 and 52 cover each other by covering the opening 11 of the chamber 10 and closing the chamber 10. The film forming apparatus 7 of this embodiment is a plasma CVD apparatus, and the inside of the chamber 10 closed by the covers 51 and 52 is evacuated, and a thin film is formed on the substrate W by the plasma generated by the electrode 25. For example, a silicon nitride film is generated as the thin film.

  In this embodiment, the base material W is a strip-shaped member (resin film) conveyed by roll-to-roll, and for that purpose, the feeding device 61 for feeding the base material W and the base material W on which a thin film is formed are provided. And a winding device 62 for winding. The base material W may be a sheet-like substrate. In this case, a transport robot that transports the base material W is disposed instead of the feeding device 61 and the winding device 62.

  Although not shown, the film forming apparatus 7 further includes a gas introduction unit that introduces gas into the internal space 13 of the chamber 10 closed by the covers 51 and 52, a gas exhaust unit that exhausts the gas in the chamber 10, and an electrode. 25 is provided with a power supply unit for supplying a high frequency current. Note that the power supply unit includes a matching unit in addition to the high-frequency power supply.

  As shown in FIG. 2, the chamber 10 has a box structure in which one of the openings (11) is opened, and the two covers 51 and 52 cover the opening 11. The covers 51 and 52 are configured to be movable in a direction approaching and separating from the chamber 10 by a moving mechanism including an actuator and a guide rail (not shown). In the present embodiment, the opening direction of the chamber 10 is the front, and the covers 51 and 52 are moved in the front-rear direction by the moving mechanism. The horizontal direction orthogonal to the front-rear direction is the left-right direction, and this left-right direction is the width direction of the chamber 10.

  The chamber 10 is thus opened and the covers 51 and 52 covering the chamber 10 are movable mainly for maintenance such as cleaning and replacement of the electrode 25 and its attachments. It is. Further, since the maintenance of the main roll 63 and the like for guiding the base material W in the chamber 10 (see FIG. 1) is also performed, the entire chamber 10 is opened forward. FIG. 3 is a front view of the chamber 10. The chamber 10 has a rectangular frame-like flange 12 for fixing the cover 51 to the front. With the chamber 10 closed by the covers 51 and 52, the inside of the chamber 10 is evacuated by a vacuum pump (not shown).

The configuration of each part of the film forming apparatus 7 will be further described.
The electrodes 25 are provided side by side along a predetermined arrangement direction in the chamber 10. In the present embodiment, as shown in FIG. 1, four electrodes 25 are provided side by side along a circumferential direction centering on an imaginary line L that coincides with the center line of the main roll 63 that guides the substrate W. . That is, the predetermined arrangement direction is a circumferential direction around the virtual line L in the horizontal front-rear direction. In the case of the present embodiment, the four electrodes 25 are arranged at equal intervals and close to each other. These four electrodes 25 are separately attached to two covers 51 and 52 (see FIG. 4). FIG. 4 is an explanatory view in which the first cover 51 is separated from the chamber 10 and the second cover 52 is separated from the first cover 51. In the state shown in FIG. 4 (disassembled state), maintenance of the film forming apparatus 7 is performed by an operator.

  Here, the first electrode 25a, the second electrode 25b, the third electrode 25c, and the fourth electrode 25d are defined in order from the upstream side in the transport direction of the substrate W along the arrangement direction. Note that the four electrodes 25a, 25b, 25c, and 25d are referred to as electrodes 25 when they are described without distinction.

  The attachment of the electrode 25 to the covers 51 and 52 will be described. As shown in FIG. 4, the first electrode 51a and the fourth electrode 25d are attached to the first cover 51 located on the chamber 10 side, and the second electrode 25b and the third electrode 25c are attached to the second cover 52. Is attached. Each electrode 25 is attached to each of the covers 51 and 52 in a cantilever shape. As described above, the second cover 52 is attached with the two second electrodes 25b and the third electrode 25c arranged side by side along the arrangement direction. That is, two second electrodes 25b and a third electrode 25c are attached to the second cover 52 side by side along the arrangement direction. On the other hand, two first electrodes 25a and a fourth electrode 25d are attached to the first cover 51 apart from each other in the arrangement direction.

  In order to arrange the four electrodes 25 in the chamber 10 when these covers 51 and 52 are closed, as shown in FIGS. 4 and 5, the first cover 51 is inserted through the second electrode 25b. A hole 53b and a through hole 53c through which the third electrode 25c is inserted are formed. FIG. 5 is a front view of the first cover 51. FIG. 6 is a front view of the second cover 52. The first cover 51 on the side of the chamber 10 needs to be large enough to close the opening 11 of the chamber 10 shown in FIG. 3, but the second cover 52 overlapping the first cover 51 (see FIG. 6) It is sufficient if the size is sufficient to block the through holes 53b and 53c. That is, in the present embodiment, the second cover 52 is smaller than the first cover 51. By making the second cover 52 small, the weight can be reduced, and the output of the actuator for moving the second cover 52 in the front-rear direction can be reduced.

