JP2018072269A - Image measurement device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an image measurement device for improving usability, while suppressing reduction of a measurEment accuracy.SOLUTION: A movement detection part acquires a first image of a work W generated by an imaging part 201 before a contact part 261 and a side surface of the work W are brought into contact with each other in order to measure a position of the side surface of the work W. Further, the movement detection part acquires a second image of the work W generated by the imaging part 201 after the contact part 261 and the side surface of the work W are brought into contact with each other in order to measure the position of the side surface of the work W. The movement detection part detects a movement of the work W on the mounting surface of the stage 23 by the fact that the contact part 261 and the side surface of the work W are brought into contact with each other, using the first image and the second image. A result output part outputs a detection result of the movement detection part.SELECTED DRAWING: Figure 1

Description

  The present invention relates to an image measuring apparatus, and more particularly, to an improvement in an image measuring apparatus that obtains the dimensions of a workpiece by bringing a probe into contact with a workpiece on a stage and detecting the position of the probe with an image.

  The image measuring device is a dimension measuring device that captures a workpiece placed on a stage to acquire a workpiece image, extracts an edge from the workpiece image, and obtains a workpiece dimension. Regardless of the position in the height direction of the camera, the workpiece image is a very accurate similar shape to the workpiece. By detecting the distance and angle on the workpiece image, the actual size and angle on the workpiece are detected. can do. Edge extraction is performed by analyzing the brightness change of the workpiece image, detecting edge points, and fitting a plurality of detected edge points with geometric figures such as straight lines, circles, arcs, etc. A boundary, a contour of a concave portion or a convex portion on the workpiece, and the like are obtained as edges. The dimension of the workpiece is obtained as the distance or angle between the edges obtained in this way. Further, the quality of the workpiece is determined by comparing the difference (error) between the obtained dimension value and the design value with a tolerance.

  Some image measuring apparatuses as described above obtain the dimensions of a workpiece by bringing a probe into contact with the side surface of the workpiece placed on a stage (Non-Patent Document 1). The probe is disposed in the imaging field of view of the camera, and the contact position with the workpiece is obtained by specifying the position of the probe from an image obtained by photographing the probe in contact with the side surface of the workpiece.

Guijun Ji, Heinrich Schwenke, Eugen Trapet, “An Opto-mechanical micro probe system for measuring berry small parts on CMMs (An Opto-mechanical MicroSrobeM) USA), International Society of Optical Engineering (SPIE) Vision Geometry VII (Vision Geometry VII), July 20-22, 1998, 3454, p. 348-353

33 and 34 are diagrams illustrating an example of the operation of the image measurement apparatus. 33A shows the workpiece W to be measured, and FIG. 33B shows the workpiece image Iw. The workpiece W includes a base member w ₁ and two protrusions w ₂ formed on the base member w ₁ . The distance A between the inner side surface Sa of the two protrusions w _2, when measuring the distance B between the outer side surface Sb, and the distance C between the side surfaces Sc of the base member w _1, the interior sides of the protruding portion w ₂ Is a curved surface shape, it is difficult to accurately specify the edge of the side surface Sa from the work image Iw as compared to the edges of the side surfaces Sb and Sc.

The (a) of FIG. 34, indicated workpiece image Iw taken in a state in contact with the side surface Sa of the right protrusion w ₂ the probe Pr is, the (b) is a probe Pr left projecting portions A work image Iw photographed while being in contact with the side surface Sa of w ₂ is shown. The position of the probe Pr in the work image Iw can be accurately specified since the shape and size of the probe Pr are known. Further, the position of the side surface Sa is obtained by specifying the contact position from the displacement amount of the probe Pr within the imaging field of view. Therefore, if this type of image measuring apparatus is used, it is possible to accurately determine the dimensions even at a measurement location where the edge cannot be accurately specified from the work image Iw.

  By the way, in the image measuring apparatus using the probe Pr, the workpiece W may move when the probe Pr contacts the workpiece W. If measurement is continued with the probe Pr without knowing that the workpiece W has moved, the measurement result obtained after the workpiece W has moved will contain an error. In order to prevent the movement of the workpiece W, it is conceivable to create a special jig and fix the workpiece W to the jig. However, in this method, it is essential to fix and remove the workpiece W from the jig, and it is difficult to efficiently measure a large amount of workpieces W. Accordingly, an object of the present invention is to improve usability while suppressing a decrease in measurement accuracy.

An image measuring apparatus according to the first aspect of the present invention includes:
A stage on which the workpiece is placed;
An imaging unit that images the workpiece placed on the stage and generates an image;
In the field of view of the imaging unit, a probe having a contact part that can come into contact with the side surface of the workpiece placed on the stage;
A drive unit that moves at least one of the stage and the probe substantially parallel to the mounting surface of the stage;
An image measuring apparatus comprising: a measuring unit that measures a position of the side surface of the workpiece using an image generated by the imaging unit when the contact unit and the side surface of the workpiece are in contact with each other;
In order to measure the position of the side surface of the workpiece and the first image of the workpiece generated by the imaging unit before the contact portion and the side surface of the workpiece contact to measure the position of the side surface of the workpiece The contact portion and the side surface of the work are brought into contact with each other by using the second image of the workpiece generated by the imaging unit after the contact portion and the side surface of the workpiece are in contact with each other. A movement detector for detecting that the workpiece has moved on the surface;
And an output unit that outputs a detection result of the movement detection unit.

  According to the present invention, since a determination result indicating whether the shape of the contact portion is a predetermined shape is output, the user can perform cleaning of the contact portion based on the determination result. Thus, usability can be improved while suppressing a decrease in measurement accuracy.

1 is a system diagram illustrating a configuration example of an image measurement device 1 according to an embodiment of the present invention. It is explanatory drawing which showed typically an example of operation | movement of the image measuring apparatus 1 of FIG. It is explanatory drawing which showed typically an example of the operation | movement at the time of making the probe 26 contact the workpiece | work W on the stage 23. FIG. FIG. 2 is a diagram illustrating an example of the operation of the image measurement apparatus 1 in FIG. 1, in which the position D of the contour line 14 is specified and the distance D between the side surfaces of the workpiece W is calculated. FIG. 2 is a block diagram illustrating a configuration example of a controller 3 in FIG. 1. FIG. 6 is a block diagram illustrating a configuration example of an input receiving unit 311 in FIG. 5. It is the figure which showed an example of the operation | movement at the time of the contact position designation | designated in the input reception part 311 of FIG. It is the figure which showed an example of the operation | movement at the time of the pattern image registration in the input reception part 311 of FIG. FIG. 6 is a diagram illustrating an example of an operation at the time of designating a contact position in the input reception unit 311 in FIG. 5, in which a table in which shape types are associated with the number of scan paths is illustrated. FIG. 6 is a diagram illustrating an example of an operation at the time of designating a scan position in the input management unit 311 in FIG. 5, in which the number of scan paths varies depending on the length of the contour line L. FIG. 6 is a block diagram illustrating a configuration example of a measurement control unit 315 in FIG. 5. 6 is a flowchart showing an example of an operation at the time of measurement setting in the controller 3 of FIG. 5. It is the figure which showed an example of the operation | movement at the time of the measurement setting in the image measuring device 1 of FIG. 1, and the workpiece | work W and pattern image Ip of registration object are shown. FIG. 2 is a diagram showing an example of an operation at the time of measurement setting in the image measurement apparatus 1 of FIG. 1, and shows a setting screen 100 displayed on the display unit 21. It is the figure which showed the tolerance setting screen 101 at the time of designation | designated of a design value and tolerance. It is the figure which showed the feature-value setting screen 102 at the time of designation | designated of feature-value information. FIG. 13 is a flowchart showing an example of a detailed operation for step S103 (setting of an image measurement element) in FIG. FIG. 2 is a diagram illustrating an example of an operation when setting an image measurement element in the image measurement apparatus 1 of FIG. 1. FIG. 13 is a flowchart showing an example of a detailed operation in step S104 (probe measurement element setting) in FIG. It is the figure which showed an example of the operation | movement at the time of the setting of the probe measurement element in the image measuring apparatus 1 of FIG. It is the figure which showed the operation example in the case of adjusting the contact target position on the model image Im. It is the figure which showed the operation example in case the start position of scanning operation | movement interferes with another site | part. It is the figure which showed the operation example in the case of adjusting the height position of scanning operation | movement on the model image Im. It is the figure which showed the operation example in the case of designating the movement method at the time of the probe 26 moving between contact target positions. 13 is a flowchart showing an example of detailed operation for step S107 (registration of feature amount information) in FIG. FIG. 26 is a flowchart showing an example of detailed operations in step S201 in FIG. 17, step S301 in FIG. 19, and step S401 in FIG. 25 (designation of shooting conditions). It is the flowchart which showed an example of the operation | movement at the time of the continuous measurement in the controller 3 of FIG. It is the flowchart which showed an example of the operation | movement at the time of the continuous measurement in the controller 3 of FIG. It is the figure which showed an example of the operation | movement at the time of the continuous measurement in the image measuring apparatus 1 of FIG. It is the figure which showed an example of the operation | movement at the time of the continuous measurement in the image measuring apparatus 1 of FIG. It is the figure which showed an example of the operation | movement at the time of the continuous measurement in the image measuring apparatus 1 of FIG. FIG. 29 is a flowchart showing an example of detailed operation for step S615 (scan operation) in FIG. 28. FIG. It is the figure which showed the operation example of the conventional image measuring apparatus. It is the figure which showed the operation example of the conventional image measuring apparatus. It is a figure explaining the concept of the movement detection based on an image. It is a figure explaining the concept of the movement detection based on the contact measurement to a specific shape. It is a figure explaining the concept of the movement detection based on the brightness | luminance of a specific area | region. It is a block diagram explaining a movement detection setting part. It is a block diagram explaining UI regarding a movement detection setting. It is a flowchart which shows a movement detection setting. It is a block diagram which shows the function of the measurement control part which performs a movement detection. It is a block diagram which shows the function of the measurement control part which performs a movement detection. It is a block diagram which shows the function of the measurement control part which performs a movement detection. It is a flowchart which shows the movement detection for every workpiece | work. It is a flowchart which shows the movement detection for every probe measurement. It is a flowchart which shows the movement detection for every contact point.

<Image measuring device 1>
FIG. 1 is a system diagram showing a configuration example of an image measuring apparatus 1 according to an embodiment of the present invention. The image measuring apparatus 1 extracts an edge from a workpiece image obtained by photographing the workpiece W on the stage 23, and specifies the contact position by bringing the probe 26 into contact with the workpiece W on the stage 23. Is a dimension measuring instrument for determining the dimensions of the main body 2, and comprises the main body 2, the controller 3, the keyboard 41 and the mouse 42. The workpiece W is a measurement object whose shape and dimensions are measured.

  The main body 2 includes a measurement unit 20, a display unit 21, a vertical drive unit 22, a stage 23, a horizontal drive unit 24, and a transmission illumination unit 25, and irradiates the work W on the stage 23 with detection light made of visible light. The transmitted light or reflected light is received to generate a work image. If the front direction of the display unit 21 is referred to as the front-rear direction, the display unit 21 is arranged in front of the measurement unit 20.

  Here, the process of extracting the edge from the workpiece image and obtaining the dimension of the workpiece W is called image measurement, and the position of the probe 26 is detected from the workpiece image in a state where the probe 26 is in contact with the side surface of the workpiece W. The process for obtaining the dimensions of the workpiece W by specifying the coordinates of the contact position between the workpiece 26 and the workpiece W will be referred to as probe measurement.

  The display unit 21 is a display device that displays work images and measurement results. The vertical driving unit 22 relatively moves the measurement unit 20 and the stage 23 in the vertical direction in order to adjust the height of the focus position with respect to the stage 23 and the height of the probe 26. The vertical drive unit 22 can move the measurement unit 20 in the vertical direction. Note that the vertical drive unit 22 may be configured such that the height of the probe 26 can be individually adjusted with respect to the measurement unit 20.

  The stage 23 is a work table having a horizontal and flat mounting surface for mounting the workpiece W. For example, the stage 23 is made of a glass plate that transmits detection light. The horizontal driving unit 24 relatively moves the measurement unit 20 and the stage 23 in a direction parallel to the upper surface of the stage 23 in order to adjust the position of the imaging field of view with respect to the stage 23 and the position of the probe 26. The horizontal drive unit 24 can move the stage 23 in an arbitrary direction within a horizontal plane.

  The transmitted illumination unit 25 is a light projecting device that irradiates the workpiece W on the stage 23 with detection light from below, and includes a transmitted illumination light source 251, a mirror 252, and a condenser lens 253. The transmitted illumination light source 251 is disposed facing forward. The detection light emitted from the transmitted illumination light source 251 is reflected upward by the mirror 252 and emitted through the condenser lens 253. This detection light passes through the stage 23, a part of the transmitted light is blocked by the work W, and the other part enters the objective lens 205 of the measurement unit 20.