  3 and 5, a seal member 15 (see FIG. 3) such as an O-ring is interposed between the flange 12 of the chamber 10 and the first cover 51, and the first cover 51 and the second cover 52. A seal member 16 (see FIG. 5) such as an O-ring is interposed between them (see FIG. 6), and these seal members 15 and 16 can ensure the airtightness of the internal space 13 of the chamber 10. It is possible to make the inside of the chamber 10 a sealed space. The first cover 51 is fixed to the chamber 10 (flange 12) by bolts 55 provided around them. In addition, the second cover 52 is fixed to the first cover 51 by a bolt 56 provided around the second cover 52. Then, by removing these bolts 55 and 56, the first cover 51 and the second cover 52 can be moved in the front-rear direction, and the first cover 51 is moved forward from the chamber 10 as shown in FIG. The second cover 52 is moved to a predetermined pulling position away from the first cover 51, and maintenance of each part of the film forming apparatus 7 is performed.

  4 (not shown), the second electrode 25b and the third electrode 25c are attached to the first cover 51 on the chamber 10 side, and the first electrode 25a and the first electrode 25a are attached to the second cover 52. The four electrodes 25d may be attached. In this case, the first cover 51 is formed with a through hole through which the first electrode 25a and the fourth electrode 25d are inserted.

  FIG. 7 is a cross-sectional view of a film forming apparatus 7 (an exploded state) having another form as seen from above. In the film forming apparatus 7, the first electrode 25 a and the second electrode 25 b are attached to the first cover 51 on the chamber 10 side, and the third electrode 25 c and the fourth electrode 25 d are attached to the second cover 52. It has been. The first cover 51 is formed with through holes 53c and 53d through which the third electrode 25c and the fourth electrode 25d are inserted. As a further modification, although not shown, the electrode 25 attached to the first cover 51 and the electrode 25 attached to the second cover 52 may be reversed.

  FIG. 8 is a cross-sectional view of a film forming apparatus 7 (an exploded state) having still another form as seen from above. In the film forming apparatus 7, the first electrode 25 a and the third electrode 25 c are attached to the first cover 51 on the chamber 10 side, and the second electrode 25 b and the fourth electrode 25 d are attached to the second cover 52. It has been. The first cover 51 is formed with through holes 53b and 53d through which the second electrode 25b and the fourth electrode 25d are inserted. As a further modification, although not shown, the electrode 25 attached to the first cover 51 and the electrode 25 attached to the second cover 52 may be reversed.

  As described above, in the film forming apparatus 7 of each embodiment, the four electrodes 25 are separately attached to the two covers 51 and 52. In the first cover 51, the maximum value of the number of electrodes 25 attached in a row along the arrangement direction is 2, and in the second cover 52, the arrangement direction The maximum value of the number of electrodes 25 attached side by side along the line is 2. That is, the first cover 51 is not attached with three or more electrodes 25 arranged in a row along the arrangement direction, and the second cover 52 also has an electrode along the arrangement direction. 25 or more 25 are not attached side by side.

Here, in the first cover 51 or the second cover 52, when three (three or more) electrodes 25 are attached in a row along the arrangement direction, these three (three) As for the central electrode 25 among the electrodes 25 that are continuously arranged, since the electrodes 25 are located close to both sides thereof, access for maintenance deteriorates (that is, the operator approaches). Maintenance work becomes difficult.
On the other hand, according to the film forming apparatus 7 of each embodiment, for example, as shown in FIG. 4, the covers 51 and 52 are opened with respect to the chamber 10 and the overlap of the covers 51 and 52 is released for maintenance. Then, there is always an empty space K next to each electrode 25. As a result, the use of each empty space K facilitates access to each electrode 25 (that is, the approach of the operator), and facilitates maintenance work.

  In particular, in the embodiment shown in FIG. 4, the second electrode 25 b and the third electrode 25 c attached to the second cover 52 between the first electrode 25 a and the fourth electrode 25 d attached to the first cover 51. The empty space K corresponding to the two electrodes 25 is created, and the maintenance work of the first electrode 25a and the fourth electrode 25d is easy to perform.

  In each of the above embodiments, the number of electrodes 25 is “4”, but the number may be larger than that. FIG. 9 is a cross-sectional view of the chamber 10 of the film forming apparatus 7 including the eight electrodes 25 as viewed from above. FIG. 10 is an explanatory view showing a state in which the chamber 10 and the covers 51 and 52 of the film forming apparatus 7 are disassembled. The eight electrodes 25 are arranged along the circumferential direction in the chamber 10 as in the embodiment shown in FIG. 1, but in FIG. 9 and FIG. The electrode 25 is shown as being developed in a plane.