<Measurement unit 20>
The measurement unit 20 is a light projecting / receiving unit that irradiates the workpiece W on the stage 23 with detection light and receives detection light from the workpiece W, and includes a probe 26, a switching drive unit 27, imaging units 201 and 206, and a half mirror 204. 210, the objective lens 205, the coaxial epi-illumination light source 209, the ring illumination unit 211, the ring illumination vertical drive unit 212, and the probe light source 263.

  The objective lens 205 is a light receiving lens that condenses detection light from the workpiece W, and is disposed so as to face the stage 23. The imaging units 201 and 206 are cameras that capture the workpiece W on the stage 23 via the common objective lens 205 and generate workpiece images, respectively.

  The imaging unit 201 is an imaging device with a low imaging magnification, and includes an imaging element 202 and a low-magnification side imaging lens unit 203 including an imaging lens and a diaphragm plate. The image sensor 202 receives the detection light from the workpiece W via the low magnification side imaging lens unit 203 and generates a workpiece image. The image sensor 202 is arranged with the light receiving surface facing downward.

  The imaging unit 206 is an imaging device having a high imaging magnification, and includes an imaging element 207 and a high-magnification imaging lens unit 208 including an imaging lens and a diaphragm plate. The imaging field of view is coaxial with the imaging field of the imaging unit 201. Is formed on the stage 23. The image sensor 207 receives detection light from the work W via the high magnification side imaging lens unit 208 and generates a work image. The image sensor 207 is arranged with the light receiving surface facing forward. The detection light transmitted through the objective lens 205 is reflected backward by the half mirror 204 and forms an image on the image sensor 207 via the high magnification side imaging lens unit 208.

  For the imaging elements 202 and 207, for example, an image sensor such as a charge coupled device (CCD) or a complementary metal oxide semiconductor (CMOS) is used. As the objective lens 205, a telecentric lens having a property that the size of the image is not changed even when the position in the optical axis direction of the objective lens 205 is changed is used.

  The coaxial epi-illumination light source 209 is a light projecting light source device for irradiating the workpiece W on the stage 23 with detection light from vertically above, and is arranged facing forward. Detection light emitted from the coaxial epi-illumination light source 209 is reflected downward by the half mirror 210 and emitted through the objective lens 205.

  The ring illumination unit 211 is a light projecting device that irradiates the workpiece W on the stage 23 with detection light from above or from the side, and has a ring shape surrounding the objective lens 205. The ring illumination vertical drive unit 212 moves the ring illumination unit 211 in the vertical direction in order to adjust the irradiation angle of the detection light with respect to the stage 23. As a method for illuminating the workpiece W, any one of transmitted illumination, ring illumination, and coaxial epi-illumination can be selected.

<Probe 26>
The probe 26 is a contact for contacting the side surface of the workpiece W placed on the stage 23 and measuring the dimension of the workpiece W. The probe 26 is disposed so as to be movable between an imaging field of the imaging unit 201 and a retracted position. The probe 26 is a self-luminous probe, and includes a spherical contact portion 261 that contacts the workpiece W and a metal tube 262 that transmits guide light.

  An optical fiber for transmitting guide light is included inside the metal tube 262. The metal tube 262 is formed of a SUS tube having sufficient strength, and the shape of the metal tube 262 does not change even if the contact portion 261 contacts the workpiece W.

  The contact portion 261 is disposed at the tip of a metal tube 262 extending from the probe light source 263, and diffuses and emits guide light. Since the cross-sectional area in the horizontal direction of the spherical contact portion 261 is larger than the cross-sectional area in the horizontal direction of the metal tube 262, even when the contact portion 261 is imaged from above by the imaging portion 201, the contact portion 261 contours can be imaged. The probe light source 263 is a light source device that generates guide light made of visible light and makes it incident on the metal tube 262.

  The switching drive unit 27 is a horizontal drive unit that switches between a state in which the probe 26 is positioned at a measurement position in the imaging field of view and a state in which the probe 26 is positioned in a retracted position that is moved away from the center of the imaging field of view. . The switching drive unit 27 is a rotation drive unit that rotates the probe light source 263 around the rotation axis in the vertical direction. By rotating the probe light source 263, the probe 26 is moved between the retracted position and the measurement position. Move. For example, the retracted position is preferably outside the imaging field of the imaging unit 201, but may be the peripheral part of the imaging field if the probe 26 is not reflected as a subject in the work image.

  The controller 3 is a control unit that controls photographing and screen display by the main body 2, analyzes the work image, and obtains the dimensions of the work W by calculation, and is connected to a keyboard 41 and a mouse 42. The keyboard 41 and the mouse 42 are the input unit 4 on which a user performs operation input.

  2-4 is explanatory drawing which showed typically an example of operation | movement of the image measuring apparatus 1 of FIG. FIG. 2 shows a state where the probe 26 extending from the mounting arm 264 is viewed from above. (A) in the figure shows the case where the probe 26 is in the measurement position, and (b) shows the case where the probe 26 is in the retracted position.

  The attachment arm 264 is an attachment member for attaching the probe 26 to the housing of the measurement unit 20 and has an L shape. A vertical rotation shaft 265 is disposed at one end of the mounting arm 264, and the probe 26 projects from the other end surface. The mounting arm 264 supports the metal tube 262 with a floating structure. When the contact portion 261 contacts the side surface of the workpiece W, the metal tube 262 is offset in the X and Y directions without being deformed by the contact. As a result, the position of the contact portion 261 changes on the work image.

  The imaging area 11 is an area on the stage 23 corresponding to the imaging field of view of the imaging unit 201 and has a rectangular shape. The translucent area 12 is a circular area on the stage 23 that is irradiated with detection light from the transillumination unit 25, and is formed in the imaging area 11.

  When the probe 26 is at the measurement position, the contact portion 261 is disposed at the center of the imaging area 11 and the light transmitting area 12. The contact part 261 is reflected as a subject on the work image photographed in this state. By controlling the switching drive unit 27 and rotating the mounting arm 264 about 180 ° from the state where the probe 26 is at the measurement position, the probe 26 is moved to the retracted position.

  The retracted position is a position for retracting the probe 26 so that the probe 26 is not reflected as a subject in the work image. When the probe 26 is in the retracted position, the contact portion 261 and the metal tube 262 are disposed outside the imaging area 11.

  FIG. 3 shows an example of the operation when the probe 26 is brought into contact with the workpiece W on the stage 23. (A) in the figure shows a case where the probe 26 is moved relative to the stage 23 to the position corresponding to the start position of the scan path at the reference height, and (b) shows the reference height. The case where the probe 26 is moved vertically downward from the height to the measurement height is shown. (C) in the drawing shows a case where the probe 26 is moved relative to the stage 23 along the scanning path at the measurement height.

  In dimension measurement using the probe 26, a contact target position when the probe 26 is brought into contact with the side surface of the workpiece W and a scan path passing through the contact target position are designated in advance. The reference height is a height at which the probe 26 does not interfere with the workpiece W on the stage 23. By controlling the horizontal drive unit 24, the probe 26 can be moved in the horizontal direction relative to the stage 23 at the reference height. The reference height may be configured to be specified such that the tip of the probe 26 is outside the depth of field range of the imaging unit 201 or 206.

  The measurement height is the height of the side surface of the workpiece that the probe 26 should contact, and the vertical position is lower than the reference height. The vertical drive unit 22 switches the height of the probe 26 with respect to the stage 23 between a measurement height and a reference height higher than the measurement height. If the probe 26 is moved relative to the stage 23 in the scanning direction from the start position to the end position along the scan path, the contact portion 261 can be brought into contact with the side surface of the workpiece W. If it is detected that the probe 26 contacts the side surface of the workpiece W, the probe 26 immediately stops with respect to the stage 23.

  The start position of the scan path is an operation start position for starting the above-described scan operation, and the end position is an operation end position for ending the scan operation. By determining the end position, a contact error can be detected when the probe 26 reaches the end position. The start position and the end position of the scan path are set on a scan path that passes through the contact target position and extends along the normal line of the contour line of the workpiece W.

  FIG. 4 shows a case where the distance D between the side surfaces of the workpiece W is calculated by specifying the position of the contour line 14. (A) in the drawing shows the workpiece W to be measured and the probe 26 brought into contact with the right side surface of the workpiece W. The workpiece W has a stepped step, and a distance D between the upper right side surface and the left side surface is measured.

  (B) in the drawing shows a work image Iw composed of a transmission image captured by transmission illumination. In the transmission image, it is possible to specify the outer edge of the workpiece W by edge extraction, but it is difficult to specify the contour line inside the outer edge by edge extraction.

  (C) in the figure shows a work image Iw composed of a reflected image captured by reflected illumination. The reflected illumination is an illumination method using coaxial epi-illumination or ring illumination, and even a contour line inside the outer edge of the workpiece W can be specified by edge extraction. However, since the upper part of the workpiece W has a curved upper surface, it is difficult to accurately identify the right side contour line by edge extraction compared to the left side contour line. In such a case, the contour line 14 on the right side surface can be accurately specified by bringing the probe 26 into contact.

  In the work image Iw shown in FIG. 5C, the right side outline 14 specified by contacting the probe 26 and the left side outline 14 specified by extracting an edge from the edge extraction region 15 are included. It is displayed.

  The contact of the probe 26 with the side surface of the workpiece W can be detected based on whether or not the position on the workpiece image Iw of the contact portion 261 moving along the scan path has changed by a predetermined threshold value or more within a predetermined time. . The position of the contact part 261 is specified by obtaining the center of the circle from the edge of the contact part 261, for example. Further, on the workpiece image Iw when the probe 26 contacts the side surface of the workpiece W, the normal direction of the side surface of the workpiece W and the contact position 13 can be specified from the displacement direction of the contact portion 261 with respect to the center of the imaging field of view. it can.

  In the case of a configuration in which the probe 26 itself is moved horizontally, contact with the workpiece side surface is detected depending on whether or not the contact portion 261 moving along the scan path has stopped on the workpiece image Iw.

  Since the shape of the contact portion 261 is known, the position of the contact portion 261 can be specified with high accuracy using a known search technique. Therefore, even when the edge is rounded and the edge cannot be accurately detected on the two-dimensional workpiece image Iw as in the workpiece W in FIG. 4, the probe 26 and the workpiece W are positioned from the position of the contact portion 261. By specifying the coordinates of the contact position 13, the edge size that is difficult to detect on the image can be obtained with high accuracy.

  The contact position 13 is specified by specifying the position of the contact portion 261 from the work image Iw and offsetting it in the normal direction by a distance corresponding to the radius of the contact portion 261. Further, the position of the contour line 14 on the right side surface is obtained by fitting a predetermined geometric figure to the plurality of contact positions 13. On the other hand, the position of the contour line 14 on the left side is obtained by detecting an edge point from the edge extraction region 15 on the work image Iw and fitting a geometric figure to the detected plurality of edge points. Based on the position of the contour line 14 specified in this way, the distance D between the right side surface and the left side surface is calculated.

<Controller 3>
FIG. 5 is a block diagram showing a configuration example of the controller 3 of FIG. The controller 3 includes a control device 31 and a storage device 33, and the control device 31 and the storage device 33 are connected via a bus 32. The control device 31 includes an input receiving unit 311, a display control unit 312, an imaging control unit 313, an illumination control unit 314, and a measurement control unit 315. The main body 2 includes a camera 200 including imaging units 201 and 206 and a vertical driving unit 22, a stage 23 including a horizontal driving unit 24, a probe unit 260 including a switching driving unit 27, a display unit 21, a transmission illumination unit 25, and The reflection illumination unit 28 is used. The reflective illumination unit 28 includes a coaxial epi-illumination light source 209 and a ring illumination unit 211.

  The display control unit 312 displays a model image and setting information for dimension measurement on the display unit 21. The model image may be, for example, a master piece image obtained by photographing a master piece, or may be a CAD image made up of CAD data created by CAD (Computer Aided Design).

  When displaying the model image generated from the design data on the display unit 21, the display control unit 312 assumes that the image data obtained by imaging the workpiece W placed on the stage 23 from above is designed. The model image generated from the data is displayed. In this way, even the model image generated from the design data is displayed at the same angle as the work image picked up by the image pickup unit 201 or 206, thereby facilitating specification of the contact target position information. be able to.

  The input receiving unit 311 acquires a model image from the imaging unit 201 or 206 based on a user operation received by the input unit 4 and registers various measurement setting information for measuring dimensions in the storage device 33. I do.

  The imaging control unit 313 controls the imaging units 201 and 206 based on the measurement setting information registered in the storage device 33, and performs switching of imaging magnification and adjustment of imaging timing and exposure time. The illumination control unit 314 performs lighting control of the transmitted illumination unit 25, the coaxial incident illumination light source 209, the ring illumination unit 211, and the probe light source 263 based on the measurement setting information registered in the storage device 33. For example, when switching from image measurement to probe measurement, the illumination control unit 314 turns on the probe light source 263 while turning off the transmitted illumination unit 25, the coaxial incident illumination light source 209, and the ring illumination unit 211.

  The measurement control unit 315 controls the vertical drive unit 22, the horizontal drive unit 24, and the switching drive unit 27 based on the measurement setting information registered in the storage device 33, and acquires the work image Iw from the imaging unit 201 or 206. Measure the dimensions.

<Input reception unit 311>
FIG. 6 is a block diagram illustrating a configuration example of the input receiving unit 311 in FIG. The input receiving unit 311 includes an imaging and illumination condition specifying unit 341, an edge extraction region specifying unit 342, a contact position specifying unit 343, a measurement setting unit 344, a design value and tolerance specifying unit 345, and a feature amount information setting unit 346. The

  The imaging and illumination condition designating unit 341 designates imaging conditions such as imaging magnification, exposure time, and gain, and illumination conditions such as illumination type, brightness, and height of the ring illumination unit based on a user instruction. Registered as measurement setting information in the storage device 33.

  The edge extraction region designation unit 342 designates the edge extraction region on the model image as feature amount information, for example, a relative coordinate value with respect to the pattern image, based on the user's instruction, and stores it as edge extraction region information in the storage device 33. sign up.

  The contact position designation unit 343 accepts designation of contact target position information indicating a plurality of contact target positions on the side surface of the work W to be contacted by the probe 26 on the model image displayed on the display unit 21. That is, the contact position designating unit 343 sets the contact target position information for determining the probe operation for bringing the probe 26 into contact with a plurality of contact target positions to be contacted by the probe 26 with relative coordinates with respect to the feature amount information (pattern image). It is designated as a value and registered in the storage device 33. The contact target position information includes a contact target position, a scan operation start position, and a scan operation end position.

  The contact target position includes a relative position coordinate with respect to the pattern image (search data) registered on the model image, and a measurement height indicating the height of the side surface of the workpiece to which the probe 26 should contact. The measurement height is designated in advance by the user, for example.

  The measurement setting unit 344 extracts the edge of the workpiece W existing on the model image from the edge extraction region designated by the edge extraction region designation unit 342, and brings the probe 26 into contact with the contact target position, By imaging the probe 26, the contact position between the probe 26 and the workpiece W existing on the model image is specified, and based on these edges or contact positions, a contour line as a measurement reference from the model image, Identify the reference point. A measurement element (for example, a straight line, a circle, an arc, etc.) is specified based on the specified contour line or reference point. When the feature amount information is CAD data, the contour line and the reference point are specified directly without edge extraction.

  The measurement setting unit 344 selects an element to be measured from the measurement elements specified by the above-described processing based on a user instruction, and registers the selected element in the storage device 33 as measurement location information. The measurement element can also be specified based on an auxiliary line (point) newly created from the specified contour line or reference point. Examples of the auxiliary line (point) include an intersection of two contour lines and a circle center. The measurement setting unit 344 can specify the radius and diameter when the selected measurement element is a circle or an arc, and the distance between the straight lines when the two straight lines are selected as the measurement target.

  The design value and tolerance designation unit 345 designates the design value and tolerance for pass / fail judgment based on the user's instruction, and registers the design value and tolerance in the storage device 33 as measurement setting information.

  The feature amount information setting unit 346 sets feature amount information for specifying the position and orientation of the workpiece W from the workpiece image captured by the imaging unit 201 or 206 when performing measurement. That is, the feature amount information setting unit 346 sets feature amount information including search data for specifying the position and orientation of the workpiece W based on the model image based on the user's instruction, and measures the feature amount information in the storage device 33. Register as setting information. For example, the feature amount information is a pattern image (data) for normalized correlation search, and is set based on a master piece image obtained by photographing a master piece. The storage device 33 stores the pattern image set by the feature amount information setting unit 346 and the contact target position information specified by the contact position specifying unit 343 on the same coordinates.

  The pattern image may be registered by the user specifying a portion having many features on the model image, or the entire image may be automatically registered as the pattern image. In addition, a pattern image may be automatically registered by extracting a feature portion from a model image.

  By matching the registered pattern image and the work image obtained by imaging the inspection target work W, the position and orientation (coordinates) of the work W in the work image can be specified. For matching, a known matching technique such as normalized correlation search or geometric search can be used. Note that if the model image is a CAD image, the feature amount information can be specified based on the CAD data.

  As described above, according to the present embodiment, the contact target position information and the edge extraction region by the probe 26 are designated as relative coordinate values with respect to the pattern image (search data) registered on the model image. . The contact target position information includes a contact target position that is a target position for contacting the probe 26, a scan operation start position that is a position for starting a scan operation, a scan operation end position that is a position for ending the scan operation, and a work to be contacted Measurement height indicating the height of the side is included.

  A user obtains a workpiece image by placing the workpiece W to be inspected on the stage 23, and executes a matching process using a pattern image (search data). Extraction area can be specified automatically. The outline of the workpiece W is specified by sequentially bringing the probe 26 into contact with the side surface of the workpiece according to the specified contact target position. In addition, in order to specify a linear outline, coordinate information of two or more contact positions is required, and in order to specify a circular or arc-shaped outline, the coordinates of three or more contact positions are required. Information is needed. In addition, two or more contact positions are not necessarily required, and when it is desired to measure a specific point, the coordinate information of one contact position can be used for the measurement.

  The input accepting unit 311 accepts designation of a measurement element to be measured by the probe 26 on the model image displayed on the display unit 21. The model image being displayed on the display unit 21 is a work image obtained by capturing the work W for measurement setting. The storage device 33 stores in advance an arrangement rule that defines the relationship between the shape type or size of the measurement element that can be designated by the input reception unit 311 and the arrangement position of the contact target position of the probe 26. The arrangement rule is information for appropriately specifying the contact target position according to the shape type or size of the measurement element. The arrangement rule includes, for example, a table, a function, or an arithmetic expression that associates the shape type and size of the measurement element with the number of contact target positions.

  For example, when the shape type of the measurement element is a circle or an arc, the arrangement rule is determined so that three or more contact target positions are arranged at equal intervals in the circumferential direction of the circle or arc. In addition, when the shape type is a straight line, the arrangement rule is determined so that two or more contact target positions are arranged at equal intervals in the direction of the straight line.

  The measurement control unit 315 performs the contact target of the probe according to the position of the measurement element designated by the input receiving unit, the shape type or size of the measurement element, and the arrangement rule stored in the storage unit when performing measurement. The position is specified, and the horizontal drive unit is controlled so that the probe sequentially moves to the specified plurality of contact target positions.

  When an edge extraction region is set on the measurement element, the contact position designation unit 343 obtains a contour line by extracting an edge from the edge extraction region with respect to the model image being displayed, and obtains a plurality of positions as the positions on the contour line. A contact target position is designated, and a start position of a scanning operation for approaching the probe 26 is designated as a position separated from the contact target position in the normal direction of the contour line.

  The display unit 21 displays a symbol indicating the start position of the scan operation on the model image, and the contact position specifying unit 343 scans the probe 26 to approach the start position of the scan operation, the number of contact target positions on the contour line. A user operation for changing the direction and height information is received.

FIG. 7 is a diagram illustrating an example of an operation at the time of designating a contact position in the input receiving unit 311 in FIG. (A) in the figure shows a work W for registering the pattern image Ip and the target contact position information. In this work W, both outer sides of the protruding part w ₂ formed on the base member w ₁ have a curved shape, and the distance D between the side surfaces of the protruding part w ₂ is measured using the probe 26.

  The model image Im is a reflected image captured by reflected illumination, and a partial area including the workpiece W is registered as the pattern image Ip. There are three methods for associating the pattern image Ip with the contact target position information, for example, as shown in the following (b) to (d).

  (B) in the figure shows a case where the pattern image Ip and the contact target position are directly associated with each other. For example, by designating the start position and end position of the scanning operation for the pattern image Ip, the contact target position is automatically specified. The start position and the end position can be specified by moving the symbol Sm indicating the probe 26 and the arrow Y indicating the scanning direction by operating the mouse. Note that the start position and end position of the scanning operation may be automatically determined by designating the contact target position. In this way, the contact target position coordinates are stored relative to the pattern image (search data) by directly associating the pattern image Ip with the contact target position.

  (C) in the drawing shows a case where the contour line L specified by extracting an edge from the edge extraction region R and the contact target position are associated with each other. An edge point is extracted from the edge extraction region R designated on the pattern image Ip, and a contour line L to be fitted to the extracted edge point sequence is specified. By designating the contact target position with respect to the contour line L, the pattern image Ip and the contact target position are indirectly associated. The position coordinates of the edge extraction region R on the workpiece image input at the time of inspection are automatically specified by matching the workpiece image with the pattern image (search data). An edge point sequence in the edge extraction region R whose position has been specified is extracted, and a contact target position is set at a predetermined position with respect to the contour line L specified from the edge point sequence. For example, when the scanning direction is set to a direction approaching from a position that is a predetermined distance away from the contour line L in the normal direction, the approach can be stably approached along the normal line of the contour line L, so that the measurement is stable. To do.

  (D) in the figure shows a case where the edge extraction region R and the contact target position are associated with each other. By designating the contact target position for the edge extraction region R designated on the pattern image Ip, the pattern image Ip and the contact target position are indirectly associated. The position coordinates of the edge extraction region R are specified by the matching process described above, and at the same time, the target contact position coordinates are specified.

  FIG. 8 is a diagram illustrating an example of an operation at the time of pattern image registration in the input reception unit 311 in FIG. 5. A model image Im when the workpiece W illustrated in FIG. It is shown. A part of the model image Im is registered as a pattern image Ip for search. In this way, a transmitted image captured with transmitted illumination is used as the search pattern image Ip, while a reflected image captured with reflected illumination can be used to specify the contact target position.

  In general, a transmitted image captured with transmitted illumination provides a clear edge, and changes in the image due to changes in the surrounding environment are small. Therefore, while registering a pattern image based on a transmission image captured with transmission illumination, it is captured with reflection illumination in order to measure the dimension of the inner contour existing in a non-penetrating workpiece shape that cannot be obtained with transmission illumination. The contact target position can be designated by the probe 26 based on the reflected image. In this way, the illumination condition for registering the pattern image can be different from the illumination condition for registering the contact target position and the edge extraction region. Further, in order to make the illumination condition at the time of continuous measurement the same as the illumination condition at the time of setting, the illumination condition at the time of setting is registered as measurement setting information.

  As described above, the target contact position is specified directly or indirectly by matching the pattern image (search data) registered on the model image Im at the time of setting with the work image input at the time of inspection. The When the position to be scanned is specified by the probe 26, the operation plan of the probe 26 is determined, and the measurement control unit 315 controls the operation of the probe 26.

  FIG. 9 is a diagram showing an example of the operation at the time of designating the contact position in the input reception unit 311 in FIG. 5, and shows a table in which the shape type and the number of scan paths are associated with each other. (A) in the figure shows a table when the number of divisions is fixed. This table is an arrangement reference that associates the shape type of the measurement target with the number of scan paths, and the number of scan paths and the number of divisions are defined for three shape types (straight line, circle, and arc).

  Specifically, if the shape type is a straight line, the number of divisions is 3, and two scan paths are arranged so as to divide the straight line into three equal parts. If the shape type is a circle, the number of divisions is 3, and three scan paths are arranged so that the circumference is equally divided into three. If the shape type is an arc, the number of divisions is 4, and three scan paths are arranged to divide the arc into four equal parts.

  (B) in the figure shows a table when the number of divisions is variable according to the size of the measurement target. This table is an arrangement reference that associates the shape type and size of the measurement target with the number of scan paths, and the number of scan paths is defined for three shape types (straight line, circle, and arc).

  Specifically, when the shape type is a straight line and the length of the contour line L is less than the threshold value TH, the number of divisions is 3, and two scan paths are arranged so as to divide the straight line into three equal parts. The On the other hand, if the length of the contour line L is equal to or greater than the threshold value TH, the number of divisions is 4, and three scan paths are arranged to divide the straight line into four equal parts. When the shape type is a circle and the length of the contour line L is less than the threshold value TH, the number of divisions is 3, and three scan paths are arranged so as to divide the circumference into three equal parts. On the other hand, if the length of the contour line L is equal to or greater than the threshold value TH, the number of divisions is 4, and four scan paths are arranged so as to divide the circumference into four equal parts. When the shape type is an arc, if the length of the contour line L is less than the threshold TH, the number of divisions is 4, and three scan paths are arranged so as to divide the arc into four equal parts. On the other hand, if the length of the contour line L is equal to or greater than the threshold value TH, the number of divisions is 5, and four scan paths are arranged so as to divide the arc into five equal parts.

  FIG. 10 is a diagram illustrating an example of the operation at the time of designating the contact position in the input receiving unit 311 in FIG. 5, and shows a case where the number of scan paths differs according to the length of the contour line L. In the figure, (a) shows a case where the shape type is a straight line, and (b) shows a case where the shape type is a circle.

  If the edge extraction region R is specified as a measurement target region on the model image Im by the user, the contact target position is specified for the contour line L specified by extracting the edge from the edge extraction region R. For example, the contact target position is designated at regular intervals from the end point of the contour line L. If the shape type of the contour line L is a straight line, two or more contact target positions are specified, and if the shape type of the contour line L is a circle or an arc, three or more contact target positions are specified. In this case, the number of contact target positions designated on the contour line L varies depending on the length of the contour line L. Note that the contour line L may be specified directly by a mouse operation or the like.