  In the film forming apparatus 7, eight electrodes 25 are provided in the chamber 10 along the predetermined arrangement direction. This arrangement direction is the same as the arrangement direction in each of the embodiments described above, and is centered on a virtual line L that coincides with the center line of the main roll 63 that guides the substrate W (the number of electrodes 25 is different, but see FIG. 1). Is the circumferential direction. Along this arrangement direction (circumferential direction), the first electrode 25a, the second electrode 25b,..., The seventh electrode 25g, and the eighth electrode 25h are called in order from the upstream side in the conveyance direction of the substrate W.

  These eight electrodes 25 are separately attached to the two covers 51 and 52. In the case of the embodiment shown in FIGS. 9 and 10, the first electrode 25a, the fourth electrode 25d, the fifth electrode 25e, and the eighth electrode 25h are attached to the first cover 51 located on the chamber 10 side. A second electrode 25b, a third electrode 25c, a sixth electrode 25f, and a seventh electrode 25g are attached to the second cover 52. The first cover 51 is formed with through holes 53b, 53c, 53f, and 53g through which the second electrode 25b, the third electrode 25c, the sixth electrode 25f, and the seventh electrode 25g are inserted. As a modification, although not shown, the electrode 25 attached to the first cover 51 and the electrode 25 attached to the second cover 52 may be reversed.

  FIG. 11 is a cross-sectional view of a modification of the film forming apparatus 7 shown in FIGS. 9 and 10 as viewed from above. In FIG. 11, as in FIG. 10, the eight electrodes 25 are shown in a state of being flatly developed for easy explanation. In the film forming apparatus 7, the first electrode 51 a, the second electrode 25 b, the fifth electrode 25 e, and the sixth electrode 25 f are attached to the first cover 51 located on the chamber 10 side, and the second cover 52 is provided. In addition, a third electrode 25c, a fourth electrode 25d, a seventh electrode 25g, and an eighth electrode 25h are attached. The first cover 51 is formed with through holes 53c, 53d, 53g, and 53h through which the third electrode 25c, the fourth electrode 25d, the seventh electrode 25g, and the eighth electrode 25h are inserted. As a further modification, although not shown, the electrode 25 attached to the first cover 51 and the electrode 25 attached to the second cover 52 may be reversed.

  In each of the film forming apparatuses 7 having the configuration shown in FIGS. 9 and 10 and the configuration shown in FIG. 11 as described above, the eight electrodes 25 are separately attached to the two covers 51 and 52. In each of the covers 51 and 52, the maximum value of the number of electrodes 25 attached in a row along the arrangement direction is 2. That is, the first cover 51 is not attached with three or more electrodes 25 arranged in a row along the arrangement direction, and the second cover 52 also has an electrode along the arrangement direction. 25 or more 25 are not attached side by side. This is the same as the film forming apparatus 7 having four electrodes 25. Therefore, in the film forming apparatus 7 (FIGS. 10 and 11) having eight electrodes 25, the covers 51 and 52 are opened with respect to the chamber 10 and the covers 51 and 52 are overlapped for maintenance. When released, there is always an empty space K next to each electrode 25. As a result, the use of each empty space K facilitates access to each electrode 25 (that is, the approach of the operator), and facilitates maintenance work.

  Moreover, in the film-forming apparatus 7 of each form shown in FIGS. 1-11, in the state which decomposed | disassembled the chamber 10 and the covers 51 and 52, as already demonstrated, on the at least one side of the said arrangement | positioning direction of each electrode 25 Has an empty space K. For example, in the case of the form shown in FIG. 4, the arrangement direction of the first electrode 25 a (fourth electrode 25 d) attached to the first cover 51 among the pair of covers 51 and 52 that overlap each other (in FIG. 4, There is a space where the electrodes 25b and 25c attached to the second cover 52 can exist on one side in the left-right direction), and the second electrode 25b attached to the second cover 52 (first On one side of the three electrodes 25c) in the arrangement direction (left-right direction in FIG. 4), there is a space where the electrode 25a (25d) attached to the first cover 51 can exist. In a state where the covers 51 and 52 are disassembled, each of the spaces becomes an empty space K for maintenance.