  Further, as shown in the illustrated scan path, n or (n-1) scan paths for equally dividing the contour line L may be specified by designating a division number n of 3 or more. . Specifically, as shown in FIG. 10A, if the shape type of the contour line L is a straight line, the number of divisions is set to 3 when the length of the contour line L is less than a certain value, and the contour line L Two scan paths that equally divide are designated. On the other hand, when the length of the contour line L is equal to or greater than a certain value, the number of divisions is set to 4, and three scan paths for equally dividing the contour line L are designated.

  Further, as shown in FIG. 10B, if the shape type is a circle, the number of divisions is set to 3 when the radius is less than a certain value, and three scan paths for equally dividing the contour line L are designated. The On the other hand, when the radius is equal to or larger than a certain value, the number of divisions is set to 4, and four scan paths for equally dividing the contour line L are designated.

  The start position of the scan path is designated as a position that is separated from the contact target position by a certain distance in the direction perpendicular to the contour line L. The end position of the scan path is designated as a position on the opposite side of the start position across the contour line L. Further, based on the luminance difference between both sides of the edge extracted from the model image Im, the scanning direction for bringing the probe 26 close to the side surface of the workpiece W is determined. The method for determining the start position and end position of the scan path is not limited to the above method. The start position and the end position of the scan path may be determined relative to the contact target position.

<Measurement control unit 315>
FIG. 11 is a block diagram illustrating a configuration example of the measurement control unit 315 in FIG. The measurement control unit 315 includes a search processing unit 351, an edge extraction region specifying unit 352, an edge extraction processing unit 353, a scan operation determining unit 354, a scan operation control unit 355, a probe detection unit 356, a contact position specifying unit 357, an outline The calculation unit 358 and the dimension calculation unit 359 are configured.

  The search processing unit 351 acquires a work image from the imaging unit 201 or 206 and specifies the position and orientation of the work W based on the feature amount information in the storage device 33. The position and orientation are specified by pattern search. The search processing unit 351 acquires a workpiece image generated in a state where the probe 26 is at the retracted position outside the imaging field of view, and specifies the position and orientation of the workpiece W from the workpiece image.

  The edge extraction region specifying unit 352 specifies an edge extraction region on the workpiece image based on the position and posture of the workpiece W specified by the search processing unit 351 and the edge extraction region information. The edge extraction processing unit 353 extracts edge points from the edge extraction region specified by the edge extraction region specifying unit 352.

  The scanning operation determination unit 354 specifies the position of the contour line by fitting a geometric figure previously specified as a shape type to the plurality of edge points extracted by the edge extraction processing unit 353, and sets the position as the contact target position information. Based on this, the scan operation is determined by specifying the start position and the scan direction.

  The scan operation control unit 355 controls the vertical drive unit 22, the horizontal drive unit 24, and the switching drive unit 27 of the main body 2 according to the scan operation determined by the scan operation determination unit 354. For example, the scan operation control unit 355 controls the switching drive unit 27 to switch the probe 26 from the retracted position to the measurement position, and then moves the horizontal drive unit 24 so that the probe 26 sequentially moves to a plurality of contact target positions. Control.

  The probe detection unit 356 detects that the probe 26 has contacted the side surface of the workpiece W. For example, when a workpiece image is repeatedly acquired from the imaging unit 201 or 206 and the position of the probe 26 moving on the scan path on the workpiece image changes by a certain threshold value within a certain time, the probe 26 is placed on the side surface of the workpiece W. Judged to have touched. A sensor for detecting physical contact may be provided on the probe 26.

  When it is detected that the probe 26 is in contact with the side surface of the workpiece W, the contact position specifying unit 357 acquires a workpiece image in which the probe 26 in contact with the side surface of the workpiece W is photographed, The contact position is specified from the position of the probe 26. Based on the position of the probe 26 on the workpiece image and the relative position of the imaging field of view with respect to the stage 23, a plurality of contact positions where the probe 26 has contacted the workpiece W are specified.

  The relative position of the imaging field of view with respect to the stage 23 is input from the horizontal drive unit 24. From the position coordinates of the imaging field of view (relative position of the camera 200 or the stage 23) in the global coordinate system input from the horizontal drive unit 24 and the coordinates of each contact position in the local coordinate system within the imaging field of view, each contact position Is required.

  In the present embodiment, the camera 200 and the probe 26 do not operate in the XY direction, and the stage 23 moves in the XY direction so that the probe 26 and the side surface of the workpiece W are brought into contact with each other. Therefore, in a state where the probe 26 is not in contact with the workpiece W, the probe 26 is always located at the center in the imaging field. The present invention is not limited to this embodiment, and the camera side may move with the probe 26, or the probe 26 may move within the imaging field of view.

  The contour calculation unit 358 fits the geometric figure to the plurality of edge points extracted by the edge extraction processing unit 353 or the plurality of contact positions specified by the contact position specifying unit 357, thereby generating a contour line. Specify the position of.

  The dimension calculation unit 359 obtains the dimension of the workpiece W based on the position of the contour line specified by the contour line calculation unit 358 and displays the measurement result on the display unit 21. In the dimension calculation unit 359, the dimension of the workpiece W is determined using one or both of the contour line specified by extracting the edge from the edge extraction region and the contour line specified by the probe 26 contacting. Desired.

  For example, the dimension can be obtained by combining the contour line specified by edge extraction and the contour line specified by contact of the probe 26. By adopting such a configuration, the contour line of the measurement point where the edge cannot be accurately extracted is specified by contacting the probe 26, and the contour line of the measurement point where the edge can be accurately extracted is specified and dimensioned by edge extraction. Measurements can be made. That is, it is possible to reduce the time required for measuring the dimension of the portion that can be measured with the image by measuring with the image.

  Steps S101 to S107 in FIG. 12 are flowcharts showing an example of the operation at the time of measurement setting in the controller 3 in FIG. First, when one of the measurement methods of image measurement or probe measurement is selected by the user (step S101), the controller 3 sets measurement elements according to the selected measurement method (steps S102 to S104).

13 and 14 are diagrams showing an example of an operation at the time of measurement setting in the image measurement apparatus 1 of FIG. 13A shows the workpiece W to be registered, and FIG. 13B shows the edge extraction region R designated on the pattern image Ip and the symbol Sm indicating the start position of the scanning operation. Yes. The workpiece W includes a cylindrical projecting portion w ₂ is formed on the base member w _1, the periphery into three holes w ₃ of the base member w ₁ is formed.

The pattern image Ip is composed of a captured image obtained by capturing such a workpiece W as a subject. As the measurement location, the distance between the left and right side surfaces of the base member w ₁ , the distance between the front and rear side surfaces, the distance between the two through holes w ₃ , and the inner diameter of the protruding portion w ₂ are specified. The distance between the left and right side surfaces of the base member w ₁ and the distance between the two through holes w ₃ are measured by extracting an edge from the edge extraction region R specified for the contour line of the workpiece W. On the other hand, the distance between the front and back side surfaces of the base member w ₁ and the inner diameter of the protrusion w ₂ are measured by bringing the probe 26 into contact therewith.

  FIG. 14 shows a setting screen 100 displayed on the display unit 21 when the measurement setting information is designated. The setting screen 100 is an editing screen for measurement setting information, and includes a display column 110 for displaying a model image and a menu column 111 for selecting a dimension type.

  The model image being displayed in the display column 110 is a captured image obtained by capturing the work W illustrated in FIG. 12 as a subject. By operating the magnification button 131 or 132, either the low magnification for wide field measurement or the high magnification for high accuracy measurement can be designated as the imaging magnification. Further, if the stage adjustment button 133 is operated, the position in the X direction and the position in the Y direction of the stage 23 can be adjusted. Further, if the Z adjustment button 134 is operated, the position of the measurement unit 20 in the Z direction can be adjusted. By operating the illumination button 135, the illumination type can be designated. Illumination types include transmitted illumination, ring illumination, and coaxial epi-illumination.

  The dimension types in the menu column 111 include distance measurement and angle measurement. Distance measurement includes distance measurement between two straight lines, distance measurement between straight lines and points, distance measurement between two points, distance measurement between two circles, distance measurement between circles and straight lines, circles There is a distance measurement between each point, a circle diameter measurement and an arc radius measurement.

  In the setting of the image measurement element in step S103, the measurement setting information is specified for the measurement element for performing dimension measurement by edge extraction. On the other hand, in the setting of the probe measurement element in step S104, the measurement setting information is designated for the measurement element for measuring the dimension by bringing the probe 26 into contact. The processing contents of steps S103 and S104 will be described in detail with reference to FIGS. The controller 3 repeats the processing procedure from step S101 to S104 for all measurement elements on the model image until the setting is completed (step S105).

  Next, the controller 3 designates design values and tolerances (step S106). In this step, the dimension value calculated from the model image is displayed in association with the outline of the measurement element, and if the dimension value on the model image is selected by the user, a design value or tolerance is newly designated, or Can be changed.

  FIG. 15 shows a tolerance setting screen 101 when design values and tolerances are designated. The tolerance setting screen 101 is a design value and tolerance editing screen, and is provided with a display column 110 for displaying a model image and an input column 112 for designating the design value and the upper limit value and the lower limit value of the tolerance. ing. In the model image being displayed in the display column 110, a dimension line and an identification number are displayed in association with the measurement location.

  In this input column 112, design values and upper and lower tolerance limits are displayed for a plurality of measurement locations registered as measurement setting information. If a measurement location is selected, the design value, the upper limit of tolerance or A lower limit value can be newly designated or changed.

  Next, the controller 3 registers feature amount information (step S107). In this step, the pattern image (search data) for specifying the position and orientation of the workpiece W is converted into a model image together with the relative positional relationship between the pattern image and the edge extraction region specified by the setting of each measurement element. Registered.

  FIG. 16 shows a feature amount setting screen 102 when designating feature amount information. The feature amount setting screen 102 is an edit screen for registering a pattern image as feature amount information, and includes a display column 110 for displaying a model image, and an input column 114 for specifying a registration target region and a search condition. Is provided. In the model image displayed in the display column 110, a frame 113 indicating the outer edge of the registration target area is displayed.

  As the search condition, a search range for limiting the scan range in the rotation direction and the number of workpieces W that match the pattern image can be specified. When the registration button 115 is operated, the model image being displayed is registered as a pattern image for search.

  Steps S201 to S209 in FIG. 17 are flowcharts showing an example of detailed operations for step S103 (setting of image measurement elements) in FIG. 12, and the operations of the controller 3 are shown. First, the controller 3 designates shooting conditions to be described later (step S201), acquires a shot image obtained by shooting a master piece placed on the stage 23, and displays it as a model image (step S202).

  Next, the shape type of the measurement element is selected by the user (step S203), and the edge extraction region is specified by the user in association with the shape type (step S204). The controller 3 extracts a plurality of edge points from the designated edge extraction region (step S205), and fits a geometric figure corresponding to the selected shape type to these edge points to thereby determine the position of the contour line. Is determined (step S206).

  Next, the controller 3 calculates the dimension of the measurement location based on the position of the contour line, and displays the dimension value of the measurement result on the model image in association with the measurement element (steps S207 and S208). The controller repeats the processing procedure from steps S203 to S208 for all measurement elements on the model image until the setting is completed (step S209).

  FIG. 18 is a diagram illustrating an example of an operation when setting an image measurement element in the image measurement apparatus 1 of FIG. In the figure, (a) shows an edge extraction region 116 designated on the model image, and (b) shows an outline 117 specified by extracting an edge from the edge extraction region 116. Yes.

  If the position of the start point and end point of the measurement element is specified for the model image displayed in the display field 110 of the setting screen 100, a rectangular area including a straight line connecting the start point and end point is automatically specified as the edge extraction area 116. The edge point scan direction is displayed on the model image in association with the measurement element. When the registration of the edge extraction region 116 is completed, the contour 117 and the dimension value specified by extracting the edge from the edge extraction region 116 are displayed on the model image.

  Steps S301 to S315 in FIG. 19 are flowcharts showing an example of detailed operation for step S104 (setting of probe measurement elements) in FIG. 12, and the operation of the controller 3 is shown. The processing procedure from step S301 to step S306 is the same as the processing procedure from step S201 to step S206 in FIG.

  Next, the controller 3 designates contact target position information (step S307). The contact target position information, that is, the contact target position and the scan path are automatically specified based on the shape type and size of the measurement element. Also, the designated scan path is displayed superimposed on the model image (step S308).

  FIG. 20 is a diagram showing an example of the operation when setting the probe measurement element in the image measurement apparatus 1 of FIG. Since the probe measurement is performed by imaging the probe 26 with the camera 200, where the probe 26 should be brought into contact with the work W or how the approach is made to the side surface of the work W. It is difficult for the user to determine whether or not. In the image measurement apparatus 1 according to the present embodiment, the contact target position is automatically determined simply by designating the edge extraction region as the measurement target region on the model image.

  (A) in the figure shows an edge extraction region 118 designated on the model image Im. If three points are specified on the circumference of the measurement element for the model image Im displayed in the display field 110 of the setting screen 100, an annular area including these points is automatically set as the edge extraction area 118. Designated and displayed on the model image Im.

  (B) in the figure shows a contour line 119 identified by extracting an edge from the edge extraction region 118 and a symbol 120 indicating the start position of the scanning operation. When the registration of the edge extraction area 118 is completed, the edge is extracted from the edge extraction area 118 and the position of the contour line 119 is specified. The contact target position is specified for the contour line 119, and a symbol 120 indicating the start position of the scanning operation is displayed in association with the contour line 119. In this example, three scan paths are arranged along the contour line 119 at equal intervals.

  The symbol 120 and the workpiece W on the setting screen 100 are similar to the actual contact portion 261 and the workpiece W. Accordingly, the user can accurately grasp the positional relationship between the contact portion 261 and the workpiece W on the setting screen 100, and whether or not the contact portion 261 interferes with the workpiece W when the probe 26 is operated. Can be confirmed. Further, when there is a high possibility that the contact portion 261 and the workpiece W interfere with each other, an error may be displayed on the setting screen 100 to notify the user.

  (C) in the figure shows the contour line 121 specified by contacting the probe 26 and the dimension value displayed in association with the contour line 121. When the registration of the contact target position is completed, the model image in the setting screen 100 displays the contour line 121 specified by bringing the probe 26 into contact with the side surface of the workpiece W and is obtained from the contour line 121. Dimension values are displayed in association with the contour line 121.

  Next, the controller 3 inquires of the user whether or not to adjust the scan path (step S309), and if the user instructs to adjust the scan path, the controller 3 adjusts the target contact position (step S310).

  21 and 22 are diagrams illustrating an example of the operation when setting the probe measurement element in the image measurement apparatus 1 of FIG. FIG. 21A shows a case where the contact target position designated with respect to the contour line 119 on the model image Im is adjusted, and FIG. 21B shows a case where the scan direction is changed. (C) shows a case where the number of scan paths is changed.

  The contact target position designated for the contour line 119 on the model image Im can be adjusted by moving the symbol 120 indicating the start position of the scanning operation by a mouse operation or the like. For example, by moving the symbol 120 in the radial direction of the contour line 119, the start position of the scanning operation can be moved away from the contour line 119. Further, by operating the setting screen 100, the scan direction can be reversed or a scan path can be added.

  22A shows the workpiece W to be registered, FIG. 22B shows the contact target position designated on the model image Im, and FIG. 22C shows the symbol displayed as an error. 120 is shown. Two scan paths are designated for the contour line 119 corresponding to the right side surface of the workpiece W. The contact target position can be changed by moving the symbol 120 indicating the start position of the scanning operation by a mouse operation or the like.

  As the start position of the scanning operation is closer to the outline 119 of the measurement location, the measurement time can be shortened. However, if the start position of the scanning operation is too close to the outline 119 of the measurement location, the probe 26 may interfere with the work W when the probe 26 is moved to the start position due to dimensional variations of the work W. That is, when the right outline 119 is a measurement target, if the scan start position is too close to the right outline 119, the probe 26 interferes with the workpiece W due to dimensional variations of the workpiece W during continuous measurement.

  As described above, when the contact target position designated on the model image Im is close to the contour line 119 to be measured, the contact target position can be adjusted so as to be away from the contour line 119. That is, the start position of the scanning operation can be adjusted so as to be away from the right outline 119.

  On the other hand, if the scan start position is too close to the left outline 119, the probe 26 interferes with the left side surface of the workpiece W. In this way, if the scan start position is designated at a position overlapping with a contour line different from the contour line 119 to be measured, the symbol 120 is displayed as an error. Therefore, the user can easily adjust the contact target position by confirming the model image Im.

  FIG. 23 is a diagram showing an example of the operation when setting the probe measurement element in the image measurement apparatus 1 of FIG. (A) in the figure shows a workpiece W to be registered, and (b) shows a case where the height position of the scanning operation is adjusted on the model image Im. The workpiece W has a step in the height direction, and a horizontal distance D between the lower right side surface and the upper right side surface is measured using the probe 26.

Since the lower right side surface and the upper right side surface of the work W have different vertical positions, it is necessary to appropriately specify the measurement height of the scanning operation. That is, the measurement height h ₂ for measuring the right side surface of the upper, it is necessary to specify a position higher than the measured height h ₁ for measuring the right side surface of the lower. Such height information may be specified by actually moving the probe 26 or numerically.

  When the measurement height is changed, the vertical drive unit 22 can be controlled to move the probe 26 to the changed measurement height, thereby actually confirming the height relationship between the workpiece W and the contact part 261. be able to.

  Next, the controller 3 starts a scanning operation, acquires a captured image obtained by capturing the probe 26 in contact with the side surface of the master piece, and specifies the position of the contact point based on the captured image (step S311). ). Then, the controller 3 determines the position of the contour line from the positions of two or more contact points (step S312).

  The controller 3 calculates the dimension of the measurement location based on the position of the contour line, and displays the dimension value of the measurement result on the model image in association with the measurement element (steps S313 and S314). The controller repeats the processing procedure from step S303 to S314 for all measurement elements on the model image until the setting is completed (step S315).

  FIG. 24 is a diagram showing an example of the operation when setting the probe measurement element in the image measurement apparatus 1 of FIG. In the figure, (a) shows the case of the first scan mode, and (b) shows the second scan mode. The first scan mode and the second scan mode are moving methods when the probe 26 moves between the contact target positions relative to the stage 23, and designates either the first scan mode or the second scan mode. can do.

  In the first scan mode, the probe 26 is switched from the measurement height to the reference height for each movement between the contact target positions. When there is an obstacle such as a step between two adjacent contact target positions, interference with the workpiece W can be reliably prevented by selecting the first scan mode.

  On the other hand, in the second scan mode, the probe 26 moves between the contact target positions relative to the stage 23 without switching to the reference height. Specifically, when a plurality of contact target positions are specified for one measurement element, the probe 26 is moved between the contact target positions relative to the stage 23 without switching to the reference height. Let However, when the probe 26 is moved relative to the stage 23 between two different measurement elements, the probe 26 may be moved without switching to the reference height, but the probe 26 is moved from the measurement height. It is desirable to switch to the reference height. The measurement time can be shortened by moving the probe 26 along the contour line at the same height relative to the stage 23.

  Steps S401 to S404 in FIG. 25 are flowcharts showing an example of detailed operations for step S107 (registration of feature amount information) in FIG. 12, and the operations of the controller 3 are shown. First, after designating shooting conditions (step S401), the controller 3 acquires a model image in which a master piece is shot and designates a registration target area (step S402).

  Next, the controller 3 designates a search condition for performing a pattern search using the pattern image (step S403). The controller 3 repeats the processing procedure from step S401 to step S403 until all the settings related to the registration of the feature amount information are completed (step S404). If all the settings are completed, the pattern obtained from the model image is obtained. Images and search conditions are stored as feature information.

  Steps S501 to S508 in FIG. 26 are flowcharts showing an example of detailed operations for step S201 in FIG. 17, step S301 in FIG. 19 and step S401 in FIG. 25 (designation of shooting conditions). It is shown. First, the controller 3 confirms the position of the probe 26, and if it is not the retracted position, it switches to the retracted position by controlling the switching drive unit 27 of the measurement unit 20 (steps S501 and S502).

  Next, the controller 3 controls the horizontal drive unit 24 to adjust the position in the X direction and the position in the Y direction of the stage 23 in the horizontal plane (step S503). Next, in order to adjust the focus position, the controller 3 controls the vertical drive unit 22 to adjust the position of the measurement unit 20 in the Z direction (step S504).

  Next, the controller 3 designates illumination conditions, imaging conditions, and imaging magnification (steps S505 to S507). Illumination conditions include illumination type, lighting state, brightness, and position of the ring illumination unit 211 in the Z direction. Imaging conditions include exposure time, gain, and imaging range.

  The controller 3 repeats the processing procedure from step S503 to step S507 until all the settings relating to the specification of the imaging conditions are completed (step S508). If all the settings are completed, the imaging conditions are stored as measurement setting information. To do.

  Steps S601 to S617 in FIG. 27 and FIG. 28 are flowcharts showing an example of the operation at the time of continuous measurement in the controller 3 in FIG. First, the controller 3 reads the measurement setting information (step S601), and designates the imaging condition based on the measurement setting information (step S602). Next, the controller 3 captures the workpiece W placed on the stage 23 under the above-described photographing conditions to obtain a workpiece image (step S603), and the position and orientation of the workpiece W by pattern search using feature amount information. Is specified (steps S604 and S605).

  Next, the controller 3 specifies the position of the edge extraction region on the work image based on the position and orientation of the work W specified by the pattern search (step S606). The controller 3 extracts a plurality of edge points from the specified edge extraction region (step S607), and specifies the position of the contour line by fitting a geometric figure to these edge points (step S608).

  Next, if the image measurement element is registered as measurement setting information (step S609), the controller 3 calculates the dimension of the measurement location based on the position of the specified contour line (step S610), and the measurement element The dimension value of the measurement result is displayed on the work image in association with (Step S611).

  Next, if the probe measurement element is registered as measurement setting information (step S612), the controller 3 controls the switching drive unit 27 of the measurement unit 20 to switch the probe 26 from the retracted position to the measurement position. The vertical drive unit 22 is controlled to switch to the reference height (step S613). The controller 3 specifies the scan start position based on the position of the contour line extracted and specified from the edge extraction region (step S614), and performs the scan operation (step S615).

  Next, the controller 3 obtains a photographed image obtained by photographing the probe 26 in contact with the side surface of the workpiece W, obtains the position of the contact point based on the photographed image, identifies the position of the contour line, and measures The dimension of the location is calculated (step S616). Then, the controller 3 displays the dimension value of the measurement result in association with the measurement element on the work image (step S617).

  When the contact target position is directly associated with the pattern image, the contact target position is directly specified from the position and posture of the workpiece W specified by the pattern search. Further, when the contact target position is associated with the edge extraction area, the position of the edge extraction area on the work image is specified based on the position and posture of the work W specified by the pattern search, thereby A location is identified.

  FIGS. 29 to 31 are diagrams showing an example of the operation at the time of continuous measurement in the image measuring apparatus 1 of FIG. 29 (b) to (d), FIG. 30 (a) to (d), and FIG. 31, two work images Iw having different positions and postures of the work W are shown as case 1 and case 2, respectively. Has been. 29A shows a pattern image Ip registered as search data, and FIG. 29B shows a work image Iw captured for pattern search. Both the pattern image Ip and the work image Iw are transmitted images by transmitted illumination. By matching the workpiece image Iw with the pattern image Ip, the position and orientation of the workpiece W are specified.

  FIG. 29 (c) shows a work image Iw imaged for edge extraction. This work image Iw is a reflected image by reflected illumination, and an edge extraction region is specified based on the position and posture of the work W specified by the pattern search.

  FIG. 29D shows a plurality of edge extraction regions R specified on the work image Iw shown in FIG. The position coordinates of the edge extraction region R are specified based on the position and orientation of the workpiece W and the relative position information registered as the edge extraction region information.

FIG. 30A shows a plurality of contour lines L ₁ and L ₂ specified by extracting an edge from the edge extraction region R. Contour line L _1, the measurement element is a contour line in a case that is registered as the image measuring elements. On the other hand, the contour line L _2, when the measuring element is registered as a probe measuring element, a provisional contour used to identify the contact target position, positional accuracy is low.

In (b) of FIG. 30, a plurality of contact target position specified with respect to the contour line L ₂ on the work image Iw is shown. Contact target position, based on the relative position information registered as the position and the contact target position information of contour L _2, are specified.

FIG. 30C shows a plurality of contact positions P identified by bringing the probe 26 into contact therewith. The contact position P is specified based on the workpiece image Iw acquired in a state where the probe 26 is in contact with the side surface of the workpiece W and the position of the stage 23. In (d) of FIG. 30 is a contour line L ₃ identified by fitting a geometric figures into a plurality of the contact position P is shown.

FIG. 31 shows a workpiece image Iw in which the result of the quality determination of the workpiece W is displayed in association with the measurement location. Based on the contour line L ₃ identified by the identifying contour line L ₁ and the probe operation by the edge extraction, the dimension values of the measurement point is determined. Further, the quality of the workpiece W is determined by comparing the obtained dimension value with the design value and comparing the error with respect to the design value with the tolerance. The result of the pass / fail judgment is displayed on the work image Iw in association with the measurement location.

  In the work image Iw shown on the left side of FIG. 31, all measurement locations are OK, and the work W is determined to be a non-defective product. On the other hand, in the work image Iw shown on the right side of FIG. 31, one of the measurement points registered as the image measurement element is NG determination, and the work W is determined to be a defective product.

  Steps S701 to S712 in FIG. 32 are flowcharts showing an example of detailed operation for step S615 (scan operation) in FIG. 28, and show the operation of the controller 3. First, the controller 3 controls the horizontal drive unit 24 to move the probe 26 relative to the stage 23 at a reference height to a position corresponding to the start position of the scan path (step S701), and then vertically. The drive unit 22 is controlled to move the probe 26 to the measurement height (step S702).