  In particular, in the case of each form shown in FIGS. 4, 7, 10, and 11, a wide empty space K corresponding to the size of the two electrodes 25 is obtained. For example, in the case shown in each of FIGS. 4 and 10, the second electrode 25a and the fourth electrode 25d, which are discontinuously attached to the first cover 51 along the arrangement direction, There is a space where the second electrode 25b and the third electrode 25c attached to the cover 52 in a row along the arrangement direction can exist. Thus, between the two electrodes (25a, 25d) discontinuously attached to one cover (51) of the covers 51, 52 overlapping each other, the other cover (52) is continuous. There is a space where there can be two electrodes (25b, 25c) mounted side by side. In the case of this film forming apparatus 7, when the covers 51 and 52 are opened and the overlap is released with respect to the chamber 10, the gap between the two electrodes (25a and 25d) that are discontinuously attached to one cover (51). There is a wide empty space K corresponding to the size of the two electrodes 25b and 25c. By using such a wide empty space K, the maintenance work of each electrode 25 is further facilitated.

  The number of electrodes 25 can be other than the number described in each of the above embodiments (“4” or “8”). The film forming apparatus 7 of the present invention only needs to include four or more electrodes 25. The film forming apparatus 7 includes covers that are stacked on each other for a number smaller than the number of the electrodes 25. Also in this case, the four or more electrodes 25 are separately attached to a plurality of covers, and the number of the electrodes 25 attached to each of the covers is arranged side by side along the arrangement direction. The maximum value is 2.

  Even if the number of the electrodes 25 is four or more, the number of covers is only two (two), and the covers 51 and 52 are each attached in series along the arrangement direction. If the maximum value of the number of is set to 2, when the covers 51 and 52 are opened with respect to the chamber 10 and the overlap of the covers 51 and 52 is released, one electrode or two of the electrodes 25 are adjacent to each electrode 25. An empty space K corresponding to is born.

  The first cover 51 on the chamber 10 side is formed with a through-hole through which the electrode 25 attached to another second cover 52 overlapping therewith is inserted. Thereby, the cover 51 is overlapped and the opening of the chamber 10 is closed, so that each electrode 25 is disposed in the chamber 10, and the plurality of electrodes 25 are attached side by side along the predetermined direction. It becomes a state.

  Although not shown, the internal space 13 (see FIG. 1) of the chamber 10 may be divided into a plurality of sections, and one electrode 25 may be installed in each partitioned area. Thus, when it divides into a some area | region, the same film-forming process may be performed in each area | region, and the film-forming process different for every area | region may be performed.

  The embodiments disclosed above are illustrative in all respects and not restrictive. In other words, the film forming apparatus of the present invention is not limited to the form shown in the drawings, but may be in another form within the scope of the present invention. For example, the substrate W may be a single wafer instead of a strip. Further, the thin film formed on the substrate W may be other than the silicon nitride film.

  Further, the arrangement direction of the electrodes 25 may be other than the circumferential direction, or may be a linear direction. When the arrangement direction of the electrodes 25 is a linear direction, the substrate W is linearly conveyed near the electrodes 25.

  Moreover, in each said form, although the number of covers was two, it is good also as three or more. However, the number is smaller than the number of electrodes. It is sufficient that the number of covers is two as in each of the above-described embodiments, and the film forming apparatus 7 has a configuration in which two covers are provided and the covers are drawn out in two stages regardless of the number of electrodes 25. And the structure of the moving mechanism for moving these covers can be simplified. Further, by setting the number of covers to two, although not shown, pipes and wirings connected to the respective electrodes 25 can be integrated into two covers, so that the apparatus configuration is simplified.

7: Film forming apparatus 10: Chamber 11: Opening 12: Flange 25: Electrode 25a: First electrode 25b: Second electrode 25c: Third electrode 25d: Fourth electrode 25e: Fifth electrode 25f: Sixth electrode 25g: First Seventh electrode 25h: Eighth electrode 51: First cover 52: Second cover 53b, 53c, 53d, 53f, 53g, 53h: Through hole

Claims (6)

A chamber capable of accommodating a substrate and opening toward one side;
Four or more electrodes provided side by side in a predetermined arrangement direction in the chamber;
A plurality of covers provided for a number smaller than the number of the electrodes and capable of covering the opening in a state of overlapping each other;
With
The four or more electrodes are separately attached to the plurality of covers, and in each of the covers, the maximum value of the number of the electrodes attached side by side along the arrangement direction is 2 A film forming apparatus.   The film forming apparatus according to claim 1, wherein the number of covers is two.   The film forming apparatus according to claim 1, wherein the cover on the chamber side is formed with a through-hole through which the electrode attached to another cover that overlaps the cover is inserted.   The film forming apparatus according to claim 3, wherein the another cover is smaller than the cover on the chamber side.   Among the mutually overlapping covers, at least one side of each of the electrodes attached to one of the covers has a space where the electrode attached to the other cover can exist. The film-forming apparatus as described in any one of Claims 1-4.   Between the two electrodes that are discontinuously attached to one of the covers that overlap each other, there are two electrodes that are attached side by side to the other cover. The film-forming apparatus as described in any one of Claims 1-4 with which the space to obtain exists.

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