  Next, the controller 3 controls the horizontal driving unit 24 to move the probe 26 relative to the stage 23 in the scanning direction (step S703). If contact is detected, the probe 26 on the workpiece image is detected. And the position of the stage 23, the contact position is calculated (steps S704 and S705). The probe 26 is controlled so as to approach along the normal line of the contour line on the workpiece image. The controller 3 repeats the processing procedure from step S701 to step S705 until the measurement is completed for all contact target positions. When the measurement is completed for all contact target positions, the probe 26 is moved to the reference height. This process ends (steps S706 and S707).

  If the first scan mode is designated, the controller 3 moves the probe 26 to the reference height every time measurement is completed for one contact target position (steps S706, S711, S712).

  The controller 3 determines that an error has occurred if the probe 26 reaches the end position without detecting contact, and moves the probe to the reference height to output an error (steps S704 and S708). ~ S710).

  According to the present embodiment, since the position and orientation of the workpiece W are specified from the workpiece image based on the pattern image, the dimension measurement using the probe 26 is performed only by placing the workpiece W on the stage 23. be able to. In addition, since the contact target position to which the probe 26 should contact is specified based on the contact target position information, a plurality of contact target positions with respect to the workpiece W can be simply specified by first specifying a relative position with respect to the pattern image. And the probe 26 can be moved sequentially.

  Further, since the workpiece image for specifying the position and orientation of the workpiece W is generated in a state where the probe 26 is in the retracted position, the probe 26 is imaged in an overlapping manner with the workpiece W or is imaged in the vicinity of the workpiece W. Can be prevented.

  Further, according to the present embodiment, a plurality of contact target positions on the side surface of the workpiece to which the probe 26 should contact are specified according to the position of the measurement element, the shape type or size of the measurement element, and the arrangement rule. By simply designating the measurement element, the plurality of contact target positions can be automatically identified and the scanning operation by the probe 26 can be determined.

  In the present embodiment, an example in which the horizontal driving unit 24 moves the stage 23 in the X direction and the Y direction has been described, but the present invention does not limit the configuration of the horizontal driving unit 24 to this. . For example, the horizontal drive unit 24 may be configured to move the probe 26 or the measurement unit 20 in the X direction and the Y direction. Alternatively, the horizontal driving unit 24 may move the stage 23 in the X direction and move the probe 26 or the measurement unit 20 in the Y direction.

  In the present embodiment, an example in which the vertical drive unit 22 moves the measurement unit 20 in the Z direction has been described. However, the present invention does not limit the configuration of the vertical drive unit 22 to this. For example, the vertical drive unit 22 may be configured to move the stage 23 in the Z direction.

  In the present embodiment, an example in which the scan direction of the scan path is designated based on the luminance difference between both sides of the edge has been described. However, the present invention does not limit the scan direction designation method to this. Absent. For example, the configuration may be such that height information in the vicinity of the measurement location is acquired using the focus position of the imaging unit 201 or 206, and the scan direction is designated based on this height information. The scan direction may be configured so that a predetermined direction is designated by default.

  In this embodiment, an example in which the measurement height of the contact target position is specified by the user has been described. However, the present invention automatically uses the focus position of the imaging unit 201 or 206 to measure the measurement height. The configuration may be specified as desired.

  In the present embodiment, an example in which it is detected that the probe 26 has contacted the side surface of the workpiece W based on the workpiece image has been described. However, the present invention limits the contact detection method to this. It is not a thing. For example, it may be configured to detect that the probe 26 is in contact with the side surface of the workpiece W using a sensor that detects pressure or vibration.

  Further, in the present embodiment, an example in which the probe 26 is attached to the housing of the measurement unit 20 has been described. However, in the present invention, the probe 26 is within a measurement region in the imaging field of the imaging unit 201 or 206. The present invention can also be applied to those that are movable in the horizontal direction.

  In the present embodiment, the image measuring apparatus 1 including the self-luminous probe 26 that transmits the guide light from the probe light source 263 through the metal tube 262 has been described. The configuration is not limited to this. For example, the probe may not emit guide light.

<Movement detection>
The contact portion 261 of the probe 26 is supported by a non-flexible rod or tube such as a metal tube 262. Therefore, when the contact portion 261 contacts the workpiece W, a pressing force is generated between the contact portion 261 and the workpiece W, and the workpiece W moves. For example, when measuring the distance between the first side surface of the workpiece W and the second side surface facing the first side surface, when the first side surface is pressed by the contact portion 261 and the workpiece W moves, the distance depends on the distance moved. Error is included in the measurement result of the position of the first side surface. Therefore, the error is reflected in the distance between the first side surface and the second side surface. Therefore, the measurement control unit 315 includes a first image of the workpiece W generated by the imaging unit 201 before the contact portion 261 contacts the side surface of the workpiece W in order to measure the position of the side surface of the workpiece W, and the workpiece W In order to measure the position of the side surface of the workpiece W, the contact portion 261 and the side surface of the workpiece W are formed using the second image of the workpiece W generated by the imaging unit 201 after the contact portion 261 contacts the side surface of the workpiece W. It is detected that the workpiece W has moved on the placement surface of the stage 23 due to the contact. For example, the input receiving unit 311 of the control device 31 sets the feature of the workpiece W as a monitoring target. The measurement control unit 315 detects that the workpiece W has moved by comparing the position of the monitoring target in the first image with the position of the monitoring target in the second image. For example, the measurement control unit 315 determines that the workpiece W has moved when the distance between the position of the monitoring target in the first image and the position of the monitoring target in the second image is equal to or greater than a threshold value.

FIG. 35A shows an image of the workpiece W taken by the imaging unit 201 before the contact portion 261 of the probe 26 contacts the side surface of the workpiece W. FIG. The generated first image Im1 is shown. In this example, the measurement control unit 315 includes a first image Im1 photographed before the contact portion 261 contacts the side surface of the workpiece W, and a second image Im2 photographed after the contact portion 261 contacts the side surface of the workpiece W. Is used to detect the movement of the workpiece W. For example, the measurement control unit 315 detects the movement of the workpiece W by comparing the position of the feature of the workpiece W in the first image Im1 and the position of the feature of the workpiece W in the second image Im2. In this example, as a feature that is a movement monitoring target (detection target), a first line (straight line 3502) obtained by approximation from a plurality of edge points extracted in the first feature region (edge extraction region 3501), and the first An intersection point 3505 with a second line (straight line 3504) obtained by approximation from a plurality of edge points extracted in the two feature region (edge extraction region 3502) is employed.

  FIG. 35B shows a workpiece image Im1 ′ generated by photographing the workpiece W by the imaging unit 201 when the contact portion 261 contacts the side surface of the workpiece W for probe measurement. As shown in FIG. 35B, the work W is moved by the contact portion 261 pressing the work W (or the work W is the contact portion 261).

  FIG. 35C shows a second image Im <b> 2 generated by photographing the workpiece W by the imaging unit 201 after the contact portion 261 of the probe 26 contacts the side surface of the workpiece W. The measurement control unit 315 obtains the position of the intersection point 3505 of the first line (straight line 3502) and the second line (straight line 3504) in the second image Im2 in the same manner as the first image Im1, and the intersection point 3505 in the first image Im1. Compare with position. If the distance between the position of the intersection point 3505 in the second image Im2 and the position of the intersection point 3505 in the first image Im1 is equal to or greater than the threshold, the measurement control unit 315 determines that the workpiece W has moved and warns the user. Or perform a remeasurement.

Movement detection based on monitoring the position of a contact portion that has contacted a specific shape of the workpiece FIG. 36A shows an image of the workpiece W taken by the imaging unit 201 before the contact portion 261 of the probe 26 contacts the side surface of the workpiece W. The first image Im1 generated in this way is shown. The workpiece W has a protrusion 3601 having a specific shape (feature). Before the contact control unit 315 contacts the side surface of the workpiece W to measure the width or the like of the workpiece W, the measurement control unit 315 contacts the projection unit 3601 with the contact unit 261 as the position of the projection unit 3601 and contacts the contact unit 261. The center position P1 is obtained. An arrow indicates a scan path of the contact portion 261.

  FIG. 36B shows a workpiece image Im1 ′ generated by photographing the workpiece W by the imaging unit 201 when the contact portion 261 contacts the side surface of the workpiece W for probe measurement. As shown in FIG. 36B, the work W is moved by the contact portion 261 pressing the work W (or the work W is the contact portion 261).

  FIG. 36C shows a second image Im2 generated by photographing the workpiece W by the imaging unit 201 after the contact portion 261 contacts the side surface of the workpiece W. Similar to the first image Im1, the measurement control unit 315 brings the contact portion 261 into contact with the protruding portion 3601, and obtains the center position P2 of the contact portion 261 as the position of the protruding portion 3601. Further, the measurement control unit 315 compares the center position P1 of the contact portion 261 obtained from the first image Im1 with the center position P2 of the contact portion 261 obtained from the second image Im2, and the workpiece W has moved. Determine whether or not. For example, if the distance between the center position P1 in the second image Im2 and the center position P1 in the first image Im1 is equal to or greater than the threshold value, the measurement control unit 315 determines that the workpiece W has moved and warns the user. Or perform a remeasurement.

Movement detection based on monitoring luminance of specific area in work image FIG. 37A is generated by imaging the work W by the imaging unit 201 before the contact part 261 of the probe 26 contacts the side surface of the work W. The first image Im1 is shown. The surface of the workpiece W has a characteristic 3701 having a characteristic in reflectance. The measurement control unit 315 arranges the luminance detection region 3702 for the first image Im1 acquired before the contact portion 261 is brought into contact with the side surface of the workpiece W in order to measure the width of the workpiece W and the like. The luminance (eg, average value) Iv1 within 3702 is calculated. The brightness detection area 3702 is irrelevant to the position of the work W, and is associated with a specific position in the work image.

  FIG. 37B shows a workpiece image Im1 ′ generated by photographing the workpiece W by the imaging unit 201 when the contact portion 261 contacts the side surface of the workpiece W for probe measurement. As shown in FIG. 37B, the work W is moved by the contact portion 261 pressing the work W (or the work W is the contact portion 261).

  FIG. 37 (c) shows a second image Im <b> 2 generated by photographing the workpiece W by the imaging unit 201 after the contact unit 261 contacts the side surface of the workpiece W. Similar to the first image Im1, the measurement control unit 315 arranges the luminance detection region 3702 for the second image Im2, and calculates the luminance (eg, average value) Iv2 in the luminance detection region 3702. Furthermore, the measurement control unit 315 determines whether or not the workpiece W has moved by comparing the luminance Iv1 obtained from the first image Im1 with the luminance Iv2 obtained from the second image Im2. For example, if the difference between the luminance Iv2 in the second image Im2 and the luminance Iv1 in the first image Im1 is greater than or equal to a threshold value, the measurement control unit 315 determines that the workpiece W has moved and issues a warning to the user. Or perform a re-measurement.

Movement detection setting FIG. 38 is a diagram for explaining main functions involved in movement detection setting. FIG. 39 is a diagram illustrating a user interface (UI) for accepting settings relating to movement detection. As shown in FIG. 38, the input receiving unit 311 has a movement detection setting unit 3801 for executing settings related to movement detection in addition to the above-described functions. When the user puts the pointer 3905 of the mouse 42 on a specific element and right-clicks in the setting of the image measurement element in S103 or the probe measurement element in S104, the movement detection setting unit 3801 displays a UI 3900 as shown in FIG. Displayed on the display unit 21. For example, it is confirmed that the intersection 3505 shown in FIG. 35A, the edge (contact point) of the projection 3601 shown in FIG. 36A, and the luminance detection area 3702 shown in FIG. When detected, the movement detection setting unit 3801 displays the UI 3900 on the display unit 21. The UI 3900 has a setting UI 3901 for setting an element designated by right-clicking as a detection target for movement detection. The setting UI 3901 may have a check box, for example. When a check is given to the check box by the mouse 42, the target setting unit 3802 writes information on the position and feature amount of the designated element as the detection target in the movement detection setting information 3805, and the movement detection setting information 3805. Is stored in the storage device 33. The detection timing setting UI 3902 is a UI for setting the timing for executing movement detection. In this example, it can be selected to perform movement detection for each workpiece, for each measurement, or for each contact point. “For each work” means that the movement detection is executed only once for the measurement group (all image measurements and probe measurements) executed on the work W. That is, firstly, the first image Im1 is acquired, secondly, all the measurements included in the measurement group are executed, and thirdly, the second image Im2 is acquired, and the result of movement detection is output. “Every measurement” means that one movement detection is performed for one probe measurement. In the probe measurement, in order to measure the position of the edge, the contact portion 261 sequentially contacts the N contact points, but the first image Im1 is acquired before the contact portion 261 contacts the N contact points, and N After the contact part 261 contacts all of the contact points, the second image Im2 is acquired and the result of movement detection is output. “For each contact point” means that movement detection is performed for each contact point. The user designates the timing for executing the movement detection by adding a check to any check box. The timing setting unit 3803 writes the timing specified by the setting UI 3902 in the movement detection setting information 3805. A setting UI 3903 is a UI for setting processing (post-processing) when movement is detected. As post-processing, there is a possibility that a warning indicating that the workpiece W has moved is displayed on the display unit 21, a measurement result that may have a measurement error associated with the movement is highlighted, or that there is a measurement error. For example, the measurement may be re-executed. The user gives a check to any of the check boxes to designate post-processing when the movement of the workpiece W is detected. The post-processing setting unit 3804 writes the post-processing selected through the setting UI 3903 in the movement detection setting information 3805.

  FIG. 40 is a flowchart showing the movement detection setting. Here, the movement detection setting will be described independently of other setting processes, but the movement detection setting may be incorporated in the setting of the image measurement element shown in FIG. 17 or the setting of the probe measurement element shown in FIG.

  In step S <b> 801, the movement detection setting unit 3801 generates a model image by causing the camera 200 to photograph the model workpiece W and displays the model image on the display unit 21. For example, the model image is rendered in the display field 110.

  In step S802, the movement detection setting unit 3801 selects a detection method according to a user instruction. A method for detecting movement by monitoring features extracted from an image as shown in FIG. 35, a method for detecting movement by bringing the contact portion 261 into contact with a specific feature as shown in FIG. 36, and FIG. One method is selected by the user from the method of detecting the movement by monitoring the luminance of the specific feature as shown. For example, when the intersection 3505 is right-clicked, the movement detection setting unit 3801 may recognize that a method for detecting movement by monitoring features extracted from the image is designated. When the edge of the protrusion 3601 is right-clicked, the movement detection setting unit 3801 may recognize that a method for detecting movement by bringing the contact part 261 into contact with a specific feature is designated. When the luminance detection area 3702 is right-clicked, the movement detection setting unit 3801 may recognize that a method for detecting movement by monitoring the luminance of a specific feature is designated. The movement detection setting unit 3801 writes the selected method in the movement detection setting information 3805.

  In step S803, the movement detection setting unit 3801 sets a detection target. As described above, when the target setting unit 3802 of the movement detection setting unit 3801 is right-clicked on an element set in the model image displayed in the display field 110 and the check box in the detection target setting UI 3901 is checked, The element is set as a detection target, and information necessary for detecting the element is written in the movement detection setting information 3805. For example, information such as the position of the edge extraction region 3501 for obtaining the straight line 3502 defining the intersection 3505 with respect to the workpiece W and the position of the edge extraction region 3503 for obtaining the straight line 3504 with respect to the workpiece W are the movement detection setting information 3805. Is written to.

  In S804, the movement detection setting unit 3801 sets the detection timing. For example, the timing setting unit 3803 of the movement detection setting unit 3801 writes the timing designated through the setting UI 3902 in the movement detection setting information 3805.

  In step S805, the movement detection setting unit 3801 sets post-processing that is executed when movement of the workpiece W is detected. For example, the post-processing setting unit 3804 of the movement detection setting unit 3801 writes the post-processing specified through the setting UI 3903 in the movement detection setting information 3805.

Movement detection during measurement FIG. 41 is a block diagram showing the main functions involved in movement detection. When the method of detecting the movement by monitoring the feature extracted from the image is selected, the search processing unit 351 obtains the position and orientation of the workpiece W in the first image Im1. The edge extraction area specifying unit 352 arranges the edge extraction areas 3501 and 3503 with respect to the workpiece W based on the positional relationship between the edge extraction areas 3501 and 3503 and the workpiece W held in the movement detection setting information 3805. The edge extraction processing unit 353 extracts edges from the edge extraction areas 3501 and 3503. The movement detection unit 4101 obtains straight lines 3502 and 3504 from the extracted edges, and further obtains an intersection 3505 of the straight lines 3502 and 3504. Similarly, an intersection point 3505 is obtained from the second image Im2. The movement detection unit 4101 determines that the workpiece W has moved if the distance between the intersection point 3505 in the first image Im1 and the intersection point 3505 in the second image Im2 is equal to or greater than a threshold value. When it is detected (determined) that the workpiece W has moved, the result output unit 4102 displays a warning message indicating that the workpiece W has moved on the display unit 21 via the display control unit 312. Moreover, the measurement control part 315 may perform re-measurement of the workpiece | work W, if it detects that the workpiece | work W moved.

  FIG. 42 is a block diagram showing other main functions involved in movement detection. When the method of detecting the movement by bringing the contact part 261 into contact with a specific feature is selected, the search processing part 351 obtains the position and orientation of the work W in the image of the work W. The edge extraction region specifying unit 352 arranges the edge extraction region with respect to the workpiece W based on the positional relationship between the edge extraction region of the protrusion 3601 and the workpiece W held in the movement detection setting information 3805. The edge extraction processing unit 353 extracts the edge of the protrusion 3601 from the edge extraction region. The scan operation determination unit 354 determines a contact target position of the contact unit 261 according to the movement detection setting information 3805, and further determines a movement start position and a scan path of the contact unit 261. The scan operation determination unit 354 brings the contact unit 261 into contact with the contact target position according to the movement start position and the scan path, acquires the first image Im1, and obtains the center position P1 of the contact unit 261. The contact of the contact part 261 is detected by the probe detection part 356, and the center position P1 is obtained by the contact position specifying part 357. Similarly, the center position P2 of the contact portion 261 is obtained for the second image Im2. The movement detection unit 4101 determines that the workpiece W has moved if the distance between the center position P1 and the center position P2 is equal to or greater than the threshold value. When it is detected (determined) that the workpiece W has moved, the result output unit 4102 displays a warning message indicating that the workpiece W has moved on the display unit 21 via the display control unit 312. Moreover, the measurement control part 315 may perform re-measurement of the workpiece | work W, if it detects that the workpiece | work W moved.

  FIG. 43 is a block diagram showing other main functions involved in movement detection. When a method of detecting the movement by monitoring the luminance of the specific feature is selected, the luminance detection area specifying unit 4301 moves the position, posture, and movement of the workpiece W in the first image Im1 obtained by the search processing unit 351. A luminance detection area 3702 is arranged with respect to the work W in accordance with the detection setting information 3805. The luminance measurement unit 4302 measures the luminance Iv1 of the luminance detection region 3702 in the first image Im1. That is, the movement detection unit 4101 has a luminance measurement unit. The luminance detection area specifying unit 4301 also arranges the luminance detection area 3702 according to the movement detection setting information 3805 for the second image Im2. However, the position and orientation of the luminance detection area 3702 are independent of the position and orientation of the workpiece W in the second image Im2, and are determined according to the movement detection setting information 3805. The luminance measurement unit 4302 measures the luminance Iv2 of the luminance detection region 3702 in the second image Im2. The movement detection unit 4101 determines that the workpiece W has moved if the difference between the luminance Iv1 and the luminance Iv2 is equal to or greater than a threshold value. The movement detection unit 4101 includes a difference calculation unit that obtains a difference between the luminance Iv1 and the luminance Iv2, and a comparison unit that compares the difference with a threshold value. When it is detected (determined) that the workpiece W has moved, the result output unit 4102 displays a warning message indicating that the workpiece W has moved on the display unit 21 via the display control unit 312. Moreover, the measurement control part 315 may perform re-measurement of the workpiece | work W, if it detects that the workpiece | work W moved.

  FIG. 44 is a flowchart showing measurement processing of the workpiece W including movement detection executed for each workpiece. Here, since the movement detection is performed for each workpiece W, the first image Im1 is acquired, then all the image measurements and all the probe measurements are performed, and finally the second image Im2 is acquired to detect the movement. Executed.

  In step S <b> 901, the movement detection unit 4101 of the measurement control unit 315 controls the camera 200 through the imaging control unit 313, causes the imaging unit 201 of the camera 200 to capture the workpiece W, and generates the first image generated by the camera 200 and the imaging control unit 313. Im1 is acquired. Further, the movement detection unit 4101 detects a detection target according to the movement detection setting information 3805. For example, the position of the intersection 3505, the center position P1, the luminance Iv1, and the like are detected.

  In step S <b> 902, the measurement control unit 315 performs various measurements set on the workpiece W. This measurement includes not only all image measurements, but also all probe measurements.

  In step S <b> 903, the movement detection unit 4101 of the measurement control unit 315 controls the camera 200 through the imaging control unit 313, causes the imaging unit 201 of the camera 200 to capture the workpiece W, and generates the second image generated by the camera 200 and the imaging control unit 313. Get Im2. Further, the movement detection unit 4101 detects a detection target according to the movement detection setting information 3805. For example, the position of the intersection 3505, the center position P2, the luminance Iv2, and the like are detected.

  In step S904, the movement detection unit 4101 of the measurement control unit 315 determines whether the workpiece W has moved based on the detection results of the detection targets in the first image Im1 and the second image Im2. For example, the movement detection unit 4101 may determine that the workpiece W has moved if the distance between the intersection point 3505 in the first image Im1 and the intersection point 3505 in the second image Im2 is equal to or greater than a threshold value. Further, the movement detection unit 4101 may determine that the workpiece W has moved if the distance between the center position P1 and the center position P2 is equal to or greater than a threshold value. The movement detection unit 4101 may determine that the workpiece W has moved if the difference between the luminance Iv1 and the luminance Iv2 is equal to or greater than a threshold value. If it is determined that the workpiece W has not moved, the measurement control unit 315 ends the measurement process for one workpiece W. On the other hand, if it determines with the workpiece | work W having moved, the measurement control part 315 will progress to S905.

  In step S905, the measurement control unit 315 performs post-processing according to the movement detection setting information 3805. For example, the result output unit 4102 displays a warning message on the display unit 21 or executes highlighting to indicate that an error associated with the movement of the workpiece W may be included in the measurement result of the probe measurement. In addition, the measurement control unit 315 performs remeasurement for probe measurement that may include an error associated with the movement of the workpiece W.

  FIG. 45 is a flowchart showing a workpiece W measurement process including movement detection executed for each probe measurement. Here, the first image Im1 is acquired before the probe measurement, and after the probe measurement is performed, the second image Im2 is acquired and the movement detection is performed. Movement detection may be executed for each probe measurement, or movement detection may be executed only for a probe measurement designated by the user among a plurality of probe measurements. At a plurality of positions where the contact portion 261 can contact, there may be a position where the workpiece W is likely to move and a position where the workpiece W is difficult to move. Therefore, the movement detection may be executed only for the probe measurement involving the contact with the position where the workpiece W is easily moved. Thereby, movement detection is efficiently performed.

  In step S <b> 1001, the movement detection unit 4101 of the measurement control unit 315 controls the camera 200 through the imaging control unit 313, causes the imaging unit 201 of the camera 200 to photograph the workpiece W, and displays the workpiece image generated by the camera 200 and the imaging control unit 313. To perform image measurement. In the image measurement, since the contact portion 261 does not contact the workpiece W, the movement of the workpiece W does not occur in principle. Therefore, the measurement control unit 315 performs all image measurements collectively before the probe measurement.

  In step S <b> 1002, the movement detection unit 4101 of the measurement control unit 315 controls the camera 200 through the imaging control unit 313, causes the imaging unit 201 of the camera 200 to capture the workpiece W, and generates the first image generated by the camera 200 and the imaging control unit 313. Im1 is acquired. Further, the movement detection unit 4101 detects a detection target according to the movement detection setting information 3805. For example, the position of the intersection 3505, the center position P1, the luminance Iv1, and the like are detected.

  In step S1003, the measurement control unit 315 performs the probe measurement set on the workpiece W. Here, one of a plurality of probe measurements set for the workpiece W is executed.

  In step S <b> 1004, the movement detection unit 4101 of the measurement control unit 315 controls the camera 200 through the imaging control unit 313, causes the imaging unit 201 of the camera 200 to capture the workpiece W, and generates the second image generated by the camera 200 and the imaging control unit 313. Get Im2. Further, the movement detection unit 4101 detects a detection target according to the movement detection setting information 3805. For example, the position of the intersection 3505, the center position P2, the luminance Iv2, and the like are detected.

  In step S1005, the movement detection unit 4101 of the measurement control unit 315 determines whether the workpiece W has moved based on the detection result of the detection target. For example, the movement detection unit 4101 may determine that the workpiece W has moved if the distance between the intersection point 3505 in the first image Im1 and the intersection point 3505 in the second image Im2 is equal to or greater than a threshold value. Further, the movement detection unit 4101 may determine that the workpiece W has moved if the distance between the center position P1 and the center position P2 is equal to or greater than a threshold value. The movement detection unit 4101 may determine that the workpiece W has moved if the difference between the luminance Iv1 and the luminance Iv2 is equal to or greater than a threshold value. If it is determined that the workpiece W has not moved, the measurement control unit 315 proceeds to S1007. On the other hand, if it determines with the workpiece | work W having moved, the measurement control part 315 will progress to S1006.

  In step S1006, the measurement control unit 315 performs post-processing according to the movement detection setting information 3805. For example, the result output unit 4102 displays a warning message on the display unit 21 or executes highlighting to indicate that an error associated with the movement of the workpiece W may be included in the measurement result of the probe measurement. In addition, the measurement control unit 315 performs remeasurement for probe measurement that may include an error associated with the movement of the workpiece W.

  In step S1007, the movement detection unit 4101 of the measurement control unit 315 determines whether all probe measurements have been completed. If all the probe measurements are completed, the measurement control unit 315 ends the measurement for one workpiece W. On the other hand, if one or more probe measurements remain, the measurement control unit 315 executes each process of S1002 to S1007 again.

  FIG. 46 is a flowchart showing workpiece measurement processing including movement detection executed for each contact point. Here, the first image Im1 is acquired before the probe measurement before the contact part 261 contacts the contact point, and the second image Im2 is acquired after the contact part 261 contacts the contact point, and movement detection is performed. .

  In step S <b> 1101, the movement detection unit 4101 of the measurement control unit 315 controls the camera 200 through the imaging control unit 313, causes the imaging unit 201 of the camera 200 to capture the workpiece W, and displays the workpiece image generated by the camera 200 and the imaging control unit 313. To perform image measurement. In the image measurement, since the contact portion 261 does not contact the workpiece W, the movement of the workpiece W does not occur in principle. Therefore, the measurement control unit 315 performs all image measurements collectively before the probe measurement.

  In step S <b> 1102, the movement detection unit 4101 of the measurement control unit 315 controls the camera 200 through the imaging control unit 313, causes the imaging unit 201 of the camera 200 to capture the work W, and the first image generated by the camera 200 and the imaging control unit 313. Im1 is acquired. Further, the movement detection unit 4101 detects a detection target according to the movement detection setting information 3805. For example, the position of the intersection 3505, the center position P1, the luminance Iv1, and the like are detected.

  In S1103, the measurement control unit 315 measures the contact position by bringing the contact unit 261 into contact with the contact point for probe measurement set on the workpiece W. Here, the measurement of the contact position is executed for each contact point set for one probe measurement.

  In step S <b> 1104, the movement detection unit 4101 of the measurement control unit 315 controls the camera 200 through the imaging control unit 313, causes the imaging unit 201 of the camera 200 to capture the workpiece W, and generates the second image generated by the camera 200 and the imaging control unit 313. Get Im2. Further, the movement detection unit 4101 detects a detection target according to the movement detection setting information 3805. For example, the position of the intersection 3505, the center position P2, the luminance Iv2, and the like are detected.

  In step S1105, the movement detection unit 4101 of the measurement control unit 315 determines whether the workpiece W has moved based on the detection result of the detection target. For example, the movement detection unit 4101 may determine that the workpiece W has moved if the distance between the intersection point 3505 in the first image Im1 and the intersection point 3505 in the second image Im2 is equal to or greater than a threshold value. Further, the movement detection unit 4101 may determine that the workpiece W has moved if the distance between the center position P1 and the center position P2 is equal to or greater than a threshold value. The movement detection unit 4101 may determine that the workpiece W has moved if the difference between the luminance Iv1 and the luminance Iv2 is equal to or greater than a threshold value. If it is determined that the workpiece W has not moved, the measurement control unit 315 proceeds to S1007. On the other hand, if it determines with the workpiece | work W having moved, the measurement control part 315 will progress to S1006.

  In step S1106, the measurement control unit 315 performs post-processing according to the movement detection setting information 3805. For example, the result output unit 4102 displays a warning message on the display unit 21 or executes highlighting to indicate that an error associated with the movement of the workpiece W may be included in the contact point measurement result. Further, the measurement control unit 315 performs re-measurement on the measurement of the contact point that may include an error accompanying the movement of the workpiece W.

  In step S1107, the movement detection unit 4101 of the measurement control unit 315 determines whether or not the contact of the contact unit 261 with respect to all contact points and the measurement have been completed. If contact and measurement have been completed for all contact points, the measurement control unit 315 ends one probe measurement, and proceeds to S1108. For example, the contour calculation unit 358 calculates a contour line such as a straight line or a circle based on the position of the contact point of the contact unit 261 obtained by the contact position specifying unit 357. Further, the dimension calculation unit 359 calculates a length and the like based on the contour line. On the other hand, if the contact with one or more contact points has not been executed, the measurement control unit 315 executes the processes of S1102 to S1107 again.

  In step S1108, the movement detection unit 4101 of the measurement control unit 315 determines whether all probe measurements have been completed. If all the probe measurements are completed, the measurement control unit 315 ends the measurement for one workpiece W. On the other hand, if one or more probe measurements remain, the measurement control unit 315 executes each process of S1102 to S1108 again.

<Summary>
As illustrated in FIG. 1, the image measurement apparatus 1 includes a stage 23 on which a workpiece W is placed, an imaging unit 201 that captures an image of the workpiece W placed on the stage 23 and generates an image, and an imaging unit 201. The probe 26 having the contact portion 261 that can come into contact with the side surface of the workpiece W placed on the stage 23 is provided. Furthermore, when the image measuring apparatus 1 is in contact with the horizontal drive unit 24 that moves at least one of the stage 23 and the probe 26 substantially parallel to the mounting surface of the stage 23, and the contact unit 261 and the side surface of the workpiece W. And a measuring unit (contact position specifying unit 357) that measures the position of the side surface of the workpiece W using the images Ic1 and Ic2 generated by the imaging unit 201. In particular, the image measurement apparatus 1 includes a movement detection unit 4101. The movement detection unit 4101 acquires the first image Im1 of the workpiece W generated by the imaging unit 201 before the contact unit 261 contacts the side surface of the workpiece W in order to measure the position of the side surface of the workpiece W. Furthermore, the movement detection unit 4101 acquires the second image Im2 of the workpiece W generated by the imaging unit 201 after the contact unit 261 contacts the side surface of the workpiece W in order to measure the position of the side surface of the workpiece W. The movement detection unit 4101 uses the first image Im1 and the second image Im2 to detect that the workpiece W has moved on the placement surface of the stage 23 due to the contact between the contact unit 261 and the side surface of the workpiece W. To do. The result output unit 4102 outputs the detection result of the movement detection unit 4101. If measurement is continued with the probe 26 without knowing that the workpiece W has moved, the measurement result obtained after the workpiece W has moved will contain an error. In order to prevent the movement of the workpiece W, it is conceivable to create a special jig and fix the workpiece W to the jig. However, in this method, it is essential to fix and remove the workpiece W from the jig, and it is difficult to efficiently measure a large amount of workpieces W. According to the present embodiment, since the detection result of the movement of the workpiece W is output, the user can easily recognize that the workpiece W has moved. As a result, the user can easily measure the workpiece W again and obtain a measurement result with less error, and a decrease in measurement accuracy is suppressed. Moreover, since the work of fixing the workpiece W to the jig and the work of removing it are not necessary, usability is improved.

  The edge extraction processing unit 353, the contact position specifying unit 357, and the like are an example of an extraction unit that extracts features of the workpiece W included in each of the first image Im1 and the second image Im2. The movement detection unit 4101 detects that the workpiece W has moved by comparing the feature position extracted from the first image Im1 and the feature position extracted from the second image Im2. By paying attention to the feature of the workpiece W in this way, the movement of the workpiece W can be detected by image processing.

As illustrated in FIG. 35 and the like, the movement detection unit 4101 determines whether the distance between the feature position extracted from the first image Im1 and the feature position extracted from the second image Im2 is equal to or greater than a threshold value. It may be detected that the workpiece W has moved on the mounting surface.
The feature may be, for example, an intersection 3505 of the first edge and the second edge extracted from the image of the workpiece W.

  As illustrated in FIG. 36 and the like, the first image Im1 is generated by the imaging unit 201 by bringing the contact unit 261 into contact with the second side surface of the workpiece W before measuring the position of the first side surface of the workpiece W. It may be an image. The second image Im2 may be an image generated by the imaging unit 201 by contacting the contact unit 261 and the second side surface after measuring the position of the first side surface. The movement detection unit 4101 may detect that the workpiece W has moved by comparing the position of the predetermined feature in the first image Im1 and the position of the predetermined feature in the second image Im2.

  As shown in FIG. 37 and the like, the movement detection unit 4101 compares the brightness of the predetermined area of the work W in the first image Im1 with the brightness of the predetermined area in the second image Im2, and indicates that the work W has moved. It may be detected. A part of the surface of the workpiece W may have a portion having a reflectance that is significantly different from the ambient reflectance. Therefore, by focusing attention on the luminance of this portion, it is possible to execute movement detection without using the contact portion 261.

  The measurement control unit 315 may measure the positions of a plurality of side surfaces of the workpiece W. In this case, the result output unit 4102 may execute a warning display for a measurement result that may include an error due to movement of the workpiece W among the measurement results of the positions of the plurality of side surfaces. This makes it easier for the user to know which measurement result includes an error.

  As illustrated in FIG. 46, the movement detection unit 4101 may detect that the workpiece W has moved each time the measurement unit measures each of the positions of the plurality of side surfaces of the workpiece W. Thereby, the movement of the workpiece W can be accurately detected. For the workpiece W that is difficult to move, it is sufficient that one movement detection is executed for one workpiece W as shown in FIG. That is, the first image Im1 is an image generated before the measurement unit measures the position of the first side surface among the plurality of side surfaces, and the second image Im2 is the last side surface among the plurality of side surfaces. It is the image produced | generated after measuring the position of. In addition, as shown in FIG. 45, one movement detection may be performed for one probe measurement. In this case, the first image Im1 is an image generated before measuring the position of the side surface specified in advance among the plurality of side surfaces, and the second image Im2 is the position of the side surface specified in advance. It is an image generated later. Further, movement detection may be executed only for a specified probe measurement among a plurality of probe measurements. Further, movement detection may be executed only for a designated contact point among a plurality of contact points.

DESCRIPTION OF SYMBOLS 1 Image measuring apparatus, 201,206 Imaging part, 21 Display part, 23 Stage, 24 Horizontal drive part, 26 Probe, 261 Contact part, 31 Control apparatus, 311 Input reception part, 315 Measurement control part, 33 Storage apparatus, 4101 Movement Detection unit, 4102 Result output unit

Claims (10)

A stage on which the workpiece is placed;
An imaging unit that images the workpiece placed on the stage and generates an image;
In the field of view of the imaging unit, a probe having a contact part that can come into contact with the side surface of the workpiece placed on the stage;
A drive unit that moves at least one of the stage and the probe substantially parallel to the mounting surface of the stage;
An image measuring apparatus comprising: a measuring unit that measures a position of the side surface of the workpiece using an image generated by the imaging unit when the contact unit and the side surface of the workpiece are in contact with each other;
In order to measure the position of the side surface of the workpiece and the first image of the workpiece generated by the imaging unit before the contact portion and the side surface of the workpiece contact to measure the position of the side surface of the workpiece The contact portion and the side surface of the work are brought into contact with each other by using the second image of the workpiece generated by the imaging unit after the contact portion and the side surface of the workpiece are in contact with each other. A movement detector for detecting that the workpiece has moved on the surface;
An image measurement apparatus further comprising: an output unit that outputs a detection result of the movement detection unit. An extractor for extracting features of the workpiece included in each of the first image and the second image;
The movement detection unit detects that the workpiece has moved by comparing the position of the feature extracted from the first image with the position of the feature extracted from the second image. The image measuring device according to claim 1.   The movement detector is configured to determine whether the distance between the feature position extracted from the first image and the feature position extracted from the second image is greater than or equal to a threshold value on the stage mounting surface. The image measuring apparatus according to claim 2, wherein the movement of the workpiece is detected.   The image measuring apparatus according to claim 2, wherein the feature is an intersection of a first edge and a second edge extracted from the image of the workpiece. The first image is an image generated by the imaging unit by contacting the second side surface of the workpiece with the contact unit before measuring the position of the first side surface of the workpiece,
The second image is an image generated by the imaging unit by contacting the contact portion and the second side surface after measuring the position of the first side surface,
The movement detection unit detects that the workpiece has moved by comparing a position of a predetermined feature in the first image with a position of the predetermined feature in the second image. 2. The image measuring device according to 1.   The said movement detection part detects that the said workpiece | work moved by comparing the brightness | luminance of the predetermined area | region of the said workpiece | work in said 1st image, and the brightness | luminance of the said predetermined area | region in said 2nd image. Item 2. The image measuring device according to Item 1. The measuring unit measures positions of a plurality of side surfaces of the workpiece;
The said output part performs a warning display about the measurement result which may contain an error because the said workpiece | work moved among the measurement results of the position of these side surfaces, The Claim 1 thru | or 6 characterized by the above-mentioned. The image measuring device described in 1.   The image measurement apparatus according to claim 7, wherein the movement detection unit detects that the workpiece has moved each time the measurement unit measures each of the positions of a plurality of side surfaces of the workpiece. The first image is an image generated before the measurement unit measures the position of the first side surface among the plurality of side surfaces,
The image measurement apparatus according to claim 7, wherein the second image is an image generated after the measurement unit measures a position of a last side surface among the plurality of side surfaces. The first image is an image generated before measuring a position of a predetermined side surface among the plurality of side surfaces,
The image measurement apparatus according to claim 7, wherein the second image is an image generated after measuring a position of the side surface designated in advance.